Double-seal door mechanism of dry etching platform for radio frequency components
By employing a graded sealing design with a double-door mechanism and a leakage detection unit, the problem of easy failure of a single sealing structure is solved, improving the sealing stability and safety of the etching stage and ensuring etching accuracy and equipment safety.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHEJIANG SHUANGXIN MICROELECTRONICS TECH CO LTD
- Filing Date
- 2025-09-24
- Publication Date
- 2026-07-21
AI Technical Summary
The existing sealing door mechanism of the dry etching stage adopts a single sealing structure, which is prone to wear and aging failure due to the harsh etching environment. It lacks redundancy protection and leakage early warning mechanism, which leads to gas leakage in the processing chamber, affecting etching accuracy and equipment safety.
It adopts a dual-sealing mechanism, including a primary sealing unit and a secondary sealing unit, combined with a leakage detection unit, forming a triple guarantee of primary sealing, emergency sealing and leakage monitoring. Utilizing the graded sealing design and the mechanical triggering principle driven by air pressure, it monitors the sealing status in real time and provides timely alarms.
It improves the sealing reliability of the etching stage, avoids the reduction in etching accuracy and equipment failure caused by seal failure, ensures equipment safety and personnel health, and reduces the risk of sealing unit failure.
Smart Images
Figure CN224537051U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to a double-door mechanism for a dry etching stage for radio frequency components, and particularly to a double-door mechanism for a dry etching stage for radio frequency components applied in the field of radio frequency component manufacturing. Background Technology
[0002] In the manufacturing process of radio frequency components, dry etching is a key processing technology. It achieves precise etching of materials by physical and chemical reactions between plasma and the workpiece surface material to form microstructures that meet design requirements. As the core equipment of this process, the sealing of the processing chamber of the dry etching stage directly affects the stability and processing accuracy of the etching process. Therefore, the sealing door mechanism used to close the processing chamber is an important component to ensure the normal operation of the dry etching stage, and its sealing reliability is of great significance to the efficiency of the entire production process and the quality of products.
[0003] Currently, most dry etching stages on the market use a single sealing structure for their sealing door mechanism. This means that a single sealing gasket or sealing strip is used to seal the edge of the machining cavity opening. However, this single sealing design has obvious limitations: on the one hand, the sealing components are exposed to corrosive gases, plasma erosion, and temperature changes generated during the etching process for a long time, which can easily cause wear, aging, or deformation, leading to a gradual decline in sealing performance or even failure.
[0004] On the other hand, a single sealing structure lacks effective redundancy protection and leakage early warning mechanism. When the seal fails, the gas in the processing chamber leaks directly to the outside, which will not only disrupt the stability of the processing environment, leading to reduced etching accuracy of radio frequency components and a decrease in product qualification rate, but may also cause equipment failure due to corrosive gas leakage, and even threaten the health of operators. In view of this, this utility model is proposed. Utility Model Content
[0005] The technical problem that this utility model aims to solve in view of the above-mentioned prior art is that the existing sealing door mechanism with a single sealing structure has the problem that the sealing element is prone to wear and aging failure due to the harsh environment of etching, and lacks redundancy protection and leakage early warning mechanism. After failure, it is easy to damage the processing environment, reduce the product qualification rate, cause equipment failure and threaten the health of personnel.
[0006] To address the aforementioned issues, this utility model provides a double-door mechanism for a dry etching stage for radio frequency components. The mechanism includes a processing chamber with a processing cavity and a sealing door plate connected to the processing chamber via hinges for closing the processing cavity. The sealing door plate also includes a sealing component for increasing the sealing between the processing cavities, and a plugging component for temporary sealing in case of sealing component failure. A leakage detection unit is provided between the sealing component and the plugging component to monitor whether the plugging component has failed.
[0007] As a further improvement of this application, the sealing component adopts a graded sealing design, which is composed of a primary sealing unit and a secondary sealing unit working together to form a double main sealing barrier.
[0008] As a further improvement of this application, the primary sealing unit includes a sealing gasket, a sealing plate and a sealing door plate integrally formed and inserted into the processing cavity. The sealing gasket is fixedly connected to the outer periphery of the sealing plate in an annular structure. Its cross-sectional shape is adapted to the contour of the contact surface of the inner wall of the processing cavity. After assembly, it can form a comprehensive and tight contact sealing surface with the inner wall of the processing cavity.
