Calibration method of radio frequency tester, radio frequency tester and radio frequency testing system

Abstract

The application relates to the field of chip testing, in particular to a radio frequency test machine calibration method, a radio frequency test machine and a radio frequency test system. The method comprises the following steps: based on configured first radio frequency test signals, acquiring first power detection values of an external power detection circuit and second power detection values of an internal power detection circuit; based on the first power detection values and the second power detection values, determining calibration values of the internal power detection circuit for the first radio frequency test signals; based on a second radio frequency test signal, determining a target calibration value in the calibration values, and acquiring a third power detection value of the internal power detection circuit; and based on the target calibration value and the third power detection value, adjusting hardware parameters of the radio frequency front-end circuit. The application improves the calibration efficiency of the radio frequency test machine.

Description

Technical Field

[0001] This application relates to the field of chip testing, and in particular to a calibration method for an RF tester, an RF tester, and an RF test system. Background Technology

[0002] As a chip testing device, the RF tester primarily functions to generate excitation signals and analyze the signals under test. As a signal generation unit, generating the desired signals is particularly crucial, with power accuracy being the most fundamental and important indicator, directly impacting the accuracy of chip testing. As an RF circuit system, factors such as component inconsistencies, component aging, and temperature variations can cause even identical platforms and designs to exhibit different characteristics. To eliminate these effects, each device undergoes calibration before leaving the factory, analyzing and calculating these error information, and storing this data in the RF tester. When using the tester to test chips or modules, the relevant information is retrieved according to requirements to configure the hardware and obtain signals with precise amplitude.

[0003] Currently, the calibration technology of RF test machines mainly relies on power meters for calibration. In order to achieve the accuracy requirements of each power point, the power step of calibration is very small. These calibrations all need to be based on external power meters, and the calibration of power meters also depends on calibration boards. Therefore, the entire calibration process is inefficient. Summary of the Invention

[0004] Therefore, it is necessary to provide a calibration method for an RF tester, an RF tester, and an RF test system to address the aforementioned technical problems.

[0005] In a first aspect, embodiments of the present invention provide a calibration method for an RF tester, wherein the RF tester is connected to an external power detection circuit, and the RF tester includes a signal generation circuit, an RF front-end circuit, and an internal power detection circuit connected in sequence; the method includes:

[0006] Based on the configured first radio frequency test signals, obtain each first power detection value of the external power detection circuit and each second power detection value of the internal power detection circuit;

[0007] Based on each of the first power detection values ​​and each of the second power detection values, the calibration value of the internal power detection circuit for each of the first radio frequency test signals is determined;

[0008] Based on the configured second radio frequency test signal, determine the target calibration value among the calibration values, and obtain the third power detection value of the internal power detection circuit;

[0009] Based on the target calibration value and the third power detection value, the hardware parameters of the radio frequency front-end circuit are adjusted.

[0010] In one embodiment, the calibration value is determined based on a first difference between the first power detection value and the second power detection value.

[0011] In one embodiment, determining the target calibration value among the calibration values ​​based on the configured second radio frequency test signal includes:

[0012] Based on the configured second RF test signal, determine the corresponding first RF test signal;

[0013] Based on the first radio frequency test signal, determine the calibration value among the calibration values.

[0014] In one embodiment, the configuration parameters and corresponding calibration values ​​of the first radio frequency test signal are stored in a first calibration table; determining the target calibration value among the calibration values ​​based on the configured second radio frequency test signal includes:

[0015] Based on the configured second RF test signal, determine the first RF test signal in the first calibration table that is closest to the second RF test signal;

[0016] Based on the closest first radio frequency test signal, the target calibration value corresponding to the first calibration table is determined.

[0017] In one embodiment, adjusting the hardware parameters of the RF front-end circuit based on the target calibration value and the third power detection value includes:

[0018] Based on the target calibration value and the third power detection value, a fourth power detection value is determined;

[0019] Based on the fourth power detection value and the second target power value of the second RF test signal, the hardware parameters of the RF front-end circuit are adjusted.

[0020] In one embodiment, adjusting the hardware parameters of the radio frequency front-end circuit based on the fourth power detection value and the second target power value of the second radio frequency test signal includes:

[0021] Obtain the second difference between the fourth power detection value and the second target power value of the second radio frequency test signal;

[0022] If the second difference is greater than or equal to the first threshold, the hardware parameters of the RF front-end circuit are adjusted, and the second target power value and the hardware parameters are stored in the second calibration table.

