A two-stage shielded vortex pump

Abstract

The application relates to the technical field of chip semiconductor processing equipment, and discloses a two-stage shielding vortex pump with a carrying type, two sides of a motor are fixedly connected with a primary pump and a secondary pump, front vortex impellers and rear vortex impellers are respectively arranged in the primary pump and the secondary pump, the front vortex impellers and the rear vortex impellers are respectively in transmission connection with two ends of a rotor shaft, a motor cavity in communication with two ends is arranged in the motor, a primary pump inlet, a primary pump outlet, the motor cavity, a secondary pump inlet and a secondary pump outlet form a flow channel. The two-stage shielding vortex pump with the carrying type not only has the advantages of small size, large lift, low temperature rise of pump inlet and outlet, precise temperature control, stable flow and the like, but also can measure the efficiency of the pump at any time, so that related parameters are set more accurately, the chip semiconductor temperature control device system can be accurately controlled in temperature, and the yield of chip processing is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing equipment technology, specifically a two-stage shielded vortex pump with a carrying pole. Background Technology

[0002] Chips are the foundation and core of the electronics and information industry, the "food" of modern industry. The chip industry is a fundamental, strategic, and pioneering industry in the modern industrial system, and a crucial support for industrial restructuring and upgrading. It is characterized by high technology, heavy capital investment, and high concentration. Along with aero engines, it is hailed as one of the "jewels in the crown of industry." Developing the chip industry is both a necessity for the internal development of the next-generation information technology industry and a requirement for technological competition in the international market, and has risen to the level of a national strategy.

[0003] In chip manufacturing, a semiconductor temperature control device called a chiiller is required to precisely control the temperature of the silicon wafer tray and reaction chamber. It mainly consists of a heat exchanger, a circulating pump, a compressor, and a heat dissipation unit. With the continuous improvement of semiconductor manufacturing processes and the expansion of production scale, the temperature control accuracy required for the chiiller device is also increasing, and the head of the circulating pump is also increasing. The circulating pump is energy-efficient, has good flow stability, high head, low temperature rise, and excellent system sealing performance, ensuring no leakage. It has a significant impact on the yield rate of chip manufacturing processes.

[0004] The circulating pump used in this semiconductor temperature control device delivers a new type of coolant, FC-3283. This coolant is non-corrosive, non-flammable and non-explosive, has good safety, a relatively high specific gravity (1.83 at room temperature), a low flow rate, and a high head. Currently, there are two circulating pump solutions: one uses a multi-stage canned centrifugal pump, and the other uses two magnetic vortex pumps connected in series to ensure high head (a single pump's head is insufficient). Both of these product types have shortcomings in chip semiconductor manufacturing processes.

[0005] While multistage shielded centrifugal pumps achieve integrated pump and motor operation with no mechanical seals and absolutely no leakage, the high pump head required necessitates a large impeller outer diameter, a large pump body radial dimension, and a large number of impeller stages, resulting in a large and long circulating pump. In contrast, the Chiller temperature control device has a compact structure and small size, leading to insufficient installation space. Furthermore, multistage centrifugal pumps exhibit low hydraulic efficiency at low flow rates and high heads, resulting in increased inlet and outlet temperature rise, which is detrimental to energy conservation and temperature control of the system. Additionally, centrifugal pump flow curves are typically flat and lack steepness, while the system's circulation pipeline diameter is small, making the flow rate susceptible to external interference, causing instability, large fluctuations, and even insufficient flow.

[0006] While using two magnetic vortex pumps in series, although also a seal-free pump capable of absolute leak-proof operation, requires an additional magnetic coupling drive device, increasing the product's axial and overall dimensions. Furthermore, the two pumps in series require significantly more space for the temperature control system. Additionally, the magnetic vortex pumps necessitate a three-phase asynchronous induction motor as a power source, and the motor's cooling fan increases product noise.

[0007] Using a single magnetic vortex pump also presents problems. To meet the requirements of low flow rate and high head, the outlet width of a single vortex impeller needs to be smaller and the impeller diameter needs to be larger. This results in very low pump efficiency, increased motor power, and high temperature rise of the medium at the pump inlet and outlet, which is very detrimental to energy saving and temperature control of the system.