[0009] As a further improvement of this application, the secondary sealing unit includes an annular airbag. The airbag is embedded in the outer periphery of the sealing plate and is located in the annular area between the primary sealing unit and the outer periphery of the sealing plate. The sealing door plate is provided with an air supply pipe that is fixedly connected to the airbag. A valve switch is fixedly installed on the air supply pipe, and gas can be injected into the airbag to make it expand.
[0010] As another improvement of this application, it also includes a sealing groove with an annular structure. The sealing groove is pre-opened on the inner wall of the processing cavity and multiple grooves are evenly distributed along the depth direction of the processing cavity. When the primary sealing unit is squeezed and deformed, part of its outer wall can be embedded into each sealing groove. Multiple superimposed main sealing barriers are formed by the interlocking of the primary sealing unit and the groove.
[0011] As a further improvement to this application, the sealing component includes a second sealing gasket with an annular structure, which is fitted onto the sealing plate and has one side surface fixedly connected to the sealing door plate, while the other side surface of the second sealing gasket is tightly fitted to the outer wall of the processing box.
[0012] As a further improvement to this application, the leakage detection unit includes a hollow cavity, an alarm, and a slider slidably connected inside the hollow cavity. The slider is equipped with a control unit for controlling the alarm's activation and deactivation. The hollow cavity has an annular structure and is pre-formed within a sealing door panel. A tension spring is installed inside the cavity, with one end fixedly connected to the slider and the other end fixedly connected to the inner wall of the hollow cavity. The sealing door panel also has an air outlet communicating with the hollow cavity to allow for air pressure communication between the cavity and the outside. A mounting cavity is pre-formed on the side wall of the processing box, and a battery is fixedly installed within the mounting cavity. The alarm is electrically connected to the battery through the control unit.
[0013] As a further improvement to this application, the control unit includes a pair of conductive plates, one of which is fixedly mounted on the end of the slider, and the other is fixedly mounted on the inner wall of the hollow cavity, with the two conductive plates arranged opposite to each other.
[0014] As a further improvement to this application, the sealing door panel is embedded with an observation window for observing the processing status inside the processing cavity.
[0015] In summary, this application, by adopting a triple protection design of main seal, emergency seal, and leakage monitoring, effectively solves the problem of air leakage in the processing chamber caused by the failure of the seal in traditional single-seal doors, improves the sealing reliability of the etching stage, avoids the impact of air leakage on the etching accuracy of radio frequency components, and the early warning function of the leakage detection unit can promptly remind the staff to deal with the situation, prevent the leakage from worsening, and ensure equipment safety and personnel health.
[0016] By leveraging the complementary characteristics of primary and secondary sealing units, the primary seal relies on mechanical extrusion to form a stable initial sealing surface, while the secondary seal compensates for minute gaps through active deformation, forming a double sealing barrier. Compared to a single sealing structure, this design offers superior sealing performance, effectively preventing the leakage of corrosive gases within the machining cavity, reducing the risk of failure of a single sealing unit, and enhancing the sealing stability of the etching stage during long-term operation.
[0017] Based on the mechanical triggering principle of pneumatically driven slider, compared with traditional electronic sensor detection methods, it is more resistant to corrosion and interference in etched environments, has higher reliability, and can monitor sealing failure in real time and accurately. When the air pressure exceeds the threshold, it triggers an audible and visual alarm, and the alarm signal promptly reminds the staff to deal with it, preventing the leakage from worsening and ensuring equipment safety and personnel health. Attached Figure Description
[0018] Figure 1 This is a schematic diagram of the structure of the present invention. Figure 1 ;
[0019] Figure 2 This is a cross-sectional view of the processing box and sealing door panel of this utility model;
[0020] Figure 3 This is a schematic diagram of the structure of the present invention. Figure 2 ;
[0021] Figure 4 This is a schematic diagram of the structure of the sealing door panel of this utility model;
[0022] Figure 5 This is a cross-sectional view of the sealing door panel, sealing plate, and sealing gasket of this utility model;
[0023] Figure 6 This utility model Figure 5 Enlarged view of part A in the middle.
