Contact testing equipment and dicing machine

Abstract

Embodiments of this application provide a contact detection device and a dicing machine. The device includes: a first circuit for connecting to a first workpiece to be tested via two first connecting lines to form a first circuit; a second circuit for connecting to a second workpiece to be tested via two second connecting lines to form a second circuit; and a first detection module for detecting the voltage of a first preset node in the first or second circuit, and determining whether the first and second workpieces to be tested are electrically connected due to contact based on the voltage of the first preset node and the corresponding theoretical voltage. This device can achieve timely and effective contact detection of two workpieces to be tested, and is not easily affected by other factors, thus achieving high detection accuracy and sensitivity.

Description

Technical Field

[0001] This application relates to the field of testing technology, specifically to a contact testing device and a dicing machine. Background Technology

[0002] In some fields of testing technology, it is common to use testing devices to detect whether multiple test pieces are in contact, so that if contact is confirmed, the test pieces can be further controlled.

[0003] Taking dicing machines in the wafer dicing field as an example, in the process of using dicing machines to cut silicon wafers, wafers, and special cuts, it is necessary to accurately determine whether the cutting blade has come into contact with the turntable, so as to control the cutting blade to stop descending when contact is confirmed.

[0004] In existing technologies, contact detection schemes have low detection accuracy and are easily affected by other factors in the circuit, resulting in low detection sensitivity and efficiency. Summary of the Invention

[0005] To at least partially solve the above-mentioned technical problems, according to a first aspect of this application, a contact detection device is provided, comprising: a first circuit for connecting to a first test piece via two first connecting lines to form a first circuit; a second circuit for connecting to a second test piece via two second connecting lines to form a second circuit; and a first detection module for detecting the voltage of a first preset node in the first circuit or the second circuit, so as to determine whether the first test piece and the second test piece are electrically connected due to contact based on the voltage of the first preset node and the corresponding theoretical voltage.

[0006] For example, the device further includes a second detection module and / or a third detection module, wherein the second detection module is used to detect the voltage of the second preset node in the first circuit, so as to determine whether the first circuit is disconnected based on the voltage of the second preset node and the corresponding theoretical voltage; the third detection module is used to detect the voltage of the third preset node in the second circuit, so as to determine whether the second circuit is disconnected based on the voltage of the third preset node and the corresponding theoretical voltage.

[0007] For example, the device further includes a processing module, configured to determine whether the first test piece and the second test piece are electrically connected due to contact, based on the voltage of the first preset node and the corresponding theoretical voltage, when neither the first circuit nor the second circuit is disconnected.

[0008] For example, the processing module is further configured to: determine whether the first circuit is disconnected based on the voltage of the second preset node and the corresponding theoretical voltage; and / or determine whether the second circuit is disconnected based on the voltage of the third preset node and the corresponding theoretical voltage.

[0009] For example, the device further includes a switching module; the switching module is used to control the formation of a first circuit and / or a second circuit based on the control signal from the processing module; the processing module is also used to determine whether the first circuit and / or the second circuit is disconnected after outputting the control signal.

[0010] For example, the processing module includes: a comparison submodule, used to compare the voltage of each preset node with the corresponding theoretical voltage, and output a corresponding electrical signal according to each comparison result; and a control submodule, used to determine whether the first circuit and / or the second circuit is disconnected based on the electrical signal, and to determine whether the first test piece and the second test piece are electrically connected due to contact.

[0011] For example, the comparison submodule includes comparators, wherein the two inputs of each comparator are respectively connected to each preset node and a reference voltage node, and the voltage of each reference voltage node is equal to the theoretical voltage corresponding to the preset node.

[0012] For example, the first circuit includes a first voltage divider resistor and a second voltage divider resistor, wherein the first end of the first voltage divider resistor is connected to a first power supply, the second end of the first voltage divider resistor serves as the first end of the first circuit, the first end of the second voltage divider resistor serves as the second end of the first circuit, and the second end of the second voltage divider resistor is grounded; and / or the second circuit includes a third voltage divider resistor, a fourth voltage divider resistor, and a fifth voltage divider resistor, wherein the first end of the third voltage divider resistor is connected to the first power supply, the second end of the third voltage divider resistor serves as the first end of the second circuit, the first ends of the fourth and fifth voltage divider resistors are connected and serve as the second end of the second circuit, the second end of the fourth voltage divider resistor is grounded, and the second end of the fifth voltage divider resistor is connected to a second power supply; wherein the first preset node includes either end of the first connection line of the first circuit or either end of the second connection line of the second circuit; the second preset node includes either end of the first connection line of the first circuit; and the third preset node includes either end of the second connection line of the second circuit.

[0013] According to a second aspect of this application, a dicing machine is provided, comprising: a first test piece, a second test piece, and the aforementioned contact detection device. The first test piece is a cutting blade, and the second test piece is a turntable.

[0014] For example, the contact detection device includes a processing module, which is used to determine whether the cutting blade and the turntable are electrically connected due to contact, based on the voltage of the first preset node and the corresponding theoretical voltage, when neither the first circuit nor the second circuit is disconnected; and when it is determined that the cutting blade and the turntable are electrically connected due to contact, to output a stop control signal to the movement drive module of the cutting blade to control the cutting blade to stop moving.

[0015] The aforementioned contact detection device utilizes a first circuit and a second circuit to connect a first test piece and a second test piece, respectively. Based on the voltage of a first preset node in either of the two circuits and the corresponding theoretical voltage, it determines whether the two test pieces are in contact. This solution enables timely and effective contact detection of two test pieces and is less susceptible to interference from other factors, resulting in high accuracy and sensitivity.

