A flap gas delivery valve

Abstract

The present application relates to a valve structure, in particular to a kind of opening and closing and opening of realization by using cylinder to drive connecting rod mechanism to drive flap overturning.The flap gas delivery valve of the present application is composed of main body module, power module, overturning module and self-tightening module, mainly includes: chamber, its two sides have opening, for transporting reaction gas;End cap, its surface is equipped with three openings, so that cylinder displacement rod is connected with connecting rod group in chamber;Flap, for opening and closing gas delivery;Cylinder group, provide overturning power, adopt angle block to connect cylinder and end cap, the angle between cylinder and the upper surface of end cap can be adjusted.The present application modularizes structure, is convenient to overhaul, and flap is installed in chamber inboard, reduce the loss of structural member and improve the stability of transmission, also have limiting self-tightening device and angle adjusting device, improve the vacuum degree and opening and closing speed, can be applied to control valve in semiconductor gas reaction chamber.

Description

Technical Field

[0001] This invention relates to a valve body structure, specifically a valve that uses a cylinder to drive a linkage mechanism to flip a flap to achieve the closing and opening of an opening. Background Technology

[0002] Valves are commonly used in the flow paths of various liquids or gases, serving functions such as pressure regulation, flow control, check valves, control valves, start-up valves, and shut-off valves. Based on their function, they can be classified as regulating valves, check valves, shut-off valves, etc.

[0003] Chinese patent ZL201811234051.5 proposes a flap conveying valve that uses a cylinder to drive a connecting rod to stretch and convert it into the flipping motion of the flap. However, the flap is installed on the end cover, and the vibration of the cavity can easily cause the flap to misalign, which cannot meet the overall airtightness requirements. Furthermore, the misalignment of the flap can easily damage its structural components and shorten its service life.

[0004] Chinese patent ZL202123454424.X proposes a flip-top valve, which mainly includes a self-locking structure. This self-locking structure consists of two rocker arms that are fixedly connected by a rotating rod. However, this structure is not a self-locking structure; it is still controlled by a piston push-pull rod.

[0005] In summary, existing gas valves, especially flap valves between adjacent reaction chambers, rely on connecting rod assemblies and other structural components mounted on the end caps to open and close the chambers. However, during transport, vibrations can easily cause the end caps to shift, leading to structural deformation. This results in poor chamber airtightness and increased component wear. Furthermore, existing valve designs lack self-locking mechanisms, failing to guarantee airtightness. To prevent unforeseen circumstances, a self-locking function is indispensable in the overall valve design; these are crucial issues that urgently need to be addressed. Summary of the Invention

[0006] The purpose of this invention is to provide a flap-type gas delivery valve, which installs a flap inside the chamber to solve the problems of poor airtightness of the chamber and high wear of structural components caused by misalignment and deformation due to vibration during gas delivery, and to improve the smoothness of the transmission process and the life of moving parts; at the same time, a limit self-tightening block is designed in the chamber, so that the valve has a self-locking function, thereby improving the airtightness of the chamber during gas delivery.

[0007] To address the aforementioned technical problems, this invention addresses existing gas valves, particularly flap valves located between adjacent reaction chambers, which rely on connecting rods and other structural components mounted on end caps to open and close the chambers. However, during transport, vibrations can easily cause the end caps to misalign, leading to structural deformation and consequently poor chamber airtightness and increased component wear. Furthermore, to prevent unforeseen circumstances, a self-locking function is essential in the overall valve design. Therefore, this invention installs a flap inside the chamber, and the angle between the cylinder end face and the end cap surface can be adjusted using an angle block to regulate the fit between the flap and the chamber wall, ensuring airtightness during gas transport. Simultaneously, this invention incorporates a self-tightening limiting block; a unique limiting port design enables the device to achieve structural self-tightening.

[0008] The specific technical solution is as follows.

