Semiconductor processing apparatus

Abstract

The application discloses a semiconductor process equipment, which comprises an outer quartz shaft and a quartz shaft fixing device, the quartz shaft fixing device comprises a shaft cylinder for accommodating the outer quartz shaft, a cylinder wall of the shaft cylinder comprises a deformable section and a non-deformable section, an annular clamping structure is arranged along the circumference of the deformable section and comprises an elastic convex ring arranged at the inner circumference of the deformable section, the inner diameter of the elastic convex ring is smaller than the inner diameter of the non-deformable section, and the elastic convex ring is in interference fit with the outer circumference of the outer quartz shaft when the outer quartz shaft is inserted into the shaft cylinder, and the shaft cylinder is arranged on a base. The deformable section can adjust the radial dimension thereof, the outer quartz shaft is facilitated to be inserted into the shaft cylinder, the outer quartz shaft is clamped in the shaft cylinder in the radial and axial directions through the annular clamping structure of the deformable section, relative axial and radial movements between the outer quartz shaft and the shaft sleeve are avoided when the outer quartz shaft moves up and down, and the position accuracy of the up-and-down movement of the outer quartz shaft is ensured.

Description

[0001] This application is a divisional application of patent application No. 202010462057.9, filed on May 27, 2020, entitled "Semiconductor Process Equipment". Technical Field

[0002] This invention belongs to the field of semiconductor manufacturing equipment, and more specifically, relates to a semiconductor process equipment. Background Technology

[0003] Silicon epitaxy equipment requires two sets of quartz shafts, one internal and one external, to support the graphite disk and switch between workstations. Each set of quartz shafts needs a metal base for fixation. The metal bases drive the quartz shafts to move up and down, thus achieving workstation switching.

[0004] Figure 1 A schematic diagram of a prior art structure using a double O-ring for fixing the outer quartz shaft is shown. (For example...) Figure 1 As shown, an annular groove is provided on the outer quartz shaft 2, and two O-rings 4 are installed in the annular groove. The outer quartz shaft 2 is inserted into the shaft sleeve 1 of the metal seat. Ideally, the bottom end face of the outer quartz shaft 2 is in contact with the support plate 3 of the base 5. The support plate 3 is used to prevent the outer quartz shaft 2 from moving downward. The frictional resistance between the O-rings 4 and the shaft sleeve 1 of the metal seat restricts the outer quartz shaft 2 from moving upward. The radial elastic deformation of the O-rings 4 themselves can ensure that the outer quartz shaft 2 and the shaft sleeve 1 of the metal seat are coaxial, thereby fixing the outer quartz shaft 2 to the metal seat.

[0005] Figure 2 A schematic diagram is shown illustrating a gap between the outer quartz shaft and the support plate in the prior art. (For example...) Figure 2 As shown, in reality, when the outer quartz shaft 2 is inserted into the shaft sleeve of the metal base from top to bottom, and downward force is applied to press the outer quartz shaft 2, the bottom of the outer quartz shaft 2 can contact the support plate 3 of the base 5. However, at the same time, the O-ring 4 will undergo elastic deformation. When the downward force is removed, the elastic restoring force of the O-ring 4 will push the outer quartz shaft 2 upward and away from the support plate 3, resulting in a gap 6 between the outer quartz shaft 2 and the support plate 3. As the outer quartz shaft 2 moves up and down and accelerates and decelerates, this gap will continue to change, causing a stroke error in the outer quartz shaft 2 during its up and down movement.

[0006] Therefore, there is a need to provide a semiconductor process apparatus that can clamp the outer quartz shaft axially and radially to prevent relative axial and radial movement between the outer quartz shaft and the bushing when the outer quartz shaft moves up and down. Summary of the Invention

[0007] The purpose of this invention is to provide a semiconductor process apparatus that can clamp an outer quartz shaft in both the axial and radial directions to ensure the positional accuracy of the upper and lower movement of the outer quartz shaft.

