Substrate processing apparatus and control method for substrate processing apparatus

Abstract

The present invention provides a substrate processing device. One aspect of the present invention relates to a substrate processing device and a control method for the substrate processing device, which can improve the resolution of a printer by determining the discharge time of an ink discharge controller with a higher resolution than a pulse wave generated by an encoder. The substrate processing device includes: a substrate conveying portion in which a conveying object is placed; an ejection system unit portion, which includes: an inkjet main body configured to eject ink from the upper surface of the substrate conveying portion to the conveying object and print on the conveying object; an ink module conveying portion configured to convey the inkjet main body; an ink discharge controller configured to control the inkjet timing of the inkjet main body by interlocking with the inkjet main body; a speed measuring portion configured to specify the moving speed of the inkjet main body; and a signal separator configured to receive the moving speed of the inkjet main body by interlocking with the speed measuring portion and transmit a predicted movement signal predicted based on the moving speed to the ink discharge controller.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to and the benefit of Korean Patent Application Nos. 10-2021-0191462 and 10-2022-0126628, filed on December 29, 2021, and October 4, 2022, in the Korean Intellectual Property Office, the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present invention relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus for ejecting ink to and printing on a substrate, and a control method for the substrate processing apparatus. Background Art

[0004] In display manufacturing equipment, there is a jetting system that jets chemical ink such as an alignment film into glass.

[0005] This jetting system piezoelectrically drives the nozzles of the inkjet head while moving the inkjet head and discharge module transport device in a two-dimensional plane to eject ink onto the display glass.

[0006] In this case, in the jetting system, when the X-axis and the Y-axis are divided on a two-dimensional plane, in a state where a conveying object to which ink is to be applied to a lower conveying substrate is conveyed a certain distance toward the X-axis, the ink is applied while a discharge module conveying device provided on the conveying object and connected to the ink discharge module is moved along the Y-axis, and after the application is completed, the ink is printed on the entire upper surface of the conveying object by repeating a process of moving the conveying object to which ink is to be applied again a certain distance toward the X-axis and then conveying the discharge module conveying device back to the Y-axis.

[0007] In this case, the ejection system receives pulse waves from an encoder to determine when to eject ink. The encoder generates pulse waves at specific movement intervals of the ejection module conveyor, and the ink ejection controller receives the pulse waves. Upon receiving the pulse waves, the ink ejection controller checks the position of the ejection module conveyor based on the number of received pulse waves and then ejects ink.

[0008] If the resolution is set to 100 nm, the encoder generates a pulse wave signal when the discharge module conveyor moves 100 nm. In this case, the ink discharge controller recognizes that the discharge module conveyor has moved 100 nm and, based on this event, executes various control drives, such as PID control of the discharge module conveyor. In this case, the ink discharge controller determines that the discharge module conveyor has moved 100 nm based on one pulse wave signal and ejects ink when the corresponding area is where ink should be ejected.

[0009] In this case, the ejection system ejects ink as the ejection module conveyor moves continuously. At this time, if the encoder resolution is 100nm, the ejection system can count approximately 200 pulse waves and identify the ejection position when the ejection module conveyor moves in 20μm units.

[0010] Since conventional jetting systems have low printing resolution and sufficient production time, a method of applying ink by connecting a plurality of ink discharge controllers in a daisy-chain manner is generally used.

[0011] However, recent efforts to minimize production time have resulted in signal delays due to differences in cable length. To address this issue, ink discharge controllers have adopted a method for setting the output timing of the signal distributor so that the same time delay is achieved even with different cable lengths.

[0012] However, since this arrangement of adjusting the time delay of the demultiplexer does not provide a direct technique for improving the printer resolution, a fundamental solution is needed to improve the printer resolution.

[0013] On the other hand, the encoder periodically generates a pulse wave, and since the pulse waves output from the encoder are omitted or overlapped due to various variables in the input / output interval, the control timing of the ink discharge controller may vary. Summary of the Invention

[0014] The present invention is directed to providing a substrate processing apparatus and a control method for the substrate processing apparatus, which can improve the resolution of a printer by determining a discharge timing of an ink discharge controller with a higher resolution than a pulse wave generated by an encoder.

[0015] The present invention is also directed to providing a substrate processing apparatus and a control method for the substrate processing apparatus, which can ensure normal ink discharge timing even when a pulse wave of an encoder input to an ink discharge controller is omitted or overlapped.

[0016] The objects of the present invention are not limited thereto, and other objects not mentioned will be clearly understood from the following description by those skilled in the art.

