A method and device for detecting the quality of a two-dimensional annular light spot and a storage medium

Abstract

The application relates to a two-dimensional annular light spot quality detection method, a device and a storage medium, wherein the two-dimensional annular light spot quality detection method comprises the following steps: acquiring light intensity information of a two-dimensional annular light spot to be detected; determining a light intensity change trend of the two-dimensional annular light spot on a detection line according to the light intensity information, the detection line comprising a ray extending from a center of the two-dimensional annular light spot to one side; and determining the quality of the two-dimensional annular light spot according to the light intensity change trend. According to the application, the light intensity information of the two-dimensional annular light spot to be detected is first acquired, and then the light intensity change trend of the two-dimensional annular light spot on at least one detection line is determined. The faster the light intensity reduction rate of the inner side of the two-dimensional annular light spot, the better the quality, and the more suitable the two-dimensional annular light spot is as inhibiting light. The problem that a two-dimensional annular light spot with good engraving effect cannot be effectively screened in the related art is solved.

Description

Technical Field

[0001] This application relates to the field of ultra-precision writing, and in particular to a method, apparatus and storage medium for quality detection of a two-dimensional annular light spot. Background Technology

[0002] Two-photon laser direct writing technology is currently the most effective technique for achieving micro- and nano-scale 3D printing, with important applications in aerospace, microelectronics, quantum chips, silicon photonics chips, micro-optics, mechanical metamaterials, and regenerative medicine engineering. To improve writing accuracy, researchers have proposed edge light suppression (PPI) technology. This technology uses two beams, called the excitation beam and the suppression beam, where the excitation beam is used for writing, and the suppression beam is used to suppress the aggregation process at the structure edges. Through the combined action of the two beams, writing feature sizes of less than 50 nm can be achieved.

[0003] Based on the principle of PPI technology, superimposing a suppression light on the excitation light can further reduce the writing linewidth. However, experiments have shown that while the suppression light reduces the linewidth, it also affects the writing effect. Typically, the suppression light is a two-dimensional ring spot. Since different two-dimensional ring spots have different effects on the writing structure, quality inspection of the two-dimensional ring spots is necessary to identify those with good writing performance. However, current technology lacks a method for quality inspection of two-dimensional ring spots, thus failing to effectively screen out those with good writing performance.

[0004] There is currently no effective solution to the problem that related technologies cannot effectively screen out two-dimensional ring-shaped light spots with good writing effects. Summary of the Invention

[0005] This invention provides a method, apparatus, and storage medium for quality detection of two-dimensional annular light spots, in order to solve the problem in related technologies that it is impossible to effectively screen out two-dimensional annular light spots with good writing effects.

[0006] In a first aspect, the present invention provides a method for quality detection of a two-dimensional annular light spot, the method comprising:

[0007] Obtain the light intensity information of the two-dimensional ring-shaped light spot to be detected;

[0008] The intensity variation trend of the two-dimensional annular spot on the detection line is determined based on the light intensity information. The detection line includes rays extending from the center of the two-dimensional annular spot to one side.

[0009] The quality of the two-dimensional annular light spot is determined based on the trend of light intensity variation.

[0010] In some embodiments, obtaining the light intensity information of the two-dimensional annular spot to be detected includes:

[0011] The light intensity information of the two-dimensional annular light spot is obtained by scanning the two-dimensional annular light spot to be detected using an avalanche photodiode or a photomultiplier tube.

[0012] In some embodiments, determining the intensity variation trend of the two-dimensional annular spot on the detection line based on the light intensity information includes:

[0013] Determine the point of highest light intensity of the two-dimensional annular light spot on the detection line, and calculate the rate of decrease in light intensity of the two-dimensional annular light spot from the point of highest light intensity along the direction pointing to the center of the circle.

[0014] Determining the mass of the two-dimensional annular light spot based on the light intensity variation trend includes:

[0015] The quality of the two-dimensional annular light spot is determined based on the light intensity decrease rate, and the quality of the two-dimensional annular light spot is positively correlated with the light intensity decrease rate.

[0016] In some embodiments, the detection line is a central axis, and determining the intensity variation trend of the two-dimensional annular spot on the detection line based on the light intensity information includes:

[0017] Based on the light intensity information, a bimodal curve of light intensity of the two-dimensional annular light spot on the central axis is generated, wherein the horizontal axis of the bimodal curve represents the position and the vertical axis represents the light intensity.

[0018] The inner spacing of the bimodal curve of light intensity corresponding to multiple different ordinates is determined, and the standard deviation of the multiple inner spacings is calculated.

[0019] Determining the mass of the two-dimensional annular light spot based on the light intensity variation trend includes:

[0020] The quality of the two-dimensional annular light spot is determined based on the standard deviation, and the quality of the two-dimensional annular light spot is negatively correlated with the standard deviation.

[0021] In some embodiments, determining the intensity variation trend of the two-dimensional annular spot on the detection line based on the light intensity information includes:

[0022] Grayscale information is generated based on the light intensity information;

[0023] A grayscale image of the two-dimensional annular light spot is generated based on the grayscale information;

[0024] Determine the highest gray level point of the grayscale image on the detection line, and calculate the gray level decrease rate of the grayscale image from the highest gray level point along the direction pointing to the center of the circle;

[0025] Determining the mass of the two-dimensional annular light spot based on the light intensity variation trend includes:

[0026] The quality of the two-dimensional annular spot is determined based on the grayscale decrease rate, and the quality of the two-dimensional annular spot is positively correlated with the grayscale decrease rate.

