A six-axis image-stabilized piezoelectric adaptive zoom lens and its preparation and working method

Abstract

The present invention provides a six-axis image-stabilized piezoelectric adaptive zoom lens and a preparation and operating method thereof, comprising a piezoelectric element, a transparent medium and a base arranged in sequence along an optical axis; the piezoelectric element is a transparent body, and two surfaces of the piezoelectric element perpendicular to the optical axis are respectively provided with transparent first and second electrodes; the first electrode or the second electrode is divided into a plurality of independent edge electrodes and a central electrode; the piezoelectric material and the base are fixed to a frame, and an ordered structure of three-dimensional spatial arrangement of piezoelectric material strain units is constructed, which can stimulate automatic zooming and optically stabilized six-axis basic motion of the adaptive zoom lens within a wide non-resonant low-frequency range, as well as a composite motion mode in a coupled state; the structure is simple and compact, easy to miniaturize, fast in response speed and large in output displacement, low in working electric field, ultra-high adjustable focal length sensitivity, insensitive to external environmental conditions, free from the influence of external conditions, extremely low power consumption, and easy for system integration.

Description

Technical Field

[0001] The present invention belongs to the technical field of optical devices, and in particular relates to a six-axis image-stabilized piezoelectric adaptive zoom lens and a preparation and operating method thereof. Background Art

[0002] With the continuous advancement of electronic technology, people's demands for photographic quality are constantly increasing. Traditional autofocus is achieved by using a voice coil motor in the camera module to propel the lens, which can only drive the lens along the optical axis. However, when taking photos or videos, the relative motion between the imaging device and the subject often causes image blur, making image stabilization an indispensable feature in videography. Currently, there are two mainstream image stabilization technologies: electronic image stabilization and optical image stabilization. Electronic image stabilization uses digital image processing to correct and restore images after shaking. It is a technology that compensates for shake by reducing image quality, so electronic image stabilization is also called "pseudo-image stabilization." Optical image stabilization uses movable components to compensate for vibration-induced optical path shifts, thereby reducing the blur in photos. Therefore, it is an effective image stabilization technology recognized by the public.

[0003] In the prior art, similar to the voice coil motor that realizes the autofocus function, the optical image stabilization voice coil motor is still based on the voice coil motor in the horizontal direction (X direction or Y direction) perpendicular to the optical axis, and drives the lens movement through the Lorentz force to obtain better image quality and achieve optical image stabilization. Its main disadvantages are as follows: (1) Since the optical image stabilization motor has magnets in its own moving parts, it is easily affected by the magnetic field of nearby motors or external magnetic fields; (2) Multiple motors jointly control the multi-dimensional movement of the lens to achieve optical image stabilization, that is, the motors are driven in at least two directions. This has the problems of large module size, complex mechanical structure, high power consumption, heavy moving parts, and high cost. It is difficult to design mutual interference, which ultimately reduces the reliability of the entire camera module structure; (3) Due to the limited space size of multiple motors, the lens module cannot be very thin. Summary of the Invention

[0004] In order to solve the problems existing in the above-mentioned prior art, the present invention proposes a six-axis stabilized piezoelectric adaptive zoom lens and its preparation and working method. By constructing an ordered structure of three-dimensional spatial arrangement of piezoelectric material strain units, it can stimulate the automatic zoom and optical stabilization of the adaptive zoom lens in a very wide non-resonant low-frequency range. The six-axis basic motion and 57 compound motion modes in the coupled state.

[0005] The system solves the problems of the adaptive zoom lens of the existing optical image stabilization voice coil motor, such as being easily affected by the external magnetic field or the magnetic field of the nearby motor, being large in size, having a relatively high overall cost, being unable to make the lens body very thin, having a complex mechanical structure, heavy moving parts, high power consumption, and difficulty in designing anti-interference with each other, which ultimately reduces the reliability of the entire camera module structure.

[0006] In order to achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a six-axis stabilized piezoelectric adaptive zoom lens and its preparation and working method, including a piezoelectric element, a transparent medium, a frame and a base; the piezoelectric element is a transparent body, and the two surfaces of the piezoelectric element perpendicular to the optical axis are respectively provided with a first electrode and a second electrode; the first electrode and the second electrode are transparent electrodes, and the first electrode or the second electrode is divided into multiple independent working areas, namely a central electrode and an independent edge electrode; along the optical axis are the piezoelectric element, the transparent medium and the base in sequence, and the piezoelectric material and the base are fixed on the frame.

[0007] The piezoelectric element is polarized along the thickness direction or radial direction.

[0008] The independent edge electrodes are a portion of the central electrode, a structure of multiple equal parts or multiple ring nests symmetrical about the center.

[0009] The frame is made of PDMS gel, ClearFlex50 glue, silicone rubber PDMS or a flexible solid material that can be 3D printed; the transparent medium is a transparent medium with a refractive index greater than 1.4; the base is made of a transparent rigid solid material; the first electrode and the second electrode are made of ITO electrodes or AZO electrodes, and the first electrode and the second electrode are made of magnetron sputtering or vapor deposition transparent electrodes; the piezoelectric element and the frame, and the frame and the base are bonded by an adhesive, and are encapsulated with UV curing glue or epoxy resin material.

[0010] The cross-section of the piezoelectric element is circular or square; the piezoelectric element is a piezoelectric sheet, a piezoelectric film, a piezoelectric block or a piezoelectric stack structure; when the piezoelectric element is a piezoelectric stack structure, it comprises a plurality of stacked piezoelectric sheets, and a plurality of piezoelectric single crystal sheets are stacked and arranged along the thickness direction; the piezoelectric stack structure is directly prepared by co-firing or coating method or by bonding independent piezoelectric sheets with transparent epoxy resin.

[0011] When the piezoelectric unit uses multiple piezoelectric sheets, the multiple piezoelectric sheets are electrically connected in parallel and in series.

[0012] The present invention provides a method for preparing the six-axis image-stabilized piezoelectric adaptive zoom lens, comprising the following steps:

[0013] Cutting the transparent piezoelectric material block into piezoelectric sheets of the same size;

[0014] The upper and lower surfaces of the cut piezoelectric sheets are ground and polished respectively, and the surface flatness is within 0.01mm;

[0015] Transparent electrodes are deposited by magnetron sputtering or evaporation according to the designed internal electrode pattern;

[0016] Polarize the piezoelectric sheet with electrodes as required and clean it;

[0017] The polarized and cleaned piezoelectric sheets are bonded together using UV-curing glue or epoxy resin, and a set pressure is applied to expel excess epoxy resin to obtain a micron-level glue layer with uniform thickness. After the glue layer is cured, an integrated piezoelectric stack is obtained; wherein multiple piezoelectric sheets are stacked along the thickness direction, the internal electrodes between adjacent piezoelectric sheets are uniformly distributed, and the internal electrodes are arranged in an interdigitated electrode structure, and the internal electrodes are led out by side electrodes.

