Substrate holding robot and substrate handling robot

Abstract

The substrate holding robot (1) includes: a frame (31); a blade (32) supporting the substrate (W); a mounting member (33) for supporting the blade and mounting the blade to the frame; and a tilt adjustment mechanism (34) that can adjust the tilt of the blade relative to the horizontal direction when viewed from the side by adjusting the tilt of the mounting member relative to the frame.

Description

Technical Field

[0001] This invention relates to a substrate holding manipulator and a substrate handling robot, specifically a substrate holding manipulator and a substrate handling robot having blades that support the substrate. Background Technology

[0002] Previously, it was known that there were substrate holding robots with blades that support substrates. For example, such a robot was disclosed in Japanese Patent Application Publication No. 2013-69914.

[0003] Japanese Patent Application Publication No. 2013-69914 discloses a substrate handling robot (substrate holding robot) for handling substrates. This substrate handling robot includes a robot body (blade) that supports the substrate. The robot body supports and handles substrates, for example, those housed in a substrate storage container corresponding to a SEMI (Semiconductor Equipment and Materials International) specification FOUP (Front Opening Unified Pod).

[0004] Furthermore, although not explicitly described in Japanese Patent Application Publication No. 2013-69914, in conventional substrate storage containers as described in that publication, substrates are stored in a manner parallel to the horizontal direction when viewed from the side. In this case, in conventional substrate handling robots as described in Japanese Patent Application Publication No. 2013-69914, the main body of the robot is configured to be parallel to the horizontal direction when viewed from the side, in a manner corresponding to the substrate stored in the substrate storage container.

[0005] Patent Document 1: Japanese Patent Application Publication No. 2013-69914

[0006] However, in the aforementioned conventional substrate handling robots, when the substrate stored in the substrate storage container (accommodation container) is tilted relative to the horizontal direction when viewed from the side, there is a problem that it is difficult to adjust the tilt of the robot body (blade) supporting the substrate relative to the horizontal direction when viewed from the side according to the tilt of the substrate relative to the horizontal direction. Summary of the Invention

[0007] The objective of this invention is to provide a substrate holding manipulator and a substrate handling robot that can easily adjust the tilt of the blades supporting the substrate relative to the horizontal direction when viewed from the side, even when the substrate contained in the container is tilted relative to the horizontal direction when viewed from the side.

[0008] The substrate holding robot based on the first aspect of the invention comprises: a frame; a blade that supports the substrate; a mounting member for supporting the blade and mounting the blade to the frame; and a tilt adjustment mechanism that adjusts the tilt of the mounting member relative to the frame, thereby enabling adjustment of the tilt of the blade relative to the horizontal direction when viewed from the side.

[0009] The substrate handling robot based on the second aspect of the invention has a substrate holding manipulator and an arm for moving the substrate holding manipulator. The substrate holding manipulator includes: a frame; a blade that supports the substrate; a mounting member for supporting the blade and mounting the blade to the frame; and a tilt adjustment mechanism that adjusts the tilt of the blade relative to the horizontal direction when viewed from the side by adjusting the tilt of the mounting member relative to the frame.

[0010] According to the present invention, as described above, by providing a tilt adjustment mechanism that can adjust the tilt of the blade relative to the horizontal direction when viewed from the side by adjusting the tilt of the mounting component relative to the frame, even when the substrate housed in the housing (such as a front-opening wafer cassette) is tilted relative to the horizontal direction when viewed from the side, the tilt of the blade supporting the substrate relative to the horizontal direction can be easily adjusted based on the tilt of the substrate relative to the horizontal direction. Furthermore, even when the substrate housed in the housing is tilted relative to the horizontal direction when viewed from the side due to the tilt of the housing itself, the tilt of the blade supporting the substrate relative to the horizontal direction can be easily adjusted based on the tilt of the substrate relative to the horizontal direction. Additionally, even when the blade is tilted relative to the horizontal direction due to deflection caused by the weight of the blade itself and the weight of the substrate when the blade is held against the substrate, the tilt of the blade supporting the substrate relative to the horizontal direction can be easily adjusted based on the tilt of the substrate relative to the horizontal direction. Attached Figure Description

[0011] Figure 1 This is a diagram showing the structure of a substrate handling robot based on one embodiment of the present invention.

