Method, device and terminal equipment for obtaining film parameters

Abstract

The present application discloses a method, an acquisition device, and a terminal device for obtaining film parameters. The method includes: obtaining a functional relationship of the film, wherein the independent variables of the functional relationship include the thickness and optical constants of each layer of the film, and the dependent variable includes the polarization information of the reflected light of the film; substituting the estimated values ​​of the thickness and optical constants of each layer of the film into the functional relationship to obtain a simulated value of the polarization information of the reflected light of the film, wherein the estimated values ​​of the thickness of each layer of at least two layers of the film meet a preset ratio; when the difference between the simulated value of the polarization information of the reflected light of the film and the experimental value of the polarization information of the reflected light of the film meets a preset condition, the estimated value of the thickness of each layer of the film is used as the actual value of the thickness, and the estimated value of the optical constant of each layer of the film is used as the actual value of the optical constant. The present application solution obtains the actual value of the optical constant and thickness of each layer of the film by fitting the estimated value of the thickness that meets the preset ratio, which can make the calculated actual value of the thickness and optical constant more accurate.

Description

Technical Field

[0001] The present application belongs to the field of thin film measurement technology, and in particular relates to a method for obtaining thin film parameters, an obtaining device, a terminal device, and a computer-readable storage medium. Background Art

[0002] Ellipsometry is a surface-sensitive, non-destructive, and non-invasive technique for measuring multilayer films. It uses the change in polarization state of linearly polarized light after reflection from a thin film sample to determine the thickness and optical constants of the film sample through model fitting. However, in practical applications, the obtained thickness and optical constants are often inaccurate. Summary of the Invention

[0003] The present application provides a method, an acquisition device, a terminal device and a computer-readable storage medium for obtaining film parameters. By fitting the thickness estimation values ​​that meet the preset ratio to obtain the actual values ​​of the optical constants and thicknesses of each layer of the film, the calculated actual values ​​of the thickness and optical constants can be made more accurate.

[0004] In a first aspect, the present application provides a method for obtaining film parameters, comprising:

[0005] Obtaining a functional relationship of the film, wherein the independent variables of the functional relationship include the thickness of each layer of the film and the optical constants of each layer, and the dependent variable of the functional relationship includes polarization information of the reflected light of the film;

[0006] Substituting estimated values ​​of the thickness of each layer of the film and estimated values ​​of the optical constants of each layer into a functional relationship to calculate a simulated value of polarization information of reflected light of the film, wherein the estimated values ​​of the thickness of each layer of at least two layers of the film satisfy a predetermined ratio;

[0007] When the difference between the simulated value of the polarization information of the reflected light of the film and the experimental value of the polarization information of the reflected light of the film meets the preset conditions, the estimated value of the thickness of each layer of the film is taken as the actual value of the thickness, and the estimated value of the optical constant of each layer of the film is taken as the actual value of the optical constant.

[0008] Optionally, after substituting the estimated values ​​of the thickness of each layer of the film and the estimated values ​​of the optical constants of each layer into the functional relationship to calculate the simulated value of the polarization information of the reflected light of the film, the acquisition method further includes:

[0009] When the difference between the simulated value of the polarization information of the reflected light of the film and the experimental value of the polarization information of the reflected light of the film does not meet the preset condition, the estimated value of the thickness of each layer of the film and the estimated value of the optical constant of each layer are adjusted;

[0010] The adjusted estimated values ​​of the thickness of each layer are determined as the new estimated values ​​of the thickness of each layer, and the adjusted estimated values ​​of the optical constants of each layer are determined as the new estimated values ​​of the optical constants of each layer, and the step of substituting the estimated values ​​of the thickness of each layer of the film and the estimated values ​​of the optical constants of each layer into the functional relationship to calculate the simulated value of the polarization information of the reflected light of the film is returned to.

[0011] Optionally, adjustments are made to the estimated values ​​of the thickness of each layer of the film and the estimated values ​​of the optical constants of each layer,

[0012] include:

[0013] The estimated values ​​of the thickness of each layer and the estimated values ​​of the optical constants of each layer are adjusted using the gradient descent method.

[0014] Optionally, the preset condition includes: a difference between a simulated value and an experimental value of the reflected light polarization information is less than an error threshold.

