Ultra-precision machine tool multi-axis linkage trajectory precision detection method, device and system

Abstract

The application provides a kind of ultra-precision machine tool multi-axis linkage trajectory precision detection method, device and system, the method comprises: in the process of operation of the machine to be measured, the first machining trajectory and the second machining trajectory of the machine to be measured are acquired respectively;Wherein, the first machining trajectory and the second machining trajectory are synchronously collected, the first machining trajectory includes the first motion trajectory detection value of each motion axis of the machine to be measured, and the second machining trajectory includes the second motion trajectory detection value of the preset axis in the plurality of motion axes of the machine to be measured;Determine the first trajectory deviation of the machine to be measured based on the first machining trajectory and the first target machining trajectory of the machine to be measured, and determine the second trajectory deviation of the machine to be measured based on the second machining trajectory and the first target machining trajectory;When the first trajectory deviation is effective based on the second trajectory deviation, the trajectory precision of the machine to be measured is determined based on the first trajectory deviation.The application can comprehensively and accurately detect the multi-axis linkage trajectory precision of the machine to be measured.

Description

Technical Field

[0001] This invention relates to the field of data processing technology, and in particular to a method, device and system for detecting the accuracy of multi-axis linkage trajectory of ultra-precision machine tools. Background Technology

[0002] In recent years, non-axisymmetric aspherical or freeform optical components have been widely used in head-up displays, vehicle cameras, lidar and other fields, and the requirements for processing efficiency and precision of non-axisymmetric aspherical or freeform optical components are increasing.

[0003] To address this, the industry has developed cutting methods such as fast / slow servo machining to achieve relatively high-speed and precise machining. Simultaneously, the response speed of ultra-precision machine tools using linear motors has been significantly improved, increasing the possibility of high-precision machining of complex aspherical shapes. In ultra-high precision machining through multi-axis linkage control, the accuracy of the multi-axis linkage trajectory of ultra-precision machine tools is a crucial factor affecting the final shape accuracy of non-axisymmetric aspherical or freeform surfaces.

[0004] Currently, ballbars, laser interferometers, and cross-grid encoders are commonly used to detect the trajectory accuracy of ultra-precision machine tools. However, these methods all have significant limitations when detecting the trajectory accuracy of ultra-high precision machine tools. For example, ballbars cannot fully reproduce the machining trajectory of ultra-precision machine tools, laser interferometers are affected by air turbulence and can only verify the trajectory accuracy of a single axis, and cross-grid encoders are difficult to detect the machining trajectory of three-axis or even more-axis ultra-precision machine tools.

[0005] Therefore, there is an urgent need for a method that can comprehensively and accurately detect the accuracy of multi-axis linkage trajectory of ultra-precision machine tools. Summary of the Invention

[0006] This invention provides a method, device, and system for detecting the accuracy of multi-axis linkage trajectory of ultra-precision machine tools, thereby overcoming the shortcomings of existing technologies that cannot comprehensively and accurately detect the accuracy of multi-axis linkage trajectory of ultra-precision machine tools.

[0007] This invention provides a method for detecting the accuracy of multi-axis linkage trajectory in ultra-precision machine tools, comprising:

[0008] During the operation of the machine tool under test, the first machining trajectory and the second machining trajectory of the machine tool under test are acquired respectively; wherein, the first machining trajectory and the second machining trajectory are acquired synchronously, the machine tool under test includes multiple motion axes, the first machining trajectory includes the first motion trajectory detection value of each motion axis of the machine tool under test, and the second machining trajectory includes the second motion trajectory detection value of a preset axis among the multiple motion axes of the machine tool under test;

[0009] Based on the first machining trajectory and the first target machining trajectory of the machine tool under test, a first trajectory deviation of the machine tool under test is determined, and based on the second machining trajectory and the first target machining trajectory, a second trajectory deviation of the machine tool under test is determined.

[0010] When the first trajectory deviation is determined to be valid based on the second trajectory deviation, the trajectory accuracy of the machine tool under test is determined based on the first trajectory deviation.

[0011] According to the ultra-precision machine tool multi-axis linkage trajectory accuracy detection method provided by the present invention, the step of determining the first trajectory deviation of the machine tool under test based on the first machining trajectory and the first target machining trajectory of the machine tool under test includes:

[0012] Obtain the difference between the first target processing trajectory and the first processing trajectory;

[0013] The first trajectory deviation is determined based on the difference between the first target processing trajectory and the first processing trajectory.

[0014] According to the ultra-precision machine tool multi-axis linkage trajectory accuracy detection method provided by the present invention, the step of determining the second trajectory deviation of the machine tool under test based on the second machining trajectory and the first target machining trajectory includes:

[0015] Obtain the motion trajectory target values ​​of each preset axis in the first target machining trajectory to obtain the second target machining trajectory; wherein, the first target machining trajectory includes the motion trajectory target values ​​of each motion axis of the machine tool under test;

[0016] The deviation of the second trajectory is determined based on the difference between the second target machining trajectory and the second machining trajectory.

[0017] The method for detecting the accuracy of multi-axis linkage trajectory of ultra-precision machine tools provided by the present invention includes a method for determining whether the first trajectory deviation is effective based on the second trajectory deviation, comprising:

[0018] Obtain the trajectory deviation corresponding to each preset axis in the first trajectory deviation to obtain the third trajectory deviation;

[0019] The validity of the first trajectory deviation is determined based on the absolute value of the difference between the third trajectory deviation and the second trajectory deviation.

[0020] According to the ultra-precision machine tool multi-axis linkage trajectory accuracy detection method provided by the present invention, the step of determining the trajectory accuracy of the machine tool under test based on the first trajectory deviation includes:

[0021] Based on the trajectory deviation corresponding to each of the motion axes in the first trajectory deviation, and the motion trajectory target value of each of the motion axes in the first target machining trajectory, the trajectory accuracy corresponding to each of the motion axes is determined respectively;

[0022] The trajectory accuracy of the machine tool under test is determined based on the trajectory accuracy corresponding to each of the motion axes.

[0023] The method for detecting the multi-axis linkage trajectory accuracy of ultra-precision machine tools provided by the present invention further includes:

[0024] One or more of the first machining trajectory, the second machining trajectory, the first trajectory deviation, the second trajectory deviation, and the trajectory accuracy of the machine tool under test are sent to a preset terminal.

