An accelerometer proof mass processing system and method

Abstract

The application discloses an accelerometer pendulum piece processing system and method, and the system comprises a liquid defoaming machine, a heating spraying device and a reversible positioning temperature control device; the heating spraying device comprises a feeding bin, a feeding bin temperature control sleeve, a dispensing nozzle and a dispensing nozzle temperature control device; the reversible positioning temperature control device comprises a pendulum piece loading frame and a temperature control heating disc; the feeding bin is used for storing microcrystalline wax, the feeding bin temperature control sleeve is used for heating the microcrystalline wax, and the dispensing nozzle is used for spraying the pendulum piece to be coated under the control of the dispensing nozzle temperature control device; the pendulum piece loading frame is used for fixing the pendulum piece to be coated, and the temperature control heating disc is used for heating the pendulum piece to be coated to a preset temperature; the processing method is simple in manual operation and high in repeatability.

Description

Technical Field

[0001] This invention relates to the field of accelerometer processing technology, and more particularly to an accelerometer pendulum processing system and method. Background Technology

[0002] Quartz flexural accelerometers, as linear acceleration sensors, are widely used in inertial navigation, track mapping, and oil exploration. In inertial navigation, long-term output and high stability are required. The core component of a quartz flexural accelerometer is the pendulum, which is formed by laser cutting and wet chemical etching of a blank sheet of fused quartz glass after fine polishing. Finally, a gold film is plated onto the pattern to form the electrical properties. Wet chemical etching with concentrated acid is the most widely used etching method. Chemical etching requires first covering the surface of the fused quartz glass sheet with a hydrofluoric acid-resistant mask, and then immersing the quartz pendulum along with the mask in hydrofluoric acid for etching. Currently, the etching of quartz pendulums is performed in two steps. The first step is to etch the pendulum's flat bridges. After separating the pendulum from the etching mask and thoroughly cleaning the pendulum, the second step is to etch the pendulum's bosses.

[0003] Currently, a composite material of special rubber and beryllium bronze is used as the mask. The advantages of this mask are high material rigidity, high corrosion resistance, and the ability to remain unswelled after prolonged immersion in hydrofluoric acid while maintaining a constant sealing pressure between the mask and the quartz plate. However, the beryllium bronze and rubber composite mask process is complex and costly. It is also difficult to manually align multiple small-area double-sided etching patterns simultaneously. Furthermore, under the same pressure, the rubber structure of the small-area pattern has a high pressure with the quartz material, which can easily adhere to the quartz surface after prolonged pressure contact and is difficult to remove, hindering subsequent gold plating operations. In addition, the plate thickness is only 0.7mm, and there is a risk of breakage of the outer ring of the plate during the assembly and disassembly of the composite mask. Summary of the Invention

[0004] This invention provides an accelerometer pendulum processing system and method, which can effectively avoid the risk of breakage of the outer ring of the pendulum during the assembly and disassembly of the composite mask.

[0005] An accelerometer pendulum processing system includes a liquid degassing machine, a heating spraying device, and a flip-up positioning temperature control device;

[0006] The heating spraying equipment includes a feeding hopper, a feeding hopper temperature control sleeve, a dispensing nozzle, and a dispensing nozzle temperature control device.

[0007] The reversible positioning temperature control device includes a plate loading frame and a temperature control heating plate;

[0008] The feeding hopper is used to store microcrystalline wax, the temperature control sleeve of the feeding hopper is used to heat the microcrystalline wax, and the dispensing nozzle is used to spray the coating onto the sheet under the control of the dispensing nozzle temperature control device.

[0009] The loading frame for the plate is used to fix the plate to be coated, and the temperature-controlled heating plate is used to heat the plate to be coated to a preset temperature.

[0010] Furthermore, the system also includes a cleaning device for cleaning and drying the blades before and after spraying.

[0011] Furthermore, the system also includes a visual inspection device for aligning the swing plate when it is installed on the temperature-controlled heating plate.

