Pressure-controllable floating pickup device and chip automatic test equipment

Abstract

The application relates to a pressure-controllable floating pickup device and a chip automatic testing equipment, wherein a synchronous wheel is installed on an output shaft of a stepping motor and accommodated in a rotary pickup seat; a ball spline is accommodated in the rotary pickup seat and connected with the synchronous wheel through a synchronous belt; one end of a spline shaft tube of the ball spline is connected with an air pipe joint, and the other end is connected with a suction nozzle through a suction nozzle seat, so that the air pipe joint is connected with the suction nozzle through an air channel in the spline shaft tube; a rotary induction sheet is fixed on the synchronous wheel, a slot-type inductor is electrically connected with the stepping motor, and the slot-type inductor is used for sensing the position of the rotary induction sheet, so as to determine the position of the suction nozzle and drive the stepping motor. On the one hand, the ball spline is ingeniously used for one-way displacement control, which is beneficial to precise pickup control in the direction; on the other hand, the application has the advantages of simple structure and accurate control; on the other hand, the ball spline is used in cooperation with a vacuum pump and a suction nozzle to realize negative pressure suction, and the application has the advantage of small size.

Description

Technical Field

[0001] This application relates to the field of automated chip manufacturing, and in particular to pressure-controlled floating pickup devices and automated chip testing equipment. Background Technology

[0002] In the process of chip testing or manufacturing other micro-components, it is often necessary to perform displacement operations on the chips or other micro-components.

[0003] Chinese patent CN218503831U discloses a material picking swing arm mechanism and a semiconductor packaging placement machine. The material picking swing arm mechanism includes a fixed arm, a gripper assembly, a second motor, and a connecting assembly. The fixed arm has a first through hole. The gripper assembly includes a picking gripper and a first motor. The first motor is mounted on the fixed arm, and its shaft passes through the first through hole and is driven by the picking gripper. The first motor drives the picking gripper to swing between a picking position and a placing position, and the picking gripper picks up a semiconductor chip at the picking position. The second motor is mounted on the fixed arm. One end of the connecting assembly is connected to the shaft of the second motor, and the second motor drives the picking gripper to move vertically through the connecting assembly. This invention simplifies the structure and reduces the overall size of the mechanism.

[0004] However, this patented technology is implemented through a swing arm, which inherently limits its accuracy.

[0005] Chinese Patent CN115452058A discloses a compact, highly automated, and accurately aligned micro-component automatic inspection mechanism that effectively improves overall production line efficiency. It falls within the technical field of automatic inspection mechanisms. The mechanism includes a base and, sequentially arranged on the base, a feeding module, a transfer module, an end-face inspection module, a back-side inspection module, and an unloading module. The feeding module moves a product carrier close to the transfer module, which then attracts and moves the component to the end-face inspection module. The end-face inspection module detects the component's flatness. The transfer module then attracts the component again, moves it, and positions it above the back-side inspection module, which detects the flatness of the component's back side. After detection, the transfer module adjusts the component's position and places it on the unloading module.

[0006] However, the patented technology has a complex structure and a slightly large size, making it somewhat unsuitable for different micro-components. Furthermore, since it is a sliding control, it also has inherent limitations in terms of accuracy.

[0007] Chinese patent CN218173906U discloses a structure for controlling multiple nozzle modules with a single-axis motor. The structure includes: a Z-axis drive mechanism, sliding limit mechanisms on both sides of the output end of the Z-axis drive mechanism, a clutch plate on the sliding limit mechanisms and positioned at the output end of the Z-axis drive mechanism, and several nozzle mechanisms on the clutch plate. The sliding limit mechanism includes a slide rail, a slider on the slide rail, and limit components at the upper and lower ends of the slider. Each nozzle mechanism includes an electromagnet assembly, a first shaft, a nozzle shaft, an up / down adjustment block, an elastic mechanism one, and an elastic mechanism two. This invention uses a single motor axis to control multiple nozzles, achieving free up / down control that would otherwise require multiple axes. This significantly reduces costs. Future upgrades to add more nozzles only require adding nozzle kits without modifying the mechanism, making it simple and convenient. The single-axis design simplifies the mechanism and makes maintenance easier.

[0008] However, this patented technology is also a sliding control, so it also has inherent shortcomings in terms of accuracy. Summary of the Invention

[0009] Therefore, it is necessary to provide a pressure-controllable floating pickup device and an automated chip testing equipment.

[0010] A pressure-controllable floating pickup device includes a rotary pickup base, a stepper motor, a slotted sensor, a timing pulley, a rotary sensing plate, a ball spline, a timing belt, a nozzle holder, an air tube connector, and a nozzle.