[0012] Figure 2 This is a perspective view showing the structure of a substrate holding robot based on one embodiment of the present invention.

[0013] Figure 3 This is a top view showing the structure of a substrate holding robot based on one embodiment of the present invention.

[0014] Figure 4 This is a side view showing the structure of a substrate holding robot based on one embodiment of the present invention.

[0015] Figure 5 (A) and (B) are diagrams illustrating the adjustment of the blade tilt according to one embodiment of the present invention. Detailed Implementation

[0016] Hereinafter, an embodiment of the present invention, which is embodied in the accompanying drawings, will be described.

[0017] Reference Figures 1-5 The structure of the substrate handling robot 100 based on this embodiment will be described.

[0018] like Figure 1 As shown, the substrate handling robot 100 includes a substrate holding manipulator 1 and an arm 2 for moving the substrate holding manipulator 1. Figures 2-5 As shown, the substrate holding robot 1 includes a frame 31, blades 32 supporting the substrate (semiconductor wafer) W, a mounting member 33 for supporting the blades 32 and mounting the blades 32 to the frame 31, and a tilt adjustment mechanism 34 that can adjust the tilt of the blades 32 relative to the horizontal direction when viewed from the side by adjusting the tilt of the mounting member 33 relative to the frame 31.

[0019] According to this embodiment, as described above, by providing a tilt adjustment mechanism 34 that can adjust the tilt of the blade 32 relative to the horizontal direction when viewed from the side by adjusting the tilt of the mounting member 33 relative to the frame 31, even when the substrate W housed in the housing container (such as a front-opening wafer cassette) is tilted relative to the horizontal direction when viewed from the side, the tilt of the blade 32 supporting the substrate W can be easily adjusted according to the tilt of the substrate W relative to the horizontal direction. Furthermore, even when the substrate W housed in the housing container is tilted relative to the horizontal direction when viewed from the side due to the tilt of the housing container itself, the tilt of the blade 32 supporting the substrate W can be easily adjusted according to the tilt of the substrate W relative to the horizontal direction. Additionally, even when the blade 32 is deflected due to its own weight and the weight of the substrate W when the blade 32 holds the substrate W, causing the blade 32 to tilt relative to the horizontal direction when viewed from the side, the tilt of the blade 32 supporting the substrate W can be easily adjusted according to the tilt of the substrate W relative to the horizontal direction.

[0020] like Figures 2-5 As shown, the substrate holding robot 1 includes a frame 31, blades 32, mounting components 33, and tilt adjustment mechanism 34.

[0021] like Figures 3-5As shown, the tilt adjustment mechanism 34 includes a tilt adjustment pin 34a. The tilt adjustment pin 34a is configured to: insert into the mounting member 33, supporting the mounting member 33 in such a way that the mounting member 33 can rotate about a predetermined rotation axis C1 extending laterally (X direction) orthogonal to the front-rear direction (Y direction) of the arrangement of the frame 31 and the blades 32 in the horizontal direction, and extending laterally (X direction). Furthermore, in Figure 5 In order to facilitate understanding, the adjustment of the tilt of blade 32 is exaggeratedly illustrated.

[0022] Mounting components 33 include a pair of mounting components 33 for mounting one side and the other side of the base end 32c of the blade 32 to the frame 31, respectively. Tilt adjustment pins 34a include a pair of tilt adjustment pins 34a corresponding to the pair of mounting components 33. The tilt adjustment mechanism 34 adjusts the tilt of the blade 32 relative to the horizontal direction when viewed from the side by rotating the pair of mounting components 33 about a predetermined axis of rotation C1 with the pair of tilt adjustment pins 34a as the center of rotation.

[0023] The tilt adjustment pin 34a is configured to be supported on the frame 31 and protrude from the side of the frame 31 to insert into the mounting component 33.

