Carrier boat transfer device, carrier boat loading and unloading system, and carrier boat loading and unloading method

Abstract

The present invention discloses a boat transfer device, a wafer boat loading and unloading system, and a wafer boat loading and unloading method. The boat transfer device includes a frame, a first lifting assembly, a first translation assembly, a second translation assembly, a first robot gripper, and a second robot gripper. The first lifting assembly is provided on the frame; the first translation assembly is provided on the upper side of the second translation assembly, and both the first translation assembly and the second translation assembly are connected to the first lifting assembly so that the first lifting assembly drives the first translation assembly and the second translation assembly to lift synchronously; the first robot gripper is connected to the first translation assembly, and the second robot gripper is connected to the second translation assembly so that the first translation assembly and the second translation assembly respectively drive the first robot gripper and the second robot gripper to move along a first horizontal direction. The boat transfer device according to the embodiment of the present invention has the advantages of high boat transfer efficiency and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of solar cell manufacturing, and particularly relates to a boat transfer device, a wafer boat loading and unloading system, and a wafer boat loading and unloading method. Background Art

[0002] In the production of solar cells, thermal process technologies such as ALD, PECVD, LPCVD, and diffusion require the use of a tube furnace and a boat transfer device. The boat transfer device includes a boat transfer manipulator. The boat transfer manipulator transports a wafer boat carrying silicon wafers from the front inserter to the pushing paddle of the pushing mechanism on the purification table conveying component, and the pushing mechanism pushes the wafer boat into the furnace body. After the process is completed in the furnace body, the pushing mechanism takes out the wafer boat from the furnace body, and the boat transfer manipulator transports the wafer boat after the process is completed to the cooling buffer table for cooling. After cooling is completed, the boat transfer manipulator transports the wafer boat on the cooling buffer table to the conveying component again, and the conveying component transports the wafer boat out of the purification table, completing a process flow of the wafer boat.

[0003] In current equipment, there is one boat transfer device corresponding to multiple furnace bodies, and each boat transfer device only has one boat transfer manipulator. To ensure stable handling, there is a certain upper limit to the operating speed of the boat transfer manipulator. Therefore, in current equipment, the boat transfer efficiency of the boat transfer device is one of the main factors affecting the production capacity of the equipment. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems in the related art to some extent.

[0005] For this purpose, an embodiment of the present invention provides a boat transfer device to improve the boat transfer efficiency.

[0006] The boat transfer device according to the embodiment of the present invention includes a frame, a first lifting component, a first translation component, a second translation component, a first mechanical claw, and a second mechanical claw. The first lifting component is arranged on the frame; the first translation component is arranged on the upper side of the second translation component, and both the first translation component and the second translation component are connected to the first lifting component so that the first lifting component drives the first translation component and the second translation component to lift synchronously; the first mechanical claw is connected to the first translation component, and the second mechanical claw is connected to the second translation component so that the first translation component and the second translation component respectively drive the first mechanical claw and the second mechanical claw to move along the first horizontal direction.

[0007] In some embodiments, the first lifting assembly includes a lifting guide rail, a first guiding block, and a second guiding block. The lifting guide rail extends in the up-and-down direction and is connected to the machine frame. The first guiding block is disposed above the second guiding block. Both the first guiding block and the second guiding block are slidably engaged with the lifting guide rail. The first translation assembly is connected to the first guiding block, and the second translation assembly is connected to the second guiding block.

[0008] In some embodiments, the first translation assembly includes a first fixed frame and a first moving frame. The first fixed frame is connected to the first guiding block. The first moving frame is movably connected to the first fixed frame along the first horizontal direction. The first robotic gripper is connected to the first moving frame. The second translation assembly includes a second fixed frame and a second moving frame. The second fixed frame is connected to the second guiding block. The second moving frame is movably connected to the second fixed frame along the first horizontal direction. The second robotic gripper is connected to the second moving frame.

[0009] In some embodiments, the first translation assembly further includes a first guide rail and a first slider. The first guide rail extends along the first horizontal direction. The first slider is slidably engaged with the first guide rail. The first guide rail is connected to the first fixed frame, and the first slider is connected to the first moving frame. The second translation assembly further includes a second guide rail and a second slider. The second guide rail extends along the first horizontal direction. The second slider is slidably engaged with the second guide rail. The second guide rail is connected to the second fixed frame, and the second slider is connected to the second moving frame.

[0010] An embodiment of the present invention provides a wafer boat loading and unloading system to improve the loading and unloading efficiency of the wafer boat.

[0011] The wafer boat loading and unloading system according to the embodiment of the present invention includes a boat handling device, a conveying assembly, a second lifting assembly, and a cooling buffer table. The boat handling device is the boat handling device described in any of the above embodiments. The conveying assembly is configured to convey the wafer boat along the second horizontal direction. The conveying assembly is disposed on the second lifting assembly so that the second lifting assembly drives the conveying assembly to lift. The cooling buffer table is used for placing the wafer boat. Wherein, the second horizontal direction is perpendicular to the first horizontal direction.

[0012] In some embodiments, the second lifting assembly is a scissor lift assembly.

[0013] In some embodiments, the cooling buffer table has a first buffer platform and a second buffer platform. The first buffer platform is disposed above the second buffer platform, and the distance between the first buffer platform and the second buffer platform is equal to the distance between the first robotic gripper and the second robotic gripper.

[0014] An embodiment of the present invention provides a method for loading and unloading a wafer boat to improve the loading and unloading efficiency of the wafer boat.

