Actuator, pump, method of manufacturing an actuator

Abstract

This invention relates to an actuator, a pump, and a method for manufacturing an actuator. The actuator (11) comprises a vibrating component (21), a frame (23), and an adhesive (241). The vibrating component (21) has a main surface (F211) and a main surface (F212), and a piezoelectric element (30) is mounted on the main surface (F211). The vibrating component (21) is plate-shaped and has an outer edge (212) that, when viewed from above, is larger than the piezoelectric element (30) and does not abut against the piezoelectric element (30). The outer edge of the frame (23) is smaller than the vibrating component (21). The adhesive (241) bonds the main surface (F212) at the outer edge (212) of the vibrating component (21) to the frame (23). When viewed from above, the outer edge of the frame (23) is smaller than the outer edge (212) of the vibrating component (21). The frame (23) has a protrusion (239) that protrudes partially from the outer edge to the outer side.

Description

Technical Field

[0001] This invention relates to actuators that use adhesives to assemble housings. Background Technology

[0002] Patent Document 1 describes a fluid pump. The fluid pump described in Patent Document 1 includes a vibrating plate, a vibrating plate support frame, a connecting part, a piezoelectric element, a partition, and a cover. The vibrating plate is a circular plate. The vibrating plate support frame is shaped to surround the outer periphery of the vibrating plate. The vibrating plate is vibratingly held in place of the vibrating plate support frame by the connecting part. The piezoelectric element is mounted on the vibrating plate.

[0003] The cover is positioned opposite the plate component, which consists of a vibrating plate, a connecting part, and a vibrating plate support frame. A partition is disposed between the plate component and the cover. The partition is a frame-shaped part with a hollow section and is connected to the vibrating plate support frame and the cover.

[0004] The cover, partition, and vibrating plate support frame have the same external shape, and they are bonded together, for example, by adhesive.

[0005] Patent Document 1: International Publication No. 2011 / 145544

[0006] However, in existing structures like those in Patent Document 1, adhesive may unnecessarily overflow to the outside, sometimes failing to adequately bond the components to be bonded, leading to reduced reliability. In particular, in the vibration-generating device shown in Patent Document 1, reduced reliability due to decreased adhesion is likely to occur. Summary of the Invention

[0007] Therefore, the purpose of this invention is to improve the adhesion of the various components and achieve a highly reliable device.

[0008] The actuator of the present invention includes a vibrating component, a frame, and an adhesive. The vibrating component has a first main surface and a second main surface, and a piezoelectric element is mounted on at least one of the first and second main surfaces. The vibrating component is plate-shaped and has an outer edge portion that, when viewed from above, is larger than the piezoelectric element and does not abut against the piezoelectric element. The outer edge of the frame is smaller than the vibrating component. The adhesive bonds the first or second main surface of the vibrating component at its outer edge to the frame. When viewed from above, the outer edge of the frame is smaller than the outer edge of the vibrating component. The frame has a protrusion that partially protrudes outward from its outer edge.

[0009] In this structure, the adhesive is also bonded to the protruding parts, thus the bonding area is larger compared to when there are no protrusions.

[0010] According to the present invention, the adhesion of the various components is improved, thereby achieving high reliability. Attached Figure Description

[0011] Figure 1 This is an exploded perspective view of the pump according to the first embodiment of the present invention.

[0012] Figure 2 (A) is a top view of the pump according to the first embodiment of the present invention. Figure 2 (B) is its AA sectional view.

[0013] Figure 3 (A) is the top view of the frame. Figure 3 (B) Figure 3 (C) Figure 3 (D) Figure 3 (E) are the side views of the frame.

[0014] Figure 4 (A) Figure 4 (B) is a partially enlarged perspective view of an example of the bonding state between the frame and the vibrating component.

[0015] Figure 5 This is a schematic diagram of the cut-out frame.

