A stereoscopic length measurement method based on a scanning electron microscope

By measuring the tilt angle of the sample stage and calculating the formula in a scanning electron microscope, the problem that scanning electron microscopes cannot measure three-dimensional length was solved, realizing the three-dimensional length measurement of micro- and nano-scale samples, and improving the accuracy and convenience of measurement.

CN116336948BActive Publication Date: 2026-06-19SHANDONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANDONG UNIV
Filing Date
2023-04-12
Publication Date
2026-06-19

AI Technical Summary

Technical Problem

Current scanning electron microscopes can only measure the projected length of a sample in a horizontal plane, and cannot accurately measure the three-dimensional length of the sample when it is at a certain angle to the horizontal plane. This is especially true in the study of micro- and nano-scale samples, which limits the study of the length variation of structures such as static cilia.

Method used

By measuring the horizontal state of the sample stage and its tilt angle around the X-axis using a scanning electron microscope, the projected length and angle of the sample in the XY plane of the electronic screen are calculated. Combining various calculation formulas, the three-dimensional length of the sample is obtained, including methods for adjusting the tilt angle of the sample stage and measuring the projected length and angle.

Benefits of technology

It enables the calculation of the three-dimensional length of the sample under test with only one tilting operation, with accurate measurement results. It is suitable for the study of three-dimensional length at the micro-nano scale and simplifies the operation process.

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Abstract

This invention relates to a method for measuring stereoscopic length based on scanning electron microscopy (SEM). The method measures the projected length l of the sample under test in the XY plane of an electronic screen after the sample stage is horizontal and tilted by an angle η around the X-axis using an SEM. α l β The angles α and β between the projection of the sample onto the X-axis and the Y-axis are calculated, thereby determining the angle θ between the projection of the sample onto the YZ plane of the electronic screen and the Y-axis when the sample stage is horizontal. Finally, the solid length L of the sample is obtained. α and β should be in the same direction as the X-axis and not less than zero degrees and not greater than ninety degrees. After tilting the sample stage by an angle η, the quadrant of the projection of the sample onto the YZ plane coincides with the quadrant of the projection in the YZ plane in the initial state. This invention can calculate the three-dimensional solid length of the sample with only one tilt of the sample stage. It is simple to operate, provides accurate measurement results, and is of great significance for the study of micro- and nano-scale solid length measurement.
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