Robotic arm and wafer handling robot

Abstract

Provided is a robotic arm and a wafer handling robot. The robotic arm includes a shoulder, a first telescopic arm, a second telescopic arm, a finger mounting seat, fingers, a shoulder joint axis, an elbow joint axis and a wrist joint axis; the shoulder joint axis is provided between the shoulder and the first telescopic arm, the elbow joint axis is provided between the first telescopic arm and the second telescopic arm, the wrist joint axis is provided between the second telescopic arm and the finger mounting seat, and the fingers are fixed to the finger mounting seat; the shoulder can drive the first telescopic arm and the elbow joint axis to rotate positively around the shoulder joint axis; the rotation of the first telescopic arm and the elbow joint axis around the shoulder joint axis can drive the second telescopic arm and the wrist joint axis to rotate reversely around the elbow joint axis; the reverse rotation of the second telescopic arm and the wrist joint axis around the elbow joint axis can drive the finger mounting seat and the fingers to rotate positively around the wrist joint axis; the shoulder drive adopts a pure gear drive; the shoulder joint axis and the elbow joint axis are connected by gears; the elbow joint axis and the wrist joint axis are connected by gears. The wafer handling robot includes the robotic arm.

Description

Technical Field

[0001] The present disclosure relates to the field of automation, and more particularly to a robotic arm and a wafer handling robot. Background Art

[0002] A wafer refers to a silicon wafer formed after a silicon ingot is ground, polished, and sliced, that is, a wafer, which is generally used in semiconductor circuits.

[0003] In semiconductor processing equipment, wafers need to be frequently transported between various stations of the equipment. During the transportation process, the higher the transportation accuracy, the higher the processing accuracy of the wafers, and the faster the transportation speed, the higher the production capacity of a single piece of equipment. With the development of semiconductors, the wafer processing technology has become increasingly complex and the processing accuracy has become higher and higher, which requires a wafer handling robot with high precision and high speed.

[0004] In existing wafer handling robots, the transmission mode of the robotic arm structure generally adopts wire rope or synchronous belt transmission. Because wire rope transmission has a slipping phenomenon, and the synchronous belt belongs to an elastomer and will be stretched under the working tension, these two robotic arm structures cannot ensure an accurate transmission ratio. Summary of the Invention

[0005] In view of the problems in the background art, the purpose of the present disclosure is to provide a robotic arm and a wafer handling robot that can achieve a higher-precision transmission ratio.

[0006] Thus, in some embodiments, a robotic arm includes a shoulder, a first telescopic arm, a second telescopic arm, a finger mounting seat, fingers, a shoulder joint axis, an elbow joint axis, and a wrist joint axis; the shoulder joint axis is disposed between the shoulder and the first telescopic arm, the elbow joint axis is disposed between the first telescopic arm and the second telescopic arm, the wrist joint axis is disposed between the second telescopic arm and the finger mounting seat, and the fingers are fixed to the finger mounting seat; the shoulder can drive the first telescopic arm and the elbow joint axis to rotate positively around the shoulder joint axis; the rotation of the first telescopic arm and the elbow joint axis around the shoulder joint axis can drive the second telescopic arm and the wrist joint axis to rotate reversely around the elbow joint axis; the reverse rotation of the second telescopic arm and the wrist joint axis around the elbow joint axis can drive the finger mounting seat and the fingers to rotate positively around the wrist joint axis; wherein, the drive of the shoulder adopts pure gear drive; the shoulder joint axis and the elbow joint axis are connected via gears; the elbow joint axis and the wrist joint axis are connected via gears.

[0007] In some embodiments, the shoulder portion includes a shoulder plate, a drive motor, an arm drive gear, a shoulder bearing, and a shoulder movable gear. The shoulder plate includes a shoulder horizontal plate. The shoulder joint axis is vertically provided and fixed to the shoulder horizontal plate. The shoulder joint axis and the shoulder horizontal plate are immovable relative to each other. The drive motor includes a main body and an output shaft. The main body is fixed to the shoulder horizontal plate. The main body and the shoulder horizontal plate are immovable relative to each other. The output shaft extends upward from the main body. The output shaft can rotate in a horizontal plane about its own axis. The arm drive gear is fixedly mounted on the output shaft of the drive motor. The arm drive gear can rotate in the same direction as the output shaft of the drive motor as the output shaft of the drive motor rotates. The shoulder bearing is mounted on the lower part of the shoulder joint axis. The shoulder movable gear is mounted on the shoulder bearing. The shoulder movable gear meshes with the arm drive gear to rotate about the shoulder joint axis in a direction opposite to the rotation direction of the arm drive gear under the drive of the arm drive gear.

[0008] In some embodiments, the first telescopic arm includes an arm, a shoulder fixed gear, an arm intermediate gear, a first bearing, and an elbow movable gear. The arm includes an arm horizontal plate. The arm horizontal plate is located above the shoulder movable gear and is fixed to the shoulder movable gear in the up-and-down direction. The arm horizontal plate is provided with a first through hole penetrating in the up-and-down direction. The shoulder joint axis extends upward through the first through hole. The elbow joint axis is fixed to the arm horizontal plate and extends upward. The elbow joint axis and the arm horizontal plate are immovable relative to each other. The shoulder fixed gear is located above the arm horizontal plate and is fixed to the shoulder joint axis. The shoulder fixed gear and the shoulder joint axis are immovable relative to each other. The arm intermediate gear is arranged on the arm horizontal plate. The arm intermediate gear can rotate on its own. The arm intermediate gear meshes with the shoulder fixed gear. The first bearing is mounted on the lower part of the elbow joint axis. The elbow movable gear is mounted on the first bearing. The elbow movable gear meshes with the arm intermediate gear so that the arm intermediate gear is located between the elbow movable gear and the shoulder fixed gear.

