Fluid control device

Abstract

The present invention provides a fluid control device. The fluid control device (10) includes a frame (11). The first main plate (20) of the frame (11) includes: a vibrating part (21) for which a drive body (30) is disposed, and which has a rotationally symmetrical shape when viewed from above; and a plurality of openings (230) formed on the outside of the vibrating part (21) to communicate with the outside of the pump chamber (100). The second main plate (40) has an opening (400) that communicates with the outside of the pump chamber (100) and has a rotationally symmetrical shape when viewed from above. The opening (400) is configured to include the center of the vibrating part (21) when the first main plate (20) and the second main plate (40) are viewed from above. The opening area (S400) of the opening (400) is 10% to 75% of the area (S21) of the vibrating part (21).

Description

Technical Field

[0001] This invention relates to a fluid control device utilizing piezoelectric elements. Background Technology

[0002] Patent Document 1 describes a fluid control device that uses a piezoelectric element to transport fluid. The fluid control device shown in Patent Document 1 includes a vibrating plate, a cover plate, and a frame plate. The vibrating plate and the cover plate are arranged opposite each other at a predetermined distance. The outer peripheral ends of the vibrating plate and the cover plate are connected by the frame plate. This forms a pump chamber enclosed by the vibrating plate, the cover plate, and the frame plate. The vibrating plate has an intake port near its outer periphery. The cover plate has a small-diameter discharge port. A piezoelectric element is disposed on the vibrating plate.

[0003] The vibrating plate vibrates due to the strain of the piezoelectric element, causing a change in the volume of the pump chamber. The fluid control device utilizes this volume change to draw in fluid through the suction port and discharge the fluid through the discharge port.

[0004] Patent Document 1: International Publication No. 2016 / 063710

[0005] However, in the existing fluid control device shown in Patent Document 1, it is difficult to increase the volume change of the pump chamber and obtain a large flow rate. Summary of the Invention

[0006] Therefore, the object of the present invention is to provide a fluid control device that can increase the volume variation of the pump chamber.

[0007] The fluid control device of the present invention includes: a frame, a pump chamber formed by a first main plate and a second main plate opposed to each other; and a drive body disposed on the first main plate to vibrate the first main plate. The first main plate includes: a vibrating portion for which the drive body is disposed and which has a rotationally symmetrical shape when viewed from above; and a first opening formed on the outer side of the vibrating portion, communicating the pump chamber with the exterior of the first main plate. The second main plate has a second opening that communicates the pump chamber with the exterior of the second main plate and also has a rotationally symmetrical shape when viewed from above. The second opening is configured to include the center of the vibrating portion when the first and second main plates are viewed from above. The opening area of ​​the second opening is 10% to 75% of the area of ​​the vibrating portion.

[0008] In this structure, the area where the vibrating part overlaps with the second opening does not substantially contribute to volume change. Therefore, even if opposite-phase vibrations occur at the center and outer periphery of the vibrating part, the mutual cancellation of volume changes can be suppressed.

[0009] For example, at the center of the vibrating section, as the vibrating section shifts to approach the second main plate, the outer peripheral end shifts to move away from the second main plate. In this case, when the first and second main plates are positioned approximately face-to-face, the volume of the pump chamber decreases at the center and increases at the outer peripheral end. Therefore, these volume changes are offset.

[0010] However, by having a second opening in the center, the volume change of the pump chamber is substantially dependent on the volume change at the outer periphery. Thus, the aforementioned offsetting effect is suppressed.

[0011] According to the present invention, the volume variation of the pump chamber can be increased to obtain a large flow rate. Attached Figure Description

[0012] Figure 1 This is an exploded perspective view showing an example of the structure of the fluid control device 10 according to the first embodiment.

[0013] Figure 2 This is a side view showing an example of the structure of the fluid control device 10 according to the first embodiment.

[0014] Figure 3 This is a top view of the fluid control device 10 according to the first embodiment.

[0015] Figure 4 (A) is a graph showing the relationship between the opening ratio and the rate of volume change. Figure 4 (B) is a graph showing the relationship between the opening ratio and the intermediate flow rate.

[0016] Figure 5 (A) is a graph showing the relationship between the opening ratio and the volume change. Figure 5 (B) is a graph showing the relationship between the opening ratio and pressure.

[0017] Figure 6 This is a top view showing the adjustable range of the outer periphery of the opening 400.

[0018] Figure 7 (A) Figure 7 (B) are top views showing an example of the location and shape of an opening.

[0019] Figure 8 This is a side view showing an example of the structure of the fluid control device 10A according to the second embodiment.

[0020] Figure 9 This is a side view showing an example of the structure of the fluid control device 10B according to the third embodiment.

[0021] Figure 10This is a side view showing an example of the structure of the fluid control device 10C according to the fourth embodiment.

