Fluorescent x-ray analysis device

Abstract

A fluorescent X-ray analysis device includes: a sample stage formed with an opening portion, the sample stage placing a sample in a manner that the sample is exposed from the opening portion; an X-ray source irradiating primary X-rays from below the sample stage through the opening portion to the sample; a detector detecting fluorescent X-rays generated from the sample. The fluorescent X-ray analysis device further includes: an analysis section analyzing constituent elements based on the fluorescent X-rays; a measuring device measuring a height of a surface of the sample exposed from the opening portion; a determination section determining whether a height difference between the height measured by the measuring device and a height of an upper surface of the sample stage is within an allowable range; and a notification section notifying a determination result of the determination section. Thus, reliability of an analysis result can be recognized.

Description

Technical Field

[0001] This invention relates to a fluorescence X-ray analysis device. Background Technology

[0002] Previously, a fluorescent X-ray analysis device was known that irradiates a sample with X-rays and analyzes the constituent elements of the sample by detecting the fluorescent X-rays emitted from the sample. For example, Japanese Patent Application Publication No. 2020-085826 (Patent Document 1) discloses a fluorescent X-ray analysis device having the following structures (1) to (3).

[0003] (1) A sample stage having an opening, wherein the sample stage holds the sample in such a way that the sample is exposed from the opening.

[0004] (2) An X-ray source that allows X-rays to pass through an opening and irradiate the sample; and

[0005] (3) Detector that detects fluorescent X-rays generated from the sample.

[0006] Existing technical documents

[0007] Patent documents

[0008] Patent Document 1: Japanese Patent Application Publication No. 2020-085826 Summary of the Invention

[0009] The problem the invention aims to solve

[0010] In the fluorescence X-ray analysis apparatus disclosed in Patent Document 1, the intensity of the fluorescence X-rays incident from the sample to the detector can vary depending on the condition of the sample placement on the sample stage. Therefore, the reliability of the analytical results from the fluorescence X-ray analysis apparatus also varies depending on the condition of the sample placement on the sample stage. For example, even if the sample contains a small amount of a restricted substance that is subject to the RoHS (Restriction of Hazardous Substances) directive, the restricted substance may not be detected. However, the analyst cannot identify the decrease in the reliability of the analytical results caused by the sample placement condition.

[0011] This disclosure was made to solve the above-mentioned problems, and its purpose is to provide a fluorescence X-ray analysis device capable of identifying the reliability of analysis results.

[0012] Solution for solving the problem

[0013] One aspect of the present invention relates to a fluorescence X-ray analysis apparatus for analyzing the constituent elements of a sample. The fluorescence X-ray analysis apparatus includes: a sample stage having an opening, wherein the sample is placed on the sample such that it exposes the sample through the opening; an X-ray source that irradiates the sample with primary X-rays passing through the opening from below the sample stage; and a detector that detects the fluorescence X-rays generated from the sample. The fluorescence X-ray analysis apparatus further includes: an analysis unit that analyzes the constituent elements based on the fluorescence X-rays; a measuring device that measures the height of the surface of the sample exposed from the opening; a determination unit that determines whether the height difference between the height measured by the measuring device and the height of the upper surface of the sample stage is within an acceptable range; and a notification unit that notifies the determination unit of the determination result.

[0014] The effects of the invention

[0015] According to the present invention, a fluorescence X-ray analysis apparatus capable of identifying the reliability of analysis results can be provided. Attached Figure Description

[0016] Figure 1 This is a diagram that schematically illustrates the overall structure of the fluorescence X-ray analysis apparatus according to Embodiment 1.

[0017] Figure 2 This is a diagram showing an example of the internal structure of the measuring device according to Embodiment 1.

[0018] Figure 3 This is a flowchart illustrating an example of the processing flow of the fluorescence X-ray analysis apparatus according to Embodiment 1.

[0019] Figure 4 This is a diagram illustrating an example of the relative positional relationship between the specimen and the opening when the height difference is determined to be outside the allowable range.

[0020] Figure 5 This is a diagram showing the structure of the measuring device involved in the modified example.

[0021] Figure 6 This is a diagram that schematically illustrates the overall structure of the fluorescence X-ray analysis apparatus according to Embodiment 2.