[0009] In some embodiments, the second telescopic arm includes an elbow, an elbow fixed gear, an elbow intermediate gear, a second bearing, and a wrist movable gear. The elbow includes an elbow horizontal plate. The elbow horizontal plate is located above the elbow movable gear. The elbow horizontal plate is fixed to the elbow movable gear in the up-and-down direction. The elbow horizontal plate is provided with a second through hole penetrating in the up-and-down direction. The elbow joint axis extends upward through the second through hole of the elbow horizontal plate. The wrist joint axis is fixed to the elbow horizontal plate and extends upward. The wrist joint axis and the elbow horizontal plate are immovable relative to each other. The elbow fixed gear is located above the elbow horizontal plate and is fixed to the elbow joint axis. The elbow fixed gear and the elbow joint axis are immovable relative to each other. The elbow intermediate gear is arranged on the elbow horizontal plate. The elbow intermediate gear can rotate on its own. The elbow intermediate gear meshes with the elbow fixed gear. The second bearing is mounted on the wrist joint axis. The wrist movable gear is mounted on the second bearing. The wrist movable gear meshes with the elbow intermediate gear so that the elbow intermediate gear is located between the wrist movable gear and the elbow fixed gear.

[0010] In some embodiments, the finger mount includes a finger mounting plate which is located above the wrist movable gear and is fixedly connected to the wrist movable gear in the up-down direction; the finger is fixed to the finger mount.

[0011] In some embodiments, the elbow movable gear, the arm intermediate gear, and the shoulder fixed gear are engaged by helical teeth.

[0012] In some embodiments, the arm intermediate gear includes an arm intermediate fixed shaft, a female helical gear, a male helical gear, an adjusting spring, an upper stop, and a sliding key; the arm intermediate fixed shaft is fixed to the arm horizontal plate, the arm intermediate fixed shaft and the arm horizontal plate are immovable relative to each other, the arm intermediate fixed shaft has a lower stop portion and an upper shaft rod, the upper shaft rod extends upward from the lower stop portion, and the upper surface of the lower stop portion is larger than the cross-section of the upper shaft rod; the female helical gear has a shaft cylinder portion sleeved on the upper shaft rod, a female helical tooth portion, and a flange, the shaft cylinder portion is provided with a key groove extending in the up-down direction, the female helical tooth portion is located between the shaft cylinder portion and the flange in the up-down direction, the flange is located above the lower stop portion and is stopped and supported by the lower stop portion; the male helical gear is sleeved on the shaft cylinder portion of the female helical gear, the male helical gear and the female helical tooth portion of the female helical gear are simultaneously engaged with the shoulder fixed gear by helical teeth, the adjusting spring is sleeved on the upper shaft rod, and the lower end of the adjusting spring abuts against the top of the male helical gear; the upper stop is arranged on the arm intermediate fixed shaft and is located above the adjusting spring, and the lower surface of the upper stop abuts against the upper end of the adjusting spring; the sliding key is arranged in the key groove and is fixed to the male helical gear, so that the male helical gear together with the sliding key can slide relative to the shaft cylinder portion in the up-down direction in the key groove.

[0013] In some embodiments, the wrist movable gear, the elbow intermediate gear, and the elbow fixed gear are engaged by helical teeth.

[0014] In some embodiments, the elbow intermediate gear has the same structure as the arm intermediate gear.

[0015] In some embodiments, a wafer handling robot includes the aforementioned robotic arm.

[0016] In some embodiments, the wafer handling robot further includes a rotating mechanism which is fixedly connected to the shoulder plate of the robotic arm to drive the entire robotic arm to rotate.

[0017] In some embodiments, the rotation mechanism includes a motor base, a rotation driving motor, a rotation driving gear, a bearing mounting base, a third bearing, a slide post mounting base, a large rotation gear, and a slide post; the rotation driving motor includes a body and a rotating shaft, the body is fixed on the upper surface of the motor base, and the rotating shaft passes through and exposes downward from the motor base; the rotation driving gear is located below the motor base and is mounted on the rotating shaft; the bearing mounting base is annular and fixedly connected to the motor base; the third bearing is mounted in the bearing mounting base; the lower end of the slide post mounting base is mounted in the third bearing; the large rotation gear is fixed to the slide post mounting base from below in the up-down direction, and the large rotation gear meshes with the rotation driving gear; the lower end of the slide post is fixed on the slide post mounting base, and the upper end of the slide post is used to be fixed to the shoulder plate of the robotic arm.

[0018] In some embodiments, the wafer handling robot further includes a lifting mechanism, which is fixedly connected to the rotation mechanism to drive the rotation mechanism and the entire robotic arm to lift together. Description of the Drawings

[0019] Figure 1 is a perspective view of an embodiment of a wafer handling robot according to the present disclosure.

[0020] Figure 2 is a perspective view of the robotic arm of the wafer handling robot;

[0021] Figure 3 is Figure 2 a variable cross-section cut-away view of the robotic arm taken along the A-A broken line.

[0022] Figure 4 is Figure 3 an enlarged view of the intermediate arm gear of the robotic arm.

[0023] Figure 5 is a perspective view of the rotation mechanism and the lifting mechanism of the wafer handling robot

[0024] Figure 6 is Figure 5 a perspective view of the lifting mechanism.

[0025] Among them, the reference numerals are explained as follows:

[0026] 1000 wafer handling robot 3 second telescopic arm

[0027] D1 up-down direction 31 elbow

[0028] 100 robotic arm 311 elbow horizontal plate

[0029] 1 shoulder 311a second through hole

[0030] 11 shoulder plate 312 elbow vertical plate

[0031] 111 Shoulder horizontal plate 313 Elbow upper plate

[0032] 112 Shoulder vertical plate 313a Second perforation

[0033] 113 Shoulder upper plate 314 Second cavity

[0034] 113a Shoulder perforation 32 Elbow fixing gear

[0035] 114 Shoulder cavity 33 Elbow intermediate gear

[0036] 115 Mounting protrusion 34 Second bearing

[0037] 12 Drive motor 35 Wrist movable gear

[0038] 121 Main body 4 Finger mounting seat

[0039] 122 Output shaft 41 Finger mounting plate

[0040] 13 Arm drive gear 411 Third through hole

[0041] 14 Shoulder bearing 42 Finger upper plate

[0042] 15 Shoulder movable gear 43 Receiving cavity

[0043] 2 First telescopic arm 44 Finger fixing block

[0044] 21 Arm 5 Finger

[0045] 211 Arm horizontal plate 6 Shoulder joint axis

[0046] 211a First through hole 7 Elbow joint axis

[0047] 212 Arm vertical plate 8 Wrist joint axis

[0048] 213 Arm upper plate 200 Rotating mechanism

[0049] 213a First perforation 200a Motor seat

[0050] 214 First cavity 200b Rotating drive motor

[0051] 22 Shoulder fixing gear 200b1 Body

[0052] 23 Arm intermediate gear 200b2 Rotating shaft

[0053] 231 Arm intermediate fixed shaft 200c Rotating drive gear

[0054] 231a Lower stop 200d Bearing mounting seat

[0055] 231b Upper shaft rod 200e Third bearing

[0056] 232 Female Helical Gear, 200f Slide Post Mounting Base

[0057] 232a Shaft Tube Portion, 200g Rotating Large Gear

[0058] 232a1 Keyway, 200h Slide Post

[0059] 232b Female Helical Tooth Portion, 300 Lifting Mechanism

[0060] 232c Flange, 300a Lifting Drive Motor

[0061] 233 Male Helical Gear, 300b Synchronous Pulley

[0062] 234 Adjusting Spring, 300c Timing Belt

[0063] 235 Upper Stop, 300d Ball Screw

[0064] 236 Slide Key, 300e Screw Nut Base

[0065] 237 Sleeve, 400 Frame

[0066] 24 First Bearing, 500 Cabinet

[0067] 25 Elbow Moving Gear Detailed Implementation Manner

[0068] The accompanying drawings illustrate embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be construed as limiting, but only as a basis for the claims and as a representative basis for teaching those of ordinary skill in the art to implement the present disclosure in various ways.

[0069] It should be noted that in this document, the use of terms such as "first", "second", "third", etc. is only for indicating components and does not represent the interdependence and importance between components.

[0070] Referring to Figure 1 , the wafer handling robot 1000 includes a robotic arm 100. In Figure 1 , the robotic arm 100 is shown as two, but is not limited thereto, and can be one or more than three.

[0071] Referring to Figure 2 and Figure 3, the robotic arm 100 includes a shoulder 1, a first telescopic arm 2, a second telescopic arm 3, a finger mounting base 4, fingers 5, a shoulder joint axis 6, an elbow joint axis 7, and a wrist joint axis 8. The shoulder joint axis 6 is disposed between the shoulder 1 and the first telescopic arm 2, the elbow joint axis 7 is disposed between the first telescopic arm 2 and the second telescopic arm 3, the wrist joint axis 8 is disposed between the second telescopic arm 3 and the finger mounting base 4, and the fingers 5 are fixed to the finger mounting base 4. The shoulder 1 can drive the first telescopic arm 2 and the elbow joint axis 7 to rotate positively around the shoulder joint axis 6; the rotation of the first telescopic arm 2 and the elbow joint axis 7 around the shoulder joint axis 6 can drive the second telescopic arm 3 and the wrist joint axis 8 to rotate reversely around the elbow joint axis 7; the reverse rotation of the second telescopic arm 3 and the wrist joint axis 8 around the elbow joint axis 7 can drive the finger mounting base 4 and the fingers 5 to rotate positively around the wrist joint axis 8. Among them, the drive of the shoulder 1 uses pure gear drive; the shoulder joint axis 6 and the elbow joint axis 7 are connected via gears, and the elbow joint axis 7 and the wrist joint axis 8 are connected via gears. It should be noted that the positive rotation can be clockwise rotation or counterclockwise rotation.

[0072] Compared with the transmission using wire ropes or synchronous belts in the background art, in the robotic arm 100, through the drive of the shoulder 1 using pure gear drive, the connection between the shoulder joint axis 6 and the elbow joint axis 7 via gears, and the connection between the elbow joint axis 7 and the wrist joint axis 8 via gears, a higher-precision transmission ratio can be achieved, which is especially suitable for products such as wafers that are high-tech and picked up by the fingers 5.

[0073] As Figure 2 shown, the shoulder 1 may include a shoulder plate 11, a drive motor 12, an arm drive gear 13, a shoulder bearing 14, and a shoulder movable gear 15.

[0074] The shoulder plate 11 includes a shoulder horizontal plate 111. The shoulder joint axis 6 is erected and fixed to the shoulder horizontal plate 111, and the shoulder joint axis 6 and the shoulder horizontal plate 111 are stationary relative to each other. The drive motor 12 includes a main body 121 and an output shaft 122. The main body 121 is fixed to the shoulder horizontal plate 111, and the main body 121 and the shoulder horizontal plate 111 are stationary relative to each other. The output shaft 122 extends upward from the main body 121, and the output shaft 122 can rotate in a horizontal plane around its own axis. The arm drive gear 13 is fixedly (e.g., through a fixing key) mounted on the output shaft 122 of the drive motor 12, and the arm drive gear 13 can rotate in the same direction as the output shaft 122 of the drive motor 12 as the output shaft 122 of the drive motor 12 rotates. The shoulder bearing 14 is mounted on the lower part of the shoulder joint axis 6. The shoulder movable gear 15 is mounted on the shoulder bearing 14, and the shoulder movable gear 15 meshes with the arm drive gear 13 to rotate around the shoulder joint axis 6 in a direction opposite to the rotation direction of the arm drive gear 13 under the drive of the arm drive gear 13.

[0075] As Figure 2As shown, the first telescopic arm 2 may include an arm 21, a shoulder fixed gear 22, an arm intermediate gear 23, a first bearing 24, and an elbow movable gear 25.

