Method and apparatus for measuring the intensity distribution of high-energy laser light

Abstract

This invention provides a method and apparatus for measuring the intensity distribution of high-energy laser light, relating to the field of laser intensity measurement technology. The apparatus includes: a beam sampling element, a sampling material, a sampling material control platform, a damage spot monitoring system, and a data processing terminal. The beam sampling element is used to sample a single beam of fixed diameter from the high-energy laser to be measured, obtaining the incident laser. The sampling material control platform, connected to the sampling material, is used to adjust the incident angle of the incident laser onto the surface of the sampling material and to adjust the position of the incident laser acting on the surface of the sampling material. The damage spot monitoring system is used to monitor the radius of the laser damage spot on the surface of the sampling material. The data processing terminal determines the intensity distribution of the high-energy laser to be measured based on the prior data of the damage threshold of the sampling material and the radius of the laser damage spot. This invention achieves direct measurement of the intensity and intensity distribution of high-energy laser light without using a beam attenuation element, providing intuitive results and simple operation.

Description

Technical Field

[0001] This invention relates to the field of laser intensity measurement technology, and in particular to a method and apparatus for measuring the intensity distribution of high-energy laser light. Background Technology

[0002] Laser intensity refers to the radial distribution of laser intensity across a cross-section during laser transmission. The intensity distribution of a laser beam is indispensable for the optimized design of lasers, beam transmission evaluation and control, and the measurement of inherent parameters such as spot diameter, divergence angle, and beam quality factor. Therefore, measuring laser intensity and its distribution is of great significance. Compared to low-energy / power laser beams, high-energy laser beams, due to their higher average power / energy or peak power, are more prone to causing permanent damage to measurement devices, making the measurement of high-energy laser intensity and distribution more challenging.

[0003] Currently, the methods for measuring the intensity and distribution of high-energy laser light are either to directly measure the laser beam by scanning it point by point using the knife-edge method, and then to calculate the intensity and distribution of the incident laser through inversion, or to measure the intensity of high-energy laser light through indirect measurement methods.

[0004] Existing direct measurement methods require mechanical scanning devices to scan the entire laser beam point by point, which takes a relatively long time to adjust and reconstruct, and is subject to unavoidable mechanical errors. Other indirect measurement methods are structurally complex and the results are not intuitive enough. Therefore, how to improve the intuitiveness of high-energy laser intensity and distribution results and expand application scenarios while ensuring the accuracy of measurement results is an important issue that the industry urgently needs to address. Summary of the Invention

[0005] This invention provides a method and apparatus for measuring the intensity distribution of high-energy laser light, which solves the defects of large measurement errors and unintuitive results in the prior art. It improves the intuitiveness of the intensity and distribution results of high-energy laser light while ensuring the accuracy of the measurement results, and expands the application scenarios.

[0006] This invention provides a high-energy laser intensity distribution measurement device, comprising a beam sampling element, a sampling material, a sampling material control platform, a damage spot monitoring system, and a data processing terminal; wherein:

[0007] The beam sampling element is used to sample a single beam of fixed diameter from the high-energy laser under test to obtain the incident laser.

[0008] The sampling material control platform is connected to the sampling material and is used to adjust the incident angle of the incident laser onto the surface of the sampling material, and to adjust the position of the incident laser acting on the surface of the sampling material.

[0009] The damage spot monitoring system is used to monitor the radius of laser damage spots on the surface of the sampled material;

[0010] The data processing terminal is connected to the damage spot monitoring system and is used to determine the intensity distribution of the high-energy laser to be measured based on the prior data of the damage threshold of the sampled material and the radius of the laser damage spot; wherein, different laser damage spot radii correspond to different incident angles.

[0011] According to the present invention, a high-energy laser intensity distribution measuring device is provided, wherein the sampling material includes at least one of the following: a metal sheet; glass; or a semiconductor material.

[0012] According to the present invention, a high-energy laser intensity distribution measuring device is provided, wherein the sampling material control platform includes: a rotary table and a translational table; wherein the rotary table is used to adjust the incident angle of the incident laser onto the surface of the sampling material; and the translational table is used to adjust the position of the incident laser acting on the surface of the sampling material.

[0013] The present invention also provides a method for measuring the intensity distribution of a high-energy laser based on the above-mentioned high-energy laser intensity distribution measuring device, comprising:

[0014] The incident laser is obtained by sampling a single beam of a fixed diameter from the high-energy laser to be tested.

