Pump device

Abstract

A pump device is provided. A pump main body (11) is provided with a cover member (60) having a through-hole (600). A filter member (70) is located on the outer side of the cover member (60) of the pump main body (11) and is formed in a shape that overlaps the through-hole (600). A plurality of adhesive members (700) hold the filter member (70) to the pump main body (11) in such a manner that the distance between at least the portion of the filter member (70) that overlaps the through-hole (600) and the cover member (60) can be changed. The plurality of adhesive members (700) are in a state in which the portion of the filter member (70) that overlaps the through-hole (600) is separated from the cover member (60), and are formed in a shape in which a space created between the portion of the filter member (70) that overlaps the through-hole (600) and the cover member (60) and an opening between at least a portion of the outer edge of the filter member (70) and the cover member (60) are in communication.

Description

Technical Field

[0001] This invention relates to a pump device comprising a pump body for conveying gas and a filter for filtering gas. Background Technology

[0002] Patent Document 1 describes a cooling device comprising a pump body with a built-in piezoelectric pump. The pump body has a passage for introducing gas. The passage communicates with an inlet port for introducing gas from the outside. Additionally, a portion of the passage communicates with an outlet port for discharging gas to the outside. The piezoelectric pump introduces gas from the outside via the inlet port and the passage, and discharges gas from the outlet port.

[0003] The filter is configured to block the inlet port. When gas is introduced through the inlet port, the filter restricts the passage of liquid.

[0004] Patent Document 1: Japanese Patent Application Publication No. 2009-103111

[0005] However, sometimes it is necessary to supply gas bidirectionally between the inlet and outlet. For example, if an airbag is provided at the outlet, gas is supplied from the inlet to the outlet when gas is introduced into the airbag. On the other hand, gas is supplied from the outlet to the inlet when air is released from the airbag.

[0006] In this case, pressure loss occurs due to the filter in bidirectional gas delivery. In particular, when gas is delivered from the outlet to the inlet, the function of the filter (filtration function) is not necessary, resulting in unnecessary pressure loss. Summary of the Invention

[0007] Therefore, the object of the present invention is to reduce pressure loss when the filtration function of the filter is not required.

[0008] The pump assembly includes a pump body, a filter element, and a retaining member. The pump body has a first wall having a suction port and a second wall having a discharge port. The filter element is located outside the first wall of the pump body and is shaped to overlap with the suction port when viewed in a direction orthogonal to the first wall. The retaining member holds the filter element to the pump body in a manner in which the distance between at least the portion of the filter element overlapping the suction port and the first wall is variable. The retaining member is shaped such that, with the portion of the filter element overlapping the suction port separated from the first wall, the space created between the portion of the filter element overlapping the suction port and the first wall communicates with the outer edge of the filter element or further outward than the retaining member.

[0009] In this structure, when gas (fluid) is drawn in through the suction port, the filter element overlaps with and blocks the suction port. Thus, gas is drawn into the suction port through the filter element. When gas (fluid) is discharged from the suction port, the filter element separates from the suction port. Therefore, the gas (fluid) discharged from the suction port passes through the filter element to the outside and is discharged from the outer edge of the filter element through the space between the first wall and the filter element. In this way, when gas (liquid) is discharged from the suction port, the flow path for gas discharge is increased, and the pressure loss is reduced.

[0010] According to the present invention, pressure loss can be reduced when the filtration function of the filter is not required. Attached Figure Description

[0011] Figure 1 This is an exploded perspective view of the pump device according to the first embodiment.

[0012] Figure 2 This is a schematic side sectional view showing the structure of the pump device according to the first embodiment.

[0013] Figure 3 It is a diagram that roughly shows the state of filter components, etc., when gas is inhaled.

[0014] Figure 4 (A) is a side view that roughly shows the state of the filter components, etc., when the gas is discharged. Figure 4 (B) is a top view of the side of the filter component.

[0015] Figure 5 This is an exploded perspective view of the pump device according to the second embodiment.

