Information processing method, system, storage device and electronic device

Abstract

This disclosure relates to an information processing method, system, storage device, and electronic device, specifically in the field of silicon wafer manufacturing. It is applied to an information processing system comprising: a manufacturing execution module, a data acquisition module, and a presentation module. The method includes: determining a production task through the manufacturing execution module and sending a task identifier of the production task to a single-crystal furnace to control the single-crystal furnace to execute the production task; acquiring the task identifier of the production task, the production information of the single-crystal furnace, and the equipment operation information of the single-crystal furnace from the single-crystal furnace through the data acquisition module, and acquiring the task information of the production task and the equipment attribute information of the single-crystal furnace from the manufacturing execution module; the production information being generated during the execution of the production task by the single-crystal furnace; and sending a prompt message to the presentation module through the data acquisition module; and presenting the prompt message according to a preset presentation format, including at least one of image, text, sound, and vibration formats.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the field of silicon wafer production, in particular, to an information processing method and system, a storage device and an electronic device. BACKGROUND

[0002] The crystal pulling manufacturing of single crystal silicon is a process of melting and recrystallizing various silicon raw materials. A large amount of information is generated in the production process of silicon wafers, such as operation information of a single crystal furnace, task information, etc. Generally, the production workshop will design a paper version of the production record book in the form of a table according to actual needs, and the operator will fill in the relevant information according to the table to record the information generated in the production process of the silicon wafer. However, the design and filling of the paper version of the production record book have a large workload, low accuracy, and are not convenient for long-term storage and quick query. SUMMARY

[0003] The purpose of the present disclosure is to provide an information processing method and system, a storage device and an electronic device to solve the related problems in the prior art.

[0004] According to a first aspect of an embodiment of the present disclosure, an information processing method is provided, applied to an information processing system, the information processing system comprising: a manufacturing execution module, a collection module and a presentation module; the method comprising:

[0005] determining a production task through the manufacturing execution module, and sending a task identifier of the production task to a single crystal furnace to control the single crystal furnace to execute the production task;

[0006] collecting, through the collection module, a task identifier of the production task, production information of the single crystal furnace and device operation information of the single crystal furnace from the single crystal furnace, and collecting task information of the production task and device attribute information of the single crystal furnace from the manufacturing execution module; the production information is information generated in the process of the single crystal furnace executing the production task;

[0007] sending, through the collection module, prompt information to the presentation module, the prompt information comprising at least one of the task identifier, the task information, the production information, the device operation information and the device attribute information;

[0008] presenting, through the presentation module, the prompt information in a preset presentation form, the presentation form comprising at least one of an image form, a text form, a sound form and a vibration form.

[0009] Optionally, the information processing system further comprises a query module; the method further comprises:

[0010] The query module is configured to, in response to a query instruction, acquire and display target information corresponding to a target object according to an identification of the target object included in the query instruction, the target object including a target production task and / or a target single crystal furnace.

[0011] Optionally, the acquisition module includes a first acquisition submodule and a second acquisition submodule.

[0012] The acquisition module is configured to acquire the task identification of the production task, the production information of the single crystal furnace, and the equipment operation information of the single crystal furnace from the single crystal furnace, and acquire the task information of the production task and the equipment attribute information of the single crystal furnace from the manufacturing execution module.

[0013] The first acquisition submodule is configured to acquire the task identification, the production information, and the equipment operation information from the controller of the single crystal furnace.

[0014] The second acquisition submodule is configured to acquire the task information and the equipment attribute information from the manufacturing execution module.

[0015] Optionally, the first acquisition submodule includes a supervisory control and data acquisition (SCADA) tool and an industrial personal computer (IPC) acquisition tool.

[0016] The first acquisition submodule is configured to acquire the task identification, the production information, and the equipment operation information from the controller of the single crystal furnace.

[0017] The SCADA tool is configured to acquire the task identification, the production information, and the equipment operation information from the controller of the single crystal furnace according to a preset first acquisition period.

[0018] The IPC acquisition tool is configured to acquire at least one of the task identification, the production information, and the equipment operation information from the controller of the single crystal furnace according to a preset second acquisition period.

[0019] Optionally, the query module includes an IPC query submodule and a user terminal query submodule, and the query instruction includes a first query instruction and a second query instruction.

[0020] The query module is configured to, in response to a query instruction, acquire and display target information corresponding to a target object according to an identification of the target object included in the query instruction.

[0021] The work computer query submodule is configured to, in response to the first query instruction, acquire and display first target information corresponding to the target object from the acquisition module according to an identifier of the target object included in the first query instruction;

[0022] The user terminal query submodule is configured to, in response to the second query instruction, acquire and display second target information corresponding to the target object from the acquisition module according to an identifier of the target object included in the second query instruction.

[0023] Optionally, the information processing system further comprises an input module, and the method further comprises:

[0024] The input module is configured to, in response to a first input instruction, acquire point inspection information corresponding to the first input instruction, and in response to a second input instruction, acquire first worker information corresponding to the second input instruction; and the point inspection information is associated with the first worker information, and the point inspection information is used to indicate whether the single crystal furnace meets a preset starting condition;

[0025] The input module is configured to, in response to a third input instruction, acquire feeding information corresponding to the third input instruction from the acquisition module, and in response to a fourth input instruction, acquire second worker information corresponding to the fourth input instruction from the acquisition module; and the feeding information is associated with the second worker information.

