Safety fence, conveying device and apparatus for handling substrates

Abstract

A transfer device can include a transfer section including a transfer track installed on a ceiling of a production line for integrated circuit devices and a transfer vehicle traveling along the transfer track, and a safety fence disposed adjacent to the transfer section. The safety fence can include a plurality of first horizontal support sections disposed in parallel with the transfer track, a plurality of second horizontal support sections connecting the plurality of first horizontal support sections to the transfer track, a plurality of vertical support sections respectively extending from the plurality of first horizontal support sections, and a plate section connected to the plurality of vertical support sections. The safety fence can be partially foldable and partially unfoldable.

Description

[0001] Cross-reference to related applications

[0002] This application claims priority to Korean Patent Application No. 10-2021-0189877, filed on December 28, 2021, with the Korean Intellectual Property Office (KIPO), the contents of which are incorporated herein by reference in their entirety. Technical Field

[0003] Exemplary embodiments of the present invention relate to a safety barrier, a conveying device, and an apparatus for processing substrates. More specifically, exemplary embodiments of the present invention relate to a safety barrier capable of protecting a structure from interference caused below a production line for an integrated circuit device and protecting the structure below from falling objects. Exemplary embodiments of the present invention relate to a conveying device including such a safety barrier, and an apparatus for processing substrates including the safety barrier. Background Technology

[0004] In a production line for an integrated circuit device used in a semiconductor device or a display device, a processing section is provided for performing a predetermined process on a substrate, and a conveying section is installed for conveying items used in the manufacture of the integrated circuit device.

[0005] Typically, the conveyor section, including conveyor tracks and conveyor vehicles, can be installed on the ceiling of the production line. When the conveyor section is installed on the ceiling, it should be protected from interference caused by the line below, and the structures and personnel below should also be protected from objects falling from the conveyor section. For this purpose, safety railings can be installed along the conveyor tracks. However, newer processing sections may be close to the ceiling of the production line, making it difficult to properly open and close the doors of such processing sections when safety railings are near them. Summary of the Invention

[0006] One object of the present invention is to provide a safety barrier that can protect a structure from interference caused by the production line of an integrated circuit device and protect the structure below from the impact of falling objects.

[0007] Another object of the present invention is to provide a conveying device including a safety barrier that can protect the structure from interference caused below the production line of an integrated circuit device and protect the structure below from the impact of falling objects.

[0008] Another object of the present invention is to provide an apparatus for handling substrates including a safety barrier that can protect the structure from interference caused below the production line of an integrated circuit device and protect the structure below from the impact of falling objects.

[0009] According to an aspect of the present application, there is provided a safety fence for use in a production line of integrated circuit devices. The safety fence can include a plurality of first horizontal support portions disposed in parallel with a transfer track, a plurality of second horizontal support portions connecting the plurality of first horizontal support portions to the transfer track, a plurality of vertical support portions respectively extending from the plurality of first horizontal support portions, and a plate portion connected to the plurality of vertical support portions. The safety fence can be partially foldable and partially unfoldable.

[0010] In an exemplary embodiment, each of the plurality of vertical support portions can include an upper vertical support portion and a lower vertical support portion. The upper vertical support portion and the lower vertical support portion can be separable from each other.

[0011] In some exemplary embodiments, the safety fence can include two first horizontal support portions, six second horizontal support portions, and six vertical support portions. Three second horizontal support portions can connect one first horizontal support portion to one transfer track, and three vertical support portions can extend from one first horizontal support portion.

[0012] In an exemplary embodiment, when the safety fence is partially folded, some of the upper vertical support portions and some of the lower vertical support portions can be connected to each other, and others of the upper vertical support portions and others of the lower vertical support portions can be separated from each other.

[0013] In some exemplary embodiments, the upper vertical support portions and the lower vertical support portions can be connected to and separated from each other in a sliding coupling method, a screw coupling method, or a lever coupling method.