[0015] The method for loading and unloading a wafer boat according to an embodiment of the present invention is implemented by using the wafer boat loading and unloading system described in any of the above embodiments. The method for loading and unloading a wafer boat includes the following steps:

[0016] Step 1: The conveying component conveys the first wafer boat and the second wafer boat respectively. The first robotic gripper and the second robotic gripper lift the first wafer boat and the second wafer boat on the conveying component respectively, and place the first wafer boat and the second wafer boat on the first pusher paddle and the second pusher paddle.

[0017] Step 2: The first robotic gripper and the second robotic gripper lift the first wafer boat and the second wafer boat after the process is completed respectively, and place the first wafer boat and the second wafer boat after the process is completed on the cooling buffer table for cooling. The first robotic gripper and the second robotic gripper lift the first wafer boat and the second wafer boat after cooling is completed respectively, and place the first wafer boat and the second wafer boat after cooling is completed on the conveying component respectively. The conveying component transports the first wafer boat and the second wafer boat after cooling is completed out.

[0018] In some embodiments, the first robotic gripper has a first working position and a first avoidance position, and the second robotic gripper has a second working position and a second avoidance position. Step 1 includes:

[0019] Step 1.1: The conveying component conveys the first wafer boat to a first preset position.

[0020] Step 1.2: The second lifting component drives the conveying component to move to a second preset position, and the first lifting component drives the first robotic gripper to move to a third preset position.

[0021] Step 1.3: The first translation component drives the first robotic gripper to move to the first working position, the second translation component drives the second robotic gripper to move to the second avoidance position, and the first lifting component drives the first robotic gripper to move to a fourth preset position so that the first robotic gripper lifts the first wafer boat on the conveying component.

[0022] Step 1.4: The conveying assembly conveys the second wafer boat to the fifth preset position;

[0023] Step 1.5: The second lifting assembly drives the conveying assembly to move to the sixth preset position;

[0024] Step 1.6: The second translation assembly drives the second robotic gripper to move to the second working position, and the first lifting assembly drives the second robotic gripper to move to the seventh preset position so that the second robotic gripper picks up the second wafer boat on the conveying assembly;

[0025] Step 1.7: The first lifting assembly simultaneously drives the first robotic gripper and the second robotic gripper to move, so as to place the picked-up first wafer boat and second wafer boat on the first pusher paddle and the second pusher paddle respectively.

[0026] In some embodiments, Step 2 includes:

[0027] Step 2.1: The first lifting assembly drives the first robotic gripper and the second robotic gripper to move, so that the first robotic gripper and the second robotic gripper pick up the first wafer boat and the second wafer boat after the process is completed respectively;

[0028] Step 2.2: The first lifting assembly and the first translation assembly drive the first robotic gripper to move, and the first lifting assembly and the second translation assembly drive the second robotic gripper to move, so as to place the first wafer boat and the second wafer boat after the process is completed on the cooling buffer table for cooling;

[0029] Step 2.3: The first lifting assembly and the first translation assembly drive the first robotic gripper to move, and the first lifting assembly and the second translation assembly drive the second robotic gripper to move, so as to remove the first wafer boat and the second wafer boat after cooling is completed from the cooling buffer table respectively;

[0030] Step 2.4: The first lifting assembly drives the second robotic gripper to move to the eighth preset position, so as to place the second wafer boat removed from the cooling buffer table on the conveying assembly;

[0031] Step 2.5: The conveying assembly transports the second wafer boat out;

[0032] Step 2.6: The second translation assembly drives the second robotic gripper to move to the second avoidance position, and the first translation assembly drives the second robotic gripper to move to the first working position;

[0033] Step 2.7: The second lifting component drives the conveying component to move to the ninth preset position, and the first lifting component drives the first mechanical claw to move to the tenth preset position to place the first wafer boat carried out from the cooling buffer table on the conveying component.

[0034] Step 2.8: The second lifting component drives the conveying component to move to the tenth preset position.

[0035] Step 2.9: The conveying component transports the first wafer boat out.

[0036] The wafer boat transferring device according to the embodiment of the present invention can use the first mechanical claw and the second mechanical claw to respectively grab the first wafer boat and the second wafer boat, use the first translation component and the second translation component to respectively drive the first mechanical claw and the second mechanical claw to move along the first horizontal direction, and use the first lifting component to drive the first mechanical claw and the second mechanical claw to lift synchronously, so as to place the first wafer boat and the second wafer boat on the wafer boat transferring mechanism, or remove the first wafer boat and the second wafer boat with the process completed from the wafer boat transferring mechanism. Among them, the first mechanical claw and the second mechanical claw can respectively correspond to the upper and lower two furnace bodies. Thus, the wafer boat transferring device can simultaneously realize the transfer of at least two wafer boats (including the above-mentioned first wafer boat and the second wafer boat), improve the wafer boat transferring efficiency, and thereby improve the equipment production capacity. Description of the Drawings

[0037] Figure 1 is a usage state diagram of the wafer boat transferring device according to an embodiment of the present invention, and is also a partial structural schematic diagram of the wafer boat loading and unloading system according to an embodiment of the present invention.

[0038] Figure 2 is Figure 1 the enlarged view of part A in

[0039] Figure 3 is Figure 1 the enlarged view of part B in

[0040] Figure 4 is Figure 1 the enlarged view of part C in

[0041] Reference Numerals:

[0042] Wafer boat transferring device 100;

[0043] First lifting component 1; Lifting guide rail 11; First guide block 12; Second guide block 13;

[0044] First translation component 2; First fixing frame 21; First moving frame 22; First guide rail 23; First slider 24;

[0045] The second translation component 3; the second fixing frame 31; the second moving frame 32; the second guide rail 33; the second slider 34;

[0046] The first manipulator claw 4;

[0047] The second manipulator claw 5;

[0048] The first wafer carrier 6;

[0049] The second wafer carrier 7;

[0050] The conveying component 200;

[0051] The second lifting component 300. Detailed implementation manners

[0052] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings. The embodiments described below by referring to the drawings are exemplary and are intended to explain the present invention, and should not be construed as a limitation to the present invention.