[0008] When controlling the pump flow rate, the pump efficiency needs to be considered. Generally, the pump efficiency is usually set to a default value. However, the efficiency of different pumps is actually different. As the pump is used, its mechanical and electrical performance deteriorates, and the overall efficiency will also decrease. The difference between the default efficiency and the actual efficiency is large, which is very detrimental to the energy saving and temperature control of the device system. Summary of the Invention

[0009] To address the shortcomings of the aforementioned background technology, this invention provides a technical solution for a two-stage shielded vortex pump with a carrying pole design. This pump not only has advantages such as small size, large head, low inlet and outlet temperature rise, precise temperature control, and stable flow rate, but also allows for real-time measurement of pump efficiency, enabling more accurate parameter settings and solving the problems raised in the background technology.

[0010] The present invention provides the following technical solution: a two-stage shielded vortex pump with a carrying pole, comprising a motor, the motor comprising a stator assembly and a rotor assembly, both equipped with shielding sleeves, the rotor assembly being fixedly connected to a rotor shaft, a primary pump and a secondary pump being fixedly connected to both sides of the motor respectively, the primary pump and the secondary pump being respectively equipped with a front vortex impeller and a rear vortex impeller, the front vortex impeller and the rear vortex impeller being respectively drivenly connected to both ends of the rotor shaft, the motor having a motor cavity connecting the two ends, the primary pump inlet, the primary pump outlet, the motor cavity, the secondary pump inlet, and the secondary pump outlet forming a flow channel.

[0011] Preferably, the primary pump is fixedly connected to a front bearing housing, and the secondary pump is fixedly connected to a rear bearing housing. The front bearing housing and the rear bearing housing are respectively provided with a liquid passage hole for the front bearing housing and a liquid passage hole for the rear bearing housing. The high-pressure zone of the primary pump is connected to the motor cavity through the liquid passage hole for the front bearing housing, and the low-pressure zone of the secondary pump is connected to the motor cavity through the liquid passage hole for the rear bearing housing.

[0012] Preferably, the inlet of the primary pump and the outlet of the secondary pump are at a radial angle of 45 degrees.

[0013] Preferably, the rotor shaft has a central hole and four radial holes on the front and rear sides of the rotor shaft, respectively. The radial holes and the central hole of the shaft are connected to form a parallel flow channel with the gap between the stator and rotor shield sleeves.

[0014] Preferably, the rotor shaft is connected to the measuring load via a second transmission ring. The rear vortex impeller and the front vortex impeller are respectively connected to the rotor shaft via a first transmission ring. The first and second transmission rings can be switched so that the rotor shaft can choose one of the first and second transmission rings to drive it. A power meter is provided between the motor and the power supply. When the rotor shaft only drives the measuring load to rotate, the rotor shaft rotates at a set speed. The power meter records the energy consumption per unit time and calculates the ratio of the fixed energy consumption of the measuring load rotating per unit time to the energy consumption recorded by the power meter.

[0015] Preferably, both the second transmission ring and the first transmission ring have a gap with the rotor shaft. The first transmission ring is connected to the rotor shaft through a side bearing on one side. The second transmission ring is annular. The measuring load is located between the two rings. The outer ring of the second transmission ring is movably connected to the inner wall of the motor through an outer bearing.

[0016] Preferably, the rotor shaft is connected to the first transmission ring via a floating first key, and the rotor shaft is connected to the second transmission ring via a floating second key. A connecting rod is provided between the first floating key and the second transmission key. The connecting rod is hinged to the inner wall of the rotor shaft, and both ends of the connecting rod are respectively hinged to the first floating key and the second transmission key. The resultant force on the first floating key and the second transmission key changes with the direction of rotation. During normal operation, the resultant force on the first floating key is greater than the resultant force on the second transmission key. During reverse rotation, the resultant force on the second transmission key is greater than the resultant force on the first floating key.

