Vibration cutting device for fine pattern production

Abstract

The present application relates to a micro pattern making vibration cutting device, more specifically, comprising: a cutting part capable of processing the surface of a workpiece; and a shaking part connected with the cutting part, for generating vibration, the shaking part makes the cutting part that performs cutting processing on the workpiece vibrate, to perform vibration-based pattern processing on the surface of the workpiece. Moreover, according to the present application, the present application has the following effects: the micro pattern processing on the surface of the workpiece can be accurately performed, and the responsiveness of the cutting blade that generates vibration can be improved.

Description

Technical Field

[0001] This invention relates to a vibratory cutting apparatus for creating micro-patterns, and more specifically, to a vibratory cutting apparatus for creating micro-patterns that can perform micro-patterning on the surface of a workpiece during the vibration of a cutting blade. Background Technology

[0002] Typically, the process of fabricating micro-patterns on the surface of materials is widely used to impart superior mechanical properties suitable for natural replication techniques to optical thin films, functional materials, lenses, and the like. However, recent micro-patterning processes require micrometer- or nanometer-scale patterns, which presents limitations in forming precise micro-patterns within molds.

[0003] As a prior art document for solving this problem, Korean Patent Publication No. 10-1170531 discloses a micromachining apparatus using a cam-driven roller. However, in this prior art document, processing is performed solely by vibration in the depth direction relative to the surface of the workpiece, thus still resulting in the inability to form complex patterns other than two-dimensional shapes. Summary of the Invention

[0004] Technical issues

[0005] The present invention is proposed to solve the problems of the prior art as described above. The purpose of the present invention is to enable the precise processing of fine patterns of various waveforms on the surface of a workpiece.

[0006] Technical solution

[0007] A preferred embodiment of the present invention is characterized by a vibration cutting device for fabricating fine patterns, comprising: a cutting section capable of machining the surface of a workpiece; and an oscillating section connected to the cutting section for generating vibration, wherein the oscillating section causes the cutting section performing the cutting machining on the workpiece to vibrate, thereby performing vibration-based pattern processing on the surface of the workpiece.

[0008] The effects of the invention

[0009] Through the above technical solution, the present invention has the following effect: it can accurately perform micro-pattern processing on the surface of the workpiece.

[0010] Furthermore, the present invention has the following effect: it can stably process patterns of various shapes, such as Lissar curves and random waveforms, on the surface of the workpiece through a composite vibration based on two-dimensional vibration and cross-axis vibration.

[0011] Furthermore, the present invention has the following effect: it has a spring portion that applies elastic force in a manner corresponding to the vibration direction, so that the displacement of the cutting blade is quickly restored, thereby enabling high-speed surface processing. Attached Figure Description

[0012] Figure 1 This is a schematic diagram illustrating the state of the vibratory cutting device for creating fine patterns according to the first embodiment of the present invention installed on a rolling die processing machine.

[0013] Figure 2 This is a conceptual diagram illustrating an example of the driving mechanism of the cutting section structure according to the first embodiment of the present invention.

[0014] Figure 3 The diagram shows the shape of the elastic hinge portion according to the first embodiment of the present invention. (a) shows the elastic hinge portion with recesses on both sides, and (b) shows the shape of the elastic hinge portion with recesses on one side.

[0015] Figure 4 The diagram shows the shape of the spring portion according to the first embodiment of the present invention. (a) is a spring portion in the form of a wire spring, and (b) is a spring portion in the form of a leaf spring.

[0016] Figure 5 This diagram illustrates an embodiment of the structure of the cutting portion that causes the cutting blade of the first embodiment of the present invention to vibrate in the depth direction of the workpiece being machined.

[0017] Figure 6 This diagram illustrates the state of a workpiece having its surface machined by the cutting portion according to the first embodiment of the present invention.

[0018] Figure 7 This is a conceptual diagram illustrating an example of the driving mechanism of the cutting section structure according to a second embodiment of the present invention.

[0019] Figure 8 This diagram illustrates an embodiment of the structure of the cutting portion that causes the cutting blade of the second embodiment of the present invention to vibrate in the length direction of the workpiece.

[0020] Figure 9 This diagram illustrates the state of a workpiece having its surface machined by the cutting portion according to the second embodiment of the present invention.

[0021] Figure 10 This is a conceptual diagram illustrating an example of the driving mechanism of the cutting section structure according to a third embodiment of the present invention.