[0015] Optionally, the reflected light polarization information includes N, C and S;

[0016] Among them, N=cos2Ψ, C=sin2ΨcosΔ, S=sin2ΨsinΔ;

[0017] Ψ represents the amplitude ratio angle of the elliptically polarized light reflected from the film surface, and Δ represents the phase difference angle of the elliptically polarized light reflected from the film surface.

[0018] Optionally, before substituting the estimated values ​​of the thickness of each layer of the film and the estimated values ​​of the optical constants of each layer into the functional relationship to calculate the simulated value of the polarization information of the reflected light of the film, the acquisition method further includes:

[0019] Obtaining the time required for the production process of each of the at least two layers of the film;

[0020] The preset ratio is determined according to the time consumption of the production process corresponding to each layer.

[0021] Optionally, the optical constants include a refractive index and a dielectric constant.

[0022] 5 In a second aspect, the present application provides a device for obtaining film parameters, comprising:

[0023] A relationship acquisition unit is used to acquire a functional relationship of the film, wherein the independent variables of the functional relationship include the thickness of each layer of the film and the optical constants of each layer, and the dependent variable of the functional relationship includes the polarization information of the reflected light of the film;

[0024] an estimated value calculation unit, configured to substitute estimated values ​​of thickness of each layer of the film and estimated values ​​of optical constants of each layer into a functional relationship to calculate a simulated value of polarization information of reflected light of the film, wherein the estimated values ​​of thickness of each layer of at least two layers of the film satisfy a preset ratio;

[0025] The actual value determination unit is used to use the estimated value of the thickness of each layer of the film as the actual value of the thickness and the estimated value of the optical constant of each layer of the film as the actual value of the optical constant when the difference between the simulated value of the polarization information of the reflected light of the film and the experimental value of the polarization information of the reflected light of the film meets the preset conditions.

[0026] In a third aspect, the present application provides a terminal device, which includes a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, the steps of the method in the first aspect are implemented.

[0027] In a fourth aspect, the present application provides a computer-readable storage medium, wherein the computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the method of the first aspect are implemented.

[0028] In a fifth aspect, the present application provides a computer program product, which includes a computer program. When the computer program is executed by one or more processors, it implements the steps of the method of the first aspect.

[0029] Compared with the prior art, the present application has the following advantages: the present application solution first obtains the functional relationship of the film to be measured (i.e., the established model), and then substitutes the estimated values ​​of the thickness and optical constants of each layer of the film into the functional relationship to obtain the simulated value of the polarization information of the reflected light of the film. When the difference between the simulated value of the polarization information of the reflected light of the film and the experimental value of the polarization information of the reflected light of the film meets the preset conditions, the estimated value of the thickness of each layer of the film is used as the actual value of the thickness, and the estimated value of the optical constant of each layer of the film is used as the actual value of the optical constant. Unlike the related art, the present application solution pre-determines the proportional relationship between the thicknesses of certain layers in the film based on the manufacturing process information of the film. By fitting the actual values ​​of the optical constants and thicknesses of each layer of the film with the estimated thickness values ​​that meet the preset ratio, the calculated actual values ​​of the thickness and optical constants can be made more accurate.

[0030] It can be understood that the beneficial effects of the second to fifth aspects can be found in the above-mentioned relevant descriptions and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments or descriptions of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0032] Figure 1 Schematic diagram of the application environment of the method for obtaining film parameters provided in an embodiment of the present application;

[0033] Figure 2 This is a schematic diagram of the implementation process of the method for obtaining film parameters provided in an embodiment of the present application;

[0034] Figure 3 Schematic diagram of a device for obtaining film parameters provided in an embodiment of the present application;

[0035] Figure 4 This is a structural block diagram of the terminal device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0036] In the following description, specific details such as specific system structures and techniques are provided for purposes of illustration rather than limitation to facilitate a thorough understanding of the embodiments of the present application. However, it will be apparent to those skilled in the art that the present application may be implemented in other embodiments without these specific details. In other cases, detailed descriptions of well-known systems, devices, circuits, and methods are omitted to avoid obscuring the description of the present application with unnecessary detail.

[0037] In order to illustrate the technical solutions proposed in the embodiments of the present application, specific embodiments are provided below for illustration.

