Optical storage method and apparatus based on a high-speed recording system using a rotating mirror.

By combining a high-speed recording system based on a rotating mirror with a high-speed digital output card, the shortcomings of existing optical storage technology in terms of efficiency and accuracy in recording three-dimensional volumetric storage data are solved, achieving efficient recording of three-dimensional volumetric storage data and improving the capacity and speed of optical storage.

CN116564361BActive Publication Date: 2026-05-26ZHEJIANG LAB +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
ZHEJIANG LAB
Filing Date
2023-03-13
Publication Date
2026-05-26

AI Technical Summary

Technical Problem

Existing optical storage technologies cannot keep pace with the rapid development of information science and technology in terms of storage density and data recording efficiency, especially in achieving rapid three-dimensional volumetric data recording.

Method used

A high-speed recording system based on a rotating mirror is adopted, which combines a high-speed digital output card and an objective lens. Through multiple encoding and encoding adjustments, and by utilizing the rotation of the rotating mirror and the continuous movement of the air bearing displacement stage, three-dimensional volumetric storage data is recorded.

Benefits of technology

It improves the efficiency and recording accuracy of optical storage, enables continuous recording of multiple layers of data, and enhances the capacity and speed of optical storage.

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Abstract

This invention discloses an optical storage method based on a high-speed recording system using a rotating mirror. The method, implemented using a high-speed recording system, includes: 1. Encoding the data to be stored, including data information and recording coordinates, to obtain a corresponding binary code; 2. Adjusting the binary code to obtain a storage code; 3. Calibrating a high-speed digital output card and determining the recording substrate surface; 4. Generating corresponding light intensity waveform data based on the storage code and storing it in the calibrated high-speed digital output card; 5. Calibrating the optical spherical aberration between the objective lens and the recording substrate surface, and controlling the recording laser to perform recording operations in the y-axis direction; 6. Adjusting the focal length offset of the objective lens and repeating step 5 until all storage codes in the z-axis direction are recorded, obtaining three-dimensional volumetric storage data. This invention also provides an optical storage device. The method provided by this invention solves the problem of excessively long data storage time in the prior art, improving the success rate and accuracy of recording.
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Description

Technical Field

[0001] This invention belongs to the field of optical storage technology, and particularly relates to an optical storage method and apparatus based on a high-speed recording system with rotating mirrors. Background Technology

[0002] Optical storage technology utilizes laser irradiation of a medium. Through the interaction between the laser and the medium, physical or chemical changes occur in the medium, thereby storing the corresponding information. Its basic principle is that when the information-carrying medium is exposed to laser radiation, certain properties of the medium undergo physical or chemical changes, and different changes in the medium's properties correspond to different stored information.

[0003] Optical storage has the following characteristics: 1. Large storage capacity; 2. Non-contact reading and writing, which prevents wear and tear, improving reliability and lifespan. Furthermore, information recorded on the disc is not lost due to frequent access; 3. A transparent protective layer is typically applied to the storage medium, minimizing the impact of airborne impurities and dust on the recorded information. However, optical heads, in terms of both size and weight, are currently incomparable to magnetic heads, significantly impacting recording speed. With the rapid development of information technology, the demand for storing large amounts of information is increasing rapidly. However, current information storage development remains relatively weak; the storage density and data recording efficiency achieved by optical storage are far behind the pace of information technology advancements. To improve storage capacity and recording speed, optical storage is evolving from longer wavelengths to shorter wavelengths, from planar to three-dimensional storage, from far-field to near-field, from thermal ablation to photon excitation, and from point-to-point storage to parallel high-speed storage.