[0023] In one embodiment, the radio frequency front-end circuit includes a digitally controlled attenuator and a voltage-controlled attenuator; adjusting the hardware parameters of the radio frequency front-end circuit when the second difference is greater than or equal to a first threshold includes:

[0024] If the second difference is greater than the second threshold, the hardware parameters of the numerically controlled attenuator are adjusted until the second difference is less than or equal to the second threshold.

[0025] If the second difference is less than or equal to the second threshold, the hardware parameters of the voltage-controlled attenuator are adjusted until the second difference is less than the first threshold.

[0026] In one embodiment, after acquiring the first power detection values ​​of the external power detection circuit and the second power detection values ​​of the internal power detection circuit, the method further includes:

[0027] Obtain the third difference between each of the first power detection values ​​and the first target power values ​​of each of the first radio frequency test signals;

[0028] If the third difference is greater than or equal to the first threshold, the hardware parameters of the radio frequency front-end circuit are adjusted until the third difference is less than the first threshold.

[0029] In a second aspect, embodiments of the present invention provide an RF tester, which is connected to an external power detection circuit. The RF tester includes a signal generation circuit, an RF front-end circuit, and an internal power detection circuit connected in sequence, as well as a host connected to the external power detection circuit, the signal generation circuit, the RF front-end circuit, and the internal power detection circuit. The host performs the calibration method as described in the first aspect.

[0030] Thirdly, embodiments of the present invention provide a radio frequency (RF) testing system, including an RF tester as described in the second aspect and an external power detection circuit connected to the RF tester.

[0031] Compared with the prior art, the present invention has the following advantages: based on the configured first radio frequency test signals, it acquires the first power detection values ​​of the external power detection circuit and the second power detection values ​​of the internal power detection circuit; based on the first power detection values ​​and the second power detection values, it determines the calibration value of the internal power detection circuit for each first radio frequency test signal; based on the configured second radio frequency test signals, it determines the target calibration value among the calibration values ​​and acquires the third power detection value of the internal power detection circuit; based on the target calibration value and the third power detection value, it adjusts the hardware parameters of the radio frequency front-end circuit. The present invention improves the calibration efficiency of the radio frequency tester. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the structure of an RF testing system according to an embodiment of the present invention;

[0033] Figure 2 This is a schematic flowchart of a calibration method in one embodiment of the present invention;

[0034] Figure 3 This is a flowchart illustrating a method for determining target calibration values ​​in one embodiment of the present invention;

[0035] Figure 4 This is a schematic diagram illustrating the specific process of determining the target calibration value in one embodiment of the present invention;

[0036] Figure 5 This is a flowchart illustrating a hardware parameter adjustment method in one embodiment of the present invention;

[0037] Figure 6 This is a schematic diagram illustrating the specific process of a hardware parameter adjustment method in one embodiment of the present invention;

[0038] Figure 7 This is a schematic flowchart of a calibration method in another embodiment of the present invention;

[0039] Figure 8 This is a schematic diagram of the overall process of the calibration method in one embodiment of the present invention. Detailed Implementation

[0040] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are merely some examples or embodiments of the present invention. For those skilled in the art, the present invention can be applied to other similar scenarios based on these drawings without creative effort. Unless obvious from the context or otherwise specified, the same reference numerals in the drawings represent the same structures or operations.

[0041] As indicated in this invention and the claims, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" do not specifically refer to the singular and may also include the plural. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of explicitly identified steps and elements, which do not constitute an exclusive list, and the method or apparatus may also include other steps or elements.

[0042] While this invention makes various references to certain modules in systems according to embodiments of the invention, any number of different modules can be used and run on computing devices and / or processors. Modules are merely illustrative, and different aspects of the system and method may use different modules.

[0043] It should be understood that when a unit or module is described as "connected" or "coupled" to other units, modules, or blocks, it may refer to a direct connection or coupling, or communication with other units, modules, or blocks, or the presence of intermediate units, modules, or blocks, unless the context explicitly indicates otherwise. The term "and / or" as used herein may include any and all combinations of one or more of the related listed items.