[0017] Preferably, the first floating key and the second transmission key are rough on only one side, and the rough surfaces are in opposite positions in the circumferential direction. During normal operation, the pressure between the rough surface of the first floating key and the first transmission ring is small, and during reverse rotation, the pressure between the rough surface of the second transmission key and the second transmission ring is small.

[0018] Preferably, the inner wall of the first transmission ring is provided with a first vortex surface corresponding to the position of the first floating key, and the inner wall of the second transmission ring is provided with a second vortex surface corresponding to the position of the second transmission key. The first vortex surface and the second vortex surface rotate in opposite directions.

[0019] Preferably, the second transmission ring and the first floating key are inclined in opposite directions. The inner wall of the first transmission ring is provided with a first transmission hook that is inclined in the same direction as the first floating key. The inner wall of the second transmission ring is provided with a second transmission hook that is inclined in the same direction as the second transmission key. The first transmission hook only hooks the first floating key after the first floating key is fully extended. The second transmission hook only hooks the second transmission key when the second transmission key is fully extended.

[0020] The present invention has the following beneficial effects:

[0021] 1. This two-stage shielded vortex pump, with the same outer diameter, has a head 4 to 5 times that of a centrifugal pump of the same size. The two-stage vortex impellers at the beginning and end double the head. Secondly, under conditions of low flow rate and high head, the pump efficiency is higher than that of a multi-stage centrifugal pump, and the inlet and outlet temperature rise is lower. This is beneficial for precise temperature control in chip semiconductor temperature control systems, improving chip manufacturing yield. Furthermore, the flow rate-head performance curve is steeply declining. With the two-stage structure of the "carrying pole" design, the performance is superimposed, resulting in a steeper curve and more stable flow rate. It is not adversely affected by disturbances in the pipeline system, which is beneficial for precise flow control in chip semiconductor temperature control systems.

[0022] 2. This two-stage shielded vortex pump features a vortex impeller at each end of the motor, resulting in a compact, symmetrical structure with even force distribution across the shaft and an aesthetically pleasing appearance. Furthermore, the pump body and bearing housing of both vortex impellers are identical in size, ensuring good interchangeability, reducing the number of parts, and facilitating production management.

[0023] 3. This two-stage shielded vortex pump with a carrying pole design allows for testing of pump efficiency at any time, enabling more precise setting of relevant parameters and improving the accurate temperature control capability of the chip semiconductor temperature control device system. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of the present invention;

[0025] Figure 2 This is a front view of the front and rear bearing housings in this invention;

[0026] Figure 3 This is a side view of the front bearing housing in this invention;

[0027] Figure 4 This is a side view of the secondary pump in this invention;

[0028] Figure 5 This is a partial structural diagram of the present invention;

[0029] Figure 6 This is a schematic diagram of the structure of the first transmission ring in Embodiment 2 of the present invention;

[0030] Figure 7 This is a schematic diagram of the structure of the second transmission ring in Embodiment 2 of the present invention;

[0031] Figure 8 This is a schematic diagram of the structure of the first transmission ring in Embodiment 3 of the present invention;

[0032] Figure 9 This is a schematic diagram of the structure of the second transmission ring in Embodiment 3 of the present invention.

[0033] In the diagram: 1. Motor; 2. Stator assembly; 3. Rotor assembly; 4. Rotor shaft; 5. Primary pump; 6. Front vortex impeller; 7. Front bearing housing through hole; 8. Primary pump inlet; 9. Secondary pump; 10. Rear vortex impeller; 11. Rear bearing housing through hole; 12. Secondary pump outlet; 13. Motor cavity; 14. Measuring load; 15. Front bearing housing; 16. Rear bearing housing; 17. Power meter; 18. Outer bearing; 19. First transmission ring; 20. Second transmission ring; 21. First floating key; 22. Second transmission key; 23. Connecting rod; 24. Side bearing; 25. First vortex surface; 26. Second vortex surface; 27. First transmission hook; 28. Second transmission hook. Detailed Implementation