[0038] The following describes the application environment of a method for obtaining film parameters provided in the embodiment of the present application. Figure 1 The application environment of the method for obtaining film parameters includes:

[0039] The spectroscopic ellipsometry includes a light source and a detector. The light source is used to emit light. The light emitted by the light source is reflected by the thin film sample and then received by the detector. The detector is used to analyze the received reflected light to obtain an ellipsometry spectrum.

[0040] The computer can be connected to the ellipsometer and used to obtain the thickness and optical constants of the thin film sample by fitting the model of the thin film sample according to the ellipsometer spectrum output by the ellipsometer.

[0041] Specifically, spectroscopic ellipsometry is a surface-sensitive, non-destructive, and non-invasive multilayer film measurement technique. It uses the change in polarization state of linearly polarized light after reflection from a thin film sample to determine the thickness and optical constants of the film sample through model fitting. The specific measurement principle is that when light is incident on a thin film sample, it undergoes multiple reflections and transmissions, causing the polarization information of the reflected light to change. First, a detector detects the ellipsometry spectrum of the reflected light from the film sample. The ellipsometry spectrum can be represented by the amplitude ratio angle Ψ and the phase difference angle Δ. Generally, after measuring the amplitude ratio angle Ψ and the phase difference angle Δ, Ψ and Δ are converted to N = cos²Ψ, C = sin²ΨcosΔ, and S = sin²ΨsinΔ. Next, a model of the film sample is constructed based on the materials and stacking order of each layer. By continuously adjusting the optical constants and thickness in the model, the difference between the theoretical N, C, and S output by the model and the measured N, C, and S is minimized, thereby fitting a more accurate thickness and optical constants of the film.

[0042] The following describes a method for obtaining film parameters provided in an embodiment of the present application. Figure 2 , the method for obtaining film parameters can be applied to Figure 1 The method for obtaining the film parameters includes:

[0043] Step 201: Obtain a functional relationship of the film.

[0044] In step 202 , the estimated values ​​of the thickness of each layer of the film and the estimated values ​​of the optical constants of each layer are substituted into the functional relationship to calculate and obtain the simulated value of the polarization information of the reflected light of the film.

[0045] In step 203, when the difference between the simulated value of the polarization information of the reflected light of the film and the experimental value of the polarization information of the reflected light of the film meets the preset conditions, the estimated value of the thickness of each layer of the film is used as the actual value of the thickness, and the estimated value of the optical constant of each layer of the film is used as the actual value of the optical constant.

[0046] In an embodiment of the present application, the independent variables of the functional relationship of the film include the thickness of each layer of the film, and the optical constants of each layer of the film. The dependent variables of the functional relationship of the film include the polarization information of the reflected light of the film. The reflected light polarization information is used to represent the change in the polarization of the reflected light of the film. The film includes multiple layers, and the user establishes a functional relationship for the film according to the stacking order of the layers of the film. Then, the user can input the constructed functional relationship into the computer. Among them, the estimated value of the thickness of each layer of the film and the estimated value of the optical constant can be the estimated value input by the user into the computer, or it can be the estimated value generated by the computer itself. The experimental value of the reflected light polarization information of the film is obtained by Figure 1 The value of the polarization information of the reflected light detected by the ellipsometry spectrometer.

[0047] The computer can substitute the estimated thickness and estimated optical constant values ​​into the functional relationship to calculate a simulated value of the polarization information of the reflected light of the film. Optionally, the computer can execute step 202 only once to obtain a simulated value of the polarization information of the reflected light such that the difference satisfies a preset condition. If executing step 202 only once fails to obtain a simulated value of the polarization information of the reflected light such that the difference satisfies the preset condition, step 202 can be executed two or more times, each time substituting a different estimated thickness and estimated optical constant value, to obtain a simulated value of the polarization information of the reflected light such that the difference satisfies the preset condition. It should be noted that each time the estimated thickness of the film is substituted into the functional relationship, the following condition must be met: the estimated thickness values ​​of at least two layers of the film must meet a preset ratio. During the fabrication process of a thin film sample, the physical dimensions of each layer are related to the length of its fabrication process. Specifically, thickness = fabrication process time * growth rate. The growth rate can be calculated by first performing a destructive measurement experiment on a layer of material using a scanning electron microscope to obtain the thickness of that layer, and then inferring the growth rate. After obtaining the growth rate, the above formula is then used to non-destructively determine the thickness ratios between the layers. The user can input these ratios into a computer, which then uses them as the preset ratios in the embodiments of this application. By fitting the estimated thicknesses of each layer that satisfy the preset ratios to obtain the actual thickness values ​​and optical constant values, the obtained actual thickness values ​​and optical constant values ​​can be made more accurate.