[0016] The invention description introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This description is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0017] The advantages and features of this application are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0018] The following drawings, which are incorporated herein by reference and are used to understand this application, illustrate embodiments of the invention and their descriptions to explain the principles of the invention. In the drawings,

[0019] Figure 1 shows a schematic block diagram of a contact detection device according to an embodiment of this application;

[0020] Figure 2 A schematic diagram of a first circuit and a second circuit according to an embodiment of this application is shown;

[0021] Figure 3 A schematic diagram of a comparative submodule according to an embodiment of this application is shown;

[0022] Figure 4 A schematic block diagram of a dicing machine apparatus according to one embodiment of this application is shown; and

[0023] Figure 5 A schematic diagram of a dicing machine apparatus according to another embodiment of this application is shown. Detailed Implementation

[0024] In the following description, numerous details are provided to enable a thorough understanding of this application. However, those skilled in the art will appreciate that the following description pertains only to preferred embodiments of the application, and that the application can be implemented without one or more of these details. Furthermore, to avoid confusion with this application, some technical features well-known in the art have not been described.

[0025] To at least partially solve the aforementioned technical problems, according to one aspect of this application, a contact detection device is provided. This contact detection device determines whether the two test pieces are in contact by detecting the voltage of a preset node in the circuit loop containing either test piece or the corresponding theoretical voltage. That is, by detecting and comparing the voltage of the preset node with the theoretical voltage, the occurrence of a contact event can be accurately detected at the moment the two test pieces come into contact. This contact detection device can be used for contact detection of any suitable test pieces in any field. For example, the two test pieces can be a cutting blade and a turntable in the cutting field. The contact detection device can be a device that can accurately determine whether the cutting blade is in contact with the turntable during precision cutting processes such as silicon wafer cutting, wafer cutting, and special cutting. For simplicity, the following explanation will only use a cutting blade and a turntable as examples, with the first and second test pieces being a cutting blade and a turntable, respectively.

[0026] Figure 1a A schematic block diagram of a contact detection device 100 according to one embodiment of this application is shown. Figure 1a As shown, the contact detection device 100 includes a first circuit 110, a second circuit 120, and a first detection module 130.

[0027] The first circuit 110 is used to connect to the first device under test via two first connecting lines to form a first loop. The first circuit 110 can be any suitable circuit. For example, the first circuit 110 can be a voltage divider circuit, which may include one or more voltage divider resistors. The connection between the voltage divider resistors can be arbitrary; it can be a series connection, a parallel connection, or a hybrid series-parallel connection. The first circuit 110 may include a power supply. The two ends of the first circuit 110 can be connected to the two first connecting lines respectively. Exemplarily, the two ends of the first circuit 110 can be two points with unequal potentials. For example, the first circuit 110 may include a first power supply, with its two ends connected to the positive and negative terminals of the power supply respectively. Alternatively, the first circuit 110 may include a pull-up resistor with one end connected to the supply voltage and a pull-down resistor with one end grounded. The two ends of the first circuit 110 can be the other end of the pull-up resistor and the other end of the pull-down resistor, respectively. The first connecting lines can be any suitable wires. Taking the first test piece as a cutting blade as an example, the two first connecting lines can be brush lines that connect the two brushes of the cutting blade shaft respectively, and the first circuit 110 can be a brush voltage divider circuit. Thus, when the first circuit 110 is energized, it can be indirectly electrically connected to the cutting blade by connecting the two first connecting lines, forming a circuit, i.e., the first loop.

[0028] The second circuit 120 is used to connect to the second device under test via two second connecting lines to form a second loop. The second circuit 120 can also be a circuit similar to the first circuit 110. The second circuit 120 can have the same or different circuit structure as the first circuit 110. Exemplarily and not limitingly, the second circuit 120 can also be a voltage divider circuit. The second circuit 120 can include one or more voltage divider resistors. The two ends of the second circuit 120 can also be two points with different potentials. For example, the second circuit 120 also includes pull-up resistors and pull-down resistors. The two ends of the second circuit 120 can be the other ends of the pull-up resistor and pull-down resistor, respectively. The second connecting lines can also be any suitable wires. Taking a turntable as an example, the two second connecting lines can be connecting lines to the positive and negative terminals of the turntable, respectively, and the second circuit 120 can be a voltage divider circuit for the turntable. Thus, when energized, the second circuit 120 can be indirectly electrically connected to the turntable by connecting the two second connecting lines, forming another path, i.e., a second loop.

[0029] The first detection module 130 is used to detect the voltage of a first preset node in a first circuit or a second circuit. The first detection module 130 can have any suitable form, as long as it can perform voltage detection. Optionally, the first detection module 130 can be a voltmeter installed at the first preset node. Alternatively, the first detection module 130 can also be a connecting line installed at the first preset node and output to an external device such as an external voltmeter. Alternatively, the first detection module 130 can also be an analog-to-digital converter, which can convert the electrical signal of the first preset node into a digital signal and output it to an external device such as a host computer.

[0030] like Figure 1a As shown, the first detection module 130 can be connected to a first preset node in the first circuit to detect the voltage of the first preset node in the first circuit. The first preset node can be any suitable location in the first circuit, as long as there is a detectable change in the voltage of the node before and after the two objects to be tested come into contact. For example, before contact, the voltage of the first preset node is the voltage in the first circuit; after contact, the first circuit and the second circuit are connected, and the voltage of the first preset node is the voltage of the entire circuit formed by the connection of the first circuit and the second circuit, and there is a voltage change before and after contact. For example, the first preset node can be any one of the two endpoints of the first circuit 110 that are connected to the two first connecting lines.

[0031] Similarly, the first detection module 130 can also be connected to the first preset node in the second circuit to detect the voltage of the first preset node in the second circuit. Figure 1b A schematic block diagram of a contact detection device 100 according to another embodiment of this application is shown. Figure 1bAs shown, the first preset node can be any suitable node in the second circuit. For example, the first preset node can be either of the two endpoints of the second circuit 120 that are connected to the two second connection lines.

