A method and control device for monitoring the level of a process chamber and its base.

Abstract

This application provides a method and control device for monitoring the level of a process chamber and its base. The process chamber includes a base, a bell jar, at least two distance sensors, and a control device. The base is located inside the bell jar; the upper surface of the base is circular; at least two distance sensors are positioned above the base and outside the bell jar; the at least two distance sensors are on the same horizontal plane, and their projected positions on the base are distributed around the center of the base, with the same distance to the center; the at least two distance sensors measure multiple vertical distances to the base during at least one rotation of the base, and transmit these distances to the control device; the control device determines whether the base is level based on these multiple distances. This application enables monitoring of the base's level status after the bell jar is installed, and improves the accuracy of this monitoring.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a method and control device for monitoring the level of a process chamber and a base. Background Technology

[0002] The basic principle of chemical vapor deposition (CVD) epitaxial growth is to deliver process gases into a process chamber, where heating causes a reaction that deposits a film onto the wafer. During this process, the wafer is typically placed in a slot on a substrate, allowing the substrate to continuously rotate the wafer. Therefore, the levelness of the substrate within the process chamber module is crucial for the uniformity of the epitaxial wafer's thickness, resistivity, and overall thickness consistency.

[0003] Currently, there are two methods for monitoring the level of the base: one is to calibrate the base before installing the bell, but the disordered orientation of the base during assembly may cause it to change level, making it impossible to measure whether the base is level inside the bell; the other is to monitor temperature fluctuations at the center of the base to determine its levelness, but due to the lag in temperature fluctuations, the accuracy of base level monitoring is low, and data feedback is not timely, leading to substandard product quality. Therefore, how to monitor the base level after installing the bell is an urgent issue to consider. Summary of the Invention

[0004] This application provides a method and control device for monitoring the level of a process chamber and a base, in order to solve the problem in the prior art that the level of the base cannot be monitored after the bell is installed.

[0005] In a first aspect, this application provides a process chamber, including a base, a bell jar, at least two ranging sensors, and a control device;

[0006] The base is located inside the bell jar; the upper surface of the base is circular;

[0007] The at least two distance sensors are disposed above the base and outside the bell jar; the at least two distance sensors are on the same horizontal plane, and the projection positions of the at least two distance sensors on the base are distributed around the center of the base and are equidistant from the center of the base; the at least two distance sensors are used to measure multiple vertical distances from the base to the base during at least one rotation of the base, and send the multiple distances to the control device;

[0008] The control device is used to determine whether the base is horizontal based on the plurality of distances.

[0009] Secondly, this application provides a method for monitoring the level of a base, the method being applied to the process chamber of claim 1, the process chamber comprising a base, a bell jar, at least two ranging sensors, and a control device, the method comprising:

[0010] During the process of the base rotating at least one revolution, the distances from the at least two ranging sensors to the base in the vertical direction are measured, and the multiple distances are sent to the control device;

[0011] Based on the multiple distances, determine whether the base is level.

[0012] Thirdly, this application provides a control device including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the steps of the method as described in the first aspect or any possible implementation of the first aspect.

[0013] This application provides a method and control device for monitoring the level of a process chamber and a base. By installing at least two distance sensors outside the bell jar, the level of the base can be monitored after the bell jar is installed. By measuring multiple distances from the base to the at least two distance sensors in the vertical direction, it can be determined whether the base is level, thus improving the accuracy of monitoring the level of the base. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the structure of the process chamber provided in the embodiments of this application;

[0016] Figure 2 This is a schematic projection of two evenly distributed ranging sensors provided in an embodiment of this application;

[0017] Figure 3 This is a schematic diagram of the measurement points of the two ranging sensors on the base provided in the embodiments of this application;

[0018] Figure 4 This is a schematic projection of two non-uniformly distributed ranging sensors provided in an embodiment of this application;

[0019] Figure 5 This is a schematic projection diagram showing the three ranging sensors evenly distributed according to an embodiment of this application;

[0020] Figure 6 This is a schematic flowchart of the base level monitoring method provided in the embodiments of this application;

[0021] Figure 7 This is a schematic diagram of the base level monitoring device provided in the embodiments of this application;

[0022] Figure 8 This is a schematic diagram of the control device provided in the embodiments of this application. Detailed Implementation

[0023] In the following description, specific details such as particular system architectures and techniques are set forth for illustrative purposes and not for limitation, in order to provide a thorough understanding of the embodiments of this application. However, those skilled in the art will understand that this application may also be implemented in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, apparatuses, circuits, and methods have been omitted so as not to obscure the description of this application with unnecessary detail.

