Vacuum capacitor and radio frequency matcher

Abstract

The application provides a vacuum capacitor and a radio frequency matching device. The vacuum capacitor comprises a shell assembly, a magnetic levitation driving coil set, a magnetic levitation mover, a connecting piece, a shielding piece, a movable electrode and a fixed electrode. The shell assembly is arranged along the direction of an axis and has a closed vacuum chamber formed inside. The magnetic levitation mover, the connecting piece, the shielding piece, the movable electrode and the fixed electrode are all accommodated in the vacuum chamber. The shielding piece divides the vacuum chamber into a first region and a second region. The movable electrode is movably arranged in the first region along the direction of the axis, the fixed electrode is fixedly arranged in the first region, the magnetic levitation mover is movably arranged in the second region along the direction of the axis, the connecting piece penetrates through the shielding piece along the direction of the axis and is connected with the magnetic levitation mover and the movable electrode respectively, and the magnetic levitation driving coil set is arranged outside the shell assembly corresponding to the second region and is used for driving the magnetic levitation mover and moving the movable electrode along the direction of the axis through the connecting piece.

Description

Technical Field

[0001] This invention relates to the field of semiconductor device technology, and in particular to a vacuum capacitor and radio frequency matching device. Background Technology

[0002] In some RF matching circuits, high-power vacuum capacitors with adjustable capacitance are required to match impedance. Existing vacuum capacitors adjust capacitance by varying the spacing of their electrodes. To achieve electrode position adjustment, bellows are often used to balance vacuum sealing and electrode mobility. However, bellows have limited mechanical life and slow speed response, affecting the capacitance adjustment response speed of the vacuum capacitor. Furthermore, the pressure difference between the vacuum inside the capacitor and the external atmospheric pressure creates a significant resistance to atmospheric pressure when the moving electrode moves away from the fixed electrode, also impacting the capacitance adjustment response speed. Summary of the Invention

[0003] The purpose of this invention is to provide a vacuum capacitor and an RF matching device to solve the problems of short lifespan and slow response speed of existing vacuum capacitors.

[0004] To solve the above-mentioned technical problems, the present invention provides a vacuum capacitor, which includes: a housing assembly, a magnetic levitation drive coil assembly, a magnetic float, a connector, a shield, a movable electrode, and a fixed electrode;

[0005] The housing assembly is arranged along an axis, forming a sealed vacuum chamber inside; the magnetic float, the connector, the shield, the movable electrode, and the fixed electrode are all housed within the vacuum chamber;

[0006] Along the axis, the shield divides the vacuum chamber into a first region and a second region; the movable electrode is movably disposed in the first region along the axis, the fixed electrode is fixedly disposed in the first region, the magnetic float is movably disposed in the second region along the axis, and the connector movably penetrates the shield along the axis and is connected to the magnetic float and the movable electrode respectively.

[0007] The magnetic levitation drive coil group is wound around the outside of the housing assembly corresponding to the second region. The magnetic levitation drive coil group is used to drive the magnetic float to move along the direction of the axis, and to drive the movable electrode to move along the direction of the axis through the connector.

[0008] The vacuum capacitor has a movable electrode lead, a fixed electrode lead, and a shielding lead, which are respectively connected to the movable electrode, the fixed electrode, and the shielding component.

[0009] Optionally, the vacuum capacitor further includes a flexible electrode lead disposed in the first region; one end of the flexible electrode lead is connected to the movable electrode, and the other end is connected to the housing assembly, wherein the end of the flexible electrode lead connected to the housing assembly is configured as the movable electrode lead.

[0010] The flexible electrode lead-out member has a degree of freedom of deformation along the axis.

[0011] Optionally, the flexible electrode lead-out is a perforated sheet-like part, which also has an inner hole through which the connector passes; the inner periphery of the sheet-like part is connected to the movable electrode, and the outer periphery of the sheet-like part is connected to the housing assembly.

[0012] Optionally, the housing assembly includes two end caps, one end cap being electrically connected to the shielding element and the other end cap being electrically connected to the fixed electrode; the end cap electrically connected to the shielding element is configured as the shielding lead-out electrode, and the end cap electrically connected to the fixed electrode is configured as the fixed electrode lead-out electrode.