[0024] Explanation of the labels in the diagram:
[0025] 1. Processing box; 101. Processing cavity; 102. Sealing door panel; 103. Observation window; 2. Sealing plate; 201. Sealing gasket one; 202. Sealing gasket two; 3. Airbag; 301. Air supply pipe; 302. Sealing groove; 4. Hollow cavity; 401. Slider; 402. Conductive plate; 403. Tension spring; 404. Air supply hole; 5. Mounting cavity; 501. Battery; 502. Warning device. Detailed Implementation
[0026] The embodiments of this application will now be described in detail with reference to the accompanying drawings.
[0027] Figure 1 , Figure 2 , Figure 3 The diagram shows a double-door mechanism for a dry etching stage for radio frequency components, including a processing box 1 with a processing cavity 101 and a sealing door plate 102 connected to the processing box 1 by a hinge for closing the processing cavity 101. The sealing door plate 102 also includes a sealing component for increasing the sealing between the processing cavities 101, and a plugging component for temporarily sealing when the sealing component fails. A leakage detection unit is provided between the sealing component and the plugging component to monitor whether the plugging component has failed.
[0028] When etching is required, the RF components are placed into the processing cavity 101, and the sealing door 102 is rotated to close the processing cavity 101. At this time, the sealing component first cooperates with the corresponding structure of the processing cavity 101 to form the main sealing barrier. During the processing, the leakage detection unit continuously monitors the state of the area between the sealing component and the plugging component. If the sealing component fails due to wear, aging, or other reasons, the gas in the processing cavity 101 will leak into the area between the two components. The leakage detection unit detects this change and provides timely feedback. If the leakage further aggravates and causes the sealing component to completely fail, the plugging component will tightly adhere to the outer wall of the processing chamber 1 or the edge of the opening of the processing cavity 101 to form a temporary seal. This process is achieved through the sealing component. The main sealing defense is constructed by the component, which achieves a tight seal by utilizing its structural compatibility with the machining cavity 101. The sealing component is designed as a redundancy and is activated when the main seal fails. At the same time, the leakage detection unit, based on the principle of air pressure difference, judges the sealing status by monitoring the air pressure change between the two sealing structures. This forms a triple guarantee of main seal, emergency seal, and leakage monitoring, which effectively solves the problem of leakage in machining cavity 101 caused by the failure of the sealing component in traditional single sealing doors. It effectively improves the sealing reliability of the etching stage and avoids the impact of leakage on the etching accuracy of radio frequency components. At the same time, the early warning function of the leakage detection unit can promptly remind the staff to deal with the situation, prevent the leakage from worsening, and ensure equipment safety and personnel health.
[0029] Figure 2 , Figure 3 As shown, the sealing component adopts a graded sealing design. The first-level sealing unit is a combination of a rigid sealing structure and an elastic sealing element, which directly forms a surface contact seal with the inner wall of the processing cavity 101. The second-level sealing unit is an expandable sealing structure, which is set inside the first-level sealing unit. After it expands, it can squeeze the first-level sealing unit and the corresponding groove or inner wall of the processing cavity 101 to form multiple line contact or surface contact seals.
[0030] When the sealing door panel 102 is closed, the primary sealing unit first comes into contact with the inner wall of the processing cavity 101 and forms an initial seal under the squeezing action of the door panel. Then, the secondary sealing unit is activated by the external control device, which expands and squeezes the primary sealing unit to form a multi-line contact or surface contact seal with the corresponding groove or inner wall of the processing cavity 101, further enhancing the sealing effect.
[0031] During the processing, the two sealing units jointly bear the pressure difference and chemical gas corrosion in the processing chamber 101. This process utilizes the complementary characteristics of different sealing units in the graded sealing. The first-level sealing unit forms a stable initial sealing surface by mechanical extrusion, while the second-level sealing unit forms a double sealing barrier through active deformation, such as expansion to compensate for the small gaps in the first-level seal. Compared with a single sealing structure, the sealing performance is superior, which can effectively prevent the leakage of corrosive gases in the processing chamber 101. At the same time, the double barrier design reduces the risk of failure of a single sealing unit and improves the sealing stability of the etching stage during long-term operation.