[0016] Figure 6 (A) Figure 6 (B) Figure 6 (C) Figure 6 (D) is a top view representing a derived instance of the frame. Detailed Implementation

[0017] The actuators and pumps according to embodiments of the present invention will be described with reference to the accompanying drawings. Figure 1 This is an exploded perspective view of the pump according to the first embodiment of the present invention. Figure 2 (A) is a top view of the pump according to the first embodiment of the present invention. Figure 2 (B) is its AA sectional view. Furthermore, in Figure 2 (A) Figure 2 In (B), the illustration of the electrode pattern is omitted. Furthermore, in order to facilitate understanding of the structure of the fluid control device, the shapes of each component are depicted in exaggerated detail, either partially or entirely, in the figures shown in each embodiment, including this embodiment.

[0018] like Figure 1 , Figure 2 (A) Figure 2 As shown in (B), the pump 10 includes an actuator 11 and a housing 20. The components of the actuator 11 and the housing 20 are partially repeated.

[0019] The actuator 11 includes a vibrating component 21, a frame 23, a piezoelectric element 30, and electrode patterns 41 and 42. The housing 20 includes the vibrating component 21, a cover component 22, and a frame 23.

[0020] The vibrating component 21 is a flat plate having a main surface F211 and a main surface F212. The vibrating component 21 is formed, for example, by stamping metal.

[0021] The vibrating component 21 includes a main plate 211, an outer edge 212, and a connecting part 213.

[0022] The main plate 211 is circular when viewed from above. The outer edge 212 is annular when viewed from above. The inner end of the outer edge 212 is circular, and the outer end is octagonal. When viewed from above, the inner end of the outer edge 212 is located on the outer side of the main plate 211, and is separated from the outer edge of the main plate 211.

[0023] A connecting portion 213 is disposed between the outer edge of the main plate 211 and the inner end of the outer edge portion 212. Multiple connecting portions 213 are arranged at intervals along the outer edge of the main plate 211. The connecting portions 213 are beam-shaped, connecting the outer edge of the main plate 211 to the inner end of the outer edge portion 212. According to this structure, the main plate 211 is held in the outer edge portion 212 in a bending and vibrating manner via the connecting portions 213. In the region between the main plate 211 and the outer edge portion 212, the area where no connecting portion 213 exists becomes the opening 214 formed in the vibrating member 21.

[0024] The piezoelectric element 30 is a circular plate composed of piezoelectric materials. The piezoelectric element 30 is grounded against the main surface F211 of the main plate 211.

[0025] The cover member 22 is octagonal when viewed from above. The shape of the cover member 22 when viewed from above is approximately the same as the outer edge 212 of the vibrating member 21. The cover member 22 has an opening 220. The opening 220 is formed approximately in the center of the cover member 22 when viewed from above. When viewed from above, the opening 220 is smaller than the piezoelectric element 30. The cover member 22 is formed, for example, by stamping metal.

[0026] The frame 23 is annular when viewed from above, and has a cylindrical internal space 230. The inner circumferential ends of the frame 23 are circular, and the outer circumferential ends are octagonal. The frame 23 is formed, for example, by stamping metal.

[0027] When viewed from above, the shape of the inner periphery of the frame 23 is roughly similar to the shape of the inner end of the outer edge 212 of the vibrating component 21. The circle forming the inner periphery of the frame 23 is larger than the circle forming the inner periphery of the outer edge 212.

[0028] When viewed from above, the shape of the outer periphery of the frame 23 is approximately similar to the shape of the outer periphery of the outer edge 212 of the vibrating component 21. The outer periphery of the frame 23 is smaller than that of the outer edge 212 of the vibrating component 21. For example, the outer periphery of the cover component 22 is approximately 0.9 times larger and less than 1.0 times larger than that of the outer edge 212 of the vibrating component 21. This ratio is just one example and is not limited to this.

[0029] When viewed from above, the frame 23 overlaps with the outer edge 212 of the vibrating component 21. Furthermore, one end face of the frame 23 in the height direction (the direction orthogonal to the inner and outer end faces) is bonded to the main surface F212 of the outer edge 212 using adhesive 241.