[0013] Optionally, the vacuum capacitor further includes a first guiding assembly; the first guiding assembly includes a guide rod and a guide sleeve disposed along the axis, one of the guide rod and the guide sleeve being disposed on the movable electrode and the other being disposed on the housing assembly; the guide rod is movably inserted into the guide sleeve along the axis and is restricted by the guide sleeve to a position perpendicular to the axis.

[0014] Optionally, the vacuum capacitor further includes a second guide assembly; the second guide assembly includes a bushing disposed on the shield, the bushing being used to limit the position of the connector in a direction perpendicular to the axis.

[0015] Optionally, the magnetic levitation drive coil group includes at least two coils, wherein at least one of the coils is used to drive the magnetic float to move along the axis, and at least another coil is used to define the position of the magnetic float in a direction perpendicular to the axis.

[0016] Optionally, the shielding element includes an electric field shielding layer and a magnetic field shielding layer along the axis, wherein the electric field shielding layer is made of a highly conductive material and the magnetic field shielding layer is made of a highly magnetic permeable material.

[0017] Optionally, the vacuum capacitor further includes a position detection module for detecting the position of the movable electrode along the axis.

[0018] To address the aforementioned technical problems, the present invention also provides an RF matching device, which includes the vacuum capacitor described above.

[0019] In summary, in the vacuum capacitor and RF matching device provided by the present invention, the vacuum capacitor includes a housing assembly, a magnetic levitation drive coil assembly, a magnetic float, a connector, a shield, a movable electrode, and a fixed electrode; the housing assembly is arranged along an axis, forming a sealed vacuum chamber inside; the magnetic float, the connector, the shield, the movable electrode, and the fixed electrode are all housed within the vacuum chamber; along the axis, the shield divides the vacuum chamber into a first region and a second region; the movable electrode is movably disposed in the first region along the axis, the fixed electrode is fixedly disposed in the first region, the magnetic float is movably disposed in the second region along the axis, the connector movably penetrates the shield along the axis and is connected to the magnetic float and the movable electrode respectively; the magnetic levitation drive coil assembly is wound around the outside of the housing assembly corresponding to the second region, the magnetic levitation drive coil assembly is used to drive the magnetic float to move along the axis, and drives the movable electrode to move along the axis through the connector.

[0020] This configuration, on the one hand, places all moving parts except the magnetic levitation drive coil assembly within the vacuum chamber formed by the housing assembly. This eliminates the need for mechanically variable sealing components like bellows inside and outside the vacuum chamber, improving the reliability and lifespan of the vacuum capacitor. Furthermore, the moving parts are unaffected by vacuum pressure differences, significantly reducing the driving force; driven by magnetic changes, the movement speed of the moving parts is greatly increased. On the other hand, the shielding component divides the vacuum chamber into a first region and a second region, effectively separating the electrode section from the magnetic levitation drive section and overcoming their mutual interference. Attached Figure Description

[0021] Those skilled in the art will understand that the accompanying drawings are provided to better understand the invention and do not constitute any limitation on the scope of the invention. Wherein:

[0022] Figure 1 This is a schematic diagram of a vacuum capacitor according to an embodiment of the present invention;

[0023] Figure 2 This is a schematic axial cross-sectional view of the vacuum capacitor according to an embodiment of the present invention;

[0024] Figure 3This is a schematic diagram of a sheet-like component according to an embodiment of the present invention;

[0025] Figure 4 This is a schematic diagram of the fixed electrode according to an embodiment of the present invention;

[0026] Figure 5 This is a schematic diagram of the movable electrode according to an embodiment of the present invention.