[0014] In some exemplary embodiments, the safety fence can be composed of one or more support modules including the first horizontal support portion, the second horizontal support portion, the vertical support portion, and the plate portion.

[0015] According to another aspect of the present application, there is provided a transfer apparatus. The transfer apparatus can include a transfer portion including a transfer track installed on a ceiling of a production line for integrated circuit devices and a transfer vehicle traveling along the transfer track, and a safety fence disposed adjacent to the transfer portion. The safety fence can include a plurality of first horizontal support portions disposed in parallel with the transfer track, a plurality of second horizontal support portions connecting the plurality of first horizontal support portions to the transfer track, a plurality of vertical support portions respectively extending from the plurality of first horizontal support portions, and a plate portion connected to the plurality of vertical support portions. The safety fence can be partially foldable and partially unfoldable.

[0016] In exemplary embodiments, each of the plurality of vertical support portions can include an upper vertical support portion and a lower vertical support portion. In some exemplary embodiments, the upper vertical support portions and the lower vertical support portions can be connected to and disconnected from each other in a sliding coupling method, a screw coupling method, or a lever coupling method.

[0017] In exemplary embodiments, when the safety fence is partially folded, some of the upper vertical support portions and some of the lower vertical support portions can be connected to each other, while others of the upper vertical support portions and others of the lower vertical support portions can be disconnected from each other.

[0018] In exemplary embodiments, a length of each of the lower vertical support portions can be substantially longer than a length of each of the upper vertical support portions.

[0019] In some exemplary embodiments, the safety fence can include two first horizontal support portions, six second horizontal support portions, and six vertical support portions. Three second horizontal support portions can connect one first horizontal support portion to one transfer track, and three vertical support portions can extend from one first horizontal support portion.

[0020] In some exemplary embodiments, the safety fence can be composed of one or more support modules including a first horizontal support portion, a second horizontal support portion, a vertical support portion, and a plate portion.

[0021] According to still another aspect of the present application, there is provided an apparatus for processing a substrate. The apparatus for processing a substrate can include a processing portion disposed in a production line for an integrated circuit device, the processing portion including a hinged door; a transfer portion including a transfer track installed on a ceiling of the production line and a transfer vehicle traveling along the transfer track; and a safety fence disposed in the vicinity of the transfer portion. The safety fence can include a plurality of first horizontal support portions disposed in parallel with the transfer track, a plurality of second horizontal support portions connecting the plurality of first horizontal support portions to the transfer track, a plurality of vertical support portions respectively extending from the plurality of first horizontal support portions, and a plate portion connected to the plurality of vertical support portions. The safety fence can be partially foldable such that the safety fence can not affect opening and closing of the door of the processing portion.

[0022] In exemplary embodiments, each of the plurality of vertical support portions can include an upper vertical support portion and a lower vertical support portion. The upper vertical support portions and the lower vertical support portions can be connected to and disconnected from each other in a sliding coupling method, a screw coupling method, or a lever coupling method.

[0023] In exemplary embodiments, when the safety fence is partially folded, some of the upper vertical support portions and some of the lower vertical support portions can be connected to each other, while others of the upper vertical support portions and others of the lower vertical support portions can be separated from each other.

[0024] In exemplary embodiments, the length of each of the lower vertical support portions can be substantially longer than the length of each of the upper vertical support portions.

[0025] In some exemplary embodiments, the safety fence can include two first horizontal support portions, six second horizontal support portions, and six vertical support portions. Three second horizontal support portions can connect one first horizontal support portion to one transfer track, and three vertical support portions can extend from one first horizontal support portion.

[0026] In some exemplary embodiments, the safety fence can be composed of one or more support modules including a first horizontal support portion, a second horizontal support portion, a vertical support portion, and a plate portion.

