Temperature sensing device, and micro-zone temperature field detection system and method using the same

Abstract

The application provides a temperature measurement sensor device, and a micro-region temperature field detection system and method applicable to the temperature measurement sensor device. The temperature measurement sensor device comprises: a micro-nano fiber grating probe, a front end of the micro-nano fiber grating probe being prepared based on three-dimensional printing, the micro-nano fiber grating probe being suitable for measuring temperature sensing information of a surface and surroundings of a sample; a tuning fork sensor, the tuning fork sensor being attached to the micro-nano fiber grating probe, the tuning fork sensor being suitable for outputting a tuning fork signal to the micro-nano fiber grating probe; and a feedback driving module, the feedback driving module being connected to the tuning fork sensor and being suitable for demodulating the tuning fork signal. The temperature measurement sensor device, the micro-region temperature field detection system and the method applicable to the temperature measurement sensor device realize non-invasive high spatial resolution temperature distribution imaging by applying the micro-nano fiber grating probe prepared based on three-dimensional printing to temperature sensing measurement.

Description

TECHNICAL FIELD

[0001] The present application mainly relates to the field of optical fiber sensing temperature measurement technology, in particular to a temperature measurement sensing device and a micro-area temperature field detection system and method suitable for the same. BACKGROUND

[0002] In the development process of the semiconductor industry, Moore's Law predicts the development rule of the semiconductor industry for nearly 50 years. However, in recent years, with the development of semiconductor technology to the nanometer level, the heat dissipation problem of the chip makes Moore's Law no longer applicable. Because the chip runs at a very fast speed, the heat accumulation of each transistor is also very fast, and damage to the transistor caused by heat is prone to occur. At present, the following methods are adopted to avoid the limitation of chip heating on the performance improvement of the chip: limiting the clock frequency of the processor, increasing the multi-core parallel processor, and finding new materials to replace silicon. However, the fundamental problem of chip heating has not been solved. To solve this problem, we first need to know where the problem is. Therefore, a high-speed and micro-nano area temperature field detection means is needed.

[0003] When the existing thermal sensing technology is applied to the micro-area temperature measurement of the semiconductor core device, the following difficulties exist: 1. The size of the thermocouple probe is generally greater than 1 μm, and the time resolution cannot reach the accuracy of detecting the heat accumulation measurement process of the chip due to the limitation of the probe reading. In addition, since most thermocouples are made of metal, they will interfere with the normal operation of the chip when they come into contact with the chip type sample; 2. The 3ω method is generally suitable for the measurement of nanometer materials, which requires placing the nanometer material between two electrodes and applying an alternating current signal with a frequency of 3ω to ultimately obtain a voltage signal containing material thermal parameter information. Therefore, this measurement method is not suitable for the detection of local temperature of the chip; 3. The thermal sensitive electrical parameter method is used to measure a specific PN junction in the semiconductor device, and the measurement needs to be carried out when the chip is not in working condition; 4. The scanning thermal field microscope is a temperature measurement method based on atomic force feedback, and its main measurement component is a probe. Generally, the probe of the scanning thermal field microscope contains metal components, which may interfere with the normal operation of the chip; 5. The transient thermal reflection method requires a layer of metal to be plated on the surface of the measured sample, so it cannot guarantee the integrity of the measured sample; 6. The Raman spectroscopy method needs to use strong laser to excite the sample, which causes great damage to some samples. Moreover, when reaching high temperature, the Raman signal of the material will have a large noise; 7. The infrared thermal imaging technology is a relatively mature thermal detection method, but the spatial resolution is limited by the diffraction limit of light; 8. The spatial resolution of the reflective temperature measurement of the optical fiber terminated with the thermal sensitive reflectivity material depends on the size of the reflectivity material, and the current conditions cannot achieve micro-area temperature measurement. SUMMARY

[0004] The technical problem solved by the present application is to provide a temperature sensing device, a micro-region temperature field detection system and method suitable for the same, which realizes non-invasive high spatial resolution temperature distribution imaging by using a micro-nano fiber grating probe prepared by three-dimensional printing for temperature sensing measurement.

