Probe adjusting member, probe rack and test platform

Abstract

The present invention provides a probe adjusting part, a probe rack and a testing platform, which belong to the field of chip testing technology, wherein the probe adjusting part comprises: an adjusting part body, having a threaded section and a blocking part connected to one end of the threaded section, the outer diameter of the blocking part is larger than that of the threaded section, and the center of the threaded section has a center hole opening toward an end away from the blocking part; a first elastic part, sleeved on the threaded section, one end of the first elastic part abuts against the blocking part; a second elastic part, installed in the center hole, one end of the second elastic part extending out of the center hole is used to contact the swing arm of the probe; the probe adjusting part of the present invention elastically abuts the blocking part through the first elastic part, thereby ensuring that the threaded section remains relatively stable in the axial direction when threadedly connected, thereby improving the adjustment accuracy, and is used to contact the swing arm of the probe through the second elastic part, so that the abutting pressure of the swing arm is maintained within a certain fluctuation range.

Description

Technical Field

[0001] The present invention relates to the technical field of chip testing, and in particular to a probe adjusting component, a probe rack and a testing platform. Background Art

[0002] In optical communication chip production, wafers are not cut directly into individual chips. Instead, they are first cut into strips, called bars. A bar contains multiple chips, and during production, the chip parameters need to be tested. Existing chip testing methods typically use a test platform. After the probes on the test platform touch the chips, power is applied to simulate actual operating conditions.

[0003] On current test platforms, probes are typically clamped and fixed by a probe holder, with the probe's test tip contacting the chip. The probe is mounted on the test platform via an elastic plate. When the probe's test tip contacts the bar under test, the elastic deformation of the elastic plate maintains a certain contact pressure between the probe's test tip and the bar under test.

[0004] In practice, the contact pressure between the probe and the bar requires fine-tuning, and high precision is required throughout the entire test process. In existing technologies, adjusting the probe's contact pressure against the bar is easily affected by the precision of the adjustment components, causing the probe's contact pressure to fluctuate within an uncontrollable small range, affecting test results. Summary of the Invention

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the defect in the prior art that the probe adjustment part causes the probe to fluctuate within an uncontrollable small range, thereby providing a probe adjustment part, a probe rack and a test platform.

[0006] In order to solve the above technical problems, the present invention provides a probe adjustment member, comprising:

[0007] an adjusting member body, the adjusting member body comprising a threaded section and a blocking portion connected to one end of the threaded section, the blocking portion having an outer diameter larger than the threaded section, and a center hole having a center opening toward an end away from the blocking portion;

[0008] a first elastic member, sleeved on the threaded segment, one end of the first elastic member abutting against the blocking portion, and the first elastic member having an elastic force for driving the adjusting member body to move toward one end of the blocking portion;

[0009] The second elastic member is installed in the central hole, and one end of the second elastic member extending out of the central hole is used to contact the swing arm of the probe.

[0010] Optionally, the pressure applied by the second elastic member toward the swing arm is in the range of 0-20g.

[0011] The present invention provides a probe holder, comprising:

[0012] main body;

[0013] a swing arm connected to the main body via a spring clip, the swing arm being suitable for mounting a probe;

[0014] An adjustment platform is provided on the main body, and a probe adjustment member according to any one of the above schemes is installed on the adjustment platform. The first elastic member of the probe adjustment member abuts against the adjustment platform, and the second elastic member passes through the adjustment platform and abuts against the swing arm.

[0015] Optionally, a conductive plate is mounted on the main body, the conductive plate has an abutting surface facing the swing arm, and the swing arm has an electrode facing the abutting surface;

[0016] In a free state, pressure is applied toward the swing arm by the adjusting member, so that the electrode of the swing arm abuts against the abutting surface of the conductive plate.

[0017] Optionally, a connecting rod is connected between the conductive plate and the adjustment platform.

[0018] Optionally, the connecting rod passes through the swing arm.

[0019] Optionally, a fixture for connecting a probe is mounted on the swing arm, and the probe is detachably mounted on the fixture.

[0020] Optionally, the probe is tiltably clamped on the fixture.

[0021] Optionally, the clamp comprises: a sliding post and a sliding member slidably sleeved on the sliding post, wherein the free end of the sliding post is provided with a clamping hole for passing the probe;

[0022] A third elastic member is sleeved on the sliding post, and the third elastic member has an elastic force for driving the sliding member to move toward the free end of the sliding post.

[0023] The present invention provides a testing platform, comprising: a probe rack according to any one of the above solutions.