[0026] According to a second aspect of the embodiments of the present disclosure, an information processing system is provided, which comprises a manufacturing execution module, an acquisition module and a presentation module;

[0027] The manufacturing execution module is configured to determine a production task, and send a task identifier of the production task to a single crystal furnace to control the single crystal furnace to execute the production task;

[0028] The acquisition module is configured to acquire, from the single crystal furnace, a task identifier of the production task, production information of the single crystal furnace and equipment operation information of the single crystal furnace, and acquire, from the manufacturing execution module, task information of the production task and equipment attribute information of the single crystal furnace; the production information is information generated in a process in which the single crystal furnace executes the production task;

[0029] The acquisition module is further configured to send prompt information to the presentation module, the prompt information comprising at least one of the task identifier, the task information, the production information, the equipment operation information and the equipment attribute information;

[0030] The presentation module is configured to present the prompt information in a preset presentation form, the presentation form including at least one of an image form, a text form, a sound form, and a vibration form.

[0031] Optionally, the information processing system further includes a query module.

[0032] The query module is configured to, in response to a query instruction, acquire and display target information corresponding to a target object according to an identification of the target object included in the query instruction, the target object including a target production task and / or a target single crystal furnace.

[0033] Optionally, the acquisition module includes a first acquisition submodule and a second acquisition submodule.

[0034] The first acquisition submodule is configured to acquire the task identification, the production information, and the equipment operation information from a controller of the single crystal furnace.

[0035] The second acquisition submodule is configured to acquire the task information and the equipment attribute information from the manufacturing execution module.

[0036] Optionally, the first acquisition submodule includes a supervisory control and data acquisition (SCADA) tool and an industrial personal computer (IPC) acquisition tool.

[0037] The SCADA tool is configured to acquire the task identification, the production information, and the equipment operation information from the controller of the single crystal furnace according to a preset first acquisition period.

[0038] The IPC acquisition tool is configured to acquire at least one of the task identification, the production information, and the equipment operation information from the controller of the single crystal furnace according to a preset second acquisition period.

[0039] Optionally, the query module includes an IPC query submodule and a user terminal query submodule, and the query instruction includes a first query instruction and a second query instruction.

[0040] The IPC query submodule is configured to, in response to the first query instruction, acquire and display first target information corresponding to the target object according to an identification of the target object included in the first query instruction.

[0041] The user terminal query submodule is configured to, in response to the second query instruction, acquire and display second target information corresponding to the target object according to an identification of the target object included in the second query instruction.

[0042] Optionally, the information processing system further includes an input module.

[0043] The input module is configured to acquire the inspection information corresponding to the first input instruction in response to the first input instruction, and acquire the first worker information corresponding to the second input instruction in response to the second input instruction; and associate the inspection information with the first worker information; the inspection information is used to indicate whether the single crystal furnace meets a preset starting condition.

[0044] The input module is further configured to acquire the feeding information corresponding to the third input instruction from the collection module in response to the third input instruction, and acquire the second worker information corresponding to the fourth input instruction from the collection module in response to the fourth input instruction; and associate the feeding information with the second worker information.

[0045] According to a third aspect of the embodiments of the present disclosure, a non-transitory computer readable storage medium is provided, which has stored thereon a computer program, the program being executed by a processor to implement the steps of the method according to any one of the first aspect of the present disclosure.

[0046] According to a fourth aspect of the embodiments of the present disclosure, an electronic device is provided, which comprises:

[0047] a memory having stored thereon a computer program;

[0048] a processor configured to execute the computer program in the memory to implement the steps of the method according to any one of the first aspect of the present disclosure.

[0049] According to the above technical solution, the present disclosure first determines a production task through a manufacturing execution module, and sends a task identifier of the production task to a single crystal furnace, so as to control the single crystal furnace to execute the production task. Then, the collection module collects the task identifier of the production task, production information of the single crystal furnace and equipment running information of the single crystal furnace from the single crystal furnace, and collects task information of the production task and equipment attribute information of the single crystal furnace from the manufacturing execution module, wherein the production information is information generated in the process of the single crystal furnace executing the production task. Finally, the collection module sends prompt information to the presentation module, and the presentation module presents the prompt information in a preset presentation form. The prompt information includes at least one of the task identifier, the task information, the production information, the equipment running information and the equipment attribute information, and the presentation form includes at least one of an image form, a text form, a sound form and a vibration form. The present disclosure collects information from the single crystal furnace and the manufacturing execution module through the collection module, and presents the information through the presentation module, so as to improve the accuracy of information recording and the degree of digitization in the process of producing silicon wafers.

