Non-contact sorting device and its photo-triggered structure and biological particle sorting equipment

Abstract

This invention discloses a non-contact sorting device, its phototriggered structure, and a biological particle sorting apparatus. The phototriggered structure includes a first substrate, a first electrode layer formed on the first substrate, a photodiode layer formed on the first electrode layer, and an insulating layer covering the photodiode layer. The photodiode layer has a thickness between 1 micrometer and 3 micrometers and includes a first doped layer, a type I layer, and a second doped layer sequentially stacked from the first electrode layer. The second doped layer includes a plurality of trigger pads spaced apart from each other, each trigger pad having a width between 3 micrometers and 7 micrometers, and a distance of no more than 2 micrometers between any two adjacent trigger pads. Accordingly, the photodiode layer has a specific structural design that enables it to generate a relatively concentrated electric field through photoelectric coupling, thereby accurately moving the target biological particles to any region.

Description

Technical Field

[0001] This invention relates to a sorting device, and more particularly to a non-contact sorting device, its photo-triggered structure, and a biological particle sorting equipment. Background Technology

[0002] Existing microbial sorting devices can drive target microbial particles to move by applying an electric field. However, how to make the target microbial particles move more accurately along a predetermined route without contacting them is the direction in which existing microbial sorting devices need further improvement and refinement.

[0003] Therefore, the inventor believed that the above-mentioned defects could be improved, and thus devoted himself to research and applied scientific principles, and finally proposed an invention that is reasonably designed and effectively improves the above-mentioned defects. Summary of the Invention

[0004] The present invention provides a non-contact sorting device, its light-triggered structure, and a biological particle sorting device to address the potential defects of existing biological particle sorting devices.

[0005] To solve the above-mentioned technical problems, this invention discloses a biological particle sorting device for sorting a target biological particle from a liquid sample. The biological particle sorting device includes: a non-contact sorting device and an AC power supply device.

[0006] The non-contact sorting device includes: a phototriggered structure, the phototriggered structure comprising: a first substrate; a first electrode layer formed on the first substrate; a photodiode layer formed on the first electrode layer, wherein the thickness of the photodiode layer is between 1 micrometer (μm) and 3 micrometers; wherein the photodiode layer comprises: a first doped layer formed on the first electrode layer; an I-type layer formed on the first doped layer; and a second doped layer comprising a plurality of trigger pads formed on the I-type layer and spaced apart from each other; wherein each trigger pad has a width between 3 micrometers and 7 micrometers, and any two adjacent trigger pads have a distance of no more than 2 micrometers; and an insulating layer covering the photodiode layer;

[0007] A mating structure is provided at intervals from a light-triggered structure, and at least one of them is transparent. The mating structure includes a second substrate and a second electrode layer formed on the second substrate, with the second electrode layer facing the light-triggered structure.

[0008] The AC power supply device is electrically coupled to the first electrode layer and the second electrode layer;

[0009] When the liquid sample is located between the insulating layer and the second electrode layer of the non-contact sorting device, the non-contact sorting device is used to allow a light source to irradiate at least one trigger pad so that the non-contact sorting device generates a concentrated and non-uniform electric field at the liquid sample, and applies a dielectric electrophoretic force to the target biological particles that can drive them to move.

[0010] Preferably, in the bioparticle sorting device described above, the photodiode layer further includes a plurality of transparent electrode pads formed on a plurality of trigger pads, and the width of each trigger pad is greater than the width of the corresponding transparent electrode pad.

[0011] Preferably, in the bioparticle sorting device described above, the thickness of each trigger pad is 3% to 10% of the thickness of the corresponding transparent electrode pad.

[0012] Preferably, in the bioparticle sorting device described above, the first doped layer covers at least 90% of the area of ​​the first electrode layer, and the type I layer covers the entire first doped layer.

[0013] Preferably, in the biological particle sorting device described above, the I-type layer is recessed with a patterned groove so that the I-type layer forms a plurality of protrusions arranged at intervals, and a plurality of trigger pads are respectively formed on the plurality of protrusions.

[0014] Preferably, in the bioparticle sorting device described above, the edge of each trigger pad is aligned with the edge of the corresponding boss, and the depth of the patterned groove is 1% to 5% of the thickness of the type I layer.

[0015] Preferably, in the bioparticle sorting device described above, the type I layer includes a plurality of type I pads spaced apart on the first doped layer, and a plurality of trigger pads are formed on the plurality of type I pads, wherein the width of each trigger pad is smaller than the width of the corresponding type I pad.

[0016] Preferably, in the bioparticle sorting device described above, the first doped layer includes a plurality of spacer pads spaced apart on the first electrode layer, and a plurality of I-type pads are formed on the plurality of spacer pads respectively, and the edge of each I-type pad is aligned with the edge of the corresponding spacer pad.

[0017] Preferably, in the bioparticle sorting device described above, the thickness of each trigger pad and the thickness of the first doped layer are 1% to 5% of the thickness of the type I layer, respectively, and the thickness of each trigger pad is less than the thickness of the first doped layer.

[0018] Preferably, in the microparticle sorting device described above, the non-contact sorting device further comprises:

[0019] An bonding layer connects the light-triggered structure and the mating structure, together defining an accommodating space, and the photodiode layer is correspondingly located within the accommodating space; and

[0020] Multiple partition walls are located within the accommodating space and connect the light triggering structure and the mating structure; wherein, the multiple partition walls are arranged in a row with intervals between each other, and a culture area is formed between any two adjacent partition walls, a first flow channel communicating with each culture area is formed on one side of the row of partition walls, and a second flow channel communicating with each culture area is formed on the other side of the row of partition walls.