[0015] The incident laser is incident on the surface of the sampled material at a first preset angle;

[0016] Adjust the incident angle of the incident laser onto the surface of the sampled material, and the position where the incident laser acts on the surface of the sampled material;

[0017] Obtain the radius of the laser damage spot on the surface of the sampled material at different incident angles;

[0018] The intensity distribution of the high-energy laser to be tested is determined based on the prior data of the damage threshold of the sampled material and the radius of the laser damage spot.

[0019] The different laser damage spot radii correspond to different incident angles.

[0020] According to the high-energy laser intensity distribution measurement method provided by the present invention, the prior data of the damage threshold of the sampled material is the correspondence between the laser damage threshold of the sampled material and the incident angle of the incident laser.

[0021] Wherein, the laser damage threshold of the sampled material is the laser intensity induced by the laser damage spot.

[0022] According to a high-energy laser intensity distribution measurement method provided by the present invention, after the incident laser is incident on the surface of the sampled material at a first preset angle, the method further includes: determining whether the sampled material has laser damage spots;

[0023] If the laser damage spot is found in the sampled material, the incident angle is increased by a fixed increment, and the radius of the laser damage spot is recorded.

[0024] Alternatively, if it is determined that the sampling material does not show the laser damage spots, the sampling material may be replaced.

[0025] According to a high-energy laser intensity distribution measurement method provided by the present invention, after increasing the incident angle by a fixed increment, the method further includes:

[0026] Move the position of the sampling material to adjust the position where the incident laser acts on the surface of the sampling material.

[0027] According to the method for measuring the intensity distribution of high-energy laser light provided by the present invention, the sampling material includes at least one of the following: metal sheet; glass; semiconductor material.

[0028] According to the present invention, a method for measuring the intensity distribution of a high-energy laser is provided, wherein the high-energy laser to be measured includes at least one of the following: a normal high-energy laser beam; or a high-energy laser beam at the focal point after focusing.

[0029] According to the present invention, a method for measuring the intensity distribution of a high-energy laser light is provided, the method further includes:

[0030] The radius of the laser damage spot is equal to the radial radius of the high-energy laser under test;

[0031] The intensity distribution of the high-energy laser to be measured is the distribution of the intensity of the high-energy laser to be measured with respect to the radial radius.

[0032] The high-energy laser intensity distribution measurement method and apparatus provided by this invention involves sampling a single beam of fixed diameter from the high-energy laser to be measured using a beam sampling element to obtain the incident laser. A sampling material control platform adjusts the incident angle of the incident laser onto the surface of the sampling material, as well as the position of the incident laser acting on the surface of the sampling material. A damage spot monitoring system acquires the damage spot radius on the surface of the sampling material at different incident angles. Based on prior data of the damage threshold of the sampling material and the laser damage spot radius, the intensity distribution of the high-energy laser to be measured is determined. This method achieves direct measurement of high-energy laser intensity and intensity distribution without using beam attenuation elements, avoiding the influence of attenuation elements. It expands the measurement range of high-energy laser intensity and distribution according to different damage thresholds of the sampling material, and the results are intuitive, the operation is simple, and the application scenarios are broadened. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0034] Figure 1 This is a schematic diagram of the high-energy laser intensity distribution measurement device provided by the present invention;

[0035] Figure 2 This is one of the flowcharts illustrating the high-energy laser intensity distribution measurement method provided by the present invention;

[0036] Figure 3 This is the second flowchart of the high-energy laser intensity distribution measurement method provided by the present invention;

[0037] Figure 4 This is a schematic diagram of the high-energy laser intensity distribution measurement system provided by the present invention;

[0038] Figure 5 This is one of the experimental data graphs of the high-energy laser intensity distribution measurement method provided by the present invention;

[0039] Figure 6 This is the second experimental data graph of the high-energy laser intensity distribution measurement method provided by the present invention;

[0040] Figure 7 This is the third experimental data graph of the high-energy laser intensity distribution measurement method provided by the present invention. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0042] The following is combined with Figures 1-7 The present invention describes a method and apparatus for measuring the intensity distribution of high-energy laser light.

[0043] Figure 1 This is a schematic diagram of the high-energy laser intensity distribution measurement device provided by the present invention, as shown below. Figure 1 As shown, the device includes:

[0044] The beam sampling element 1 is used to sample a single beam of fixed diameter from the high-energy laser under test to obtain the incident laser.