[0024] The technical solution of the present invention has the following advantages:

[0025] 1. The probe adjustment member provided by the present invention elastically abuts the blocking portion through the first elastic member, thereby ensuring that the threaded segment remains relatively stable in the axial direction when threadedly connected, thereby improving the adjustment accuracy, and the second elastic member is used to contact the swing arm of the probe, so that the abutment pressure of the swing arm is maintained within a certain fluctuation range.

[0026] 2. The probe holder provided by the present invention is connected to the swing arm through a spring piece on the main body, and an adjusting platform is provided on the main body. The adjusting member for applying pressure to the swing arm is provided on the adjusting member. Since a first elastic member is sleeved on the adjusting member, the state of the adjusting member on the adjusting member is subject to the constrained elastic force of the first elastic member, thereby avoiding the shaking of the adjusting member affecting the pressure applied to the swing arm; a second elastic member is installed on the adjusting member, which contacts the swing arm through the second elastic member, and the swing arm is acted upon by the elastic force of the second elastic member, thereby keeping the abutting pressure of the swing arm within a small fluctuation range, which is beneficial to ensuring the abutting accuracy of the probe.

[0027] 3. The probe holder provided by the present invention is provided with a clamp for connecting the probe on the swing arm. The probe is detachably mounted on the clamp. Different elastic parts can be selected to adjust the elastic force according to the actual size of the test probe, thereby ensuring that the probe is fixed in the clamping hole and avoiding damage to the probe due to insufficient elastic force or excessive elastic force.

[0028] 4. The test platform provided by the present invention has all the advantages of the probe rack because it has the probe rack described above. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0030] Figure 1 A three-dimensional diagram of a test platform in an embodiment of the present invention;

[0031] Figure 2 for Figure 1 A front view of the test platform is shown;

[0032] Figure 3 for Figure 1 The exploded view of part of the test platform shown;

[0033] Figure 4 Schematic diagram of the assembly of the adjusting member, the first elastic member and the second elastic member in an embodiment of the present invention.

[0034] Description of reference numerals:

[0035] 1. Main body; 2. Adjustment platform; 3. First elastic member; 4. Second elastic member; 5. Swing arm; 6. Probe; 7. Adjustment member; 8. Conductive plate; 9. Connecting rod; 10. Sliding column; 11. Sliding member; 12. Third elastic member; 111. Center hole; 112. Shrapnel; 113. Blocking part. DETAILED DESCRIPTION

[0036] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0037] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0038] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0039] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0040] Example 1

[0041] This embodiment provides a probe adjustment member that can be used on a probe rack, specifically for adjusting a swing arm of the probe rack.

[0042] like Figure 4As shown, it specifically includes: an adjusting member body, a first elastic member 3 and a second elastic member 4, the adjusting member body having a threaded section and a blocking portion 113 connected to one end of the threaded section, the outer diameter of the blocking portion 113 being larger than the threaded section, and the center of the threaded section having a center hole 111 opening toward an end away from the blocking portion 113; the first elastic member 3 is sleeved on the threaded section, one end of the first elastic member 3 abuts against the blocking portion 113, and the first elastic member 3 has an elastic force for driving the adjusting member body to move toward one end of the blocking portion 113; the second elastic member 4 is installed in the center hole 111, and the end of the second elastic member 4 extending out of the center hole 111 is used to contact the swing arm 5 of the probe 6.

[0043] The probe adjustment member provided in this embodiment uses a first elastic member to elastically abut the blocking portion, thereby ensuring that the threaded segment remains relatively stable in the axial direction when threadedly connected, thereby improving the adjustment accuracy, and uses a second elastic member to contact the swing arm of the probe, so that the abutment pressure of the swing arm is maintained within a certain fluctuation range.

[0044] Furthermore, in the probe adjustment member provided in this embodiment, the pressure applied by the second elastic member 4 toward the swing arm 5 is within the range of 0-20g.

[0045] Example 2

[0046] This embodiment provides a probe holder, which can be applied to a bar detection device or a chip detection device.

[0047] like Figures 1 to 3 As shown, the probe rack described in this embodiment includes a main body 1 and an adjusting platform 2, the main body 1 is connected to the swing arm 5 through a spring piece 112, the swing arm 5 is equipped with a probe 6, the adjusting platform 2 is arranged on the main body 1, and the adjusting platform 2 is provided with an adjusting member 7 suitable for applying pressure to the swing arm 5, the adjusting member 7 is sleeved with a first elastic member 3, the first elastic member 3 has an elastic force driving the adjusting member 7 to move in a direction away from the swing arm 5, the adjusting member 7 is equipped with a second elastic member 4, and the adjusting member 7 is in contact with the swing arm 5 through the second elastic member 4.

