A grinding anti-rust system
By introducing a magnetic suction module, electromagnetic adsorption pipeline and spray module into the grinder, the problems of scratches and breakage of ultra-thin lithium tantalate wafers were solved, efficient rust prevention treatment was achieved, and production efficiency and processing applicability were improved.
Patent Information
- Application Number
- CN202211721378.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Priority Date
- 2022-09-01
- Filing Date
- 2022-12-30
- Publication Date
- 2025-09-30
- Estimated Expiration
- 2042-12-30
AI Technical Summary
Traditional grinders suffer from scratches and breakage when processing ultra-thin lithium tantalate wafers with a material hardness lower than iron and a thickness less than 250μm. Manual spraying of rust inhibitors is also inefficient, affecting production efficiency and costs.
The magnetic suction module, electromagnetic adsorption pipeline, flushing module and spray module are used in combination with computer module control to achieve efficient adsorption of impurities such as iron filings and rust in the mortar and automatic spraying of rust inhibitors, ensuring low impurity content and moist disk surface during processing.
It effectively reduces chip scratches and breakage, improves processing yield, reduces manpower load, and improves production efficiency and processing applicability.
Smart Images
Figure CN116197815B_ABST
Abstract
Description
Technical Field
[0001] The present application relates to a grinding slurry supply system, and in particular to a grinding rust prevention system. Background Art
[0002] Traditional grinding machines only install magnets and filters in the mortar's diversion pipe, and use magnets and filters to filter out rust, iron filings, and other impurities before the mortar is recovered into the mortar bucket. However, this filtering effect is only suitable for wafers with a hardness greater than that of iron, such as sapphire wafers. There will be no obvious scratches or fragments during the processing of sapphire wafers. However, when processing ultra-thin lithium tantalate wafers with a material hardness lower than that of iron and a thickness of less than 250μm, this filtering effect is not satisfactory and a large number of scratches will occur. As the number of times the mortar is used increases, the proportion of scratches and fragments in the processing of ultra-thin lithium tantalate wafers will continue to rise. In addition, in the traditional grinding process, a certain proportion of rust inhibitor is added to the mortar to prevent the disc surface from rusting. The rust inhibitor is manually sprayed on the upper and lower grinding discs in the interval between wafer collection. This method is inefficient and the manual spraying speed is slow. In addition, the mortar attached to the lower surface of the wafer may dry out during the manual spraying process, resulting in the wafer needing to be re-grinded, affecting production efficiency and cost. Summary of the Invention
[0003] In view of this, the present application provides a grinding anti-rust system to solve the above problems.
[0004] The grinding anti-rust system provided in this application includes:
[0005] A magnetic module is used to absorb impurities in the mortar bucket during the mortar mixing process, and the impurities in the mortar bucket include iron filings, rust and / or other impurities;
[0006] The mortar inlet pipeline, part of which is an electromagnetic adsorption pipeline, is made of steel, and an electromagnet is installed on the periphery of the pipeline to adsorb impurities such as iron filings and rust on the pipe wall during the flow of mortar. The electromagnetic adsorption pipeline is also connected to an electromagnetic control module for controlling the electromagnet installed on the periphery of the pipeline;
[0007] A flushing module is provided on the electromagnetic adsorption pipeline, and is used to flush impurities such as iron filings and rust adsorbed by the pipeline during processing and shutdown, to ensure that the impurity content is lower than a preset value and that the adsorption effect of the electromagnet on the iron filings is maintained at a certain rate;
[0008] The spray module is used to spray rust preventive agent on the upper and lower discs of the grinding machine when the grinding machine stops working and collects the sheets, ensuring that the upper and lower discs of the grinding machine are kept moisturized;
[0009] The computer module is used to control the magnetic attraction module, electromagnetic control module, flushing module and spraying module.
[0010] Optionally, the grinding and rust prevention system also includes a mortar bucket, and the magnetic module includes a clamping component and a tray. The tray is circular and is used to carry multiple magnets; the tray can rotate around the center on a horizontal plane; the clamping component is used to clamp the magnet and immerse the magnet in the mortar bucket to adsorb iron filings. After the adsorption is completed, the magnet is pulled out from the mortar bucket and moved above the tray. The computer module controls the clamping arm to place the magnet adsorbed with iron filings on the tray and rotate the tray at the same time. The clamping arm takes out the unused magnets on the tray for the next operation.