[0005] To solve the above technical problem, the present application provides a temperature sensing device, comprising: a micro-nano fiber grating probe, a front end of the micro-nano fiber grating probe is prepared based on three-dimensional printing, and the micro-nano fiber grating probe is suitable for measuring temperature sensing information of a surface and surroundings of a sample; a tuning fork sensor attached to the micro-nano fiber grating probe, the tuning fork sensor is suitable for outputting a tuning fork signal to the micro-nano fiber grating probe; and a feedback driving module connected to the tuning fork sensor and suitable for demodulating the tuning fork signal.

[0006] In an embodiment of the present application, the front end of the micro-nano fiber grating probe is in a reverse pyramid shape, the front end has a tip, and the tip is located at a vertex of the reverse pyramid shape.

[0007] In an embodiment of the present application, the front end further has a base opposite to the tip, and the base is a smooth plane with a diameter less than 40 μm.

[0008] In an embodiment of the present application, the front end comprises a multi-stage grating structure, and a diameter of the multi-stage grating structure gradually decreases in a direction tending to the tip.

[0009] In an embodiment of the present application, the multi-stage grating structure has a preset grating length, grating diameter, grating period and / or grating duty cycle, and the preset grating length, grating diameter, grating period and / or grating duty cycle are prepared by adjusting the three-dimensional printing parameters in the process of three-dimensional printing.

[0010] In an embodiment of the present application, the tuning fork signal comprises a frequency signal, an amplitude signal and a phase signal.

[0011] In an embodiment of the present application, the feedback driving module is connected to the sample while being connected to the tuning fork sensor, and the feedback driving module is configured to switch between a first driving mode and a second driving mode, wherein the first driving mode comprises controlling the micro-nano fiber grating probe to move while the sample remains stationary, and the second driving mode comprises controlling the sample to move while the micro-nano fiber grating probe remains stationary.

[0012] In an embodiment of the present application, the feedback driving module is configured to control the micro-nano fiber grating probe to move in a three-dimensional space according to the demodulation result of the tuning fork signal, so as to control the spacing between the micro-nano fiber grating probe and the sample.

[0013] To solve the above problems, another aspect of the present application also provides a micro-area temperature field detection system, which comprises the temperature measurement sensing device, a laser device adapted to emit laser light, a circulator having a first end, a second end and a third end, wherein the laser light emitted by the laser device is input into the circulator from the first end, and the temperature measurement sensing device is connected to the second end, and a spectrometer connected to the third end.

[0014] Another aspect of the present application also provides a micro-area temperature field detection method, which is suitable for the micro-area temperature field detection system, and comprises the following steps: causing the laser device to emit laser light, and causing the laser light to be output from the second end to the temperature measurement sensing device after being input into the circulator from the first end; causing the laser light to reach the sample after passing through the micro-nano fiber grating probe of the temperature measurement sensing device, and causing the temperature sensing information of the surface and the surrounding of the sample to be measured by the micro-nano fiber grating probe to form a reflected signal; and causing the reflected signal to be output from the third end to the spectrometer after being input into the circulator from the second end.

[0015] Compared with the prior art, the present application has the following advantages: the micro-nano fiber grating probe prepared by combining three-dimensional printing means is used for temperature sensing measurement, the near-field optical microscopy principle and the temperature characteristics of the grating structure are combined, and non-invasive high-resolution temperature imaging applied to biological samples and other samples with high fineness requirements can be realized, and in particular, high-resolution sensing of temperature distribution of biological macromolecules, biological tissues and living cells is realized, which has the advantages of higher resolution and non-invasiveness. BRIEF DESCRIPTION OF DRAWINGS

[0016] The accompanying drawings are included to provide a further understanding of the present application, and they are collected and constitute a part of the present application, which show embodiments of the present application, and together with the present specification, play a role in explaining the principles of the present application. In the drawings:

[0017] Figure 1 is a system architecture diagram of a micro-area temperature measurement sensing device and a micro-area temperature field detection system suitable therefor according to an embodiment of the present application;

[0018] Figure 2 is an instrument arrangement architecture diagram of a micro-area temperature measurement sensing device and a micro-area temperature field detection system suitable therefor according to an embodiment of the present application; and

[0019] Figure 3is a flowchart of a micro-zone temperature field detection method according to an embodiment of the present application. DETAILED DESCRIPTION

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some examples or embodiments of the present application, and for those skilled in the art, the present application can also be applied to other similar scenarios without creative labor on the basis of these drawings. Unless it is clear from the language context or otherwise indicated, the same reference numbers in the drawings represent the same structures or operations.

