Motion mechanism for micro stage and vertical three-degree-of-freedom micro stage

Abstract

The application provides a motion mechanism for a micro-motion stage and a vertical three-degree-of-freedom micro-motion stage, relates to the field of semiconductor processing equipment, and comprises a driving part, a transmission assembly, a vertical adjusting assembly and a limiting guide assembly; the vertical adjusting assembly comprises a lead screw and a lead screw nut; the lead screw nut is connected with the transmission assembly, the transmission assembly is used for transmitting the power of the driving part to drive the lead screw nut to rotate and limit the axial movement of the lead screw nut; the lead screw is connected with the limiting guide assembly, the limiting guide assembly is used for limiting the axial rotation of the lead screw and providing guidance for the axial displacement of the lead screw, so that the lead screw is axially displaced; one end of the lead screw is used for connecting the micro-motion stage, and the micro-motion stage is angularly adjustable; when the lead screw is axially displaced, the height and the inclination angle of the micro-motion stage change along with the axial displacement of the lead screw. Through the vertical adjusting assembly and the limiting guide assembly, the micro-motion stage can meet the precision requirement of micron-level positioning and has a large bearing capacity.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing equipment, and more specifically to a motion mechanism for a micro stage and a vertical three-degree-of-freedom micro stage. Background Technology

[0002] Currently, micro stages used for semiconductor flip soldering include wedge-type micro stages, piezoelectric micro stages, and motor-driven micro stages. While these micro stages can meet the accuracy requirements for micron-level positioning, they all suffer from insufficient load-bearing capacity for the same size, making it difficult to meet the requirements for high-load flip soldering.

[0003] Therefore, a new micro-stage structure is needed that can meet the accuracy requirements of micron-level positioning, while also having a large load-bearing capacity to meet the requirements of high-load reverse welding. Summary of the Invention

[0004] In view of this, the embodiments of this specification provide a motion mechanism for a micro-motion stage and a vertical three-degree-of-freedom micro-motion stage, which can meet the accuracy requirements of the micro-motion stage, achieve micron-level positioning, and also have a large load-bearing capacity to meet the requirements of high load-bearing reverse welding.

[0005] The embodiments in this specification provide the following technical solutions:

[0006] This specification provides a motion mechanism for a micro-motion stage, including a drive component, a transmission assembly, a vertical adjustment assembly, and a limit guide assembly;

[0007] The vertical adjustment assembly includes a lead screw and a lead screw nut;

[0008] The lead screw nut is connected to the transmission assembly, which is used to transmit the power of the driving component to drive the lead screw nut to rotate around its own axis.

[0009] The axial movement of the lead screw nut is limited by the transmission assembly;

[0010] The lead screw is connected to the limiting guide assembly, which is used to limit the axial rotation of the lead screw and provide guidance for the axial displacement of the lead screw, so that when the lead screw nut rotates about its own axis, the lead screw is displaced axially.

[0011] One end of the lead screw is used to connect to the micro stage, and the angle between the lead screw and the micro stage is adjustable.

[0012] When the lead screw is displaced axially, the height and tilt angle of the micro-motion stage change accordingly with the axial displacement of the lead screw.

[0013] The above technical solution includes a vertical adjustment component and a limit guide component. The height and tilt adjustment of the micro stage are achieved by the vertical adjustment component, which includes a lead screw and a lead screw nut. Relying on the small helix angle of the lead screw, it can be ensured that the lead screw moves only a very small distance axially for each rotation of the lead screw nut. Specifically, the accuracy can be achieved at the micrometer level, depending on the selection. Thus, the height and tilt adjustment of the micro stage can both reach the micrometer level. On the other hand, since the lead screw itself has good self-locking ability and load-bearing capacity, it is used as an adjustment component in the height direction of the micro stage, which enables the micro stage to have a large load-bearing capacity and meet the requirements of high load-bearing reverse welding.

[0014] Preferably, the transmission assembly includes a worm gear and a worm that mesh with each other;

[0015] The worm gear is connected to the output end of the drive component;

[0016] The worm gear is coaxially connected to the lead screw nut;

[0017] The power output by the drive component is transmitted to the lead screw nut through the worm gear and the worm.

[0018] The above technical solution sets the transmission component to consist of a worm gear and a worm. By utilizing the large reduction ratio of the worm gear and the worm, the transmission torque of the driving component is greatly amplified, thereby further improving the load-bearing capacity. At the same time, it can also eliminate the need for structures such as a speed reducer, reducing costs and the overall size of the structure.

[0019] Preferably, the transmission assembly further includes a bearing;

[0020] The bearing includes an inner ring and an outer ring, which are coaxially rotatably connected.