[0027] In some embodiments, the detection line is a central axis, and determining the intensity variation trend of the two-dimensional annular spot on the detection line based on the light intensity information includes:

[0028] Grayscale information is generated based on the light intensity information;

[0029] A grayscale image of the two-dimensional annular light spot is generated based on the grayscale information;

[0030] Generate a grayscale bimodal curve of the grayscale image on the central axis, wherein the horizontal axis of the light intensity bimodal curve represents the position and the vertical axis represents the grayscale value;

[0031] The inner spacing of the bimodal curve of light intensity corresponding to multiple different ordinates is determined, and the standard deviation of the multiple inner spacings is calculated.

[0032] Determining the mass of the two-dimensional annular light spot based on the light intensity variation trend includes:

[0033] The quality of the two-dimensional annular light spot is determined based on the standard deviation, and the quality of the two-dimensional annular light spot is negatively correlated with the standard deviation.

[0034] In some embodiments, generating the grayscale image as a bimodal grayscale curve along the central axis includes:

[0035] Determine the grayscale value of the grayscale image at each position point on the central axis;

[0036] The gray values ​​of each location point are normalized.

[0037] The grayscale bimodal curve is generated based on the normalized grayscale values.

[0038] In some embodiments, determining the intensity variation trend of the two-dimensional annular spot on the detection line based on the light intensity information includes:

[0039] Based on the light intensity information, determine the light intensity variation trend of the two-dimensional annular spot on multiple detection lines;

[0040] The total light intensity variation trend of the two-dimensional annular spot is determined based on the light intensity variation trend corresponding to the multiple detection lines.

[0041] Determining the mass of the two-dimensional annular light spot based on the light intensity variation trend includes:

[0042] The quality of the two-dimensional annular light spot is determined based on the trend of total light intensity variation.

[0043] Secondly, this invention provides a quality detection device for a two-dimensional annular light spot, the device comprising:

[0044] The information acquisition module is used to acquire the light intensity information of the two-dimensional ring spot to be detected, the light intensity information including the light intensity at each position point of the two-dimensional ring spot;

[0045] A light spot detection module is used to determine the light intensity change trend of the two-dimensional annular light spot on the detection line based on the light intensity information. The detection line includes a straight line extending from the center of the two-dimensional annular light spot to one side.

[0046] A quality determination module is used to determine the quality of the two-dimensional annular light spot based on the light intensity change trend.

[0047] Fourthly, the present invention provides a storage medium storing a computer program that, when executed by a processor, implements the two-dimensional annular spot quality detection method described in the first aspect above.

[0048] Compared with related technologies, the two-dimensional ring spot quality detection method, apparatus, and storage medium provided in this invention first acquire the light intensity information of the two-dimensional ring spot to be detected, then determine the light intensity variation trend of the two-dimensional ring spot on at least one detection line. These light intensity variation trends determine the light intensity decrease rate inside the two-dimensional ring spot, and thus the spot quality is determined by the light intensity decrease rate inside the two-dimensional ring spot. The faster the light intensity decrease rate inside the two-dimensional ring spot, the better its quality, and the more suitable it is as a suppression light. This solves the problem in related technologies where it is impossible to effectively screen out two-dimensional ring spots with good writing effects.

[0049] Details of one or more embodiments of this application are set forth in the following drawings and description to make other features, objects and advantages of this application more readily apparent. Attached Figure Description

[0050] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0051] Figure 1 This is a hardware structure block diagram of the terminal for implementing the two-dimensional ring spot quality detection method of the present invention;

[0052] Figure 2This is a flowchart of a two-dimensional annular spot quality detection method in an embodiment of the present invention;

[0053] Figure 3 This is a two-dimensional annular light spot pattern in one embodiment of the present invention;

[0054] Figure 4 This is a grayscale image of a two-dimensional annular light spot in one embodiment of the present invention;

[0055] Figure 5 This is a flowchart of a two-dimensional annular spot quality detection method in a specific embodiment of the present invention;

[0056] Figure 6 This is a schematic diagram of the bimodal intensity curve in a specific embodiment of the present invention;

[0057] Figure 7 This is a structural block diagram of the two-dimensional annular spot quality detection device in this embodiment. Detailed Implementation

[0058] To better understand the purpose, technical solution, and advantages of this application, the application is described and illustrated below in conjunction with the accompanying drawings and embodiments.

[0059] Unless otherwise defined, the technical or scientific terms used in this application shall have the general meaning as understood by one of ordinary skill in the art to which this application pertains. Words such as “a,” “an,” “an,” “the,” “the,” and “these,” used in this application, do not indicate quantitative limitation and may be singular or plural. The terms “comprising,” “including,” “having,” and any variations thereof used in this application are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or device that comprises a series of steps or modules (units) is not limited to the listed steps or modules (units) but may include steps or modules (units) not listed, or may include other steps or modules (units) inherent to such processes, methods, products, or devices. The terms “connected,” “linked,” and “coupled,” used in this application, are not limited to physical or mechanical connections but may include electrical connections, whether direct or indirect. The term “multiple” used in this application refers to two or more. The "and / or" operator describes the relationship between related objects, indicating that three relationships can exist. For example, "A and / or B" can represent three cases: A alone, A and B simultaneously, and B alone. Typically, the character " / " indicates that the objects before and after it are in an "or" relationship. The terms "first," "second," and "third," etc., used in this application are merely for distinguishing similar objects and do not represent a specific ordering of the objects.