[0022] Figure 7 This is a flowchart illustrating an example of the processing flow of the fluorescence X-ray analysis apparatus according to Embodiment 2.

[0023] Figure 8 This is a diagram showing the structure of the moving mechanism involved in the modified example. Detailed Implementation

[0024] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings. Furthermore, the same or equivalent parts in the drawings will be labeled with the same reference numerals, and their descriptions will generally not be repeated.

[0025] [Implementation Method 1]

[0026] <Overall Structure of Fluorescence X-ray Analysis Device>

[0027] Figure 1 This is a diagram that schematically illustrates the overall structure of the fluorescence X-ray analysis apparatus according to Embodiment 1 of this disclosure. The fluorescence X-ray analysis apparatus 100 analyzes the constituent elements of the sample S. The fluorescence X-ray analysis apparatus 100 is, for example, an energy-dispersive fluorescence X-ray analysis apparatus.

[0028] like Figure 1 As shown, the fluorescence X-ray analysis apparatus 100 includes a sample chamber 1, a measurement chamber 2, and a computer 3. The sample chamber 1 and the measurement chamber 2 are hermetically enclosed by a housing 4, which maintains the internal space as a vacuum as needed. The housing 4 has, for example, a cuboid shape.

[0029] The sample chamber 1 includes a sample stage 11 at its bottom. An opening 12 is formed in the sample stage 11. The sample S is placed on the upper surface 11a of the sample stage 11 such that at least a portion of it protrudes from the opening 12. The sample S can be solid, powder, or liquid. However, if the sample S is powder or liquid, it is placed in a sample cup.

[0030] The measuring chamber 2 includes an X-ray source 21, a detector 22, a measuring device 23, and a support member 24. The X-ray source 21 is positioned below the sample stage 11. The X-ray source 21 directs primary X-rays from below the sample stage 11 through the opening 12 to irradiate the sample S. The X-ray source 21 has a filament that emits thermionic electrons and a target that converts the thermionic electrons into a predetermined primary X-ray beam for emission. The center of the primary X-ray beam of the X-ray source 21 is aligned with the center of the opening 12.

[0031] The detector 22 is positioned below the sample stage 11 and receives fluorescent X-rays (secondary X-rays) generated from the sample S through the opening 12, and detects the energy and intensity of the fluorescent X-rays.

[0032] The X-ray source 21 and detector 22 are configured such that the intensity of the fluorescent X-rays detected by detector 22 is maximized when the height of the surface Sa exposed from the opening 12 in the sample S in the vertical direction (Z-axis in the figure) is the same as the height of the upper surface 11a of the sample stage 11.

[0033] Alternatively, a filter can be provided between the X-ray source 21 and the opening 12 to attenuate the background components in the primary X-rays emitted from the X-ray source 21, thereby increasing the S / N ratio of the desired characteristic X-rays. Alternatively, a collimator can be provided between the X-ray source 21 and the opening 12 to determine the size of the primary X-ray beam irradiating the sample S.

[0034] The measuring device 23 measures the height of the surface Sa exposed from the opening 12 in the sample S relative to a reference horizontal plane. In Embodiment 1, the measuring device 23 is a laser rangefinder.

[0035] Figure 2 This is a diagram illustrating an example of the internal structure of the measuring device 23 according to Embodiment 1. Figure 2 As shown, the measuring device 23 has a light-emitting part 23a and a light-receiving part 23b. The light-emitting part 23a irradiates a laser 60 toward the center of the opening 12. The light-receiving part 23b receives the laser 60 reflected from the surface Sa of the sample S. The measuring device 23 measures the height H1 of the surface Sa exposed from the opening 12 in the sample S using known methods such as phase difference detection, triangulation, or TOF (Time of Flight). The height H1 of the surface Sa is represented by the distance between the reference horizontal plane 50 and the surface Sa along the vertical direction (Z-axis direction in the figure). The reference horizontal plane 50 is, for example, a horizontal plane that includes the point from which light is emitted from the light-emitting part 23a.

[0036] like Figure 1 As shown, the support member 24 supports the X-ray source 21, the detector 22, and the measuring device 23. Therefore, the relative positions of the X-ray source 21, the detector 22, and the measuring device 23 with respect to the opening 12 are fixed.