[0016] Figure 6 This is a top view of the side of the filter component when observing the discharged gas.

[0017] Figure 7 This is an exploded perspective view of the pump device according to the second embodiment.

[0018] Figure 8 It is a diagram that roughly shows the state of filter components, etc., when gas is inhaled.

[0019] Figure 9 (A) is a side view that roughly shows the state of the filter components, etc., when the gas is discharged. Figure 9 (B) is a top view of the side of the filter component.

[0020] Figure 10 (A) is a schematic side sectional view showing the structure of the pump device according to the fourth embodiment. Figure 10 (B) is a top view of the side of the filter component.

[0021] Figure 11 It is a diagram that roughly shows the state of filter components, etc., when gas is inhaled.

[0022] Figure 12 (A) is a side view that roughly shows the state of the filter components, etc., when the gas is discharged. Figure 12 (B) is a top view of the side of the filter component. Detailed Implementation

[0023] [First Implementation Method]

[0024] The pump device according to the first embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 This is an exploded perspective view of the pump device according to the first embodiment. Figure 2 This is a schematic side sectional view showing the structure of the pump device according to the first embodiment. In each embodiment including this embodiment, the shapes of each component are exaggerated, either partially or entirely, in order to facilitate understanding of the structure of the actuator and fluid control device.

[0025] like Figure 1 , Figure 2 As shown, the pump device 10 includes a pump body 11, a filter component 70, and multiple adhesive components 700.

[0026] The pump body 11 includes a flat plate component 20, a piezoelectric element 30, a flat plate component 40, a side wall component 50, and a cover component 60.

[0027] The flat panel component 20 is made of a metal plate or the like, and includes a main flat panel 21, a frame 22, and multiple connecting components 23. The main flat panel 21, the frame 22, and the multiple connecting components 23 are formed integrally from a single flat panel.

[0028] The main plate 21 is circular when viewed from above. The frame 22 is configured to surround the main plate 21. Multiple connecting members 23 are beam-shaped and are disposed between the main plate 21 and the frame 22. The multiple connecting members 23 support the main plate 21 so that it can vibrate relative to the frame 22.

[0029] The piezoelectric element 30 is circular when viewed from above. The piezoelectric element 30 includes a piezoelectric body and a driving conductor. The piezoelectric element 30 is disposed on one main surface of the main plate 21. At this time, the center of the piezoelectric element 30 coincides with the center of the main plate 21. Furthermore, this coincidence also includes the range of offset between their center positions within the range of manufacturing tolerances.

[0030] The piezoelectric element 30 is strained by the application of a driving voltage. The main plate 21 vibrates due to the stress caused by the strain of the piezoelectric element 30.

[0031] The flat plate component 40 is made of a metal plate or the like. The flat plate component 40 is disposed on the other main surface side of the flat plate component 20. The flat plate component 40 and the flat plate component 20 are configured such that their main surfaces face each other. The flat plate component 40 is configured to be separate from the other main surface of the flat plate component 20. A through hole 400 is formed in the flat plate component 40, extending through the flat plate component 40 along its thickness direction.

[0032] The sidewall component 50 is annular with a hollow section 500 and is disposed between the flat plate component 20 and the flat plate component 40. The sidewall component 50 is connected to the frame 22 of the flat plate component 20 and the flat plate component 40.

[0033] The cover member 60 includes a first portion 61 and a second portion 62. The cover member 60 is made of, for example, metal. The first portion 61 is a flat plate. The second portion 62 is a frame erected along the outer edge of the first portion 61 in a direction orthogonal to the main surface of the first portion 61. A plurality of through holes 600 are formed in the first portion 61.

[0034] The cover component 60 is configured such that the first part 61 is opposite to the flat plate component 20, and the side of the second part 62 that is erected becomes the side of the flat plate component 20. The front end of the second part 62 (the end opposite to the side connected to the first part 61) is connected to the frame 22 of the flat plate component 20.

