A quartz thin ring annealing support fixture

Abstract

The present invention discloses a quartz thin ring annealing support fixture, aiming to solve the problem that the quartz thin ring is prone to distortion and deformation during annealing processing in the prior art, and there is a lack of a fixture for supporting the thin ring. The present invention solves the above technical problems through the following technical solutions: It includes: The central base includes two centrally disposed parallel disks, and a plurality of central shafts are disposed between the two central disks, and the plurality of central shafts are arranged along the circumferential direction of the central disk; The rotating disk is rotatably disposed on the periphery of the central base, and the rotating disk includes two parallel and concentrically disposed rotating rings, and a plurality of rotating shafts corresponding to the central shafts are disposed between the rotating rings; A plurality of support arms are provided, one end of the support arm is rotatably disposed on the central shaft, a long slot is provided through the support arm along its length direction, and the rotating shaft is disposed in the long slot. By rotating the rotating disk, the support arm supports the inner side wall of the quartz thin ring, playing a supporting role, thereby preventing the quartz thin ring from deforming.

Description

Technical Field

[0001] The present invention relates to the technical field of quartz glass processing, and more specifically, it relates to a quartz thin ring annealing support jig. Background Art

[0002] With the development of the semiconductor industry, the size of quartz products has gradually increased, and the diameters of quartz products for supporting the production of 12-inch silicon wafers are generally above 400 mm. Semiconductor equipment is constantly optimized, and the utilization rate of the internal space of the equipment is gradually increasing. The assembly dimensional accuracy requirements for quartz parts are extremely high. Quartz materials have the advantages of high temperature resistance, fire prevention, and good electrical insulation properties, and are widely used as isolation components in equipment.

[0003] Currently, the diameter of the quartz thin ring parts in semiconductor high-end manufacturing equipment is above 460 mm, the side wall thickness of the product is less than 2 mm, and the height is above 100 mm, making the processing difficult. According to the usage requirements of the product, many processing procedures such as surface high-temperature fine firing and side wall laser cutting are also required. During the surface fine firing and high-temperature annealing processes, it is easy to generate distorted deformations. Therefore, a suitable annealing support jig is needed to assist in the production of quartz thin rings.

[0004] In the prior art, there is a lack of a support jig suitable for thin ring annealing. Therefore, there is an urgent need for a support jig to solve the above technical problems. Summary of the Invention

[0005] The present invention overcomes the problem that the quartz thin ring is prone to distortion and deformation during annealing or high-temperature processing in the prior art, and there is a lack of a jig that can support the thin ring during the annealing process of the thin ring. The present invention provides a quartz thin ring annealing support jig, which can support the quartz thin ring during annealing or high-temperature fine firing and prevent the quartz thin ring from deforming.

[0006] To solve the above technical problems, the present invention adopts the following technical solutions: A quartz thin ring annealing support jig, comprising:

[0007] A central base, including two parallel central disks, and a plurality of central shafts are arranged between the two central disks, and the plurality of central shafts are arranged along the circumferential direction of the central disks;

[0008] A rotating disk, the rotating disk is rotatably arranged on the periphery of the central base, the rotating disk includes two parallel and concentric rotating rings, and a plurality of rotating shafts corresponding to the central shafts are arranged between the rotating rings;

[0009] A plurality of support arms are provided. One end of the support arm is rotatably arranged on the central shaft, a long groove is arranged through the support arm along its length direction, and the rotating shaft is arranged in the long groove.

[0010] In the present invention, by rotating the rotating disk, the rotating disk can rotate around the central base. During the rotation of the rotating disk, the rotating shaft on the rotating disk will drive the support arm to move in the long slot, causing the support arm to deflect in a direction coinciding with the radial direction of the central base, so that the support block at the end of the support arm moves outward, and the support block gradually abuts against the inner side wall of the quartz thin ring. After the support block stably abuts against the inner side wall of the quartz thin ring, the fixing plug block is inserted into the fixing groove to fix the central disk and the rotating ring, so that the support block can maintain the abutment with the inner side wall of the quartz thin ring. Thus, when annealing or high-temperature fine sintering the quartz thin ring, it plays a supporting role for the quartz thin ring and prevents the quartz thin ring from deforming.