[0045] In practice, the beam sampling element can be a variable aperture or a fixed-size beam aperture. The function of the beam sampling element is to uniformly sample different high-energy beams of the sample to the same size in order to confirm the size of the incident laser beam incident on the surface of the sampling material.

[0046] The sampling material control platform 2 is connected to the sampling material and is used to adjust the incident angle of the incident laser onto the surface of the sampling material and to adjust the position of the incident laser acting on the surface of the sampling material.

[0047] In practice, based on the beam size of the incident laser determined by the beam sampling element, the distance the translation stage moves can be determined, and a uniform translation scale can be established.

[0048] Damage spot monitoring system 3 is used to monitor the radius of laser damage spots on the surface of the sampled material;

[0049] The data processing terminal 4 is connected in communication with the damage spot monitoring system and is used to determine the intensity distribution of the high-energy laser light to be measured based on the prior data of the damage threshold of the sampled material and the laser damage spot radius, wherein different laser damage spot radii correspond to different incident angles.

[0050] In practice, the damage spot monitoring system is a charge-coupled device (CCD) imaging system with a lens. After the incident laser irradiates the surface of the sampled material, it identifies and measures the laser damage spots generated on the surface of the sampled material and the radius of the laser damage spots.

[0051] The high-energy laser intensity distribution measurement device provided in this embodiment obtains the incident laser by sampling a single beam of fixed diameter from the high-energy laser to be measured using a beam sampling element. The incident angle of the incident laser onto the surface of the sampling material and the position of the incident laser on the surface of the sampling material are adjusted by a sampling material control platform. The damage spot radius on the surface of the sampling material at different incident angles is obtained by a damage spot monitoring system. The data processing terminal determines the intensity distribution of the high-energy laser to be measured based on the prior data of the damage threshold of the sampling material and the laser damage spot radius. This device achieves direct measurement of high-energy laser intensity and intensity distribution without using a beam attenuation element, avoiding the influence of attenuation elements. It expands the measurement range of high-energy laser intensity and distribution according to different damage thresholds of the sampling material, and the results are intuitive, the operation is simple, and the application scenarios are expanded.

[0052] In an optional embodiment, the sampling material control platform of the high-energy laser intensity distribution measurement device includes a rotary table for adjusting the incident angle of the incident laser onto the surface of the sampling material; and a translation table for adjusting the position of the incident laser acting on the surface of the sampling material.

[0053] In an optional embodiment, the sampling material in the above-mentioned high-energy laser intensity distribution measurement device includes at least one of the following: a metal sheet; glass; or a semiconductor material.

[0054] In practice, the sampling materials can be metal sheets (such as gold-plated films or aluminum-plated films), glass (such as fused silica or BK7), or semiconductor materials (silicon wafers), etc.

[0055] This invention also provides a method for measuring the intensity distribution of high-energy laser light. Figure 2 This is one of the flowcharts illustrating the high-energy laser intensity distribution measurement method provided by the present invention, such as... Figure 2 As shown, the above-mentioned method for measuring the intensity distribution of high-energy laser light includes:

[0056] S1. A single-beam sample of a fixed diameter is taken from the high-energy laser to be measured to obtain the incident laser.

[0057] S2. The incident laser is incident on the surface of the sampled material at a first preset angle;

[0058] S3. Adjust the incident angle of the incident laser onto the surface of the sampled material, and the position of the incident laser on the surface of the sampled material;

[0059] S4. Obtain the radius of the laser damage spot on the surface of the sampled material at different incident angles;

[0060] S5. Determine the intensity distribution of the high-energy laser to be measured based on the prior data of the damage threshold of the sampled material and the radius of the laser damage spot.

[0061] The different laser damage spot radii correspond to different incident angles.

[0062] The high-energy laser intensity distribution measurement method provided in this embodiment obtains the incident laser by sampling a single beam of a fixed diameter from the high-energy laser to be measured. The incident laser is then incident on the surface of the sampled material at a first preset angle. The incident angle and the position of the incident laser on the sampled material surface are adjusted. The damage spot radius on the sampled material surface at different incident angles is obtained. Based on the prior data of the damage threshold of the sampled material and the laser damage spot radius, the intensity distribution of the high-energy laser to be measured is determined. This method achieves direct measurement of high-energy laser intensity and intensity distribution without using beam attenuation elements, avoiding the influence of attenuation elements. It expands the measurement range of high-energy laser intensity and distribution according to different damage thresholds of the sampled material. Furthermore, the results are intuitive, the operation is simple, and the application scenarios are expanded.