[0024] When the tilt adjustment mechanism 34 adjusts the tilt of the mounting member 33 by rotating the mounting member 33 about the tilt adjustment pin 34a around a predetermined rotation axis C1, the mounting member 33 is fastened to the frame 31 by the fastening member 35, thereby adjusting the tilt of the blade 32 relative to the horizontal direction when viewed from the side. The fastening member 35 is configured to extend parallel to the predetermined rotation axis C1 and be mounted to the frame 31 from the side (X direction) via the mounting member 33.

[0025] The blades 32 include multiple (4) blades 32 that support the base plate W. The mounting member 33 supports the multiple blades 32 together. The tilt adjustment mechanism 34 can adjust the tilt of the multiple blades 32 relative to the horizontal direction when viewed from the side by adjusting the tilt of the mounting member 33 relative to the frame 31.

[0026] Multiple blades 32 are arranged at a predetermined spacing in a direction perpendicular to the main surface 32a of the blades 32 (Z direction). The tilt adjustment mechanism 34 can adjust the tilt of the multiple blades 32 relative to the horizontal direction when viewed from the side, while maintaining the spacing between the multiple blades 32 in the direction perpendicular to the main surface 32a of the blades 32 (Z direction).

[0027] Mounting component 33 is mounted from the side of frame 31.

[0028] like Figure 1As shown, arm 2 is a horizontal multi-joint robotic arm. Arm 2 includes a first arm 2a and a second arm 2b. The first arm 2a is configured to rotate relative to the base 5 (described later) with one end as the center of rotation. Specifically, one end of the first arm 2a is rotatably connected to the base 5 via a first joint. The second arm 2b is configured to rotate relative to the first arm 2a with one end as the center of rotation. Specifically, one end of the second arm 2b is rotatably connected to the other end of the first arm 2a via a second joint. In addition, a base plate holding manipulator 1 is rotatably connected to the other end of the second arm 2b via a third joint. Each of the first, second, and third joints is provided with a drive mechanism including a servo motor as a drive source for rotation, a rotational position sensor for detecting the rotational position of the output shaft of the servo motor, and a power transmission mechanism for transmitting the output of the servo motor to the joint.

[0029] In addition, the substrate handling robot 100 also includes a base 5 on which the arm 2 is mounted, and an arm lifting mechanism 6 on which the base 5 is mounted. The base 5 is configured such that one end is connected to one end of the first arm 2a, and the other end is connected to the arm lifting mechanism 6. The arm lifting mechanism 6 is configured to lift the arm 2 by lifting the base 5. The arm lifting mechanism 6 includes a servo motor as a drive source for lifting, a rotational position sensor for detecting the rotational position of the output shaft of the servo motor, and a power transmission mechanism for transmitting the output of the servo motor to the base 5 (arm 2).

[0030] like Figure 2 As shown, the substrate holding robot 1 is provided with multiple (4) blades 32. That is, the substrate holding robot 1 is configured to transport (hold) multiple (4) substrates W.

[0031] like Figure 2 and Figure 3 As shown, the substrate holding robot 1 includes a frame 31, a blade 32, and a mounting member 33. The frame 31 is a support for the blade 32. The frame 31 includes a pair of sidewall portions 31a and a base end portion 31b connecting the pair of sidewall portions 31a. The pair of sidewall portions 31a are arranged separately with their wall surfaces facing each other in a direction parallel to the direction in which the pair of front support portions 321 are arranged (X direction). In addition, the pair of sidewall portions 31a are arranged to extend in a direction orthogonal to the direction in which the pair of front support portions 321 are arranged and parallel to the main surface 32a of the blade 32 (Y direction). The base end portion 31b connects the respective base ends (parts on the Y2 direction side) of the pair of sidewall portions 31a. The base end portion 31b has a shape that bends into a convex shape towards the base end side (Y2 direction side). When viewed from a direction perpendicular to the main surface 32a of the blade 32, the pair of sidewall portions 31a and the base end portion 31b are arranged in a U-shape.