[0035] In this structure, as described above, when the main plate 21 vibrates, gas is drawn into the pump body 11 through multiple through holes 600 and discharged to the outside through through holes 400. Thus, the pump body 11 functions as a pump for conveying gas. Therefore, the multiple through holes 600 correspond to the "intake holes" of the present invention, and the through holes 400 correspond to the "discharge holes" of the present invention. Furthermore, the first portion 61 of the cover member 60 corresponds to the "first wall" of the present invention, and the plate member 40 corresponds to the "second wall" of the present invention.

[0036] The filter element 70 is a flexible plate. That is, the shape of the filter element 70 changes with the passage of gas, etc. The filter element 70 allows the gas delivered by the pump device 10 to pass through and blocks other unwanted substances (e.g., dust particles larger than the gas). For example, the filter element 70 is a flat plate with a plurality of holes having a diameter smaller than the opening diameter of the plurality of through holes 600. Alternatively, the filter element 70 can also be a waterproof filter, a HEPA filter, etc.

[0037] The shape of the filter component 70 viewed from above (the shape under external pressure, such as when no gas is applied) is approximately the same as the shape of the pump body 11 viewed from above (the shape of the flat surface of the first part 61 of the cover component 60 viewed from above).

[0038] The filter element 70 is configured to face the outer main surface 102 of the first portion 61 of the cover element 60.

[0039] When viewed from above, the first part 61 has multiple adhesive components 700 positioned at locations different from (non-overlapping) of the multiple through holes 600. One end of each adhesive component 700 in the height direction is bonded to the outer main surface 102 of the first part 61, and the other end is bonded to the filter component 70. That is, the multiple adhesive components 700 bond and fix multiple portions of the filter component 70 that do not overlap with the multiple through holes 600 when viewed from above to the first part 61. The height and position of the multiple adhesive components 700 are set such that when gas is drawn into the pump body 11 through the multiple through holes 600, the filter component 70 deforms due to the gas, thus blocking the multiple through holes 600. The flow rate of the gas during intake and the flexibility (Young's modulus, etc.) of the filter component 70 are considered. Each of the multiple adhesive components 700 corresponds to an "individual retaining component" of the present invention.

[0040] (When inhaled)

[0041] Figure 3 This is a diagram that roughly shows the state of the filter components, etc., when the gas is inhaled. Furthermore, in Figure 3 The diagram showing the internal structure of the pump body 11 is omitted (see reference). Figure 2 ).exist Figure 3 In the image, the thick arrows indicate the flow of gas.

[0042] like Figure 3 And then Figure 4 As shown, as an example of the utilization of the pump device 10, an airbag 91 is installed on the outer main surface 101 of the pump body 11.

[0043] In this case, such as Figure 3 As shown, gas is drawn into the pump body 11 through the through-hole 600 and discharged into the air bladder 91 through the through-hole 400. Gas flows into the through-hole 600 from the side of the filter element 70. At this time, gas passes through the filter element 70 and flows into the through-hole 600.

[0044] As the gas passes through, the filter element 70 experiences stress toward the pump body 11. Because the filter element 70 is flexible, it bends due to this stress. The filter element 70 then abuts against the pump body 11 (the first portion 61 of the cover element 60) in a defined area including the through hole 600.

[0045] As a result, the through hole 600 is blocked by the filter element 70. Therefore, only the gas filtered by the filter element 70 is drawn into the pump body 11. Consequently, only the filtered gas is discharged into the air bladder 91.

[0046] (During discharge)

[0047] Gas discharge is achieved, for example, by stopping the drive of the pump body 11. In this case, the pressure inside the air bladder 91 becomes higher than that inside and outside the pump body 11, so gas is discharged from the air bladder 91 to the pump body 11. Alternatively, if the direction of gas delivery in the pump body 11 can be reversed, the pump body 11 can be driven to deliver gas from the through hole 400 to the through hole 600.