[0063] In an optional implementation, the prior data for the damage threshold of the sampling material is the correspondence between the laser damage threshold of the sampling material and the incident angle of the incident laser; wherein, the laser damage threshold of the sampling material is the laser intensity induced by the laser damage spot. The laser damage thresholds of different sampling materials at different incident angles are prior data, obtained through pre-measurement.

[0064] Figure 3 This is the second schematic diagram of the high-energy laser intensity distribution measurement method provided by the present invention, as shown below. Figure 3 As shown, during execution Figure 2 After step S2, perform the following steps:

[0065] Determine whether laser damage spots appear on the sampled material;

[0066] If laser damage spots are found in the sampled material, the incident angle is increased by a fixed increment, and the radius of the laser damage spots is recorded.

[0067] Alternatively, if it is determined that no laser damage spots have appeared on the sampled material, the sampled material may be replaced.

[0068] In practice, the incident angle is increased by a fixed increment and the corresponding damage spot radius is recorded until the incident angle reaches 85 degrees or no laser damage spot appears on the sampled material.

[0069] If no laser damage spots are found on the sampled material, it indicates that the intensity of the incident laser is outside the measurable range of the sampled material, and the maximum laser intensity at the center of the incident beam is insufficient to damage the sampled material. Therefore, it is necessary to replace the sampled material with one that has a lower damage threshold for measurement.

[0070] If no laser damage spots are found in the sampled material, it is necessary to replace it with a material with a lower damage threshold.

[0071] In an optional implementation, after increasing the incident angle by a fixed increment, the method further includes:

[0072] The position of the sampling material is moved to adjust the position of the incident laser acting on the surface of the sampling material.

[0073] In specific implementation, the sampling material includes at least one of the following: the sampling material can be a metal sheet (such as a gold-plated film or an aluminum-plated film), glass (such as fused silica or BK7), or a semiconductor material (silicon wafer), etc. The high-energy laser to be tested includes at least one of the following: a regular high-energy laser beam; a high-energy laser beam at the focal point after focusing, i.e., the intensity distribution of the high-intensity laser emitted from the focal point of the laser can be directly measured.

[0074] The radius of the laser damage spot is equal to the radial radius of the high-energy laser being tested;

[0075] The intensity distribution of the high-energy laser to be measured is the distribution of the intensity of the high-energy laser to be measured with respect to the radial radius.

[0076] This invention also provides a high-energy laser intensity distribution measurement system. Figure 4 This is a schematic diagram of the high-energy laser intensity distribution measurement system provided by the present invention, as shown below. Figure 4 As shown, the above system includes:

[0077] The beam sampling module 41 is used to sample a single beam of fixed diameter from the high-energy laser under test to obtain the incident laser.

[0078] The adjustment module 42 is used to adjust the incident angle of the incident laser onto the surface of the sampled material, and the position of the incident laser acting on the surface of the sampled material.

[0079] The damage spot radius acquisition module 43 is used to acquire the damage spot radius of the sampled material surface at different incident angles;

[0080] The intensity distribution determination module 44 is used to determine the intensity distribution of the high-energy laser to be measured based on the prior data of the damage threshold of the sampled material and the radius of the laser damage spot.

[0081] The different laser damage spot radii correspond to different incident angles.

[0082] The high-energy laser intensity distribution measurement system provided in this embodiment, through the cooperation of various modules, uses a beam sampling module to sample a single beam of fixed diameter from the high-energy laser to be measured, obtaining the incident laser. An adjustment module adjusts the incident angle of the incident laser onto the sampled material surface and the position of the incident laser acting on the sampled material surface. A damage spot radius acquisition module obtains the damage spot radius on the sampled material surface at different incident angles. The intensity distribution determination module determines the intensity distribution of the high-energy laser to be measured based on prior data of the damage threshold of the sampled material and the laser damage spot radius. This system achieves direct measurement of high-energy laser intensity and intensity distribution without using beam attenuation elements, avoiding the influence of attenuation elements. It expands the measurement range of high-energy laser intensity and distribution according to different damage thresholds of the sampled material, and the results are intuitive, the operation is simple, and the application scenarios are expanded.

[0083] The technical solution of the present invention will now be clearly and completely described using an optional embodiment.