[0024] To make the objectives, technical solutions, and advantages of this application clearer, the following description will be provided in conjunction with the accompanying drawings and specific embodiments.

[0025] Figure 1 This is a schematic diagram of the structure of the process chamber provided in an embodiment of this application. Figure 1 As shown, the process chamber includes a base 11, a bell jar 12, at least two ranging sensors, and a control device 16.

[0026] The base 11 is located inside the bell jar 12. The upper surface of the base 11 is circular.

[0027] At least two ranging sensors are positioned above the base 11 and outside the bell jar 12. The at least two ranging sensors are on the same horizontal plane, and their projected positions on the base 11 are distributed around the center of the base 11, with all sensors at the same distance from the center. The at least two ranging sensors are used to measure multiple vertical distances from the base 11 during at least one rotation of the base 11, and transmit these distances to the control device 16.

[0028] The control device 16 is used to determine whether the base 11 is horizontal based on multiple distances.

[0029] Among them, since the base 11 is circular, such as Figure 1 As shown, if at least two ranging sensors include two ranging sensors, namely ranging sensor 13 and ranging sensor 14, then the purpose of placing the two ranging sensors on the same horizontal plane is to ensure that the vertical distances from the two ranging sensors to the base 11 are the same. (Refer to...) Figure 2Distance sensors 13 and 14 are on the same horizontal plane and are level with the plane of the base 11; the projection positions of the two distance sensors on the base 11 are distributed around the center of the base 11. (Refer to...) Figure 2 The distance from the projection position A of the ranging sensor 13 onto the base 11 and the projection position B of the ranging sensor 14 onto the base 11 to the center O of the base 11 are the same, that is, AO = BO.

[0030] The control device 16 is connected to at least two ranging sensors wirelessly or via a wired connection, which is not limited here. (See reference...) Figure 1 The connection line between the control device 16 and at least two ranging sensors is a dashed line, indicating that... Figure 1 The control device 16 is wirelessly connected to at least two ranging sensors to acquire multiple distance data sent by the at least two ranging sensors to determine whether the base 11 is horizontal.

[0031] In one possible implementation, the projected positions of at least two ranging sensors on the base 11 are uniformly distributed around the center O of the base 11. The at least two ranging sensors include a first ranging sensor 13 and a second ranging sensor 14.

[0032] The first ranging sensor 13 is used to measure the first vertical distance l1 of N measuring points on the base 11 during the first cycle of uniform rotation of the base 11;

[0033] The second distance sensor 14 is used to measure the second vertical distance l2 of N measurement points on the base 11 during the first cycle of uniform rotation of the base 11.

[0034] Among them, reference Figure 2 If there are two ranging sensors, then the projection positions of the two ranging sensors on the base 11 are evenly distributed around the center O of the base 11. That is, the ranging sensors 13 and 14 divide the entire circular base 11 into two equal parts, and the projection positions A of the ranging sensor 13 and B of the ranging sensor 14 on the base 11 are the same distance from the center O of the base 11.

[0035] In this embodiment, the N measurement points measured by the first ranging sensor 13 and the second ranging sensor 14 on the base 11 are the same number and the same position of measurement points during the first cycle of uniform rotation of the base 11. The distribution of the measurement points is specifically referred to... Figure 3 Based on the same number and location of measurement points, the first distance l1 and the second distance l2, comprising N measurement points, are obtained respectively. The specific distances are referenced in [reference needed]. Figure 2 .

[0036] In one possible implementation, the N / 2 measurement points measured by the first ranging sensor 13 in the first half of the first cycle correspond to the N / 2 measurement points measured by the second ranging sensor 14 in the second half of the first cycle.

[0037] The N / 2 measurement points measured by the first ranging sensor 13 in the second half of the first cycle correspond to the N / 2 measurement points measured by the second ranging sensor 14 in the first half of the first cycle.