[0025] The present invention also provides a device for detecting the accuracy of multi-axis linkage trajectory of ultra-precision machine tools, comprising:

[0026] The first processing module is used to acquire the first machining trajectory and the second machining trajectory of the machine tool under test during the operation of the machine tool under test; wherein the first machining trajectory and the second machining trajectory are acquired synchronously, the machine tool under test includes multiple motion axes, the first machining trajectory includes the first motion trajectory detection value of each motion axis of the machine tool under test, and the second machining trajectory includes the second motion trajectory detection value of a preset axis among the multiple motion axes of the machine tool under test;

[0027] The second processing module is used to determine a first trajectory deviation of the machine tool under test based on the first machining trajectory and the first target machining trajectory of the machine tool under test, and to determine a second trajectory deviation of the machine tool under test based on the second machining trajectory and the first target machining trajectory.

[0028] The third processing module is used to determine the trajectory accuracy of the machine tool under test based on the first trajectory deviation when the first trajectory deviation is determined to be valid based on the second trajectory deviation.

[0029] The present invention also provides a multi-axis linkage trajectory accuracy detection system for ultra-precision machine tools, comprising: a first data acquisition device, a second data acquisition device, and a data processing device;

[0030] The data processing device is used to send synchronization signals to the first data acquisition device and the second data acquisition device; it is also used to determine a first trajectory deviation of the machine tool under test based on a first machining trajectory and a first target machining trajectory of the machine tool under test, and to determine a second trajectory deviation of the machine tool under test based on a second machining trajectory and the first target machining trajectory of the machine tool under test, and when the first trajectory deviation is determined to be valid based on the second trajectory deviation, to determine the trajectory accuracy of the machine tool under test based on the first trajectory deviation;

[0031] The first data acquisition device is used to acquire the first machining trajectory of the machine tool under test based on the synchronization signal during the operation of the machine tool under test and transmit it to the data processing device; wherein, the machine tool under test includes multiple motion axes, and the first machining trajectory includes the first motion trajectory detection value of each motion axis of the machine tool under test;

[0032] The second data acquisition device is used to acquire the second machining trajectory of the machine tool under test based on the synchronization signal during the operation of the machine tool under test and transmit it to the data processing device; wherein, the second machining trajectory includes the second motion trajectory detection value of a preset axis among multiple motion axes of the machine tool under test.

[0033] According to the ultra-precision machine tool multi-axis linkage trajectory accuracy detection system provided by the present invention, the first data acquisition device includes a data acquisition circuit and a data processing circuit;

[0034] The data acquisition circuit, the data processing circuit, and the data processing device are connected in sequence; the data acquisition circuit is also connected to the output port of the positioning device of each motion axis of the machine tool under test.

[0035] The data acquisition circuit is used to acquire the initial machining trajectory of the machine tool under test in real time and output it to the data processing circuit;

[0036] The data processing circuit is used to perform signal sampling processing on the initial processing trajectory based on the synchronization signal to obtain the first processing trajectory, and output it to the data processing device.

[0037] According to the ultra-precision machine tool multi-axis linkage trajectory accuracy detection system provided by the present invention, the second data acquisition device includes a displacement sensing device disposed on each of the preset axes; the displacement sensing device is used to acquire the displacement signal of the corresponding preset axis based on the synchronization signal.

[0038] The present invention provides a method, apparatus, and system for detecting the multi-axis linkage trajectory accuracy of ultra-precision machine tools. This method acquires a first machining trajectory and a second machining trajectory of the machine tool under test during its operation. The first and second machining trajectories are acquired synchronously. The first machining trajectory includes the first motion trajectory detection value of each motion axis of the machine tool under test, and the second machining trajectory includes the second motion trajectory detection value of a preset axis among the motion axes of the machine tool under test. Based on the first machining trajectory and the first target machining trajectory of the machine tool under test, a first trajectory deviation of the machine tool under test is determined. Similarly, based on the second machining trajectory and the first target machining trajectory, a second trajectory deviation of the machine tool under test is determined. When the first trajectory deviation is determined to be valid based on the second trajectory deviation, the trajectory accuracy of the machine tool under test is determined based on the first trajectory deviation. This allows for comprehensive and accurate detection of the multi-axis linkage trajectory accuracy of the machine tool under test. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0040] Figure 1 This is a flowchart illustrating the method for detecting the multi-axis linkage trajectory accuracy of ultra-precision machine tools provided by the present invention.

[0041] Figure 2 This is a schematic diagram of the structure of the ultra-precision machine tool multi-axis linkage trajectory accuracy detection device provided by the present invention;

[0042] Figure 3 This is a schematic diagram of the structure of the ultra-precision machine tool multi-axis linkage trajectory accuracy detection system provided by the present invention;

[0043] Figure 4 This is a schematic diagram of the structure of the electronic device provided by the present invention. Detailed Implementation

[0044] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0045] The following is combined Figure 1This invention describes a method for detecting the accuracy of multi-axis linkage trajectory in ultra-precision machine tools. This method is executed by electronic devices such as computers and servers, or by the hardware and / or software therein. Figure 1 As shown, the method for detecting the multi-axis linkage trajectory accuracy of ultra-precision machine tools according to the present invention includes at least the following:

[0046] S101. During the operation of the machine tool under test, the first machining trajectory and the second machining trajectory of the machine tool under test are acquired respectively; wherein, the first machining trajectory and the second machining trajectory are acquired synchronously, the machine tool under test includes multiple motion axes, the first machining trajectory includes the first motion trajectory detection value of each motion axis of the machine tool under test, and the second machining trajectory includes the second motion trajectory detection value of a preset axis among the multiple motion axes of the machine tool under test;

[0047] S102. Based on the first machining trajectory and the first target machining trajectory of the machine tool under test, determine the first trajectory deviation of the machine tool under test, and based on the second machining trajectory and the first target machining trajectory, determine the second trajectory deviation of the machine tool under test.

[0048] S103. When the first trajectory deviation is determined to be valid based on the second trajectory deviation, the trajectory accuracy of the machine tool under test is determined based on the first trajectory deviation.

[0049] In this embodiment, the machine tool under test (MDT) is an ultra-precision machine tool. The MDT may include multiple motion axes to achieve high-speed and precise machining of non-axisymmetric aspherical or freeform optical components through multi-axis linkage. The multiple motion axes of the MDT may include linear motion axes, and may also include both linear and rotary motion axes simultaneously. For example, the MDT may include three linear motion axes and two rotary motion axes.

