A method, system and related device for detecting laser spot offset in a laser array

Abstract

This invention provides a method, system, and related equipment for detecting laser spot offset in a laser array, used to improve the detection accuracy of vertical offset detection of laser spot in a laser array. The method includes: dividing the lasers in the laser array into multiple first-type calibration groups and second-type calibration groups by pairwise combinations at intervals N and (N+1), each first-type and second-type calibration group containing two non-adjacent lasers, serving as a calibration laser and a target laser, respectively; and obtaining the vertical offset P between the spot center of the target laser and the calibration laser in the first-type calibration group. i And the vertical offset Q between the target laser and the center of the laser spot of the calibration laser in each of the second type of calibration groups. i According to formula Y i = |Q i -P i | Calculate the vertical offset of the spot centers of adjacent lasers, where Y i In this case, i is a positive integer greater than N+1.

Description

Technical Field

[0001] This invention relates to the field of laser direct-write imaging equipment technology, and in particular to a method, system and related equipment for detecting laser spot offset in a laser array. Background Technology

[0002] The imaging principle of the laser imaging device in related technologies (such as the laser direct plate-making device for flat screen printing plates disclosed in application number: 201310084860.3) is: controlling the laser to scan the photosensitive coating on the exposure surface line by line to expose the pixel exposure points, developing the exposed photosensitive coating, and generating the required developed image on the exposure surface.

[0003] In related technologies, due to factors such as laser installation errors and laser spot offset on the exposure surface, the vertical coordinates (perpendicular to the laser scanning direction) of the laser spot on the exposure surface may differ, resulting in deviations. This necessitates the allocation of pixel rows for each laser scanned based on these deviations. Therefore, the actual vertical offset distance of the laser spot on the exposure surface needs to be calibrated, with a calibration accuracy often requiring approximately ten micrometers. Current CCD cameras struggle to achieve this ten-micrometer level of accuracy across large format applications, and spot recognition remains challenging. Therefore, accurately measuring the vertical offset of the laser spots from multiple lasers in a laser array has become a pressing problem to solve. Summary of the Invention

[0004] This invention provides a method, system, and related equipment for detecting laser spot offset in a laser array, which improves the detection accuracy of vertical offset detection of laser spot in a laser array.

[0005] The first aspect of this invention provides a method for detecting laser spot shift in a laser array, which may include:

[0006] The lasers in the laser array are combined in pairs at intervals of N and (N+1) to form multiple first-type calibration groups and second-type calibration groups. Each first-type calibration group and second-type calibration group contains two non-adjacent lasers, which serve as calibration lasers and target lasers, respectively.

[0007] Obtain the vertical offset P between the target laser in the first type of calibration group and the center of the laser spot of the calibration laser. i And the vertical offset Q between the target laser and the spot center of the calibration laser in each of the second type of calibration groups. i ;

[0008] According to formula Y i = |Q i -P i| Calculate the vertical offset of the spot centers of adjacent lasers, where Y i In this case, i is a positive integer greater than N+1.

[0009] Optionally, as a possible implementation, in this embodiment of the invention, the vertical offset P between the target laser in the first type of calibration group and the center of the laser spot of the calibration laser is obtained. i And the vertical offset Q between the target laser and the spot center of the calibration laser in each of the second type of calibration groups. i ,include:

[0010] The lasers in all first-type calibration groups and all second-type calibration groups are sequentially controlled for calibration operations, and the horizontal projections of the scanned areas of adjacent calibration groups do not overlap. The calibration operation includes: controlling the calibration laser to maintain a first height and scan along the laser scanning direction to form a standard line L1 on the exposure surface and recording the height of the target laser spot on the exposure surface as the second height; dividing the area between the second height and L1 into multiple layers, and controlling the target laser to perform a scanning operation layer by layer. The scanning operation refers to calibrating a calibration line segment of a preset length along the laser scanning direction, then moving closer to L1 by the same straight-line distance D2, and continuing to calibrate a calibration line segment of a preset length along the laser scanning direction; determining the line segment L2 that first aligns with the standard line among all calibration line segments, and obtaining the number N of lines between L2 and the second height that include D2.