[0018] The present invention can also provide an adaptive optical imaging system, in which the six-axis image-stabilized piezoelectric adaptive zoom lens of the present invention is arranged in its lens assembly.

[0019] The present invention discloses a working method for a six-axis image-stabilized piezoelectric adaptive zoom lens, in which the piezoelectric element realizes zoom and image stabilization movements based on a length extension mode or a thickness shear mode, specifically including: linear movement of the focus along the optical axis for the AF function; linear movement of the focus along the X-axis or Y-axis perpendicular to the optical axis for the OIS function; ROLL movement of the focus around the X-axis; PITCH movement of the focus around the Y-axis; YAW movement of the focus around the imaging optical axis; and a composite motion mode combining AF, linear, and rotational movements.

[0020] In the length expansion or thickness shear mode, the polarization direction of the piezoelectric element is thickness or radial. When the excitation electric field is applied to the upper and lower surfaces of the piezoelectric element, the electric field is applied in the following ways: the independent electrode area applies the same electric field as the independent linear or axial rotation motion, the central electrode area applies a zero electric field or a fixed DC electric field, and the other surface is not divided and always applies a zero electric field. 31 and d 15 The piezoelectric working mode successfully stimulates the length expansion and thickness shear mode vibrations of the piezoelectric element, and stimulates at least one of the deformation elongation, shortening, arching and concavity in different areas, and finally forms a composite motion mode of automatic zoom with the focus moving linearly along the optical axis, linear or rotation around the axis.

[0021] Compared with the prior art, the present invention has at least the following beneficial effects: the present invention provides a six-axis image-stabilized piezoelectric adaptive zoom lens, which can excite the basic vibration modes of the automatic focus (AF) and optical image stabilization (OIS) functions of the adaptive zoom lens within a wide non-resonant low-frequency range, and has a fast response speed and a large output displacement; the adaptive zoom lens has a low working electric field and a large adjustable focal length range, and has ultra-high adjustable focal length sensitivity; the adaptive zoom lens is insensitive to external environmental conditions and is not affected by external temperature, pressure, magnetic field and gravity, and therefore does not require a complex calibration procedure; the working electric field current of the adaptive zoom lens is relatively small, and it has extremely low power consumption; the adaptive zoom lens is small in size, simple and compact in structure, low in overall cost, simple in manufacturing process, and high in integration, so that the lens body can be made very thin, the moving parts are light in weight, and there is no electromagnetic interference; the adaptive zoom lens has the advantages of stable performance and long life during its service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 Schematic diagram of the structure of a six-axis image-stabilized piezoelectric adaptive zoom lens according to the present invention;

[0023] Figure 2 This is an exploded view of a six-axis image-stabilized piezoelectric adaptive zoom lens structure of the present invention;

[0024] Figure 3 This is a schematic diagram of the electrode structure on the upper and lower surfaces of the piezoelectric material of the piezoelectric adaptive zoom lens, where the independent edge electrode is a ring (one surface is divided into five independent electrode areas);

[0025] Figure 4 This is a schematic diagram of the electrode structure on the upper and lower surfaces of the piezoelectric material of the piezoelectric adaptive zoom lens, where the independent edge electrodes are two rings (one surface is divided into nine independent electrode areas);

[0026] Figure 5 This is a schematic diagram of the electrode structure on the upper and lower surfaces of the piezoelectric material of the piezoelectric adaptive zoom lens, where the independent edge electrodes are three rings (one surface is divided into 13 independent electrode areas);

[0027] Figure 6 This is a schematic diagram of the preparation process of the three-dimensional multilayer piezoelectric material intelligent structure of the piezoelectric adaptive zoom lens;

[0028] Figure 7 This is a schematic diagram of the electrical parallel structure of the double-layer thickness polarized piezoelectric units of the piezoelectric material of the piezoelectric adaptive zoom lens;

[0029] Figure 8This is a schematic diagram of the electrical parallel structure of the piezoelectric material multi-layer thickness polarized piezoelectric units of the piezoelectric adaptive zoom lens;

[0030] Figure 9 This is a schematic diagram of the electrical series structure of the double-layer thickness polarized piezoelectric unit of the piezoelectric material of the piezoelectric adaptive zoom lens;

[0031] Figure 10 This is a schematic diagram of the electrical series structure of piezoelectric material multi-layer thickness-polarized piezoelectric units of the piezoelectric adaptive zoom lens;

[0032] Figure 11 This is a schematic diagram of the electrical parallel structure of a double-layer radially polarized piezoelectric unit of a piezoelectric material of a piezoelectric adaptive zoom lens;

[0033] Figure 12 This is a schematic diagram of the electrical parallel structure of the piezoelectric material multilayer radially polarized piezoelectric units of the piezoelectric adaptive zoom lens;

[0034] Figure 13 This is a schematic diagram of the electrical series structure of a double-layer radially polarized piezoelectric unit of piezoelectric material of a piezoelectric adaptive zoom lens;

[0035] Figure 14 This is a schematic diagram of the electrical series structure of multi-layer radially polarized piezoelectric units of piezoelectric materials for a piezoelectric adaptive zoom lens;

[0036] Figure 15 Schematic diagram of the driving voltage waveform and its deformation when the six-axis image-stabilized piezoelectric adaptive zoom lens of the present invention realizes automatic zoom (AF) with the focus moving linearly along the optical axis (Z axis) to form a concave-convex lens. The dotted line in the voltage waveform represents zero voltage.

[0037] Figure 16 2. Schematic diagram of the driving voltage waveform and its deformation when the six-axis image-stabilized piezoelectric adaptive zoom lens of the present invention realizes linear motion of the focus along the perpendicular optical axis X-axis. The dotted line in the voltage waveform represents zero voltage.

[0038] Figure 17 1 is a schematic diagram of the driving voltage waveform and its deformation when the six-axis image-stabilized piezoelectric adaptive zoom lens of the present invention realizes linear motion of the focus along the vertical optical axis Y axis. The dotted line in the voltage waveform represents 0 voltage.

[0039] Figure 18 1 is a schematic diagram of the driving voltage waveform and its deformation when the six-axis image-stabilized piezoelectric adaptive zoom lens of the present invention realizes the focus rotation and rolling motion around the X-axis. The dotted line in the voltage waveform represents 0 voltage.

[0040] Figure 192. Schematic diagram of the driving voltage waveform and its deformation when the six-axis image-stabilized piezoelectric adaptive zoom lens of the present invention realizes the pitch motion of the focus around the Y-axis. The dotted line in the voltage waveform represents 0 voltage.

[0041] Figure 20 2. Schematic diagram of the driving voltage waveform and its deformation when the six-axis image-stabilized piezoelectric adaptive zoom lens of the present invention realizes the focus rotation yaw motion YAW around the Z axis. The dotted line in the voltage waveform represents 0 voltage.

[0042] Figure 21 Schematic diagram of the driving voltage waveform and its deformation when the six-axis image-stabilized piezoelectric adaptive zoom lens of the present invention realizes automatic focus (AF) with linear motion of the focus along the optical axis (Z axis) coupled with linear motion along the perpendicular optical axis X axis. The dotted line in the voltage waveform represents zero voltage.