[0038] In the embodiments of this application, reference is made to Figure 3 The base 11 rotates clockwise at a constant speed. Figure 3 (In the direction indicated by the middle arrow). Assume that at the beginning of a cycle, the point projected onto the base by the first ranging sensor 13 is point A, and the point projected onto the base by the second ranging sensor 14 is point B. Figure 3 The straight line containing midpoints A and B divides the base into equal parts. Figure 3 The base consists of two semicircles, one above the other. Within one cycle, the base rotates clockwise. Assume that within this cycle, the first ranging sensor 13 and the second ranging sensor 14 each measure N measurement points. Then, in the first half of this cycle, the first ranging sensor 13 measures... Figure 3 The second ranging sensor 14 measures the N / 2 measurement points in the lower half-circle. Figure 3 The upper half of the circle contains N / 2 measurement points; during the latter half of the cycle, the first ranging sensor 13 measures... Figure 3 The second ranging sensor 14 measures the N / 2 measurement points in the upper semicircle. Figure 3 The N / 2 measurement points in the lower half of the circle. That is, the N / 2 measurement points measured by the first ranging sensor 13 in the first half of the cycle correspond to the N / 2 measurement points measured by the second ranging sensor 14 in the second half of the cycle. Figure 3 The points within the lower half-circle; the N / 2 measurement points measured by the first ranging sensor 13 in the second half-cycle of this period correspond to the N / 2 measurement points measured by the second ranging sensor 14 in the first half-cycle of this period, and are all the same. Figure 3 A point within the upper semicircle.

[0039] For example, refer to Figure 3 The i-th measurement point measured by the first ranging sensor 13 in the first half of a cycle corresponds to the i-th measurement point measured by the second ranging sensor 14 in the second half of a cycle.

[0040] In one possible implementation, the control device 16 is specifically used for:

[0041] For each measurement point, the first distance l1 obtained by the first ranging sensor 13 measuring the measurement point is subtracted from the second distance l2 obtained by the second ranging sensor 14 measuring the measurement point to obtain the first difference value corresponding to the measurement point;

[0042] If the first difference corresponding to all measurement points is less than or equal to the preset difference, then the base 11 is determined to be horizontal.

[0043] Alternatively, select multiple target measurement points from all measurement points. If the first difference corresponding to multiple target measurement points is less than or equal to the preset difference, then determine that the base 11 is horizontal.

[0044] In this embodiment of the application, for each measurement point i among N measurement points, the first distance l of the i-th measurement point is measured by the first ranging sensor 13. i1 And the second distance l of the i-th measurement point measured by the second ranging sensor 14 i2 The data is sent to the control device 16, and the control device 16 sends the first distance l. i1 Second distance l i2 The difference is calculated to obtain the first difference value of the i-th measurement point. The calculation process for the first difference value of the remaining measurement points is the same, thus obtaining the first difference value corresponding to each measurement point.

[0045] The following two judgment conditions can be used for the judgment process:

[0046] The first method is to determine whether the first difference of all measurement points is less than or equal to the preset difference. If the first difference of all measurement points is less than or equal to the preset difference, then the base 11 is determined to be horizontal.

[0047] The second method is to select multiple target measurement points from all the measurement points if the intervals of the measurement points of the ranging sensor are relatively close, and determine whether the multiple target measurement points are all less than or equal to the preset difference. If the multiple target measurement points are all less than or equal to the preset difference, then the base 11 is determined to be horizontal.

[0048] This process involves selecting multiple target measurement points from all measurement points. A measurement point can be selected at preset intervals, such as one measurement point at a time, or two measurement points at a time. The specific preset interval can be set according to actual conditions and user needs. It is important to note that the intervals cannot be infinite, otherwise the acquired measurement points will not accurately determine the horizontal state of the base.

[0049] In one possible implementation, if two ranging sensors are present, the positions of the two ranging sensors can also be referenced. Figure 4As shown, the two distance sensors are projected onto the base 11 around the center O of the base 11, and their distances to the center O are the same, i.e., a = b. When the base 11 rotates clockwise at a constant speed, one cycle can be divided into four quarter cycles. The measurement point measured by the first distance sensor 13 in the first quarter cycle corresponds to the measurement point measured by the second distance sensor 14 in the second quarter cycle. If there are three distance sensors, as long as the corresponding positions of the three distance sensors are proportional and the measurement points at the corresponding positions are consistent, it is possible to determine whether the base is level based on the distance corresponding to the measurement points.