[0030] Furthermore, when viewed from above, the frame 23 overlaps with the cover component 22. Moreover, the other end face of the frame 23 in the height direction (the direction orthogonal to the inner and outer end faces) is bonded to the cover component 22 using adhesive 242.

[0031] According to this structure, the housing 20 has an internal space 230 surrounded by a vibrating member 21, a cover member 22, and a frame 23. This internal space 230 functions as the pump chamber of the pump 10. The internal space 230 communicates with the outside of the housing 20 through openings 214 and 220.

[0032] The electrode pattern 41 includes an internal connection portion 411 and an external terminal 412. When viewed from above, the internal connection portion 411 overlaps with the piezoelectric element 30, and the end portion of the internal connection portion 411 contacts the surface of the piezoelectric element 30 opposite to the surface that abuts against the vibrating member 21. When viewed from above, the external terminal 412 protrudes outward from the outer edge 212 of the vibrating member 21.

[0033] The electrode pattern 42 includes an internal connection portion 421 and an external terminal 422. When viewed from above, the internal connection portion 421 overlaps with the outer edge portion 212 and contacts the main surface F211 at the outer edge portion 212. When viewed from above, the external terminal 422 protrudes outward from the outer edge portion 212 of the vibrating member 21.

[0034] With this structure, the actuator 11 and the pump 10 operate as follows.

[0035] A driving voltage is applied to the piezoelectric element 30 through electrode patterns 41 and 42. As a result, the piezoelectric element 30 strains, and the main plate 211 vibrates.

[0036] Here, the outer edge 212 is fixed by the frame 23. Furthermore, the main plate 211 is held in place by the connecting portion 213 so that it can vibrate. Therefore, in the vibrating member 21, the main plate 211 vibrates while the outer edge 212 is substantially fixed by the frame 23. Thus, it fulfills its function as an actuator 11.

[0037] Furthermore, by vibrating the main plate 211, fluid can be drawn into the internal space 230 from the outside through the opening 214, and fluid can be discharged from the internal space 230 to the outside through the opening 220. Alternatively, the fluid flow can be reversed. That is, fluid can be drawn into the internal space 230 from the outside through the opening 220, and fluid can be discharged from the internal space 230 to the outside through the opening 214. Thus, it functions as a pump 10.

[0038] In such actuators 11 and pumps 10, the frame 23 specifically has the following structure. Figure 3 (A) is the top view of the frame. Figure 3 (B) Figure 3 (C) Figure 3 (D) Figure 3 (E) are the side views of the frame.

[0039] like Figure 3 (A)- Figure 3 As shown in (E), the frame 23 has an internal space 230 and a protrusion 239. When viewed from above, the frame 23 is octagonal except for the protrusion 239. The frame 23 has a main surface 231, a main surface 232, a side surface 2331, a side surface 2332, a side surface 2333, a side surface 2334, a side surface 2341, a side surface 2342, a side surface 2343, and a side surface 2344.

[0040] Main surfaces 231 and 232 are the two end surfaces of the frame 23 in the thickness direction and are opposite to each other. The outer shape of main surfaces 231 and 232 (excluding the protrusion 239) is octagonal.

[0041] Side surfaces 2331, 2332, 2333, 2334, 2341, 2342, 2343, and 2344 are orthogonal to main surfaces 231 and 232 and are connected to the outer edges of main surfaces 231 and 232.

[0042] Side 2331 is opposite to side 2332, and side 2333 is opposite to side 2334. Side 2331 and side 2332 are perpendicular to side 2333 and side 2334.

[0043] Side 2341 is opposite to side 2342, and side 2343 is opposite to side 2344. Side 2341 and side 2342 are perpendicular to side 2343 and side 2344.

[0044] Side 2341 connects side 2331 and side 2333. Side 2341 is configured such that the angle formed by side 2331 and side 2333 on the center side of frame 23 is 135°.