[0011] Optionally, the magnet of the magnetic attraction module is a neodymium iron boron magnet, which has a stronger magnetic force and a better adsorption effect.
[0012] Optionally, after the grinding program is started, the mortar passes through the electromagnetic adsorption pipeline, and the electromagnetic control module controls the electromagnets set on the periphery of the pipeline to adsorb iron filings in the mortar onto the pipe wall; when the grinding program ends, the electromagnetic control module controls the electromagnets set on the periphery of the pipeline to turn off the adsorption function; the computer module turns on the flushing module to discharge the iron filings from the mortar pipeline.
[0013] The magnetism of an electromagnet can be controlled by turning the current on and off, by the strength of the current or the number of turns of the coil, or by changing the resistance to control the current. However, the magnetism, magnetism, and magnetic pole direction of an ordinary magnet cannot generally be changed at will. Therefore, an electromagnet is used in an electromagnetic adsorption pipeline to adsorb impurities such as iron filings and rust in the mortar pipeline. The presence and strength of the magnetism of the electromagnet are controlled by connecting an electromagnetic control module.
[0014] Optionally, the spray module includes a rotating structure, a spray shower, a rust inhibitor tank and a transmission pipe. The spray shower is connected to the rust inhibitor tank through a transmission pipe. The rotating structure is used to control the movement of the spray shower. After the grinding process is completed, the computer module controls the spray shower to move between the upper and lower grinding discs to spray the rust inhibitor. After the spraying is completed, the spray shower moves back to its original position.
[0015] Optionally, when the spray shower is spraying, the distance between it and the grinding lower disk surface is greater than the distance between it and the grinding upper disk surface, and a sufficient distance is maintained between the spray shower and the grinding lower disk surface for the operator to collect the wafers, thereby avoiding affecting the operator's wafer collection action.
[0016] Optionally, the time it takes for the spray head to complete one spraying is 3 to 6 seconds.
[0017] Optionally, when the grinding machine stops working, the computer module controls the spraying head to complete a spraying action at a fixed interval. The fixed time can be set to 30 to 60 seconds to ensure that the upper and lower grinding discs are in a moisturizing state during the wafer collection process.
[0018] Optionally, the hardness of the material of the ground wafer is lower than that of iron.
[0019] Optionally, the ground wafer is a lithium tantalate or lithium niobate wafer with a thickness less than 250 μm.
[0020] The grinding and rust prevention system disclosed in this application has the following beneficial effects:
[0021] 1. The magnetic module can discharge iron filings, rust and other impurities in the mortar barrel to the maximum extent. The electromagnetic adsorption pipeline and flushing module can discharge iron filings, rust and other impurities in the pipeline to the maximum extent. The grinding and rust prevention system disclosed in this application can discharge iron filings, rust and other impurities to the maximum extent, which can effectively solve the problem of wafer scratches;
[0022] 2. The spray module can effectively prevent the upper and lower grinding discs from rusting, reduce the manpower load and improve efficiency; the interval spraying function of the spray shower can prevent the disc from rusting to the greatest extent and improve the processing yield;
[0023] 3. The grinding and rust prevention system disclosed in this application is suitable for wafers with a material hardness lower than iron because of its low impurities such as iron filings and rust. It is also suitable for lithium tantalate or lithium niobate wafers with a thickness of less than 250μm. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] In order to more clearly illustrate the technical solutions in this application or the prior art, the following briefly introduces the drawings required for use in this application or the prior art description. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without inventive work. In the drawings:
[0025] Figure 1 This is a schematic diagram of the operation of a conventional grinding machine mortar;
[0026] Figure 2 This is a schematic diagram of the operation of the grinding machine mortar in one embodiment of the present application;
[0027] Figure 3 This is a schematic structural diagram of a magnetic attraction module in one embodiment of the present application;
[0028] Figure 4 is a top view of a tray in one embodiment of the present application;
[0029] Figure 5This is a structural diagram of the mortar inlet pipeline in one embodiment of the present application;
[0030] Figure 6 It is a structural diagram of a spray module in one embodiment of the present application.