[0022] Figure 11 This diagram illustrates an embodiment of the structure of the cutting section that causes the cutting blade of the third embodiment of the present invention to vibrate along the trajectory of the oscillator motion.

[0023] Figure 12 This is a conceptual diagram illustrating an example of the driving mechanism of the cutting section structure according to the fourth embodiment of the present invention.

[0024] Figure 13This diagram illustrates an embodiment of the structure of a cutting section in which the cutting blade vibrates according to a Lissajous curve, a composite waveform, a random waveform, or the like, according to a fourth embodiment of the present invention.

[0025] Figure 14 This diagram illustrates the state of a workpiece with a surface machined by the cutting portion according to the fourth embodiment of the present invention. Detailed Implementation

[0026] This specification provides a brief explanation of the terminology used and a detailed description of the invention.

[0027] The terminology used in this invention has been selected from general terms that take into account the function of this invention and are currently widely used. However, this may be modified according to the intentions, conventions, or the emergence of new technologies of those skilled in the art to which this invention pertains. Therefore, the terminology used in this invention is not simply a name, but should be defined based on its meaning and the overall content of this invention.

[0028] Throughout the specification, when a section “includes” other structural elements, unless otherwise stated otherwise, it means that other structural elements may also be included, rather than excluding them.

[0029] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, enabling those skilled in the art to readily implement the present invention. However, the present invention can be embodied in many different forms and is not limited to the embodiments described herein.

[0030] Specific details regarding the technical problems, technical solutions, and effects of this invention are included in the following embodiments and accompanying drawings. References and accompanying drawings are also provided. Figure 1 The advantages, features, and methods of implementing the present invention will become more apparent from the embodiments described in detail below.

[0031] Hereinafter, with reference to the accompanying drawings, the vibration cutting device for fabricating fine patterns according to the present invention will be described in detail.

[0032] Reference Figures 1 to 6 The preferred embodiment of the present invention, a vibration cutting device for fabricating fine patterns, includes: a cutting section 200 for machining the surface of a workpiece 50; and an oscillation section 300 connected to the cutting section 200 for generating vibration. Furthermore, the oscillation section 300 causes the cutting section 200, which performs cutting on the workpiece 50, to vibrate, thereby performing vibration-based patterning on the surface of the workpiece 50.

[0033] First, the aforementioned cutting section 200 and vibration section 300 are installed in a processing apparatus 100 suitable for machining fine patterns based on vibrations from machines such as rolling mills, lens mold machines, forming machines, planers, grooving machines, lathes, CNC lathes, and ultrasonic machines. As an example, see... Figure 1 The workpiece 50 is coupled to a machining apparatus 100, such as a roll forming machine, and can rotate on its axis. The cutting section 200 and the vibration section 300 are arranged adjacent to the workpiece 50, thereby enabling machining of the workpiece 50. That is, the cutting section 200 and the vibration section 300 can be used in multiple fields where vibration-based micro-patterning is applicable. Furthermore, the workpiece 50 is formed from a material requiring surface processing for use in wafers or functional materials. Moreover, the surface processing of the vibration cutting apparatus for micro-patterning based on the present invention involves micro-patterning of the surface of the workpiece 50 based on vibrations such as sine waves, composite waves, and Lissajous curves, allowing for the application of natural imitation techniques to the surface of the product.

[0034] Next, the cutting part 200 can vibrate at high speed through the oscillation part 300 and process a vibration-based micro-pattern on the surface of the workpiece 50. More specifically, the cutting part 200 includes: a cutting blade 210 with a pointed end provided at one end so as to cut the workpiece 50, which can vibrate through the oscillation part 300; an elastic hinge part 220 for engaging the cutting blade 210; and a spring part 230 connected to the other side of the cutting blade 210.

[0035] The cutting blade 210 is arranged perpendicular to the surface of the workpiece 50 and is fixed on one side by the elastic hinge portion 220.

[0036] Furthermore, when the cutting blade 210 is fixed and force is applied, the elastic hinge portion 220 undergoes elastic deformation, allowing the cutting blade 210 to vibrate. Specifically, referring to… Figure 3 ,like Figure 3 As shown in part (a), the aforementioned elastic hinge portion 220 has a concave shape on both sides, as... Figure 3 As shown in part (b), one side is flat and the other side is concave.