[0021] As shown in the present application and claims, unless the context clearly indicates otherwise, the words "one", "an", "a", and / or "the" do not specify a singular form, but can also include a plural form. Generally speaking, the terms "comprise" and "include" only indicate the inclusion of the steps and elements explicitly identified, and these steps and elements do not constitute an exclusive list, and the method or device can also include other steps or elements.

[0022] Unless otherwise specifically indicated, the relative arrangement of the components and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that the sizes of the various parts shown in the drawings are not drawn in accordance with the actual proportional relationship for the convenience of description. The technology, methods and devices known to those skilled in the relevant art can not be discussed in detail, but under appropriate circumstances, the technology, methods and devices should be considered as part of the authorized description. In all examples shown and discussed here, any specific value should be interpreted as merely exemplary, and not as a limitation. Therefore, other examples of exemplary embodiments can have different values. It should be noted that similar reference numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0023] In the description of the present application, it should be understood that the orientation words such as "front, back, up, down, left, right", "horizontal, vertical, perpendicular, horizontal" and "top, bottom" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and in the absence of contrary indications, these orientation words do not indicate and imply that the indicated device or element must have a particular orientation or be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the scope of protection of the present application; the orientation words "inner, outer" refer to the inner and outer relative to the contour of the parts themselves.

[0024] For purposes of the description hereinafter, spatially relative terms, such as "above", "below", "up", "down", "right", "left", and the like, are used for ease of describing the illustrated embodiments. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientations depicted in the figures. For example, if a device described is turned over, then a relative term such as "above" or "up" can include both the orientations of above or up as shown in the figures, and below or down, respectively. Accordingly, the exemplary term "above" can encompass both a position above and a position below. The device can be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

[0025] In addition, it should be noted that the use of "first", "second", and the like, terminology simply identifies the names of the components, and does not otherwise limit the scope of the application, unless otherwise specifically indicated. Also, the term "exemplary" is used herein to mean "serving as an example, instance, or illustration." Any implementation described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other implementations. The terms "comprises", "comprising", "includes", "including", or the like, are used herein to generally mean one or more components, steps, or the like, are included. It will be understood by those within the art that the term "comprises" is not intended to exclude the presence of other components, steps, or the like, even if not specifically listed. It will also be understood by those within the art that the term "comprising" is used herein to mean the presence of one or more components, steps, or the like, but not to the exclusion of other components, steps, or the like. The term "comprising" is used herein to mean the presence of one or more components, steps, or the like, but not to the exclusion of other components, steps, or the like.

[0026] It will be understood that when a component, such as a layer, film, region, or substrate, is referred to as being "on" or "connected to" another component, it can be directly on or connected to the other component or intervening components can be present. In contrast, when a component, such as a layer, film, region, or substrate, is referred to as being "directly on" or "directly connected to" another component, there are no intervening components present. Also, it will be understood that when a first component is referred to as being "electrically connected" or "electrically coupled" to a second component, there is an electrical path between the first component and the second component that allows electrical current to flow from the first component to the second component. The electrical path can include capacitors, coupled inductors, and / or other components that allow electrical current to flow, even if there is no direct contact between conductive components.

[0027] The present application is described with reference to Figure 1 A temperature sensing device 11 is presented, with reference to Figure 1 A micro-zone temperature field detection system 10 is presented. As shown in Figure 1 The temperature sensing device 11 includes a micro-nano fiber grating probe 111, a tuning fork sensor 112, and a feedback driving module 113. Further specifically,Figure 1 A partial enlarged view of the front end portion 1110 of the micro-nano fiber grating probe 111 is also shown, the front end portion 1110 of the micro-nano fiber grating probe 111 is prepared based on three-dimensional printing, for example, the front end portion 1110 can be printed by using a two-photon 3D printing technology, and a 3D printing material such as a photoresist polymer material can be selected. In addition, when the substrate (a region other than the front end portion 1110) of the micro-nano fiber grating probe 111 is prepared, a method such as a pull-tower method or a chemical etching method can be selected, and the present application does not limit this.