[0076] The arm 21 includes an arm horizontal plate 211. The arm horizontal plate 211 is located above the shoulder movable gear 15 and is fixed to the shoulder movable gear 15 in the up-and-down direction D1 (for example, by screws). The arm horizontal plate 211 is provided with a first through hole 211a penetrating in the up-and-down direction D1. The shoulder joint axis 6 passes upward through the first through hole 211a. The elbow joint axis 7 is fixed to the arm horizontal plate 211 and extends upward. The elbow joint axis 7 and the arm horizontal plate 211 are immovable relative to each other. The shoulder fixed gear 22 is located above the arm horizontal plate 211 and is fixed (for example, by a key for fixing) to the shoulder joint axis 6. The shoulder fixed gear 22 and the shoulder joint axis 6 are immovable relative to each other. The arm intermediate gear 23 is arranged on the arm horizontal plate 211. The arm intermediate gear 23 can rotate on its own axis. The arm intermediate gear 23 meshes with the shoulder fixed gear 22. The first bearing 24 is installed at the lower part of the elbow joint axis 7. The elbow movable gear 25 is installed on the first bearing 24. The elbow movable gear 25 meshes with the arm intermediate gear 23 so that the arm intermediate gear 23 is located between the elbow movable gear 25 and the shoulder fixed gear 22.

[0077] As Figure 2 shown, the second telescopic arm 3 may include an elbow 31, an elbow fixed gear 32, an elbow intermediate gear 33, a second bearing 34, and a wrist movable gear 35.

[0078] The elbow 31 includes an elbow horizontal plate 311. The elbow horizontal plate 311 is located above the elbow movable gear 25. The elbow horizontal plate 311 is fixed (for example, by screws) to the elbow movable gear 25 in the up-and-down direction D1. The elbow horizontal plate 311 is provided with a second through hole 311a penetrating in the up-and-down direction D1. The elbow joint axis 7 extends upward through the second through hole 311a of the elbow horizontal plate 311. The wrist joint axis 8 is fixed to the elbow horizontal plate 311 and extends upward. The wrist joint axis 8 and the elbow horizontal plate 311 are immovable relative to each other. The elbow fixed gear 32 is located above the elbow horizontal plate 311 and is fixed (for example, by a key for fixing) to the elbow joint axis 7. The elbow fixed gear 32 and the elbow joint axis 7 are immovable relative to each other. The elbow intermediate gear 33 is arranged on the elbow horizontal plate 311. The elbow intermediate gear 33 can rotate on its own axis. The elbow intermediate gear 33 meshes with the elbow fixed gear 32. The second bearing 34 is installed on the wrist joint axis 8. The wrist movable gear 35 is installed on the second bearing 34. The wrist movable gear 35 meshes with the elbow intermediate gear 33 so that the elbow intermediate gear 33 is located between the wrist movable gear 35 and the elbow fixed gear 32.

[0079] The finger mounting base 4 may include a finger mounting plate 41. The finger mounting plate 41 is located above the wrist moving gear 35 and is fixedly connected (e.g., by screws) to the wrist moving gear 35 in the up-down direction D1.

[0080] Based on Figure 3 , during operation,

[0081] Assume that the shoulder horizontal plate 111 is stationary and the output shaft 122 of the drive motor 12 rotates counterclockwise;

[0082] The arm drive gear 13 rotates counterclockwise: The output shaft 122 of the drive motor 12 rotating counterclockwise drives the arm drive gear 13 to rotate counterclockwise;

[0083] The first telescopic arm 2 rotates clockwise: The arm drive gear 13 rotating counterclockwise drives the shoulder moving gear 15 to rotate clockwise around the shoulder joint axis 6. Since the shoulder moving gear 15 is fixedly connected to the arm horizontal plate 211 of the arm 21, the arm horizontal plate 211 of the arm 21 also rotates clockwise. Since the elbow joint axis 7 is fixed to the arm horizontal plate 211 of the arm 21 and the elbow joint axis 7 is stationary relative to the arm horizontal plate 211 of the arm 21, and the arm intermediate gear 23 is arranged on the arm horizontal plate 211 of the arm 21 but can rotate self - sufficiently. The arm intermediate gear 23 forms a clockwise revolution around the shoulder joint axis 6 while rotating self - sufficiently as a planetary gear. Since the shoulder joint axis 6 is stationary (because it is assumed that the shoulder horizontal plate 111 is stationary), the revolution of the arm intermediate gear 23 together with the arm horizontal plate 211 of the arm 21 causes the arm intermediate gear 23 to rotate clockwise self - sufficiently. The arm intermediate gear 223 rotating clockwise causes the elbow moving gear 25 to rotate counterclockwise around the elbow joint axis 7. Thus, as a whole, it is reflected that the elbow joint axis 7 and the arm horizontal plate 211 of the arm 21, the first bearing 24, the elbow moving gear 25 and the arm intermediate gear 23 rotate clockwise around the shoulder joint axis 6 as a whole. Thus, as a whole, it is equivalent to the first telescopic arm 2 and the elbow joint axis 7 rotating clockwise around the shoulder joint axis 6;

[0084] Counterclockwise rotation of the second telescopic arm 3: Since the elbow moving gear 25 rotates counterclockwise around the elbow joint axis 7, and since the elbow horizontal plate 311 of the elbow 31 is fixed to the elbow moving gear 25 in the up-and-down direction D1, the elbow horizontal plate 311 of the elbow 31 rotates counterclockwise around the elbow joint axis 7. Since the elbow intermediate gear 33 and the wrist joint axis 8 are provided on the elbow horizontal plate 311, the wrist joint axis 8, the second bearing 34, the wrist moving gear 35, and the elbow intermediate gear 33 as a whole rotate counterclockwise around the elbow joint axis 7. Thus, as a whole, it is equivalent to the second telescopic arm 3 and the wrist joint axis 8 rotating counterclockwise around the elbow joint axis 7. However, the elbow intermediate gear 33 is provided on the elbow horizontal plate 311 of the elbow 31 but can rotate on its own. The elbow intermediate gear 33 forms a counterclockwise revolution around the elbow joint axis 7 while rotating on its own as a planetary gear. Based on relativity, due to the counterclockwise revolution of the wrist joint axis 8, the second bearing 34, the wrist moving gear 35, and the elbow intermediate gear 33 as a whole around the elbow joint axis 7, the elbow intermediate gear 33 can only rotate counterclockwise on its own. The counterclockwise rotating elbow intermediate gear 33 drives the wrist moving gear 35 to rotate clockwise around the wrist joint axis 8;

[0085] Clockwise rotation of the finger mounting base 4: Since the wrist moving gear 35 rotates clockwise around the wrist joint axis 8, and since the wrist moving gear 35 is fixedly connected to the finger mounting plate 41 in the up-and-down direction D1, the finger mounting plate 41 rotates clockwise around the wrist joint axis 8. Further, the finger mounting base 4 drives the finger 5 to rotate clockwise around the wrist joint axis 8.

