Dust removal device

Abstract

A dust removal device with good ease of use is provided. The dust removal device has an outlet (30a(30)) and a suction port (21a, 21b, 22a, 22b) that are opposite to the surface of the relatively moving object (100) and arranged at predetermined intervals along the direction of the relative movement of the object (100). The dust removal device sprays gas onto the surface of the object (100) from the outlet (30) and draws gas from the surface of the object (100) through the suction ports (21a, 21b, 22a, 22b). The dust removal device is configured to have a gas ejection path (32b) that gradually expands from the opening (33) opposite to the object (100) to the outlet (30a).

Description

Technical Field

[0001] The present invention relates to a dust removal device that sprays gas onto the surface of a relatively moving object and draws the gas from the surface of the object, thereby removing dust from the surface of the object. Background Technology

[0002] Conventionally, a dust removal device described in Patent Document 1 is known. This dust removal device is arranged opposite to a sheet (the object to be dusted) that abuts against a guide roller (support portion). The sheet is wound around the guide roller and conveyed by its rotation. Slit-shaped nozzles and suction ports (openings of the suction box) extending in a direction perpendicular to the conveying direction (relative to the moving direction) of the sheet are formed in the dust removal device at predetermined intervals, with the nozzles positioned upstream of the suction ports in the conveying direction. Furthermore, during the conveying of the sheet, the dust removal device sprays air from the nozzles onto the surface of the sheet and draws air from the surface of the sheet through the suction ports. Dust adhering to the surface of the sheet is removed by the air sprayed from the nozzles and floats, and this floating dust, along with the air, is drawn in through the suction ports. Thus, the dust adhering to the surface of the sheet is removed (dust removal).

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 5-138136 Summary of the Invention

[0006] The problem that the invention aims to solve

[0007] However, in dust removal devices like those described above, such as Figure 1 As shown, due to the high-speed flow of air ejected from the nozzle O (opening) (refer to...) Figure 1 As indicated by the thick arrow, the static pressure decreases along the flow area, potentially creating a negative pressure BA (Bernoulli effect). When a negative pressure BA is generated along the flow area of ​​the ejected air, the conveying posture of the conveyed sheet material 100 may become disordered when it enters the area opposite the nozzle O and when it exits the nozzle O. This disordered conveying posture can lead to the sheet material 100 being drawn into the suction port due to air intake, or further exacerbate the disorder. This phenomenon is not limited to sheet-like objects; even plate-like objects can experience this negative pressure BA due to the Bernoulli effect.

[0008] Therefore, when dust removal is performed on sheet-like objects conveyed as the guide rollers rotate, as described in Patent Document 1, this dust removal device is arranged opposite to the portion wound with tension around the guide rollers. Furthermore, when dust removal is performed on the surface of plate-like objects such as glass substrates or semiconductor substrates, the dust removal device is moved in a state opposite to the surface of the plate-like object fixed to the adsorption worktable, and dust removal is performed on the surface of the plate-like object using air ejection and suction. Moreover, when conveying plate-like objects using a roller conveyor, even when performing single-sided dust removal, the plate-like object to be dusted moves between two opposing dust removal devices. This cancels out the influence of the air ejected from the opposing dust removal devices, thereby maintaining a stable posture of the conveyed plate-like object.

[0009] Thus, in the past, the configuration of the objects to be dusted was relatively flexible, and special mechanisms (such as adsorption worktables and additional dust removal devices) were required to ensure the stability of the objects' posture, which may have made them less convenient to use.

[0010] The present invention was made in view of the following circumstances, providing a dust removal device that is easy to use.

[0011] Methods for solving problems

[0012] (Application typically involves spray nozzles)

[0013] The dust removal device of the present invention includes an outlet and a suction port that are opposite to the surface of a relatively moving object to be dusted and arranged at predetermined intervals along the direction of the relative movement of the object. The dust removal device sprays gas onto the surface of the object from the outlet and draws gas from the surface of the object through the suction port. The dust removal device is configured to have a gas ejection path that gradually expands from the opening opposite the object to the outlet.

[0014] According to this structure, when the object being dusted moves relative to it, gas is ejected from the opening through a gradually widening gas ejection path and from the nozzle towards the surface of the object. The ejection pressure of the gas ejected from the opening along the inner circumferential wall of the gas ejection path and from the peripheral portion of the nozzle is less than the ejection pressure of the gas ejected directly from the portion of the nozzle opposite the opening, not along the inner wall of the gas ejection path. Therefore, the ejection pressure of the gas ejected from the portion of the nozzle opposite the opening can be maintained at a desired pressure, and the ejection pressure of the gas ejected from the peripheral portion of the nozzle can be reduced. By reducing the ejection pressure of the gas ejected from the peripheral portion of the nozzle, it is difficult to generate a negative pressure state due to the Bernoulli effect in the opposite region of the peripheral portion of the nozzle. Therefore, the object being dusted, being blown with gas ejected from the nozzle, is less affected by a negative pressure state due to the Bernoulli effect, and thus the object being dusted, being blown with this gas, can move relatively stably. The gas ejected from the nozzle is blown toward the surface of the object being dusted, which is moving relatively steadily, and the gas on the surface of the object is drawn in through the suction port, thereby removing the dust from the surface of the object (dust removal).