[0044] like Figure 1 As shown, the RF test system includes an RF tester 1 and an external power detection circuit 2 connected to the RF tester 1. The RF tester 1 includes a signal generation circuit 10, an RF front-end circuit 20, and an internal power detection circuit 30 connected in sequence, and a host 40 connected to the signal generation circuit 10, the RF front-end circuit 20, and the internal power detection circuit 30, for executing the calibration method in this embodiment to achieve power calibration of the RF tester.

[0045] Existing RF testers do not include internal power detection circuitry, therefore power calibration can only be performed using external power detection circuitry. Considering the very small power step size calibrated by external power detection circuitry, and the fact that external power detection circuitry calibration relies on a calibration board, the entire calibration process is inefficient.

[0046] To solve the above technical problems, such as Figure 2 As shown in the figure, an embodiment of the present invention proposes a calibration method for an RF tester, comprising:

[0047] S202: Based on the configured first RF test signals, obtain the first power detection values ​​of the external power detection circuit and the second power detection values ​​of the internal power detection circuit.

[0048] To obtain the best performance of the RF tester, some hardware parameters of the links in the RF front-end circuit are usually constrained. For example, after determining the target power value and target frequency value, whether to use an amplification or direct path, and the size of the attenuator can be initially determined, thereby realizing the configuration of each first RF test signal.

[0049] The external power detection circuit includes a power meter, which, in conjunction with a calibration board, obtains a first power detection value. This first power detection value is the actual power value at the port. For example, if the power meter measures power P_out, and the calibration board's corresponding correction value is loss, then the first power detection value P_actual = P_out + loss.

[0050] S204: Based on each of the first power detection values ​​and each of the second power detection values, determine the calibration value of the internal power detection circuit for each of the first RF test signals.

[0051] Generally, the linearity, accuracy, and consistency of internal power detection circuits are inferior to those of external power detection circuits. Therefore, if you want to use an internal power detection circuit for power detection, you first need to calibrate the internal power detection circuit with an external power detection circuit, that is, to standardize the internal power detection circuit. After calibration, the internal power detection circuit can achieve the accuracy of standard power detection.

[0052] S206: Based on the configured second radio frequency test signal, determine the target calibration value among the calibration values, and obtain the third power detection value of the internal power detection circuit;

[0053] S208: Adjust the hardware parameters of the RF front-end circuit based on the target calibration value and the third power detection value.

[0054] Due to factors such as the difficulty in controlling the performance of RF front-end circuits, the challenge of ensuring inter-stage matching, board manufacturing issues, and assembly differences, some performance fluctuations are inevitable. The purpose of calibration is precisely to extract these differences and then feed them back into the hardware parameters of each component in the RF front-end circuit, ensuring that the power accuracy of the RF tester meets application requirements.

[0055] In this embodiment, based on steps S202-S204, the external power detection circuit is used to calibrate the error of the internal power detection circuit to improve the detection accuracy of the internal power detection circuit. Based on steps S206-S208, the calibrated internal power detection circuit is used to calibrate the power of the RF tester.

[0056] Because power calibration is performed using a calibrated internal power detection circuit, the number of configured first RF test signals can be reduced. For example, in the prior art, when calibrating using an external power detection circuit, the gain step of the first RF test signal is 1dB. However, using the calibration method in this embodiment, the gain step of the first RF test signal can be set to 10dB, reducing the calibration power points by 90% and greatly improving calibration efficiency.

[0057] During power calibration using the calibrated internal power detection circuit, the corresponding second RF test signal can be selected for calibration according to the calibration requirements. Compared with the existing technology that requires calibration of the RF test signal at the full power point when using an external power detection circuit, the calibration efficiency is greatly improved.

[0058] In the process of power calibration using the calibrated internal power detection circuit, since no calibration board is required, the calibration efficiency is greatly improved compared to the existing technology that requires a calibration board when using an external power detection circuit for calibration.

[0059] Because the internal power detection circuit is located inside the RF tester, the power reading rate is faster than that of the external power detection circuit, which can further improve calibration efficiency.

[0060] In step S202, the first RF test signals are configured using the hardware parameter calibration table. As shown in Table 1, the hardware parameter calibration table is a consistent table across all RF testers. This table is released along with the RF tester and stored in a fixed path on the host machine. The table stores information such as target power, frequency (Freq), test interface port, and the configuration of each component, such as the voltage-controlled attenuator (VVA), digitally controlled attenuator (DSA) settings, and whether the amplifier (PA) channel is bypassed. The hardware parameter table in this case can be referenced below. In actual applications, the frequency and power steps in the calibration table need to be set according to specific circumstances to achieve optimal calibration efficiency and accuracy.