[0008] To achieve the above objectives, the present invention provides a semiconductor process apparatus, including an outer quartz shaft and a quartz shaft fixing device for fixing the outer quartz shaft;

[0009] The quartz shaft fixing device includes:

[0010] A cylinder for accommodating the outer quartz shaft, the cylinder wall including a deformable section, the deformable section being able to adjust its radial dimension by deformation;

[0011] A ring-shaped clamping structure is provided along the circumference of the deformable section, which can clamp the outer quartz shaft in both the axial and radial directions;

[0012] The base, on which the shaft cylinder is mounted.

[0013] Preferably, it further includes: an inner quartz shaft, wherein the outer quartz shaft is sleeved on the inner quartz shaft;

[0014] The semiconductor process equipment also includes a quartz shaft fixing device for fixing the inner quartz shaft.

[0015] Preferably, the shaft cylinder includes a deformable section and a non-deformable section, wherein the inner diameter of the non-deformable section is adapted to the outer diameter of the outer quartz shaft.

[0016] Preferably, the deformable section is provided with a plurality of strip-shaped through holes arranged circumferentially, and the length direction of the strip-shaped through holes is parallel to the axis of the shaft cylinder.

[0017] Preferably, one end of the strip-shaped through hole extends to the end face of one end of the shaft cylinder, and the other end of the strip-shaped through hole is closed.

[0018] Preferably, the outer wall of the deformable section is provided with a pair of shoulders, and the annular clamping structure includes an elastic ring sleeved on the outer periphery of the deformable section and located between the pair of shoulders.

[0019] Preferably, the inner diameter of the elastic ring in the relaxed state is smaller than the outer diameter of the non-deformable section, and in the tensioned state, it can be clamped to the outer periphery of the deformable section to clamp the outer quartz shaft.

[0020] Preferably, both ends of the strip-shaped through hole are closed.

[0021] Preferably, the annular clamping structure includes an elastic convex ring disposed on the inner circumference of the deformable section, the inner diameter of the elastic convex ring being smaller than the inner diameter of the non-deformable section, and the elastic convex ring being press-fitted with the outer circumference of the outer quartz shaft when the outer quartz shaft is inserted into the shaft cylinder.

[0022] Preferably, the plurality of strip-shaped through holes are arranged at equal intervals along the cylinder wall.

[0023] The beneficial effects of this invention are as follows:

[0024] The deformable section on the shaft sleeve can adjust its radial dimension, facilitating the insertion of the outer quartz shaft into the shaft sleeve. Through the annular clamping structure of the deformable section, the outer quartz shaft is clamped in the shaft sleeve in both the radial and axial directions, preventing relative movement between the outer quartz shaft and the shaft sleeve in the axial and radial directions during the up-and-down movement. This ensures the positional accuracy of the outer quartz shaft's up-and-down movement, eliminates the need to slot and install O-rings on the outer quartz shaft, reduces the processing cost of the adaptable shaft, and improves the strength of the outer quartz shaft.

[0025] Other features and advantages of the present invention will be described in detail in the following detailed description section. Attached Figure Description

[0026] The invention will now be described in more detail with reference to the accompanying drawings. While preferred embodiments of the invention are shown in the drawings, it should be understood that the invention can be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that the invention will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0027] Figure 1 This diagram illustrates a prior art structure where the outer quartz shaft is fixed using double O-rings.

[0028] Figure 2 A schematic diagram is shown showing a gap between the outer quartz shaft and the support plate in the prior art.

[0029] Figure 3 A schematic diagram of a shaft cylinder according to an embodiment of the present invention is shown.

[0030] Figure 4 It shows Figure 3 Sectional view along the AA direction.

[0031] Figure 5 A schematic diagram of the structure of an elastic ring according to an embodiment of the present invention is shown.

[0032] Figure 6 A schematic diagram of a quartz shaft fixing device according to an embodiment of the present invention is shown.

[0033] Figure 7 It shows Figure 6 Sectional view along the BB direction.

[0034] Figure 8 A schematic diagram of another shaft cylinder according to an embodiment of the present invention is shown.

[0035] Figure 9 It shows Figure 8 A cross-sectional view along the CC direction.

[0036] Figure 10 A schematic diagram of another quartz shaft fixing device according to an embodiment of the present invention is shown.