[0084] A fixed aperture of approximately 2 mm in diameter is selected as the beam sampling element to sample a single beam of the high-energy laser under test, obtaining the incident laser. The sampling material is a silicon wafer with a gold-plated film. In the specific implementation, the damage threshold of different sampling materials at different incident laser angles is pre-measured a priori data. Figure 5 This is one of the experimental data graphs for the high-energy laser intensity distribution measurement method provided by the present invention. It represents the prior data showing how the laser damage threshold of the gold-plated silicon wafer changes with the incident laser angle in this embodiment. Figure 5 As shown, the horizontal axis represents the incident laser angle, and the vertical axis represents the damage threshold, i.e., the laser intensity induced by damage. The first preset incident angle is 0 degrees. The incident laser is incident on the surface of the sampled material to perform a single-beam laser damage experiment. A damage spot monitoring device is used to monitor whether laser damage spots appear on the surface of the sampled material.

[0085] If laser damage spots appear on the surface of the sampled material, measure and record the radius of the laser damage spot and the incident angle of the laser beam corresponding to the laser damage spot. Adjust the incident angle of the laser beam in fixed increments of 5 degrees, and repeat the single-beam laser damage experiment. Measure and record the radius of the laser damage spot on the surface of the sampled material under different incident angles of the laser beam until the incident angle is 85 degrees, or until no laser damage spots can be obtained. Obtain a set of corresponding data, which is the correspondence between the incident angle of the laser beam and the radius of the damage spot.

[0086] Figure 6 This is the second experimental data graph of the high-energy laser intensity distribution measurement method provided by the present invention. It shows the damage spots generated by lasers at different incident angles on a gold-plated silicon wafer, such as... Figure 6The figure shows the corresponding laser damage spots generated on the surface of the gold-plated silicon wafer under different incident angles when the sampling material is a gold-plated silicon wafer.

[0087] Based on the prior data of how the laser damage threshold of the silicon wafer with the gold-plated film changes with the incident angle of the incident laser, the correspondence between the incident laser intensity and the laser damage spot radius can be determined. According to the above correspondence, the light intensity distribution of the high-energy laser to be tested can be obtained.

[0088] In practice, two situations may arise:

[0089] Assuming that the incident angle is increased to 80 degrees so as not to produce laser damage spots on the surface of the sampled material, a set of incident angles and laser damage spot radii can be obtained every 5 degrees from 0 degrees to 80 degrees, and the intensity and distribution of the high-energy laser to be measured can be determined accordingly.

[0090] Assuming that the incident angle is increased to more than 85 degrees, laser damage spots can still be generated on the surface of the sampled material. Here, the sampled material is a silicon wafer with a gold-plated film. If other types of sampled materials with higher damage thresholds are replaced, such as quartz glass, the single-beam laser damage experiment described above can be continued. In this case, based on the damage spot radius of the surface of two or more sampled materials under different incident laser incident angles, the range of measurable laser intensity can be expanded.

[0091] In practice, the laser intensity corresponding to different beam sizes is obtained based on the prior data of the damage threshold of the sampled material and the radius of the laser damage spot, thus obtaining the light intensity distribution. Figure 7 This is the third experimental data graph of the high-energy laser intensity distribution measurement method provided by the present invention. It is a schematic diagram of the high-energy laser intensity distribution obtained according to this embodiment. Figure 7 As shown, the high-energy laser beam under test is axisymmetrically distributed, and the difference in light intensity distribution across the cross-section is represented by a variable r (the distance of the beam from the center). The laser intensity at the nominal diameter r0 of the beam is I0. The laser intensity varies at different points r, which can be visualized by... Figure 7The correspondences are as follows: r1 corresponds to I1, r2 to I2, and r3 to I3. The damage spot of an ultrafast laser on a material is generally considered to correspond to the beam intensity (energy density). When a fixed laser beam is incident on the sampled material surface at a 0-degree angle, the resulting laser damage spots are of uniform size (the damage threshold at 0 degrees is fixed for this material). Therefore, the beam portion within the distance corresponding to the damage threshold intensity can cause damage. Consequently, the radius of the damage spot (the distance from the outermost edge of the damage spot to the center) is the same as the intensity r corresponding to the intensity in the high-energy laser beam intensity distribution. The damage threshold of a high-energy laser on a material is closely related to the incident angle. By changing the angle at which the incident laser is incident on the sampled material, damage spots of different sizes can be obtained, corresponding to different laser beam damage spots at distance r from the center. This allows determination of the high-energy laser intensity and its distribution with radial distance r.