[0011] According to P i =N*D2 and Q i =N*D2 Calculate the vertical offset P between the target laser and the center of the laser spot of the calibration laser in the first type of calibration group. i And the vertical offset Q between the target laser and the spot center of the calibration laser in each of the second type of calibration groups. i .

[0012] Optionally, as a possible implementation, in this embodiment of the invention, dividing the region between the second height and L1 into multiple layers and controlling the target laser to perform a layer-by-layer scanning operation includes:

[0013] The area between the current position and L1 is divided into multiple layers. After calibrating one layer, the target laser is moved closer to L1 by the same straight-line distance D2, and then controlled to return to a position aligned with the initial scanning position of the previous layer to perform calibration operations on the next layer.

[0014] Optionally, as a possible implementation, in this embodiment of the invention, the projections of the scanning areas of adjacent calibration groups in the first type of calibration group and / or the second type of calibration group do not overlap in the vertical direction.

[0015] A second aspect of the present invention provides a laser spot shift detection system in a laser array, which may include:

[0016] The grouping module is used to group the lasers in the laser array into multiple first-type calibration groups and second-type calibration groups by pairwise combinations at intervals of N and (N+1), respectively. Each first-type calibration group and second-type calibration group contains two non-adjacent lasers, which serve as calibration lasers and target lasers, respectively.

[0017] The acquisition module is used to acquire the vertical offset P between the target laser in the first type of calibration group and the center of the laser spot of the calibration laser. i And the vertical offset Q between the target laser and the spot center of the calibration laser in each of the second type of calibration groups. i ;

[0018] The calculation module calculates the value of Y according to the formula. i = |Q i -P i | Calculate the vertical offset of the spot centers of adjacent lasers, where Y i In this case, i is a positive integer greater than N+1.

[0019] Optionally, as one possible implementation, the acquisition module may include:

[0020] The calibration unit sequentially controls all lasers in the first type of calibration group and all lasers in the second type of calibration group to perform calibration operations, and the horizontal projections of the scanned areas of two adjacent calibration groups do not overlap. The calibration operation includes: controlling the calibration laser to maintain a first height and scan along the laser scanning direction to form a standard line L1 on the exposure surface and recording the height of the target laser spot on the exposure surface at this time as the second height; dividing the area between the second height and L1 into multiple layers, and controlling the target laser to perform scanning operations layer by layer. The scanning operation refers to calibrating a calibration line segment of a preset length along the laser scanning direction, then moving closer to L1 by the same straight line distance D2, and continuing to calibrate a calibration line segment of a preset length along the laser scanning direction; determining the line segment L2 that first aligns with the standard line among all calibration line segments, and obtaining the number N of lines between L2 and the second height that include D2.

[0021] Calculation unit, based on P i =N*D2 and Q i=N*D2 Calculate the vertical offset P between the target laser and the center of the laser spot of the calibration laser in the first type of calibration group. i And the vertical offset Q between the target laser and the spot center of the calibration laser in each of the second type of calibration groups. i .

[0022] Optionally, as one possible implementation, the calibration unit may include:

[0023] The loop subunit divides the region between the current position and L1 into multiple layers. After calibrating one layer, it moves closer to L1 by the same straight-line distance D2 and controls the target laser to return to a position aligned with the initial scanning position of the previous layer to perform calibration operations on the next layer.

[0024] Optionally, as a possible implementation, the projections of the scanning areas of adjacent calibration groups in the first and / or second calibration groups do not overlap in the vertical direction.

[0025] A third aspect of the present invention provides a computer device, the computer device including a processor, the processor being configured to execute a computer program stored in a memory to implement the steps of the first aspect and any possible implementation thereof.

[0026] A fourth aspect of the present invention provides a computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, implements the steps of the first aspect and any possible implementation thereof.