[0050] The operation process of the machine tool under test (MDT) can represent its normal operation. By detecting the multi-axis linkage trajectory accuracy, real-time monitoring of the machining accuracy of the MDT can be achieved. Furthermore, if the multi-axis linkage trajectory accuracy of the MDT does not meet requirements, timely adjustments can be made. The MDT's operation process can also represent its debugging process, allowing for optimization or adjustment based on the detected multi-axis linkage trajectory accuracy.

[0051] The first machining trajectory of the machine tool under test (MTBT) may include the first motion trajectory detection value of each motion axis of the MTBT. For any one of the multiple motion axes of the MTBT, the first motion trajectory detection value of that motion axis may include multiple first moments and the first displacement detection value of that motion axis at each first moment. A preset axis may be a linear motion axis among the multiple motion axes of the MTBT; for example, a preset axis may be one or more of three linear motion axes. The second machining trajectory of the MTBT may include the second motion trajectory detection values ​​of each preset axis of the MTBT. For any one of the one or more preset axes, the second motion trajectory detection value may include multiple second moments and the second displacement detection value of that preset axis at each second moment. The first and second machining trajectories are acquired synchronously; that is, the first moments in the first motion trajectory detection values ​​of different motion axes correspond to the same moment, the second moments in the second motion trajectory detection values ​​of different preset axes correspond to the same moment, and the first moments in the first motion trajectory detection values ​​and the second moments in the second motion trajectory detection values ​​correspond to the same moment.

[0052] In practical applications, the first machining trajectory can be acquired by a first data acquisition device, and the second machining trajectory can be acquired by a second data acquisition device. The first data acquisition device can acquire the initial motion trajectory acquired by the positioning device of each motion axis in the machine tool under test, and process the initial motion trajectory of each motion axis to obtain the first machining trajectory. The positioning device of the motion axis itself can be a grating ruler set on the motion axis. The second data acquisition device can include a displacement sensing device externally mounted on each preset axis of the machine tool under test; wherein, each displacement sensing device can be used to acquire the second motion trajectory detection value of the corresponding motion axis.

[0053] The first target machining trajectory of the machine tool under test includes the target value of the motion trajectory of each motion axis of the machine tool under test. It can be a machining trajectory set according to machining requirements, for example, a machining trajectory set in the control program of the machine tool under test. For any one of the multiple motion axes of the machine tool under test, the target value of the trajectory of that motion axis can include the target value of the displacement of that motion axis at each moment.

[0054] In practical applications, a first trajectory deviation of the machine tool under test can be determined based on a first machining trajectory and a first target machining trajectory, and a second trajectory deviation of the machine tool under test can be determined based on a second machining trajectory and a first target machining trajectory. For example, the first trajectory deviation can be determined based on the difference between the first target machining trajectory and the first machining trajectory, and the second trajectory deviation can be determined based on the difference between the first target machining trajectory and the second machining trajectory.

[0055] After obtaining the first trajectory deviation and the second trajectory deviation, the validity of the first trajectory deviation can be self-checked using the second trajectory deviation. For example, the validity of the first trajectory deviation can be self-checked based on the absolute value of the difference between the second trajectory deviation and the first trajectory deviation. It is understood that the reliability of the second machining trajectory can be greater than that of the first machining trajectory, thereby effectively improving the accuracy of the detection results for the trajectory accuracy of the machine tool under test.

[0056] The trajectory accuracy of the machine tool under test (MDT) can be considered as the trajectory accuracy of its machining trajectory. If the first trajectory deviation is valid, the trajectory accuracy of the MDT can be determined based on this deviation. Since the first machining trajectory includes the first motion trajectory detection value of each motion axis of the MDT, a comprehensive detection of the MDT's trajectory accuracy can be achieved based on the first trajectory deviation. Simultaneously, the validity of the first trajectory deviation is self-checked using a second trajectory deviation, further ensuring the accuracy of the MDT's trajectory accuracy detection results. For example, the trajectory accuracy of each motion axis can be determined based on the first trajectory deviation, and the trajectory accuracy of the MDT's machining trajectory can be determined based on the trajectory accuracy of each motion axis.

[0057] In addition, if the first trajectory deviation is invalid, it indicates that the error of the first data acquisition device corresponding to the first machining trajectory and / or the positioning device of each motion axis in the machine tool under test is too large or there is a fault. The machine tool under test can be controlled to stop operation and the fault can be rectified in time.

[0058] This embodiment acquires a first machining trajectory and a second machining trajectory of the machine tool under test during its operation. The first and second machining trajectories are acquired synchronously. The first machining trajectory includes the first motion trajectory detection value of each motion axis of the machine tool under test, and the second machining trajectory includes the second motion trajectory detection value of a preset axis among the motion axes of the machine tool under test. Based on the first machining trajectory and the first target machining trajectory of the machine tool under test, a first trajectory deviation of the machine tool under test is determined, and a second trajectory deviation of the machine tool under test is determined based on the second machining trajectory and the first target machining trajectory. When the first trajectory deviation is determined to be valid based on the second trajectory deviation, the trajectory accuracy of the machine tool under test is determined based on the first trajectory deviation. This enables a comprehensive and accurate detection of the multi-axis linkage trajectory accuracy of the machine tool under test.

[0059] In an exemplary embodiment, determining the first trajectory deviation of the machine tool under test based on the first machining trajectory and the first target machining trajectory of the machine tool under test includes:

[0060] Obtain the difference between the first target processing trajectory and the first processing trajectory;

[0061] The first trajectory deviation is determined based on the difference between the first target processing trajectory and the first processing trajectory.

[0062] In this embodiment, during the process of determining the first trajectory deviation of the machine tool under test, the difference between the first target machining trajectory and the first machining trajectory can be obtained. Specifically, the first target trajectory point corresponding to each first moment in the first machining trajectory in the first target machining trajectory can be determined. For any one of multiple first moments, the corresponding first target trajectory point includes the target value of the displacement of each motion axis of the machine tool under test at that first moment.

[0063] After obtaining the first target trajectory point corresponding to each first moment, for any one of the multiple first moments, the first difference between the first target trajectory point corresponding to that first moment and the first trajectory point corresponding to that first moment in the first machining trajectory can be obtained. The first difference corresponding to each first moment constitutes the difference between the first target machining trajectory and the first machining trajectory. The first trajectory point corresponding to the first moment includes the first displacement detection value of each motion axis of the machine tool under test at that first moment. The target value of the displacement of each motion axis at that first moment can be subtracted from the first displacement detection value at that first moment to obtain the first displacement deviation of each motion axis at that first moment. That is, the first difference corresponding to the first moment includes the first displacement deviation of each motion axis of the machine tool under test at that first moment.

