A magnetoelectric sensor for vibration cancellation and its manufacturing method

Abstract

This invention discloses a magnetoelectric sensor for vibration cancellation and its manufacturing method, comprising, from top to bottom, a first magnetostrictive material layer, a first piezoelectric material layer, a second piezoelectric material layer, and a second magnetostrictive material layer; wherein, interdigitated electrode flexible circuit boards are adhered to the upper and lower surfaces of the first and second piezoelectric material layers, and two wires are led out from the electrode flexible circuit boards for polarization of the first and second piezoelectric material layers and signal output. This invention, through structural changes, adopts a differential structure to reduce the susceptibility of conventional sandwich-structure magnetoelectric sensors to vibration noise, while maintaining excellent vibration signal cancellation capability without reducing the magnetic signal response.

Description

Technical Field

[0001] This invention belongs to the field of magnetoelectric materials technology, and particularly relates to a magnetoelectric sensor that achieves vibration cancellation and its manufacturing method. Background Technology

[0002] Magnetoelectric materials exhibit changes in polarization under the influence of a magnetic field or in magnetization under an applied electric field. Due to their potential in sensors, data storage, and communication applications, they have become a subject of recent research interest. Suppressing environmental vibrations is crucial for the detection of weak magnetic signals and has become one of the technical challenges in manufacturing ultrasensitive magnetic sensors, especially in practical applications. Because the application environment for ultra-low frequency weak magnetic detection is often accompanied by vibration and noise signals of similar frequencies, the true low-frequency magnetic field response signal is drowned out by the low-frequency vibration signal, making it difficult to detect weak magnetic signals. However, due to the vibrations encountered in its applications, its performance has not yet been fully developed. Summary of the Invention

[0003] The purpose of this invention is to reduce the susceptibility of conventional sandwich-structure magnetoelectric sensors to vibration and noise by employing a differential structure through structural modifications. This structure effectively suppresses the impact of vibration on sensor sensitivity without degrading the magnetoelectric signal.

[0004] To achieve the above objectives, the present invention provides the following solution: a magnetoelectric sensor for vibration cancellation and a method for manufacturing the same.

[0005] The present invention provides a magnetoelectric sensor for vibration cancellation, comprising:

[0006] The layers arranged from top to bottom are: a first magnetostrictive material layer, a first piezoelectric material layer, a second piezoelectric material layer, and a second magnetostrictive material layer.

[0007] The first piezoelectric material layer and the second piezoelectric material layer have interdigitated electrode flexible circuit boards attached to their upper and lower surfaces. Two wires are led out from the electrode flexible circuit boards to conduct polarization and signal output to the first piezoelectric material layer and the second piezoelectric material layer.

[0008] Preferably, the first magnetostrictive material layer and the second magnetostrictive material layer are made of amorphous alloy Metglas.

[0009] Preferably, the first piezoelectric material layer and the second piezoelectric material layer are made of PZT.

[0010] Preferably, the first magnetostrictive material layer, the first piezoelectric material layer, the second piezoelectric material layer, and the second magnetostrictive material layer are bonded together with epoxy resin adhesive.

[0011] Preferably, the epoxy resin adhesive is a room temperature curing two-component adhesive.

[0012] Preferably, the bonding process using the epoxy resin adhesive employs a combination of vacuum compressor evacuation and hydraulic press pressurization.

[0013] Preferably, the magnetoelectric sensor has a differential symmetric structure.

[0014] The present invention also provides a method for manufacturing a magnetoelectric sensor that achieves vibration cancellation, comprising:

[0015] PZT ceramic is selected to make piezoelectric fiber material, and a first piezoelectric material layer and a second piezoelectric material layer are obtained based on the piezoelectric fiber material.

[0016] A first magnetostrictive material layer and a second magnetostrictive material layer were prepared using a Metglas strip alloy.

[0017] A magnetoelectric sensor is obtained by differentially and symmetrically arranging the first magnetostrictive material layer, the first piezoelectric material layer, the second piezoelectric material layer, and the second magnetostrictive material layer from top to bottom.

[0018] Preferably, after obtaining the first piezoelectric material layer and the second piezoelectric material layer based on the piezoelectric fiber material, the process further includes:

[0019] The upper and lower surfaces of the piezoelectric fiber material are coated with epoxy resin adhesive in a certain proportion of PA and PB, and then bonded to a flexible interdigitated electrode. During the curing process of the epoxy adhesive, a vacuum pumping and pressure method is used to ensure a tight composite. After vacuum sealing for 24 hours, the material is taken out, placed in a drying oven, and pressed with a heavy object to obtain a piezoelectric composite material.