[0037] In this case, as Figure 3 When the elastic hinge portion 220, as shown in part (a), is bent, the same elastic force can be applied to both sides. Furthermore, when... Figure 3 When the elastic hinge portion 220, as shown in part (b), bends upward, a greater elastic force can be applied than when it bends downward. Furthermore, the elastic hinge portion 220 can guide the vibration direction of the cutting blade vibrating through the oscillation portion 300. As an example, refer to... Figure 2The aforementioned elastic hinge portion 220 can fix both sides of the cutting blade 210 so that the cutting blade 210 vibrates only upwards and downwards. That is, the aforementioned elastic hinge portion 220 restricts the starting direction of the cutting blade 210 and can guide the vibration direction of the cutting blade 210.

[0038] Furthermore, the aforementioned spring portion 230 can apply a spring force corresponding to the vibration of the aforementioned cutting blade 210, thereby increasing the recovery speed of the aforementioned cutting blade. As an example, see... Figure 2 The aforementioned spring portion 230 is disposed between the lower ends of both sides of the cutting blade 210 and the upper machining device 100. Furthermore, when the cutting blade 210 is moved upward via the aforementioned oscillation portion 300, the spring portion 230 applies a downward elastic force; conversely, when the cutting blade 210 is moved downward, it applies an upward elastic force. In this manner, the displacement of the cutting blade 210 can be quickly restored. In this case, the spring portion 230 can be as follows: Figure 4 The coil shape shown in part (a), or as... Figure 4 The leaf spring shape shown in part (b) is as follows. The spring part 230 in the shape of a leaf spring can easily apply elastic force in one direction, and the spring part 230 in the shape of a wire spring can easily apply elastic force in two directions.

[0039] Next, the aforementioned oscillation section 300 is provided at the lower end of the aforementioned cutting blade 210 to generate vibration, and the aforementioned elastic hinge section 220 fixes the two sides of the aforementioned cutting blade 210, thereby enabling the aforementioned cutting blade 210 to reciprocate linearly.

[0040] That is, the cutting part 200 vibrates in a reciprocating manner toward the center line of the workpiece 50 via the oscillation part 300, thereby processing the surface of the workpiece 50 in the length direction.

[0041] Hereinafter, in the vibratory cutting apparatus for fabricating fine patterns according to the first embodiment of the present invention, the structure of the cutting part 200 and the oscillating part 300 of the cutting blade 210 vibrating in the depth direction of the workpiece 50 and cutting the workpiece 50 will be described.

[0042] First, refer to Figure 5 In part (a), a spring portion 230a in the form of a leaf spring is connected to the machining apparatus 100 from both sides of the cutting blade 210. Furthermore, a recessed elastic hinge portion 220a is disposed at the lower part of the spring portion 230a and is connected to the machining apparatus 100 from both sides of the cutting blade 210. Additionally, a vibration portion 300 is provided at the lower end of the cutting blade 210 and vibrates.

[0043] Moreover, refer to Figure 5In part (b), a spring portion 230b in the form of a leaf spring is connected to the machining apparatus 100 from both sides of the cutting blade 210b. Furthermore, a recessed elastic hinge portion 220b is disposed on the upper part of the spring portion 230b and connected to the machining apparatus 100 from both sides of the cutting blade 210. Additionally, a vibration portion 300 is provided at the lower end of the cutting blade 210 and vibrates.

[0044] Moreover, refer to Figure 5 In part (c), the recessed elastic hinge portions 220b on both sides are connected to the machining apparatus 100 from both sides of the cutting blade 210. Furthermore, the coil-shaped spring portion 230c surrounds the oscillating portion 300. The oscillating portion 300 is located at the lower end of the cutting blade 210 and vibrates.

[0045] That is, according to Figure 5 The structure of the cutting section 200 and the vibration section 300 shown above allows the vibration direction of the cutting blade 210 to be guided and vibrate towards the depth direction of the workpiece 50. The spring section 220 allows for faster recovery speed based on the vibration. That is, the elastic hinge section 220 can fix both sides of the cutting blade 210, thereby allowing the cutting blade 210 to vibrate towards the depth direction of the workpiece surface. In this case, using the cutting section 200 of the first embodiment, the surface of the workpiece 50 can be processed as shown... Figure 6 As shown.

[0046] Hereinafter, in the vibratory cutting apparatus for fabricating fine patterns according to the second embodiment of the present invention, an embodiment of the structure in which the cutting blade 410 vibrates in the length direction of the workpiece 50 and cuts the workpiece 50 is described. Therefore, the structure overlapping with the first embodiment is referred to in the description of the first embodiment.