[0032] The blade 32 is a thin plate-shaped support plate supporting the base plate W. The blade 32 has a front support portion 321 provided on the front end portion 32b side (Y1 direction side) and a rear support portion 322 provided on the base end portion 32c side (Y2 direction side). Furthermore, the blade 32 has a bifurcated shape on the front end portion 32b side. In the blade 32, a pair of front support portions 321 are separately provided in each bifurcated portion. The pair of front support portions 321 have multiple (two) support surfaces with different heights. Additionally, the pair of rear support portions 322 have support surfaces at approximately the same height as the support surfaces on the lower side (Z2 direction side) of the pair of front support portions 321. Furthermore, "height" refers to the distance from the main surface 32a of the blade 32 in the direction perpendicular to the main surface 32a (Z direction).

[0033] A pair of front support portions 321 and a pair of rear support portions 322 are provided on the main surface 32a of the blade 32. Each support surface of the pair of front support portions 321 and the pair of rear support portions 322 is configured to support the back side (Z2 direction side) of the outer peripheral portion of the generally circular substrate W from the bottom side.

[0034] Mounting member 33 is mounted to the side wall portion 31a of frame 31 from the side. Specifically, the X1-direction side mounting member 33 is mounted to the front end portion of the X1-direction side wall portion 31a of frame 31 from the outer side (X1-direction side). Furthermore, the X1-direction side mounting member 33 is fixed to the front end portion of the X1-direction side wall portion 31a of frame 31 by the X1-direction side fastening member 35. Similarly, the X2-direction side mounting member 33 is mounted to the front end portion of the X2-direction side wall portion 31a of frame 31 from the outer side (X2-direction side). Furthermore, the X2-direction side mounting member 33 is fixed to the front end portion of the X2-direction side wall portion 31a of frame 31 by the X2-direction side fastening member 35. The fastening member 35 is inserted into the mounting member 33 in the X direction and fastened to the fastening hole of the side wall portion 31a of frame 31.

[0035] In addition, such as Figure 4 and Figure 5As shown, the mounting component 33 has plate-shaped support portions 33a, 33b, and 33c for supporting the blade 32. The support portions 33a, 33b, and 33c are arranged in a direction perpendicular to the main surface 31c of the blade 32 (Z direction). Furthermore, the support portions 33a, 33b, and 33c are configured to extend from the frame 31 side (Y2 direction side) towards the front end 32b side (Y1 direction side) of the blade 32. Additionally, the support portion 33a supports the blade (first layer blade) 32 at the upper end (Z1 direction side) on its upper surface side. The support portion 33b also supports the intermediate blades (second and third layer blades) 32. The support portion 33b supports the blade 32 on both its upper and lower surfaces. The support portion 33c supports the blade (fourth layer blade) at the lower end (Z2 direction side) on its lower surface side.

[0036] When the tilt is adjusted by the tilt adjustment mechanism 34, with the fastening member 35 loosened, the mounting member 33 is rotated around the rotation axis C1 with the tilt adjustment pin 34a as the rotation center. This causes the multiple blades 32 supported on the support portions 33a, 33b, and 33c of the mounting member 33 to rotate around the rotation axis C1 while maintaining the spacing between the multiple blades 32. As a result, the tilt of the multiple blades 32 relative to the horizontal direction is adjusted simultaneously when viewed from the side. Furthermore, the tilt of the multiple blades 32 relative to the horizontal direction when viewed from the side is fixed by tightening the fastening member 35.

[0037] In addition, the substrate holding robot 1 also includes a movable support unit 36 ​​for supporting the substrate W and moving it forward and backward, and a first movable pressing unit 37 and a second movable pressing unit 38 for pressing the substrate W and moving it forward and backward. The movable support unit 36 ​​has a pair of support members 36a supporting the substrate W, and a cylinder 36b serving as an actuator for moving the pair of support members 36a forward and backward in the Y direction. The movable support unit 36 ​​is configured such that the pair of support members 36a are moved forward in the Y1 direction by the cylinder 36b to be positioned in a support position supporting the substrate W. In addition, the movable support unit 36 ​​is configured such that the pair of support members 36a are moved backward in the Y2 direction by the cylinder 36b to be positioned in a retracted position not supporting the substrate W. Furthermore, the pair of support members 36a have a support surface set at approximately the same height as the support surface on the upper side (Z1 direction side) of the pair of front support portions 321. Each support surface of the pair of support members 36a is configured to support the back side (Z2 direction side) of the outer periphery of the generally circular substrate W from below.