[0032] Then, any suitable method can be used to determine whether the first and second test pieces are electrically connected due to contact, based on the voltage of the first preset node and the corresponding theoretical voltage. The theoretical voltage corresponding to the voltage of the first preset node can be the voltage of the first preset node when the two test pieces are in contact, theoretically. The corresponding theoretical voltage can be a pre-tested or pre-calculated voltage. For ease of distinction, the theoretical voltage corresponding to the voltage of the first preset node can be referred to as the first theoretical voltage.

[0033] The voltage of the first preset node and the corresponding theoretical voltage can be compared using any suitable method. Based on the comparison result, any suitable judgment logic can be used to determine whether the first and second test pieces are electrically connected due to contact. Optionally, the voltage of the first preset node detected and output can be manually compared with the corresponding theoretical voltage to determine whether the two test pieces are in contact. Alternatively, a suitable device or component can be used to automatically compare the voltage of the first preset node with the corresponding theoretical voltage to determine whether the two test pieces are in contact. For example, the contact detection device 100 may also include a first comparator connected to the first preset node. The first comparator can be used to compare the voltage of the first preset node with the corresponding theoretical voltage and output a comparison result signal. The contact detection device 100 may also include a controller electrically connected to the comparator. The controller can receive the comparison result signal and determine whether the first and second test pieces are electrically connected due to contact based on the comparison result signal. The comparison result signal may include, for example, a first signal indicating that the voltage of the first preset node and the corresponding theoretical voltage are equal and a second signal indicating that the voltage of the first preset node and the corresponding theoretical voltage are not equal. The first signal and the second signal can be one of a low-level signal and the other of a high-level signal.

[0034] For example, the first and second test items are a cutting blade and a turntable, respectively. The first circuit 110 includes a brush voltage divider circuit with pull-up and pull-down resistors. The second circuit 120 is a turntable voltage divider circuit with pull-up and pull-down resistors. The voltage of a first preset node on the brush voltage divider circuit or the turntable voltage divider circuit can be detected using the first detection module 130. The detected voltage of the first preset node can be compared with the corresponding theoretical voltage using any suitable method, and the comparison result can be used to determine whether the cutting blade and the turntable are in contact. Different processing can be performed based on the determination of whether they are in contact. For example, when the detected voltage of the first preset node is equal to the first theoretical voltage, it can be determined that the cutting blade and the turntable are in contact. Then, the cutting blade can be controlled to stop moving downwards. Alternatively, when the detected voltage of the first preset node is not equal to the first theoretical voltage, it can be determined that the cutting blade is not in contact with the turntable, and then the cutting blade can be controlled to continue moving downwards.

[0035] The contact detection device in the above scheme uses a first circuit and a second circuit to connect a first test piece and a second test piece, respectively. Based on the voltage of a first preset node in either of the two circuits and the corresponding theoretical voltage, it determines whether the two test pieces are in contact. This scheme can achieve timely and effective contact detection of two test pieces and is not easily affected by other factors, thus achieving high detection accuracy and sensitivity.

[0036] For example, the contact detection device 100 further includes a second detection module and / or a third detection module. The second detection module detects the voltage of a second preset node in the first circuit to determine whether the first circuit is open based on the voltage of the second preset node and the corresponding theoretical voltage. The third detection module detects the voltage of a third preset node in the second circuit to determine whether the second circuit is open based on the voltage of the third preset node and the corresponding theoretical voltage.

[0037] Similar to the first detection module 130, the second and third detection modules can also be any existing or future-developed components or devices capable of voltage detection. The second and third detection modules can have the same structure as the first detection module 130, or they can be different.

[0038] The second detection module can be connected to a second preset node of the first circuit. The second preset node can be any suitable point in the first circuit, as long as the voltage value at that point changes detectably when the first circuit is formed and broken. For example, the second preset node can also be either the first or second end of the first circuit 110. The second preset node can be at the same or different position as the first preset node. For example, both the first detection module 130 and the second detection module can be connected to either end of the first circuit 110. When both are connected to the same end of the first circuit 110, the first preset node can be at the same position as the second preset node. It is understood that although their positions are the same in this case, their corresponding theoretical voltages are different. The theoretical voltage corresponding to the voltage of the second preset node can be called the second theoretical voltage. The second theoretical voltage can be the theoretical voltage of the second preset node that has been pre-tested or calculated when the first circuit is not actually formed, i.e., when the first circuit is actually open. Alternatively, the second theoretical voltage can also be the theoretical voltage of the second preset node that has been pre-tested or calculated when the first circuit is actually formed. The voltage of the second preset node in the first circuit can be detected in real time by the second detection module. The detected voltage and the second theoretical voltage can be compared using any suitable method, and the first circuit can be determined to be open based on the comparison result. Similar to the aforementioned method of determining whether the first and second test objects are in contact using the detection result of the first detection module 130, a manual comparison and judgment method can be used. Alternatively, preferably, the voltage of the second preset node in the first circuit detected by the second detection module and the second theoretical voltage can be compared using a voltage comparison device such as a comparator, and a comparison result can be obtained. For example, a first signal indicating that the two are equal and a second signal indicating that they are not equal can be output. Then, the controller can receive the signals and determine whether the first circuit is open based on the signals. Further subsequent processing can also be performed. For example, the second theoretical voltage is the theoretical voltage of the second preset node that has been pre-tested or calculated when the first circuit is actually formed. The controller can determine that the first circuit is not open when it receives a first signal indicating that the voltage of the second preset node in the first circuit is equal to the second theoretical voltage; and can determine that the first circuit is open when it receives a second signal indicating that the voltage of the second preset node in the first circuit is not equal to the second theoretical voltage. Exemplarily, the contact detection device 100 may also include an alarm module. If the first circuit is determined to be disconnected, the controller can activate the alarm module to issue an alarm indicating that the first circuit is disconnected. This alerts the user to promptly detect and address the first circuit issue.

