Tactile sensing system

Abstract

In this tactile sensing system, a sensor unit of the tactile sensor is mounted on the grip of a robot and outputs multiple signals corresponding to multiple first electrodes positioned opposite a second electrode. Based on all or part of the multiple signals, an output unit calculates pressure values at multiple pressure detection locations within the contact surface of the sensor unit with the workpiece and outputs pressure distribution data. Furthermore, based on all or part of the multiple signals, the output unit calculates a single aggregate shear force value for the entire contact surface and outputs the aggregate shear force value data.

Description

Technical Field

[0001] The technology disclosed in this application relates to a tactile sensing system. Background Art

[0002] As a tactile sensing system including a tactile sensor that comes into contact with an object, for example, the following technology is known.

[0003] Specifically, Patent Document 1 discloses a touch panel device including: a tactile sensor capable of outputting signals corresponding to pressure distribution and shear force distribution of a contact surface with an object; and a microcontroller to which the signals output from the tactile sensor are input.

[0004] Patent Document 2 discloses a tactile detection technology including: a tactile sensor capable of outputting signals corresponding to pressure distribution and shear force distribution of a contact surface with an object; and an external power supply connected to the tactile sensor.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent No. 6280579

[0008] Patent Document 2: Japanese Patent Application Laid-Open No. 6488414 Summary of the Invention

[0009] Problems to be solved by the invention

[0010] Patent Document 1 does not describe specific uses of the pressure distribution and shear force distribution detected by the tactile sensor.

[0011] Patent Document 2 describes that the tactile detection technology can be applied to a personal convenience robot that can assist human life, but does not describe a robot having a pair of gripping parts for gripping a workpiece.

[0012] In order to accurately control a robot having a pair of gripping parts for gripping a workpiece, it is necessary to efficiently provide a controller for controlling the robot with tactile information that is useful for controlling the robot.

[0013] One aspect of the technology disclosed in the present application aims to provide a tactile sensing system that can efficiently provide a controller that controls a robot having a pair of grips with tactile information that is useful for controlling the robot.

[0014] Means for solving problems

[0015] In order to achieve the above-mentioned purpose, according to one viewpoint of the technology disclosed in the present application, a tactile sensing system is provided, which comprises: a pair of tactile sensors, wherein the pair of tactile sensors are respectively arranged on the opposing surfaces of a pair of gripping parts provided by the robot, and are in contact with the workpiece gripped by the pair of gripping parts; and an output part, which is electrically connected to the pair of tactile sensors, each of the tactile sensors comprises a sensor part of an electrostatic capacitance type, wherein the sensor part of the electrostatic capacitance type has a contact surface with the workpiece, and has a stacked structure in which an elastic layer and a first electrode layer and a second electrode layer located on both sides of the elastic layer are stacked in a normal direction of the contact surface, wherein the first electrode layer has a plurality of first electrodes. The second electrode layer has one or more second electrodes, and two or more of the multiple first electrodes are locally overlapping electrodes that locally overlap with the second electrode when observed in the normal direction. The sensor unit outputs multiple signals corresponding to the multiple first electrodes respectively, and the output unit calculates the pressure values of each of the multiple pressure detection positions within the contact surface based on all or part of the multiple signals, and calculates a summary shear force value for the entire contact surface based on all or part of the multiple local overlapping electrode signals corresponding to the multiple locally overlapping electrodes in the multiple signals, and outputs data of the summary shear force value and data representing the pressure distribution of the pressure values of each of the multiple pressure detection positions.

[0016] Effects of the Invention

[0017] According to one aspect of the technology disclosed in this application, a tactile sensing system can efficiently provide a controller that controls a robot having a pair of grips with tactile information that is useful for controlling the robot. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a perspective view showing an example of a robot system.

[0019] Figure 2 It shows Figure 1 A stereoscopic view of an example of a pair of tactile sensors.

[0020] Figure 3 It is a longitudinal sectional view of the touch sensor according to the first embodiment.

[0021] Figure 4 yes Figure 3 A top view of the substrate.

[0022] Figure 5 yes Figure 3 A top view of the second electrode layer.

[0023] Figure 6 It shows that Figure 3A top view of a state in which a plurality of second electrodes, an elastic layer, and a substrate are overlapped.

[0024] Figure 7 yes Figure 3 Bottom view of the substrate.

[0025] Figure 8 Yes Figure 3 FIG. 2 is a diagram illustrating an example of a method for manufacturing a tactile sensor.

[0026] Figure 9 Is to show the use of Figure 1 FIG1 is a diagram showing a first example of a state in which a pair of gripping parts grip a workpiece.

[0027] Figure 10 Is to show the use of Figure 1 FIG2 is a diagram showing a second example of a state in which a pair of gripping parts grip a workpiece.

[0028] Figure 11 It is to act on Figure 3 FIG. 1 is a diagram illustrating an example of shear force and moment on the contact surface of a tactile sensor.

[0029] Figure 12 Yes Figure 3 FIG. 1 is a diagram illustrating an example of the moment length of a tactile sensor.

[0030] Figure 13 Yes Figure 3 A top view illustrating an example of displacement Δx and displacement Δy in a tactile sensor.

[0031] Figure 14 Yes Figure 3 FIG. 1 is a diagram illustrating an example of displacement Δx and displacement Δz in a tactile sensor.

[0032] Figure 15 Yes Figure 3 FIG. 1 is a diagram illustrating an example of displacement Δy and displacement Δz in a tactile sensor.

[0033] Figure 16 It shows Figure 1 A block diagram of an example of the hardware structure of a tactile sensor, an output unit, and a controller.

[0034] Figure 17 Yes Figure 16 A diagram illustrating an example of multiple modes in the output unit.

[0035] Figure 18 It shows Figure 16 This is a flowchart of an example of the flow of pressure distribution data output processing in the output unit.

[0036] Figure 19 It shows Figure 16 Flowchart of an example of the flow of data output processing of the grip position in the output unit.

[0037] Figure 20 It shows Figure 16 Flowchart of an example of the flow of data output processing of the gripping force Fz value in the output unit.

[0038] Figure 21 It shows Figure 16 Flowchart of an example of the flow of data output processing of the aggregated shear force Fx value in the output unit.

[0039] Figure 22 It shows Figure 16 Flowchart of an example of the flow of data output processing of the aggregated shear force Fy value in the output unit.

[0040] Figure 23 It shows Figure 16 Flowchart of an example of the flow of data output processing of the moment Mx value in the output unit.

[0041] Figure 24 It shows Figure 16 Flowchart of an example of the flow of data output processing of the moment My value in the output unit.

[0042] Figure 25 It shows Figure 16 Flowchart of an example of the flow of data output processing of the moment Mz value in the output unit.

[0043] Figure 26 It is to act on Figure 1 FIG. 2 is a plan view illustrating an example of a translational force ΔFx in the X-axis direction of a workpiece grasped by a pair of grasping portions.

[0044] Figure 27 It shows Figure 16 Flowchart of an example of a flow of data output processing of the translational force ΔFx value in the output unit.

[0045] Figure 28 It is to act on Figure 1 FIG. 2 is a plan view illustrating an example of a translational force ΔFy in the Y-axis direction of a workpiece grasped by a pair of grasping portions.

[0046] Figure 29 It shows Figure 16 Flowchart of an example of a flow of data output processing of the translational force ΔFy value in the output unit.

[0047] Figure 30 It shows Figure 16 Flowchart of an example of the flow of data output processing of the rotational moment MRx value in the output unit.

[0048] Figure 31 It shows Figure 16 Flowchart of an example of the flow of data output processing of the rotational moment MRy value in the output unit.

[0049] Figure 32 It is a longitudinal sectional view of the touch sensor according to the second embodiment.

[0050] Figure 33 yes Figure 32 A top view of the second electrode layer.

[0051] Figure 34 It shows that Figure 32 A top view of a state in which the second electrode, the elastic layer, and the substrate overlap.

[0052] Figure 35 Yes Figure 32 FIG. 1 is a diagram illustrating an example of the moment length of a tactile sensor.

[0053] Figure 36 It is a longitudinal sectional view of a touch sensor according to a third embodiment.

[0054] Figure 37 yes Figure 36 A top view of the second electrode layer.

[0055] Figure 38 It shows that Figure 36 A top view of a state in which the second electrode, the elastic layer, and the substrate overlap.

[0056] Figure 39 Yes Figure 36 FIG. 1 is a diagram illustrating an example of the moment length of a tactile sensor.

[0057] Figure 40 It is a longitudinal sectional view of a touch sensor according to a fourth embodiment.

[0058] Figure 41 yes Figure 40 A top view of the second electrode layer.

[0059] Figure 42 It shows that Figure 40 A top view of a state in which the second electrode, the elastic layer, and the substrate overlap. DETAILED DESCRIPTION

[0060] Hereinafter, one embodiment of the technology disclosed in the present application will be described in detail with reference to the accompanying drawings.

[0061] (An example of the robot system 100)

[0062] First, an overview of an example of the robot system 100 will be described.

[0063] Figure 1 1 is a perspective view showing an example of a robot system 100. Robot system 100 includes a robot 102 and a controller 104. Robot 102 is, for example, a multi-jointed robot and includes a robot arm 106 and a robot hand 108. Robot arm 106 includes a plurality of joints 110. Robot hand 108 is provided at the distal end of robot arm 106. Robot hand 108 is connected to the distal end of robot arm 106 via a wrist joint 112.

[0064] The robot hand 108 is provided with a pair of gripping parts 114. The pair of gripping parts 114 are arranged to face each other. The pair of gripping parts 114 are driven by a driving unit (not shown) to move toward and away from each other in opposing directions. When a workpiece W is positioned between the pair of gripping parts 114 and the pair of gripping parts 114 move toward each other, the workpiece W is gripped by the pair of gripping parts 114.

[0065] The controller 104 controls the robot 102 and is electrically connected to the robot 102. Figure 1 In the embodiment, the controller 104 is connected to the robot 102 via a wired connection as an example, but the controller 104 may be connected to the robot 102 wirelessly.

[0066] (An example of the tactile sensing system 1)

[0067] Next, an outline of an example of the tactile sensor system 1 will be described.

[0068] The robot system 100 is equipped with a tactile sensing system 1. The tactile sensing system 1 includes a pair of tactile sensors 10 and an output unit 12. The pair of tactile sensors 10 are respectively provided on the opposing surfaces 114A of the pair of gripping parts 114. The pair of tactile sensors 10 are provided at positions where they come into contact with the workpiece W when the pair of gripping parts 114 grip the workpiece W, that is, as an example, at the mutually opposing portions of the distal ends of the pair of gripping parts 114.

[0069] The output unit 12 is electrically connected to the pair of tactile sensors 10. The output unit 12 can be connected to the pair of tactile sensors 10 via a wired connection or wirelessly. As described in detail below, the output unit 12 has the function of performing various processes based on data output from the pair of tactile sensors 10 and outputting data based on the results of the processes to the controller 104. As an example, the output unit 12 is provided at the wrist joint 112.

[0070] Figure 2 Yes Figure 1A perspective view of an example of a pair of tactile sensors 10. As an example, the pair of tactile sensors 10 are symmetrical in mutually opposing directions. The X-axis direction corresponds to a first direction perpendicular to the opposing direction of the pair of tactile sensors 10, the Y-axis direction corresponds to a second direction perpendicular to the opposing direction of the pair of tactile sensors 10, and the Z-axis direction corresponds to the opposing direction of the pair of tactile sensors 10. The X-axis direction is perpendicular to the Y-axis direction. As an example, the X-axis direction corresponds to the longitudinal direction of the tactile sensor 10, and the Y-axis direction corresponds to the lateral direction of the tactile sensor 10.

[0071] The touch sensor 10 includes a support plate 14, a substrate 16, and a sensor portion 18. The support plate 14 and the grip portion 114 (see Figure 1 ) is separately configured and fixed to the gripping portion 114. The support plate 14 may also be integrally configured with the gripping portion 114. The substrate 16 is fixed to the support plate 14, and the sensor portion 18 is provided on the substrate 16. The details of the sensor portion 18 will be described in detail later.

[0072] Next, first to fourth embodiments of the touch sensor system 1 will be described.

[0073] [First embodiment]

[0074] First, the first embodiment will be described.

[0075] (Structure of the Touch Sensor 10)

[0076] Figure 3 1 is a longitudinal sectional view of the touch sensor 10 according to the first embodiment. The touch sensor 10 according to the first embodiment includes a sensor portion 18 and a substrate 16 .

[0077] The sensor unit 18 employs an electrostatic capacitance method. More specifically, it employs a self-capacitive method and has a multilayer structure comprising multiple layers. Specifically, the sensor unit 18 comprises an insulating layer 20, an elastic layer 22, a first electrode layer 24, and a second electrode layer 26. The first electrode layer 24 and the second electrode layer 26 are located on either side of the elastic layer 22.

[0078] The insulating layer 20 is located on the side opposite to the elastic layer 22 with respect to the second electrode layer 26. The insulating layer 20 forms the surface layer of the sensor portion 18. The surface of the insulating layer 20 is formed to be aligned with the workpiece W (see Figure 1 ) contact surface 28. Furthermore, the insulating layer 20 may be omitted. When the insulating layer 20 is omitted, the second electrode layer 26 and the surface of the surface layer formed on the second electrode layer 26 serve as the contact surface 28.

[0079] The elastic layer 22 is a dielectric. It has both flexibility and elasticity. It is formed, for example, from a gel. The insulating layer 20, elastic layer 22, first electrode layer 24, and second electrode layer 26 are stacked in the Z-axis direction. The Z-axis direction corresponds to the normal direction of the contact surface 28. The insulating layer 20, elastic layer 22, first electrode layer 24, and second electrode layer 26 are bonded to each other, for example, using an adhesive. To enhance the overall bonding strength of the sensor portion 18, the insulating layer 20 is preferably large enough to cover the entire surface of the second electrode layer 26.

[0080] The first electrode layer 24 includes a plurality of first electrodes 34. The plurality of first electrodes 34 are formed on the first surface 16A of the substrate 16, which faces the sensor portion 18. A plurality of capacitance detection ICs (integrated circuits) 44 are mounted on the second surface 16B of the substrate 16, which faces away from the sensor portion 18. The plurality of first electrodes 34 and the plurality of capacitance detection ICs 44 are connected via through-holes 46 extending along the thickness of the substrate 16.

[0081] Figure 4 yes Figure 3 The first electrodes 34 formed on the first surface 16A of the substrate 16 are arranged in a matrix along the XY plane. That is, the first electrodes 34 are arranged with the X-axis direction as the longitudinal direction and the Y-axis direction as the transverse direction. The XY plane is the plane that corresponds to the contact surface 28 (see FIG. Figure 2 ) parallel surfaces.

[0082] The plurality of first electrodes 34 are independent of one another. The plurality of first electrodes 34 have the same shape. As an example, the plurality of first electrodes 34 are formed into a square when viewed from above. Viewing from above is equivalent to viewing in the Z-axis direction. As an example, the plurality of first electrodes 34 are arranged in the X-axis direction, with six electrodes arranged in the Y-axis direction, with six electrodes arranged in the Y-axis direction. That is, the number of the plurality of first electrodes 34 is 36. The plurality of first electrodes 34 are arranged at equal intervals in the X-axis direction and the Y-axis direction.

[0083] Figure 5 yes Figure 3 FIG2 is a top view of the second electrode layer 26. The second electrode layer 26 is composed of a plurality of second electrodes 36 as a single layer. The plurality of second electrodes 36 are formed, for example, from a conductive rubber. Each of the plurality of second electrodes 36 is formed in a flat plate shape. The plurality of second electrodes 36 can be connected to the ground of the substrate 16 or float relative to the ground.

[0084] The plurality of second electrodes 36 form a plurality of mutually independent island portions. The plurality of second electrodes 36 are arranged in a matrix along the XY plane. That is, the plurality of second electrodes 36 are arranged with the X-axis direction as the longitudinal direction and the Y-axis direction as the transverse direction.

[0085] The plurality of second electrodes 36 are of the same shape. As an example, the plurality of second electrodes 36 are each formed in a square shape when viewed from above. The number of the plurality of second electrodes 36 is greater than the number of the plurality of first electrodes 34 (see FIG. Figure 4 ) is small. As an example, the plurality of second electrodes 36 are arranged three in the X-axis direction and three in the Y-axis direction. That is, the number of the plurality of second electrodes 36 is nine. The plurality of second electrodes 36 are arranged at equal intervals in the X-axis direction and the Y-axis direction.

[0086] Figure 6 It means Figure 3 FIG1 is a top view of a state in which the plurality of second electrodes 36, the elastic layer 22, and the substrate 16 overlap. The plurality of second electrodes 36 are arranged so as to overlap all of the plurality of first electrodes 34 when viewed from above. The plurality of second electrodes 36 are formed so as to partially overlap four of the plurality of first electrodes 34 that are adjacent in the X-axis direction and the Y-axis direction when viewed from above. Each second electrode 36 is located at the center of the four first electrodes 34 when viewed from above, partially overlapping these four first electrodes 34.

[0087] Thus, in the first embodiment, all of the plurality of first electrodes 34 partially overlap with the plurality of second electrodes 36. In this first embodiment, all of the plurality of first electrodes 34 correspond to an example of "a plurality of partially overlapping electrodes that partially overlap with the plurality of second electrodes," and the plurality of signals output from the plurality of first electrodes 34 correspond to an example of "a plurality of partially overlapping electrode signals."

[0088] The electrostatic capacitance C [F] between the first electrode 34 and the second electrode 36 is obtained by the following formula.

[0089] C=ε×A / d

[0090] ε is the dielectric constant of the elastic layer 22 [Fm -1 ], A is the overlapping area of the first electrode 34 and the second electrode 36 when viewed from above [m 2 ], d is the distance [m] between the first electrode 34 and the second electrode 36 along the Z-axis direction.

[0091] In this sensor portion 18, when pressure is applied to the contact surface 28, the distance d between each first electrode 34 and the second electrode 36 changes, and the capacitance C changes in accordance with the change in distance d. Furthermore, in the sensor portion 18, when shear force is applied to the contact surface 28, the overlapping area A between each first electrode 34 and the second electrode 36 changes, and the capacitance C changes in accordance with the change in area A.

[0092] The pressure applied to the contact surface 28 corresponds to a force applied to the contact surface 28 along the Z-axis direction, which will be described in detail later. Furthermore, the shear force applied to the contact surface 28 corresponds to a force applied to the contact surface 28 along a direction perpendicular to the Z-axis direction. Directions perpendicular to the Z-axis direction include the X-axis direction, the Y-axis direction, and a combination of the X-axis and Y-axis directions.

[0093] The plurality of first electrodes 34 are connected to the capacitance detection IC 44 described later (see Figure 3 、 Figure 7 ) is driven to output signals corresponding to the electrostatic capacitance C between the second electrodes 36. That is, the sensor unit 18 outputs a plurality of signals corresponding to the plurality of first electrodes 34. These plurality of signals are analog signals.

[0094] Figure 7 yes Figure 3 A bottom view of the substrate 16 is shown. Multiple capacitance detection ICs 44 are arranged in a matrix along the XY plane. Specifically, the capacitance detection ICs 44 are arranged with the X-axis direction as the longitudinal direction and the Y-axis direction as the transverse direction. The capacitance detection ICs 44 have the same structure. As an example, three capacitance detection ICs 44 are arranged in the X-axis direction and three in the Y-axis direction. This means that the total number of capacitance detection ICs 44 is nine.

[0095] Four first electrodes 34 that overlap the capacitance detection IC in a plan view are connected to each capacitance detection IC 44. Each capacitance detection IC 44 is configured to drive the four first electrodes 34 and output data corresponding to signals output from the four first electrodes 34.

[0096] (Method of Manufacturing Tactile Sensor 10)

[0097] Figure 8 It is an explanation Figure 3 FIG. 1 shows an example of a method for manufacturing the touch sensor 10. The touch sensor 10 is manufactured, for example, by the following method. Specifically, multiple capacitance detection ICs 44 are mounted on the second surface 16B of the substrate 16, on which multiple first electrodes 34 are patterned on the first surface 16A. Multiple through-holes 46 are formed in the substrate 16, and the multiple capacitance detection ICs 44 are connected to the multiple first electrodes 34 via the multiple through-holes 46.

[0098] Next, the elastic layer 22 is stacked on the first electrode layer 24 having the plurality of first electrodes 34. Furthermore, the elastic layer 22 is stacked on the elastic layer 22 having the plurality of second electrodes 36 (see Figure 5) is formed, and further, the insulating layer 20 is stacked on the second electrode layer 26. The insulating layer 20, elastic layer 22, first electrode layer 24, and second electrode layer 26 are bonded to each other using, for example, an adhesive. The touch sensor 10 is manufactured using the above method.

[0099] (Pressure distribution)

[0100] Figure 9 Is to show the use of Figure 1 FIG1 shows a first example of a pair of gripping portions 114 gripping a workpiece W. For example, the workpiece W is a cylinder or a sphere. When the pair of gripping portions 114 grip the cylindrical or spherical workpiece W, there are locations within the contact surface 28 where the pressure is high due to contact with the workpiece W, and locations where the pressure is not applied due to contact with the workpiece W. In other words, the pressure distribution on the contact surface 28 is uneven.

[0101] Figure 10 Is to show the use of Figure 1 FIG2 shows a second example of a pair of gripping portions 114 gripping a workpiece W. For example, the workpiece W is a quadrangular prism or a rectangular parallelepiped. The surface of the workpiece W is larger than the contact surface 28. When the pair of gripping portions 114 grip such a quadrangular prism or rectangular parallelepiped workpiece W, pressure is applied evenly to the contact surface 28. In other words, the pressure distribution on the contact surface 28 is uniform.

[0102] (Holding force Fz and vertical load Fz')

[0103] like Figure 9 、 Figure 10 As shown, when the workpiece W is gripped by the pair of gripping parts 114, a vertical load Fz' acts on the contact surface 28 in the opposite direction to the gripping force Fz of the pair of gripping parts 114 as a reaction force to the gripping force Fz. The gripping force Fz and the vertical load Fz' are forces along the Z-axis direction.