[0092] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without any creative effort.

[0093] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A high-energy laser intensity distribution measurement device, characterized in that, This includes a beam sampling element, sampling material, a sampling material control platform, a damage spot monitoring system, and a data processing terminal; among which: The beam sampling element is used to sample a single beam of fixed diameter from the high-energy laser under test to obtain the incident laser. The sampling material control platform is connected to the sampling material and is used to adjust the incident angle of the incident laser onto the surface of the sampling material, and to adjust the position of the incident laser acting on the surface of the sampling material. The damage spot monitoring system is used to monitor the radius of laser damage spots on the surface of the sampled material; The data processing terminal is connected to the damage spot monitoring system and is used to determine the intensity distribution of the high-energy laser light to be measured based on the prior data of the damage threshold of the sampled material and the radius of the laser damage spot; wherein, different laser damage spot radii correspond to different incident angles. The data processing terminal is specifically used to obtain multiple laser damage spot radii corresponding to different radial positions in the light intensity distribution by changing the incident angle, and to invert the light intensity distribution of the high-energy laser under test by combining the prior data of the damage threshold of the sampled material at different angles.

2. The high-energy laser intensity distribution measuring device according to claim 1, characterized in that, The sampling material includes at least one of the following: metal sheet; glass; semiconductor material.

3. The high-energy laser intensity distribution measuring device according to claim 1, characterized in that, The sampling material control platform includes: a rotary table and a translational table; wherein... A rotating stage is used to adjust the incident angle of the incident laser onto the surface of the sampled material; A translation stage is used to adjust the position where the incident laser acts on the surface of the sampled material.

4. A method for measuring the intensity distribution of a high-energy laser based on the high-energy laser intensity distribution measuring device as described in claim 1, characterized in that, include: The incident laser is obtained by sampling a single beam of a fixed diameter from the high-energy laser to be tested. The incident laser is incident on the surface of the sampled material at a first preset angle; Adjust the incident angle of the incident laser onto the surface of the sampled material, and the position where the incident laser acts on the surface of the sampled material; The radius of the laser damage spot on the surface of the sampled material is obtained at different incident angles; The intensity distribution of the high-energy laser to be tested is determined based on the prior data of the damage threshold of the sampled material and the radius of the laser damage spot. The different laser damage spot radii correspond to different incident angles; The determination of the intensity distribution of the high-energy laser to be measured based on the prior damage threshold data of the sampled material and the laser damage spot radius includes: By changing the incident angle, multiple laser damage spot radii corresponding to different radial positions in the light intensity distribution are obtained. Combined with the prior data of the damage threshold of the sampled material at different angles, the light intensity distribution of the high-energy laser to be tested is inverted.

5. The method for measuring the intensity distribution of high-energy laser light according to claim 4, characterized in that, The prior data of the damage threshold of the sampling material is the correspondence between the laser damage threshold of the sampling material and the incident angle of the incident laser. Wherein, the laser damage threshold of the sampled material is the laser intensity induced by the laser damage spot.

6. The method for measuring the intensity distribution of high-energy laser light according to claim 4, characterized in that, After the incident laser is incident on the surface of the sampled material at a first preset angle, the method further includes: determining whether the sampled material has laser damage spots; If the laser damage spot is found in the sampled material, the incident angle is increased by a fixed increment, and the radius of the laser damage spot is recorded. Alternatively, if it is determined that the sampling material does not show the laser damage spots, the sampling material may be replaced.

7. The method for measuring the intensity distribution of high-energy laser light according to claim 6, characterized in that, After increasing the incident angle by a fixed increment, the method further includes: Move the position of the sampling material to adjust the position where the incident laser acts on the surface of the sampling material.

8. The method for measuring the intensity distribution of high-energy laser light according to claim 4, characterized in that, The sampling material includes at least one of the following: metal sheet; glass; semiconductor material.

9. The method for measuring the intensity distribution of high-energy laser light according to claim 4, characterized in that, The high-energy laser to be tested includes at least one of the following: a normal high-energy laser beam; or a high-energy laser beam at the focal point after focusing.

10. The method for measuring the intensity distribution of high-energy laser light according to claim 4, characterized in that, The method further includes: The radius of the laser damage spot is equal to the radial radius of the high-energy laser under test; The intensity distribution of the high-energy laser to be measured is the distribution of the intensity of the high-energy laser to be measured with respect to the radial radius.

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