Light element detection device and detection method

By using a detection device and pressure control system that are divided into upper and lower cavities, the problems of airtightness and high cost in the detection of light elements are solved, and efficient fluorescence response of light elements and reduced interference from cavity materials are achieved.

CN116735639BActive Publication Date: 2026-06-26LIHE TECH (HUNAN) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
LIHE TECH (HUNAN) CO LTD
Filing Date
2023-05-12
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

In existing technologies, helium filling or vacuuming methods for light element detection have problems such as high airtightness requirements, high cost, and increased interference from the background material of the cavity, and cannot effectively improve the fluorescence responsivity of light elements.

Method used

The detection device is divided into two chambers, upper and lower. Helium is introduced into the first chamber to enhance the fluorescence response, while a preset gas is introduced into the second chamber to absorb X-rays that penetrate the sample and the fluorescence of the chamber material. Combined with a pressure control system, the gas pressure of each chamber is adjusted to optimize the detection environment.

Benefits of technology

It effectively improves the X-ray fluorescence response intensity of light elements, reduces the interference of cavity materials on detection, simplifies the airtightness requirements of the equipment, and reduces costs.

✦ Generated by Eureka AI based on patent content.

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    Figure CN116735639B_ABST
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Abstract

The application discloses a light element detection device and a detection method, which are used for detecting light elements of a film sample and comprise an analysis chamber, an X-ray generating mechanism, a detection mechanism, a first gas source and a second gas source. The analysis chamber comprises a first cavity and a second cavity, and an opening is arranged between the first cavity and the second cavity. A detection position is arranged at the opening and used for placing a sample to be detected. The X-ray generating mechanism is used for providing X-ray irradiation to the surface of the sample to excite the sample to generate X-ray fluorescence. The detection mechanism is used for detecting the X-ray fluorescence. The first gas source is used for providing helium to the first cavity. The second gas source is used for providing a preset gas to the second cavity. The preset gas is used for absorbing the X-ray penetrating through the sample or is used for absorbing the X-ray penetrating through the sample and X-ray fluorescence generated by exciting the material of the second cavity, so as to reduce the interference on the detection of the sample.
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