[0011] Both the stepper motor and the slotted sensor are fixed on the rotating pickup base;

[0012] The synchronous pulley is mounted on the output shaft of the stepper motor and housed in the rotary pickup base;

[0013] The ball spline is housed in the rotary pickup seat and is connected to the synchronous pulley via the synchronous belt;

[0014] One end of the spline shaft tube of the ball spline is connected to the air pipe connector, and the other end is fixed to the nozzle seat and connected to the nozzle through the nozzle seat, so that the air pipe connector is connected to the nozzle through the air passage in the spline shaft tube.

[0015] The rotating sensor plate is fixed on the synchronous wheel, and the slotted sensor is electrically connected to the stepper motor. The slotted sensor is used to sense the position of the rotating sensor plate in order to determine the position of the suction nozzle and drive the stepper motor.

[0016] The aforementioned pressure-controllable floating pickup device cleverly utilizes ball splines for unidirectional displacement control, which is beneficial for achieving precise pickup control in that direction. On the other hand, it uses a stepper motor to drive the ball splines through a synchronous pulley, which has the advantages of simple structure and precise control. Furthermore, it achieves negative pressure suction through a spline shaft tube in conjunction with a vacuum pump and a suction nozzle, and has the advantage of small size.

[0017] Furthermore, in one embodiment, the slotted sensor is electrically connected to the stepper motor via a circuit.

[0018] In one embodiment, the pressure-controllable floating pickup device further includes a bearing cover, the top of the ball spline passing through or abutting against the bearing cover, such that one end of the spline shaft passes through the bearing cover and connects to the suction nozzle above the bearing cover, and the ball spline is fixed in the rotary pickup seat by the bearing cover.

[0019] In one embodiment, the ball spline is mounted in the rotary pickup unit from the assembly port of the rotary pickup unit;

[0020] The pressure-controllable floating pickup device also includes a suction head end cap, which closes the assembly port.

[0021] In one embodiment, the pressure-controllable floating pickup device further includes a rotary motor base fixed to the rotary pickup base, and the stepper motor fixed to the rotary motor base.

[0022] In one embodiment, the rotating sensing plate has a 1 / 4 fan ring, 1 / 3 fan ring, or 1 / 2 fan ring shape.

[0023] Furthermore, in one embodiment, the rotating sensing sheet includes a body and a protrusion protruding from the body, and a groove is formed in the body;

[0024] The main body is fitted onto the synchronous pulley through the groove, and the main body is fixed to the synchronous pulley;

[0025] Driven by the synchronous pulley, the convex piece has a first state located in the groove sensing area of ​​the groove sensor and a second state located outside the groove sensing area.

[0026] Furthermore, in one embodiment, the tab has a 1 / 4 fan ring, 1 / 3 fan ring, or 1 / 2 fan ring shape.

[0027] In one embodiment, the pressure-controllable floating pickup device further includes a pickup adjustment seat, and the rotating pickup seat is fixed to the pickup adjustment seat.

[0028] In one embodiment, the pressure-controllable floating pickup device further includes an air connector, and one end of the spline shaft tube of the ball spline is connected to the air pipe connector through the air connector.

[0029] Furthermore, in one embodiment, the rotary pickup seat has a seat body and an extended protrusion connected to the seat body, and a wheel groove is formed in the seat body, and an opening communicating with the wheel groove is formed on the surface of the seat body;

[0030] The synchronous pulley and the rotating induction plate are both located in the pulley groove, the ball spline is located in the spline groove of the extended protrusion, and the synchronous belt extends from the pulley groove into the spline groove;

[0031] The extended protrusion has a limiting hole that communicates with the spline groove, the spline shaft tube passes through the limiting hole, and the limiting hole is closed by a bearing cover;

[0032] The slotted sensor is fixed to the base at the opening and adjacent to the rotating sensing plate;

[0033] The rotary motor base is fixed to the rotary pickup base and closes the wheel groove.

[0034] In one embodiment, the pressure-controllable floating pickup device further includes an elastic element that is sleeved outside the splined shaft tube and located between the rotary pickup seat and the nozzle seat.

[0035] In one embodiment, the pressure-controllable floating pickup device further includes an elastic element located between the rotary pickup seat and the nozzle seat, the elastic element being fixed to the nozzle seat and having a symmetrical shape.

[0036] In one embodiment, the elastic element includes a spring and a spring block.

[0037] In one embodiment, an automated chip testing device includes a testing device, a storage device, and a pressure-controllable floating pickup device as described in any embodiment.