[0050] In one possible implementation, at least two ranging sensors include three ranging sensors, namely a first ranging sensor, a second ranging sensor, and a third ranging sensor. The projection positions A of the first ranging sensor onto the base 11, B of the second ranging sensor onto the base 11, and C of the third ranging sensor onto the base 11 form an equilateral triangle.

[0051] In this embodiment, the ranging sensor may include three ranging sensors: a first ranging sensor, a second ranging sensor, and a third ranging sensor. The projection positions of the three ranging sensors on the base 11 are distributed around the center O of the base 11, and are equidistant from the center, i.e., AO = BO = CO. Furthermore, the lines connecting the projection positions A, B, and C of the first, second, and third ranging sensors can form an equilateral triangle. Figure 5 Triangle ABC is an equilateral triangle, meaning AB = BC = CA.

[0052] based on Figure 5 Within one cycle of clockwise uniform rotation of base 11, base 11 is divided into arcs AB, BC, and CA, respectively. Arcs AB, BC, and CA correspond to the first, middle, and last three 1 / 3 cycles of a cycle. Assume that the three ranging sensors measure N measurement points on base 11 within one cycle. Specifically, in the first 1 / 3 cycle, the first ranging sensor measures N / 3 measurement points within arc AC, the second ranging sensor measures N / 3 measurement points within arc AB, and the third ranging sensor measures N / 3 measurement points within arc BC. That is, the N / 3 measurement points measured by the first ranging sensor in the first 1 / 3 cycle, the N / 3 measurement points measured by the second ranging sensor in the second 1 / 3 cycle, and the N / 3 measurement points measured by the third ranging sensor in the third 1 / 3 cycle correspond to the same value. Figure 5Points within the middle arc AC segment; the N / 3 measurement points measured by the first ranging sensor in the second 1 / 3 cycle of this period, the N / 3 measurement points measured by the second ranging sensor in the third 1 / 3 cycle of this period, and the N / 3 measurement points measured by the third ranging sensor in the first 1 / 3 cycle of this period, all correspond to the same point. Figure 5 Points within the BC segment of the middle arc; the N / 3 measurement points measured by the first ranging sensor in the third 1 / 3 cycle of this period, the N / 3 measurement points measured by the second ranging sensor in the first 1 / 3 cycle of this period, and the N / 3 measurement points measured by the third ranging sensor in the second 1 / 3 cycle of this period, all correspond to the same point. Figure 5 Points within the middle arc AB segment.

[0053] In one possible implementation, the control device 16 can also be used for:

[0054] From a plurality of distances measured by any one of at least two ranging sensors, select the maximum and minimum distances from the plurality of distances measured by that ranging sensor;

[0055] The difference between the maximum distance and the minimum distance is used to obtain the second difference value corresponding to the ranging sensor.

[0056] If the second difference value corresponding to the ranging sensor is less than or equal to the preset threshold, then the surface of the base 11 is determined to be flat.

[0057] In this embodiment of the application, multiple distances l measured by any one of at least two ranging sensors are... i The data is sent to the control device 16, which then selects the maximum distance l from among multiple distances l. max and minimum distance l min , the maximum distance l max and minimum distance l min The difference is calculated to obtain a second difference value l'. It is then determined whether the second difference value l' is less than or equal to a preset threshold ε. If the second difference value l' is less than or equal to the preset threshold ε, it is determined that the surface of the base 11 is flat, which indicates that the current base meets the usage standards.

[0058] For example, a preset threshold ε is set to 0.7 mm, and the first distance of 18 measurement points measured by the first ranging sensor 13 in the first cycle is selected. The specific data can be seen in Table 1.

[0059] Table 1 shows the first distances measured by the first ranging sensor at 18 measurement points.

[0060] position 1 2 3 4 5 6 7 8 9 value 105.885 105.815 105.905 105.99 105.965 105.89 105.865 105.755 105.73 position 10 11 12 13 14 15 16 17 18 value 105.635 105.455 105.615 105.65 105.665 105.67 105.815 105.82 105.795

[0061] It can be seen that the maximum distance is 105.99 mm corresponding to the 4th measurement point, and the minimum distance is 105.455 mm corresponding to the 11th measurement point. Therefore, the second difference l' equals 0.535 mm, that is, l' = l max -l min =105.99-105.455=0.535mm, where l'<ε indicates that the current base surface is flat, that is, the current base meets the usage standards.

