Mechanical hand clamping device of wafer dicing machine

Abstract

The application discloses a wafer dicing machine mechanical hand material clamping device and relates to the technical field of wafer dicing machines.The wafer dicing machine mechanical hand material clamping device comprises a linear driving mechanism arranged horizontally; a pair of clamping mechanisms are arranged below the linear driving mechanism; the upper portions of the two clamping mechanisms are connected with the linear driving mechanism through rotary direction adjusting mechanisms respectively; the rotary direction adjusting mechanisms can drive the clamping mechanisms to rotate horizontally; and a lifting mechanism for driving the clamping mechanisms to move up and down is arranged on the linear driving mechanism. The wafer dicing machine mechanical hand material clamping device has the advantages of reasonable structural design, convenient use, effectively improved processing efficiency of the semiconductor wafer dicing machine on material workpiece discs and high market application value.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of wafer dicing machines, in particular to a mechanical hand material clamping device of a wafer dicing machine. BACKGROUND

[0002] A mechanical hand material clamping device for a semiconductor wafer dicing machine is disclosed in Chinese Patent No. CN218365806U. The device is driven by an upper and lower air cylinder to move the linear optical axis downward, thereby driving the rotating assembly and the material lifting assembly to descend to the position of the material workpiece disc. Then, the rotating air cylinder drives the rotating disc to rotate, so that the connecting rod slides along the arc-shaped sliding groove to the center of the rotating disc and drives the material lifting clamp to clamp the workpiece disc. After that, the upper and lower air cylinders drive the rotating assembly and the material lifting assembly to rise to a certain position, and the material is transported to the designated cutting workbench through the material pushing device connected to the upper and lower air cylinders. The upper and lower air cylinders again drive the rotating assembly and the material lifting assembly to descend to the designated cutting workbench position. The rotating air cylinder drives the rotating disc to rotate in the opposite direction, so that the connecting rod slides along the arc-shaped sliding groove to the outer periphery of the rotating disc and drives the material lifting clamp to release the workpiece disc. Finally, the upper and lower air cylinders drive the rotating assembly and the material lifting assembly to rise and then return to the original position with the material pushing device. The above-mentioned device has the following disadvantages: the material pushing device is driven by the upper and lower air cylinders and the rotating assembly to move the material lifting assembly once, and only then can the material workpiece disc be clamped and transported once, which is slow and reduces the processing efficiency of the semiconductor wafer dicing machine. Therefore, there is an urgent need to research a mechanical hand material clamping device for a wafer dicing machine to solve the above-mentioned problems. SUMMARY

[0003] The present application provides a mechanical hand material clamping device for a wafer dicing machine, which aims to solve the technical problems raised in the background art.

[0004] To solve the above-mentioned technical problems, the present application is realized by the following technical scheme:

[0005] The present application is a mechanical hand material clamping device for a wafer dicing machine, which includes a horizontal linear drive mechanism. A pair of clamping mechanisms is arranged below the linear drive mechanism. The upper parts of the two clamping mechanisms are connected to the linear drive mechanism through rotating direction adjusting mechanisms, respectively. The rotating direction adjusting mechanisms can drive the clamping mechanisms to rotate horizontally. A lifting mechanism is installed on the linear drive mechanism to drive the clamping mechanisms to move up and down.

[0006] As a preferred technical scheme of the present application, the straight line driving mechanism comprises a pair of symmetrically vertically arranged side support columns; the lower ends of the two side support columns are connected by a first support strip; the upper surface of the first support strip is horizontally fixed with a first air cylinder parallel thereto; the output end of the first air cylinder penetrates one side support column; the lower surface of one end of the first support strip is rotatably connected with a vertically arranged mounting shaft; the mounting shaft is fixedly sleeved with a first gear; the first gear is meshed with a pair of transmission racks parallel to the first support strip; the two transmission racks are arranged on the opposite sides of the first support strip respectively; one end of one of the transmission racks is connected with the output end of the first air cylinder through a drive strip; the upper surfaces of the two transmission racks are both provided with a directional groove along the length direction; the two directional grooves are both slidably connected with a sliding block; the two sliding blocks are fixed on the opposite ends of the first support strip respectively.