[0027] As can be seen from the above technical solutions, the embodiments of the present invention have the following advantages:

[0028] In this embodiment of the invention, the lasers in the laser array are grouped into two calibration groups with different intervals. The lasers in all the first and second calibration groups are sequentially calibrated in a horizontally non-overlapping area to obtain the horizontal offset between the two types of lasers with different intervals. Then, the vertical offset of adjacent lasers is obtained through iterative calculation. In the detection method of this application embodiment, the detection accuracy of the offset is the difference in the interval distance between the two lasers during scanning calibration. The accuracy of this interval difference can reach the pixel level, greatly improving the detection accuracy. Furthermore, by increasing the spacing between the calibration laser and the target laser, the area of ​​the same length in the horizontal direction can be divided into multiple dispersed, non-overlapping scanning areas. This ensures that the scanning patterns of adjacent calibration groups of the same type do not overlap in the horizontal direction, which not only improves the recognizability of laser scanning traces and increases detection accuracy, but also reduces the scanning area required for calibration, saving photosensitive adhesive consumables. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of an embodiment of a laser spot offset detection method in a laser array according to an embodiment of the present invention;

[0030] Figure 2 This is a schematic diagram of the scanned image distribution formed by the first type of calibration group in an embodiment of the present invention;

[0031] Figure 3 This is a schematic diagram of one embodiment of a computer device according to an embodiment of the present invention. Detailed Implementation

[0032] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0033] The terms "first," "second," "third," "fourth," etc., used in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0034] In the description of this application, unless otherwise stated, "a plurality of" means two or more. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" shall be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection; as a mechanical connection or an electrical connection; as a direct connection or an indirect connection through an intermediate medium; or as a connection within two components.

[0035] To facilitate understanding, the laser array in the application scenario of this application will be described first. The laser array contains at least three lasers with fixed relative positions. The vertical projection points of the lasers in the laser array (i.e., the projection points of the laser spot in the vertical direction, which must ensure that the scanning traces of the laser spot in the vertical direction do not overlap) are arranged without overlap and are numbered sequentially.

[0036] It should be noted that, in this embodiment, the horizontal direction refers to the direction parallel to the pixel rows of the desired image on the exposure surface or a plane parallel to the exposure surface, and the vertical direction refers to the direction perpendicular to the selected horizontal direction on the exposure surface or a plane parallel to the exposure surface. The laser scanning direction is parallel to the horizontal direction.

[0037] It should be noted that the laser spot center in this application is defined for ease of explanation. It can be the center of a circular spot, the centroid of an irregularly shaped spot, or the midpoint of the overlapping part of the spot image and a preset straight line. As long as the standard for determining the center of each spot is consistent, no specific limitation is made here.

[0038] The specific process in the embodiments of the present invention is described below. Please refer to [link / reference]. Figure 1 One embodiment of a laser spot offset detection method in a laser array according to the present invention may include:

[0039] S101: The lasers in the laser array are combined in pairs at intervals of N and (N+1) to form multiple first-type calibration groups and second-type calibration groups. Each first-type calibration group and second-type calibration group contains two non-adjacent lasers, which serve as calibration lasers and target lasers, respectively.

[0040] The calibration laser is controlled to maintain a first height and scan along the laser scanning direction to form a standard line L1 on the exposure surface. Then, based on the alignment of the standard line L1 with the calibration line segment formed by the target laser, the distance between the laser spots of the two lasers is indirectly measured. The applicant noted that, to improve the efficiency of laser imaging, the spacing between adjacent lasers in a laser array is often designed to be very small, approximately 1 mm, making the scanning traces of adjacent lasers difficult to distinguish and identify. To improve the recognizability of laser scanning traces, the applicant proposes to measure the vertical offset of the laser spot by using two mutually spaced lasers to form a calibration group. The scanning areas between adjacent calibration groups do not overlap in the horizontal direction. When the laser array contains three or more lasers with fixed relative positions, the lasers can be paired at intervals of N and (N+1) to form multiple first-type and second-type calibration groups. Each calibration group contains a calibration laser and a target laser. Where N is a positive integer. For example, when N is 1, lasers 1 and 3, 2 and 4, 3 and 5 can be grouped together, and so on, to form all lasers into the first type of calibration group. At the same time, lasers 1 and 4, 2 and 5, 3 and 6 can be grouped together, and so on, to form all lasers into the second type of calibration group.