[0028] The micro-nano fiber grating probe 111 is suitable for measuring temperature sensing information of the surface and surrounding of the sample 100. For example, the sample 100 measured by using the temperature sensing device 11 of the present application includes biological macromolecules, biological tissues, living cell temperatures, and other categories with high measurement accuracy and requirements. For example, the temperature sensing information can be a reflection spectrum with temperature characteristics. The reflection spectrum obtained by the micro-nano fiber grating probe 111 has temperature characteristics and changes with temperature. By demodulating the reflection spectrum, temperature information can be obtained. In addition, the temperature characteristics can be adjusted by the size and preparation conditions of the specific structure of the micro-nano fiber grating probe 111 to adapt to different application scenarios.

[0029] The micro-nano fiber grating probe 111 is suitable for measuring temperature sensing information of the surface and surrounding of the sample 100. For example, the sample 100 measured by using the temperature sensing device 11 of the present application includes biological macromolecules, biological tissues, living cell temperatures, and other categories with high measurement accuracy and requirements. For example, the temperature sensing information can be a reflection spectrum with temperature characteristics. The reflection spectrum obtained by the micro-nano fiber grating probe 111 has temperature characteristics and changes with temperature. By demodulating the reflection spectrum, temperature information can be obtained. In addition, the temperature characteristics can be adjusted by the size and preparation conditions of the specific structure of the micro-nano fiber grating probe 111 to adapt to different application scenarios. Figure 1 It can be seen that the front end portion 1110 is in the shape of an inverted pyramid in the placement position during the work process, the front end portion 1110 has a tip a, and the tip a is located at the top of the inverted pyramid. In the front end portion 1110, a base b opposite to the tip a is shown in Figure 1 It can be seen in the front end portion 1110 of the micro-nano fiber grating probe 111 that the multi-stage grating structure has a diameter that gradually decreases in the direction of the tip a, thereby forming the front end portion 1110 in the shape of an inverted pyramid as a whole. On the other hand, the base b opposite to the tip a in the front end portion 1110 is shown in Figure 1 It can be seen in the front end portion 1110 of the micro-nano fiber grating probe 111 that the multi-stage grating structure has a diameter that gradually decreases in the direction of the tip a, thereby forming the front end portion 1110 in the shape of an inverted pyramid as a whole. On the other hand, the base b opposite to the tip a in the front end portion 1110 is shown in Figure 1 The multi-stage grating structure in the front end portion 1110 has a preset grating length, grating diameter, grating period, and / or grating duty cycle, which can be prepared by adjusting the three-dimensional printing parameters during three-dimensional printing.

[0030] Further referring to Figure 1 , the tuning fork sensor 112 is attached to the micro-nano fiber grating probe 111, and the tuning fork sensor 112 is suitable for outputting a tuning fork signal to the micro-nano fiber grating probe 111. The feedback driving module 113 is connected to the tuning fork sensor 112 and is suitable for demodulating the above-mentioned tuning fork signal.

[0031] On the other hand, as mentioned above, the tuning fork sensor 112 is adapted to output a tuning fork signal to the micro-nano fiber grating probe 111, which in some embodiments of the application includes a frequency signal, an amplitude signal and a phase signal. In the present embodiment, the feedback driving module 113 is connected to the tuning fork sensor 112 while also being connected to the sample 100, and in such an embodiment, the feedback driving module 113 is configured to switch between a first driving mode and a second driving mode. In the first driving mode, the sample 100 is kept stationary while the micro-nano fiber grating probe 111 is controlled to move. In the second driving mode, the micro-nano fiber grating probe 111 is kept stationary while the sample 100 is controlled to move.

[0032] Through the above structure and control mode, single-point temperature measurement of the micro-nano region of the sample 100 can be achieved, and temperature distribution imaging in a certain region can also be achieved. In addition, while scanning the sample 100 to obtain the temperature distribution by the feedback driving module 113, atomic force microscopic imaging can be achieved to obtain information such as surface topography, Young's modulus and viscosity in the scanned region of the sample 100.

[0033] The feedback driving module 113 is configured to control the micro-nano fiber grating probe 111 to move in three-dimensional space according to the demodulation result of the tuning fork signal, so as to control the distance between the micro-nano fiber grating probe 111 and the sample 100. Figure 1 Specifically, it can be understood as the distance between the tip a and the sample 100.