[0048] When the difference between the simulated value and the experimental value of the polarization information of the reflected light of the film obtained by executing step 202 once meets the preset conditions, the estimated value of the thickness of each layer of the film substituted this time can be used as the actual value of the thickness, and the estimated value of the optical constant of each layer of the film can be used as the actual value of the optical constant.

[0049] In some embodiments, the preset condition may be that the difference between the simulated value of the film's reflected light polarization information and the experimental value of the film's reflected light polarization information is less than a preset error threshold. In other words, when the calculated simulated value of the reflected light polarization information is close to the experimental value of the reflected light polarization information, the estimated thickness and optical constant values ​​substituted into the functional relationship can be determined as the actual values.

[0050] In other embodiments, the preset condition may be that, after executing step 202 multiple times, the difference between the simulated value of the reflected light polarization information calculated once and the experimental value is the smallest among the differences between the simulated value and the experimental value of the reflected light polarization information calculated multiple times. For example, assuming step 202 is executed three times, the simulated value of the reflected light polarization information calculated by executing step 202 the first time is a1, the simulated value of the reflected light polarization information calculated by executing step 202 the second time is a2, and the simulated value of the reflected light polarization information calculated by executing step 202 the third time is a3. Assuming the experimental value of the reflected light polarization information is b, if the difference between a3 and b is smaller than the difference between a1 and b and the difference between a2 and b, then the thickness estimate and optical constant estimate entered into the functional relationship for the third time may be determined as the actual value.

[0051] Optionally, in order to more quickly determine the actual thickness value and the actual optical constant value, after each execution of step 202, the acquisition method further includes:

[0052] When the difference between the simulated value of the polarization information of the reflected light of the film and the experimental value of the polarization information of the reflected light of the film does not meet the preset conditions, the estimated values ​​of the thickness of each layer of the film and the estimated values ​​of the optical constants of each layer are adjusted.

[0053] The adjusted estimated values ​​of the thickness of each layer are determined as new estimated values ​​of the thickness of each layer, and the adjusted estimated values ​​of the optical constants of each layer are determined as new estimated values ​​of the optical constants of each layer, and the process returns to step 202 .

[0054] In this embodiment of the present application, if the difference between the simulated value of the film's reflected light polarization information calculated this time and the experimental value of the film's reflected light polarization information does not meet a preset condition, the thickness estimates and optical constant estimates currently substituted into the functional equations may be adjusted, and the adjusted estimated values ​​of each layer's thickness are determined as new estimated values ​​of each layer's thickness, and the adjusted estimated values ​​of each layer's optical constants are determined as new estimated values ​​of each layer's optical constants, and then step 202 is re-executed. It should be understood that when step 202 is re-executed, the new estimated values ​​of each layer's thickness and optical constants are substituted into the functional equations to obtain new estimated values ​​of the reflected light polarization information. The new estimated values ​​of each layer's thickness for at least two layers of the film still meet a preset ratio. If the difference between the new estimated values ​​of the reflected light polarization information and the experimental value of the reflected light polarization information meets a preset condition, the new estimated values ​​of each layer's thickness are used as the actual thickness values, and the new estimated values ​​of each layer's optical constants are used as the actual optical constant values. If the difference between the new estimated value of the reflected light polarization information and the experimental value of the reflected light polarization information does not meet the preset conditions, the new estimated values ​​of the thickness of each layer of the film and the new estimated values ​​of the optical constants of each layer are adjusted, and so on. In the embodiment of the present application, since the new estimated values ​​are adjusted based on the estimated values ​​of the thickness of each layer of the film and the estimated values ​​of the optical constants of each layer, it can help users obtain the actual values ​​of the thickness and optical constants more quickly.

[0055] It should be noted that when the computer first executes step 202, it may use the user-entered thickness values ​​for each film layer as estimated thickness values ​​for each film layer, and the user-entered optical constant values ​​for each film layer as estimated optical constant values ​​for each layer. For example, the user may enter the thickness values ​​designed before film fabrication into the computer, or may enter the thickness values ​​obtained through electron microscopic observation, without limitation. The optical constants of each film layer are related to the material used for that layer. The user can obtain the optical constant values ​​for each layer from the Internet or from a paper and then enter these values ​​into the computer. It should be understood that due to differences in film fabrication methods, the optical constant values ​​obtained from the Internet or from a paper may not be completely accurate and should only be used as a reference.