[0009] A flap-type air valve, characterized in that it comprises a main body module, a power module, a flapping module, and a self-tightening module:

[0010] The main module includes: a chamber (1) with openings on both sides for conveying reaction gas; an end cap (2) which is detachably covered on the upper side of the chamber (1); a set of square holes A is machined on the end cap (2) so that the cylinder displacement rod (7) is connected to the long transverse rod (8) to form a power unit connecting rod; each square hole in the set of square holes A is evenly distributed on the end cap (2) and its position corresponds to the position of the long transverse rod (8) in the chamber (1); the length of each square hole corresponds to the stroke of the cylinder group (4) on the angle block (3), and the width of each square hole is greater than the diameter of the cylinder displacement rod (7) and less than the spacing of the parallel guide rail group (3-1);

[0011] The power module includes: a cylinder assembly (4), which mainly provides power for driving the flip plate (6) to flip, and its position corresponds to the position of the square hole assembly A; an angle block (3) connecting the cylinder assembly (4) and the end cover (2), used to adjust the angle between the cylinder (4) and the surface of the end cover (2); a square hole assembly B corresponding to the square hole assembly A is machined on the angle block (3); a parallel guide rail assembly (3-1) is installed on the angle block (3), which can be controlled by a solenoid valve to drive the cylinder assembly (4) to move on the parallel guide rail assembly (3-1) to cooperate with the flip plate (6) to flip; the end cover (2) and the chamber (1), the angle block (3) and the end cover (2), and the angle block (3) and the cylinder assembly (4) are all airtightly connected by sealing rings;

[0012] The flipping module includes: a flip plate (6), located in the chamber (1), used to perform opening and closing flipping motion to achieve gas delivery; the rotating linkage includes a first linkage (11) and a second linkage (9), which are connected by a power linkage to drive the flip plate (6) to rotate and complete the opening and closing of the chamber (1);

[0013] The self-tightening module includes: a limiting self-tightening block (5), which is installed at the bottom of the chamber (1) and is positioned corresponding to the rotating assembly connecting rod. A limiting port (5-1) is machined on the limiting self-tightening block (5). When the flap (6) is in the closed state, the long horizontal rod (8) is located at the limiting port (5-1) and produces a self-tightening effect when subjected to a horizontal force outside the opening.

[0014] The flap (6) is detachably mounted on the L-shaped step (1-2) on the inner wall of the chamber (1) via a cylindrical shaft (12) concentrically connected to the first connecting rod (11).

[0015] Both ends of the first connecting rod (11), both ends of the second connecting rod (9), and the end of the displacement rod (7) are all machined into circular through holes and fitted with needle roller bearings.

[0016] The parallel guide rail assembly (3-1) on the angle block (3) is pneumatically driven and is controlled by the same solenoid valve as the cylinder (4).

[0017] The upper part of the limiting self-tightening block (5) is arc-shaped and has a guiding function for the long transverse rod (8).

[0018] The flap (6) has a groove structure on the back, and the first connecting rod (11) is fixed to the flap (6) by two limiting pieces (10).

[0019] The first connecting rod (11) is mainly composed of a rod body (11-1) and a long strip block (11-2), with welding strips (11-3) used in the middle for welding to improve the fatigue damage resistance of the key rotating parts.

[0020] The specific working process of the present invention is as follows: the cylinder group (4) moves downward on the parallel guide rail group (3-1) through the same solenoid valve and the compressor, accompanied by the extension of the displacement rod (7) inside the cylinder group (4), so that the first connecting rod (11) rotates around the cylindrical shaft (12), and finally the long transverse rod (8) moves to the limiting port (5-1) of the limiting self-tightening block (5). At this time, the obtuse angle between the second connecting rod (9) and the first connecting rod (11) is less than 180°, thus realizing the closing of the flap (6); by controlling the upward movement of the cylinder group (4) on the parallel guide rail group (3-1) accompanied by the contraction of the displacement rod (7) inside the cylinder group (4), the long transverse rod (8) leaves the limiting port (5-1), and one end of the second connecting rod (9) moves upward, thereby driving the first connecting rod (11) to rotate around the cylindrical shaft (12), driving the flap (6) to flip upward and open the air supply port.

[0021] This invention has beneficial effects

[0022] 1. The present invention installs the flap inside the cavity, which helps to reduce the vibration of the flap during movement, improves the smoothness of the transmission process, and thus improves the life of the moving parts.