[0050] Other features and advantages of the present disclosure will be described in detail in the following detailed description. BRIEF DESCRIPTION OF DRAWINGS

[0051] The accompanying drawings are included to provide a further understanding of the disclosure and constitute a part of the specification, illustrate embodiments of the present disclosure and together with the specific description given below help to explain the present disclosure, but do not limit the present disclosure. In the drawings:

[0052] Figure 1 is a flowchart of an information processing method according to an example embodiment;

[0053] Figure 2 is a flowchart of another information processing method according to an example embodiment;

[0054] Figure 3 is a flowchart of another information processing method according to an example embodiment;

[0055] Figure 4 is a flowchart of another information processing method according to an example embodiment;

[0056] Figure 5 is a flowchart of another information processing method according to an example embodiment;

[0057] Figure 6 is a flowchart of another information processing method according to an example embodiment;

[0058] Figure 7 is a block diagram of an information processing system according to an example embodiment;

[0059] Figure 8 is a block diagram of another information processing system according to an example embodiment;

[0060] Figure 9 is a block diagram of another information processing system according to an example embodiment;

[0061] Figure 10 is a block diagram of another information processing system according to an example embodiment;

[0062] Figure 11 is a block diagram of another information processing system according to an example embodiment;

[0063] Figure 12 is a block diagram of another information processing system according to an example embodiment;

[0064] Figure 13 is a block diagram of an electronic device according to an example embodiment. DETAILED DESCRIPTION

[0065] The exemplary embodiments will be described in detail herein with reference to the attached drawings. The following description is made with reference to the accompanying drawings in which like reference numerals refer to like elements, unless the context of use indicates otherwise. The following description of exemplary embodiments is not representative of all embodiments consistent with the present disclosure. Rather, it is merely an example of apparatus and methods consistent with some aspects of the present disclosure as detailed in the appended claims.

[0066] Figure 1 is a flow chart of an information processing method according to an exemplary embodiment, applied to an information processing system including a manufacturing execution module, a collection module and a presentation module. As shown in Figure 1 the method includes:

[0067] Step 101, determine a production task by the manufacturing execution module, and send a task identification of the production task to a single crystal furnace to control the single crystal furnace to execute the production task.

[0068] For example, the manufacturing execution module can be understood as an MES (English: Manufacturing Execution System, Chinese: Manufacturing Execution System). Before a production task starts, the manufacturing execution module can first determine the production task according to the received order, and generate task information and a task identification corresponding to the production task. The task information can be understood as information for instructing the single crystal furnace to execute the production task, such as the temperature of the single crystal furnace, the specification of the drawn crystal bar, the number of drawn crystal bars, etc. The task identification can be understood as an identification that can uniquely identify the production task. Then, the task identification of the production task can be sent to the single crystal furnace, so as to control the single crystal furnace to execute the production task according to the task information.

[0069] Step 102, collect the task identification of the production task, the production information of the single crystal furnace and the equipment operation information of the single crystal furnace from the single crystal furnace by the collection module, and collect the task information of the production task and the equipment attribute information of the single crystal furnace from the manufacturing execution module. The production information is information generated in the process of the single crystal furnace executing the production task.

[0070] For example, during the execution of the production task, the single crystal furnace, the acquisition module can collect the identification of the production task, the production information of the single crystal furnace and the equipment running information of the single crystal furnace from the single crystal furnace according to the preset acquisition period. The production information is the information generated during the execution of the production task by the single crystal furnace, for example, the diameter of the drawn crystal bar, the length of the drawn crystal bar, etc. The equipment running information is used to indicate the running state of the single crystal furnace, for example, the opening time of the heater, the temperature of the single crystal furnace, etc. At the same time, the acquisition module can also collect the task information of the production task and the equipment attribute information of the single crystal furnace from the manufacturing execution module. The equipment attribute information is used to indicate the inherent attribute of the single crystal furnace, for example, the model of the single crystal furnace, the thermal field size of the single crystal furnace, the model of the heater, the model of the crucible used in this production task, etc. In this way, without manual recording, the required information can be collected from the single crystal furnace and the manufacturing execution module, which can improve the accuracy and convenience of information recording.

[0071] Step 103, sending the prompt information to the presentation module through the acquisition module, the prompt information including at least one of the task identification, the task information, the production information, the equipment running information and the equipment attribute information.

[0072] Step 104, presenting the prompt information through the presentation module according to the preset presentation form, the presentation form including at least one of the image form, the text form, the sound form and the vibration form.

[0073] Further, the collection module can send the prompt information to the presentation module, and the presentation module presents the prompt information in a preset presentation form, so as to facilitate the staff to monitor the execution of the production task in real time. The prompt information can include at least one of the task identifier, the task information, the production information, the equipment running information and the equipment attribute information, and the presentation form can include at least one of an image form, a text form, a sound form and a vibration form. According to specific needs, the information to be presented can be selected from the task identifier, the task information, the production information, the equipment running information and the equipment attribute information as the prompt information, for example, the task identifier, the number of drawn crystal bars in the task information, and the temperature of the single crystal furnace in the equipment running information can be used as the prompt information. The presentation module can be a display device, such as a look board, an LED screen, a display screen of an industrial computer corresponding to the single crystal furnace, a display screen of a user terminal bound to the information processing system, etc. The prompt information can be displayed on the display device in the form of text and image in a centralized display or distributed display manner. The presentation module can also be a player, such as a player in the production workshop, a player of the industrial computer corresponding to the single crystal furnace, a player of the user terminal bound to the information processing system, etc. The prompt information can be played in a centralized play or distributed play manner through the player. The presentation module can also present the prompt information in the form of vibration according to a preset rule. The present disclosure does not make specific limitations in this regard.