[0021] When liquid sample is injected into the first channel, the non-contact sorting device can drive the target biological particles to a culture area by moving the light source and restrain them from moving to the second channel.

[0022] Preferably, in the bioparticle sorting device described above, a plurality of trigger pads are partially embedded within a plurality of compartment walls, each compartment wall comprising:

[0023] One partition section;

[0024] Two first guide sections are connected to one end of the partition section, and each first guide section forms a first angle between 110 degrees and 160 degrees with the partition section; and

[0025] Two second guide sections are connected to the other end of the partition section, and each of the second guide sections forms a second angle between 100 degrees and 160 degrees with the partition section;

[0026] In any two adjacent partition walls, two first guide segments that are adjacent to each other but belong to different partition walls jointly define a first opening, and two second guide segments that are adjacent to each other but belong to different partition walls jointly define a second opening, and the first opening is larger than the second opening.

[0027] Preferably, in the biological particle sorting device as described above, the first flow channel defines a first flow direction; among the two first guide sections defining any one first opening, the first guide section located upstream in the first flow direction has a shorter length than the other first guide section and is used to allow the liquid sample to contact it along the first flow direction at an acute angle between 70 degrees and 20 degrees.

[0028] Preferably, in the microparticle sorting device as described above, each culture region has a first opening connected to a first flow channel and a second opening connected to a second flow channel, and the first opening is larger than the second opening; within the accommodating space of the non-contact sorting device, the first flow channel can only be connected to the second flow channel through any one of the culture regions.

[0029] Preferably, in the biological particle sorting device as described above, at least one of any two adjacent partition walls is formed with a layout section located within the corresponding culture area to extend the path of the liquid sample from the first opening to the second opening.

[0030] This invention also discloses a non-contact sorting device for sorting a target biological particle from a liquid sample. The non-contact sorting device includes: a photo-triggered structure and a mating structure.

[0031] The light-triggered structure includes:

[0032] First substrate;

[0033] A first electrode layer is formed on a first substrate;

[0034] A photodiode layer is formed on a first electrode layer, and the thickness of the photodiode layer is between 1 micrometer and 3 micrometers; wherein the photodiode layer includes: a first doped layer formed on the first electrode layer; an I-type layer formed on the first doped layer; and a second doped layer including a plurality of trigger pads formed on the I-type layer and spaced apart from each other; wherein each trigger pad has a width between 3 micrometers and 7 micrometers, and there is a distance of no more than 2 micrometers between any two adjacent trigger pads; and an insulating layer covering the photodiode layer;

[0035] The mating structure and the photo-triggering structure are spaced apart and at least one of them is transparent. The mating structure includes a second substrate and a second electrode layer formed on the second substrate, with the second electrode layer facing the photo-triggering structure. The space between the insulating layer and the second electrode layer of the non-contact sorting device can be used to contain liquid samples for sorting operations corresponding to target biological particles.

[0036] Preferably, in the non-contact sorting device described above, the photodiode layer further includes a plurality of transparent electrode pads formed on a plurality of trigger pads, and the width of each trigger pad is greater than the width of the corresponding transparent electrode pad, and the thickness of each trigger pad is 3% to 10% of the thickness of the corresponding transparent electrode pad.

[0037] Preferably, in the non-contact sorting device described above, the thickness of each trigger pad is 1% to 5% of the thickness of the type I layer, and the thickness of each trigger pad is less than the thickness of the first doped layer.

[0038] Preferably, the non-contact sorting device as described above further comprises:

[0039] An bonding layer connects the light-triggered structure and the mating structure, together defining an accommodating space, and the photodiode layer is correspondingly located within the accommodating space; and

[0040] Multiple partition walls are located within the accommodating space and connect the light triggering structure and the mating structure; wherein, the multiple partition walls are arranged in a row with intervals between each other, and a culture area is formed between any two adjacent partition walls, a first flow channel communicating with each culture area is formed on one side of the row of partition walls, and a second flow channel communicating with each culture area is formed on the other side of the row of partition walls.

[0041] In the non-contact sorting device, the first channel can only be connected to the second channel through any one of the cultivation areas.

[0042] This invention also discloses a light-triggered structure for a non-contact sorting device, comprising:

[0043] First substrate;

[0044] A first electrode layer is formed on a first substrate;

[0045] A photodiode layer is formed on a first electrode layer, and the thickness of the photodiode layer is between 1 micrometer and 3 micrometers; wherein the photodiode layer includes: a first doped layer formed on the first electrode layer; and an I-type layer formed on the first doped layer, wherein the I-type layer is recessed to form a patterned trench, so that the I-type layer constitutes a plurality of protrusions arranged at intervals; wherein each protrusion has a width between 3 micrometers and 7 micrometers, and there is a distance of no more than 2 micrometers between any two adjacent protrusions;

[0046] An insulating layer covers the photodiode layer.

[0047] Preferably, in the light-triggered structure described above, the photodiode layer further includes a plurality of transparent electrode pads formed on a plurality of protrusions, and the width of each protrusion is greater than the width of the corresponding transparent electrode pad.