[0060] The method embodiments provided in this example can be executed on a terminal, computer, or similar computing device. For example, it can run on a terminal. Figure 1 This is a hardware structure block diagram of the terminal executing the two-dimensional annular spot quality detection method of the present invention. For example... Figure 1 As shown, a terminal may include one or more ( Figure 1 Only one is shown in the diagram. A processor 102 and a memory 104 for storing data are also included. The processor 102 may be, but is not limited to, a microprocessor (MCU) or a programmable logic device (FPGA). The terminal may also include a transmission device 106 for communication functions and an input / output device 108. Those skilled in the art will understand that… Figure 1 The structure shown is for illustrative purposes only and does not limit the structure of the terminal described above. For example, the terminal may also include components that are larger than... Figure 1 The more or fewer components shown, or having the same Figure 1 The different configurations shown are illustrated.

[0061] The memory 104 can be used to store computer programs, such as application software programs and modules, like the computer program corresponding to the two-dimensional ring spot quality detection method in this invention. The processor 102 executes various functional applications and data processing by running the computer program stored in the memory 104, thereby implementing the above-described method. The memory 104 may include high-speed random access memory, and may also include non-volatile memory, such as one or more magnetic storage devices, flash memory, or other non-volatile solid-state memory. In some instances, the memory 104 may further include memory remotely located relative to the processor 102, and these remote memories can be connected to the terminal via a network. Examples of such networks include, but are not limited to, the Internet, corporate intranets, local area networks, mobile communication networks, and combinations thereof.

[0062] The transmission device 106 is used to receive or send data via a network. This network includes a wireless network provided by the terminal's communication provider. In one example, the transmission device 106 includes a Network Interface Controller (NIC), which can connect to other network devices via a base station to communicate with the Internet. In another example, the transmission device 106 can be a Radio Frequency (RF) module used for wireless communication with the Internet.

[0063] This invention provides a method for quality detection of a two-dimensional annular light spot. Figure 2 This is a flowchart of a two-dimensional annular spot quality detection method according to an embodiment of the present invention, such as... Figure 2 As shown, the process includes the following steps:

[0064] Step S210: Obtain the light intensity information of the two-dimensional ring-shaped light spot to be detected.

[0065] In this step, the detection device first acquires the light intensity information of the two-dimensional ring-shaped light spot to be detected. This light intensity information includes the light intensity at each location point of the two-dimensional ring-shaped light spot, which can also be understood as the light intensity of each pixel in a computer system. The light intensity information of the two-dimensional ring-shaped light spot can be imported from a third-party database or obtained by scanning the two-dimensional ring-shaped light spot using appropriate scanning equipment.

[0066] Therefore, in one embodiment, this step includes: scanning the two-dimensional annular light spot to be detected using an avalanche photodiode or photomultiplier tube to obtain the light intensity information of the two-dimensional annular light spot. Specifically, an avalanche photodiode (APD) or photomultiplier tube (PMT) can be used to detect the light intensity within a given two-dimensional planar region (containing the two-dimensional annular light spot). The avalanche photodiode or photomultiplier tube can convert the light intensity into a count value or a voltage value, and then send the count value or voltage value to the detection device.

[0067] Step S220: Determine the light intensity variation trend of the two-dimensional annular spot on the detection line based on the light intensity information. The detection line includes rays extending from the center of the two-dimensional annular spot to one side.

[0068] In this step, the detection equipment first determines at least one detection line within the two-dimensional annular light spot. The detection line includes a ray extending from the center of the light spot to one side, which penetrates one side of the two-dimensional annular light spot. Then, the position points where the two-dimensional annular light spot falls on this detection line are determined, and the light intensity at these positions can be determined based on the light intensity information, thereby determining the light intensity variation trend of the two-dimensional annular light spot along this ray. It should be further noted that this step detects the light intensity variation trend of the two-dimensional annular light spot along at least one detection line. Correspondingly, the light intensity variation trend of the two-dimensional annular light spot along multiple detection lines can be detected, such as two, three, or four. Moreover, the form of the detection line is diverse; it can be a ray extending from the center of the light spot to one side, or it can be the central axis or radial line of the light spot. The central axis or radial line is equivalent to two rays extending from the center of the light spot to opposite sides, or it can be any other ray penetrating the center of the light spot.

[0069] Step S230: Determine the quality of the two-dimensional annular light spot based on the trend of light intensity change.

[0070] In this step, the intensity variation trend of the two-dimensional ring spot on at least one detection line was determined through the previous step. Typically, the intensity of a two-dimensional ring spot gradually increases from the outside to the inside and then gradually decreases. In this invention, research has shown that the faster the intensity decreases on the inner side of the two-dimensional ring spot, the better its writing effect as a suppression light. Therefore, in this step, the quality of the two-dimensional ring spot can be determined based on the intensity variation trend on the detection line. The faster the intensity decreases on the inner side of the two-dimensional ring spot, the better its quality and the more suitable it is as a suppression light. It should be further noted that since the intensity variation trend of the two-dimensional ring spot may differ at different locations, the intensity decrease rate at multiple different inner parts can be obtained by observing the intensity variation trend of the two-dimensional ring spot on multiple detection lines, thus comprehensively judging the quality of the two-dimensional ring spot.