[0038] The detection device is used to detect that there is material to be processed on the storage device. The material to be processed is picked up by the pressure-controllable floating pickup device through its nozzle and transported in the extension direction of the spline shaft tube. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of an embodiment of the pressure-controllable floating pickup device described in this application.

[0041] Figure 2 for Figure 1 Another schematic diagram of the embodiment shown.

[0042] Figure 3 for Figure 1 The illustrated embodiment is shown in an exploded view.

[0043] Figure 4 for Figure 3 A partial structural schematic diagram of the embodiment shown.

[0044] Figure 5 for Figure 3 A partial structural schematic diagram of the embodiment shown.

[0045] Figure 6 This is a schematic diagram of an embodiment of the pressure-controllable floating pickup device described in this application.

[0046] Figure 7 for Figure 6 An enlarged schematic diagram of point A in the illustrated embodiment.

[0047] Figure 8 for Figure 6 The illustrated embodiment is shown in an exploded view.

[0048] Figure 9 for Figure 6 Another schematic diagram of the embodiment shown.

[0049] Figure 10 for Figure 6 A schematic diagram of the rotating pickup base in the embodiment shown.

[0050] Figure 11 for Figure 8 The diagram shows the structure of the slotted sensor and circuitry in the embodiment shown.

[0051] Figure 12 for Figure 8 A schematic diagram of the structure of the rotating induction plate in the embodiment shown.

[0052] Reference numerals: Pickup adjustment seat 101, Rotary pickup seat 102, Rotary motor seat 103, Stepper motor 104, Slotted sensor 105, Bearing cover 106, Nozzle end cover 107, Synchronous pulley 108, Rotary sensing plate 109, Ball spline 110, Synchronous belt 111, Nozzle seat 112, Elastic element 113, Air connector 114, Air pipe connector 115, Nozzle 116, Splined shaft tube 117, Assembly port 118, Seat body 119, Wheel groove 120, Opening 121, Extension protrusion 122, Spline groove 123, Circuit 124, Body 125, Protrusion 126, Sleeve groove 127, Air passage 128, Slotted sensing area 129. Detailed Implementation

[0053] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0054] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.

[0055] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0056] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0057] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used in this application includes any and all combinations of one or more of the associated listed items.

[0058] This application discloses a pressure-controllable floating pickup device and an automated chip testing equipment, which includes some or all of the structures of the following embodiments; that is, the pressure-controllable floating pickup device and the automated chip testing equipment include some or all of the following technical features. In one embodiment of this application, a pressure-controllable floating pickup device includes a rotary pickup base, a stepper motor, a slotted sensor, a timing pulley, a rotary sensing plate, a ball spline, a timing belt, a nozzle holder, an air hose connector, and a nozzle: the stepper motor and the slotted sensor are both fixed on the rotary pickup base; the timing pulley is mounted on the output shaft of the stepper motor and housed in the rotary pickup base; the ball spline is housed in the rotary pickup base and connected to the timing pulley via the timing belt; one end of the spline shaft tube of the ball spline is connected to the air hose connector, and the other end is fixed to the nozzle holder and connected to the nozzle through the nozzle holder, so that the air hose connector communicates with the nozzle through the air passage in the spline shaft tube; the rotary sensing plate is fixed on the timing pulley, and the slotted sensor is electrically connected to the stepper motor, the slotted sensor being used to sense the position of the rotary sensing plate to determine the position of the nozzle and drive the stepper motor. The aforementioned pressure-controllable floating pickup device cleverly utilizes ball splines for unidirectional displacement control, which is beneficial for achieving precise pickup control in that direction. On the other hand, it uses a stepper motor to drive the position of the ball splines and the nozzle through a synchronous pulley, which has the advantages of simple structure and precise control. Furthermore, it achieves negative pressure suction through a spline shaft tube in conjunction with a vacuum pump and nozzle, and has the advantage of small size.

[0059] Taking the automated production of thermoelectric coolers (TECs) as an example, the embodiments of this application can be applied to automated production equipment for thermoelectric coolers and TECs, enabling the automated picking and unloading of multi-specification micro-thermoelectric coolers, especially in the picking process of TEC testing equipment. Individual TEC picking and unloading is convenient, adjustable, nozzle pressure is controllable, and the structure is simple and precise. It can also be applied to automated production processes for chip transfer. In one embodiment, a pressure-controllable floating pickup device is provided, such as... Figure 1As shown, it includes a rotary pickup base 102, a stepper motor 104, a slotted sensor 105, a synchronous pulley 108, a rotary sensing plate 109, a ball spline 110, a synchronous belt 111, a nozzle base 112, an air pipe connector 115, and a nozzle 116. This provides a floating pickup device with a simple mechanism that facilitates floating functionality, and the overall mechanism is compact and concise.