[0104] (Shear forces Fx, Fy and moments Mx, My, Mz)

[0105] Figure 11 It is to act on Figure 3 The following diagram illustrates an example of shear forces Fx and Fy and moments Mx, My, and Mz on the contact surface 28 of the touch sensor 10. As a force acts on a workpiece (not shown), shear forces Fx and Fy and moments Mx, My, and Mz may act on the contact surface 28 of the touch sensor 10. The shear force Fx is a force along the X-axis, and the shear force Fy is a force along the Y-axis. Furthermore, the moment Mx is a moment about the X-axis, the moment My is a moment about the Y-axis, and the moment Mz is a moment about the Z-axis.

[0106] Figure 12 Yes Figure 3FIG. 1 is a diagram illustrating an example of moment lengths dx and dy in the tactile sensor 10. Figure 12 , identification numbers 1 to 9 are shown for the plurality of second electrodes 36. When the plurality of second electrodes 36 are identified, the plurality of second electrodes 36 are referred to as second electrodes 36-1 to 9, respectively.

[0107] Figure 12 The moment length dx shown is used to calculate the moment Mx around the X-axis (see Figure 11 As an example, the moment length dx corresponds to the distance along the Y-axis direction between the center of the second electrode 36-3 located away from the center of the contact surface 28 in the Y-axis direction and the center of the contact surface 28.

[0108] Figure 12 The moment length dy shown is used to calculate the moment My around the Y axis (refer to Figure 11 As an example, the moment length dy corresponds to the distance along the X-axis direction between the center of the second electrode 36-1 located away from the center of the contact surface 28 in the X-axis direction and the center of the contact surface 28.

[0109] (Explanation of displacements Δx, Δy, and Δz)

[0110] Figure 13 It is an explanation Figure 3 FIG. 1 is a top view of an example of the displacement Δx and the displacement Δy in the touch sensor 10. Figure 13 The electrostatic capacitance C between each of the plurality of first electrodes 34 and the second electrode 36 is 00 ~C 55 The plurality of first electrodes 34 are shown corresponding to each other.

[0111] Figure 14 It is an explanation Figure 3 FIG. 1 is a diagram showing an example of displacement Δx and displacement Δz in the tactile sensor 10. Figure 14 , the cases of (A) no vertical load Fz', (B) vertical load Fz', (C) shear force Fx, and (D) vertical load Fz'+shear force Fx are shown respectively.

[0112] Figure 15 It is an explanation Figure 3 FIG. 1 is a diagram showing an example of displacement Δy and displacement Δz in the tactile sensor 10. Figure 15 , the cases of (A) no vertical load Fz', (B) vertical load Fz', (C) shear force Fy, and (D) vertical load Fz' + shear force Fy are shown respectively.

[0113] like Figure 13 、 Figure 14As shown in FIG, the displacement Δx corresponds to the distance that the second electrode 36 moves along the X-axis direction due to the action of the shear force Fx. Figure 13 、 Figure 15 As shown, the displacement Δy corresponds to the distance that the second electrode 36 moves along the Y-axis direction due to the action of the shear force Fy.

[0114] like Figure 14 、 Figure 15 As shown, the distance Z0 corresponds to the distance along the Z-axis direction between the first electrode 34 and the second electrode 36 when no vertical load Fz' is applied. The displacement Δz corresponds to the distance that the second electrode 36 moves toward the first electrode 34 along the Z-axis direction due to the application of the vertical load Fz'.

[0115] Hereinafter, an example of calculating the displacements Δx, Δy, and Δz will be described by taking an adjacent first electrode 34 partially overlapping one second electrode 36 as an example.

[0116] (When no vertical load Fz′ is applied: Δx, Δy, Δz = 0)

[0117] like Figure 14 (A) Figure 15 As shown in (A), when the vertical load Fz′ is not applied, Δx, Δy, and Δz=0, and Expression 1 holds true for the adjacent first electrode 34 partially overlapping the second electrode 36 .

[0118] [Formula 1]

[0119] C 00_0 =K1 / Z0

[0120] C 01_0 =K2 / Z0

[0121] C 00_0 、C 01_0 is the electrostatic capacitance between the adjacent first electrode 34 and second electrode 36 when no vertical load Fz′ is applied, and K1 and K2 are constants.

[0122] The same equation as Equation 1 also holds true for the electrostatic capacitance between other adjacent first electrodes 34 and second electrodes 36 .

[0123] (When only vertical load Fz' acts: Δx, Δy = 0, Δz ≠ 0)

[0124] like Figure 14 (B) Figure 15 As shown in (B), when only the vertical load Fz′ acts, Δx, Δy=0, Δz≠0, and Expression 2 holds true for the adjacent first electrode 34 partially overlapping the second electrode 36 .

[0125] [Formula 2]

[0126] C 00_z =K1 / (Z0-Δz)

[0127] C 01_z =K2 / (Z0-Δz)

[0128] C 00_z 、C 01_z It is the electrostatic capacitance between the adjacent first electrode 34 and second electrode 36 when only the vertical load Fz′ acts.

[0129] According to formula 2, the following is obtained.

[0130] C 00_z / K1=1(Z0-Δz)

[0131] Z0-Δz=K1 / C 00_z

[0132] Δz=Z0-K1 / C 00_z

[0133] Based on Formula 1, the displacement Δz of the second electrode 36 relative to one of the first electrodes 34 is calculated as follows.

[0134] Z0=K1 / C 00_0

[0135] ∴Δz=K1(1 / C 00_0 -1 / C 00_z )

[0136] Similarly, the displacement Δz of the second electrode 36 relative to the other first electrode 34 is determined as follows.

[0137] Δz=K2(1 / C 01_0 -1 / C 01_z )

[0138] The displacement Δz of the second electrode 36 relative to the other first electrodes 34 is also determined in the same manner as described above.

[0139] (When only shear force Fx acts: Δy, Δz = 0, Δx ≠ 0)

[0140] like Figure 14 As shown in (C), when only the shear force Fx acts, Δy, Δz=0, Δx≠0, and Expression 3 holds true for the adjacent first electrode 34 partially overlapping the second electrode 36 .

[0141] [Formula 3]

[0142] C 00_x =K1 / Z0+Δx·Kp / Z0

[0143] C 01_x =K2 / Z0-Δx·Kp / Z0

[0144] C 00_x 、C 01_x It is the electrostatic capacitance between the first electrode 34 and the second electrode 36 adjacent to each other in the x direction when only the shear force Fx acts, and Kp is a constant.

[0145] According to formula 3, the following is obtained.

[0146] Δ×·Kp / Z0=C 00_x -K1 / Z0

[0147] Δx·Kp=Z0·C 00_x K1

[0148] Δx=(Z0·C 00_x -K1) / Kp

[0149] According to formula 1, since K1=Z0×C 00_0 Therefore, the displacement Δx of the second electrode 36 relative to one of the first electrodes 34 is calculated as follows.

[0150] Δx=(Z0·C 00_x -Z0×C 00_0 ) / Kp

[0151] Δx=Z0 / Kp×(C 00_x -C 00_0 )

[0152] Similarly, the displacement Δx of the second electrode 36 relative to the other first electrode 34 is determined as follows.

[0153] Δx=Z0 / Kp×(C 01_0 -C 01_x )

[0154] The displacement Δx of the second electrode 36 relative to the other first electrodes 34 is also determined in the same manner as described above.

[0155] (When only shear force Fy acts: Δx, Δz = 0, Δy ≠ 0)

[0156] like Figure 15 As shown in FIG. 5(C), when only the shear force Fy acts, the displacement Δy of the second electrode 36 relative to the first electrode 34 is obtained by the same calculation as when only the shear force Fx acts.

[0157] (When only vertical load Fz' and shear force Fx act: Δy=0, Δx, Δz≠0)

[0158] like Figure 14As shown in (D), when only the vertical load Fz′ and the shear force Fx act, Δy=0, Δx, Δz≠0, and Equation 4 holds true for the first electrode 34 adjacent in the x direction that partially overlaps the second electrode 36 .

[0159] [Formula 4]

[0160] C 00_zx =K1 / (Z0-Δz)+Δx·Kp / (Z0-Δz)

[0161] C 01_zx =K2 / (Z0-Δz)-Δx·Kp / (Z0-Δz)

[0162] C 00_zx 、C 01_zx It is the electrostatic capacitance between the first electrode 34 and the second electrode 36 when only the vertical load Fz′ and the shear force Fx act.

[0163] Based on Equation 4, the displacements Δz and Δx of the second electrode 36 relative to the first electrode 34 are calculated as follows.

[0164] Δz=(K1+K2){1 / (C 00_0 +C 01_0 )-1 / (C 00_zx +C 01_zx )}

[0165] Δx=(K1+K2) / 2Kp·(C 00_zx -C 01_zx ) / (C 00_zx +C 01_zx )

[0166] The displacements Δz and Δx of the second electrode 36 relative to the other first electrodes 34 are also determined in the same manner as described above.

[0167] (When only vertical load Fz' and shear force Fy act: Δx=0, Δy, Δz≠0)

[0168] like Figure 15 As shown in (D), when only the vertical load Fz' and the shear force Fy act, the displacements Δz and Δy of the second electrode 36 relative to the adjacent first electrode 34 are calculated by the same calculation as when only the vertical load Fz' and the shear force Fx act.

[0169] (When vertical load Fz' and shear forces Fx and Fy act: Δx, Δy, Δz ≠ 0)

[0170] When a vertical load Fz' and shear forces Fx and Fy act, the displacements Δx, Δy, and Δz of the second electrode 36 relative to the first electrode 34 can be calculated as follows. Within the range of four first electrodes 34 partially overlapping one second electrode 36, the values of the displacements Δz in each first electrode 34 are often similar to each other, so it is assumed that the values of the displacements Δz are the same. In this case, the magnitude (electrostatic capacitance value) of the signal corresponding to each first electrode 34 is proportional to the overlapping area of each first electrode 34 with the second electrode 36. Therefore, the electrostatic capacitance value C 00 、C 01 、C 10 、C 11 The ratio of the overlap area S 00 、S 01 、S 10 、S 11 The ratio of is equal. That is, Equation 5 holds.

[0171] [Formula 5]

[0172] C 00 :C 01 :C 10 :C 11 =S 00 :S 01 :S 10 :S 11

[0173] If the square root of the overlap area in the no-load state is a, then the overlap area S 00 、S 01 、S 10 、S 11 It is expressed by formula 6.

[0174] [Formula 6]

[0175] S 00 =(a-Δx)×(a-Δy), S 01 =(a-Δx)×(a+Δy), S 10 =(a+Δx)×(a-Δy), S 11 =(a+Δx)×(a+Δy)

[0176] According to formula 6, the sum of the four overlapping areas is 4a 2 , is a constant. Therefore, according to the sum of the four overlapping areas 4a 2 And Equation 5, overlapping area S 00 、S 01 、S 10 、S 11 From the above, the unknown displacements Δx and Δy can be calculated by the simultaneous equations of Formula 6.

[0177] Alternatively, after calculating the displacements Δx and Δy, these displacements can be treated as known values, and the displacement Δz, which is assumed to be the same value, can be corrected to the displacement Δz of each first electrode 34. For example, in an environment where the true values of the four displacements Δz can be measured by other means, the correlation between the displacements Δx and Δy and the four displacements Δz can be obtained in advance, and this correction can be performed using this correlation. This correlation can also be obtained through machine learning.

[0178] If it is known that the four electrostatic capacitance values corresponding to each first electrode 34 are substantially equal, that is, the displacement Δx and the displacement Δy are close to zero, the displacement Δz of each of the four first electrodes 34 can be calculated individually using the method described above for the case where Δx, Δy = 0 and Δz ≠ 0. The case where Δx, Δy = 0 and Δz ≠ 0 refers to, for example, a situation where a workpiece W is held on a table and its weight is not applied to the contact surface 28. If the workpiece W is lifted from the table in this state, the displacement Δz hardly changes, while the displacements Δx and Δy change primarily. Therefore, the displacements Δx and Δy can be more accurately calculated using the displacement Δz as a known value.

[0179] In this specification, "calculating pressure values at each of the plurality of pressure detection locations" includes, assuming that the displacement Δz at the plurality of pressure detection locations, such as the four first electrodes 34, is the same, and processing the pressure values based on the calculated identical displacement Δz as the pressure values at each pressure detection location. Furthermore, "calculating a summary pressure value by calculating a representative value for the pressure values at each of the plurality of pressure detection locations" includes, assuming that the displacement Δz at the plurality of pressure detection locations, such as the four first electrodes 34, is the same, and calculating the summary pressure value using the pressure values based on the calculated identical displacement Δz as the representative values.

[0180] As described above, the output unit 12 calculates the respective shear force Fx and Fy values based on the multiple signals corresponding to the multiple first electrodes 34 including at least one partially overlapping electrode as the first electrode 34 partially overlapping the second electrode 36, while eliminating the influence of pressure on the multiple signals.

[0181] (Hardware Structure of Tactile Sensor 10, Output Unit 12, and Controller 104)

[0182] Figure 16 It shows Figure 1FIG1 is a block diagram showing an example of the hardware configuration of the tactile sensor 10, the output unit 12, and the controller 104. The output unit 12 includes a first multiplexer 50, a second multiplexer 52, a CPU (Central Processing Unit) 54, a ROM (Read Only Memory) 56, and a RAM (Random Access Memory) 58.

[0183] The plurality of capacitance detection ICs 44 are connected to the first multiplexer 50 and the second multiplexer 52 . Data output from the plurality of capacitance detection ICs 44 is input to the first multiplexer 50 and the second multiplexer 52 .

[0184] The first multiplexer 50 and the second multiplexer 52 are connected to the CPU 54. Data output from the first multiplexer 50 and the second multiplexer 52 are input to the CPU 54. Data output from the controller 104 described later is also input to the CPU 54.

[0185] The CPU 54 uses the RAM 58 as a primary storage area to execute a program 60 stored in the ROM 56. As will be described later, the program 60 allows the CPU 54 to perform calculations based on data output from the touch sensor 10 and the controller 104, and also stores various procedures for outputting data to the controller 104.

[0186] The output unit 12 is connected to the controller 104 in a communicable manner by wire or wirelessly. The controller 104 includes a CPU 124, a ROM 126, and a RAM 128. Data output from the output unit 12 is input to the CPU 124.

[0187] The CPU 124 uses the RAM 128 as a primary storage area to execute the program 130 stored in the ROM 126. As will be described later, the program 130 contains various procedures for the output controller 104 to move the robot 102 or request data from the output unit 12.

[0188] (Multiple Modes in Output Unit 12)

[0189] Figure 17 Yes Figure 16 FIG. 1 is a diagram for explaining an example of a plurality of modes in the output unit 12. The output unit 12 includes a collision detection mode, an action content determination mode, and a request command response mode.

[0190] The collision detection mode is a mode in which, when a collision of a workpiece is detected based on data output from the tactile sensor 10, collision detection data is output to the controller 104. The collision of the workpiece refers to a case in which an unexpected object collides with the workpiece.

[0191] The collision detection data may, for example, selectively include, in addition to data indicating a collision has been detected, at least one of the gripping force (summed pressure) Fz value data, the summed shear force Fx value data, and the summed shear force Fy value data, described later. Regardless of whether there is an instruction from the controller 104, the output unit 12 outputs the collision detection data to the controller 104, and the controller 104 processes the collision detection data through interrupt processing.

[0192] In the process of detecting the collision of the workpiece, for example, the pressure values of each of the multiple pressure detection positions within the contact surface 28 are calculated as described later, and the collision of the workpiece is detected when at least a specified number of the pressure values of each of the multiple pressure detection positions exceed a threshold value, when the aggregated pressure value described later exceeds a threshold value, when the aggregated shear force Fx value described later exceeds a threshold value, or when the aggregated shear force Fy value described later exceeds a threshold value.

[0193] The motion content determination mode determines the motion content of the robot 102 based on data output from the controller 104, and selectively outputs at least one of the following data: pressure distribution data, gripping force Fz value data, aggregated shear force Fx value data, aggregated shear force Fy value data, moment Mx value data, moment My value data, and moment Mz value data, described later, based on the motion content. The output unit 12 determines which data to output based on the motion content of the robot 102.

[0194] The action content of the robot 102 is, for example, to use Figure 1 The robot hand 108 shown grasps the workpiece W, the robot arm 106 moves in a manner that moves the workpiece W while being grasped by the robot hand 108, the robot arm 106 moves in a manner that searches for a moving destination while bringing the workpiece W into contact with an object, the robot arm 106 moves in a manner that inserts the workpiece W into the moving destination, and the robot hand 108 releases the workpiece W, etc.

[0195] Figure 17 The request instruction response mode shown is a mode that selectively outputs at least any one of the pressure distribution data, gripping force Fz value data, gripping position data, summary shear force Fx value data, summary shear force Fy value data, moment Mx value data, moment My value data, and moment Mz value data described later based on the request instruction contained in the data output from the controller 104.

[0196] The request command response mode includes, as an example, a grip position detection mode, a grip force detection mode, and an insertion feature quantity detection mode.

[0197] The grip position detection mode is Figure 1 The pair of gripping parts 114 shown is a mode designated by the controller 104 when gripping the workpiece W. This gripping position detection mode is a mode for outputting data on pressure distribution or gripping position.

[0198] The grip force detection mode is for example Figure 1 The pair of gripping parts 114 shown in the figure are in a mode designated by the controller 104 during the transition from the open state to the closed state. This gripping force detection mode is a mode in which data on the gripping force Fz value is output.

[0199] The insertion feature detection mode is, for example, performed by the controller 104 Figure 1 The modes shown include contact detection between the robot hand 108 and the workpiece W, contact maintenance detection between the robot hand 108 and the workpiece W, fitting position detection of the workpiece W toward the moving destination, fitting position offset detection of the workpiece W toward the moving destination, insertion posture offset detection of the workpiece W toward the moving destination, completion detection of insertion of the workpiece W into the moving destination, and completion detection of removal of the workpiece W from the moving destination, which are all specified by the controller 104.

[0200] This insertion feature value detection mode outputs data of gripping force Fz value, aggregated shear force Fx value, aggregated shear force Fy value, moment Mx value, moment My value, and moment Mz value as 6-axis information.

[0201] In the operation content determination mode and the request command response mode, the output unit 12 outputs data of a translational force ΔFx value, data of a translational force ΔFy value, or a rotational moment Mr value, which will be described later, as needed.

[0202] (Pressure distribution data output processing)

[0203] The output unit 12 outputs pressure distribution data representing pressure values at each of a plurality of pressure detection locations within the contact surface 28. In the first embodiment, the pressure detection locations are the positions of the first electrodes 34. The positions of the first electrodes 34 are represented by the positions of specific portions of the first electrodes 34, such as the center or any corner of the first electrodes 34. The CPU 54 of the output unit 12 executes the pressure distribution data output process, for example, in the following manner.

[0204] Figure 18 It shows Figure 16This is a flowchart of an example of a process for outputting pressure distribution data in the output unit 12. In step S1, the CPU 54 obtains data output from the plurality of capacitance detection ICs 44. The data obtained in step S1 is the data of the signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculating the displacement Δz in step S2 described later.

[0205] In step S2, the CPU 54 calculates the displacement Δz of each of the multiple pressure detection positions within the contact surface 28 based on the data acquired in step S1. In this case, the displacement Δz of each of the multiple pressure detection positions corresponding to all of the multiple first electrodes 34 can be calculated based on the entire data of the multiple signals output from the sensor unit 18, or the displacement Δz of each of the multiple pressure detection positions corresponding to a portion of the multiple first electrodes 34 can be calculated based on the data of a portion of the multiple signals output from the sensor unit 18. In the first embodiment, as described above for the case where Δx, Δy, and Δz ≠ 0, the following processing is performed for each second electrode 36: four Δz values are calculated for the positions of the four first electrodes 34, which serve as pressure detection positions, based on the signals corresponding to the four first electrodes 34 that partially overlap with one second electrode 36.

[0206] The displacement Δz of each of the plurality of pressure detection positions calculated in this manner is proportional to the pressure value of each of the plurality of pressure detection positions. Therefore, by calculating the displacement Δz of each of the plurality of pressure detection positions, the pressure value of each of the plurality of pressure detection positions is calculated.

[0207] In step S3 , the CPU 54 generates pressure distribution data based on the pressure values at each of the plurality of pressure detection positions within the contact surface 28 calculated in step S2 .

[0208] In step S4, the CPU 54 outputs the pressure distribution data generated in step S3 to the controller 104. The pressure distribution data is used by the controller 104 to grasp the gripping position and gripping posture of the workpiece W having a known shape, or to recognize the workpiece W based on its shape.

[0209] (Data output processing of grip position)

[0210] The output unit 12 determines the gripping position of the workpiece W on the contact surface 28 based on the pressure values at each of the plurality of pressure detection positions on the contact surface 28 and outputs the gripping position data. The gripping position data output process is executed by the CPU 54 of the output unit 12 in the following manner, for example.

[0211] Figure 19 It shows Figure 16This is a flowchart of an example of a process for outputting grip position data in the output unit 12. In step S11, the CPU 54 obtains data output from the plurality of capacitance detection ICs 44. The data obtained in step S11 is the data of a signal output from the sensor unit 18 corresponding to the first electrode 34, which is the target for calculating the displacement Δz in step S12 described later.

[0212] In step S12, the CPU 54 calculates the displacement Δz of each of the multiple pressure detection positions within the contact surface 28 based on the data acquired in step S11. In this case, the displacement Δz of each of the multiple pressure detection positions corresponding to all of the multiple first electrodes 34 may be calculated based on the entire data of the multiple signals output from the sensor unit 18, or the displacement Δz of each of the multiple pressure detection positions corresponding to a portion of the multiple first electrodes 34 may be calculated based on the data of a portion of the multiple signals output from the sensor unit 18. In the first embodiment, as described above for the case where Δx, Δy, and Δz ≠ 0, the following processing is performed for each second electrode 36: four Δz values are calculated for the positions of the four first electrodes 34 serving as pressure detection positions based on the signals corresponding to the four first electrodes 34 that partially overlap with one second electrode 36.

[0213] The displacement Δz of each of the plurality of pressure detection positions calculated in this manner is proportional to the pressure value of each of the plurality of pressure detection positions. Therefore, by calculating the displacement Δz of each of the plurality of pressure detection positions, the pressure value of each of the plurality of pressure detection positions is calculated.