[0017] An exemplary embodiment of the present invention provides a substrate processing device, which includes: a substrate conveying part in which a conveying object is placed; and a jetting system including: an inkjet body configured to jet ink from an upper surface of the substrate conveying part to the conveying object and print on the conveying object; an ink module conveying part configured to convey the inkjet body; an ink discharge controller configured to control the inkjet timing of the inkjet body by interlocking with the inkjet body; a speed measuring part configured to specify a moving speed of the inkjet body; and a signal separator configured to receive the moving speed of the inkjet body by interlocking with the speed measuring part, and transmit a predicted movement signal predicted according to the moving speed to the ink discharge controller.

[0018] According to an exemplary embodiment, the ejection system may further include an encoder disposed around the ink module transfer portion and configured to output a movement signal for each unit movement distance of the ink module transfer portion.

[0019] According to an exemplary embodiment, the demultiplexer may use a velocity profile for movement of the inkjet body and a predicted pulse wave profile configured to generate a predicted pulse wave predicted according to a velocity of the velocity profile.

[0020] According to an exemplary embodiment, the velocity curve may be divided into an equivalent acceleration interval and an equivalent velocity interval, and in the equivalent velocity interval, predicted pulse waves of the same interval may be transmitted to the ink discharge controller.

[0021] According to an exemplary embodiment, in the equivalent acceleration interval, predicted pulse waves whose intervals become narrower in proportion to the slope of the equivalent acceleration interval may be transmitted to the ink discharge controller.

[0022] According to an exemplary embodiment, a plurality of inkjet bodies and a plurality of ink discharge controllers may be interlocked to eject ink, and a signal separator may output a predicted pulse wave to each of the plurality of ink discharge controllers.

[0023] According to an exemplary embodiment, the ink discharge controller may acquire position information of the ink ejecting body by counting the number of inputs of the predicted pulse wave.

[0024] According to an exemplary embodiment, the ink module conveying portion may include: a module base in which an inkjet body is installed; an actuator driver configured to convey the module base in one direction; and an ink module position controller configured to control an ejection position of ink by controlling the actuator driver to move the module base.

[0025] According to an exemplary embodiment, the ink module position controller may acquire position information of the module substrate from the encoder by interlocking with the encoder.

[0026] According to an exemplary embodiment, the substrate transfer part may further include a base controller configured to transfer the transfer object according to a predetermined work command.

[0027] Another exemplary embodiment of the present invention provides a control method for a substrate processing device, which includes: an inkjet body conveying step, wherein an inkjet body set in an upper part of a conveying object is moved by an ink module conveying part; a speed measuring step, wherein the moving speed of the inkjet body is measured, and the moving speed is converted into a digital speed value by the speed measuring part, and the converted digital speed value is transmitted to a signal separator; a signal separator signal conversion step, wherein a predicted motion signal that changes in response to the digital speed value is generated by the signal separator; a signal distribution step, wherein the predicted movement signal from the signal separator is output and distributed to an ink discharge controller, and the position of the inkjet body is confirmed based on the predicted movement signal from the ink discharge controller; and an inkjet control step, wherein the position information of the inkjet body is adjusted and set based on the predicted movement signal from the ink discharge controller, and when the adjusted position corresponds to the inkjet position, a discharge command is sent to eject ink from the inkjet body.

[0028] According to an exemplary embodiment, in a step before the signal separator signal conversion step, an encoder signal output step may also be included, wherein when the ink module conveying part moves, a movement signal is output from the encoder for each unit movement distance, and in the signal separator signal conversion step, a predicted pulse wave can be generated based on the initial value of the movement signal output from the encoder and transmitted to the ink discharge controller.

[0029] According to an exemplary embodiment, in the demultiplexer signal conversion step, the demultiplexer may use a velocity curve for movement of the inkjet body and a predicted pulse wave curve configured to generate a predicted pulse wave according to a velocity of the velocity curve.

[0030] According to an exemplary embodiment, the velocity curve may be divided into an equivalent acceleration interval and an equivalent velocity interval, and in the equivalent velocity interval, predicted pulse waves of the same interval are transmitted to the ink discharge controller.

[0031] According to an exemplary embodiment, in the equivalent acceleration interval, the predicted pulse waves whose intervals become narrower in proportion to the slope of the equivalent acceleration interval are transmitted to the ink discharge controller.

[0032] According to an exemplary embodiment, in the signal distribution step, the predicted movement signal is output to each of the plurality of ink discharge controllers.

[0033] According to an exemplary embodiment, the ink module conveying portion may include: a module base in which an inkjet body is installed; an actuator driver configured to move the module base in one direction; and an ink module position controller configured to control an ejection position of ink by controlling the actuator driver to move the module base.

[0034] According to an exemplary embodiment, the ink module position controller may acquire position information of the module substrate from the encoder by interlocking with the encoder.

[0035] According to an exemplary embodiment, in a step before the inkjet body conveying step, a conveying object conveying step may also be included, in which the conveying object placed on the substrate conveying part is conveyed by a predetermined command of the substrate controller and placed in a specific position in the middle of the lower part of the inkjet body.