[0015] In the dust removal device of the present invention, the cross section of the gas outlet perpendicular to the surface of the object to be dusted can be configured to have a shape that gradually expands in an arc shape.

[0016] With this structure, gas is ejected from the nozzle through the opening along the gradually widening inner circumferential wall of the gas ejection path, and directly ejected from the portion of the nozzle opposite to the opening. Thus, as previously described, the ejection pressure of the gas ejected from the portion of the nozzle opposite to the opening can be maintained at a desired pressure, and the ejection pressure of the gas ejected from the peripheral portion of the nozzle can be reduced.

[0017] (Multiple seam types)

[0018] Furthermore, the dust removal device of the present invention is configured to have an outlet and a suction port facing the surface of a relatively moving object to be dusted and arranged and extending at predetermined intervals along the direction of the relative movement of the object to be dusted. The dust removal device sprays gas onto the surface of the object to be dusted from the outlet and draws gas from the surface of the object to be dusted through the suction port. The outlet includes a plurality of slits arranged along a direction that traverses the direction of the relative movement of the object to be dusted and extending in a direction that traverses the arrangement direction. The dust removal device also has gas ejection paths respectively disposed opposite to the plurality of slits and extending from an opening facing the object to the slits. The cross section of the gas ejection path perpendicular to the slit has a shape that gradually widens from the opening to the slit.

[0019] According to this structure, when the objects being dusted move relative to each other, gas is ejected from the openings through gradually widening gas ejection paths and from multiple slits. The ejection pressure of the gas ejected from the openings along the inner circumferential wall of the gas ejection path and from both ends of the slits in the direction of relative movement of the objects being dusted is less than the ejection pressure of the gas ejected directly from the portion of the slit opposite the opening, not along the inner circumferential wall of the gas ejection path. Therefore, the ejection pressure of the gas ejected from the portion of each slit opposite the opening can be maintained at a desired pressure, and the ejection pressure of the gas ejected from both ends of each slit can be reduced. By reducing the ejection pressure of the gas ejected from both ends of each slit, it is difficult to generate a negative pressure state caused by the Bernoulli effect in the opposing regions at both ends of each slit. Therefore, the objects being dusted, which are being blown with gas ejected from the multiple slits constituting the nozzles, are less affected by a negative pressure state caused by the Bernoulli effect, and thus the objects being dusted with this gas can move relatively stably. Gas ejected from the plurality of slits (outlets) is blown toward the surface of the object being dusted, which is moving stably relative to the object, and the gas on the surface of the object is drawn in through the suction port, thereby removing the dust from the surface of the object (dust removal).

[0020] In the dust removal device of the present invention, the cross-section can be configured such that it gradually expands in an arc shape.

[0021] With this structure, gas is ejected from both ends of each slit from the opening along the gradually widening inner circumferential wall of the gas ejection path, while simultaneously being ejected directly from the portion of each slit opposite the opening, without following the inner circumferential wall of the gas ejection path. Thus, as described above, the ejection pressure of the gas ejected from the portion of each slit opposite the opening can be maintained at a desired pressure, while the ejection pressure of the gas ejected from both ends of each slit can be reduced.

[0022] In the dust removal device of the present invention, the plurality of slits can be configured such that they are formed obliquely relative to the direction of relative movement of the object to be dusted.

[0023] With this structure, gas can be blown from a plurality of discretely arranged slits to a larger area of ​​the surface of the object being dusted during relative movement, rather than blowing gas only to a plurality of strip-shaped areas.

[0024] In the dust removal device of the present invention, the plurality of slits can be arranged in parallel.

[0025] Based on this structure, gas is ejected from multiple parallel slits and blown onto the surface of the object being cleaned, which is moving relative to each other.

[0026] In the dust removal device of the present invention, the spray outlet can be configured such that the spray outlet includes a longitudinal slit that extends through the plurality of slits.

[0027] With this structure, on the surface of a relatively moving object to be cleaned, gases ejected from multiple slits can be blown at a desired pressure while maintaining the ejection pressure of the gas ejected from the longitudinal slits and the gas ejected from the portion opposite the opening at a reduced pressure. In this way, the gas ejected from the longitudinal slits interacts with the gases ejected from the multiple slits, thereby effectively removing dust from the surface of the relatively moving object.