[0022] Figure 11 This is a side view showing an example of the structure of the fluid control device 10D according to the fifth embodiment.

[0023] Figure 12 This is a side view showing an example of the structure of the fluid control device 10E according to the sixth embodiment.

[0024] Figure 13 (A) Figure 13 (B) is a side view showing an example of the structure of the fluid control devices 10F1 and 10F2 according to the seventh embodiment.

[0025] Figure 14 This is a side view showing an example of the structure of the fluid control device 10G according to the eighth embodiment. Detailed Implementation

[0026] (First Implementation)

[0027] The fluid control device according to the first embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 This is an exploded perspective view showing an example of the structure of the fluid control device 10 according to the first embodiment. Figure 2 This is a side view showing an example of the structure of the fluid control device 10 according to the first embodiment. Furthermore, with these... Figure 1 In the figures shown in the following embodiments, the shapes of each constituent element are exaggerated, either partially or entirely, in order to make the explanation easier to understand.

[0028] like Figure 1 , Figure 2 As shown, the fluid control device 10 includes a frame 11 and a drive unit 30. The frame 11 includes a first main board 20, a second main board 40, and a connecting component 50.

[0029] The first main board 20 is a flat plate that is circular when viewed from above. The first main board 20 has two parallel main surfaces 201 and 202. The first main board 20 is made of, for example, metal. Furthermore, the shape of the first main board 20 is not limited to a circle. The first main board 20 includes a vibrating part 21, an outer frame part 22, a support part 23, and an opening 230.

[0030] The vibrating part 21 is a flat plate with a circular shape when viewed from above. Furthermore, the shape of the vibrating part 21 when viewed from above should be rotationally symmetrical. The vibrating part 21 is made of a material and has a thickness that allows it to bend and vibrate via the driving body 30. Bending vibration refers to, for example... Figure 2As shown in the vibration shape, the vibration exhibits a wave-like displacement when the side of the first main board 20 (vibrating part 21) is observed.

[0031] The outer frame portion 22 is ring-shaped and is positioned outside the outer edge of the vibrating portion 21. When viewed from above, the outer frame portion 22 surrounds the vibrating portion 21.

[0032] Multiple support portions 23 are beam-shaped. Multiple support portions 23 are disposed between the vibrating portion 21 and the outer frame portion 22. Multiple support portions 23 are connected to the outer edge of the vibrating portion 21 and the inner edge of the outer frame portion 22. Multiple support portions 23 are arranged at intervals along the outer edge of the vibrating portion 21.

[0033] Multiple openings 230 are disposed between the vibrating part 21 and the outer frame part 22. The multiple openings 230 pass through the main surface 201 and the main surface 202 of the first main board 20. The multiple openings 230 are the portions in the area between the vibrating part 21 and the outer frame part 22 where multiple support parts 23 are not formed. The openings 230 correspond to the "first opening" of the present invention.

[0034] With this structure, in the first main board 20, the vibrating part 21 is supported by a plurality of support parts 23 so that it can vibrate relative to the outer frame part 22.

[0035] Furthermore, the vibrating part 21, the outer frame part 22, and the multiple support parts 23 are preferably integrally formed. That is, the vibrating part 21, the outer frame part 22, and the multiple support parts 23 are preferably formed by punching a flat plate using a prescribed method to create multiple openings 230. Thus, by connecting the vibrating part 21 and the outer frame part 22 using multiple support parts 23, a shape with multiple openings 230 can be achieved with high precision and ease. However, the vibrating part 21, the outer frame part 22, and the multiple support parts 23 may not be integrally formed. That is, the vibrating part 21, the outer frame part 22, and the multiple support parts 23 may also be formed by connecting separate components.

[0036] The second motherboard 40 is a flat plate that is circular when viewed from above. Furthermore, the shape of the second motherboard 40 only needs to be rotationally symmetrical when viewed from above. The second motherboard 40 has two parallel main surfaces 401 and 402. The second motherboard 40 is configured to be positioned opposite the first motherboard 20, with the main surfaces 401 and 201 separated.

[0037] The second motherboard 40 has an opening 400. The opening 400 connects the main surface 401 and the main surface 402 of the second motherboard 40. The opening 400 is circular when viewed from above. In addition, the opening 400 only needs to be rotationally symmetrical when viewed from above.

[0038] The connecting component 50 is a ring-shaped column. The connecting component 50 is preferably made of a material and thickness that hardly produces bending vibration.

[0039] The connecting component 50 is disposed between the outer frame portion 22 and the second main board 40. One end of the connecting component 50 in the height direction is connected to the outer frame portion 22. The other end of the connecting component 50 in the height direction is connected to the second main board 40.

