A precise light splitting device and laser

Abstract

The application relates to the technical field of light path transmission, in particular to a precise light splitting device, which comprises a sealed cavity, an adjusting mechanism, a one-way shaft joint and a mounting assembly for mounting a light splitting mirror; the sealed cavity is in the shape of a cuboid, three sides of the sealed cavity are respectively provided with an entrance, an exit and a light splitting port, the exit and the light splitting port are both provided with the one-way shaft joint, wherein the one-way shaft joint mounted at the entrance and the one-way shaft joint mounted at the exit are located on the same central axis; the light splitting mirror is circular, a coordinate system is established, X and Y axes are established according to the radial direction of the light splitting mirror, and Z axis is established according to the axial direction of the light splitting mirror; the mounting assembly and the adjusting mechanism are arranged in the sealed cavity, the adjusting mechanism is used for connecting the light splitting mirror and can be used for precisely adjusting multiple degrees of freedom of the light splitting mirror outside the sealed cavity; the precise light splitting device can realize high-precision adjustment of multiple degrees of freedom of the light splitting mirror outside the sealed pipeline, improves the alignment precision of the light path and reduces the adjustment difficulty of the light path.

Description

Technical Field

[0001] This invention relates to the field of optical transmission technology, and more specifically, to a precision beam splitting device and a laser. Background Technology

[0002] With the increasing application of laser processing technology in the semiconductor manufacturing industry, higher requirements are placed on the cleanliness and stability of the laser optical transmission system. To meet the cleanliness requirements, the entire optical system is sealed and inflated to provide overpressure protection.

[0003] Because lasers are expensive, it is sometimes necessary to split the beam to meet energy requirements, allowing several processing or measurement systems to share the same light source. Beam splitting is achieved through a beam splitting device, with the adjustment mechanism located inside a sealed conduit, which complicates optical path adjustment. Summary of the Invention

[0004] The purpose of this invention is to provide a precision beam splitting device that enables high-precision adjustment of multiple degrees of freedom of the beam splitting lens outside the sealed pipeline, thereby improving the alignment accuracy of the optical path and reducing the difficulty of optical path adjustment.

[0005] Another objective of this invention is to provide a laser that enables high-precision adjustment of multiple degrees of freedom of the beam splitter outside the sealed conduit, thereby improving the alignment accuracy of the optical path and reducing the difficulty of optical path adjustment.

[0006] The technical solution of this invention is implemented as follows:

[0007] A precision beam splitter includes a sealed cavity, an adjustment mechanism, a one-way joint, and a mounting assembly for mounting a beam splitter.

[0008] The sealed cavity is rectangular, and the three sides of the sealed cavity are respectively provided with a light inlet, a light outlet, and a light splitter. The light outlet and the light splitter are both equipped with the one-way shaft joint, wherein the one-way shaft joint installed at the light inlet and the one-way shaft joint installed at the light outlet are on the same central axis.

[0009] The beam splitter is circular. A coordinate system is established, and the X-axis and Y-axis are established according to the radial direction of the beam splitter, and the Z-axis is established according to the axial direction of the beam splitter.

[0010] The mounting assembly and the adjustment mechanism are disposed within the sealed cavity. The adjustment mechanism is used to connect the beam splitter and can precisely adjust multiple degrees of freedom of the beam splitter outside the sealed cavity.

[0011] Furthermore, the mounting assembly includes a support assembly, a spring plate assembly, and a fixing base assembly arranged sequentially from top to bottom;

[0012] The support assembly includes a beam splitter bracket. A radial limiting plate and a radial clamping seat are provided on the top of the beam splitter bracket. The radial limiting plate is arc-shaped, and its inner diameter is equal to the outer diameter of the beam splitter. The radial clamping seat and the radial limiting plate are arranged opposite to each other and are used to place the beam splitter between them. The radial limiting plate and the radial clamping seat cooperate to radially limit the beam splitter. A corresponding eaves plate is provided on the top of the radial limiting plate. The eaves plate limits the axial movement of the beam splitter. A clamping bolt is provided on the radial clamping seat. By tightening the clamping bolt, it can be pressed against the outer wall of the beam splitter.

[0013] The spring plate assembly includes a spring plate, a first clamping block is provided on the top of the spring plate, and a first slot for placing the first clamping block is provided on the bottom of the beam splitter bracket. A threaded hole is provided on the top of the spring plate, and a ball-head set screw is installed in the threaded hole by thread. The ball head part of the ball-head set screw supports the beam splitter bracket.

[0014] The mounting bracket assembly includes a mounting bracket, a second clamping block is provided at the bottom of the spring plate, a second slot for placing the second clamping block is provided at the top of the mounting bracket, and the mounting bracket is connected to the beam splitter bracket by a plurality of tension springs.