[0007] As a preferred technical scheme of the present application, the clamping mechanism comprises a horizontally arranged bearing plate; the four sides of the bearing plate are all vertically fixed with a support rail; the four support rails are all slidably sleeved with a guide sleeve; the lower surface of the guide sleeve is vertically fixed with a mounting column; the lower end of the mounting column is horizontally fixed with a positioning piece; the lower side of the positioning piece is parallel arranged with a clamping piece; the clamping piece and the positioning piece form a clamping space for the material; one edge of the clamping piece is vertically fixed with a pair of connecting columns; the two connecting columns are both inserted into one edge of the positioning piece; the two connecting columns are arranged on the opposite sides of the guide sleeve; the upper surface of the bearing plate is provided with a receiving opening; the receiving opening is fixedly inserted with a vertically arranged second air cylinder; the output end of the second air cylinder is horizontally fixed with a transmission block; the four sides of the transmission block are all rotatably connected with a push-pull rod corresponding to the guide sleeve; one end of the push-pull rod is rotatably connected with the upper surface of the guide sleeve; the end of the support rail away from the bearing plate is vertically fixed with a support piece; the lower edge of the support piece is fixed with an extension strip parallel to the support rail side by side; the lower end of the extension strip close to the bearing plate is fixed with a magnet; the lower side of the magnet is provided with an iron block; the iron block is fixed on the upper end of the connecting column; the lower surface of the iron block and the upper surface of the positioning piece are connected by a first spring.

[0008] As a preferred technical scheme of the present application, the rotating direction adjusting mechanism comprises a positioning strip arranged in parallel below the first supporting strip; opposite sides of the positioning strip are provided with a plurality of first teeth and a plurality of second teeth side by side; an upper surface of one end of the positioning strip is rotationally connected with a lower end of the mounting shaft; an upper surface of the other end of the positioning strip is connected with a lower surface of the first supporting strip through a suspension column; opposite sides of the positioning strip are horizontally provided with second gears which can engage with the first teeth or the second teeth; lower surfaces of the two second gears are respectively connected with upper surfaces of the two bearing plates through a pair of vertically arranged bearing columns; the bearing columns are respectively arranged at edges of the second gears and edges of the bearing plates; upper surfaces of the two second gears are coaxially fixed with movable columns; outer peripheries of the two movable columns are movably sleeved with connecting blocks; the two connecting blocks are respectively fixed on one end of the two transmission racks which are oriented in the same direction.

[0009] As a preferred technical scheme of the present application, the lifting mechanism comprises a pair of second supporting strips which are respectively vertically fixed on opposite sides of the first supporting strip; upper ends of the two second supporting strips are connected through a top plate; an upper surface of the top plate is vertically fixed with a third air cylinder; an output end of the third air cylinder penetrates through the top plate and is horizontally fixed with a transmission rack which is parallel to the first supporting strip; two ends of the transmission rack are horizontally fixed with pressing strips which are perpendicular to the first supporting strip; lower sides of the two pressing strips are provided with lifting blocks; the two lifting blocks are respectively rotationally connected on upper ends of the two movable columns; a lower surface of the lifting block is connected with an upper surface of the connecting block through a second spring.

[0010] The present application has the following beneficial effects:

[0011] The present application drives the two clamping mechanisms to synchronously move relative to each other through the linear driving mechanism and the rotating direction adjusting mechanism, and the rotating direction adjusting mechanism is used to rotate and adjust the direction of the clamping mechanisms while the clamping mechanisms horizontally move, so as to avoid the collision of the two clamping mechanisms; after the two clamping mechanisms reach the specified positions, the lifting mechanism is used to drive the two clamping mechanisms to synchronously move downward; then one clamping mechanism clamps the material and the other clamping mechanism releases the material; then the two clamping mechanisms are synchronously reset; then the linear driving mechanism drives the two clamping mechanisms to move back through the rotating direction adjusting mechanism, and the rotating direction adjusting mechanism synchronously rotates and adjusts the direction of the clamping mechanisms; after the two clamping mechanisms are reset, the lifting mechanism is used to drive the two clamping mechanisms to synchronously move downward; then one clamping mechanism clamps the material and the other clamping mechanism clamps the material; then the two clamping mechanisms are synchronously reset, so that the linear driving mechanism drives the two clamping mechanisms to reciprocate once, and the clamping and transfer of the material can be realized twice, and the processing efficiency of the semiconductor wafer slicing machine on the material workpiece disc is effectively improved.

[0012] Of course, implementing any of the products of the present application does not necessarily require that all of the above-mentioned advantages be achieved simultaneously. BRIEF DESCRIPTION OF DRAWINGS

[0013] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed for the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0014] Figure 1 FIG. 1 is a structural schematic diagram of a mechanical arm clamping device of a wafer dicing machine according to the present application.