[0048] Through this arrangement, the state of the adjusting member 7 on the adjusting platform 2 is subject to the constrained elastic force of the first elastic member 3, thereby preventing the shaking of the adjusting member 7 from affecting the pressure applied to the swing arm 5. The swing arm 5 is acted upon by the elastic force of the second elastic member 4, so that the abutment pressure of the swing arm 5 is maintained within a small fluctuation range, which is conducive to ensuring the abutment accuracy of the probe 6.

[0049] like Figure 2 and Figure 3As shown, the adjusting member 7 in this embodiment is threadedly connected to the adjusting platform 2, and the adjusting member 7 has a threaded section suitable for matching the threaded hole of the adjusting platform 2. The end of the adjusting member 7 has a blocking portion 113 with an outer diameter larger than the threaded section. Since the pressure adjustment control accuracy applied by the adjusting member 7 to the swing arm 5 is generally within a small range of 0-20g, the shaking of the adjusting member 7 itself due to factors such as the pitch will affect the pressure applied to the swing arm 5, resulting in a sudden change in the pressure of the swing arm 5, which is not conducive to the normal detection effect. When the first elastic member 3 is constrained between the blocking portion 113 and the abutting end face of the adjusting platform 2, the first elastic member 3 applies an elastic force to the adjusting member 7 to move away from the swing arm 5, thereby forcing the adjusting member 7 to avoid shaking, thereby effectively improving the control accuracy.

[0050] like Figure 4 As shown, in this embodiment, the end of the adjusting member 7 facing the swing arm 5 has a center hole 111 for installing the second elastic member 4, and the second elastic member 4 is partially installed in the center hole 111, thereby forming a matching connection between the second elastic member 4 and the adjusting member 7. Here, the second elastic member 4 is partially installed in the center hole 111, and the axial direction of the second elastic member 4 is constrained by the center hole 111, which is conducive to keeping the extension and contraction of the second elastic member 4 on the axis, avoiding the displacement and deformation of the second elastic member 4.

[0051] As an alternative embodiment, one end of the second elastic member 4 is fixedly connected to the end of the adjusting member 7 facing the swing arm 5, and the other end is directly abutted against the swing arm 5. Here, the second elastic member 4 and the adjusting member 7 can be fixedly connected by welding or by clamping.

[0052] like Figures 1 to 3 As shown, the swing arm 5 and the main body 1 are connected via a spring clip 112. The spring clip 112 is preferably made of a metal sheet with good elasticity. When the swing arm 5 swings, the spring clip 112 deforms with the swing arm 5, thereby facilitating pressure detection of the swing arm 5. When the spring clip 112 is used for connection, only the spring clip 112 itself wears out and can be replaced after a period of operation. Compared with a shaft connection, which will cause friction and wear with other components, resulting in a shortened life of the entire component, the spring clip 112 is simple and convenient to replace and can avoid wear and tear with other components.

[0053] The probe holder in this embodiment also includes a conductive plate 8 connected to the main body 1, and the conductive plate 8 has a contact surface facing the swing arm 5. The swing arm 5 is provided with an electrode corresponding to the contact surface. In the free state, pressure is applied toward the swing arm 5 through the adjustment member 7, so that the electrode of the swing arm 5 abuts against the contact surface of the conductive plate 8.

[0054] Here, the conductive plate 8 is connected to the external circuit with an indicator unit, which can be an indicator light or other device indicating the power on / off status. The indicator light is always on in the on state. When the detection work is carried out, an external force is set to drive the swing arm 5 to swing upward, and the swing arm 5 swings to overcome the elastic force of the second elastic member 4. When the electrode of the swing arm 5 is separated from the abutment surface of the conductive plate 8, the conductive plate 8 is disconnected and the indicator light is turned off. The force value at this time is the abutment pressure during the detection work. The conductive plate 8 is provided for debugging the abutment pressure of the probe 6 on the one hand, and on the other hand, it is used together with the adjustment platform 2 of the main body 1 to constrain the swing amplitude of the swing arm 5, thereby facilitating the adjustment of the abutment accuracy of the probe 6.