[0074] In summary, the present disclosure first determines the production task through the manufacturing execution module, and sends the task identifier of the production task to the single crystal furnace, so as to control the single crystal furnace to execute the production task. Then, the collection module collects the task identifier of the production task, the production information of the single crystal furnace and the equipment running information of the single crystal furnace from the single crystal furnace, and collects the task information of the production task and the equipment attribute information of the single crystal furnace from the manufacturing execution module, wherein the production information is information generated in the process of the single crystal furnace executing the production task. Finally, the collection module sends the prompt information to the presentation module, and the presentation module presents the prompt information in a preset presentation form. The prompt information includes at least one of the task identifier, the task information, the production information, the equipment running information and the equipment attribute information, and the presentation form includes at least one of an image form, a text form, a sound form and a vibration form. The present disclosure collects information from the single crystal furnace and the manufacturing execution module through the collection module, and presents the information through the presentation module, which can improve the accuracy of information recording and the degree of digitization in the process of producing silicon wafers.

[0075] Figure 2 is a flow chart of another information processing method according to an exemplary embodiment. The information processing system further includes a query module. As shown in Figure 2 the method further includes:

[0076] At step 105, the query module responds to the query instruction to obtain and display the target information corresponding to the target object according to the identification of the target object included in the query instruction. The target object includes a target production task and / or a target single crystal furnace.

[0077] In an example, the information processing system can further include a query module. The query module can be arranged on an industrial computer corresponding to the single crystal furnace, or arranged on a remote user terminal bound to the information processing system, and the disclosure does not make specific limitations thereon. When a user needs to query information in the production process of the silicon wafer, the query module can be used for querying. Specifically, the user can input the identification of the target object on the preset query interface, and trigger a query instruction (such as the first query instruction and the second query instruction mentioned below) including the identification of the target object by clicking the query button. The target object can be a target production task, or a target single crystal furnace, or both, and the disclosure does not make specific limitations thereon.

[0078] After receiving the query instruction, the query module can obtain the target information corresponding to the identification of the target object from the acquisition module according to the identification of the target object indicated by the query instruction, and display the target information on the preset display interface, or display the target information through the presentation module. Specifically, if the query instruction indicates the identification of the target production task, the query module can obtain the target information associated with the identification of the target production task, wherein the target information can be task information, production information, device running information and device attribute information corresponding to the identification of the target production task. If the query instruction indicates the identification of the target single crystal furnace, the query module can obtain the target information associated with the identification of the target single crystal furnace, wherein the target information can be device running information, device attribute information and production information of the target single crystal furnace. In this way, the query module can quickly query the information corresponding to the production task and the single crystal furnace, and improve the accuracy and convenience of information query.

[0079] Figure 3 is a flowchart of another information processing method according to an example embodiment. The acquisition module includes a first acquisition submodule and a second acquisition submodule. As shown in Figure 3 Step 102 can be implemented by the following steps:

[0080] At step 1021, the first acquisition submodule acquires the task identification, production information and device running information from the controller of the single crystal furnace.

[0081] At step 1022, the second acquisition submodule acquires the task information and device attribute information from the manufacturing execution module.

[0082] The collection module can include a first collection sub-module and a second collection sub-module. The first collection sub-module can collect task identification, production information and equipment operation information from the controller of the single crystal furnace, and associate the production information and the equipment operation information with the task identification respectively, so as to facilitate subsequent query. The controller of the single crystal furnace can be a PLC (Programmable Logic Controller) for controlling and monitoring the operation state of the single crystal furnace.

[0083] Meanwhile, since the task information and the equipment attribute information corresponding to the task identification have been stored in the manufacturing execution module, the second collection sub-module can directly obtain the task information and the equipment attribute information from the manufacturing execution module. The task information can be, for example, initial feeding amount, secondary feeding amount, etc., and the equipment attribute information can be, for example, crucible model of the single crystal furnace, thermal field size, etc. In this way, without manual recording, the required information can be collected from the controller of the single crystal furnace and the manufacturing execution module, so that the accuracy and convenience of information recording can be improved.

[0084] Figure 4 is a flowchart of another information processing method according to an exemplary embodiment. The first collection sub-module includes a SCADA tool and an industrial computer collection tool. As shown in Figure 4 Step 1021 can be implemented by the following steps:

[0085] Step 1021a, collecting task identification, production information and equipment operation information from the controller of the single crystal furnace according to a preset first collection period through the SCADA tool.

[0086] Step 1021b, collecting at least one of task identification, production information and equipment operation information from the controller of the single crystal furnace according to a preset second collection period through the industrial computer collection tool.

