Conveyance system

Abstract

A conveyance system (1) includes a first track (10) provided in a first building (100), a second track (20) provided in a second building (200), an aerial conveyance vehicle (40A, 40B), and a relay section (30) for transferring a FOUP (300) between the aerial conveyance vehicle (40A) and the aerial conveyance vehicle (40B). The aerial conveyance vehicle (40A) traveling in a first route section (32a) and the aerial conveyance vehicle (40B) traveling in a second route section (33b) can carry the FOUP (300) to the same storage rack (31), and the aerial conveyance vehicle (40A) traveling in a first return section (32b) and the aerial conveyance vehicle (40B) traveling in a second return section (33a) can carry the FOUP (300) to the same storage rack (31).

Description

Technical Field

[0001] This invention relates to a conveying system. Background Technology

[0002] Patent Document 1 discloses a conveying system comprising: a first track provided in a first building; a second track provided in a second building different from the first building; a first aerial conveyor that travels on the first track to convey and transfer the conveyed items; a second aerial conveyor that travels on the second track to convey and transfer the conveyed items; and a relay unit for relaying the conveyed items transferred from the first aerial conveyor and the second aerial conveyor respectively.

[0003] In the aforementioned transport system, the transported items are moved between the first and second buildings via a relay unit. The relay unit is located between the first and second tracks, and two loading sections for the transported items are provided along the first and second tracks. The first and second aerial transport vehicles travel in opposite directions within the relay unit. Through this structure, the first and second aerial transport vehicles respectively load the transported items onto the relay unit upstream of their respective travel directions and retrieve the transported items from the relay unit downstream of their travel directions.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent Application Publication No. 2012-66933 Summary of the Invention

[0007] In conventional transport systems, there is only one loading station where the first and second aerial transport vehicles can each place the transported item in the relay section. Therefore, if the loading station is already carrying a transported item, it cannot place the transported item. Therefore, it has been considered to arrange multiple loading stations along the extension direction of the tracks between the first and second tracks. However, due to space limitations along the track extension direction, it is sometimes impossible to arrange the required number of loading stations.

[0008] One objective of the present invention is to provide a transport system that can be appropriately configured for use in inter-building transport.

[0009] One aspect of the present invention is a conveying system comprising: a first track provided in a first building; a second track provided in a second building different from the first building; a first aerial transport vehicle that travels on the first track to transport and transfer the transported items; a second aerial transport vehicle that travels on the second track to transport and transfer the transported items; and a relay unit for transferring the transported items between the first aerial transport vehicle and the second aerial transport vehicle, the relay unit comprising: a plurality of storage units that temporarily store the transported items transferred from each of the first and second aerial transport vehicles; the first transport vehicle... The system includes a first transfer track, which extends from the first track, for a first aerial transport vehicle to place the transported item in the storage area and retrieve the transported item from the storage area; and a second transfer track, which extends from the second track, for a second aerial transport vehicle to place the transported item in the storage area and retrieve the transported item from the storage area. The first transfer track has a first outgoing route extending in a straight line, a first turning-back route continuing from the first outgoing route, and a first return route continuing from the first turning-back route and extending in a straight line. The second transfer track has a second outgoing route extending in a straight line. The first outbound route, the second return route, and the second return route, which continue from the second outbound route and extend in a straight line, overlap when viewed from the vertical direction. The first return route and the second outbound route also overlap when viewed from the vertical direction. The direction of travel of the first aerial transport vehicle traveling on the first outbound route is the same as the direction of travel of the second aerial transport vehicle traveling on the second return route. Furthermore, the direction of travel of the first aerial transport vehicle traveling on the first return route is the same as the direction of travel of the second aerial transport vehicle traveling on the second outbound route. Therefore, multiple storage units are located below the first destination section, the first return section, the second destination section, and the second return section, respectively, and are located on both sides of the first destination section and the second return section when viewed from the vertical direction. The first aerial transport vehicle traveling on the first destination section and the second aerial transport vehicle traveling on the second return section can transfer the transported items to the same storage unit, and the first aerial transport vehicle traveling on the first return section and the second aerial transport vehicle traveling on the second destination section can transfer the transported items to the same storage unit.

[0010] In a conveying system according to one aspect of the present invention, the first destination section and the second return section overlap when viewed from the vertical direction, and the first return section and the second destination section overlap when viewed from the vertical direction. Multiple storage units are respectively provided on both sides of the first destination section and the second return section when viewed from the vertical direction. That is, the two tracks overlap when viewed from the vertical direction, therefore, storage units can be arranged on both sides of the tracks rather than on one side. Therefore, in the conveying system, even when there is limited space to arrange storage units in the extending direction of the tracks (the first destination section, the second destination section, the first return section, and the second return section), the required number of storage units can be appropriately arranged using space in the direction orthogonal to the tracks.