[0048] Compared with the prior art, the non-contact sorting device, its light-triggered structure, and the biological particle sorting equipment provided in this application have at least the following beneficial effects:

[0049] The non-contact sorting device, its phototriggered structure, and the biological particle sorting equipment disclosed in this invention employ a photodiode layer with a specific structural design (e.g., multiple trigger pads or multiple protrusions spaced apart by the distance and each having a predetermined width), which enables it to generate a relatively concentrated electric field (similar to the effect of tip discharge) through non-contact photoelectric coupling, thereby enabling it to accurately move (or capture) the target biological particles to any region. Attached Figure Description

[0050] Figure 1 This is a three-dimensional schematic diagram of the biological particle sorting device according to Embodiment 1 of the present invention.

[0051] Figure 2 for Figure 1 A three-dimensional cross-sectional diagram of a biological microparticle sorting device used for injecting liquid samples.

[0052] Figure 3 for Figure 1 A schematic cross-sectional view along section line III-III.

[0053] Figure 4 for Figure 3 An enlarged schematic diagram of region IV in the image.

[0054] Figure 5 for Figure 1 A cross-sectional view along section line VV.

[0055] Figure 6 This is a three-dimensional schematic diagram of another state of the biological particle sorting device according to Embodiment 1 of the present invention.

[0056] Figure 7 This is a partially enlarged schematic diagram of the biological particle sorting device according to Embodiment 2 of the present invention.

[0057] Figure 8 This is a partially enlarged schematic diagram of the biological particle sorting device according to Embodiment 3 of the present invention.

[0058] Figure 9 This is a three-dimensional schematic diagram of the biological particle sorting device according to Embodiment 4 of the present invention.

[0059] Figure 10 for Figure 9 A cross-sectional view along section line XX.

[0060] Figure 11 for Figure 9 A cross-sectional view along section line XI-XI.

[0061] Figure 12 for Figure 11A cross-sectional schematic diagram of a biological microparticle sorting device used for injecting liquid samples and culture media.

[0062] Figure 13 for Figure 12 A schematic diagram of the subsequent operation of the biological microparticle sorting equipment.

[0063] Figure 14 A cross-sectional schematic diagram of the biological particle sorting device of Embodiment 5 of the present invention.

[0064] Figure 15 A partially enlarged schematic diagram (I) of the biological particle sorting device of Embodiment Six of the present invention.

[0065] Figure 16 Partial enlarged schematic diagram (II) of the biological particle sorting device of Embodiment 6 of the present invention. Detailed Implementation

[0066] To make the technical problems, technical solutions, and advantages of this application clearer, a detailed description will be provided below in conjunction with the accompanying drawings and specific embodiments. In the following description, specific details such as particular configurations and components are provided merely to aid in a comprehensive understanding of the embodiments of this application. Therefore, those skilled in the art should understand that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of this application. Furthermore, for clarity and brevity, descriptions of known functions and structures have been omitted.

[0067] It should be understood that the phrase "one embodiment" or "an embodiment" throughout the specification means that a specific feature, structure, or characteristic related to the embodiment is included in at least one embodiment of this application. Therefore, "in one embodiment" or "in an embodiment" appearing throughout the specification does not necessarily refer to the same embodiment. Furthermore, these specific features, structures, or characteristics can be combined in any suitable manner in one or more embodiments.

[0068] In the various embodiments of this application, it should be understood that the sequence number of each process described below does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application.

[0069] It should be understood that the term "and / or" in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this article generally indicates that the preceding and following related objects have an "or" relationship.

[0070] In the embodiments provided in this application, it should be understood that "B corresponding to A" means that B is associated with A, and B can be determined based on A. However, it should also be understood that determining B based on A does not mean that B is determined solely based on A, but can also be determined based on A and / or other information.

[0071] It should be understood that although terms such as "first," "second," and "third" may be used in this document to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Example 1

[0072] Please see Figures 1 to 6 This is an embodiment of the present invention. Figure 1 and Figure 2 As shown, this embodiment discloses a biological particle sorting device 1000 for sorting a target biological particle 301 from a liquid sample 300. That is, any sorting device not used for biological particles is different from the biological particle sorting device 1000 described in this embodiment.

[0073] The liquid sample 300 may be a bodily fluid sample from an animal (e.g., blood, lymph, saliva, or urine), and the target biological microparticles 301 may be specific types of cells, such as circulating tumor cells (CTCs), fetal nucleated red blood cells (FNRBCs), viruses, or bacteria, but the present invention is not limited to the above. For example, in other embodiments of the present invention not illustrated, the liquid sample 300 may also be a liquid sample from a plant.

[0074] Furthermore, in this embodiment, the bioparticle sorting device 1000 includes a non-contact sorting device 100 and an AC power supply device 200 electrically coupled to the non-contact sorting device 100, but the present invention is not limited thereto. For example, in other embodiments of the present invention not illustrated, the non-contact sorting device 100 may also be used alone (e.g., for sale) or in conjunction with other devices. The specific structure of the non-contact sorting device 100 will be described first, and then its connection relationship with the AC power supply device 200 will be described as appropriate.

[0075] It should be noted that the non-contact sorting device 100 in this embodiment is chip-scale in size (e.g., the thickness of the non-contact sorting device 100 is no more than 100 micrometers), and the non-contact sorting device 100 is illustrated in the figures as a rectangular structure, but the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the non-contact sorting device 100 may also have a curved or irregular structure.