[0028] In the dust removal device of the present invention, the plurality of slits can be configured such that they extend parallel to the direction of relative movement of the object to be dusted.

[0029] According to this structure, the gas ejected from the longitudinal slits and the gas ejected from multiple slits are blown onto the surface of the relatively moving dust-collecting object in multiple strips extending along the direction of its relative movement.

[0030] Invention Effects

[0031] According to the dust removal device of the present invention, it is difficult to generate a negative pressure state due to the Bernoulli effect caused by the high-speed gas ejected from the nozzle, thereby enabling the dust-removing object being blown with the gas ejected from the nozzle to move stably relative to it. As a result, the mechanism for enabling the dust-removing object subjected to the gas ejected from the nozzle to move stably relative to it can be simplified, thus improving ease of use. Attached Figure Description

[0032] Figure 1 It is a diagram illustrating the principle that the conveyed sheet becomes unstable due to the air (gas) ejected from the nozzle.

[0033] Figure 2 This is a diagram illustrating an application example of the dust removal device according to an embodiment of the present invention.

[0034] Figure 3 This is a front view showing the dust removal device according to the first embodiment of the present invention.

[0035] Figure 4 This is a top view showing a dust removal device according to the first embodiment of the present invention.

[0036] Figure 5 This is a side view showing a dust removal device according to the first embodiment of the present invention.

[0037] Figure 6 This is a bottom view showing the dust removal device according to the first embodiment of the present invention.

[0038] Figure 7 It shows the dust removal device along Figure 6 A cross-sectional view of the section of line AA.

[0039] Figure 8 It is a magnified cross-sectional view showing the gas ejection path to the nozzle (slit).

[0040] Figure 9 It is a line graph showing the ejection pressure of the air ejected from the nozzle (slit).

[0041] Figure 10 This is a bottom view showing the dust removal device according to the second embodiment of the present invention.

[0042] Figure 11 It shows the dust removal device along Figure 10 A cross-sectional view of the section of line AA.

[0043] Figure 12 It shows the dust removal device along Figure 10 A cross-sectional view of the BB line.

[0044] Figure 13 This is a diagram showing a modified example of the nozzle.

[0045] Figure 14 The figure illustrates other application examples of the dust removal device according to embodiments of the present invention.

[0046] Figure 15 This is a figure illustrating another application example of the dust removal device according to an embodiment of the present invention. Detailed Implementation

[0047] Hereinafter, embodiments of the present invention will be described using the accompanying drawings.

[0048] The dust removal device 10 of this invention is applied, for example, to a system for removing dust from sheet-like materials 100. In this system, such as... Figure 2 As shown, the sheet 100, which is the object to be dusted, is fed from the delivery roller 51 and extends towards the winding roller 54 via tension rollers 52 and 53. Through the synchronized rotation of the winding roller 54 and the delivery roller 51, the sheet 100 is subjected to a certain tension and is conveyed from the delivery roller 51 toward the winding roller 54 (conveyance direction Dcv). The dust removal device 10 can be configured opposite to the portion of the sheet 100 wound on the tension roller 52. Furthermore, since the dust removal device 10 does not have a support portion such as rollers at its back, it can also be configured opposite to the portion between the delivery roller 51 and the tension roller 52 of the sheet 100.

[0049] The dust removal system for the sheet material 100 is configured as described above (see reference). Figure 2The dust removal device 10 of the first embodiment of the present invention is, for example, as shown in the example... Figures 3-6 It is constructed as shown. Additionally... Figure 3 This is a front view showing the dust removal device. Figure 4 This is a top view showing the dust removal device. Figure 5 This is a side view showing the dust removal device. Figure 6 This is a bottom view showing the dust removal device.

[0050] exist Figure 2 as well as Figures 3 to 5 In this process, the dust removal device 10 has a direction perpendicular to the conveying direction Dcv (relative movement direction) of the sheet 100 (and... Figure 2 A long, strip-shaped dust collector head 11 extends (vertically from the paper surface) and an exhaust pipe unit 13 extends along the upper surface of the dust collector head 11. The exhaust pipe unit 13 has an opening at its bottom, and a flange 13a is formed at the edge of the opening (see reference). Figure 3 , Figure 4 And the following Figure 7 The flange 13a of the exhaust duct unit 13 is fixed to the upper surface of the dust collector head 11 by multiple bolts, thereby making the dust collector unit 11 and the exhaust duct unit 13 an integral unit, thus forming a space inside the exhaust duct unit 13 as an exhaust path. An exhaust port 14 is provided on the side of the exhaust duct unit 13. The exhaust port 14 is connected to a suction mechanism (e.g., a vacuum pump: not shown), and by the action of the suction mechanism, the air (gas) passing through the exhaust path of the exhaust duct unit 13 is discharged to the outside through the exhaust port 14.