[0037] The computer 3 includes a processor 30, a memory 31, a storage device 32, an input device 33, and a display device 34.

[0038] The processor 30 is composed of, for example, a CPU (Central Processing Unit) or an MPU (Microprocessing Unit). The processor 30 reads various programs stored in the storage device 32, expands them in the memory 31, and executes them. The memory 31 is composed of, for example, volatile storage devices such as DRAM (Dynamic Random Access Memory) or SRAM (Static Random Access Memory). The storage device 32 is composed of, for example, non-volatile storage devices such as SSD (Solid State Drive) or HDD (Hard Disk Drive).

[0039] Input device 33 includes, for example, a keyboard, mouse, touch panel, etc. Display device 34 is, for example, a liquid crystal display.

[0040] like Figure 1 As shown, the processor 30 executes a program, thereby realizing the determination unit 35, the X-ray source control unit 36, the detector control unit 37, the analysis unit 38, and the notification unit 39.

[0041] The determination unit 35 determines the height H1 measured by the measuring device 23 and the height H2 of the upper surface 11a of the sample stage 11 (refer to...). Figure 2 The determination unit 35 checks whether the height difference ΔH (=H1-H2) is within the allowable range. The height H2 of the upper surface 11a relative to the reference horizontal plane 50 is determined in advance based on the installation position of the measuring device 23. Therefore, the determination unit 35 can store the predetermined height H2 in advance and calculate the height difference ΔH. The allowable range of the height difference ΔH is determined in advance in a way that will not output incorrect analysis results due to changes in the height difference ΔH. The allowable range of the height difference ΔH is, for example, -0.2mm to 0.2mm.

[0042] In response to an instruction to begin analysis, the X-ray source control unit 36 ​​is input to the input device 33, and primary X-rays are emitted from the X-ray source 21.

[0043] The detector control unit 37 acquires a fluorescence spectrum from the detector 22 in response to the emission of primary X-rays from the X-ray source 21. The fluorescence spectrum represents the intensity of fluorescent X-rays at each energy.

[0044] The analysis unit 38 analyzes the constituent elements of sample S based on fluorescence spectroscopy. Specifically, the analysis unit 38 performs qualitative and quantitative analysis of the constituent elements. The analysis unit 38 outputs the analysis results. For example, the analysis unit 38 generates data representing the analysis results and saves the generated data in a designated folder. Alternatively, the analysis unit 38 displays the analysis results on the display device 34.

[0045] The notification unit 39 notifies the judgment unit 35 of the judgment result. Specifically, the notification unit 39 determines that the height difference ΔH is outside the allowable range before inputting the instruction to start the analysis to the input device 33, and displays a warning indicating that the position of the sample S is inappropriate on the display device 34. Thus, by checking the warning displayed on the display device 34, the analyst can recognize that the reliability of the analysis results is reduced if the analysis has started in the current state. Therefore, the analyst can change the position of the sample S to avoid a decrease in reliability. The warning may also include a message prompting the change of the position of the sample S.

[0046] Furthermore, the notification unit 39 analyzes the constituent elements based on the fluorescence spectrum detected by the analysis unit 38 when the height difference ΔH is outside the allowable range, and adds information indicating that the height difference ΔH is outside the allowable range to the analysis results. Thus, by confirming the information added to the analysis results, the analyst can recognize that the analysis results were obtained under inappropriate conditions, and that the reliability of the analysis results is low.

[0047] <Processing flow of fluorescence X-ray analysis device>

[0048] Figure 3 This is a flowchart illustrating an example of the processing flow of the fluorescence X-ray analysis apparatus according to Embodiment 1.

[0049] like Figure 3 As shown, the measuring device 23 measures the height H1 of the surface Sa of the sample S exposed from the opening 12 (step S1).

[0050] The processor 30 calculates the height difference ΔH (=H1-H2) between the height H1 of the processor and the height H2 of the upper surface 11a of the sample stage 11, and determines whether the height difference ΔH is within the predetermined allowable range (step S2).

[0051] If the height difference ΔH is outside the allowable range (No in step S2), the processor 30 issues a warning indicating that the position of the sample S is inappropriate (step S3).