[0062] In one possible implementation, the relationship between the rotational speed of the base 11 and the acquisition cycle of at least two ranging sensors can be:

[0063] The angle of one revolution of the base 11 at the rotation speed is compared with the number of ranging sensors to obtain the corresponding angle between at least two ranging sensors. The corresponding angle is then compared with the rotation speed of the base 11 to obtain the first duration, which is an integer multiple of the acquisition cycle of at least two ranging sensors.

[0064] In this embodiment, since the upper surface of the base 11 is circular, based on the number N of ranging sensors, the base 11 can be divided into N equal parts by calculating the ratio of the angle of one rotation to the number of ranging sensors N. Each part has an angle of 360° / N. The circumferential distance L corresponding to the angle of any part is... i For the circumferential distance L i The ratio of the rotational speed v of the base 11 to the first duration T1 is calculated. If it is an integer multiple of the sampling period T0 of each ranging sensor, it means that the rotational speed of the base at this time is an integer multiple of the sampling period of each ranging sensor, which can ensure that the measurement points of each ranging sensor on the base are consistent.

[0065] For example, if the rotational speed of the base is set to v, and two ranging sensors are used, then N = 2, and the sampling period of each ranging sensor is T0, then the circumference of the base can be divided into two equal semicircles, each with an angle of 180°, and the circumferential distance corresponding to each semicircle is L1. Where a is a positive integer greater than or equal to 1.

[0066] For example, if the rotational speed of the base is set to v, and two ranging sensors are used, then N = 3, and the sampling period of each ranging sensor is T0, then the circumference of the base can be divided into one-third circles, each one-third circle having an angle of 120°, and the circumferential distance corresponding to each one-third circle being L1. Then, by... Where b is a positive integer greater than or equal to 1.

[0067] In one possible implementation, the process chamber may further include a reaction chamber cover module 18, which is horizontally fixed above the bell jar 12. At least two ranging sensors are installed on the reaction chamber cover module 17 and located below it.

[0068] In the embodiments of this application, reference is made to Figure 1 The reaction chamber cover module 17 is horizontally fixed on the bell jar 12, and the positions of the reaction chamber cover module 17 and the bell jar 12 remain unchanged. At least two ranging sensors are fixed on the reaction chamber cover module 17, and at least two ranging sensors are located below the reaction chamber cover module 17, which can ensure that at least two ranging sensors are on the same horizontal plane.

[0069] In one possible implementation, at least two holes are provided above the bell jar 12, and at least two distance sensors measure multiple distances in the vertical direction from the base 11 through the at least two holes.

[0070] In this embodiment, since the base 11 is installed inside the bell jar 12, at least two holes are provided on the bell jar 12. At least two distance sensors are installed at the positions corresponding to the holes on the bell jar 12 so that the distance sensors can measure the base inside the bell jar 12 through the holes.

[0071] In one possible implementation, at least two ranging sensors are infrared sensors.

[0072] In this embodiment, at least two ranging sensors can be infrared sensors, which emit infrared light through holes in the bell jar 12 to measure the distance between the infrared sensors and the base 11.

[0073] For any infrared sensor, infrared rays are emitted perpendicularly to the base 11 inside the bell jar 12 through the hole on the bell jar 12 to measure the distance from the infrared sensor to the base. This ensures that the measured distance is the distance between the infrared sensor and the base 11.

[0074] In one possible implementation, the process chamber may also include a rotating shaft 15 for rotating the base at a uniform speed.

[0075] In one possible implementation, the rotating shaft 15 may also include a rotating button. When the control device 16 determines that the base 11 is not currently in a horizontal state, the rotating button can be adjusted to make the base 11 horizontal.

[0076] This application provides a process chamber that, by installing at least two distance sensors outside the bell jar, can monitor the horizontal state of the base after the bell jar is installed; by measuring multiple distances from the base to the base in the vertical direction from the at least two distance sensors, it can determine whether the base is horizontal, thereby improving the accuracy of monitoring the horizontal state of the base.