[0045] Side 2342 connects side 2332 and side 2334. Side 2342 is configured such that the angle formed by side 2332 and side 2334 on the center side of frame 23 is 135°.

[0046] Side 2343 connects side 2331 and side 2334. Side 2343 is configured such that the angle formed by side 2331 and side 2334 on the center side of frame 23 is 135°.

[0047] Side 2344 connects side 2332 and side 2333. Side 2344 is configured such that the angle formed by side 2332 and side 2333 on the center side of frame 23 is 135°.

[0048] Side views 2331, 2332, 2333, and 2334 are of the same length (the same length when viewed from above). Side views 2341, 2342, 2343, and 2344 are of the same length (the same length when viewed from above). Side views 2331, 2332, 2333, and 2334 are longer than side views 2341, 2342, 2343, and 2344. Therefore, as... Figure 3 As shown in (A), an octagon is formed by alternating the four long sides and four short sides on the outer perimeter.

[0049] like Figure 3 As shown in (A), the frame 23 has an internal space 230 that is circular when viewed from above. The internal space 230 is a through hole that extends from the main surface 231 to the main surface 232 of the frame 23.

[0050] The center of the frame 23 coincides with the center of the internal space 230. Furthermore, this coincidence also includes cases where the centers are slightly misaligned due to manufacturing errors, etc.

[0051] Since the frame 23 is an octagon as described above, and the internal space 230 is circular (cylindrical), the thickness W233 from side 2331, side 2332, side 2333, and side 2334 to the center is smaller than the thickness W234 from side 2341, side 2342, side 2343, and side 2344 to the center. In other words, the thickness W233 from the longer side to the center is smaller than the thickness W234 from the shorter side to the center. Furthermore, as... Figure 3 As shown in (A) thicknesses W233 and W234, the thickness from the side to the center side is defined by the shortest distance between the side and the interior space 230.

[0052] The protrusion 239 protrudes outward from the outer edge of the frame 23, i.e., the side surface 2341. For example, the protrusion 239 is semi-cylindrical in shape and protrudes partially relative to the side surface 2341. Here, "partially" means partially in the circumferential direction of the side surface 2341. The protrusion 239 is integrally formed throughout the thickness direction of the frame 23.

[0053] For example, when the distance from the center of the frame 23 to each side is approximately 30 μm, the protrusion of the protrusion 239 is approximately 5 μm. Furthermore, this dimension is just one example and is not limited to this.

[0054] By having such a protrusion 239, the bonding area between the frame 23 and the outer edge 212 of the vibrating member 21, as well as the bonding area between the frame 23 and the cover member 22, is larger than that of the comparative structure (existing structure) without the protrusion 239.

[0055] Figure 4 (A) Figure 4 (B) is a partially enlarged perspective view of an example of the bonding state between the frame and the vibrating component. Figure 4 (A) indicates the structure of this embodiment. Figure 4 (B) indicates a comparison structure.

[0056] right Figure 4 (A) and Figure 4 (B) Comparison shows that by providing the protrusion 239, the contact area between the frame 23 and the outer edge 212 of the vibrating component 21 increases, and the length of the outline where the frame 23 and the outer edge 212 of the vibrating component 21 meet also increases. Therefore, the area bonded by the adhesive 242 between the frame 23 and the outer edge 212 of the vibrating component 21 increases not only at the end face in the thickness direction of the frame 23 but also on the side. In other words, the weld legs formed by the adhesive 242 on the frame 23 and the outer edge 212 of the vibrating component 21 also increase. Therefore, the bonding strength between the frame 23 and the outer edge 212 of the vibrating component 21 is improved. As a result, the actuator 11 can achieve high reliability.

[0057] Furthermore, although the illustration is omitted, the bonding between the frame 23 and the cover component 22 is the same as the bonding between the frame 23 and the outer edge 212 of the vibrating component 21. Therefore, the bonding strength between the frame 23 and the outer edge 212 of the vibrating component 21 is improved. As a result, the pump 10 can achieve high reliability.