[0004] Patent document CN114415481A discloses a writing method and apparatus for a laser direct writing system based on a rotating mirror. The method constructs a fitting relationship between optical power and the input voltage of an acousto-optic modulator; obtains the optical power distribution within the effective area of ​​the rotating mirror scanning; determines the single-stroke writing field of view based on a predetermined writing optical power and the optical power distribution; segments the file to be written according to the single-stroke writing field of view to obtain at least one sub-file; performs grayscale compensation correction on the sub-file to obtain a writing data file; performs coordinate transformation on the initial row position coordinates of each writing data file according to the deflection angle of the writing direction; and performs writing using a laser direct writing system based on a rotating mirror according to the transformed initial row position coordinates and the fitting relationship. This method is used for planar data writing, but how to achieve rapid three-dimensional volumetric data writing is not mentioned in the specification.

[0005] Patent CN115327867A discloses a high-speed, high-precision aligned laser direct-write lithography method and apparatus. This method uses a synchronous motion algorithm for a displacement stage and a rotating mirror. First, a laser beam is generated based on a laser, and the laser intensity is high-speed modulated using an electro-optic / acousto-optic modulator. A high-speed modulation signal is generated and controlled by an arbitrary waveform generator. Then, the displacement stage is activated and moves along a preset path, generating a trigger signal when it passes a preset trigger position. The trigger signal is then acquired by a data acquisition card. After triggering, the rotating mirror triggers the laser. The starting point signal of the rotating mirror scan is obtained based on the laser's position, which is used to activate the arbitrary waveform generator to output a high-speed modulation signal. Finally, the displacement stage moves at a constant speed to the next trigger position, generating a trigger signal, until the displacement stage completes its preset path movement, thus completing the writing process. This method addresses the accuracy issue in laser writing during laser direct-write lithography. Summary of the Invention

[0006] To address the aforementioned problems, this invention provides an optical storage method based on a high-speed recording system using a rotating mirror, which can effectively improve recording accuracy and efficiency.

[0007] An optical storage method based on a high-speed recording system with a rotating mirror, the high-speed recording system including a rotating mirror, an objective lens, and controlling the intensity of the recording laser through an external high-speed digital output card;

[0008] The optical storage method includes the following steps:

[0009] 1. The encoding includes the data information and the coordinates to be recorded, which are to be stored to obtain the binary code of the corresponding laser trigger action.

[0010] 2. Adjust the binary encoding based on the preset information spacing to obtain the storage encoding, wherein the information spacing is the distance between each operator in the binary encoding;

[0011] III. Calibrate the high-speed digital output card and determine the recording substrate surface;

[0012] Fourth, generate the corresponding light intensity waveform data according to the storage code and store it in the calibrated high-speed digital output card;

[0013] 5. Based on the spherical aberration calibration phase diagram, calibrate the optical spherical aberration between the objective lens and the recording substrate in the high-speed recording system, and control the recording laser to perform the recording operation in the y-axis direction based on the light intensity waveform data output by the high-speed digital output card;

[0014] 6. After completing one recording operation in the y-axis direction, adjust the objective lens focal length offset according to the recording coordinates, and repeat step 5 until all storage codes in the z-axis direction are recorded, and obtain the three-dimensional volume storage data corresponding to the data to be stored.

[0015] Specifically, the high-speed etching system includes a light source assembly for providing laser light, a scanning assembly consisting of a scanning lens, a field lens, and a dichroic mirror, and an etching platform for fixing the photoresist sample.

[0016] The laser emitted by the light source component is reflected by the rotating mirror into a scanning laser along the y-axis. This laser is then projected onto the scanning component, where it is focused by a scanning lens and a field lens onto a dichroic mirror. The dichroic mirror refracts the focused laser into the objective lens, which then projects the laser onto the photoresist sample on the writing platform. During the writing process, the intensity of the laser emitted by the light source component is adjusted by the high-speed digital output card.

[0017] The method provided by this invention involves encoding the data to be stored into two-dimensional binary data multiple times, and then, while the rotating mirror is rotating, the air bearing displacement stage moves continuously in a direction perpendicular to the scanning direction of the rotating mirror. The high-speed digital output card outputs the encoded binary data at high speed until the entire plane is engraved. After changing the offset of the objective lens focal length and recalibrating the spherical aberration, the above process is repeated to obtain three-dimensional volumetric storage data.