[0040] According to this structure, in the fluid control device 10, the space enclosed by the first main board 20, the second main board 40, and the connecting component 50 (the internal space of the frame 11) becomes the pump chamber 100 of the fluid control device 10. The pump chamber 100 communicates with a plurality of openings 230 and openings 400. In other words, the pump chamber 100 communicates with the external space on the side of the first main board 20 of the fluid control device 10 through the plurality of openings 230, and with the external space on the side of the second main board 40 of the fluid control device 10 through the openings 400.

[0041] The driving element 30 is implemented, for example, by a piezoelectric element. The piezoelectric element has a circular piezoelectric body and driving electrodes. The driving electrodes are formed on two main surfaces of the circular piezoelectric body.

[0042] The drive body 30 is disposed on the main surface 202 of the vibrating part 21. When viewed from above, the center of the drive body 30 is approximately aligned with the center of the vibrating part 21. The piezoelectric element of the drive body 30 is strained by a drive signal applied through the drive electrodes. The vibrating part 21 is supported so that it can vibrate as described above. That is, the vibrating part 21 vibrates due to this strain.

[0043] Due to this vibration, the volume within the pump chamber 100 changes. Because of this change, the fluid control device 10 draws fluid into the pump chamber 100 from the external space on the first main board 20 side through multiple openings 230. Then, the fluid control device 10 discharges fluid from the pump chamber 100 into the external space on the second main board 40 side through an opening 400.

[0044] Furthermore, the fluid control device 10 can also draw fluid from the external space on the second main board 40 side into the pump chamber 100 through the opening 400, and discharge fluid from the pump chamber 100 into the external space on the first main board 20 side through multiple openings 230. Either of these two fluid delivery methods can be selectively executed.

[0045] (The specific shape and location of opening 400, and the effects brought about by the area of ​​opening 400)

[0046] Figure 3 This is a top view of the fluid control device 10 according to the first embodiment. Figure 3 This is a top-down view from the 40 side of the second motherboard.

[0047] like Figure 3As shown, the shape of the opening 400 when viewed from above is also circular, just like the vibrating part 21, but the diameter of the opening 400 is smaller than the diameter of the vibrating part 21. That is, the opening 400 has a shape similar to that of the vibrating part 21. Furthermore, the opening 400 and the vibrating part 21 are not limited to having completely similar shapes, but it is preferable that they have completely similar shapes.

[0048] The center C400 of the opening 400 coincides with the center C21 of the vibrating part 21. In other words, the opening 400 is configured to include the center C21 of the vibrating part 21. Furthermore, in the fluid control device 10, the center C400 of the opening 400 and the center C21 of the vibrating part 21 coincide with the center C10 of the fluid control device 10.

[0049] At this time, the opening area S400 of the opening 400 (the opening area of ​​the second main board 40) is 10% to 75% of the area S21 of the vibrating part 21.

[0050] Figure 4 (A) is a graph showing the relationship between the opening ratio and the rate of volume change. Figure 4 (B) is a graph showing the relationship between the opening ratio and the intermediate flow rate. The opening ratio is the ratio of the area of ​​the opening 400 to the area of ​​the vibrating part 21. The volume change rate is the ratio of the change in volume of the pump chamber 100 at its minimum and maximum. The intermediate flow rate is the flow rate when the fluid control device 10 is driven at 50% of the pump's maximum pressure value. Furthermore, in Figure 4 In (A), the opening ratio with the largest volume change is recorded as the volume change rate of 100%.

[0051] like Figure 4 As shown in (A), the rate of volume change also changes when the opening ratio is changed. This is believed to be based on the following reasons.

[0052] like Figure 2 As shown, in the fluid control device 10, vibrations of opposite phases are generated at the center and outer periphery of the vibrating part 21.

[0053] Here, for example, in the structure of the prior art, the opening of the plate opposite the vibrating part (opposing plate: corresponding to the second main board of this application) is a small diameter hole, so the vibrating part and the opposing plate are facing each other across approximately the entire surface.

[0054] In this case, for example, when the vibrating part is displaced at its center to approach the opposing plate, its outer peripheral end is displaced to move away from the opposing plate. Therefore, the volume of the pump chamber decreases at the center and increases at the outer peripheral end. Thus, these volume changes are offset.

[0055] On the other hand, for example, when the vibrating part is displaced at its center to move away from the opposing plate, its outer peripheral end is displaced to move closer to the opposing plate. Therefore, the volume of the pump chamber increases at the center and decreases at the outer peripheral end. Thus, these volume changes are offset.

[0056] As a result, the rate of volume change is reduced in the existing structure.

[0057] On the other hand, in this invention, the opening 400 overlaps with the vibrating part 21 over a large area. The overlapping area of ​​the vibrating part 21 and the opening 400 is connected to the external space; therefore, even if the vibrating part 21 vibrates, it does not substantially contribute to the volume change of the pump chamber 100. That is, in the structure of this invention, the vibration of the vibrating part 21 at its center (the portion where the vibrating part 21 overlaps with the opening 400) has almost no effect on the volume change of the pump chamber 100. Therefore, in the structure of this invention, the volume change of the pump chamber 100 depends on the volume change at the outer periphery of the vibrating part 21 (the portion where the vibrating part 21 overlaps with the second main plate 40).