[0041] S102: Obtain the vertical offset P between the spot center of the target laser and the calibration laser in the first type of calibration group. i And the vertical offset Q between the target laser and the calibration laser spot center in each of the second type of calibration groups. i ;

[0042] After grouping the lasers in the laser array, the vertical offset P between the spot centers of the target laser and the calibration laser in the first calibration group can be obtained. i And the vertical offset Q between the target laser and the calibration laser spot center in each of the second type of calibration groups. i .

[0043] For example, obtain P i and Q i The process may include: sequentially controlling all lasers in the first type of calibration group and all lasers in the second type of calibration group to perform calibration operations, ensuring that the scanned areas of adjacent calibration groups do not overlap in the vertical direction. More specifically, the calibration operation may include: controlling the calibration laser to maintain a first height while scanning along the laser scanning direction, forming a standard line L1 on the exposure surface and recording the height of the target laser spot on the exposure surface at this time as the second height; dividing the region between the second height and L1 into multiple layers (…). Figure 2Taking the image formed by the first type of calibration group as an example, it can be divided into layers S1, S2, S3, etc., and the target laser is controlled to perform a scanning operation layer by layer. The scanning operation refers to calibrating a calibration line segment of a preset length along the laser scanning direction, then moving closer to L1 by the same straight line distance D2, and continuing to calibrate a calibration line segment of a preset length along the laser scanning direction; determining the line segment L2 that first aligns with the standard line among all calibration line segments, and obtaining the number N containing D2 between L2 and the second height, according to P i =N*D2 calculates the vertical offset P between the spot center of the target laser and the calibration laser in the first type of calibration group. i And according to Q i =N*D2 calculates the vertical offset Q between the target laser and the calibration laser's spot center in each of the second-type calibration groups. i .

[0044] It is understood that the above implementation methods are merely exemplary, and in practical applications, P can also be obtained through other means. i And Q i P can be directly detected through image recognition technology. i And Q i The specific implementation method is not limited here.

[0045] Optionally, as a possible implementation, in order to further improve the recognizability of the scanned images, in this embodiment of the application, the projections of the scanning areas of adjacent calibration groups in the first type of calibration group and / or the second type of calibration group in the vertical direction can also be controlled to not overlap.

[0046] S103: According to formula Y i = |Q i -P i | Calculate the vertical offset of the spot centers of adjacent lasers, where Y i In this case, i is a positive integer greater than N+1.

[0047] After the lasers are sorted sequentially, the vertical offset between adjacent lasers is Y. i According to formula Y i = |Q i -P i | Calculate the vertical offset of the spot centers of adjacent lasers, where Y i In this case, i is a positive integer greater than N+1.

[0048] For example, taking N=1 as an example, given P i Given (Y1+Y2), (Y2+Y3), (Y3+Y4), (Y4+Y5), (Y5+Y6), (Y7+Y8); and Q. iThe formulas (Y1+Y2+Y3), (Y2+Y3+Y4), (Y3+Y4+Y5), (Y4+Y5+Y6), (Y5+Y6+Y7), and (Y6+Y7+Y8) represent the vertical offset of adjacent lasers.

[0049] Y3=(Y1+Y2+Y3)-(Y1+Y2)=∣Q1–P1∣;

[0050] Y4=(Y2+Y3+Y4)-(Y2+Y3)=∣Q2–P2∣;

[0051] Y5=(Y3+Y4+Y5)-(Y3+Y4)=∣Q3–P3∣;

[0052] Y6=(Y4+Y5+Y6)-(Y4+Y5)=∣Q4–P4∣;

[0053] Y7=(Y5+Y6+Y7)-(Y5+Y6)=∣Q5–P5∣;

[0054] Y8=(Y6+Y7+Y8)-(Y6+Y7)=∣Q6–P6∣;

[0055] Y9 = (Y7 + Y8 + Y9) - (Y7 + Y8) = |Q7 – P7|; and so on, to obtain more offsets Y. i .