[0036] Yet another exemplary embodiment of the present invention provides a substrate processing apparatus, comprising: a substrate conveying portion in which a conveying object is placed; and a jetting system, the jetting system comprising: an inkjet body configured to eject ink from an upper surface of the substrate conveying portion to the conveying object and print on the conveying object; an ink module conveying portion configured to convey the inkjet body; an ink discharge controller configured to control inkjet timing of the inkjet body by interlocking with the inkjet body; a speed measuring portion configured to specify a moving speed of the inkjet body; and a signal separator configured to receive the moving speed of the inkjet body by interlocking with the speed measuring portion and transmit a predicted movement signal predicted based on the moving speed to the ink discharge controller, wherein the jetting system further comprises an encoder disposed around the ink module conveying portion and configured to output a movement signal for each unit moving distance of the ink module conveying portion, the signal separator generates a predicted pulse wave based on an initial value of the movement signal output from the encoder, and transmits the predicted pulse wave to the ink discharge controller, the signal separator uses a speed curve for the inkjet body and a predicted pulse wave curve. Movement, the predicted pulse wave curve is configured to generate a predicted pulse wave according to the speed of the speed curve, the speed curve is divided into an equivalent acceleration interval and an equivalent speed interval, and in the equivalent speed interval, the predicted pulse waves of the same interval are transmitted to the ink discharge controller, and in the equivalent acceleration interval, the predicted pulse waves with intervals narrowed in proportion to the slope of the equivalent acceleration interval are transmitted to the ink discharge controller, multiple inkjet bodies and multiple ink discharge controllers are interlocked to eject ink, the signal separator outputs the predicted pulse wave to each of the multiple ink discharge controllers, the ink discharge controller obtains the position information of the inkjet body by counting the number of inputs of the predicted pulse wave, the ink module conveying part includes: a module base, in which the inkjet body is installed; an actuator driver, which is configured to convey the module base in one direction; and an ink module position controller, which is configured to control the ejection position of the ink by controlling the actuator driver to move the module base, the ink module position controller obtains the position information of the module base from the encoder by interlocking with the encoder, and the substrate conveying part also includes a substrate controller, which is configured to convey the conveying object according to a predetermined work command.

[0037] According to an exemplary embodiment of the present invention, a signal separator outputs a predicted pulse wave to an ink discharge controller based on an encoder's motion signal and a digital velocity value. This allows the signal separator to separate the motion signal to multiple ink discharge controllers. This generates a predicted pulse wave that is more accurate than the encoder's pulse wave, thereby improving printing resolution. Furthermore, noise generated between the encoder and the signal separator is negligible, and even if pulse waves are lost or overlapped, the generated predicted pulse wave prevents errors in the inkjet ejection timing.

[0038] The effects of the present invention are not limited to the above-mentioned effects, and those skilled in the art can clearly understand unmentioned effects from this specification and the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 FIG. 4 is a structural diagram of a substrate processing apparatus according to an embodiment of the present invention.

[0040] Figure 2 It is compared from Figure 1 The graph shown is a pulse wave output by the encoder and a combined pulse wave output from the signal separator.

[0041] Figure 3 is a flowchart of a method for controlling a substrate processing apparatus according to an embodiment of the present invention. DETAILED DESCRIPTION

[0042] Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art to which the present invention pertains can easily implement the exemplary embodiments. In this case, unless expressly stated otherwise, the word "comprising" used throughout the specification should not be understood as excluding other elements, but rather as implying the inclusion of other elements. In addition, the term "part" in the specification refers to a unit that processes at least one function or operation when describing electronic hardware or electronic software, and is considered to refer to a component, function, purpose, point, or driving element when describing a machine device. The same or similar elements are given the same reference numerals regardless of their reference numerals, and repeated descriptions thereof are omitted.

[0043] Figure 1 is a block diagram of a substrate processing apparatus according to an embodiment of the present invention. Figure 2 It is compared from Figure 1 The graph shown is a pulse wave output by the encoder, a predicted pulse wave output from the signal separator, and a speed curve pre-stored in the signal separator.

[0044] like Figure 1 As shown, the substrate treating apparatus according to an exemplary embodiment of the present invention includes a substrate transferring portion 10 and a spray system unit 20 .