[0037] Figure 11 It shows Figure 10 Sectional view along the DD direction.

[0038] Explanation of reference numerals in the attached figures:

[0039] 1. Shaft sleeve; 2. Outer quartz shaft; 3. Support plate; 4. O-ring; 5. Base; 6. Clearance; 7. Chamfer; 8. Shoulder; 9. Strip-shaped through hole; 10. Deformable section; 11. Elastic ring; 12. Elastic convex ring. Detailed Implementation

[0040] Preferred embodiments of the invention will now be described in more detail. While preferred embodiments of the invention are described below, it should be understood that the invention can be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that the invention will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0041] A semiconductor process apparatus according to an embodiment of the present invention includes an outer quartz shaft and a quartz shaft fixing device for fixing the outer quartz shaft; the quartz shaft fixing device includes: a shaft cylinder for accommodating the outer quartz shaft, the cylinder wall including a deformable section, the deformable section being able to adjust its radial dimension by deformation; an annular clamping structure, the annular clamping structure being arranged circumferentially along the deformable section, capable of clamping the outer quartz shaft in the axial and radial directions; and a base, the shaft cylinder being disposed on the base.

[0042] The deformable section of the shaft sleeve can adjust its radial dimension through deformation; that is, the radial dimension of the deformable section can be expanded or clamped down to allow the outer quartz shaft to be inserted into the shaft sleeve. The annular clamping structure of the deformable section clamps the outer quartz shaft radially and axially within the shaft sleeve, preventing relative movement between the outer quartz shaft and the sleeve during vertical movement. This ensures the positional accuracy of the outer quartz shaft's vertical movement. Compared to existing technologies that use double O-rings for frictional resistance to limit the movement of the outer quartz shaft relative to the shaft sleeve, this embodiment's quartz shaft fixing device does not use O-rings. Instead, it clamps the outer quartz shaft within the shaft sleeve using an annular clamping structure, avoiding elastic deformation of the O-rings and eliminating the gap between the base and the other end of the outer quartz shaft. Because this embodiment does not use O-rings for fixing the outer quartz shaft, there is no need to create an annular groove on the outer quartz shaft, reducing its processing cost.

[0043] As an example, the shaft is fixedly connected to the base, and the base located inside the shaft is provided with a support plate, which is used to support the quartz shaft inside the shaft.

[0044] As a preferred embodiment, the semiconductor process equipment further includes: an inner quartz shaft, with an outer quartz shaft sleeved on the inner quartz shaft; the semiconductor process equipment also includes a quartz shaft fixing device, which is used to fix the inner quartz shaft. The aforementioned quartz shaft fixing device can be used to fix the outer quartz shaft, and can also be used to clamp and fix the inner quartz shaft inside the outer quartz shaft.

[0045] As a preferred embodiment, the shaft sleeve includes a deformable section and a non-deformable section, the inner diameter of which is adapted to the outer diameter of the quartz shaft.

[0046] As an example, the inner diameter of the non-deformable section is equal to the outer diameter of the outer quartz shaft. When the outer quartz shaft is inserted into the shaft cylinder, it ensures that the outer quartz shaft and the shaft cylinder are coaxial and radially fixed, avoiding the outer quartz shaft from wobbling relative to the shaft cylinder during up and down movement, which would affect the positional accuracy of the movement and improve the clamping effect of the shaft cylinder on the outer quartz shaft.

[0047] As a preferred embodiment, the deformable section is provided with multiple strip-shaped through holes arranged circumferentially, and the length direction of the strip-shaped through holes is parallel to the axis of the cylinder.

[0048] Specifically, multiple strip-shaped through holes are provided around the shaft cylinder. The length direction of the strip-shaped through holes is parallel to the axis of the shaft cylinder, so that the shaft cylinder at this position is transformed from a rigid integral part into a deformable section with a certain deformation capacity. Each strip-shaped through hole has a certain radial deformability. The multiple strip-shaped through holes arranged around the circumference can be expanded or clamped to reduce their size, thereby realizing the radial dimension adjustment of the deformable section.