[0086] In one example, as Figure 3 shown, the shoulder plate 11 further includes a shoulder vertical plate 112 and a shoulder upper plate 113. The shoulder upper plate 113 is provided with a shoulder through hole 113a. The shoulder through hole 113a is aligned with the first through hole 211a in the up-and-down direction D1. The shoulder through hole 113a allows the shoulder joint axis 6 to pass upward through and exposes the shoulder moving gear 15. The shoulder horizontal plate 111, the shoulder vertical plate 112, and the shoulder upper plate 113 enclose a shoulder cavity 114. The shoulder cavity 114 houses the entire arm driving gear 13, a part of the shoulder moving gear 15, a part of the shoulder joint axis 6, and at least part of the shoulder bearing 14. Through the shoulder horizontal plate 111, the shoulder vertical plate 112, and the shoulder upper plate 113, external protection for the arm driving gear 13, the shoulder moving gear 15, the shoulder joint axis 6, and the shoulder bearing 14 is provided.

[0087] In one example, as Figure 3 shown, the shoulder plate 11 further includes a mounting protrusion 115. The mounting protrusion 115 protrudes downward from the shoulder horizontal plate 111. The mounting protrusion 115 is used to be fixed together with a later-described sliding column 200h.

[0088] In one example, as Figure 3As shown, the arm 21 further includes an arm vertical plate 212 and an arm upper plate 213. The arm upper plate 213 is provided with a first through hole 213a, and the first through hole 213a is aligned with the second through hole 311a in the up and down direction D1. The first through hole 213a allows the elbow joint shaft 7 to pass upward through and exposes the elbow movable gear 25. The arm horizontal plate 211, the arm vertical plate 212, and the arm upper plate 213 enclose a first cavity 214, and the first cavity 214 houses the entire shoulder fixed gear 22, the entire elbow intermediate gear 33, a part of the elbow movable gear 25, a part of the shoulder joint shaft 6, a part of the elbow joint shaft 7, and a part of the first bearing 24. Through the arm horizontal plate 211, the arm vertical plate 212, and the arm upper plate 213, external protection for the shoulder fixed gear 22, the elbow intermediate gear 33, the elbow movable gear 25, the shoulder joint shaft 6, the elbow joint shaft 7, and the first bearing 24 is provided.

[0089] In an example, the elbow movable gear 25, the arm intermediate gear 23, and the shoulder fixed gear 22 are engaged with helical teeth. The helical tooth engagement has high motion accuracy and stability, achieving high motion accuracy of the robotic arm 100.

[0090] Further, as Figure 4As shown in the figure, the intermediate arm gear 23 includes an intermediate arm fixed shaft 231, a female helical gear 232, a male helical gear 233, an adjusting spring 234, an upper stop 235, and a sliding key 236. The intermediate arm fixed shaft 231 is fixed to the arm horizontal plate 211, and the intermediate arm fixed shaft 231 and the arm horizontal plate 211 are immovable relative to each other. The intermediate arm fixed shaft 231 has a lower stop portion 231a and an upper shaft rod 231b. The upper shaft rod 231b extends upward from the lower stop portion 231a, and the upper surface of the lower stop portion 231a is larger than the cross-section of the upper shaft rod 231b. The female helical gear 232 has a shaft cylinder portion 232a sleeved on the upper shaft rod 231b, a female helical tooth portion 232b, and a flange 232c. The shaft cylinder portion 232a is provided with a keyway 232a1 extending in the up and down direction D1. The female helical tooth portion 232b is located between the shaft cylinder portion 232a and the flange 232c in the up and down direction D1. The flange 232c is located above the lower stop portion 231a and is stopped and supported by the lower stop portion 231a. The male helical gear 233 is sleeved on the shaft cylinder portion 232a of the female helical gear 232. The male helical gear 233 and the female helical tooth portion 232b of the female helical gear 232 are simultaneously helically meshed with the shoulder fixed gear 22. The adjusting spring 234 is sleeved on the upper shaft rod 231b, and the lower end of the adjusting spring 234 abuts against the top of the male helical gear 233. The upper stop 235 is arranged on the intermediate arm fixed shaft 231 and is located above the adjusting spring 234. The lower surface of the upper stop 235 abuts against the upper end of the adjusting spring 234. The sliding key 236 is arranged in the keyway 232a1 and is fixed to the male helical gear 233. Thus, the male helical gear 233 together with the sliding key can slide relative to the shaft cylinder portion 232a in the up and down direction D1 in the keyway 232a1. Since the male helical gear 233 together with the sliding key can slide relative to the shaft cylinder portion 232a in the up and down direction D1 in the keyway 232a1 and the adjusting spring 234 is arranged between the lower surface of the upper stop 235 and the top of the male helical gear 233, the tooth sides of the male helical gear 233 and the female helical gear 232 are respectively pressed against the left and right sides of the tooth grooves of the shoulder fixed gear 22, the clearance of the gear transmission is eliminated, and elastic automatic compensation of the clearance can be realized, which can be applied to the elimination of the backlash of the gear, thereby ensuring that the robotic arm 100 has high transmission accuracy.

[0091] In one example, as Figure 4 shown, the intermediate arm gear 23 further includes a sleeve 237; the sleeve 237 is sleeved on the upper shaft rod 231b, and is located inside the shaft cylinder portion 232a, the female helical tooth portion 232b, and the flange 232c and is fixed to the shaft cylinder portion 232a, the female helical tooth portion 232b, and the flange 232c. The sleeve 237 can rotate relative to the upper shaft rod 231b. The arrangement of the sleeve 237 can reduce the wear caused by the direct rotation of the female helical gear 232 sleeved on the intermediate arm fixed shaft 231. The material of the sleeve 237 is, for example but not limited to, copper.