[0056] Wherein, formula Y i When i is no greater than N+1, the corresponding value can be calculated using the addition and subtraction of finite term polynomials, for example, Y1=(Y1+Y2+Y3)-(Y2+Y3); Y2=(Y1+Y2)-Y1.

[0057] As disclosed above, in this embodiment, the lasers in the laser array are grouped into two calibration groups with different intervals. Calibration operations are performed sequentially on all lasers in the first and second calibration groups in a non-overlapping horizontal region, obtaining the horizontal offset between the two types of lasers with different intervals. Then, the vertical offset of adjacent lasers is obtained through iterative calculation. In the detection method of this embodiment, the detection accuracy of the offset is the difference in the interval distance between the two lasers during scanning calibration. The accuracy of this interval difference can reach the pixel level, greatly improving detection accuracy. Furthermore, a horizontal region of the same length can be divided into multiple non-overlapping scanning regions of adjacent calibration groups, ensuring that the horizontal projections of the scanning patterns of adjacent calibration groups do not overlap. This not only improves the recognizability of laser scanning traces and increases detection accuracy but also reduces the scanning area required for calibration, saving photosensitive adhesive consumables.

[0058] It is understood that, in the various embodiments of this application, the order of the steps does not imply the order of execution. The execution order of each step should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application.

[0059] This application embodiment also provides a laser spot offset detection system in a laser array, which may include:

[0060] The grouping module is used to divide the lasers in the laser array into multiple first-type calibration groups and second-type calibration groups by pairwise combinations at intervals of N and (N+1). Each first-type calibration group and second-type calibration group contains two non-adjacent lasers, which serve as calibration lasers and target lasers, respectively.

[0061] The acquisition module is used to acquire the vertical offset P between the spot center of the target laser and the calibration laser in the first type of calibration group. i And the vertical offset Q between the target laser and the calibration laser spot center in each of the second type of calibration groups. i ;

[0062] The calculation module calculates the value of Y according to the formula. i = |Q i -P i | Calculate the vertical offset of the spot centers of adjacent lasers, where Y i In this case, i is a positive integer greater than N+1.

[0063] Optionally, as one possible implementation, the acquisition module may include:

[0064] The calibration unit sequentially controls all lasers in the first type of calibration group and all lasers in the second type of calibration group to perform calibration operations, and the horizontal projections of the scanned areas of two adjacent calibration groups do not overlap. The calibration operation includes: controlling the calibration laser to maintain a first height and scan along the laser scanning direction to form a standard line L1 on the exposure surface and recording the height of the target laser spot on the exposure surface at this time as the second height; dividing the area between the second height and L1 into multiple layers, and controlling the target laser to perform scanning operations layer by layer. The scanning operation means that after calibrating a calibration line segment of a preset length along the laser scanning direction, it moves closer to L1 by the same straight line distance D2 and continues to calibrate a calibration line segment of a preset length along the laser scanning direction; determining the line segment L2 that first aligns with the standard line among all calibration line segments, and obtaining the number N of lines between L2 and the second height containing D2.

[0065] The calculation unit, based on P i =N*D2 and Q i=N*D2 Calculate the vertical offset P between the spot center of the target laser and the calibration laser in the first type of calibration group. i And the vertical offset Q between the target laser and the calibration laser spot center in each of the second type of calibration groups. i .

[0066] Optionally, as one possible implementation, the calibration unit may include:

[0067] The loop subunit divides the region between the current position and L1 into multiple layers. After calibrating one layer, it moves closer to L1 by the same straight-line distance D2 and controls the target laser to return to a position aligned with the initial scanning position of the previous layer to perform calibration operations on the next layer.

[0068] Optionally, as a possible implementation, the projections of the scanning areas of adjacent calibration groups in the first and / or second calibration groups do not overlap in the vertical direction.

[0069] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.

[0070] The laser spot shift detection system in the laser array of the present invention has been described above from the perspective of modular functional entities. Please refer to [link to relevant documentation]. Figure 3 The computer device in the embodiments of the present invention will now be described from the perspective of hardware processing:

[0071] The computer device 1 may include a memory 11, a processor 12, and an input / output bus 13. The processor 11 executes the computer program to implement the above-described... Figure 1 The steps in the method embodiments shown, for example Figure 1 Steps 101 to 103 are shown. Alternatively, the processor executes a computer program to implement the functions of each module or unit in the above-described device embodiments.