[0027] In the attached image:

[0028] 100 - Housing assembly; 110 - Vacuum chamber; 111 - First region; 112 - Second region; 120 - Insulating cylinder; 130 - End cap; 140 - Connecting terminal; 210 - Magnetic levitation drive coil assembly; 220 - Magnetic float; 300 - Connector; 400 - Shielding component; 510 - Movable electrode; 511 - First substrate; 512 - First electrode sheet; 513 - Connector; 520 - Fixed electrode; 521 - Second substrate; 522 - Second electrode sheet; 600 - Flexible electrode lead-out component; 610 - Sheet-shaped component; 620 - Inner hole; 700 - First guide assembly; 710 - Guide rod; 720 - Guide sleeve; 800 - Second guide assembly; 810 - Bushing. Detailed Implementation

[0029] To make the objectives, advantages, and features of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to facilitate and clarify the explanation of the embodiments of this invention. Furthermore, the structures shown in the drawings are often part of the actual structures. In particular, different figures may emphasize different aspects and may sometimes use different scales.

[0030] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the term “at least two” is generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature; “one end” and “the other end,” and “proximal end” and “distal end” generally refer to two corresponding parts, which include not only endpoints. Furthermore, the terms "installed," "connected," and "attached," as used in this invention, and the term "set" on one element from another, should be interpreted broadly. They generally only indicate a connection, coupling, cooperation, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial relationship between the two elements, meaning one element can be located inside, outside, above, below, or to one side of another element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances. Additionally, directional terms such as above, below, up, down, upward, downward, left, and right are used relative to exemplary embodiments as shown in the figures, with upward or upper directions pointing towards the top of the corresponding figure, and downward or lower directions pointing towards the bottom of the corresponding figure.

[0031] The purpose of this invention is to provide a vacuum capacitor and an RF matching device to solve the problems of short lifespan and slow response speed of existing vacuum capacitors. The following description refers to the accompanying drawings.

[0032] Please refer to Figures 1 to 5This invention provides a vacuum capacitor comprising: a housing assembly 100, a magnetic levitation drive coil assembly 210, a magnetic float 220, a connector 300, a shield 400, a movable electrode 510, and a fixed electrode 520; the housing assembly 100 is arranged along an axis A, forming a sealed vacuum chamber 110 inside; the magnetic float 220, the connector 300, the shield 400, the movable electrode 510, and the fixed electrode 520 are all housed within the vacuum chamber 110; along the axis A, the shield 400 divides the vacuum chamber 110 into a first region 111 and a second region 112; the movable electrode 510 is movably disposed in the first region 111 along the axis A, and the fixed electrode 520 is fixedly disposed in the first region 111; the magnetic float 220... The magnetic float 220 is movably disposed in the second region 112 along the direction of axis A. The connector 300 movably passes through the shield 400 along the direction of axis A and is connected to the magnetic float 220 and the movable electrode 510 respectively. The magnetic levitation drive coil group 210 is wound around the outer side of the housing assembly 100 corresponding to the second region 112. The magnetic levitation drive coil group 210 is used to drive the magnetic float 220 to move along the direction of axis A and to drive the movable electrode 510 to move along the direction of axis A through the connector 300. The vacuum capacitor has a movable electrode lead, a fixed electrode lead, and a shield lead. The movable electrode lead, the fixed electrode lead, and the shield lead are connected to the movable electrode 510, the fixed electrode 520, and the shield 400 respectively.

[0033] With this configuration, all moving parts except the magnetic levitation drive coil group 210 are placed in the vacuum chamber 110 formed by the housing assembly 100. The vacuum chamber 110 no longer needs to be equipped with mechanical variable sealing components such as bellows, which improves the reliability and service life of the vacuum capacitor. Moreover, the moving parts are not affected by the vacuum pressure difference, the driving force is greatly reduced, and the movement speed of the moving parts is greatly improved by relying on the change of magnetic force.