[0071] Through the above steps, the detection device first acquires the light intensity information of the two-dimensional ring spot to be detected, then determines the light intensity variation trend of the two-dimensional ring spot along at least one detection line. These light intensity variation trends determine the light intensity decrease rate inside the two-dimensional ring spot, and thus the spot quality is determined by the light intensity decrease rate inside the two-dimensional ring spot. The faster the light intensity decrease rate inside the two-dimensional ring spot, the better its quality, and the more suitable it is as a suppression light.

[0072] Since the quality of the two-dimensional ring-shaped light spot is related to the rate of decrease in light intensity on its inner side, in some embodiments, step S220, determining the light intensity change trend of the two-dimensional ring-shaped light spot on the detection line based on the light intensity information, includes:

[0073] Step S221: Determine the point of highest light intensity of the two-dimensional annular spot on the detection line, and calculate the rate of decrease in light intensity of the two-dimensional annular spot from the point of highest light intensity along the direction pointing to the center of the circle.

[0074] In this step, since the light intensity of the two-dimensional annular spot gradually increases and then decreases from the outside to the inside, the outer and inner sides of the two-dimensional annular spot can be distinguished by the point of highest light intensity. Specifically, for any detection line, it is first necessary to determine the point of highest light intensity of the two-dimensional annular spot on that detection line, and then calculate the rate of decrease in light intensity of the two-dimensional annular spot from that point of highest intensity along the direction pointing towards the center of the circle. It should be further noted that when the detection line is only a ray extending from the center of the spot to one side, since the same detection line only passes through one side of the two-dimensional annular spot, it is only necessary to determine one point of highest light intensity on one side of the two-dimensional annular spot on the detection line. When the detection line is the central axis of the spot, since the detection line passes through both sides of the two-dimensional annular spot, it is necessary to determine two points of highest light intensity on the detection line, one on each side of the two-dimensional annular spot.

[0075] Step S230, determining the quality of the two-dimensional annular spot based on the trend of light intensity variation includes:

[0076] Step S231: Determine the quality of the two-dimensional ring spot based on the light intensity decrease rate. The quality of the two-dimensional ring spot is positively correlated with the light intensity decrease rate.

[0077] In this step, the light intensity decrease rate obtained in the previous step is the light intensity decrease rate inside the two-dimensional ring spot. Therefore, the quality of the two-dimensional ring spot can be determined based on this light intensity decrease rate, and the two are positively correlated. That is, the greater the light intensity decrease rate, the higher the quality of the two-dimensional ring spot; the smaller the light intensity decrease rate, the lower the quality of the two-dimensional ring spot.

[0078] In some embodiments, the detection line is the central axis. Step S220, determining the light intensity variation trend of the two-dimensional annular spot on the detection line based on the light intensity information, includes:

[0079] Step S221: Generate a two-dimensional annular light spot bimodal curve on the central axis based on the light intensity information. The horizontal axis of the bimodal curve represents the position and the vertical axis represents the light intensity. Step S222: Determine the inner spacing of the bimodal curve corresponding to multiple different vertical axes and calculate the standard deviation of the multiple inner spacings.

[0080] Step S230, determining the quality of the two-dimensional annular spot based on the trend of light intensity variation includes:

[0081] Step S231: Determine the quality of the two-dimensional ring spot based on the standard deviation. The quality of the two-dimensional ring spot is negatively correlated with the standard deviation.

[0082] Compared to the previous embodiment, this embodiment provides a specific method for quantitatively calculating the quality of a two-dimensional annular light spot. Figure 3 This is a two-dimensional annular light spot pattern in one embodiment of the present invention. (Refer to...) Figure 3In this embodiment, the detection line is the central axis (shown as a dashed line in the figure). First, the intensity variation trend of the two-dimensional ring spot along the central axis is determined based on the light intensity information. Since the light intensity of the two-dimensional ring spot gradually increases and then gradually decreases from the outside to the inside, the intensity variation trend along the central axis can be plotted as a bimodal curve. The horizontal axis of the bimodal curve represents the position, and the vertical axis represents the light intensity. Then, the inner spacing of the bimodal curve corresponding to multiple different vertical axes is determined, and the standard deviation of multiple inner spacings is calculated. The standard deviation reflects the closeness between multiple data points. The smaller the standard deviation, the closer these inner spacings are, which means that the two lines inside the bimodal curve are closer to parallel, and thus closer to perpendicular for a single line, indicating a greater rate of light intensity decrease inside the two-dimensional ring spot. Correspondingly, the larger the standard deviation, the greater the rate of light intensity decrease inside the two-dimensional ring spot. Therefore, the quality of the two-dimensional ring spot can be judged based on the standard deviation between the multiple inner spacings of the bimodal curve, and the two are negatively correlated. The larger the standard deviation, the lower the quality of the two-dimensional ring spot; the smaller the standard deviation, the higher the quality of the two-dimensional ring spot.

[0083] It should be noted that, in order to more accurately determine the quality of the two-dimensional ring spot, multiple intensity bimodal curves can be plotted based on multiple central axes, and the standard deviation of the inner spacing of the multiple intensity bimodal curves can be calculated. The quality of the two-dimensional ring spot can then be determined based on the average of these standard deviations.

[0084] Figure 4 This is a grayscale image of a two-dimensional annular light spot in one embodiment of the present invention. (Refer to...) Figure 4 To gain a more intuitive understanding of the intensity variation trend of the two-dimensional ring spot, the image of the two-dimensional ring spot can be converted into a grayscale image, and its quality can be determined by the grayscale variation trend of the two-dimensional ring spot.