[0047] Reference Figure 7 The cutting blade 410 includes a protrusion 411 that protrudes from the other side of the cutting blade 410. Furthermore, the elastic hinge portion 420 is connected to both sides of the protrusion 411, and the spring portion 430 is provided on the opposite side of the protrusion 411.

[0048] As an example, refer to Figure 8In part (a), a spring portion 430a in the form of a leaf spring is connected to the machining apparatus 100 from one side of the cutting blade 410 in a manner perpendicular to the side of the cutting blade 410. Furthermore, an elastic hinge portion 420a is connected to the machining apparatus 100 from both sides of the protrusion 411. The elastic hinge portion 420a can also be additionally provided at the lower end of the cutting blade 410. Moreover, the oscillating portion 300 is connected to the end of the protrusion 411 and vibrates toward the side of the cutting blade 410.

[0049] Moreover, refer to Figure 8 In part (b), a spring portion 430b in the form of a leaf spring is connected to the machining apparatus 100 from both sides of the protrusion 411. Furthermore, an elastic hinge portion 420b is connected to the machining apparatus 100 from both sides of the protrusion 411. The elastic hinge portion 420b can be additionally provided at the lower end of the cutting blade 410. Moreover, the oscillating portion 300 is connected to the end of the protrusion 411 and vibrates toward the side of the cutting blade 410.

[0050] Moreover, refer to Figure 8 In part (c), a spring portion 430c, in the form of a wire spring, is connected to the end of the protrusion 411 in a manner that surrounds the oscillating portion 300. Furthermore, the elastic hinge portion 420c is connected to the machining apparatus 100 from both sides of the protrusion 411. The elastic hinge portion 420c can also be additionally provided at the lower end of the cutting blade 410. Moreover, the oscillating portion 300 is connected to the end of the protrusion 411 and vibrates toward the side of the cutting blade 410.

[0051] That is, according to Figure 8 The structure of the cutting section 400 and the vibration section 300 shown above guides the vibration direction of the cutting blade 210 to vibrate left and right, thereby allowing it to vibrate along the length of the workpiece 50. That is, the elastic hinge section 420 can fix the lower end and one side of the cutting blade 210, thereby allowing the cutting blade 210 to vibrate along the length of the workpiece 50. In this case, with the cutting section 400 of the second embodiment, the surface of the workpiece 50 can be processed as shown... Figure 9 As shown.

[0052] Hereinafter, in the vibratory cutting apparatus for fabricating fine patterns according to the third embodiment of the present invention, an embodiment of the structure of the cutting portion 500 and the oscillating portion 300 for cutting and machining the workpiece 50 by vibrating the cutting blade 510 along the trajectory of the oscillator motion will be described. Therefore, the structure overlapping with the first embodiment will be described in the description of the first embodiment.

[0053] Reference Figure 10The aforementioned elastic hinge portion 520 is connected to one side of the cutting blade 510. Furthermore, the aforementioned spring portion 530 is disposed on the opposite side of the elastic hinge portion 520, connected to the side of the cutting blade 520 below or above the elastic hinge portion 520. Thus, the oscillating portion 300 is connected to the side of the cutting blade 510 and generates vibration, while the elastic hinge portion 520 fixes one side of the cutting blade 510, thereby causing the cutting blade 510 to vibrate along the trajectory of the oscillator.

[0054] As an example, refer to Figure 11 In part (a), a spring portion 530a in the form of a leaf spring is connected to the machining apparatus 100 from one lower side of the cutting blade 510. Furthermore, a vibration portion 300 is provided on the other side of the cutting blade 510, opposite to the spring portion 530a. Moreover, an elastic hinge portion 520a is provided on the upper part of the vibration portion 300.

[0055] Moreover, refer to Figure 11 In part (b), the aforementioned oscillating part 300 is connected to one side of the lower portion of the aforementioned cutting blade 510. Furthermore, a spring part 530b, in the form of a wire spring, is connected to the aforementioned cutting blade 510 in a manner that surrounds the aforementioned oscillating part 300. Moreover, the aforementioned elastic hinge part 520a is provided on the upper portion of the aforementioned oscillating part 300.