[0064] As an optional implementation, the difference between the first target processing trajectory and the first processing trajectory can be represented by a two-dimensional matrix.

[0065] After obtaining the difference between the first target machining trajectory and the first machining trajectory, the difference between the first target machining trajectory and the first machining trajectory can be directly used as the first trajectory deviation, thereby enabling the rapid and effective determination of the first trajectory deviation of the machine tool under test.

[0066] In an exemplary embodiment, determining the second trajectory deviation of the machine tool under test based on the second machining trajectory and the first target machining trajectory includes:

[0067] Obtain the motion trajectory target values ​​of each preset axis in the first target machining trajectory to obtain the second target machining trajectory; wherein, the first target machining trajectory includes the motion trajectory target values ​​of each motion axis of the machine tool under test;

[0068] The deviation of the second trajectory is determined based on the difference between the second target machining trajectory and the second machining trajectory.

[0069] In this embodiment, the first target machining trajectory of the machine tool under test includes the target value of the motion trajectory of each motion axis of the machine tool under test, and the target value of the motion trajectory of each preset axis in the first target machining trajectory can be used as the second target machining trajectory.

[0070] In determining the second trajectory deviation of the machine tool under test, the difference between the second target machining trajectory and the second machining trajectory can be obtained. Specifically, the second target trajectory point corresponding to each second moment in the second machining trajectory can be determined in the second target machining trajectory. For any given second moment among multiple second moments, the corresponding second target trajectory point includes the target value of the displacement of each preset axis of the machine tool under test at that second moment.

[0071] After obtaining the second target trajectory points corresponding to each second time moment, for any second time moment among multiple second time moments, a second difference can be obtained between the second target trajectory point corresponding to that second time moment and the second trajectory point corresponding to that second time moment in the second machining trajectory. The second difference values ​​corresponding to each second time moment constitute the difference between the second target machining trajectory and the second machining trajectory. The second trajectory points corresponding to the second time moment include the second displacement detection values ​​of each preset axis of the machine tool under test at that second time moment. The target value of the displacement of each preset axis at that second time moment can be subtracted from the second displacement detection value at that second time moment to obtain the second displacement deviation of each preset axis at that second time moment. That is, the second difference value corresponding to the second time moment includes the second displacement deviation of each preset axis of the machine tool under test at that second time moment.

[0072] As an optional implementation, when there are multiple preset axes, the difference between the second target machining trajectory and the second machining trajectory can be represented by a two-dimensional matrix.

[0073] After obtaining the difference between the second target machining trajectory and the second machining trajectory, the difference between the second target machining trajectory and the second machining trajectory can be directly used as the second trajectory deviation, thereby enabling the rapid and effective determination of the second trajectory deviation of the machine tool under test.

[0074] In an exemplary embodiment, the method for determining whether the first trajectory deviation is valid based on the second trajectory deviation includes:

[0075] Obtain the trajectory deviation corresponding to each preset axis in the first trajectory deviation to obtain the third trajectory deviation;

[0076] The validity of the first trajectory deviation is determined based on the absolute value of the difference between the third trajectory deviation and the second trajectory deviation.

[0077] In this embodiment, the first trajectory deviation of the machine tool under test includes the trajectory deviation corresponding to each motion axis of the machine tool under test. For any one of the multiple motion axes of the machine tool under test, its corresponding trajectory deviation includes the first displacement deviation of that motion axis at each first moment. The trajectory deviations corresponding to each preset axis in the first trajectory deviation can be used as the third trajectory deviation.

[0078] In determining whether the first trajectory deviation is valid, the absolute value of the difference between the third trajectory deviation and the second trajectory deviation can be obtained. Specifically, for any given second time point, the difference between the second difference at that second time point and the first difference at the corresponding first time point can be calculated, and this difference becomes the third difference at that second time point. The absolute value of the third difference at each second time point constitutes the absolute value of the difference between the third trajectory deviation and the second trajectory deviation. The absolute value of the third difference at each second time point includes the absolute value of the difference between the first displacement deviation and the second displacement deviation for each preset axis at that second time point.

[0079] In practical applications, the validity of the first trajectory deviation can be determined based on the absolute value of the difference between the third trajectory deviation and the second trajectory deviation. For example, if the absolute value of the third difference corresponding to each second moment is less than or equal to a preset value, it indicates that the first trajectory deviation is valid; otherwise, it indicates that the first trajectory deviation is invalid. Specifically, for any second moment among multiple second moments, if the absolute value of the difference between the first displacement deviation and the second displacement deviation of each preset axis at that second moment is less than or equal to the preset value, it can be determined that the absolute value of the third difference corresponding to that second moment is less than or equal to the preset value. This allows for a quick and accurate self-check of the validity of the first trajectory deviation, further ensuring the reliability of the detection results of the trajectory accuracy of the machine tool under test.

[0080] In an exemplary embodiment, determining the trajectory accuracy of the machine tool under test based on the first trajectory deviation includes:

[0081] Based on the trajectory deviation corresponding to each of the motion axes in the first trajectory deviation, and the motion trajectory target value of each of the motion axes in the first target machining trajectory, the trajectory accuracy corresponding to each of the motion axes is determined respectively;

[0082] The trajectory accuracy of the machine tool under test is determined based on the trajectory accuracy corresponding to each of the motion axes.

[0083] In this embodiment, for any one of the multiple motion axes of the machine tool under test, the trajectory deviation corresponding to the motion axis in the first trajectory deviation includes the first displacement deviation of the motion axis at each first moment. The trajectory target value of the motion axis may include the target value of the displacement of the motion axis at each moment. The trajectory accuracy of the motion axis at each first moment can be determined based on the first displacement deviation of the motion axis at each first moment and the target value of the displacement of the motion axis at each first moment. For example, for any one of the multiple first moments, the ratio of the absolute value of the first displacement deviation of the motion axis at the first moment to the target value of the displacement of the motion axis at the first moment can be obtained, and the trajectory accuracy of the motion axis at the first moment can be determined based on the ratio.