[0011] In one embodiment, the relay unit may be located in any one of the first building, the second building, and the intermediate section between the first and second buildings. In this structure, the transfer of transported items can be carried out between the first aerial transport vehicle and the aerial transport vehicle in any one of the first building, the second building, and the intermediate section between the first and second buildings.

[0012] In one embodiment, a first aerial transport vehicle may travel along a first transfer track in the order of a first outbound section, a first return section, and a first return section. In the first outbound section, it places the transported item in the storage unit and retrieves the transported item from the storage unit in the first return section. Similarly, a second aerial transport vehicle travels along a second transfer track in the order of a second outbound section, a second return section, and a second return section. In the second outbound section, it places the transported item in the storage unit and retrieves the transported item from the storage unit in the second return section. In this configuration, the first aerial transport vehicle can place and retrieve the transported item while traveling along the first transfer track, and the second aerial transport vehicle can place and retrieve the transported item while traveling along the second transfer track.

[0013] In one embodiment, the first track may have a first extended track located in the second building. This first extended track continues from the first outgoing section of the first transfer track, branches off from the first turning-back section, and merges with the first return section. The second track may have a second extended track located in the first building. This second extended track continues from the second outgoing section of the second transfer track, branches off from the second turning-back section, and merges with the second return section. The first aerial transport vehicle can transfer items between the first and second buildings, and the second aerial transport vehicle can also transfer items between the first and second buildings. In this structure, for example, when it is impossible to transfer items to the storage area, the aerial transport vehicle can directly transport items to other buildings. Therefore, the efficiency of inter-building transport can be improved in the transport system.

[0014] In one embodiment, the conveying system may include a control device that controls the movement of the first aerial conveyor and the second aerial conveyor. The control device controls the transfer of the items on the first or second transfer track, or controls the transport of the items to or from the first or second building, based on the operating status of the first and second aerial conveyors in the first and second buildings. In this configuration, for example, if the first aerial conveyor in the first building has a high operating rate, the items can be transported to the first building by the second aerial conveyor, eliminating the need for the first aerial conveyor to transport the items to the first transfer track. Therefore, more efficient conveying can be achieved.

[0015] Invention Effects

[0016] According to one aspect of the invention, multiple storage units that can be appropriately configured for use in inter-building transport can be appropriately configured. Attached Figure Description

[0017] Figure 1 This is a diagram showing the conveying system of the first embodiment.

[0018] Figure 2 yes Figure 1 Top view of the first and second transfer tracks of the conveying system shown.

[0019] Figure 3 This is a front view of part of the first and second transfer tracks.

[0020] Figure 4 This is a diagram illustrating the conveying system of the second embodiment.

[0021] Figure 5 yes Figure 4 Top view of the first and second transfer tracks of the conveying system shown. Detailed Implementation

[0022] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that in the description of the drawings, the same or equivalent elements are labeled with the same reference numerals, and repeated descriptions are omitted.

[0023] [First Implementation]

[0024] like Figure 1 As shown, the conveying system 1 is a system for conveying FOUP (foil-on-board unit) 300. The conveying system 1 includes a first track 10, a second track 20, a relay unit 30, an overhead conveyor (first overhead conveyor) 40A, and an overhead conveyor (second overhead conveyor) 40B (see reference). Figure 2 ), and control device 50 (refer to Figure 3 ).

[0025] The transport system 1 is installed, for example, in a semiconductor manufacturing plant equipped with multiple semiconductor processing units (not shown). The transport system 1 is installed in a first building 100 and a second building 200 within the semiconductor manufacturing plant. The first building 100 and the second building 200 are buildings housing semiconductor processing units. In the transport system 1, FOUP 300 is transferred from each of the first building 100 and the second building 200 to the device inlet of the semiconductor processing unit via overhead transport vehicles 40A and 40B.

[0026] The first track 10 is located in the first building 100. The first track 10 is a component that allows the aerial transport vehicle 40A to travel, and it is suspended from the ceiling. In this embodiment, the transport system 1 includes multiple systems (bays). The transport system 1 includes multiple internal bay routes that serve as travel paths within bays; and inter-bay routes that serve as travel paths connecting different bays. The first track 10 includes internal bay tracks 11 arranged in the multiple internal bay routes; and inter-bay tracks 12 arranged in the inter-bay routes. The internal bay tracks 11 are configured for one-way right-turn travel of the aerial transport vehicle 40A. The inter-bay tracks 12 are also configured, similarly to the internal bay tracks 11, for one-way right-turn travel of the aerial transport vehicle 40A. Furthermore, the first track 10 can also be configured for one-way left-turn travel of the aerial transport vehicle 40A.