[0027] According to exemplary embodiments, an apparatus for processing a substrate can include a transfer device having a safety fence that is partially foldable and unfoldable, such that the apparatus for processing a substrate can effectively protect underlying structures and operators from being affected by objects falling from a ceiling of a production line, and can also sufficiently prevent disturbances caused below the production line. In addition, the safety fence can not affect opening and closing of a door of a processing portion, such that efficiency of the apparatus for processing a substrate can be improved. BRIEF DESCRIPTION OF DRAWINGS

[0028] Exemplary embodiments will become more fully understood from the detailed description given herein below, and the accompanying drawings, which are given by way of illustration only and thus are not limitative of the exemplary embodiments as described herein. The following drawings represent non-limiting exemplary embodiments as described herein.

[0029] Figure 1 FIG. 1 is a schematic perspective view illustrating a transfer device including a safety fence according to an exemplary embodiment of the present application.

[0030] Figure 2 and Figure 3 FIG. 2 is a schematic cross-sectional view illustrating a transfer device including a safety fence according to an exemplary embodiment of the present application.

[0031] Figure 4 FIG. 3 is a schematic perspective view illustrating an apparatus for processing a substrate including a safety fence according to an exemplary embodiment of the present application. DETAILED DESCRIPTION

[0032] Various embodiments will be described more fully hereinafter with reference to the accompanying drawings, in which some, but not all embodiments are shown. The present application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and fully convey the scope of the application to those skilled in the art. In the drawings, the size and relative sizes of layers and regions can be exaggerated for clarity.

[0033] It will be understood that when an element or layer is referred to as being "on" or "connected to" another element or layer, it can be directly on or connected to the other element or layer or intervening elements or layers can be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element or layer, there are no intervening elements or layers present. Like reference numerals denote like elements throughout. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0034] It will be understood that, although the terms first, second, third, etc. can be used herein to describe various elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present application.

[0035] Spatially relative terms, such as "under", "below", "lower", "over", "upper" and the like, can be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientations depicted in the figures. For example, if a device described is turned over, elements described as "under" or "below" other elements or features would then be oriented "over" the other elements or features. Thus, the exemplary term "under" can encompass both an orientation of over and under. The device can be otherwise oriented (e.g., rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

[0036] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0037] Embodiments are described herein with reference to cross-sectional illustrations that are schematic illustrations of idealized embodiments (and intermediate structures) and variations are possible. Thus, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and / or tolerances, are to be expected. Therefore, embodiments should not be construed as limited to the particular shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, an implanted region illustrated as a rectangle will, typically, have rounded or curved features and / or a gradient of implant concentration at its edges rather than a binary change between implanted and non-implanted region. Similarly, a buried region formed by implantation can result in some implantation in the region between the buried region and the surface through which implantation occurs. Thus, the regions illustrated in the figures are schematic and their shapes are not intended to illustrate the precise shape of a region of a device and are not intended to limit the scope of the present application.

[0038] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

[0039] Figure 1 is a schematic perspective view showing a conveying device including a safety fence according to an exemplary embodiment of the present application. Figure 2 and Figure 3 is a schematic cross-sectional view showing a conveying device including a safety fence according to an exemplary embodiment of the present application.

[0040] Referring to Figure 1 A conveying device 100 according to an exemplary embodiment can include a safety fence 13 and a conveying portion 11. The safety fence 13 can be disposed adjacent to the conveying portion 11.

[0041] The conveying part 11 can accommodate articles used when manufacturing an integrated circuit device, and can convey the articles to a desired location. The conveying part 11 can be installed on a ceiling of a production line for integrated circuit devices. In an exemplary embodiment, the conveying part 11 can include a conveying track and a conveying vehicle. The conveying track can provide a conveying path in which articles are conveyed and along which the conveying vehicle can travel on the conveying track. The articles can be accommodated in the conveying vehicle. Examples of the articles can include, but are not limited to, front opening unified pods (FOUPs), front opening shipping boxes (FOSBs), etc. The conveying part 11 can include a pair of conveying tracks substantially facing each other. The conveying vehicle can include an accommodation part for accommodating the articles and running wheels for moving along the conveying tracks.