[0214] In step S13, the CPU 54 determines the positions at which the pressure values of the multiple pressure detection positions within the contact surface 28 calculated in step S12 become predetermined relative to each other. For example, the center of gravity position of the area to which pressure is applied may be determined as the holding position. The shape of the area to which pressure is applied includes a surface, a strip, a point (a surface with a small area), a line (a strip with a small width), etc. The position of the boundary line between the area to which pressure is applied and the area to which no pressure is applied may also be determined as the holding position. Thus, the holding position of the workpiece W within the contact surface 28 is determined based on the pressure values of the multiple pressure detection positions within the contact surface 28.

[0215] In step S14, the CPU 54 outputs the gripping position data (XY coordinate data) determined in step S13 to the controller 104. The gripping position data is used by the controller 104 to determine the gripping position of the workpiece W, for example.

[0216] (Data output processing of the gripping force Fz value)

[0217] The output unit 12 calculates a total pressure value for the entire contact surface 28 and outputs the total pressure value data as the gripping force Fz value data. The gripping force Fz value data output process is executed by the CPU 54 of the output unit 12 in the following manner, for example.

[0218] Figure 20 It shows Figure 16 This flowchart illustrates an example of a process for outputting data on the gripping force Fz value in the output unit 12. In step S21, the CPU 54 obtains data output from the plurality of capacitance detection ICs 44. The data obtained in step S21 is the data of a signal output from the sensor unit 18 corresponding to the first electrode 34, which is the target for calculating the displacement Δz in step S22 described later.

[0219] In step S22, the CPU 54 calculates the displacement Δz of each of the multiple pressure detection positions within the contact surface 28 based on the data acquired in step S21. In this case, the displacement Δz of each of the multiple pressure detection positions corresponding to all of the multiple first electrodes 34 can be calculated based on the entire data of the multiple signals output from the sensor unit 18, or the displacement Δz of each of the multiple pressure detection positions corresponding to a portion of the multiple first electrodes 34 can be calculated based on the data of a portion of the multiple signals output from the sensor unit 18. In the first embodiment, as described above for the case where Δx, Δy, and Δz ≠ 0, the following processing is performed for each second electrode 36: four Δz values are calculated for the positions of the four first electrodes 34, which are pressure detection positions, based on the signals corresponding to the four first electrodes 34 that partially overlap with one second electrode 36.

[0220] The displacement Δz of each of the plurality of pressure detection positions calculated in this manner is proportional to the pressure value of each of the plurality of pressure detection positions. Therefore, by calculating the displacement Δz of each of the plurality of pressure detection positions, the pressure value of each of the plurality of pressure detection positions is calculated.

[0221] In step S23 , the CPU 54 calculates a summary pressure value by performing at least one of calculation of a representative value, calculation of a total value, and calculation of an average value for the pressure values at the plurality of pressure detection positions within the contact surface 28 calculated in step S22 .

[0222] In step S24, the CPU 54 outputs the data of the summary pressure value calculated in step S23 as data of the gripping force Fz value to the controller 104. This data of the gripping force Fz value is used, for example, in the controller 104 to adjust the gripping force Fz to prevent the workpiece W from falling, or to adjust the gripping force Fz according to the weight of the workpiece W, the degree of crushing ease, and the like.

[0223] (Data output processing of the aggregated shear force Fx value)

[0224] The output unit 12 calculates a single aggregate shear force Fx value for the entire contact surface 28 and outputs data of the aggregate shear force Fx value. The data output process of the aggregate shear force Fx value is executed by the CPU 54 of the output unit 12, for example, in the following manner.

[0225] Figure 21 It shows Figure 16 This flowchart illustrates an example of a process for outputting data of the aggregated shear force Fx values in the output unit 12. In step S31, the CPU 54 obtains data output from the plurality of capacitance detection ICs 44. The data obtained in step S31 is the data of the signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculating the displacement Δx in step S32 described below.

[0226] In step S32, the CPU 54 calculates displacement Δx for each of the positions of the plurality of second electrodes 36 as an example of "plurality of shear force detection positions" based on the data acquired in step S31. The position of the second electrode 36 is represented by the position of a specific portion of the second electrode 36, such as the center or an arbitrary corner of the second electrode 36. The calculation of displacement Δx is performed using all or part of the signals corresponding to the four first electrodes 34 partially overlapping a single second electrode 36, as described above for the case where Δx, Δy, and Δz ≠ 0. When using part of the signals, the signals corresponding to at least two electrodes 34 that are located at different x-direction positions among the four first electrodes 34 overlapping a single second electrode 36 are used. In this case, the plurality of second electrodes 36 for which displacement Δx is calculated may be all or only a portion of the plurality of second electrodes 36. Furthermore, in step S32, all or part of the plurality of signals output from the sensor unit 18 may be used.

[0227] The displacement Δx calculated for each of the plurality of second electrodes 36 thus calculated is proportional to the shear force Fx value at each of the plurality of second electrodes 36. Therefore, by calculating the displacement Δx for each of the plurality of second electrodes 36, the shear force Fx value at each of the plurality of second electrodes 36 is calculated.

[0228] In the data output process of the aggregated shear force Fx value of the first embodiment, the shear force Fx value calculated for each position of the plurality of second electrodes 36 corresponds to an example of “the shear force value for each of the plurality of shear force detection positions within the contact surface”.

[0229] In step S33 , the CPU 54 calculates a summary shear force Fx value by performing at least one of representative value calculation, total value calculation, and average value calculation on the shear force Fx values at the positions of the plurality of second electrodes 36 calculated in step S32 .

[0230] In step S34, the CPU 54 outputs the data of the aggregated shear force Fx value calculated in step S33 to the controller 104. The data of the aggregated shear force Fx value is used for detecting collisions of the workpiece W, detecting contact maintenance between the workpiece W held by the robot hand 108 and other objects, detecting the fit position of the workpiece W at the destination of movement, detecting the completion of insertion of the workpiece W into the destination of movement, detecting the completion of removal of the workpiece W from the destination of movement, and the like.

[0231] (Data output processing of the aggregated shear force Fy value)

[0232] The output unit 12 calculates a single aggregate shear force Fy value for the entire contact surface 28 and outputs data of the aggregate shear force Fy value. The data output process of the aggregate shear force Fy value is executed by the CPU 54 of the output unit 12, for example, in the following manner.

[0233] Figure 22 It shows Figure 16 This flowchart shows an example of a process for outputting data of the aggregated shear force Fy values in the output unit 12. In step S41, the CPU 54 obtains data output from the plurality of capacitance detection ICs 44. The data obtained in step S41 is the data of the signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculating the displacement Δy in step S42 described later.

[0234] In step S42, the CPU 54 calculates displacement Δy for each of the positions of the plurality of second electrodes 36 as an example of "plurality of shear force detection positions" based on the data acquired in step S41. The position of the second electrode 36 is represented by the position of a specific portion of the second electrode 36, such as the center or an arbitrary corner of the second electrode 36. The calculation of displacement Δy is performed using all or part of the signals corresponding to the four first electrodes 34 partially overlapping a single second electrode 36, as described above with respect to the case where Δx, Δy, and Δz ≠ 0. When using part of the signals, the signals corresponding to at least two electrodes 34 that are located at different positions in the y-direction among the four first electrodes 34 overlapping a single second electrode 36 are used. In this case, the plurality of second electrodes 36 for which displacement Δy is calculated may be all or only a portion of the plurality of second electrodes 36. Furthermore, in step S42, all or part of the plurality of signals output from the sensor unit 18 may be used.

[0235] Thus, the displacement Δy calculated for each position of the plurality of second electrodes 36 is proportional to the shear force Fy value at each position of the plurality of second electrodes 36. Therefore, by calculating the displacement Δy for each position of the plurality of second electrodes 36, the shear force Fy value at each position of the plurality of second electrodes 36 is calculated.

[0236] In the data output process of the aggregated shear force Fy value in the first embodiment, the shear force Fy value calculated for each position of the plurality of second electrodes 36 corresponds to an example of “the shear force value for each of the plurality of shear force detection positions in the contact surface”.

[0237] In step S43 , the CPU 54 calculates a total shear force Fy value by performing at least one of calculation of a representative value, calculation of a total value, and calculation of an average value on the shear force Fy values at the positions of the plurality of second electrodes 36 calculated in step S42 .

[0238] In step S44, the CPU 54 outputs the data of the aggregated shear force Fy value calculated in step S43 to the controller 104. The data of the aggregated shear force Fy value is used for detecting collisions of the workpiece W, detecting contact maintenance between the workpiece W held by the robot hand 108 and other objects, detecting the fit position of the workpiece W at the destination of movement, detecting the completion of insertion of the workpiece W into the destination of movement, detecting the completion of removal of the workpiece W from the destination of movement, and the like.

[0239] (Data output processing of torque Mx value)

[0240] The output unit 12 calculates a first and second total pressure value for the second electrodes 36 at two locations on the contact surface 28 separated in the Y-axis direction. At this point, it is assumed that the touch sensor 10 is receiving a force from the workpiece W at least at the locations of the second electrodes 36 at these two locations. Based on the first and second total pressure values, the output unit 12 calculates the moment Mx acting on the touch sensor 10 about the X-axis as a moment Mx value, and outputs the moment Mx value data. The CPU 54 of the output unit 12 executes the data output of the moment Mx value, for example, in the following manner.

[0241] Figure 23 It shows Figure 16 This flowchart illustrates an example of a process for outputting data of the moment Mx value in the output unit 12. In step S51, the CPU 54 obtains data output from the plurality of capacitance detection ICs 44. The data obtained in step S51 is the data of a signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculating the displacement Δz in step S52 described later.

[0242] In step S52, the CPU 54 selects the second electrode 36-4 (see FIG. 1 ) which is spaced apart from the center of the contact surface 28 in the Y-axis direction as an example of the "first aggregate pressure detection position" based on the data obtained in step S51. Figure 12 ), the displacement Δz is calculated for each position of the four first electrodes 34 partially overlapping with the second electrode 36-4. The positions of the four first electrodes 34 are an example of "a plurality of pressure detection positions near the first aggregate pressure detection position". Furthermore, as an example of "the second aggregate pressure detection position", the second electrode 36-6 (see FIG. 1 ) which is away from the center of the contact surface 28 in the direction opposite to the second electrode 36-4 is selected. Figure 12 ), the displacement Δz is calculated for each position of the four first electrodes 34 partially overlapping the second electrode 36-6. The positions of the four first electrodes 34 are an example of "a plurality of pressure detection positions near the second aggregate pressure detection position."

[0243] Thus, the displacement Δz calculated for each position of the first electrode 34 partially overlapping the plurality of second electrodes 36-4 and 36-6 is proportional to the pressure value at each position of the first electrode 34. Therefore, by calculating the displacement Δz for each position of the first electrode 34, the pressure value at each position of the first electrode 34 is calculated.

[0244] Furthermore, in the data output processing of the moment Mx value in the first embodiment, the pressure value calculated for each position of the first electrode 34 that partially overlaps with the second electrode 36-4 is an example of "the pressure value for each of the multiple pressure detection positions in the vicinity of the first aggregate pressure detection position among the multiple pressure detection positions within the contact surface." Furthermore, the pressure value calculated for each position of the first electrode 34 that partially overlaps with the second electrode 36-6 is an example of "the pressure value for each of the multiple pressure detection positions in the vicinity of the second aggregate pressure detection position among the multiple pressure detection positions within the contact surface."

[0245] In step S53, the CPU 54 calculates at least one of a representative value, a total value, and an average value for the pressure values at each position of the first electrode 34 partially overlapping the second electrode 36-4, and uses the calculated value as a first summary pressure value. Thus, a first summary pressure value is calculated for the second electrode 36-4. The first summary pressure value corresponds to the vertical load Fz'.

[0246] Similarly, in step S53, the CPU 54 calculates at least one of a representative value, a total value, and an average value for the pressure values at each position of the first electrode 34 that partially overlaps the second electrode 36-6, and uses the calculated value as a second total pressure value. Thus, a second total pressure value is calculated for the second electrode 36-6. The second total pressure value corresponds to the vertical load Fz'.

[0247] In steps S52 and S53, similarly to the calculation of the first total pressure value for the second electrode 36-4, first total pressure values may also be calculated for the second electrodes 36-1 and 36-7. These three first total pressure values may then be subjected to at least one of calculation of a representative value, a total value, and an average value, with the resulting value being the final first total pressure value. In this case, the first total pressure detection locations are the positions of the second electrodes 36-1, 36-4, and 36-7. Furthermore, in steps S52 and S53, similarly to the calculation of the second total pressure value for the second electrode 36-6, second total pressure values may also be calculated for the second electrodes 36-3 and 36-9. These three second total pressure values may then be subjected to at least one of calculation of a representative value, a total value, and an average value, with the resulting value being the final second total pressure value. In this case, the second total pressure detection locations are the positions of the second electrodes 36-3, 36-6, and 36-9. At this time, it is assumed that the touch sensor 10 receives force from the workpiece W at least at the positions of the second electrodes 36 in these six locations.

[0248] In step S54, the CPU 54 calculates the difference between the first total pressure value (vertical load Fz') calculated in step S53 for the second electrode 36-4 or the pair of 36-1, 36-4, and 36-7, multiplied by the distance dx, and the second total pressure value (vertical load Fz') calculated in step S53 for the second electrode 36-6 or the pair of 36-3, 36-6, and 36-9, multiplied by the distance dx, and uses this difference as the moment Mx value. Thus, the moment Mx value (the magnitude and direction of the moment) is calculated. The moment Mx value is an example of a "first moment value."

[0249] In step S55 , the CPU 54 outputs data of the value of the moment Mx calculated in step S54 to the controller 104 .

[0250] (Data output processing of moment My value)

[0251] The output unit 12 calculates a first and second total pressure value for the second electrodes 36 at two locations on the contact surface 28 separated in the X-axis direction. At this point, it is assumed that the touch sensor 10 is receiving a force from the workpiece W at least at the locations of the second electrodes 36 at these two locations. The output unit 12 then calculates the moment My acting on the touch sensor 10 about the Y-axis as a moment My value based on the first and second total pressure values, and outputs the moment My value data. The CPU 54 of the output unit 12 executes this moment My value data output process, for example, in the following manner.

[0252] Figure 24 It shows Figure 16 This flowchart illustrates an example of a process for outputting data about the moment My value in the output unit 12. In step S61, the CPU 54 obtains data output from the plurality of capacitance detection ICs 44. The data obtained in step S61 is the data of a signal output from the sensor unit 18 corresponding to the first electrode 34 for which the displacement Δz is to be calculated in step S62, described later.

[0253] In step S62, the CPU 54 selects the second electrode 36-2 (see FIG. 1 ) which is spaced apart from the center of the contact surface 28 in the X-axis direction as an example of the “first aggregate pressure detection position” based on the data obtained in step S61. Figure 12 ), the displacement Δz is calculated for each position of the four first electrodes 34 partially overlapping with the second electrode 36-2. The positions of the four first electrodes 34 are an example of "a plurality of pressure detection positions near the first aggregate pressure detection position". Furthermore, as an example of "the second aggregate pressure detection position", the second electrode 36-8 (see FIG. 2 ) which is away from the center of the contact surface 28 in the direction opposite to the second electrode 36-2 is selected. Figure 12 ), the displacement Δz is calculated for each position of the four first electrodes 34 partially overlapping the second electrode 36-8. The positions of the four first electrodes 34 are an example of "a plurality of pressure detection positions near the second aggregate pressure detection position."

[0254] Thus, the displacement Δz calculated for each position of the first electrode 34 partially overlapping the plurality of second electrodes 36-2 and 36-8 is proportional to the pressure value at each position of the first electrode 34. Therefore, by calculating the displacement Δz for each position of the first electrode 34, the pressure value at each position of the first electrode 34 is calculated.

[0255] Furthermore, in the data output processing of the moment My value in the first embodiment, the pressure value calculated for each position of the first electrode 34 partially overlapping with the second electrode 36-2 is an example of "the pressure value for each of the plurality of pressure detection positions in the vicinity of the first pressure detection position among the plurality of pressure detection positions within the contact surface." Furthermore, the pressure value calculated for each position of the first electrode 34 partially overlapping with the second electrode 36-8 is an example of "the pressure value for each of the plurality of pressure detection positions in the vicinity of the second aggregate pressure detection position among the plurality of pressure detection positions within the contact surface."

[0256] In step S63, the CPU 54 calculates at least one of a representative value, a total value, and an average value for the pressure values of each of the first electrodes 34 that partially overlap the second electrode 36-2, and uses the calculated value as a first total pressure value. Thus, a first total pressure value is calculated for the second electrode 36-2. The first total pressure value corresponds to the vertical load Fz'.

[0257] Similarly, in step S63, the CPU 54 calculates at least one of a representative value, a total value, and an average value for the pressure values of each of the first electrodes 34 that partially overlap with the second electrode 36-8, and uses this calculated value as a second total pressure value. Thus, a second total pressure value is calculated for the second electrode 36-8. The second total pressure value corresponds to the vertical load Fz'.

[0258] In steps S62 and S63, similarly to the calculation of the first total pressure value for the second electrode 36-2, first total pressure values may also be calculated for the second electrodes 36-1 and 36-3. These three first total pressure values may then be subjected to at least one of calculation of a representative value, calculation of a total value, and calculation of an average value, with the resulting value being the final first total pressure value. In this case, the first total pressure detection position is the position of each of the second electrodes 36-1, 36-2, and 36-3. Furthermore, similarly to the calculation of the second total pressure value for the second electrode 36-8, second total pressure values may also be calculated for the second electrodes 36-7 and 36-9. These three second total pressure values may then be subjected to at least one of calculation of a representative value, calculation of a total value, and calculation of an average value, with the resulting value being the final second total pressure value. In this case, the second total pressure detection position is the position of each of the second electrodes 36-7, 36-8, and 36-9. At this time, it is assumed that the touch sensor 10 receives force from the workpiece W at least at the positions of the second electrodes 36 in these six locations.

[0259] In step S64, the CPU 54 calculates the difference between the first total pressure value (vertical load Fz') calculated in step S63 for the second electrode 36-2 or the pair of 36-1, 36-2, and 36-3, multiplied by the distance dy, and the second total pressure value (vertical load Fz') calculated in step S63 for the second electrode 36-8 or the pair of 36-7, 36-8, and 36-9, multiplied by the distance dy, and uses this difference as the moment My value. Thus, the moment My value (the magnitude and direction of the moment) is calculated. The moment My value is an example of a "first moment value."

[0260] In step S65 , the CPU 54 outputs data of the value of the moment My calculated in step S64 to the controller 104 .

[0261] (Data output processing of moment Mz value)

[0262] The output unit 12 calculates a first total shear force value and a second total shear force value for each of the second electrodes 36 at two locations spaced apart from the center of the contact surface 28 in the X-axis direction or the Y-axis direction. Furthermore, the output unit 12 calculates a value of a moment Mz acting on the touch sensor 10 about the Z-axis direction based on the first total shear force value and the second total shear force value as a moment Mz value, and outputs data on the moment Mz value.

[0263] Figure 25 It shows Figure 16 Flowchart of an example of the flow of the data output process of the moment Mz value in the output unit 12. In the data output process of the moment Mz value, there are the following first and second examples.

[0264] The data output processing of the moment Mz value in the first example is executed by the CPU 54 of the output unit 12, for example, in the following manner. In step S71, the CPU 54 obtains data output from the plurality of capacitance detection ICs 44. The data obtained in step S71 is the data of the signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculation of the displacement Δy in step S72 described later.

[0265] In step S72, the CPU 54 calculates the displacement Δy of each position of the second electrodes 36-2 and 36-8 away from the center of the contact surface 28 in the X-axis direction as an example of the "first shear force detection position" and the "second shear force detection position" based on the data obtained in step S71.

[0266] Thus, the displacement Δy calculated for each of the second electrodes 36-2 and 36-8 is proportional to the shear force Fy value at each of the second electrodes 36-2 and 36-8. Therefore, by calculating the displacement Δy for each of the second electrodes 36-2 and 36-8, the shear force Fy value at each of the second electrodes 36-2 and 36-8 is calculated. Hereinafter, the shear force Fy value calculated for the second electrode 36-2 in this manner is referred to as the first shear force Fy value, and the shear force Fy value calculated for the second electrode 36-8 is referred to as the second shear force Fy value.

[0267] The first shear force Fy value calculated for the second electrode 36-2 is an example of the "first shear force value calculated for the first shear force detection position within the contact surface." Furthermore, the second shear force Fy value calculated for the second electrode 36-8 is an example of the "second shear force value calculated for the second shear force detection position within the contact surface."

[0268] In step S73, the CPU 54 calculates the difference between the value obtained by multiplying the first shear force Fy calculated for the second electrode 36-2 in step S72 by the distance dy and the value obtained by multiplying the second shear force Fy calculated for the second electrode 36-8 in step S72 by the distance dy, and uses this difference as the moment Mz value. Thus, the moment Mz value (the magnitude and direction of the moment) is calculated. The moment Mz value is an example of a "second moment value."

[0269] In step S74 , the CPU 54 outputs data of the moment Mz value calculated in step S73 to the controller 104 .

[0270] Furthermore, in step S72 described above, the first shear force Fy value is calculated for the second electrode 36-2, but the first shear force Fy value may be calculated for at least one of the second electrodes 36-1, 36-2, and 36-3. Similarly, in step S72 described above, the second shear force Fy value is calculated for the second electrode 36-8, but the second shear force Fy value may be calculated for at least one of the second electrodes 36-7, 36-8, and 36-9.

[0271] The data output processing of the moment Mz value in the second example is executed by the CPU 54 of the output unit 12, for example, in the following manner. In step S71, the CPU 54 obtains data output from the plurality of capacitance detection ICs 44. The data obtained in step S71 is the data of the signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculation of the displacement Δx in step S72 described later.

[0272] In step S72, the CPU 54 calculates the displacement Δx of each position of the second electrodes 36-4 and 36-6 away from the center of the contact surface 28 in the Y-axis direction as an example of the "first shear force detection position" and the "second shear force detection position" based on the data obtained in step S71.

[0273] In this way, the displacement Δx calculated for the respective positions of the second electrodes 36-4 and 36-6 is proportional to the shear force Fx value at the respective positions of the second electrodes 36-4 and 36-6. Therefore, by calculating the displacement Δx for the respective positions of the second electrodes 36-4 and 36-6, the shear force Fx value of the respective second electrodes 36-4 and 36-6 is calculated.

[0274] The first shear force Fx value calculated for the second electrode 36-4 is an example of the "first shear force value calculated for the first shear force detection position within the contact surface." Furthermore, the second shear force Fx value calculated for the second electrode 36-6 is an example of the "second shear force value calculated for the second shear force detection position within the contact surface."