[0092] In one example, asFigure 4 As shown, the upper stop 235 is a nut, and the upper shaft rod 231b is provided with an external thread that mates with the nut. Thus, the position of the upper stop 235 in the up-down direction D1 can be adjusted to adaptively adjust the elastic expansion and contraction degree of the adjusting spring 234 to meet the requirements of eliminating the clearance of the aforementioned gear transmission and the backlash of the gear, and at the same time, the intermediate gear 23 of the arm can be completely disassembled and assembled.

[0093] In one example, as Figure 3 shown, the elbow 31 further includes an elbow vertical plate 312 and an elbow upper plate 313. The elbow upper plate 313 is provided with a second through hole 313a through which the wrist joint shaft 8 passes upward and exposes the wrist moving gear 35. The elbow horizontal plate 311, the elbow vertical plate 312, and the elbow upper plate 313 enclose a second cavity 314, and the second cavity 314 houses the entire elbow fixed gear 32, the entire elbow intermediate gear 33, a part of the wrist moving gear 35, the wrist joint shaft 8, a part of the elbow joint shaft 7, and a part of the second bearing 34. Through the elbow horizontal plate 311, the elbow vertical plate 312, and the elbow upper plate 313, external protection for the elbow fixed gear 32, the elbow intermediate gear 33, the wrist moving gear 35, the wrist joint shaft 8, the elbow joint shaft 7, and the second bearing 34 is provided.

[0094] In one example, similar to the elbow moving gear 25, the intermediate gear 23 of the arm, and the shoulder fixed gear 22, the wrist moving gear 35, the elbow intermediate gear 33, and the elbow fixed gear 32 are engaged with helical teeth. Similarly, helical tooth engagement has high movement accuracy and smoothness, achieving high movement accuracy of the robotic arm 100.

[0095] In one example, the elbow intermediate gear 33 has the same structure as the intermediate gear 23 of the arm, that is, as Figure 3 shown and as described above, that is, Figure 4 the structure shown is fully applicable to the elbow intermediate gear 33. Through the sub-helical gear together with the sliding key, it can slide relative to the shaft cylinder part in the up-down direction D1 in the key groove, and through the adjusting spring arranged on the lower surface of the upper stop and the top of the sub-helical gear, the tooth sides of the sub-helical gear and the mother helical gear of the elbow intermediate gear 33 are respectively in close contact with the left and right sides of the tooth grooves of the elbow fixed gear 32, eliminating the clearance of the gear transmission, and can achieve elastic automatic compensation for the clearance, being able to apply to the elimination of the gear backlash, thereby ensuring that the robotic arm 100 has high transmission accuracy.

[0096] In one example, the lengths of the arm 21 and the elbow 31 are equal, and the transmission ratios of the first telescopic arm 2, the second telescopic arm 3, and the finger mounting seat 4 are 1:2:1. Thus, the final linear translational movement of the finger 5 is achieved.

[0097] In one example, as Figure 3As shown, the finger mounting plate 41 is provided with a third through hole 411 through which the wrist joint shaft 8 passes upward. The finger mounting seat 4 further includes a finger upper plate 42. The finger upper plate 42 is located above the finger mounting plate 41 and is fixed to the finger mounting plate 41 to form a receiving cavity 43. The upper part of the wrist joint shaft 8 is received in the receiving cavity 43. The finger mounting plate 41 and the finger upper plate 42 provide external protection for the wrist joint shaft 8.

[0098] In one example, as Figure 3 shown, the finger mounting seat 4 further includes a finger fixing block 44. The finger fixing block 44 is located above the finger upper plate 42, and the finger fixing block 44 and the finger upper plate 42 clamp and fix the finger 5 together.

[0099] Referring to Figure 5 , the wafer handling robot 1000 further includes a rotating mechanism 200. The rotating mechanism 200 is fixedly connected to the shoulder plate 11 of the robotic arm 100 to drive the entire robotic arm 100 to rotate.

[0100] Specifically, as Figure 5 shown, the rotating mechanism 200 includes a motor base 200a, a rotating drive motor 200b, a rotating driving gear 200c, a bearing mounting seat 200d, a third bearing 200e, a slide post mounting seat 200f, a rotating large gear 200g, and a slide post 200h.

[0101] The rotating drive motor 200b includes a body 200b1 and a rotating shaft 200b2. The body 200b1 is fixed on the upper surface of the motor base 200a, and the rotating shaft 200b2 passes downward through and exposes from the motor base 200a. The rotating driving gear 200c is located below the motor base 200a and is mounted on the rotating shaft 200b2. The bearing mounting seat 200d is annular and is fixedly (e.g., by screws) connected to the motor base 200a. The third bearing 200e is mounted in the bearing mounting seat 200d. The lower end of the slide post mounting seat 200f is mounted in the third bearing 200e. The rotating large gear 200g is fixed (e.g., by screws) to the slide post mounting seat 200f in the up-down direction D1 from below. The rotating large gear 200g meshes with the rotating driving gear 200c. The lower end of the slide post 200h is fixed (e.g., by interference fit, welding, screw connection, or integral molding) to the slide post mounting seat 200f, and the upper end of the slide post 200h is used to be fixed to the shoulder plate 11 of the robotic arm 100 (specifically, such as the mounting protrusion 115 shown in Figure 3 ), such as by screws). During operation, when the rotating drive motor 200b rotates, the rotating shaft 200b2 of the rotating drive motor 200b drives the rotating driving gear 200c to rotate, thereby driving the rotating large gear 200g, the slide post mounting seat 200f, the slide post 200h, and the shoulder plate 11 of the robotic arm 100 to rotate together, so as to drive the entire robotic arm 100 to rotate.

[0102] Reference Figure 6 Referring to Figure 6 , the wafer handling robot 1000 further includes a lifting mechanism 300. The lifting mechanism 300 is fixedly connected to the rotating mechanism 200 to drive the rotating mechanism 200 and the entire robotic arm 100 to move up and down together.

[0103] Specifically, as Figure 6 shown, the lifting mechanism 300 includes a lifting drive motor 300a, a synchronous pulley 300b, a synchronous belt 300c, a ball screw 300d, and a screw nut seat 300e.