[0060] Combination Figure 2 and Figure 3 The stepper motor 104 is fixed to the rotary pickup base 102 and drives the synchronous pulley 108, the rotary sensing plate 109, the ball spline 110, and the synchronous belt 111. The slotted sensor 105 is fixed to the rotary pickup base 102 and electrically connected to the stepper motor 104 or the controller of the stepper motor 104. It senses the rotary sensing plate 109 to determine the position of the suction nozzle 116 and controls the position of the suction nozzle 116 through the stepper motor 104. This design facilitates precise positioning and control of the suction nozzle 116.

[0061] The synchronous pulley 108 is mounted on the output shaft of the stepper motor 104 and housed in the rotary pickup seat 102. The synchronous pulley 108 is used to drive the rotary sensing plate 109 to rotate under the drive of the stepper motor 104. At the same time, it drives the ball spline 110 through the synchronous belt 111, thereby driving the suction nozzle 116 mounted on the spline shaft tube 117 of the ball spline 110 to rotate. For example, the suction nozzle 116 can rotate 360 ​​degrees. Under the action of the rotary sensing plate 109, the rotation angle of the suction nozzle 116 can be determined.

[0062] Specifically, the ball spline 110 is housed in the rotary pickup seat 102 and connected to the synchronous pulley 108 via the synchronous belt 111. One end of the spline shaft tube 117 of the ball spline 110 is connected to the air pipe connector 115, and the other end is fixed to the nozzle seat 112. Figure 4 and Figure 5This structure allows the air connector 115 to connect to the suction nozzle 116 via the air passage 128 in the splined shaft tube 117; that is, the air connector 115 connects to the suction nozzle 116 via the splined shaft tube 117 and the suction nozzle seat 112. The splined shaft tube 117 can move relative to other parts of the ball spline 110 in the Z direction. Further, in one embodiment, the air connector 115 is used to connect to a vacuum pump. In one embodiment, the pressure-controllable floating pickup device also includes the vacuum pump. The splined shaft tube 117 is an important inventive point of this application, which hollows out the traditional splined shaft, giving the splined shaft tube 117 a gas transmission function, forming a gas transmission channel, thereby facilitating negative pressure suction in conjunction with the vacuum pump and suction nozzle under the premise of precise displacement control.

[0063] To facilitate fine-tuning of the pickup position to adjust the position of the splined shaft tube and its connected nozzle, such as Figure 6 As shown, in one embodiment, the pressure-controllable floating pickup device further includes a pickup adjustment seat 101, and the rotating pickup seat 102 is fixed to the pickup adjustment seat 101. This design facilitates fine-tuning the position of the splined shaft tube 117 and its connected nozzle 116 in the Y direction by adjusting the relative position of the rotating pickup seat 102 and the pickup adjustment seat 101.

[0064] To facilitate the assembly and overall fixing of the motor, such as Figure 6 As shown, in one embodiment, the pressure-controllable floating pickup device further includes a rotary motor base 103, which is fixed to the rotary pickup base 102, and the stepper motor 104 is fixed to the rotary motor base 103. That is, the stepper motor 104 is fixed to the rotary pickup base 102 via the rotary motor base 103. This design not only facilitates the overall fixing of the motor during assembly but also facilitates subsequent maintenance of the motor.

[0065] To facilitate the placement of the timing pulley and the timing belt, and to ensure the effectiveness of the working state and the accuracy of the spline shaft tube displacement, such as Figure 7 As shown, further, in one embodiment, the rotary pickup base 102 has a groove 120, in which the synchronous pulley 108, the synchronous belt 111, and the rotary sensing plate 109 are all located. The rotary motor base 103 is fixed to the rotary pickup base 102 and closes the groove 120. In this embodiment, the rotary motor base 103 does not completely close the groove 120 to allow for ventilation.