[0027] The second track 20 is located in the second building 200. The second track 20 is a component that allows the aerial transport vehicle 40B to travel, and it is suspended from the ceiling. The second track 20 includes: an internal zone track 21 configured within a portion of multiple internal zone routes; and an inter-zone track 22 configured between zones. The internal zone track 21 is configured for one-way right-turn traffic of the aerial transport vehicle 40B. The inter-zone track 22 is also configured, similarly to the internal zone track 21, for one-way right-turn traffic of the aerial transport vehicle 40B. Furthermore, the second track 20 can also be configured for one-way left-turn traffic of the aerial transport vehicle 40B.

[0028] like Figure 2 As shown, in the relay unit 30, the FOUP 300 is transferred between the aerial transport vehicle 40A and the aerial transport vehicle 40B. The relay unit 30 is located in the middle section between the first building 100 and the second building 200. The relay unit 30 has a storage rack (storage section) 31, a first transfer track 32, and a second transfer track 33. Figure 2 In the diagram, the first transfer track 32 is shown in dashed lines, and the second transfer track 33 is shown in solid lines.

[0029] The first transfer track 32 allows the aerial transport vehicle 40A to place FOUP 300 on the storage rack 31 and to retrieve FOUP 300 from the storage rack 31. In this embodiment, two first transfer tracks 32 are provided. The first transfer track 32 extends from the first track 10. The first transfer track 32 is connected to the inter-zone track 12.

[0030] like Figure 2 As shown, the first transfer track 32 has a first outbound portion 32a, a first return portion 32b, and a first turnaround portion 32c. The first outbound portion 32a extends in a straight line. In this embodiment, the first outbound portion 32a extends from the side of the first building 100 toward the side of the second building 200. The first outbound portion 32a causes the aerial transport vehicle 40A to travel along a first direction D1. The first direction D1 is the direction in which the aerial transport vehicle 40A moves from the side of the first building 100 toward the side of the second building 200.

[0031] The first loop section 32b extends in a straight line. In this embodiment, the first loop section 32b extends from the side of the first building 100 toward the side of the second building 200. The first loop section 32b is parallel to the first outgoing route section 32a. The first loop section 32b causes the aerial transport vehicle 40A to travel along a second direction D2, which is opposite to the first direction D1. The second direction D2 is the direction in which the aerial transport vehicle 40A moves from the side of the second building 200 toward the side of the first building 100.

[0032] The first reversing portion 32c is connected to the first outgoing portion 32a and the first returning portion 32b. The first reversing portion 32c connects the end of the first outgoing portion 32a on the second building 200 side to the end of the first returning portion 32b on the second building 200 side. The first reversing portion 32c reverses the travel direction of the aerial transport vehicle 40A (changes its direction). In this embodiment, the first reversing portion 32c reverses the travel direction of the aerial transport vehicle 40A from the first direction D1 to the second direction D2. The first reversing portion 32c includes: a straight portion extending orthogonally to the first outgoing portion 32a and the first returning portion 32b; and a curved connecting portion connecting the straight portion to each of the first outgoing portion 32a and the first returning portion 32b. It should be noted that the first reversing portion 32c may also be entirely curved.

[0033] The second transfer track 33 allows the aerial transport vehicle 40B to place FOUP 300 on the storage rack 31 and to retrieve FOUP 300 from the storage rack 31. In this embodiment, two second transfer tracks 33 are provided. The second transfer track 33 extends from the second track 20. The second transfer track 33 is connected to the inter-zone track 22.

[0034] The second transfer track 33 has a second outbound portion 33a, a second return portion 33b, and a second turnaround portion 33. The second outbound portion 33a extends in a straight line. In this embodiment, the second outbound portion 33a extends from the side of the second building 200 toward the side of the first building 100. The second outbound portion 33a causes the aerial transport vehicle 40B to travel along the second direction D2.

[0035] The second loop section 33b extends in a straight line. In this embodiment, the second loop section 33b extends from the side of the second building 200 toward the side of the first building 100. The second loop section 33b is parallel to the second outbound route section 33a. The second loop section 33b enables the aerial transport vehicle 40B to travel along the first direction D1.

[0036] The second turning-back section 33c continues (connects) to the second outgoing section 33a and the second returning section 33b. The second turning-back section 33c connects the end of the second outgoing section 33a on the first building 100 side to the end of the second returning section 33b on the first building 100 side. The second turning-back section 33c reverses the travel direction of the aerial transport vehicle 40B. In this embodiment, the second turning-back section 33c reverses the travel direction of the aerial transport vehicle 40B from the second direction D2 to the first direction D1. The second turning-back section 33c includes: a straight section extending orthogonally to the second outgoing section 33a and the second returning section 33b; and a curved connecting section connecting the straight section to each of the second outgoing section 33a and the second returning section 33b. It should be noted that the second turning-back section 33c may also be entirely curved.