[0018] Specifically, the high-speed recording system also includes a recording observation component, comprising: a camera, an illumination source, an aperture, a condenser lens, a beam splitter, and an imaging lens;

[0019] The illumination light emitted by the illumination source is projected onto the condenser lens through the aperture and converted into parallel light. The parallel light is then reflected by the beam splitter and focused into the entrance pupil of the objective lens. The camera then obtains an image of the photoresist sample within the field of view of the objective lens.

[0020] Specifically, the objective lens is an air objective lens.

[0021] Specifically, the writing platform includes an air bearing displacement stage that can move along the y-axis and a piezoelectric displacement stage mounted on the air bearing displacement stage that can be adjusted in the z-axis direction, and the photoresist sample is placed on the piezoelectric displacement stage.

[0022] Preferably, the air bearing displacement stage is provided with an extended track on the y-axis and adopts a stepped motion mode. The stepped motion mode includes a uniform acceleration stage when not entering the recording area, a uniform speed movement stage when in the recording area, and a uniform deceleration stage when leaving the recording area. This prevents the air bearing displacement stage from being damaged due to long-term sudden stops, and also avoids changes in the positioning of the photoresist sample placed on the piezoelectric displacement stage.

[0023] Preferably, the speed of the air bearing displacement stage during the uniform speed phase is determined by the rotation frequency of the rotating mirror and the preset information gap.

[0024] Specifically, the velocity calculation formula for the air bearing displacement stage during the uniform velocity phase is as follows:

[0025] v = 1000 × d ÷ (1 ÷ f)

[0026] In the formula, d represents the preset information spacing in μm, f represents the mirror rotation frequency in Hz, and v represents the moving speed of the displacement stage in mm / s.

[0027] Specifically, control commands for laser recording are generated by reverse engineering the storage code. Whether it is a C, D, or DVD optical disc, the way they store data is the same as that of a hard disk. The data is represented by binary sequences. When recording information on such optical discs, the encoded binary data can be recorded onto the reflective disc by laser. The small pits on the optical disc represent binary "0", while blank spaces represent binary "1". For laser recording, "1" means that the laser is on and writing is off, and "0" means that the laser is off and writing is off.

[0028] Preferably, in step 2, the adjustment of the difference between the information spacing based on binary encoding and the preset information spacing is processed:

[0029] When the spacing between directly recorded information is greater than the preset spacing, multiple consecutive high-level signals are set to extend the laser's on-time when recording a single data information, thereby reducing the spacing.

[0030] When the spacing between directly recorded information is less than the preset spacing, the laser off time is extended between two consecutive data information to increase the spacing.

[0031] Specifically, the calibration process for the high-speed digital output card in step three is as follows:

[0032] After adjusting the rotating mirror to the factory calibration frequency, the rotating mirror outputs a grating of a preset recording length. The grating is then divided into pixels with a preset segmentation precision to obtain a set of template lines composed of multiple pixels.

[0033] Based on the multiple pixels, the output frequency of the high-speed digital output card is adjusted until a line of the same length as the template line is obtained, and then the initialization is completed.

[0034] Preferably, the high-speed digital output card detects the frequency waveform of the rotating mirror and outputs light intensity waveform data according to a preset delay time when the first rising edge of the frequency occurs, thereby improving the feedback speed of the recording action.

[0035] The present invention also provides an optical storage device, including a memory, one or more processors and a high-speed recording system. The memory stores executable code, and the one or more processors execute the executable code to implement the above-mentioned optical storage method. The specific steps are as follows: acquiring data to be stored, processing the data to be stored and the high-speed recording system using the optical storage method, and then recording the data to be stored using the high-speed recording system to obtain three-dimensional volume storage data corresponding to the data to be stored.