[0056] In some embodiments, in order to more quickly determine the actual thickness values ​​and the actual optical constant values, the estimated values ​​of the thickness of each layer of the thin film and the estimated values ​​of the optical constants of each layer are adjusted, including:

[0057] The estimated values ​​of the thickness of each layer and the estimated values ​​of the optical constants of each layer are adjusted using the gradient descent method.

[0058] In an embodiment of the present application, starting from the second execution of step 202, the estimated values ​​of the thickness of each layer of the thin film and the estimated values ​​of the optical constants of each layer can be adjusted using the gradient descent method based on the difference between the simulated value and the experimental value of the reflected light polarization information obtained by the previous calculation, so as to speed up the fitting of the thin film model.

[0059] In some embodiments, the aforementioned reflected light polarization information may include N, C, and S.

[0060] Among them, N=cos2Ψ, C=sin2ΨcosΔ, and S=sin2ΨsinΔ.

[0061] Ψ represents the amplitude ratio angle of the elliptically polarized light reflected from the film surface, and Δ represents the phase difference angle of the elliptically polarized light reflected from the film surface.

[0062] In some embodiments, the aforementioned optical constants include refractive index and dielectric constant. The refractive index is the ratio of the speed of light in a vacuum to the speed of light in the medium. The higher the refractive index of a material, the greater its ability to refract incident light. The dielectric constant is a macroscopic physical quantity that comprehensively reflects the internal electrical polarization properties of a material.

[0063] In some embodiments, in order to determine the preset ratio, before step 202, the acquisition method further includes:

[0064] Obtain the time required for the production process of each of the at least two layers of the film.

[0065] The preset ratio is determined according to the time consumption of the production process corresponding to each layer.

[0066] During the film sample production process, the physical dimensions of each layer are related to the manufacturing process time. When the manufacturing process times of the layers are proportional, the thicknesses of the layers are subject to ratio constraints. In this embodiment of the present application, the user can input the manufacturing process times corresponding to each of at least two layers of the film into a computer. Based on the manufacturing process times corresponding to each layer, the computer can determine a preset ratio.

[0067] As can be seen from the above, the present application solution first obtains the functional relationship of the film to be measured (i.e., the established model), and then substitutes the estimated values ​​of the thickness and optical constants of each layer of the film into the functional relationship to obtain the simulated value of the polarization information of the reflected light of the film. When the difference between the simulated value of the polarization information of the reflected light of the film and the experimental value of the polarization information of the reflected light of the film meets the preset conditions, the estimated value of the thickness of each layer of the film is used as the actual value of the thickness, and the estimated value of the optical constant of each layer of the film is used as the actual value of the optical constant. Unlike the related art, the present application solution pre-determines the proportional relationship between the thicknesses of certain layers in the film based on the manufacturing process information of the film. By fitting the actual values ​​of the optical constants and thicknesses of each layer of the film with the estimated thickness values ​​that meet the preset ratio, the calculated actual values ​​of the thickness and optical constants can be made more accurate.

[0068] Corresponding to the above-mentioned method for obtaining film parameters, the present invention also provides a device for obtaining film parameters. Figure 3 As shown, the device 300 for obtaining film parameters in the embodiment of the present application includes:

[0069] The relationship acquisition unit 301 is used to obtain the functional relationship of the film, wherein the independent variables of the functional relationship include the thickness of each layer of the film and the optical constants of each layer, and the dependent variables of the functional relationship include the polarization information of the reflected light of the film.

[0070] The estimated value calculation unit 302 is used to substitute the estimated value of the thickness of each layer of the film and the estimated value of the optical constant of each layer into the functional relationship to calculate the simulated value of the polarization information of the reflected light of the film, wherein the estimated values ​​of the thickness of each layer in at least two layers of the film meet a preset ratio.

[0071] The actual value determination unit 303 is used to use the estimated value of the thickness of each layer of the film as the actual value of the thickness and the estimated value of the optical constant of each layer of the film as the actual value of the optical constant when the difference between the simulated value of the polarization information of the reflected light of the film and the experimental value of the polarization information of the reflected light of the film meets the preset conditions.