[0053] As Figures 1 to 4 shown, the wafer carrier device 100 of the embodiment of the present invention includes a frame (not shown in the figure), a first lifting component 1, a first translation component 2, a second translation component 3, a first manipulator claw 4, and a second manipulator claw 5. The first lifting component 1 is arranged on the frame. The first translation component 2 is arranged on the upper side of the second translation component 3. Both the first translation component 2 and the second translation component 3 are connected to the first lifting component 1 so that the first lifting component 1 can drive the first translation component 2 and the second translation component 3 to lift synchronously. The first manipulator claw 4 is connected to the first translation component 2, and the second manipulator claw 5 is connected to the second translation component 3 so that the first translation component 2 and the second translation component 3 can respectively drive the first manipulator claw 4 and the second manipulator claw 5 to move along the first horizontal direction. Among them, the frame can be connected to the cleaning table.

[0054] The wafer carrier device 100 of the embodiment of the present invention can use the first manipulator claw 4 and the second manipulator claw 5 to respectively grasp the first wafer carrier 6 and the second wafer carrier 7, use the first translation component 2 and the second translation component 3 to respectively drive the first manipulator claw 4 and the second manipulator claw 5 to move along the first horizontal direction, and use the first lifting component 1 to drive the first manipulator claw 4 and the second manipulator claw 5 to lift synchronously, so as to place the first wafer carrier 6 and the second wafer carrier 7 on the wafer carrier mechanism, or remove the first wafer carrier 6 and the second wafer carrier 7 with the process completed from the wafer carrier mechanism. Among them, the first manipulator claw 4 and the second manipulator claw 5 can respectively correspond to the upper and lower two furnace bodies.

[0055] Thus, the wafer carrier device 100 can simultaneously realize the handling of at least two wafer carriers (including the above-mentioned first wafer carrier 6 and second wafer carrier 7), improve the wafer carrier efficiency, and thus improve the equipment production capacity.

[0056] Therefore, the boat transfer device 100 according to the embodiments of the present invention has advantages such as high boat transfer efficiency.

[0057] To make the technical solution of the present invention easier to understand, taking the first horizontal direction being consistent with the front-back direction as an example, the technical solution of the present invention will be further described. Wherein, the front-back direction is as Figure 1 shown.

[0058] For example, as Figure 1 shown, the first lifting component 1 drives the first translation component 2 and the second translation component 3 to move simultaneously in the up-down direction, realizing the synchronous lifting of the first translation component 2 and the second translation component 3. The first translation component 2 and the second translation component 3 respectively drive the first robotic gripper 4 and the second robotic gripper 5 to move in the front-back direction.

[0059] In some embodiments, as Figure 1 and Figure 2 shown, the first lifting component 1 includes a lifting guide rail 11, a first guide block 12, and a second guide block 13. The first guide block 12 is provided above the second guide block 13. The lifting guide rail 11 extends in the up-down direction and is connected to the machine frame. The first guide block 12 and the second guide block 13 are both slidably engaged with the lifting guide rail 11. The first translation component 2 is connected to the first guide block 12, and the second translation component 3 is connected to the second guide block 13.

[0060] When the first translation component 2 and the second translation component 3 are lifted synchronously, by using the cooperation between the first guide block 12 and the lifting guide rail 11 and the cooperation between the second guide block 13 and the lifting guide rail 11, it can guide the movement of the first translation component 2 and the second translation component 3, enabling the first translation component 2 and the second translation component 3 to move along a set path, thereby avoiding the skew of the first translation component 2 and the second translation component 3, which is beneficial to improving the reliability of the boat transfer device 100.

[0061] Optionally, a first guide groove is provided on the first guide block 12, and a second guide groove is provided on the second guide block 13. The first guide groove and the second guide groove are engaged with the lifting guide rail 11.

[0062] Optionally, the first lifting component 1 includes a first motor (not shown in the figure) and a first transmission mechanism (not shown in the figure). The first transmission mechanism includes a first driving pulley, a first driven pulley, and a first transmission belt. The first driving pulley is in transmission connection with the first motor, and the first transmission belt is wound around the first driving pulley and the first driven pulley. The first driving pulley and the first driven pulley are arranged at intervals in the up-down direction, and the first driving pulley and the first driven pulley are both rotatably connected to the machine frame. The first translation component 2 and the second translation component 3 are both connected to the first transmission belt.

[0063] During specific use, the first motor is used to drive the first driving pulley to rotate. The first transmission belt moves and drives the first driven pulley to rotate. The first transmission belt drives the first translation assembly 2 and the second translation assembly 3 to move synchronously in the up and down direction, thereby realizing the synchronous lifting of the first translation assembly 2 and the second translation assembly 3.

[0064] Optionally, there are multiple lifting guide rails 11, first guide blocks 12, and second guide blocks 13. The multiple lifting guide rails 11 are arranged at intervals in the second horizontal direction, where the second horizontal direction is perpendicular to the first horizontal direction. The multiple first guide blocks 12 and multiple second guide blocks 13 correspond to the multiple lifting guide rails 11 one by one. Each first guide block 12 cooperates with the corresponding lifting guide rail 11, and each second guide block 13 cooperates with the corresponding lifting guide rail 11.

[0065] To make the technical solution of the present invention easier to understand, the following takes the second horizontal direction being consistent with the left and right direction as an example to further describe the technical solution of the present invention. Among them, the left and right directions are as Figure 1 shown.