[0015] The sealed cavity is provided with a fixed mounting plate, which is perpendicular to the Z-axis. The mounting plate has a third slot for mounting the mounting assembly. The support assembly is located on the top of the mounting plate, and the support assembly and the fixed base assembly are engaged in the third slot.

[0016] Furthermore, at least two first positioning pins are provided on the first clamping block along the Z direction, and at least two first pin holes corresponding to the first positioning pins are provided on the top of the fixed base.

[0017] The second clamping block is provided with at least two second positioning pins along the Z direction, and the bottom of the beam splitter bracket is provided with at least two second pin holes corresponding to the second positioning pins.

[0018] Furthermore, the adjustment mechanism includes a first adjustment component and a second adjustment component;

[0019] The first adjustment component is configured in two sets, which are used to adjust the Ry and Rx of the beam splitter respectively, where Rx is the rotation direction around the X-axis and Ry is the rotation direction around the Y-axis.

[0020] The second adjustment component is disposed on the support component and is used to adjust the Z-axis of the beam splitter.

[0021] Furthermore, the first adjusting component is a wedge block mechanism, which includes an adjusting screw, a wedge block, a wedge block seat, and a top rod;

[0022] A wedge block seat is fixed to the bottom of the fixed seat. A slide rail is opened inside the wedge block seat. The wedge block is slidably installed in the slide rail. The push rod passes through along the Z-axis and is slidably installed in the mounting assembly. One end of the push rod abuts against the bottom surface of the beam splitter bracket, and the other end abuts against the inclined surface of the wedge block. A threaded hole for connecting the adjusting screw is opened inside the wedge block. One end of the adjusting screw is threadedly connected to the threaded hole in the wedge block, and the other end passes through one side of the sealing cavity and extends to the outside of the sealing cavity.

[0023] The tops of the two push rods in the two wedge block mechanisms and the ball head portion of the ball head setter form three fulcrums to jointly support the beam splitter bracket. The three fulcrums are distributed in a right-angled triangle. The line connecting one of the fulcrums where the push rod is located and the fulcrum where the ball head setter is located is parallel to the X-axis, and the line connecting the fulcrum where the push rod is located and the fulcrum where the ball head setter is located is parallel to the Y-axis.

[0024] Furthermore, the second adjustment component includes a plurality of ball-head positioning screws evenly arranged on the eaves and a plurality of ball-head spring screws evenly arranged on the beam splitter bracket. Both the ball-head spring screws and the ball-head positioning screws are arranged along the Z-axis, with one end of the ball-head positioning screw abutting against the top of the beam splitter and the other end located at the top of the eaves. The ball-head spring screws are correspondingly arranged with the beam splitter. The Z-axis of the beam splitter can be adjusted by turning the ball-head spring screws, and the Z-axis of the beam splitter can be positioned by the ball-head positioning screws.

[0025] Furthermore, a locking nut is provided on the portion of the adjusting screw located outside the sealing cavity, and a first sealing ring is provided at the connection between the adjusting screw and the sealing cavity.

[0026] Furthermore, each of the three one-way shaft joints is sequentially provided with a pressure ring and a second sealing ring at the connection between it and the sealing cavity.

[0027] Furthermore, a maintenance window is provided on one side of the sealed cavity, and the maintenance window is equipped with a movable cover.

[0028] Another object of this application is to provide a laser that includes the aforementioned precision beam splitting device.

[0029] Compared with the prior art, the beneficial effects of the present invention are:

[0030] This application provides an installation component adjustment mechanism within the sealed cavity. This mechanism connects to the beam splitter and enables precise adjustment of multiple degrees of freedom of the beam splitter from outside the sealed cavity. It allows for high-precision adjustment of multiple degrees of freedom of the beam splitter from outside the sealed conduit, improving the alignment accuracy of the optical path and reducing the difficulty of optical path adjustment. Attached Figure Description

[0031] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is a schematic diagram of the overall structure of the precision beam splitting device of the present invention;

[0033] Figure 2 This is a schematic diagram of the structure of the precision beam splitting device of the present invention after a portion has been cut open;

[0034] Figure 3 This is a schematic diagram of the sealing cavity structure of the present invention;

[0035] Figure 4 This is a schematic diagram of the structure between the wedge block structure and the mounting components of the present invention;

[0036] Figure 5 This is a schematic diagram of the structure of the mounting component of the present invention after the beam splitter is installed;

[0037] Figure 6 This is a schematic diagram of the beam splitter of the present invention mounted on the support assembly;

[0038] Figure 7 For the present invention Figure 6 Another perspective structural diagram;

[0039] Figure 8 This is an assembly diagram of the spring plate assembly of the present invention;

[0040] Figure 9 This is an assembly diagram of the fixing base assembly of the present invention;

[0041] Figure 10 For the present invention Figure 9 Another perspective of the assembly drawing;

[0042] Figure 11 This is a schematic diagram of the one-way shaft joint structure of the present invention;

[0043] Figure 12 This is a diagram showing the position distribution of the two push rods and the ball head push screw (three fulcrums) of this invention.