[0058] For example, when the vibrating part 21 is displaced to approach the opening 400 of the second main board 40 at its center, the outer peripheral end of the vibrating part 21 is displaced to move away from the second main board 40. In this case, the volume of the pump chamber 100 increases as the volume at the outer peripheral end of the vibrating part 21 increases.

[0059] On the other hand, when the vibrating part 21 is displaced away from the opening 400 of the second main board 40 at its center, the outer peripheral end of the vibrating part 21 is displaced to approach the second main board 40. In this case, the volume of the pump chamber 100 decreases as the volume at the outer peripheral end of the vibrating part 21 decreases.

[0060] Thus, according to the structure of the present invention, the cancellation of volume changes at the center and outer periphery of the vibrating part 21 under various vibration states can be suppressed. Therefore, the fluid control device 10 can increase the volume change rate. Furthermore, by increasing the volume change rate, the fluid control device 10 can increase the intermediate flow rate.

[0061] At this time, when the opening area S400 of the opening 400 is too close to the area S21 of the vibrating part 21, the volume of the outer peripheral end portion that contributes to volume change becomes smaller. Therefore, as Figure 4 As shown in (A), when the opening area S400 of the opening 400 is too close to the area S21 of the vibrating part 21, the volume change rate decreases. Therefore, as... Figure 4 As shown in (B), when the opening area S400 of the opening 400 is too close to the area S21 of the vibrating part 21, the intermediate flow rate also decreases.

[0062] Therefore, the fluid control device 10 sets the opening area S400 of the opening 400 relative to the area S21 of the vibrating part 21 to a predetermined minimum value APL (for example, in...). Figure 4 (A) is 10%) up to the specified maximum value of APH (e.g., in Figure 4 (In case (A) it is 75%). Therefore, the fluid control device 10 is able to achieve the desired value (e.g., in...). Figure 4 (A) is a volume change rate of 60% or more.

[0063] Then, by achieving such a volume change rate, the fluid control device 10 can achieve an intermediate flow rate above the desired baseline value FRS. As an example, if... Figure 4 (A) Figure 4 In case (B), an intermediate flow rate of 2.0 L / min or higher can be achieved by making the volume change rate 60% or more (making the opening ratio in the range of 10% to 75%).

[0064] Figure 5 (A) is a graph showing the relationship between the opening ratio and the volume change. Figure 5 (B) is a graph showing the relationship between opening ratio and pressure. Pressure is the discharge pressure of the fluid. Figure 5 In (A), the volume variation of the existing structure is recorded as 1.0 (comparison reference value). Furthermore, in the existing structure, the opposing plate (a plate synonymous with the second main plate of this application) has a small-diameter opening with an opening ratio of 0.3%.

[0065] like Figure 5 As shown in (A), by using the structure of this invention, the volume change is approximately 4.0 times greater than that of existing structures. Correspondingly, the intermediate flow rate also increases significantly. Furthermore, at this time, as... Figure 5 As shown in (B), when using the structure of the present invention, even if the opening is enlarged, there will be no decrease in pressure.

[0066] Therefore, the fluid control device 10 can increase the volume change of the pump chamber 100, thereby obtaining a large flow rate. Furthermore, the fluid control device 10 can suppress pressure drops. In other words, the fluid control device 10 can significantly improve the basic characteristics of the pump.

[0067] Furthermore, in this fluid control device 10, the reference value FRS, which serves as the intermediate flow rate, is set to 2.0 L / min. However, the reference value FRS can be changed according to the specifications of the fluid control device 10. Moreover, by changing the reference value FRS, the minimum value of the volume change rate can also be changed, thereby allowing for a change in the range of the opening ratio.

[0068] Furthermore, in the above structure, the center C400 of the opening 400 is shown to coincide with the center C21 of the vibrating part 21, and both the opening 400 and the vibrating part 21 are circular, i.e., have completely similar shapes. However, as mentioned above, the center C400 of the opening 400 and the center C21 of the vibrating part 21 may not coincide completely, and the opening 400 and the vibrating part 21 may not both be circular, i.e., have completely similar shapes.

[0069] Figure 6 This is a top view showing the adjustable range of the outer periphery of the opening 400. Figure 7 (A) Figure 7 (B) are top views showing an example of the location and shape of the opening 400.