[0034] Please refer to Figure 2 and in conjunction with references Figure 4 and Figure 5In one example, the movable electrode 510 includes a first substrate 511 and a plurality of annular first electrode pieces 512 surrounding axis A. The plurality of first electrode pieces 512 are coaxially spaced and fixedly disposed on the first substrate 511. The fixed electrode 520 includes a second substrate 521 and a plurality of annular second electrode pieces 522 surrounding axis A. The plurality of second electrode pieces 522 are coaxially spaced and fixedly disposed on the second substrate 521. Furthermore, the first electrode pieces 512 and the second electrode pieces 522 are spaced apart in a direction perpendicular to axis A, such that each first electrode piece 512 does not directly contact a second electrode piece 522. Preferably, the spacing between each first electrode piece 512 and its adjacent second electrode piece 522 is equal. Further, the first electrode pieces 512 and the second electrode pieces 522 overlap in the direction of axis A. It can be understood that the capacitance between the movable electrode 510 and the fixed electrode 520 can change based on the movement of the movable electrode 510 along axis A.

[0035] The inventors discovered that in existing technologies, mechanical screw and nut assemblies are commonly used to drive the movable electrode 510. However, this necessitates the use of mechanically variable sealing components such as bellows. This limits the mechanical lifespan of the entire vacuum capacitor, and in some applications, such as those requiring rapid capacitance adjustment, mechanical screw and nut-driven adjustment is difficult to achieve. Further research revealed that while using a magnetic field to drive the movable electrode 510 can solve the issues of mechanical lifespan and response speed, it also introduces electromagnetic interference, leading to insufficient reliability. Specifically, vacuum capacitors are generally used for transmitting high-power radio frequency currents. Based on their operating principle, it is easy to understand that a strong electromagnetic field exists around the movable electrode 510 and the fixed electrode 520. This electromagnetic field interferes with the magnetic field drive, inducing eddy current heating in static magnetic field materials such as magnets, resulting in low reliability.

[0036] Based on the above research, the present invention divides the vacuum chamber 110 into a first region 111 and a second region 112 in the axial direction by setting the shield 400, thereby separating the electrode part (including the movable electrode 510 and the fixed electrode 520) from the magnetic levitation drive part (including the magnetic levitation drive coil group 210 and the magnetic float 220), effectively overcoming the mutual interference between the two.

[0037] Preferably, the shielding element 400 includes an electric field shielding layer and a magnetic field shielding layer along the axis A. The electric field shielding layer is made of a high conductivity material, wherein a high conductivity material refers to a material with a conductivity of not less than 10.0 × 10⁻⁶. 6Materials with a permeability of S / m, such as metals like copper and aluminum. High permeability materials refer to materials with a permeability of not less than 100, such as ferrite materials. The function of the electric field shielding layer is to isolate the high-frequency electromagnetic fields on the movable electrode 510 and the fixed electrode 520, preventing them from being induced on the magnetic levitation drive coil assembly 210 and the magnetic float 220. The function of the magnetic field shielding layer is to isolate the low-frequency electric and static magnetic fields on the magnetic levitation drive coil assembly 210 and the magnetic float 220, preventing them from being induced on the movable electrode 510 and the fixed electrode 520. Optionally, the electric field shielding layer and the magnetic field shielding layer can be attached together in the direction of axis A, or they can be arranged at intervals.

[0038] Please continue to refer to this. Figure 2 Optionally, in one exemplary embodiment, the housing assembly 100 includes an insulating cylinder 120 and two end caps 130, the insulating cylinder 120 being disposed along the direction of the axis A, and the two end caps 130 being closedly disposed at both ends of the insulating cylinder 120 along the direction of the axis A. The insulating cylinder 120 is made of, for example, ceramic, and is preferably cylindrical. The end caps 130 are capable of sealingly connecting to the ends of the insulating cylinder 120, thereby forming a vacuum chamber 110 inside the insulating cylinder 120. Optionally, one end cap 130 is electrically connected to the shield 400, and the other end cap 130 is electrically connected to the fixed electrode 520; the end cap 130 electrically connected to the shield 400 is configured as the shield lead-out electrode, and the end cap 130 electrically connected to the fixed electrode 520 is configured as the fixed electrode lead-out electrode. In one exemplary embodiment, the end cap 130 located on one side of the second region 112 ( Figure 2 The end cap 130 (located on the upper side) is connected to the shielding member 400 via a conductor (not shown) disposed within the insulating cylinder 120. The end cap 130 is preferably made of metal and is configured as a shielding lead, which can be grounded during use to further improve the shielding effect. The end cap 130 (located on one side of the first region 111) Figure 2 The lower end cap 130 is electrically connected to the fixed electrode 520. Alternatively, in some embodiments, the second substrate 521 of the fixed electrode 520 can be directly configured as an end cap 130. In this case, the end cap 130 is preferably made of metal and also serves as the fixed electrode lead of the vacuum capacitor. Of course, in other embodiments, the housing assembly 100 is not limited to a combination of an insulating cylinder 120 and two end caps 130. It can also be a combination of a cylinder with one end closed and an end cap 130. In this case, the closed end of the cylinder can also be regarded as an end cap 130. The present invention is not limited to this.