[0045] The substrate conveyor section 10 includes a conveyor base 11, on which a conveying object 1a is placed; a conveyor actuator driver 12, which conveys the conveyor base 11 along one or more axes; and a substrate controller 13, which controls the conveyor actuator driver 12. In this embodiment, the substrate conveyor section 10 is illustrated as a single-axis conveyor device for conveying the conveyor base 11 along a single axis. Here, the conveying object 1a conveyed by the substrate conveyor section 10 consists of a display substrate printed with ink, and is conveyed by the display substrate. However, in the present invention, the conveying object 1a conveyed by the substrate conveyor section 10 is not limited to a display substrate and can be implemented with various modifications, such as a printed circuit board. Here, the substrate conveyor section 10 is arranged to intersect with the ink module conveyor section 23, described below. For example, when the substrate conveyor section 10 conveys the conveying object 1a to the Y-axis on a plane based on the X-axis and the Y-axis, the ink module conveyor section 23 moves to the X-axis and along the plane. Furthermore, the substrate conveyor 10 can transmit positional information about the Y-axis of the conveying object 1a by interlocking with the ink discharge controller 25. In this case, the positional information about the Y-axis can be installed on the substrate conveyor 10 and transmitted from an encoding device that provides positional information about the Y-axis. Furthermore, the substrate controller 13 interlocks with the substrate conveyor 10 according to a preset operation command to convey the conveying substrate 11 of the substrate conveyor 10 and, accordingly, convey the conveying object 1a located on the conveying substrate 11. In this case, when the inkjet system unit 20 issues an inkjet command, the substrate controller 13 interrupts the conveyance of the conveying object 1a, and some areas of the conveying object 1a are moved a certain distance after they have been printed, and the next area is printed.

[0046] The jetting system unit 20 includes an inkjet main body 21 , an ink supply portion 22 , an ink module transfer portion 23 , an encoder 24 , an ink discharge controller 25 , a speed measuring portion 26 , and a signal separator 27 .

[0047] The inkjet main body 21 is formed by incorporating a piezoelectric element (not shown) and a head component (not shown), the piezoelectric element being installed in the head component and the ink passing through the head component. The inkjet main body 21 is connected to the ink supply portion 22, and when the ink supplied from the ink supply portion 22 flows into the flow path inside the head component, the piezoelectric element connected to the head component is driven to discharge the ink in the head component. However, the construction of the inkjet main body 21 in the present invention is not limited to the method of using a piezoelectric device, but can be modified into various forms, such as a type of heating the head part. In this case, the inkjet main body 21 is installed in the module base 23a to eject ink while changing the ejection position. A plurality of inkjet main bodies 21 can be provided, and they can be spaced apart from each other, and the plurality of inkjet main bodies 21 eject ink on the printing surface of the conveying object 1a at the same time, thereby shortening the ink application time.

[0048] The ink supply portion 22 pumps and supplies ink to the inkjet main body 21 by interlocking with the inkjet main body 21. In this case, the ink can be formed in various ways according to the process, such as display RGB light-emitting layer ink, conductive ink for wiring substrate layer, doping ink for doping semiconductors, and insulating ink for forming an insulating layer.

[0049] The ink module transport section 23 includes a module base 23a, on which the inkjet printer 21 is mounted; an actuator driver 23b, which transports the module base 23a in a single direction; and an ink module position controller 23c, which controls the actuator driver 23b and controls the ink ejection position by moving the module base 23a. A linear motor or linear actuator can be used to implement the actuator driver 23b, which transports the module base 23a along one or more axes by interlocking with the module base 23a. In the exemplary embodiment of the present invention, the ink module transport section 23 is described as a single-axis transport device for transporting the module base 23a along one axis. Here, multiple inkjet printers 21 can be arranged spaced apart in the ink module transport section 23. Furthermore, the ink module position controller 23c receives pulse waves 2a from an encoder 24, acquires positional information about the module base 23a, and controls the position of the inkjet printer 21 by controlling the actuator driver 23b based on the positional information from the encoder 24.

[0050] The encoder 24 is mounted around the ink module transport section 23 and detects the linear movement distance of the inkjet main body 21. In this embodiment, the encoder 24 outputs a pulse wave 2a to the signal separator 27 for each unit movement distance of the ink module transport section 23. This pulse wave is a signal corresponding to each movement distance. For example, the encoder 24 may output a pulse wave 2a for every 100 nm movement of the ink module transport section 23. In this case, when the transport speed of the ink module transport section 23 is 1 m / s, the interval between the pulse waves 2a outputted from the encoder 24 corresponds to 100 ns. In this case, as the transport speed of the ink module transport section 23 increases, the interval between the pulse waves 2a outputted from the encoder 24 becomes shorter.

[0051] A plurality of ink discharge controllers are provided and connected to each of the inkjet bodies 21, and control the ejection timing of the ink discharged from the inkjet bodies 21 by interlocking with each of the inkjet bodies 21. In this case, the ink discharge controller 25 receives the prediction pulse wave 3a formed by prediction from the signal separator 27 to adjust the ejection timing of the ink, obtains the position of the inkjet body 21 through the received prediction pulse wave 3a, and transmits an ink discharge command to the inkjet body 21 so that the ink can be ejected to the position where the ink must be ejected.