[0070] like Figure 6 As shown, the setting range ZNce of the outer periphery of the opening 400 is defined by an annular region between the minimum side boundary CEmn and the maximum side boundary CEmx of the circle. The center of the setting range ZNce coincides with the center C21 of the vibrating part 21 when viewed from above. The centers of the minimum side boundary CEmn and the maximum side boundary CEmx also coincide with the center C21 of the vibrating part 21 when viewed from above. The minimum side boundary CEmn is set as a circle representing 10% of the area of ​​the vibrating part 21. The maximum side boundary CEmx is set as a circle representing 75% of the area of ​​the vibrating part 21.

[0071] The opening 400 is set so that its outer perimeter enters the set range ZNce. For example, in Figure 7 In case (A), the opening 400 is circular, but the center C400 of the opening 400 does not coincide with the center C21 of the vibrating part 21. However, the outer periphery CE400 of the opening 400 enters the set range ZNce. Figure 7 In case (B), the center C400 of the opening 400 coincides with the center C21 of the vibrating part 21, but the opening 400 is a regular hexagon. However, the outer periphery CE400 of the opening 400 enters the set range ZNce.

[0072] Even with this structure, the fluid control device 10 can still achieve the aforementioned effects. Furthermore, even if the center C400 of the opening 400 is not aligned with the center C21 of the vibrating part 21, and the opening 400 and the vibrating part 21 are not similar in shape, the fluid control device 10 can still achieve the aforementioned effects by bringing the outer periphery CE400 of the opening 400 into the set range ZNce. In this case, the vibrating part 21 and the opening 400 are preferably symmetrical in a top view, and more preferably a regular polygon or circle with a large number of angles.

[0073] In addition, Figure 2The diagram shows the outer periphery of the opening 400 aligned with the vibrating node Nv, which has an antinode Mv at the center of the vibrating section 21. However, the positional relationship between the outer periphery of the opening 400 and the vibrating node Nv is not limited to this; the outer periphery of the opening 400 only needs to be within the aforementioned range. However, by making the outer periphery of the opening 400 approximately aligned with the vibrating node Nv, the portion of the vibrating section 21 that is outermost than the node Nv can contribute more effectively to volume change.

[0074] (Second Implementation)

[0075] The fluid control device according to the second embodiment of the present invention will be described with reference to the accompanying drawings. Figure 8 This is a side view showing an example of the structure of the fluid control device 10A according to the second embodiment.

[0076] like Figure 8 As shown, the fluid control device 10A according to the second embodiment differs from the fluid control device 10 according to the first embodiment in that the second main board and the connecting member are integrally formed. The other structures of the fluid control device 10A are the same as those of the fluid control device 10, and the description of the same parts is omitted.

[0077] The fluid control device 10A includes a second main board 40A. The second main board 40A has a recess on the side of the first main board 20, which overlaps with the shape of the vibration part 21, the plurality of support parts 23, and the plurality of openings 230. The outer periphery of the second main board 40A surrounding the recess is connected to the first main board 20.

[0078] In this structure, the connecting parts of the fluid control device 10A can be omitted. Therefore, the fluid control device 10A can achieve the same effect as the fluid control device 10, while reducing the number of constituent elements. Alternatively, the connecting parts of the fluid control device 10 can be added to the structure of the fluid control device 10A.

[0079] (Third Implementation)

[0080] The fluid control device according to the third embodiment of the present invention will be described with reference to the accompanying drawings. Figure 9 This is a side view showing an example of the structure of the fluid control device 10B according to the third embodiment.

[0081] like Figure 9 As shown, the fluid control device 10B according to the third embodiment differs from the fluid control device 10 according to the first embodiment in that the first main board and the connecting member are integrally formed. The other structures of the fluid control device 10B are the same as those of the fluid control device 10, and the description of the same parts is omitted.

[0082] The fluid control device 10B includes a first main board 20B. The first main board 20B includes an outer frame portion 22B. The outer frame portion 22B is thicker than the vibration portion 21 and the plurality of support portions 23, and is shaped to protrude toward the second main board 40. The outer frame portion 22B is connected to the second main board 40.

[0083] In this structure, the connecting parts of the fluid control device 10B can be omitted. Therefore, the fluid control device 10B can achieve the same effect as the fluid control device 10, while reducing the number of constituent elements. Furthermore, the connecting parts of the fluid control device 10 can be added to the structure of the fluid control device 10B. Additionally, the structure of the second main board 40A of the fluid control device 10A can be combined with the structure of the first main board 20B of the fluid control device 10B, and further connecting parts can be added thereto.

[0084] Furthermore, in the structure of the fluid control device 10 and the structure of the additional connecting parts of the fluid control devices 10A and 10B, the height of the pump chamber 100 can be achieved with high precision by using the connecting parts. As a result, the volume change rate and volume change amount can be set with high precision.

[0085] (Fourth Implementation)

[0086] The fluid control device according to the fourth embodiment of the present invention will be described with reference to the accompanying drawings. Figure 10 This is a side view showing an example of the structure of the fluid control device 10C according to the fourth embodiment.