[0085] Therefore, in some other embodiments, step S220, determining the light intensity variation trend of the two-dimensional annular spot on the detection line based on the light intensity information, includes:

[0086] Step S221: Generate grayscale information based on light intensity information; Step S222: Generate a grayscale image of a two-dimensional ring-shaped light spot based on the grayscale information; Step S223: Determine the highest grayscale point of the grayscale image on the detection line, and calculate the grayscale decrease rate of the grayscale image from the highest grayscale point along the direction pointing to the center of the circle.

[0087] In this step, the light intensity information is first converted into grayscale information. The light intensity information includes the light intensity at each location point in the two-dimensional ring-shaped light spot. This conversion process involves mapping the light intensity at each location point of the two-dimensional ring-shaped light spot to a grayscale value. For example, the count value output by the avalanche photodiode can be directly set as a grayscale value, or the voltage value output by the photomultiplier tube can be mapped to a grayscale value. Furthermore, depending on different precision requirements, 8-bit, 12-bit, 16-bit, or higher precision grayscale images can be obtained. For example, in an embodiment where a 16-bit grayscale image is obtained based on the voltage value output by the photomultiplier tube, the specific mapping relationship is as follows:

[0088]

[0089] Where G is the mapped grayscale value, V is the voltage value of the point to be mapped, and V max V represents the maximum voltage value in the light intensity information. min This represents the minimum voltage value in the light intensity information.

[0090] After grayscale mapping, the point with the lowest light intensity has the lowest grayscale value (white), and the point with the highest light intensity has the highest grayscale value (black). This is determined by comparison. Figure 4 and Figure 3 As can be seen, users can more intuitively see the grayscale change trend in the grayscale image. After obtaining the grayscale image of the two-dimensional annular spot, the grayscale change trend of the grayscale image on at least one detection line is obtained through the same operation as in the previous embodiment. Since the light intensity of the two-dimensional annular spot has a trend of gradually increasing and then gradually decreasing from the outside to the inside, the grayscale value of the two-dimensional annular spot has the same change trend. Therefore, the outside and inside of the two-dimensional annular spot can be distinguished by the highest grayscale point. Specifically, for any detection line, it is first necessary to determine the highest grayscale point of the two-dimensional annular spot on that detection line, and then calculate the grayscale decrease rate of the two-dimensional annular spot from the highest grayscale point along the direction pointing to the center. It should be further noted that when the detection line is only a ray extending from the center of the spot to one side, since the same detection line only passes through one side of the two-dimensional annular spot, it is only necessary to determine one highest grayscale point on one side of the two-dimensional annular spot on the detection line. When the detection line is the central axis of the light spot, since the detection line passes through both sides of the two-dimensional annular light spot, it is necessary to determine two points with the highest gray level on the detection line, which are located on both sides of the two-dimensional annular light spot.

[0091] Step S230, determining the quality of the two-dimensional annular spot based on the trend of light intensity variation includes:

[0092] Step S231: Determine the quality of the two-dimensional ring spot based on the grayscale decrease rate. The quality of the two-dimensional ring spot is positively correlated with the grayscale decrease rate.

[0093] In this step, the grayscale decrease rate obtained in the previous step is the grayscale decrease rate inside the two-dimensional ring spot. Therefore, the quality of the two-dimensional ring spot can be determined based on this grayscale decrease rate, and the two are positively correlated. That is, the larger the grayscale decrease rate, the higher the quality of the two-dimensional ring spot; the smaller the grayscale decrease rate, the lower the quality of the two-dimensional ring spot.

[0094] Accordingly, in some embodiments, the detection line is the central axis, and step S220, determining the light intensity variation trend of the two-dimensional annular spot on the detection line based on the light intensity information, includes:

[0095] Step S221: Generate grayscale information based on light intensity information; Step S222: Generate a grayscale image of a two-dimensional annular light spot based on the grayscale information; Step S223: Generate a grayscale bimodal curve on the central axis of the grayscale image, where the horizontal axis of the light intensity bimodal curve represents the position and the vertical axis represents the grayscale value; Step S224: Determine the inner spacing of the light intensity bimodal curve corresponding to multiple different vertical axes, and calculate the standard deviation of the multiple inner spacings.

[0096] Step S230, determining the quality of the two-dimensional annular spot based on the trend of light intensity variation includes:

[0097] Step S231: Determine the quality of the two-dimensional ring spot based on the standard deviation. The quality of the two-dimensional ring spot is negatively correlated with the standard deviation.

[0098] Compared to the previous embodiment, this embodiment provides a specific method for calculating the quality of a two-dimensional annular spot based on grayscale image quantization. In this embodiment, the detection line is the central axis. First, the grayscale change trend of the grayscale image along the central axis is determined based on the grayscale information. Since the grayscale of the two-dimensional annular spot has a trend of gradually increasing and then gradually decreasing from the outside to the inside, the grayscale change trend along the central axis can be plotted as a bimodal curve. The horizontal axis of the bimodal curve represents the position, and the vertical axis represents the grayscale value. Then, the inner spacing of the bimodal curve corresponding to multiple different vertical axes is determined, and the standard deviation of multiple inner spacings is calculated. The standard deviation reflects the closeness between multiple data points. The smaller the standard deviation, the closer these inner spacings are, which means that the two lines inside the bimodal curve are closer to parallel, and thus closer to perpendicular for a single line, indicating a greater grayscale decrease rate inside the two-dimensional annular spot. Correspondingly, the larger the standard deviation, the greater the grayscale decrease rate inside the two-dimensional annular spot. Therefore, the quality of a two-dimensional ring spot can be determined based on the standard deviation between the inner spacings of the gray-scale bimodal curves, and there is a negative correlation between the two. The larger the standard deviation, the lower the quality of the two-dimensional ring spot; the smaller the standard deviation, the higher the quality of the two-dimensional ring spot.