[0011] Preferably, a plurality of inner notches are provided at the edge of the central disk, and a plurality of outer notches are provided at the inner edge of the rotating ring. The inner notches and the outer notches cooperate to form a fixing groove, and the fixing plug block is inserted into the fixing groove to fix the central disk and the rotating ring.

[0012] Through the cooperation of the inner notches and the outer notches and the cooperation of the fixing plug head, the rotation of the rotating ring can be prevented.

[0013] Preferably, a support block is provided at the end of the support arm far from the central base, and the support block is rotatably arranged on the support arm.

[0014] The support block can play a role in supporting the inner side wall of the quartz thin ring, and the support block is rotatably arranged at the end of the support arm, so that the support block can automatically adjust the angle and better abut against the inner side wall of the quartz thin ring.

[0015] Preferably, the end face of the support block far from the central base is an arc surface.

[0016] The arc surface can better abut against the inner side wall of the quartz thin ring.

[0017] Preferably, a plurality of inner notches are arranged in the same direction. The included angle between the center line connecting any one of the inner notches and the first inner notch and the center of the central base is T10 + (N - 1)×0.1 degrees, where N is the serial number of the inner notch and T is an integer; the included angle between adjacent outer notches and the center of the rotating ring is 10 degrees.

[0018] So that every time the rotating disk is rotated, there is a closest outer notch corresponding to an inner notch, and the deviation between the outer notch and the inner notch is within the range of 0.1 degree, so that the fixing plug block can be inserted into the fixing groove formed by the cooperation of the inner notch and the outer notch to fix the rotating disk.

[0019] Preferably, support columns are provided at the bottom of the central base, and support sleeves mating with the support columns are provided at the bottom of the rotating disk; a rotating column is provided on the upper end surface of the central base plate, a spiral groove is provided on the side wall of the rotating column, and a sliding convex head is provided on the inner side wall of the rotating ring above the rotating disk, and the sliding convex head mates with the spiral groove.

[0020] During use, first rotate the rotating disk counterclockwise, so that the rotating disk moves upward along the rotating column, and at the same time the rotating disk drives the support block to contract inward; then place the annealing support fixture for the quartz thin ring at the center position of the quartz thin ring, and then release the hand, so that the rotating disk moves downward by its own gravity. During the downward movement, through the cooperation of the sliding convex head and the spiral groove, the rotating disk will rotate clockwise. During the clockwise rotation, the support arm deflects towards the direction coinciding with the radial direction of the central base, so that the support block at the end of the support arm moves outward, so that the support block gradually abuts against the inner side wall of the quartz thin ring. In this process, the support arm can abut against the quartz thin ring by the gravity of the rotating disk itself. Since the force of the support arm abutting against the quartz thin ring is controlled by the gravity of the rotating disk, the abutting force of the support arm against the inner side wall of the quartz thin ring is almost the same each time, making the overall quality of the product better; and by controlling the overall mass of the rotating disk, the magnitude of the force of the support arm abutting against the inner side wall of the quartz thin ring is controlled. And it can effectively prevent damage to the quartz thin ring due to manual operation errors.

[0021] Preferably, six spiral grooves are provided, and the six spiral grooves are evenly distributed in the circumferential direction of the rotating column.

[0022] Six spiral grooves are provided, making the downward sliding of the rotating disk more stable.

[0023] Preferably, the fixed plug block includes a vertical plug block and a horizontal block provided above the vertical plug block. A chamfer is provided at the edge of the bottom of the vertical plug block, and a convex block is provided on the horizontal block.

[0024] A chamfer is provided at the bottom of the vertical plug block, making it more convenient to insert the vertical plug block into the fixing groove, and the convex block is provided, making it more convenient to take the fixed plug block.