[0087] like Figure 10 As shown, the fluid control device 10C according to the fourth embodiment differs from the fluid control device 10 according to the first embodiment in the shape of the vibrating part on the first main board. The other structures of the fluid control device 10C are the same as those of the fluid control device 10, and descriptions of identical parts are omitted.

[0088] The fluid control device 10C includes a first main board 20C. The first main board 20C includes a vibrating part 21C. The vibrating part 21C includes a central portion 210CC and a peripheral portion 210CP. The planar area of ​​the central portion 210CC is smaller than that of the vibrating part 21C, and includes the center of the vibrating part 21C. The peripheral portion 210CP is configured to surround the outer periphery of the central portion 210CC. The central portion 210CC is thicker than the peripheral portion 210CP.

[0089] With this structure, the fluid control device 10C can increase the vibration at the peripheral portion 210CP on the outer periphery side of the vibrating part 21C without increasing the voltage of the driving vibration of the drive body 30. As a result, the fluid control device 10C can increase the volume change rate and volume change amount, and further increase the flow rate.

[0090] Furthermore, it is preferable to have a structure in which the area of ​​the central portion 210CC is larger than that of the opening 400. In the fluid control device 10C, when fluid flows in through the opening 400, the vibrating part 21C is pushed by the fluid. When pushed by the fluid, the vibration of the vibrating part 21C is suppressed, and it cannot achieve a large displacement. The part pushed by the fluid is the portion where the opening 400 and the vibrating part 21C overlap when viewed from above. Therefore, by making the overlapping portion thicker, the vibrating part 21C can achieve a large displacement without being affected by the pushing of the fluid.

[0091] Furthermore, as described above, it is preferable that the vibrating portion 21C protrudes to the side opposite to the pump chamber 100 side. With this structure, it is possible to prevent the central portion 210CC from contacting the second main plate 40 during vibration of the vibrating portion 21C. More preferably, the main surface 201 of the vibrating portion 21C on the pump chamber 100 side is flush with both the central portion 210CC and the peripheral portion 210CP. In this structure, since the main surface 201 of the vibrating portion 21C is flat, it is possible to prevent the central portion 210CC from contacting the second main plate 40 during vibration of the vibrating portion 21C.

[0092] (Fifth Implementation)

[0093] The fluid control device according to the fifth embodiment of the present invention will be described with reference to the accompanying drawings. Figure 11 This is a side view showing an example of the structure of the fluid control device 10D according to the fifth embodiment.

[0094] like Figure 11 As shown, the fluid control device 10D according to the fifth embodiment differs from the fluid control device 10 according to the first embodiment in the shape of the vibrating part on the first main board. The other structures of the fluid control device 10D are the same as those of the fluid control device 10, and descriptions of identical parts are omitted.

[0095] The fluid control device 10D includes a first main board 20D. The first main board 20D includes a vibrating section 21D. The vibrating section 21D includes a central portion 210DC and a peripheral portion 210DP. The planar area of ​​the central portion 210DC is smaller than that of the vibrating section 21D, and includes the center of the vibrating section 21D. The peripheral portion 210DP is configured to surround the outer periphery of the central portion 210DC. The central portion 210DC is thicker than the peripheral portion 210DP. On the pump chamber 100 side of the vibrating section 21D (the main surface 201 of the vibrating section 21D), it protrudes beyond the peripheral portion 210DP. Furthermore, on the main surface 202 opposite to the pump chamber 100 side, the central portion 210DC and the peripheral portion 210DP are flush.

[0096] With this structure, the fluid control device 10D can increase the vibration at the peripheral portion 210DP on the outer periphery side of the vibrating part 21D without increasing the voltage of the driving vibration of the drive body 30. As a result, the fluid control device 10D can increase the volume change rate and volume change amount, and further increase the flow rate.

[0097] Furthermore, in the fluid control device 10D, it is preferable that the central portion 210DC of the vibrating part 21D overlaps with the opening 400 when viewed from above, and preferably the area of ​​the central portion 210DC is smaller than the area of ​​the opening 400. This allows for more reliable suppression of contact between the central portion 210DC and the second main board 40 during vibration of the vibrating part 21D.

[0098] Furthermore, in the fluid control device 10D, the surface of the vibrating part 21D on one side of the drive body 30 is flat. Therefore, compared with the fluid control device 10C, the fluid control device 10D can increase the degree of freedom in the shape of the drive body 30.

[0099] (Sixth Implementation Method)

[0100] The fluid control device according to the sixth embodiment of the present invention will be described with reference to the accompanying drawings. Figure 12 This is a side view showing an example of the structure of the fluid control device 10E according to the sixth embodiment.