[0037] The first outgoing route portion 32a and the second return route portion 33b overlap when viewed from the vertical direction. The first return route portion 32b and the second outgoing route portion 33a overlap when viewed from the vertical direction. The first transfer track 32 and the second transfer track 33 are configured to form a closed area when viewed from the vertical direction. The first turning-back portion 32c (straight section) of the first transfer track 32 and the second turning-back portion 33c (straight section) of the second transfer track 33 are positioned opposite each other when viewed from the vertical direction.

[0038] like Figure 3 As shown, the first destination portion 32a and the first return portion 32b of the first transfer track 32, and the second destination portion 33a and the second return portion 33b of the second transfer track 33 are arranged at different heights in the vertical direction. The first destination portion 32a and the first return portion 32b of the first transfer track 32 are located below the second destination portion 33a and the second return portion 33b of the second transfer track 33. In other words, the second destination portion 33a and the second return portion 33b of the second transfer track 33 are located above the first destination portion 32a and the first return portion 32b of the first transfer track 32.

[0039] FOUP 300 is placed on storage rack 31. Multiple storage racks 31 support FOUP 300. Storage rack 31 is suspended from the ceiling, for example. Storage rack 31 can be an OHB (Overhead Buffer). An area on storage rack 31 is available for placing FOUP 300. This area of ​​storage rack 31 is a temporary storage area for FOUP 300 to be transferred by overhead transport vehicles 40A, 40B that stop on the first track 10 and the second track 20. Storage rack 31 can be a structure for placing one FOUP 300 or a structure for placing multiple FOUP 300.

[0040] Multiple storage racks 31 include multiple storage racks 31a and 31b. For example... Figure 2 or Figure 3 As shown, multiple storage racks 31a are positioned to allow the aerial transport vehicle 40A traveling in the first destination section 32a and the aerial transport vehicle 40B traveling in the second destination section 33b to transfer FOUP 300. Multiple storage racks 31b are positioned to allow the aerial transport vehicle 40A traveling in the first destination section 32b and the aerial transport vehicle 40B traveling in the second destination section 33a to transfer FOUP 300.

[0041] Specifically, multiple storage racks 31 are located below the first destination section 32a, the first loop section 32b, the second destination section 33a, and the second loop section 33b, respectively, and are positioned on both sides of the first destination section 32a and the second loop section 33b when viewed from the vertical direction, and also on both sides of the first loop section 32b and the second destination section 33a. That is, in the opposite direction of the first destination section 32a and the first loop section 32b (the opposite direction of the second destination section 33a and the second loop section 33b), a pair of storage racks 31a are arranged at a position separated from the first destination section 32a and the second loop section 33b when viewed from the vertical direction. Similarly, a pair of storage racks 31b are arranged at a position separated from the first loop section 32b and the second destination section 33a when viewed from the vertical direction.

[0042] like Figure 2 As shown, multiple storage racks 31 are arranged along the first destination section 32a, the first return section 32b, the second destination section 33a, and the second return section 33b. In this embodiment, six storage racks 31 are arranged. Among the multiple storage racks 31, the direction of FOUP 300 relative to the travel direction of the overhead transport vehicles 40A and 40B is constant.

[0043] The aerial transport vehicles 40A and 40B include, for example, OHT (Overhead Hoist Transfer). FOUP300 is a container for holding semiconductor wafers (FOUP: Front Opening Unified Pod).

[0044] like Figure 3 As shown, the aerial transport vehicles 40A and 40B have a holding part 41, a lifting mechanism 42, and a moving mechanism 43. The aerial transport vehicles 40A and 40B also have a transceiver unit 44 capable of communicating with the control device 50.

[0045] The gripping part 41 is a device for gripping and releasing the FOUP 300. The gripping part 41 is capable of gripping the flange portion 310 of the FOUP 300. When the overhead transport vehicles 40A and 40B retrieve the FOUP 300 from the storage rack 31, the gripping part 41 grips the flange portion 310 of the FOUP 300. When the overhead transport vehicles 40A and 40B load the FOUP 300 onto the storage rack 31, the gripping part 41 releases the flange portion 310 of the FOUP 300.