[0032] Figure 3 , Figure 4 As shown, the primary sealing unit includes a sealing gasket 201. The sealing plate 2, which is inserted into the processing cavity 101, is integrally formed with the sealing door plate 102. The sealing gasket 201 is fixedly connected to the outer periphery of the sealing plate 2 in an annular structure. Its cross-sectional shape is adapted to the contour of the contact surface of the inner wall of the processing cavity 101. After assembly, it can form a comprehensive and tight contact sealing surface with the inner wall of the processing cavity 101. The sealing plate 2 is made of metal (such as aluminum alloy or stainless steel), and the sealing gasket 201 is made of corrosion-resistant rubber (such as fluororubber) in an annular structure.
[0033] During the closing process of the sealing door panel 102, the sealing plate 2 is gradually inserted into the processing cavity 101. The sealing gasket 201 contacts and is compressed against the inner wall of the processing cavity 101. As the door panel continues to close, the sealing gasket 201 undergoes elastic deformation under the extrusion force. Its cross-sectional shape conforms to the contour of the inner wall of the processing cavity 101, filling the gap between the sealing plate 2 and the processing cavity 101, ultimately forming a tight surface contact seal. This process utilizes the rigid support of the sealing plate 2 to ensure the installation stability of the sealing gasket 201. The elastic deformation of the sealing gasket 201 achieves a tight fit with the inner wall of the processing cavity 101. The surface contact seal increases the sealing area and improves the sealing reliability. The full fit design between the sealing gasket 201 and the inner wall of the processing cavity 101 effectively avoids local leakage, while the corrosion-resistant rubber material ensures that it is not easily aged or damaged in the chemical environment of etching. The integral molding structure of the sealing plate 2 and the door panel reduces the assembly gap and further improves the sealing effect of the primary sealing unit.
[0034] Figure 5 , Figure 6As shown, the secondary sealing unit includes an annular airbag 3, which is embedded in the outer periphery of the sealing plate 2 and located in the annular area between the primary sealing unit and the outer periphery of the sealing plate 2. The sealing door plate 102 is provided with an air supply pipe 301 that is fixedly connected to the airbag 3. A valve switch is fixedly installed on the air supply pipe 301. Gas can be injected into the airbag 3 through the air supply pipe 301 to make it expand. The airbag 3 is made of a high-strength, aging-resistant elastic material (such as polyurethane elastomer).
[0035] After the primary sealing unit forms an initial seal, the external air pump is connected to the external interface of the air supply pipe 301. The solenoid valve switch on the air supply pipe 301 is opened through the external control device, and the air pump is started to deliver compressed gas into the airbag 3. Under the pressure of the continuous air supply from the air source, the airbag 3 gradually inflates and expands, protruding outward from the annular groove on the outer wall of the sealing plate 2. During the expansion process, its outer wall directly squeezes the sealing gasket 201, pushing the sealing gasket 201 to undergo elastic deformation towards the inner wall of the processing cavity 101, which increases the contact pressure between the sealing gasket 201 and the inner wall of the processing cavity 101, and the gap between the contact surfaces is fully filled, achieving a tighter surface contact seal.
[0036] Once the airbag 3 inflates to the preset pressure and stabilizes, the air pump is turned off. At this time, the valve switch remains closed, and the air pressure inside the airbag 3 remains stable, continuously applying pressure to the sealing gasket 201 to ensure the sealing effect.
[0037] After processing, the valve is opened, and the gas in the airbag 3 is discharged through the air supply pipe 301 and gradually shrinks back into the annular groove. The sealing gasket 201 returns to its initial state under its own elasticity, and the sealing door 102 can be opened smoothly. This process is provided by an external air pump with a controllable air source, which can accurately adjust the expansion pressure of the airbag 3 to avoid sealing failure or damage to the sealing gasket caused by improper pressure. The design of the airbag 3 expanding and squeezing the sealing gasket 201 upgrades the primary seal from passive bonding to active pressure sealing, improving the reliability of the primary seal. At the same time, the expanded airbag 3 itself also forms an auxiliary seal with the inner wall of the processing cavity 101, constructing a double primary sealing barrier.
[0038] Figure 2 , Figure 3 , Figure 4 , Figure 5 As shown, it also includes a ring-shaped sealing groove 302, which is pre-opened on the inner wall of the processing cavity 101 and is distributed equidistantly along the depth direction of the processing cavity 101. When the primary sealing unit is squeezed and deformed, part of its outer wall can be embedded into each sealing groove 302, and multiple superimposed main sealing barriers are formed by the fitting of the primary sealing unit and the groove.