[0039] The third detection module can be connected to a third preset node of the second circuit. The second preset node can be any suitable point in the second circuit, as long as the voltage value at that point changes detectably when the second circuit is formed and disconnected. For example, the third preset node can also be the first or second end of the second circuit 120. The third preset node can be at the same or different position as the first preset node. For example, both the first detection module 130 and the third detection module can be connected to either end of the second circuit 120. When both are connected to the same end of the second circuit 120, the first preset node and the third preset node can be at the same position. The theoretical voltage corresponding to the voltage of the third preset node can be called the third theoretical voltage. The third theoretical voltage can be the theoretical voltage of the third preset node that has been pre-tested or calculated before the second circuit is formed. Alternatively, the third theoretical voltage can also be the theoretical voltage of the third preset node that has been pre-tested or calculated when the second circuit is actually formed. The voltage of the third preset node in the second circuit can be detected in real time by the third detection module. The detected voltage and the third theoretical voltage can be compared by any suitable method, and the second circuit can be determined as to whether it is disconnected based on the comparison result. Manual comparison and judgment can also be used. Preferably, the voltage of the third preset node in the second loop detected by the third detection module and the third theoretical voltage can be compared by a voltage comparison device such as a comparator to obtain a comparison result. For example, a first signal indicating that the two are equal and a second signal indicating that they are not equal can be output. Then, the controller can receive the signal and determine whether the second loop is open based on the signal. Further subsequent processing can be performed. For example, the third theoretical voltage is the theoretical voltage of the third preset node that has been tested or calculated in advance when the second loop is formed. The controller can determine that the second loop is not open when it receives the first signal indicating that the voltage of the third preset node in the second loop is equal to the third theoretical voltage; and can determine that the second loop is open when it receives the second signal indicating that the voltage of the third preset node in the second loop is not equal to the third theoretical voltage. Exemplarily, the contact detection device 100 may also include an alarm module. When it is determined that the second loop is open, the controller can control the alarm module to issue an alarm message indicating that the second loop is open. Thus, the user can be reminded to perform detection processing on the second loop in a timely manner.

[0040] For example, if the first component to be tested is a cutting blade and the second component is a turntable, the voltage of a second preset node in a brush voltage divider circuit can be detected by a second detection module. The real-time detected voltage of the second preset node can be compared with the second theoretical voltage, allowing the determination of whether the brush wire is functioning correctly. For instance, if the first circuit is determined to be open, further investigation can be conducted to check for abnormalities that could cause the first circuit to be open, such as whether the brush wire is properly connected or broken. Similarly, the voltage of a third preset node in a turntable voltage divider circuit can be detected by a third detection module. The real-time detected voltage of the third preset node can be compared with the third theoretical voltage, allowing the determination of whether the turntable wire is functioning correctly. Thus, by using two or three detection modules to detect the voltage of the corresponding preset nodes, not only can contact detection of the cutting blade and turntable be achieved, but also accurate detection of the individual operating states of the brush wire and turntable wire. In other words, the three operating states of the carbon brush wire and turntable wire can be determined simultaneously based on the voltage detected at the preset nodes, significantly improving the stability of the dicing machine.

[0041] Figure 2 A schematic diagram of a first circuit and a second circuit according to an embodiment of this application is shown. As shown, the first circuit 110 includes a first voltage divider resistor R1 and a second voltage divider resistor R2. The first terminal of the first voltage divider resistor R1 is connected to a first power supply, and the second terminal of the first voltage divider resistor R1 serves as the first terminal of the first circuit 110. The first terminal of the second voltage divider resistor R2 serves as the second terminal of the first circuit 110, and the second terminal of the second voltage divider resistor R2 is grounded. The second circuit 120 includes a third voltage divider resistor R3, a fourth voltage divider resistor R4, and a fifth voltage divider resistor R5. The first terminal of the third voltage divider resistor R3 is connected to the first power supply, and the second terminal of the third voltage divider resistor R3 serves as the first terminal of the second circuit 120. The first terminals of the fourth voltage divider resistor R4 and the fifth voltage divider resistor R5 are connected together and serve as the second terminal of the second circuit 120. The second terminal of the fourth voltage divider resistor R4 is grounded, and the second terminal of the fifth voltage divider resistor R5 is connected to a second power supply. The first preset node includes either the first terminal or the second terminal of the first circuit 110, or either the first terminal or the second terminal of the second circuit 120. The second preset node includes either the first terminal or the second terminal of the first circuit 110. The third preset node includes either the first terminal or the second terminal of the second circuit 120.

[0042] like Figure 2As shown, the first power supply is, for example, the supply voltage VCC 3.3V. The first circuit can be formed by the first power supply, the first voltage divider resistor R1, the first device under test, and the second voltage divider resistor R2 when the first circuit 110 is connected to the first power supply. The two ends of the first circuit 110 can be terminals A and B as shown in the figure. Terminal A is connected to the first voltage divider resistor R1 and the first power supply VCC 3.3V. Therefore, when the first circuit is open, i.e., not actually formed, the voltage at terminal A is also equal to 3.3V, while when the first circuit is formed, the voltage at terminal A is less than 3.3V due to the voltage division of the first voltage divider resistor. In addition, since the second voltage divider resistor R2 connected to terminal B is grounded, on the one hand, when the first power supply is connected and two first connection lines are connected, a high and low potential difference can be formed, thereby forming the first circuit. On the other hand, when the first circuit is open, the voltage at terminal B is close to 0V; while when the first circuit is formed, the voltage at terminal B is not 0. The first preset node and the second preset node can both be either terminal A or terminal B. The voltage of the second preset node can be compared with the second theoretical voltage, and the first circuit can be determined as to whether it is disconnected based on the comparison result.