[0036] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0037] This invention utilizes the high-speed rotation of a rotating mirror and a high-speed digital output card to output preset storage codes, thereby greatly improving optical storage efficiency.

[0038] At the same time, there is no need to adjust the position of the rotating mirror; only the offset between the writing platform and the objective lens needs to be adjusted, thereby achieving the purpose of continuously writing multiple layers of data. Attached Figure Description

[0039] Figure 1 This is a schematic diagram of the structure of a high-speed recording system provided in this embodiment;

[0040] Figure 2 A flowchart illustrating the optical storage method of the high-speed laser etching system based on rotating mirror provided in this embodiment;

[0041] Figure 3 This is a schematic diagram of the letter "W" after secondary encoding provided in this embodiment;

[0042] Figure 4 This is a schematic diagram illustrating the relationship between the rotating mirror waveform during the recording stage and the recording data from the high-speed digital output card, as provided in this embodiment.

[0043] Figure 5 This embodiment provides a schematic diagram showing the relationship between the rotating mirror waveform and the air bearing displacement stage motion during the recording stage.

[0044] In the diagram, 1. 780nm femtosecond laser; 2. 780nm half-wave plate; 3. First reflecting mirror; 4. Second reflecting mirror; 5-6. Diffraction grating; 7. Roof reflecting mirror; 8. Reflecting mirror; 9. First 4f beam expander lens; 10. Second 4f beam expander lens; 11. Third reflecting mirror; 12. Fourth reflecting mirror; 13. 780nm spatial light modulator; 14. Reflecting mirror; 15. Lens; 16. 780nm multi-channel acousto-optic modulator. 17. Lens; 18. Dichroic mirror; 19. Image rotator; 20. Mirror; 21. Rotating mirror; 22. Scanning lens; 23. Field lens; 24. Dichroic mirror; 25. High NA objective lens; 26. Photoresist sample; 27. Piezoelectric displacement stage; 28. Air bearing displacement stage; 29. ​​Imaging lens; 30. Proportional beam splitter; 31. Condenser lens; 32. Aperture; 33. Illumination source; 34. Camera; 35. High-speed digital output card. Detailed Implementation

[0045] To better illustrate the objectives and specific implementation methods of this invention, the present invention will be further described in detail below with reference to embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the invention. Modifications or equivalent substitutions made by those skilled in the art based on their understanding of the technical solutions of this invention, without departing from the principles of the technical solutions of this invention, should be covered within the protection scope of this invention.

[0046] like Figure 1 As shown, a high-speed etching system includes a light source assembly for providing laser light, a rotating mirror 21, a scanning assembly consisting of a scanning lens 22, a field lens 23 and a dichroic mirror 24, a high-NA objective lens 25 with adjustable focal length offset, an etching platform (including a piezoelectric displacement stage 27 and an air bearing displacement stage 28) for fixing a photoresist sample 26, and an etching observation assembly.

[0047] Furthermore, the working process of this high-speed burning system is as follows:

[0048] A 780nm femtosecond laser 1 (writing laser) generates a 780nm femtosecond laser beam, which is polarized by a 780nm half-wave plate 2. After the laser direction is adjusted by the first reflector 3 and the second reflector 4, it passes through diffraction gratings 5-6, and then the beam is heightened by the roof reflector 7 before returning to the diffraction gratings 6-5. The reflector 3 is a D-type reflector. The beam returning from the diffraction grating 5 is reflected by the reflector 4, propagates above the reflector 3 (i.e., passes over the reflector 3), and is reflected by the reflector 8 into the beam expanding lens group 9-10, completing the beam expansion. The beam direction is then adjusted by the third reflector 11 and the fourth reflector 12 before it is incident on the 780nm spatial light modulator 13. A hologram is loaded onto the spatial light modulator 13 to modulate the single beam into multiple beams. After reflection by the reflector 14, the hologram is subjected to a Fourier transform by the lens 15, generating multiple focal points at the focal plane of the lens 15.