[0072] Optionally, the acquisition device 300 further includes:

[0073] an adjusting unit, configured to adjust the estimated values ​​of the thickness of each layer of the film and the estimated values ​​of the optical constants of each layer when a difference between a simulated value of the polarization information of the reflected light of the film and an experimental value of the polarization information of the reflected light of the film does not satisfy a preset condition;

[0074] The new value determination unit is used to determine the adjusted estimated value of the thickness of each layer as the new estimated value of the thickness of each layer, determine the adjusted estimated value of the optical constant of each layer as the new estimated value of the optical constant of each layer, and return to execute the step of substituting the estimated value of the thickness of each layer of the film and the estimated value of the optical constant of each layer into the functional relationship to calculate the simulated value of the polarization information of the reflected light of the film.

[0075] Optionally, the adjustment unit is specifically configured to adjust the estimated values ​​of the thickness of each layer of the thin film and the estimated values ​​of the optical constants of each layer by using a gradient descent method.

[0076] Optionally, the preset condition includes: a difference between a simulated value and an experimental value of the reflected light polarization information is less than an error threshold.

[0077] Optionally, the reflected light polarization information includes N, C and S.

[0078] Among them, N=cos2Ψ, C=sin2ΨcosΔ, and S=sin2ΨsinΔ.

[0079] Ψ represents the amplitude ratio angle of the elliptically polarized light reflected from the film surface, and Δ represents the phase difference angle of the elliptically polarized light reflected from the film surface.

[0080] Optionally, the acquisition device 300 further includes:

[0081] The time acquisition unit is used to acquire the time consumed in the manufacturing process of each layer corresponding to at least two layers of the film.

[0082] The ratio determination unit is used to determine the preset ratio according to the time consumption of the production process corresponding to each layer.

[0083] Optionally, the optical constants include a refractive index and a dielectric constant.

[0084] As can be seen from the above, the present application solution first obtains the functional relationship of the film to be measured (i.e., the established model), and then substitutes the estimated values ​​of the thickness and optical constants of each layer of the film into the functional relationship to obtain the simulated value of the polarization information of the reflected light of the film. When the difference between the simulated value of the polarization information of the reflected light of the film and the experimental value of the polarization information of the reflected light of the film meets the preset conditions, the estimated value of the thickness of each layer of the film is used as the actual value of the thickness, and the estimated value of the optical constant of each layer of the film is used as the actual value of the optical constant. Unlike the related art, the present application solution pre-determines the proportional relationship between the thicknesses of certain layers in the film based on the manufacturing process information of the film. By fitting the actual values ​​of the optical constants and thicknesses of each layer of the film with the estimated thickness values ​​that meet the preset ratio, the calculated actual values ​​of the thickness and optical constants can be made more accurate.

[0085] Corresponding to the method for obtaining film parameters provided above, the embodiment of the present application further provides a terminal device, which can be Figure 1 The computer in the , can also be any other device with computing capabilities. Figure 4 The terminal device 4 in the embodiment of the present application includes: a memory 401, one or more processors 402 ( Figure 4 Only one is shown) and a computer program stored in the memory 401 and capable of running on the processor. Among them: the memory 401 is used to store software programs and units, and the processor 402 executes various functional applications and data processing by running the software programs and units stored in the memory 401 to obtain resources corresponding to the preset events. Specifically, the processor 402 realizes the following when running the above-mentioned computer program stored in the memory 401 Figure 2 The method for obtaining the film parameters in the corresponding embodiment.

[0086] It should be understood that in the embodiment of the present application, the processor 402 may be a central processing unit (CPU), and may also be other general-purpose processors, digital signal processors (DSP), application-specific integrated circuits (ASIC), field-programmable gate arrays (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. The general-purpose processor may be a microprocessor, or any conventional processor, etc.

[0087] The memory 401 may include a read-only memory and a random access memory, and provides instructions and data to the processor 402. A portion or all of the memory 401 may also include a non-volatile random access memory. For example, the memory 401 may also store device category information.

[0088] Corresponding to the above-mentioned method for obtaining film parameters applied to terminal equipment, the embodiment of the present application further provides a computer-readable storage medium, wherein the computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the following is achieved: Figure 2 The steps of the method for obtaining film parameters in the corresponding embodiment.