[0101] like Figure 12 As shown, the fluid control device 10E according to the sixth embodiment differs from the fluid control device 10C according to the fourth embodiment in that it has an additional plate 24. The other structures of the fluid control device 10E are the same as those of the fluid control device 10C, and descriptions of identical parts are omitted. Furthermore, the first main board 20E has the same structure as the first main board 20C.

[0102] The fluid control device 10E includes a flat plate 24. The flat plate 24 is disposed on the side of the drive body 30 opposite to the surface that abuts against the vibrating part 21E.

[0103] With this structure, the fluid control device 10E can further increase the vibration of the outer peripheral end of the vibrating part 21E without increasing the voltage of the driving vibration of the drive body 30. As a result, the fluid control device 10E can further increase the volume change rate and volume change amount, and further increase the flow rate.

[0104] (Seventh Implementation)

[0105] The fluid control device according to the seventh embodiment of the present invention will be described with reference to the accompanying drawings. Figure 13 (A) Figure 13(B) is a side view showing an example of the structure of the fluid control devices 10F1 and 10F2 according to the seventh embodiment.

[0106] like Figure 13 (A) Figure 13 As shown in (B), in the fluid control devices 10F1 and 10F2 according to the seventh embodiment, the shape of the second main board 40F is different from that of the fluid control device 10 according to the first embodiment. The other structures of the fluid control devices 10F1 and 10F2 are the same as those of the fluid control device 10, and the description of the same parts is omitted.

[0107] like Figure 13 (A) Figure 13 As shown in (B), the fluid control devices 10F1 and 10F2 include a second main board 40F. The second main board 40F has a recess 41. The recess 41 is a shape recessed from one of the main surfaces of the second main board 40F. The planar area of ​​the recess 41 is larger than the planar area of ​​the opening 400. The opening 400 is formed to penetrate the bottom of the recess 41.

[0108] like Figure 13 As shown in (A), in the fluid control device 10F1, a recess 41 is formed on the main surface 401 side of the second main board 40F, and the recess 41 becomes the pump chamber 100 side (vibration part 21 side).

[0109] like Figure 13 As shown in (B), in the fluid control device 10F2, a recess 41 is formed on the main surface 402 side of the second main board 40F, and the recess 41 becomes the external space side.

[0110] Through these structures, in the fluid control devices 10F1 and 10F2, the second main plate 40F becomes thinner in the portion with the recess 41. As a result, the second main plate 40F vibrates together with the vibrating part 21. At this time, by appropriately setting the shape of the recess 41, the vibration frequencies of the vibrating part 21 and the second main plate 40F can be made approximately the same, forming an out-of-phase vibration. Consequently, in the fluid control devices 10F1 and 10F2, the volume change rate and volume change amount can be increased, and the intermediate flow rate can be increased.

[0111] In addition, Figure 13 In the structure shown in (B), for example, by making the area of ​​the recess 41 greater than the area of ​​the vibrating part 21, it is possible to more reliably suppress the contact between the vibrating part 21 and the second main board 40F when the vibrating part 21 and the second main board 40F vibrate.

[0112] Furthermore, in the fluid control devices 10F1 and 10F2 described above, a recess 41 is shown. However, in the fluid control devices 10F1 and 10F2, it is sufficient that the portion of the second main board 40F adjacent to the opening 400 is thinner than the portion of the second main board 40F that overlaps with the outer frame portion 22 when viewed from above.

[0113] (Eighth Implementation Method)

[0114] The fluid control device according to the eighth embodiment of the present invention will be described with reference to the accompanying drawings. Figure 14 This is a side view showing an example of the structure of the fluid control device 10G according to the eighth embodiment.

[0115] like Figure 14 As shown, the fluid control device 10G according to the eighth embodiment differs from the fluid control device 10 according to the first embodiment in that it includes a valve component. The other structures of the fluid control device 10G are the same as those of the fluid control device 10, and descriptions of identical parts are omitted. Furthermore, it is shown that the fluid control device 10G operates in a manner that draws in fluid from the opening 400 and discharges the fluid from the plurality of openings 230.

[0116] like Figure 14 As shown, the fluid control device 10G includes a valve diaphragm 61 and a fixing component 62.

[0117] The valve diaphragm 61 is made of a flexible material. The valve diaphragm 61 only needs to have the elasticity to deform in response to the fluid flowing through the pump chamber 100. The valve diaphragm 61 is annular and has a specified width (length in the radial direction). The outer periphery of the valve diaphragm 61 overlaps with the second main plate 40 when viewed from above.

[0118] The fixing member 62 is made of an adhesive material, such as double-sided tape. The fixing member 62 is annular and has a predetermined width (length in the radial direction). The width of the fixing member 62 is smaller than the width of the valve diaphragm 61. The outer diameter of the fixing member 62 is smaller than the outer diameter of the valve diaphragm 61.