[0049] A 780nm multi-channel acousto-optic modulator 16 is placed at the focal plane of lens 15, with each channel passing through a focal point to achieve independent modulation of each beam of light. The diverging light is then re-collimated by lens 17, passes through dichroic mirror 18, and enters image rotator 19.

[0050] The 780nm femtosecond laser beam, after being modulated by the image rotator 19, is reflected by the mirror 20 and enters the rotating mirror 21. The multiple beams, after being reflected by the rotating mirror 21, pass through the scanning lens 22 and the field lens 23, and are then reflected by the dichroic mirror 24 before entering the high-NA objective lens 25 and being focused onto the photoresist sample 26. The piezoelectric displacement stage 27 and the air bearing displacement stage 28, under program control, drive the photoresist sample 26 to perform scanning motion.

[0051] The writing observation assembly: The illumination source 33 uses an LED lamp. The emitted illumination light passes through the aperture 32 and is converted into parallel light by the condenser lens 31. After being reflected by the proportional beam splitter 30, it passes sequentially through the imaging lens 29 and the dichroic mirror 24, and is focused at the entrance pupil of the high-NA objective lens 25. In addition, the image of the photoresist sample 26 is sequentially imaged through the high-NA objective lens 25, the dichroic mirror 24, the imaging lens 29, and the proportional beam splitter 30 and projected onto the camera 34 for writing observation.

[0052] like Figure 2 As shown, an optical storage method is used to record and store data information based on the high-speed recording system described in the above embodiments.

[0053] I. Define the small pits etched by the laser as representing binary "0", and the blank areas as representing binary "1";

[0054] For laser recording, "1" indicates that the laser is turned on for writing, and "0" indicates that the laser is turned off and no writing is required. The information to be recorded is converted into a binary data sequence of actual data records.

[0055] 2. Subdivide the “1” obtained in step 1 into n “1” + m “0”, and subdivide the “0” into n + m “0”: When n≥1, we can assume n=1 and m=0. Then, according to these parameters, we actually record the information and compare it with the preset information spacing to adjust the binary sequence in step 1 to obtain the final storage code.

[0056] If the actual information spacing obtained by writing is greater than the set information spacing, the value of n can be increased, that is, multiple consecutive high levels are used to encode one piece of information; if the actual information spacing obtained by writing is less than the set information spacing, the value of m can be increased, that is, the laser off time is increased between two consecutive pieces of information, thereby increasing the spacing.

[0057] like Figure 3 The image shown is the final storage encoding diagram obtained when the data to be stored is the letter "W".

[0058] 3. Rotate the mirror at the factory-calibrated frequency of 6000Hz. Assuming a 100µm long grating needs to be written, divide the grating into 1000 points, each pixel being 100nm. Output these 1000 points using a high-speed digital output card. Continuously change the output frequency of the high-speed digital output card and measure the length of the written lines until the line length reaches 100µm. The output frequency at this point is the output frequency at the mirror's 6000Hz rotation speed.

[0059] The Z-axis displacement stage is raised to half of its maximum value, i.e., the middle position, and then the substrate surface is probed by finely adjusting the height of the objective lens.

[0060] Fourth, generate corresponding light intensity waveform data based on the stored encoded binary data, and store the light intensity waveform data in a calibrated high-speed digital output card.

[0061] like Figure 4 The figure shows the relationship between the light intensity waveform corresponding to the storage code during the burning operation and the output action of the high-speed digital output card.

[0062] 5. Turn on the spatial light modulator, load the spherical aberration calibration phase, and calibrate the optical spherical aberration caused by air between the objective lens and the substrate surface in step 4. The calibration process is a well-known technique in the field, so it will not be described in detail. At the same time, start the rotating mirror and start the air bearing displacement stage at a certain offset from the actual writing position. When the air bearing displacement stage moves to the actual writing position, let the high-speed digital output card output the pre-stored light intensity waveform data to complete the single-layer writing work.