[0076] Furthermore, in this embodiment, the non-contact sorting device 100 includes a light-triggered structure 1, a mating structure 2 spaced apart from the light-triggered structure 1, and an adhesive layer 3 connecting the light-triggered structure 1 and the mating structure 2. For ease of explanation, the mating structure 2 is transparent in this embodiment; however, in practical applications, at least one of the mating structure 2 and the light-triggered structure 1 can be transparent to allow the non-contact sorting device 100 to operate normally.

[0077] like Figures 2 to 4 As shown, the light-triggered structure 1 includes a first substrate 11, a first electrode layer 12 formed on the first substrate 11, a photodiode layer 13 formed on the first electrode layer 12, and an insulating layer 14 covering the photodiode layer 13. The first electrode layer 12 may cover the entire surface of the first substrate 11, while the photodiode layer 13 is located between the first electrode layer 12 and the insulating layer 14 (that is, the photodiode layer 13 is embedded within the first electrode layer 12 and the insulating layer 14).

[0078] In this embodiment, the first substrate 11 is a glass plate, the first electrode layer 12 is a thin metal layer or an indium tin oxide (ITO) layer, the photodiode layer 13 is a PIN diode layer with a thickness T13 between 1 micrometer (μm) and 3 micrometers (e.g., approximately 1.5 micrometers), and the insulating layer 14 is a silicon nitride layer or a silicon oxide layer with a thickness T14 between 10 nanometers (nm) and 100 nanometers.

[0079] More specifically, the photodiode layer 13 may include a first doped layer 131 formed on the first electrode layer 12, an I-type layer 132 formed on the first doped layer 131, a second doped layer 133 formed on the I-type layer 132, and a plurality of transparent electrode pads 134 formed on the second doped layer 133, but the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the photodiode layer 13 may be omitted or replaced with other structures according to design requirements.

[0080] In this embodiment, the first doped layer 131 is an N-type layer (e.g., a highly doped N-type amorphous silicon layer) deposited on the first electrode layer 12, and the first doped layer 131 preferably covers at least 90% of the area of ​​the first electrode layer 12. The I-type layer 132 is a lightly doped (or undoped) I-type amorphous silicon layer deposited on the first doped layer 131, and the I-type layer 132 preferably covers the entire first doped layer. That is, the first doped layer 131 and the I-type layer 132 are each monolithically constructed in this embodiment.

[0081] Furthermore, the second doped layer 133 is a P-type layer (e.g., a low-doped P-type amorphous silicon layer) deposited on the first doped layer 131, and the second doped layer 133 includes a plurality of trigger pads 1331 spaced apart from each other, while a plurality of transparent electrode pads 134 are respectively formed on the plurality of trigger pads 1331. In this embodiment, the plurality of trigger pads 1331 are arranged in a regular pattern (e.g., ...). Figure 5 (The matrix arrangement shown is not intended to limit the invention.) For example, in other embodiments not illustrated in this invention, the first doped layer 131 may be a P-type layer, while the second doped layer 133 may be an N-type layer.

[0082] Furthermore, each of the trigger pads 1331 has a width W1331 between 3 micrometers and 7 micrometers, and the width W1331 of each of the trigger pads 1331 (e.g., 5 micrometers) is preferably greater than the width W134 of the corresponding transparent electrode pad 134 (e.g., 3 micrometers), while there is a distance G (e.g., about 1 micrometer) between any two adjacent trigger pads 1331 that is no greater than 2 micrometers.

[0083] From another perspective, the thickness T1331 of each trigger pad 1331 (e.g., approximately 10 nanometers) is 3% to 10% of the thickness T134 of the corresponding transparent electrode pad 134 (e.g., approximately 200 nanometers). Furthermore, the thickness T1331 of each trigger pad 1331 and the thickness T131 of the first doped layer 131 are respectively 1% to 5% of the thickness T132 of the type I layer 132 (e.g., approximately 1000 nanometers), and the thickness T1331 of each trigger pad 1331 (e.g., approximately 10 nanometers) is less than the thickness T131 of the first doped layer 131 (e.g., approximately 20 nanometers).

[0084] It should be noted that, when viewed from the perspective of the target biological particles 301, any slight change in the non-contact sorting device 100 will have a significant impact on the target biological particles 301. Therefore, in the above description, this embodiment proposes the size and arrangement of each component of the photodiode layer 13 to facilitate sorting the target biological particles 301 with lower external force, but the present invention is not limited thereto.

[0085] The mating structure 2 includes a second substrate 21 and a second electrode layer 22 formed on the second substrate 21, with the second electrode layer 22 facing the phototriggered structure 1. The bonding layer 3 connects the phototriggered structure 1 and the mating structure 2 (e.g., the bonding layer 3 connects the insulating layer 14 and the second electrode layer 22), together defining a receiving space C. The space between the insulating layer 14 and the second electrode layer 22 of the non-contact sorting device 100 (e.g., the receiving space C) can be used to contain the liquid sample 300 for sorting operations corresponding to the target biological particles 301.

[0086] More specifically, at least one of the mating structure 2 and the bonding layer 3 is provided with an input port E and an output port O respectively connected to both ends of the accommodating space C (e.g., ...). Figure 1 and Figure 6 The non-contact sorting device 100 can inject the liquid sample 300 from the input port E and make the liquid sample 300 flow out from the output port O.