[0052] Figure 4 This is a diagram illustrating an example of the relative positional relationship between the specimen and the opening when the height difference ΔH is determined to be outside the permissible range. Figure 4 The surface of the sample S shown has multiple recesses 70. Therefore, as Figure 4 As shown, if the sample S is placed on the sample stage 11 with one of the recesses 70 covering the opening 12, the height difference ΔH between the height H1 of the surface Sa of the sample S exposed from the opening 12 and the height H2 of the upper surface 11a of the sample stage 11 is outside the allowable range. In this case, a warning is issued. Thus, the analyst can recognize that the reliability of the analysis results is reduced if the analysis is started in the current state, and adjust the position of the sample S. For example, the analyst can reposition the sample S on the sample stage 11 with none of the recesses 70 covering the opening 12.

[0053] like Figure 3 As shown, if the height difference ΔH is within the allowable range ("Yes" in step S2) or after step S3, the processor 30 determines whether an instruction to start the analysis has been input to the input device 33 (step S4). If no instruction to start the analysis has been input ("No" in step S4), the fluorescence X-ray analysis device 100 returns the process to step S1.

[0054] When an instruction to start analysis is entered ("Yes" in step S4), processor 30 emits primary X-rays from X-ray source 21 and acquires a fluorescence spectrum from detector 22. Then, processor 30 analyzes the constituent elements of sample S based on the fluorescence spectrum (step S5).

[0055] Next, the processor 30 outputs the analysis results (step S6). If step S5 was performed when the height difference ΔH was outside the allowable range, the processor 30 appends information indicating that the height difference ΔH is outside the allowable range to the analysis results. Thus, the analyst can recognize that the analysis results were obtained under inappropriate conditions and that the reliability of the analysis results is low.

[0056] <Variation Example>

[0057] In the above description, the measuring device 23 is a laser rangefinder. However, the measuring device 23 is not limited to a laser rangefinder, as long as it can measure the height H1 of the surface Sa of the sample S exposed from the opening 12. For example, the measuring device 23 can also be a device for performing three-dimensional image measurement.

[0058] Figure 5 This is a diagram showing the structure of the measuring device involved in the modified example. For example... Figure 5 As shown, the measuring device 23 includes an illumination unit 23c, at least one camera unit 23d, and an image processing unit 23e.

[0059] Illumination unit 23c illuminates the opening 12 from below the sample stage 11. At least one camera unit 23d is configured to include the opening 12 and its surroundings within its field of view and to capture images of the opening 12 from below.

[0060] The image processing unit 23e generates a three-dimensional image based on the image obtained by at least one camera unit 23d, and uses the generated three-dimensional image to calculate the height H1 of the surface Sa of the sample S exposed from the opening 12.

[0061] The image processing unit 23e can generate a three-dimensional image using a known method. Known methods for three-dimensional image measurement include stereo methods and active stereo methods. Stereo methods utilize the principle of triangulation to generate a three-dimensional image based on images from two cameras positioned side-by-side. In the case of using stereo methods, the measuring device 23 includes multiple camera units 23d. Active stereo methods use the same principle of triangulation as stereo methods, but generate a three-dimensional image based on images when patterned light is applied. Active stereo methods require one camera and one projector. Therefore, in the case of using active stereo methods, the measuring device 23 only needs to include one camera unit 23d.

[0062] As described above, the area around the opening 12 is included within the field of view of at least one camera unit 23d. That is, the lower surface 11b of the sample stage 11 is captured in the captured image. The height H3 of the lower surface 11b of the sample stage 11 relative to the measuring device 23 is known. Therefore, the image processing unit 23e uses the three-dimensional image to calculate the height difference ΔHa (=H1-H3) between the captured portion of the lower surface 11b and the captured portion of the surface Sa of the sample S exposed from the opening 12. The image processing unit 23e has the known height H3 pre-stored, and calculates the height H1 by substituting H3 and ΔHa into the calculation formula H1=H3+ΔHa.