[0039] Optionally, in one example, the magnetic float 220 is a magnet with a circular cross-section, such as a ring, cylinder, or disc, and the connector 300 is a columnar insulator, such as a ceramic column, and the connector 300 is fixedly connected to the magnet. The shield 400 is preferably an annular plate with an inner hole, and the connector 300 can pass through the inner hole of the shield 400 to connect with the first substrate 511 of the movable electrode 510. It should be noted that the thickness of the magnetic float 220 along axis A should be less than the length of the second region 112 divided by the shield 400 along axis A, to allow the magnetic float 220 to move along axis A within the second region 112. Preferably, the outer diameter of the annular magnetic float 220 is smaller than the inner diameter of the insulating cylinder 120. Optionally, the magnetic levitation drive coil assembly 210 includes at least two coils, wherein at least one coil is used to drive the magnetic float 220 to move along the axis A, and at least another coil is used to define the position of the magnetic float 220 in a direction perpendicular to the axis A. That is, the magnetic levitation drive coil assembly 210 is not only used to drive the magnetic float 220 to move along the axis A, but also to define the radial position (perpendicular to the axis A) of the magnetic float 220, so that the magnetic float 220 forms a magnetically levitated shape under the action of the magnetic field of the magnetic levitation drive coil assembly 210 and moves in the second region 112. This configuration can reduce the movement resistance of the magnetic float 220 and further improve the response speed of the capacitance adjustment. In addition, the radial limitation of the magnetic float 220 by the magnetic levitation drive coil assembly 210 can also reduce or avoid friction between the guide rod 710 and the guide sleeve 720 of the first guide assembly 700 (see description below).

[0040] Furthermore, the magnetic levitation drive coil assembly 210 is wound around the outside of the wall of the insulating cylinder 120, and the length of the magnetic levitation drive coil assembly 210 along the axis A should be greater than the thickness of the magnetic float 220 along the axis A, and preferably covers the entire second region 112, so as to reliably drive the magnetic float 220 to move along the axis A.

[0041] Please refer to Figure 2 and in conjunction with references Figure 3Optionally, the vacuum capacitor further includes a flexible electrode lead-out 600 disposed in the first region 111; one end of the flexible electrode lead-out 600 is connected to the movable electrode 510, and the other end is connected to the housing assembly 100. The end of the flexible electrode lead-out 600 connected to the housing assembly 100 is configured as the movable electrode lead-out terminal; wherein, the flexible electrode lead-out 600 has a degree of freedom of deformation along the axis A. It is understood that since the movable electrode 510 needs to move along the axis A in the vacuum chamber 110, and in some scenarios even reciprocate rapidly, the movable electrode 510 needs to be led out as a lead-out terminal of the vacuum capacitor. This embodiment decouples the axially moving movable electrode 510 from the fixed housing assembly 100 by providing the flexible electrode lead-out 600 in the first region 111, thereby achieving an electrical connection to the movable electrode 510.