[0043] like Figure 2 As shown, the first power supply can also be the supply voltage of the second circuit. The second circuit can be formed by the first power supply, the third voltage divider resistor R3, the second device under test, the fourth voltage divider resistor R4, the fifth voltage divider resistor R5, and the second power supply when the second circuit 120 is connected to the first power supply. The two ends of the second circuit 120 can be terminals A' and B' as shown in the figure. Terminal A' is connected to the first voltage divider resistor R3 and the first power supply VCC (3.3V). Therefore, when the second circuit is open, the voltage at terminal A' is also equal to 3.3V, while when the second circuit is formed, the voltage at terminal A' is less than 3.3V due to the voltage division by the third voltage divider resistor R3. Furthermore, since the fourth voltage divider resistor R4 connected to terminal B' is grounded, and the fifth voltage divider resistor R5 is connected to the second power supply, which is, for example, the VIN input voltage of 24V. Therefore, when the second circuit is open, a path is formed by the second power supply, the fourth voltage divider resistor R4, and the fifth voltage divider resistor R5, and the voltage at terminal B' is the voltage portion of the second power supply shared by the fourth voltage divider resistor. When the second circuit is formed, the voltage at terminal B' becomes the voltage after the fourth voltage divider resistor shares the voltage portions of the first and second power supplies. It can be understood that the voltage at terminal B' changes after the second circuit is formed. Therefore, both the first and third preset nodes can be either terminal A' or terminal B'. Thus, by comparing the voltage at the third preset node with the third theoretical voltage, it can be determined whether the second circuit is broken based on the comparison result.

[0044] like Figure 2As shown, when the first and second test pieces are in contact, the voltages at terminals A and B in the first circuit 110 and terminals A' and B' in the second circuit 120 are the same. Furthermore, the voltage is the voltage at that node in the entire loop formed by the first and second circuits. At this time, the voltages at terminals A and B in the first circuit 110 are different from the voltages at terminals A and B when the first and second test pieces are not in contact and the first circuit is either open or not open. Similarly, the voltages at terminals A' and B' in the second circuit 120 are different from the voltages at terminals A' and B' when the first and second test pieces are not in contact and the second circuit is either open or not open. Therefore, the voltage of the first preset node (any one of terminals A, B, A', and B') can be detected in real time by the first detection module 130, and the contact between the first preset node and the first theoretical voltage can be determined based on the comparison result.

[0045] The first and second circuits in the above scheme have simple structures, are easy to implement, and have good stability. Setting the preset node to be detected at both ends of the first and second circuits facilitates detection and minimizes interference from other factors. The detection sensitivity is also high, resulting in a better user experience.

[0046] For example, the contact detection device 100 further includes a processing module. The processing module is used to determine, based on the voltage of the first preset node and the corresponding theoretical voltage, whether the first and second test pieces are electrically connected due to contact when neither the first nor the second circuit is disconnected.

[0047] According to embodiments of this application, the processing module can automatically compare the voltage of the first preset node with the corresponding theoretical voltage and determine whether the first and second test pieces are electrically connected due to contact. Furthermore, the processing module can determine whether the first and second test pieces are electrically connected due to contact only after confirming that both the first and second circuits are genuinely not disconnected.

[0048] In one example, the processing module can first determine whether the first circuit and / or the second circuit is disconnected. Then, if it is determined that neither the first nor the second circuit is disconnected, it can determine whether the first and second test pieces are in contact. For example, the processing module is also used to determine whether the first circuit is disconnected based on the voltage of the second preset node and the corresponding theoretical voltage; and / or to determine whether the second circuit is disconnected based on the voltage of the third preset node and the corresponding theoretical voltage. For example, the processing module can compare the voltage detected by the second detection module with the second theoretical voltage to determine whether the first circuit is disconnected; it can compare the voltage detected by the third detection module with the third theoretical voltage to determine whether the second circuit is disconnected. If it is determined that neither the first nor the second circuit is disconnected, the voltage detected by the first detection module 130 can be further compared with the first theoretical voltage to determine whether the first and second test pieces are electrically connected due to contact.

[0049] According to the above scheme, the processing module can first determine whether the first circuit and / or the second circuit is disconnected, and then compare the voltage of the first preset node with the corresponding theoretical voltage to determine whether the first and second test components are electrically connected due to contact. This judgment and processing scheme eliminates the need to determine contact when at least one of the first and second circuits is disconnected, allowing for immediate alarm and other operations upon the occurrence of a disconnection. Therefore, it offers high detection accuracy, fast processing and response speed, and thus improves the reliability of the equipment.

[0050] For example, the contact detection device 100 also includes a switching module. The switching module is used to control the formation of a first circuit and / or a second circuit based on control signals from the processing module. This can be understood as controlling the theoretical formation of the first circuit and / or the second circuit through the switching module; that is, controlling the formation of the first circuit when the first circuit 110 and the first connecting line are in an ideal connection state, and controlling the formation of the second circuit 120 when the second connecting line is in an ideal connection state. The processing module is also used to determine whether the first circuit and / or the second circuit is disconnected after outputting the control signal. For example, after theoretically forming the first and second circuits through the switching module, the processing module can also determine whether the first or second circuit is actually disconnected due to the disconnection of the first or second connecting line.