[0084] After obtaining the trajectory accuracy of the motion axis at each first moment, the trajectory accuracy of the motion axis at each first moment can be determined based on the trajectory accuracy of the motion axis at each first moment. For example, the lowest trajectory accuracy of the motion axis at each first moment can be taken as the trajectory accuracy of the motion axis, or the average of the trajectory accuracy of the motion axis at each first moment can be taken as the trajectory accuracy of the motion axis.

[0085] After obtaining the trajectory accuracy corresponding to each motion axis, the trajectory accuracy of the machining trajectory of the machine tool under test can be determined based on the trajectory accuracy corresponding to each motion axis, that is, the trajectory accuracy of the machine tool under test, so as to quickly and effectively determine the trajectory accuracy of the machine tool under test.

[0086] In practical applications, the trajectory accuracy of each motion axis can be weighted and summed based on the preset weight coefficients corresponding to each motion axis to obtain the trajectory accuracy of the machine tool under test. Alternatively, the trajectory accuracy of each motion axis can be used as the trajectory accuracy of the machine tool under test. That is, the trajectory accuracy of the machine tool under test includes the trajectory accuracy of each motion axis. For example, the trajectory accuracy of the machine tool under test can be represented in the form of a matrix, thereby realizing a quantitative evaluation of the trajectory accuracy of the machine tool under test.

[0087] In an exemplary embodiment, it also includes:

[0088] One or more of the first machining trajectory, the second machining trajectory, the first trajectory deviation, the second trajectory deviation, and the trajectory accuracy of the machine tool under test are sent to a preset terminal.

[0089] In this embodiment, the preset terminal can be a preset mobile terminal, such as a mobile phone, computer, tablet, etc., or it can be a display device, such as a display device installed on the machine tool under test, or a display device installed on a remote monitoring terminal.

[0090] One or more of the following can be sent to a preset terminal: the first machining trajectory, the second machining trajectory, the first trajectory deviation, the second trajectory deviation, and the trajectory accuracy of the machine tool under test. This enables real-time monitoring of the working status of the machine tool under test, facilitating timely adjustments by the operator and effectively ensuring the machining accuracy of the machine tool under test.

[0091] The following describes the ultra-precision machine tool multi-axis linkage trajectory accuracy detection device provided by the present invention. The ultra-precision machine tool multi-axis linkage trajectory accuracy detection device described below can be referred to in correspondence with the ultra-precision machine tool multi-axis linkage trajectory accuracy detection method described above. Figure 2 As shown, the ultra-precision machine tool multi-axis linkage trajectory accuracy detection device of the present invention includes at least:

[0092] The first processing module 201 is used to acquire a first machining trajectory and a second machining trajectory of the machine tool under test during the operation of the machine tool under test; wherein the first machining trajectory and the second machining trajectory are acquired synchronously, the machine tool under test includes multiple motion axes, the first machining trajectory includes the first motion trajectory detection value of each motion axis of the machine tool under test, and the second machining trajectory includes the second motion trajectory detection value of a preset axis among the multiple motion axes of the machine tool under test;

[0093] The second processing module 202 is used to determine a first trajectory deviation of the machine tool under test based on the first machining trajectory and the first target machining trajectory of the machine tool under test, and to determine a second trajectory deviation of the machine tool under test based on the second machining trajectory and the first target machining trajectory.

[0094] The third processing module 203 is used to determine the trajectory accuracy of the machine tool under test based on the first trajectory deviation when the first trajectory deviation is determined to be valid based on the second trajectory deviation.

[0095] In an exemplary embodiment, the second processing module 202 is specifically used for:

[0096] Obtain the difference between the first target processing trajectory and the first processing trajectory;

[0097] The first trajectory deviation is determined based on the difference between the first target processing trajectory and the first processing trajectory.

[0098] In an exemplary embodiment, the second processing module 202 is specifically used for:

[0099] Obtain the motion trajectory target values ​​of each preset axis in the first target machining trajectory to obtain the second target machining trajectory; wherein, the first target machining trajectory includes the motion trajectory target values ​​of each motion axis of the machine tool under test;

[0100] The deviation of the second trajectory is determined based on the difference between the second target machining trajectory and the second machining trajectory.

[0101] In an exemplary embodiment, the third processing module 203 is specifically used for:

[0102] Obtain the trajectory deviation corresponding to each preset axis in the first trajectory deviation to obtain the third trajectory deviation;

[0103] The validity of the first trajectory deviation is determined based on the absolute value of the difference between the third trajectory deviation and the second trajectory deviation.

[0104] In an exemplary embodiment, the third processing module 203 is specifically used for:

[0105] Based on the trajectory deviation corresponding to each of the motion axes in the first trajectory deviation, and the motion trajectory target value of each of the motion axes in the first target machining trajectory, the trajectory accuracy corresponding to each of the motion axes is determined respectively;

[0106] The trajectory accuracy of the machine tool under test is determined based on the trajectory accuracy corresponding to each of the motion axes.

[0107] In an exemplary embodiment, a fourth processing module is further included, the fourth processing module being used to:

[0108] One or more of the first machining trajectory, the second machining trajectory, the first trajectory deviation, the second trajectory deviation, and the trajectory accuracy of the machine tool under test are sent to a preset terminal.

[0109] The following describes the ultra-precision machine tool multi-axis linkage trajectory accuracy detection system provided by this invention. The ultra-precision machine tool multi-axis linkage trajectory accuracy detection system described below can be referred to in correspondence with the ultra-precision machine tool multi-axis linkage trajectory accuracy detection method described above. For example... Figure 3 As shown, the ultra-precision machine tool multi-axis linkage trajectory accuracy detection system of the present invention includes at least: a first data acquisition device 301, a second data acquisition device 302, and a data processing device 303;

[0110] The data processing device 303 is used to send a synchronization signal to the first data acquisition device 301 and the second data acquisition device 302; it is also used to determine a first trajectory deviation of the machine tool under test based on a first machining trajectory and a first target machining trajectory of the machine tool under test, and to determine a second trajectory deviation of the machine tool under test based on a second machining trajectory and the first target machining trajectory of the machine tool under test, and to determine the trajectory accuracy of the machine tool under test based on the first trajectory deviation when the first trajectory deviation is determined to be valid based on the second trajectory deviation;

[0111] The first data acquisition device 301 is used to acquire the first machining trajectory of the machine tool under test based on the synchronization signal during the operation of the machine tool under test and transmit it to the data processing device 303; wherein, the machine tool under test includes multiple motion axes, and the first machining trajectory includes the first motion trajectory detection value of each motion axis of the machine tool under test;

[0112] The second data acquisition device 302 is used to acquire the second machining trajectory of the machine tool under test based on the synchronization signal during the operation of the machine tool under test and transmit it to the data processing device 303; wherein, the second machining trajectory includes the second motion trajectory detection value of a preset axis among the multiple motion axes of the machine tool under test.