[0089] Corresponding to the above-mentioned method for obtaining film parameters applied to terminal equipment, the embodiment of the present application further provides a computer program product, the above-mentioned computer program product includes a computer program, and when the above-mentioned computer program is executed by one or more processors, it implements the following Figure 2 The steps of the method for obtaining film parameters in the corresponding embodiment.

[0090] Those skilled in the art can clearly understand that, for the convenience and brevity of description, only the division of the above-mentioned functional units and modules is used as an example for illustration. In actual applications, the above-mentioned functions can be distributed and completed by different functional units and modules as needed, that is, the internal structure of the above-mentioned device can be divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiment can be integrated into one processing unit, or each unit can exist physically alone, or two or more units can be integrated into one unit. The above-mentioned integrated unit can be implemented in the form of hardware or in the form of software functional units. In addition, the specific names of the functional units and modules are only for the convenience of distinguishing each other, and are not used to limit the scope of protection of this application. The specific working process of the units and modules in the above-mentioned system can refer to the corresponding process in the aforementioned method embodiment, which will not be repeated here.

[0091] In the above embodiments, the description of each embodiment has its own focus. For parts that are not described or recorded in detail in a certain embodiment, reference can be made to the relevant description of other embodiments.

[0092] Those skilled in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of external device software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0093] In the embodiments provided in this application, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the system embodiments described above are merely schematic. For example, the division of the above modules or units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be an indirect coupling or communication connection through some interfaces, devices or units, which can be electrical, mechanical or other forms.

[0094] The units described above as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of these units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0095] If the above-mentioned integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the present application implements all or part of the processes in the above-mentioned embodiment method, and can also be completed by instructing the associated hardware through a computer program. The above-mentioned computer program can be stored in a computer-readable storage medium, and the computer program, when executed by the processor, can implement the steps of the above-mentioned various method embodiments. Among them, the above-mentioned computer program includes computer program code, and the above-mentioned computer program code can be in source code form, object code form, executable file or some intermediate form, etc. The above-mentioned computer-readable storage medium may include: any entity or device capable of carrying the above-mentioned computer program code, recording medium, U disk, mobile hard disk, magnetic disk, optical disk, computer-readable memory, read-only memory (ROM, Read-Onl8 Memor8), random access memory (RAM, Random Access Memor8), electric carrier signal, telecommunication signal and software distribution medium, etc. It should be noted that the content contained in the above-mentioned computer-readable storage medium can be appropriately increased or decreased according to the requirements of legislation and patent practice in the jurisdiction. For example, in some jurisdictions, according to legislation and patent practice, computer-readable storage media does not include electrical carrier signals and telecommunication signals.

[0096] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present application, and should all be included in the scope of protection of the present application.

Claims

1. A method for obtaining film parameters, characterized in that: include: Obtaining a functional relationship of the film, wherein the independent variables of the functional relationship include the thickness of each layer of the film and the optical constants of each layer, and the dependent variable of the functional relationship includes polarization information of the reflected light of the film; Substituting the estimated values ​​of the thickness of each layer of the film and the estimated values ​​of the optical constants of each layer into the functional relationship to calculate a simulated value of the polarization information of the reflected light of the film, wherein the estimated values ​​of the thickness of each layer of at least two layers of the film satisfy a preset ratio; When the difference between the simulated value of the polarization information of the reflected light of the film and the experimental value of the polarization information of the reflected light of the film meets a preset condition, the estimated value of the thickness of each layer of the film is used as the actual value of the thickness, and the estimated value of the optical constant of each layer of the film is used as the actual value of the optical constant; When the difference between the simulated value of the polarization information of the reflected light of the film and the experimental value of the polarization information of the reflected light of the film does not meet the preset condition, adjusting the estimated value of the thickness of each layer of the film and the estimated value of the optical constant of each layer; Determining the adjusted estimated values ​​of the thickness of each layer as new estimated values ​​of the thickness of each layer, and determining the adjusted estimated values ​​of the optical constants of each layer as new estimated values ​​of the optical constants of each layer, and returning to the step of substituting the estimated values ​​of the thickness of each layer of the film and the estimated values ​​of the optical constants of each layer into the functional relationship to calculate a simulated value of the polarization information of the reflected light of the film; Before substituting the estimated values ​​of the thickness of each layer of the film and the estimated values ​​of the optical constants of each layer into the functional relationship to calculate the simulated value of the polarization information of the reflected light of the film, obtaining the time consumption of the manufacturing process corresponding to each layer of the at least two layers of the film; Determining the preset ratio according to the time consumption of the production processes corresponding to the respective layers; Determining the preset ratio includes: Thickness = manufacturing process time * growth rate. First, a destructive measurement experiment is performed on a certain layer of material using a scanning electron microscope to obtain the thickness of the layer, and then the growth rate is calculated. After the growth rate is obtained, the above formula is used to non-destructively obtain the thickness ratio between each layer. The user enters this ratio into the computer, and the computer uses this ratio as the preset ratio. The reflected light polarization information includes N, C and S; Among them, N=cos2Ψ, C=sin2ΨcosΔ, S=sin2ΨsinΔ; Ψ represents the amplitude ratio angle of the elliptically polarized light reflected from the film surface, and Δ represents the phase difference angle of the elliptically polarized light reflected from the film surface.