[0031] Reference numerals:
[0032] 1. Mortar bucket, 2. Mortar outlet pipe,
[0033] 3. Mixer, 4. Clamping parts,
[0034] 5. Magnet, 6. Control module,
[0035] 7. Tray support assembly, 8. Mortar valve,
[0036] 9. Electromagnet, 10. Iron chips adsorption position,
[0037] 11. Mortar flow direction, 12. Electromagnetic control module,
[0038] 13. Water inlet pipe, 14. Water outlet pipe,
[0039] 15. Spraying head, 16. Showing the spraying position,
[0040] 17. Rotating structure, 18. Anti-rust agent tank,
[0041] 19. Transmission tube, 20. Tray,
[0042] 21. Water valve. DETAILED DESCRIPTION
[0043] In order to make the purpose, technical solutions and advantages of this application more clear, the application is further described in detail below with reference to the accompanying drawings. Here, the illustrative embodiments of this application and their descriptions are used to explain this application, but are not intended to limit this application.
[0044] It should be noted in advance that the descriptions of the following embodiments or examples or the features mentioned therein can be combined with the features of other embodiments or examples in the same or similar manner, or replace the features of other embodiments or examples to form possible implementations. In addition, the term "include / comprise" as used herein refers to the presence of a feature, element, step, or component, but does not exclude the presence of one or more other features, elements, steps, or components.
[0045] See also Figure 1, is a schematic diagram of the operation of a traditional grinding machine slurry. Only magnets and filters are installed in the slurry's diversion pipeline. Before the slurry is recovered into the mortar barrel, the magnets and filters are used to filter out rust, iron filings, and other impurities. However, this filtering effect is only suitable for wafers with a hardness greater than that of iron, such as sapphire wafers. There will be no obvious scratches or fragments during the processing of sapphire wafers. However, when processing ultra-thin lithium tantalate wafers with a material hardness lower than that of iron and a thickness of less than 250μm, this filtering effect is not satisfactory. A large number of scratches will occur. As the mortar is used more frequently, the scratch and fragmentation rate of ultra-thin lithium tantalate wafers will continue to increase. In the traditional grinding process, a certain proportion of rust inhibitor is added to the slurry to prevent rust on the disc surface. The rust inhibitor is manually sprayed on the upper and lower grinding discs in between wafer collection. This method is inefficient and the manual spraying speed is slow. In addition, the slurry attached to the lower surface of the wafer may dry out during the manual spraying process, resulting in the wafer needing to be re-grinded, affecting production efficiency and cost.
[0046] In order to solve the above problems, this application discloses a grinding anti-rust system, see Figure 2 , which is a schematic diagram of the mortar operation of the grinder of this application. Compared with the traditional grinder, a magnetic suction module, a mortar inlet pipeline that is partly an electromagnetic adsorption pipeline, a flushing module, a spray module are added on the basis of the mortar barrel, mortar inlet pipeline, mortar diversion pipeline, grinding disc surface, magnet, and filter screen. A computer module for controlling the functions of each part is also added.
[0047] See also Figure 3 , is a structural diagram of the magnetic module in the embodiment of the present application, which is used to absorb impurities in the mortar bucket 1 during the mortar mixing process of the mixer 3, and the impurities in the mortar bucket include iron filings, rust and / or other impurities; the magnetic module also includes a clamping component 4 and a tray 20, see Figure 4 , is a top view of the tray 20 in the embodiment of the present application. The tray 20 is circular and is used to carry multiple magnets. It can rotate around its center in a horizontal plane. In this embodiment, the tray 20 carries four magnets. The control module 6 is connected to the computer module. When the mixer 3 is operating, the control module 6 controls the clamping component 4 to clamp a magnet and immerse the magnet in the mortar bucket 1 to absorb iron filings, rust, etc., while stirring and absorbing impurities in the mortar bucket 1. The absorbed mortar is then discharged through the mortar outlet pipe 2 for the next use.
[0048] After the magnet 5 is adsorbed, the clamping part 4 is pulled out from the mortar bucket 1 and moved above the tray 20. The control module 6 controls the clamping part 4 to place the magnet 5 adsorbed with iron filings on the tray 20, and rotates the tray at the same time. The clamping part 4 takes out the unused magnets on the tray 20 for the next adsorption operation.
[0049] In the embodiment of the present application, the magnet 5 of the magnetic attraction module is a neodymium iron boron magnet, which has a stronger magnetic force and a better adsorption effect.
[0050] In an embodiment of the present application, after the grinding program is started, the mortar passes through the electromagnetic adsorption pipeline, and the electromagnetic control module controls the electromagnets set on the periphery of the pipeline to adsorb the iron filings in the mortar onto the pipe wall; when the grinding program ends, the electromagnetic control module controls the electromagnets set on the periphery of the pipeline to turn off the adsorption function, and the computer module controls the opening of the flushing module to discharge the iron filings from the mortar pipeline.