[0113] In an exemplary embodiment, the data processing device 303 is specifically used for:

[0114] Obtain the difference between the first target processing trajectory and the first processing trajectory;

[0115] The first trajectory deviation is determined based on the difference between the first target processing trajectory and the first processing trajectory.

[0116] In an exemplary embodiment, the data processing device 303 is specifically used for:

[0117] Obtain the motion trajectory target values ​​of each preset axis in the first target machining trajectory to obtain the second target machining trajectory; wherein, the first target machining trajectory includes the motion trajectory target values ​​of each motion axis of the machine tool under test;

[0118] The deviation of the second trajectory is determined based on the difference between the second target machining trajectory and the second machining trajectory.

[0119] In an exemplary embodiment, the data processing device 303 is specifically used for:

[0120] Obtain the trajectory deviation corresponding to each preset axis in the first trajectory deviation to obtain the third trajectory deviation;

[0121] The validity of the first trajectory deviation is determined based on the absolute value of the difference between the third trajectory deviation and the second trajectory deviation.

[0122] In an exemplary embodiment, the data processing device 303 is specifically used for:

[0123] Based on the trajectory deviation corresponding to each of the motion axes in the first trajectory deviation, and the motion trajectory target value of each of the motion axes in the first target machining trajectory, the trajectory accuracy corresponding to each of the motion axes is determined respectively;

[0124] The trajectory accuracy of the machine tool under test is determined based on the trajectory accuracy corresponding to each of the motion axes.

[0125] In an exemplary embodiment, the data processing device 303 is further configured to:

[0126] One or more of the first machining trajectory, the second machining trajectory, the first trajectory deviation, the second trajectory deviation, and the trajectory accuracy of the machine tool under test are sent to a preset terminal.

[0127] In an exemplary embodiment, the first data acquisition device 301 includes a data acquisition circuit and a data processing circuit;

[0128] The data acquisition circuit, the data processing circuit, and the data processing device 303 are connected in sequence; the data acquisition circuit is also connected to the output port of the positioning device of each motion axis of the machine tool under test.

[0129] The data acquisition circuit is used to acquire the initial machining trajectory of the machine tool under test in real time and output it to the data processing circuit;

[0130] The data processing circuit is used to perform signal sampling processing on the initial processing trajectory based on the synchronization signal to obtain the first processing trajectory, and output it to the data processing device 303.

[0131] In this embodiment, the positioning device for each motion axis of the machine tool under test can be a grating ruler. For example, a grating ruler can be installed on each motion axis of the machine tool under test to detect the first displacement information of the corresponding motion axis in real time, forming the initial motion trajectory of that motion axis. The initial motion trajectory of each motion axis constitutes the initial machining trajectory of the machine tool under test. The machine tool under test can send the data collected by the grating rulers on each motion axis to its own control device as feedback for positioning control. It is understood that the signal output by the grating ruler can be a high-frequency subdivision voltage signal, that is, the initial motion trajectory of each motion axis is an analog signal.

[0132] The input terminal of the data acquisition circuit can be connected to the output port of the positioning device of each motion axis of the machine tool under test (MDT) to acquire the initial machining trajectory of the MDT in real time. The first output terminal of the data acquisition circuit can be connected to the data processing circuit, and the second output terminal can be connected to the control device of the MDT itself. This allows the data acquisition circuit to simultaneously output the acquired initial machining trajectory of the MDT to both the data processing circuit and the control device of the MDT, avoiding the data delay caused by the data acquisition circuit directly acquiring the initial machining trajectory from the control device of the MDT, thus ensuring the real-time performance of the initial machining trajectory output to the data processing circuit. The data acquisition circuit can employ a signal multiplier amplification circuit.

[0133] The input terminal of the data processing circuit is connected to the first output terminal of the data acquisition circuit, and the output terminal of the data processing circuit is connected to the input terminal of the data processing device 303. The data processing circuit may include one or more data processing sub-circuits. When multiple data processing sub-circuits exist, they are connected in parallel between the data acquisition circuit and the data processing device 303. The sum of the data output by the data acquisition circuit to each data processing sub-circuit is the initial machining trajectory of the machine tool under test.

[0134] As an optional implementation, when the machine tool under test includes both linear motion axes and rotary motion axes, the number of data processing sub-circuits is two. The data acquisition circuit sends the initial motion trajectory corresponding to the linear motion axis to the first data processing sub-circuit and sends the initial motion trajectory corresponding to the rotary motion axis to the other data processing sub-circuit.

[0135] The data processing circuit is used to sample and process the initial machining trajectory based on the synchronization signal to obtain the first machining trajectory, and output it to the data processing device 303. The synchronization signal can be a high-frequency pulse sequence. The data processing sub-circuit can determine each first moment based on the synchronization signal, and sample the initial motion trajectory of each motion axis in the received data based on each first moment to obtain the first motion trajectory detection value corresponding to the corresponding motion axis, and send it to the data processing device 303. The first motion trajectory detection values ​​corresponding to all motion axes of the machine tool under test constitute the first machining trajectory. The data processing circuit can employ an encoder. The high-frequency subdivision voltage signal is sampled and processed by the encoder, and outputs the first displacement detection value of the corresponding motion axis, as well as the first moment corresponding to each first displacement detection value.

[0136] In an exemplary embodiment, the second data acquisition device 302 includes displacement sensing devices disposed on each of the preset axes; the displacement sensing devices are used to acquire displacement signals of the corresponding preset axes based on the synchronization signal.

[0137] In this embodiment, the second data acquisition device 302 may include a displacement sensing device externally mounted on each preset axis of the machine tool under test. The displacement sensing device can determine each second moment based on the synchronization signal and acquire the second displacement information of the corresponding motion axis at each second moment to obtain the second motion trajectory detection value of the motion axis.

[0138] The reliability of the data acquired by the second data acquisition device 302 is higher than that of the data acquired by the positioning devices of each motion axis of the machine tool under test. For example, the second data acquisition device 302 can use displacement sensing devices with built-in reference devices or reference surfaces, such as laser interferometers or radar lasers, thereby ensuring the effectiveness of the second trajectory deviation, and thus ensuring the reliability of the self-check results of the effectiveness of the first trajectory deviation, further improving the reliability of the determination results of the trajectory accuracy of the machine tool under test.