[0051] For this purpose, a switching module can be positioned, for example, between the power supplies to which the first circuit 110 and the second circuit 120 are respectively connected. The switching module can take any form. For example, refer again... Figure 2Since the first circuit 110 and the second circuit 120 share the same first power supply, a switching module can be positioned between the first circuit 110 and / or the second circuit 120 and the first power supply. This allows for simultaneous control of the formation of the first and second circuits via a single control signal, simplifying the circuit. For example, the switching module can be a transistor switch, which can control the first circuit 110 and the second circuit 120 to connect to the power supply based on the control signal from the processing module, thereby simultaneously controlling the formation of the first and / or second circuits. For instance, the first object to be detected is a cutting blade, and the second object to be detected is a turntable. The contact detection device 100 may include, for example, a cutting blade. Figure 2 The diagram shows a first circuit 110 and a second circuit 120, as well as a processing module connected to a transistor switch. When contact detection is initiated using the contact detection device 100, the processing module can first output a control signal indicating connection to the first power supply. The control transistor switch can then control the connection between the first power supply and the first circuit 110 and the second circuit 120 based on this control signal, thereby controlling the formation of a first loop and a second loop. The first detection module of the contact detection device 100 can be connected to a first preset node, such as terminal A or B in the diagram. The contact detection device 100 also includes a second detection module and / or a third detection module. The second detection module can be connected to a second preset node, such as terminal A or B in the diagram. The third detection module can be connected to a third preset node, such as terminal A' or B' in the diagram. The processing module can be connected to the first detection module 130, the second detection module, and / or the third detection module, respectively. After the processing module outputs a control signal, it can compare the voltage of the second preset node detected by the second detection module with the second theoretical voltage, and determine whether the first loop is open, such as whether the brush wire is open, based on the comparison result. The voltage of the third preset node detected by the third detection module can be compared with the third theoretical voltage, and the comparison result can be used to determine whether the second circuit is disconnected, such as whether the turntable line is disconnected. Furthermore, if it is determined that neither the first nor the second circuit is disconnected, the voltage of the first preset node detected by the first detection module 130 can be compared with the first theoretical voltage, and the comparison result can be used to determine whether the cutting blade is in contact with the turntable.

[0052] According to the above scheme, the processing module can control the connection between the first circuit and / or the second circuit and the power supply using the control switch module, thereby controlling the formation of the first loop and / or the second loop under theoretical conditions. Given that the first and second circuits are connected to the power supply, it is determined whether the first and second loops are actually disconnected and whether the two components to be tested are in contact. This scheme has a simple and reasonable execution logic, avoiding interference from other factors on the judgment results, thus accurately determining whether the first loop and / or the second loop are disconnected. Therefore, it can efficiently and accurately achieve contact detection of the first and second components to be tested. Furthermore, the control switch module can also protect the components in the circuit, ensuring the safe and effective operation of the contact detection device 100.

[0053] The processing module according to embodiments of this application can take various forms. In one example, the processing module includes a comparison submodule and a control submodule. The comparison submodule is used to compare the voltage of each preset node with the corresponding theoretical voltage, and output a corresponding electrical signal based on each comparison result. The control submodule is used to determine, based on the electrical signal, whether the first circuit and / or the second circuit is disconnected, and to determine whether the first and second test pieces are electrically connected due to contact.

[0054] In the case where the contact detection device 100 includes a first detection module 130, the comparison submodule may include a first comparison submodule. The first comparison submodule may be connected to the first detection module 130. The first comparison submodule is used to compare the voltage of a first preset node with a first theoretical voltage, and outputs a corresponding electrical signal based on the comparison result. For example, the first detection module 130 is connected to... Figure 2 The first circuit shown in the diagram, at node A, also sends the voltage of node A to the first comparison submodule. The first comparison submodule can be a contact determination processing circuit, which compares the detected voltage at terminal A' with a first theoretical voltage and outputs a corresponding electrical signal based on the comparison result. For example, if the voltage of the first preset node equals the first theoretical voltage, a high-level signal can be output and sent to the control submodule. The control submodule determines whether the first and second devices under test are in contact based on the received high-level signal from the first comparison submodule.

[0055] In cases where the contact detection device 100 includes a second detection module, the comparison submodule may further include a second comparison submodule. The second comparison submodule can be connected to the second detection module. The second comparison submodule is used to compare the voltage of the second preset node with the second theoretical voltage, and outputs a corresponding electrical signal based on the comparison result. For example, the second detection module may also be connected to... Figure 2The first circuit shown in the diagram, at node A, also sends the voltage of node A to the second comparison submodule. The second comparison submodule can be a first loop processing circuit, which compares the detected voltage at terminal A with a second theoretical voltage. The second theoretical voltage is, for example, the theoretical voltage at terminal A when the first loop is open. The control submodule can then determine that the first loop is open based on the high-level signal received from the second comparison submodule.

[0056] In cases where the contact detection device 100 includes a third detection module, the comparison submodule may further include a third comparison submodule. The third comparison submodule can be connected to the third detection module. The third comparison submodule is used to compare the voltage of a third preset node with a third theoretical voltage, and outputs a corresponding electrical signal based on the comparison result. For example, the third detection module may also be connected to... Figure 2 The second circuit shown also sends the voltage of node A' to the third comparison submodule. The third comparison submodule can be a second loop processing circuit, which compares the detected voltage at terminal A' with the third theoretical voltage and outputs a corresponding electrical signal based on the comparison result. For example, if the voltage of the third preset node equals the third theoretical voltage, a high-level signal can be output and sent to the control submodule. The third theoretical voltage is, for example, the theoretical voltage at terminal A' when the second loop is open. The control submodule determines that the second loop is open based on the high-level signal received from the third comparison submodule.

[0057] The comparison submodule can take any suitable form, as long as it can compare the voltage of the corresponding preset node with the corresponding theoretical voltage.

[0058] By way of example, and not limitation, the comparison submodule can be implemented using comparators. The comparison submodule includes comparators. Each comparator has two inputs connected to a preset node and a reference voltage node, respectively, where the voltage of each reference voltage node is equal to the theoretical voltage corresponding to that preset node.