[0046] The lifting mechanism 42 is a device that causes the gripping part 41 to move up and down in the vertical direction. The lifting mechanism 42 is capable of moving the gripping part 41 up and down in the vertical direction. The lifting mechanism 42 has a winding mechanism 42a and a belt 42b. The winding mechanism 42a is held by a moving mechanism 43. The winding mechanism 42a is a device that winds up and unwinds the belt 42b in the vertical direction. The winding mechanism 42a is capable of winding up and unwinding the belt 42b in the vertical direction. The belt 42b hangs down from the winding mechanism 42a, and the gripping part 41 is held at its lower end. The lifting mechanism 42 is capable of winding up and unwinding the FOUP 300 held by the gripping part 41 to a distance that allows it to reach the storage rack 31.

[0047] The moving mechanism 43 is a device that moves the holding part 41 and the lifting mechanism 42 laterally relative to the overhead transport vehicles 40A and 40B. That is, the moving mechanism 43 can move the holding part 41 and the lifting mechanism 42 horizontally relative to the traveling direction of the overhead transport vehicles 40A and 40B. The moving mechanism 43 can move the holding part 41 and the lifting mechanism 42 above their respective storage racks 31. When the FOUP 300 is held by the holding part 41, the moving mechanism 43 can move the FOUP 300 vertically upward relative to the storage rack 31.

[0048] like Figure 2As shown, the travel direction of the aerial transport vehicle 40A traveling in the first outbound section 32a is the same as the travel direction of the aerial transport vehicle 40B traveling in the second outbound section 33b, both in the first direction D1. The travel direction of the aerial transport vehicle 40A traveling in the first outbound section 32b is the same as the travel direction of the aerial transport vehicle 40B traveling in the second outbound section 33a, both in the second direction D2.

[0049] The overhead trolleys 40A and 40B, stopped on the first transfer track 32 and the second transfer track 33 respectively, can transfer FOUP 300 relative to the storage rack 31. The overhead trolleys 40A and 40B can transfer FOUP 300 relative to the same storage rack 31. That is, whether on the overhead trolley 40A in the first transfer track 32 or on the overhead trolley 40B in the second transfer track 33, the transfer (handover) of FOUP 300 with the storage rack 31 is possible.

[0050] With overhead conveyors 40A and 40B holding the flange 310 of FOUP 300 from the holding part 41, the moving mechanism 43 is activated, moving FOUP 300 above each of the storage racks 31. Next, overhead conveyors 40A and 40B activate the winding mechanism 42a to release the belt 42b, causing FOUP 300 to descend and be placed on the storage rack 31. Through this process, overhead conveyors 40A and 40B transfer (place) FOUP 300 onto the storage rack 31.

[0051] Furthermore, overhead conveyors 40A and 40B grip the flange 310 of the FOUP 300, which is placed on the storage rack 31, via the gripping part 41. Next, overhead conveyors 40A and 40B activate the winding mechanism 42a to wind up the belt 42b, causing the FOUP 300 to rise. Then, overhead conveyors 40A and 40B activate the moving mechanism 43 to move the FOUP 300. Through these actions, overhead conveyors 40A and 40B transfer (retrieve) the FOUP 300 from the storage rack 31.

[0052] The transceiver unit 44 is positioned at a designated location on the overhead transport vehicles 40A and 40B. The transceiver unit 44 of the overhead transport vehicles 40A and 40B is capable of communicating with the control device 50. The transceiver unit 44 and the control device 50 communicate with each other, for example, via a feeder line (not shown) laid along the first track 10 or the second track. The overhead transport vehicles 40A and 40B transport the FOUP 300 based on transport commands received from the transceiver unit 44.

[0053] Control device 50 controls the movements of aerial transport vehicles 40A and 40B. Control device 50 is an electronic control unit composed of a CPU (Central Processing Unit), ROM (Read Only Memory), and RAM (Random Access Memory). Control device 50 sends transport commands to aerial transport vehicles 40A and 40B.

[0054] Next, the operation of aerial transport vehicles 40A and 40B will be explained. For example... Figure 2 As shown, if the aerial transport vehicle 40A transports the FOUP 300 obtained from the internal zoning route of the first building 100 to the first transfer track 32, it travels on the first transfer track 32 in the order of the first outbound section 32a, the first turnaround section 32c, and the first return section 32b. The aerial transport vehicle 40A stops at the empty storage rack 31a in the first outbound section 32a and places the FOUP 300 on the storage rack 31a. After placing the FOUP 300 on the storage rack 31a, the aerial transport vehicle 40A travels in the first turnaround section 32c, changing its travel direction from the first direction D1 to the second direction D2. The aerial transport vehicle 40A travels to the first return section 32b and stops at the designated position, obtaining the FOUP 300 from the storage rack 31b. The aerial transport vehicle 40A then transports the obtained FOUP 300 to the first building 100.