[0099] It should be noted that, in order to more accurately determine the quality of the two-dimensional ring spot, multiple gray-scale bimodal curves can be plotted based on multiple central axes, and the standard deviation of the inner spacing of the multiple gray-scale bimodal curves can be calculated. The quality of the two-dimensional ring spot can then be determined based on the average of these standard deviations.

[0100] Furthermore, in some embodiments, step S223, generating a grayscale bimodal curve of the grayscale image on the central axis, includes: determining the grayscale value of each position point of the grayscale image on the central axis; normalizing the grayscale value of each position point; and generating a grayscale bimodal curve based on the normalized grayscale value.

[0101] In this embodiment, to improve data processing, the grayscale values ​​of the two-dimensional annular spot are normalized before plotting the grayscale bimodal curve; that is, all grayscale values ​​are mapped to the range of 0-1. Specifically, the normalization formula is:

[0102]

[0103] Where N is the normalized intensity value, G is the gray value of the point to be normalized on the central axis, and G max G represents the maximum grayscale value on the central axis. min It is the smallest gray value on the central axis.

[0104] For a normalized bimodal grayscale curve, its ordinate changes from grayscale value to normalized intensity value. When calculating the inner spacing of the curve, for example, the standard deviation can be calculated by selecting the inner spacing of the bimodal grayscale curve at positions with normalized intensities of 0, 0.25, 0.5, 0.75, and 1.

[0105] It should be noted that the light intensity values ​​can also be normalized before plotting the bimodal curve of light intensity, that is, the light intensity values ​​at each position of the two-dimensional annular light spot can be mapped to the range of 0-1.

[0106] The technical solution of this application will be described in detail below through a specific embodiment.

[0107] Figure 5 This is a flowchart of a two-dimensional annular spot quality detection method in a specific embodiment of the present invention.

[0108] Reference Figure 5 The process includes:

[0109] Step S510: Use an optical measuring device to obtain the light intensity within a given two-dimensional planar region.

[0110] In this step, an avalanche photodiode (APD) or photomultiplier tube (PMT) is used to detect the light intensity within a given two-dimensional planar region. The APD or PMT can convert the light intensity into a count value or a voltage value.

[0111] Step S520: The light intensity is converted into an electrical signal and transmitted to the computer.

[0112] In this step, a data acquisition card is used to transfer the count or voltage values ​​output by the APD or PMT to the computer's memory.

[0113] Step S530: Use a computer to convert the electrical signal into a grayscale image.

[0114] In this step, a computer is used to directly set the count value output by the APD to a grayscale value, or to map the voltage value output by the PMT to a grayscale value, obtaining an 8-bit, 12-bit, 16-bit, or higher precision grayscale image according to different precision requirements. For example, a computer can be used to map the acquired voltage signal to a 16-bit grayscale image. The specific mapping method is as follows:

[0115]

[0116] Where G is the mapped grayscale value, and V is the voltage value corresponding to a point acquired in the two-dimensional plane. max V represents the maximum voltage value collected in a two-dimensional plane. min This represents the minimum voltage value collected within a two-dimensional plane.

[0117] Step S540: Select the image of the ring-shaped light spot from the grayscale image, obtain the grayscale value along the central axis, and calculate the deviation.

[0118] In this step, grayscale values ​​are obtained along multiple central axes of the grayscale image of the two-dimensional annular light spot. For example, four central axes can be selected: the X direction, the Y direction, and the 45-degree angle between X and Y. Grayscale values ​​are obtained along each of the four central axes, and these grayscale values ​​represent light intensity, resulting in a bimodal intensity normalization curve. The specific normalization formula is as follows:

[0119]

[0120] Where N is the normalized intensity value, G is the gray value of a point on the central axis, and G max G represents the maximum grayscale value on the central axis. min It is the smallest gray value on the central axis.

[0121] Figure 6 This is a schematic diagram of the bimodal intensity curves in a specific embodiment of the present invention. Curve 1 and curve 2 are the bimodal intensity curves of two two-dimensional annular light spots, respectively. (Refer to...) Figure 6We can choose normalized intensities of 0, 0.25, 0.5, 0.75, and 1, and calculate the intersection points of the lines Y=0, Y=0.25, Y=0.5, Y=0.75, and Y=1 with the inner sides of the double peaks of the normalized intensity curve 2. Further calculations yield the distances D1, D2, D3, D4, and D5 between the inner sides of the double peaks. The deviation of the two-dimensional annular spot is then calculated. The formula for the deviation of the two-dimensional annular spot is:

[0122]

[0123] Among them, S i The two-dimensional annular light spot defined in this invention is located on the central axis l. i The deviation, j is the strength value index, m is the total number of strength values, D j Let be the distance between the inner sides of the double peaks at the j-th intensity value. For all D j The average value.

[0124] Step S550: Select different centerlines to obtain grayscale values, calculate the deviation multiple times, and further calculate the total deviation.

[0125] In this step, after calculating the deviation of the two-dimensional annular spot on multiple axes separately, the total deviation is further calculated. The formula for the total deviation of the two-dimensional annular spot is:

[0126]

[0127] Where S is the total deviation of the two-dimensional annular spot, i is the index of the central axis, n is the total number of central axes, and S i For a two-dimensional annular light spot on the central axis l i The degree of deviation.