[0087] The first acquisition submodule can include a SCADA (Supervisory Control And Data Acquisition) tool and an industrial computer acquisition tool. The SCADA tool can be understood as a SCADA system. During the operation of the single crystal furnace, the SCADA tool can acquire task identifiers, production information, and equipment operation information from the controller of the single crystal furnace according to a preset first acquisition period, and associate the acquired production information and equipment operation information with the task identifiers, so as to facilitate subsequent queries. The first acquisition period can be 30 seconds, for example. Further, the SCADA tool can analyze all the acquired information to obtain parsed data. For example, the SCADA tool can analyze the opening time and closing time of the heater during the production process of the single crystal furnace to obtain the opening duration of the heater, and accordingly, the opening duration of the heater can be stored as equipment operation information. For another example, the SCADA tool can count the draw rod records during the production process of the single crystal furnace to obtain the number of drawn rods, and accordingly, the number of drawn rods can be stored as production information. For another example, the SCADA tool can analyze the historical records of each temperature adjustment during the production process of the single crystal furnace to obtain the maximum temperature and the minimum temperature during the production process of the single crystal furnace, and accordingly, the maximum temperature and the minimum temperature can be stored as equipment operation information.

[0088] Meanwhile, the industrial computer acquisition tool can continuously acquire at least one of the task identifiers, the production information, and the equipment operation information from the controller of the single crystal furnace according to a preset second acquisition period, and store the information in the local database of the industrial computer, so as to monitor the operation state of the single crystal furnace in real time. The second acquisition period can be 10 seconds, for example. For example, the industrial computer can acquire the task identifiers and associate the task identifiers with the information entered in the industrial computer, and the industrial computer can also acquire the task identifiers and the equipment operation information and associate the task identifiers with the equipment operation information, so as to facilitate subsequent queries. The present disclosure does not make specific limitations in this regard. It should be noted that the information acquired by the industrial computer acquisition tool and the information acquired by the SCADA tool can be completely the same information, and the information acquired by the industrial computer acquisition tool can also be part of the information acquired by the SCADA tool, and the present disclosure does not make specific limitations in this regard.

[0089] In this way, without manual recording, the required information can be collected from the controller and manufacturing execution module of the single crystal furnace through the SCADA tool and the industrial computer collection tool, so as to improve the accuracy and convenience of information recording. The information collected by the SCADA tool is relatively comprehensive, including most of the information generated in the production task, and the collected information can be further analyzed and processed. The industrial computer collection tool can more quickly collect information directly from the controller of the single crystal furnace without passing through the SCADA tool, and the time delay of information transmission is small.

[0090] Figure 5 is a flowchart of another information processing method according to an exemplary embodiment. The query module includes an industrial computer query submodule and a user terminal query submodule. The query instruction includes a first query instruction and a second query instruction. As shown in Figure 5 Step 105 can be implemented by the following steps:

[0091] Step 1051, through the industrial computer query submodule, in response to the first query instruction, according to the identification of the target object included in the first query instruction, the first target information corresponding to the target object is obtained from the collection module and displayed.

[0092] Step 1052, through the user terminal query submodule, in response to the second query instruction, according to the identification of the target object included in the second query instruction, the second target information corresponding to the target object is obtained from the collection module and displayed.

[0093] For example, the query module can include an industrial computer query submodule and a user terminal query submodule. The query instruction can include a first query instruction and a second query instruction. The industrial computer query submodule can be understood as a client for querying on the industrial computer. The user terminal query submodule can be understood as an application program for querying on the user terminal, for example: a centralized report query system. The user terminal can include but is not limited to mobile terminals such as mobile phones, notebook computers, digital broadcast receivers, PDAs (personal digital assistants), PADs (tablet computers), PMPs (portable multimedia players), vehicle terminals (such as vehicle navigation terminals), and the like, as well as fixed terminals such as digital TVs, desktop computers, and the like.

[0094] When a user needs to query related information in the production process of a silicon wafer, the user can query through the industrial computer query submodule or the user terminal query submodule. Specifically, the user can input the identification of a target object on the query interface of the industrial computer and trigger a first query instruction including the identification of the target object by clicking the query button. After receiving the first query instruction, the industrial computer query submodule can obtain first target information associated with the identification of the target object from the collection module according to the identification of the target object indicated by the first query instruction, and display the first target information on the display interface of the industrial computer. Correspondingly, the user can input the identification of the target object on the query interface of the user terminal and trigger a second query instruction including the identification of the target object by clicking the query button. After receiving the second query instruction, the user terminal query submodule can obtain second target information associated with the identification of the target object from the collection module according to the identification of the target object indicated by the second query instruction, and display the second target information on the display interface of the user terminal. The first target information and the second target information can be completely the same information, or the first target information can be part of the second target information, and the present disclosure does not make a specific limitation in this regard. In this way, through the industrial computer query submodule and the user terminal query submodule, the information corresponding to the production task can be quickly queried, and the accuracy and convenience of information query are improved.

[0095] Figure 6 is a flowchart of another information processing method according to an exemplary embodiment. The information processing system further includes an entry module. As shown in Figure 6 the method further includes:

[0096] Step 106, through the entry module, in response to the first entry instruction, obtaining the point inspection information corresponding to the first entry instruction, and in response to the second entry instruction, obtaining the first worker information corresponding to the second entry instruction.