[0023] 2. The self-tightening block used in this invention ensures that the angle between the first and second connecting rods during the flip-closing process of the flap is less than 180°, resulting in a tight fit between the flap surface and the inner wall of the chamber, guaranteeing airtightness. This self-tightening structure not only reduces the rotational torque on the displacement rod, extending its service life, but also ensures that the flap remains closed in the event of a sudden power or gas outage, giving the valve a self-locking function and protecting the processed products. The arc-shaped design of its upper part guides and restricts the movement of the long transverse rod, preventing collisions and wear between structural components and the chamber.

[0024] 3. This device modularizes the overall valve structure into a main module, a power module, a tilting module, and a self-tightening module. The structure is simple and easy to disassemble during regular maintenance, while also reducing assembly costs.

[0025] 4. The device of the present invention can adjust the fit between the flap and the inner wall of the cavity by adjusting the angle between the cylinder end face and the end cover surface by adjusting the angle block, thus ensuring the airtightness during the gas transmission process. Attached Figure Description

[0026] Figure 1 This is a three-dimensional structural diagram of the flap gas valve of the present invention;

[0027] Figure 2 This is a diagram of the internal structure of the cavity in this invention;

[0028] Figure 3 This is a schematic diagram of the flap opening according to the present invention;

[0029] Figure 4This is a schematic diagram of the flap closure of the present invention;

[0030] Figure 5 This is a schematic diagram of the self-tightening block of the present invention;

[0031] Figure 6 This is a schematic diagram of the first link structure.

[0032] In the diagram: 1. Chamber, 1-2. L-shaped step, 2. End cap, 3. Angle block, 3-1. Parallel guide rail assembly, 4. Cylinder assembly, 5. Limiting self-tightening block, 5-1. Limiting port, 6. Flip plate, 7. Displacement rod, 8. Long transverse rod, 9. Second connecting rod, 10. Limiting piece, 11. First connecting rod, 12. Cylindrical shaft, 11-1. Rod body, 11-2. Long strip block, 11-3. Welding strip. Detailed Implementation

[0033] To better illustrate the implementation details of the present invention, the technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The following embodiments are merely general examples, and the present invention is not limited to the following embodiments.

[0034] This invention relates to a flap-type gas supply valve, such as... Figure 1 and Figure 2 As shown, it includes a chamber 1, an L-shaped step 1-2, an end cap 2, an angle block 3, a parallel guide rail assembly 3-1, a cylinder assembly 4, a self-tightening limiting block 5, a limiting port 5-1, a flap 6, a displacement rod 7, a long transverse rod 8, a second connecting rod 9, a limiting piece 10, a first connecting rod 11, and a cylindrical shaft 12. The first connecting rod 11 includes a rod body 11-1, a long strip block 11-2, and a welding strip 11-3, specifically as follows... Figure 6 As shown. This device is not limited to the following examples; it can be used for vacuum flow valve control in various gas reaction chambers, and the number of cylinders can be increased to enhance the tilting driving force, depending on the actual situation.

[0035] It should be noted that the descriptions in the device of the present invention, such as "first", "second", "upward", "downward", "upper half", "both ends", "end", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the device of the present invention and to improve the connection between the description and the accompanying drawings and the clarity of the narrative. They do not specifically refer to a certain orientation or position and should not be construed as a limitation of the device of the present invention.