[0128] By following the steps described above, the total deviation of a two-dimensional ring spot can be obtained. Repeating these steps yields the total deviations of different two-dimensional ring spots, which are then compared to complete the quality assessment of the two-dimensional ring spot. A smaller total deviation indicates better quality of the two-dimensional ring spot.

[0129] Specific references Figure 6 Comparing curves 1 and 2, it can be seen that since the spacing between the inner sides of the double peaks of curve 2 is relatively close at each intensity, the deviation of curve 2 is smaller than that of curve 1. Therefore, the quality of the two-dimensional ring spot represented by curve 2 is better than that of the two-dimensional ring spot represented by curve 1.

[0130] This embodiment also provides a two-dimensional annular spot quality detection device, which is used to implement the above embodiments and preferred embodiments, and will not be repeated as described previously. The terms "module," "unit," "subunit," etc., used below can refer to combinations of software and / or hardware that implement a predetermined function. Although the device described in the following embodiments is preferably implemented in software, hardware implementation, or a combination of software and hardware, is also possible and contemplated.

[0131] Figure 7 This is a structural block diagram of the two-dimensional annular spot quality detection device in this embodiment, as shown below. Figure 7 As shown, the device includes:

[0132] The information acquisition module 710 is used to acquire the light intensity information of the two-dimensional ring spot to be detected. The light intensity information includes the light intensity at each position point of the two-dimensional ring spot.

[0133] The light spot detection module 720 is used to determine the light intensity change trend of the two-dimensional annular light spot on the detection line based on the light intensity information. The detection line includes a straight line extending from the center of the two-dimensional annular light spot to one side.

[0134] The quality determination module 730 is used to determine the quality of the two-dimensional annular light spot based on the trend of light intensity variation.

[0135] Through the aforementioned modules, the detection device first acquires the light intensity information of the two-dimensional annular spot to be detected. Then, it determines the light intensity variation trend of the two-dimensional annular spot along at least one detection line. These light intensity variation trends determine the light intensity decrease rate inside the two-dimensional annular spot, and thus the spot quality is determined by this rate of decrease. The faster the light intensity decreases inside the two-dimensional annular spot, the better its quality, and the more suitable it is as a suppression light.

[0136] It should be noted that the above modules can be functional modules or program modules, and can be implemented through software or hardware. For modules implemented through hardware, the above modules can reside in the same processor; or the above modules can be located in different processors in any combination.

[0137] This embodiment also provides an electronic device including a memory and a processor, the memory storing a computer program and the processor being configured to run the computer program to perform the steps in any of the above method embodiments.

[0138] Optionally, the electronic device may further include a transmission device and an input / output device, wherein the transmission device is connected to the processor and the input / output device is connected to the processor.

[0139] It should be noted that the specific examples in this embodiment can refer to the examples described in the above embodiments and optional implementations, and will not be repeated in this embodiment.

[0140] Furthermore, in conjunction with the two-dimensional annular spot quality detection method provided in the above embodiments, this embodiment can also provide a storage medium for implementation. This storage medium stores a computer program; when executed by a processor, the computer program implements any of the two-dimensional annular spot quality detection methods described in the above embodiments.

[0141] It should be noted that the user information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data used for analysis, data stored, data displayed, etc.) involved in this application are all information and data authorized by the user or fully authorized by all parties.

[0142] It should be understood that the specific embodiments described herein are merely illustrative of the application and not intended to limit it. All other embodiments derived by those skilled in the art based on the embodiments provided in this application without inventive effort are within the scope of protection of this application.

[0143] Obviously, the accompanying drawings are merely some examples or embodiments of this application. Those skilled in the art can apply this application to other similar situations based on these drawings without any creative effort. Furthermore, it is understood that although the work done in this development process may be complex and lengthy, for those skilled in the art, certain design, manufacturing, or production modifications made based on the technical content disclosed in this application are merely conventional technical means and should not be considered as insufficient disclosure of this application.

[0144] The term "embodiment" in this application refers to a specific feature, structure, or characteristic described in connection with an embodiment that may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily imply the same embodiment, nor does it imply that it is mutually exclusive with or independent of other embodiments. It will be clearly or implicitly understood by those skilled in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0145] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of patent protection. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the appended claims.