[0043] Figure 22 Schematic diagram of the driving voltage waveform and its deformation when the six-axis image-stabilized piezoelectric adaptive zoom lens of the present invention realizes automatic focus (AF) with linear motion of the focus along the optical axis (Z axis) coupled with linear motion along the perpendicular optical axis Y axis. The dotted line in the voltage waveform represents zero voltage.

[0044] Figure 23 Schematic diagram of the driving voltage waveform and its deformation when the six-axis image-stabilized piezoelectric adaptive zoom lens of the present invention realizes automatic focusing (AF) with linear motion of the focus along the optical axis (Z axis) coupled with ROLL motion around the X axis. The dotted line in the voltage waveform represents zero voltage.

[0045] Figure 24 Schematic diagram of the driving voltage waveform and its deformation when the six-axis image-stabilized piezoelectric adaptive zoom lens of the present invention realizes automatic focusing (AF) with linear motion of the focus along the optical axis (Z axis) coupled with pitch motion around the Y axis. The dotted line in the voltage waveform represents zero voltage.

[0046] Figure 25 Schematic diagram of the driving voltage waveform and its deformation when the six-axis image-stabilized piezoelectric adaptive zoom lens of the present invention realizes automatic focusing (AF) with linear motion of the focus along the optical axis (Z axis) coupled with yaw motion (YAW) around the Z axis. The dotted line in the voltage waveform represents zero voltage.

[0047] Figure 26This is a schematic diagram of the coupling deformation of the six-axis image-stabilized piezoelectric adaptive zoom lens of the present invention to achieve automatic focus (AF) with linear motion of the focus along the optical axis (Z axis), linear motion perpendicular to the optical axis (X axis or Y axis), and rotation around the axis (ROLL rotation around the X axis, PITCH rotation around the Y axis, and YAW rotation around the imaging optical axis). It also includes a schematic diagram of the electrode structure on the upper and lower surfaces of the piezoelectric material, where the independent edge electrodes are five rings (one surface is divided into 21 independent electrode areas);

[0048] Figure 27 This is a schematic diagram of the structure of a piezoelectric adaptive zoom lens with six-axis image stabilization. DETAILED DESCRIPTION

[0049] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It will be understood that the specific embodiments described herein are intended only to explain the relevant content and are not intended to limit the present invention. It should also be noted that, for ease of description, only portions relevant to the present invention are shown in the accompanying drawings.

[0050] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The technical solution of the present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0051] Unless otherwise stated, the exemplary embodiments / examples shown are to be understood as providing exemplary features of various details of some ways in which the technical concept of the present invention can be implemented in practice. Therefore, unless otherwise stated, the features of the various embodiments / examples may be further combined, separated, interchanged, and / or rearranged without departing from the technical concept of the present invention.

[0052] The use of cross hatching and / or shading in the accompanying drawings is generally used to make the boundaries between adjacent components clear. As such, unless otherwise indicated, the presence or absence of cross hatching or shading does not convey or indicate any preference or requirement for the specific materials, material properties, dimensions, proportions, commonalities between the components shown, and / or any other characteristics, attributes, properties, etc. of the components. In addition, in the accompanying drawings, the sizes and relative sizes of the components may be exaggerated for clarity and / or descriptive purposes. When the exemplary embodiments can be implemented differently, the specific process sequence can be performed in a different order than described. For example, two successively described processes can be performed substantially simultaneously or in an order opposite to the order described. In addition, the same figure numbers represent the same components.

[0053] When a component is referred to as being “on,” “over,” “connected to,” or “coupled to” another component, the component may be directly on, directly connected to, or directly coupled to the other component, or intervening components may be present. However, when a component is referred to as being “directly on,” “directly connected to,” or “directly coupled to” another component, there are no intervening components present. For this purpose, the term “connected” may refer to a physical connection, an electrical connection, etc., with or without intervening components.

[0054] For descriptive purposes, the present disclosure may use spatially relative terms such as "below," "beneath," "under," "down," "above," "upper," "above," "higher," and "side (e.g., as in "sidewall")," to describe the relationship of one component to another (other) component as shown in the accompanying drawings. The spatially relative terms are intended to encompass different orientations of the device in use, operation, and / or manufacture in addition to the orientation depicted in the accompanying drawings. For example, if the device in the drawings is turned over, a component described as "below" or "beneath" another component or feature would then be oriented "above" the other component or feature. Thus, the exemplary term "below" can encompass both the "above" and "below" orientations. Furthermore, the device may be otherwise oriented (e.g., rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

[0055] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0056] The present invention provides a six-axis image-stabilized piezoelectric adaptive zoom lens comprising a piezoelectric element 1, a transparent medium 2, a frame 3 and a base 4; Figure 1 , from top to bottom are piezoelectric element 1, transparent medium 2, frame 3, and base 4. The piezoelectric element 1 and the base 4 can be fixed on the frame 3; an upper electrode is provided on the upper surface of the piezoelectric element 1, and a lower electrode is provided on the lower surface of the piezoelectric element 1; one of the surface electrodes (upper electrode or lower electrode) of the piezoelectric element 1 is divided into multiple independent working areas, that is, one of the surface electrodes is divided into a central electrode and an independent edge electrode, the first electrode and the second electrode correspond to the upper electrode and the lower electrode, "upper" and "lower" are only used to describe the time difference, and do not limit the orientation of the structure described in this application.

[0057] The frame 3 can be made of PDMS (Polydimethylsiloxane) gel, ClearFlex 50 glue, silicone rubber PDMS or a flexible material that can be 3D printed. The hardness of the material used for the frame 3 does not exceed 60HA.

[0058] The transparent medium 2 is a transparent medium with a refractive index greater than 1.4, and can be silicone oil or PDMS.

[0059] The base 4 is made of a transparent solid material that is relatively rigid and not easily deformed. The hardness of the base 4 is not less than 80HD, and can be made of PMMA, glass, or a material that can be 3D printed.

[0060] The components of the adaptive zoom lens, including the piezoelectric element 1 and frame 3, and the frame 3 and base 4, are bonded together using an adhesive. UV-curable glue, epoxy resin, or other adhesives can be used for encapsulation. Epoxy resin is used as the adhesive, and assembly of the components and curing of the adhesive are completed under prestressed loading conditions.

[0061] like Figure 1 As shown, the piezoelectric piece is a thin circular piece or a thin square piece; it can be made of transparent piezoelectric ceramics, transparent piezoelectric textured ceramics or transparent piezoelectric single crystal materials; the piezoelectric pieces are polarized along the thickness or radial direction, and an electric field is applied along the thickness direction during operation.

[0062] An upper electrode is provided on the upper surface of the piezoelectric sheet, and a lower electrode is provided on the lower surface; the upper electrode of the piezoelectric material is divided into different working areas, namely the central electrode and the independent edge electrode. The upper electrode and the lower electrode can be made of magnetron sputtering or vapor deposition transparent electrodes, such as ITO electrodes or AZO electrodes.