[0012] Furthermore, the swing plate loading frame includes an annular swing plate fixing groove, a swing plate outer ring fixing post, a central support platform, and a central post. The swing plate fixing groove is located around the central support platform, the central post is located at the center of the central support platform, and the swing plate outer ring is fixedly located on the swing plate fixing groove. Screw holes are also provided around the swing plate fixing groove.

[0013] Furthermore, the temperature-controlled heating plate includes a heat-conducting frame, a heating plate, a temperature sensor, and a temperature sensor fixing frame. The heating plate is bonded to the heat-conducting frame, the temperature sensor fixing frame is located on the heat-conducting frame, and the temperature sensor is disposed on the temperature sensor fixing frame.

[0014] Furthermore, the number of temperature sensors is six.

[0015] Furthermore, the system also includes a heated spraying workbench, on which the heated spraying equipment is mounted.

[0016] A method for processing accelerometer pendulums using the above system includes:

[0017] Microcrystalline wax is placed into the feeding hopper and heated to a liquid state by the temperature control sleeve of the feeding hopper;

[0018] Place the feeding hopper sleeve into the liquid degassing machine to allow the bubbles to fully overflow;

[0019] The degassed microcrystalline wax is then placed back into the feeding hopper and heated.

[0020] Fix the plate to be coated onto the plate loading frame, and fix the temperature control heating plate onto the plate to be coated. Adjust the position of the plate loading frame to be horizontal.

[0021] The plate is heated to a preset temperature by a temperature-controlled heating plate, the dispensing nozzle is started, and the temperature is controlled by the temperature control device of the dispensing nozzle to spray the plate to be coated.

[0022] Remove the temperature control heating plate, flip the swing plate over, and install the temperature control heating plate on the uncoated side of the swing plate;

[0023] Align the uncoated side of the oscillating plate with the coated side;

[0024] The plate is heated to a preset temperature by a temperature-controlled heating plate, the dispensing nozzle is started, and the temperature is controlled by the temperature control device of the dispensing nozzle to spray the uncoated side of the plate.

[0025] The coated wafers are then etched with bosses, cleaned, and dried.

[0026] Furthermore, the swash plate is cleaned and dried using a cleaning device before and after spraying.

[0027] Furthermore, a visual inspection device is used to align the uncoated side of the display piece with the coated side.

[0028] The accelerometer pendulum processing system and method provided by the present invention have at least the following beneficial effects:

[0029] The manual operation is simple and highly repeatable. Using this method to load the swivel boss and etch the mask, the operation efficiency is high and the cost is low. It can effectively ensure the bonding strength between the polymer mask and the swivel surface, and the mask can be removed with a simple hydrocarbon cleaning agent after etching, which can completely avoid the risk of breakage of the outer ring of the swivel during the disassembly and assembly of the composite mask. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of one embodiment of the accelerometer pendulum processing system provided by the present invention.

[0031] Figure 2 This is a schematic diagram of a heating spraying device in an accelerometer pendulum processing system provided by the present invention.

[0032] Figure 3 This is a schematic diagram of the structure of one embodiment of the pendulum in the accelerometer pendulum processing system provided by the present invention.

[0033] Figure 4 This is a schematic diagram of the structure of a pendulum loading frame in an accelerometer pendulum processing system provided by the present invention.

[0034] Figure 5 for Figure 4 Cross-sectional view along line AA.

[0035] Figure 6 This is a schematic diagram of the structure of a temperature-controlled heating plate in an accelerometer pendulum processing system provided by the present invention.

[0036] Figure 7 This is a flowchart of one embodiment of the accelerometer pendulum processing method provided by the present invention. Detailed Implementation

[0037] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0038] The terminology used in the embodiments of this invention is for the purpose of describing particular embodiments only and is not intended to limit the invention. The singular forms “a,” “the,” and “the” as used in the embodiments of this invention and the appended claims are also intended to include the plural forms, and “multiple” generally includes at least two unless the context clearly indicates otherwise.

[0039] It should be understood that although the terms first, second, third, etc., may be used to describe... in the embodiments of the present invention, these... should not be limited to these terms. These terms are only used to distinguish... For example, first... may also be referred to as second... without departing from the scope of the embodiments of the present invention, and similarly, second... may also be referred to as first...