[0275] In step S73, the CPU 54 calculates the difference between the value obtained by multiplying the first shear force Fx value calculated for the second electrode 36-4 in step S72 by the distance dx and the value obtained by multiplying the second shear force Fx calculated for the second electrode 36-6 in step S72 by the distance dx, and uses this difference as the moment Mz value. Thus, the moment Mz value (the magnitude and direction of the moment) is calculated. The moment Mz value is an example of a "second moment value."

[0276] In step S74 , the CPU 54 outputs data of the moment Mz value calculated in step S73 to the controller 104 .

[0277] Furthermore, in step S72 described above, the first shear force Fx value is calculated for the second electrode 36-4, but the first shear force Fx value may be calculated for at least one of the second electrodes 36-1, 36-4, and 36-7. Similarly, in step S72 described above, the second shear force Fx value is calculated for the second electrode 36-6, but the second shear force Fx value may be calculated for at least one of the second electrodes 36-3, 36-6, and 36-9.

[0278] (Data Output Processing of Translational Force ΔFx Value)

[0279] Figure 26 It is to act on Figure 1This is a top view illustrating an example of the X-axis translational force ΔFx on a workpiece W gripped by a pair of gripping portions 114. Due to the rotational moment MRy about the Y-axis acting on the workpiece W, a first shear force Fx1 in the X-axis direction may act on the first tactile sensor 10 of the pair of tactile sensors 10, while a second shear force Fx2 in the opposite direction to the first shear force Fx1 may act on the second tactile sensor 10 of the pair of tactile sensors 10. In this case, the sum of the signed values of the first shear force Fx1 and the second shear force Fx2 corresponds to the X-axis translational force ΔFx.

[0280] The output unit 12 for calculating the translational force ΔFx is configured to receive signals from both the pair of tactile sensors 10. The output unit 12 calculates the translational force ΔFx value as the sum of the first and second aggregated shear force values Fx1 and Fx2 calculated for the pair of tactile sensors 10, and outputs data on the translational force ΔFx value.

[0281] Figure 27 It shows Figure 16 The flowchart shows an example of the process of data output processing of the translational force ΔFx value in the output unit 12. In step S81, the CPU 54 calculates the first total shear force Fx1 value in the X-axis direction for the first tactile sensor 10. Similarly, in step S81, the CPU 54 calculates the second total shear force Fx2 value in the X-axis direction for the second tactile sensor 10.

[0282] The calculation method of the first total shear force Fx1 value and the second total shear force Fx2 value in the X-axis direction is the same as the calculation method of the total shear force Fx value described above (refer to Figure 21 ). Thus, a first aggregate shear force Fx1 value and a second aggregate shear force Fx2 value are calculated for each of the pair of tactile sensors 10. The first aggregate shear force Fx1 value and the second aggregate shear force Fx2 value are examples of "aggregated shear force values calculated for each of the pair of tactile sensors."

[0283] In step S82 , the CPU 54 calculates the sum of the first total shear force Fx1 value and the second total shear force Fx2 value calculated in step S81 as the translation force ΔFx value.

[0284] In step S83 , the CPU 54 outputs data of the translation force ΔFx value calculated in step S82 to the controller 104 .

[0285] (Data Output Processing of Translational Force ΔFy Value)

[0286] Figure 28 It is to act on Figure 1This is a top view illustrating an example of a Y-axis translational force ΔFy on a workpiece W gripped by a pair of gripping portions 114. Due to the rotational moment MRx about the X-axis acting on the workpiece W, a first Y-axis shear force Fy1 may act on the first tactile sensor 10 of the pair of tactile sensors 10, while a second shear force Fy2 in the opposite direction to the first shear force Fy1 may act on the second tactile sensor 10 of the pair of tactile sensors 10. In this case, the sum of the first and second shear forces Fy1, which are signed values, corresponds to the Y-axis translational force ΔFy.

[0287] The output unit 12 for calculating the translational force ΔFy is configured to receive signals from both the pair of tactile sensors 10. The output unit 12 calculates the translational force ΔFy value as the sum of the first and second aggregated shear force Fy1 and Fy2 values calculated for the pair of tactile sensors 10, and outputs data on the translational force ΔFy value.

[0288] Figure 29 It shows Figure 16 The flowchart shows an example of the process of data output processing of the translational force ΔFy value in the output unit 12. In step S91, the CPU 54 calculates the first total shear force Fy1 value in the Y-axis direction for the first touch sensor 10. Similarly, in step S91, the CPU 54 calculates the second total shear force Fy2 value in the Y-axis direction for the second touch sensor 10.

[0289] The calculation method of the first total shear force Fy1 value and the second total shear force Fy2 value in the Y-axis direction is the same as the calculation method of the total shear force Fy value described above (refer to Figure 22 ). Thus, a first aggregate shear force Fy1 value and a second aggregate shear force Fy2 value are calculated for each of the pair of tactile sensors 10. The first aggregate shear force Fy1 value and the second aggregate shear force Fy2 value are examples of "aggregated shear force values calculated for each of the pair of tactile sensors."

[0290] In step S92 , the CPU 54 calculates the sum of the first total shear force Fy1 value and the second total shear force Fy2 value calculated in step S91 as the translation force ΔFy value.

[0291] In step S93 , the CPU 54 outputs data of the translation force ΔFy value calculated in step S92 to the controller 104 .

[0292] (Data output processing of the rotational torque MRx value)

[0293] like Figure 28As shown, a first shear force Fy1 in the Y-axis direction acts on the first tactile sensor 10 of the pair of tactile sensors 10, and a second shear force Fy2 in the opposite direction to the first shear force Fy1 acts on the second tactile sensor 10 of the pair of tactile sensors 10. In this case, a rotational moment MRx about the X-axis direction acts on the pair of tactile sensors 10.

[0294] The output unit 12 for calculating the rotational moment MRx receives input signals from both the pair of tactile sensors 10. The output unit 12 calculates the rotational moment MRx value about the X-axis direction based on the difference between the first and second aggregated shear force Fy1 and Fy2 values, which are signed values calculated for the pair of tactile sensors 10, and outputs data on the rotational moment MRx value.

[0295] Figure 30 It shows Figure 16 Flowchart showing an example of a process for outputting data of the rotational moment MRx value in the output unit 12. In step S101, the CPU 54 calculates a first total shear force Fy1 value in the Y-axis direction for the first touch sensor 10. Similarly, in step S101, the CPU 54 calculates a second total shear force Fy2 value in the Y-axis direction for the second touch sensor 10.

[0296] The calculation method of the first total shear force Fy1 value and the second total shear force Fy2 value in the Y-axis direction is the same as the calculation method of the total shear force Fy value described above (refer to Figure 22 ). Thus, a first aggregate shear force Fy1 value and a second aggregate shear force Fy2 value are calculated for each of the pair of tactile sensors 10. The first aggregate shear force Fy1 value and the second aggregate shear force Fy2 value are examples of "aggregated shear force values calculated for each of the pair of tactile sensors."

[0297] In step S102 , the CPU 54 calculates the value of the rotational moment MRx about the X-axis direction based on the difference between the first total shear force Fy1 and the second total shear force Fy2 calculated in step S101 .

[0298] In step S103 , the CPU 54 outputs data of the rotational torque MRx value calculated in step S102 to the controller 104 .

[0299] (Data output processing of the rotational torque MRy value)

[0300] like Figure 26As shown, a first shear force Fx1 in the X-axis direction acts on the first tactile sensor 10 of the pair of tactile sensors 10, and a second shear force Fx2 in the opposite direction to the first shear force Fx1 acts on the second tactile sensor 10 of the pair of tactile sensors 10. In this case, a rotational moment MRy about the Y-axis direction acts on the pair of tactile sensors 10.

[0301] The output unit 12 for calculating the rotational moment MRy receives signals from both the pair of tactile sensors 10. The output unit 12 calculates the rotational moment MRy value about the Y-axis direction based on the difference between the first aggregate shear force Fx1 value and the second aggregate shear force Fx2 value, which are signed values calculated for the pair of tactile sensors 10, and outputs data on the rotational moment MRy value.

[0302] Figure 31 It shows Figure 16 Flowchart showing an example of a process for outputting data of the rotational moment MRy value in the output unit 12. In step S111, the CPU 54 calculates a first total shear force Fx1 value in the X-axis direction for the first tactile sensor 10. Similarly, in step S111, the CPU 54 calculates a second total shear force Fx2 value in the X-axis direction for the second tactile sensor 10.

[0303] The calculation method of the first total shear force Fx1 value and the second total shear force Fx2 value in the X-axis direction is the same as the calculation method of the total shear force Fx value described above (refer to Figure 21 ). Thus, a first aggregate shear force Fx1 value and a second aggregate shear force Fx2 value are calculated for each of the pair of tactile sensors 10. The first aggregate shear force Fx1 value and the second aggregate shear force Fx2 value are examples of "aggregated shear force values calculated for each of the pair of tactile sensors."

[0304] In step S112 , the CPU 54 calculates the value of the rotational moment MRy about the Y-axis direction based on the difference between the first total shear force Fx1 and the second total shear force Fx2 calculated in step S111 .

[0305] In step S113 , the CPU 54 outputs data of the value of the rotational moment MRy calculated in step S112 to the controller 104 .

[0306] Next, the operation and effects of the first embodiment will be described.

[0307] (1) For multiple modes in the output unit 12 (see Figure 17), the output unit 12 has a collision detection mode that outputs collision detection data under specified conditions. Specifically, the specified conditions include the output unit 12 outputting collision detection data when at least a specified number of pressure values at multiple pressure detection locations within the contact surface 28 exceed a threshold value; when a total pressure value calculated by calculating at least one of a representative value, a total value, and an average value for the pressure values at the multiple pressure detection locations exceeds a threshold value; or when a single total shear force value calculated for the entire contact surface 28 exceeds a threshold value. Therefore, collision determination by the controller 104 is no longer necessary, reducing the burden on the controller 104.

[0308] (2) For multiple modes in the output unit 12 (see Figure 17 As described in the preceding text, the output unit 12 includes an action content determination mode for determining the action content of the robot 102 and selectively outputting various data based on the action content. Specifically, the output unit 12 selectively outputs at least one of pressure distribution data, gripping force Fz value data, aggregated shear force Fx value data, aggregated shear force Fy value data, moment Mx value data, moment My value data, and moment Mz value data. Therefore, various data can be provided to the controller 104 based on the action content of the robot 102, enabling the controller 104 to appropriately control the robot 102.

[0309] In addition, as for the multiple modes in the output unit 12 (see Figure 17 As described above, the output unit 12 has a request command response mode for selectively outputting various data in response to a request command from the controller 104. Specifically, the output unit 12 selectively outputs at least one of pressure distribution data, gripping force Fz value data, aggregated shear force Fx value data, aggregated shear force Fy value data, moment Mx value data, moment My value data, and moment Mz value data. Therefore, various data can be provided to the controller 104 in response to a request command from the controller 104, enabling the controller 104 to appropriately control the robot 102.

[0310] (3) Data output processing at the grip position (refer to Figure 19 ), the output unit 12 determines the gripping position of the workpiece W within the contact surface 28 based on the pressure at each of the plurality of pressure detection locations within the contact surface 28, and outputs the gripping position data. Therefore, there is no need for the controller 104 to determine the gripping position, thereby reducing the burden on the controller 104.

[0311] (4) In the data output processing of the holding force Fz value (refer to Figure 20), the output unit 12 calculates a summary pressure value by calculating at least one of a representative value, a total value, and an average value for the pressure values at each of the multiple pressure detection positions within the contact surface 28. The output unit 12 then outputs the summary pressure value data as the gripping force Fz value data. Therefore, the controller 104 does not need to calculate the gripping force Fz value as the summary pressure value, thereby reducing the burden on the controller 104.

[0312] (5) In the data output processing of the summary shear force Fx value (refer to Figure 21 ), the output unit 12 calculates one aggregated shear force Fx value for the entire contact surface 28 and outputs data of the aggregated shear force Fx value. Therefore, there is no need for the controller 104 to calculate the aggregated shear force Fx value, and thus the burden on the controller 104 can be reduced. In addition, for example, compared with the case of outputting data of a shear force distribution representing the shear force Fx values of each of a plurality of shear force detection positions within the contact surface 28, the amount of data communication between the output unit 12 and the controller 104 can be reduced in accordance with the aggregation of the shear force Fx values. Thus, the response speed of the output unit 12 and the controller 104 can be improved, and thus the controller 104 that controls the robot 102 having a pair of gripping parts 114 can be efficiently provided with tactile information that is beneficial to the control of the robot 102.

[0313] Similarly, in the data output process of the summary shear force Fy value (refer to Figure 22 ), the output unit 12 calculates one aggregated shear force Fy value for the entire contact surface 28 and outputs data of the aggregated shear force Fy value. Therefore, there is no need for the controller 104 to calculate the aggregated shear force Fy value, and thus the burden on the controller 104 can be reduced. In addition, for example, compared with the case of outputting data of a shear force distribution representing the shear force Fx values of each of a plurality of shear force detection positions within the contact surface 28, the amount of data communication between the output unit 12 and the controller 104 can be reduced in accordance with the aggregation of the shear force Fx values. Thus, the response speed of the output unit 12 and the controller 104 can be improved, and thus the controller 104 that controls the robot 102 having a pair of gripping parts 114 can be efficiently provided with tactile information that is beneficial to the control of the robot 102.

[0314] (6) In the data output processing of the summary shear force Fx value (refer to Figure 21), the output unit 12 calculates the shear force Fx value at each of the plurality of second electrodes 36 within the contact surface 28 based on all or part of the plurality of signals output from the sensor unit 18. The output unit 12 then calculates a summary shear force Fx value by performing at least one of calculation of a representative value, calculation of a total value, and calculation of an average value on the shear force Fx values at each of the plurality of second electrodes 36. Therefore, for example, a summary shear force Fx value that more accurately represents the shear force Fx value of the entire contact surface 28 can be output compared to the shear force Fx value calculated for an arbitrarily selected single second electrode 36.

[0315] Similarly, in the data output process of the summary shear force Fy value (refer to Figure 22 ), the output unit 12 calculates the shear force Fy value at each of the plurality of second electrodes 36 within the contact surface 28 based on all or part of the plurality of signals output from the sensor unit 18. The output unit 12 then calculates the aggregate shear force Fy value by performing at least one of calculation of a representative value, calculation of a total value, and calculation of an average value on the shear force Fy values at each of the plurality of second electrodes 36. Therefore, for example, a aggregate shear force Fy value that more accurately represents the shear force Fy value of the entire contact surface 28 can be output compared to the shear force Fy value calculated for an arbitrarily selected second electrode 36.

[0316] (7) In the data output processing of the moment Mx value (refer to Figure 23 ), the output unit 12 calculates a first and second total pressure value for each of the second electrodes 36 at two locations on the contact surface 28 that are separated in the Y-axis direction. Then, based on the first and second total pressure values, the output unit 12 calculates the value of the moment Mx acting on the tactile sensor 10 about the X-axis as the moment Mx value, and outputs the data of the moment Mx value. Therefore, the controller 104 does not need to calculate the moment Mx value, thereby reducing the burden on the controller 104.

[0317] Similarly, in the data output processing of the moment My value (see Figure 24 ), the output unit 12 calculates a first and second total pressure value for each of the second electrodes 36 at two locations on the contact surface 28 that are separated in the X-axis direction. Then, based on the first and second total pressure values, the output unit 12 calculates the value of the moment My acting on the tactile sensor 10 about the Y-axis as the moment My value, and outputs the data on the moment My value. Therefore, the controller 104 does not need to calculate the moment My value, thereby reducing the burden on the controller 104.

[0318] (8) In the data output processing of the moment Mz value (refer to Figure 25In the first example of FIG. 2 , the output unit 12 calculates the first and second shear force Fy values for the second electrodes 36 at two locations on the contact surface 28 separated in the X-axis direction. Furthermore, the output unit 12 calculates the value of the moment Mz acting on the touch sensor 10 about the Z-axis direction based on the first and second shear force Fy values as the moment Mz value, and outputs the moment Mz value data. Therefore, the controller 104 does not need to calculate the moment Mz value, thereby reducing the burden on the controller 104.

[0319] Similarly, in the data output processing of the moment Mz value (see Figure 25 In the second example of FIG. 2 , the output unit 12 calculates the first shear force Fx value and the second shear force Fx value for the second electrodes 36 at two locations separated in the Y-axis direction on the contact surface 28. Then, based on the first shear force Fx value and the second shear force Fx value, the output unit 12 calculates the moment Mz acting on the touch sensor 10 about the Z-axis as the moment Mz value, and outputs the moment Mz value data. Therefore, the controller 104 does not need to calculate the moment Mz value, thereby reducing the burden on the controller 104.

[0320] (9) In the data output processing of the translation force ΔFx value (refer to Figure 27 ), the output unit 12 calculates the sum of the first aggregate shear force Fx1 and the second aggregate shear force Fx2 calculated for the pair of tactile sensors 10 as the translational force ΔFx value, and outputs data on the translational force ΔFx value. Therefore, the controller 104 does not need to calculate the translational force ΔFx value, thereby reducing the burden on the controller 104.

[0321] Similarly, in the data output processing of the translation force ΔFy value (refer to Figure 29 ), the output unit 12 calculates the sum of the first and second aggregate shear force values Fy1 and Fy2 calculated for the pair of tactile sensors 10 as the translational force ΔFy value, and outputs data on the translational force ΔFy value. Therefore, the controller 104 does not need to calculate the translational force ΔFy value, thereby reducing the burden on the controller 104.

[0322] (10) In the data output processing of the rotation torque MRx value (refer to Figure 30 ), the output unit 12 calculates the value of the rotational moment MRx about the X-axis as the rotational moment MRx value based on the difference between the first and second aggregated shear force Fy1 and Fy2 values calculated for the pair of tactile sensors 10. The output unit 12 then outputs the data representing the rotational moment MRx value. Therefore, the controller 104 does not need to calculate the data representing the rotational moment MRx value, thereby reducing the burden on the controller 104.

[0323] Similarly, in the data output processing of the rotational torque MRy value (see Figure 31 ), the output unit 12 calculates the value of the rotational moment MRy about the Y-axis as the rotational moment MRy value based on the difference between the first aggregate shear force Fx1 and the second aggregate shear force Fx2 values calculated for the pair of tactile sensors 10. Furthermore, the output unit 12 outputs the data of the rotational moment MRy value. Therefore, the controller 104 does not need to calculate the data of the rotational moment MRy value, thereby reducing the burden on the controller 104.

[0324] (11) In the tactile sensor 10 (refer to Figures 3 to 7 ), the second electrode layer 26 is composed of a plurality of second electrodes 36 as a single layer. Therefore, the structure and manufacturing process of the touch sensor 10 can be simplified.

[0325] Furthermore, by detecting the electrostatic capacitance that changes depending on the distance between the first electrode 34 and the second electrode 36, pressure can be detected at each of the plurality of first electrodes 34. Furthermore, since each second electrode 36 partially overlaps with each of the four adjacent first electrodes 34 in the X-axis and Y-axis directions, shear force can also be detected at each of the second electrodes 36 by detecting the electrostatic capacitance that changes depending on the overlapping area between the four first electrodes 34 and the second electrodes 36.

[0326] Furthermore, since the number of the plurality of second electrodes 36 is smaller than the number of the plurality of first electrodes 34, the plurality of first electrodes 34 are matched with one second electrode 36. Therefore, for example, the intervals between the plurality of first electrodes 34 can be reduced compared to a case where the plurality of first electrodes 34 are matched with the plurality of second electrodes 36 on a one-to-one basis. Thus, the number of the plurality of first electrodes 34 can be ensured, and thus the resolution of the pressure distribution can be maintained.

[0327] As described above, according to the touch sensor 10 of the first embodiment, it is possible to detect shear force even with a simple structure and manufacturing process, and to ensure the resolution of pressure distribution.

[0328] Next, a modification of the first embodiment will be described.

[0329] (1) The output unit 12 and the tactile sensor 10 are configured separately, but the tactile sensor 10 and the output unit 12 may be formed into a unit.

[0330] (2) The output unit 12 is provided at the wrist joint 112 connecting the robot hand 108 to the robot arm 106. However, at least a portion of the output unit 12 may be provided at any of the robot hand 108, the robot arm 106, the input unit of the controller 104, and a program component provided in the controller 104 and executing program processing. Furthermore, when the output unit 12 is a program component executed in the controller 104, the controller 104 mentioned in contrast to the output unit 12 refers to the portion of the physical controller 104 other than the program component that serves as the output unit 12.

[0331] The input unit of the controller 104 may be, for example, an amplifier unit connected to the CPU 54 of the controller 104, or a program component (functional block) that inputs data output from the tactile sensor 10 and executes program processing. If at least a portion of the output unit 12 is provided in the input unit of the controller 104, the burden on the user who programs the controller 104 can be reduced.

[0332] (3) As a preferred example, the output unit 12 has both the operation content determination mode and the request command response mode, but either the operation content determination mode or the request command response mode may be omitted.

[0333] (4) The output unit 12 performs data output processing on pressure distribution, holding position, holding force Fz value, aggregated shear force Fx value, aggregated shear force Fy value, moment Mx value, moment My value, moment Mz value, translational force ΔFx value, translational force ΔFy value, rotational torque MRx value, and rotational torque MRy value, but any one or several of these multiple data output processings may be omitted.

[0334] (5) The tactile sensor 10 preferably has the above-described structure. However, the tactile sensor 10 may have a structure other than the above-described structure as long as the first electrode layer 24 has a plurality of first electrodes 34, the second electrode layer 26 has a plurality of second electrodes 36, and two or more of the plurality of first electrodes 34 partially overlap with the second electrode 36 when viewed from above.

[0335] (6) The touch sensor 10 includes 36 first electrodes 34 , but the number of the plurality of first electrodes 34 may be any number.

[0336] (7) The number of the plurality of second electrodes 36 may be any number as long as it is smaller than the number of the plurality of first electrodes 34 .

[0337] (8) The plurality of first electrodes 34 are preferably arranged in a matrix along the contact surface 28 , but may be arranged in a pattern other than a matrix as long as a desired pressure distribution can be obtained within the contact surface 28 .

[0338] [Second embodiment]

[0339] Next, a second embodiment will be described.