[0058] In addition, the outer edge 212 of the vibrating component 21 is larger than the outer shape of the frame 23, so that even if the adhesive 242 overflows to the outer side of the frame 23, it can be suppressed from overflowing from the outer edge 212 of the vibrating component 21.

[0059] Similarly, the outer shape of the cover component 22 is larger than that of the frame 23, so that even if the adhesive 241 overflows to the outer side of the frame 23, it can be suppressed to overflow from the outer side of the cover component 22.

[0060] Therefore, when other components are bonded or joined to the housing 20, the adhesives 241 and 242 will not have an adverse effect on the bonding or joining.

[0061] Furthermore, as described above, the protrusion 239 preferably does not protrude from the outer edge 212 of the vibrating member 21 and the outer shape of the cover member 22. In other words, the amount of protrusion of the protrusion 239 is preferably less than the absolute value of the difference between the distance from the center of the frame 23 to the side 2341 and the distance from the center of the vibrating member 21 to the outer edge of the adhesive side 2341 of the outer edge 212.

[0062] Therefore, when viewing the actuator 11 and pump 10 from above, the protrusion 239 can be prevented from protruding to the side. As a result, the enlargement of the planar shape of the actuator 11 and pump 10 is suppressed. In addition, the overflow of adhesive 241 and 242 from the sides of the actuator 11 and pump 10 can be prevented.

[0063] Additionally, the protrusion 239 is disposed on an imaginary line extending from side 2331 and side 2333 (corresponding to the "first connecting side" and "second connecting side" of the present invention) toward side 2341. Figure 3 Within the space enclosed by the dashed line (A) and side 2341, side 2331 and side 2333 are connected to side 2341 where the protrusion 239 is formed. Thus, the protrusion 239 is housed within the quadrilateral formed by connecting side 2331, side 2332, side 2333, and side 2334 of the frame 23 when viewed from above. Therefore, it is possible to suppress [damage to] the mother substrate M23 (see reference 1). Figure 5 The distance Ls between adjacent frames 23 (refer to) Figure 5 The size increases due to the protrusion 239. That is, it is possible to suppress the decrease in the number of frames 23 relative to the mother substrate M23.

[0064] Furthermore, the protrusion 239 only needs to be formed at or near the end of at least the outer edge 212 of the vibrating member 21 in the frame 23. This increases the adhesive strength between the frame 23 and the outer edge 212 of the vibrating member 21. Therefore, the outer edge 212 can be more securely fixed, suppressing unnecessary vibration leakage to the outer edge 212. Additionally, while the outer edge 212 is susceptible to vibration from the main plate 211, by increasing the adhesive strength, peeling between the frame 23 and the outer edge 212 can be more reliably suppressed.

[0065] Furthermore, in the above structure, the protrusion 239 is formed on the side 2341, which is the shorter side. In other words, the protrusion 239 is formed on the side of the frame 23 that is different from the longest side. Thus, the protrusion 239 is formed on the thicker sidewall of the frame 23.

[0066] By forming the protrusion 239 at such a location, the generation of unnecessary vibrations caused by the formation of the protrusion 239 can be suppressed. That is, the pump 10 has the same shape throughout its entire circumference when viewed from above, and the frame 23 has the same shape, thereby uniformizing the vibration throughout the entire circumference and making it less likely for unnecessary vibrations to occur. Here, due to the formation of the protrusion 239, the thickness of the sidewall of the portion having the protrusion 239 is increased. Therefore, due to the presence of the protrusion 239, unnecessary vibrations are easily generated. However, by forming the protrusion 239 in the thicker portion, the variation in the sidewall thickness is smaller compared to forming the protrusion 239 in the thinner portion. Therefore, by forming the protrusion 239 in the thicker portion, the generation of unnecessary vibrations can be suppressed compared to forming the protrusion 239 in the thinner portion.