[0025] Compared with the prior art, the beneficial effects of the present invention are:

[0026] (1) It can support the annealed or high-temperature precision-burned quartz thin ring and prevent the quartz thin ring from deforming;

[0027] (2) Through the cooperation of the rotating disk and the support arm, it can adapt to quartz thin rings of different sizes and has stronger applicability. Description of the Drawings

[0028] Figure 1It is a three-dimensional structure diagram of the first embodiment of the present invention;

[0029] Figure 2 It is an internal perspective view of the first embodiment of the present invention;

[0030] Figure 3 It is a top view and a rotating cross-sectional view of the first embodiment of the present invention;

[0031] Figure 4 It is a three-dimensional structure diagram of the central base and the rotating disk of the first embodiment of the present invention;

[0032] Figure 5 It is a three-dimensional structure diagram of the support arm of the first embodiment of the present invention;

[0033] Figure 6 It is a three-dimensional structure diagram of the second embodiment of the present invention;

[0034] Figure 7 It is a top view and a rotating cross-sectional view of the second embodiment of the present invention;

[0035] Figure 8 It is a three-dimensional structure diagram of the central base and the rotating disk of the second embodiment of the present invention;

[0036] Figure 9 It is a three-dimensional structure diagram of the fixed plug block of the second embodiment of the present invention;

[0037] In the figure: 1. Central base, 11. Central disk, 12. Central axis, 13. Inner notch, 14. Support column, 15. Rotating column, 16. Spiral groove;

[0038] 2. Rotating disk, 21. Rotating ring, 22. Rotating shaft, 23. Outer notch, 24. Support sleeve, 25. Sliding convex head;

[0039] 3. Support arm, 31. First rotating hole, 32. Second rotating hole, 33. Long groove, 34. Support block, 341. Rotating pin, 342. Arc surface;

[0040] 4. Fixed plug block, 41. Vertical plug block, 42. Horizontal block, 43. Convex block. Detailed implementation manners

[0041] The following will further specifically describe the technical solutions of the present invention through specific embodiments in combination with the accompanying drawings:

[0042] Embodiment 1: Refer to Figures 1 to 5 As shown, a quartz thin ring annealing support fixture includes a central base 1, a rotating disk 2, and a support arm 3.

[0043] The central base 1 includes two centrally disposed parallel central disks 11. The two central disks 11 are concentrically arranged. A support column 14 is provided at the bottom of the lower central disk 11. A number of central shafts 12 are provided between the two central disks 11. The number of central shafts 12 is evenly distributed along the circumferential direction of the central disk 11. In this embodiment, eight central shafts 12 are provided.

[0044] The rotating disk 2 is rotatably arranged on the periphery of the central base 1. The rotating disk 2 includes two parallel and concentrically arranged rotating rings 21. A number of rotating shafts 22 corresponding to the central shafts 12 are provided between the rotating rings 21. In this embodiment, eight rotating shafts 22 are provided.

[0045] A number of support arms 3 are provided. In this embodiment, eight support arms 3 are provided. First rotation holes 31 and second rotation holes 32 are respectively provided at both ends of the support arm 3. The first rotation hole 31 is matched with the central shaft 12. A long slot 33 is provided through the support arm 3 along its length direction. The rotating shaft 22 is inserted into the long slot 33. A support block 34 is provided at the end of the support arm 3 away from the central base 1. A rotating pin 341 is provided on the support block 34. The rotating pin 341 is inserted into the second rotation hole 32, so that the support block 34 is rotatably arranged at the end of the support arm 3. In addition, the end face of the support block 34 away from the central base 1 is an arc surface 342, and the arc surface 342 can better abut against the inner side wall of the support thin ring.

[0046] A number of inner notches 13 are provided at the edge of the central disk 11. A number of outer notches 23 are provided at the inner edge of the rotating ring 21. The inner notches 13 and the outer notches 23 cooperate to form a fixing slot. A fixing plug 4 is inserted into the fixing slot to fix the central disk 11 and the rotating ring 21.