[0015] Figure 2 FIG. 2 is a structural front view of the wafer dicing machine according to the present application. Figure 1

[0016] Figure 3 FIG. 4 is a structural schematic diagram of a connection between a linear driving mechanism and a lifting mechanism according to the present application.

[0017] Figure 4 FIG. 5 is a structural schematic diagram of a connection between the linear driving mechanism and a rotary direction adjusting mechanism according to the present application.

[0018] Figure 5 FIG. 6 is a structural schematic diagram of the linear driving mechanism according to the present application.

[0019] Figure 6 FIG. 7 is a structural schematic diagram of a clamping mechanism according to the present application.

[0020] Figure 7 FIG. 8 is a structural schematic diagram of a connection between a support rail, a positioning sheet and a clamping sheet according to the present application.

[0021] Figure 8 FIG. 9 is a structural schematic diagram of a connection between the support rail and a second cylinder according to the present application.

[0022] Figure 9 FIG. 10 is a structural schematic diagram of a connection between the positioning sheet and the clamping sheet according to the present application.

[0023] Figure 10 FIG. 11 is a structural schematic diagram of the rotary direction adjusting mechanism according to the present application.

[0024] In the drawings, the components represented by each reference numeral are listed as follows:

[0025] ​1-linear drive mechanism, 2-clamping mechanism, 3-rotary steering mechanism, 4-lifting mechanism, 101-side support column, 102-first support slat, 103-first cylinder, 104-mounting shaft, 105-first gear, 106-transmission rack, 107-driving slat, 108-orientation slot, 109-sliding block, 201-bearing plate, 202-support rail, 203-guide sleeve, 204-mounting column, 205-positioning piece, 206-clamping piece, 207-connecting column, 208-receiving opening, 209-second cylinder, 210-transmission block, 211-pushing and pulling rod, 212-supporting piece, 213-extending strip, 214-magnet, 215-iron block, 216-first spring, 301-positioning strip, 302-first tooth, 303-second tooth, 304-suspension column, 305-second gear, 306-bearing column, 307-movable column, 308-connecting block, 401-second support slat, 402-top plate, 403-third cylinder, 404-transmission slat, 405-pressing slat, 406-lifting block, 407-second spring. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application. Embodiment one:

[0028] Please refer to Figures 1-2As shown, the application is a mechanical hand clamping device of wafer dicing machine, comprising a linear drive mechanism 1 arranged horizontally; a pair of clamping mechanisms 2 are arranged below the linear drive mechanism 1; the upper parts of the two clamping mechanisms 2 are respectively connected with the linear drive mechanism 1 through rotary direction adjusting mechanisms 3; the rotary direction adjusting mechanisms 3 can drive the clamping mechanisms 2 to rotate horizontally; the linear drive mechanism 1 is provided with a lifting mechanism 4 for driving the clamping mechanisms 2 to move up and down. Before use, the initial position of one clamping mechanism 2 is above the material to be clamped, and the initial position of the other clamping mechanism 2 is above the material to be released, that is, one clamping mechanism 2 is about to clamp the material, and the other clamping mechanism 2 is about to release the material; during use, the linear drive mechanism 1 drives the two clamping mechanisms 2 to move synchronously and relatively through the rotary direction adjusting mechanisms 3, and the rotary direction adjusting mechanisms 3 are used to rotate the clamping mechanisms 2 in a staggered manner while the clamping mechanisms 2 move horizontally, so as to avoid collision between the two clamping mechanisms 2; after the two clamping mechanisms 2 reach the designated position, the lifting mechanism 4 drives the two clamping mechanisms 2 to move downward synchronously, then one clamping mechanism 2 clamps the material and the other clamping mechanism 2 releases the material, then the two clamping mechanisms 2 are reset synchronously, then the linear drive mechanism 1 drives the two clamping mechanisms 2 to move back through the rotary direction adjusting mechanisms 3, and the rotary direction adjusting mechanisms 3 rotate the clamping mechanisms 2 synchronously at the same time, after the two clamping mechanisms 2 are reset, the lifting mechanism 4 drives the two clamping mechanisms 2 to move downward synchronously, then one clamping mechanism 2 clamps the material and the other clamping mechanism 2 clamps the material, then the two clamping mechanisms 2 are reset synchronously, so that the linear drive mechanism 1 drives the two clamping mechanisms 2 to move back and forth once, which can realize clamping and transferring of the material twice, and effectively improve the processing efficiency of the wafer dicing machine on the material workpiece disc. Specific embodiment two:

[0030] On the basis of specific embodiment one, as Figures 3-5As shown, the linear driving mechanism 1 comprises a pair of symmetrically vertically arranged side support columns 101; the upper ends of the two side support columns 101 are respectively connected to a semiconductor wafer dicing machine through screws; the lower ends of the two side support columns 101 are connected through a first support plate strip 102; the first support plate strip 102 is connected with the side support columns 101 through screws; the upper surface of the first support plate strip 102 is horizontally fixed with a first air cylinder 103 parallel thereto; the first air cylinder 103 is a conventional element in the art; the output end of the first air cylinder 103 penetrates through one side support column 101, and the output end of the first air cylinder 103 is in clearance fit with the side support column 101; the lower surface of one end of the first support plate strip 102 is rotatably connected with a vertically arranged mounting shaft 104; the mounting shaft 104 is fixedly sleeved with a first gear 105; the first gear 105 is engaged with a pair of transmission racks 106 parallel to the first support plate strip 102; the two transmission racks 106 are respectively arranged on the opposite sides of the first support plate strip 102; one end of one transmission rack 106 is connected with the output end of the first air cylinder 103 through a driving plate strip 107; the driving plate strip 107 is respectively connected with one transmission rack 106 and the output end of the first air cylinder 103 through screws; the upper surfaces of the two transmission racks 106 are both provided with directional grooves 108 along the length direction; the cross section of the directional groove 108 along the vertical direction to the length direction is in a "⊥" type structure; the two directional grooves 108 are both slidably connected with sliders 109; the two sliders 109 are respectively connected with the opposite ends of the first support plate strip 102 through screws, and the two sliders 109 are respectively arranged on the opposite sides of the first support plate strip 102. In use, the output end of the first air cylinder 103 is extended to drive one transmission rack 106 to move linearly through the driving plate strip 107, since the two transmission racks 106 are both engaged with the first gear 105, the two transmission racks 106 are caused to move relatively, so as to realize the relative movement of the two clamping mechanisms 2. Specific embodiment three:

[0032] On the basis of the specific embodiment two, as Figures 6-9As shown, the clamping mechanism 2 comprises a horizontally arranged bearing plate 201; four sides of the bearing plate 201 are each vertically fixed with a support rail 202; the support rail 202 is connected to the bearing plate 201 through an L-shaped piece and a bolt piece; a guide sleeve 203 is slidingly sleeved on each of the four support rails 202; a mounting column 204 in a "「" type structure is screw-fixed on the lower surface of the guide sleeve 203; a positioning piece 205 is horizontally fixed on the lower end of the mounting column 204; a clamping piece 206 is parallelly arranged below the positioning piece 205; the end portion of the clamping piece 206 close to the bearing plate 201 is chamfered; a clamping space for materials is formed between the clamping piece 206 and the positioning piece 205; a pair of connecting columns 207 are vertically fixed on one edge of the clamping piece 206; the two connecting columns 207 are slidingly inserted on the edge of the positioning piece 205 away from the bearing plate 201; the two connecting columns 207 are arranged on opposite sides of the guide sleeve 203; a square-shaped accommodating opening 208 is formed on the upper surface of the bearing plate 201; a second air cylinder 209 vertically arranged is fixed and inserted in the accommodating opening 208; the second air cylinder 209 is a conventional element in the art, and is connected to the bearing plate 201 through an L-shaped piece and a bolt piece; a transmission block 210 is horizontally fixed on the output end of the second air cylinder 209; a push-pull rod 211 corresponding to the guide sleeve 203 is rotationally connected to each of the four sides of the transmission block 210; one end of the push-pull rod 211 is rotationally connected to the upper surface of the guide sleeve 203; a support piece 212 is vertically fixed on the end of the support rail 202 away from the bearing plate 201; a T-shaped structure is formed between the support piece 212 and the support rail 202; an extension bar 213 parallel to the support rail 202 is fixed on the lower edge of the support piece 212 in parallel; a magnet 214 is fixed on the lower surface of the end portion of each of the two extension bars 213 close to the bearing plate 201; an iron block 215 is arranged below each of the two magnets 214; the iron block 215 is fixed on the upper end of each of the two connecting columns 207; the lower surface of the iron block 215 and the upper surface of the positioning piece 205 are connected through a first spring 216.When the clamping mechanism 2 reaches the clamping position, the output end of the second air cylinder 209 extends upward to drive the transmission block 210 to move upward, so that the four push-pull rods 211 pull the four guide sleeves 203 to move synchronously toward the bearing plate 201, so that the clamping pieces 206 move to the lower side of the material edge to realize the lifting operation. Then the transmission block 210 continues to pull the four guide sleeves 203 toward the bearing plate 201 through the four push-pull rods 211, so that the iron blocks 215 approach the magnets 214, and then the iron blocks 215 are attracted to the magnets 214 under the magnetic attraction of the magnets 214, so that the connecting column 207 drives the clamping pieces 206 to move upward, thereby realizing the positioning of the material between the clamping pieces 206 and the positioning pieces 205, and ensuring that the material is always in a stable state during rotation. When the clamping mechanism 2 reaches the discharging position, the output end of the second air cylinder 209 is retracted downward to drive the transmission block 210 to move downward, so that the four push-pull rods 211 pull the four guide sleeves 203 to move synchronously away from the bearing plate 201, so that the iron blocks 215 deviate from the magnets 214, and then the clamping pieces 206 move downward under the elastic action of the first springs 216, and then the transmission block 210 continues to pull the four guide sleeves 203 away from the bearing plate 201 through the four push-pull rods 211, so that the clamping pieces 206 deviate from the material, thereby realizing the release operation of the material. Specific embodiment four:

[0034] On the basis of specific embodiment three, as Figures 4-5 and Figure 10As shown, the rotating direction adjusting mechanism 3 comprises a positioning strip 301 arranged in parallel below the first support strip 102; the opposite sides of the positioning strip 301 are both provided with a plurality of first teeth 302 and a plurality of second teeth 303 arranged side by side; the upper surface of one end of the positioning strip 301 is rotationally connected with the lower end of the mounting shaft 104; the upper surface of the other end of the positioning strip 301 is connected with the lower surface of the first support strip 102 through a suspension column 304; the suspension column 304 is respectively connected with the positioning strip 301 and the first support strip 102 through screws; the opposite sides of the positioning strip 301 are both horizontally provided with second gears 305 which can be engaged with the first teeth 302 or the second teeth 303; the lower surfaces of the two second gears 305 are respectively connected with the upper surfaces of the two bearing plates 201 through a pair of vertically arranged bearing columns 306; the bearing columns 306 are respectively connected with the second gears 305 and the bearing plates 201 through screws; the bearing columns 306 are respectively arranged at the edges of the second gears 305 and the edges of the bearing plates 201; the upper surfaces of the two second gears 305 are both screw-connected with coaxially arranged movable columns 307; the outer peripheries of the two movable columns 307 are both movably sleeved with connecting blocks 308; the connecting blocks 308 are composed of rotating sleeves and limiting blocks; the rotating sleeves are slidably sleeved on the outer peripheries of the movable columns 307; the movable columns 307 slide along the axial direction of the rotating sleeves; the rotating sleeves are rotationally inserted into the limiting blocks; the rotating sleeves and the limiting blocks are connected through roller bearings; the two connecting blocks 308 are respectively connected with the same ends of the two transmission racks 106 through screws, and the connecting blocks 308 and the driving strip 107 are respectively arranged at the opposite ends of one transmission rack 106.When the two clamping mechanisms 2 are about to clamp and release materials respectively, the two bearing plates 201 are respectively located right below the two ends of the first supporting strip 102, that is, the arrangement direction of the two bearing plates 201 is parallel to the length direction of the first supporting strip 102. At this time, one second gear 305 is engaged with the first tooth 302 at one end of the positioning strip 301, and the other second gear 305 is engaged with the second tooth 303 at the other end of the positioning strip 301. Then, in the process of driving the two clamping mechanisms 2 to move similarly by the linear driving mechanism 1, the two second gears 305 roll on the positioning strip 301 respectively, so as to drive the two clamping mechanisms 2 to rotate horizontally by the bearing column 306. When one second gear 305 is just disengaged from the first tooth 302 at one end of the positioning strip 301 and the other second gear 305 is just disengaged from the second tooth 303 at the other end of the positioning strip 301, the two clamping mechanisms 2 rotate horizontally by 180° respectively. At this time, the two clamping mechanisms 2 are farthest from each other (without any interference), and then, as the two clamping mechanisms 2 are continuously driven by the linear driving mechanism 1, one second gear 305 is engaged with the second tooth 303 at the other end of the positioning strip 301 and the other second gear 305 is engaged with the first tooth 302 at one end of the positioning strip 301. Then, the two clamping mechanisms 2 are continuously driven by the linear driving mechanism 1, so that the two second gears 305 roll on the positioning strip 301 respectively. When one second gear 305 moves to the other end of the positioning strip 301 and the other second gear 305 moves to one end of the positioning strip 301, the two clamping mechanisms 2 rotate horizontally by 180° respectively. At this time, the two bearing plates 201 are respectively located right below the two ends of the first supporting strip 102, that is, the clamping mechanism 2 corresponding to one second gear 305 moves to the position right above the released material, and the clamping mechanism 2 corresponding to the other second gear 305 moves to the position right above the material to be clamped, so as to realize the staggered rotation direction adjustment of the two clamping mechanisms 2, avoid the collision of the two clamping mechanisms 2 when they move similarly, and also adapt to one clamping station and one releasing station of the wafer dicing machine. Specific embodiment five:

[0036] On the basis of the specific embodiment four, as Figures 3-5 and Figure 10As shown, the lifting mechanism 4 includes a pair of second support plates 401 respectively connected to opposite sides of the first support plate 102 by screws; the second support plates 401 are vertically arranged; the upper ends of the two second support plates 401 are connected by a top plate 402; the top plate 402 is connected to the second support plates 401 by screws; a conventional third cylinder 403 is vertically fixed on the upper surface of the top plate 402; the output end of the third cylinder 403 passes through the top plate 402 and is horizontally fixed with a transmission plate 404 parallel to the first support plate 102; The output end of the third cylinder 403 is clearance-fitted with the top plate 402; both ends of the transmission strip 404 are screwed to pressing strips 405 perpendicular to the first support strip 102; the pressing strips 405 are horizontally arranged; the two pressing strips 405 and the second support strip 401 form an "I" shaped structure; a lifting block 406 is provided below each of the two pressing strips 405; the two lifting blocks 406 are rotatably connected to the upper ends of the two movable columns 307 respectively; the lower surface of the lifting block 406 is connected to the upper surface of the limiting block by a second spring 407. In use, when clamping mechanism 2 is about to clamp material and another clamping mechanism 2 is about to release material, the upper surfaces of the two lifting blocks 406 are in contact with the lower surfaces of the two pressing strips 405, and the compression of the second spring 407 is minimal. The output end of the third cylinder 403 extends downward and drives the two pressing strips 405 to move downward synchronously via the transmission strip 404. This causes the two lifting blocks 406 to drive the two clamping mechanisms 2 to move downward synchronously via the movable column 307, the second gear 305, and the bearing column 306. Thus, one clamping mechanism 2 reaches the clamping position and the other clamping mechanism 2 reaches the releasing position (at this time, the compression of the second spring 407 is maximum). After one clamping mechanism 2 completes clamping and the other clamping mechanism 2 completes releasing, the third cylinder 403 drives the two pressing strips 405 to reset via the transmission strip 404. Under the elastic action of the second spring 407, the two clamping mechanisms 2 move upward synchronously to the reset position, thus realizing the synchronous up and down movement of the two clamping mechanisms 2.