[0139] Figure 4 An example is a schematic diagram of the physical structure of an electronic device, such as... Figure 4 As shown, the electronic device may include: a processor 401, a communication interface 402, a memory 403, and a communication bus 404. The processor 401, communication interface 402, and memory 403 communicate with each other via the communication bus 404. The processor 401 can call logical instructions in the memory 403 to execute a method for detecting the accuracy of multi-axis linkage trajectory of an ultra-precision machine tool. This method includes: during the operation of the machine tool under test, acquiring a first machining trajectory and a second machining trajectory of the machine tool under test; wherein the first machining trajectory and the second machining trajectory are acquired synchronously, the machine tool under test includes multiple motion axes, the first machining trajectory includes the first motion trajectory detection value of each motion axis of the machine tool under test, and the second machining trajectory includes the second motion trajectory detection value of a preset axis among the multiple motion axes of the machine tool under test.

[0140] Based on the first machining trajectory and the first target machining trajectory of the machine tool under test, a first trajectory deviation of the machine tool under test is determined, and based on the second machining trajectory and the first target machining trajectory, a second trajectory deviation of the machine tool under test is determined.

[0141] When the first trajectory deviation is determined to be valid based on the second trajectory deviation, the trajectory accuracy of the machine tool under test is determined based on the first trajectory deviation.

[0142] Furthermore, the logical instructions in the aforementioned memory 403 can be implemented as software functional units and, when sold or used as independent products, can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, essentially, or the part that contributes to the prior art, or a part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0143] On the other hand, the present invention also provides a computer program product, which includes a computer program that can be stored on a non-transitory computer-readable storage medium. When the computer program is executed by a processor, the computer can execute the ultra-precision machine tool multi-axis linkage trajectory accuracy detection method provided by the above methods. The method includes: acquiring a first machining trajectory and a second machining trajectory of the machine tool under test during operation; wherein the first machining trajectory and the second machining trajectory are acquired synchronously, the machine tool under test includes multiple motion axes, the first machining trajectory includes a first motion trajectory detection value of each motion axis of the machine tool under test, and the second machining trajectory includes a second motion trajectory detection value of a preset axis among the multiple motion axes of the machine tool under test.

[0144] Based on the first machining trajectory and the first target machining trajectory of the machine tool under test, a first trajectory deviation of the machine tool under test is determined, and based on the second machining trajectory and the first target machining trajectory, a second trajectory deviation of the machine tool under test is determined.

[0145] When the first trajectory deviation is determined to be valid based on the second trajectory deviation, the trajectory accuracy of the machine tool under test is determined based on the first trajectory deviation.

[0146] In another aspect, the present invention also provides a non-transitory computer-readable storage medium storing a computer program thereon. When executed by a processor, the computer program implements the method for detecting the accuracy of multi-axis linkage trajectory of ultra-precision machine tools provided by the above methods. The method includes: acquiring a first machining trajectory and a second machining trajectory of the machine tool under test during operation; wherein the first machining trajectory and the second machining trajectory are acquired synchronously, the machine tool under test includes multiple motion axes, the first machining trajectory includes a first motion trajectory detection value of each motion axis of the machine tool under test, and the second machining trajectory includes a second motion trajectory detection value of a preset axis among the multiple motion axes of the machine tool under test.

[0147] Based on the first machining trajectory and the first target machining trajectory of the machine tool under test, a first trajectory deviation of the machine tool under test is determined, and based on the second machining trajectory and the first target machining trajectory, a second trajectory deviation of the machine tool under test is determined.

[0148] When the first trajectory deviation is determined to be valid based on the second trajectory deviation, the trajectory accuracy of the machine tool under test is determined based on the first trajectory deviation.

[0149] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without any creative effort.

[0150] Through the above description of the embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus necessary general-purpose hardware platforms, and of course, it can also be implemented by hardware. Based on this understanding, the above technical solutions, in essence or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute the methods described in the various embodiments or some parts of the embodiments.

[0151] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for detecting the accuracy of multi-axis linkage trajectory in ultra-precision machine tools, characterized in that, include: During the operation of the machine tool under test, a first machining trajectory and a second machining trajectory of the machine tool under test are acquired respectively; wherein, the first machining trajectory and the second machining trajectory are acquired synchronously, the machine tool under test includes multiple motion axes, the first machining trajectory includes the first motion trajectory detection value of each motion axis of the machine tool under test, and the second machining trajectory includes the second motion trajectory detection value of a preset axis among the multiple motion axes of the machine tool under test; wherein, the preset axis is a linear motion axis among the multiple motion axes of the machine tool under test; Based on the first machining trajectory and the first target machining trajectory of the machine tool under test, a first trajectory deviation of the machine tool under test is determined, and based on the second machining trajectory and the first target machining trajectory, a second trajectory deviation of the machine tool under test is determined. When the first trajectory deviation is determined to be valid based on the second trajectory deviation, the trajectory accuracy of the machine tool under test is determined based on the first trajectory deviation. The method for determining whether the first trajectory deviation is valid based on the second trajectory deviation includes: Obtain the trajectory deviation corresponding to each preset axis in the first trajectory deviation to obtain the third trajectory deviation; Based on the absolute value of the difference between the third trajectory deviation and the second trajectory deviation, determine whether the first trajectory deviation is valid; The step of determining the trajectory accuracy of the machine tool under test based on the first trajectory deviation includes: Based on the ratio of the absolute value of the trajectory deviation corresponding to each motion axis in the first trajectory deviation at the first moment to the target value of the motion trajectory of each motion axis in the first target machining trajectory at the first moment, the trajectory accuracy corresponding to each motion axis is determined respectively; wherein, the lowest trajectory accuracy among the trajectory accuracies corresponding to each motion axis at each first moment is taken as the trajectory accuracy corresponding to that motion axis. Based on the preset weighting coefficients corresponding to each motion axis, the trajectory accuracy corresponding to each motion axis is weighted and summed to obtain the trajectory accuracy of the machine tool under test.

2. The method for detecting the accuracy of multi-axis linkage trajectory of ultra-precision machine tools according to claim 1, characterized in that, The step of determining the first trajectory deviation of the machine tool under test based on the first machining trajectory and the first target machining trajectory of the machine tool under test includes: Obtain the difference between the first target processing trajectory and the first processing trajectory; The first trajectory deviation is determined based on the difference between the first target processing trajectory and the first processing trajectory.