2. The acquisition method according to claim 1, characterized in that The adjusting of the estimated value of the thickness of each layer of the thin film and the estimated value of the optical constant of each layer comprises: The estimated values ​​of the thickness of each layer of the film and the estimated values ​​of the optical constants of each layer are adjusted using a gradient descent method.

3. The acquisition method according to claim 1, wherein: The preset condition includes: a difference between a simulation value of the reflected light polarization information and the experimental value is less than an error threshold.

4. The acquisition method according to claim 1, wherein: The optical constants include a refractive index and a dielectric constant.

5. A device for obtaining film parameters, used to implement the method for obtaining film parameters according to claim 1, characterized in that: include: A relationship acquisition unit is used to obtain a functional relationship of the film, wherein the independent variables of the functional relationship include the thickness of each layer of the film and the optical constants of each layer, and the dependent variables of the functional relationship include the polarization information of the reflected light of the film; the reflected light polarization information includes N, C and S; wherein N = cos2Ψ, C = sin2ΨcosΔ, S = sin2ΨsinΔ; Ψ represents the amplitude ratio angle of the elliptically polarized light reflected on the film surface, and Δ represents the phase difference angle of the elliptically polarized light reflected on the film surface; an estimated value calculation unit, configured to substitute estimated values ​​of the thickness of each layer of the film and estimated values ​​of the optical constants of each layer into the functional relationship to calculate a simulated value of polarization information of the reflected light of the film, wherein the estimated values ​​of the thickness of each layer of at least two layers of the film satisfy a preset ratio; an actual value determining unit, configured to use the estimated value of the thickness of each layer of the film as the actual value of the thickness and the estimated value of the optical constant of each layer of the film as the actual value of the optical constant when a difference between a simulated value of the polarization information of the reflected light of the film and an experimental value of the polarization information of the reflected light of the film satisfies a preset condition; an adjusting unit, configured to adjust the estimated values ​​of the thickness of each layer of the film and the estimated values ​​of the optical constants of each layer when a difference between a simulated value of the polarization information of the reflected light of the film and an experimental value of the polarization information of the reflected light of the film does not satisfy a preset condition; A new value determination unit is used to determine the adjusted estimated value of each layer thickness as a new estimated value of each layer thickness, determine the adjusted estimated value of each layer optical constant as a new estimated value of each layer optical constant, and return it to the estimated value calculation unit; A duration acquisition unit, configured to acquire the duration of the manufacturing process corresponding to each of the at least two layers of the film; A ratio determination unit, configured to determine the preset ratio according to the time taken by the production processes corresponding to the respective layers; Determining the preset ratio includes: thickness = time spent in the manufacturing process * growth rate. First, a destructive measurement experiment is performed on a certain layer of material using a scanning electron microscope to obtain the thickness of the layer, and then the growth rate is calculated. After obtaining the growth rate, the above formula is used to non-destructively obtain the thickness ratio between the layers. The user inputs the ratio into the computer, and the computer uses the ratio as the preset ratio.

6. A terminal device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein: When the processor executes the computer program, the method according to any one of claims 1 to 4 is implemented.

7. A computer-readable storage medium storing a computer program, characterized in that: When the computer program is executed by a processor, the method according to any one of claims 1 to 4 is implemented.

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