[0097] Step 107, associating the point inspection information with the first worker information. The point inspection information is used to indicate whether the single crystal furnace meets the preset start condition.

[0098] Step 108, through the entry module, in response to the third entry instruction, obtaining the feeding information corresponding to the third entry instruction from the collection module, and in response to the fourth entry instruction, obtaining the second worker information corresponding to the fourth entry instruction from the collection module.

[0099] Step 109, associating the feeding information with the second worker information.

[0100] In an example, the information processing system can further include an input module. The worker can input the relevant information in the production process through an input device provided with the input module. The input device can be an industrial computer, a user terminal, or the like. In an implementation, a plurality of inspection items can be displayed in advance on the display interface of the input device, and the first input instruction can be triggered by selecting the inspection item meeting the condition. When the input module receives the first input instruction, the inspection information corresponding to the first input instruction can be acquired. The inspection information is used to indicate whether the single crystal furnace meets the preset starting condition, for example, the single crystal furnace has good sealing performance. After the worker completes the input of all the inspection items, the first worker number information can be input and the confirmation button can be clicked to trigger the second input instruction. After the input module receives the second input instruction, the first worker number information corresponding to the second input instruction can be acquired, and the previously acquired inspection information and the first worker number information are associated, so as to facilitate subsequent query of the worker number information corresponding to the worker performing the inspection operation.

[0101] In another implementation, the worker can trigger a third input instruction by clicking a feeding information input button on the input device. When the input module receives the third input instruction, the feeding information corresponding to the third input instruction can be acquired from the acquisition module. The feeding information can include the type of feeding, the weight of feeding, and the like. Then, the worker can input the second worker number information and click the confirmation button to trigger the fourth input instruction. After the input module receives the fourth input instruction, the second worker number information corresponding to the fourth input instruction can be acquired, and the previously acquired feeding information and the second worker number information are associated, so as to facilitate subsequent query of the worker number information corresponding to the worker performing the feeding operation.

[0102] To sum up, the present disclosure first determines the production task through the manufacturing execution module, and sends the task identifier of the production task to the single crystal furnace, so as to control the single crystal furnace to perform the production task. Then, the task identifier of the production task, the production information of the single crystal furnace, and the equipment running information of the single crystal furnace are acquired from the single crystal furnace through the acquisition module, and the task information of the production task and the equipment attribute information of the single crystal furnace are acquired from the manufacturing execution module. The production information is the information generated in the process of the single crystal furnace performing the production task. Finally, the prompt information is sent to the presentation module through the acquisition module, and the prompt information is presented in a preset presentation form through the presentation module. The prompt information includes at least one of the task identifier, the task information, the production information, the equipment running information, and the equipment attribute information, and the presentation form includes at least one of an image form, a text form, a sound form, and a vibration form. The present disclosure can improve the accuracy of information recording and the degree of digitization in the silicon wafer production process by acquiring information from the single crystal furnace and the manufacturing execution module through the acquisition module and presenting the information through the presentation module.

[0103] Figure 7is a block diagram of an information processing system according to an exemplary embodiment, as shown in Figure 7 The information processing system 200 includes a manufacturing execution module 201, a collection module 202, and a presentation module 203.

[0104] The manufacturing execution module 201 is configured to determine a production task, and send a task identifier of the production task to a single crystal furnace to control the single crystal furnace to execute the production task.

[0105] The collection module 202 is configured to collect, from the single crystal furnace, a task identifier of the production task, production information of the single crystal furnace, and equipment operation information of the single crystal furnace, and collect, from the manufacturing execution module, task information of the production task and equipment attribute information of the single crystal furnace. The production information is information generated in a process in which the single crystal furnace executes the production task.

[0106] The collection module 202 is further configured to send prompt information to the presentation module, the prompt information including at least one of the task identifier, the task information, the production information, the equipment operation information, and the equipment attribute information.

[0107] The presentation module 203 is configured to present the prompt information in a preset presentation form, the presentation form including at least one of an image form, a text form, a sound form, and a vibration form.

[0108] Figure 8 is a block diagram of another information processing system according to an exemplary embodiment, as shown in Figure 8 The information processing system 200 further includes a query module 204.

[0109] The query module 204 is configured to, in response to a query instruction, acquire and display target information corresponding to a target object according to an identifier of the target object included in the query instruction, the target object including a target production task and / or a target single crystal furnace.

[0110] Figure 9 is a block diagram of another information processing system according to an exemplary embodiment, as shown in Figure 9 The collection module 202 includes a first collection sub-module 2021 and a second collection sub-module 2022.

[0111] The first collection sub-module 2021 is configured to collect, from a controller of the single crystal furnace, the task identifier, the production information, and the equipment operation information.

[0112] The second collection sub-module 2022 is configured to collect, from the manufacturing execution module, the task information and the equipment attribute information.