[0067] Furthermore, in the above structure, when viewed from above, the position of the protrusion 239 is different from and separate from the outward extension positions of the electrode patterns 41 and 42. Specifically, the outward extension positions of the electrode patterns 41 and 42 are located on approximately the opposite side of the position of the protrusion 239, separated by the internal space 230 of the frame 23. This suppresses the adverse effects of unnecessary vibrations on the electrode patterns 41 and 42. For example, peeling of the electrode patterns 41 and 42 caused by unnecessary vibrations, especially peeling of the electrode pattern 41, is suppressed.

[0068] Such actuators 11 and pumps 10 are manufactured as follows. Figure 5 This is a schematic diagram of the cut-out frame.

[0069] First, the vibrating component 21, the cover component 22, and the frame 23 are cut from their respective mother substrates. Each mother substrate is a stretched metal sheet. For example, for the frame 23, as shown... Figure 5 As shown, multiple frames 23 are cut out such that the protrusions 239 are positioned in the same direction relative to each frame 23 in the stretching direction of the mother substrate M23.

[0070] Regarding the vibration component 21 and the cover component 22, although they are not shown in the figure, they are cut out so that they are aligned in the stretching direction of the mother substrate.

[0071] The vibrating component 21, the cover component 22, and the frame 23 are bonded together using adhesives 241 and 242. At this time, all actuators 11 and pumps 10 are bonded together so that the vibrating component 21, the cover component 22, and the frame 23 are facing the same direction.

[0072] A piezoelectric element 30 is installed on the vibrating component 21, and electrode patterns 41 and 42 are installed thereon.

[0073] By using this manufacturing method, the space (internal space 230) surrounded by the vibrating component 21, the cover component 22, and the frame 23 has a consistent shape and stable pump characteristics, enabling the stable manufacture of multiple pumps 10 with high reliability. Furthermore, stable pump characteristics include, for example, high durability and achieving the desired flow rate.

[0074] Similarly, it is possible to manufacture actuators 11 with stable vibration characteristics and high reliability.

[0075] [Derivatives of the frame]

[0076] Figure 6 (A) Figure 6 (B) Figure 6 (C) Figure 6 (D) is a top view representing a derived instance of the frame.

[0077] like Figure 6 As shown in (A), the frame 23A includes a protrusion 2391A and a protrusion 2394A. Protrusion 2391A is identical to protrusion 239. Protrusion 2394A is a shape that protrudes from the side 2344. Thus, there can be multiple protrusions. For example, protrusion 2391A corresponds to the "first protrusion" of the present invention, and protrusion 2394A corresponds to the "second protrusion." Figure 6 As shown in (B), the frame 23B includes protrusions 2391B, 2392B, 2393B, and 2394B. Protrusion 2391B is identical to protrusion 239. Protrusion 2392B is shaped to protrude from side 2342. Protrusion 2393B is shaped to protrude from side 2343. Protrusion 2394B is shaped to protrude from side 2344. Protrusion 2391B corresponds to the "first protrusion" of the present invention, and protrusions 2392B, 2393B, and 2394B correspond to the "second protrusion".

[0078] Protrusions 2392B, 2393B, and 2394B have the same shape (second shape). Protrusion 2391B has a different shape from protrusions 2392B, 2393B, and 2394B (first shape). In other words, the frame 23B has multiple protrusions, but only protrusion 2391B has a different shape. Thus, even with multiple protrusions, by placing the protrusion with a different shape from the others at a specific position on the side of the frame, the orientation of the frame 23B can be easily determined.

[0079] like Figure 6 As shown in (C), the frame 23C has a protrusion 2391C. The protrusion 2391C is in the shape of protruding from the side 2333. Thus, the protrusion can also be in the shape of protruding from the long side of the octagon of the frame 23C. However, in order to obtain the above-mentioned effects, it is preferable to have a shape that protrudes from the short side.