[0044] In the diagram: (Explanation of reference numerals)

[0045] 1-Sealed cavity; 101-First sealing ring; 102-Support plate; 103-End cap 205 plate; 104-Modible cover plate; 105-Third sealing ring; 106-Light inlet; 107-Light outlet; 108-Light splitter; 109-Mounting plate; 110-Fourth sealing ring;

[0046] 2-Adjusting mechanism; 201-Adjusting screw; 202-Wedge block; 203-Wedge block seat; 204-Push rod; 205-End cap; 206-Locking nut;

[0047] 3-Mounting component; 310-Supporting component; 311-Radial limiting plate; 312-Beam splitter bracket; 313-Ball head positioning screw; 314-Eaves plate; 315-Radial clamping seat; 3150-Clamping bolt; 3151-Connecting plate; 3152-Standing block; 316-Ball head spring screw; 317-Contact block; 318-First spring hanging rod; 319-First slot;

[0048] 320 - Spring plate assembly; 321 - Spring plate; 322 - First clamping block; 323 - First locating pin; 324 - Second clamping block; 325 - Second locating pin;

[0049] 330 - Fixing base assembly; 331 - Fixing base; 332 - Ball head set screw; 333 - Tension spring; 334 - Second spring rod; 335 - Second slot;

[0050] 4-One-way joint; 401-One-way joint body; 402-Second sealing ring; 403-Pressure ring; 404-Transmission pipeline;

[0051] 5- Beam splitter; 6- Laser. Detailed Implementation

[0052] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0053] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0054] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0055] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0056] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0057] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0058] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0059] Example 1

[0060] like Figures 1-12As shown, this embodiment provides a precision beam splitter, including a sealed cavity 1, an adjustment mechanism 2, a one-way joint 4, and a mounting assembly 3 for mounting a beam splitter 5. The sealed cavity 1 is rectangular in shape, with a sealed cavity inside. The sealed cavity 1 has six sides, three of which are respectively provided with an inlet 106, an outlet 107, and a beam splitter 108 communicating with their inner cavities. The inlet 106, outlet 107, and beam splitter 108 are preferably designed as circular openings. The one-way joint 4 is installed on both the outlet 107 and the beam splitter 108. The one-way joint 4 installed on the inlet 106 and the outlet 107 are on the same central axis, that is, the inlet 106 and the outlet 107 are coaxially arranged to facilitate the linear transmission of laser light. For easy distinction, the one-way shaft joint 4 installed at the light inlet 106 is named the light inlet one-way shaft joint 4, the one-way shaft joint 4 installed at the light outlet 107 is named the light outlet one-way shaft joint 4, and the one-way shaft joint 4 installed at the light splitter 108 is named the light outlet one-way shaft joint 4.

[0061] An end cap 205 plate 103 is provided on one side of the light outlet 107 of the sealed cavity 1. The end cap 205 plate 103 is connected to the sealed cavity 1 by screws and positioned by pins. The seal is achieved by filling the gap with sealant or by providing a fourth sealing ring 110. Support plates 102 are provided on both sides of the bottom of the sealed cavity 1. The support plates 102 are provided with several threaded holes for installing screws to connect with other components.

[0062] The beam splitter 5 is a circular cylinder with a certain thickness, and its reflective surface is coated. When the beam splitter 5 is initially installed in the mounting assembly 3 and has not been adjusted, a coordinate system is established based on the shape of the beam splitter 5. Specifically, the X and Y axes are established based on the radial direction of the beam splitter 5, and the Z axis is established based on the axial direction of the beam splitter 5, such as... Figure 2 As shown.

[0063] The following is a detailed description of the structure of each mechanism in the precision spectrometer:

[0064] The mounting assembly 3 includes, from top to bottom, a support assembly 310, a spring plate assembly 320, and a fixing base assembly 330 (here, "from top to bottom" refers to their relative positions in the Z-axis). The support assembly 310 includes a beam splitter bracket 312. Since the beam splitter 5 is circular, the beam splitter bracket 312 is used to support the beam splitter 5. The beam splitter bracket 312 is designed as a ring-shaped plate structure. Note that the coordinate system established above can also be understood as being established based on the radial and axial directions of the ring-shaped beam splitter bracket 312.