[0034] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0035] Please see Figure 1 A two-stage shielded vortex pump with a carrying pole design includes a motor 1, a primary pump 5, and a secondary pump 9. The primary pump 5 is located in front of the motor 1 and includes a front vortex impeller 6 and a front bearing housing 15. The secondary pump 9 is located behind the motor 1 and includes a rear vortex impeller 10 and a rear bearing housing 16. Wear-resistant rings are provided on both sides of the front vortex impeller 6 and the rear vortex impeller 10. The components of the primary pump 5 and the secondary pump 9 are identical in size and shape and are symmetrically arranged. The motor 1 includes a stator assembly 2 (including a stator shielding sleeve), a rotor assembly 3 (including a rotor shielding sleeve), and a rotor shaft 4. The rotor assembly 3 and the rotor shaft 4 are fixedly connected. The two ends of the rotor shaft 4 are respectively provided with front and rear bearings, front and rear shaft sleeves, and front and rear thrust discs. The rotor shaft 4 is supported by the front and rear bearings, which are fastened in the front and rear bearing housings by screws and washers. The front and rear bearing housings are fixed to the front and rear flanges of the motor 1 by cylindrical head hexagonal bolts. The front and rear bushings and the front and rear thrust discs are all mounted on the rotor shaft 4 with flat keys. The front and rear bushings are fixed to the rotor shaft 4 with bushings and tightening screws to prevent axial movement of the front and rear bushings.

[0036] The stator assembly 2 has a stator shielding sleeve on its inner diameter, and the rotor assembly 3 has a rotor shielding sleeve on its outer diameter. These are welded to the front and rear flanges of the motor 1 and the front and rear cover plates of the rotor assembly 3 using argon arc welding. This isolates the conveyed medium from the electromagnetic materials, protecting the motor 1. The motor type is a three-phase asynchronous induction motor, which can be connected to an external frequency converter to change the motor speed, thereby regulating the pump flow rate and head.

[0037] Both the front and rear vortex impellers are closed impellers with open flow channels. Both the front and rear vortex impellers are discs with 72 radial blades on the outer circumference. The large number of blades results in high zero-flow head, steep flow curve, and good flow stability, which facilitates precise control of flow and temperature in the system.

[0038] The flow channels are located on the internal end face of the pump body and on the corresponding bearing housing end face. Please refer to [link / reference]. Figures 2-4 The primary pump inlet 8 and the secondary pump outlet 12 are radially aligned at 45 degrees and are directly connected to the inlet and outlet annular flow channels, respectively.

[0039] Both the front and rear bearing housings are equipped with liquid passage holes. The liquid passage hole 7 of the front bearing housing is located in the high-pressure zone of the primary pump 5 and serves as the outlet of the primary pump 5, introducing the high-pressure liquid flow generated by the rotation of the front vortex impeller 6 into the motor cavity 13. The liquid passage hole 11 of the rear bearing housing is located in the low-pressure zone of the secondary pump 9 and serves as the inlet of the secondary pump 9, introducing the high-pressure liquid into the motor cavity 13. The rear vortex impeller 10 further pressurizes the liquid, generating even higher pressure, which is then discharged from the outlet 12 of the secondary pump.

[0040] The vortex impeller is made of semi-austenitic stainless steel 631, which undergoes cryogenic treatment to increase its hardness, achieving a Rockwell hardness of HRC48 or higher. The wear ring is made of high-molecular polymer polyetheretherketone (PEEK) with 30% carbon fiber, achieving a Shore hardness of HSD88, a low coefficient of friction, and excellent wear resistance. The impeller hub is lengthened to increase the frictional contact area between the impeller and the shaft, extending the impeller's service life.

[0041] The rotor shaft 4 is made of martensitic stainless steel 1Cr17Ni2 with WC hard alloy spraying or hard chrome plating. The surface Vickers hardness HV is over 800. This type of rotor shaft will not rust. After the shaft head is sprayed or electroplated, it has high hardness. The vortex impeller slides on the shaft, and there will be no abnormal wear on the inner diameter of the impeller hub and the shaft surface.