[0021] The lead screw nut is installed on the inner ring and rotates coaxially with the inner ring relative to the outer ring.

[0022] Preferably, the upper end of the lead screw is used to connect to the micro-motion table, and the upper end of the lead screw is provided with a ball head;

[0023] The lower end of the micro-motion stage is provided with a ball seat, the ball head and the ball seat abut against each other, and the relative angle between the ball head and the ball seat is adjustable;

[0024] The lead screw achieves angular adjustment with the micro-motion table through the cooperation of the ball head and the ball seat.

[0025] Preferably, the limiting and guiding assembly includes a guide rail, a slider, and a clamping structure;

[0026] One end of the clamping structure is clamped to the lead screw to restrict the axial rotation of the lead screw;

[0027] The other end of the clamping structure is fixedly connected to the slider;

[0028] The slider is slidably connected to the guide rail, the length direction of the guide rail is parallel to the axis of the lead screw, and the slider slides relative to the guide rail along the length direction.

[0029] Preferably, the clamping structure includes an integrally formed clamping part and a connecting part;

[0030] The connecting part is fixedly connected to the end of the slider away from the guide rail;

[0031] The clamping part is provided with a clamping through hole, and the lead screw passes through the clamping through hole;

[0032] The outer periphery of the clamping part is provided with a clamping gap communicating with the clamping through hole;

[0033] The clamping part is also provided with a locking screw hole and a locking bolt. The locking screw hole extends laterally through the clamping gap, and the locking bolt passes through the locking screw hole to adjust the size of the clamping gap. By adjusting the clamping gap, the inner wall of the clamping through hole clamps the lead screw.

[0034] Preferably, the worm gear and the lead screw nut are coaxially fixedly connected by a clamping device;

[0035] The lead screw is provided with a limiting block, which is located at the end of the worm gear away from the lead screw nut. The limiting block is used to limit the maximum distance that the lead screw can move axially away from the worm gear.

[0036] This specification also provides a vertical three-degree-of-freedom micro-motion stage, including a base and a micro-motion stage;

[0037] The base is provided with three sets of motion mechanisms as described in any one of claims 1-7, and the three sets of motion mechanisms are evenly distributed circumferentially around the same center on the base.

[0038] The micro-motion stage is positioned above the three sets of motion mechanisms and is connected to the three sets of motion mechanisms.

[0039] Preferably, a retainer is further provided between the base and the micro-motion stage;

[0040] The lead screw nut is rotatably connected to the cage.

[0041] Preferably, a plurality of tension springs are provided between the base and / or the retainer and the micro-motion stage, the tension springs being used to improve the stiffness of the micro-motion stage in the horizontal direction.

[0042] Compared with the prior art, the beneficial effects that at least one technical solution adopted in the embodiments of this specification can achieve include at least:

[0043] By setting up a vertical adjustment component and a limit guide component, the height and tilt adjustment of the micro stage are achieved by the vertical adjustment component, which includes a lead screw and a lead screw nut. Relying on the small helix angle of the lead screw itself, it can be ensured that the lead screw moves only a very small distance axially for each rotation of the lead screw nut. Specifically, depending on the selection, the accuracy can reach the micrometer level, so that the height and tilt adjustment of the micro stage can both reach the micrometer level. On the other hand, since the lead screw itself has good self-locking ability and load-bearing capacity, it is used as an adjustment component in the height direction of the micro stage, which enables the micro stage to have a large load-bearing capacity and meet the requirements of high load-bearing reverse welding. Attached Figure Description

[0044] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0045] Figure 1 This is a schematic diagram of the structure of a motion mechanism for a micro-motion stage according to this application;

[0046] Figure 2 This is a schematic diagram of the vertical adjustment assembly, worm gear, ball, and ball seat in this application;

[0047] Figure 3 This is a schematic diagram of the overall structure of a vertical three-degree-of-freedom micro-motion stage according to this application;

[0048] Figure 4 This is a partial structural schematic diagram of a vertical three-degree-of-freedom micro-motion stage according to this application.

[0049] Reference numerals: 1. Motion mechanism; 11. Transmission assembly; 111. Worm gear; 112. Worm; 113. Bearing; 12. Vertical adjustment assembly; 121. Lead screw; 122. Lead screw nut; 13. Limiting guide assembly; 131. Guide rail; 132. Slider; 133. Clamping structure; 1331. Clamping part; 1332. Connecting part; 2. Micro-motion table; 3. Ball head; 4. Ball seat; 5. Clamping device; 6. Base; 7. Cage; 8. Mounting seat; 9. Tension spring; 10. Limiting block. Detailed Implementation

[0050] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0051] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0052] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0053] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0054] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0055] The technical solutions provided by the various embodiments of this application are described below with reference to the accompanying drawings.