[0066] For example, as Figure 1 shown, there are two lifting guide rails 11, first guide blocks 12, and second guide blocks 13. The two lifting guide rails 11 are arranged at intervals in the left and right direction. The two first guide blocks 12 are arranged at intervals in the left and right direction. The two second guide blocks 13 are arranged at intervals in the left and right direction. The first guide block 12 on the left cooperates with the lifting guide rail 11 on the left, and the first guide block 12 on the right cooperates with the lifting guide rail 11 on the right. The second guide block 13 on the left cooperates with the lifting guide rail 11 on the left, and the second guide block 13 on the right cooperates with the lifting guide rail 11 on the right.

[0067] Optionally, the first lifting assembly 1 further includes a support profile. The lifting guide rail 11 is fixed on the support profile, and the support profile is connected to the frame.

[0068] Optionally, the first translation assembly 2 includes a first fixed frame 21 and a first moving frame 22. The first fixed frame 21 is connected to the first guide block 12. The first moving frame 22 is movably connected to the first fixed frame 21 in the first horizontal direction. The first mechanical claw 4 is connected to the first moving frame 22.

[0069] By providing the first fixed frame 21 and the first moving frame 22, and the first fixed frame 21 and the first mechanical claw 4 are respectively connected to the first guide block 12 and the first moving frame 22, it is convenient to install and fix the first translation assembly 2.

[0070] Optionally, the first translation component 2 further includes a first guide rail 23 and a first slider 24. The first guide rail 23 is connected to the first fixing frame 21, and the first slider 24 is connected to the first moving frame 22. The first guide rail 23 extends along the first horizontal direction, and the first slider 24 is slidably engaged with the first guide rail 23.

[0071] For example, as Figure 3 shown, the first guide rail 23 extends in the front-rear direction, and the first slider 24 is slidably engaged with the first guide rail 23 in the front-rear direction.

[0072] When the first moving frame 22 moves relative to the first fixing frame 21 in the front-rear direction, the cooperation between the first slider 24 and the first guide rail 23 can guide the movement of the first moving frame 22, so that the first moving frame 22 moves along a set path, thereby avoiding the skew of the first moving frame 22, which is beneficial to further improving the reliability of the boat handling device 100.

[0073] Optionally, the first translation component 2 includes a second motor (not shown in the figure) and a second transmission mechanism (not shown in the figure). The second transmission mechanism includes a second driving pulley, a second driven pulley and a second transmission belt. The second driving pulley is in transmission connection with the second motor, and the second transmission belt is wound around the second driving pulley and the second driven pulley. The second driving pulley and the second driven pulley are arranged at intervals in the front-rear direction, the second driving pulley and the second driven pulley are rotatably connected to the first fixing frame 21, and the first moving frame 22 is connected to the second transmission belt.

[0074] During specific use, the second motor is used to drive the second driving pulley to rotate. The second transmission belt moves and drives the second driven pulley to rotate. The second transmission belt drives the first moving frame 22 to move in the front-rear direction, so as to realize the movement of the first mechanical claw 4 in the front-rear direction.

[0075] Optionally, the first fixing frame 21 includes a first support plate and a first support rod. One end of the first support rod is connected to the first support plate, the other end of the first support rod is suspended, the first guide block 12 is connected to the first support plate, and the first guide rail 23 is connected to the first support rod.

[0076] For example, the first support rod extends in the front-rear direction, the first guide rail 23 is arranged on the upper side of the first support rod, and the first guide rail 23 is connected to the first support rod.

[0077] Optionally, the number of the first support rods and the first guide rails 23 is multiple. The multiple first guide rails 23 correspond to the multiple first support rods one by one, and each first guide rail 23 is fixed on the corresponding first support rod.

[0078] For example, the number of the first support rods and the first guide rails 23 is both two. The two first support rods are arranged at intervals in the left - right direction, and the two first guide rails 23 are arranged at intervals in the left - right direction. The first guide rail 23 on the left is fixed to the first support rod on the left, and the first guide rail 23 on the right is fixed to the first support rod on the right.

[0079] Optionally, the second translation assembly 3 includes a second fixed frame 31 and a second moving frame 32. The second fixed frame 31 is connected to the second guide block 13. The second moving frame 32 is movably connected to the second fixed frame 31 along the first horizontal direction, and the second mechanical gripper 5 is connected to the second moving frame 32.

[0080] By providing the second fixed frame 31 and the second moving frame 32, and connecting the second fixed frame 31 and the second mechanical gripper 5 to the second guide block 13 and the second moving frame 32 respectively, it is convenient to install and fix the second translation assembly 3.

[0081] Optionally, the second translation assembly 3 further includes a second guide rail 33 and a second slider 34. The second guide rail 33 is connected to the second fixed frame 31, and the second slider 34 is connected to the second moving frame 32. The second guide rail 33 extends along the first horizontal direction, and the second slider 34 is slidably engaged with the second guide rail 33.

[0082] For example, as Figure 3 shown, the second guide rail 33 extends along the front - rear direction, and the second slider 34 is slidably engaged with the second guide rail 33 along the front - rear direction.

[0083] When the second moving frame 32 moves relative to the second fixed frame 31 along the front - rear direction, by using the cooperation between the second slider 34 and the second guide rail 33, the movement of the second moving frame 32 can be guided, so that the second moving frame 32 moves along the set path, thereby avoiding the skew of the second moving frame 32, which is beneficial to further improving the reliability of the boat - handling device 100.

[0084] Optionally, the second translation assembly 3 includes a third motor (not shown in the figure) and a third transmission mechanism (not shown in the figure). The third transmission mechanism includes a third driving pulley, a third driven pulley and a third transmission belt. The third driving pulley is in transmission connection with the third motor, and the third transmission belt is wound around the third driving pulley and the third driven pulley. The third driving pulley and the third driven pulley are arranged at intervals in the front - rear direction, and both the third driving pulley and the third driven pulley are rotatably connected to the second fixed frame 31. The second moving frame 32 is connected to the third transmission belt.