[0052] The speed measurement unit 26 includes a speed sensor (not shown) mounted in the ink module transport unit 23 to sense a physical velocity proportional to the movement speed of the inkjet main body 21, and a speed value conversion module (not shown) that converts the speed measured by the speed sensor into a digital speed value. The speed sensor can be implemented as various speed sensors, such as an acceleration sensor, a laser displacement sensor, or an encoder-type sensor. The speed measurement unit 26 converts the movement speed of the inkjet main body 21, which is moved by the ink module transport unit 23, into a digital speed value and transmits the converted speed to the signal separator 27.

[0053] The signal separator 27 is connected between the encoder 24 and the plurality of ink discharge controllers 25. It records the interval of the pulse wave 2a, which is a signal for each movement distance input from the encoder 24, and receives and records the digital velocity value by interlocking with the velocity measurement section 26. Furthermore, the signal separator 27 distinguishes whether the digital velocity value belongs to the equivalent acceleration interval 5a or the equivalent velocity interval 5b. Depending on the velocity interval, the signal separator 27 outputs a predicted pulse wave 3a to the ink discharge controller 25 based on the initial value of the pulse wave 2a input from the encoder 24. For example, when the inkjet main body 21 moves at an equivalent velocity of 1 m / s through the ink module transport section 23, generating pulse waves 2a with 100 ns intervals in the encoder 24, the signal separator 27 generates a predicted pulse wave 3a in which another pulse wave 2b is added between the pulse waves 2a of the encoder 24 to generate pulse waves 2a with 100 ns intervals, and outputs this to the ink discharge controller 25. In this case, the ink discharge controller 25 that receives the predicted pulse wave 3a counts the number of times the predicted pulse wave 3a is input and obtains the position information of the inkjet main body 21. In the exemplary embodiment, the predicted pulse wave 3a achieves a resolution twice that of the pulse wave 2a of the encoder 24, thereby doubling the accuracy of the printer. However, in the present invention, the resolution of the predicted pulse wave 3a is not limited to twice, and a more accurate resolution can be achieved by changing the multiple as needed. On the other hand, when the inkjet main body 21 passes through the ink module conveying part 23 at a speed of 10m / s 2 When the equivalent acceleration moves to generate the first pulse wave 2a of 100 ns interval in the encoder 24, and the interval of the pulse wave 2a decreases in proportion to the slope of the equivalent acceleration, the signal separator 27 outputs the first predicted pulse wave 3a of 100 ns interval, but outputs the predicted pulse wave 3a whose interval is reduced by two times in proportion to the slope of the equivalent acceleration to the ink discharge controller 25. In this case, the ink discharge controller 25, which receives the predicted pulse wave 3a that decreases in proportion to the slope of the equivalent acceleration, counts the number of inputs of the predicted pulse wave 3a and obtains the position information of the inkjet main body 21.

[0054] In this manner, since the demultiplexer 27 transmits the high-resolution predicted pulse wave 3a to the ink discharge controller 25 instead of the pulse wave 2a output from the encoder 24, the signal from the encoder 24 can be separated into multiple ink discharge controllers 25, and the printing resolution can be improved by the predicted pulse wave 3a, which is more accurate than the pulse wave 2a of the encoder 24. Furthermore, since the noise generated between the encoder 24 and the demultiplexer 27 is negligible, there is no error in the discharge timing of the inkjet body 21. Furthermore, since the demultiplexer 27 outputs the predicted pulse wave 3a instead of the pulse wave 2a output from the encoder 24, even if an omission interval 2c in which the pulse wave 2a is omitted or an overlap interval 2d in which the pulse wave 2a overlaps occurs in the encoder 24, this can be compensated.

[0055] Alternatively, as described above, the demultiplexer 27 can use a pre-stored velocity profile 5 and a predicted pulse wave profile 6 to generate a predicted pulse wave 3a based on the intervals and digital velocity values ​​output from the encoder 24. The pre-stored velocity profile 5 corresponds to pre-set data for driving the inkjet element 21 at an equivalent velocity and equivalent acceleration during its movement. In this case, the pre-stored velocity profile 5 is divided into an equivalent acceleration interval 5a and an equivalent velocity interval 5b. The demultiplexer 27 also stores and uses the predicted pulse wave profile 6 to correspond to the velocity profile 5. For example, if the digital velocity value of the inkjet element 21 corresponds to an equivalent velocity interval 5b within the velocity profile 5, indicating movement at an equivalent velocity of 1 m / s, the demultiplexer 27 generates a predicted pulse wave 3a corresponding to the equivalent velocity interval 5b at a more precise interval than the pulse wave 2a from the encoder 24. Similarly, if the digital velocity value of the inkjet element 21 corresponds to an equivalent acceleration interval 5a within the velocity profile 5, the demultiplexer 27 generates a predicted pulse wave 3a corresponding to the equivalent acceleration interval 5a within the predicted pulse wave profile 6. In this case, in the equivalent acceleration interval 5 a , the predicted pulse wave 3 a having a higher resolution than the pulse wave 2 a output from the encoder 24 can be generated.