[0036] Example 1

[0037] When cylinder group 4 uses three cylinders, there are three corresponding angle blocks 3, and three square hole groups A are machined on the end cover 2 accordingly. Throughout the gas delivery process, both the parallel guide rail group 3-1 and cylinder group 4 are controlled by FESTO CPE18-M1H-5J-1 / 4 solenoid valves, and the solenoid valves are set with the same control program. Therefore, the cylinder stroke is the same as the stroke of cylinder group 4 on the parallel guide rail group 3-1. The connection path between the solenoid valve and the compressor and the specific control program are not described in detail in this embodiment. When gas enters the reaction chamber on one side of chamber 1 from the reaction chamber on the other side for gas reaction, cylinder group 4 moves upward through the parallel guide rail group 3-1 on the angle block 3, accompanied by the retraction of displacement rod 7 and the rise of long transverse rod 8. Simultaneously, the second connecting rod 9 moves upward, causing the first connecting rod 11 to rotate around the cylindrical shaft 12. Figure 3 As shown. When cylinder assembly 4 reaches the top of angle block 3, the piston displacement inside the cylinder corresponds to the cylinder stroke, displacement rod 7 retracts, flap 6 fully opens, and gas delivery begins. After the reaction gas delivery is complete, as shown... Figure 4 As shown, cylinder assembly 4 also moves downward along parallel guide rail assembly 3-1 on angle block 3, accompanied by the extension of displacement rod 7. The long transverse rod 8 moves downward, driving the second connecting rod 9 downward. When the long transverse rod 8 moves to the limiting port 5-1 of the self-tightening block 5, the first connecting rod 11 completes downward flipping, and the flap 6 tightly fits against the inner wall of the accommodating chamber 1. Since the initial angle between the second connecting rod 9 and the first connecting rod 11 is an acute angle, the flap 6 is always the first to be driven to flip. After the chamber 1 is closed, the angle between the second connecting rod 9 and the first connecting rod 11 is an obtuse angle less than 180°, enabling the valve to achieve a structural self-locking function. The specific structure of the self-tightening block is as follows: Figure 5 As shown.

[0038] Example 2

[0039] When cylinder group 4 uses five cylinders, there are five corresponding angle blocks 3, and five square holes A are machined on the end cover 2 accordingly. Compared with embodiment 1, using five cylinders makes the entire flipping process smoother, reduces the load on structural components, and extends service life. During the entire gas delivery process, both the parallel guide rail group 3-1 and cylinder group 4 are controlled by FESTO CPE18-M1H-5J-1 / 4 solenoid valves, and the solenoid valves are set with the same control program. Therefore, the cylinder stroke is the same as the stroke of cylinder group 4 on the parallel guide rail group 3-1. The connection path and specific control program between the solenoid valve and the compressor are as follows. When gas enters the reaction chamber on the other side of chamber 1 from the reaction chamber on one side for gas reaction, cylinder group 4 moves upward through the parallel guide rail group 3-1 on the angle block 3, accompanied by the retraction of displacement rod 7 and the rise of long transverse rod 8. At the same time, the second connecting rod 9 moves upward, driving the first connecting rod 11 to rotate around the cylindrical shaft 12. Figure 3As shown. Due to the increased number of cylinders, the force on the long transverse rod is more even, which in turn makes the force on the back of the flap more even, ensuring good airtightness of the chamber. When cylinder group 4 reaches the top of angle block 3, the displacement of the piston inside the cylinder corresponds to the cylinder stroke, the displacement rod 7 retracts, the flap 6 opens completely, and gas delivery begins. After the reaction gas has been delivered, as... Figure 4 As shown, the cylinder assembly 4 also moves downward on the parallel guide rail assembly 3-1 on the angle block 3, and at the same time, the displacement rod 7 extends, the long transverse rod 8 moves downward and drives the second connecting rod 9 to move downward. When the long transverse rod 8 moves downward to the limiting port 5-1 of the limiting self-tightening block 5, the first connecting rod 11 completes the downward flipping, and the flap 6 is tightly attached to the inner wall of the accommodating chamber 1.

[0040] Example 3

[0041] When cylinder group 4 uses seven cylinders, there are seven corresponding angle blocks 3. Consequently, seven square holes A are machined on the end cap 2. The seven cylinders significantly increase the reliability and safety of the valve's gas delivery. Throughout the gas delivery process, both the parallel guide rail group 3-1 and cylinder group 4 are controlled by FESTO's CPE18-M1H-5J-1 / 4 solenoid valves, and the control program for the solenoid valves is the same as in Embodiments 1 and 2. When gas enters the reaction chamber on one side of chamber 1 from the reaction chamber on the other side for gas reaction, cylinder group 4 moves upward via the parallel guide rail group 3-1 on the angle block 3, accompanied by the retraction of the displacement rod 7 and the rise of the long transverse rod 8. Simultaneously, the second connecting rod 9 moves upward, causing the first connecting rod 11 to rotate around the cylindrical shaft 12. Figure 3 As shown. When cylinder assembly 4 reaches the top of angle block 3, the piston displacement inside the cylinder corresponds to the cylinder stroke, displacement rod 7 retracts, flap 6 fully opens, and gas delivery begins. After the reaction gas delivery is complete, as shown... Figure 4 As shown, the cylinder assembly 4 also moves downward on the parallel guide rail assembly 3-1 on the angle block 3, and at the same time, the displacement rod 7 extends, the long transverse rod 8 moves downward and drives the second connecting rod 9 to move downward. When the long transverse rod 8 moves downward to the limiting port 5-1 of the limiting self-tightening block 5, the first connecting rod 11 completes the downward flipping, and the flap 6 is tightly attached to the inner wall of the accommodating chamber 1.