[0065] The top of the beam splitter support 312 is provided with a radial limiting plate 311 and a radial clamping seat 315 (the radial direction is named after the radial direction of the beam splitter 5). The radial limiting plate 311 is arc-shaped, and its inner diameter is equal to or slightly larger than the outer diameter of the beam splitter 5. The radial clamping seat 315 and the radial limiting plate 311 are arranged opposite to each other and are used to place the beam splitter 5 between them. Specifically, the radial limiting plate 311 is fixedly connected to the beam splitter support 312 (welded, bonded, bolted, or integrally formed). The shape of the radial clamping seat 315 is as follows: Figure 6 As shown, the radial clamping seat 315 includes a connecting plate 3151 and a stand block 3152. The stand block 3152 is disposed in the middle of the connecting plate 3151. The two sides of the connecting plate 3151 are connected to the beam splitter bracket 312 by bolts. Bolt holes are opened on the stand block 3152 along the radial direction of the beam splitter 5, and clamping bolts 3150 are installed. By tightening the clamping bolts 3150, they can be pressed against the outer wall of the beam splitter 5. The radial limiting plate 311 and the radial clamping seat 315 cooperate to radially limit the beam splitter 5. The top of the radial limiting plate 311 is correspondingly provided with an eaves plate 314 (e.g., Figure 5 or Figure 6 The eaves plate 314 is disposed inside the radial limiting plate 311, and the eaves plate 314 and the radial limiting plate 311 are integral structures. The eaves plate 314 does not contact the beam splitter 5, and when the beam splitter 5 is adjusted in the Z direction, the eaves plate 314 can limit the axial movement (height) of the beam splitter 5.

[0066] The spring plate assembly 320 includes a spring plate 321, such as Figure 8 As shown, the spring plate 321 is preferably designed as an annular plate structure. A first clamping block 322 is provided on the top of the spring plate 321, and a first slot 319 for placing the first clamping block 322 is correspondingly provided on the bottom of the beam splitter bracket 312. During actual assembly, the first clamping block 322 is placed in the first slot 319, which radially limits the movement of the first clamping block 322. At least two first positioning pins 323 are provided along the Z-direction on the first clamping block 322, and at least two first pin holes corresponding to the first positioning pins 323 are provided on the top of the fixing base 331. Preferably, both the number of first positioning pins 323 and the number of first pin holes are two. After the first clamping block 322 is placed in the first slot 319, radial positioning of the spring plate 321 and the beam splitter bracket 312 is achieved, but the spring plate 321 and the beam splitter bracket 312 are not fixedly connected.

[0067] The top of the spring plate 321 is provided with a threaded hole, and a ball-headed set screw 332 is threadedly installed in the threaded hole. The threaded portion of the ball-headed set screw 332 is threadedly connected to the threaded hole, and the ball-head portion of the ball-headed set screw 332 supports the beam splitter bracket 312. It should be noted that the ball-headed set screw 332 in this application can also be replaced with a ball or a hemisphere. During installation, it can be fixed to the top of the spring plate 321 so that its spherical surface contacts the bottom surface of the beam splitter bracket 312, achieving the same technical effect as the ball-headed set screw 332. Therefore, the use of a ball or a hemisphere is also within the scope of protection of this application. The advantage of using the ball-headed set screw 332 in this application is that its threaded connection with the spring plate 321 makes installation and disassembly more convenient.

[0068] The mounting bracket assembly 330 includes a mounting bracket 331, such as Figures 9-10 As shown, the fixed base 331 is preferably designed as an annular body. The bottom of the spring plate 321 is provided with a second pressing block 324, and the top of the fixed base 331 is provided with a second slot 335 for placing the second pressing block 324. When the spring plate 321 and the fixed base 331 are actually assembled, the second pressing block 324 is placed in the second slot 335. The second slot 335 can radially limit the second pressing block 324. At least two second positioning pins 325 are provided on the second pressing block 324 along the Z direction, and the bottom of the beam splitter bracket 312 is provided with at least two second pin holes corresponding to the second positioning pins 325. The number of the second positioning pins 325 and the number of the second pin holes are preferably designed to be two. After the second clamping block 324 is placed in the second slot 335, the spring plate 321 and the fixed base 331 are radially positioned and installed. The spring plate 321 and the fixed base 331 are not fixedly connected. In the Z-direction, by inserting the two first positioning pins 323 into the two first pin holes respectively, the spring plate 321 and the fixed base 331 can move relative to each other along the first positioning pins 323. By inserting the two second positioning pins 325 into the two second pin holes respectively, the spring plate 321 and the beam splitter bracket 312 can move relative to each other along the second positioning pins 325 in the Z-direction. The fixed base 331 and the beam splitter bracket 312 are connected by a number of tension springs 333. Preferably, a number of first spring hanging rods 318 are provided on the beam splitter bracket 312, and a number of second spring hanging rods 334 are provided on the fixed base 331. The number of first spring hanging rods 318, second spring hanging rods 334 and tension springs 333 are the same and are arranged one-to-one. At the same time, a first through hole for placing tension springs 333 is provided between the beam splitter bracket 312, the spring plate 321 and the fixed base 331. The first through hole is arranged one-to-one with tension springs 333. The tension springs 333 are located in the first through hole. One end of the tension spring 333 is hung on the first spring hanging rod 318 and the other end is hung on the second spring hanging rod 334.