[0340] (Structure of the Touch Sensor 10)

[0341] Figure 32 1 is a longitudinal sectional view of a touch sensor 10 according to a second embodiment. The touch sensor 10 according to the second embodiment is different from the touch sensor 10 according to the first embodiment (see FIG. Figures 3 to 6 ), the structure of the second electrode layer 26 is changed as follows.

[0342] Figure 33 yes Figure 32 A top view of the second electrode layer 26 is shown. The second electrode layer 26 is composed of a single second electrode 36. Specifically, the second electrode 36 forms an island. The second electrode 36 is formed, for example, from a conductive rubber. The second electrode 36 is formed in a flat plate shape. The second electrode 36 can be connected to the ground of the substrate 16 or float relative to the ground.

[0343] Figure 34 It shows that Figure 32 FIG2 is a top view of a state in which the second electrode 36, the elastic layer 22, and the substrate 16 overlap. As an example, the number of the plurality of first electrodes 34 is 36, whereas the second electrode 36 forms one island portion. Therefore, in the second embodiment, the number of island portions formed by the second electrode 36 is less than the number of the plurality of first electrodes 34.

[0344] As an example, the second electrode 36 is formed to be larger than the contact surface 28 (see Figure 32 ) is a small square. The second electrode 36 is sized to overlap all of the plurality of first electrodes 34 when viewed from above. Specifically, the second electrode 36 is sized such that the first electrodes 34 arranged along the outer periphery of the second electrode 36 among the plurality of first electrodes 34 overlap the outer periphery of the second electrode 36 when viewed from above. Thus, the first electrodes 34 arranged along the outer periphery of the second electrode 36 partially overlap with the second electrode 36 when viewed from above, and the first electrodes 34 located inside the outer periphery of the second electrode 36 among the plurality of first electrodes 34 overlap with the second electrode 36 in their entirety.

[0345] In the second embodiment, the first electrode 34 among the multiple first electrodes 34 that partially overlaps with the second electrode 36 is equivalent to an example of "multiple locally overlapping electrodes that partially overlap with the second electrode", and the multiple signals output from the first electrode 34 that partially overlaps with the second electrode 36 is equivalent to an example of "multiple locally overlapping electrode signals".

[0346] exist Figure 32In the sensor portion 18 of the touch sensor 10 shown in FIG. 1 , when pressure is applied to the contact surface 28, the distance d between each first electrode 34 and the second electrode 36 changes, and the capacitance C changes in accordance with the change in the distance d. In addition, in the sensor portion 18, when a shear force is applied to the contact surface 28, the first electrode 34 partially overlapping the second electrode 36 (see FIG. 1 ) is moved. Figure 34 ) When the overlapping area A of the second electrode 36 changes, the electrostatic capacitance C changes according to the change of the area A.

[0347] The touch sensor 10 of this structure is different from the touch sensor 10 of the first embodiment described above (see Figures 3 to 6 ) are similarly manufactured.

[0348] Figure 35 Yes Figure 32 FIG. 1 is a diagram illustrating an example of moment lengths dx and dy in the tactile sensor 10. Figure 35 , identification numbers 1 to 28 are shown for the plurality of first electrodes 34. When the plurality of first electrodes 34 are identified, the plurality of first electrodes 34 are respectively referred to as first electrodes 34-1 to 34-28.

[0349] The moment length dx is used to calculate the moment Mx around the X axis (refer to Figure 11 As an example, the moment length dx corresponds to the distance along the Y-axis direction between the center of the first electrode 34-4 located away from the center of the contact surface 28 in the Y-axis direction and the center of the contact surface 28.

[0350] Figure 35 The moment length dy shown is used to calculate the moment My around the Y axis (refer to Figure 11 As an example, the moment length dy corresponds to the distance along the X-axis direction between the center of the first electrode 34-13 and the center of the second electrode 36, which are located away from the center of the second electrode 36 in the X-axis direction.

[0351] In the second embodiment, the calculation of displacements Δx, Δy, and Δz is performed based on the same concept as in the first embodiment. In the second embodiment, the hardware configuration of the tactile sensor 10, output unit 12, and controller 104, as well as the multiple modes of the output unit 12, are the same as in the first embodiment. Furthermore, in the second embodiment, the output processing for data on pressure distribution, grip position, grip force Fz value, translational force ΔFx value, translational force ΔFy value, rotational moment MRx value, and rotational moment MRy value is the same as in the first embodiment.

[0352] On the other hand, the second embodiment is different from the first embodiment in the processing of outputting the data of the aggregated shear force Fx value, the aggregated shear force Fy value, the moment Mx value, the moment My value, and the moment Mz value.

[0353] (Data output processing of the aggregated shear force Fx value)

[0354] In the second embodiment, the output unit 12 calculates a total shear force Fx value for the entire contact surface 28 and outputs the data of the total shear force Fx value. The data output processing of the total shear force Fx value is executed by the CPU 54 of the output unit 12, for example, in the following manner. Figure 21 The flow of the data output process of the aggregated shear force Fx values in the second embodiment will be described.

[0355] In step S31, the CPU 54 acquires data output from the plurality of capacitance detection ICs 44. The data acquired in step S31 is data of a signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculation of the displacement Δx in step S32 described later.

[0356] In step S32, the CPU 54 calculates the displacement Δx for each position of the plurality of first electrodes 34-1 to 34-8 that partially overlap with the second electrode 36 based on the data acquired in step S31. In this case, the plurality of first electrodes 34 for which the displacement Δx is calculated may be all of the plurality of first electrodes 34-1 to 34-8 or only a portion of the plurality of first electrodes 34-1 to 34-8.

[0357] In the second embodiment, as an example, the CPU 54 calculates displacement Δx for each of the plurality of first electrodes 34-1 to 34-8. In step S32, displacement Δx is calculated for each of the plurality of first electrodes 34-1 to 34-8 based on a portion of the plurality of signals output from the sensor unit 18. Furthermore, in the second embodiment, it is preferable to use the displacement Δz values calculated for the first electrodes 34-17 to 34-20 and 34-21 to 34-24 to correct the displacement Δx.

[0358] The displacement Δx calculated for each of the plurality of first electrodes 34-1 to 34-8 is proportional to the shear force Fx value at each of the plurality of first electrodes 34-1 to 34-8. Therefore, by calculating the displacement Δx for each of the plurality of first electrodes 34-1 to 34-8, the shear force Fx value at each of the plurality of first electrodes 34-1 to 34-8 is calculated.

[0359] In the data output process of the aggregated shear force Fx value of the second embodiment, the shear force Fx value calculated for each position of the plurality of first electrodes 34 - 1 to 34 - 8 corresponds to an example of “the shear force value at each of the plurality of shear force detection positions within the contact surface”.

[0360] In step S33 , the CPU 54 calculates a total shear force Fx value by performing at least one of representative value calculation, total value calculation, and average value calculation on the shear force Fx values at the respective positions of the plurality of first electrodes 34 - 1 to 34 - 8 calculated in step S32 .

[0361] In step S34, the CPU 54 outputs the data of the aggregated shear force Fx value calculated in step S33 to the controller 104. The data of the aggregated shear force Fx value is used for detecting collisions of the workpiece W, detecting contact maintenance between the workpiece W held by the robot hand 108 and other objects, detecting the fit position of the workpiece W at the destination of movement, detecting the completion of insertion of the workpiece W into the destination of movement, detecting the completion of removal of the workpiece W from the destination of movement, and the like.

[0362] (Data output processing of the aggregated shear force Fy value)

[0363] In the second embodiment, the output unit 12 calculates a total shear force Fy value for the entire contact surface 28 and outputs the data of the total shear force Fy value. The data output processing of the total shear force Fy value is executed by the CPU 54 of the output unit 12, for example, in the following manner. Figure 22 Next, the flow of the data output process of the aggregated shear force Fy values in the second embodiment will be described.

[0364] In step S41, the CPU 54 acquires data output from the plurality of capacitance detection ICs 44. The data acquired in step S41 is data of a signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculating the displacement Δy in step S42 described later.

[0365] In step S42, the CPU 54 calculates the displacement Δy for each position of the plurality of first electrodes 34-9 to 34-16 partially overlapping the second electrode 36 based on the data obtained in step S41. In this case, the plurality of first electrodes 34 for which the displacement Δy is calculated may be all of the plurality of first electrodes 34-9 to 34-16 or only a portion of the plurality of first electrodes 34-9 to 34-16.

[0366] In the second embodiment, as an example, the CPU 54 calculates displacement Δy for each of the plurality of first electrodes 34-9 to 34-16. In step S42, displacement Δy is calculated for each of the plurality of first electrodes 34-9 to 34-16 based on a portion of the plurality of signals output from the sensor unit 18. Furthermore, in the second embodiment, it is preferable to use the values of displacement Δz calculated for the first electrodes 34-17 to 34-25, 34-26, 34-21, 34-20, 34-27, 34-28, and 34-24 to correct displacement Δy.

[0367] The displacement Δy calculated for each of the plurality of first electrodes 34-9 to 34-16 is proportional to the shear force Fy value at each of the plurality of first electrodes 34-9 to 34-16. Therefore, by calculating the displacement Δy for each of the plurality of first electrodes 34-9 to 34-16, the shear force Fy value at each of the plurality of first electrodes 34-9 to 34-16 is calculated.

[0368] In the data output process of the aggregated shear force Fy value in the second embodiment, the shear force Fy value calculated for each position of the plurality of first electrodes 34 - 9 to 34 - 16 corresponds to an example of “the shear force value at each of the plurality of shear force detection positions within the contact surface”.

[0369] In step S43 , the CPU 54 calculates a summary shear force Fy value by performing at least one of representative value calculation, total value calculation, and average value calculation on the shear force Fy values at the respective positions of the plurality of first electrodes 34 - 9 to 34 - 16 calculated in step S42 .

[0370] In step S44, the CPU 54 outputs the data of the aggregated shear force Fy value calculated in step S43 to the controller 104. The data of the aggregated shear force Fy value is used for detecting collisions of the workpiece W, detecting contact maintenance between the workpiece W held by the robot hand 108 and other objects, detecting the fit position of the workpiece W at the destination of movement, detecting the completion of insertion of the workpiece W into the destination of movement, detecting the completion of removal of the workpiece W from the destination of movement, and the like.

[0371] (Data output processing of torque Mx value)

[0372] In the second embodiment, the output unit 12 calculates a first total pressure value and a second total pressure value for each of the first electrodes 34 at two locations separated in the Y-axis direction on the contact surface 28. The output unit 12 then calculates the value of the moment Mx acting on the touch sensor 10 about the X-axis direction based on the first total pressure value and the second total pressure value as the moment Mx value, and outputs the moment Mx value data.

[0373] The data output processing of the moment Mx value is executed by the CPU 54 of the output unit 12, for example, in the following manner. Figure 23 , the flow of the data output processing of the moment Mx value in the second embodiment is described.

[0374] In step S51, the CPU 54 acquires data output from the plurality of capacitance detection ICs 44. The data acquired in step S51 is data of a signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculation of the displacement Δz in step S52 described later.

[0375] In step S52, the CPU 54 calculates the displacement Δz for the respective positions of the first electrodes 34-20, 34-27, 34-28, 34-24 and the first electrodes 34-17, 34-25, 34-26, 34-21 moving away from the center of the contact surface 28 in the Y-axis direction as an example of "multiple first aggregated pressure detection positions" and "multiple second aggregated pressure detection positions" based on the data obtained in step S51.

[0376] Thus, the displacement Δz calculated for each position of the plurality of first electrodes 34 is proportional to the pressure value at each position of the plurality of first electrodes 34. Therefore, by calculating the displacement Δz for each position of the plurality of first electrodes 34, the pressure value at each position of the plurality of first electrodes 34 is calculated.

[0377] Furthermore, in the data output processing of the moment Mx value in the second embodiment, the pressure value calculated for each of the first electrodes 34-20, 34-27, 34-28, and 34-24 corresponds to an example of "the pressure value for each of the plurality of first aggregated pressure detection positions among the plurality of pressure detection positions within the contact surface." Furthermore, the pressure value calculated for each of the first electrodes 34-17, 34-25, 34-26, and 34-21 corresponds to an example of "the pressure value for each of the plurality of second aggregated pressure detection positions among the plurality of pressure detection positions within the contact surface."

[0378] In step S53, the CPU 54 calculates at least one of a representative value, a total value, and an average value for the pressure values at each of the first electrodes 34-20, 34-27, 34-28, and 34-24, and uses the calculated value as a first total pressure value. Thus, a first total pressure value is calculated for the first electrodes 34-20, 34-27, 34-28, and 34-24. The first total pressure value corresponds to the vertical load Fz'.

[0379] Similarly, in step S53, the CPU 54 calculates at least one of a representative value, a total value, and an average value for the pressure values at each of the first electrodes 34-17, 34-25, 34-26, and 34-21, and uses the calculated value as a second total pressure value. Thus, a second total pressure value is calculated for the first electrodes 34-17, 34-25, 34-26, and 34-21. The second total pressure value corresponds to the vertical load Fz'.

[0380] In step S54, the CPU 54 calculates the difference between the first total pressure value (vertical load Fz') calculated for the first electrodes 34-17, 34-25, 34-26, and 34-21 in step S53 and the second total pressure value (vertical load Fz') calculated for the first electrodes 34-17, 34-25, 34-26, and 34-21 in step S53 and the distance dx, and uses this difference as the moment Mx value. Thus, the moment Mx value (the magnitude and direction of the moment) is calculated. The moment Mx value is an example of a "first moment value."

[0381] In step S55 , the CPU 54 outputs data of the value of the moment Mx calculated in step S54 to the controller 104 .

[0382] Furthermore, in step S52 above, the pressure values at the positions of the first electrodes 34-20, 34-27, 34-28, and 34-24 are calculated, but the pressure values at the positions of any two of the first electrodes 34-20, 34-27, 34-28, and 34-24 may be calculated. Similarly, in step S52 above, the pressure values at the positions of the first electrodes 34-17, 34-25, 34-26, and 34-21 are calculated, but the pressure values at the positions of any two of the first electrodes 34-17, 34-25, 34-26, and 34-21 may be calculated.

[0383] (Data output processing of moment My value)

[0384] In the second embodiment, the output unit 12 calculates a first total pressure value and a second total pressure value for each of the first electrodes 34 at two locations separated in the X-axis direction on the contact surface 28. The output unit 12 then calculates the value of the moment My acting on the tactile sensor 10 about the Y-axis direction based on the first total pressure value and the second total pressure value as the moment My value, and outputs the moment My value data.

[0385] The data output processing of the moment Mx value is executed by the CPU 54 of the output unit 12, for example, in the following manner. Figure 24, the flow of data output processing of the moment My value in the second embodiment is described.

[0386] In step S61, the CPU 54 acquires data output from the plurality of capacitance detection ICs 44. The data acquired in step S61 is data of a signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculation of the displacement Δz in step S62 described later.

[0387] In step S62, the CPU 54 calculates the displacement Δz for the respective positions of the first electrodes 34-17, 34-18, 34-19, 34-20 and the first electrodes 34-21, 34-22, 34-23, 34-24 moving away from the center of the contact surface 28 in the X-axis direction as an example of "multiple first aggregated pressure detection positions" and "multiple second aggregated pressure detection positions" based on the data obtained in step S61.

[0388] Thus, the displacement Δz calculated for each position of the plurality of first electrodes 34 is proportional to the pressure value at each position of the plurality of first electrodes 34. Therefore, by calculating the displacement Δz for each position of the plurality of first electrodes 34, the pressure value at each position of the plurality of first electrodes 34 is calculated.

[0389] Furthermore, in the data output processing of the moment Mx value in the second embodiment, the pressure value calculated for each of the first electrodes 34-17, 34-18, 34-19, and 34-20 corresponds to an example of "the pressure value for each of the plurality of first aggregated pressure detection positions among the plurality of pressure detection positions within the contact surface." Furthermore, the pressure value calculated for each of the first electrodes 34-21, 34-22, 34-23, and 34-24 corresponds to an example of "the pressure value for each of the plurality of second aggregated pressure detection positions among the plurality of pressure detection positions within the contact surface."

[0390] In step S63, the CPU 54 calculates at least one of a representative value, a total value, and an average value for the pressure values at each of the first electrodes 34-17, 34-18, 34-19, and 34-20, and uses the calculated value as a first total pressure value. Thus, a first total pressure value is calculated for the first electrodes 34-17, 34-18, 34-19, and 34-20. The first total pressure value corresponds to the vertical load Fz'.

[0391] Similarly, in step S63, the CPU 54 calculates at least one of a representative value, a total value, and an average value for the pressure values at each of the first electrodes 34-21, 34-22, 34-23, and 34-24, and uses the calculated value as a second total pressure value. Thus, a second total pressure value is calculated for the first electrodes 34-21, 34-22, 34-23, and 34-24. The second total pressure value corresponds to the vertical load Fz'.

[0392] In step S64, the CPU 54 calculates the difference between the first total pressure value (vertical load Fz') calculated for the first electrodes 34-17, 34-18, 34-19, and 34-20 in step S63, multiplied by the distance dy, and the second total pressure value (vertical load Fz') calculated for the first electrodes 34-21, 34-22, 34-23, and 34-24 in step S63, multiplied by the distance dy, and uses this difference as the moment My value. Thus, the moment My value (the magnitude and direction of the moment) is calculated. The moment My value is an example of a "first moment value."

[0393] In step S65 , the CPU 54 outputs data of the value of the moment My calculated in step S64 to the controller 104 .

[0394] Furthermore, in step S62 described above, the pressure values at the positions of the first electrodes 34-17, 34-18, 34-19, and 34-20 are calculated, but the pressure values at the positions of any two of the first electrodes 34-17, 34-18, 34-19, and 34-20 may be calculated. Similarly, in step S62 described above, the pressure values at the positions of the first electrodes 34-21, 34-22, 34-23, and 34-24 are calculated, but the pressure values at the positions of any two of the first electrodes 34-21, 34-22, 34-23, and 34-24 may be calculated.

[0395] (Data output processing of moment Mz value)

[0396] In the second embodiment, the output unit 12 calculates a first shear force value and a second shear force value for each of the first electrodes 34 at two locations spaced apart from the center of the contact surface 28 in the X-axis direction or the Y-axis direction. Furthermore, the output unit 12 calculates a moment Mz acting on the touch sensor 10 about the Z-axis direction based on the first shear force value and the second shear force value as a moment Mz value, and outputs data on the moment Mz value.

[0397] Below, refer to Figure 25The flow of the data output process of the moment Mz value in the second embodiment will be described. The data output process of the moment Mz value includes the following first and second examples.

[0398] The data output process for the moment Mz value in the first example is executed by the CPU 54 of the output unit 12, for example, in the following manner. In step S71, the CPU 54 obtains data output from the plurality of capacitance detection ICs 44. The data obtained in step S71 is the data of the signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculation of the displacement Δx in step S72 described later.

[0399] In step S72, the CPU 54 calculates the displacement Δx for each position of the first electrode 34 at two locations separated from each other in the Y-axis direction among the first electrodes 34-1 to 34-4 and 34-5 to 34-8 as an example of the "first shear force detection position" and the "second shear force detection position" based on the data obtained in step S71.

[0400] At this time, for example, the CPU 54 can calculate the displacement Δx for the respective positions of the first electrodes 34-1 and 34-4 at two locations separated from each other in the Y-axis direction among the first electrodes 34-1 to 34-4, and can also calculate the displacement Δx for the respective positions of the first electrodes 34-5 and 34-8 at two locations separated from each other in the Y-axis direction among the first electrodes 34-5 to 34-8.

[0401] In addition, for example, the CPU 54 can also calculate the displacement Δx for the respective positions of the first electrodes 34-2 and 34-3 at two locations separated from each other in the Y-axis direction among the first electrodes 34-1 to 34-4, and can also calculate the displacement Δx for the respective positions of the first electrodes 34-6 and 34-7 at two locations separated from each other in the Y-axis direction among the first electrodes 34-5 to 34-8.

[0402] Thus, the displacement Δx calculated for the positions of the first electrodes 34 at two locations separated from each other in the Y-axis direction is proportional to the shear force Fx value at the positions of the two first electrodes 34. Therefore, by calculating the displacement Δx for the positions of the first electrodes 34 at two locations separated from each other in the Y-axis direction, the shear force Fx value at the positions of the two first electrodes 34 is calculated.

[0403] Hereinafter, the shear force Fx value calculated for one of the two first electrodes 34 is referred to as a first shear force Fx value, and the shear force Fx value calculated for the other of the two first electrodes 34 is referred to as a second shear force Fx value.

[0404] In step S73 , the CPU 54 calculates the difference between the first shear force Fx value calculated in step S72 and the second shear force Fx, and calculates the moment Mz value (the magnitude and direction of the moment) based on the difference. The moment Mz value is an example of the “second moment value”.

[0405] In step S74 , the CPU 54 outputs data of the moment Mz value calculated in step S73 to the controller 104 .

[0406] The data output processing of the moment Mz value in the second example is executed by the CPU 54 of the output unit 12, for example, in the following manner. In step S71, the CPU 54 obtains data output from the plurality of capacitance detection ICs 44. The data obtained in step S71 is the data of the signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculation of the displacement Δy in step S72 described later.

[0407] In step S72, the CPU 54 calculates the displacement Δy for each position of the first electrode 34 at two locations separated from each other in the X-axis direction among the first electrodes 34-9 to 34-12 and 34-13 to 34-16 as an example of the "first shear force detection position" and the "second shear force detection position" based on the data obtained in step S71.

[0408] At this time, for example, the CPU 54 can calculate the displacement Δy for the respective positions of the first electrodes 34-9 and 34-12 at two locations separated from each other in the X-axis direction among the first electrodes 34-9 to 34-12, and can also calculate the displacement Δy for the respective positions of the first electrodes 34-13 and 34-16 at two locations separated from each other in the X-axis direction among the first electrodes 34-13 to 34-16.

[0409] In addition, for example, the CPU 54 can also calculate the displacement Δy for the respective positions of the first electrodes 34-10 and 34-11 at two locations separated from each other in the X-axis direction among the first electrodes 34-9 to 34-12, and can also calculate the displacement Δy for the respective positions of the first electrodes 34-14 and 34-15 at two locations separated from each other in the X-axis direction among the first electrodes 34-13 to 34-16.