[0051] An air supply port 12 is provided on the side of the dust collector head 11. The air supply port 12 is connected to an air supply mechanism (e.g., a pressure pump: not shown) that supplies pressurized air. Using the operation of this air supply mechanism, pressurized air is introduced into the dust collector head 11 (the air jet chamber 15 described later) through the air supply port 12. The dust collector head 11 has a structure in which the head block 11a overlaps with the suction adjustment plate 11b (see reference). Figure 3 and the following Figure 7 ).

[0052] like Figure 6As shown, elongated rectangular front first suction port 21a and front second suction port 21b extending along the front edge (the upstream edge of the conveying direction Dcv of the sheet 100) are formed in an arrangement on the surface (bottom surface) of the dust collector head 11 (head block 11a) opposite to the sheet 100. Furthermore, elongated rectangular rear first suction port 22a and rear second suction port 22b extending along the rear edge (the downstream edge of the conveying direction Dcv of the sheet 100) are formed in an arrangement on this surface. Moreover, a nozzle 30 composed of multiple slits 30a is formed on the surface (bottom surface) of the dust collector head 11 (head block 11a) opposite to the sheet 100, sandwiched between two side-by-side front suction ports 21a, 21b and two side-by-side rear suction ports 22a, 22b.

[0053] The plurality of slits 30a constituting the nozzle 30 are arranged along the length direction of the dust removal head 11 (head block 11a) (a direction that traverses (e.g., is perpendicular to) the conveying direction Dcv of the sheet 100). Moreover, the plurality of slits 30a extend in a direction that traverses their arrangement direction (a direction that traverses the width direction of the sheet 100, i.e., the length direction of the dust removal head 11), and are inclined obliquely relative to the conveying direction Dcv of the sheet 100.

[0054] like Figure 7 (showing along) Figure 6 As shown in the cross-sectional view along line AA), in the head block 11a, an air injection chamber 15, a front air suction chamber 16a, and a rear air suction chamber 16b are formed, each serving as a space opening at the joint surface with the suction adjustment plate 11b. The air injection chamber 15 is located at the center of the head block 11a in the width direction and extends along the length direction (towards...). Figure 7 The front air suction chamber 16a is formed along the front edge of the head block 11a (corresponding to the upstream side of the conveying direction Dcv of the sheet 100), and the rear air suction chamber 16b is formed along the rear edge of the head block 11a (corresponding to the downstream side of the conveying direction Dcv of the sheet 100).

[0055] Furthermore, the front suction adjustment hole 17a and the rear suction adjustment hole 17b are formed through the suction adjustment plate 11b. The front suction adjustment hole 17a is formed along the front edge of the suction adjustment plate 11b (the upstream edge in the conveying direction Dcv of the sheet 100), and the rear suction adjustment hole 17b is formed along the rear edge of the suction adjustment plate 11b (the downstream edge in the conveying direction Dcv of the sheet 100). The head block 11a and the suction adjustment plate 11b are fixed together with the aforementioned exhaust pipe unit 13 (flange 13a) in an overlapping state by a plurality of bolts. In this overlapping state of the head block 11a and the suction adjustment plate 11b, the air injection chamber 15 of the head block 11a is closed by the suction adjustment plate 11b. Furthermore, when the head block 11a overlaps with the suction adjustment plate 11b, the front air suction chamber 16a and the rear air suction chamber 16b of the head block 11a are respectively opposite to the front suction adjustment hole 17a and the rear suction adjustment hole 17b of the suction adjustment plate 11b.

[0056] The first front suction port 21a (and the second front suction port 21b are the same) formed on the bottom surface of the head block 11a communicates with the space (exhaust path) within the exhaust pipe unit 13 through the front air suction chamber 16a and the front suction adjustment hole 17a formed on the suction adjustment plate 11b. The first rear suction port 22a (and the second rear suction port 22b are the same) formed on the bottom surface of the head block 11a communicates with the space (exhaust path) within the exhaust pipe unit 13 through the rear air suction chamber 16b and the rear suction adjustment hole 17b formed on the suction adjustment plate 11b. As a result, air passing through the exhaust path (space) of the exhaust pipe unit 13 is discharged to the outside through the exhaust port 14, and air is drawn in through the front first suction port 21a (the same is true for the front second suction port 21b) and the rear first suction port 22a (the same is true for the rear second suction port 22b) which are connected to the space inside the exhaust pipe unit 13.