[0049] As a preferred embodiment, one end of the strip-shaped through hole extends to the end face of one end of the shaft cylinder, and the other end of the strip-shaped through hole is closed. That is, the strip-shaped through hole forms a structure with one end open and the other end closed, which makes the radial opening size of one end of the shaft cylinder adjustable, making it convenient for the outer quartz shaft to be inserted into the shaft cylinder.

[0050] As an example, multiple strip-shaped through holes extend one end to the end face of one end of the shaft cylinder and the other end to the middle of the shaft cylinder.

[0051] As an example, the width of the strip-shaped through holes is 0.5mm-2mm, and the number of strip-shaped through holes is 4-20, which can ensure that the shaft cylinder has sufficient deformability during the assembly and disassembly of the outer quartz shaft.

[0052] As a preferred embodiment, the outer wall of the deformable section is provided with a pair of shoulders, and the annular clamping structure includes an elastic ring sleeved on the outer periphery of the deformable section and located between the pair of shoulders.

[0053] Specifically, a pair of shoulders can axially fix an elastic ring, which has a certain radial elastic deformation, reducing the radial dimension of the deformable section, thereby clamping the outer quartz shaft.

[0054] As an example, the shoulder near the end face of the shaft is provided with an annular chamfer, which facilitates the elastic ring to be fitted into the deformable section along the chamfer and fixed between a pair of shoulders.

[0055] As a preferred embodiment, the inner diameter of the elastic ring in the relaxed state is smaller than the outer diameter of the non-deformable section, and the elastic ring in the tensioned state can clamp the outer circumference of the deformable section and clamp the outer quartz shaft in the deformable section.

[0056] Specifically, when the elastic ring is relaxed, its inner diameter is smaller than the outer diameter of the non-deformable section. When the elastic ring clamps the outer circumference of the deformable section, its radial dimension becomes smaller, and its elastic restoring force after deformation clamps the quartz shaft radially and axially.

[0057] As an example, the elastic ring is a C-shaped retaining ring, which is made of spring steel. In the free state, the inner diameter of the C-shaped retaining ring is slightly smaller than the outer diameter of the non-deformable section. The opening size of the side wall of the C-shaped retaining ring can be elastically adjusted. After the C-shaped retaining ring is fitted into the deformable section, the radial direction of the deformable section is clamped, making its radial dimension smaller, thus achieving an interference fit between the deformable section and the outer quartz shaft.

[0058] As a preferred option, both ends of the strip-shaped through hole are closed.

[0059] Specifically, the deformable section is located in the middle section of the shaft cylinder, and the two ends of its strip-shaped through hole are closed, so that the middle section of the strip-shaped through hole has a certain deformation, thereby adjusting the radial dimension of the deformable section.

[0060] As a preferred embodiment, the annular clamping structure includes an elastic convex ring disposed on the inner circumference of the deformable section. The inner diameter of the elastic convex ring is smaller than the inner diameter of the non-deformable section. When the outer quartz shaft is inserted into the shaft cylinder, the elastic convex ring is interference-fitted with the outer circumference of the outer quartz shaft.

[0061] Specifically, when the outer quartz shaft is inserted into the shaft sleeve, the elastic convex ring is interference-fitted with the outer circumference of the outer quartz shaft, and the elastic convex ring undergoes radial deformation and is radially expanded. The elastic convex ring protrudes towards the outer circumference of the deformable section, thereby causing the deformable section at that location to bulge along its outer circumference. Its elastic restoring force after deformation can clamp the outer quartz shaft radially and axially.

[0062] As a preferred option, multiple strip-shaped through holes are arranged at equal intervals along the cylinder wall.

[0063] Specifically, multiple strip-shaped through holes are evenly spaced along the cylinder wall, which can make the deformation of the cylinder uniform in its circumferential direction, and make the stress generated inside the cylinder uniform when the cylinder deforms, thus ensuring that the outer quartz shaft is coaxial with the cylinder.