[0410] Thus, the displacement Δy calculated for the positions of the first electrodes 34 at two locations separated from each other in the X-axis direction is proportional to the shear force Fy values at the positions of the two first electrodes 34. Therefore, by calculating the displacement Δy for the positions of the first electrodes 34 at two locations separated from each other in the X-axis direction, the shear force Fy values at the positions of the two first electrodes 34 are calculated.

[0411] Hereinafter, the shear force Fy value calculated for one of the two first electrodes 34 is referred to as a first shear force Fy value, and the shear force Fy value calculated for the other of the two first electrodes 34 is referred to as a second shear force Fy value.

[0412] In step S73, the CPU 54 calculates the difference between the first shear force Fy value calculated in step S72 and the second shear force Fy, and calculates the moment Mz value (the magnitude and direction of the moment) based on the difference. The moment Mz value is an example of the "second moment value."

[0413] In step S74 , the CPU 54 outputs data of the moment Mz value calculated in step S73 to the controller 104 .

[0414] Next, the operation and effects of the second embodiment will be described.

[0415] (1) In the data output processing of the summary shear force Fx value (refer to Figure 21 ), the output unit 12 calculates a summary shear force Fx value for the entire contact surface 28 and outputs data of the summary shear force Fx value. Therefore, there is no need for the controller 104 to calculate the summary shear force Fx value, so the burden on the controller 104 can be reduced. In addition, for example, compared with the case of outputting data of a shear force distribution representing the shear force Fx values of each of a plurality of pressure detection positions within the contact surface 28, the amount of data communication between the output unit 12 and the controller 104 can be reduced in accordance with the summary of the shear force Fx values. As a result, the response speed of the output unit 12 and the controller 104 can be improved, so that the controller 104 that controls the robot 102 having a pair of gripping parts 114 can efficiently provide tactile information that is beneficial to the control of the robot 102.

[0416] Similarly, in the data output process of the summary shear force Fy value (refer to Figure 22 ), the output unit 12 calculates one aggregated shear force Fy value for the entire contact surface 28 and outputs data of the aggregated shear force Fy value. Therefore, there is no need for the controller 104 to calculate the aggregated shear force Fy value, and thus the burden on the controller 104 can be reduced. In addition, for example, compared with the case of outputting data of a shear force distribution representing the shear force Fx values of each of a plurality of pressure detection positions within the contact surface 28, the amount of data communication between the output unit 12 and the controller 104 can be reduced in accordance with the aggregation of the shear force Fx values. Thus, the response speed of the output unit 12 and the controller 104 can be improved, and thus the controller 104 that controls the robot 102 having a pair of gripping parts 114 can be efficiently provided with tactile information that is beneficial to the control of the robot 102.

[0417] (2) In the data output processing of the summary shear force Fx value (refer to Figure 21 ), the output unit 12 calculates the shear force Fx value at each of the plurality of first electrodes 34 within the contact surface 28 based on a portion of the plurality of signals output from the sensor unit 18. The output unit 12 then calculates a summary shear force Fx value by performing at least one of calculation of a representative value, calculation of a total value, and calculation of an average value on the shear force Fx values at each of the plurality of first electrodes 34. Therefore, for example, a summary shear force Fx value that more accurately represents the shear force Fx value of the entire contact surface 28 can be output compared to the shear force Fx value calculated for an arbitrarily selected first electrode 34.

[0418] Similarly, in the data output process of the summary shear force Fy value (refer to Figure 22 ), the output unit 12 calculates the shear force Fy value at each of the plurality of first electrodes 34 within the contact surface 28 based on a portion of the plurality of signals output from the sensor unit 18. The output unit 12 then calculates the aggregated shear force Fy value by performing at least one of calculation of a representative value, calculation of a total value, and calculation of an average value on the shear force Fy values at each of the plurality of first electrodes 34. Therefore, for example, aggregated shear force Fy value data that more accurately represents the shear force Fy value of the entire contact surface 28 can be output compared to the shear force Fy value calculated for an arbitrarily selected single first electrode 34.

[0419] (3) In the data output processing of the moment Mx value (refer to Figure 23 ), the output unit 12 calculates a first and second total pressure value for each of the first electrodes 34 at two locations on the contact surface 28 that are separated in the Y-axis direction. Then, based on the first and second total pressure values, the output unit 12 calculates the value of the moment Mx acting on the tactile sensor 10 about the X-axis as the moment Mx value, and outputs the data of the moment Mx value. Therefore, the controller 104 does not need to calculate the moment Mx value, thereby reducing the burden on the controller 104.

[0420] Similarly, in the data output processing of the moment My value (see Figure 24 ), the output unit 12 calculates a first and second total pressure value for each of the first electrodes 34 at two locations on the contact surface 28 that are separated in the X-axis direction. Then, based on the first and second total pressure values, the output unit 12 calculates the value of the moment My acting on the tactile sensor 10 about the Y-axis as the moment My value, and outputs the moment My value data. Therefore, the controller 104 does not need to calculate the moment My value, thereby reducing the burden on the controller 104.

[0421] (4) In the data output processing of the moment Mz value (refer to Figure 25), the output unit 12 calculates a first aggregate shear force Fx value and a second aggregate shear force Fx value for the first electrodes 34 at two locations separated in the Y-axis direction on the contact surface 28. Then, based on the first aggregate shear force Fx value and the second aggregate shear force Fx value, the output unit 12 calculates the value of the moment Mz acting on the touch sensor 10 about the Z-axis as the moment Mz value, and outputs the moment Mz value data. Therefore, the controller 104 does not need to calculate the moment Mz value, thereby reducing the burden on the controller 104.

[0422] Similarly, in the data output processing of the moment Mz value (see Figure 25 In the second example of FIG. 2 , the output unit 12 calculates a first aggregate shear force Fy value and a second aggregate shear force Fy value for the first electrodes 34 at two locations separated in the X-axis direction on the contact surface 28. The output unit 12 then calculates the value of the moment Mz acting on the touch sensor 10 about the Z-axis as the moment Mz value based on the first aggregate shear force Fy value and the second aggregate shear force Fy value, and outputs the moment Mz value data. Therefore, the controller 104 does not need to calculate the moment Mz value, thereby reducing the burden on the controller 104.

[0423] (5) In the tactile sensor 10 (see Figures 32 to 34 ), the second electrode layer 26 is composed of a single second electrode 36 as a single layer. Therefore, the structure and manufacturing process of the touch sensor 10 can be simplified.

[0424] Furthermore, by detecting the electrostatic capacitance that changes according to the distance between the first electrode 34 and the second electrode 36, pressure can be detected at each position of the plurality of first electrodes 34. Furthermore, since a portion of the plurality of first electrodes 34, namely, the first electrodes 34 arranged along the outer periphery of the second electrode 36, partially overlap with the second electrode 36 in a plan view, by detecting the electrostatic capacitance that changes according to the overlapping area between the first electrode 34 and the second electrode 36, shear force can also be detected at the position of the first electrodes 34 arranged along the outer periphery of the second electrode 36.

[0425] Furthermore, since the number of second electrodes 36 is one, which is smaller than the number of first electrodes 34, multiple first electrodes 34 are matched with one second electrode 36. Therefore, for example, the spacing between the multiple first electrodes 34 can be reduced compared to a case where multiple first electrodes 34 are matched with multiple second electrodes 36 on a one-to-one basis. This ensures the number of first electrodes 34 and, therefore, the resolution of the pressure distribution can be maintained.

[0426] As described above, according to the touch sensor 10 of the second embodiment, shear force can be detected even with a simple structure and manufacturing process, and the resolution of pressure distribution can be ensured.

[0427] (6) The second electrode 36 has a single structure, and therefore, compared to a case where the second electrode 36 is composed of a plurality of components, for example, manufacturing efficiency can be improved and the number of components can be reduced.

[0428] (7) In the second embodiment, the same structure as that of the first embodiment produces the same operational effects as those of the first embodiment.

[0429] Next, a modification of the second embodiment will be described.

[0430] (1) The tactile sensor 10 preferably has the above-described structure. However, the tactile sensor 10 may have a structure other than the above-described structure as long as the first electrode layer 24 has a plurality of first electrodes 34, the second electrode layer 26 has a single second electrode 36, and two or more of the plurality of first electrodes 34 partially overlap with the second electrode 36 when viewed from above.

[0431] (2) The touch sensor 10 includes 36 first electrodes 34 , but the number of the plurality of first electrodes 34 may be any number.

[0432] (3) The number of the second electrode 36 is one, but the number of the second electrode 36 may be any number as long as it is less than the number of the plurality of first electrodes 34 .

[0433] (4) The plurality of first electrodes 34 are preferably arranged in a matrix along the contact surface 28 , but may be arranged in a pattern other than a matrix as long as a desired pressure distribution can be obtained within the contact surface 28 .

[0434] (5) In the second embodiment, the same configuration as that of the first embodiment may also employ the same modified example as that of the first embodiment.

[0435] [Third embodiment]

[0436] Next, a third embodiment will be described.

[0437] (Structure of the Touch Sensor 10)

[0438] Figure 36 1 is a longitudinal sectional view of a touch sensor 10 according to a third embodiment. The touch sensor 10 according to the third embodiment is different from the touch sensor 10 according to the first embodiment (see FIG. Figures 3 to 6 ), the structure of the second electrode layer 26 is changed as follows.

[0439] Figure 37 yes Figure 36The second electrode layer 26 is a top view of the second electrode layer 26. The second electrode layer 26 is composed of a single second electrode 36. The second electrode 36 is formed of, for example, a conductive rubber. The second electrode 36 is formed in a flat plate shape. As an example, the second electrode 36 is formed in a square shape when viewed from above. The second electrode 36 can be connected to the substrate 16 (see Figure 3 ) can also be floated relative to ground.

[0440] A plurality of openings 38 are formed in the second electrode 36. The plurality of openings 38 extend through the second electrode 36 in the thickness direction, i.e., the Z-axis direction. The plurality of openings 38 are arranged in a matrix along the XY plane. Specifically, the plurality of openings 38 are arranged with the X-axis direction as the longitudinal direction and the Y-axis direction as the transverse direction.

[0441] The plurality of openings 38 are of the same shape. As an example, the plurality of openings 38 are formed in a square shape when viewed from above. The number of the plurality of openings 38 is greater than the number of the plurality of first electrodes 34 (see FIG. Figure 4 ) is small. As an example, the plurality of openings 38 are arranged in three in the X-axis direction and three in the Y-axis direction. That is, the number of the plurality of openings 38 is nine. The plurality of openings 38 are arranged at equal intervals in the X-axis direction and the Y-axis direction.

[0442] Figure 38 It shows that Figure 36 FIG1 is a plan view showing a state in which the second electrode 36, the elastic layer 22, and the substrate 16 overlap. The second electrode 36 is sized so as to overlap all of the first electrodes 34 when viewed from above. Specifically, the second electrode 36 is sized so as to accommodate all of the first electrodes 34 within the outer shape of the second electrode 36 when viewed from above.

[0443] The plurality of openings 38 are formed so as to partially overlap with four first electrodes 34 adjacent in the X-axis direction and the Y-axis direction among the plurality of first electrodes 34 in a plan view. Specifically, each opening 38 is located at the center of the four first electrodes 34 in a plan view and partially overlaps with the four first electrodes 34.

[0444] Thus, in the third embodiment, all of the plurality of first electrodes 34 are housed inside the outer portion of the second electrode 36 in a plan view, and all of the plurality of first electrodes 34 partially overlap with the opening 38. The fact that all of the plurality of first electrodes 34 partially overlap with the opening 38 is equivalent to the fact that all of the plurality of first electrodes 34 partially overlap with the second electrode 36.

[0445] In the third embodiment, all of the plurality of first electrodes 34 correspond to an example of “a plurality of partially overlapping electrodes partially overlapping with the second electrode”, and the plurality of signals output from the plurality of first electrodes 34 correspond to an example of “a plurality of partially overlapping electrode signals”.

[0446] exist Figure 36 In the sensor portion 18 of the touch sensor 10 shown, when pressure is applied to the contact surface 28, the distance d between each first electrode 34 and the opening 38 changes, and the capacitance C changes in accordance with the change in distance d. Furthermore, in the sensor portion 18, when shear force is applied to the contact surface 28, the overlapping area A between each first electrode 34 and the opening 38 changes, and the capacitance C changes in accordance with the change in area A.

[0447] The touch sensor 10 of this structure is different from the touch sensor 10 of the first embodiment described above (see Figures 3 to 6 ) are similarly manufactured.

[0448] Figure 39 Yes Figure 36 FIG. 1 is a diagram illustrating an example of moment lengths dx and dy in the tactile sensor 10. Figure 35 , identification numbers 1 to 9 are shown for the plurality of openings 38. When the plurality of openings 38 are identified, the plurality of openings 38 are referred to as openings 38-1 to 38-9, respectively.

[0449] Figure 39 The moment length dx shown is used to calculate the moment Mx around the X-axis (see Figure 11 As an example, the moment length dx corresponds to the distance along the Y-axis direction between the center of the opening 38-3 located away from the center of the contact surface 28 in the Y-axis direction and the center of the contact surface 28.

[0450] Figure 39 The moment length dy shown is used to calculate the moment My around the Y axis (refer to Figure 11 As an example, the moment length dy corresponds to the distance along the X-axis direction between the center of the opening 38-1 located away from the center of the contact surface 28 in the X-axis direction and the center of the contact surface 28.

[0451] In the third embodiment, the calculation of displacements Δx, Δy, and Δz is performed based on the same concept as in the first embodiment. In the third embodiment, the hardware configuration of the tactile sensor 10, output unit 12, and controller 104, as well as the multiple modes of the output unit 12, are the same as in the first embodiment. Furthermore, in the third embodiment, the output processing for data on pressure distribution, grip position, grip force Fz value, translational force ΔFx value, translational force ΔFy value, rotational moment MRx value, and rotational moment MRy value is the same as in the first embodiment.

[0452] On the other hand, in the third embodiment, the processing for outputting the data of the aggregated shear force Fx value, the aggregated shear force Fy value, the moment Mx value, the moment My value, and the moment Mz value is different from that in the first embodiment.

[0453] (Data output processing of the aggregated shear force Fx value)

[0454] In the third embodiment, the output unit 12 calculates a total shear force Fx value for the entire contact surface 28 and outputs the data of the total shear force Fx value. The data output processing of the total shear force Fx value is executed by the CPU 54 of the output unit 12, for example, in the following manner. Figure 21 The flow of the data output process of the aggregated shear force Fx values in the third embodiment will be described.

[0455] In step S31, the CPU 54 acquires data output from the plurality of capacitance detection ICs 44. The data acquired in step S31 is data of a signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculation of the displacement Δx in step S32 described later.

[0456] In step S32, the CPU 54 calculates the displacement Δx for the position of each of the plurality of openings 38 as an example of "a plurality of shear force detection positions" based on the data obtained in step S31. The position of the opening 38 is represented by the position of a specific part of the opening 38, such as the center of the opening 38 or an arbitrary corner. The calculation of the displacement Δx is based on the same idea as the description of the case where Δx, Δy, Δz≠0 in the first embodiment, and is performed using all or part of the signals corresponding to the four first electrodes 34 that partially overlap with one opening 38. When a part of the signal is used, the signals corresponding to at least two electrodes of the four first electrodes 34 that overlap with one opening 38 that have different positions in the x direction are used. At this time, the plurality of openings 38 that are the objects of calculation of the displacement Δx may be all the openings 38 or a part of the openings 38. In addition, in step S32, all or a part of the plurality of signals output from the sensor unit 18 may be used.

[0457] Thus, the displacement Δx calculated for each position of the plurality of openings 38 is proportional to the shear force Fx value at each position of the plurality of openings 38. Therefore, by calculating the displacement Δx for each position of the plurality of openings 38, the shear force Fx value at each position of the plurality of openings 38 is calculated.

[0458] In the data output process of the aggregated shear force Fx value of the third embodiment, the shear force Fx value calculated for each position of the plurality of openings 38 corresponds to an example of “the shear force value for each of the plurality of shear force detection positions within the contact surface”.

[0459] In step S33 , the CPU 54 calculates a summary shear force Fx value by performing at least one of calculation of a representative value, calculation of a total value, and calculation of an average value on the shear force Fx values at the positions of the plurality of openings 38 calculated in step S32 .

[0460] In step S34, the CPU 54 outputs the data of the aggregated shear force Fx value calculated in step S33 to the controller 104. The data of the aggregated shear force Fx value is used for detecting collisions of the workpiece W, detecting contact maintenance between the workpiece W held by the robot hand 108 and other objects, detecting the fit position of the workpiece W at the destination of movement, detecting the completion of insertion of the workpiece W into the destination of movement, detecting the completion of removal of the workpiece W from the destination of movement, and the like.

[0461] (Data output processing of the aggregated shear force Fy value)

[0462] In the third embodiment, the output unit 12 calculates a total shear force Fy value for the entire contact surface 28 and outputs data of the total shear force Fy value. The data output processing of the total shear force Fy value is executed by the CPU 54 of the output unit 12, for example, in the following manner. Figure 22 Next, the flow of the data output process of the aggregated shear force Fy values in the third embodiment will be described.

[0463] In step S41, the CPU 54 acquires data output from the plurality of capacitance detection ICs 44. The data acquired in step S41 is data of a signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculating the displacement Δy in step S42 described later.

[0464] In step S42, the CPU 54 calculates the displacement Δy for the position of each of the plurality of openings 38 as an example of "a plurality of shear force detection positions" based on the data obtained in step S41. The position of the opening 38 is represented by the position of a specific part of the opening 38, such as the center of the opening 38 or an arbitrary corner. The calculation of the displacement Δy is based on the same idea as the description of the case where Δx, Δy, Δz≠0 in the first embodiment, and is performed using all or part of the signals corresponding to the four first electrodes 34 that partially overlap with one opening 38. When a part of the signal is used, the signals corresponding to at least two electrodes that are different in position in the y direction from the four first electrodes 34 that overlap with one opening 38 are used. At this time, the plurality of openings 38 that are the objects of calculation of the displacement Δy may be all the openings 38 or a part of the openings 38. In addition, in step S42, all or a part of the plurality of signals output from the sensor unit 18 may be used.

[0465] Thus, the displacement Δy calculated for each position of the plurality of openings 38 is proportional to the shear force Fy value at each position of the plurality of openings 38. Therefore, by calculating the displacement Δy for each position of the plurality of openings 38, the shear force Fy value at each position of the plurality of openings 38 is calculated.

[0466] In the data output process of the aggregated shear force Fy value of the third embodiment, the shear force Fy value calculated for each position of the plurality of openings 38 corresponds to an example of “the shear force value for each of the plurality of shear force detection positions within the contact surface”.

[0467] In step S43 , the CPU 54 calculates a summary shear force Fy value by performing at least one of calculation of a representative value, calculation of a total value, and calculation of an average value on the shear force Fy values at the positions of the plurality of openings 38 calculated in step S42 .

[0468] In step S44, the CPU 54 outputs the data of the aggregated shear force Fy value calculated in step S43 to the controller 104. The data of the aggregated shear force Fy value is used for detecting collisions of the workpiece W, detecting contact maintenance between the workpiece W held by the robot hand 108 and other objects, detecting the fit position of the workpiece W at the destination of movement, detecting the completion of insertion of the workpiece W into the destination of movement, detecting the completion of removal of the workpiece W from the destination of movement, and the like.

[0469] (Data output processing of torque Mx value)

[0470] In the third embodiment, the output unit 12 calculates a first and second total pressure value for two openings 38 on the contact surface 28 that are spaced apart in the Y-axis direction. In this case, the tactile sensor 10 is assumed to receive a force from the workpiece W at least at the locations of these two openings 38. The output unit 12 then calculates the moment Mx acting on the tactile sensor 10 about the X-axis as the moment Mx value based on the first and second total pressure values, and outputs the moment Mx value data.

[0471] The data output processing of the moment Mx value is executed by the CPU 54 of the output unit 12, for example, in the following manner. Figure 23 The flow of the data output process of the moment Mx value in the third embodiment will be described.

[0472] In step S51, the CPU 54 acquires data output from the plurality of capacitance detection ICs 44. The data acquired in step S51 is data of a signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculation of the displacement Δz in step S52 described later.

[0473] In step S52, the CPU 54 selects the opening 38-4 (see FIG. 1 ) which is spaced apart from the center of the contact surface 28 in the Y-axis direction as an example of the “plurality of first aggregate pressure detection positions” based on the data obtained in step S51. Figure 39 ), the displacement Δz is calculated for each position of the four first electrodes 34 partially overlapping with the opening 38-4. The positions of the four first electrodes 34 are an example of "a plurality of pressure detection positions near the first aggregate pressure detection position". In addition, as an example of a "second aggregate pressure detection position", the opening 38-6 (see FIG. 1 ) which is away from the center of the contact surface 28 in the direction opposite to the opening 38-4 is selected. Figure 39 ), the displacement Δz is calculated for each position of the four first electrodes 34 partially overlapping the opening 38-6. The positions of the four first electrodes 34 are an example of "a plurality of pressure detection positions near the second aggregate pressure detection position."

[0474] Thus, the displacement Δz calculated for each position of the first electrode 34 partially overlapping the plurality of openings 38-4 and 38-6 is proportional to the pressure value at each position of the first electrode 34. Therefore, by calculating the displacement Δz for each position of the first electrode 34, the pressure value at each position of the first electrode 34 is calculated.

[0475] Furthermore, in the data output processing of the moment Mx value in the third embodiment, the pressure value calculated for each position of the first electrode 34 partially overlapping with the opening 38-4 is an example of "the pressure value of each of the plurality of pressure detection positions in the vicinity of the first aggregate pressure detection position among the plurality of pressure detection positions within the contact surface." Furthermore, the pressure value calculated for each position of the first electrode 34 partially overlapping with the opening 38-6 is an example of "the pressure value of each of the plurality of pressure detection positions in the vicinity of the second aggregate pressure detection position among the plurality of pressure detection positions within the contact surface."

[0476] In step S53, the CPU 54 calculates at least one of a representative value, a total value, and an average value for the pressure values at each position of the first electrode 34 that partially overlaps the opening 38-4, and uses the calculated value as a first summary pressure value. Thus, the first summary pressure value is calculated for the opening 38-4. The first summary pressure value corresponds to the vertical load Fz'.

[0477] Similarly, in step S53, the CPU 54 calculates at least one of a representative value, a total value, and an average value for the pressure values at each position of the first electrode 34 that partially overlaps the opening 38-6, and uses the calculated value as a second summary pressure value. Thus, a second summary pressure value is calculated for the opening 38-6. The second summary pressure value corresponds to the vertical load Fz'.