[0085] During specific use, the third motor is used to drive the third driving pulley to rotate. The third transmission belt moves and drives the third driven pulley to rotate. The third transmission belt drives the second moving frame 32 to move along the front - rear direction, so as to realize the movement of the second mechanical gripper 5 along the front - rear direction.

[0086] Optionally, the second fixing bracket 31 includes a second support plate and a second support rod. One end of the second support rod is connected to the second support plate, and the other end of the second support rod is disposed in a suspended manner. The second guiding block 13 is connected to the second support plate, and the second guide rail 33 is connected to the second support rod.

[0087] For example, the second support rod extends in the front-rear direction. The second guide rail 33 is disposed on the upper side of the second support rod and is connected to the second support rod.

[0088] Optionally, the number of the second support rods and the second guide rails 33 is multiple. The multiple second guide rails 33 correspond to the multiple second support rods one by one, and each second guide rail 33 is fixed on the corresponding second support rod.

[0089] For example, the number of the second support rods and the second guide rails 33 is two. The two second support rods are arranged at intervals in the left-right direction, and the two second guide rails 33 are arranged at intervals in the left-right direction. The second guide rail 33 on the left side is fixed on the second support rod on the left side, and the second guide rail 33 on the right side is fixed on the second support rod on the right side.

[0090] Of course, in other embodiments, the first translation assembly 2 and the second translation assembly 3 may also adopt other forms. For example, both the first translation assembly 2 and the second translation assembly 3 adopt linear modules.

[0091] Optionally, the first mechanical gripper 4 and the second mechanical gripper 5 are provided with grooves or bayonets for cooperating with the wafer boat.

[0092] As Figures 1 to 4 shown, the wafer boat loading and unloading system of the embodiment of the present invention includes a boat handling device 100, a conveying assembly 200, a second lifting assembly 300, and a cooling buffer table. The boat handling device 100 is the boat handling device 100 described in any of the above embodiments. The conveying assembly 200 is used to convey the wafer boat along the second horizontal direction. The conveying assembly 200 is disposed on the second lifting assembly 300 so that the second lifting assembly 300 drives the conveying assembly 200 to lift. The cooling buffer table is used to place the wafer boat. Among them, the conveying assembly may be composed of a motor, a synchronous pulley belt, profiles, bearings, etc., and its main function is to convey the wafer boat according to requirements.

[0093] The wafer boat loading and unloading method of the embodiment of the present invention includes the following steps:

[0094] Step 1: The conveying assembly 200 conveys the first wafer boat 6 and the second wafer boat 7 respectively; the first mechanical gripper 4 and the second mechanical gripper 5 lift the first wafer boat 6 and the second wafer boat 7 on the conveying assembly 200 respectively, and place the first wafer boat 6 and the second wafer boat 7 on the first pusher paddle and the second pusher paddle.

[0095] Step 2: The first robotic gripper 4 and the second robotic gripper 5 respectively lift the first wafer boat 6 and the second wafer boat 7 after the process is completed, and place the first wafer boat 6 and the second wafer boat 7 after the process is completed on the cooling buffer table for cooling; the first robotic gripper 4 and the second robotic gripper 5 respectively lift the first wafer boat 6 and the second wafer boat 7 after cooling is completed, and place the first wafer boat 6 and the second wafer boat 7 after cooling is completed on the conveying assembly 200 respectively; the conveying assembly 200 transports the first wafer boat 6 and the second wafer boat 7 after cooling is completed out.

[0096] When using the first lifting assembly 1 to drive the first robotic gripper 4 and the second robotic gripper 5 to move in the up and down direction, the second lifting assembly 300 can be used to drive the conveying assembly 200 to move in the up and down direction at the same time, so that the first robotic gripper 4 and the second robotic gripper 5 can respectively reach the first wafer boat 6 and the second wafer boat 7 quickly, which is beneficial to improving the loading and unloading efficiency of the wafer boat and further improving the production capacity of the equipment.

[0097] Optionally, the second lifting assembly 300 is a scissor lift. Among them, the power source components of the scissor lift include but are not limited to cylinders, motors and screw rod assemblies, and the main function is to lift the conveying assembly 200 to a preset height.

[0098] The scissor lift has the advantages of strong load-bearing capacity and good stability. The second lifting assembly 300 adopts a scissor lift, which is beneficial to improving the reliability of the wafer boat loading and unloading system.

[0099] Of course, in some other embodiments, the second lifting assembly 300 can also be in other forms. For example, the second lifting assembly 300 is driven by a belt drive.

[0100] Optionally, the cooling buffer table has a first buffer platform and a second buffer platform. The first buffer platform is arranged on the upper side of the second buffer platform, and the distance between the first buffer platform and the second buffer platform is equal to the distance between the first robotic gripper 4 and the second robotic gripper 5.

[0101] During specific use, the first wafer boat 6 after the process is completed is placed on the first buffer platform, and the second wafer boat 7 after the process is completed is placed on the second buffer platform.

[0102] By setting the distance between the first buffer platform and the second buffer platform to be equal to the distance between the first robotic gripper 4 and the second robotic gripper 5, when the first wafer boat 6 after the process is completed grabbed by the first robotic gripper 4 can be placed on the first buffer platform, the second wafer boat 7 after the process is completed grabbed by the second robotic gripper 5 can just be placed on the second buffer platform, so as to place the first wafer boat 6 and the second wafer boat 7 on the cooling buffer table at the same time. This is beneficial to further improving the loading and unloading efficiency of the wafer boat and further improving the production capacity of the equipment.