Claims

1. A flap-type gas supply valve, characterized in that: It includes the main module, power module, tilting module, and self-tightening module; The main module includes: a chamber (1) with openings on both sides for conveying reaction gas; an end cap (2) which is detachably covered on the upper side of the chamber (1); a set of square holes A is machined on the end cap (2) so that the cylinder displacement rod (7) is connected to the long transverse rod (8) to form a power unit connecting rod; each square hole in the set of square holes A is evenly distributed on the end cap (2) and its position corresponds to the position of the long transverse rod (8) in the chamber (1); the length of each square hole corresponds to the stroke of the cylinder group (4) on the angle block (3), and the width of each square hole is greater than the diameter of the cylinder displacement rod (7) and less than the spacing of the parallel guide rail group (3-1); The power module includes: a cylinder assembly (4), which mainly provides power for driving the flip plate (6) to flip, and its position corresponds to the position of the square hole assembly A; an angle block (3) connecting the cylinder assembly (4) and the end cover (2), used to adjust the angle between the cylinder assembly (4) and the surface of the end cover (2); a square hole assembly B corresponding to the square hole assembly A is machined on the angle block (3); a parallel guide rail assembly (3-1) is installed on the angle block (3), which can be controlled by a solenoid valve to drive the cylinder assembly (4) to move on the parallel guide rail assembly (3-1) to cooperate with the flip plate (6) to flip; the end cover (2) and the chamber (1), the angle block (3) and the end cover (2), and the angle block (3) and the cylinder assembly (4) are all airtightly connected by sealing rings; The flipping module includes: a flip plate (6), located in the chamber (1), used to perform opening and closing flipping motion to achieve gas delivery; the rotating linkage includes a first linkage (11) and a second linkage (9), which are connected by a power linkage to drive the flip plate (6) to rotate and complete the opening and closing of the chamber (1); The self-tightening module includes: a limiting self-tightening block (5), which is installed at the bottom of the chamber (1) and is positioned corresponding to the rotating assembly connecting rod. A limiting port (5-1) is machined on the limiting self-tightening block (5). When the flap (6) is in the closed state, the long transverse rod (8) is located at the limiting port (5-1) and produces a self-tightening effect when subjected to a transverse force outside the opening. The upper part of the limiting self-tightening block (5) is arc-shaped and has a guiding function for the long transverse rod (8).

2. The flap valve for supplying gas according to claim 1, characterized in that: The flap (6) is detachably mounted on the L-shaped step (1-2) on the inner wall of the chamber (1) via a cylindrical shaft (12) concentrically connected to the first connecting rod (11).

3. The flap valve for supplying gas according to claim 1, characterized in that: Both ends of the first connecting rod (11), both ends of the second connecting rod (9), and the end of the displacement rod (7) are all machined into circular through holes and fitted with needle roller bearings.

4. The flap valve for supplying gas according to claim 1, characterized in that: The parallel guide rail assembly (3-1) on the angle block (3) is pneumatically driven and is controlled by the same solenoid valve as the cylinder assembly (4).

5. The flap valve for supplying gas according to claim 1, characterized in that: The flap (6) has a groove structure on the back, and the first connecting rod (11) is fixed to the flap (6) by two limiting pieces (10).

6. The flap valve for supplying gas according to claim 1, characterized in that: The first connecting rod (11) consists of a rod body (11-1) and a long strip block (11-2), which are welded together by welding strips (11-3).

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