[0034] As mentioned above, Figure 1 A micro-region temperature field detection system 10 is also proposed in the present application. The micro-region temperature field detection system 10 further comprises a laser 12, a circulator 13 and a spectrometer 14 on the basis of the temperature measurement sensor device 11 proposed in the present application. Specifically, the laser 12 is adapted to emit laser light, and the travel and feedback route of the laser light is indicated by arrows in Figure 1 The circulator 13 has a first end I, a second end II and a third end III, and the temperature measurement sensor device 11 is connected to the second end II. Among them, the laser light emitted by the laser 12 is input into the circulator from the first end I, the temperature measurement sensor device 11 is integrally connected to the second end II, and the spectrometer 14 is connected to the third end III.

[0035] Overall, the micro-region temperature field detection system 10 can be understood as being composed of the following modules: a sensing module composed of a tapered fiber probe (i.e. the base part of the micro-nano fiber grating probe 111), a 3D printed grating structure (i.e. the front end part 1110 of the micro-nano fiber grating probe 111) and a tuning fork sensor 112; an optical module composed of a laser 12 and a spectrometer 14; and an electrical module composed of a tuning fork feedback system based on the principle of atomic force microscopy (i.e. the feedback driving module 113).

[0036] Specifically, in the sensing module, a multi-stage grating structure in the shape of an inverted pyramid is prepared on the top end face of the tapered fiber probe by using 3D printing technology. The micro-nano fiber grating probe 111 is fixed on a quartz tuning fork (i.e., the tuning fork sensor 112) that is excited to oscillate, and under the driving of the quartz tuning fork, the distance between the tip a of the micro-nano fiber grating probe 111 and the surface of the sample 100 is gradually reduced. When the distance between the tip a and the sample 100 is small enough, the oscillation state of the quartz tuning fork changes, and the corresponding signal (i.e., the above-mentioned tuning fork signal) is transmitted to the electrical module containing the feedback system. When the tip a contacts the sample 100, the oscillation amplitude of the quartz tuning fork decreases, and at the same time, due to the energy absorption characteristics of the grating structure in the front end 1110 of the micro-nano fiber grating probe 111, the force exerted by the micro-nano fiber grating probe 111 on the surface of the sample 100 decreases, thereby reducing the damage to the sample 100 during the detection process.

[0037] In the above-mentioned electrical module, the feedback driving module 113 processes the oscillation signal of the tuning fork (i.e., the above-mentioned tuning fork signal), demodulates the distance between the micro-nano fiber grating probe 111 and the sample 100, and thereby controls the micro-nano fiber grating probe 111 to follow the ups and downs of the surface topography of the sample 100. In addition, the electrical module contains a micro-nano level displacement system, which realizes the scanning detection of the sample 100.

[0038] In the above-mentioned optical module, the laser 12 emits a broadband light source containing the center wavelength range of the multi-stage grating structure in the front end 1110 of the micro-nano fiber grating probe 111, which passes through the circulator 13 and is incident into the micro-nano fiber grating probe 111 until the tip a and obtains a reflected signal. At this time, the reflected spectrum in the multi-stage grating structure is modulated and contains temperature information. The reflected signal enters the spectrometer 14 after passing through the circulator 13 and undergoes subsequent spectral demodulation. Compared with the prior art, the present application has the advantages of high resolution and less damage to biological samples during detection. In order to better understand Figure 1 the structure of the temperature sensing device 11 and the micro-zone temperature field detection system 10 shown, Figure 2 a specific implementation is shown. According to Figure 2 , the laser 12 is specifically implemented as a broadband laser. After the laser input to the circulator, it passes through the reference grating and reaches the micro-nano fiber grating probe 111, which cooperates with the tuning fork sensor 112 and the feedback driving module 113 to complete the measurement of the sample 100. In this embodiment, the sample 100 can also be placed on a three-dimensional sample stage 100', so that the movement of the sample 100 is controlled by controlling the position of the three-dimensional sample stage 100' in the three-dimensional space. As Figure 2 the front end 1110 of the micro-nano fiber grating probe 111 exhibits the same inverted pyramid structure as shown in Figure 1 .

[0039] Another aspect of the present application refers to Figure 3 A micro-thermal field detection method 30 is also proposed, which is applicable to the micro-thermal field detection system of the present application (for example, the micro-thermal field detection system 10 as shown in Figure 1 and 2 According to Figure 3 , the micro-thermal field detection method 30 comprises the following steps:

[0040] Step 31 is to make the laser emit laser light, and make the laser light input from the first end to the circulator and then output from the second end to the temperature sensing device.