[0103] Of course, in some other embodiments, the distance between the first buffer platform and the second buffer platform may not be equal to the distance between the first robotic gripper 4 and the second robotic gripper 5. In this case, the first wafer boat 6 can be placed on the first buffer platform first, and then the second wafer boat 7 can be placed on the second buffer platform; or, the second wafer boat 7 can be placed on the second buffer platform first, and then the first wafer boat 6 can be placed on the first buffer platform.

[0104] Optionally, the first robotic gripper 4 has a first working position and a first avoidance position, and the second robotic gripper 5 has a second working position and a second avoidance position. Among them, the first avoidance position is closer to the lifting guide rail 11 than the first working position, and the second avoidance position is closer to the lifting guide rail 11 than the second working position.

[0105] For example, the first avoidance position is located behind the first working position, and the second avoidance position is located behind the second working position.

[0106] Optionally, step 1 includes:

[0107] Step 1.1, the conveying component 200 conveys the first wafer boat 6 to the first preset position;

[0108] Step 1.2, the second lifting component 300 drives the conveying component 200 to move to the second preset position, and the first lifting component 1 drives the first robotic gripper 4 to move to the third preset position;

[0109] Step 1.3, the first translation component 2 drives the first robotic gripper 4 to move to the first working position, the second translation component 3 drives the second robotic gripper 5 to move to the second avoidance position, and the first lifting component 1 drives the first robotic gripper 4 to move to the fourth preset position, so that the first robotic gripper 4 picks up the first wafer boat 6 on the conveying component 200;

[0110] Step 1.4, the conveying component 200 conveys the second wafer boat 7 to the fifth preset position;

[0111] Step 1.5, the second lifting component 300 drives the conveying component 200 to move to the sixth preset position;

[0112] Step 1.6, the second translation component 3 drives the second robotic gripper 5 to move to the second working position, and the first lifting component 1 drives the second robotic gripper 5 to move to the seventh preset position, so that the second robotic gripper 5 picks up the second wafer boat 7 on the conveying component 200;

[0113] Step 1.7, the first lifting component 1 simultaneously drives the first robotic gripper 4 and the second robotic gripper 5 to move, so as to place the lifted first wafer boat 6 and second wafer boat 7 on the first pusher paddle and the second pusher paddle respectively.

[0114] Next, refer toFigure 1 Describe Step 1 above:

[0115] 1.1. The conveying component 200 conveys the first wafer boat 6 from right to left to the first preset position;

[0116] 1.2. The second lifting component 300 drives the conveying component 200 to move upward to the second preset position, and the first lifting component 1 drives the first manipulator claw 4 to descend to the third preset position; Optionally, in this step, the second lifting component 300 and the first lifting component 1 can move simultaneously;

[0117] 1.3. The first translation component 2 drives the first manipulator claw 4 to move forward to the first working position, the second translation component 3 drives the second manipulator claw 5 to move backward to the second avoidance position, and the first lifting component 1 drives the first manipulator claw 4 to move upward to the fourth preset position, so that the first manipulator claw 4 picks up the first wafer boat 6 on the conveying component 200; Optionally, in this step, the first translation component 2 and the second translation component 3 can move simultaneously;

[0118] 1.4. The conveying component 200 conveys the second wafer boat 7 from right to left to the fifth preset position;

[0119] 1.5. The second lifting component 300 drives the conveying component 200 to move upward to the sixth preset position; wherein, the rising height of the second lifting component 300 in this step is equal to the rising height of the first lifting component 1 in Step 1.3.

[0120] 1.6. The second translation component 3 drives the second manipulator claw 5 to move forward to the second working position, and the first lifting component 1 drives the second manipulator claw 5 to move upward to the seventh preset position, so that the second manipulator claw 5 picks up the second wafer boat 7 on the conveying component 200;

[0121] Step 1.7. The first lifting component 1 simultaneously drives the first manipulator claw 4 and the second manipulator claw 5 to move, so as to place the picked-up first wafer boat 6 and second wafer boat 7 on the first pusher paddle and the second pusher paddle respectively, and wait for the boats to enter.

[0122] Optionally, Step 2 includes:

[0123] Step 2.1. The first lifting component 1 drives the first manipulator claw 4 and the second manipulator claw 5 to move, so that the first manipulator claw 4 and the second manipulator claw 5 pick up the first wafer boat 6 and the second wafer boat 7 that have completed the process respectively;

[0124] Step 2.2. The first lifting component 1 and the first translation component 2 drive the first manipulator claw 4 to move, and the first lifting component 1 and the second translation component 3 drive the second manipulator claw 5 to move, so as to place the first wafer boat 6 and the second wafer boat 7 that have completed the process on the cooling buffer table for cooling;

[0125] Step 2.3: The first lifting assembly 1 and the first translation assembly 2 drive the first mechanical gripper 4 to move, and the first lifting assembly 1 and the second translation assembly 3 drive the second mechanical gripper 5 to move, so as to remove the cooled first carrier boat 6 and the second carrier boat 7 from the cooling buffer table respectively;

[0126] Step 2.4: The first lifting assembly 1 drives the second mechanical gripper 5 to move to the eighth preset position, so as to place the second carrier boat 7 removed from the cooling buffer table on the conveying assembly 200;

[0127] Step 2.5: The conveying assembly 200 transports the second carrier boat 7 out;

[0128] Step 2.6: The second translation assembly 3 drives the second mechanical gripper 5 to move to the second avoidance position, and the first translation assembly 2 drives the second mechanical gripper 5 to move to the first working position;

[0129] Step 2.7: The second lifting assembly 300 drives the conveying assembly 200 to move to the ninth preset position, and the first lifting assembly 1 drives the first mechanical gripper 4 to move to the tenth preset position, so as to place the first carrier boat 6 on the conveying assembly 200;

[0130] Step 2.8: The second lifting assembly 300 drives the conveying assembly 200 to move to the tenth preset position;

[0131] Step 2.9: The conveying assembly 200 transports the first carrier boat 6 out.