[0063] 6. After completing the single-layer recording, change the offset of the objective lens focal length and repeat step 5 until all storage codes in the z-direction are recorded, and obtain the three-dimensional volume storage data corresponding to the data to be stored.

[0064] like Figure 5 As shown, the displacement stage used in this system is an air bearing displacement stage provided by PI, with a default speed unit of mm / s. The system is set to output one cycle of pulses for every one revolution of the rotating mirror (i.e., scanning one line), which takes 1000 ÷ f (in seconds). For every line scanned by the rotating mirror, the displacement stage moves one line, so the displacement stage's moving speed is d ÷ (1 ÷ f) (in μm / s). Therefore, the speed of the air bearing displacement stage during the horizontal uniform speed phase is as follows:

[0065] v = 1000 × d ÷ (1 ÷ f)

[0066] In the formula, d represents the information spacing in μm, f represents the mirror rotation frequency in Hz, and v represents the moving speed of the displacement stage in mm / s.

[0067] Furthermore, if the mirror rotation frequency has already been calibrated at 6000Hz, changing the mirror rotation frequency to another frequency will ensure that the high-speed digital output card's frequency matches the mirror's frequency at 6000Hz. Only the planar displacement stage's movement speed needs to be recalculated; the specific formula is as follows:

[0068] v new =v 6000 ×f x ÷6000

[0069] In the formula, v new This represents the speed at which the displacement stage moves corresponding to the set mirror rotation frequency, v. 6000 f represents the moving speed of the displacement stage at a rotating mirror frequency of 6000Hz. x This refers to the mirror rotation frequency used during actual writing, measured in Hz.

[0070] The magnification of the air objective lens can also be changed to a different magnification of the same model. If the mirror rotation frequency has already been calibrated, there is no need to recalibrate the frequency. Simply recalculate based on the already calibrated frequency, using the following formula:

[0071] f new =f o ×NA O ÷NA X

[0072] In the formula, f new This indicates the frequency of the high-speed digital output card after switching the objective lens magnification, f. o Indicates the calibrated frequency of the high-speed digital output card, NA. ONA indicates the magnification of the original objective lens. X To switch the magnification of the objective lens, if the new objective lens is of a different model than the one used in the calibration, the high-speed digital output card frequency needs to be recalibrated.

[0073] This embodiment also provides an optical storage device, including a memory, one or more processors, and a high-speed recording system.

[0074] The memory stores executable code for implementing the optical storage method proposed in the above embodiments. The specific steps are as follows: acquiring the data to be stored, processing the data to be stored and the high-speed recording system using the optical storage method, and then recording the data to be stored using the high-speed recording system to obtain the three-dimensional volume storage data corresponding to the data to be stored.

Claims

1. An optical storage method for a high speed writing system based on a rotating mirror, characterized in that, The high-speed recording system includes a rotating mirror, an objective lens, and controls the intensity of the recording laser via an external high-speed digital output card. The optical storage method includes the following steps:

1. The encoding includes the data information and the coordinates to be recorded, which are to be stored to obtain the binary code of the corresponding laser trigger action.

2. Adjust the binary encoding based on the preset information spacing to obtain the storage encoding, wherein the information spacing is the distance between each operator in the binary encoding; III. Calibrate the high-speed digital output card and determine the recording substrate surface; Fourth, generate the corresponding light intensity waveform data according to the storage code and store it in the calibrated high-speed digital output card; 5. Based on the spherical aberration calibration phase diagram, calibrate the optical spherical aberration between the objective lens and the recording substrate in the high-speed recording system, and control the recording laser to perform the recording operation in the y-axis direction based on the light intensity waveform data output by the high-speed digital output card; 6. After completing one recording operation in the y-axis direction, adjust the objective lens focal length offset according to the recording coordinates, and repeat step 5 until all storage codes in the z-axis direction are recorded, and obtain the three-dimensional volume storage data corresponding to the data to be stored.