[0478] In steps S52 and S53, similarly to the calculation of the first aggregate pressure value for opening 38-4, first aggregate pressure values may also be calculated for openings 38-1 and 38-7. At least one of a representative value, a total value, and an average value may be calculated for these three first aggregate pressure values, and this calculated value may be used as the final first aggregate pressure value. In this case, the first aggregate pressure detection locations are openings 38-1, 38-4, and 38-7. Furthermore, in steps S52 and S53, similarly to the calculation of the second aggregate pressure value for opening 38-6, second aggregate pressure values may also be calculated for openings 38-3 and 38-9. At least one of a representative value, a total value, and an average value may be calculated for these three second aggregate pressure values, and this calculated value may be used as the final second aggregate pressure value. In this case, the second aggregate pressure detection locations are openings 38-3, 38-6, and 38-9. At this time, it is assumed that the touch sensor 10 receives force from the workpiece W at least at the positions of the six openings 38 .

[0479] In step S54, the CPU 54 calculates the difference between the first total pressure value (vertical load Fz') calculated in step S53 for the group of openings 38-4 or 38-1, 38-4, and 38-7, multiplied by the distance dx, and the second total pressure value (vertical load Fz') calculated in step S53 for the group of openings 38-6 or 38-3, 38-6, and 38-9, multiplied by the distance dx, and uses this difference as the moment Mx value. Thus, the moment Mx value (the magnitude and direction of the moment) is calculated. The moment Mx value is an example of a "first moment value."

[0480] In step S55 , the CPU 54 outputs data of the value of the moment Mx calculated in step S54 to the controller 104 .

[0481] (Data output processing of moment My value)

[0482] In the third embodiment, the output unit 12 calculates a first and second total pressure value for two openings 38 on the contact surface 28 that are spaced apart in the X-axis direction. In this case, the tactile sensor 10 is assumed to receive a force from the workpiece W at least at the locations of these two openings 38. The output unit 12 then calculates the moment My acting on the tactile sensor 10 about the Y-axis as a moment My value based on the first and second total pressure values, and outputs the moment My value data.

[0483] The data output processing of the moment My value is executed by the CPU 54 of the output unit 12, for example, in the following manner. Figure 24, the flow of data output processing of the moment My value in the third embodiment is described.

[0484] In step S61, the CPU 54 acquires data output from the plurality of capacitance detection ICs 44. The data acquired in step S61 is data of a signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculation of the displacement Δx in step S62 described later.

[0485] In step S62, the CPU 54 selects the opening 382 that is away from the center of the contact surface 28 in the X-axis direction as an example of "a plurality of first aggregated pressure detection positions" based on the data obtained in step S61, and calculates the displacement Δz of the position of each of the four first electrodes 34 that partially overlap with the opening 38-2. The position of the four first electrodes 34 is an example of "a plurality of pressure detection positions near the first aggregated pressure detection position". In addition, as an example of "a second aggregated pressure detection position", the opening 38-8 (see FIG. 1 ) that is away from the center of the contact surface 28 in the direction opposite to the opening 38-2 is selected. Figure 39 ), the displacement Δz is calculated for each position of the four first electrodes 34 partially overlapping the second electrode 8. The positions of the four first electrodes 34 are an example of "a plurality of pressure detection positions near the second aggregate pressure detection position."

[0486] Thus, the displacement Δz calculated for each position of the first electrode 34 partially overlapping the plurality of openings 38-2 and 38-8 is proportional to the pressure value at each position of the first electrode 34. Therefore, by calculating the displacement Δz for each position of the first electrode 34, the pressure value at each position of the first electrode 34 is calculated.

[0487] Furthermore, in the data output processing of the moment My value in the third embodiment, the pressure value calculated for each position of the first electrode 34 partially overlapping with the opening 38-2 is an example of "the pressure value of each of the plurality of pressure detection positions in the vicinity of the first pressure detection position among the plurality of pressure detection positions within the contact surface." Furthermore, the pressure value calculated for each position of the first electrode 34 partially overlapping with the opening 38-8 is an example of "the pressure value of each of the plurality of pressure detection positions in the vicinity of the second aggregate pressure detection position among the plurality of pressure detection positions within the contact surface."

[0488] In step S63, the CPU 54 calculates at least one of a representative value, a total value, and an average value for the pressure values of each of the first electrodes 34 that partially overlap with the opening 38-2, and uses the calculated value as the first aggregate pressure value. Thus, the first aggregate pressure value is calculated for the openings 38-1, 38-2, and 38-3. The first aggregate pressure value corresponds to the vertical load Fz'.

[0489] Similarly, in step S63, the CPU 54 calculates at least one of a representative value, a total value, and an average value for the pressure values of each of the first electrodes 34 that partially overlap with the opening 38-8, and uses the calculated value as a second total pressure value. Thus, a second total pressure value is calculated for the opening 38-8. The second total pressure value corresponds to the vertical load Fz'.

[0490] In steps S62 and S63, similarly to the calculation of the first aggregate pressure value for opening 38-2, first aggregate pressure values may also be calculated for openings 38-1 and 38-3. At least one of a representative value, a total value, and an average value may be calculated for these three first aggregate pressure values, and the calculated value may be used as the final first aggregate pressure value. In this case, the first aggregate pressure detection positions are openings 38-1, 38-2, and 38-3. Furthermore, in steps S62 and S63, similarly to the calculation of the second aggregate pressure value for opening 38-8, second aggregate pressure values may also be calculated for openings 38-7 and 38-9. At least one of a representative value, a total value, and an average value may be calculated for these three second aggregate pressure values, and the calculated value may be used as the final second aggregate pressure value. In this case, the second aggregate pressure detection positions are openings 38-7, 38-8, and 38-9. At this time, it is assumed that the touch sensor 10 receives force from the workpiece W at least at the positions of the six openings 38 .

[0491] In step S64, the CPU 54 calculates the difference between the first total pressure value (vertical load Fz') calculated in step S63 for the group of openings 38-2 or 38-1, 38-2, and 38-3, multiplied by the distance dy, and the second total pressure value (vertical load Fz') calculated in step S63 for the group of openings 38-8 or 38-7, 38-8, and 38-9, multiplied by the distance dy, and uses this difference as the moment My value. Thus, the moment My value (the magnitude and direction of the moment) is calculated. The moment My value is an example of a "first moment value."

[0492] In step S65 , the CPU 54 outputs data of the value of the moment My calculated in step S64 to the controller 104 .

[0493] (Data output processing of moment Mz value)

[0494] In the third embodiment, the output unit 12 calculates a first total shear force value and a second total shear force value for each of the two openings 38 spaced apart from the center of the contact surface 28 in the X-axis direction or the Y-axis direction. Furthermore, the output unit 12 calculates the value of the moment Mz acting on the touch sensor 10 about the Z-axis direction based on the first total shear force value and the second total shear force value as the moment Mz value, and outputs the moment Mz value data.

[0495] Below, refer to Figure 25 The flow of the data output process of the moment Mz value in the third embodiment will be described. The data output process of the moment Mz value includes the following first and second examples.

[0496] The data output processing of the moment Mz value in the first example is executed by the CPU 54 of the output unit 12, for example, in the following manner. In step S71, the CPU 54 obtains data output from the plurality of capacitance detection ICs 44. The data obtained in step S71 is the data of the signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculation of the displacement Δy in step S72 described later.

[0497] In step S72, the CPU 54 calculates displacement Δy of each position of the openings 38-2 and 38-8 away from the center of the contact surface 28 in the X-axis direction as an example of the "first shear force detection position" and the "second shear force detection position" based on the data acquired in step S71.

[0498] Thus, the displacement Δy calculated for each of the positions of openings 38-2 and 38-8 is proportional to the shear force Fy value at each position of opening 38. Therefore, by calculating the displacement Δy for each of the positions of openings 38-2 and 38-8, the shear force Fy value at each of the positions of openings 38-2 and 38-8 is calculated. Hereinafter, the shear force Fy value calculated for opening 38-2 in this manner is referred to as the first shear force Fy value, and the shear force Fy value calculated for opening 38-8 is referred to as the second shear force Fy value.

[0499] The first shear force Fy value calculated for the opening 38-2 is an example of the "first shear force value calculated for the first shear force detection position within the contact surface." The second shear force Fy value calculated for the opening 38-8 is an example of the "second shear force value calculated for the second shear force detection position within the contact surface."

[0500] In step S73, the CPU 54 calculates the difference between the value obtained by multiplying the first shear force Fy calculated for the opening 38-2 in step S72 by the distance dy and the value obtained by multiplying the second shear force Fy calculated for the opening 38-8 in step S72 by the distance dy, and uses this difference as the moment Mz value. Thus, the moment Mz value (the magnitude and direction of the moment) is calculated. The moment Mz value is an example of a "second moment value."

[0501] In step S74 , the CPU 54 outputs data of the moment Mz value calculated in step S73 to the controller 104 .

[0502] In addition, in the above-mentioned step S72, the first shear force Fy value is calculated for the opening 38-2, but the first shear force Fy value may be calculated for at least one of the openings 38-1, 38-2, and 38-3. Similarly, in the above-mentioned step S72, the second shear force Fy value is calculated for the opening 38-8, but the second shear force Fy value may be calculated for at least one of the openings 38-7, 38-8, and 38-9.

[0503] The data output processing of the moment Mz value in the second example is executed by the CPU 54 of the output unit 12, for example, in the following manner. In step S71, the CPU 54 obtains data output from the plurality of capacitance detection ICs 44. The data obtained in step S71 is the data of the signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculation of the displacement Δx in step S72 described later.

[0504] In step S72, the CPU 54 calculates displacement Δx of each of the openings 38-4 and 38-6 separated from the center of the contact surface 28 in the Y-axis direction as an example of the "first shear force detection position" and the "second shear force detection position" based on the data acquired in step S71.

[0505] Thus, the displacement Δx calculated for each position of the openings 38-4 and 38-6 is proportional to the shear force Fx value at each position of the opening 38. Therefore, by calculating the displacement Δx for each position of the openings 38-4 and 38-6, the shear force Fx value at each position of the openings 38-4 and 38-6 can be calculated.

[0506] The first shear force Fx value calculated for the opening 38-4 is an example of the "first shear force value calculated for the first shear force detection position within the contact surface." The second shear force Fx value calculated for the opening 38-6 is an example of the "second shear force value calculated for the second shear force detection position within the contact surface."

[0507] In step S73, the CPU 54 calculates the difference between the value obtained by multiplying the first shear force Fx calculated for the opening 38-4 in step S72 by the distance dx and the value obtained by multiplying the second shear force Fx calculated for the opening 38-8 in step S72 by the distance dx, and uses this difference as the moment Mz value. Thus, the moment Mz value (the magnitude and direction of the moment) is calculated. The moment Mz value is an example of a "second moment value."

[0508] In step S74 , the CPU 54 outputs data of the moment Mz value calculated in step S73 to the controller 104 .

[0509] In addition, in the above-mentioned step S72, the first shear force Fx value is calculated for the opening 38-4, but the first shear force Fx value may be calculated for at least one of the openings 38-1, 38-4, and 38-7. Similarly, in the above-mentioned step S72, the second shear force Fx value is calculated for the opening 38-6, but the second shear force Fx value may be calculated for at least the opening 38 among the openings 38-3, 38-6, and 38-9.

[0510] Next, the operation and effects of the third embodiment will be described.

[0511] (1) In the data output processing of the summary shear force Fx value (refer to Figure 21 ), the output unit 12 calculates one aggregated shear force Fx value for the entire contact surface 28 and outputs data of the aggregated shear force Fx value. Therefore, there is no need for the controller 104 to calculate the aggregated shear force Fx value, and thus the burden on the controller 104 can be reduced. In addition, for example, compared with the case of outputting data of a shear force distribution representing the shear force Fx values of each of a plurality of shear force detection positions within the contact surface 28, the amount of data communication between the output unit 12 and the controller 104 can be reduced in accordance with the aggregation of the shear force Fx values. Thus, the response speed of the output unit 12 and the controller 104 can be improved, and thus the controller 104 that controls the robot 102 having a pair of gripping parts 114 can be efficiently provided with tactile information that is beneficial to the control of the robot 102.

[0512] Similarly, in the data output process of the summary shear force Fy value (refer to Figure 22), the output unit 12 calculates one aggregated shear force Fy value for the entire contact surface 28 and outputs data of the aggregated shear force Fy value. Therefore, there is no need for the controller 104 to calculate the aggregated shear force Fy value, and thus the burden on the controller 104 can be reduced. In addition, for example, compared with the case of outputting data of a shear force distribution representing the shear force Fx values of each of a plurality of shear force detection positions within the contact surface 28, the amount of data communication between the output unit 12 and the controller 104 can be reduced in accordance with the aggregation of the shear force Fx values. Thus, the response speed of the output unit 12 and the controller 104 can be improved, and thus the controller 104 that controls the robot 102 having a pair of gripping parts 114 can be efficiently provided with tactile information that is beneficial to the control of the robot 102.

[0513] (2) In the data output processing of the summary shear force Fx value (refer to Figure 21 ), the output unit 12 calculates the shear force Fx value at each of the plurality of openings 38 within the contact surface 28 based on all or part of the plurality of signals output from the sensor unit 18. The output unit 12 then calculates a summary shear force Fx value by performing at least one of calculation of a representative value, a total value, and an average value on the shear force Fx values at each of the plurality of openings 38. Therefore, for example, a summary shear force Fx value that more accurately represents the shear force Fx value of the entire contact surface 28 can be output compared to the shear force Fx value calculated for an arbitrarily selected single opening 38.

[0514] Similarly, in the data output process of the summary shear force Fy value (refer to Figure 22 ), the output unit 12 calculates the shear force Fy value at each of the plurality of openings 38 within the contact surface 28 based on all or part of the plurality of signals output from the sensor unit 18. The output unit 12 then calculates a summary shear force Fy value by performing at least one of calculation of a representative value, a total value, and an average value on the shear force Fy values at each of the plurality of openings 38. Therefore, for example, a summary shear force Fy value that more accurately represents the shear force Fy value of the entire contact surface 28 can be output compared to the shear force Fy value calculated for any one of the arbitrarily selected openings 38.

[0515] (3) In the data output processing of the moment Mx value (refer to Figure 23 ), the output unit 12 calculates a first and second total pressure value for each of the openings 38 at two locations on the contact surface 28 that are separated in the Y-axis direction. Then, based on the first and second total pressure values, the output unit 12 calculates the value of the moment Mx acting on the tactile sensor 10 about the X-axis as the moment Mx value, and outputs the moment Mx value data. Therefore, the controller 104 does not need to calculate the moment Mx value, thereby reducing the burden on the controller 104.

[0516] Similarly, in the data output processing of the moment My value (see Figure 24 ), the output unit 12 calculates a first and second total pressure value for each of the openings 38 at two locations on the contact surface 28 that are separated in the X-axis direction. Then, based on the first and second total pressure values, the output unit 12 calculates the value of the moment My acting on the tactile sensor 10 about the Y-axis as the moment My value, and outputs the moment My value data. Therefore, the controller 104 does not need to calculate the moment My value, thereby reducing the burden on the controller 104.

[0517] (4) In the data output processing of the moment Mz value (refer to Figure 25 In the first example of FIG. 2 , the output unit 12 calculates the first and second shear force Fy values for the openings 38 at two locations on the contact surface 28 that are separated in the X-axis direction. Furthermore, the output unit 12 calculates the value of the moment Mz acting on the touch sensor 10 about the Z-axis direction based on the first and second shear force Fy values as the moment Mz value, and outputs the moment Mz value data. Therefore, the controller 104 does not need to calculate the moment Mz value, thereby reducing the burden on the controller 104.

[0518] Similarly, in the data output processing of the moment Mz value (see Figure 25 In the second example of FIG. 2 , the output unit 12 calculates the first shear force Fx value and the second shear force Fx value for each of the openings 38 at two locations on the contact surface 28 that are separated in the Y-axis direction. Then, based on the first shear force Fx value and the second shear force Fx value, the output unit 12 calculates the moment Mz acting on the touch sensor 10 about the Z-axis as the moment Mz value, and outputs the moment Mz value data. Therefore, the controller 104 does not need to calculate the moment Mz value, thereby reducing the burden on the controller 104.

[0519] (5) In the tactile sensor 10 (see Figures 36 to 38 ), the second electrode layer 26 is composed of a single second electrode 36 as a single layer. Therefore, the structure and manufacturing process of the touch sensor 10 can be simplified.

[0520] Furthermore, by detecting the electrostatic capacitance that changes depending on the distance between the first electrode 34 and the opening 38, pressure can be detected at each of the plurality of first electrodes 34. Furthermore, since each opening 38 partially overlaps with the four first electrodes 34 adjacent in the X-axis and Y-axis directions, shear force can also be detected at each opening 38 by detecting the electrostatic capacitance that changes according to the overlapping area between the four first electrodes 34 and the plurality of openings 38.

[0521] Furthermore, since the number of openings 38 formed in the second electrode 36 is smaller than the number of the plurality of first electrodes 34, the plurality of first electrodes 34 are matched with one opening 38. Therefore, for example, the intervals between the plurality of first electrodes 34 can be reduced compared to a case where the plurality of first electrodes 34 are matched with the plurality of openings 38 on a one-to-one basis. Thus, the number of the plurality of first electrodes 34 can be ensured, and thus the resolution of the pressure distribution can be maintained.

[0522] As described above, according to the touch sensor 10 of the third embodiment, it is possible to detect shear force even with a simple structure and manufacturing process, and to ensure the resolution of pressure distribution.

[0523] Furthermore, since the second electrode 36 has a single structure having a plurality of openings 38 , manufacturing efficiency can be improved and the number of components can be reduced, compared to, for example, a case where the second electrode 36 is formed of a plurality of components.

[0524] Next, a modification of the third embodiment will be described.

[0525] (1) The tactile sensor 10 preferably has the above-described structure. However, the tactile sensor 10 may have a structure other than the above-described structure as long as the first electrode layer 24 has a plurality of first electrodes 34, the second electrode layer 26 has a single second electrode 36, and two or more of the plurality of first electrodes 34 partially overlap with the second electrode 36 when viewed from above.

[0526] (2) The touch sensor 10 includes 36 first electrodes 34 , but the number of the plurality of first electrodes 34 may be any number.

[0527] (3) The second electrode 36 has nine openings 38 , but the number of the plurality of openings 38 may be any number as long as the number of the openings 38 is smaller than the number of the plurality of first electrodes 34 .

[0528] (4) The plurality of first electrodes 34 are preferably arranged in a matrix along the contact surface 28 , but may be arranged in a pattern other than a matrix as long as a desired pressure distribution can be obtained within the contact surface 28 .

[0529] (5) In the third embodiment, regarding the same configuration as that of the first embodiment, the same modified example as that of the first embodiment may be adopted.

[0530] [Fourth embodiment]

[0531] Next, a fourth embodiment will be described.

[0532] (Structure of the Touch Sensor 10)

[0533] Figure 401 is a longitudinal sectional view of a touch sensor 10 according to a fourth embodiment. The touch sensor 10 according to the fourth embodiment is different from the touch sensor 10 according to the first embodiment (see FIG. 1 ). Figures 3 to 6 ), the structure of the second electrode layer 26 is changed as follows.

[0534] Figure 41 yes Figure 40 FIG2 is a top view of the second electrode layer 26. The second electrode layer 26 is composed of a single second electrode 36. The second electrode 36 is formed in a flat plate shape. The second electrode 36 can be connected to the ground of the substrate 16 or float relative to the ground. The second electrode 36 is formed of, for example, conductive rubber.

[0535] One opening 38 is formed in the second electrode 36. As an example, the opening 38 is formed in the center of the second electrode 36. The second electrode 36 is formed in a square shape in a plan view, and the opening 38 is also formed in a square shape in a plan view.

[0536] Figure 42 It shows that Figure 40 FIG4 is a top view of a state where the second electrode 36, the elastic layer 22, and the substrate 16 overlap. As an example, the number of the plurality of first electrodes 34 is 36, whereas one opening 38 is formed in the second electrode 36. Therefore, in the fourth embodiment, the number of openings 38 formed in the second electrode 36 is less than the number of the plurality of first electrodes 34.

[0537] The second electrode 36 has a size that overlaps all of the first electrodes 34 in a plan view. Specifically, the second electrode 36 has a size that allows all of the first electrodes 34 to fit inside the outer shape of the second electrode 36 in a plan view.

[0538] As an example, the opening 38 is formed in a square shape that is smaller than the smallest square that would accommodate all four adjacent central first electrodes 34 in the X-axis and Y-axis directions when viewed from above. The opening 38 is located at the center of the four central first electrodes 34 when viewed from above, partially overlapping with these four first electrodes 34. Thus, the four central first electrodes 34 among the plurality of first electrodes 34 partially overlap with the second electrode 36 when viewed from above, while the first electrodes 34 other than the four central first electrodes 34 among the plurality of first electrodes 34 entirely overlap with the second electrode 36.

[0539] In the second embodiment, the central four first electrodes 34 among the plurality of first electrodes 34 correspond to an example of “plurality of partially overlapping electrodes partially overlapping with the second electrode”, and the plurality of signals output from the central four first electrodes correspond to an example of “plurality of partially overlapping electrode signals”.

[0540] The touch sensor 10 of this structure is different from the touch sensor 10 of the first embodiment described above (see Figures 3 to 6 ) are similarly manufactured.

[0541] In the fourth embodiment, the calculation of displacements Δx, Δy, and Δz is performed based on the same concept as in the first embodiment. In the fourth embodiment, the hardware configuration of the tactile sensor 10, output unit 12, and controller 104, as well as the multiple modes of the output unit 12, are the same as in the first embodiment. Furthermore, in the fourth embodiment, the output processing for data on pressure distribution, grip position, grip force Fz value, translational force ΔFx value, translational force ΔFy value, rotational moment MRx value, and rotational moment MRy value is the same as in the first embodiment.

[0542] On the other hand, the fourth embodiment is different from the first embodiment in the processing of outputting the data of the aggregated shear force Fx value and the aggregated shear force Fy value.