[0132] The following refers to Figure 1 to describe the above Step 2:

[0133] Step 2.1: The first lifting assembly 1 drives the first mechanical gripper 4 and the second mechanical gripper 5 to first move downward to the lower sides of the first carrier boat 6 and the second carrier boat 7 that have completed the process respectively, and then, the first lifting assembly 1 drives the first mechanical gripper 4 and the second mechanical gripper 5 to move upward, so that the first mechanical gripper 4 and the second mechanical gripper 5 lift the first carrier boat 6 and the second carrier boat 7 that have completed the process respectively;

[0134] Step 2.2: The second translation assembly 3 drives the second mechanical gripper 5 to move backward to the second avoidance position, the first lifting assembly 1 moves downward until the second carrier boat 7 is aligned with the second buffer platform, the second translation assembly 3 drives the second mechanical gripper 5 to move forward to the second working position, and then, the first lifting assembly 1 moves downward, so that the first carrier boat 6 and the second carrier boat 7 that have completed the process are respectively placed on the first buffer platform and the second buffer platform for cooling; in this step, the first mechanical gripper 4 always remains at the first working position;

[0135] Step 2.3: The second translation component 3 drives the second mechanical claw 5 to move backward to the second avoidance position, the first lifting component 1 moves downward to the lower side of the second wafer boat 7, the second translation component 3 drives the second mechanical claw 5 to move forward to the second working position, and then, the first lifting component 1 moves upward to remove the cooled first wafer boat 6 and the second wafer boat 7 from the first buffer platform and the second buffer platform respectively;

[0136] Step 2.4: The first lifting component 1 drives the second mechanical claw 5 to move downward to the eighth preset position to place the second wafer boat 7 removed from the cooling buffer table on the conveying component 200;

[0137] Step 2.5: The conveying component 200 transports the second wafer boat 7 out of the purification table from left to right;

[0138] Step 2.6: The second translation component 3 drives the second mechanical claw 5 to move backward to the second avoidance position, and the first translation component 2 drives the second mechanical claw 5 to move forward to the first working position; Optionally, in this step, the second translation component 3 and the first translation component 2 can move simultaneously;

[0139] Step 2.7: The second lifting component 300 drives the conveying component 200 to move upward to the ninth preset position, and the first lifting component 1 drives the first mechanical claw 4 to move downward to the tenth preset position to place the first wafer boat 6 on the conveying component 200;

[0140] Step 2.8: The second lifting component 300 drives the conveying component 200 to move downward to the tenth preset position;

[0141] Step 2.9: The conveying component 200 transports the first wafer boat 6 out from left to right.

[0142] However, in the actual process, since the process time of the wafer boat in the furnace tube is relatively long, one wafer boat transfer device 100 can correspond to multiple groups of furnace tubes for interspersed transfer of wafer boats. Among them, one group of furnace tubes includes at least two furnace tubes arranged in the up-down direction.

[0143] The wafer boat transfer device 100 of the embodiment of the present invention is provided with multiple independent wafer boat transfer manipulators (including the first mechanical claw 4 and the second mechanical claw 5) in the up-down direction. The distances between the multiple wafer boat transfer manipulators are fixed and are driven by the same driving source component (the first lifting component 1). The conveying component 200 is a liftable multi-station conveying component 200. Through the lifting of the conveying component 200, after the wafer boat transfer manipulator makes multiple up and down grabs, it can simultaneously transfer multiple wafer boats to the designated position at one time, thus effectively improving the transfer efficiency of the wafer boat and further enhancing the production capacity of the equipment.

[0144] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the present invention.

[0145] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present invention, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0146] In the present invention, unless otherwise clearly specified and defined, the terms "mounted", "connected", "coupled", "fixed", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection, an electrical connection, or communicable with each other; it may be directly connected, or indirectly connected through an intermediate medium, and may be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0147] In the present invention, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0148] In the present invention, the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples", etc., mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0149] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Variations, modifications, substitutions, and alterations made by those of ordinary skill in the art to the above embodiments are all within the scope of protection of the present invention.

Claims

1. A wafer boat loading and unloading system, characterized in that, it comprises: A boat transfer device, which includes a frame, a first lifting assembly, a first translation assembly, a second translation assembly, and a first robot gripper and a second robot gripper. The first lifting assembly is arranged on the frame; the first translation assembly is arranged on the upper side of the second translation assembly, and both the first translation assembly and the second translation assembly are connected to the first lifting assembly so that the first lifting assembly drives the first translation assembly and the second translation assembly to lift synchronously; The first robot gripper is connected to the first translation assembly, and the second robot gripper is connected to the second translation assembly so that the first translation assembly and the second translation assembly respectively drive the first robot gripper and the second robot gripper to move along the first horizontal direction; A conveying assembly for conveying the wafer boat along the second horizontal direction; A second lifting assembly, the conveying assembly is arranged on the second lifting assembly so that the second lifting assembly drives the conveying assembly to lift; and A cooling buffer table for placing the wafer boat; wherein, the second horizontal direction is perpendicular to the first horizontal direction.

2. The wafer boat loading and unloading system according to claim 1, characterized in that, The first lifting assembly includes: A lifting guide rail extending in the vertical direction, and the lifting guide rail is connected to the frame; and A first guide block and a second guide block, the first guide block is arranged on the upper side of the second guide block, and both the first guide block and the second guide block are slidably engaged with the lifting guide rail. The first translation assembly is connected to the first guide block, and the second translation assembly is connected to the second guide block.