[0048] Figure 4 (A) is a side view that roughly shows the state of the filter components, etc., when the gas is discharged. Figure 4 (B) is a top view observing the side of the filter component. Furthermore, in Figure 4 In (A), the detailed internal structure of the pump body 11 is omitted (see Figure 1). Figure 2 ).exist Figure 4 (A) Figure 4 In (B), the thick arrow indicates the flow of gas.

[0049] like Figure 4 (A) Figure 4 As shown in (B), when gas is discharged from the air bag 91 through the through hole 400 into the pump body 11, and then discharged from the pump body 11 to the outside through the through hole 600, the gas is discharged through the through hole 600 toward the filter element 70 outside the pump body 11. Figure 4 As shown in (B), the filter element 70 separates from the outer main surface 102 of the first part 61 of the pump body 11 by means of the stress exerted on the discharged gas.

[0050] The filter element 70 is permeable to gas, therefore, as Figure 4 As shown in (A), a portion of the gas discharged through the through hole 600 passes through the filter element 70 and is discharged to the outside.

[0051] Furthermore, as described above, the filter element 70 is partially bonded to the first portion 61 by a plurality of adhesive elements 700. Therefore, when the filter element 70 is separated from the through hole 600, the space where the filter element 70 and the through hole 600 overlap when viewed from above is connected to the opening between the filter element 70 and the first portion 61 at the outer edge of the filter element 70.

[0052] Therefore, as Figure 4 (A) Figure 4 As shown in (B), a portion of the gas discharged through the through hole 600 passes through the space formed between the filter element 70 and the outer main surface 102 of the first part 61, and is discharged to the outside from the opening at the outer edge of the filter element 70.

[0053] In this way, the flow path of gas discharged through the filter element 70 and the flow path of gas discharged through the opening at the outer edge of the filter element 70 between the filter element 70 and the first part 61 are ensured. As a result, the pressure loss during gas discharge is reduced.

[0054] As described above, by using the structure of this embodiment, the filtering function of the filter element 70 can be more reliably realized when the gas is inhaled, and pressure loss can be reduced and rapid discharge can be achieved when the gas is discharged.

[0055] Furthermore, by adopting this structure, it is possible to prevent dust and other particles from entering the airbag 91, and to quickly expel gas from the airbag 91. In this case, it is also possible to omit the quick exhaust valve and other components, and to make the pump device 10 small and low-profile.

[0056] Furthermore, in this structure, when gas is discharged, the gas discharged through the through hole 600 flows along the surface of the first portion 61 of the cover member 60. As a result, the gas easily absorbs heat from the pump body 11, improving the heat dissipation of the pump device 10. Additionally, when the filter member 70 is made of a material with high thermal conductivity, such as metal, heat dissipation can also be achieved using the filter member 70. Therefore, the heat dissipation of the pump device 10 is further improved.

[0057] [Second Implementation]

[0058] The pump device according to the second embodiment of the present invention will be described with reference to the accompanying drawings. Figure 5 This is an exploded perspective view of the pump device according to the second embodiment.

[0059] like Figure 5 As shown, the pump device 10A according to the second embodiment differs from the pump device 10 according to the first embodiment in that it includes a pump body 11A and in the arrangement of multiple adhesive parts 700. The other structures of the pump device 10A are the same as those of the pump device 10, and the description of the same parts is omitted.

[0060] The pump assembly 10A includes a pump body 11A. The pump body 11A includes a cover member 60A. In the cover member 60A, a through hole 600 is formed approximately at the center of the first portion 61.

[0061] The filter element 70 is bonded to the first portion 61 of the cover element 60A near each corner along its outer edge by a plurality of adhesive elements 700. In other words, the plurality of adhesive elements 700 are configured to surround the through hole 600 when viewed from above, and the plurality of adhesive elements 700 do not overlap.