[0087] It should be further noted that, in this embodiment, the non-contact sorting device 100 is described using the light-triggered structure 1 in conjunction with the mating structure 2 and the bonding layer 3, but the present invention is not limited thereto. For example, in other embodiments of the present invention not illustrated, the non-contact sorting device 100 may use other structures to replace the bonding layer 3; or, the light-triggered structure 1 may be used alone (e.g., for sale) or in conjunction with other devices.

[0088] The AC power supply device 200 is electrically coupled to the first electrode layer 12 and the second electrode layer 22 of the non-contact sorting device 100. When the liquid sample 300 is located between the insulating layer 14 and the second electrode layer 22 of the non-contact sorting device 100, the non-contact sorting device 100 can be used to supply a light source P to irradiate at least one of the trigger pads 1331, thereby generating a concentrated and non-uniform electric field on the liquid sample 300, and thus applying a dielectrophoresis (DEP) force to the target biological particles 301, driving them to move.

[0089] As described above, the photodiode layer 13 used in the biological particle sorting device 1000 (or the non-contact sorting device 100) in this embodiment has a specific structural design (e.g., multiple trigger pads 1331 are separated by the distance G and each has a predetermined width W1331, or multiple transparent electrode pads 134 are further added), which facilitates the generation of a relatively concentrated electric field (similar to the effect of tip discharge) through the trigger pads 1331 in a non-contact photoelectric coupling manner, thereby enabling it to accurately move (or capture) the target biological particles 301 to any region. Example 2

[0090] Please see Figure 7 This is a schematic diagram of Embodiment 2 of the present invention. Since this embodiment is similar to Embodiment 1 above, the similarities between the two embodiments will not be repeated. The main difference between this embodiment and Embodiment 1 above is that the photodiode layer 13 is described.

[0091] In this embodiment, the I-layer 132 is recessed with a patterned groove 1321, so that the I-layer 132 forms a plurality of spaced protrusions 1322, and a plurality of trigger pads 1331 are respectively formed on the plurality of protrusions 1322. The edge of each trigger pad 1331 is aligned with the edge of the corresponding protrusion 1322, and the depth D1321 of the patterned groove 1321 (e.g., approximately 20 nanometers) is 1% to 5% of the thickness T132 of the I-layer 132. Example 3

[0092] Please see Figure 8 This is a schematic diagram of Embodiment 3 of the present invention. Since this embodiment is similar to Embodiments 1 and 2 above, the similarities between the above embodiments will not be repeated. The main difference between this embodiment and Embodiments 1 and 2 above is that the photodiode layer 13 is described.

[0093] In this embodiment, the type I layer 132 includes a plurality of type I pads 1323 spaced apart on the first doped layer 131, and a plurality of trigger pads 1331 are formed on the plurality of type I pads 1323 respectively, and the width W1331 of each trigger pad 1331 (e.g., about 5 micrometers) is smaller than the width W1323 of the corresponding type I pad 1323 (e.g., about 10 micrometers).

[0094] Furthermore, the first doped layer 131 preferably includes a plurality of spacer pads 1311 spaced apart on the first electrode layer 12, and a plurality of I-type pads 1323 are respectively formed on the plurality of spacer pads 1311, with the edge of each I-type pad 1323 aligned with the edge of the corresponding spacer pad 1311, but the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the I-type layer 132 may include a plurality of I-type pads 1323, but the first doped layer 131 is a monolithic structure as shown in Embodiment 1. In addition, the thickness of the insulating layer 14 can be adjusted according to design requirements. Example 4

[0095] Please see Figures 9 to 13 This is a schematic diagram of Embodiment 4 of the present invention. Since this embodiment is similar to Embodiments 1 to 3 above, the similarities of the above embodiments will not be repeated. The main difference between this embodiment and Embodiments 1 to 3 above is that the non-contact sorting device 100 in this embodiment further includes a plurality of partition walls 4 located in the accommodating space C and connecting the light triggering structure 1 and the mating structure 2.

[0096] In this embodiment, as Figure 9 and Figure 10 As shown, any of the partition walls 4 are made of a soft, highly biocompatible material, such as thick-film photoresist (SU-8), polydimethylsiloxane (PDMS), acrylic foam, or silicone. Each partition wall 4 is connected between the insulating layer 14 and the second electrode layer 22, so that a portion of the photodiode layer 13 (e.g., portions of the plurality of trigger pads 1331) is embedded within the plurality of partition walls 4.

[0097] Furthermore, such as Figures 10 to 13 As shown, a plurality of partition walls 4 are arranged in a row with intervals between them, and a culture region R is formed between any two adjacent partition walls 4. A first flow channel C1 is formed on one side of the row of partition walls 4, which is connected to each culture region R, and a second flow channel C2 is formed on the other side of the row of partition walls 4, which is connected to each culture region R.

[0098] Furthermore, when the liquid sample 300 is injected into the first flow channel C1, the non-contact sorting device 100 can be used to provide a light source to illuminate the photodiode layer 13 (e.g., ...). Figure 12 and Figure 13The light irradiation area is surrounded by a dotted chain line, so that it applies a dielectric electrophoretic force to the target biological particles 301, thereby enabling the target biological particles 301 to move to a culture area R by moving the position of the light source, and be restrained by it so that they cannot move to the second flow channel C2.