[0077] Figure 6 The implementation flowchart of the base level monitoring method provided in the embodiments of this application is described in detail below:

[0078] This method is applied to Figure 1 The process chamber shown includes a base 11, a bell jar 12, at least two ranging sensors, and a control device 16. The method includes:

[0079] In step 601, during the process of the base rotating at least one revolution, at least two distance sensors are measured to the base in the vertical direction at multiple distances, and the multiple distances are sent to the control device.

[0080] In this embodiment of the application, during the process of the base 11 rotating at least one revolution, at least two ranging sensors measure multiple distances from the base 11 in the vertical direction, and send the multiple distances to the control device 16.

[0081] In one possible implementation, if there are two ranging sensors, the first ranging sensor 13 measures the first distance of the base 11 in the vertical direction, and the second ranging sensor 14 measures the second distance of the base 11 in the vertical direction, and sends the first distance and the second distance to the control device 16 for calculation.

[0082] In one possible implementation, if there are three ranging sensors, the first ranging sensor measures multiple distances of the base 11 in the vertical direction, the second ranging sensor measures multiple distances of the base 11 in the vertical direction, and the third ranging sensor measures multiple distances of the base 11 in the vertical direction, and sends them to the control device 16.

[0083] In this embodiment of the application, when there are three ranging sensors, it is possible to accurately determine whether the base is level. However, according to user needs, multiple ranging sensors can also be used for measurement.

[0084] In step 602, it is determined whether the base is horizontal based on multiple distances.

[0085] In this embodiment of the application, the control device 16 determines whether the base 11 is horizontal based on multiple distances measured by at least two ranging sensors.

[0086] In one possible implementation, there are two ranging sensors. One of the ranging sensors is randomly selected, and the maximum distance l is selected from multiple distances measured by that ranging sensor. max and minimum distance l min The maximum distance l is controlled by the control device 16. max and minimum distance l min Calculate the difference to obtain the second difference. If the second difference is less than or equal to the preset threshold, it indicates that the surface of the base 11 is flat, which means that the current base meets the usage standards.

[0087] When determining whether the current base meets the usage standards, for each measurement point, the first distance measured by the first ranging sensor 13 and the second distance measured by the second ranging sensor 14 are subtracted to obtain the first difference value corresponding to that measurement point. The determination method includes:

[0088] If the first difference corresponding to all measurement points is less than or equal to the preset difference, then the base 11 is determined to be horizontal.

[0089] Alternatively, multiple target measurement points can be selected from all measurement points at preset intervals. If the first difference corresponding to multiple target measurement points is less than or equal to the preset difference, the base 11 is determined to be horizontal. The preset interval can be 1 measurement point, 2 measurement points, or can be set according to user needs.

[0090] This application provides a base leveling monitoring method. It uses at least two distance sensors to measure multiple distances to the base. First, it uses multiple distances from a single distance sensor to determine if the base surface is flat, improving the accuracy of quality inspection during use. When the base meets the usage standards, it calculates the difference between the distances measured by different distance sensors at the same measurement point to determine if the base is level. This improves the accuracy of base leveling detection, and requires a sufficient amount of data to reduce the error rate of base leveling detection, thereby increasing the product qualification rate.

[0091] It should be understood that the sequence number of each step in the above embodiments does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application.

[0092] The following are device embodiments of this application. For details not described in detail, please refer to the corresponding method embodiments described above.

[0093] Figure 7 A schematic diagram of the base level monitoring device provided in an embodiment of this application is shown. For ease of explanation, only the parts related to the embodiment of this application are shown, and are described in detail below:

[0094] like Figure 7 As shown, the base level monitoring device 7 includes:

[0095] Measurement module 71 is used to measure multiple distances in the vertical direction from at least two ranging sensors to the base during at least one rotation of the base, and to send the multiple distances to the control device.

[0096] The judgment module 72 is used to determine whether the base is horizontal based on multiple distances.

[0097] This application provides a base leveling monitoring device. It measures multiple distances to the base using at least two distance sensors. First, it uses multiple distances from a single distance sensor to determine if the base surface is flat, improving the accuracy of quality inspection during use. When the base meets the usage standards, it calculates the difference between distances measured by different distance sensors at the same measurement point to determine if the base is level. This improves the accuracy of base leveling detection, and requires a sufficient amount of data to reduce the error rate of base leveling detection, thereby increasing the product's pass rate.