[0072] The memory 11 includes at least one type of readable storage medium, including flash memory, hard disk, multimedia card, card-type memory (e.g., SD or DX memory), magnetic memory, magnetic disk, optical disk, etc. In some embodiments, the memory 11 can be an internal storage unit of the computer device 1, such as the hard disk of the computer device 1. In other embodiments, the memory 11 can be an external storage device of the computer device 1, such as a plug-in hard disk, smart media card (SMC), secure digital (SD) card, flash card, etc., equipped on the computer device 1. Furthermore, the memory 11 can include both internal storage units and external storage devices of the computer device 1. The memory 11 can be used not only to store application software and various types of data installed on the computer device 1, such as computer program code, but also to temporarily store data that has been output or will be output.

[0073] In some embodiments, processor 12 may be a central processing unit (CPU), controller, microcontroller, microprocessor or other data processing chip, used to run program code stored in memory 11 or process data, such as executing computer programs.

[0074] The input / output bus 13 can be a peripheral component interconnect (PCI) bus or an extended industry standard architecture (EISA) bus, etc. This bus can be divided into address bus, data bus, control bus, etc.

[0075] Furthermore, the computer device may also include a wired or wireless network interface 14, which may optionally include a wired interface and / or a wireless interface (such as a Wi-Fi interface, a Bluetooth interface, etc.), typically used to establish communication connections between the computer device 1 and other electronic devices.

[0076] Optionally, the computer device 1 may further include a user interface, which may include a display, an input unit such as a keyboard, and optionally, a standard wired interface or a wireless interface. Optionally, in some embodiments, the display may be an LED display, a liquid crystal display, a touch-sensitive liquid crystal display, or an OLED (Organic Light-Emitting Diode) touchscreen, etc. The display may also be appropriately referred to as a screen or display unit, used to display information processed in the computer device 1 and to display a visual user interface.

[0077] Figure 3 Only computer device 1 with components 11-14 and computer programs is shown; those skilled in the art will understand that... Figure 3 The structure shown does not constitute a limitation on the computer device 1, and may include fewer or more components than shown, or combine certain components, or have different component arrangements.

[0078] The present invention also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, can perform the functions described above. Figure 1 The steps in the method embodiments shown, for example Figure 1 Steps 101 to 103 are shown. Alternatively, the processor executes a computer program to implement the functions of each module or unit in the above-described device embodiments.

[0079] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be an indirect coupling or communication connection between apparatuses or units through some interfaces, and may be electrical, mechanical, or other forms.

[0080] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0081] Furthermore, the functional units in the various embodiments of the present invention can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0082] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0083] The above-described embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for detecting laser spot shift in a laser array, characterized in that, The laser array comprises at least three lasers with fixed relative positions, and the method includes: The lasers in the laser array are combined in pairs at intervals of N and N+1 to form multiple first-type calibration groups and second-type calibration groups. Each first-type calibration group and second-type calibration group contains two non-adjacent lasers, which serve as calibration lasers and target lasers, respectively. Obtain the vertical offset P between the target laser in the first type of calibration group and the center of the laser spot of the calibration laser. i And the vertical offset Q between the target laser and the center of the laser spot of the calibration laser in each of the second type of calibration groups. i ; According to formula Y i =∣Q i -P i | Calculate the vertical offset of the spot centers of adjacent lasers, where Y i In this case, i is a positive integer greater than N+1; The vertical offset P between the target laser in the first type of calibration group and the center of the laser spot of the calibration laser is obtained. i And the vertical offset Q between the target laser and the center of the laser spot of the calibration laser in each of the second type of calibration groups. i ,include: The lasers in all first-type calibration groups and all second-type calibration groups are sequentially controlled for calibration operations, and the horizontal projections of the scanned areas of adjacent calibration groups do not overlap. The calibration operation includes: controlling the calibration laser to maintain a first height and scan along the laser scanning direction to form a standard line L1 on the exposure surface and recording the height of the target laser spot on the exposure surface as the second height; dividing the area between the second height and L1 into multiple layers, and controlling the target laser to perform a scanning operation layer by layer. The scanning operation refers to calibrating a calibration line segment of a preset length along the laser scanning direction, then moving closer to L1 by the same straight-line distance D2, and continuing to calibrate a calibration line segment of a preset length along the laser scanning direction; determining the line segment L2 that first aligns with the standard line among all calibration line segments, and obtaining the number of segments between L2 and the second height that include D2. Based on the product of D2 and the quantity contained between L2 and the second height, calculate the vertical offset P between the target laser and the spot center of the calibration laser in the first type of calibration group. i And the vertical offset Q between the target laser and the center of the laser spot of the calibration laser in each of the second type of calibration groups. i .