[0113] Figure 10 is a block diagram of another information processing system according to an exemplary embodiment, as shown in Figure 10As shown, the first acquisition submodule 2021 includes a supervisory control and data acquisition (SCADA) tool 2021a and an industrial personal computer (IPC) acquisition tool 2021b.

[0114] The SCADA tool 2021a is configured to acquire the task identifier, the production information, and the equipment operation information from the controller of the single crystal furnace according to a preset first acquisition period.

[0115] The IPC acquisition tool 2021b is configured to acquire at least one of the task identifier, the production information, and the equipment operation information from the controller of the single crystal furnace according to a preset second acquisition period.

[0116] Figure 11 is a block diagram of another information processing system according to an example embodiment, as shown in Figure 11 As shown, the query module 204 includes an IPC query submodule 2041 and a user terminal query submodule 2042. The query instruction includes a first query instruction and a second query instruction.

[0117] The IPC query submodule 2041 is configured to, in response to the first query instruction, acquire and display the first target information corresponding to the target object from the acquisition module according to the identifier of the target object included in the first query instruction.

[0118] The user terminal query submodule 2042 is configured to, in response to the second query instruction, acquire and display the second target information corresponding to the target object from the acquisition module according to the identifier of the target object included in the second query instruction.

[0119] Figure 12 is a block diagram of another information processing system according to an example embodiment, as shown in Figure 12 As shown, the information processing system 200 further includes an entry module 205.

[0120] The entry module 205 is configured to, in response to a first entry instruction, acquire the point inspection information corresponding to the first entry instruction, and in response to a second entry instruction, acquire the first worker information corresponding to the second entry instruction. The point inspection information is associated with the first worker information. The point inspection information is used to indicate whether the single crystal furnace meets a preset start condition.

[0121] The entry module 205 is further configured to, in response to a third entry instruction, acquire the feeding information corresponding to the third entry instruction from the acquisition module, and in response to a fourth entry instruction, acquire the second worker information corresponding to the fourth entry instruction from the acquisition module. The feeding information is associated with the second worker information.

[0122] As to the apparatus in the above embodiments, the specific manners in which various modules perform operations have been described in detail in the embodiments of the method, and thus will not be described here in detail.

[0123] In summary, the present disclosure first determines a production task through a manufacturing execution module, and sends a task identifier of the production task to a single crystal furnace, so as to control the single crystal furnace to execute the production task. Then, the acquisition module acquires the task identifier of the production task, production information of the single crystal furnace, and equipment operation information of the single crystal furnace from the single crystal furnace, and acquires task information of the production task and equipment attribute information of the single crystal furnace from the manufacturing execution module, wherein the production information is information generated in the process of the single crystal furnace executing the production task. Finally, the acquisition module sends prompt information to the presentation module, and the presentation module presents the prompt information. The prompt information includes at least one of the task identifier, the task information, the production information, the equipment operation information, and the equipment attribute information. The present disclosure can improve the accuracy of information recording and the degree of digitization in the process of producing silicon wafers by acquiring information from the single crystal furnace and the manufacturing execution module through the acquisition module, and presenting the information through the presentation module.

[0124] Figure 13 is a block diagram of an electronic device 300 according to an example embodiment. For example, the electronic device 300 can be provided as a server. Referring to Figure 13 , the electronic device 300 includes a processor 322, which can be one or more in number, and a memory 332 for storing a computer program executable by the processor 322. The computer program stored in the memory 332 can include one or more modules each corresponding to a set of instructions. In addition, the processor 322 can be configured to execute the computer program to perform the information processing method described above.

[0125] In addition, the electronic device 300 can further include a power supply component 326, which can be configured to perform power management of the electronic device 300, and a communication component 350, which can be configured to implement communication of the electronic device 300, such as wired or wireless communication. In addition, the electronic device 300 can further include an input / output (I / O) interface 358. The electronic device 300 can operate based on an operating system stored in the memory 332, such as Windows Server TM , Mac OSX TM , Unix TM , Linux TM , etc.

[0126] In another example embodiment, a computer readable storage medium including program instructions is also provided, which, when executed by a processor, implements the steps of the information processing method described above. For example, the non-transitory computer readable storage medium can be the memory 332 described above including program instructions, and the program instructions can be executed by the processor 322 of the electronic device 300 to complete the information processing method described above.

[0127] In another exemplary embodiment, there is also provided a computer program product comprising a computer program capable of being executed by a programmable apparatus, the computer program having code portions for performing the information processing method described above when executed by the programmable apparatus.

[0128] The preferred embodiments of the present disclosure are described in detail above with reference to the accompanying drawings, but the present disclosure is not limited to the specific details described in the above embodiments. Various simple modifications can be made to the technical solutions of the present disclosure within the scope of the technical concepts of the present disclosure, and these simple modifications all belong to the protection scope of the present disclosure.

[0129] In addition, it should be noted that each specific technical feature described in the above specific embodiments can be combined in any appropriate manner without contradiction. In order to avoid unnecessary repetition, various possible combinations are not described again in the present disclosure.

[0130] In addition, various different embodiments of the present disclosure can also be combined in any appropriate manner, as long as they do not deviate from the idea of the present disclosure, and they should also be considered as disclosed by the present disclosure.