[0042] In an exemplary embodiment, the safety fence 13 can be provided in a production line of integrated circuit devices, such as semiconductor devices or display devices. In particular, the safety fence 13 can protect a ceiling of the production line and structures on the production line from disturbances below the production line. In addition, the safety fence 13 can protect the structures below and operators from objects falling from the ceiling of the production line. For example, when the conveying part 11 is provided on the ceiling of the production line, the conveying part 11 should be protected from disturbances generated below the production line, and the structures below and the operators should be protected from objects falling from the conveying part 11. To this end, the safety fence 13 can be provided around the conveying part 11 along the conveying tracks.

[0043] Figure 4 FIG. 1 is a schematic perspective view showing an apparatus for processing a substrate including a safety fence according to an exemplary embodiment of the present application.

[0044] Referring to Figure 4 The apparatus for processing a substrate 200 according to an exemplary embodiment can include the safety fence 13 having the above-described structure, the conveying part 11 protected by the safety fence 13, and the processing part 41 for performing a predetermined process on the substrate. In an exemplary embodiment, the processing part 41 can include a hinged door 43. Here, the processing part 41 can have a height close to a ceiling of the production line in order to manufacture a recent display device having a relatively large size. The processing part 41 can include, but is not limited to, a cabinet, a stacker, etc.

[0045] As Figure 4As shown, the conveying device 100 including the safety fence 13 can be located near the processing part 41 so that the articles can be conveyed from the conveying part 11 to the processing part 41. However, when the processing part 41 of the apparatus 200 for processing the substrate has a height close to the ceiling of the production line, the door 43 of the processing part 41 can not be sufficiently opened due to the adjacent safety fence 13. In consideration of such a problem, the safety fence 13 according to an exemplary embodiment can have a configuration that has no influence on the opening and closing of the door 43 of the processing part 41.

[0046] In an exemplary embodiment, the safety fence 13 can have a folding configuration as shown in Figure 2 and Figure 3 . Specifically, the safety fence 13 can include a portion that can be folded toward the ceiling of the production line adjacent to the processing part 41. That is, when the safety fence 13 is adjacent to the door 43 of the processing part 41, the safety fence 13 can be partially folded in the upward direction. In this way, when the safety fence 13 is in the partially folded state, the safety fence 13 does not interfere with the opening and closing of the door 43. In this case, the other portion of the safety fence 13 can be in the unfolded state.

[0047] Referring to Figures 1 to 3 , the safety fence 13 can include first horizontal support portions 15, second horizontal support portions 23, vertical support portions 17 and 19, and a plate portion 21.

[0048] The first horizontal support portions 15 can be respectively disposed substantially parallel to the conveying rails of the conveying part 11, and can be spaced apart from the conveying rails by a predetermined distance. The second horizontal support portions 23 can be respectively disposed between the first horizontal support portions 15 and the conveying rails. The second horizontal support portions 23 can connect the first horizontal support portions 15 to the conveying rails. As shown in Figure 1 , each of the second horizontal support portions 23 can extend from each of the first horizontal support portions 15. For example, two second horizontal support portions 23 can connect one first horizontal support portion 15 to one conveying rail. However, the number of the second horizontal support portions 23 can be increased or decreased according to the configuration / size of the safety fence 13.

[0049] The vertical support portions 17 and 19 can extend from the first horizontal support portions 15 in a downward direction with respect to the ceiling of the production line, respectively. In this case, each of the second horizontal support portions 23 can substantially correspond to each of the vertical support portions 17 and 19 to improve the structural stability of the safety fence 13. The first horizontal support portions 15 and the vertical support portions 17 and 19 are connected to the plate portion 21. The plate portion 21 can protect the conveying portion 11 from interference caused below the production line, and also can prevent the structure below the conveying portion 11 from being damaged due to the objects falling from the conveying portion 11. For example, the plate portion 21 can have a mesh structure to reduce the weight of the safety fence 13.