2. The method according to claim 1, characterized in that, The step of dividing the region between the second height and L1 into multiple layers and controlling the target laser to perform a layer-by-layer scanning operation includes: The area between the current position and L1 is divided into multiple layers. After calibrating one layer, the target laser is moved closer to L1 by the same straight-line distance D2, and then controlled to return to a position aligned with the initial scanning position of the previous layer to perform calibration operations on the next layer.

3. The method according to claim 1, characterized in that, The vertical projections of the scanning areas of adjacent calibration groups in the first and / or second calibration groups do not overlap.

4. A laser spot shift detection system in a laser array, characterized in that, include: The grouping module is used to group the lasers in the laser array into multiple first-type calibration groups and second-type calibration groups by pairwise combinations at intervals of N and N+1. Each first-type calibration group and second-type calibration group contains two non-adjacent lasers, which serve as calibration lasers and target lasers, respectively. The acquisition module is used to acquire the vertical offset P between the target laser in the first type of calibration group and the center of the laser spot of the calibration laser. i And the vertical offset Q between the target laser and the center of the laser spot of the calibration laser in each of the second type of calibration groups. i ; The calculation module calculates the value of Y according to the formula. i =∣Q i -P i | Calculate the vertical offset of the spot centers of adjacent lasers, where Y i In this case, i is a positive integer greater than N+1; The acquisition module includes: The calibration unit sequentially controls all lasers in the first type of calibration group and all lasers in the second type of calibration group to perform calibration operations, and the horizontal projections of the scanned areas of two adjacent calibration groups do not overlap. The calibration operation includes: controlling the calibration laser to maintain a first height and scan along the laser scanning direction to form a standard line L1 on the exposure surface and recording the height of the target laser spot on the exposure surface at this time as the second height; dividing the area between the second height and L1 into multiple layers, and controlling the target laser to perform scanning operations layer by layer. The scanning operation refers to calibrating a calibration line segment of a preset length along the laser scanning direction, then moving closer to L1 by the same straight line distance D2, and continuing to calibrate a calibration line segment of a preset length along the laser scanning direction; determining the line segment L2 that first aligns with the standard line among all calibration line segments, and obtaining the number of segments between L2 and the second height that include D2. The calculation unit calculates the vertical offset P between the target laser and the calibration laser in the first calibration group based on the product of the number of times D2 is included between L2 and the second height and D2. i And the vertical offset Q between the target laser and the center of the laser spot of the calibration laser in each of the second type of calibration groups. i .

5. The system according to claim 4, characterized in that, The calibration unit includes: The loop subunit divides the region between the current position and L1 into multiple layers. After calibrating one layer, it moves closer to L1 by the same straight-line distance D2 and controls the target laser to return to a position aligned with the initial scanning position of the previous layer to perform calibration operations on the next layer.

6. The system according to claim 5, characterized in that, The vertical projections of the scanning areas of adjacent calibration groups in the first and / or second calibration groups do not overlap.

7. A computer device, characterized in that, The computer device includes a processor that executes a computer program stored in a memory to implement the method as described in any one of claims 1 to 3.

8. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, it implements the method as described in any one of claims 1 to 3.

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