[0042] The small gap between the stator and rotor shielding sleeves restricts the flow rate. A hole is drilled in the center of the rotor shaft 4, and four radial holes are drilled on the front and rear sides of the rotor shaft 4, respectively, communicating with the central hole. These holes form parallel flow channels with the gap between the stator and rotor shielding sleeves, increasing the overall pump flow rate. This flow rate is both the main flow rate of the pump and also helps to cool the motor 1 and reduce its temperature rise.

[0043] Please see Figures 5-7The rotor shaft 4 is connected to a measuring load 14 via a second transmission ring 20. The measuring load 14 generates a constant resistance. The rear vortex impeller 10 and the front vortex impeller 6 are respectively connected to the rotor shaft 4 via a first transmission ring 19. The first transmission ring 19 and the second transmission ring 20 can be switched, allowing the rotor shaft 4 to choose one of the two transmission rings for transmission. That is, either the rotor shaft 4 drives the rear vortex impeller 10 and the front vortex impeller 6 to rotate via the first transmission ring 19, or the rotor shaft 4 drives the rear vortex impeller 10 and the front vortex impeller 6 to rotate via the second transmission ring 20. The rotating ring 20 drives the measuring load 14 to rotate. When the rotor shaft 4 only drives the measuring load 14 to rotate, a power meter 17 is installed between the motor 1 and the power supply. When the rotor shaft 4 only drives the measuring load 14 to rotate, the rotor shaft 4 rotates at a set speed. The power meter 17 records the energy consumption per unit time. Since the resistance of the measuring load 14 remains constant, the power is always constant when rotating at the set speed. At this time, the ratio of the fixed power of the rotating measuring load 14 to the power recorded by the power meter 17 is the efficiency of the two-stage canned vortex pump.

[0044] The first transmission ring 19 and the second transmission ring 20 can be one-way bearings in opposite directions. During normal operation, they drive the rear vortex impeller 10 and the front vortex impeller 6 to rotate and pump the liquid. When measuring efficiency, the rotor shaft 4 reverses direction and only drives the measuring load 14 to rotate. The rear vortex impeller 10 and the front vortex impeller 6 do not generate resistance. The measuring load 14 is a fan blade in the same direction as the rotor shaft 4. When the speed is constant, the resistance between the fan blade and the liquid is constant.

[0045] In this application, in order to reduce the interference generated by the first transmission ring 19 and the second transmission ring 20, both the second transmission ring 20 and the first transmission ring 19 are left with a gap of about 20-40 mils between them and the rotor shaft 4. The first transmission ring 19 is connected to the rotor shaft 4 through a side bearing 24 on one side. The inner wall of the side bearing 24 holds the rotor shaft 4 tightly to prevent the front vortex impeller 6 and the rear vortex impeller 10 from shaking when rotating. The second transmission ring 20 is annular, and the measuring load 14 is set between the two rings. The outer ring of the second transmission ring 20 is movably connected to the inner wall of the motor 1 through an outer bearing 18 to reduce the resistance of the first transmission ring 19 and the second transmission ring 20 to the rotor shaft 4 and reduce interference.

[0046] The rotor shaft 4 is connected to the first transmission ring 19 via a floating first floating key 21 and to the second transmission ring 20 via a floating second transmission key 22. A connecting rod 23 is provided between the first floating key 21 and the second transmission key 22. The connecting rod 23 is hinged to the inner wall of the rotor shaft 4, and both ends of the connecting rod 23 are respectively hinged to the first floating key 21 and the second transmission key 22. The first floating key 21 and the second transmission key 22 are both connected to the connecting rod 23 via steel wire ropes. The connecting rod 23 causes the first floating key 21 and the second transmission key 22 to move in tandem, ensuring that only one of the first floating key 21 and the second transmission key 22 is in the extended state, and to achieve transmission with the first transmission ring 19 or the second transmission ring 20. During normal operation, the resultant force on the first floating key 21 is greater than the resultant force on the second transmission key 22. During reverse rotation, the resultant force on the second transmission key 22 is greater than the resultant force on the first floating key 21.