[0069] like Figure 4 As shown, a fixed mounting plate 109 is provided inside the sealed cavity 1. The mounting plate 109 is perpendicular to the Z-axis. A third slot for mounting the mounting assembly 3 is opened inside the mounting plate 109. The support assembly 310 is located on the top of the mounting plate 109. The support assembly 310 and the fixed seat assembly 330 are snapped into the third slot.

[0070] The adjustment mechanism 2 includes a first adjustment component and a second adjustment component. The first adjustment component is configured in two sets, respectively used to adjust the Ry and Rx of the beam splitter 5, where Rx is the rotation direction around the X-axis and Ry is the rotation direction around the Y-axis. The second adjustment component is disposed on the support component 310 and is used to adjust the Z-axis of the beam splitter 5.

[0071] Specifically, the first adjustment component is a wedge block mechanism, which includes an adjustment screw 201, a wedge block 202, a wedge block seat 203, and a push rod 204. The wedge block seat 203 is fixed to the bottom of the fixed base 331, and a slide rail is formed inside the wedge block seat 203. The wedge block 202 is slidably installed in the slide rail. The push rod 204 passes through the Z-axis and is slidably installed in the mounting component 3. One end of the push rod 204 abuts against the bottom surface of the beam splitter bracket 312, and the other end abuts against the inclined surface of the wedge block 202. The sealing cavity 1 has a threaded hole for connecting the adjusting screw 201. One end of the adjusting screw 201 is threadedly connected to the threaded hole in the wedge block 202, and the other end passes through one side of the sealing cavity 1 and extends to the outside of the sealing cavity 1. The side of the sealing cavity 1 has a second through hole for the adjusting screw 201 to pass through and to provide support for the adjusting screw 201. Specifically, a third through hole for mounting the push rod 204 is provided along the Z direction between the spring plate 321 and the fixing seat 331 in the mounting assembly 3. Two third through holes are provided, and two push rods 204 are inserted into each of them. Preferably, the push rod 204 is slidably connected to the third through hole, and the third through hole can radially limit the push rod 204.

[0072] The tops of the two push rods 204 in the two wedge-shaped block mechanisms, together with the ball-head portion of the ball-head setter 332, form three fulcrums to jointly support the beam splitter bracket 312. These three fulcrums are arranged in a right-angled triangle. For ease of distinction, the two push rods 204 are named 204a and 204b respectively. The line connecting the fulcrum of one push rod 204a to the fulcrum of the ball-head setter 332 is parallel to the X-axis, and the line connecting the fulcrum of the other push rod 204b to the fulcrum of the ball-head setter 332 is parallel to the Y-axis. Figure 12 As shown.

[0073] Note that: multiple contact blocks 317 are provided at the bottom of the beam splitter bracket 312. Preferably, three contact blocks 317 are designed, and the tops of the two push rods 204 and the ball head of the ball head screw 332 respectively contact the beam splitter bracket 312 through one contact block 317.

[0074] One set of wedge block mechanisms is used to adjust Ry of beam splitter 5. When adjusting Ry of beam splitter 5 using this set of wedge block mechanisms, such as... Figure 4 As shown, by turning the adjusting screw 201, the wedge block 202 moves laterally along the slide along the adjusting screw 201. The push rod 204a is gradually lifted along the inclined surface of the wedge block seat 203. During the lifting of the push rod 204a, the beam splitter support 312 is lifted, and at the same time, the beam splitter support 312 rotates and swings around the Y-axis around the other two fulcrums (i.e., the ball-head setter 332 and the other push rod 204b), thereby adjusting the Ry of the beam splitter 5. Similarly, when adjusting Rx using another set of wedge block mechanisms (which has the same structure as the first set of wedge block mechanisms, and will not be described in detail, nor shown in the attached figure), the push rod 204b is similarly lifted, and at the same time, the beam splitter support 312 rotates and swings around the other two fulcrums (i.e., the ball-head setter 332 and the push rod 204a), thereby adjusting the Rx of the beam splitter 5 (specifically as shown in the attached figure). Figure 12 As shown in the diagram, the locations of the three support points are distributed as follows.