Claims

1. An information processing method characterized by comprising: The method is applied to an information processing system, and the information processing system comprises a manufacturing execution module, a collection module and a presentation module. The method comprises the following steps: determining a production task by the manufacturing execution module, and sending a task identifier of the production task to a single crystal furnace to control the single crystal furnace to execute the production task; the collection module comprises a first collection submodule and a second collection submodule; the first collection submodule comprises a SCADA tool and an industrial computer collection tool; the collection module collects the task identifier of the production task, production information of the single crystal furnace and equipment operation information of the single crystal furnace from the single crystal furnace, and collects task information of the production task and equipment attribute information of the single crystal furnace from the manufacturing execution module, comprising: collecting the task identifier, the production information and the equipment operation information from the controller of the single crystal furnace according to a preset first collection period by the SCADA tool; collecting at least one of the task identifier, the production information and the equipment operation information from the controller of the single crystal furnace according to a preset second collection period by the industrial computer collection tool; collecting the task information and the equipment attribute information from the manufacturing execution module by the second collection submodule; the production information is information generated in the process of the single crystal furnace executing the production task; sending prompt information to the presentation module by the collection module, the prompt information comprising at least one of the task identifier, the task information, the production information, the equipment operation information and the equipment attribute information; 2. The method of claim 1, wherein, presenting the prompt information in a preset presentation form by the presentation module, the presentation form comprising at least one of an image form, a text form, a sound form and a vibration form. The information processing system further comprises a query module; the method further comprises the following steps:

3. The method of claim 2, wherein, in response to a query instruction, acquiring and displaying target information corresponding to a target object from the collection module according to an identifier of the target object included in the query instruction by the query module, the target object comprising a target production task and / or a target single crystal furnace. The query module comprises an industrial computer query submodule and a user terminal query submodule; the query instruction comprises a first query instruction and a second query instruction; the step of acquiring and displaying the target information corresponding to the target object from the collection module according to the identifier of the target object included in the query instruction by the query module comprises: in response to the first query instruction, acquiring and displaying first target information corresponding to the target object from the collection module according to the identifier of the target object included in the first query instruction by the industrial computer query submodule; 4. The method of claim 1, wherein, in response to the second query instruction, acquiring and displaying second target information corresponding to the target object from the collection module according to the identifier of the target object included in the second query instruction by the user terminal query submodule. The information processing system further comprises an input module; the method further comprises the following steps: The input module is configured to: in response to a first input instruction, acquire point inspection information corresponding to the first input instruction; in response to a second input instruction, acquire first worker information corresponding to the second input instruction; and associate the point inspection information with the first worker information; the point inspection information is used to indicate whether the single crystal furnace meets a preset starting condition. The input module is configured to: in response to a third input instruction, acquire feeding information corresponding to the third input instruction from the collection module; in response to a fourth input instruction, acquire second worker information corresponding to the fourth input instruction from the collection module; and associate the feeding information with the second worker information.

5. An information processing system, characterized by comprising: The information processing system comprises: a manufacturing execution module, a collection module, and a presentation module; the collection module comprises: a first collection submodule and a second collection submodule; the first collection submodule comprises: a supervisory control and data acquisition (SCADA) tool and an industrial personal computer (IPC) collection tool; The manufacturing execution module is configured to determine a production task, and send a task identifier of the production task to the single crystal furnace to control the single crystal furnace to execute the production task. The collection module is configured to collect, from the single crystal furnace, a task identifier of the production task, production information of the single crystal furnace, and equipment operation information of the single crystal furnace, and collect, from the manufacturing execution module, task information of the production task and equipment attribute information of the single crystal furnace, including: collecting, by the SCADA tool, the task identifier, the production information, and the equipment operation information from a controller of the single crystal furnace according to a preset first collection period; collecting, by the IPC collection tool, at least one of the task identifier, the production information, and the equipment operation information from the controller of the single crystal furnace according to a preset second collection period; and collecting, by the second collection submodule, the task information and the equipment attribute information from the manufacturing execution module; the production information is information generated in a process in which the single crystal furnace executes the production task. The collection module is further configured to send prompt information to the presentation module, the prompt information comprising at least one of the task identifier, the task information, the production information, the equipment operation information, and the equipment attribute information. The presentation module is configured to present the prompt information in a preset presentation form, the presentation form comprising at least one of an image form, a text form, a sound form, and a vibration form.

6. The system of claim 5, wherein, The information processing system further comprises a query module. The query module is configured to, in response to a query instruction, acquire and display target information corresponding to a target object according to an identifier of the target object included in the query instruction, the target object comprising: a target production task, and / or a target single crystal furnace.

7. A non-transitory computer-readable storage medium having stored thereon a computer program, characterized in that, The program is executed by a processor to implement the steps of the method of any one of claims 1-4.

8. An electronic device, comprising: The program is executed by a processor to implement the steps of the method of any one of claims 1-4. The program is executed by a processor to implement the steps of the method of any one of claims 1-4. The program is executed by a processor to implement the steps of the method of any one of claims 1-4.

Images