[0055] If the aerial transport vehicle 40B has transported the FOUP 300 obtained from the internal zoning route of the second building 200 to the second transfer track 33, it will travel on the second transfer track 33 in the order of the second outbound section 33a, the second turnaround section 33c, and the second return section 33b. The aerial transport vehicle 40B stops at the empty storage rack 31b in the second outbound section 33a and places the FOUP 300 on the storage rack 31b. After placing the FOUP 300 on the storage rack 31b, the aerial transport vehicle 40B travels in the second turnaround section 33c, changing its travel direction from the second direction D2 to the first direction D1. The aerial transport vehicle 40B travels to the second return section 33b and stops at the designated position, obtaining the FOUP 300 from the storage rack 31a. The aerial transport vehicle 40B then transports the obtained FOUP 300 to the second building 200.

[0056] As explained above, in the conveying system 1 of this embodiment, in the relay section 30, the first destination section 32a and the second loop section 33b overlap when viewed from the vertical direction, and the first loop section 32b and the second destination section 33a also overlap when viewed from the vertical direction. Multiple storage racks 31 are respectively provided on both sides of the first destination section 32a and the second loop section 33b when viewed from the vertical direction, and also on both sides of the first loop section 32b and the second destination section 33a. That is, since the two tracks overlap when viewed from the vertical direction, storage racks 31 can be arranged on both sides of the tracks rather than on one side. Therefore, in the conveying system 1, even when there is limited space to arrange storage racks 31 in the extending direction of the tracks (first destination section 32a, second destination section 33a, first loop section 33b, and second loop section 33b), the required number of storage racks 31 can be appropriately arranged using space in the direction orthogonal to the tracks.

[0057] In the conveying system 1 of this embodiment, the relay unit 30 is provided in the middle of the first building 100 and the second building 200. In this structure, it is not necessary to provide separate spaces for the relay unit 30 in the first building 100 and the second building 200. Therefore, the space in the first building 100 and the second building 200 can be utilized effectively.

[0058] In the transport system 1 of this embodiment, the aerial transport vehicle 40A travels along the first transfer track 32 in the sequence of the first outbound section 32a, the first turnaround section 32c, and the first return section 32b. The aerial transport vehicle 40A places a FOUP 300 on the storage rack 31a in the first outbound section 32a and retrieves the FOUP 300 from the storage rack 31b in the first return section 32b. The aerial transport vehicle 40B travels along the second transfer track 33 in the sequence of the second outbound section 33a, the second turnaround section 33c, and the second return section 33b. The aerial transport vehicle 40B places a FOUP 300 on the storage rack 31b in the second outbound section 33a and retrieves the FOUP 300 from the storage rack 31a in the second return section 33b. In this structure, the aerial transport vehicle 40A is able to load and retrieve the FOUP300 while traveling on the first transfer track 32, and the aerial transport vehicle 40B is able to load and retrieve the FOUP300 while traveling on the second transfer track 33.

[0059] [Second Implementation]

[0060] Next, the second embodiment will be described. For example... Figure 4 and Figure 5 As shown, the conveying system 1A includes a first track 10A, a second track 20A, a relay unit 30, an overhead conveyor 40A and an overhead conveyor 40B, and a control device 50 (see reference). Figure 3 ).

[0061] The first track 10A has a first extension track 13 located in the second building 200. This first extension track 13 connects to the first destination portion 32a of the first transfer track 32, branches off from the first return portion 32c, and merges with the first return portion 32b. The first extension track 13 connects to the first destination portion 32a and the first return portion 32b, extending in a straight line from the first building 100 side towards the second building 200 side, and is located within the second building 200. The first extension track 13 within the second building 200 includes internal zone tracks configured in multiple internal zone routes and inter-zone tracks configured in inter-zone routes. The aerial transport vehicle 40A is capable of transferring FOUP 300 between the first building 100 and the second building 200. The aerial transport vehicle 40A essentially transports FOUP 300 within the first building 100.

[0062] The second track 20A has a second extension track 23 located in the first building 100. This second extension track 23 connects to the second destination section 33a of the second transfer track 33, branches off from the second return section 33c, and merges with the second return section 33b. The second extension track 23 connects to the second destination section 33a and the second return section 33b and extends in a straight line from the second building 200 side towards the first building 100 side, located within the first building 100. The second extension track 23 within the first building 100 includes internal zone tracks configured in multiple internal zone routes and inter-zone tracks configured in inter-zone routes. The aerial transport vehicle 40B is capable of transferring FOUP 300 between the first building 100 and the second building 200. The aerial transport vehicle 40B essentially transports FOUP 300 within the second building 200.