[0056] Therefore, since the demultiplexer 27 transmits the predicted pulse wave 3a predicted according to the speed to the ink discharge controller 25 using the pre-stored speed curve 5 and the predicted pulse wave curve 6, the demultiplexer 27 can separate the signal from the encoder 24 to a plurality of ink discharge controllers 25. In addition, the print resolution can be improved by generating the predicted pulse wave 3a that is more accurate than the pulse wave 2a of the encoder 24, and the noise generated between the encoder 24 and the demultiplexer 27 can be ignored. In addition, even if the pulse wave 2a is omitted from the encoder 24, since the predicted pulse wave 3a is generated, no error will occur in the discharge timing of the inkjet main body 21.

[0057] Hereinafter, a control method of the substrate processing apparatus as described above will be described.

[0058] Figure 3 is a flowchart of a method for controlling a substrate processing apparatus according to an embodiment of the present invention.

[0059] Further references Figure 3 According to one embodiment of the present invention, a control method for a substrate processing apparatus includes a conveying object conveying step S10, an inkjet body conveying step S20, an encoder signal outputting step S30, a speed measuring step S40, a demultiplexer signal converting step S50, a signal distributing step S60, and an ink discharge controlling step S70.

[0060] First, in the conveying object conveying step S10, the display substrate as the conveying object 1a located on the substrate conveying part 10 is conveyed by a preset command from the base controller 13, and then the display substrate as the conveying object 1a is placed at a specific position in the middle of the lower part of the inkjet main body 21.

[0061] Next, in the inkjet body conveying step S20 , the ink module conveying part 23 conveys the inkjet body 21 disposed on the upper portion of the display substrate.

[0062] Next, in encoder signal output step S30, a pulse wave 2a is output as a movement signal for each distance traveled as the inkjet main body 21 moves. For example, as described above, the encoder 24 drives the ink module transport portion 23, so a pulse wave 2a is output every time the inkjet main body 21 moves 100 nm.

[0063] Next, in the velocity measuring step S40 , the velocity measuring part 26 measures the moving velocity of the inkjet body 21 , converts the measured velocity into a digital velocity value, and transmits the converted digital velocity value to the demultiplexer 27 .

[0064] Next, in the demultiplexer signal conversion step S50, the demultiplexer 27 records the intervals between the pulse waves 2a as signals for each moving distance input from the encoder 24, receives and records the digital speed value by interlocking with the speed measuring section 26, distinguishes whether the digital speed value belongs to the equivalent acceleration interval 5a or the equivalent speed interval 5b through the digital speed value, and generates a predicted pulse wave 3a in each speed interval based on the initial pulse wave input from the encoder 24. For example, as described above, when the inkjet body 21 moves at an equivalent speed of 1 m / s to generate a pulse wave 2a of 100 ns interval in the encoder 24, the demultiplexer 27 generates a predicted pulse wave or a precise predicted pulse wave of 100 ns interval by adding another pulse wave 2a between the pulse waves 2a of the encoder 24. When the inkjet body 21 moves at an equivalent speed of 10 m / s, the predicted pulse wave 3a is generated.2 When the vehicle moves at a constant acceleration, the signal separator 27 generates a predicted pulse wave 3a, the interval of which is further reduced in proportion to the slope of the constant acceleration compared to the pulse wave 2a of the encoder 24.

[0065] Furthermore, in the demultiplexer signal conversion step S50, the predicted pulse wave 3a can be generated using the pre-stored velocity curve 5 and the predicted pulse wave curve 6. For example, when the digital velocity value of the inkjet main body 21 corresponds to the equivalent velocity interval 5b in the velocity curve 5, in which the inkjet main body 21 moves at an equivalent velocity of 1 m / s, the demultiplexer 27 generates the predicted pulse wave 3a corresponding to the equivalent velocity interval 5b in the predicted pulse wave curve 6. Furthermore, when the digital velocity value of the inkjet main body 21 corresponds to the equivalent acceleration interval 5a in the velocity curve 5, the demultiplexer 27 generates the predicted pulse wave 3a corresponding to the equivalent acceleration interval 5a in the predicted pulse wave curve 6.

[0066] Next, in the signal distribution step S60, the signal separator 2 outputs and separates the predicted pulse wave 3a to each of the ink discharge controllers 25, and confirms the position of the inkjet body 21 based on the interval and count of the predicted pulse wave 3a in the ink discharge controller 25 that receives the predicted pulse wave 3a.