[0075] The second adjustment component includes a plurality of ball-head positioning screws 313 evenly arranged on the eaves 314 and a plurality of ball-head spring screws 316 evenly arranged on the beam splitter bracket 312. The ball-head spring screws 316 and the ball-head positioning screws 313 are both arranged along the Z-axis. One end of the ball-head positioning screw 313 abuts against the top of the beam splitter 5 and the other end is located on the top of the eaves 314. The ball-head spring screws 316 are correspondingly arranged with the beam splitter 5. The Z-axis of the beam splitter 5 can be adjusted by turning the ball-head spring screws 316, and the Z-axis of the beam splitter 5 can be positioned by the ball-head positioning screws 313.

[0076] The second adjustment component is used for Z-axis adjustment of the beam splitter 5 when it is first installed. During installation, the beam splitter 5 is first inserted radially into the inner side of the radial limiting plate 311. The radial limiting plate 311 initially limits the radial positioning of the beam splitter 5, ensuring the bottom surface of the beam splitter 5 is in contact with the top surface of the beam splitter bracket 312. Then, the radial clamping seat 315 is installed on the top of the beam splitter bracket 312 using bolts. Next, the clamping bolt 3150 (preferably a ball-head spring screw) on the radial clamping seat 315 is tightened. At this point, the clamping bolt 3150 should not contact the outer wall of the beam splitter 5, allowing the beam splitter 5 to have a certain degree of looseness. If further adjustment of the beam splitter is needed... 5. When adjusting the axis, first tighten the ball head spring screw 316 to a certain extent and beyond the top surface of the beam splitter bracket 312. Continue to tighten it to lift the beam splitter 5 until it is lifted to the appropriate height. Then tighten the ball head positioning screw 313 to press it against the top surface of the beam splitter 5. The ball head spring screw 316 and the ball head positioning screw 313 are used to position the beam splitter 5 in the Z direction. After the Z direction height of the beam splitter 5 is adjusted, the clamping bolt 3150 on the radial clamping seat 315 can be tightened to press it against the outer wall of the beam splitter 5. The radial positioning of the beam splitter 5 is achieved through the radial limiting plate 311 and the radial clamping seat 315.

[0077] It should be noted that the wedge block mechanism also includes a locking nut 206 and an end cap 205, such as Figure 4 As shown, the locking nut 206 is located on the adjusting screw 201 and outside the sealing cavity 1. The connection between the adjusting screw 201 and the sealing cavity 1 is provided with an end cap 205 and a first sealing ring 101. The adjusting screw 201 passes through the middle hole in the end cap 205 and the first sealing ring 101. After the adjusting screw 201 is adjusted, the locking nut 206 is screwed on to lock it. The first sealing ring 101 is a lip seal.

[0078] like Figure 11 As shown, the one-way joint 4 comprises a one-way joint body 401, a second sealing ring 402, a pressure ring 403, and a transmission pipeline 404. The transmission pipeline 404 can slide within the one-way joint body 401 to compensate for errors in the length direction and facilitate assembly. The pressure ring 403 presses the second sealing ring 402 against the one-way joint body 401 to keep the transmission pipeline 404 sealed to the one-way joint body 401.

[0079] A maintenance window is provided on one side of the sealed cavity 1. The maintenance window is equipped with a movable cover plate 104 and serves as a maintenance and assembly window. A third sealing ring 105 is provided between the movable cover plate 104 and the sealed cavity. The third sealing ring 105 seals the movable cover plate 104 and the maintenance window. The movable cover plate 104 and the sealed cavity 1 are connected by screws.

[0080] In this example, Rx and Ry adjust the resolution:

[0081] The pitch P of the adjusting screw 201 is designed to be 0.5mm, and the slope ratio of the wedge block 202 is 1.5:12, or 1:8.

[0082] The distance R from the ball head to the center of the optical axis is 12mm, and the distribution diameter D of the push rod 204 is 24mm. The resolution adjustment is calculated as follows:

[0083] The linear resolution achievable per degree by adjusting the set screw is:

[0084]

[0085] Each adjustment of 5° results in the following lateral feed:

[0086] r2 = r1 × 5° = 7μm

[0087] The height of beam splitter 5 after downscaling by wedge block 202 is:

[0088]

[0089] The achievable rotation resolution is:

[0090]

[0091] The beneficial effects of the technical solution of the present invention are:

[0092] After the beam splitter 5 is installed, the Z-axis position of the beam splitter 5 is adjusted by adjusting the ball head spring screw 316 and the ball head positioning screw 313. Two sets of first adjustment components are set to adjust the Rx or Ry of the beam splitter 5. The laser 6 enters through the light inlet 106. Part of the laser beam 6 is directly incident and exits from the light outlet 107, while the other part passes through the beam splitter 5 and exits from the beam splitting port 108. When the beam reflected by the beam splitter 5 does not exit accurately from the beam splitting port 108, it is necessary to adjust the two sets of first adjustment components to adjust the Rx and / or Ry of the beam splitter 5. By turning the adjusting screw 201 outside the sealed cavity 1, the wedge block 202 slides and drives the top rod 204 to move up and down, thereby adjusting the Rx and / or Ry of the beam splitter 5. When the top rod descends, the support assembly 310 and the beam splitter 5 descend accordingly under the tension of the tension spring 333. The adjustment accuracy of the adjusting mechanism 2 is improved by adjusting the threaded connection between the adjusting screw 201 and the wedge block 202 and the slope ratio of the wedge block 202. The sealing performance of the sealed cavity 1 is ensured by the first sealing ring 101, the second sealing ring, etc. This mechanism is mainly used in sealed pipelines, realizing high-precision position adjustment of the beam splitter 5 in sealed pipelines and reducing the difficulty of optical path adjustment.

[0093] Example 2

[0094] This embodiment provides a precision beam splitter. The difference between this embodiment and Embodiment 1 is that the first adjustment component in this embodiment is a cam mechanism. The cam structure includes a motor, a cam, and a push rod 204. The position of the push rod 204 remains unchanged. The top end of the push rod 204 supports the beam splitter bracket 312, and the bottom end contacts the outer wall of the cam. The output shaft of the motor is connected to the cam, driving the cam to rotate. During the rotation of the cam, the distance between the outer wall of the cam and the motor output shaft varies, allowing the push rod 204 to move up and down, thereby adjusting the Rx and Ry of the beam splitter 5. This embodiment can also include a control system electrically connected to the motor for remote automatic adjustment.

[0095] Example 3

[0096] This embodiment provides a precision beam splitter. The difference between this embodiment and Embodiment 1 is that the first adjustment component in this embodiment is a gear and rack mechanism. The gear and rack mechanism includes a motor, gears, a rack, and a push rod 204. The output shaft of the motor is fitted with a gear, which meshes with the rack. The rack is positioned along the Z-axis. The position of the push rod 204 remains unchanged. The top end of the push rod 204 supports the beam splitter bracket 312, and the bottom end is fixed or abuts against the top of the rack. The length directions of the push rod 204 and the rack are consistent. When the top of the rack is fixed to the push rod 204, the motor drives the gear to rotate and the rack to rise and fall, thereby moving the push rod 204 up and down, thus adjusting the Rx and Ry of the beam splitter 5. When the top of the rack abuts against the push rod 204, the motor drives the gear to rotate and the rack to rise, thereby lifting the push rod 204, thus adjusting the Rx and Ry of the beam splitter 5. When the rack descends, under the tension of the tension spring 333, the support component 310 and the beam splitter 5 descend accordingly. This embodiment can also include a control system, which is electrically connected to the motor for controlling it and achieving remote automatic adjustment.

[0097] Example 4

[0098] This embodiment provides a laser, including the precision beam splitting device described in any one of embodiments 1-3.

[0099] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

[0100] Furthermore, those skilled in the art will understand that although some embodiments herein include certain features included in other embodiments but not others, combinations of features from different embodiments are meant to be within the scope of the invention and form different embodiments. For example, in the foregoing claims, any of the claimed embodiments can be used in any combination. The information disclosed in this background section is intended only to enhance the understanding of the general background of the invention and should not be construed as an admission or in any way implying that such information constitutes prior art known to those skilled in the art.