[0063] In the transport system 1A, in the relay unit 30, the FOUP300 can be transferred between the overhead transport vehicle 40A and the overhead transport vehicle 40B via the storage rack 31.

[0064] Next, the operation of aerial transport vehicles 40A and 40B will be described. When transferring FOUP 300 to the storage rack 31 of the relay unit 30, aerial transport vehicle 40A travels on the first transfer track 32 in the sequence of the first outbound section 32a, the first return section 32c, and the first return section 32b. When transporting FOUP 300 to the second building 200, aerial transport vehicle 40A passes through the first outbound section 32a of the first transfer track 32 and enters the first extension track 13 as it approaches the second building 200. When returning from the second building 200 to the first building 100, aerial transport vehicle 40A enters the first return section 32b of the first transfer track 32 from the first extension track 13.

[0065] When the aerial transport vehicle 40B transfers FOUP 300 to the storage rack 31, it travels on the second transfer track 33 in the sequence of the second outbound section 33a, the second return section 33c, and the second return section 33b. When transporting FOUP 300 to the first building 100, the aerial transport vehicle 40B passes through the second outbound section 33a of the second transfer track 33 and enters the second extended track 23 as it approaches the first building 100. When returning from the first building 100 to the second building 200, the aerial transport vehicle 40B enters the second return section 33b of the second transfer track 33 from the second extended track 23.

[0066] In the transfer system 1A, the control device 50 controls the transfer of FOUP 300 on the first transfer track 32 or the second transfer track 33, or the transport of FOUP 300 to the first building 100 or the second building 200, based on the operating status of the aerial trolley 40A in the first building 100 and the aerial trolley 40B in the second building 200. The operating status refers to the number of aerial trolleys 40A and 40B in operation, the operating rate, and the ratio of the number of operating trolleys in the first building 100 and the second building 200.

[0067] For example, if the number of aerial transport vehicles 40A operating in Building 100 reaches the specified number, the control device 50 sends a transfer request to aerial transport vehicle 40B to move FOUP 300 to storage rack 31. For example, if the number of aerial transport vehicles 40A operating in Building 100 does not reach the specified number, the control device 50 sends a transfer request to aerial transport vehicle 40B to move FOUP 300 to Building 100.

[0068] As explained above, in the transport system 1A of this embodiment, the aerial transport vehicle 40A can transfer FOUP 300 between the first building 100 and the second building 200, and the aerial transport vehicle 40B can transfer FOUP 300 between the first building 100 and the second building 200. Therefore, in the transport system 1A, for example, when it is impossible to transfer FOUP 300 to the storage rack 31, the aerial transport vehicles 40A and 40B can directly transport FOUP 300 to other buildings. Thus, in the transport system 1A, the efficiency of inter-building transport can be improved.

[0069] In the transport system 1A of this embodiment, the control device 50 controls the transfer of FOUP 300 on the first transfer track 32 or the second transfer track 33, or the transport of FOUP 300 to the first building 100 or the second building 200, based on the operating status of the aerial transport vehicle 40A in the first building 100 and the operating status of the aerial transport vehicle 40B in the second building 200. In this structure, for example, when the operating rate of the aerial transport vehicle 40A in the first building 100 is high, the number of aerial transport vehicles in the first building 100 is increased by transporting FOUP 300 to the first building 100 by the aerial transport vehicle 40B. Therefore, more efficient transport can be achieved in the first building 100.

[0070] The embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments and various modifications can be made without departing from its spirit.

[0071] In the above embodiment, the configuration in which the first transfer track 32 and the second transfer track 33 are located between the first building 100 and the second building 200 has been described as an example. However, the first transfer track 32 and the second transfer track 33 may also be located within the first building 100 or within the second building 200.

[0072] In the above embodiment, a pair of storage racks 31 are described as being arranged opposite each other in the opposite direction of the first destination portion 32a and the first return portion 32b (the opposite direction of the second destination portion 33a and the second return portion 33b), with the first destination portion 32a and the second return portion 33b separated by a gap, and the first return portion 32b and the second destination portion 33a, respectively. However, the storage racks 31 may also be arranged in an alternating manner, for example.

[0073] In the above embodiment, an example is described where the same number of storage racks 31 are arranged opposite each other in the opposite direction of the first destination portion 32a and the first return portion 32b (the opposite direction of the second destination portion 33a and the second return portion 33b). However, the number of storage racks 31 may not be the same, as long as it is set appropriately according to the design.

[0074] In the above embodiment, the form of the object to be transported being FOUP300 was described as an example. However, the object to be transported may also be, for example, a container for holding a glass substrate, a marking sheet box, a FOSB, an SMIF Pod, or a general component.