[0057] The plurality of slits 30a forming the nozzle 30 on the bottom surface of the head block 11a are respectively located at the bottom of the air injection chamber 15 along the length direction of the head block 11a. Figure 7 The grooves 31, formed by extending in a manner perpendicular to the paper surface, are connected, thereby allowing pressurized air introduced from the air supply port 12 into the air injection chamber 15 to be ejected from multiple slits 30a. More specifically, as... Figure 8 As shown, the connecting path 32a extending from the groove 31 is connected to the gas ejection path 32b reaching the slit 30a via the opening 33. The cross-section of the gas ejection path 32b perpendicular to the slit 30a is shown. Figure 8 As shown along Figure 6 The cross section of line AA becomes a shape that gradually expands from opening 33 to slit 30a, specifically, it becomes a shape that gradually expands in an arc shape.

[0058] The operation of the dust removal device 10 with the structure described above will be explained.

[0059] The sheet 100 is subjected to a certain tension by the synchronous rotation of the feed roller 51 and the winding roller 54, and is conveyed from the feed roller 51 toward the winding roller 54 (conveying direction Dcv) (see reference). Figure 2 In this process, for example, a dust removal device 10 disposed between the feed roller 51 and the tension roller 52 removes dust from the surface of the sheet 100 as follows.

[0060] As the sheet 100 moves, air ejected from the plurality of slits 30a constituting the nozzle 30 of the dust removal device 10 is blown toward the surface of the sheet 100, and the air on the surface of the sheet 100 is drawn in through the front first suction port 21a, the front second suction port 21b, the rear first suction port 22a, and the rear second suction port 22b. Dust that floats on the surface of the sheet 100 due to the air ejected from the plurality of slits 30a (nozzles 30) is drawn in along with the air through the front first suction port 21a, the front second suction port 21b, the rear first suction port 22a, and the rear second suction port 22b. Thus, the surface of the sheet 100 is dusted.

[0061] Here, we focus on the air ejected through the gas ejection path 32b and from the multiple slits 30a that constitute the ejection outlet 30.

[0062] like Figure 8 As shown, high-pressure air from the air injection chamber 15 passes through the slot 31 and the connecting part 32a, exits through the opening 33, through the gradually widening gas ejection path 32b, and out of the slit 30a. The ejection pressure of the air ejected from the slit 30a is as follows: Figure 9 The air is distributed as shown. That is, the ejection pressures Pe1 and Pe2 of the air ejected from the upstream end and downstream end of the slit 30a respectively from the opening 33 along the inner peripheral wall of the gas ejection path 32b are less than the ejection pressure Pc of the air ejected directly from the portion of the slit 30b opposite to the opening 33 that does not follow the inner peripheral wall of the gas ejection path 32b.

[0063] Therefore, the ejection pressure of the air ejected from the portion of each slit 30a opposite to the opening 33 can be maintained at the desired pressure, and the ejection pressures Pe1 and Pe2 of the air ejected from both ends of each slit 30a can be reduced. By reducing the ejection pressure of the air ejected from both ends of each slit 30a, it is difficult to reduce the ejection pressure in the opposing regions Eb1 and Eb2 (refer to...) at both ends of each slit 30a. Figure 8This generates a negative pressure state due to the Bernoulli effect. As a result, the sheet 100, to which air is blown from the plurality of slits 30a constituting the nozzle 30, is less affected by the negative pressure state caused by the Bernoulli effect, thus allowing the sheet 100 to move stably (to be conveyed). Furthermore, air is blown from the plurality of slits 30a onto the surface of this stably conveyed sheet 100 as described above, and the air on the surface of the sheet 100 is drawn through the front first suction port 21a, the front second suction port 21b, the rear first suction port 22a, and the rear second suction port 22b, thereby removing dust from the surface of the sheet 100 (dust removal).

[0064] According to the dust removal device 10 described above, it is difficult to generate a negative pressure state due to the Bernoulli effect caused by the high-speed air ejected from the nozzle 30 (each of the plurality of slits 30a), thereby enabling stable conveying of the sheet material 100 while being blown by air ejected from the plurality of slits 30a (nozzles 30). As a result, even if the dust removal device 10 is configured such that there are no rollers or the like behind it (e.g., Figure 2 The portion of the tension roller 52) support that is opposite to, for example, the portion between the feed roller 51 and the tension roller 52 of the sheet 100 (see reference). Figure 2 It can also stably transport the sheet 100 and remove dust from its surface. In this way, the restrictions on the placement of the dust removal device 10, which is subject to the air ejected from the nozzle 30, are reduced (which relates to the simplification of the mechanism for the stable movement of the sheet 100 subject to the air), thereby making the dust removal device 10 more convenient to use.

[0065] Furthermore, each of the plurality of slits 30a constituting the nozzle 30 is inclined obliquely relative to the conveying direction Dcv of the sheet 100, so that during the conveying of the sheet 100, air can be blown from the discretely arranged plurality of slits 30a to a larger area of ​​the surface of the sheet 100, rather than blowing gas only to a plurality of strip-shaped areas.