[0066] In order to limit the ball spline from the displacement direction of the spline shaft tube, that is, to limit the ball spline from other structures besides the spline shaft tube, combined with Figure 6 and Figure 8 In one embodiment, the pressure-controllable floating pickup device further includes a bearing cover 106, the top of the ball spline 110 passing through or abutting against the bearing cover 106, so that one end of the spline shaft tube 117 passes through the bearing cover 106 and connects to the suction nozzle 116 above the bearing cover 106, and the ball spline 110 is fixed in the rotary pickup base 102 by the bearing cover 106. Further, in one embodiment, the bearing cover 106 is fixed to the rotary pickup base 102. This design, on the one hand, allows for the adjustment of the position of the suction nozzle 116 through the splined shaft tube 110, facilitating reasonable control of the pressure at the suction nozzle 116. Therefore, it is called a pressure-controllable floating pickup device. On the other hand, it facilitates the control of the position of the ball spline 110, ensuring the precise position of the splined shaft tube 110, thereby guaranteeing the precise displacement of the splined shaft tube 110. This allows for precise control of the position of the suction nozzle 116, improving position control accuracy by one to two orders of magnitude compared to traditional slide rail displacement control. This is beneficial for protecting the micro-components being picked up, such as chips or semiconductor coolers. Taking TEC as an example, this application can provide equipment with TECs suitable for different sizes and specifications, and solves the problem of adjustable pressure on the product during TEC loading and unloading, achieving equipment versatility, high precision and high stability of automatic feeding. Furthermore, besides TECs, this application is also applicable to the negative pressure adsorption and pickup of other products, especially micro-components.

[0067] To protect the ball splines and ensure their effective design life, combined with Figure 6 and Figure 8 In one embodiment, the ball spline 110 is installed in the rotary pickup base 102 through the assembly port 118; the pressure-controllable floating pickup device also includes a suction head end cap 107, which closes the assembly port 118. With this design, the ball spline 110 is essentially closed externally, while internally it is connected to the synchronous pulley 108 via the synchronous belt 111.

[0068] To ensure nozzle pressure and prevent the vacuum pump pressure from affecting the pickup of micro-components, in one embodiment, the pressure-controllable floating pickup device further includes an elastic element 113, located between the rotary pickup seat 102 and the nozzle seat 112. In another embodiment, the pressure-controllable floating pickup device further includes the elastic element 113, which is sleeved on the splined shaft tube 117 and located between the rotary pickup seat 102 and the nozzle seat 112. In yet another embodiment, the pressure-controllable floating pickup device further includes an elastic element located between the rotary pickup seat and the nozzle seat, fixed to the nozzle seat and having a symmetrical shape. In one embodiment, the elastic element 113 includes a spring and a spring block. This design, when suctioning micro-components such as TECs or chips under negative pressure, allows the spline shaft tube 117 to move up and down in the Z direction due to the action of the ball spline 110, thereby achieving floating pickup. Furthermore, the elastic element 113, such as a spring, facilitates the cooperation with the suction nozzle to control the pressure of the nozzle on the material during suction. Therefore, it is called a pressure-controllable floating pickup device. For example, if there is no elastic element, the pressure will concentrate on the material being sucked up when the pressure of the nozzle is too high, which can easily damage the material. This application, by designing an elastic element, prevents the nozzle from moving too far when the pressure of the nozzle on the material is too high. The seat abuts against the rotating pickup seat via an elastic element, which helps to work with the splined shaft tube to limit excessive pressure from the nozzle on the material. Therefore, the design of the elastic element also helps to further control the suction pressure. On the one hand, the design of the elastic element helps to protect micro-components such as chips or micro-semiconductor coolers from damage caused by excessive negative pressure from the vacuum pump; on the other hand, it helps to protect the nozzle from deformation and scrapping caused by excessive negative pressure from the vacuum pump; and furthermore, it helps to provide different nozzle pressure conditions to handle various sizes of materials to be processed, thereby improving the versatility of the pressure-controllable floating pickup device.

[0069] To facilitate the connection of rigid splined shaft tubes to rigid air fittings within a specific space, such as... Figure 8 and Figure 9As shown, in one embodiment, the pressure-controllable floating pickup device further includes an air connector 114, through which one end of the spline shaft tube 117 of the ball spline 110 is connected to the air pipe connector 115. The air connector 114 can be a rigid or flexible structural component. It is used to connect the rigid spline shaft tube to the rigid air pipe connector within a specific spatial range, for example, a height difference of 2 cm. Further, in one embodiment, the air connector 114 has both deformation and fixing characteristics. This design, on the one hand, helps ensure a stable connection between the spline shaft tube 117 of the ball spline 110 and the air connector 114; on the other hand, it helps protect the spline shaft tube 117, preventing the spatial connection from affecting the stability of the suction position.