[0075] In the above embodiment, the configuration of the conveying system 1 installed in a semiconductor manufacturing plant was described as an example. However, it is not limited to semiconductor manufacturing plants, and the conveying system can also be applied to other facilities.

[0076] Explanation of reference numerals in the attached figures

[0077] 1, 1A: Conveying system; 10, 10A: First track; 13: First extension track; 20, 20A: Second track; 23: Second extension track; 30: Relay section; 31, 31a, 31b: Storage rack (storage section); 32: First transfer track; 32a: First outbound section; 32b: First return section; 32c: First turnaround section; 33: Second transfer track; 33a: Second outbound section; 33b: Second return section; 33c: Second turnaround section; 40A: Aerial transport vehicle (first aerial transport vehicle); 40B: Aerial transport vehicle (second aerial transport vehicle); 50: Control device; 100: First building; 200: Second building; 300: FOUP (Fulfilled object).

Claims

1. A conveying system, comprising: The first track is located in the first building; A second track is located on a second building that is different from the first building; A first aerial transport vehicle travels along the first track to transport and transfer the transported items; A second aerial transport vehicle travels on the second track to transport and transfer the transported item; and A relay unit used for transferring the transported item between the first aerial transport vehicle and the second aerial transport vehicle. The relay unit has: Multiple storage units temporarily store the items transferred from the first aerial transport vehicle and the second aerial transport vehicle, respectively. A first transfer track, which extends from the first track, is provided for the first aerial transport vehicle to place the transported item in the storage area and retrieve the transported item from the storage area; and A second transfer track, extending from the second track, is provided for the second aerial transport vehicle to place the transported item into the storage area and retrieve the transported item from the storage area. The first transfer track has a first outgoing route portion extending in a straight line, a first turning-back portion continuing from the first outgoing route portion, and a first return portion continuing from the first turning-back portion and extending in a straight line. The second transfer track has a second outgoing route portion extending in a straight line, a second turning-back portion continuing from the second outgoing route portion, and a second return portion continuing from the second turning-back portion and extending in a straight line. The first outgoing route portion and the second returning route portion overlap when viewed from the vertical direction, and the first returning route portion and the second outgoing route portion overlap when viewed from the vertical direction. The first aerial transport vehicle traveling on the first outbound route has the same travel direction as the second aerial transport vehicle traveling on the second return route, and the first aerial transport vehicle traveling on the first return route has the same travel direction as the second aerial transport vehicle traveling on the second outbound route. The plurality of storage sections are respectively located below the first destination section, the first loop section, the second destination section, and the second loop section, and are positioned on both sides of the first destination section and the second loop section when viewed from the vertical direction, and are also positioned on both sides of the first loop section and the second destination section. The first aerial transport vehicle traveling on the first outbound route and the second aerial transport vehicle traveling on the second return route are both capable of transferring the transported items to the same storage unit. The first track has a first extension track located in the second building. This first extension track continues from the first outgoing route portion of the first transfer track and branches off from the first turning-back portion, and merges with the first return portion. The second track has a second extension track located on the first building. This second extension track continues from the second outbound portion of the second transfer track, branches off from the second return portion, and merges with the second loop portion. The first aerial transport vehicle is capable of transferring the transported items between the first building and the second building. The second aerial transport vehicle is capable of transferring the transported items between the first building and the second building.

2. The conveying system according to claim 1, wherein, The relay unit is located in any one of the first building, the second building, and the intermediate part between the first building and the second building.

3. The conveying system according to claim 1 or 2, wherein, The first aerial transport vehicle travels in the first transfer track in the order of the first outbound route, the first return route, and the first return route. The first aerial transport vehicle places the transported item on the storage unit in the first outgoing route section and retrieves the transported item from the storage unit in the first return route section. The second aerial transport vehicle travels in the second transfer track in the order of the second outbound route, the second return route, and the second return route. The second aerial transport vehicle places the transported item on the storage unit in the second outgoing route section and retrieves the transported item from the storage unit in the second return route section.

4. The conveying system according to claim 1 or 2, wherein, The conveying system includes a control device for controlling the movement of the first aerial conveyor and the second aerial conveyor. The control device controls the transfer of the object to be transferred on the first transfer track or the second transfer track, or controls the transfer of the object to the first building or the second building, based on the operating status of the first aerial transport vehicle in the first building and the operating status of the second aerial transport vehicle in the second building.

5. The conveying system according to claim 3, wherein, The conveying system includes a control device for controlling the movement of the first aerial conveyor and the second aerial conveyor. The control device controls the transfer of the object to be transferred on the first transfer track or the second transfer track, or controls the transfer of the object to the first building or the second building, based on the operating status of the first aerial transport vehicle in the first building and the operating status of the second aerial transport vehicle in the second building.

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