[0062] (When inhaled)

[0063] During inhalation, the operation is substantially the same as in the first embodiment, but the through-hole 600 is surrounded, thereby reducing the difference in deformation caused by the circumferential position of the portion of the filter element 70A that overlaps with the through-hole 600. As a result, the through-hole 600 can be blocked more reliably by the filter element 70 during gas inhalation.

[0064] (During discharge)

[0065] Figure 6 This is a top view of the side of the filter element when the gas is being discharged. During discharge, the operation is roughly the same as in the first embodiment, but as with intake, since the through hole 600 is surrounded, the difference in deformation caused by the circumferential position of the portion of the filter element 70A that overlaps with the through hole 600 can be reduced.

[0066] As a result, the gas discharged from the through hole 600 and flowing between the filter member 70 and the first portion 61 of the cover member 60A flows substantially uniformly in all directions of the filter member 70A except for the direction where the plurality of adhesive members 700 are present, and is discharged to the outside from the opening at the outer edge. Therefore, for example, it is possible to dissipate heat substantially uniformly over substantially the entire surface of the first portion 61 of the cover member 60A.

[0067] [Third Implementation Method]

[0068] The pump device according to the third embodiment of the present invention will be described with reference to the accompanying drawings. Figure 7 This is an exploded perspective view of the pump device according to the second embodiment.

[0069] like Figure 7 As shown, the pump device 10B according to the third embodiment differs from the pump device 10A according to the second embodiment in the filter component 70B and the adhesive component 700B. The other structures of the pump device 10B are the same as those of the pump device 10A, and descriptions of identical parts are omitted. Furthermore, the pump body 11B and the cover component 60B of the pump device 10B are the same as those of the pump body 11A and the cover component 60A of the pump device 10A.

[0070] The shape of the filter element 70B when viewed from above is smaller than the shape of the first part 61 of the cover element 60B when viewed from above.

[0071] The filter element 70B is configured to overlap with the through hole 600 when viewed from above. More specifically, the center of the filter element 70B overlaps with the through hole 600 when viewed from above.

[0072] Multiple adhesive components 700B are in the form of strips. These adhesive components 700B are arranged along opposite sides of the filter component 70B. At this time, the multiple adhesive components 700B are separated from each other.

[0073] Multiple adhesive components 700B are bonded to the first portion 61 of the cover component 60B so as not to overlap with the through hole 600, and the through hole 600 is positioned therebetween when viewed from above.

[0074] (When inhaled)

[0075] Figure 8 This is a diagram that roughly shows the state of the filter components, etc., when the gas is inhaled. Furthermore, in Figure 8 The diagram showing the internal structure of the pump body 11B is omitted (see reference). Figure 7 ).exist Figure 8 In the image, the thick arrows indicate the flow of gas.

[0076] like Figure 8 As shown, during suction, the operation is substantially the same as in the first embodiment. Here, in the pump device 10B, a plurality of adhesive members 700B are configured to clamp through holes 600 in one direction along the outer main surface 102 of the pump body 11B (the outer main surface 102 of the first portion 61 of the cover member 60B). Therefore, at the beginning of suction, before the filter member 70B comes into contact with the first portion 61, it is possible to prevent gas from being drawn in from both sides in that direction without passing through the filter member 70B. That is, the pump device 10B can suppress the intake of dust at the initial stage of the suction operation (during the transition of filtration).

[0077] (During discharge)

[0078] Figure 9 (A) is a side view that roughly shows the state of the filter components, etc., when the gas is discharged. Figure 9 (B) is a top view observing the side of the filter component. Furthermore, in Figure 9 In (A), the detailed internal structure of the pump body 11B is omitted (see Figure 1). Figure 7 ).exist Figure 9 (A) Figure 9 In (B), the thick arrow indicates the flow of gas.

[0079] like Figure 9 (A) Figure 9 As shown in (B), the operation during discharge is roughly the same as in the first embodiment, but the shape of the filter member 70B is smaller than that of the first part 61 of the cover member 60B, thereby shortening the distance from the through hole 600 to the opening at the outer edge of the filter member 70B.