[0047] Specifically, as shown in the figure, a number of inner notches 13 are arranged in the clockwise direction. The angle between any inner notch 13 and the center line connecting the first inner notch 13 and the center of the central base 1 is T10 + (N - 1)×0.1 degrees, where N is the serial number of the inner notch 13 and T is an integer. For example, the serial number of the first inner notch 13 is 1, and the serial number of the third inner notch 13 is 3. The angle between the third inner notch 13 and the center line connecting the first inner notch 13 and the center of the central base 1 is T10 + 0.2 degrees. T can be any integer such as 1, 2, 3, etc., ensuring that the angle between two adjacent inner notches 13 and the center of the central base 1 is an integer multiple of 10 degrees plus 0.1 degree, so that the inner notches deflect by 0.1 degree in sequence along the clockwise direction; the angle between adjacent outer notches 23 and the center of the rotating ring 21 is 10 degrees. In this embodiment, there are 20 inner notches 13. Along the clockwise direction, the angle between the center lines connecting adjacent inner notches 13 and the center of the central base gradually increases by 0.1 degree in sequence, that is, starting from the first one, the angles of adjacent inner notches are 20°, 20.1°, 20.2°, 20.3°, 20.4° ······ 21.4°. There are 36 outer notches 23; so that every time the turntable 2 is rotated, there is a closest outer notch 23 corresponding to an inner notch 13, and the deviation between the outer notch 23 and the inner notch 13 is within the range of 0.1 degree, enabling the fixed plug block to be inserted into the fixing groove formed by the cooperation of the inner notch 13 and the outer notch 23 to fix the turntable 2.

[0048] The working principle of this embodiment is as follows: When in use, the annealing support fixture for the quartz thin ring is placed in the inner ring of the quartz thin ring, and then the turntable 2 is rotated so that the turntable 2 can rotate around the central base 1. During the rotation of the turntable 2, the rotating shaft 22 on the turntable 2 will drive the support arm 3 to move in the long groove 33, causing the support arm 3 to deflect towards the direction coinciding with the radial direction of the central base 1, making the support block 34 at the end of the support arm 3 move outward, so that the support block 34 gradually abuts against the inner side wall of the quartz thin ring. After the support block 34 stably abuts against the inner side wall of the quartz thin ring, the fixed plug block is inserted into the fixing groove to fix the central disk 11 and the rotating ring 21, enabling the support block 34 to maintain the abutment with the inner side wall of the quartz thin ring. In addition, all the structural parts in this embodiment are made of quartz materials and can be annealed together with the quartz thin ring under high-temperature conditions.

[0049] Example 2: Refer to Figures 6 to 9As shown, this embodiment is similar in structure to Embodiment 1. The difference lies in that a support column 14 is provided at the bottom of the central base 1, and a support sleeve 24 that cooperates with the support column 14 is provided at the bottom of the rotating disk 2. The support sleeve 24 is sleeved on the rotating disk 2, and the two can rotate relative to each other; a rotating column 15 is provided on the upper end surface of the central base plate. The rotating column 15 is formed by increasing the thickness on the basis of the rotating disk 2. A spiral groove 16 is provided on the side wall of the rotating column 15, and a sliding convex head 25 is provided on the inner side wall of the rotating ring 21 above the rotating disk 2. The sliding convex head 25 cooperates with the spiral groove 16. In this embodiment, the sliding convex head 25 is hemispherical. In addition, the inner slot openings 13 in this embodiment are divided into four groups, with five inner slot openings 13 in each group. Along the clockwise direction, the included angle between adjacent inner slot openings in the inner slot openings 13 gradually increases by 0.1°. Taking the first group of inner slot openings as an example, the included angles between adjacent inner slot openings are 10.1°, 10.2°, 10.3°, and 10.4° in sequence.

[0050] Six spiral grooves 16 are provided in this embodiment, and the six spiral grooves 16 are evenly distributed in the circumferential direction of the rotating column 15.

[0051] The fixed plug block 4 includes a vertical plug block 41 and a horizontal block 42 provided above the vertical plug block. A chamfer is provided at the edge of the bottom of the vertical plug block, and a convex block 43 is provided on the horizontal block. The chamfer provided at the bottom of the vertical plug block enables the vertical plug block to be more conveniently inserted into the fixing groove, and the provision of the convex block enables the fixed plug block to be more conveniently taken.

[0052] In Embodiment 1, the rotating disk 2 is rotated by hand to make the support arm 3 abut against the inner side wall of the quartz thin ring. In this way, the force supporting the quartz thin ring is completely controlled by hand, which will cause the force on the quartz thin ring processed each time to be different, thus resulting in differences in the quality of the quartz thin ring product; and since the wall of the quartz thin ring is very thin, during the process of rotating the rotating disk 2, once the operation is too fast, the support arm 3 will break the quartz thin ring. Therefore, this embodiment is provided.