[0056] That is, according to Figure 11 The structure of the cutting part 500 and the oscillation part 300 shown above allows the cutting blade 510 to be fixed at its center via the elastic hinge part 520 if the oscillation part 300 vibrates, so that the tip of the cutting blade 510 can vibrate along the trajectory of the oscillator.

[0057] Hereinafter, in the vibratory cutting apparatus for fabricating fine patterns according to the fourth embodiment of the present invention, an embodiment of the structure of the cutting part 600 and the oscillation part 300 is described, in which the cutting blade 610 vibrates in a combined manner in the x-axis and y-axis directions, thereby enabling the surface of the workpiece 50 to be processed in various forms such as Lissajous curves and random waveforms according to the waveform. Therefore, the structure overlapping with the first embodiment is described in the first embodiment.

[0058] The aforementioned elastic hinge portion 620 can fix the two sides and the lower end of the aforementioned cutting blade 610, thereby allowing the aforementioned cutting blade 610 to vibrate along a trajectory such as a Lissajous curve and a random waveform through a composite vibration based on cross-axis vibration.

[0059] Reference Figure 12The cutting blade 610 includes a pair of protrusions 611 extending from both sides of the cutting blade 610. Furthermore, the elastic hinge portion 620 includes: a pair of first side hinges 621, respectively disposed at both ends of the protrusions 611; a first fixing member 622 connected to the first side hinges 621; a pair of second side hinges 623, respectively disposed at the upper and lower ends of the first fixing member 622; a first lower end hinge 624 disposed at the lower end of the cutting blade 610; a second fixing member 625 connected to the first lower end hinge 624; and a pair of second lower end hinges 626, respectively disposed on both sides of the second fixing member 625. The spring portion 630 includes: an x-axis spring 631 connected to the first side hinges 621 and vertically disposed to the cutting blade 610; and a y-axis spring 632 connected to the first side hinges 621 and horizontally disposed to the cutting blade 610.

[0060] As an example, refer to Figure 13 In part (a), the x-axis spring 631a is built into the inner side of the machining device 100 to support the first side hinge 621a. An x-axis oscillation section 300a is provided on one side of the first fixing member 622. A second side hinge 623a is provided at the upper and lower ends of the first fixing member 622. A y-axis spring 632a is provided on the first side hinge 621a in a direction horizontal to the cutting blade 610. A y-axis oscillation section 300b is provided at the lower end of the second fixing member 625. Second lower end hinges 626a are provided on both sides of the second fixing member 625.

[0061] Furthermore, referring to Figure 13 In part (b), the x-axis spring 631b is built into the inner side of the machining device 100 to support the first side hinge 621b. An x-axis oscillation section 300a is provided on one side of the first fixing member 622. Second side hinges 623b are provided at the upper and lower ends of the first fixing member 622. The y-axis spring 632 is connected to one side of the cutting blade 610 at the upper part of the first side hinge 621b, providing elastic force in the vertical direction of the cutting blade 610. A y-axis oscillation section 300b is provided at the lower end of the second fixing member 625. Second lower end hinges 626b are provided on both sides of the second fixing member 625.

[0062] Moreover, refer to Figure 13In part (c), the x-axis spring 631c is built into the inner side of the machining device 100 to support the first side hinge 621c. An x-axis oscillation portion 300a is provided on one side of the first fixing member 622. A second side hinge 623c is provided at the upper and lower ends of the first fixing member 622. The y-axis spring 632 surrounds the y-axis oscillation portion 300b and provides elastic force in the vertical direction of the cutting blade 610. A y-axis oscillation portion 300b is provided at the lower end of the second fixing member 625. A second lower end hinge 626c is provided on both sides of the second fixing member 625.

[0063] That is, if the x-axis oscillation section 300a vibrates, the cutting blade 610 can vibrate along the length of the workpiece 50. Furthermore, if the y-axis oscillation section 300b vibrates, the cutting blade 610 can vibrate along the depth of the workpiece 50.

[0064] Therefore, based on the vibration patterns of the x-axis oscillation section 300a and the y-axis oscillation section 300b, the cutting section 600 vibrates with various waveforms, thereby enabling the machining of various patterns on the workpiece 50. In this case, using the cutting section 600 of the fourth embodiment, the surface of the workpiece 50 can be machined into the following shapes: Figure 14 As shown.

[0065] Therefore, according to the present invention, the present invention has the following effect: it can accurately perform micro-pattern processing on the surface of a workpiece.