[0099] Accordingly, in this embodiment, the non-contact sorting device 100 (or the biological particle sorting device 1000) is configured with a dual-channel structure (e.g., the first channel C1 and the second channel C2) connected to each of the culture areas R through a plurality of partition walls 4, so that the metabolites of the target biological particles 301 entering any of the culture areas R through the first channel C1 can flow to the second channel C2, thereby effectively improving the culture or growth effect of the target biological particles 301.

[0100] Furthermore, the multiple trigger pads 1331 configured in each culture region R by the non-contact sorting device 100, through the design of specific structures (e.g., the multiple trigger pads 1331 are separated by the distance G and each has a predetermined width W1331), help to stimulate the target biological particles 301 located in the culture region R.

[0101] It should be noted that at least one of the mating structure 2 and the bonding layer 3 is provided with a first input port E1 and a first output port O1 respectively connected to the end of the first flow channel C1, and at least one of the mating structure 2 and the bonding layer 3 is provided with a second input port E2 and a second output port O2 respectively connected to the two ends of the second flow channel C2.

[0102] In this embodiment, the first flow channel C1 has a first flow direction F1 (e.g., the direction from the first input port E1 to the first output port O1), and the second flow channel C2 defines a second flow direction F2, which is preferably parallel to the first flow direction F1. The width of the second flow channel C2 is preferably smaller than the width of the first flow channel C1, but the invention is not limited thereto. Furthermore, the first input port E1 is adjacent to the second input port E2, and the first output port O1 is adjacent to the second output port O2.

[0103] Accordingly, the non-contact sorting device 100 can inject the liquid sample 300 from the first input port E1 and cause the liquid sample 300 to flow out from the first output port O1; the non-contact sorting device 100 can inject a culture medium 400 into the second input port E2 and cause the culture medium 400 to flow out from the second output port O2.

[0104] More specifically, each of the culture regions R has a first opening R1 communicating with the first channel C1 and a second opening R2 communicating with the second channel C2, and the first opening R1 is larger than the second opening R2 (e.g., about 2 micrometers); within the accommodating space C of the non-contact sorting device 100, the first channel C1 can be connected to the second channel C2 through any of the culture regions R.

[0105] The plurality of partition walls 4 have numerous embodiments that meet the above conditions. For ease of explanation, this embodiment will only describe the construction of the partition wall 4 according to one preferred embodiment, but the present invention is not limited thereto. Furthermore, the structural designs of the plurality of partition walls 4 in this embodiment are generally the same, while the structures of the two partition walls 4 located at the ends are slightly different from the other partition walls 4. For ease of explanation, the structural design of one partition wall 4 will be described below first, but the present invention is not limited thereto.

[0106] Specifically, in this embodiment, the partition wall 4 includes an elongated partition section 41, two first guide sections 42 connected to one end of the partition section 41, and two second guide sections 43 connected to the other end of the partition section 41. The partition section 41 is perpendicular to the first flow direction F1 (or the second flow direction F2). Each of the first guide sections 42 forms a first angle α1 with the partition section 41 between 110 and 160 degrees, and each of the second guide sections 43 forms a second angle α2 with the partition section 41 between 100 and 160 degrees. Preferably, the length of each of the second guide sections 43 is greater than the length of each of the first guide sections 42, but this invention is not limited thereto.

[0107] From another perspective, in any two adjacent partition walls 4, the two first guide segments 42 that are adjacent to each other but belong to different partition walls 4 jointly define a first opening R1, and the two second guide segments 43 that are adjacent to each other but belong to different partition walls 4 jointly define a second opening R2. The first opening R1 is larger than the second opening R2 (e.g., about 2 micrometers), so as to facilitate the target biological particles 301 to enter the culture area R through the first flow C1 through the first opening R1, and to restrict the target biological particles 301 to the second flow channel C2 by the second opening R2.

[0108] Furthermore, among the two first guide segments 42 of any defined first opening R1, the length of the first guide segment 42 located upstream of the first flow direction F1 is shorter than the length of the other first guide segment 42, so that the liquid sample 300 can contact it at an acute angle α between 70 degrees and 20 degrees along the first flow direction F1. Accordingly, the longer first guide segment 42 can prevent cells in the liquid sample 300 from accidentally falling into the corresponding culture area R.

[0109] It should be further noted that, in the non-contact sorting device 100, the other structures associated with the plurality of partition walls 4 can be adjusted and varied according to design requirements, and are not limited to those shown in Embodiments 1 to 3. For example, in other embodiments not illustrated in this invention, the photodiode layer 13 may employ a structure other than a PIN diode layer. Example 5

[0110] Please see Figure 14 This is a schematic diagram of Embodiment 5 of the present invention. Since this embodiment is similar to Embodiment 4 above, the similarities between the two embodiments will not be repeated. The main difference between this embodiment and Embodiment 4 above lies in the construction of the plurality of partition walls 4.

[0111] In this embodiment, at least one of any two adjacent partition walls 4 is formed with a layout segment 44 located within the corresponding culture area R, to extend the path of the liquid sample 300 from the first opening R1 to the second opening R2, so as to effectively prevent objects in the liquid sample 300 that are not the target biological particles 301 from flowing into the culture area R. Example 6

[0112] Please see Figure 15 and Figure 16 This is a schematic diagram of Embodiment Six of the present invention. Since this embodiment is similar to Embodiment Two above, the similarities between the two embodiments will not be repeated. The main difference between this embodiment and Embodiment Two above is that the photodiode layer 13 is described.