[0064] As an example, semiconductor process equipment also includes a reaction chamber, a tray, and a transmission mechanism. The tray is disposed in the reaction chamber, and the lower part of the base is connected to the transmission mechanism. A support plate is provided on the base. One end of the outer quartz shaft extends into the shaft cylinder and is in contact with the support plate on the base. The other end of the outer quartz shaft extends into the reaction chamber. The transmission mechanism is used to drive the outer quartz shaft fixing device and the outer quartz shaft to move up and down. The quartz shaft fixing device clamps the outer quartz shaft axially and radially to ensure the positional accuracy of the up and down movement of the outer quartz shaft and improve the process quality.

[0065] Example 1

[0066] Figure 3 A schematic diagram of a shaft cylinder according to an embodiment of the present invention is shown. Figure 4 It shows Figure 3 Sectional view along the AA direction. Figure 5 A schematic diagram of the structure of an elastic ring according to an embodiment of the present invention is shown. Figure 6 A schematic diagram of a quartz shaft fixing device according to an embodiment of the present invention is shown. Figure 7 It shows Figure 6 Sectional view along the BB direction.

[0067] like Figure 3 , Figure 4 , Figure 7 As shown, a semiconductor process apparatus according to an embodiment of the present invention includes: an outer quartz shaft and a quartz shaft fixing device for fixing the outer quartz shaft.

[0068] In this embodiment, the quartz shaft fixing device includes: a shaft cylinder 1, which is used to accommodate the quartz shaft 2. The cylinder wall of the shaft cylinder 1 includes a deformable section 10, which can adjust its radial dimension by deformation; an annular clamping structure, which is arranged along the circumference of the deformable section 10 and can clamp the quartz shaft 2 in the axial and radial directions; and a base 5, on which the shaft cylinder 1 is disposed.

[0069] The shaft cylinder 1 includes a deformable section 10 and a non-deformable section. The inner diameter φH of the non-deformable section is equal to the outer diameter φh of the outer quartz shaft 2. The deformable section 10 has six circumferentially arranged slots 9. The width of the slots is C1 = 1 mm. The length direction of the slots 9 is parallel to the axis of the shaft cylinder 1. The slots 9 are evenly spaced along the cylinder wall. One end of each slot 9 extends to the end face of one end of the shaft cylinder 1, and the other end is closed. A pair of shoulders 8 are provided on the outer wall of the deformable section 10. The annular clamping structure includes an elastic ring 11 sleeved on the outer periphery of the deformable section 10 and located between the pair of shoulders 8. Figure 5As shown, the elastic ring 11 is a C-type retaining ring, and an annular chamfer 7 is machined on the shoulder 1 to facilitate the installation of the elastic ring onto the outer periphery of the deformable section 10 between a pair of shoulders. When the elastic ring 11 is in the relaxed state, its inner diameter is smaller than the outer diameter of the non-deformable section. When it is in the tensioned state, it can be clamped onto the outer periphery of the deformable section 10 to clamp the outer quartz shaft 2.

[0070] like Figure 6 , Figure 5 and Figure 7 As shown, when one end of the outer quartz shaft 2 is inserted into the shaft cylinder 1, the outer diameter of the deformable section 10 is deformed and expanded, which facilitates the smooth insertion of the outer quartz shaft 2 into the shaft cylinder 1 and its contact with the support plate 3 on the base 5 without any gap. The elastic ring 11 is fitted along the outer circumference of the deformable section 10 through the shaft cylinder 1 and clamps the deformable section 10. The radial dimension of the deformable section 10 becomes smaller, thereby radially and axially clamping the outer quartz shaft 2 inside the deformable section 10. The outer quartz shaft 2 in the non-deformable section of the shaft cylinder 1 is coaxial with the shaft cylinder 1 and radially fixed, which avoids relative axial and radial movement between the outer quartz shaft 2 and the shaft cylinder 1 when the outer quartz shaft 2 moves up and down, and ensures the positional accuracy of the outer quartz shaft 2 when moving up and down.

[0071] Example 2

[0072] Figure 8 A schematic diagram of another shaft cylinder according to an embodiment of the present invention is shown. Figure 9 It shows Figure 8 Sectional view along the CC direction. Figure 10 A schematic diagram of another quartz shaft fixing device according to an embodiment of the present invention is shown. Figure 11 It shows Figure 10 Sectional view along the DD direction.