[0037] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A robotic gripper for a wafer dicing machine, comprising a horizontally arranged linear drive mechanism (1); characterized in that: A pair of clamping mechanisms (2) are provided below the linear drive mechanism (1); the upper parts of the two clamping mechanisms (2) are respectively connected to the linear drive mechanism (1) through a rotary adjustment mechanism (3); the rotary adjustment mechanism (3) can drive the clamping mechanism (2) to rotate horizontally; the linear drive mechanism (1) is equipped with a lifting mechanism (4) for driving the clamping mechanism (2) to move up and down. The linear drive mechanism (1) includes a pair of symmetrically arranged vertical side support columns (101); the lower ends of the two side support columns (101) are connected by a first support strip (102); a first cylinder (103) parallel to the upper surface of the first support strip (102) is horizontally fixed thereon; the output end of the first cylinder (103) passes through one side support column (101); a vertically arranged mounting shaft (104) is rotatably connected to the lower surface of one end of the first support strip (102); a first gear (105) is fixedly sleeved on the mounting shaft (104); the first gear (105) A pair of transmission racks (106) are engaged with the first support plate (102) and are parallel to it. The two transmission racks (106) are respectively disposed on opposite sides of the first support plate (102). One end of one transmission rack (106) is connected to the output end of the first cylinder (103) through a drive plate (107). The upper surface of both transmission racks (106) is provided with a directional groove (108) along the length direction. A slider (109) is slidably connected in both directional grooves (108). The two sliders (109) are respectively fixed at opposite ends of the first support plate (102). The clamping mechanism (2) includes a horizontally arranged bearing plate (201); the rotation adjustment mechanism (3) includes a positioning strip (301) arranged parallel to the bottom of the first support plate (102); the positioning strip (301) has multiple first teeth (302) and multiple second teeth (303) arranged side by side on both opposite sides; the upper surface of one end of the positioning strip (301) is rotatably connected to the lower end of the mounting shaft (104); the upper surface of the other end of the positioning strip (301) is connected to the lower surface of the first support plate (102) through a suspension column (304); the positioning strip (301) has horizontally arranged on both opposite sides that can be connected to the first support plate (102). A second gear (305) meshes with a second tooth (302) or a second tooth (303); the lower surfaces of the two second gears (305) are respectively connected to the upper surfaces of the two support plates (201) through a pair of vertically arranged support columns (306); the support columns (306) are respectively arranged at the edge of the second gear (305) and the edge of the support plate (201); the upper surfaces of the two second gears (305) are coaxially fixed with movable columns (307); the outer periphery of the two movable columns (307) is movably sleeved with connecting blocks (308); the two connecting blocks (308) are respectively fixed on the same end of the two transmission racks (106).

2. The robotic gripper device for a wafer dicing machine according to claim 1, characterized in that, The four sides of the bearing plate (201) are vertically fixed with support rails (202); guide sleeves (203) are slidably sleeved on the four support rails (202); the lower surface of the guide sleeve (203) is vertically fixed with a mounting post (204); the lower end of the mounting post (204) is horizontally fixed with a positioning piece (205); a clamping piece (206) is arranged parallel below the positioning piece (205); a clamping space for material is formed between the clamping piece (206) and the positioning piece (205); a pair of connecting posts (207) are vertically fixed on one edge of the clamping piece (206); both connecting posts (207) are inserted through one edge of the positioning piece (205); the two connecting posts (207) are arranged on opposite sides of the guide sleeve (203).

3. The robotic gripper device for a wafer dicing machine according to claim 2, characterized in that, The upper surface of the support plate (201) is provided with a receiving opening (208); a vertically arranged second cylinder (209) is fixedly inserted in the receiving opening (208); a transmission block (210) is horizontally fixed at the output end of the second cylinder (209); a push-pull rod (211) corresponding to the guide sleeve (203) is rotatably connected to each of the four sides of the transmission block (210); one end of the push-pull rod (211) is rotatably connected to the upper surface of the guide sleeve (203).

4. A robotic gripper for a wafer dicing machine according to claim 2 or 3, characterized in that, A support plate (212) is vertically fixed at one end of the support rail (202) away from the bearing plate (201); an extension strip (213) parallel to the support rail (202) is fixed side by side at the lower edge of the support plate (212); a magnet (214) is fixed at the lower surface of the end of each extension strip (213) near the bearing plate (201); an iron block (215) is provided below each of the two magnets (214); the two iron blocks (215) are respectively fixed on the upper ends of the two connecting columns (207); the lower surface of the iron block (215) is connected to the upper surface of the positioning plate (205) by a first spring (216).

5. The robotic gripper device for a wafer dicing machine according to claim 4, characterized in that, The lifting mechanism (4) includes a pair of second support plates (401) that are vertically fixed to opposite sides of the first support plate (102); the upper ends of the two second support plates (401) are connected by a top plate (402); a third cylinder (403) is vertically fixed on the upper surface of the top plate (402); the output end of the third cylinder (403) passes through the top plate (402) and is horizontally fixed with a transmission plate (404) that is parallel to the first support plate (102); both ends of the transmission plate (404) are horizontally fixed with pressing plates (405) that are perpendicular to the first support plate (102); a lifting block (406) is provided below each of the two pressing plates (405); the two lifting blocks (406) are rotatably connected to the upper ends of the two movable columns (307); the lower surface of the lifting block (406) is connected to the upper surface of the connecting block (308) by a second spring (407).

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