[0050] According to an exemplary embodiment, the safety fence 13 can be folded in an upward direction and unfolded in a downward direction by adjusting the vertical support portions 17 and 19. Specifically, the safety fence 13 can include a plurality of first horizontal support portions 15 and a plurality of vertical support portions 17 and 19. The plurality of vertical support portions 17 and 19 can extend from the plurality of first horizontal support portions 15 in a downward direction with respect to the ceiling of the production line, respectively. Each of the plurality of vertical support portions 17 and 19 can include an upper vertical support portion and a lower vertical support portion. In this case, the upper vertical support portion and the lower vertical support portion can be detachably coupled to each other. In addition, the length of the lower vertical support portion can be substantially greater than the length of the upper vertical support portion. In other words, when the safety fence 13 is in a folded state as shown in FIG. 1A, the upper vertical support portions and the lower vertical support portions of some of the vertical support portions 17 and 19 adjacent to the handling portion 41 are coupled to each other. On the contrary, when the safety fence 13 is in an unfolded state as shown in FIG. 1B, the upper vertical support portions and the lower vertical support portions of some of the vertical support portions 17 and 19 away from the handling portion 41 are separated from each other. Figure 3 Figure 2

[0051] For example, as shown in FIG. 1A, when the safety fence 13 includes nine vertical support portions 17 and 19, the upper vertical support portions and the lower vertical support portions of three vertical support portions 17 and 19 can be separated from each other, and the upper vertical support portions and the lower vertical support portions of six vertical support portions 17 and 19 can be coupled to each other. However, the number of the separated vertical support portions and the coupled vertical support portions can vary depending on the structure / size of the handling portion 41 and / or the structure / size of the conveying device 100. Here, the upper vertical support portion can be coupled to and separated from the lower vertical support portion by a sliding coupling method, a screw coupling method, and / or a lever coupling method. Figure 4

[0052] In some exemplary embodiments, as shown in FIG. 1A, the upper vertical support portion and the lower vertical support portion of each of the vertical support portions 17 and 19 can be coupled to each other. In this case, the upper vertical support portion and the lower vertical support portion can be coupled to each other by a sliding coupling method, a screw coupling method, and / or a lever coupling method. Figure 1 ​​​As shown, the upper vertical support portions and the lower vertical support portions of some vertical support portions 19 can be connected and separated in a sliding coupling method, while the upper vertical support portions and the lower vertical support portions of other vertical support portions 17 can be connected and separated in a screw coupling method. For example, when the safety fence 13 includes three vertical support portions 17 and 19, the upper vertical support portions and the lower vertical support portions of the side vertical support portions 19 can be connected and separated in a sliding coupling method, while the upper vertical support portions and the lower vertical support portions of the center vertical support portion 17 can be connected and separated in a screw coupling method. In this case, the upper vertical support portions and the lower vertical support portions combined in a screw method can stably maintain the folded and unfolded states of the safety fence 13.

[0053] In other exemplary embodiments, as shown in FIGS. 1A and 1B, the upper vertical support portions and the lower vertical support portions of some vertical support portions 19 can be connected and separated in a sliding coupling method, while the upper vertical support portions and the lower vertical support portions of other vertical support portions 17 can be connected and separated in a lever coupling method. For example, when the safety fence 13 includes three vertical support portions 17 and 19, the upper vertical support portions and the lower vertical support portions of the side vertical support portions 19 can be connected and separated in a sliding coupling method, while the upper vertical support portions and the lower vertical support portions of the center vertical support portion 17 can be connected and separated in a lever coupling method. Here, the upper vertical support portions and the lower vertical support portions combined in a lever method can more stably maintain the folded and unfolded states of the safety fence 13. Figure 2 Figure 3 In other exemplary embodiments, as shown in FIGS. 1A and 1B, the upper vertical support portions and the lower vertical support portions of some vertical support portions 19 can be connected and separated in a sliding coupling method, while the upper vertical support portions and the lower vertical support portions of other vertical support portions 17 can be connected and separated in a lever coupling method. For example, when the safety fence 13 includes three vertical support portions 17 and 19, the upper vertical support portions and the lower vertical support portions of the side vertical support portions 19 can be connected and separated in a sliding coupling method, while the upper vertical support portions and the lower vertical support portions of the center vertical support portion 17 can be connected and separated in a lever coupling method. Here, the upper vertical support portions and the lower vertical support portions combined in a lever method can more stably maintain the folded and unfolded states of the safety fence 13.