[0066] The dust removal device 10 of the second embodiment of the present invention will be described.

[0067] The dust removal device 10 of the second embodiment is the same as the dust removal device of the first embodiment, such as... Figures 3 to 5 It is configured as shown. Furthermore, this dust removal device 10 differs from the dust removal device of the first embodiment in that the spray outlet is as shown... Figure 10 It forms as shown.

[0068] exist Figure 10In the head block 11a (dust removal head 11), the nozzle 36 is formed on the surface (bottom surface) opposite the sheet 100 (dust removal object) of the head block 11a (dust removal head 11) in such a manner that it is sandwiched between two front suction ports 21a, 21b and two rear suction ports 22a, 22b. The nozzle 36 includes a longitudinal slit 36a and a plurality of slits 36b. The longitudinal slit 36a extends along its length direction (a direction transverse to the conveying direction Dcv of the sheet 100) at the center of the width direction (conveyance direction Dcv of the sheet 100) of the dust removal head 11a. The plurality of slits 36b are arranged along the length direction of the head block 11a (a direction transverse to (perpendicular to) the conveying direction Dcv of the sheet 100) and extend in a direction transverse to its length direction, specifically, in a direction perpendicular to its length direction (conveyance direction Dcv of the sheet 100). That is, the relationship between the longitudinal seam 36a and the multiple seams 36b is that the longitudinal seam 36a crosses the multiple seams 36b, specifically, the longitudinal seam 36a and the multiple seams 36b are perpendicular.

[0069] like Figure 11 (along Figure 10 As shown in the cross-section of line AA, the longitudinal slit 36a communicates with the air injection chamber 15 through a groove 31 formed at the bottom of the air injection chamber 15. Thus, air introduced into the air injection chamber 15 from the air supply port 12 is ejected from the longitudinal slit 36a. The plurality of slits 36b are also as shown in the cross-section of line AA. Figure 12 As shown, the air jet chamber 15 is connected to the air jet chamber 15 via a groove 31 formed at the bottom, thereby pressurized air introduced into the air jet chamber 15 from the air supply port 12 is ejected from a plurality of slits 36b. If each slit 36b is observed in more detail, it is the same as in the dust removal device of the first embodiment, such as... Figure 8 As shown, the connecting path 32a extending from the groove 31 is connected to the gas ejection path 32b reaching the slit 36b via the opening 33. The cross-section of the gas ejection path 32b perpendicular to the slit 36b is shown. Figure 12 As shown along Figure 10 The cross section of the BB line becomes a shape that gradually expands from the opening 33 to the slit 36b, specifically, it becomes a shape that gradually expands in an arc shape.

[0070] In the dust removal device 10 having the dust removal head 11 as described above, air is ejected from the longitudinal slits 36a and multiple slits 36b, and the air is drawn in through the front first suction port 21a, the front second suction port 21b, the rear first suction port 22a, and the rear second suction port 22b. Thus, similar to the dust removal device of the first embodiment, dust is removed from the surface of the sheet material 100 that is conveyed to the ground opposite to the dust removal device 10 (dust removal head 11).

[0071] Furthermore, upon detailed observation, the situation is similar to that of the dust removal device in the first embodiment described above (see...). Figure 8 , Figure 9 Similarly, the air pressure ejected from the portions of the plurality of slits 36b opposite to the opening 33 is maintained at the desired pressure, and the air ejection pressure gradually decreases toward the two ends of the slit 36b (upstream end and downstream end) (see reference). Figure 9 Thus, by reducing the ejection pressure of the air ejected from both ends of each slit 36b, it becomes difficult to penetrate the opposing regions Eb1 and Eb2 (see reference) at both ends of each slit 36b. Figure 8 This generates a negative pressure state due to the Bernoulli effect. On the other hand, air at the desired pressure is directly ejected from the longitudinal slit 36a.

[0072] The sheet 100 enters the air ejected from multiple slits 36b (opposite region Eb1: reference) Figure 8 The sheet 100 moves while being subjected to gradually increasing air pressure, without being affected by the negative pressure state caused by the Bernoulli effect. Thus, the sheet 100 can move in a stable posture. Furthermore, the sheet 100 moves while being subjected to air ejected at a desired pressure from the longitudinal slit 36a and air ejected at a desired pressure from the portions of the plurality of slits 36b opposite the opening 33. At this time, in the portion between the two slits 36b of the longitudinal slit 36a, due to the high-speed flow of the ejected air, the static pressure along this flow area decreases, potentially generating a negative pressure (Bernoulli effect: see [reference]). Figure 1 In this region, even if a negative pressure state is generated, the moving sheet 100 is pressed by the air whose pressure gradually increases from the two adjacent slits 36b, thus preventing the sheet 100 from becoming disordered.