[0047] To ensure that the resultant force changes with the direction of rotation, this application provides three methods:

[0048] Example 1

[0049] The first floating key 21 and the second transmission key 22 each have only one rough surface, and the rough surfaces are in opposite positions in the circumferential direction. During normal operation, the rough surface of the first floating key 21 experiences less force, and under the action of centrifugal force, the resultant force is greater, making it easier to extend outward. Conversely, the rough surface of the first floating key 21 has the opposite effect. To ensure reliability, a return spring is provided on the connecting rod 23 to ensure that initially, the extension amount of the first floating key 21 and the second transmission key 22 is the same, and this extension amount will not generate a driving effect.

[0050] Example 2

[0051] The inner wall of the first transmission ring 19 has a first vortex surface 25 corresponding to the position of the first floating key 21, and the inner wall of the second transmission ring 20 has a second vortex surface 26 corresponding to the position of the second transmission key 22. The first vortex surface 25 and the second vortex surface 26 rotate in opposite directions. (See reference...) Figure 6 and Figure 7 Both have the same viewing direction. When working normally, the first floating key 21 abuts against the junction of the first vortex surface 25, while the second transmission key 22 slides along the second vortex surface 26 and contracts. The radius of the first floating key 21 is larger than the rotation radius of the second transmission key 22, and the centrifugal force it receives is greater, causing the second transmission key 22 to move further away from the second vortex surface 26 and disengage from the second transmission ring 20. Conversely, the centrifugal force received by the second transmission key 22 is greater, and the second transmission key 22 realizes transmission, while the first floating key 21 moves away from the first transmission ring 19.

[0052] Example 3

[0053] Please see Figure 8 and Figure 9 The second transmission ring 20 and the first floating key 21 are inclined in opposite directions. The inner wall of the first transmission ring 19 is provided with a first transmission hook 27 facing the same direction of inclination as the first floating key 21. The inner wall of the second transmission ring 20 is provided with a second transmission hook 28 facing the same direction of inclination as the second transmission key 22. The first transmission hook 27 hooks the first floating key 21 only after it is fully extended. The second transmission hook 28 hooks the second transmission key 22 only when it is fully extended. When rotating counterclockwise, the centrifugal force of the first floating key 21 has an outward sliding force, while the second transmission key 22 is subjected to an inward sliding force. Finally, the first floating key 21 extends and hooks the first transmission hook 27 to drive the first transmission ring 19 to rotate, while the second transmission key 22 does not contact the second transmission hook 28, and the rotor shaft 4 does not drive the second transmission ring 20. Conversely, the first transmission ring 19 is not subjected to force, and the second transmission ring 20 rotates.

[0054] Working principle: Liquid enters from the inlet 8 of the primary pump, gains energy through the high-speed rotating front vortex impeller 6, and is transported to the outlet hole at the top of the pump flow channel. The liquid passage hole 7 of the front bearing housing is located at the high pressure outlet of the primary pump 5. The high-pressure liquid is introduced into the front of the motor cavity 13 through the liquid passage hole, and then flows into the rear of the motor cavity 13 through the gap between the stator shield sleeve and the rotor shield sleeve. It then enters the suction port of the secondary pump through the liquid passage hole 11 of the rear bearing housing. The secondary pump 9 has the same structure and size as the primary pump 5 and is installed symmetrically at both ends. The liquid passage hole 7 of the front bearing housing is the outlet hole of the primary pump 5, and the liquid passage hole 11 of the rear bearing housing is the suction port of the secondary pump 9. The high-pressure liquid introduced from the liquid passage hole 11 of the rear bearing housing gains further energy through the high-speed rotation of the rear vortex impeller 10, generating higher pressure, and finally flows out from the outlet 12 of the secondary pump, generating the high head required by the system.