[0061] Table 1

[0062]

[0063] In step S204, the calibration value is determined based on a first difference between the first power detection value and the second power detection value. The configuration parameters of the first RF test signal and the corresponding calibration values ​​are stored in a first calibration table, as shown in Table 2.

[0064] Table 2

[0065]

[0066] Besides the inherent deviations between the internal and external power detection circuits, their paths also differ, resulting in inconsistent power levels. These deviations are recorded as a whole in the first calibration table. For example, at a certain frequency and power, the internal power detection circuit detects 3dBm, while the external power detection circuit detects 0dBm. The difference between them is 3dB. During calibration, if the internal power detection circuit detects power X, the actual power at the port can be deduced to be X-3, thus enabling calibration without the external power detection circuit.

[0067] It should be noted that the configuration parameters and corresponding calibration values ​​of the first RF test signal in the first calibration table can be reused. Each time calibration is performed using the internal power detection circuit, only the corresponding target calibration value needs to be obtained from the first calibration table.

[0068] To ensure that the data from the first calibration table is applicable to the calibration of the internal power detection circuit, the frequency and power step need to be designed appropriately. The main differences between the internal and external power detection circuits are the switches and the external cable. Their performance differences (mainly losses) are not sensitive to power but are very sensitive to frequency. Therefore, the frequency step should be as small as possible, while the power step can be large, even a single power point is sufficient. In actual use, adjustments can be made according to specific circumstances.

[0069] In step S206, as Figure 3 As shown, determining the target calibration value among the calibration values ​​based on the configured second radio frequency test signal includes:

[0070] S302: Determine the corresponding first radio frequency test signal based on the configured second radio frequency test signal;

[0071] S304: Based on the first radio frequency test signal, determine the calibration value among the calibration values.

[0072] Specifically, such as Figure 4 As shown, determining the target calibration value among the calibration values ​​based on the configured second radio frequency test signal includes:

[0073] S402: Based on the configured second RF test signal, determine the first RF test signal in the first calibration table that is closest to the second RF test signal;

[0074] S404: Based on the closest first radio frequency test signal, determine the target calibration value corresponding to the first calibration table.

[0075] For example, if the first RF test signal (Freq, PortPower, Port) in the first calibration table is (50, -20, 0), (50, -10, 0), (50, 0, 0)..., and the configured second RF test signal is (50, -3, 0), then the closest first RF test signal (50, 0, 0) is selected from the first calibration table. If there are two closest first RF test signals, then one of them is selected.

[0076] In step S208, as Figure 5 As shown, adjusting the hardware parameters of the RF front-end circuit based on the target calibration value and the third power detection value includes:

[0077] S502: Based on the target calibration value and the third power detection value, determine the fourth power detection value;

[0078] S504: Based on the fourth power detection value and the second target power value of the second RF test signal, adjust the hardware parameters of the RF front-end circuit.

[0079] The second target power value is read from the hardware parameter calibration table or sent by the host computer.

[0080] Assuming the third power detection value is P_in and the target calibration value is deta, then the fourth power detection value P_port = P_in + deta. By adjusting the hardware parameters of the RF front-end circuit, the fourth power detection value P_port is made equal to or close to the second target power value.

[0081] Specifically, such as Figure 6 As shown, adjusting the hardware parameters of the RF front-end circuit based on the fourth power detection value and the second target power value of the second RF test signal includes:

[0082] S602: Obtain the second difference between the fourth power detection value and the second target power value of the second radio frequency test signal;

[0083] S604: If the second difference is greater than or equal to the first threshold, adjust the hardware parameters of the RF front-end circuit and store the second target power value and the hardware parameters in the second calibration table.

[0084] It is understandable that if the second difference is greater than or equal to the first threshold, the hardware parameters of the RF front-end circuit need to be adjusted; otherwise, the hardware parameters of the RF front-end circuit do not need to be adjusted.

[0085] The hardware parameters generated during calibration are stored in a second calibration table. This table stores values ​​for parameters such as power, frequency, test port, voltage-controlled attenuator (VVA), and digitally controlled attenuator (DSA). As shown in Table 3, the frequency and power values ​​in the second calibration table can be flexibly determined by the user based on their actual needs. For example, if the customer only needs 10 points, then calibrating these 10 points is sufficient. Alternatively, a default configuration can be provided for calibration, such as a frequency step of 10MHz and a power step of 0.5dB, traversing all frequency bands and power ranges covered by the video tester.