[0063] refer to Figure 3 、 Figure 4 and Figure 5 , taking the upper electrode of the piezoelectric sheet as an example, which is divided into a central electrode and independent side electrodes, refer to Figure 3 (a) Figure 3 (c) The central electrode is a square or a circle, and the independent side electrodes are divided into four parts. The independent side electrodes are symmetrically distributed about the center of the piezoelectric piece. Figure 3 (b) Figure 3 (d) Figure 3 (f) and Figure 3 (h) are the lower electrodes of the piezoelectric sheet, and the lower electrodes are a whole. Figure 3 (e) and Figure 3 (g) The independent edge electrodes can be further divided into more parts, the number of which is an integer multiple of 4.

[0064] When the piezoelectric piece is polarized, regions corresponding to different electrodes in the same piezoelectric piece can be polarized in the thickness direction and radial direction, that is, the same piezoelectric piece contains both regions polarized in the thickness direction and regions polarized in the radial direction.

[0065] Taking the upper electrode of the piezoelectric sheet as an example, which is divided into a central electrode and independent side electrodes, refer to Figure 4 (a) and Figure 4 (c) The central electrode is a square or a circle, and the independent edge electrodes are distributed in two circles. In addition, as a possible embodiment, the width of the independent edge electrodes in the outer circle is greater than that in the inner circle. The multiple independent edge electrodes in each circle are symmetrical about the center of the piezoelectric piece. Figure 4 (b) and Figure 4 (d) The lower electrode of the piezoelectric piece is a whole.

[0066] Taking the example of dividing the upper electrode of the piezoelectric sheet into a central electrode and independent side electrodes, Figure 5 (a) and Figure 5 (c) The independent edge electrodes are designed with three circles. Figure 5 (b) and Figure 5 (d) The lower electrode of the piezoelectric piece is a whole.

[0067] The edge independent electrode can be a ring, such as Figure 3 (a)~ Figure 3 (d), or multiple ring-nested structures (e.g. Figure 4 、 Figure 5 ), where an independent electrode can be one part or multiple parts such as Figure 3 (e)~ Figure 3 (h) The central independent electrode is used to realize linear motion of the focus along the optical axis (Z axis) for the AF function, and the edge independent electrodes are used to realize linear motion of the focus along the X axis or Y axis perpendicular to the optical axis for the OIS function, ROLL motion of the focus around the X axis, PITCH motion of the focus around the Y axis, and YAW motion of the focus around the imaging optical axis. One ring can only realize one motion mode; that is, Figure 3 It can realize single motion mode (including linear motion of the focus along the optical axis (Z axis) for AF function, linear motion of the focus along the X axis or Y axis perpendicular to the optical axis for OIS function, ROLL rotation of the focus around the X axis, PITCH rotation of the focus around the Y axis, YAW rotation of the focus around the imaging optical axis) and dual compound motion mode of AF coupled with linear or rotational motion; when it is necessary to realize three-mode coupling or more mode coupling, multiple ring nested structures are required (such as Figure 4 、 Figure 5 ).

[0068] The piezoelectric element 1 adopts a piezoelectric sheet, a piezoelectric film, a piezoelectric block or a piezoelectric stack structure; when the piezoelectric element is a piezoelectric stack structure, it is formed by stacking multiple piezoelectric sheets, the multiple piezoelectric sheets include at least two piezoelectric sheets, and multiple piezoelectric single crystals are stacked and arranged along the thickness direction; and the piezoelectric sheets are electrically connected in parallel or in series.

[0069] refer to Figure 6 The present invention also provides a method for preparing a three-dimensional multilayer piezoelectric material intelligent structure of a piezoelectric adaptive zoom lens:

[0070] 1) A transparent piezoelectric material block is used as the piezoelectric element, and the piezoelectric material block is a piezoelectric ceramic or a piezoelectric single crystal;

[0071] 2) Cutting the transparent piezoelectric material block into piezoelectric sheets of the same size;

[0072] 3) Grind and polish the upper and lower surfaces of the cut piezoelectric sheets to make them uniform in thickness and smooth in surface;

[0073] 4) Transparent electrodes are deposited by magnetron sputtering or evaporation according to the designed internal electrode pattern;

[0074] 5) Polarize the piezoelectric material with electrodes as required and clean it;

[0075] 6) Use UV-curing glue or epoxy resin to bond the clean and polarized piezoelectric sheets together, and apply a set pressure to expel the excess epoxy resin to obtain a micron-level glue layer with uniform thickness. The glue layer is cured for 24 hours to obtain an integrated piezoelectric stack; multiple piezoelectric single crystals are stacked and arranged along the thickness direction, and the internal electrodes between adjacent piezoelectric sheets are uniformly distributed, and the internal electrodes are arranged in a forked electrode structure, and the side electrodes are used to lead out the internal electrodes. Specifically, when the piezoelectric element 1 is a piezoelectric stack structure, the piezoelectric stack includes multiple piezoelectric sheets, and the connection between the multiple piezoelectric sheets is electrically series or electrically parallel, and the polarization direction is the thickness direction or radial direction. Its structure is as follows Figures 7 to 14 As shown, the output displacement amplification and the effect of reducing the working electric field can be achieved. Figure 7 、 Figure 9 、 Figure 11 、 Figure 13 Shown is a double layer of piezoelectric material, Figure 8 、 Figure 10 、 Figure 12 、 Figure 14 For multilayer piezoelectric materials, Figure 7 and Figure 8 Schematic diagram of the parallel structure of piezoelectric material polarized along the thickness; Figure 9 and Figure 10 Schematic diagram of the series structure of piezoelectric material polarized along the thickness; Figure 11 and Figure 12Schematic diagram of the parallel structure of piezoelectric materials polarized along the radial direction; Figure 13 and Figure 14 Schematic diagram of the parallel structure of piezoelectric materials polarized along the radial direction.

[0076] The piezoelectric stack structure can be directly prepared by co-firing or coating, or independent piezoelectric sheets can be prepared and bonded together by transparent epoxy resin.

[0077] The piezoelectric element 1 can be made of a single piece of transparent piezoelectric single crystal material, such as lead zinc niobate-lead titanate single crystal (PZN-PT), lead magnesium niobate-lead titanate single crystal (PMN-PT), lead indium niobate-lead magnesium niobate-lead titanate single crystal (PIN-PMN-PT), erbium-doped lead indium niobate-lead magnesium niobate-lead titanate single crystal (Er-PIN-PMN-PT), erbium-doped lead magnesium niobate-lead titanate single crystal (Er-PMN-PT), samarium-doped lead indium niobate-lead magnesium niobate-lead titanate single crystal (Sm-PIN-PMN-PT) or samarium-doped lead magnesium niobate-titanate single crystal (Sm-PMN-PT). The transparent piezoelectric ceramic material can be made of lead magnesium niobate single crystal (Sm-PMN-PT), or transparent piezoelectric ceramic material (lead-containing piezoelectric ceramic or lead-free piezoelectric ceramic), such as erbium-doped lead magnesium niobate-lead titanate ceramic (Er-PMN-PT), erbium-doped lead magnesium niobate-lead titanate ceramic (Er-PIN-PMN-PT), lanthanum-doped lead zirconate titanate (PLZT) electro-optical transparent ceramic, niobate-based potassium sodium niobate (KNN) ceramic, yttrium aluminum garnet laser transparent ceramic or gadolinium gallium garnet (GGG) transparent scintillating ceramic, and can also be prepared by using multiple transparent piezoelectric single crystals or transparent piezoelectric ceramics.