[0020] Preferably, the process of obtaining the magnetoelectric sensor by differentially symmetrically arranging it from top to bottom includes:

[0021] Two wires are led out from each flexible interdigital electrode to polarize the piezoelectric composite material. A first magnetostrictive material layer and a second magnetostrictive material layer are then bonded to the upper and lower surfaces of the polarized piezoelectric composite material using epoxy resin adhesive to obtain a magnetoelectric composite material differential sensor.

[0022] Compared with the prior art, the present invention has the following advantages and technical effects:

[0023] In real-world environments, external vibration noise contaminates magnetic signals, increasing the equivalent magnetic noise floor. The magnetoelectric sensor of this invention, through structural changes, employs a differential structure to reduce the susceptibility of traditional sandwich-structure magnetoelectric sensors to vibration noise. This structure effectively suppresses the impact of vibration on sensor sensitivity without degrading the magnetoelectric signal.

[0024] The magnetoelectric sensor of this invention exhibits excellent vibration signal cancellation capability without reducing the magnetic signal response. This structure can attenuate vibration signals by 10 to 20 dB, potentially enabling practical applications of this sensor in real-world environments. Attached Figure Description

[0025] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments and descriptions of this application are used to explain this application and do not constitute an undue limitation of this application. In the drawings:

[0026] Figure 1 This is a schematic diagram of the system structure according to an embodiment of the present invention;

[0027] Figure 2 This is an experimental analysis diagram of the magnetoelectric sensor according to an embodiment of the present invention;

[0028] Figure 3 This is a time-domain response diagram of the magnetoelectric sensor of this embodiment of the invention when subjected to an incident 10 Hz magnetic field;

[0029] Figure 4 This is the power spectral density response diagram of a 10 Hz magnetic field in the DC to 55 Hz range according to an embodiment of the present invention;

[0030] Figure 5 The image shows the oscilloscope signal diagrams of the differential and non-differential ME sensors according to an embodiment of the present invention. Detailed Implementation

[0031] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0032] It should be noted that the steps shown in the flowchart in the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions, and although a logical order is shown in the flowchart, in some cases the steps shown or described may be executed in a different order than that shown here.

[0033] like Figure 1 As shown, the present invention provides a magnetoelectric sensor for vibration cancellation and a method for manufacturing the same. The magnetoelectric sensor for vibration cancellation provided by the present invention includes:

[0034] The layers arranged from top to bottom are: a first magnetostrictive material layer, a first piezoelectric material layer, a second piezoelectric material layer, and a second magnetostrictive material layer.

[0035] The first piezoelectric material layer and the second piezoelectric material layer have interdigitated electrode flexible circuit boards attached to their upper and lower surfaces. Two wires are led out from the electrode flexible circuit boards to conduct polarization and signal output to the first piezoelectric material layer and the second piezoelectric material layer.

[0036] In a further optimized design, the first and second magnetostrictive material layers are made of amorphous alloy Metglas.

[0037] In a further optimized design, the first and second piezoelectric material layers are made of PZT.

[0038] In a further optimized design, the first magnetostrictive material layer, the first piezoelectric material layer, the second piezoelectric material layer, and the second magnetostrictive material layer are bonded together with epoxy resin adhesive.

[0039] In a further optimized solution, the epoxy resin adhesive is a two-component adhesive that cures at room temperature.

[0040] To further optimize the solution, the epoxy resin adhesive is bonded using a combination of vacuum compressor evacuation and hydraulic press pressurization.

[0041] In a further optimized design, the magnetoelectric sensor is a differentially symmetrical structure.

[0042] The present invention also provides a method for manufacturing a magnetoelectric sensor that achieves vibration cancellation, comprising:

[0043] PZT ceramic is selected to make piezoelectric fiber material, and a first piezoelectric material layer and a second piezoelectric material layer are obtained based on the piezoelectric fiber material.

[0044] A first magnetostrictive material layer and a second magnetostrictive material layer were prepared using a Metglas strip alloy.

[0045] A magnetoelectric sensor is obtained by differentially and symmetrically arranging the first magnetostrictive material layer, the first piezoelectric material layer, the second piezoelectric material layer, and the second magnetostrictive material layer from top to bottom.