[0042] Preferably, the flexible electrode lead-out 600 is a perforated sheet 610, which also has an inner hole 620 through which the connector 300 passes. The inner periphery of the sheet 610 is connected to the movable electrode 510, preferably in a fixed connection, and the outer periphery of the sheet 610 is connected to the housing assembly 100, preferably in a fixed connection. In some embodiments, the connector 300 movably passes through the inner hole 620; in other embodiments, the connector 300 may also pass through the inner hole 620 and then be fixedly connected to the sheet 610. In an alternative example, the housing assembly 100 has a connection terminal 140, which is, for example, fixedly disposed on the side wall of the insulating cylinder 120 and penetrates the side wall of the insulating cylinder 120. The outer periphery of the sheet 610 is connected to the connection terminal 140, such that the connection terminal 140 is electrically connected to the movable electrode 510. At this time, terminal 140 serves as the movable electrode lead of the vacuum capacitor. For example... Figure 3 As shown, the hollowed-out shape of the sheet-like component 610 can include several circumferentially discontinuous arcs, of course... Figure 3 The image shown is merely an example of the openwork shape of the sheet 610 and is not a limitation.

[0043] Preferably, the outer contour shape of the sheet-like member 610 is the same as the inner wall shape of the insulating cylinder 120, for example, it is circular, so that the sheet-like member 610 can be attached to the inner wall of the insulating cylinder 120. In this case, the sheet-like member 610 not only serves as an electrical connection, but also serves as a radial limiting function for the movable electrode 510. Specifically, the first substrate 511 of the movable electrode 510 has a connecting body 513 extending along the axis A. The connecting body 513 can be, for example, cylindrical, with one end away from the first electrode sheet 512 fixedly connected to the edge of the inner hole 620. With this configuration, since the sheet-like member 610 has a degree of freedom of deformation along the axis A, but does not have a degree of freedom of deformation in the direction perpendicular to the axis A, it is equivalent to supporting and limiting the radial position of the first substrate 511 through the connecting body 513, which is beneficial to the radial stability of the movable electrode 510.

[0044] Furthermore, the arrangement of the sheet-like component 610 can reduce the parasitic inductance of the electrical connection of the movable electrode 510, and can be used to conduct the heat generated by the radio frequency current of the movable electrode 510 to the insulating cylinder 120 for heat dissipation, for example, through the connection terminal 140.

[0045] Please continue to refer to this. Figure 2 Optionally, the flexible electrode lead-out member 600 includes at least two of the sheet-like members 610, which are spaced apart along the axis A. Preferably, the diameter of the inner hole 620 of the sheet-like member 610 farther from the movable electrode 510 is smaller than the diameter of the inner hole 620 of the sheet-like member 610 closer to the movable electrode 510. Of course, in other embodiments, the diameters of the inner holes 620 of the at least two sheet-like members 610 may be the same, and the present invention is not limited thereto. The arrangement of at least two sheet-like members 610 further improves the reliability of the lead-out connection and also further improves the radial limiting effect on the movable electrode 510.

[0046] Optionally, the vacuum capacitor further includes a first guide assembly 700; the first guide assembly 700 includes a guide rod 710 and a guide sleeve 720 disposed along the direction of the axis A, one of the guide rod 710 and the guide sleeve 720 being disposed on the movable electrode 510, and the other being disposed on the housing assembly 100; the guide rod 710 is movably inserted into the guide sleeve 720 along the direction of the axis A, and is restricted by the guide sleeve 720 to a position perpendicular to the axis A. In an alternative example, one end of the guide sleeve 720 along the direction of the axis A is fixedly disposed on the first substrate 511 of the movable electrode 510, and the other end of the guide sleeve 720 is a free end in the direction away from the connector 300. One end of the guide rod 710 along the direction of the axis A is fixedly disposed on the end cap 130 of the housing assembly 100, and the other end of the guide rod 710 is a free end in the direction towards the connector 300, and is movably inserted into the guide sleeve 720. Preferably, the outer contour shape of the guide rod 710 matches the inner contour shape of the guide sleeve 720, so that the guide rod 710 can only move along the axis A in the guide sleeve 720, and cannot move radially. Thus, the arrangement of the guide rod 710 and the guide sleeve 720 serves to radially limit the movable electrode 510, which is beneficial to the radial stability of the movable electrode 510. Optionally, both the guide rod 710 and the guide sleeve 720 are made of insulating material, such as ceramic. In other embodiments, the guide rod 710 may be disposed on the first substrate 511 of the movable electrode 510, while the guide sleeve 720 may be fixedly disposed on the end cap 130 of the housing assembly 100. The principle is similar, and those skilled in the art can understand and substitute the configuration based on existing technology.