[0070] To protect the synchronizing pulley and rotating induction plate and ensure their effective design life, such as Figure 10 As shown, further, in one embodiment, the rotary pickup seat 102 has a seat body 119 and an extending protrusion 122 connected to the seat body 119, and a wheel groove 120 is formed in the seat body 119, and an opening 121 communicating with the wheel groove 120 is formed on the surface of the seat body 119; the ball spline 110 is located in the space of the spline groove of the extending protrusion 122 communicating with the assembly port 118 and the limiting hole 123. Combined with... Figure 7 and Figure 9 The synchronous pulley 108 and the rotary sensing plate 109 are both located in the pulley groove 120, and the synchronous belt 111 extends from the pulley groove 120 into the spline groove. The extended protrusion 122 has a limiting hole 123 communicating with the spline groove. The spline shaft tube 117 passes through the limiting hole 123 and is closed by the bearing cover 106. The slotted sensor 105 is fixed to the base 119 at the opening 121 and is adjacent to the rotary sensing plate 109. The rotary motor base 103 is fixed to the rotary pickup base 102 and closes the pulley groove 120, including completely closing the pulley groove 120 and partially closing the pulley groove 120. This design helps to form a relatively closed protective space, thereby protecting the functional structural components such as the synchronous pulley, synchronous belt, and rotary sensing plate located in this space.

[0071] Combination Figure 6 and Figure 7In various embodiments, the rotating sensing plate 109 is fixed to the synchronous pulley 108, and the slotted sensor 105 is electrically connected to the stepper motor 104. The slotted sensor 105 is used to sense the position of the rotating sensing plate 109 to determine the angular position of the suction nozzle 116 and drive the stepper motor 104. Further, in one embodiment, the slotted sensor 105 is electrically connected to the stepper motor 104 via a line 124. In one embodiment, the rotating sensing plate 109 has a 1 / 4 fan-ring, 1 / 3 fan-ring, or 1 / 2 fan-ring shape. The fan-ring is a part of a ring, that is, the shape remaining after removing smaller fan-shaped sections with the same included angle from a larger fan-shaped section. The fan-ring shape of the rotating sensing plate 109 is protruding, combined with... Figure 11 The fan-shaped ring of the rotating sensing plate 109 has a state of entering and exiting the groove sensing area 129 of the groove sensor 105, so as to cooperate in determining the number of rotations and current position of the synchronous wheel 108, thereby determining the position of the spline shaft tube 117 and the suction nozzle 116. In this embodiment, the slotted sensor 105 has a slotted sensing area 129 and is connected to a line 124. The slotted sensor 105 is electrically connected to a control device or controller through the line 124 to determine the position of the splined shaft tube 117 and the suction nozzle 116, especially their angular position relative to the material to be processed. The control device or controller drives the stepper motor 104 to drive the synchronous wheel 108 to drive the ball spline 110. By controlling the position of the splined shaft tube 117 in the Z direction, the angle of the suction nozzle 116 can be precisely controlled. This is beneficial for protecting the chip or other micro-components such as TEC to be picked up, and also for accurately controlling the position of the micro-components. Combined with the transmission structure in the Y direction or other directions, it is beneficial for achieving precise delivery of micro-components.

[0072] Furthermore, in one embodiment, the slotted sensor 105 is a photoelectric sensor. The slotted sensor 105 is used to detect when light is blocked by the fan-shaped ring or protrusion of the rotating sensing plate 109, thus determining that the synchronous wheel 108 has completed one rotation. Further, in one embodiment, the rotating sensing plate 109 has a 1 / 2 fan-shaped ring, i.e., a half-ring shape. The slotted sensor 105 can determine whether the synchronous wheel 108 has rotated to half its full extent based on the rotating sensing plate 109. In other embodiments, the slotted sensor 105 can further determine the rotational position of the synchronous wheel 108 based on time, thereby making the positioning of the nozzle 116 angle via the splined shaft tube 117 more accurate.

[0073] like Figure 12As shown, further, in one embodiment, the rotating sensing plate 109 includes a body 125 and a protrusion 126 protruding from the body 125, and a groove 127 is formed in the body 125; the body 125 is fitted onto the synchronous pulley 108 through the groove 127, and the body 125 is fixed to the synchronous pulley 108; the protrusion 126, driven by the synchronous pulley 108, has a first state located in the groove-shaped sensing area 129 of the groove-shaped sensor 105, and a second state located outside the groove-shaped sensing area 129. Further, in one embodiment, the protrusion 126 has a 1 / 4 fan ring, 1 / 3 fan ring, or 1 / 2 fan ring shape. Furthermore, in one embodiment, the suction nozzle 116 has an axisymmetric shape on its suction surface, and the protrusion 126 has a 1 / 4 fan-shaped ring or two symmetrical 1 / 4 fan-shaped rings. With this design, the direction of the suction nozzle 116 can be adjusted by rotating the synchronous pulley 108 half a turn. Furthermore, in one embodiment, the body 125 and the protrusion 126 are integrally formed. As mentioned above, this design facilitates the determination of the position of the splined shaft tube and the suction nozzle 116 connected to it.