[0053] In this embodiment, when in use, first rotate the rotating disk 2 counterclockwise so that the rotating disk 2 moves upward along the rotating column 15. At the same time, the rotating disk 2 drives the support block 34 to contract inward. Then place the annealing support fixture for the quartz thin ring at the center position of the quartz thin ring, and then release the hand, so that the rotating disk 2 moves downward by its own gravity. During the downward movement, through the cooperation of the sliding convex head 25 and the spiral groove 16, the rotating disk 2 will rotate clockwise. During the clockwise rotation, the support arm 3 deflects towards the direction coinciding with the radial direction of the central base 1, so that the support block 34 at the end of the support arm 3 moves outward, and the support block 34 gradually abuts against the inner side wall of the quartz thin ring. In this process, the support arm 3 can abut against the quartz thin ring by the gravity of the rotating disk 2 itself. Since the force of the support arm 3 abutting against the quartz thin ring is controlled by the gravity of the rotating disk 2, the abutting force of the support arm 3 against the inner side wall of the quartz thin ring is almost the same each time, making the overall quality of the product better. And by controlling the overall mass of the rotating disk 2, the magnitude of the force of the support arm 3 abutting against the inner side wall of the quartz thin ring can be controlled. And it can effectively prevent damage to the quartz thin ring due to manual operation errors.

[0054] The above-described embodiments are only preferred solutions of the present invention, and do not impose any form of limitation on the present invention. There are other variations and modifications without exceeding the technical solutions recorded in the claims.

Claims

1. A quartz thin ring annealing support fixture, characterized in that, Comprising: A central base, including two parallel central disks, with a number of central shafts arranged between the two central disks, and the number of central shafts is arranged along the circumferential direction of the central disks; A rotating disk, which is rotatably arranged on the periphery of the central base. The rotating disk includes two parallel and concentric rotating rings, and a number of rotating shafts corresponding to the central shafts are arranged between the rotating rings; There are a number of support arms. One end of the support arm is rotatably arranged on the central shaft. A long groove is provided through the support arm along its length direction, and the rotating shaft is arranged in the long groove; Support columns are provided at the bottom of the central base, and support sleeves cooperating with the support columns are provided at the bottom of the rotating disk; A rotating column is provided on the upper end surface of the central base disk, a spiral groove is provided on the side wall of the rotating column, and a sliding convex head is provided on the inner side wall of the rotating ring above the rotating disk, and the sliding convex head cooperates with the spiral groove.

2. The annealing support fixture for the quartz thin ring according to claim 1, characterized in that, A number of inner notches are provided at the edge of the central disk, and a number of outer notches are provided at the inner edge of the rotating ring. The inner notches and the outer notches cooperate to form a fixing groove, and a fixing plug block is inserted into the fixing groove to fix the central disk and the rotating ring.

3. The quartz thin ring annealing support fixture according to claim 1, characterized in that, A support block is provided at the end of the support arm away from the central base, and the support block is rotatably arranged on the support arm.

4. The annealing support fixture for the quartz thin ring according to claim 3, characterized in that, The end face of the support block away from the central base is an arc surface.

5. The quartz thin ring annealing support fixture according to claim 2, characterized in that, A number of inner notches are arranged in the same direction. The included angle between any one inner notch and the first inner notch and the center line of the central base is T10 + (N - 1)×0.1 degrees, where N is the serial number of the inner notch and T is an integer; The included angle between adjacent outer notches and the center of the rotating ring is 10 degrees.

6. The quartz thin ring annealing support fixture according to claim 1, characterized in that, Six spiral grooves are provided, and the six spiral grooves are evenly distributed in the circumferential direction of the rotating column.

7. The annealing support fixture for the quartz thin ring according to claim 2, characterized in that, The fixing plug block includes a vertical plug block and a horizontal block arranged above the vertical plug block. A chamfer is provided at the edge of the bottom of the vertical plug block, and a convex block is provided on the horizontal block.

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