[0038] The first movable pressing unit 37 includes a pair of pressing members 37a that press the substrate W, and a cylinder 37b that serves as an actuator for moving the pair of pressing members 37a forward and backward in the Y direction. The first movable pressing unit 37 is configured to press the substrate W by advancing the pair of pressing members 37a in the Y1 direction via the cylinder 37b. In addition, the first movable pressing unit 37 is configured to retract the pair of pressing members 37a in the Y2 direction via the cylinder 37b, thereby positioning them in a retracted position where they are not pressing the substrate W.

[0039] The second movable pressing unit 38 includes a pair of pressing members 38a that press the substrate W, and a cylinder 38b that serves as an actuator for moving the pair of pressing members 38a forward and backward in the Y direction. The second movable pressing unit 38 is configured to press the substrate W by advancing the pair of pressing members 38a in the Y1 direction via the cylinder 38b. Furthermore, the second movable pressing unit 38 is configured to retract the pair of pressing members 38a in the Y2 direction via the cylinder 38b, thereby positioning them in a retracted position where they are not pressing the substrate W.

[0040] In the substrate holding robot 1, the substrate W, after being processed (cleaned), is supported by the upper (Z1 direction side) support surfaces of a pair of front support portions 321 and the support surfaces of a pair of support members 36a of the movable support unit 36. Furthermore, the pair of pressing members 37a of the first movable pressing unit 37 presses the processed (cleaned) substrate W, which is supported by the upper (Z1 direction side) support surfaces of the pair of front support portions 321 and the support surfaces of the pair of support members 36a of the movable support unit 36.

[0041] Furthermore, in the substrate holding robot 1, the substrate W before processing (before cleaning) is supported by the support surfaces on the lower side (Z2 direction side) of a pair of front support portions 321 and the support surfaces on a pair of rear support portions 322. Moreover, the pair of pressing members 38a of the second movable pressing unit 38 presses the substrate W before processing (before cleaning), which is supported by the support surfaces on the lower side (Z2 direction side) of the pair of front support portions 321 and the support surfaces on a pair of rear support portions 322. The pair of front support portions 321, the pair of rear support portions 322, the movable support unit 36, the first movable pressing unit 37, and the second movable pressing unit 38 are used separately for the substrate W before processing (before cleaning) and the substrate W after processing (after cleaning).

[0042] Furthermore, the cylinder 36b of the movable support unit 36, the cylinder 37b of the first movable pressing unit 37, and the cylinder 38b of the second movable pressing unit 38 are disposed inside the frame 31 as inner components 40a. Additionally, the cylinders 36b of the movable support unit 36, the first movable pressing unit 37, and the second movable pressing unit 38 are arranged inside the frame 31 along a direction perpendicular to the main surface 32a of the blade 32 (Z direction). Specifically, when viewed from a direction perpendicular to the main surface 32a of the blade 32 (Z direction), the cylinders 36b of the movable support unit 36, the first movable pressing unit 37, and the second movable pressing unit 38 are arranged to overlap. Therefore, cylinders 36b, 37b and 38b are not arranged in the width direction (X direction) of frame 31, so cylinders 36b, 37b and 38b can be compactly arranged in the width direction (X direction) of frame 31.

[0043] In addition, the substrate holding robot 1 also has a cover (outer shell) 39 that is separately disposed from the frame 31 (see reference). Figure 2 The cover 39 is configured to cover the frame 31, as well as a portion of the movable support unit 36, the first movable pressing unit 37, and the second movable pressing unit 38 (the portion disposed inside the frame 31).

[0044] [Effects of this implementation method]

[0045] In this embodiment, the following effects can be achieved.