[0104] The lifting drive motor 300a has a motor shaft (not shown), and the motor shaft can rotate. The synchronous pulley 300b is installed at the lower end of the ball screw 300d. The synchronous belt 300c is connected between the motor shaft and the synchronous pulley 300b. The screw nut seat 300e is located above the synchronous pulley 300b and is installed on the ball screw 300d. The screw nut seat 133 is fixedly connected to the bearing mount 200d of the rotating mechanism 200. During operation, the lifting drive motor 300a rotates, and the synchronous pulley 300b fixed on the motor shaft of the lifting drive motor 300a rotates accordingly. The synchronous belt 300c drives the synchronous pulley 300b at the lower end of the ball screw 300d, causing the ball screw 300d to rotate. The ball screw 300d drives the screw nut seat 300e to move up and down, thereby driving the rotating mechanism 20012 and the entire robotic arm 100 to move up and down. The number of the lifting mechanisms 300 is the same as the number of the robotic arms 100.

[0105] Reference Figure 6 Referring to Figure 6 , the wafer handling robot 1000 further includes a frame 400. The lifting drive motor 300a and the synchronous pulley 300b are installed on the frame 400.

[0106] Reference Figure 1 Referring to Figure 1 , the wafer handling robot 1000 further includes a cabinet 500. The cabinet 500 houses the frame 400, the lifting mechanism 300, and the rotating mechanism 200. The cabinet 500 provides protection for the frame 400, the lifting mechanism 300, and the rotating mechanism 200.

[0107] Note that the robotic arm 100 of the present disclosure is not limited to wafer handling and can be applicable to any occasion requiring high-precision transfer.

[0108] The drawings illustrate embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure. The present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be construed as limiting, but only as a basis for the claims and as a representative basis for teaching those of ordinary skill in the art to implement the present disclosure in various ways.

Claims

1. A robotic arm (100), characterized in that, the robotic arm (100) includes a shoulder (1), a first telescopic arm (2), a second telescopic arm (3), a finger mounting base (4), fingers (5), a shoulder joint axis (6), an elbow joint axis (7), and a wrist joint axis (8); the shoulder joint axis (6) is provided between the shoulder (1) and the first telescopic arm (2), the elbow joint axis (7) is provided between the first telescopic arm (2) and the second telescopic arm (3), the wrist joint axis (8) is provided between the second telescopic arm (3) and the finger mounting base (4), the fingers (5) are fixed to the finger mounting base (4); the shoulder (1) can drive the first telescopic arm (2) and the elbow joint axis (7) to rotate positively around the shoulder joint axis (6); the rotation of the first telescopic arm (2) and the elbow joint axis (7) around the shoulder joint axis (6) can drive the second telescopic arm (3) and the wrist joint axis (8) to rotate reversely around the elbow joint axis (7); the reverse rotation of the second telescopic arm (3) and the wrist joint axis (8) around the elbow joint axis (7) can drive the finger mounting base (4) and the fingers (5) to rotate positively around the wrist joint axis (8); wherein, the drive of the shoulder (1) adopts pure gear drive; the shoulder joint axis (6) and the elbow joint axis (7) are connected via gears; the elbow joint axis (7) and the wrist joint axis (8) are connected via gears; the shoulder (1) includes a shoulder plate (11), a drive motor (12), an arm drive gear (13), a shoulder bearing (14), and a shoulder movable gear (15), the shoulder plate (11) includes a shoulder horizontal plate (111), the shoulder joint axis (6) is erected and fixed on the shoulder horizontal plate (111), and the shoulder joint axis (6) and the shoulder horizontal plate (111) are relatively stationary to each other, the drive motor (12) includes a main body (121) and an output shaft (122), the main body (121) is fixed on the shoulder horizontal plate (111), the main body (121) and the shoulder horizontal plate (111) are relatively stationary to each other, the output shaft (122) extends upward from the main body (121), and the output shaft (122) can rotate around its own axis in the horizontal plane, the arm drive gear (13) is fixedly installed on the output shaft (122) of the drive motor (12), and the arm drive gear (13) can rotate in the same direction as the output shaft (122) of the drive motor (12) as the output shaft (122) of the drive motor (12) rotates, the shoulder bearing (14) is installed on the lower part of the shoulder joint axis (6), the shoulder movable gear (15) is installed on the shoulder bearing (14), and the shoulder movable gear (15) meshes with the arm drive gear (13) to rotate around the shoulder joint axis (6) in the opposite direction to the rotation direction of the arm drive gear (13) under the drive of the arm drive gear (13); the first telescopic arm (2) includes an arm (21), a shoulder fixed gear (22), an arm intermediate gear (23), a first bearing (24), and an elbow movable gear (25), The arm (21) includes an arm horizontal plate (211). The arm horizontal plate (211) is located above the shoulder movable gear (15) and is fixedly connected to the shoulder movable gear (15) in the up-and-down direction (D1). The arm horizontal plate (211) is provided with a first through hole (211a) penetrating in the up-and-down direction (D1). The shoulder joint axis (6) passes upward through the first through hole (211a). The elbow joint axis (7) is fixed to the arm horizontal plate (211) and extends upward. The elbow joint axis (7) and the arm horizontal plate (211) are relatively stationary with respect to each other. The shoulder fixed gear (22) is located above the arm horizontal plate (211) and is fixed to the shoulder joint axis (6). The shoulder fixed gear (22) and the shoulder joint axis (6) are relatively stationary with respect to each other. The arm intermediate gear (23) is arranged on the arm horizontal plate (211). The arm intermediate gear (23) can rotate on its own axis. The arm intermediate gear (23) meshes with the shoulder fixed gear (22). The first bearing (24) is installed at the lower part of the elbow joint axis (7). The elbow movable gear (25) is installed on the first bearing (24). The elbow movable gear (25) meshes with the arm intermediate gear (23) so that the arm intermediate gear (23) is located between the elbow movable gear (25) and the shoulder fixed gear (22). The second telescopic arm (3) includes an elbow (31), an elbow fixed gear (32), an elbow intermediate gear (33), a second bearing (34), and a wrist movable gear (35). The elbow (31) includes an elbow horizontal plate (311). The elbow horizontal plate (311) is located above the elbow movable gear (25). The elbow horizontal plate (311) is fixed to the elbow movable gear (25) in the up-and-down direction (D1). The elbow horizontal plate (311) is provided with a second through hole (311a) penetrating in the up-and-down direction (D1). The elbow joint axis (7) extends upward through the second through hole (311a) of the elbow horizontal plate (311). The wrist joint axis (8) is fixed to the elbow horizontal plate (311) and extends upward. The wrist joint axis (8) and the elbow horizontal plate (311) are relatively stationary with respect to each other. The elbow fixed gear (32) is located above the elbow horizontal plate (311) and is fixed to the elbow joint axis (7). The elbow fixed gear (32) and the elbow joint axis (7) are relatively stationary with respect to each other. The elbow intermediate gear (33) is arranged on the elbow horizontal plate (311). The elbow intermediate gear (33) can rotate on its own axis. The elbow intermediate gear (33) meshes with the elbow fixed gear (32). The second bearing (34) is installed on the wrist joint axis (8). The wrist movable gear (35) is installed on the second bearing (34). The wrist movable gear (35) meshes with the elbow intermediate gear (33) so that the elbow intermediate gear (33) is located between the wrist movable gear (35) and the elbow fixed gear (32).