[0078] The working method of the six-axis image-stabilized piezoelectric adaptive zoom lens of the present invention is specifically as follows: the piezoelectric element realizes zoom and image stabilization movements based on a length expansion mode or a thickness shear mode, specifically including: linear movement of the focus along the optical axis (Z axis) for the AF function; linear movement of the focus along the X axis or Y axis perpendicular to the optical axis for the OIS function; ROLL movement of the focus around the X axis; PITCH movement of the focus around the Y axis; YAW movement of the focus around the imaging optical axis; and a composite motion mode of AF, linear and rotational motion coupling.

[0079] Automatic zoom with focus moving along the optical axis: When the piezoelectric element is in length extension mode or thickness shear mode, the polarization direction of the piezoelectric element is the thickness or radial direction; the piezoelectric element is polarized along the thickness direction. When the upper layer of the piezoelectric element is excited in the same direction (or opposite direction) as the polarization direction and the lower layer is excited in the opposite direction (or the same direction) as the polarization direction, the piezoelectric element is polarized along the thickness direction. 31The piezoelectric working mode successfully excites the upper and lower layers of the piezoelectric element to vibrate in opposite length extension modes. The piezoelectric element will produce a large extension and contraction deformation along the radial direction. The upper part works in the extension mode (or shortening mode) and the lower part works in the shortening mode (or extension mode). When the polarization direction of the piezoelectric sheet is radial, when the upper and lower layers of the piezoelectric element are applied with the same excitation electric field perpendicular to the polarization direction, through d 15 The piezoelectric mode successfully stimulates the piezoelectric element's thickness shear mode vibration, causing its upper and lower surfaces to produce upward or downward shear motion. Since the edges of the piezoelectric element are fixed, the piezoelectric element's length expansion mode (or thickness shear mode) forces its center to produce a large displacement motion perpendicular to the piezoelectric element's surface, ultimately forming an automatic zoom with the focus moving linearly along the optical axis.

[0080] The focus moves linearly along the X-axis perpendicular to the optical axis: in the length extension mode, the polarization direction of the piezoelectric element is the thickness direction; the excitation electric field is applied to the surface of the piezoelectric element perpendicular to the optical axis. Specifically, the electric field is applied in the following manner: the independent electrode on one side of the X-axis is divided into upper and lower ends, and an electric field in the same direction (or opposite direction) as the polarization direction is applied; the independent electrode on the other side of the X-axis is also divided into upper and lower ends, and an electric field in the opposite direction (or in the same direction) as the polarization direction is applied; a zero electric field or a fixed DC electric field is applied to the central electrode area, and a zero electric field is always applied to the undivided surface of the other surface. 31 The piezoelectric working mode successfully stimulates the length extension mode vibration of the piezoelectric material, and the area on one side of the X-axis and the area on the other side of the X-axis form opposite displacement changes. That is, the upper and lower areas on one side of the X-axis both work in the extension state mode (or shortening state mode), while the upper and lower areas on the other side of the X-axis both work in the shortening state mode (or extension state mode), ultimately forming a linear motion of the focus along the X-axis perpendicular to the optical axis.

[0081] The focus moves linearly along the Y-axis perpendicular to the optical axis: in the length extension mode, the polarization direction of the piezoelectric element is the thickness direction; an excitation electric field is applied to the upper and lower surfaces of the piezoelectric element. Specifically, the electric field is applied in the following manner: the independent electrode on one side of the Y-axis is divided into upper and lower ends, and an electric field in the same direction or opposite direction as the polarization direction is applied; the independent electrode on the other side of the Y-axis is also divided into upper and lower ends, and an electric field in the opposite direction (or in the same direction) as the polarization direction is applied; a zero electric field or a fixed DC electric field is applied to the central electrode area, and a zero electric field is always applied to the undivided surface of the other surface, through d 31 The piezoelectric working mode successfully stimulated the length extension mode vibration of the piezoelectric element, and the area on one side of the Y-axis and the area on the other side of the Y-axis formed opposite displacement changes, that is, the upper and lower areas on one side of the Y-axis both worked in the extension state mode (shortening state mode), while the upper and lower areas on the other side of the Y-axis both worked in the extension state mode (shortening state mode), ultimately forming a linear motion of the focus along the Y-axis perpendicular to the optical axis.

[0082] The focus rotates and rolls around the X-axis. ROLL: When the piezoelectric element is in length expansion mode or thickness shear mode, the polarization direction of the piezoelectric element is the thickness or radial direction. An excitation electric field is applied to the upper and lower surfaces of the piezoelectric element. When in length expansion mode, the electric field is applied in the following manner: an electric field is applied to the upper layer of the piezoelectric element on one side of the X-axis in the same or opposite direction as the polarization direction, and an electric field is applied to the lower layer of the piezoelectric element in the opposite or same direction as the polarization direction; an electric field is applied to the upper layer of the piezoelectric element on the other side of the X-axis in the opposite or same direction as the polarization direction, and an electric field is applied to the lower layer of the piezoelectric element in the same or opposite direction as the polarization direction; when in thickness shear mode, the electric field is applied in the following manner: an electric field is applied to the piezoelectric element on one side of the X-axis at 90 degrees clockwise or counterclockwise to the polarization direction; an electric field is applied to the piezoelectric element on the other side of the X-axis at 90 degrees counterclockwise or clockwise to the polarization direction. A zero electric field or a fixed DC electric field is applied to the central electrode area, and a zero electric field is always applied to the undivided surface of the other surface. 31 or d 15 The piezoelectric working mode successfully stimulates the length extension or thickness shear mode vibration of the piezoelectric element. The upper layer on one side of the X-axis and the lower layer on the other side of the X-axis work in the extension state mode or the shortening state mode, and the lower layer on one side of the X-axis and the upper layer on the other side of the X-axis work in the shortening state mode or the extension state mode. That is, the area on one side of the X-axis arches upward or concave downward, while the area on the other side of the X-axis concave downward and arches upward, eventually forming a ROLL motion in which the focus rotates along the X-axis.