[0041] Step 32 is to make the laser light pass through the micro-nano fiber grating probe of the temperature sensing device to reach the sample, and form a reflected signal by measuring the temperature sensing information of the surface and the surrounding of the sample through the micro-nano fiber grating probe.

[0042] Step 33 is to make the reflected signal input from the second end to the circulator and then output from the third end to the spectrometer.

[0043] Since the micro-thermal field detection method 30 can be applied to the micro-thermal field detection system proposed by the present application, other details about the micro-thermal field detection method 30 can be referred to the foregoing description, and will not be repeated here.

[0044] The micro-nano fiber grating probe applied in the temperature sensing device, the micro-thermal field detection system and the method proposed by the present application is manufactured based on the 3D printing technology, and the refractive index difference thereof is larger than that of the conventional fiber grating probe after etching, which can be distinguished by reflected spectrum. It can be understood that the spectrum data obtained by the grating needs to be demodulated to obtain sample information. Since the refractive index of the grating structure after 3D printing is different from that of the ordinary grating, the reflection spectrum is not a single wavelength, and a broadband light source is usually used. Moreover, since the wavelength of the grating structure after 3D printing can be controlled by changing the grating period, the grating duty cycle, the printing material and the like, the grating has greater wavelength selectivity than the conventional fiber grating. On the other hand, compared with the material of the conventional grating structure, the grating printed by 3D printing has greater elasticity because it uses polymers such as photoresist as the preparation material, and thus is more suitable for biological samples and other samples with soft surfaces than other AFM probes. The present application combines 3D printing technology with the preparation of the front end of the micro-nano probe, and combines with the system arrangement of the tuning fork feedback device and the like, and can achieve non-invasive high-resolution temperature imaging for samples with high precision requirements such as biological samples, which has outstanding advantages compared with traditional probes and detection methods for such samples.

[0045] Flow diagrams have been used herein to illustrate the operations according to embodiments of the present application performed by a system. It will be understood that the acts need not necessarily be performed in the precise order shown. Rather, various steps can be handled in different order or simultaneously. Moreover, or alternatively, other acts can be added or removed from the processes.

[0046] Having described basic concepts, it is evident that the above-described application provides only an example of the application and is not restrictive of the application. Although the present application has been described in some detail, various modifications, improvements and alterations will occur to persons of ordinary skill in the art. Such modifications, improvements and alterations are intended to be within the scope and spirit of the application. Accordingly, the application is not to be restricted except in the spirit of the claims.

[0047] Also, the present application has been described using specific language which should not be construed as limiting the application in any way. For example, the phrases "one embodiment," "an embodiment," and / or "some embodiments" as used throughout this specification do not necessarily refer to the same embodiment, but instead can

[0048] Some aspects of the present application can be performed, executed, implemented, utilized, or otherwise practiced, entirely by hardware, entirely by software (including firmware, resident software, micro-code, etc.), or by combinations of both hardware and software. The above hardware or software can be referred to as a "block," "module," "engine," "unit," "component," or "system." A processor can be one or more application specific integrated circuits (ASICs), digital signal processors (DSPs), digital audio player devices (DAPDs), programmable logic devices (PLDs), field programmable gate arrays (FPGAs), processors, controllers, micro-controllers, microprocessors, or combinations thereof. Further, aspects of the present application can be embodied as a computer product including a computer readable medium having computer program code embodied thereon. The computer readable medium can include, but is not limited to, magnetic storage devices (e.g., hard disk; floppy disk; magnetic strips on credit cards; etc.), optical disks (e.g., compact disk (CD); digital versatile disk (DVD); etc.), smart cards, and flash memory devices (e.g., card; stick; key drive; etc.).

[0049] Computer readable media can include a propagated data signal with a program code embodied therein, for example, in baseband or as part of a carrier wave. Such a propagated signal can take any of a variety of forms, including, but not limited to, electro-magnetic, optical, or any combination thereof. Computer readable media can be any media that can be accessed by a computer. By way of example, and not limitation, such computer readable media can comprise RAM, ROM, EEPROM, CD-ROM or any combination thereof. The computer readable media can be transitory, such as a modulated data signal, including, but not limited to, carrier waves, or other transmission media and / or storage media. Alternatively, the computer readable media can be non-transitory, such as a semiconductor manufacturing mask, other hardware implementation, and / or any program code on a computer readable medium that is manifested in a manufacturing or processing, such as an integrated circuit.