[0039] When the sealing door panel 102 is closed, the sealing plate 2 drives the sealing gasket 201 to be inserted into the processing cavity 101. At this time, the sealing gasket 201 initially contacts the inner wall of the processing cavity 101 but does not undergo significant deformation, nor is it embedded in the sealing groove 302.
[0040] After the primary sealing unit is initially positioned, compressed air is injected into the airbag 3 through the air supply pipe 301. The airbag 3 inflates and presses the sealing gasket 201 outward. Under the compressive force of the airbag 3, the sealing gasket 201 undergoes elastic deformation, and its outer wall facing the sealing groove 302 gradually embeds into each annular sealing groove 302, forming an interlocking structure between the sealing gasket and the groove. At the same time, the inflated airbag 3 also forms an auxiliary seal with the inner wall of the processing cavity 101. This active compressive force provided by the inflation of the airbag 3 controls the deformation and interlocking timing of the sealing gasket 201, avoiding sealing failure. During the closing process of the door panel 102, the hard friction between the sealing gasket 201 and the sealing groove 302 reduces the wear of the sealing gasket, extends its service life, and forms an interlocking seal only when the airbag 3 is inflated, so that the deformation of the sealing gasket is in a controllable state, which can better adapt to the contour of the inner wall of the processing cavity 101, ensuring the tightness of the interlocking between each sealing groove 302 and the sealing gasket 201, forming a multi-layered main sealing barrier, which greatly improves the sealing redundancy. Even if a small leak occurs in one interlocking seal, the remaining sealing grooves 302 can still play a sealing role, effectively preventing further gas leakage.
[0041] Figure 1 , Figure 2 As shown, the sealing component includes a second sealing gasket 202 with an annular structure. The second sealing gasket 202 is made of a highly elastic and wear-resistant rubber material (such as silicone rubber). The second sealing gasket 202 is fitted onto the sealing plate 2, and one side of its surface is fixedly connected to the sealing door plate 102. The other side of the second sealing gasket 202 is tightly fitted to the outer wall of the processing box 1.
[0042] After the sealing door 102 is closed, regardless of whether the sealing components are in normal working condition, the sealing gasket 202 remains in close contact with the outer wall of the processing box 1 by the pressure when the door is closed. At this time, it is in standby state and does not participate in the main sealing process, but is only used as an emergency sealing reserve.
[0043] When the sealing component fails, causing gas to leak from the processing chamber 101 into the area between the sealing component and the plugging component, the tightly fitting sealing gasket 202 can immediately take effect. With its tight fit with the outer wall of the processing chamber 1, it forms an effective gas barrier, quickly preventing the leaked gas from spreading to the outside. During this process, the design of the sealing gasket 202, which is always tightly fitted, ensures the immediacy of the emergency sealing response. This avoids the risk of leakage and diffusion caused by the delay in switching from standby to sealing state in traditional emergency sealing structures, and reduces the impact of leaked gas on the environment and personnel.
[0044] Figure 1 , Figure 3 , Figure 4 , Figure 5 , Figure 6 As shown, the leakage detection unit includes a hollow cavity 4, an alarm 502, and a slider 401 slidably connected inside the hollow cavity 4. The slider 401 is equipped with a control unit for controlling the start and stop of the alarm 502. The hollow cavity 4 adopts a ring structure and is pre-opened in the sealing door plate 102. A tension spring 403 is arranged inside it. One end of the tension spring 403 is fixedly connected to the slider 401, and the other end is fixedly connected to the inner wall of the hollow cavity 4. The sealing door plate 102 has a gas outlet 404 connected to the hollow cavity 4 on the side facing the sealing component. Multiple outlets 404 are provided and evenly distributed along the contour of the sealing door plate 102. The side wall of the processing box 1 has a pre-set mounting cavity 5. A storage battery 501 is fixedly installed in the mounting cavity 5. The alarm 502 is electrically connected to the storage battery 501 through the control unit. The alarm 502 is an audible and visual alarm.