2. The optical storage method of a high speed writing system based on a rotating mirror as claimed in claim 1, wherein, In step two, the difference between the information spacing directly recorded based on binary encoding and the preset information spacing is processed: When the spacing between directly recorded information is greater than the preset spacing, multiple consecutive high-level signals are set to extend the laser's on-time when recording a single data information. If the spacing between directly recorded information is less than the preset spacing, the laser off time is extended between two consecutive data messages.

3. The optical storage method of claim 1, wherein the method further comprises the step of: The calibration process for the high-speed digital output card in step three is as follows: ​ After adjusting the rotating mirror to the factory calibration frequency, the rotating mirror outputs a grating of a preset recording length. The grating is then divided into pixels with a preset segmentation precision to obtain a set of template lines composed of multiple pixels. Based on the multiple pixels, the output frequency of the high-speed digital output card is adjusted until a line of the same length as the template line is obtained, and then the initialization is completed.

4. The optical storage method of the high-speed recording system based on rotating mirror according to claim 1, characterized in that, The high-speed digital output card detects the frequency waveform of the rotating mirror and outputs light intensity waveform data according to a preset delay time when the first rising edge of the frequency appears.

5. The optical storage method of claim 1, wherein the method further comprises the step of: The high-speed etching system also includes a light source assembly for providing laser light, a scanning assembly consisting of a scanning lens, a field lens and a dichroic mirror, and an etching platform for fixing the photoresist sample. ​ The laser emitted by the light source component is reflected by the rotating mirror into a scanning laser along the y-axis. This laser is then projected onto the scanning component, where it is focused by a scanning lens and a field lens onto a dichroic mirror. The dichroic mirror refracts the focused laser into the objective lens, which then projects the laser onto the photoresist sample on the writing platform. During the writing process, the intensity of the laser emitted by the light source component is adjusted by the high-speed digital output card.

6. The optical storage method of claim 5, wherein the method further comprises the step of: The high-speed recording system is also equipped with recording observation components, including: a camera, an illumination source, an aperture, a condenser lens, a beam splitter and an imaging lens; ​ The illumination light emitted by the illumination source is projected onto the condenser lens through the aperture and converted into parallel light. The parallel light is then reflected by the beam splitter and focused into the entrance pupil of the objective lens. The camera then obtains an image of the photoresist sample within the field of view of the objective lens.

7. The optical storage method of claim 5, wherein the method further comprises the step of: The writing platform includes an air bearing displacement stage that can move along the y-axis and a piezoelectric displacement stage mounted on the air bearing displacement stage that can be adjusted in the z-axis direction. The photoresist sample is placed on the piezoelectric displacement stage. ​ 8. The optical storage method of claim 7, wherein the method further comprises the step of: The air bearing displacement stage has an extended track in the y-axis direction and adopts a stepped motion mode, which includes a uniform acceleration stage when not entering the recording area, a uniform speed movement stage when in the recording area, and a uniform deceleration stage when leaving the recording area. ​ 9. The optical storage method of claim 7, wherein the method further comprises the step of: The speed of the air bearing displacement stage during the uniform speed phase is determined by the rotation frequency of the rotating mirror and the preset information spacing. ​ 10. An optical storage device, characterized by The method includes a memory, one or more processors, and a high-speed recording system. The memory stores executable code, and the one or more processors execute the executable code to implement the optical storage method based on the high-speed recording system of any one of claims 1 to 9. The specific steps are as follows: acquiring data to be stored, processing the data to be stored and the high-speed recording system using the optical storage method, and then recording the data to be stored using the high-speed recording system to obtain three-dimensional volume storage data corresponding to the data to be stored.