[0050] It should also be noted that, as used in the specification and the claims, the singular form "a", "an" and "the" include plural references unless the context clearly dictates otherwise. As used herein, the expression "at least one of A and B" means that A is present alone, B is present alone, or both A and B are present.

[0051] Some embodiments use numerical designations to describe components, quantities of attributes. It should be understood that such numerical designations used in the description of embodiments can, in some examples, be modified by the adjectives "about", "approximately", or "generally". Unless otherwise stated, "about", "approximately", or "generally" indicates that the stated numerical value allows for a variation of ±20%. Accordingly, numerical values used in the specification and claims are approximations that can vary depending on the desired properties sought to be obtained by a particular embodiment. In some embodiments, numerical values used in the specification and claims are approximations that will vary depending on the desired properties sought to be obtained by a particular embodiment. In some embodiments, numerical values should be considered in the context of the number of significant digits used for measurement and the acceptable rounding off errors. Although the numerical ranges and parameters setting forth the broad scope of the application are approximations, the numerical values set forth in the specific examples are reported as precisely as practicable. The numerical values set forth in the specific examples are provided to be as precise as reasonably possible. However, some variations may

[0052] While the application has been described with reference to the currently preferred embodiments, those skilled in the art will recognize that changes can be made within the spirit of the application. For example, although the application has been described with reference to a single application, the application can be used in multiple applications. The application is not limited to the details described herein but can be practiced with modification and alteration within the scope and spirit of the claims.

Claims

1. A temperature sensing device, characterized in that, include: A micro / nano fiber optic grating probe, the front end of which is fabricated based on 3D printing, is suitable for measuring temperature sensing information of the sample's surface and surrounding environment; A tuning fork sensor, attached to the micro / nano fiber optic grating probe, is adapted to output a tuning fork signal to the micro / nano fiber optic grating probe; and The feedback drive module is connected to the tuning fork sensor and is adapted to demodulate the tuning fork signal. The front end portion is an inverted pyramid shape and has a pointed tip located at the apex of the inverted pyramid shape. The front end portion includes a multi-level grating structure, the diameter of which decreases progressively in the direction toward the pointed tip.

2. The temperature sensing device as described in claim 1, characterized in that, The front end also has a base opposite the tip, the base being a smooth plane with a diameter of less than 40 μm.

3. The temperature sensing device as described in claim 1, characterized in that, The multi-level grating structure has a preset grating length, grating diameter, grating period and / or grating duty cycle, and the preset grating length, grating diameter, grating period and / or grating duty cycle are prepared by adjusting the three-dimensional printing parameters during the three-dimensional printing process.

4. The temperature sensing device as described in claim 1, characterized in that, The tuning fork signal includes a frequency signal, an amplitude signal, and a phase signal.

5. The temperature sensing device as described in claim 1 or 4, characterized in that, The feedback drive module is connected to both the tuning fork sensor and the sample. The feedback drive module is configured to switch between a first drive mode and a second drive mode. The first driving mode includes controlling the movement of the micro / nano fiber grating probe while keeping the sample stationary; and The second driving mode includes controlling the movement of the sample while keeping the micro / nano fiber optic probe stationary.

6. The temperature sensing device as described in claim 5, characterized in that, The feedback drive module is configured to control the movement of the micro / nano fiber grating probe in three-dimensional space based on the demodulation result of the tuning fork signal, so as to control the spacing between the micro / nano fiber grating probe and the sample.

7. A micro-area temperature field detection system, characterized in that, include: The temperature sensing device as described in any one of claims 1 to 6; A laser, suitable for emitting laser light; A circulator has a first end, a second end, and a third end, wherein the laser emitted by the laser is input to the circulator through the first end, and the temperature sensing device is connected to the second end; and The spectrometer is connected to the third terminal.

8. A method for detecting a micro-area temperature field, applicable to the micro-area temperature field detection system as described in claim 7, characterized in that, The micro-area temperature field detection method includes the following steps: The laser emits a laser beam, which is input from the first end to the circulator and then output from the second end to the temperature sensing device. The laser beam passes through the micro / nano fiber optic probe of the temperature sensing device to reach the sample, and the temperature sensing information of the sample's surface and surrounding area is measured by the micro / nano fiber optic probe to generate a reflected signal; and The reflected signal is input to the circulator from the second end and then output to the spectrometer from the third end.

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