[0045] Under normal sealing conditions, slider 401 is in its initial position under the tension of tension spring 403, control unit is disconnected, and alarm 502 does not work;
[0046] When a leak occurs due to seal failure, the gas in the processing chamber 101 leaks through the seal to the area between the two components. The gas pressure in this area increases, and the gas enters the hollow cavity 4 through the gas inlet 404, pushing the slider 401 to slide within the hollow cavity 4 against the tension of the spring 403. When the slider 401 slides a certain distance, the control unit closes, and the battery 501 supplies power to the alarm 502, which then emits an audible and visual alarm signal. This process is based on a mechanical triggering method that uses air pressure to drive the slider 401. The sealing status is determined by monitoring the air pressure change between the seal and the plugging components. When the air pressure exceeds a set threshold, the alarm 502 is triggered, enabling real-time and accurate monitoring of seal failure. Compared to traditional electronic sensor detection methods, the mechanical structure is more resistant to corrosion and interference in etched environments, has higher reliability, and the audible and visual alarm signals can promptly remind personnel to handle the situation, preventing further deterioration of the leak and ensuring equipment safety and personnel health. At the same time, the mechanical structure design reduces the maintenance cost of the detection unit.
[0047] Figure 1 , Figure 3 , Figure 5 , Figure 6As shown, the control unit includes a pair of conductive plates 402. The conductive plates 402 are made of copper material and have an anti-oxidation layer plated on their surface. One conductive plate 402 is fixedly installed at the end of the slider 401, and the other is fixedly fixed on the inner wall of the hollow cavity 4. The two conductive plates 402 are arranged opposite to each other. The two conductive plates 402 are respectively connected to the positive and negative terminals of the storage battery 501 and the terminal of the alarm 502 through wires to form a series circuit.
[0048] When the seal fails and causes the slider 401 to slide, the conductive plate 402 on the slider 401 moves together with the slider 401 toward the conductive plate 402 fixed on the inner wall of the hollow cavity 4. When the slider 401 slides to the point where the two conductive plates 402 are in contact, the circuit is closed, and the current of the battery 501 flows through the conductive plate 402 to the alarm 502, which then activates the alarm.
[0049] Once the leakage problem is resolved, the air pressure in the area between the two components returns to normal. The slider 401 resets under the action of the tension spring 403, the two conductive plates 402 separate, the circuit is broken, and the alarm 502 stops alarming. This process utilizes the contact and separation of the conductive plates 402 to achieve the opening and closing of the circuit, thereby controlling the start and stop of the alarm 502. It belongs to the mechanical contact control method, which is simple in structure and responds quickly. The contact triggering method ensures the reliability of the control and is not prone to false triggering or missed triggering. At the same time, the design of the copper conductive plate 402 with an anti-oxidation layer extends its service life and is suitable for the long-term working environment of the etching station. In addition, the circuit connection method is simple and easy to maintain and replace components.
[0050] Figure 1 , Figure 2 , Figure 3 As shown, an observation window 103 is embedded in the sealing door panel 102. The observation window 103 is made of double-layer quartz glass, which has good high temperature resistance, corrosion resistance and light transmission. The installation position of the observation window 103 is located in the central area of the sealing door panel 102. An annular sealing gasket, such as a fluororubber gasket, is provided at the connection between the observation window 103 and the sealing door panel 102. The observation window 103 is pressed and fixed to the door panel by bolts to ensure the sealing of the connection.
[0051] During the etching process of radio frequency components, the staff can observe the processing status, etching progress and any abnormalities of the components inside the processing cavity 101 in real time through the observation window 103 on the sealed door plate 102.
[0052] After processing is completed, the processing effect of the workpiece can be preliminarily checked through the observation window 103. This process utilizes the light transmittance of double-layer quartz glass to achieve visual observation of the inside of the processing cavity 101. At the same time, its high temperature resistance and corrosion resistance ensure that it will not be damaged in the harsh environment of etching processing. The sealing gasket at the connection ensures that there will be no leakage at the installation position of the observation window 103, avoiding the need for staff to frequently open the sealing door 102 to check the processing status, reducing the risk of sealing failure caused by opening the door and pressure fluctuations in the processing cavity 101, ensuring the continuity and stability of etching processing, and real-time observation can also detect processing abnormalities in a timely manner, making it easy to take measures quickly and improve product qualification rate and production efficiency.