[0067] Next, in the ink discharge control step S70, the position information of the inkjet main body 21 is adjusted and set by counting the predicted pulse wave 3a received from the ink discharge controller 25. When the corresponding position corresponds to a position where ink is to be ejected, an ejection command is sent from the inkjet main body 21 to eject ink, and when the corresponding position does not correspond to a position where ink is not to be ejected, no ejection command is sent.

[0068] As described above, in the substrate processing apparatus and the method for controlling the substrate processing apparatus according to embodiments of the present invention, the demultiplexer 27 can output the predicted pulse wave 3a to the ink discharge controller 25 based on the movement signal and the digital velocity value of the encoder 24, thereby distributing the movement signal to a plurality of ink discharge controllers 25. Furthermore, the printing resolution can be improved by generating the predicted pulse wave 3a that is more accurate than the pulse wave 2a of the encoder 24. Furthermore, noise generated between the encoder 24 and the demultiplexer 27 can be ignored, and even if the pulse wave 2a is lost or overlapped in the encoder 24, the predicted pulse wave 3a can be generated, thereby avoiding errors in the discharge timing of the inkjet body 21.

[0069] The foregoing detailed description illustrates the present invention. In addition, the above description illustrates and describes exemplary embodiments of the present invention, and the present invention can be used in various other combinations, modifications and environments. That is, within the scope of the concept of the present invention disclosed herein (this scope is equivalent to written disclosure) and / or within the scope of the technology or knowledge in this field, changes or modifications are possible. The foregoing exemplary embodiments describe the best state for implementing the technical spirit of the present invention, and the specific application fields of the present invention and the various changes required for the use are possible. Therefore, the detailed description of the present invention above is not intended to limit the present invention to the disclosed exemplary embodiments. In addition, the appended claims should be interpreted as including other exemplary embodiments.

Claims

1. A substrate processing device, comprising: a substrate conveying portion in which a conveying object is placed; as well as an inkjet main body configured to eject ink from an upper surface of the substrate conveying portion toward the conveying object and print on the conveying object; an ink module conveying portion configured to convey the inkjet main body; an ink discharge controller configured to control ink ejection timing of the inkjet main body by interlocking with the inkjet main body; a speed measuring portion configured to specify a moving speed of the inkjet main body; and a signal separator configured to receive the moving speed of the inkjet main body by interlocking with the speed measuring portion and transmit a predicted movement signal predicted based on the moving speed to the ink discharge controller. wherein the ejection system unit further comprises an encoder disposed around the ink module conveying portion and configured to output a movement signal for each unit movement distance of the ink module conveying portion, and The signal separator uses a velocity curve and a predicted pulse wave curve, the velocity curve is used for the movement of the inkjet body, and the predicted pulse wave curve is configured to generate a predicted pulse wave according to the velocity of the velocity curve. 2 . The substrate processing apparatus according to claim 1 , wherein the velocity profile is divided into an equivalent acceleration interval and an equivalent velocity interval, and in the equivalent velocity interval, the predicted pulse waves of the same interval are transmitted to the ink discharge controller. 3 . The substrate processing apparatus according to claim 2 , wherein in the equivalent acceleration interval, the predicted pulse wave having an interval narrowed in proportion to a slope of the equivalent acceleration interval is transmitted to the ink discharge controller.

4. The substrate processing apparatus according to claim 1, wherein a plurality of inkjet bodies and a plurality of ink discharge controllers are interlocked to eject ink, and The demultiplexer outputs the predicted pulse wave to each of the plurality of ink discharge controllers. 5 . The substrate processing apparatus according to claim 1 , wherein the ink discharge controller acquires the position information of the ink ejecting body by counting the number of inputs of the predicted pulse wave.

6. The substrate processing apparatus according to claim 1, wherein the ink module transfer portion comprises: a module base in which the inkjet main body is mounted; an actuator driver configured to convey the module substrate in one direction; and an ink module position controller configured to control an ejection position of ink by controlling the actuator driver to move the module substrate. 7 . The substrate processing apparatus according to claim 6 , wherein the ink module position controller acquires position information of the module substrate from the encoder by interlocking with the encoder. 8 . The substrate processing apparatus according to claim 1 , wherein the substrate transfer portion further comprises a base controller configured to transfer the transfer object according to a predetermined work command.