[0047] Optionally, the vacuum capacitor further includes a second guide assembly 800; the second guide assembly 800 includes a bushing 810 disposed on the shield 400, the bushing 810 being used to limit the position of the connector 300 in a direction perpendicular to the axis A. In one example, the inner diameter of the bushing 810 matches the outer diameter of the connector 300, such that the connector 300 can only move in the direction of the axis A, while being limited radially by the bushing 810 in the direction perpendicular to the axis A. In this case, the shield 400 not only serves to separate the first region 111 and the second region 112, achieving the shielding function, but also serves to support and radially limit the connector 300.

[0048] Preferably, the magnetic float 220, connector 300, shield 400, bushing 810, movable electrode 510, fixed electrode 520, guide rod 710, and guide sleeve 720 are all arranged coaxially along axis A. The magnetic float 220, connector 300, and movable electrode 510 constitute the moving component. Along axis A, there are four radial limits between the entire moving component and the insulating cylinder 120 from top to bottom:

[0049] 1. The magnetic levitation drive coil group 210 limits the radial levitation of the magnetic float 220 by means of a magnetic field;

[0050] 2. The bushing 810 provides radial restraint for the connecting piece 300;

[0051] 3. The sheet-like member 610 radially limits the first substrate 511 through the connector 513;

[0052] 4. The guide rod 710 and the guide sleeve 720 provide radial positioning for the first substrate 511.

[0053] Based on these radial limits, it is ensured that the movable electrode 510 has only the degree of freedom in the direction of axis A, and will not wobble radially, effectively guaranteeing the reliability of the vacuum capacitor.

[0054] Optionally, the vacuum capacitor further includes a position detection module (not shown), which is used to detect the position of the movable electrode 510 along the axis A. In a first embodiment, the position detection module includes an airtight optical viewing window disposed on the insulating cylinder 120 and / or the end cap 130, through which the axial position of the movable electrode 510 can be directly detected. In a second embodiment, the insulating cylinder 120 is optically transparent as a whole, and in this case, the insulating cylinder 120 is configured as a position detection module. In a third embodiment, the position detection module includes a Hall sensor disposed outside the insulating cylinder 120, which can detect the axial position of the movable electrode 510. In a fourth embodiment, the position detection module includes a built-in RF chip disposed on the movable electrode 510, which can wirelessly transmit its own position information to obtain the axial position of the movable electrode 510.

[0055] Based on the vacuum capacitor described above, embodiments of the present invention also provide an RF matching device, which includes the vacuum capacitor described above. For the structure and principle of other components of the RF matching device, please refer to the prior art; further details are not provided here.

[0056] In summary, in the vacuum capacitor and RF matching device provided by the present invention, the vacuum capacitor includes a housing assembly, a magnetic levitation drive coil assembly, a magnetic float, a connector, a shield, a movable electrode, and a fixed electrode; the housing assembly is arranged along an axis, forming a sealed vacuum chamber inside; the magnetic float, the connector, the shield, the movable electrode, and the fixed electrode are all housed within the vacuum chamber; along the axis, the shield divides the vacuum chamber into a first region and a second region; the movable electrode is movably disposed in the first region along the axis, the fixed electrode is fixedly disposed in the first region, the magnetic float is movably disposed in the second region along the axis, the connector movably penetrates the shield along the axis and is connected to the magnetic float and the movable electrode respectively; the magnetic levitation drive coil assembly is wound around the outside of the housing assembly corresponding to the second region, the magnetic levitation drive coil assembly is used to drive the magnetic float to move along the axis, and drives the movable electrode to move along the axis through the connector. This configuration, on the one hand, places all moving parts except the magnetic levitation drive coil assembly within the vacuum chamber formed by the housing assembly. This eliminates the need for mechanically variable sealing components like bellows inside and outside the vacuum chamber, improving the reliability and lifespan of the vacuum capacitor. Furthermore, the moving parts are unaffected by vacuum pressure differences, significantly reducing the driving force; driven by magnetic changes, the movement speed of the moving parts is greatly increased. On the other hand, the shielding component divides the vacuum chamber into a first region and a second region, effectively separating the electrode section from the magnetic levitation drive section and overcoming their mutual interference.