[0063] Furthermore, the image processing unit 23e can also be implemented by the processor 30 of the computer 3. In this case, the processor 30 is part of the measuring device 23. That is, the processor 30 acquires images from at least one camera unit 23d and generates a three-dimensional image based on the acquired images. The processor 30 uses the three-dimensional image to calculate the height H1 of the surface Sa of the sample S exposed from the opening 12.

[0064] [Implementation Method 2]

[0065] <Overall Structure of Fluorescence X-ray Analysis Device>

[0066] Figure 6This is a diagram that schematically illustrates the overall structure of the fluorescence X-ray analysis apparatus according to Embodiment 2 of this disclosure. The fluorescence X-ray analysis apparatus 100A differs from the fluorescence X-ray analysis apparatus 100 according to Embodiment 1 in that it includes a computer 3A instead of a computer 3, and also includes a moving mechanism 5.

[0067] The moving mechanism 5 is an XY stage that moves along the upper surface 11a of the sample stage 11. The sample S is mounted on the moving mechanism 5. Therefore, the moving mechanism 5 enables the sample S to move along the upper surface 11a of the sample stage 11.

[0068] Similar to the computer 3 described in Embodiment 1, the computer 3A includes a processor 30, a memory 31, a storage device 32, an input device 33, and a display device 34. However, the processor 30 implements the determination unit 35, the X-ray source control unit 36, the detector control unit 37, the analysis unit 38, and the notification unit 39 by executing the program stored in the storage device 32, and further implements the drive unit 80.

[0069] The drive unit 80 controls the movement of the moving mechanism 5. Specifically, the drive unit 80 controls the movement of the moving mechanism 5 by controlling the operation of a motor (not shown) included in the moving mechanism 5.

[0070] The drive unit 80 moves the moving mechanism 5 by a predetermined amount in a predetermined direction based on the determination unit 35's assessment that the height difference ΔH is outside the allowable range. For example, the drive unit 80 moves the moving mechanism 5 by an amount ΔX along the X-axis. Or, the drive unit 80 moves the moving mechanism 5 by an amount ΔY along the Y-axis. Thus, as... Figure 6 As shown, even if the sample S is placed on the upper surface 11a of the sample stage 11 with the recess 70 covering the opening 12, the sample S can be moved to a position where the recess 70 does not cover the opening 12 by moving the moving mechanism 5. As a result, the decrease in the reliability of the analysis results can be suppressed.

[0071] <Processing flow of fluorescence X-ray analysis device>

[0072] Figure 7 This is a flowchart illustrating an example of the processing flow of the fluorescence X-ray analysis apparatus according to Embodiment 2.

[0073] Figure 7 The flowchart shown is Figure 3 The difference between the flowchart shown and the one in question is that, if "No" is answered in step S2, steps S11 to S13 are included. Therefore, steps S11 to S13 will be explained, while the explanation of other steps will be omitted.

[0074] If the height difference ΔH is outside the allowable range (No in step S2), the processor 30 determines whether the number of moves n since the start of processing exceeds a predetermined N (step S11). N is, for example, 10. The number of moves n is... Figure 7 The start time of the process shown is reset to 0 times.

[0075] If the number of moves n does not exceed N ("No" in step S11), the processor 30 moves the moving mechanism 5 in a predetermined direction by a predetermined amount (step S12). For example, the processor 30 may also move the moving mechanism 5 by an amount ΔX along the X-axis. Alternatively, the processor 30 may also move the moving mechanism 5 by an amount ΔY along the Y-axis. Alternatively, the processor 30 may move the moving mechanism 5 by an amount ΔX along the X-axis when n is odd, and by an amount ΔY along the Y-axis when n is even.

[0076] After step S12, the processor 30 increments the number of moves n by 1 (step S13). After step S13, the fluorescence X-ray analysis device 100A returns the process to step S1.

[0077] If the number of moves n does not exceed N ("No" in step S11), the processor 30 executes the processing of step S3.

[0078] According to the fluorescence X-ray analysis apparatus 100A of Embodiment 2, when the height difference ΔH is outside the allowable range, the moving mechanism 5 moves the sample S. Therefore, the height difference ΔH can be automatically brought within the allowable range. As a result, the hassle of adjusting the position of the sample S by the analyst can be eliminated.