[0101] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

[0102] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A precision spectrophotometer, characterized in that, The device includes a sealed cavity, an adjustment mechanism, a one-way joint, and a mounting assembly for mounting a beam splitter. The sealed cavity is rectangular and has an inlet, an outlet, and a beam splitter on its three sides. The one-way joint is mounted on both the outlet and the beam splitter. The one-way joint mounted on the inlet and the one-way joint mounted on the outlet are on the same central axis. The beam splitter is circular. A coordinate system is established, and the X-axis and Y-axis are established according to the radial direction of the beam splitter, and the Z-axis is established according to the axial direction of the beam splitter. The mounting assembly and the adjustment mechanism are disposed within the sealed cavity. The adjustment mechanism is used to connect the beam splitter and can precisely adjust multiple degrees of freedom of the beam splitter outside the sealed cavity. The mounting assembly includes a support assembly, a spring plate assembly, and a fixing base assembly arranged sequentially from top to bottom. The support assembly includes a beam splitter bracket, with a radial limiting plate and a radial clamping seat at the top of the beam splitter bracket. The radial limiting plate is arc-shaped, and its inner diameter is equal to the outer diameter of the beam splitter. The radial clamping seat and the radial limiting plate are arranged opposite to each other and are used to place the beam splitter between them. The radial limiting plate and the radial clamping seat cooperate to radially limit the beam splitter. A corresponding eaves plate is provided at the top of the radial limiting plate, which axially limits the beam splitter. A clamping bolt is provided on the radial clamping seat, and tightening the clamping bolt can make it press against the outer wall of the beam splitter. The spring plate assembly includes a spring plate, a first clamping block is provided on the top of the spring plate, and a first slot for placing the first clamping block is provided on the bottom of the beam splitter bracket. A threaded hole is provided on the top of the spring plate, and a ball-head set screw is installed in the threaded hole by thread. The ball head part of the ball-head set screw supports the beam splitter bracket. The adjustment mechanism includes a first adjustment component and a second adjustment component; the first adjustment component is configured in two sets, which are used to adjust the Ry and Rx of the beam splitter, respectively, where Rx is the rotation direction around the X-axis and Ry is the rotation direction around the Y-axis; the second adjustment component is disposed on the support component and is used to adjust the Z-axis of the beam splitter. The first adjustment component is a wedge block mechanism, which includes an adjustment screw, a wedge block, a wedge block seat, and a top rod; The wedge block seat is fixed to the bottom of the fixed base. A slide rail is opened inside the wedge block seat. The wedge block is slidably installed in the slide rail. The push rod passes through along the Z-axis and is slidably installed in the mounting assembly. One end of the push rod abuts against the bottom surface of the beam splitter bracket, and the other end abuts against the inclined surface of the wedge block. A threaded hole for connecting the adjusting screw is opened inside the wedge block. One end of the adjusting screw is threadedly connected to the threaded hole in the wedge block, and the other end passes through one side of the sealing cavity and extends to the outside of the sealing cavity. The tops of the two push rods in the two wedge block mechanisms and the ball head portion of the ball head setter form three fulcrums to jointly support the beam splitter bracket. The three fulcrums are distributed in a right-angled triangle. The line connecting one of the fulcrums where the push rod is located and the fulcrum where the ball head setter is located is parallel to the X-axis, and the line connecting the fulcrum where the push rod is located and the fulcrum where the ball head setter is located is parallel to the Y-axis.

2. The precision spectrophotometer according to claim 1, characterized in that, The mounting bracket assembly includes a mounting bracket, a second clamping block is provided at the bottom of the spring plate, a second slot for placing the second clamping block is provided at the top of the mounting bracket, and the mounting bracket is connected to the beam splitter bracket by a plurality of tension springs. The sealed cavity is provided with a fixed mounting plate, which is perpendicular to the Z-axis. The mounting plate has a third slot for mounting the mounting assembly. The support assembly is located on the top of the mounting plate, and the support assembly and the fixed base assembly are engaged in the third slot.

3. The precision spectrophotometer according to claim 2, characterized in that, At least two first positioning pins are provided along the Z direction on the first clamping block, and at least two first pin holes corresponding to the first positioning pins are provided on the top of the fixed base; The second clamping block is provided with at least two second positioning pins along the Z direction, and the bottom of the beam splitter bracket is provided with at least two second pin holes corresponding to the second positioning pins.

4. The precision spectrophotometer according to claim 1, characterized in that, The second adjustment component includes a plurality of ball-head positioning screws evenly arranged on the eaves and a plurality of ball-head spring screws evenly arranged on the beam splitter bracket. Both the ball-head spring screws and the ball-head positioning screws are arranged along the Z-axis. One end of the ball-head positioning screw abuts against the top of the beam splitter, and the other end is located on the top of the eaves. The ball-head spring screws are correspondingly arranged with the beam splitter. The Z-axis of the beam splitter can be adjusted by turning the ball-head spring screws, and the Z-axis of the beam splitter can be positioned by the ball-head positioning screws.

5. The precision spectrophotometer according to claim 1, characterized in that, A locking nut is provided on the portion of the adjusting screw located outside the sealing cavity, and a first sealing ring is provided at the connection between the adjusting screw and the sealing cavity.

6. The precision spectrophotometer according to claim 2, characterized in that, Each of the three one-way shaft joints is provided with a pressure ring and a second sealing ring at the connection between it and the sealing cavity.

7. The precision spectrophotometer according to claim 1, characterized in that, A maintenance window is provided on one side of the sealed cavity, and the maintenance window is equipped with a movable cover.

8. A laser, characterized in that, The precision spectrometer included in any one of claims 1-7.

Images