[0080] As a result, the pressure loss in the flow path from the through hole 600 to the opening at the outer edge of the filter element 70B is further reduced. Therefore, the pump device 10B can further reduce the pressure loss when discharging gas.

[0081] [Fourth Implementation Method]

[0082] The pump device according to the fourth embodiment of the present invention will be described with reference to the accompanying drawings. Figure 10 (A) is a schematic side sectional view showing the structure of the pump device according to the fourth embodiment. Figure 10 (B) is a top view of the side of the filter component.

[0083] like Figure 10 (A) Figure 10 As shown in (B), the pump device 10C according to the fourth embodiment differs from the pump device 10 according to the first embodiment in that the pump body 11C has a structure and a retaining member 710, which is made of a rigid body and physically holds the pump body 11C, unlike the adhesive member. The other structures of the pump device 10C are the same as those of the pump device 10, and the description of the same parts is omitted.

[0084] The pump assembly 10C includes a pump body 11C, a filter element 70C, and a retaining element 710. The cover element 60C of the pump body 11C includes a nozzle 63. The nozzle 63 is formed by protruding through a portion of the outer main surface 102 of the first portion 61. A through hole 600C passes through the nozzle 63 and the first portion 61.

[0085] The retaining component 710 includes a frame 711 and a flat plate 712.

[0086] The frame 711 is fixed to the side of the pump body 11C. When viewed from above, the frame 711 does not overlap with the through hole 400 of the flat plate component 40. When viewed from above, the frame 711 does not overlap with the first part 61 of the cover component 60C and the nozzle 63.

[0087] The plate 712 has an opening 7120. The opening 7120 is larger in shape than the nozzle 63 and smaller in shape than the filter element 70C. The plate 712 is disposed on the outer side of the first portion 61 of the cover element 60C of the pump body 11C. The plate 712 is connected to the frame 711 at its outer edge. At this time, as... Figure 10 As shown in (B), the plate 712 does not have its entire outer circumference connected to the frame 711, but has an opening 713 that is not connected to the frame 711.

[0088] The filter element 70C is smaller than its external shape when viewed from above in the first part 61. The filter element 70C is disposed between the plate 712 and the first part 61. At this time, the filter element 70C is positioned so that it does not come into contact with the nozzle 63 when no gas is being drawn in or discharged.

[0089] (When inhaled)

[0090] Figure 11This is a diagram that roughly shows the state of the filter components, etc., when the gas is inhaled. Furthermore, in Figure 11 The diagram showing the internal structure of the pump body 11C is omitted (see reference). Figure 10 (A)). In Figure 11 In the image, the thick arrows indicate the flow of gas.

[0091] like Figure 11 As shown, during inhalation, gas is drawn into the through-hole 600C through the opening 7120 and the filter element 70C. At this time, the filter element 70C is subjected to stress from the gas and moves from the position abutting against the plate 712 to the position abutting against the nozzle 63. Subsequently, the filter element 70C is maintained in the state of abutting against the nozzle 63 by the flow of gas. Thus, during gas inhalation, the through-hole 600C is covered by the filter element 70C.

[0092] (During discharge)

[0093] Figure 12 (A) is a side view that roughly shows the state of the filter components, etc., when the gas is discharged. Figure 12 (B) is a top view observing the side of the filter component. Furthermore, in Figure 12 In (A), the detailed internal structure of the pump body 11C is omitted (see Figure 11C). Figure 10 (A)). In Figure 12 (A) Figure 12 In (B), the thick arrow indicates the flow of gas.

[0094] like Figure 12 (A) Figure 12 As shown in (B), during discharge, the gas passes through the through-hole 600C and is discharged toward the filter element 70C outside the pump body 11C. The filter element 70C is separated from the nozzle 63 by the stress from the discharged gas and is held against the plate 712.

[0095] The filter element 70C is permeable to gas, therefore... Figure 12 As shown in (A), a portion of the gas discharged through the through hole 600C passes through the filter element 70C and is discharged to the outside through the opening 7120.