[0054] In other exemplary embodiments, the safety fence 13 can include vertical support portions 17 and 19 having a linear motion (LM) guide structure. In other words, the lower vertical support portions of the vertical support portions 17 and 19 can have the LM guide structure, and the upper vertical support portions of the vertical support portions 17 and 19 can have a frame structure capable of sliding through the LM guide structure, respectively. Accordingly, the safety fence 13 can be smoothly and stably folded and unfolded by the vertical support portions 17 and 19.

[0055] In exemplary embodiments, the safety fence 13 can be composed of one or more support units. For example, the support unit can include two first horizontal support portions 15, six second horizontal support portions 23, six vertical support portions 17 and 19, and one plate portion 21. In other words, the safety fence 13 can be composed of one or more support modules including support portions and a plate portion.

[0056] ​As described above, the apparatus for processing a substrate 200 can include the conveying device 100 having the partially foldable and unfoldable safety fence 13, so that the apparatus for processing a substrate 200 can effectively protect the underlying structure and the operator from the falling objects from the ceiling of the production line, and also can sufficiently prevent the disturbance caused under the production line. In addition, the safety fence 13 can not affect the opening and closing of the door 43 of the processing portion 41, so that the efficiency of the apparatus for processing a substrate 200 can be improved.

[0057] The foregoing is illustrative of various embodiments and is not to be construed as limiting thereof. Although a few embodiments have been described, those skilled in the art will readily understand that many modifications can be made to the embodiments without materially departing from the novel teachings and advantages of this application. Accordingly, all such modifications are intended to be included within the scope of the present application as defined in the claims. In the claims, means-plus-function clauses are employed in which the function of the means is appended to the claim. Such clauses are intended to cover both implementing structures that perform the recited function and equivalent structures that do not perform the recited function but that have structurally equivalent, even if not functionally equivalent, characteristics. Therefore, the claims are not limited to the exact implementation set forth herein making use of the means-plus-function clauses. Accordingly, those who read and understand this disclosure will appreciate that many modifications can be made thereunto without departing from the spirit and scope of the claims.

Claims

1. A safety fence for use in a production line of integrated circuit devices, comprising: a plurality of first horizontal support portions disposed in parallel with a conveyance track; a plurality of second horizontal support portions connecting the plurality of first horizontal support portions to the conveyance track; a plurality of vertical support portions respectively extending from the plurality of first horizontal support portions; and a plate portion connected to the plurality of vertical support portions, wherein the safety fence is partially foldable and partially unfoldable, each of the plurality of vertical support portions includes an upper vertical support portion and a lower vertical support portion, some of the upper vertical support portions and some of the lower vertical support portions are spaced apart from each other in a state in which the safety fence is unfolded, and are connected to each other in a state in which the safety fence is folded, when the safety fence is partially folded, some of the upper vertical support portions and some of the lower vertical support portions are connected to each other, and others of the upper vertical support portions and others of the lower vertical support portions are separated from each other. the upper vertical support portions and the lower vertical support portions are separable from each other.

2. The safety fence according to claim 1, wherein, the safety fence includes two first horizontal support portions, six second horizontal support portions, and six vertical support portions, and wherein three of the second horizontal support portions connect one of the first horizontal support portions to one of the conveyance tracks, and three of the vertical support portions extend from one of the first horizontal support portions.

3. The safety fence according to claim 2, wherein, the upper vertical support portions and the lower vertical support portions are connected to and separated from each other in a sliding coupling method, a screw coupling method, or a lever coupling method.

4. The safety fence of claim 2, wherein, the safety fence is composed of one or more support modules including the first horizontal support portions, the second horizontal support portions, the vertical support portions, and the plate portion.