[0083] The focus rotates and pitches around the Y-axis in PITCH motion: When the piezoelectric element is in length extension mode or thickness shear mode, the polarization direction of the piezoelectric element is thickness or radial; an excitation electric field is applied to the upper and lower surfaces of the piezoelectric element. When in length extension mode, the electric field is applied in the following manner: the upper piezoelectric element on one side of the Y-axis applies an electric field in the same direction or opposite direction as the polarization direction, and the lower piezoelectric element applies an electric field in the same direction or opposite direction as the polarization direction; the upper piezoelectric element on the other side of the Y-axis applies an electric field in the same direction or opposite direction as the polarization direction, and the lower piezoelectric element applies an electric field in the same direction or opposite direction as the polarization direction; when in thickness shear mode, the electric field is applied in the following manner: the electric field applied to the piezoelectric element on one side of the Y-axis is 90 degrees clockwise or counterclockwise to the polarization direction; the electric field applied to the piezoelectric element on the other side of the Y-axis is 90 degrees counterclockwise or clockwise to the polarization direction; a zero electric field or a fixed DC electric field is applied to the central electrode area, and a zero electric field is always applied to the undivided surface of the other surface; through d 31 or d 15 The piezoelectric working mode successfully excites the length extension or thickness shear mode vibration of the piezoelectric element. The upper layer on one side of the Y-axis and the lower layer on the other side of the Y-axis work in the extension state mode or the shortened state mode, and the lower layer on one side of the Y-axis and the upper layer on the other side of the Y-axis work in the shortened state mode or the extension state mode, that is, the area on one side of the Y-axis arches upward or concave downward, and the area on the other side of the Y-axis concave downward or arches upward, eventually forming a PITCH rotation and pitch motion of the focus along the Y-axis.

[0084] The focus rotates around the Z axis in yaw motion (YAW): When the piezoelectric element is in the length extension mode, the polarization direction of the piezoelectric element is in the thickness direction or radial direction; an excitation electric field is applied to the upper and lower surfaces of the piezoelectric element. Assuming that there are N independent electrodes on the edge of the piezoelectric element surface, an electric field with a difference of 1 / N cycles is applied in sequence. When in the length extension mode, the electric field is applied in the following manner: the upper layer of the piezoelectric element is in the same direction or opposite direction as the polarization direction, and the lower layer is in the same direction or opposite direction as the polarization direction; when in the thickness shear mode, the electric field is applied in the following manner: the electric field applied to the piezoelectric element is a 90-degree clockwise or counterclockwise rotation with respect to the polarization direction; a zero electric field or a fixed DC electric field is applied to the central electrode area, and a zero electric field is always applied to the undivided surface of the other surface. By d 31 or d 15 The piezoelectric working mode successfully stimulates the length extension or thickness shear mode vibration of the piezoelectric element. The upper and lower independent areas of the same edge work in opposite states, that is, the upper area works in the extension state mode and the shortening state mode, and the lower area works in the shortening state mode or the extension state mode. Finally, the independent electrode areas on the edge are arched and concave in turn, and finally the focus is formed to rotate along the Z-axis yaw motion YAW.

[0085] Composite motion mode: When the piezoelectric element is in length extension or thickness shear mode, the polarization direction of the piezoelectric element is the thickness direction or radial direction. When an excitation electric field is applied to the upper and lower surfaces of the piezoelectric element, the electric field is applied in the following manner: the independent electrode area applies the same electric field as that applied by a single straight line (the focus moves along the X-axis or Y-axis perpendicular to the optical axis) or an axis rotation motion (the focus rotates around the X-axis for ROLL, the focus rotates around the Y-axis for PITCH, and the focus rotates around the Z-axis for YAW). The central electrode area applies a zero electric field or a fixed DC electric field, and the other surface is undivided and always applies a zero electric field. 31 and d 15 The piezoelectric working mode successfully stimulates the vibration of the length expansion and thickness shear mode of the piezoelectric element, and stimulates at least one of the deformation extension, shortening, arching and concavity of different regions, and finally forms a composite motion mode of automatic zoom with the focus moving linearly along the optical axis, linear (the focus moves linearly along the X-axis or Y-axis perpendicular to the optical axis) or rotation around the axis (the focus rotates around the X-axis for rolling motion ROLL, the focus rotates around the Y-axis for pitching motion PITCH, the focus rotates around the Z-axis for yaw motion YAW). The working principle of the piezoelectric element 1 of the adaptive zoom lens is based on the length expansion mode or the thickness shear mode to realize 57 composite motion modes including automatic zoom (AF) with the focus moving linearly along the optical axis (Z axis), linear motion of the focus perpendicular to the optical axis (X-axis or Y-axis), rotation of the focus around the X-axis for rolling motion ROLL, rotation of the focus around the Y-axis for pitching motion PITCH, rotation of the focus around the imaging optical axis for yaw motion YAW, and coupling of AF with linear and rotational motions, as follows: Taking the double-layer piezoelectric element 1 as an example, the electrodes are divided as follows: Figure 3As shown, the double-layer structure uses the undivided electrode surface F as the bonding surface to bond together, and divides the two surfaces of the electrode into upper and lower surfaces, so the electrode is divided into 12 electrode areas, A upper, A lower, B upper, B lower, C upper, C lower, D upper, D lower, E upper, E lower, F upper, F lower, and the polarization direction is the thickness direction. Figure 7 or radial, reference Figure 13 .

[0086] Auto focus (AF): When the piezoelectric element 1 is in the length extension or thickness shear mode, the polarization direction of the piezoelectric element 1 is the thickness direction or radial direction. When the excitation voltage is applied to the upper and lower surfaces of the piezoelectric element 1, the voltage is applied in the following way: the upper and lower electrodes in the regions A, B, C, D, and E are applied with a voltage at one end (V A上 、V A下 、V B上 、V B下 、V C上 、V C下 、V D上 、V D下 、V E上 、V E下 ), the upper and lower electrodes in region F are applied with the other end voltage (V F上 、V F下 ), the voltage is applied as Figure 15 As shown, through d 31 or d 15 The piezoelectric working mode successfully excites the length expansion or thickness shear mode vibration of the piezoelectric element 1, and the piezoelectric element 1 will produce a large expansion and contraction deformation along the radial direction; in the above-mentioned length expansion or thickness shear mode working mode, since the edge of the piezoelectric element 1 is fixed on the frame 3, the length expansion mode of the piezoelectric element forces its center part to produce a large displacement movement perpendicular to the surface of the piezoelectric element 1, and its deformation diagram is shown in FIG. Figure 15 As shown;

[0087] Along the linear motion perpendicular to the optical axis (X axis): In the length extension mode, the polarization direction of the piezoelectric element 1 is the thickness direction. When the excitation voltage is applied to the upper and lower surfaces of the piezoelectric element 1, the voltage is applied in the following way: the upper electrodes of regions A and D and the lower electrodes of regions B and C are at one end (V A上 、V B下 、V C下 、V D上 ), the upper electrodes in regions B and C and the lower electrodes in regions A and D are at the other end (V A下 、V B上 、V C上 、V D下 ), which applies the same frequency and opposite phase voltage, and the rest of the region E applies 0 voltage or a fixed value DC voltage (V E上 、V E下), 0 voltage is applied to region F (V F上 、V F下 ), the voltage waveform is as follows Figure 16 As shown, through d 31 The piezoelectric working mode successfully stimulates the length extension mode vibration of the independent electrode part at the edge of the piezoelectric material. Regions A and D form opposite displacement changes with regions B and C, that is, regions A and D work in the extension state mode (shortening state mode), while regions B and C work in the shortening state mode (extension state mode), and finally form a linear motion perpendicular to the optical axis (X axis). The deformation diagram is shown in the figure. Figure 16 As shown;