[0040] It should be understood that the term "and / or" used in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this article generally indicates that the preceding and following related objects have an "or" relationship.

[0041] Depending on the context, the words “if” or “suppose” as used here can be interpreted as “when” or “in response to determination” or “in response to detection.” Similarly, depending on the context, the phrases “if determination” or “if detection (of the stated condition or event)” can be interpreted as “when determination” or “in response to determination” or “when detection (of the stated condition or event)” or “in response to detection (of the stated condition or event).”

[0042] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that an article or device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or device. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the article or device that includes said element.

[0043] refer to Figures 1 to 6 In some embodiments, an accelerometer pendulum processing system is provided, including a liquid degassing machine 1, a heating spraying device 2, and a flip-up positioning temperature control device 3;

[0044] The heating spraying equipment 2 includes a feeding hopper 21, a feeding hopper temperature control sleeve 22, a dispensing nozzle 23, and a dispensing nozzle temperature control device 24;

[0045] The flip-up positioning temperature control device 3 includes a plate loading frame 31 and a temperature control heating plate 32;

[0046] The feeding hopper 21 is used to store microcrystalline wax, the feeding hopper temperature control sleeve 22 is used to heat the microcrystalline wax, and the dispensing nozzle 23 is used to spray the coating onto the sheet under the control of the dispensing nozzle temperature control device 24.

[0047] The tray loading frame 31 is used to fix the tray to be coated, and the temperature control heating plate 32 is used to heat the tray to be coated to a preset temperature.

[0048] Furthermore, the system also includes a cleaning device 4 for cleaning and drying the blades before and after spraying.

[0049] As an optional implementation, the cleaning device 4 includes a plasma cleaner, a hydrocarbon cleaner, etc.

[0050] Furthermore, the system also includes a visual inspection device 5 for aligning the swing plate when installing the temperature-controlled heating plate.

[0051] Further, refer to Figure 4 and Figure 5 The swing plate loading frame 31 includes an annular swing plate fixing groove 31a, a swing plate outer ring fixing post 31b, a central support platform 31c, and a central post 31d. The swing plate fixing groove 31a is located around the central support platform 31c, the central post 31d is located at the center of the central support platform 31c, and the swing plate outer ring fixing post 31b is located on the swing plate fixing groove 31a. Screw holes 31e are also provided around the swing plate fixing groove 31a.

[0052] Further, refer to Figure 6 The temperature-controlled heating plate 32 includes a heat-conducting frame 32a, a heating element 32b, a temperature sensor 32c, and a temperature sensor fixing frame 32d. The heating element 32b is bonded to the heat-conducting frame 32a, the temperature sensor fixing frame 32d is located on the heat-conducting frame 32a, and the temperature sensor 32c is disposed inside the temperature sensor fixing frame 32d.

[0053] refer to Figure 3 The coating area of ​​the plate is as follows Figure 3 As shown in region A, the shape of the heat-conducting frame 32a covers the uncoated area of ​​the swing plate, and the temperature sensor fixing frame 32d is located at the opening of the heat-conducting frame 32a facing the coated area of ​​the swing plate. B is the center hole of the swing plate, and C is the alignment groove. The vision inspection device 5 aligns the two sides of the swing plate through the alignment groove.

[0054] In a preferred embodiment, there are six temperature sensors 32, which are located on both sides of the three protrusions of the swing plate.

[0055] Furthermore, the system also includes a heated spraying workbench 6 and a control system 7, wherein the heated spraying equipment 2 is mounted on the heated spraying workbench 6.

[0056] In some embodiments, a method for processing accelerometer pendulums using the above system is also provided, comprising:

[0057] S1. Microcrystalline wax is placed into the feeding hopper and heated to a liquid state by the temperature control sleeve of the feeding hopper;

[0058] S2. Place the feeding hopper sleeve into the liquid degassing machine to allow the bubbles to overflow fully;

[0059] S3. Place the degassed microcrystalline wax back into the feeding hopper and heat it.