[0053] In light of current practical needs, the above-described embodiments adopted in this application are not limited to these. Any changes made within the scope of knowledge possessed by those skilled in the art without departing from the concept of this application still fall within the protection scope of this utility model.
Claims
1. A double-door mechanism for a dry etching stage for radio frequency components, comprising a processing box (1) having a processing cavity (101) and a sealing door plate (102) connected to the processing box (1) by a hinge for closing the processing cavity (101), characterized in that, Also includes: The sealing door plate (102) is provided with a sealing component for increasing the sealing between the processing chambers (101). The sealing door plate (102) is also provided with a sealing component for temporary sealing when the sealing component fails. A leakage detection unit is provided between the sealing component and the sealing component to monitor whether the sealing component has failed.
2. The double-door mechanism of a dry etching stage for radio frequency components according to claim 1, characterized in that: The sealing component adopts a graded sealing design, consisting of a primary sealing unit and a secondary sealing unit working together to form a double main sealing barrier.
3. The double-door mechanism of a dry etching stage for radio frequency components according to claim 2, characterized in that: The primary sealing unit includes a sealing gasket (201), a sealing plate (2) inserted into the processing cavity (101) and a sealing door plate (102) integrally formed. The sealing gasket (201) is fixedly connected to the outer wall of the sealing plate (2) in an annular structure. Its cross-sectional shape is adapted to the contour of the contact surface of the inner wall of the processing cavity (101). After assembly, it can form a comprehensive and tight contact sealing surface with the inner wall of the processing cavity (101).
4. The double-door mechanism of a dry etching stage for radio frequency components according to claim 2, characterized in that: The secondary sealing unit includes an annular airbag (3), which is embedded in the outer wall of the sealing plate (2) and located in the annular area between the primary sealing unit and the outer wall of the sealing plate (2). The sealing door plate (102) is provided with an air supply pipe (301) that is fixedly connected to the airbag (3). A valve switch is fixedly installed on the air supply pipe (301), and gas can be injected into the airbag (3) through the air supply pipe (301) to make it expand.
5. The double-door mechanism of a dry etching stage for radio frequency components according to claim 4, characterized in that: It also includes a ring-shaped sealing groove (302), which is pre-opened on the inner wall of the processing cavity (101) and is distributed equidistantly along the depth direction of the processing cavity (101). When the primary sealing unit is squeezed and deformed, part of its outer wall can be embedded into each sealing groove (302) to form multiple superimposed main sealing barriers through the interlocking of the primary sealing unit and the groove.
6. The double-door mechanism of a dry etching stage for radio frequency components according to claim 3, characterized in that: The sealing component includes a second sealing gasket (202) with an annular structure. The second sealing gasket (202) is fitted onto the sealing plate (2), and one side of its surface is fixedly connected to the sealing door plate (102). The other side of the second sealing gasket (202) is tightly fitted to the outer wall of the processing box (1).
7. The double-door mechanism of a dry etching stage for radio frequency components according to claim 1, characterized in that: The leakage detection unit includes a hollow cavity (4), an alarm (502), and a slider (401) slidably connected inside the hollow cavity (4). The slider (401) is equipped with a control unit for controlling the alarm (502) to start and stop. The hollow cavity (4) adopts a ring structure and is pre-opened in the sealing door plate (102). A tension spring (403) is configured inside it. One end of the tension spring (403) is fixedly connected to the slider (401), and the other end is fixedly connected to the inner wall of the hollow cavity (4). The sealing door plate (102) is provided with an air supply hole (404) that communicates with the hollow cavity (4) to realize the air pressure communication between the cavity and the outside. The side wall of the processing box (1) is pre-set with an installation cavity (5). A storage battery (501) is fixedly installed in the installation cavity (5). The alarm (502) is electrically connected to the storage battery (501) through the control unit.
8. The double-door mechanism of a dry etching stage for radio frequency components according to claim 7, characterized in that: The control unit includes a pair of conductive plates (402), one of which is fixedly installed on the end of the slider (401), and the other is fixed on the inner wall of the hollow cavity (4). The two conductive plates (402) are arranged opposite to each other.
9. The double-door mechanism of a dry etching stage for radio frequency components according to claim 1, characterized in that: The sealing door panel (102) is embedded with an observation window (103) for observing the processing status inside the processing cavity (101).