[0074] The following is a specific application embodiment of the pressure-controllable floating pickup device, which includes: a pickup adjustment seat 101; a rotary pickup seat 102 mounted on the base; a rotary motor seat 103, a stepper motor 104, a slotted sensor 105, a bearing cover 106, and a suction head end cover 107 mounted on the rotary pickup seat 102; a synchronous pulley 108 mounted on the stepper motor 104; a rotary sensing plate 109 mounted on the synchronous pulley 108; a ball spline 110 mounted on the rotary pickup seat 102; a synchronous belt 111 mounted on the ball spline 110 and the synchronous pulley 108; a suction head seat 112, an elastic element 113, an air connector 114, and an air pipe connector 115 mounted on the ball spline 110; and a suction head 116 located on the suction head seat 112.

[0075] The application of the pressure-controllable floating pickup device is briefly described as follows: Stepper motor 104 drives synchronous pulley 108 to move, which in turn drives synchronous belt 111 to move, thereby driving ball spline 110 to rotate. One end of ball spline 110 is connected to nozzle 116, so nozzle 116 can rotate 360°. The force of elastic element 113 can control the pressure of nozzle 116 floating downwards. Rotary pickup seat 102 is installed on pickup adjustment seat 101, and the whole can be finely adjusted in the Y direction by mounting screws. This design can be used as a universal picking device for chips or TEC equipment. Utilizing the telescopic, rotatable, and helical feeding characteristics of ball spline, the nozzle floats in the Z-axis within the stroke range of ball spline. For different floating strokes, only the model of ball spline 110 needs to be adjusted, and for different nozzle pressure requirements, only nozzle 116 and elastic element 113 need to be adjusted, while the overall shape and principle remain unchanged.

[0076] In one embodiment, an automated chip testing device includes a detection device, a storage device, and a pressure-controlled floating pickup device as described in any embodiment; the detection device is used to detect that there is material to be processed on the storage device, which is then picked up by the pressure-controlled floating pickup device through its suction nozzle 116 and transported in the extension direction of the spline shaft tube 117. In one embodiment, the automated chip testing equipment includes a detection device, a storage device, and a pressure-controllable floating pickup device. The pressure-controllable floating pickup device includes a rotary pickup base 102, a stepper motor 104, a slotted sensor 105, a timing pulley 108, a rotary sensing plate 109, a ball spline 110, a timing belt 111, a nozzle holder 112, an air pipe connector 115, and a nozzle 116. The stepper motor 104 and the slotted sensor 105 are both fixed to the rotary pickup base 102. The timing pulley 108 is mounted on the output shaft of the stepper motor 104 and housed within the rotary pickup base 102. The ball spline 110 is housed within the rotary pickup base. In step 102, the ball spline 110 is connected to the synchronous pulley 108 via the synchronous belt 111. One end of the spline shaft tube 117 of the ball spline 110 is connected to the air pipe connector 115, and the other end is fixed to the suction nozzle seat 112, and is connected to the suction nozzle 116 through the suction nozzle seat 112, so that the air pipe connector 115 is connected to the suction nozzle 116 through the air passage 128 in the spline shaft tube 117. The rotating sensing plate 109 is fixed on the synchronous pulley 108, and the slotted sensor 105 is electrically connected to the stepper motor 104. The slotted sensor 105 is used to sense the position of the rotating sensing plate 109 to determine the position of the suction nozzle 116 and drive the stepper motor 104. The remaining embodiments are similar and will not be described in detail. This design cleverly utilizes ball splines for unidirectional displacement control, which facilitates precise pickup control in that direction. On the other hand, it employs a stepper motor to drive the ball splines via a synchronous pulley, offering advantages such as simple structure and precise control. Furthermore, it achieves negative pressure suction through a spline shaft tube in conjunction with a vacuum pump and nozzle, while also boasting a compact size.

[0077] It should be noted that other embodiments of this application also include a pressure-controllable floating pickup device and an automated chip testing equipment formed by combining the technical features of the above embodiments.

[0078] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0079] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.