[0086] Table 3

[0087]

[0088] In one embodiment, the radio frequency front-end circuit includes a digitally controlled attenuator and a voltage-controlled attenuator.

[0089] If the second difference is greater than the second threshold, the hardware parameters of the numerically controlled attenuator are adjusted until the second difference is less than or equal to the second threshold; if the second difference is less than or equal to the second threshold, the hardware parameters of the voltage-controlled attenuator are adjusted until the second difference is less than the first threshold.

[0090] The first and second thresholds can be adjusted according to the actual calibration accuracy.

[0091] The step size of a numerically controlled attenuator is typically 0.5 / 0.25 dB, while the attenuation accuracy controlled by a voltage-controlled attenuator can reach 0.01 dB. In this embodiment, the hardware parameters of the numerically controlled attenuator are first roughly adjusted, and then the hardware parameters of the voltage-controlled attenuator are precisely adjusted to improve calibration efficiency while ensuring calibration accuracy.

[0092] In one embodiment, such as Figure 7 As shown, after acquiring the first power detection values ​​of the external power detection circuit and the second power detection values ​​of the internal power detection circuit, the method further includes:

[0093] S702: Obtain the third difference between each of the first power detection values ​​and the first target power values ​​of each of the first radio frequency test signals;

[0094] S704: If the third difference is greater than or equal to the first threshold, adjust the hardware parameters of the RF front-end circuit until the third difference is less than the first threshold.

[0095] In this embodiment, an external power detection circuit is used to calibrate the RF tester and save the hardware parameters of the RF front-end circuit. If the second RF test signal has already been calibrated using the external power detection circuit, then calibration using the internal power detection circuit is not required.

[0096] Figure 8 This is a schematic diagram of the overall process of an embodiment of the present invention. The calibration process is as follows:

[0097] Step 1: Start calibration, initialize the RF tester, and reset the status of each component of the entire RF tester to the agreed default state;

[0098] Step 2: Configure each first RF test signal according to the hardware parameter calibration table;

[0099] Step 3: Obtain each first power detection value from the external power detection circuit and each second power detection value from the internal power detection circuit. Based on each first power detection value and each second power detection value, determine the calibration value of the internal power detection circuit for each first RF test signal, and store each calibration value in the first calibration table.

[0100] Step 4: Configure the second radio frequency test signal according to the hardware parameter calibration table;

[0101] Step 5: Determine the target calibration value deta according to the first calibration table;

[0102] Step 6: Obtain the third power detection value P_in of the internal power detection circuit, and determine the fourth power detection value P_port = P_in + deta according to the target calibration value;

[0103] Step 7: Calculate the second difference P_ERROR = P_port - P_target between the fourth power detection value P_port and the second target power value P_target, and compare it with the first threshold P_limit. If P_ERROR >= P_limit and P_ERROR > the second threshold P'_limit, adjust the hardware parameters of the digital control attenuator until the second difference P_ERROR = < the second threshold P'_limit, or the number of adjustment times exceeds the set value;

[0104] Step 8: Adjust the hardware parameters of the voltage-controlled attenuator until P_ERROR = < P_limit, then the calibration is successful, and the adjusted hardware parameters are saved in the second calibration table. If P_ERROR = < P_limit cannot be satisfied, the calibration fails;

[0105] Step 9: Repeat Steps 4 to 8 until the calibration is completed for all second radio frequency test signals.

[0106] It should be understood that although the steps in the above flow chart are shown in sequence according to the indication of the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless there is a clear description in this article, the execution of these steps has no strict order limit, and these steps can be executed in other orders. Moreover, at least a part of the steps in the above flow chart may include multiple steps or multiple stages. These steps or stages are not necessarily executed at the same time, but can be executed at different times. The execution order of these steps or stages is not necessarily sequential, but can be executed alternately or alternately with at least a part of other steps or steps or stages in other steps.

[0107] An embodiment of the present invention further provides a radio frequency tester. The radio frequency tester is connected to an external power detection circuit. The radio frequency tester includes a signal generation circuit, a radio frequency front-end circuit, and an internal power detection circuit connected in sequence, and a host connected to the external power detection circuit, the signal generation circuit, the radio frequency front-end circuit, and the internal power detection circuit. The host executes the calibration method as described in the above embodiment.