[0046] In this embodiment, as described above, by providing a tilt adjustment mechanism 34 that can adjust the tilt of the blade 32 relative to the horizontal direction when viewed from the side by adjusting the tilt of the mounting member 33 relative to the frame 31, even if the substrate W housed in the housing container (such as a front-opening wafer cassette) is tilted relative to the horizontal direction when viewed from the side, the tilt of the blade 32 supporting the substrate W can be easily adjusted according to the tilt of the substrate W relative to the horizontal direction. Furthermore, even if the substrate W housed in the housing container is tilted relative to the horizontal direction when viewed from the side due to the tilt of the housing container itself, the tilt of the blade 32 supporting the substrate W can be easily adjusted according to the tilt of the substrate W relative to the horizontal direction. Additionally, even if the blade 32 is deflected due to its own weight and the weight of the substrate W when the blade 32 holds the substrate, causing the blade 32 to tilt relative to the horizontal direction when viewed from the side, the tilt of the blade 32 supporting the substrate W can be easily adjusted according to the tilt of the substrate W relative to the horizontal direction.

[0047] Furthermore, in this embodiment, as described above, the tilt adjustment mechanism 34 includes a tilt adjustment pin 34a. The tilt adjustment pin 34a is configured to be inserted into the mounting member 33 and to support the mounting member 33 in a manner that allows the mounting member 33 to rotate about a predetermined rotation axis C1 extending laterally in the horizontal direction, orthogonal to the front-back direction in which the frame 31 and the blade 32 are arranged. Therefore, the mounting member 33 can be easily and reliably rotated about the predetermined rotation axis C1 extending laterally with the tilt adjustment pin 34a as the rotation center. Thus, the tilt of the blade 32 relative to the horizontal direction when viewed from the side can be easily and reliably adjusted using the tilt adjustment mechanism 34, including the tilt adjustment pin 34a.

[0048] Furthermore, in this embodiment, as described above, the mounting member 33 includes a pair of mounting members 33 for mounting one side and the other side of the base end portion 32c of the blade 32 to the frame 31, respectively. Additionally, the tilt adjustment pins 34a include a pair of tilt adjustment pins 34a corresponding to the pair of mounting members 33. Furthermore, the tilt adjustment mechanism 34 adjusts the tilt of the blade 32 relative to the horizontal direction when viewed from the side by rotating the pair of mounting members 33 about a predetermined rotation axis C1 extending laterally, with the pair of tilt adjustment pins 34a as the rotation center. Therefore, the pair of mounting members 33 can be rotated about the predetermined rotation axis C1 more easily and reliably using the pair of tilt adjustment pins 34a, and thus the tilt of the blade 32 relative to the horizontal direction when viewed from the side can be adjusted more easily and reliably using the tilt adjustment mechanism 34, which includes the pair of tilt adjustment pins 34a.

[0049] Furthermore, in this embodiment, as described above, the tilt adjustment pin 34a is configured to be supported on the frame 31 and protrude from the side of the frame 31 into the mounting member 33. Therefore, the mounting member 33 can be rotated about a predetermined axis of rotation C1 by means of the tilt adjustment pin 34a while it is securely supported by the frame 31. As a result, the tilt of the blade 32 relative to the horizontal direction when viewed from the side can be easily adjusted.

[0050] Furthermore, in this embodiment, as described above, after the tilt adjustment mechanism 34 has adjusted the tilt of the mounting member 33 by rotating the mounting member 33 around a predetermined rotation axis C1 with the tilt adjustment pin 34a as the rotation center, the mounting member 33 is fastened to the frame 31 by the fastening member 35. This allows adjustment of the tilt of the blade 32 relative to the horizontal direction when viewed from the side. Therefore, by simply fastening the mounting member 33 to the frame 31 with the fastening member 35, the tilt of the blade 32 relative to the horizontal direction when viewed from the side can be fixed at the adjusted tilt, thus making it easy to perform adjustments to the tilt of the blade 32 relative to the horizontal direction when viewed from the side.