[0059] The comparator according to the embodiments of this application can be any existing or future-developed comparator, and this application does not limit it. Figure 3 A schematic diagram of a comparative submodule according to an embodiment of this application is shown. Figure 3 As shown in the figure, the comparator circuit can be used to compare the voltage of the first preset node with the first theoretical voltage to determine whether the first and second test objects are in contact. This comparator circuit can be connected to the first detection module. Figure 2 Terminal A or terminal B in the first circuit shown, or it can also be connected to Figure 2The second circuit contains either terminal A' or terminal B'. One input terminal of the comparator circuit (port 2 in the figure) can be connected to any one of the nodes A, B, A', or B' through the first detection module. The other input terminal (port 3 in the figure) can be connected to a reference voltage node. The voltage of this reference voltage node is equal to the first theoretical voltage. The output terminal of the comparator circuit can output an electrical signal representing the comparison result between the voltage of the preset node and the corresponding theoretical voltage. Optionally, the output terminal of the comparator circuit may also include a light-emitting diode (LED), which can start emitting light when it receives an electrical signal representing that the voltage of the preset node is equal to the corresponding theoretical voltage. The user or control submodule can also determine whether the first and second objects to be detected are in contact based on the state of the LED. Similarly, for the case where the contact detection device 100 includes a second detection module and a third detection module, it is also possible to utilize... Figure 3 A similar comparator circuit compares the voltage of the second preset node with the second theoretical voltage, and compares the voltage of the third preset node with the third theoretical voltage. Therefore, the user or control submodule can determine whether the first and second circuits are disconnected based on the comparison results. Various implementations of the above scheme will be understood by those skilled in the art, and will not be elaborated further here.

[0060] According to the above scheme, a comparator can be used to compare the voltage of a preset node with the corresponding theoretical voltage. The control submodule can then determine whether the first and / or second circuits are open, and whether the first and second components under test are in contact, based on the comparison results output by each comparator. This scheme features a simple device structure, low cost, and higher accuracy in contact detection. Furthermore, the signals output by the comparators are easier to process and interpret, resulting in higher detection efficiency.

[0061] According to a second aspect of this application, a dicing machine is also provided. Figure 4 A schematic block diagram of a dicing machine apparatus 400 according to one embodiment of this application is shown. Figure 4 As shown, the dicing machine 400 includes a first part to be tested, a second part to be tested, and the aforementioned contact detection device 100. The first part to be tested is a cutting blade 410, and the second part to be tested is a turntable 420.

[0062] In one example, the contact detection device 100 of the dicing machine 400 may include, for example... Figure 2The diagram shows a first circuit and a second circuit. The first circuit is, for example, a brush wire voltage divider circuit. The two brush wires and the brush wire voltage divider circuit form a first loop with the supply voltage VCC 3.3V. Voltage dividing resistors are provided at both ends of the brush wires connected to the brush wires in the brush wire voltage divider circuit, such as the first voltage dividing resistor R1 and the second voltage dividing resistor R2 shown in the diagram. The second circuit is, for example, a turntable wire voltage divider circuit. The two turntable wires and the turntable wire voltage divider circuit form a second loop with the supply voltage VCC 3.3V. Voltage dividing resistors are also provided at both ends of the turntable wires connected to the turntable wires in the turntable wire voltage divider circuit, such as the third voltage dividing resistor R3 and the fourth voltage dividing resistor R4 shown in the diagram.

[0063] The contact detection device 100 of the dicing machine equipment 400 may further include a second detection module connected to a second preset node, a carbon brush processing circuit connected to the second detection module, and a control submodule. The control submodule can output a first control signal to control the conduction and cutoff of the carbon brush wire voltage divider circuit. The second preset node is, for example, terminal A or terminal B in the figure. The second detection module can detect the voltage at terminal A or B and send it to the carbon brush processing circuit. The carbon brush processing circuit can output a first electrical signal based on the voltage at the node and a first theoretical voltage and send it to the control submodule. The control submodule can determine whether the carbon brush wire is open based on the first electrical signal. The control submodule can also issue an alarm signal or a prompt signal when it determines that the carbon brush wire is open.

[0064] The contact detection device 100 of the dicing machine 400 may further include a third detection module connected to a third preset node and a turntable processing circuit connected to the third detection module. The control submodule can output a second control signal to control the conduction and cutoff of the turntable line voltage divider circuit. The third preset node is, for example, terminal A' or terminal B' in the figure. The second detection module detects the voltage at terminal A' or B' and sends it to the turntable processing circuit. The turntable processing circuit can output a second electrical signal based on the voltage at this node and the second theoretical voltage, and send it to the control submodule. The control submodule can determine whether the turntable line is open based on this signal. The control submodule can also issue an alarm signal or a prompt signal when it determines that the turntable line is open.

[0065] The contact detection device of the dicing machine 400 includes a first detection module connected to a first preset node and a contact judgment processing circuit connected to the first detection module. The first preset node is, for example, any one of the nodes A, B, A', or B' in the figure. The first detection module can detect, for example, the voltage at A' and send it to the contact judgment processing circuit. The contact judgment processing circuit can output a third electrical signal based on the voltage at A' and a third theoretical voltage, and send it to the control submodule. The control submodule can determine whether the cutting blade 410 is in contact with the turntable 420 based on the third electrical signal, provided that both the first and second control signals are valid and the brush wires and turntable wires are not open circuits.

[0066] The dicing machine described above can achieve real-time detection of the contact between the cutting blade and the turntable with high accuracy. Furthermore, when the contact detection device of the dicing machine includes a second and / or a third detection module, it can also accurately detect the working status of the carbon brush line and / or the turntable line, significantly improving the stability of the dicing machine.

[0067] For example, in the case where the contact detection device 100 of the dicing machine includes a processing module, the processing is further configured to output a stop control signal to the movement drive module of the cutting blade when it is determined that the cutting blade and the turntable are electrically connected due to contact, so as to control the cutting blade to stop moving. For example, the control submodule in the processing module can output a stop control signal to the blade shaft drive mechanism of the cutting blade when it determines that the cutting blade and the turntable are in contact based on a third electrical signal. The blade shaft drive mechanism can then control the cutting blade to stop moving.