[0119] The fixing member 62 fixes the valve diaphragm 61 to the main surface 201 of the vibrating part 21. At this time, the center of the fixing member 62 is approximately aligned with the center of the vibrating part 21. In addition, the fixing member 62 fixes the inner peripheral end of the valve diaphragm 61, but does not fix the outer peripheral end.

[0120] According to this structure, when fluid flows in from the opening 400, the valve diaphragm 61 bends towards the vibrating part 21, without obstructing the flow of fluid. Therefore, the fluid flows through the multiple openings 230 and is discharged into the external space. On the other hand, when fluid flows in from the multiple openings 230, the valve diaphragm 61 bends towards the second main plate 40, abutting against the main surface 401 of the second main plate 40. Therefore, the flow of fluid within the pump chamber 100 is stopped, and fluid is not delivered to the opening 400.

[0121] As a result, the fluid control device 10G can deliver fluid in one direction more reliably.

[0122] Furthermore, in the structure of the fluid control device 10G, the position of the end of the outer peripheral side of the fixing member 62 is preferred. Figure 14 The position shown by the dashed line is located further outward than the outer periphery of the opening 400 (not overlapping with the opening 400). As a result, the valve diaphragm 61 abuts more reliably against the second main plate 40.

[0123] Furthermore, in the fluid control device 10G, a case is shown where fluid is drawn in from the opening 400 and discharged from the multiple openings 230. However, the valve-equipped structure of this embodiment can also be applied to a case where fluid is drawn in from the multiple openings 230 and discharged from the opening 400. In this case, the valve diaphragm 61 is fixed at its outer peripheral end and not at its inner peripheral end.

[0124] The structures of the above-described embodiments can be appropriately combined to achieve the corresponding effects of each combination.

[0125] Explanation of reference numerals in the attached figures

[0126] 10, 10A, 10B, 10C, 10D, 10E, 10F1, 10F2, 10G... Fluid control device; 11... Frame; 20, 20B, 20C, 20D, 20E... First main board; 21, 21C, 21D, 21E... Vibration part; 22, 22B... Outer frame part; 23... Support part; 24... Flat plate; 30... Drive body; 40, 40A, 40F... Second main board; 41... Recess; 50... Connecting part; 61... Valve diaphragm; 62... Fixing part; 100... Pump chamber; 201, 202... Main surface; 210CC, 210DC... Central part; 210CP, 210DP... Peripheral part; 230, 400... Opening; 401, 402... Main surface.

Claims

1. A fluid control device, wherein, have: The frame, using a first main board and a second main board facing each other to form the pump chamber; and A driver, configured on the first motherboard, causes the first motherboard to vibrate. The first motherboard includes: a vibration section for the drive body to be disposed, and having a rotationally symmetrical shape when viewed from above; an outer frame section located outside the vibration section; and a support section connecting the vibration section and the outer frame section. The first opening is formed by the vibration part, the outer frame part, and the support part, allowing the pump chamber to communicate with the outside of the first main board side. The second main board has a second opening that connects the pump chamber to the outside of the second main board side, and it exhibits rotational symmetry when viewed from above. The second opening is configured to overlap with the center of the vibrating part when viewed from above, aligning with the center of the first and second motherboards. The opening area of ​​the second opening is 10% to 75% of the area of ​​the vibrating part. The first opening is located between the vibrating part and the outer frame part. The vibrating part has a central portion that includes the center when viewed from above, and a peripheral portion that surrounds the central portion. The central portion has a shape that protrudes towards the pump chamber relative to the peripheral portion. When viewed from above, the central portion retracts into the second opening.

2. The fluid control device according to claim 1, wherein, The frame has a connecting component disposed between the outer frame and the second motherboard.

3. The fluid control device according to claim 1 or 2, wherein, The central portion is thicker than the peripheral portion.

4. The fluid control device according to claim 3, wherein, When viewed from above, the outer periphery of the central portion overlaps with the portion of the second motherboard that does not have the second opening.

5. The fluid control device according to claim 4, wherein, The central portion is shaped to protrude to the side opposite to the pump chamber side relative to the peripheral portion.

6. The fluid control device according to claim 1 or 2, wherein, The fluid control device includes a flat plate mounted on the drive body.

7. The fluid control device according to claim 1 or 2, wherein, In the second motherboard, the portion adjacent to the second opening is thinner than the portion overlapping the outer frame when the second motherboard is viewed from above.

8. The fluid control device according to claim 7, wherein, The thin portion is a shape that is recessed towards the pump chamber side in the second main board.

9. The fluid control device according to claim 1 or 2, wherein, The fluid control device includes a valve component disposed between the first main board and the second main board in the pump chamber.

10. The fluid control device according to claim 9, wherein, The valve component includes: Annular valve diaphragm; and A fixing component secures the outer peripheral end of the valve diaphragm to the first main board or the second main board. The end of the inner circumferential side of the fixing component does not overlap with the second opening.

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