Claims

1. A pressure-controllable floating pickup device, characterized in that, It includes a rotary pickup base (102), a stepper motor (104), a slotted sensor (105), a timing pulley (108), a rotary sensor plate (109), a ball spline (110), a timing belt (111), a nozzle holder (112), an elastic element (113), an air pipe connector (115), and a nozzle (116). The stepper motor (104) and the slotted sensor (105) are both fixed on the rotating pickup base (102); The synchronous pulley (108) is mounted on the output shaft of the stepper motor (104) and housed in the rotary pickup seat (102); The ball spline (110) is housed in the rotary pickup seat (102) and is connected to the synchronous pulley (108) via the synchronous belt (111) so as to rotate under the action of the synchronous pulley (108); One end of the spline shaft tube (117) of the ball spline (110) is connected to the air pipe connector (115), and the other end is fixed to the nozzle seat (112), and the nozzle (116) is connected through the nozzle seat (112), so that the air pipe connector (115) is connected to the nozzle (116) through the air passage (128) in the spline shaft tube (117). The elastic element (113) is located between the rotary pickup seat (102) and the nozzle seat (112), and is used to control the pressure of the nozzle (116) floating down when the splined shaft tube (117) drives the nozzle (116) to float down. The rotating sensor (109) is fixed on the synchronous wheel (108), and the slotted sensor (105) is electrically connected to the stepper motor (104). The slotted sensor (105) is used to sense the position of the rotating sensor (109) to determine the position of the suction nozzle (116) and drive the stepper motor (104). The rotating sensing plate (109) includes a body (125) and a protrusion (126) protruding from the body (125), and a groove (127) is provided in the body (125); the body (125) is fitted onto the synchronous wheel (108) through the groove (127), and the body (125) is fixed on the synchronous wheel (108); the protrusion (126) has a first state located in the groove sensing area (129) of the groove sensor (105) and a second state located outside the groove sensing area (129) under the drive of the synchronous wheel (108); the suction nozzle (116) has an axisymmetric shape on the suction surface, and the protrusion (126) has a 1 / 4 fan ring shape.

2. The pressure-controllable floating pickup device according to claim 1, characterized in that, It also includes a bearing cover (106), the top of the ball spline (110) passing through or abutting against the bearing cover (106), so that one end of the spline shaft tube (117) passes through the bearing cover (106) and connects to the nozzle (116) above the bearing cover (106), and the ball spline (110) is fixed in the rotary pickup seat (102) by the bearing cover (106).

3. The pressure-controllable floating pickup device according to claim 1, characterized in that, The ball spline (110) is installed in the rotary pickup base (102) from the assembly port (118); The pressure-controllable floating pickup device also includes a suction head end cap (107) that closes the assembly port (118).

4. The pressure-controllable floating pickup device according to claim 1, characterized in that, It also includes a rotary motor mount (103), which is fixed on the rotary pickup mount (102), and the stepper motor (104) is fixed on the rotary motor mount (103).

5. The pressure-controllable floating pickup device according to claim 4, characterized in that, It also includes a pickup adjustment seat (101), and the rotating pickup seat (102) is fixed on the pickup adjustment seat (101); The rotary pickup seat (102) has a seat body (119) and an extension protrusion (122) connected to the seat body (119). A wheel groove (120) is formed in the seat body (119), and an opening (121) communicating with the wheel groove (120) is formed on the surface of the seat body (119). The ball spline (110) is located in the spline groove of the extension protrusion (122), and the timing belt (111) extends from the wheel groove (120) into the spline groove. The protrusion (122) has a limiting hole (123) that connects to the spline groove. The spline shaft tube (117) passes through the limiting hole (123) and is closed by the bearing cover (106). The groove-shaped sensor (105) is fixed to the base (119) at the opening (121) and is adjacent to the rotating sensing plate (109). The rotating motor base (103) is fixed to the rotating pickup base (102) and closes the wheel groove (120).

6. The pressure-controllable floating pickup device according to claim 1, characterized in that, It also includes an air connector (114), one end of the spline shaft tube (117) of the ball spline (110) is connected to the air pipe connector (115) through the air connector (114); the air connector (114) has deformation characteristics and fastening characteristics.

7. The pressure-controllable floating pickup device according to claim 1, characterized in that, The tab (126) has two symmetrical quarter-sector ring shapes.

8. The pressure-controllable floating pickup device according to any one of claims 1 to 7, characterized in that, The elastic element (113) is sleeved outside the splined shaft tube (117).

9. The pressure-controllable floating pickup device according to claim 8, characterized in that, The elastic element (113) includes a spring and a spring block.

10. The pressure-controllable floating pickup device according to any one of claims 1 to 7, characterized in that, The elastic element (113) is fixed to the nozzle seat (112) and has a symmetrical shape.

11. The pressure-controllable floating pickup device according to claim 10, characterized in that, The elastic element (113) includes a spring and a spring block.

12. An automated chip testing device, characterized in that, Includes a detection device, a storage device, and a pressure-controllable floating pickup device as described in any one of claims 1 to 11; The detection device is used to detect that there is material to be processed on the storage device. The material is picked up by the pressure-controllable floating pickup device through its nozzle (116) and transported in the extension direction of the spline shaft tube (117).

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