[0073] Furthermore, the sheet 100, through which air is ejected from the longitudinal slit 36a, withstands air ejected from the plurality of slits 36b at gradually decreasing pressure, while simultaneously passing through the region opposite its downstream end (opposite region Eb2). Figure 8 (Refer to) detachment. In the region opposite to the downstream end of each slit 36b, as described above, it is difficult to generate a negative pressure state caused by the Bernoulli effect, so that the sheet 100 can pass through the region opposite to the downstream end of the plurality of slits 36b (opposite region Eb2) in a manner that does not cause it to be disordered.

[0074] According to the dust removal device 10 of the third embodiment of the present invention described above, air ejected from the longitudinal slit 36a and air ejected from the portion opposite the opening 33 are maintained at a desired pressure, and the ejection pressure of air ejected from both ends (upstream end and downstream end) is reduced. Air ejected from the plurality of slits 36b is then blown onto the surface of the conveyed sheet 100. In this way, the air ejected from the longitudinal slit 36a and the air ejected from the plurality of slits 36b work together to effectively remove dust from the surface without disrupting the posture of the conveyed sheet 100.

[0075] This allows for the stable transport of the sheet material 100 and the removal of dust from its surface, thus reducing the limitations on the placement of the dust removal device 10, which is designed to allow the sheet material 100 to move stably under the air ejected from the nozzle 36 (longitudinal slit 36a, multiple slits 36b). Therefore, the dust removal device 10 of the second embodiment is similar to that of the dust removal device of the first embodiment, but offers better ease of use.

[0076] In addition, in the dust removal device 10 described above (second embodiment), the plurality of slits 36b extend in a direction perpendicular to the length direction of the head block 11a (the direction that crosses (perpendicular to) the conveying direction Dcv of the sheet 100), but are not limited thereto. As in the first embodiment, they may also be inclined obliquely relative to the conveying direction Dcv of the sheet 100.

[0077] Furthermore, in each of the aforementioned dust removal devices 10, the spray outlet includes multiple slits, but is not limited to this. For example, such as Figure 13 As shown, an elongated orifice 45 extending along the conveying direction Dcv of the sheet 100 (e.g., perpendicular to the conveying direction Dcv of the sheet 100), i.e., the width direction of the dust collector head 11, can be formed. In this case, in the dust collector head 11 (head block 11a), a connecting path 46a extending further from the groove 31 continuous with the air injection chamber 15 is connected to a gas ejection path 46b reaching the elongated orifice 45 through an opening 47. The cross-section of the gas ejection path 46b perpendicular to the elongated orifice 45 (in...) Figure 13 (indicated by dashed lines) and the aforementioned content (refer to) Figure 8 It is the same as the opening 47, and becomes a shape that gradually expands from the opening 47 to the elongated hole 45, specifically, it becomes a shape that gradually expands in an arc shape.

[0078] In the dust removal device 10 with an elongated hole 45 as the nozzle, as described above, the ejection pressure of the air ejected from the upstream end EG1 of the conveying direction Dcv of the conveyed sheet 100 from the elongated hole 45 along the inner peripheral wall of the gas ejection path 46b from the opening 47 is less than the ejection pressure of the air ejected directly from the portion of the elongated hole 45 opposite to the opening 47 that does not follow the inner peripheral wall of the gas ejection path 46b. Therefore, the air pressure ejected from the portion of the elongated hole 45 opposite to the opening 47 can be maintained at a desired pressure, and the ejection pressure of the air ejected from the upstream end EG1 and the downstream end EG2 of the elongated hole 45 can be reduced.

[0079] Thus, by reducing the ejection pressure of the gas ejected from the upstream end EG1 and downstream end EG2 of the elongated hole 45, similarly to the above, it is difficult to generate a negative pressure state caused by the Bernoulli effect in the respective opposing regions Eb of the upstream end EG1 and downstream end EG2 of the elongated hole 45. As a result, the sheet 100 to which air is blown from the elongated hole 45 is less likely to be subjected to a negative pressure state caused by the Bernoulli effect, thereby allowing the sheet 100 to move stably. Moreover, air ejected from the elongated hole 45 (ejector) is blown onto the surface of the stably conveyed sheet 100, and the air on the surface of the sheet 100 is drawn through the front first suction port 21a, the front second suction port 21b, the rear first suction port 22a, and the rear second suction port 22b, thereby removing dust from the surface of the sheet 100 (dust removal).

[0080] In this configuration, the sheet material 100 can be conveyed stably, and dust on its surface can be removed. Therefore, the limitations on the placement of the dust removal device 10 for stably moving the sheet material 100 subjected to air ejected from the elongated hole 45 (exhaust outlet) are reduced. Consequently, the dust removal device is more convenient to use.