[0055] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0056] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A two-stage shielded vortex pump of the carrying pole type, comprising a motor, the motor comprising a stator assembly and a rotor assembly, both equipped with shielding sleeves, the rotor assembly being fixedly connected to a rotor shaft, characterized in that: A primary pump and a secondary pump are fixedly connected to both sides of the motor. A front vortex impeller and a rear vortex impeller are respectively installed in the primary pump and the secondary pump. The front vortex impeller and the rear vortex impeller are respectively connected to the two ends of the rotor shaft. The motor has a motor cavity that connects the two ends. The primary pump inlet, the primary pump outlet, the motor cavity, the secondary pump inlet, and the secondary pump outlet form a flow channel. The rotor shaft is connected to the measuring load via a second transmission ring. The rear vortex impeller and the front vortex impeller are respectively connected to the rotor shaft via a first transmission ring. The first and second transmission rings can be switched so that the rotor shaft can choose one of the first and second transmission rings to drive it. A power meter is provided between the motor and the power supply. When the rotor shaft only drives the measuring load to rotate, the rotor shaft rotates at a set speed. The power meter records the energy consumption per unit time and calculates the ratio of the fixed energy consumption of the measuring load rotating per unit time to the energy consumption recorded by the power meter.

2. The two-stage shielded vortex pump of the carrying pole type according to claim 1, characterized in that: The primary pump is fixedly connected to a front bearing housing, and the secondary pump is fixedly connected to a rear bearing housing. The front bearing housing and the rear bearing housing are respectively provided with a liquid passage hole for the front bearing housing and a liquid passage hole for the rear bearing housing. The high-pressure zone of the primary pump is connected to the motor cavity through the liquid passage hole for the front bearing housing, and the low-pressure zone of the secondary pump is connected to the motor cavity through the liquid passage hole for the rear bearing housing.

3. The two-stage shielded vortex pump of the carrying pole type according to claim 1, characterized in that: The inlet of the primary pump and the outlet of the secondary pump are at a radial angle of 45 degrees.

4. A two-stage shielded vortex pump of the carrying pole type according to claim 1, characterized in that: The rotor shaft has a central hole at its center, and four radial holes are opened on the front and rear sides of the rotor shaft respectively. The radial holes and the central hole are connected and form a parallel flow channel with the gap between the stator and rotor shield sleeves.

5. A two-stage shielded vortex pump of the carrying pole type according to claim 1, characterized in that: Both the second transmission ring and the first transmission ring have gaps with the rotor shaft. The first transmission ring is connected to the rotor shaft through a side bearing on one side. The second transmission ring is annular. The measuring load is located between the two rings. The outer ring of the second transmission ring is movably connected to the inner wall of the motor through an outer bearing.

6. A two-stage shielded vortex pump of the carrying pole type according to claim 5, characterized in that: The rotor shaft is connected to the first transmission ring via a floating first key, and to the second transmission ring via a floating second key. A connecting rod is provided between the first and second keys, and the connecting rod is hinged to the inner wall of the rotor shaft. The two ends of the connecting rod are respectively hinged to the first and second keys. The resultant force on the first and second keys changes with the direction of rotation. During normal operation, the resultant force on the first key is greater than that on the second key. During reverse rotation, the resultant force on the second key is greater than that on the first key.

7. A two-stage shielded vortex pump of the carrying pole type according to claim 6, characterized in that: The first floating key and the second transmission key each have only one rough surface, and the rough surfaces are in opposite positions in the circumferential direction. During normal operation, the pressure between the rough surface of the first floating key and the first transmission ring is small. When rotating in the opposite direction, the pressure between the rough surface of the second transmission key and the second transmission ring is small.

8. A two-stage shielded vortex pump of the carrying pole type according to claim 6, characterized in that: The inner wall of the first transmission ring is provided with a first vortex surface corresponding to the position of the first floating key, and the inner wall of the second transmission ring is provided with a second vortex surface corresponding to the position of the second transmission key. The first vortex surface and the second vortex surface rotate in opposite directions.

9. A two-stage shielded vortex pump of the carrying pole type according to claim 6, characterized in that: The second transmission ring and the first floating key are inclined in opposite directions. The inner wall of the first transmission ring is provided with a first transmission hook that is inclined in the same direction as the first floating key. The inner wall of the second transmission ring is provided with a second transmission hook that is inclined in the same direction as the second transmission key. The first transmission hook only hooks the first floating key after the first floating key is fully extended. The second transmission hook only hooks the second transmission key when the second transmission key is fully extended.

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