5. The safety fence of claim 1, wherein, 6. A conveyance apparatus, comprising: a conveyance portion including a conveyance track installed on a ceiling of a production line for integrated circuit devices, and a conveyance vehicle traveling along the conveyance track; and a safety fence disposed adjacent to the conveyance portion, the safety fence including: a plurality of first horizontal support portions disposed in parallel with the conveyance track; a plurality of second horizontal support portions connecting the plurality of first horizontal support portions to the conveyance track; a plurality of vertical support portions respectively extending from the plurality of first horizontal support portions; and a plate portion connected to the plurality of vertical support portions, wherein the safety fence is partially foldable and partially unfoldable, each of the plurality of vertical support portions includes an upper vertical support portion and a lower vertical support portion, some of the upper vertical support portions and some of the lower vertical support portions are spaced apart from each other in a state in which the safety fence is unfolded, and are connected to each other in a state in which the safety fence is folded, when the safety fence is partially folded, some of the upper vertical support portions and some of the lower vertical support portions are connected to each other, and others of the upper vertical support portions and others of the lower vertical support portions are separated from each other. ​ ​ 7. The conveyor of claim 6, wherein, The upper vertical support portions and the lower vertical support portions are connected to and separated from each other in a sliding coupling method, a screw coupling method, or a lever coupling method.

8. The conveyor of claim 7, wherein, Each of the lower vertical support portions is longer in length than each of the upper vertical support portions.

9. The conveyor of claim 6, wherein, The safety fence includes two first horizontal support portions, six second horizontal support portions, and six vertical support portions, and wherein three of the second horizontal support portions connect one of the first horizontal support portions to one of the transfer tracks, and three of the vertical support portions extend from one of the first horizontal support portions.

10. The conveyor of claim 9, wherein, The safety fence is composed of one or more support modules including the first horizontal support portions, the second horizontal support portions, the vertical support portions, and the plate portions.

11. An apparatus for processing a substrate, comprising: a processing portion disposed in a production line for integrated circuit devices, the processing portion including a hinged door; a transfer portion including a transfer track mounted on a ceiling of the production line and a transfer vehicle traveling along the transfer track; and a safety fence disposed adjacent to the transfer portion, the safety fence including: a plurality of first horizontal support portions disposed in parallel with the transfer track; a plurality of second horizontal support portions connecting the plurality of first horizontal support portions to the transfer track; a plurality of vertical support portions respectively extending from the plurality of first horizontal support portions; and a plate portion connected to the plurality of vertical support portions, wherein the safety fence is capable of being partially folded such that the safety fence does not affect opening and closing of the hinged door of the processing portion, each of the plurality of vertical support portions includes an upper vertical support portion and a lower vertical support portion, some of the upper vertical support portions and some of the lower vertical support portions are spaced apart from each other in a state in which the safety fence is unfolded, and are connected to each other in a state in which the safety fence is folded, when the safety fence is partially folded, some of the upper vertical support portions and some of the lower vertical support portions are connected to each other, and others of the upper vertical support portions and others of the lower vertical support portions are separated from each other.

12. The apparatus for processing a substrate of claim 11, wherein, The upper vertical support portions and the lower vertical support portions are connected to and separated from each other in a sliding coupling method, a screw coupling method, or a lever coupling method.

13. The apparatus for processing a substrate of claim 12, wherein, Each of the lower vertical support portions is longer in length than each of the upper vertical support portions.

14. The apparatus for processing a substrate of claim 11, wherein, The safety fence includes two first horizontal support portions, six second horizontal support portions, and six vertical support portions, and wherein three of the second horizontal support portions connect one of the first horizontal support portions to one of the transfer tracks, and three of the vertical support portions extend from one of the first horizontal support portions.

15. The apparatus for processing a substrate of claim 14, wherein, The safety fence is composed of one or more support modules including the first horizontal support portions, the second horizontal support portions, the vertical support portions, and the plate portions.

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