[0046] A further optimization of the scheme, after obtaining the first piezoelectric material layer and the second piezoelectric material layer based on the piezoelectric fiber material, also includes:

[0047] The upper and lower surfaces of the piezoelectric fiber material are coated with epoxy resin adhesive in a certain proportion of PA and PB, and then bonded to a flexible interdigitated electrode. During the curing process of the epoxy adhesive, a vacuum pumping and pressure method is used to ensure a tight composite. After vacuum sealing for 24 hours, the material is taken out, placed in a drying oven, and pressed with a heavy object to obtain a piezoelectric composite material.

[0048] Further optimization of the scheme, the process of obtaining the magnetoelectric sensor by differentially symmetrically setting it from top to bottom includes,

[0049] Two wires are led out from each flexible interdigital electrode to polarize the piezoelectric composite material. A first magnetostrictive material layer and a second magnetostrictive material layer are then bonded to the upper and lower surfaces of the polarized piezoelectric composite material using epoxy resin adhesive to obtain a magnetoelectric composite material differential sensor.

[0050] Unlike other Metglas / PZT / Metglas sandwich structures, this embodiment uses two layers of PZT for a differential symmetry structure. This structure mainly consists of four layers, sequentially configured as a multilayer structure of magnetostrictive material layer 1, piezoelectric material layer 2, piezoelectric material layer 3, and magnetostrictive material layer 4, namely, a Metglas layer, a PZT layer, a PZT layer, and a Metglas layer.

[0051] The magnetoelectric sensor also includes a piezoelectric material layer 2 composed of piezoelectric fibers. The upper and lower surfaces of the piezoelectric material layer 3 are both covered with interdigitated electrode flexible circuit boards. Two wires are led out from the interdigitated electrode flexible circuit boards on the upper and lower surfaces to conduct polarization to the piezoelectric material layer 2 and the piezoelectric material layer 3 and to output signals. Each layer is bonded together with a self-made epoxy resin adhesive.

[0052] Furthermore, the magnetostrictive material layer 1 and the magnetostrictive material layer 4 are made of amorphous alloy Metglas.

[0053] Furthermore, the piezoelectric material layer 2 and piezoelectric material layer 3 are made of PZT piezoelectric material.

[0054] Furthermore, the epoxy resin adhesive is a two-component adhesive that cures at room temperature.

[0055] Furthermore, the epoxy resin bonding process employs a combination of vacuum compressor evacuation and hydraulic press pressurization.

[0056] Furthermore, the manufacturing method of the magnetoelectric sensor that achieves vibration cancellation is as follows:

[0057] PZT ceramic was selected to fabricate the piezoelectric fiber material, and Metglas ribbon alloy was used to fabricate the magnetostrictive material layer. During preparation, five PZT piezoelectric fibers were coated with an epoxy resin adhesive containing a mixture of PA and PB in a specific ratio on their upper and lower surfaces and then bonded to flexible interdigital electrodes. During the epoxy adhesive curing process, a vacuum pressure method was used to ensure a tight composite. After vacuum sealing for 24 hours, the fibers were removed, placed in a drying oven, and weighed down with a heavy object to obtain the desired piezoelectric composite material. Next, two wires were led out from each flexible interdigital electrode, resulting in four wires, to polarize the piezoelectric composite material and impart piezoelectric properties. After polarization, Metglas was bonded to the upper and lower surfaces of the core piezoelectric composite material layer with epoxy resin adhesive, resulting in the desired magnetoelectric composite differential sensor.

[0058] Experimental analysis was performed on the obtained magnetoelectric composite material sensing element, such as... Figure 2 As shown, this reflects the response of each layer of the differential sensor, as well as the sum of the constituent signals. Figure 2 In the diagram, the solid line represents the output signal from the top PZT layer, the dashed line represents the signal generated by the bottom PZT layer, and the dotted dashed line represents the time domain sum of the top and bottom PZT layers.

[0059] To detect the sensor’s response to the incident magnetic field, the exciter was replaced with a 90 mm, 100-turn Helmholtz coil, driven by an SR850 lock-in amplifier at a frequency of 10 Hz. Figure 3 The time-domain response of the sensor to an incident 10 Hz magnetic field is shown. The signals from the top and bottom PZT layers are almost in phase, causing the output signal to approximately double when summed. At 10 Hz, the relative phase shift between the top and bottom PZT layers is only 0.6°. This indicates that the incident magnetic field causes longitudinal mode deformation of the differential electromagnetic structure.