[0079] However, depending on the sample S, there may be situations where, even after N moves, the height difference ΔH is not within the allowable range. The fluorescence X-ray analysis apparatus 100A only issues a warning indicating that the position of sample S is inappropriate in such cases. Therefore, the frequency of warnings is reduced compared to the case in Embodiment 1. As a result, the frequency with which the analyst adjusts the position of sample S based on the warnings is also reduced.

[0080] <Variation Example>

[0081] In the above description, the moving mechanism 5 is an XY stage. However, the moving mechanism 5 is not limited to an XY stage, and can be any mechanism that moves the sample S along the upper surface 11a of the sample stage 11.

[0082] Figure 8 This is a diagram illustrating the structure of the moving mechanism involved in the modified example. For example... Figure 8As shown, the moving mechanism 5 includes a plurality of rollers 51 embedded in the sample stage 11. The plurality of rollers 51 are arranged around the opening 12. A portion of the rollers 51 protrudes from the upper surface 11a of the sample stage 11. Therefore, the sample S placed on the sample stage 11 comes into contact with the rollers 51 and moves accordingly with the rotation of the rollers 51. Figure 8 The illustrated roller 51 has a rotation axis along the Y-axis. Therefore, the sample S moves accordingly along the X-axis due to the rotation of the roller 51.

[0083] The rotation shafts of multiple rollers 51 are mounted on the sample stage 11 such that the height difference between the upper end of the roller 51 and the upper surface 11a of the sample stage 11 is within an allowable range.

[0084] like Figure 8 As shown, even if the sample S is placed on the sample stage 11 with the recess 70 covering the opening 12, the rotation of the roller 51 can automatically move the sample S to a position where the recess 70 does not cover the opening 12. As a result, the height difference ΔH is within the allowable range, eliminating the hassle of adjusting the position of the sample S by the analyst.

[0085] Furthermore, the rotation axes of the multiple rollers 51 can also be movable in the vertical direction (Z-axis direction). Before rotating the multiple rollers 51, the drive unit 80 moves the rotation axis upwards so that a portion of each roller 51 protrudes from the upper surface 11a of the sample stage 11. As a result, the sample S contacts the multiple rollers 51 and moves accordingly with their rotation. After the rotation drive of the multiple rollers 51 ends, the drive unit 80 moves the rotation axis downwards so that the upper end of each roller 51 is below the height of the upper surface 11a of the sample stage 11. As a result, the height difference ΔH can be made close to 0.

[0086] [Way]

[0087] Those skilled in the art will understand that the above-described exemplary embodiments and their variations are specific examples of the following approaches.

[0088] (First item) A fluorescence X-ray analysis apparatus (100, 100A) according to one method analyzes the constituent elements of a sample. The fluorescence X-ray analysis apparatus includes: a sample stage (11) having an opening (12) on which the sample (S) is placed so that the sample (S) is exposed from the opening; an X-ray source (21) that irradiates the sample with primary X-rays passing through the opening from below the sample stage; and a detector (22) that detects the fluorescence X-rays generated from the sample. The fluorescence X-ray analysis apparatus further includes: an analysis unit (38) that analyzes the constituent elements based on fluorescence X-rays; a determination unit (35) that determines whether the height difference between the height measured by the measuring device and the height of the upper surface (11a) in the sample stage is within an allowable range; and a notification unit (39) that notifies the determination unit of the determination result.

[0089] Based on the above structure, the analyst can identify the reliability of the analytical results of the constituent elements of sample S by confirming the judgment results.

[0090] (Second item) In the fluorescence X-ray analysis apparatus described in the first item, the notification unit issues a warning indicating that the position of the sample is inappropriate based on the determination that the height difference is outside the allowable range.

[0091] Based on the above structure, by recognizing the warning, the analyst can understand that starting the analysis in the current state would reduce the reliability of the analytical results. Therefore, the analyst can adjust the position of the sample to avoid outputting unreliable analytical results.

[0092] (Third item) In the fluorescence X-ray analysis apparatus described in the first or second item, the notification unit adds information indicating that the height difference is outside the allowable range to the analysis results of the analysis unit, based on the analysis unit's analysis of the constituent elements under the condition that the height difference is outside the allowable range.