9. A control method for a substrate processing device, the method comprising: an inkjet body conveying step of moving the inkjet body disposed in an upper portion of the conveying object by an ink module conveying portion; a speed measuring step of measuring the moving speed of the inkjet main body, converting the moving speed into a digital speed value by a speed measuring part, and transmitting the converted digital speed value to a signal separator; a demultiplexer signal conversion step, wherein a predicted movement signal that changes in response to the digital velocity value is generated by the demultiplexer; a signal distribution step of outputting and distributing the predicted movement signal from the signal separator to an ink discharge controller, and confirming the position of the inkjet body based on the predicted movement signal predicted from the ink discharge controller; and an ink discharge control step of adjusting and setting position information of the inkjet body based on the predicted movement signal predicted from the ink discharge controller, and sending a discharge command to eject ink from the inkjet body when the adjusted position corresponds to an ink ejection position, Wherein, in the step before the signal separator signal conversion step, an encoder signal output step is further included, wherein when the ink module conveying part moves, the movement signal for each unit movement distance is output from the encoder, and Wherein, in the signal conversion step of the signal separator, the signal separator uses a velocity curve and a predicted pulse wave curve, the velocity curve is used for the movement of the inkjet body, and the predicted pulse wave curve is configured to generate a predicted pulse wave according to the velocity of the velocity curve.

10. The control method for a substrate processing apparatus according to claim 9, wherein in the demultiplexer signal conversion step, a predicted pulse wave is generated based on an initial value of the movement signal output from the encoder and is transmitted to the ink discharge controller.

11. The control method for a substrate processing apparatus according to claim 9, wherein the velocity profile is divided into an equivalent acceleration interval and an equivalent velocity interval, and in the equivalent velocity interval, the predicted pulse waves of the same interval are transmitted to the ink discharge controller. 12 . The control method for a substrate processing apparatus according to claim 11 , wherein in the equivalent acceleration interval, the predicted pulse wave having an interval narrowed in proportion to a slope of the equivalent acceleration interval is transmitted to the ink discharge controller. 13 . The control method for a substrate processing apparatus according to claim 9 , wherein in the signal distribution step, the predicted movement signal is output to each of a plurality of ink discharge controllers.

14. The control method for a substrate processing apparatus according to claim 9, wherein the ink module transfer portion comprises: a module base in which the inkjet main body is mounted; an actuator driver configured to move the module substrate in one direction; and an ink module position controller configured to control an ejection position of ink by controlling the actuator driver to move the module substrate. 15 . The control method for a substrate processing apparatus according to claim 14 , wherein the ink module position controller acquires position information of the module substrate from the encoder by interlocking with the encoder.

16. A control method for a substrate processing device according to claim 9, wherein the step before the inkjet body conveying step also includes a conveying object conveying step, wherein the conveying object placed in the substrate conveying part is conveyed by a predetermined command of a substrate controller and placed in a specific position in the middle of the lower part of the inkjet body.

17. A substrate processing apparatus, comprising: a substrate conveying portion in which a conveying object is placed; as well as an ejection system unit, the ejection system unit comprising: an inkjet main body configured to eject ink from an upper surface of the substrate conveying portion toward the conveying object and print on the conveying object; an ink module conveying portion configured to convey the inkjet body; an ink discharge controller configured to control ink ejection timing of the ink ejection main body by interlocking with the ink ejection main body; a speed measuring portion configured to specify a moving speed of the ink ejection main body; and a signal separator configured to receive the moving speed of the ink ejection main body by interlocking with the speed measuring portion and transmit a predicted movement signal predicted based on the moving speed to the ink discharge controller, wherein the ejection system unit further comprises an encoder disposed around the ink module conveying portion and configured to output a movement signal for each unit movement distance of the ink module conveying portion, The signal separator generates a predicted pulse wave based on an initial value of the movement signal output from the encoder and transmits the predicted pulse wave to the ink discharge controller. The demultiplexer uses a velocity curve and a predicted pulse wave curve, the velocity curve being used for movement of the inkjet body, the predicted pulse wave curve being configured to generate a predicted pulse wave according to a velocity of the velocity curve, The velocity curve is divided into an equivalent acceleration interval and an equivalent velocity interval, and in the equivalent velocity interval, the predicted pulse waves of the same interval are transmitted to the ink discharge controller, In the equivalent acceleration interval, the predicted pulse wave whose interval becomes narrower in proportion to the slope of the equivalent acceleration interval is transmitted to the ink discharge controller, Multiple inkjet bodies and multiple ink discharge controllers are interlocked to eject ink, The signal separator outputs the predicted pulse wave to each of the plurality of ink discharge controllers. The ink discharge controller obtains the position information of the inkjet body by counting the number of inputs of the predicted pulse wave. The ink module conveying portion includes: a module base in which the inkjet main body is mounted; an actuator driver configured to convey the module base in one direction; and an ink module position controller configured to control an ejection position of ink by controlling the actuator driver to move the module base. The ink module position controller obtains the position information of the module substrate from the encoder by interlocking with the encoder, and The substrate transfer part further includes a base controller configured to transfer the transfer object according to a predetermined work command.

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