[0088] Along the linear motion perpendicular to the optical axis (Y axis): In the length extension mode, the polarization direction of the piezoelectric element is the thickness direction. When the excitation voltage is applied to the upper and lower surfaces of the piezoelectric element, the voltage is applied in the following way: the upper electrodes of area A and area B and the lower electrodes of area C and area D are at one end (V A上 、V B上 、V C下 、V D下 ), the upper electrodes in regions C and D and the lower electrodes in regions A and B are at one end (V A下 、V B下 、V C上 、V D上 ), which applies the same frequency and opposite phase voltage, and the rest of the region E applies 0 voltage or a fixed value DC voltage (V E上 、V E下 ), 0 voltage is applied to region F (V F上 、V F下 ), the voltage waveform is as follows Figure 17 As shown, through d 31 The piezoelectric working mode successfully stimulates the length extension mode vibration of the independent electrode part at the edge of the piezoelectric element. Regions A and B form opposite displacement changes with regions C and D, that is, regions A and B work in the extension state mode (shortening state mode), while regions C and D work in the shortening state mode (extension state mode), and finally form a linear motion perpendicular to the optical axis (Y axis). The deformation diagram is shown in the figure. Figure 17 As shown;

[0089] Rolling motion around the X axis: When the piezoelectric element 1 is in the length extension or thickness shear mode, the polarization direction of the piezoelectric element 1 is the thickness or radial direction. When the excitation voltage is applied to the upper and lower surfaces of the piezoelectric element 1, the voltage is applied in the following manner: Region A and Region B are at one end (V A上 、V A下 、V B上 、V B下 ) Region C and Region D are one end (V C上 、V C下 、VD上 、V D下 ), which applies the same frequency and opposite phase voltage, and the rest of the region E applies 0 voltage or a fixed value DC voltage (V E上 、V E下 ), 0 voltage is applied to region F (V F上 、V F下 ), the voltage waveform is as follows Figure 18 As shown, through d 31 or d 15 The piezoelectric working mode successfully stimulates the length expansion or thickness shear mode vibration of the independent electrode part of the edge of the piezoelectric element 1. Regions A and B form opposite displacement changes with regions C and D, that is, regions A and B arch upward (concave downward), while regions C and D concave downward (arch upward), eventually forming a ROLL rotation along the X-axis. The deformation diagram is shown in the figure. Figure 18 As shown;

[0090] PITCH: When the piezoelectric element 1 is in the length extension or thickness shear mode, the polarization direction of the piezoelectric element 1 is the thickness or radial direction. When the excitation voltage is applied to the upper and lower surfaces of the piezoelectric element 1, the voltage is applied in the following manner: Area A and D are one end (V A上 、V A下 、V D上 、V D下 ), area B and C are one end (V B上 、V B下 、V C上 、V C下 ), which applies the same frequency and opposite phase voltage, and the rest of the region E applies 0 voltage or a fixed value DC voltage (V E上 、V E下 ), 0 voltage is applied to region F (V F上 、V F下 ), the voltage waveform is as follows Figure 19 As shown, through d 31 and d 15 The piezoelectric working mode successfully stimulates the length expansion or thickness shear mode vibration of the independent electrode part of the edge of the piezoelectric element 1. Regions A and D form opposite displacement changes with regions B and C, that is, regions A and D arch upward (concave downward), while regions B and C concave downward (arch upward), eventually forming a pitch motion PITCH along the Y axis. The deformation diagram is shown in the figure. Figure 19 As shown;

[0091] Yaw motion around the Z axis: When the piezoelectric element 1 is in length extension or thickness shear mode, the polarization direction of the piezoelectric element 1 is thickness or radial. When the excitation voltage is applied to the upper and lower surfaces of the piezoelectric element 1, the voltage is applied in the following manner: Region A, Region B, Region C, and Region D are each at one end (V A上 、VA下 、V B上 、V B下 、V C上 、V C下 、V D上 、V D下 ), which applies a voltage with a difference of 1 / 4 cycle, and the rest of the region E applies a 0 voltage or a fixed DC voltage (V E上 、V E下 ), 0 voltage is applied to region F (V F上 、V F下 ), the voltage waveform is as follows Figure 20 As shown, through d 31 and d 15 The piezoelectric working mode successfully stimulates the length expansion or thickness shear mode vibration of the piezoelectric element 1. Regions A, B, C, and D are arched (concave) in sequence, and finally form a yaw motion YAW along the Z axis. The deformation diagram is shown in the figure. Figure 20 As shown;

[0092] Compound motion mode: When the piezoelectric element 1 is in length extension or thickness shear mode, the polarization direction of the piezoelectric element 1 is thickness or radial, and the voltage application method is: the voltage applied to area A, area B, area C, and area D is consistent with the voltage applied to individual linear motion and individual axis motion (pitch motion PITCH, yaw motion YAW, and roll motion ROLL) (V A上 、V A下 、V B上 、V B下 、V C上 、V C下 、V D上 、V D下 ), DC voltage (V E上 、V E下 ), the ground voltage (V F上 、V F下 ), the voltage waveform is as follows Figure 21 、 Figure 22 、 Figure 23 、 Figure 24 、 Figure 25 As shown, through d 31 and d 15 The piezoelectric working mode successfully stimulates the length expansion or thickness shear mode vibration of the piezoelectric element 1, and stimulates the arching (depression) of different areas, and finally forms the coupling of automatic focus AF and rotation around the axis (pitch motion PITCH, yaw motion YAW, and roll motion ROLL). The deformation diagram is shown in the figure. Figure 21 、 Figure 22 、 Figure 23 、 Figure 24 、 Figure 25 shown.

[0093] The fully coupled motion modes of the six basic motion states (composite motion mode 31 in Table 1): The polarization direction of the piezoelectric element 1 is thickness or radial, and the electrode structures on the upper and lower surfaces of the piezoelectric material are as follows: Figure 26 As shown, the independent electrodes on the edge are 5 rings (one of the surfaces is divided into 21 independent electrode areas). The electric field is applied according to the driving mode of the six basic motion states mentioned above. 31 and d 15 The piezoelectric working mode successfully stimulates the length expansion or thickness shear mode vibration of the piezoelectric element 1, stimulates the deformation of different regions (elongation, shortening, arching, and concave modes), and finally forms a fully coupled motion mode with six basic motion states. The deformation diagram is shown in the figure. Figure 26 shown.