[0093] Based on the above structure, analysts can recognize, by verifying the information attached to the analysis results, that the results were obtained under inappropriate conditions and that the reliability of the analysis results is low.

[0094] (Fourth item) The fluorescence X-ray analysis apparatus described in any one of the first to third items further comprises a moving mechanism (5) that moves the sample along the upper surface based on the determination that the height difference is outside the allowable range.

[0095] Based on the above structure, even if the sample is placed on the sample stage in an improper state, the sample can be moved to the proper position by moving the moving mechanism. As a result, the hassle of adjusting the position of the sample by the analyst can be eliminated.

[0096] (Fifth item) In any of the first to fourth items of the fluorescence X-ray analysis apparatus, the measuring device is a laser rangefinder.

[0097] (Sixth item) In the fluorescence X-ray analysis apparatus described in any one of items one through four, the measuring device includes: an illumination unit (23c) that illuminates the opening with illumination light; an imaging unit (23d) that captures images of the opening; and an image processing unit (23e) that generates a three-dimensional image based on the image captured by the imaging unit and uses the three-dimensional image to calculate the height of the surface.

[0098] Based on the structure of item 5 or 6, the height of the surface of the specimen exposed from the opening can be measured with high precision.

[0099] The embodiments should be considered illustrative in all respects and not restrictive. The scope of the invention is shown not by the description of the above embodiments but by the claims, including all modifications within the meaning and scope of the claims.

[0100] Explanation of reference numerals in the attached figures

[0101] 1: Sample chamber; 2: Measurement chamber; 3, 3A: Computer; 4: Housing; 5: Moving mechanism; 11: Sample stage; 11a: Upper surface; 11b: Lower surface; 12: Opening; 21: X-ray source; 22: Detector; 23: Measuring device; 23a: Light-emitting part; 23b: Light-receiving part; 23c: Illumination part; 23d: Camera part; 23e: Image processing part; 24: Supporting component; 30: Processor; 31: Memory; 32: Storage device; 33: Input device; 34: Display device; 35: Judgment unit; 36: X-ray source control unit; 37: Detector control unit; 38: Analysis unit; 39: Notification unit; 50: Reference horizontal plane; 51: Roller; 60: Laser; 70: Recess; 80: Drive unit; 100, 100A: Fluorescence X-ray analysis device; S: Sample; Sa: Surface.

Claims

1. A fluorescence X-ray analysis apparatus for analyzing the constituent elements of a sample, the fluorescence X-ray analysis apparatus comprising: A sample stage having an opening, wherein the sample is placed on the sample in such a way that the sample is exposed from the opening; An X-ray source that allows primary X-rays to pass through the opening from below the sample stage and irradiate the sample; A detector that detects fluorescent X-rays generated from the sample; An analytical unit that analyzes the constituent elements based on the fluorescent X-rays; A measuring device for measuring the height of the surface of the sample exposed from the opening relative to a reference horizontal plane, wherein the reference horizontal plane is disposed in the measuring device; The determination unit determines whether the height difference between the height measured by the measuring device and the height of the upper surface of the sample stage relative to the reference horizontal plane is within an allowable range; and The notification department notifies the determination department of the determination result.

2. The fluorescence X-ray analysis apparatus according to claim 1, wherein, The notification unit issues a warning indicating that the sample's position is inappropriate based on the determination that the height difference is outside the allowable range.

3. The fluorescence X-ray analysis apparatus according to claim 1 or 2, wherein, The notification unit appends information indicating that the height difference is outside the allowable range to the analysis result of the analysis unit, based on the analysis performed by the analysis unit on the constituent elements when the height difference is outside the allowable range.

4. The fluorescence X-ray analysis apparatus according to claim 1, wherein, It also includes a moving mechanism that moves the sample along the upper surface based on a determination that the height difference is outside the allowable range.

5. The fluorescence X-ray analysis apparatus according to claim 1, wherein, The measuring device is a laser rangefinder.

6. The fluorescence X-ray analysis apparatus according to claim 1, wherein, The measuring device includes: An illumination unit that illuminates the opening; The camera unit, which captures images of the opening; and The image processing unit generates a three-dimensional image based on the image captured by the camera unit, and uses the three-dimensional image to calculate the height of the surface.

Images