[0051] The magnetism of an electromagnet can be controlled by turning the current on and off, by the strength of the current or the number of turns of the coil, and the magnetism can be controlled by changing the resistance to control the current. However, the magnetism, magnetism strength, and magnetic pole direction of an ordinary magnet cannot generally be changed at will. Therefore, in an embodiment of the present application, an electromagnet is used in an electromagnetic adsorption pipeline to adsorb impurities such as iron filings and rust in the mortar pipeline, and the magnetism and magnetism strength of the electromagnet are controlled by connecting an electromagnetic control module.
[0052] The mortar inlet pipeline, part of which is an electromagnetic adsorption pipeline, has a specific structure including the mortar inlet pipeline being made of steel, and an electromagnet being arranged on the periphery of the pipeline, which is used to adsorb impurities such as iron filings and rust on the pipe wall during the flow of mortar. The electromagnetic adsorption pipeline is also connected to an electromagnetic control module for controlling the electromagnet arranged on the periphery of the pipeline.
[0053] The flushing module is installed on the electromagnetic adsorption pipeline and is used to flush impurities such as iron chips and rust adsorbed by the pipeline during processing and shutdown to ensure that the impurity content is lower than the preset value and that the adsorption effect of the electromagnet on iron chips is maintained at a certain rate.
[0054] See also Figure 5 , which is a schematic diagram of the structure of the mortar inlet pipeline in an embodiment of the present application. During operation of the grinding machine, the mortar valve 8 is opened and the water valve 21 is closed. The mortar flows from left to right in the pipeline. The electromagnetic control module 12 controls the electromagnet 9 to activate the adsorption function. Iron filings, rust, and other impurities in the mortar are adsorbed onto the pipe wall. The amount of iron filings, rust, and other impurities in the mortar that reaches the grinding disc through the electromagnetic adsorption pipeline is greatly reduced. At the end of the grinding process, the mortar valve 8 is closed and the water valve 21 is opened. The electromagnetic control module 12 controls the electromagnet 9 to deactivate the adsorption function. Iron filings, rust, and other impurities in the electromagnetic adsorption pipeline are discharged from the water outlet pipe 14 along with the water flow.
[0055] See also Figure 6, is a schematic diagram of the structure of the spray module in the embodiment of the present application. The spray module is used to spray the upper and lower discs of the grinding machine with rust preventive agent when the grinding machine stops working and collects the slices, ensuring that the upper and lower grinding discs are kept moisturized. The spray module includes a rotating structure 17, a spray shower 15, a rust preventive tank 18 and a transmission pipe 19. The spray shower 15 is connected to the rust preventive tank 18 via the transmission pipe 19. The rotating structure 17 is used to control the movement of the spray shower 15. After the grinding process is completed, the computer module controls the spray shower 15 to move between the upper and lower grinding discs to spray the rust preventive agent. Figure 6 In the middle, 16 is a spraying position. After spraying is completed, the spraying shower 15 moves back to its original position.
[0056] In the embodiment of the present application, when the spray shower 15 is spraying, the distance between it and the grinding lower disk surface is greater than the distance between it and the grinding upper disk surface. The spray shower 15 maintains a sufficient distance from the grinding lower disk surface for the operator to collect the wafers, thereby avoiding affecting the operator's wafer collection action.
[0057] In the embodiment of the present application, the time for the spray head 15 to complete one spraying is 3 to 6 seconds.
[0058] In the embodiment of the present application, when the grinding machine stops working, the computer module controls the spray shower 15 to complete a spraying action at a fixed interval. The fixed time can be set to 30~60s to ensure that the upper and lower grinding discs are in a moisturizing state during the wafer collection process.
[0059] The computer module is used to control the magnetic attraction module, electromagnetic control module, flushing module and spraying module to execute commands according to preset programs.
[0060] The grinding and rust prevention system disclosed in the embodiments of the present application can be used to process wafers made of materials with a hardness lower than that of iron, and can also be used to process lithium tantalate or lithium niobate wafers with a thickness of less than 250 μm.