[0081] The dust removal devices 10 described above can be applied to systems for dust removal of plate-shaped materials such as glass substrates and semiconductor substrates. For example, instead of adsorbing and fixing the plate-shaped material 150, which will be the object of dust removal, onto an expensive adsorption worktable, they can be used as follows: Figure 14 As shown, a dust removal device 10 is placed on a simple base 60 and moved in this state, facing the surface of the plate 150. In this case, when air is ejected from the nozzle 30 (36) of the dust removal device 10 (dust removal head), it is difficult to generate a negative pressure state caused by the Bernoulli effect, so the posture of the plate 150 placed on the simple base 60 can be stably maintained (preventing it from floating), and dust on the surface of the plate 150 can be removed.

[0082] Additionally, for example, such as Figure 15As shown, the dust removal device 10 is not configured to face both sides of the plate-shaped object 150 being conveyed by the roller conveyor 62, but rather to face only one side of the plate-shaped object 150. In this case, it is difficult to generate a negative pressure state due to the Bernoulli effect when air is ejected from the nozzle 30 (36) of the dust removal device 10 (dust removal head). Therefore, the posture of the plate-shaped object 150 conveyed by the roller conveyor 62 can be stably maintained (preventing it from floating), and dust on the surface (one side) of the plate-shaped object 150 can be removed.

[0083] Thus, in the dust removal device 10 described above, when the plate 150 is used as the object to be dusted, the mechanism for stably moving the object to be dusted (plate 150) which is subjected to air ejected from the nozzle 30 (36) can be simplified (using a simple base 60 instead of an adsorption worktable, and using one dust removal device 10 opposite to the roller conveyor 150 instead of two dust removal devices opposite to the roller conveyor 150). As a result, the dust removal device 10 is more convenient to use.

[0084] The embodiments of the present invention have been described above, but these embodiments or variations thereof are presented as examples and are not intended to limit the scope of the invention. These new embodiments can be implemented in various other ways, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments or variations thereof are included within the scope or spirit of the invention and are included in the invention as described in the claims.

[0085] Industrial availability

[0086] The dust removal device of the present invention is easy to use and is useful as a dust removal device that sprays gas onto the surface of a relatively moving object and draws gas from the surface of the object, thereby removing dust from the surface of the object.

[0087] Label Explanation

[0088] 10: Dust removal device; 11: Dust removal head; 11a: Head block; 11b: Suction adjustment plate; 12: Air supply port; 13: Exhaust pipe unit; 13a: Flange; 14: Exhaust port; 15: Air injection chamber; 16a: Front air suction chamber; 16b: Rear air suction chamber; 17a: Front suction adjustment hole; 17b: Rear suction adjustment hole; 21a: First front suction port; 21b: Second front suction port; 22 a: First suction port on the rear side; 22b: Second suction port on the rear side; 30: Spray outlet; 30a: Slit; 31: Groove; 32a: Connecting path; 32b: Gas spray path; 33: Opening; 36: Spray outlet; 36a: Slit in the length direction; 36b: Slit; 45: Slender hole; 46a: Connecting path; 46b: Gas spray path; 47: Opening; 60: Base; 62: Roller conveyor; 100: Sheet; 150: Plate.

Claims

1. A dust removal device comprising a dust removal head disposed opposite to the surface of a dust removal object that moves in a predetermined direction relative to the dust removal head. The dust removal head has an outlet and a suction port formed on a surface opposite to the surface of the object being dusted and arranged at predetermined intervals along the direction of movement of the object relative to the dust removal head. The dust removal device sprays gas from the nozzle onto the surface of the object to be dusted and draws the gas from the surface of the object through the suction port. in, The nozzle includes a plurality of slits arranged along a direction transverse to the direction of movement of the object being dusted relative to the dust removal head. Each slit extends along the direction transverse to the arrangement of the plurality of slits and is formed obliquely relative to the direction of movement of the object being dusted relative to the dust removal head. The dust removal head also has a gas ejection path formed in such a way that it extends from an opening opposite to the surface of the object being dusted to the slit, respectively, relative to the plurality of slits. The cross-section of the gas ejection path, which is parallel to and perpendicular to the extension direction of the slit, has a shape that gradually widens from both ends of the opening toward the extension direction of the slit.

2. The dust removal device according to claim 1, wherein, The cross-section has a shape that gradually expands in an arc shape.

3. The dust removal device according to claim 1, wherein, The multiple slits are arranged in parallel.

4. The dust removal device according to claim 1, wherein, The surface of the dust removal head opposite the surface of the object to be dusted has a portion that extends from the suction port toward the spray outlet and is close to the surface of the object to be dusted.

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