[0060] S4. Fix the plate to be coated onto the plate loading frame, and fix the temperature control heating plate onto the plate to be coated, and adjust the position of the plate loading frame to be horizontal;

[0061] S5. The plate is heated to a preset temperature by a temperature-controlled heating plate, the dispensing nozzle is started, and the temperature is controlled by the temperature control device of the dispensing nozzle to spray the plate to be coated.

[0062] S6. Remove the temperature control heating plate, flip the swing plate over, and install the temperature control heating plate on the uncoated side of the swing plate;

[0063] S7. Align the uncoated side of the slab with the coated side;

[0064] S8. Heat the plate to a preset temperature using a temperature-controlled heating plate, start the dispensing nozzle, and control the temperature using the temperature control device of the dispensing nozzle to spray the uncoated side of the plate.

[0065] S9. The coated wafers are then etched with bosses, cleaned, and dried.

[0066] Specifically, in step S1, microcrystalline wax is filled into the feeding hopper, and the feeding method is 3000 to 5000 mesh particles. After being heated by the temperature control sleeve of the feeding hopper, it reaches 80±2℃ and becomes liquid.

[0067] In step S2, the temperature control sleeve of the feeding hopper is removed and placed into the liquid degassing machine to fully overflow the air bubbles of the microcrystalline wax, preventing surface defects such as cracks and hollows after coating.

[0068] The degassed microcrystalline wax is then placed back into the feeding hopper and heated.

[0069] Furthermore, before performing step S4, the plate to be coated is activated by plasma cleaning and then dried.

[0070] Further, in step S4, the plate to be coated is fixed to the plate loading frame by the outer ring fixing post and the center post, and the temperature control heating plate is placed on the plate to be coated. The position of the temperature control heating plate is adjusted so that the three temperature sensors are symmetrically positioned on the plate protrusion. After heating is started, once the temperature sensor displays a stable temperature with fluctuations within ±0.01℃, the insulating fixing spring is pressed onto the temperature control heating plate and fixed with screws through the screw holes of the plate loading frame. A torque wrench is used here to prevent excessive force from deforming the heating plate and causing uneven heating. The position of the plate loading frame is then adjusted to be horizontal.

[0071] Further, in step S5, the plate is heated to a preset temperature by a temperature-controlled heating plate, the dispensing nozzle is started, and parameters such as air pressure and spraying time of the heating and spraying equipment are repeatedly adjusted to precisely control the coating amount and prevent the microcrystalline wax from overflowing the spraying area. The temperature is controlled by the temperature control device of the dispensing nozzle to spray the plate to be coated. The heating temperature of the heating plate is about 5°C lower than the melting temperature of the microcrystalline glass, so that the melted microcrystalline glass is slowly cured after being sprayed onto the plate.

[0072] After the coating is completed, the temperature-controlled heating plate stops heating and allows the material to cool naturally before the visual acquisition device takes pictures.

[0073] Further, in step S6, the fixing spring and screws are removed, the temperature control heating plate is taken off, the pendulum is flipped over, with the side coated with microcrystalline wax facing down and the uncoated side facing up, and then placed into the temperature control heating plate.

[0074] Further, in step S7, the vision acquisition device is activated to align the existing graphic with the graphic on the other side, with the alignment mark being the alignment slot on the swing plate. After alignment, the fixing spring screw is inserted to secure it. To prevent the swing plate from shifting during screw fixing, alignment needs to be repeated. This step can be repeated until both sides are aligned.

[0075] Further, in step S8, the dispensing nozzle is started, and the temperature is controlled by the temperature control device of the dispensing nozzle to spray the uncoated side of the plate; after the coating is completed, the temperature control heating plate stops heating and is allowed to cool naturally, and then the temperature control heating plate and the plate are removed.

[0076] In step S9, the microcrystalline wax-coated plate is immersed in the etching solution to etch the bosses. After completion, it is rinsed with plenty of deionized water and dried. Then it is immersed in a hydrocarbon cleaning agent to remove the remaining microcrystalline wax, rinsed with plenty of deionized water, and dried.