[0060] The power spectral density response of a 10 Hz magnetic field in the DC to 55 Hz range is as follows: Figure 4 As shown, based on the magnetic response characteristics of the ME lamination sensor, the first harmonic signal dominates at 10 Hz (1.4 μT / √Hz and 0.7 μT / √Hz) relative to high harmonic signals (20 Hz, 30 Hz, etc.). At 10 Hz, the power spectral density of the summed signal doubles relative to the amplitude of a single component layer.

[0061] Finally, the vibration signal cancellation capabilities of this novel differential active structure were compared with those of a non-differential active structure with similar geometry. Based on a similar analysis to the previous section, different operating modes under different excitation sources were investigated. The results show that the novel differential structure can suppress incident vibration signals by superimposing signals from the upper and lower piezoelectric ceramic layers. In this measurement, the top and bottom PZT layers were first connected in parallel, and a single-charge amplifier was used to collect the signals. Simultaneously, a non-differential ME layer connected to another charge amplifier served as a control group. Both signals were observed together using an oscilloscope. An exciter was placed between the differential and non-differential ME structures and excited with a 10Hz drive signal.

[0062] Figure 5 The figures show the signals from the differential and non-differential ME sensors obtained directly from the oscilloscope. In the figure, the signal amplitude of the non-differential sensor is approximately 80mV, while the signal amplitude of the differential ME structure is only about 20mV. Clearly, our new differential structure exhibits excellent ability to cancel vibration signals. Furthermore, separating the magnetic and vibration signals is important, in itself. The hybrid sensor enables data fusion between two separate signals from an environment.

[0063] The above are merely preferred embodiments of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A magnetoelectric sensor for achieving vibration cancellation, characterized in that, include: The layers arranged from top to bottom are: a first magnetostrictive material layer, a first piezoelectric material layer, a second piezoelectric material layer, and a second magnetostrictive material layer. The first piezoelectric material layer and the second piezoelectric material layer are attached to the upper and lower surfaces of an interdigitated electrode flexible circuit board, and two wires are led out from the electrode flexible circuit board for polarization and signal output to the first piezoelectric material layer and the second piezoelectric material layer. The first magnetostrictive material layer and the second magnetostrictive material layer are made of amorphous alloy Metglas. The first magnetostrictive material layer, the first piezoelectric material layer, the second piezoelectric material layer, and the second magnetostrictive material layer are bonded together with epoxy resin adhesive. The bonding process using the epoxy resin adhesive employs a combination of vacuum compressor evacuation and hydraulic press pressurization.

2. The magnetoelectric sensor for vibration cancellation according to claim 1, characterized in that, The first and second piezoelectric material layers are made of PZT.

3. The magnetoelectric sensor for vibration cancellation according to claim 1, characterized in that, The epoxy resin adhesive is a two-component adhesive that cures at room temperature.

4. The magnetoelectric sensor for vibration cancellation according to claim 1, characterized in that, The magnetoelectric sensor has a differential symmetry structure.

5. A method for manufacturing a magnetoelectric sensor that achieves vibration cancellation, characterized in that, include: PZT ceramic is selected to make piezoelectric fiber material, and a first piezoelectric material layer and a second piezoelectric material layer are obtained based on the piezoelectric fiber material. A first magnetostrictive material layer and a second magnetostrictive material layer were prepared using a Metglas strip alloy. A magnetoelectric sensor is obtained by differentially and symmetrically arranging the first magnetostrictive material layer, the first piezoelectric material layer, the second piezoelectric material layer, and the second magnetostrictive material layer from top to bottom.

6. The method for manufacturing a magnetoelectric sensor for vibration cancellation according to claim 5, characterized in that, After obtaining the first piezoelectric material layer and the second piezoelectric material layer based on the piezoelectric fiber material, the process further includes... The upper and lower surfaces of the piezoelectric fiber material are coated with epoxy resin adhesive in a certain proportion of PA and PB, and then bonded to a flexible interdigitated electrode. During the curing process of the epoxy adhesive, a vacuum pumping and pressure method is used to ensure a tight composite. After vacuum sealing for 24 hours, the material is taken out, placed in a drying oven, and pressed with a heavy object to obtain a piezoelectric composite material.

7. The method for manufacturing a magnetoelectric sensor for vibration cancellation according to claim 6, characterized in that, The process of obtaining a magnetoelectric sensor by differentially and symmetrically setting it from top to bottom includes the following: Two wires are led out from each flexible interdigital electrode to polarize the piezoelectric composite material. A first magnetostrictive material layer and a second magnetostrictive material layer are then bonded to the upper and lower surfaces of the polarized piezoelectric composite material using epoxy resin adhesive to obtain a magnetoelectric composite material differential sensor.

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