[0096] In addition, as described above, the retaining member 710, which is composed of the frame 711 and the plate 712, has an opening 713 that opens to the side or the like.

[0097] Therefore, as Figure 12 As shown in (B), a portion of the gas discharged through the through hole 600 passes through the space formed between the filter element 70C and the nozzle 63 and the outer main surface 102 of the first part 61, and is discharged to the outside from the opening 713.

[0098] In this way, the flow path of gas discharged through the filter element 70C and the opening 7120, and the flow path of gas discharged from the opening 713 of the holding element 710 are ensured when the gas is discharged. As a result, the pressure loss during gas discharge is reduced.

[0099] Therefore, pump device 10C, like pump device 10, can more reliably realize the filtration function of filter component 70C when drawing in gas, and can reduce pressure loss and achieve rapid discharge when discharging gas.

[0100] Furthermore, in the structure of the pump device 10C, it is not necessary to bond the filter element 70C to the pump body 11C. As a result, the heat generated in the pump body 11C is not easily transferred to the filter element 70C, and thermal deformation of the filter element 70C and the displacement of the position of the pores of the filter element 70C due to such thermal deformation are less likely to occur.

[0101] Furthermore, the above description illustrates the method of gas delivery. However, the structure is not limited to gases and can also be applied to other fluids.

[0102] In addition, the shape of a piezoelectric element when viewed from above is not limited to a circle; it can also be a polygon or the like.

[0103] Furthermore, the structures of the above-described embodiments can be appropriately combined to achieve the corresponding effects of each combination.

[0104] Explanation of reference numerals in the attached figures

[0105] 10, 10A, 10B, 10C... Pump assembly; 11, 11A, 11B, 11C... Pump body; 20... Flat plate component; 21... Main flat plate; 22... Frame; 23... Connecting component; 30... Piezoelectric element; 40... Flat plate component; 50... Side wall component; 60, 60A, 60B, 60C... Cover component; 61... First part; 62... Second part; 63... Nozzle; 70, 70A, 70B, 70C... Filter component; 91... Airbag; 101, 102... Outer main surface; 400... Through hole; 500... Hollow; 600, 600C... Through hole; 700, 700B... Adhesive component; 710... Holding component; 711... Frame; 712... Flat plate; 713, 7120... Opening.

Claims

1. A pump device, wherein, have: The pump body has a first wall with a suction port and a second wall with a discharge port; The filter element is located on the outer side of the first wall side of the pump body and is shaped to overlap with the suction hole when viewed in a direction orthogonal to the first wall. as well as A retaining component holds the filter element to the pump body in a manner that allows for a variable distance between at least the portion of the filter element overlapping the suction orifice and the first wall. The retaining member is shaped such that, when gas is discharged from the discharge port into the pump body and from the pump body to the outside of the pump body via the suction port, the portion of the filter member overlapping the suction port is separated from the first wall, and the space created between the portion of the filter member overlapping the suction port and the first wall communicates with the outer edge of the filter member or further outward than the retaining member. When gas is drawn in through the intake port, the intake port is blocked by the filter element.

2. The pump device according to claim 1, wherein, The retaining component has multiple individual retaining components. The plurality of individual retaining components are separated from each other and are positioned to surround the intake hole when viewed in a direction orthogonal to the first wall.

3. The pump device according to claim 1 or 2, wherein, When viewed in a direction orthogonal to the first wall, the filter element is smaller than the first wall.

4. The pump device according to claim 1 or 2, wherein, The filter element is plate-shaped with a main surface parallel to the first wall. The filter element has flexibility that allows for shape changes in the main surface.

5. The pump device according to claim 4, wherein, The retaining component is an adhesive component that bonds the filter component to the first wall.

6. The pump device according to claim 1 or 2, wherein, The retaining member holds the entire filter element in a direction orthogonal to the first wall so that it can move.

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