[0113] In this embodiment, as Figure 15As shown, the photodiode layer 13 comprises only a first doped layer 131 formed on the first electrode layer 12 and an I-type layer 132 formed on the first doped layer 131. The I-type layer 132 has recessed patterned trenches 1321, so that the I-type layer 132 forms a plurality of spaced-apart protrusions 1322. Further, each protrusion 1322 has a width W1322 (e.g., 5 micrometers) between 3 micrometers and 7 micrometers, and any two adjacent protrusions 1322 have a distance G (e.g., 1 micrometer) not greater than 2 micrometers.

[0114] Furthermore, such as Figure 16 As shown, the photodiode layer 13 may further include a plurality of transparent electrode pads 134 respectively formed on the plurality of protrusions 1322, and the width W1322 of each protrusion 1322 is greater than the width W134 of the corresponding transparent electrode pad 134 (e.g., 3 micrometers).

[0115] In summary, the non-contact sorting device, its phototriggered structure, and the biological particle sorting equipment disclosed in the embodiments of the present invention employ a photodiode layer with a specific structural design (e.g., multiple trigger pads or multiple protrusions spaced apart by the distance and each having a predetermined width, or further adding multiple transparent electrode pads), which enables it to generate a relatively concentrated electric field (similar to the effect of tip discharge) through the trigger pads in a non-contact photoelectric coupling manner, thereby enabling it to accurately move (or capture) the target biological particles to any region.

[0116] Furthermore, the non-contact sorting device and bioparticle sorting equipment disclosed in the embodiments of the present invention form a dual-channel structure (e.g., the first channel and the second channel) connected to each of the culture areas through multiple partition walls, so that the metabolites of the target bioparticles entering any of the culture areas through the first channel can flow to the second channel, thereby effectively improving the culture effect of the target bioparticles.

[0117] Furthermore, the non-contact sorting device, by designing specific structures (e.g., the multiple trigger pads are spaced apart by the distance and each has a predetermined width), facilitates the stimulation of the target bioparticles located within the culture area.

[0118] Furthermore, reference numerals and / or letters may be repeated in different examples within this application. Such repetition is for the purpose of simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or settings discussed.

[0119] The above description is the preferred embodiment of this application. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principles described in this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. A biological particle sorting apparatus, characterized by, The biological particle sorting apparatus is used for sorting a target biological particle from a liquid sample, and the biological particle sorting apparatus comprises a non-contact sorting device and an alternating current power supply device; The non-contact sorting device comprises: A light trigger structure, comprising: a first substrate; a first electrode layer formed on the first substrate; a photodiode layer formed on the first electrode layer, and the thickness of the photodiode layer is between 1 micrometer and 3 micrometers; wherein the photodiode layer comprises: a first doped layer formed on the first electrode layer; an I-type layer formed on the first doped layer; and a second doped layer comprising a plurality of trigger pads formed on the I-type layer and spaced apart from each other; wherein each of the trigger pads has a width of between 3 micrometers and 7 micrometers, and the distance between any two adjacent trigger pads is not greater than 2 micrometers; an insulating layer covering the photodiode layer; A matching structure is spaced apart from the light trigger structure and at least one of them is transparent, and the matching structure comprises a second substrate and a second electrode layer formed on the second substrate, and the second electrode layer faces the light trigger structure; The alternating current power supply device is electrically coupled to the first electrode layer and the second electrode layer; When the liquid sample is located between the insulating layer of the non-contact sorting device and the second electrode layer, the non-contact sorting device is used for a light source to irradiate on at least one of the trigger pads, so that the non-contact sorting device generates a concentrated and non-uniform electric field at the liquid sample, and a dielectrophoresis force is applied to the target biological particle to drive it to move.

2. The biological particle sorting device according to claim 1, wherein The photodiode layer further comprises a plurality of transparent electrode pads formed on a plurality of the trigger pads, and the width of each of the trigger pads is greater than the width of the corresponding transparent electrode pad.

3. The biological particle sorting device according to claim 2, wherein The thickness of each of the trigger pads is 3% to 10% of the thickness of the corresponding transparent electrode pad.

4. The biological particle sorting device according to claim 1, wherein The first doped layer covers at least 90% of the area of the first electrode layer, and the I-type layer covers the entire first doped layer.

5. The biological particle sorting device according to claim 4, wherein The I-type layer is recessed with a patterned groove, so that the I-type layer constitutes a plurality of spaced-apart protrusions, and a plurality of the trigger pads are formed on a plurality of the protrusions, respectively.

6. The biological particle sorting device according to claim 5, wherein The edge of each of the trigger pads is aligned with the edge of the corresponding protrusion, and the depth of the patterned groove is 1% to 5% of the thickness of the I-type layer.

7. The biological particle sorting device according to claim 1, wherein The I-type layer comprises a plurality of I-type pads spaced apart on the first doped layer, and a plurality of the trigger pads are formed on a plurality of the I-type pads, respectively, and the width of each of the trigger pads is less than the width of the corresponding I-type pad.