[0108] For specific limitations regarding the RF tester, please refer to the limitations on calibration methods mentioned above, which will not be repeated here.

[0109] This invention also provides an RF testing system, including an RF tester as described in the above embodiments and an external power detection circuit connected to the RF tester.

[0110] For specific limitations regarding the RF test system, please refer to the limitations on calibration methods mentioned above, which will not be repeated here.

[0111] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium. When executed, the computer program can include the processes of the embodiments of the above methods. Any references to memory, storage, databases, or other media used in the embodiments provided in this application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, or optical storage, etc. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM), etc.

[0112] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0113] The above embodiments merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A calibration method for an RF tester, wherein the RF tester is connected to an external power detection circuit, and the RF tester includes a signal generation circuit, an RF front-end circuit, and an internal power detection circuit connected in sequence, characterized in that... The method includes: Based on the configured first radio frequency test signals, obtain each first power detection value of the external power detection circuit and each second power detection value of the internal power detection circuit; Based on each of the first power detection values ​​and each of the second power detection values, the calibration value of the internal power detection circuit for each of the first radio frequency test signals is determined; Based on the configured second radio frequency test signal, determine the target calibration value among the calibration values, and obtain the third power detection value of the internal power detection circuit; Based on the target calibration value and the third power detection value, the hardware parameters of the radio frequency front-end circuit are adjusted; The adjustment of the hardware parameters of the RF front-end circuit based on the target calibration value and the third power detection value includes: Based on the target calibration value and the third power detection value, a fourth power detection value is determined; Based on the fourth power detection value and the second target power value of the second RF test signal, the hardware parameters of the RF front-end circuit are adjusted.

2. The method according to claim 1, characterized in that, The calibration value is determined based on a first difference between the first power detection value and the second power detection value.

3. The method according to claim 1, characterized in that, The determination of the target calibration value among the calibration values ​​based on the configured second radio frequency test signal includes: Based on the configured second RF test signal, determine the corresponding first RF test signal; Based on the first radio frequency test signal, determine the calibration value among the calibration values.

4. The method according to claim 3, characterized in that, The configuration parameters and corresponding calibration values ​​of the first RF test signal are stored in a first calibration table; determining the target calibration value among the calibration values ​​based on the configured second RF test signal includes: Based on the configured second RF test signal, determine the first RF test signal in the first calibration table that is closest to the second RF test signal; Based on the closest first radio frequency test signal, the target calibration value corresponding to the first calibration table is determined.

5. The method according to claim 1, characterized in that, The adjustment of the hardware parameters of the RF front-end circuit based on the fourth power detection value and the second target power value of the second RF test signal includes: Obtain the second difference between the fourth power detection value and the second target power value of the second radio frequency test signal; If the second difference is greater than or equal to the first threshold, the hardware parameters of the RF front-end circuit are adjusted, and the second target power value and the hardware parameters are stored in the second calibration table.

6. The method according to claim 5, characterized in that, The radio frequency front-end circuit includes a digitally controlled attenuator and a voltage-controlled attenuator. The step of adjusting the hardware parameters of the RF front-end circuit when the second difference is greater than or equal to the first threshold includes: If the second difference is greater than the second threshold, the hardware parameters of the numerically controlled attenuator are adjusted until the second difference is less than or equal to the second threshold. If the second difference is less than or equal to the second threshold, the hardware parameters of the voltage-controlled attenuator are adjusted until the second difference is less than the first threshold.

7. The method according to claim 1, characterized in that, After acquiring the first power detection values ​​of the external power detection circuit and the second power detection values ​​of the internal power detection circuit, the method further includes: Obtain the third difference between each of the first power detection values ​​and the first target power values ​​of each of the first radio frequency test signals; If the third difference is greater than or equal to the first threshold, the hardware parameters of the radio frequency front-end circuit are adjusted until the third difference is less than the first threshold.

8. An RF tester, wherein the RF tester is connected to an external power detection circuit, the RF tester includes a signal generation circuit, an RF front-end circuit, and an internal power detection circuit connected in sequence, and a host connected to the external power detection circuit, the signal generation circuit, the RF front-end circuit, and the internal power detection circuit, the host performing the calibration method as described in any one of claims 1 to 7.

9. A radio frequency (RF) test system, comprising an RF tester as described in claim 8 and an external power detection circuit connected to the RF tester.

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