[0051] Furthermore, in this embodiment, as described above, the blade 32 includes a plurality of blades 32 that each support the base plate W. Additionally, the mounting member 33 also supports the plurality of blades 32. Furthermore, the tilt adjustment mechanism 34 can adjust the tilt of the plurality of blades 32 relative to the horizontal direction when viewed from the side by adjusting the tilt of the mounting member 33 relative to the frame 31. Therefore, compared to the case where the tilt of the plurality of blades 32 relative to the horizontal direction needs to be adjusted independently when viewed from the side, the hassle of adjusting the tilt of the plurality of blades 32 relative to the horizontal direction when viewed from the side can be eliminated, thus simplifying the adjustment of the tilt of the plurality of blades 32 relative to the horizontal direction when viewed from the side.

[0052] Furthermore, in this embodiment, as described above, the plurality of blades 32 are arranged at a predetermined spacing in a direction perpendicular to the main surface 32a of the blades 32. Additionally, the tilt adjustment mechanism 34 can simultaneously adjust the tilt of the plurality of blades 32 relative to the horizontal direction when viewed from the side, while maintaining the spacing between the plurality of blades 32 in the direction perpendicular to the main surface 32a of the blades 32. Therefore, it is unnecessary to adjust the spacing (center-to-center distance between the blades 32) after adjusting the tilt of the plurality of blades 32 relative to the horizontal direction when viewed from the side, thus making the adjustment of the tilt of the blades 32 relative to the horizontal direction when viewed from the side much simpler.

[0053] Furthermore, in this embodiment, as described above, the mounting member 33 is mounted to the side of the frame 31 from the side. Therefore, compared to the case where the mounting member 33 is mounted relative to the frame 31 from above or below, the tilt of the mounting member 33 relative to the horizontal direction when viewed from the side can be easily adjusted from the side. Thus, by adjusting the tilt of the mounting member 33, the tilt of the blade 32 relative to the horizontal direction when viewed from the side can be easily adjusted.

[0054] [Variation Example]

[0055] Furthermore, all points in the disclosed embodiments should be considered illustrative and not intended to limit the invention. The scope of the invention is not limited by the above description of the embodiments, but is defined by the claims, and includes all modifications (variations) equivalent to the claims and within their scope.

[0056] For example, in the above embodiments, an example of a horizontal multi-joint robotic arm is shown, but the present invention is not limited thereto. For example, the arm may also be an arm other than a horizontal multi-joint robotic arm, such as a vertical multi-joint robotic arm.

[0057] Furthermore, the above embodiment illustrates an example where a substrate holding robot is provided with multiple blades, but the present invention is not limited thereto. For example, a substrate holding robot may also be provided with only one blade.

[0058] Furthermore, the above embodiment illustrates an example where the substrate holding robot has four blades, but the present invention is not limited thereto. For example, the substrate holding robot may also have more than four blades.

[0059] Furthermore, the above embodiments show an example of a blade having a bifurcated shape, but the present invention is not limited thereto. For example, the blade may also have a shape other than a bifurcated shape.

[0060] Furthermore, in the above embodiments, an example was shown where the blades were configured to support two substrates at different heights; however, the present invention is not limited thereto. For example, the blades may also be configured to support only one substrate (supporting the substrate at only one height).

[0061] Furthermore, the above embodiments show an example with a movable support unit, but the present invention is not limited thereto. For example, the movable support unit may not be provided.

[0062] Furthermore, the above embodiments illustrate an example where the movable support unit includes a pair of support members for a substrate, but the invention is not limited thereto. For example, the movable support unit may also include a single support member for a substrate.

[0063] Furthermore, the above embodiment shows an example with two pressing units, a first movable pressing unit and a second movable pressing unit, but the present invention is not limited thereto. For example, only one movable pressing unit may be provided.

[0064] Furthermore, the above embodiments illustrate an example where the movable pressing unit includes a pair of pressing members, but the present invention is not limited thereto. For example, the movable pressing unit may also include only one pressing member.

[0065] Furthermore, while the above embodiments illustrate an example where the tilt adjustment mechanism includes a tilt adjustment pin, the present invention is not limited thereto. For example, the tilt adjustment mechanism may also include tilt adjustment structures such as tilt adjustment screws other than tilt adjustment pins.