[0080] like Figure 6 As shown in (D), the frame 23D has a protrusion 2391D. The protrusion 2391D is formed at the corner where the side surface 2331 connects to the side surface 2341. Thus, the protrusion can also be a shape that protrudes from the corner of the frame 23D. However, in order to obtain the above-mentioned effects, a shape that protrudes from the shorter side is preferred.

[0081] The configuration and shape of the protrusions of frames 23A, 23B, 23C, and 23D shown in these derivative examples, as well as the configuration and shape of the protrusions of frame 23, can be appropriately combined to achieve the corresponding effects of each combination.

[0082] Furthermore, in the above description, the external shapes of the vibrating component 21 and the frame 23 when viewed from above are octagonal. However, the external shapes of the vibrating component and the frame when viewed from above can also be other polygons. Moreover, the polygon in this case is not limited to shapes with intersecting straight lines at the corners when viewed from above; it can also be a shape composed of curves (shapes with rounded corners, etc.). Furthermore, the external shapes of the vibrating component and the frame do not necessarily have to be completely similar.

[0083] Explanation of reference numerals in the attached figures

[0084] 10... Pump; 11... Actuator; 20... Housing; 21... Vibrating component; 22... Cover component; 23, 23A, 23B, 23C, 23D... Frame; 30... Piezoelectric element; 41, 42... Electrode pattern; 211... Main plate; F211, F212... Main surface; 212... Outer edge; 213... Connecting part; 214... Opening; 220... Opening; 230... Internal space; 231, 232...Main surface; 239...Protrusion; 241, 242...Adhesive; 411, 421...Internal connection; 412, 422...External terminal; 2331, 2332, 2333, 2334, 2341, 2342, 2343, 2344...Side surface; 2391A, 2391B, 2391C, 2391D, 2392B, 2393B, 2394A, 2394B...Protrusion.

Claims

1. An actuator, wherein, have: A plate-shaped vibrating component has a first main surface and a second main surface, a piezoelectric element is mounted on at least one of the first main surface and the second main surface, and has an outer edge portion that is larger than the piezoelectric element when viewed from above and does not abut against the piezoelectric element. The frame, with an outer edge shape smaller than the vibrating component; and An adhesive is used to bond the first main surface or the second main surface at the outer edge of the vibrating component to the frame. When viewed from above, the outer edge of the frame is smaller than the outer edge of the vibrating component. The frame has a protrusion that partially protrudes outward from the outer edge. The outer edge of the frame is octagonal when viewed from above. The protrusion is positioned on a side different from the side that forms the longest side of the octagon.

2. The actuator according to claim 1, wherein, The protrusions are multiple. The protrusion includes at least a first protrusion having a first shape and a second protrusion having a second shape different from the first shape. The first protrusion is disposed on the thicker sidewall of the outer edge of the frame.

3. The actuator according to claim 1, wherein, The protrusion is one.

4. The actuator according to any one of claims 1 to 3, wherein, The protrusion is disposed in a space surrounded by an imaginary line extending from the first connecting side and the second connecting side toward the side on which the protrusion is formed, and the side on which the protrusion is formed, wherein the first connecting side and the second connecting side are connected to the two ends of the side on which the protrusion is formed.

5. The actuator according to any one of claims 1 to 3, wherein, The actuator has an electrode pattern that is connected to the piezoelectric element. The electrode pattern has an internal connection portion that overlaps with the piezoelectric element or the outer edge when viewed from above, and an external terminal that connects to the outside. The external terminal has a shape that protrudes outward from the outer edge of the vibrating component when viewed from above. The portion of the external terminal protruding to the outward side and the protrusion are positioned at a location separated from the frame when viewed from above.

6. A pump, wherein, have: The actuator according to any one of claims 1 to 5; and A plate-shaped cover component sandwiches the frame in the middle and is positioned opposite the vibrating component.

7. A method for manufacturing an actuator, which is the method for manufacturing the actuator according to any one of claims 1 to 5, wherein, Multiple frames are cut from a mother substrate made of metal stretched in a specified direction, such that each protrusion is positioned in the same way relative to each frame.

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