[0077] The accelerometer pendulum processing system and method provided in this embodiment have at least the following beneficial effects: the manual operation is simple and highly repeatable; the method of loading the pendulum boss and etching the mask results in high operation efficiency and low cost; it can effectively ensure the bonding strength between the polymer mask and the pendulum surface, and the mask can be removed by a simple hydrocarbon cleaning agent after etching, which can completely avoid the risk of pendulum outer ring breakage during the disassembly and assembly of the composite mask.

[0078] Although preferred embodiments of the invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the invention. Clearly, those skilled in the art can make various alterations and modifications to the invention without departing from its spirit and scope. Thus, if these modifications and modifications of the invention fall within the scope of the claims and their equivalents, the invention is also intended to include these modifications and modifications.

Claims

1. An accelerometer pendulum processing system, characterized by, The system comprises a liquid defoaming machine, a heating spraying device, and a reversible positioning temperature control device. The heating spraying device comprises a feeding bin, a feeding bin temperature control sleeve, a dispensing nozzle, and a dispensing nozzle temperature control device. The reversible positioning temperature control device comprises a pendulum piece loading frame and a temperature control heating disc; the pendulum piece loading frame comprises a circular pendulum piece fixing groove, a pendulum piece outer ring fixing column, a center support table, and a center column; the pendulum piece fixing groove is located at the periphery of the center support table, the center column is located at the center of the center support table, and the pendulum piece outer ring fixing column is located on the pendulum piece fixing groove; the periphery of the pendulum piece fixing groove is further provided with a screw hole; the temperature control heating disc comprises a heat conduction frame, a heating piece, a temperature sensor, and a temperature sensor fixing frame; the heating piece is bonded to the heat conduction frame, the temperature sensor fixing frame is located on the heat conduction frame, and the temperature sensor is arranged on the temperature sensor fixing frame; the number of temperature sensors is six; the shape of the heat conduction frame 32a covers the non-coating area of the pendulum piece, and the temperature sensor fixing frame 32d is located at the opening of the heat conduction frame 32a facing the coating area of the pendulum piece. The feeding bin is used for storing microcrystalline wax, the feeding bin temperature control sleeve is used for heating the microcrystalline wax, and the dispensing nozzle is used for spraying the pendulum piece to be coated under the control of the dispensing nozzle temperature control device. The pendulum piece loading frame is used for fixing the pendulum piece to be coated, and the temperature control heating disc is used for heating the pendulum piece to be coated to a preset temperature.

2. The system of claim 1, wherein, The system further comprises a cleaning device for cleaning and drying the pendulum piece before and after spraying.

3. The system of claim 1, wherein, The system further comprises a visual detection device for alignment when the pendulum piece is installed on the temperature control heating disc.

4. The system of claim 1, wherein, The system further comprises a heating spraying workbench, and the heating spraying device is arranged on the heating spraying workbench.

5. A method of processing an accelerometer proof mass using the system of any one of claims 1-4, wherein, The system comprises: Put the microcrystalline wax into the feeding bin and heat it to a liquid state through the feeding bin temperature control sleeve; Put the feeding bin into the liquid defoaming machine to fully overflow the bubbles; Put the defoamed microcrystalline wax back into the feeding bin and heat it; Fix the pendulum piece to be coated on the pendulum piece loading frame, fix the temperature control heating disc on the pendulum piece to be coated, and adjust the position of the pendulum piece loading frame to be horizontal; Heat the pendulum piece to a preset temperature through the temperature control heating disc, start the dispensing nozzle, control the temperature through the dispensing nozzle temperature control device, and spray the pendulum piece to be coated; Remove the temperature control heating disc, turn over the pendulum piece, and install the temperature control heating disc on the uncoated side of the pendulum piece; Align the uncoated side of the pendulum piece with the coated side; Heat the pendulum piece to a preset temperature through the temperature control heating disc, start the dispensing nozzle, control the temperature through the dispensing nozzle temperature control device, and spray the uncoated side of the pendulum piece; Complete the etching of the boss of the pendulum piece to be coated, and clean and dry it.

6. The method of claim 5, wherein, The pendulum piece is cleaned and dried by the cleaning device before and after spraying.

7. The method of claim 5, wherein, The visual detection device is used to align the uncoated side of the pendulum piece with the coated side.

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