[0066] Furthermore, the above embodiment illustrates an example where the tilt adjustment mechanism can simultaneously adjust the tilt of multiple blades relative to the horizontal direction when viewed from the side; however, the present invention is not limited to this. In the present invention, the tilt adjustment mechanism can also independently adjust the tilt of multiple blades relative to the horizontal direction when viewed from the side. Additionally, the tilt adjustment mechanism can also simultaneously adjust the tilt of a portion of the multiple blades relative to the horizontal direction when viewed from the side.

[0067] Explanation of reference numerals in the attached figures

[0068] 1…substrate holding robot; 2…arm; 31…frame; 32…blade; 32a…main surface; 33…mounting component; 34…tilt adjustment mechanism; 34a…tilt adjustment pin; 35…fastening component; 100…substrate handling robot; W…substrate; C1…specified axis of rotation.

Claims

1. A substrate holding robot, characterized in that, have: frame; Blades, and their supporting base plate; Mounting components for supporting the blades and mounting the blades to the frame; and The tilt adjustment mechanism adjusts the tilt of the mounting component relative to the frame, thereby adjusting the tilt of the blade relative to the horizontal direction when viewed from the side. The mounting components include a pair of mounting parts for mounting one side and the other side of the base end of the blade to the frame, respectively. The tilt adjustment mechanism adjusts the tilt of the blade relative to the horizontal direction when viewed from the side by adjusting the tilt of the pair of mounting components.

2. The substrate holding robot according to claim 1, characterized in that, The tilt adjustment mechanism includes a tilt adjustment pin. The tilt adjustment pin is configured such that it is inserted into the mounting component and supports the mounting component in such a manner that the mounting component can rotate about a predetermined axis of rotation extending laterally in the horizontal direction orthogonal to the front-back direction of the frame and the blade arrangement, and the tilt adjustment pin extends along the side.

3. The substrate holding robot according to claim 2, characterized in that, The tilt adjustment pins include a pair of tilt adjustment pins corresponding to the pair of mounting components. The tilt adjustment mechanism adjusts the tilt of the blade relative to the horizontal direction when viewed from the side by rotating the pair of mounting components around the predetermined axis of rotation with the pair of tilt adjustment pins as the center of rotation.

4. The substrate holding robot according to claim 2, characterized in that, The tilt adjustment pin is configured such that it is supported on the frame and protrudes from the side of the frame to insert into the mounting component.

5. The substrate holding robot according to claim 2, characterized in that, When the tilt adjustment mechanism adjusts the tilt of the mounting component by rotating the mounting component around the predetermined rotation axis with the tilt adjustment pin as the rotation center, the mounting component is fastened to the frame by the fastening component, thereby adjusting the tilt of the blade relative to the horizontal direction when the blade is viewed from the side.

6. The substrate holding robot according to claim 1, characterized in that, The blade includes a plurality of blades that respectively support the substrate. The mounting component provides support for the multiple blades. The tilt adjustment mechanism adjusts the tilt of the mounting component relative to the frame, thereby adjusting the tilt of the multiple blades relative to the horizontal direction when viewed from the side.

7. The substrate holding robot according to claim 6, characterized in that, The plurality of blades are arranged at a predetermined interval in a direction perpendicular to the main surface of the blade. The tilt adjustment mechanism is capable of adjusting the tilt of the multiple blades relative to the horizontal direction when viewed from the side, while maintaining the spacing between the multiple blades in a direction perpendicular to the main surface of the blades.

8. The substrate holding robot according to claim 1, characterized in that, The mounting component is mounted on the side of the frame from the side.

9. A substrate handling robot, characterized in that, have: Substrate holding robot; and The arm that holds the robotic arm in place to move the substrate. The substrate holding robot includes: frame; Blades, and their supporting base plate; Mounting components for supporting the blades and mounting the blades to the frame; and The tilt adjustment mechanism adjusts the tilt of the mounting component relative to the frame, thereby adjusting the tilt of the blade relative to the horizontal direction when viewed from the side. The mounting components include a pair of mounting parts for mounting one side and the other side of the base end of the blade to the frame, respectively. The tilt adjustment mechanism adjusts the tilt of the blade relative to the horizontal direction when viewed from the side by adjusting the tilt of the pair of mounting components.

Images