[0543] (Data output processing of the aggregated shear force Fx value)

[0544] In the fourth embodiment, the output unit 12 calculates a total shear force Fx value for the entire contact surface 28 and outputs the data of the total shear force Fx value. The data output processing of the total shear force Fx value is executed by the CPU 54 of the output unit 12, for example, in the following manner. Figure 21 The flow of data output processing of the aggregated shear force Fx values in the fourth embodiment will be described.

[0545] In step S31, the CPU 54 acquires data output from the plurality of capacitance detection ICs 44. The data acquired in step S31 is data of a signal output from the sensor unit 18 corresponding to the first electrode 34 to be used for calculation of the displacement Δx in step S32 described later.

[0546] In step S32, the CPU 54 calculates the displacement Δx of the position of the opening 38 based on the data acquired in step S31. The calculation of the displacement Δx is performed using all or part of the signals corresponding to the four first electrodes 34 that partially overlap with a single opening 38, as described in the first embodiment for the case where Δx, Δy, and Δz ≠ 0. When using part of the signals, the signals corresponding to at least two of the four first electrodes 34 that overlap with a single opening 38, but are located at different positions in the x-direction, are used. In step S32, the displacement Δx of the position of the opening 38 is calculated based on a portion of the multiple signals output from the sensor unit 18.

[0547] Thus, the displacement Δx calculated for the position of the opening 38 is proportional to the shear force Fx value at the position of the opening 38. Therefore, by calculating the displacement Δx for the position of the opening 38, the shear force Fx value at the position of the opening 38 is calculated.

[0548] In step S33, the CPU 54 sets the shear force Fx value at the position of the opening 38 calculated in step S32 as one total shear force Fx value calculated for the entire contact surface 28. Thus, one total shear force Fx value is calculated.

[0549] In step S34, the CPU 54 outputs the data of the aggregated shear force Fx value calculated in step S33 to the controller 104. This aggregated shear force Fx value data is used for collision detection of the workpiece W, detection of contact maintenance between the workpiece W and another object by the robot hand 108, detection of the fitting position of the workpiece W at the destination of movement, detection of completion of insertion of the workpiece W into the destination of movement, detection of completion of removal of the workpiece W from the destination of movement, and the like.

[0550] (Data output processing of the aggregated shear force Fy value)

[0551] In the fourth embodiment, the output unit 12 calculates a total shear force Fy value for the entire contact surface 28 and outputs the data of the total shear force Fy value. The data output processing of the total shear force Fy value is executed by the CPU 54 of the output unit 12, for example, in the following manner. Figure 22 Next, the flow of the data output processing of the aggregated shear force Fy values in the fourth embodiment will be described.

[0552] In step S41, the CPU 54 obtains data output from the plurality of capacitance detection ICs 44. The data obtained in step S41 is necessary for calculating the displacement Δy in step S42 described later, and is, for example, data of signals output from the sensor unit 18 corresponding to each of the four central first electrodes 34.

[0553] In step S42, the CPU 54 calculates the displacement Δy relative to the position of the opening 38 based on the data acquired in step S41. The calculation of the displacement Δy is performed using all or part of the signals corresponding to the four first electrodes 34 partially overlapping a single opening 38, as described in the first embodiment for the case where Δx, Δy, and Δz ≠ 0. When using part of the signals, the signals corresponding to at least two electrodes of the four first electrodes 34 overlapping a single opening 38 that are located at different positions in the y direction are used. In step S42, the displacement Δy relative to the position of the opening 38 is calculated based on a portion of the multiple signals output from the sensor unit 18.

[0554] Thus, the displacement Δy calculated for the position of the opening 38 is proportional to the shear force Fy value at the position of the opening 38. Therefore, by calculating the displacement Δy for the position of the opening 38, the shear force Fy value at the position of the opening 38 is calculated.

[0555] In step S43, the CPU 54 sets the shear force Fy value at the position of the opening 38 calculated in step S42 as one total shear force Fy value calculated for the entire contact surface 28. Thus, one total shear force Fy value is calculated.

[0556] In step S44, the CPU 54 outputs the data of the aggregated shear force Fy value calculated in step S43 to the controller 104. The data of the aggregated shear force Fy value is used for detecting collisions of the workpiece W, detecting contact maintenance between the workpiece W held by the robot hand 108 and other objects, detecting the fit position of the workpiece W at the destination of movement, detecting the completion of insertion of the workpiece W into the destination of movement, detecting the completion of removal of the workpiece W from the destination of movement, and the like.

[0557] Next, the operation and effects of the fourth embodiment will be described.

[0558] (1) In the data output processing of the summary shear force Fx value (refer to Figure 21 ), the output unit 12 calculates a summary shear force Fx value for the entire contact surface 28 and outputs data of the summary shear force Fx value. Therefore, there is no need for the controller 104 to calculate the summary shear force Fx value, so the burden on the controller 104 can be reduced. In addition, for example, compared with the case of outputting data of a shear force distribution representing the shear force Fx values of each of a plurality of pressure detection positions within the contact surface 28, the amount of data communication between the output unit 12 and the controller 104 can be reduced in accordance with the summary of the shear force Fx values. As a result, the response speed of the output unit 12 and the controller 104 can be improved, so that the controller 104 that controls the robot 102 having a pair of gripping parts 114 can efficiently provide tactile information that is beneficial to the control of the robot 102.

[0559] Similarly, in the data output process of the summary shear force Fy value (refer to Figure 22), the output unit 12 calculates one aggregated shear force Fy value for the entire contact surface 28 and outputs data of the aggregated shear force Fy value. Therefore, there is no need for the controller 104 to calculate the aggregated shear force Fy value, and thus the burden on the controller 104 can be reduced. In addition, for example, compared with the case of outputting data of a shear force distribution representing the shear force Fx values of each of a plurality of pressure detection positions within the contact surface 28, the amount of data communication between the output unit 12 and the controller 104 can be reduced in accordance with the aggregation of the shear force Fx values. Thus, the response speed of the output unit 12 and the controller 104 can be improved, and thus the controller 104 that controls the robot 102 having a pair of gripping parts 114 can be efficiently provided with tactile information that is beneficial to the control of the robot 102.

[0560] (2) In the tactile sensor 10 (see Figures 40 to 42 ), the second electrode layer 26 is composed of a single second electrode 36 as a single layer. Therefore, the structure and manufacturing process of the touch sensor 10 can be simplified.

[0561] Furthermore, by detecting the electrostatic capacitance that changes depending on the distance between the first electrode 34 and the second electrode 36, pressure can be detected at each of the plurality of first electrodes 34. Furthermore, since the four central first electrodes 34 of the plurality of first electrodes 34 partially overlap with the opening 38 formed in the center of the second electrode 36 when viewed from above, shear force can also be detected at the location of the opening 38 by detecting the electrostatic capacitance that changes depending on the overlapping area between the four first electrodes 34 and the second electrode 36.

[0562] Furthermore, since the number of openings 38 formed in the second electrode 36 is one, which is smaller than the number of the plurality of first electrodes 34, the plurality of first electrodes 34 are matched with one opening 38. Therefore, for example, the intervals between the plurality of first electrodes 34 can be reduced compared to a case where the plurality of first electrodes 34 are matched with the plurality of openings 38 on a one-to-one basis. Thus, the number of the plurality of first electrodes 34 can be ensured, and thus the resolution of the pressure distribution can be maintained.

[0563] As described above, according to the touch sensor 10 of the fourth embodiment, it is possible to detect shear force even with a simple structure and manufacturing process, and to ensure the resolution of pressure distribution.

[0564] (3) The second electrode 36 has a single structure, and therefore, compared to a case where the second electrode 36 is composed of a plurality of components, for example, manufacturing efficiency can be improved and the number of components can be reduced.

[0565] (4) In the fourth embodiment, the same structure as that of the first embodiment produces the same operational effects as those of the first embodiment.

[0566] Next, a modification of the fourth embodiment will be described.

[0567] (1) The touch sensor 10 preferably has the above-described structure. However, the touch sensor 10 may have a structure other than the above-described structure as long as the first electrode layer 24 includes a plurality of first electrodes 34, the second electrode layer 26 includes a single second electrode 36, and two or more of the plurality of first electrodes 34 partially overlap with the second electrode 36 when viewed from above.

[0568] (2) The touch sensor 10 includes 36 first electrodes 34 , but the number of the plurality of first electrodes 34 may be any number.

[0569] (3) Although one opening 38 is formed in the second electrode 36 , the number of the openings 38 may be any number as long as the number of the openings 38 is smaller than the number of the plurality of first electrodes 34 .

[0570] (4) The plurality of first electrodes 34 are preferably arranged in a matrix along the contact surface 28 , but may be arranged in a pattern other than a matrix as long as a desired pressure distribution can be obtained within the contact surface 28 .

[0571] (5) In the fourth embodiment, the same configuration as that of the first embodiment may also employ the same modified example as that of the first embodiment.

[0572] While the first to fourth embodiments of the technology disclosed in the present application have been described above, the technology disclosed in the present application is not limited to the above-described contents and can of course be implemented with various modifications other than those described above without departing from the spirit and scope of the technology.

[0573] It should be noted that the entire disclosure of Japanese Patent Application No. 2020-140394 is incorporated into this specification by reference.

[0574] In addition, all documents, patent applications, and technical standards described in this specification are incorporated by reference into this specification to the same extent as if each document, patent application, or technical standard was specifically and individually described.

[0575] Furthermore, regarding one embodiment of the technology disclosed in the present application described above, the following supplementary notes are further disclosed.

[0576] (Note 1)

[0577] A tactile sensing system comprising:

[0578] a pair of tactile sensors provided on opposing surfaces of a pair of gripping parts provided on the robot, respectively, and contacting a workpiece gripped by the pair of gripping parts; and

[0579] an output portion electrically connected to the pair of tactile sensors,

[0580] Each of the tactile sensors includes a capacitance sensor portion having a contact surface that contacts the workpiece and a laminated structure in which an elastic layer and a first electrode layer and a second electrode layer located on both sides of the elastic layer are laminated in a normal direction to the contact surface.

[0581] The first electrode layer has a plurality of first electrodes,

[0582] The second electrode layer has one or more second electrodes,

[0583] Two or more of the plurality of first electrodes are a plurality of partially overlapping electrodes that partially overlap with the second electrode when viewed in the normal direction.

[0584] The sensor unit outputs a plurality of signals corresponding to the plurality of first electrodes, respectively.

[0585] The output unit has at least one of an action content judgment mode and a request instruction response mode. In the action content judgment mode, the action content of the robot is judged, and at least one of the pressure distribution data, the summary pressure value data, the summary shear force value data, the first torque value data, and the second torque value data is selectively output according to the action content. In the request instruction response mode, at least one of the pressure distribution data, the summary pressure value data, the summary shear force value data, the first torque value data, and the second torque value data is selectively output according to a request instruction from a controller that controls the robot.

[0586] The aggregate pressure value data is data calculated by the output unit performing at least one of calculation of a representative value, calculation of a total value, and calculation of an average value for the pressure values at each of the plurality of pressure detection positions.

[0587] The data of the first torque value is as follows: the output unit calculates the first summary pressure value by performing at least any one of calculation of a representative value, calculation of a total value, and calculation of an average value on the pressure values of each of the plurality of first summary pressure detection positions among the plurality of pressure detection positions, calculates the second summary pressure value by performing at least any one of calculation of a representative value, calculation of a total value, and calculation of an average value on the pressure values of each of the plurality of second summary pressure detection positions among the plurality of pressure detection positions, and calculates, based on the first summary pressure value and the second summary pressure value, a value of a torque acting on the tactile sensor around a direction orthogonal to the normal direction and the arrangement direction of the first summary pressure detection positions and the second summary pressure detection positions as the first torque value,

[0588] The data of the second torque value is as follows: the output unit calculates a first aggregate shear force value for multiple first shear force detection positions within the contact surface based on all or part of the multiple local overlapping electrode signals, and calculates a second aggregate shear force value for multiple second shear force detection positions within the contact surface, and calculates the value of the torque acting on the tactile sensor around the normal direction based on the first aggregate shear force value and the second aggregate shear force value as the second torque value.

[0589] (Note 2)

[0590] The tactile sensing system according to Supplementary Note 1, wherein:

[0591] At least a portion of the output unit is provided on at least any one of a robot hand possessed by the robot, a robot arm possessed by the robot, a wrist joint connecting the robot arm and the robot arm, an input unit of a controller that controls the robot, and a program component that is provided on the controller and executes program processing.

[0592] (Note 3)

[0593] A tactile sensing system comprising:

[0594] a pair of tactile sensors, the pair of tactile sensors being provided on opposing surfaces of a pair of gripping parts provided on the robot, respectively, and being in contact with a workpiece gripped by the pair of gripping parts; and

[0595] an output portion electrically connected to the pair of tactile sensors,

[0596] Each of the tactile sensors includes a capacitance sensor portion having a contact surface that contacts the workpiece and a laminated structure in which an elastic layer and a first electrode layer and a second electrode layer located on both sides of the elastic layer are laminated in a normal direction to the contact surface.

[0597] The first electrode layer has a plurality of first electrodes,

[0598] The second electrode layer has one or more second electrodes,

[0599] At least a portion of the plurality of first electrodes entirely or partially overlaps with the second electrode when viewed in the normal direction.

[0600] The sensor unit outputs a plurality of signals corresponding to the plurality of first electrodes, respectively.

[0601] The output unit outputs data related to pressure based on all or part of the plurality of signals,

[0602] Furthermore, at least a portion of the output unit is arranged on at least any one of a robot hand possessed by the robot, a robot arm possessed by the robot, a wrist joint connecting the robot arm and the robot arm, an input unit of a controller that controls the robot, and a program component that is arranged on the controller and executes program processing.

Claims

1. A tactile sensing system comprising: a pair of tactile sensors, the pair of tactile sensors being provided on opposing surfaces of a pair of gripping parts provided on the robot, and being in contact with a workpiece gripped by the pair of gripping parts; and an output portion electrically connected to the pair of tactile sensors, Each of the tactile sensors includes a capacitance sensor portion having a contact surface that contacts the workpiece and a laminated structure in which an elastic layer and a first electrode layer and a second electrode layer located on both sides of the elastic layer are laminated in a normal direction to the contact surface. The first electrode layer has a plurality of first electrodes, The second electrode layer has one or more second electrodes, Two or more of the plurality of first electrodes are a plurality of partially overlapping electrodes that partially overlap with the second electrode when viewed in the normal direction. The sensor unit outputs a plurality of signals corresponding to the plurality of first electrodes, respectively. The output unit calculates the pressure values of each of the multiple pressure detection positions within the contact surface based on all or part of the multiple signals, and calculates a summary shear force value for the entire contact surface based on all or part of the multiple local overlapping electrode signals corresponding to the multiple local overlapping electrodes in the multiple signals, and outputs data of the summary shear force value and data representing the pressure distribution of the pressure values of each of the multiple pressure detection positions. The output unit calculates a first aggregated pressure value by performing at least any one of representative value calculation, total value calculation, and average value calculation on the pressure values of each of the multiple pressure detection positions near the first aggregated pressure detection position among the multiple pressure detection positions, and calculates a second aggregated pressure value by performing at least any one of representative value calculation, total value calculation, and average value calculation on the pressure values of each of the multiple pressure detection positions near the second aggregated pressure detection position among the multiple pressure detection positions. Based on the first aggregated pressure value and the second aggregated pressure value, the output unit calculates a value of a moment acting on the tactile sensor in a direction orthogonal to both the normal direction and the arrangement direction of the first aggregated pressure detection position and the second aggregated pressure detection position as a first moment value, and outputs data of the first moment value.

2. A tactile sensing system comprising: a pair of tactile sensors, the pair of tactile sensors being provided on opposing surfaces of a pair of gripping parts provided on the robot, and being in contact with a workpiece gripped by the pair of gripping parts; and an output portion electrically connected to the pair of tactile sensors, Each of the tactile sensors includes a capacitance sensor portion having a contact surface that contacts the workpiece and a laminated structure in which an elastic layer and a first electrode layer and a second electrode layer located on both sides of the elastic layer are laminated in a normal direction to the contact surface. The first electrode layer has a plurality of first electrodes, The second electrode layer has one or more second electrodes, Two or more of the plurality of first electrodes are a plurality of partially overlapping electrodes that partially overlap with the second electrode when viewed in the normal direction. The sensor unit outputs a plurality of signals corresponding to the plurality of first electrodes, respectively. The output unit calculates the pressure values of each of the multiple pressure detection positions within the contact surface based on all or part of the multiple signals, and calculates a summary shear force value for the entire contact surface based on all or part of the multiple local overlapping electrode signals corresponding to the multiple local overlapping electrodes in the multiple signals, and outputs data of the summary shear force value and data representing the pressure distribution of the pressure values of each of the multiple pressure detection positions. The output unit has at least one of an action content judgment mode and a request instruction response mode. In the action content judgment mode, the action content of the robot is judged, and at least one of the pressure distribution data, the summary pressure value data, the summary shear force value data, the first torque value data, and the second torque value data is selectively output according to the action content. In the request instruction response mode, at least one of the pressure distribution data, the summary pressure value data, the summary shear force value data, the first torque value data, and the second torque value data is selectively output according to a request instruction from a controller that controls the robot. The aggregate pressure value data is data calculated by the output unit performing at least one of calculation of a representative value, calculation of a total value, and calculation of an average value on the pressure values of each of the plurality of pressure detection positions. The data of the first torque value is as follows: the output unit calculates the first aggregated pressure value by performing at least any one of calculation of a representative value, calculation of a total value, and calculation of an average value on the pressure values of each of the plurality of first aggregated pressure detection positions among the plurality of pressure detection positions, calculates the second aggregated pressure value by performing at least any one of calculation of a representative value, calculation of a total value, and calculation of an average value on the pressure values of each of the plurality of second aggregated pressure detection positions among the plurality of pressure detection positions, and calculates, based on the first aggregated pressure value and the second aggregated pressure value, a value of a torque acting on the tactile sensor in a direction orthogonal to both the normal direction and the arrangement direction of the first aggregated pressure detection positions and the second aggregated pressure detection positions as the first torque value, The data of the second torque value is as follows: the output unit calculates a first aggregate shear force value for multiple first shear force detection positions within the contact surface based on all or part of the multiple local overlapping electrode signals, and calculates a second aggregate shear force value for multiple second shear force detection positions within the contact surface, and calculates the value of the torque acting on the tactile sensor around the normal direction based on the first aggregate shear force value and the second aggregate shear force value as the second torque value.

3. The tactile sensing system according to claim 1 or 2, wherein: The output unit determines a gripping position of the workpiece within the contact surface based on the pressure values of each of the plurality of pressure detection positions, and outputs data of the gripping position.

4. The tactile sensing system according to claim 1 or 2, wherein: The output unit calculates a summary pressure value by performing at least one of calculation of a representative value, calculation of a total value, and calculation of an average value on the pressure values of each of the plurality of pressure detection positions, and outputs data of the summary pressure value.

5. The tactile sensing system according to claim 1 or 2, wherein: The output unit calculates a sum of the aggregated shear force values respectively calculated for the pair of tactile sensors as a translational force value, and outputs data of the translational force value.

6. The tactile sensing system according to claim 1 or 2, wherein: The output unit calculates a value of a rotational moment acting on the pair of tactile sensors in a direction orthogonal to both the normal direction and the direction of the total shear force based on the difference between the total shear force values calculated for the pair of tactile sensors, and outputs data of the rotational moment value.

7. The tactile sensing system according to claim 1 or 2, wherein: The output unit has a collision detection mode that outputs collision detection data in the following situations: a situation where at least a specified number of pressure values among the respective pressure values of the multiple pressure detection positions exceed a threshold value; a situation where an aggregate pressure value calculated by performing at least any one of representative value calculation, total value calculation, and average value calculation on the pressure values of the multiple pressure detection positions exceeds a threshold value; or a situation where the aggregate shear force value exceeds a threshold value.

8. The tactile sensing system according to claim 1 or 2, wherein: The output unit calculates the shear force value of each of the multiple shear force detection positions within the contact surface based on all or part of the multiple local overlapping electrode signals, and performs at least any one of representative value calculation, total value calculation and average value calculation on the shear force value of each of the multiple shear force detection positions, thereby calculating the aggregated shear force value.

9. The tactile sensing system according to claim 8, wherein: The output unit calculates the respective shear force values based on the plurality of signals corresponding to the plurality of first electrodes including at least one partially overlapping electrode, while eliminating the influence of pressure on the plurality of signals.

10. The tactile sensing system according to claim 1 or 2, wherein: The output unit calculates a first shear force value for the first shear force detection position within the contact surface based on all or part of the multiple locally overlapping electrode signals, calculates a second shear force value for the second shear force detection position within the contact surface, calculates the value of the moment acting on the tactile sensor around the normal direction based on the first shear force value and the second shear force value as a second moment value, and outputs data of the second moment value.

11. The tactile sensing system according to claim 1 or 2, wherein: The second electrode layer is composed of one or more second electrodes as a single layer, The number of one or more openings formed in one second electrode or the number of one or more island portions formed by one or more second electrodes is smaller than the number of the plurality of first electrodes.

12. The tactile sensing system according to claim 11, wherein: The second electrode layer is composed of a plurality of the second electrodes forming a plurality of the island portions. Each of the plurality of second electrodes is formed so as to partially overlap with an adjacent first electrode among the plurality of first electrodes when viewed in the normal direction.

13. The tactile sensing system according to claim 11, wherein: The second electrode layer is composed of one second electrode having a plurality of openings formed therein. Each of the plurality of openings is formed so as to partially overlap with an adjacent first electrode among the plurality of first electrodes when viewed in the normal direction.

14. The tactile sensing system according to claim 11, wherein: The second electrode layer is composed of one second electrode forming one island portion. Each of the plurality of partially overlapping electrodes is formed so as to partially overlap with one of the second electrodes when viewed in the normal direction.

15. The tactile sensing system according to claim 11, wherein: The second electrode layer is composed of one second electrode having one opening formed therein. Each of the plurality of partially overlapping electrodes is formed so as to partially overlap with one of the openings when viewed in the normal direction.

16. The tactile sensing system according to claim 1 or 2, wherein: The tactile sensor and the output unit are unitized.

17. The tactile sensing system according to claim 1 or 2, wherein: At least a portion of the output unit is provided on at least any one of a robot hand possessed by the robot, a robot arm possessed by the robot, a wrist joint connecting the robot arm and the robot hand, an input unit of a controller that controls the robot, and a program component that is provided on the controller and executes program processing.

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