[0094] Figure 27 A schematic diagram of the structure of a double-layer piezoelectric adaptive zoom lens with six-axis motion and integrated zoom and image stabilization is shown. Two independent piezoelectric adaptive zoom lens units are bonded together with an adhesive to form a back-to-back structure, which can achieve six-axis motion with integrated zoom and image stabilization and a larger zoom range.

[0095] The six-axis basic motion includes linear motion of the focus along the optical axis (Z-axis) for the AF function; linear motion of the focus along the X-axis or Y-axis perpendicular to the optical axis for the OIS function, ROLL motion of the focus around the X-axis, PITCH motion of the focus around the Y-axis, and YAW motion of the focus around the imaging optical axis, as well as 57 composite motion modes coupled with AF, linear, and rotational motion. The specific motion modes are detailed in Table 1.

[0096] Table 1 Details of the 57 compound motion modes in the six-axis basic motion and its coupling state

[0097]

[0098]

[0099] On the other hand, the present invention can also provide an adaptive optical imaging system, in which the six-axis stabilized piezoelectric adaptive zoom lens of the present invention is arranged in its lens assembly, and the lens assembly of the electronic photographic device realizes automatic AF function and / or OIS function based on the single motion mode, two motion modes or compound motion mode of the six-axis stabilized piezoelectric adaptive zoom lens, and the power supply of the six-axis stabilized piezoelectric adaptive zoom lens is an adaptive optical imaging system.

[0100] The adaptive optical imaging system can be a microscopic imaging device, a laser measurement device, a spatial light modulator, a video camera, a professional camera, a mobile phone camera, or a sports camera.

[0101] Finally, it should be noted that the purpose of disclosing the embodiments is to facilitate a further understanding of the present invention. However, those skilled in the art will appreciate that various substitutions and modifications are possible without departing from the spirit and scope of the present invention and the appended claims. Therefore, the present invention should not be limited to the contents disclosed in the embodiments, and the scope of protection claimed by the present invention shall be determined by the scope defined in the claims.

Claims

1. A six-axis image-stabilized piezoelectric adaptive zoom lens, characterized in that: The invention comprises a piezoelectric element (1), a transparent medium (2), a frame (3) and a base (4); the piezoelectric element (1) is a transparent body, and the two surfaces of the piezoelectric element (1) perpendicular to the optical axis are respectively provided with a first electrode and a second electrode; the first electrode and the second electrode are transparent electrodes, and the first electrode or the second electrode is divided into a plurality of independent working areas, namely a central electrode and an independent edge electrode; along the optical axis, the piezoelectric element (1), the transparent medium (2) and the base (4) are arranged in sequence, and the piezoelectric element (1) and the base (4) are fixed on the frame (3); the independent edge electrodes are a plurality of equally divided or multiple annular nested structures around the central electrode and symmetrical about the center; when the piezoelectric element (1) is in a length expansion or thickness shear mode, the polarization direction of the piezoelectric element (1) is in the thickness direction or radial direction, and when an excitation electric field is applied to the upper and lower surfaces of the piezoelectric element (1), the electric field is applied in the following manner: the electric field applied to the independent electrode area is consistent with the electric field applied by a single linear motion or a rotational motion around the axis, the central electrode area is applied with a zero electric field or a fixed value of a DC electric field, and the other surface is not divided and always applied with a zero electric field, and the electric field is applied to the other surface by d 31 and d 15 The piezoelectric working mode successfully excites the piezoelectric element (1) to vibrate in length expansion and thickness shear modes, and excites at least one of deformation elongation, shortening, arching, and concavity in different regions, ultimately forming a composite motion mode of automatic zooming, linear or rotational movement of the focus along the optical axis.

2. The six-axis image-stabilized piezoelectric adaptive zoom lens according to claim 1, wherein: The frame is made of PDMS gel, ClearFlex50 glue, silicone rubber PDMS or a flexible solid material capable of 3D printing; the transparent medium (2) is a transparent medium with a refractive index greater than 1.4; the base is made of a transparent rigid solid material; the first electrode and the second electrode are made of ITO electrodes or AZO electrodes, and the first electrode and the second electrode are made of magnetron sputtering or vapor deposition transparent electrodes; the piezoelectric element (1) and the frame (3), and the frame (3) and the base (4) are bonded by an adhesive, and are encapsulated by UV curing glue or epoxy resin material.

3. The six-axis image-stabilized piezoelectric adaptive zoom lens according to claim 1, wherein: The cross section of the piezoelectric element (1) is circular or square; the piezoelectric element (1) is a piezoelectric sheet, a piezoelectric film, a piezoelectric block or a piezoelectric stack structure; When the piezoelectric element (1) is a piezoelectric stack structure, it is formed by stacking a plurality of piezoelectric sheets, and a plurality of piezoelectric single crystal sheets are stacked and arranged along the thickness direction; the piezoelectric stack structure is directly prepared by co-firing or coating, or by bonding independent piezoelectric sheets with transparent epoxy resin.

4. The six-axis image-stabilized piezoelectric adaptive zoom lens according to claim 1, wherein: When the piezoelectric element (1) uses a plurality of piezoelectric sheets, the plurality of piezoelectric sheets are electrically connected in parallel and in series.

5. The method for preparing the six-axis image-stabilized piezoelectric adaptive zoom lens according to any one of claims 1 to 4, characterized in that: The following steps are involved: Cutting the transparent piezoelectric material block into piezoelectric sheets of the same size; The upper and lower surfaces of the cut piezoelectric sheets are ground and polished respectively, and the surface flatness is within 0.01mm; Transparent electrodes are deposited by magnetron sputtering or evaporation according to the designed internal electrode pattern; Polarize the piezoelectric sheet with electrodes as required and clean it; The polarized and cleaned piezoelectric sheets are bonded together using UV-curable glue or epoxy resin, and the excess epoxy resin is expelled by applying a set pressure to obtain a micron-level and uniformly thick glue layer. After the glue layer is cured, an integrated piezoelectric stack is obtained. Multiple piezoelectric sheets are stacked and arranged along the thickness direction, the internal electrodes between adjacent piezoelectric sheets are uniformly distributed, and the internal electrodes are arranged in an interdigitated electrode structure, and the internal electrodes are led out by side electrodes.

6. An adaptive optical imaging system, characterized in that: The lens assembly is provided with the six-axis image-stabilized piezoelectric adaptive zoom lens according to any one of claims 1 to 4.

7. The operating method of the six-axis image-stabilized piezoelectric adaptive zoom lens according to any one of claims 1 to 4, characterized in that: The piezoelectric element (1) realizes the movement of zoom and image stabilization based on the length extension mode or thickness shear mode, specifically including: linear movement of the focus along the optical axis for the AF function; linear movement of the focus along the X-axis or Y-axis perpendicular to the optical axis for the OIS function, ROLL movement of the focus around the X-axis, PITCH movement of the focus around the Y-axis, YAW movement of the focus around the imaging optical axis, and a composite motion mode of AF, linear and rotational motion coupling.

Images