[0073] like Figure 8 , Figure 9 , Figure 11 As shown, another quartz shaft fixing device according to an embodiment of the present invention includes:

[0074] A shaft cylinder 1 is used to accommodate a quartz shaft 2. The cylinder wall of the shaft cylinder 1 includes a deformable section 10, which can adjust its radial dimension by deformation. An annular clamping structure is arranged along the circumference of the deformable section 10 and can clamp the quartz shaft 2 in the axial and radial directions. A base 5 is mounted on the shaft cylinder 1.

[0075] The shaft cylinder 1 includes a deformable section 10 and a non-deformable section. The inner diameter φH of the non-deformable section is equal to the outer diameter φh of the outer quartz shaft 2. The deformable section 10 has 12 circumferentially arranged slots 9. The width of the slots is C2 = 0.5 mm. The length of the slots 9 is parallel to the axis of the shaft cylinder 1, and both ends of the slots 9 are closed.

[0076] The annular clamping structure includes an elastic convex ring 12 disposed on the inner circumference of the deformable section 10. The inner diameter of the elastic convex ring 12 is smaller than the inner diameter of the non-deformable section. When the outer quartz shaft 2 is inserted into the shaft cylinder, the elastic convex ring 12 is interference-fitted with the outer circumference of the outer quartz shaft 2.

[0077] like Figure 10 and Figure 11 As shown, when the outer quartz shaft 2 is inserted into the shaft sleeve 1, the elastic protrusion 12 ring on the inner circumference of the deformable section 10 undergoes radial deformation and is radially expanded. The elastic protrusion 12 is interference-fitted with the outer circumference of the outer quartz shaft 2, thereby deforming and bulging the outer circumference of the deformable section 10 at that location. Its restoring force after deformation can clamp the outer quartz shaft 2 radially and axially, preventing relative axial and radial movement between the outer quartz shaft 2 and the shaft sleeve 1 when the outer quartz shaft 2 moves up and down, thus ensuring the positional accuracy of the outer quartz shaft 2's up and down movement.

[0078] Embodiments of the present invention have been described above. These descriptions are exemplary and not exhaustive, nor are they limited to the disclosed embodiments. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments.

Claims

1. A semiconductor process apparatus, comprising an external quartz shaft, characterized in that, Also includes: Quartz shaft fixing device for fixing the outer quartz shaft, the quartz shaft fixing device comprising: A cylinder (1) is used to accommodate the outer quartz shaft (2). The cylinder wall of the cylinder (1) includes a deformable section (10) and a non-deformable section. The deformable section (10) can adjust its radial dimension by deformation. The inner diameter of the non-deformable section is adapted to the outer diameter of the outer quartz shaft (2). A ring-shaped clamping structure is provided along the circumference of the deformable section (10) and is capable of clamping the outer quartz shaft (2) in the axial and radial directions. The annular clamping structure includes an elastic convex ring (12) disposed on the inner circumference of the deformable section (10). The inner diameter of the elastic convex ring (12) is smaller than the inner diameter of the non-deformable section. When the outer quartz shaft (2) is inserted into the shaft cylinder, the elastic convex ring (12) is interference-fitted with the outer circumference of the outer quartz shaft (2). The base (5) and the shaft cylinder (1) are mounted on the base (5); The deformable section (10) is provided with a plurality of strip-shaped through holes (9) arranged circumferentially.

2. The semiconductor process equipment according to claim 1, characterized in that, Also includes: An inner quartz shaft is provided, and the outer quartz shaft (2) is sleeved on the inner quartz shaft; the quartz shaft fixing device is used to fix the inner quartz shaft.

3. The semiconductor process equipment according to claim 1, characterized in that, The length direction of the strip-shaped through hole (9) is parallel to the axis of the shaft cylinder (1).

4. The semiconductor process equipment according to claim 3, characterized in that, The two ends of the strip-shaped through hole (9) are closed.

5. The semiconductor process equipment according to claim 3, characterized in that, The plurality of strip-shaped through holes (9) are arranged at equal intervals along the cylinder wall.

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