[0055] In addition to the structure with conductive plate 8, a connecting rod 9 is also provided between the adjustment platform 2 and the conductive plate 8. After passing through the adjustment platform 2 and the swing arm 5, the connecting rod 9 is positioned so that its upper end is abutted against the upper end surface of the adjustment platform 2 and the lower end is threadedly connected to the conductive plate 8, thereby forming a fixed connection between the adjustment platform 2 and the conductive plate 8. The provision of the connecting rod 9 maintains the relative position of the adjustment platform 2 and the conductive plate 8, preventing the conductive plate 8 from being shifted due to force. Furthermore, the connecting rod 9 passing through the swing arm 5 guides the swing arm 5 to swing, thereby preventing the swing arm 5 from lateral shifting. As an alternative embodiment, the connecting rod 9 can also be provided without passing through the swing arm 5.

[0056] like Figure 3 As shown, in this embodiment, the swing arm 5 is equipped with a fixture for connecting the probe 6, and the probe 6 is detachably mounted on the fixture. Specifically, the fixture includes a sliding post 10 and a sliding member 11 slidably mounted on the sliding post 10. The free end of the sliding post 10 is provided with a clamping hole for passing the probe 6. The sliding post 10 is sleeved with a third elastic member 12, which has an elastic force that drives the sliding member 11 toward the free end of the sliding post 10.

[0057] With this arrangement, when the size of the test probe 6 actually needs to change, different elastic members can be selected to adjust the elastic force, thereby ensuring that the probe 6 is fixed in the clamping hole and avoiding damage to the probe 6 due to insufficient elastic force or excessive elastic force.

[0058] Example 3

[0059] This embodiment provides a test platform, including the probe rack described in Embodiment 1. Since it includes the probe rack described in Embodiment 1, it has all the advantages of the probe rack.

[0060] Here, the test platform may be a bar test platform or a test platform for a single chip.

[0061] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications derived therefrom remain within the scope of protection of the present invention.

Claims

1. A probe adjustment member, characterized in that: include: An adjusting member body, the adjusting member body comprising a threaded section and a blocking portion (113) connected to one end of the threaded section, the blocking portion (113) having an outer diameter larger than the threaded section, and a center hole (111) opening toward an end away from the blocking portion (113); a first elastic member (3) sleeved on the threaded section, one end of the first elastic member (3) abutting against the blocking portion (113), and the first elastic member (3) having an elastic force for driving the adjusting member body to move toward one end of the blocking portion (113); A second elastic member (4) is installed in the central hole (111), and one end of the second elastic member (4) extending out of the central hole (111) is used to contact the swing arm (5) of the probe (6), and the pressure applied by the second elastic member (4) toward the swing arm (5) is in the range of 0-20g.

2. A probe holder, characterized in that: include: Subject (1); A swing arm (5) is connected to the main body (1) via a spring (112), and the swing arm (5) is suitable for mounting a probe (6); An adjustment platform (2) is provided on the main body (1), and the adjustment platform (2) is installed with the probe adjustment member according to claim 1. The first elastic member (3) of the adjustment platform (2) abuts against the adjustment platform (2), and the second elastic member (4) passes through the adjustment platform (2) and abuts against the swing arm (5).

3. The probe holder according to claim 2, wherein: A conductive plate (8) is mounted on the main body (1), the conductive plate (8) having an abutting surface facing the swing arm (5), and the swing arm (5) having an electrode facing the abutting surface; In a free state, pressure is applied toward the swing arm (5) through the adjusting member (7), so that the electrode of the swing arm (5) abuts against the abutting surface of the conductive plate (8).

4. The probe holder according to claim 3, wherein: A connecting rod (9) is connected between the conductive plate (8) and the adjustment platform (2).

5. The probe holder according to claim 4, characterized in that: The connecting rod (9) passes through the swing arm (5).

6. The probe holder according to claim 2, wherein: A fixture for connecting a probe (6) is mounted on the swing arm (5), and the probe (6) is detachably mounted on the fixture.

7. The probe holder according to claim 6, wherein: The probe (6) is tiltably clamped on the fixture.

8. The probe holder according to claim 7, wherein: The clamp comprises: a sliding column (10) and a sliding member (11) slidably sleeved on the sliding column (10); a clamping hole for passing the probe (6) is provided at the free end of the sliding column (10); A third elastic member (12) is sleeved on the sliding column (10), and the third elastic member (12) has an elastic force that drives the sliding member (11) to move toward the free end of the sliding column (10).

9. A test platform, characterized in that: include: The probe holder according to any one of claims 2 to 8.

Images