Claims

1. A method for quality detection of a two-dimensional annular light spot, characterized in that, The method includes: Obtain the light intensity information of the two-dimensional ring-shaped light spot to be detected; The intensity variation trend of the two-dimensional annular spot on the detection line is determined based on the light intensity information. The detection line includes rays extending from the center of the two-dimensional annular spot to one side. The mass of the two-dimensional annular light spot is determined based on the light intensity variation trend. Determining the intensity variation trend of the two-dimensional annular spot on the detection line based on the light intensity information includes: Determine the point of highest light intensity of the two-dimensional annular light spot on the detection line, and calculate the rate of decrease in light intensity of the two-dimensional annular light spot from the point of highest light intensity along the direction pointing to the center of the circle. Determining the mass of the two-dimensional annular light spot based on the light intensity variation trend includes: The mass of the two-dimensional annular spot is determined based on the light intensity decrease rate, and the mass of the two-dimensional annular spot is positively correlated with the light intensity decrease rate. Alternatively, the detection line is the central axis, and the determination of the light intensity variation trend of the two-dimensional annular spot on the detection line based on the light intensity information includes: Based on the light intensity information, a bimodal curve of light intensity of the two-dimensional annular light spot on the central axis is generated, wherein the horizontal axis of the bimodal curve represents the position and the vertical axis represents the light intensity. The inner spacing of the bimodal curve of light intensity corresponding to multiple different ordinates is determined, and the standard deviation of the multiple inner spacings is calculated. Determining the mass of the two-dimensional annular light spot based on the light intensity variation trend includes: The quality of the two-dimensional annular spot is determined based on the standard deviation, and the quality of the two-dimensional annular spot is negatively correlated with the standard deviation. Alternatively, determining the intensity variation trend of the two-dimensional annular spot on the detection line based on the light intensity information includes: Grayscale information is generated based on the light intensity information; A grayscale image of the two-dimensional annular light spot is generated based on the grayscale information; Determine the highest gray level point of the grayscale image on the detection line, and calculate the gray level decrease rate of the grayscale image from the highest gray level point along the direction pointing to the center of the circle; Determining the mass of the two-dimensional annular light spot based on the light intensity variation trend includes: The quality of the two-dimensional annular spot is determined based on the grayscale decrease rate, and the quality of the two-dimensional annular spot is positively correlated with the grayscale decrease rate. Alternatively, the detection line is the central axis, and the determination of the light intensity variation trend of the two-dimensional annular spot on the detection line based on the light intensity information includes: Grayscale information is generated based on the light intensity information; A grayscale image of the two-dimensional annular light spot is generated based on the grayscale information; Generate a bimodal grayscale curve of the grayscale image on the central axis, wherein the horizontal axis of the bimodal grayscale curve represents the position and the vertical axis represents the grayscale value; Determine the inner spacing of the gray-scale bimodal curve corresponding to multiple different ordinates, and calculate the standard deviation of the multiple inner spacings; Determining the mass of the two-dimensional annular light spot based on the light intensity variation trend includes: The quality of the two-dimensional annular light spot is determined based on the standard deviation, and the quality of the two-dimensional annular light spot is negatively correlated with the standard deviation.

2. The method for quality detection of a two-dimensional annular light spot according to claim 1, characterized in that, The acquisition of the light intensity information of the two-dimensional ring-shaped light spot to be detected includes: The light intensity information of the two-dimensional annular light spot is obtained by scanning the two-dimensional annular light spot to be detected using an avalanche photodiode or a photomultiplier tube.

3. The method for quality detection of a two-dimensional annular light spot according to claim 1, characterized in that, The process of generating the bimodal grayscale curve of the grayscale image on the central axis includes: Determine the grayscale value of the grayscale image at each point on the central axis; The gray values ​​of each location point are normalized. The grayscale bimodal curve is generated based on the normalized grayscale values.

4. A quality detection device for a two-dimensional annular light spot, characterized in that, The device includes: The information acquisition module is used to acquire the light intensity information of the two-dimensional ring spot to be detected, the light intensity information including the light intensity at each position point of the two-dimensional ring spot; A light spot detection module is used to determine the light intensity change trend of the two-dimensional annular light spot on the detection line based on the light intensity information. The detection line includes a straight line extending from the center of the two-dimensional annular light spot to one side. A quality determination module is used to determine the quality of the two-dimensional annular light spot based on the light intensity change trend. The spot detection module is also used to determine the point of highest light intensity of the two-dimensional annular spot on the detection line, and to calculate the rate of decrease in light intensity of the two-dimensional annular spot from the point of highest light intensity along the direction pointing to the center of the circle. The quality determination module is further configured to determine the quality of the two-dimensional annular spot based on the light intensity decrease rate, wherein the quality of the two-dimensional annular spot is positively correlated with the light intensity decrease rate. Alternatively, the detection line is the central axis, and the spot detection module is further used to generate a bimodal curve of the light intensity of the two-dimensional annular spot on the central axis based on the light intensity information. The horizontal axis of the bimodal curve represents the position and the vertical axis represents the light intensity. The module also determines the inner spacing of the bimodal curve corresponding to multiple different vertical axes and calculates the standard deviation of the multiple inner spacings. The quality determination module is also used to determine the quality of the two-dimensional annular spot based on the standard deviation, wherein the quality of the two-dimensional annular spot is negatively correlated with the standard deviation. Alternatively, the spot detection module is further configured to generate grayscale information based on the light intensity information; generate a grayscale image of the two-dimensional annular spot based on the grayscale information; determine the highest grayscale point of the grayscale image on the detection line; and calculate the grayscale decrease rate of the grayscale image from the highest grayscale point along the direction pointing to the center of the circle. The quality determination module is further configured to determine the quality of the two-dimensional annular spot based on the grayscale decrease rate, wherein the quality of the two-dimensional annular spot is positively correlated with the grayscale decrease rate. Alternatively, the detection line is the central axis, and the spot detection module is further used to generate grayscale information based on the light intensity information; generate a grayscale image of the two-dimensional annular spot based on the grayscale information; generate a grayscale bimodal curve of the grayscale image on the central axis, wherein the horizontal axis of the grayscale bimodal curve represents the position and the vertical axis represents the grayscale value; determine the inner spacing of the grayscale bimodal curve corresponding to multiple different vertical axes, and calculate the standard deviation of the multiple inner spacings; The quality determination module is also used to determine the quality of the two-dimensional annular spot based on the standard deviation, wherein the quality of the two-dimensional annular spot is negatively correlated with the standard deviation.

5. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it implements the steps of the two-dimensional annular spot quality detection method according to any one of claims 1 to 3.

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