3. The wafer boat loading and unloading system according to claim 2, characterized in that, The first translation assembly includes a first fixed frame and a first moving frame. The first fixed frame is connected to the first guide block, the first moving frame is movably connected to the first fixed frame along the first horizontal direction, and the first robot gripper is connected to the first moving frame; The second translation assembly includes a second fixed frame and a second moving frame. The second fixed frame is connected to the second guide block, the second moving frame is movably connected to the second fixed frame along the first horizontal direction, and the second robot gripper is connected to the second moving frame.

4. The wafer boat loading and unloading system according to claim 3, characterized in that, The first translation assembly further includes a first guide rail and a first slider. The first guide rail extends along the first horizontal direction, the first slider is slidably engaged with the first guide rail, the first guide rail is connected to the first fixed frame, and the first slider is connected to the first moving frame; The second translation assembly further includes a second guide rail and a second slider. The second guide rail extends along the first horizontal direction, the second slider is slidably engaged with the second guide rail, the second guide rail is connected to the second fixed frame, and the second slider is connected to the second moving frame.

5. The wafer boat loading and unloading system according to any one of claims 1-4, characterized in that, the second lifting assembly is a scissor-type lifting assembly.

6. The wafer boat loading and unloading system according to claim 5, characterized in that, the cooling buffer table has a first buffer platform and a second buffer platform, the first buffer platform is arranged on the upper side of the second buffer platform, and the distance between the first buffer platform and the second buffer platform is equal to the distance between the first manipulator claw and the second manipulator claw.

7. A method for loading and unloading a wafer boat, characterized in that, it is implemented by using the wafer boat loading and unloading system according to any one of claims 1-6, and includes the following steps: Step 1: The conveying assembly conveys the first wafer boat and the second wafer boat respectively; the first manipulator claw and the second manipulator claw lift the first wafer boat and the second wafer boat on the conveying assembly respectively, and place the first wafer boat and the second wafer boat on the first pusher paddle and the second pusher paddle; Step 2: The first manipulator claw and the second manipulator claw lift the first wafer boat and the second wafer boat after the process is completed respectively, and place the first wafer boat and the second wafer boat after the process is completed on the cooling buffer table for cooling; the first manipulator claw and the second manipulator claw lift the first wafer boat and the second wafer boat after cooling is completed respectively, and place the first wafer boat and the second wafer boat after cooling is completed on the conveying assembly respectively; the conveying assembly transports the first wafer boat and the second wafer boat after cooling is completed out.

8. The method for loading and unloading a wafer boat according to claim 7, characterized in that, the first manipulator claw has a first working position and a first avoidance position, the second manipulator claw has a second working position and a second avoidance position, and step 1 includes: Step 1.1: The conveying assembly conveys the first wafer boat to a first preset position; Step 1.2: The second lifting assembly drives the conveying assembly to move to a second preset position, and the first lifting assembly drives the first manipulator claw to move to a third preset position; Step 1.3: The first translation assembly drives the first manipulator claw to move to the first working position, the second translation assembly drives the second manipulator claw to move to the second avoidance position, and the first lifting assembly drives the first manipulator claw to move to a fourth preset position, so that the first manipulator claw lifts the first wafer boat on the conveying assembly; Step 1.4: The conveying assembly conveys the second wafer boat to a fifth preset position; Step 1.5: The second lifting assembly drives the conveying assembly to move to a sixth preset position; Step 1.6: The second translation assembly drives the second manipulator claw to move to the second working position, and the first lifting assembly drives the second manipulator claw to move to a seventh preset position, so that the second manipulator claw lifts the second wafer boat on the conveying assembly; Step 1.7: The first lifting assembly simultaneously drives the first robotic gripper and the second robotic gripper to move, so as to place the lifted first wafer boat and second wafer boat on the first pusher paddle and the second pusher paddle respectively.

9. The wafer boat loading and unloading method according to claim 7, wherein, the first robotic gripper has a first working position and a first avoidance position, the second robotic gripper has a second working position and a second avoidance position, and step 2 includes: Step 2.1: The first lifting assembly drives the first robotic gripper and the second robotic gripper to move, so that the first robotic gripper and the second robotic gripper lift the first wafer boat and the second wafer boat that have completed the process respectively; Step 2.2: The first lifting assembly and the first translation assembly drive the first robotic gripper to move, and the first lifting assembly and the second translation assembly drive the second robotic gripper to move, so as to place the first wafer boat and the second wafer boat that have completed the process on the cooling buffer table for cooling; Step 2.3: The first lifting assembly and the first translation assembly drive the first robotic gripper to move, and the first lifting assembly and the second translation assembly drive the second robotic gripper to move, so as to remove the first wafer boat and the second wafer boat that have completed cooling from the cooling buffer table respectively; Step 2.4: The first lifting assembly drives the second robotic gripper to move to the eighth preset position, so as to place the second wafer boat removed from the cooling buffer table on the conveying assembly; Step 2.5: The conveying assembly transports the second wafer boat out; Step 2.6: The second translation assembly drives the second robotic gripper to move to the second avoidance position, and the first translation assembly drives the second robotic gripper to move to the first working position; Step 2.7: The second lifting assembly drives the conveying assembly to move to the ninth preset position, and the first lifting assembly drives the first robotic gripper to move to the tenth preset position, so as to place the first wafer boat removed from the cooling buffer table on the conveying assembly; Step 2.8: The second lifting assembly drives the conveying assembly to move to the tenth preset position; Step 2.9: The conveying assembly transports the first wafer boat out.

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