[0066] Furthermore, the present invention has the following effect: it can stably process patterns of various forms, such as Lissajous curves and random waveforms, on the surface of the workpiece through a composite vibration based on two-dimensional vibration and cross-axis vibration.

[0067] Furthermore, the present invention has the following effect: it has a spring portion that applies elastic force in a manner corresponding to the vibration direction, so that the displacement of the cutting blade is quickly restored, thereby enabling high-speed surface machining.

[0068] The embodiments described above are illustrative in all respects and are not intended to limit the invention. The scope of the invention is presented by the scope of the claims, and not by the detailed description above. All modifications or variations derived from the meaning, scope and equivalent concepts of the scope of the claims are within the scope of the invention.

[0069] Explanation of reference numerals in the attached figures

[0070] 50: Machining workpieces

[0071] 100: Processing equipment

[0072] 200: Cutting section

[0073] 210: Cutting insert

[0074] 220, 220a, 220b, 220c: Flexible hinge section

[0075] 230, 230a, 230b, 230c: Spring section

[0076] 300, 300a, 300b: Oscillation Zone

[0077] 400: Cutting section

[0078] 410: Cutting inserts

[0079] 411: Protrusion

[0080] 420, 420a, 420b, 420c: Flexible hinge section

[0081] 430, 430a, 430b, 430c: Spring section

[0082] 500: Cutting section

[0083] 510: Cutting insert

[0084] 511: Protrusion

[0085] 520, 520a, 520b: Flexible hinge section

[0086] 530, 530a, 530b: Spring section

[0087] 600: Cutting section

[0088] 610: Cutting blade

[0089] 611: Protrusion

[0090] 620: Flexible hinge section

[0091] 621: First side face hinge

[0092] 622: First fixed component

[0093] 623: Second side face hinge

[0094] 624: First lower end hinge

[0095] 625: Second fixing component

[0096] 626: Second lower end hinge

[0097] 630: Spring section

[0098] 631: x-axis spring

[0099] 632: Y-axis spring

Claims

1. A vibration cutting device for micro patterning, comprising: a cutting portion capable of processing a surface of a workpiece; and a vibration portion connected to the cutting portion for generating vibration, wherein the cutting portion includes: a cutting blade having a tip portion provided at one end portion thereof in a manner capable of cutting the workpiece, and capable of being vibrated by the vibration portion; an elastic hinge portion for coupling the cutting blade; and a spring portion connected to lower end portions of both sides of the cutting blade, wherein the cutting portion is vibrated by the vibration portion to perform vibration-based pattern processing on the surface of the workpiece, wherein the spring portion is in the form of a leaf spring capable of applying an elastic force in one direction, and applies an elastic force corresponding to the vibration of the cutting blade, whereby a recovery speed of the cutting blade is made faster, wherein both sides of the elastic hinge portion are recessed, and the elastic hinge portion is disposed at a lower portion of the spring portion, the elastic hinge portion being connected to both side surfaces of the cutting blade to guide a vibration direction of the cutting blade, and wherein the vibration portion is connected to a lower end portion of the cutting blade and vibrates the cutting blade in a depth direction of the workpiece.

2. The vibration cutting device according to claim 1, wherein the cutting blade is formed in a plate shape, and the tip portion is formed in a pointed shape.

3. The vibration cutting device according to claim 1, wherein the spring portion is formed in a plate shape, and the elastic hinge portion is formed in a plate shape.

4. The vibration cutting device according to claim 1, wherein the spring portion is formed in a plate shape, and the elastic hinge portion is formed in a plate shape.

5. The vibration cutting device according to claim 1, wherein the spring portion is formed in a plate shape, and the elastic hinge portion is formed in a plate shape.

6. The vibration cutting device according to claim 1, wherein the spring portion is formed in a plate shape, and the elastic hinge portion is formed in a plate shape.

7. The vibration cutting device according to claim 1, wherein the spring portion is formed in a plate shape, and the elastic hinge portion is formed in a plate shape.

8. The vibration cutting device according to claim 1, wherein the spring portion is formed in a plate shape, and the elastic hinge portion is formed in a plate shape.

9. The vibration cutting device according to claim 1, wherein the spring portion is formed in a plate shape, and the elastic hinge portion is formed in a plate shape.

10. The vibration cutting device according to claim 1, wherein the spring portion is formed in a plate shape, and the elastic hinge portion is formed in a plate shape. ​ ​

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