[0057] It should be noted that the above embodiments can be combined with each other. The above description is only a description of preferred embodiments of the present invention and is not intended to limit the scope of the present invention in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the present invention.

Claims

1. A vacuum capacitor, characterized in that, Includes: housing assembly, magnetic levitation drive coil assembly, magnetic float, connectors, shielding components, movable electrodes, and fixed electrodes; The housing assembly is arranged along an axis, forming a sealed vacuum chamber inside; the magnetic float, the connector, the shield, the movable electrode, and the fixed electrode are all housed within the vacuum chamber; Along the axis, the shield divides the vacuum chamber into a first region and a second region; the movable electrode is movably disposed in the first region along the axis, the fixed electrode is fixedly disposed in the first region, the magnetic float is movably disposed in the second region along the axis, and the connector movably penetrates the shield along the axis and is connected to the magnetic float and the movable electrode respectively. The magnetic levitation drive coil group is wound around the outside of the housing assembly corresponding to the second region. The magnetic levitation drive coil group is used to drive the magnetic float to move along the direction of the axis, and to drive the movable electrode to move along the direction of the axis through the connector. The vacuum capacitor has a movable electrode lead, a fixed electrode lead, and a shielding lead, which are respectively connected to the movable electrode, the fixed electrode, and the shielding component.

2. The vacuum capacitor according to claim 1, characterized in that, The vacuum capacitor further includes a flexible electrode lead disposed in the first region; one end of the flexible electrode lead is connected to the movable electrode, and the other end is connected to the housing assembly, wherein the end of the flexible electrode lead connected to the housing assembly is configured as the movable electrode lead. The flexible electrode lead-out member has a degree of freedom of deformation along the axis.

3. The vacuum capacitor according to claim 2, characterized in that, The flexible electrode lead-out is a perforated sheet-like part, which also has an inner hole through which the connector passes. The inner periphery of the sheet-like part is connected to the movable electrode, and the outer periphery of the sheet-like part is connected to the housing assembly.

4. The vacuum capacitor according to claim 1, characterized in that, The housing assembly includes two end caps, one end cap being electrically connected to the shielding element and the other end cap being electrically connected to the fixed electrode; the end cap electrically connected to the shielding element is configured as the shielding lead-out electrode, and the end cap electrically connected to the fixed electrode is configured as the fixed electrode lead-out electrode.

5. The vacuum capacitor according to claim 1, characterized in that, The vacuum capacitor further includes a first guiding assembly; the first guiding assembly includes a guide rod and a guide sleeve disposed along the axis, one of the guide rod and the guide sleeve being disposed on the movable electrode and the other being disposed on the housing assembly; the guide rod is movably inserted through the guide sleeve along the axis and is restricted by the guide sleeve to a position perpendicular to the axis.

6. The vacuum capacitor according to claim 1, characterized in that, The vacuum capacitor further includes a second guide assembly; the second guide assembly includes a bushing disposed on the shield, the bushing being used to limit the position of the connector in a direction perpendicular to the axis.

7. The vacuum capacitor according to claim 1, characterized in that, The magnetic levitation drive coil group includes at least two coils, wherein at least one of the coils is used to drive the magnetic float to move along the axis, and at least another coil is used to define the position of the magnetic float in a direction perpendicular to the axis.

8. The vacuum capacitor according to claim 1, characterized in that, The shielding component includes an electric field shielding layer and a magnetic field shielding layer along the axis. The electric field shielding layer is made of a highly conductive material, and the magnetic field shielding layer is made of a highly magnetic permeable material.

9. The vacuum capacitor according to claim 1, characterized in that, The vacuum capacitor also includes a position detection module, which is used to detect the position of the movable electrode along the axis.

10. A radio frequency matching device, characterized in that, Includes the vacuum capacitor according to any one of claims 1 to 9.

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