3. The method for detecting the accuracy of multi-axis linkage trajectory of ultra-precision machine tools according to claim 1, characterized in that, The step of determining the second trajectory deviation of the machine tool under test based on the second machining trajectory and the first target machining trajectory includes: Obtain the motion trajectory target values ​​of each preset axis in the first target machining trajectory to obtain the second target machining trajectory; wherein, the first target machining trajectory includes the motion trajectory target values ​​of each motion axis of the machine tool under test; The deviation of the second trajectory is determined based on the difference between the second target machining trajectory and the second machining trajectory.

4. The method for detecting the accuracy of multi-axis linkage trajectory of ultra-precision machine tools according to any one of claims 1 to 3, characterized in that, Also includes: One or more of the first machining trajectory, the second machining trajectory, the first trajectory deviation, the second trajectory deviation, and the trajectory accuracy of the machine tool under test are sent to a preset terminal.

5. A device for detecting the accuracy of multi-axis linkage trajectory of an ultra-precision machine tool, characterized in that, include: A first processing module is used to acquire a first machining trajectory and a second machining trajectory of the machine tool under test during operation; wherein the first machining trajectory and the second machining trajectory are acquired synchronously, the machine tool under test includes multiple motion axes, the first machining trajectory includes the first motion trajectory detection value of each motion axis of the machine tool under test, and the second machining trajectory includes the second motion trajectory detection value of a preset axis among the multiple motion axes of the machine tool under test; wherein the preset axis is a linear motion axis among the multiple motion axes of the machine tool under test. The second processing module is used to determine a first trajectory deviation of the machine tool under test based on the first machining trajectory and the first target machining trajectory of the machine tool under test, and to determine a second trajectory deviation of the machine tool under test based on the second machining trajectory and the first target machining trajectory. The third processing module is used to determine the trajectory accuracy of the machine tool under test based on the first trajectory deviation when the first trajectory deviation is determined to be valid based on the second trajectory deviation. The method for determining whether the first trajectory deviation is valid based on the second trajectory deviation includes: Obtain the trajectory deviation corresponding to each preset axis in the first trajectory deviation to obtain the third trajectory deviation; Based on the absolute value of the difference between the third trajectory deviation and the second trajectory deviation, determine whether the first trajectory deviation is valid; The step of determining the trajectory accuracy of the machine tool under test based on the first trajectory deviation includes: Based on the ratio of the absolute value of the trajectory deviation corresponding to each motion axis in the first trajectory deviation at the first moment to the target value of the motion trajectory of each motion axis in the first target machining trajectory at the first moment, the trajectory accuracy corresponding to each motion axis is determined respectively; wherein, the lowest trajectory accuracy among the trajectory accuracies corresponding to each motion axis at each first moment is taken as the trajectory accuracy corresponding to that motion axis. Based on the preset weighting coefficients corresponding to each motion axis, the trajectory accuracy corresponding to each motion axis is weighted and summed to obtain the trajectory accuracy of the machine tool under test.

6. A multi-axis linkage trajectory accuracy detection system for ultra-precision machine tools, characterized in that, include: A first data acquisition device, a second data acquisition device, and a data processing device; The data processing device is used to send synchronization signals to the first data acquisition device and the second data acquisition device; it is also used to determine a first trajectory deviation of the machine tool under test based on a first machining trajectory and a first target machining trajectory of the machine tool under test, and to determine a second trajectory deviation of the machine tool under test based on a second machining trajectory and the first target machining trajectory of the machine tool under test, and when the first trajectory deviation is determined to be valid based on the second trajectory deviation, to determine the trajectory accuracy of the machine tool under test based on the first trajectory deviation; The method for determining whether the first trajectory deviation is valid based on the second trajectory deviation includes: Obtain the trajectory deviation corresponding to each preset axis in the first trajectory deviation to obtain the third trajectory deviation; Based on the absolute value of the difference between the third trajectory deviation and the second trajectory deviation, determine whether the first trajectory deviation is valid; The step of determining the trajectory accuracy of the machine tool under test based on the first trajectory deviation includes: Based on the ratio of the absolute value of the trajectory deviation corresponding to each motion axis in the first trajectory deviation at the first moment to the target value of the motion trajectory of each motion axis in the first target machining trajectory at the first moment, the trajectory accuracy corresponding to each motion axis is determined respectively; wherein, the lowest trajectory accuracy among the trajectory accuracies corresponding to each motion axis at the first moment is taken as the trajectory accuracy corresponding to that motion axis. Based on the preset weighting coefficients corresponding to each motion axis, the trajectory accuracy corresponding to each motion axis is weighted and summed to obtain the trajectory accuracy of the machine tool under test. The first data acquisition device is used to acquire the first machining trajectory of the machine tool under test based on the synchronization signal during the operation of the machine tool under test and transmit it to the data processing device; wherein, the machine tool under test includes multiple motion axes, and the first machining trajectory includes the first motion trajectory detection value of each motion axis of the machine tool under test; The second data acquisition device is used to acquire the second machining trajectory of the machine tool under test based on the synchronization signal during the operation of the machine tool under test and transmit it to the data processing device; wherein, the second machining trajectory includes the second motion trajectory detection value of a preset axis among the multiple motion axes of the machine tool under test; wherein, the preset axis is the motion axis that performs linear motion among the multiple motion axes of the machine tool under test.

7. The ultra-precision machine tool multi-axis linkage trajectory accuracy detection system according to claim 6, characterized in that, The first data acquisition device includes a data acquisition circuit and a data processing circuit; The data acquisition circuit, the data processing circuit, and the data processing device are connected in sequence; the data acquisition circuit is also connected to the output port of the positioning device of each motion axis of the machine tool under test. The data acquisition circuit is used to acquire the initial machining trajectory of the machine tool under test in real time and output it to the data processing circuit; The data processing circuit is used to perform signal sampling processing on the initial processing trajectory based on the synchronization signal to obtain the first processing trajectory, and output it to the data processing device.

8. The ultra-precision machine tool multi-axis linkage trajectory accuracy detection system according to claim 6, characterized in that, The second data acquisition device includes displacement sensing devices disposed on each of the preset axes; the displacement sensing devices are used to acquire displacement signals of the corresponding preset axes based on the synchronization signal.

Images