[0098] Figure 8 This is a schematic diagram of the control device provided in an embodiment of this application. Figure 8 As shown, the control device 8 in this embodiment includes: a processor 80, a memory 81, and a computer program 82 stored in the memory 81 and executable on the processor 80. When the processor 80 executes the computer program 82, it implements the steps in the various embodiments of the base level monitoring method described above, for example... Figure 6 Steps 601 to 602 are shown. Alternatively, when the processor 80 executes the computer program 82, it implements the functions of each module in the above-described device embodiments, for example... Figure 7 The functions of modules 71 to 72 are shown.

[0099] For example, the computer program 82 can be divided into one or more modules, which are stored in the memory 81 and executed by the processor 80 to complete this application. The one or more modules / units can be a series of computer program instruction segments capable of performing a specific function, which describe the execution process of the computer program 82 in the control device 8. For example, the computer program 82 can be divided into... Figure 7 Modules 71 to 72 are shown.

[0100] The control device 8 can be a desktop computer, laptop, handheld computer, or cloud server, etc. The control device 8 may include, but is not limited to, a processor 80 and a memory 81. Those skilled in the art will understand that... Figure 8This is merely an example of control device 8 and does not constitute a limitation on control device 8. It may include more or fewer components than shown, or combine certain components, or different components. For example, the control device may also include input / output devices, network access devices, buses, etc.

[0101] The processor 80 may be a Central Processing Unit (CPU), or other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. A general-purpose processor may be a microprocessor or any conventional processor.

[0102] The memory 81 can be an internal storage unit of the control device 8, such as a hard disk or RAM of the control device 8. The memory 81 can also be an external storage device of the control device 8, such as a plug-in hard disk, Smart Media Card (SMC), Secure Digital (SD) card, or Flash Card equipped on the control device 8. Furthermore, the memory 81 can include both internal storage units and external storage devices of the control device 8. The memory 81 is used to store the computer program and other programs and data required by the control device. The memory 81 can also be used to temporarily store data that has been output or will be output.

[0103] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the above-described division of functional units and modules is merely an example. In practical applications, the above functions can be assigned to different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiments can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit. Furthermore, the specific names of the functional units and modules are only for easy differentiation and are not intended to limit the scope of protection of this application. The specific working process of the units and modules in the above system can be referred to the corresponding process in the foregoing method embodiments, and will not be repeated here.

[0104] In the above embodiments, the descriptions of each embodiment have different focuses. For parts that are not described in detail or recorded in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0105] Those skilled in the art will recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0106] In the embodiments provided in this application, it should be understood that the disclosed devices / terminals and methods can be implemented in other ways. For example, the device / terminal embodiments described above are merely illustrative. For instance, the division of modules or units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the displayed or discussed mutual coupling or direct coupling or communication connection may be through some interfaces; the indirect coupling or communication connection between devices or units may be electrical, mechanical, or other forms.

[0107] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0108] Furthermore, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0109] If the integrated module / unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, all or part of the processes in the methods of the above embodiments can also be implemented by a computer program instructing related hardware. The computer program can be stored in a computer-readable storage medium, and when executed by a processor, it can implement the steps of the various base level monitoring method embodiments described above. The computer program includes computer program code, which can be in the form of source code, object code, executable files, or certain intermediate forms. The computer-readable medium can include: any entity or device capable of carrying the computer program code, a recording medium, a USB flash drive, a portable hard drive, a magnetic disk, an optical disk, a computer memory, a read-only memory (ROM), a random access memory (RAM), an electrical carrier signal, a telecommunication signal, and a software distribution medium, etc. It should be noted that the content contained in the computer-readable medium may be appropriately added to or subtracted from the content as required by the legislation and patent practice in the jurisdiction. For example, in some jurisdictions, according to legislation and patent practice, the computer-readable medium may not include electrical carrier signals and telecommunication signals.

[0110] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.