[0061] The grinding and rust prevention system disclosed in the embodiments of the present application has the following beneficial effects:
[0062] 1. The magnetic module can discharge iron filings, rust and other impurities in the mortar barrel to the maximum extent. The electromagnetic adsorption pipeline and flushing module can discharge iron filings, rust and other impurities in the pipeline to the maximum extent. The grinding and rust prevention system disclosed in this application can discharge iron filings, rust and other impurities to the maximum extent, which can effectively solve the problem of wafer scratches;
[0063] 2. The spray module can effectively prevent the upper and lower grinding discs from rusting, reduce the manpower load and improve efficiency; the interval spraying function of the spray shower can prevent the disc from rusting to the greatest extent and improve the processing yield;
[0064] 3. The grinding and rust prevention system disclosed in this application is suitable for wafers with a material hardness lower than that of iron, and is also suitable for lithium tantalate or lithium niobate wafers with a thickness of less than 250μm, because it has low impurities such as iron filings and rust.
[0065] The specific embodiments described above further illustrate the purpose, technical solutions and beneficial effects of the present application. It should be understood that the above description is only a specific embodiment of the present application and is not intended to limit the scope of protection of the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application should be included in the scope of protection of the present application.
Claims
1. A grinding and rust prevention system, characterized in that: include: mortar bucket; The magnetic module is used to absorb impurities in the mortar bucket during the mortar mixing process. It includes a clamping component and a tray. The tray is used to carry multiple magnets. The clamping component is used to clamp the magnets and immerse the magnets in the mortar bucket to absorb iron filings. After the adsorption is completed, the magnets are pulled out of the mortar bucket and moved above the tray. The mortar inlet pipeline, part of which is an electromagnetic adsorption pipeline, is made of steel, and an electromagnet is set on the periphery of the pipeline to adsorb iron filings to the pipe wall during the flow of mortar. The electromagnetic adsorption pipeline is also connected to an electromagnetic control module for controlling the electromagnet set on the periphery of the pipeline; A flushing module is provided on the electromagnetic adsorption pipeline, and is used to flush the iron chips adsorbed by the pipeline during the intervals between processing and shutdown to ensure that the iron chip content is lower than a preset value; The spray module is used to spray rust inhibitor on the upper and lower surfaces of the grinding machine when the grinding machine stops working and collects the sheets, ensuring that the upper and lower grinding plates are kept moisturized. It includes a rotating structure, a spray shower, a rust inhibitor tank and a transmission pipe. The spray shower is connected to the rust inhibitor tank through the transmission pipe. The rotating structure is used to control the movement of the spray shower. The computer module is used to control the magnet module, electromagnetic control module, flushing module and spray module, specifically: The computer module controls the clamping component to place the magnet with the iron filings on the tray and remove the unused magnet on the tray for the next operation; After the grinding process is started, the mortar passes through the electromagnetic adsorption pipeline, and the electromagnetic control module controls the electromagnets provided on the periphery of the pipeline to adsorb the iron filings in the mortar onto the pipe wall; When the grinding process is finished, the electromagnetic control module controls the electromagnets provided on the periphery of the pipeline to turn off the adsorption function; the computer module turns on the flushing module to discharge the iron chips out of the mortar pipeline; After the grinding process is completed, the computer module controls the spray shower to move to between the upper and lower grinding discs to spray the rust preventive agent. After the spraying is completed, the spray shower moves back to its original position.
2. A grinding and rust prevention system according to claim 1, characterized in that: The tray is circular and can rotate around the center on a horizontal plane; the computer module controls the clamping component to place the magnet with iron filings on the tray and rotate the tray at the same time, and the clamping component removes the unused magnets on the tray for the next operation.
3. A grinding and rust prevention system according to claim 1, characterized in that: The magnet of the magnetic attraction module is a neodymium iron boron magnet.
4. A grinding and rust prevention system according to claim 1, characterized in that: When the shower head is spraying, the distance between the shower head and the grinding lower disc surface is greater than the distance between the shower head and the grinding upper disc surface.
5. The grinding and rust prevention system according to claim 1, characterized in that: The spray shower completes one spray The time is 3 to 6 seconds.
6. A grinding and rust prevention system according to claim 1, characterized in that: When the grinding machine stops working, the computer module controls the spray head to complete a spraying action at a fixed interval.
7. The grinding and rust prevention system according to claim 1, characterized in that: The fixed time interval of the spray shower is 30 to 60 seconds.
8. A grinding and rust prevention system according to any one of claims 1 to 7, characterized in that: The ground wafer is a lithium tantalate or lithium niobate wafer with a thickness less than 250 μm.
Citation Information
Patent Citations
Grinding machine with grinding liquid filtering device
CN104647200A
Lapping liquid iron fillings separator
CN207888461U