[0068] According to embodiments of this application, the dicing machine can also be a biaxial dicing machine. Figure 5 A schematic diagram of a dicing machine apparatus according to another embodiment of this application is shown. As shown, the dicing machine apparatus may include two contact detection devices to detect the contact between the two cutting blades of the dual-axis dicing machine and the turntable. A first circuit in each contact detection device can be connected to two brush lines of each cutting blade, and a second circuit in each contact detection device can be connected to the turntable line of each cutting blade. The detection module in each contact detection device can be used to detect the voltage of a preset node. Then, a comparison submodule in the processing module can be used to compare the voltage of the preset node with the corresponding theoretical voltage and output the comparison result. Furthermore, a control submodule in the processing module can be used to determine whether the brush lines of each cutting blade are open-circuited and / or whether the turntable line is open-circuited. Finally, the control submodule can be used to determine whether each cutting blade and the turntable are in contact. If a cutting blade is in contact with the turntable, a stop movement signal can be output to the blade shaft drive mechanism. The blade shaft drive mechanism can then control the cutting blade to stop descending.

[0069] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, parts, components, and / or combinations thereof.

[0070] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0071] This application has been described through the above embodiments. However, it should be understood that the above embodiments are for illustrative purposes only and are not intended to limit this application to the scope of the described embodiments. Furthermore, those skilled in the art will understand that this application is not limited to the above embodiments, and many more variations and modifications can be made based on the teachings of this application, all of which fall within the scope of protection claimed in this application. The scope of protection of this application is defined by the appended claims and their equivalents.

Claims

1. A contact detection device, characterized by, The device comprises: a first circuit configured to connect to a first to-be-detected component via two first connection lines to form a first loop, wherein a first power supply is grounded via the first circuit and the first to-be-detected component; a second circuit configured to connect to a second to-be-detected component via two second connection lines to form a second loop, wherein the second circuit comprises a voltage dividing circuit, a second power supply is grounded via the voltage dividing circuit, and the voltage dividing circuit is further connected to the first power supply via the second to-be-detected component; and a first detection module configured to detect a voltage of a first preset node in the first loop or the second loop to determine whether the first to-be-detected component and the second to-be-detected component are electrically connected due to contact according to the voltage of the first preset node and a corresponding theoretical voltage.

2. The contact detection device according to claim 1, characterized in that, The device further comprises: a processing module configured to determine whether the first to-be-detected component and the second to-be-detected component are electrically connected due to contact according to the voltage of the first preset node and the corresponding theoretical voltage when neither the first loop nor the second loop is disconnected.

3. The contact detection apparatus according to claim 1, wherein The device further comprises a second detection module and / or a third detection module, wherein: the second detection module is configured to detect a voltage of a second preset node in the first loop to determine whether the first loop is disconnected according to the voltage of the second preset node and a corresponding theoretical voltage; and the third detection module is configured to detect a voltage of a third preset node in the second loop to determine whether the second loop is disconnected according to the voltage of the third preset node and a corresponding theoretical voltage.

4. The contact detection apparatus according to claim 3, characterized by The device further comprises: a processing module configured to determine whether the first to-be-detected component and the second to-be-detected component are electrically connected due to contact according to the voltage of the first preset node and the corresponding theoretical voltage when neither the first loop nor the second loop is disconnected.

5. The contact detection apparatus according to claim 4, wherein The processing module is further configured to: determine whether the first loop is disconnected according to the voltage of the second preset node and the corresponding theoretical voltage; and / or determine whether the second loop is disconnected according to the voltage of the third preset node and the corresponding theoretical voltage.

6. The contact detection apparatus according to claim 5, wherein The device further comprises a switching module; the switching module is configured to control formation of the first loop and / or the second loop based on a control signal of the processing module; and the processing module is further configured to determine whether the first loop and / or the second loop is disconnected after outputting the control signal.

7. The contact detection apparatus according to claim 6, wherein The processing module comprises: a comparison sub-module configured to compare a voltage of each preset node with a corresponding theoretical voltage and output a corresponding electrical signal according to each comparison result; and a control sub-module configured to determine whether the first loop and / or the second loop is disconnected and whether the first to-be-detected component and the second to-be-detected component are electrically connected due to contact based on the electrical signal.

8. The contact detection apparatus according to claim 7, wherein The comparison sub-module comprises a comparator, wherein two input terminals of each comparator are connected to each preset node and a reference voltage node respectively, and a voltage of each reference voltage node is equal to a theoretical voltage corresponding to the preset node.

9. The contact detection device according to claim 3, wherein The first circuit comprises a first voltage dividing resistor and a second voltage dividing resistor, wherein a first end of the first voltage dividing resistor is connected to the first power supply, a second end of the first voltage dividing resistor serves as a first end of the first circuit, a first end of the second voltage dividing resistor serves as a second end of the first circuit, and a second end of the second voltage dividing resistor is grounded; and / or the second circuit comprises a third voltage dividing resistor, a fourth voltage dividing resistor and a fifth voltage dividing resistor, wherein a first end of the third voltage dividing resistor is connected to the first power supply, a second end of the third voltage dividing resistor serves as a first end of the second circuit, a first end of the fourth voltage dividing resistor and a first end of the fifth voltage dividing resistor are connected and serve as a second end of the second circuit, a second end of the fourth voltage dividing resistor is grounded, and a second end of the fifth voltage dividing resistor is connected to the second power supply; The first preset node comprises any one end of the first circuit connected to the first connecting line or any one end of the second circuit connected to the second connecting line; the second preset node comprises any one end of the first circuit connected to the first connecting line; and the third preset node comprises any one end of the second circuit connected to the second connecting line.

10. A dicing saw apparatus, characterized by, The contact detection device comprises a first to-be-detected member, a second to-be-detected member and a processing module, wherein the first to-be-detected member is a cutting knife, and the second to-be-detected member is a rotary table.

11. The dicing saw apparatus of claim 10, wherein, The processing module is further configured to output a stop control signal to a movement driving module of the cutting knife to control the cutting knife to stop moving when it is determined that the cutting knife and the rotary table are electrically connected due to contact. The processing module is further configured to output a stop control signal to a movement driving module of the cutting knife to control the cutting knife to stop moving when it is determined that the cutting knife and the rotary table are electrically connected due to contact.

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