Claims

1. A process chamber, characterized in that, It includes a base, a bell jar, at least two ranging sensors, and a control device; The base is located inside the bell jar; the upper surface of the base is circular; The at least two distance sensors are disposed above the base and outside the bell jar; the at least two distance sensors are on the same horizontal plane, and the projection positions of the at least two distance sensors on the base are distributed around the center of the base and are equidistant from the center of the base; the at least two distance sensors are used to measure multiple vertical distances from the base to the base during at least one rotation of the base, and send the multiple distances to the control device; The control device is used to determine whether the base is horizontal based on the plurality of distances; wherein the relationship between the rotation speed of the base and the acquisition period of the at least two ranging sensors is as follows: The angle between the at least two ranging sensors is obtained by comparing the angle of one revolution of the base at the rotation speed with the number of ranging sensors. The corresponding angle is then compared with the rotation speed of the base to obtain a first duration, which is an integer multiple of the acquisition cycle of the at least two ranging sensors. The projection positions of the at least two ranging sensors on the base are evenly distributed around the center of the base. The at least two ranging sensors include two ranging sensors, namely a first ranging sensor and a second ranging sensor. The first ranging sensor is used to measure the first vertical distance of N measuring points on the base during the first cycle of uniform rotation of the base; The second ranging sensor is used to measure the second vertical distance of the N measuring points on the base during the first cycle of uniform rotation of the base; The N / 2 measurement points measured by the first ranging sensor in the first half of the first cycle correspond to the N / 2 measurement points measured by the second ranging sensor in the second half of the first cycle. The N / 2 measurement points measured by the first ranging sensor in the second half of the first cycle correspond to the N / 2 measurement points measured by the second ranging sensor in the first half of the first cycle. The control device is specifically used to, for each measurement point, subtract the first distance obtained by the first ranging sensor from the second distance obtained by the second ranging sensor from the first distance obtained by the second distance obtained by the second ranging sensor from the first distance obtained by the first distance obtained by the second distance obtained by the second distance obtained by the second distance obtained by the first distance obtained by the second distance obtained by the second distance obtained by the first distance obtained by the second distance obtained by the second distance obtained by the first distance obtained by the second distance obtained by the second distance obtained by the second distance obtained by the second distance obtained by the third distance obtained by the second distance obtained by the third distance obtained by the second distance obtained by the third distance obtained by the second distance obtained by the second distance obtained by the third distance obtained by the second distance obtained by the second distance obtained by the first distance obtained by the second distance obtained by the second distance obtained by the second distance obtained by the first distance obtained by the second distance obtained by the second distance obtained by the second distance obtained by the first distance obtained by the first distance obtained by the second ... first distance obtained by the first distance obtained by the second distance obtained by the second distance obtained by the second distance obtained by the second distance obtained by the first distance obtained by the first distance obtained by the second distance obtained by the second distance obtained by the second distance obtained by the first distance obtained by the first distance obtained by the second distance obtained by the second distance obtained by the second distance obtained by the second distance obtained by the first distance obtained by the first distance obtained by the second distance obtained by the second distance obtained by the second distance obtained by the second distance obtained by the first distance obtained by the first distance obtained by the If the first difference corresponding to all measurement points is less than or equal to the preset difference, then the base is determined to be horizontal. Alternatively, multiple target measurement points can be selected from all measurement points. If the first difference corresponding to the multiple target measurement points is less than or equal to the preset difference, then the base is determined to be horizontal.

2. The process chamber according to claim 1, characterized in that, The control device is also used for: From a plurality of distances measured by any one of the at least two ranging sensors, select the maximum and minimum distances from the plurality of distances measured by that ranging sensor; The difference between the maximum distance and the minimum distance is used to obtain the second difference value corresponding to the ranging sensor; If the second difference value corresponding to the ranging sensor is less than or equal to a preset threshold, then the base surface is determined to be flat.

3. The process chamber according to claim 1, characterized in that, The process chamber also includes a reaction chamber cover module, which is horizontally fixed above the bell jar. The at least two ranging sensors are installed on the reaction chamber cover module and located below it. At least two holes are provided above the bell jar, and the at least two distance sensors measure multiple distances of the base in the vertical direction through the at least two holes; The at least two ranging sensors are infrared sensors.

4. A method for monitoring the level of a base, characterized in that, The method is applied to the process chamber of claim 1, the process chamber comprising a base, a bell jar, at least two ranging sensors, and a control device, the method comprising: During the process of the base rotating at least one revolution, the distances from the at least two ranging sensors to the base in the vertical direction are measured, and the multiple distances are sent to the control device; Based on the multiple distances, determine whether the base is level.

5. A control device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the computer program, it implements the steps of the base level monitoring method as described in claim 4 above.

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