2. The robotic arm (100) according to claim 1, wherein The finger mounting seat (4) includes a finger mounting plate (41). The finger mounting plate (41) is located above the wrist moving gear (35) and is fixedly connected to the wrist moving gear (35) in the up-and-down direction (D1). The finger (5) is fixed to the finger mounting seat (4).

3. The robotic arm (100) according to claim 1, characterized in that The elbow moving gear (25), the arm intermediate gear (23), and the shoulder fixed gear (22) are engaged with helical teeth.

4. The robotic arm (100) according to claim 3, characterized in that The arm intermediate gear (23) includes an arm intermediate fixed shaft (231), a female helical gear (232), a male helical gear (233), an adjusting spring (234), an upper stop (235), and a sliding key (236); The arm intermediate fixed shaft (231) is fixed to the arm horizontal plate (211), the arm intermediate fixed shaft (231) and the arm horizontal plate (211) are immovable relative to each other, the arm intermediate fixed shaft (231) has a lower stop portion (231a) and an upper shaft rod (231b), the upper shaft rod (231b) extends upward from the lower stop portion (231a), and the upper surface of the lower stop portion (231a) is larger than the cross-section of the upper shaft rod (231b); The female helical gear (232) has a shaft cylinder portion (232a) sleeved on the upper shaft rod (231b), a female helical tooth portion (232b), and a flange (232c), the shaft cylinder portion (232a) is provided with a key groove (232a1) extending in the up-and-down direction (D1), the female helical tooth portion (232b) is located between the shaft cylinder portion (232a) and the flange (232c) in the up-and-down direction (D1), and the flange (232c) is located above the lower stop portion (231a) and is stopped and supported by the lower stop portion (231a); The male helical gear (233) is sleeved on the shaft cylinder portion (232a) of the female helical gear (232). The male helical gear (233) and the female helical tooth portion (232b) of the female helical gear (232) are simultaneously engaged with the shoulder fixed gear (22) with helical teeth. The adjusting spring (234) is sleeved on the upper shaft rod (231b), and the lower end of the adjusting spring (234) abuts against the top of the male helical gear (233). The upper stop (235) is arranged on the arm intermediate fixed shaft (231) and above the adjusting spring (234), and the lower surface of the upper stop (235) abuts against the upper end of the adjusting spring (234). The sliding key (236) is arranged in the key groove (232a1) and is fixed together with the male helical gear (233), so that the male helical gear (233) together with the sliding key can slide relative to the shaft cylinder portion (232a) in the up-and-down direction (D1) in the key groove (232a1).

5. The robotic arm (100) according to claim 1, characterized in that The wrist moving gear (35), the elbow intermediate gear (33), and the elbow fixed gear (32) are engaged with helical teeth.

6. The robotic arm (100) according to claim 5, characterized in that The elbow intermediate gear (33) has the same structure as the arm intermediate gear (23).

7. A wafer handling robot (1000), characterized in that, Comprising the robotic arm (100) according to any one of claims 1-6.

8. The wafer handling robot (1000) according to claim 7, wherein the wafer handling robot (1000) further includes a rotating mechanism (200), and the rotating mechanism (200) is fixedly connected to the shoulder plate (11) of the robotic arm (100) to drive the entire robotic arm (100) to rotate.

9. The wafer handling robot (1000) according to claim 8, wherein the rotating mechanism (200) includes a motor base (200a), a rotation driving motor (200b), a rotation driving gear (200c), a bearing mounting base (200d), a third bearing (200e), a slide post mounting base (200f), a large rotation gear (200g), and a slide post (200h); the rotation driving motor (200b) includes a body (200b1) and a rotating shaft (200b2), the body (200b1) is fixed on the upper surface of the motor base (200a), and the rotating shaft (200b2) passes downward through and exposes from the motor base (200a); the rotation driving gear (200c) is located below the motor base (200a) and is mounted on the rotating shaft (200b2); the bearing mounting base (200d) is annular and is fixedly connected to the motor base (200a); the third bearing (200e) is mounted in the bearing mounting base (200d); the lower end of the slide post mounting base (200f) is mounted in the third bearing (200e); the large rotation gear (200g) is fixed to the slide post mounting base (200f) from below in the up-down direction (D1), and the large rotation gear (200g) meshes with the rotation driving gear (200c); the lower end of the slide post (200h) is fixed to the slide post mounting base (200f), and the upper end of the slide post (200h) is used to be fixed to the shoulder plate (11) of the robotic arm (100).

10. The wafer handling robot (1000) according to claim 9, wherein the wafer handling robot (1000) further includes a lifting mechanism (300), and the lifting mechanism (300) is fixedly connected to the rotating mechanism (200) to drive the rotating mechanism (200) and the entire robotic arm (100) to lift together.

Images