8. The biological particle sorting device according to claim 7, wherein The first doped layer comprises a plurality of spacer pads spaced apart on the first electrode layer, and a plurality of the I-type pads are formed on a plurality of the spacer pads, respectively, and the edge of each of the I-type pads is aligned with the edge of the corresponding spacer pad.

9. The biological particle sorting device according to claim 1, wherein Each of the trigger pads has a thickness of 1% to 5% of a thickness of the I-type layer, and the thickness of each of the trigger pads is less than the thickness of the first doped layer.

10. The biological particle sorting device according to claim 1, wherein The non-contact sorting device further comprises: a bonding layer connected between the light trigger structure and the matching structure to jointly enclose a receiving space, and the photodiode layer is located in the receiving space; and a plurality of partition walls located in the receiving space and connected between the light trigger structure and the matching structure, wherein the plurality of partition walls are arranged in a row at intervals from each other, and each of the partition walls has a first guide section connected to one end of the partition wall and a second guide section connected to the other end of the partition wall, and each of the first guide sections and the second guide sections has a first included angle or a second included angle with the partition wall, and the first included angle is between 110 degrees and 160 degrees, and the second included angle is between 100 degrees and 160 degrees. The first flow channel has a first flow direction, and in the two first guide sections defining each of the first openings, one of the first guide sections located upstream of the first flow direction has a length less than that of the other first guide section, and is used to contact the liquid sample along the first flow direction at an acute angle between 70 degrees and 20 degrees.

11. The biological particle sorting device according to claim 10, wherein Each of the culture regions has a first opening connected to the first flow channel and a second opening connected to the second flow channel, and the first opening is larger than the second opening; in the receiving space of the non-contact sorting device, the first flow channel can be connected to the second flow channel through any of the culture regions. At least one of the adjacent partition walls has a layout section located in the corresponding culture region, which is used to extend the path of the liquid sample from the first opening to the second opening. The non-contact sorting device is used for sorting a target biological particle from a liquid sample, and the non-contact sorting device comprises a light trigger structure and a matching structure. The light trigger structure comprises: a first substrate; 12. The biological particle sorting device according to claim 11, wherein ​ 13. The biological particle sorting device of claim 10, wherein, ​ 14. The biological particle sorting device according to claim 13, wherein ​ 15. A non-contact sorting device characterized by, ​ ​ ​ a first electrode layer formed on the first substrate; a photodiode layer formed on the first electrode layer, and a thickness of the photodiode layer is between 1 micrometer and 3 micrometers; wherein the photodiode layer comprises: a first doped layer formed on the first electrode layer; an I-type layer formed on the first doped layer; a second doped layer comprising a plurality of trigger pads formed on the I-type layer and spaced apart from each other; wherein each of the trigger pads has a width between 3 micrometers and 7 micrometers, and a distance between any two adjacent trigger pads is not greater than 2 micrometers; and an insulating layer covering the photodiode layer; the matching structure and the light trigger structure are spaced apart and at least one of them is transparent, and the matching structure comprises a second substrate and a second electrode layer formed on the second substrate, and the second electrode layer faces the light trigger structure; wherein the insulating layer of the non-contact sorting device and the second electrode layer can accommodate the liquid sample to perform a sorting operation corresponding to the target biological microparticles.

16. The non-contact sorting device according to claim 15, wherein, The photodiode layer further comprises a plurality of transparent electrode pads formed on the plurality of trigger pads respectively, and the width of each trigger pad is greater than the width of the corresponding transparent electrode pad, and the thickness of each trigger pad is 3% to 10% of the thickness of the corresponding transparent electrode pad.

17. The non-contact sorting device of claim 16, wherein The thickness of each trigger pad and the thickness of the first doped layer are 1% to 5% of the thickness of the I-type layer respectively, and the thickness of each trigger pad is less than the thickness of the first doped layer.

18. The non-contact sorting device of claim 15, wherein, The non-contact sorting device further comprises: a bonding layer connected between the light trigger structure and the matching structure to collectively enclose a containing space, and the photodiode layer is located in the containing space; and a plurality of partition walls located in the containing space and connected between the light trigger structure and the matching structure; wherein the plurality of partition walls are spaced apart from each other and form a row, and any two adjacent partition walls form a culture area, one side of the row of partition walls forms a first flow channel connected to each culture area, and the other side of the row of partition walls forms a second flow channel connected to each culture area; wherein in the containing space of the non-contact sorting device, the first flow channel can only communicate with the second flow channel through any culture area.

19. A light triggering structure of a non-contact sorting device, characterized by, The light trigger structure of the non-contact sorting device comprises: a first substrate; a first electrode layer formed on the first substrate; A photodiode layer is formed on the first electrode layer, and a thickness of the photodiode layer is between 1 micrometer and 3 micrometers; wherein the photodiode layer comprises: a first doped layer formed on the first electrode layer; and an I-type layer formed on the first doped layer, and the I-type layer is recessed to form a patterned groove, so that the I-type layer constitutes a plurality of spaced-apart protrusions; wherein each of the protrusions has a width between 3 micrometers and 7 micrometers, and a distance between any two adjacent protrusions is not greater than 2 micrometers; An insulating layer covers the photodiode layer.

20. The light triggering structure of the non-contact sorting device according to claim 19, wherein, The photodiode layer further comprises a plurality of transparent electrode pads formed on the protrusions, respectively, and the width of each of the protrusions is greater than a width of the corresponding transparent electrode pad.

Images