[0056] like Figure 1 and Figure 2 As shown in the figure, this specification provides a motion mechanism for a micro-motion stage. The motion mechanism 1 includes a drive component (not shown in the figure), a transmission component 11, a vertical adjustment component 12, and a limit guide component 13.

[0057] The vertical adjustment assembly 12 includes a lead screw 121 and a lead screw nut 122.

[0058] The lead screw nut 122 is connected to the transmission assembly 11, which is used to transmit the power of the driving component to drive the lead screw nut 122 to rotate around its own axis.

[0059] The lead screw 121 is connected to the limiting guide assembly 13. The limiting guide assembly 13 is used to limit the axial rotation of the lead screw 121 and provide guidance for the axial displacement of the lead screw 121, so that when the lead screw nut 122 rotates about its own axis, the lead screw 121 is displaced axially.

[0060] One end of the lead screw 121 is used to connect to the micro stage 2, and the angle between the lead screw 121 and the micro stage 2 is adjustable.

[0061] When the lead screw 121 moves axially, the height and tilt angle of the micro-motion table 2 change accordingly with the axial displacement of the lead screw 121.

[0062] Specifically, the upper end of the lead screw 121 is used to connect to the micro-motion stage 2. A ball head 3 is fixedly or detachably connected to the upper end of the lead screw 121. A ball seat 4 is provided at the lower end of the micro-motion stage 2. The ball head 3 and the ball seat 4 abut against each other, and the relative angle between them is adjustable. Through the cooperation of the ball head 3 and the ball seat 4, during the axial movement of the lead screw 121, the height and tilt angle of the micro-motion stage 2 can change accordingly.

[0063] In this embodiment, the lead screw 121 is selected as a trapezoidal lead screw or a square thread lead screw.

[0064] If a trapezoidal lead screw is selected, its large contact area, small helix angle, and strong self-locking capability between the lead screw and the lead screw nut 122 enable the micro-motion stage 2 to have a strong load-bearing capacity. Simultaneously, due to the small helix angle of the trapezoidal lead screw, each rotation of the lead screw nut 122 results in only a very small vertical movement of the lead screw. By selecting a suitable trapezoidal lead screw model, it can be ensured that the adjustment of the micro-motion stage 2 can reach the micrometer level, meeting the precision requirements.

[0065] Similarly, using a square thread lead screw can achieve an effect similar to that of a trapezoidal lead screw.

[0066] The transmission assembly 11 includes a meshing worm gear 111 and a worm 112. The driving component is a servo motor or a stepper motor.

[0067] The worm gear 112 is coaxially connected to the output shaft of the drive component via a coupling.

[0068] The worm gear 111 and the lead screw nut 122 are coaxially connected.

[0069] Specifically, the worm gear 111 and the lead screw nut 122 can be coaxially connected via a clamping device 5 to transmit torque. The clamping device 5 can be a clamping clamp.

[0070] In some other embodiments, the worm gear 111 and the lead screw nut 122 can also be coaxially connected by a tapered sleeve.

[0071] In practical applications, the power output from the drive component is transmitted to the lead screw nut 122 via the worm gear 111 and worm 112. Utilizing the large reduction ratio between the worm gear 111 and worm 112, the transmission torque of the drive component is amplified. This allows for a large torque to be provided even when the micro-motion table 2 is carrying a large workpiece, causing the lead screw nut 122 to rotate and drive the lead screw 121 to rise and fall, thus adjusting the micro-motion table 2. Furthermore, using the worm gear 111 and worm 112 eliminates the need for a speed reducer, reducing overall cost and structural size. It also effectively reduces noise during operation and lowers maintenance costs, requiring only periodic application of lubricant.

[0072] In some other embodiments, the transmission assembly 11 may also be a combination of cylindrical gears and bevel gears.

[0073] A limit block 10 is also fixed on the lead screw 121, located at the end of the worm gear 111 away from the lead screw nut 122. The limit block 10 is used to limit the maximum distance that the lead screw 121 can move axially away from the worm gear 111. Specifically, when the lead screw 121 moves axially upward to a certain distance, the limit block 10 comes into contact with the worm gear 111, at which point the lead screw 121 cannot continue to move axially, thus the maximum distance that the lead screw 121 can move axially away from the worm gear is limited by the limit block 10.

[0074] The transmission assembly 11 also includes a bearing 113, which comprises an inner ring and an outer ring. The outer ring is mounted on a cage 7, and the inner and outer rings are coaxially rotatably connected. The lead screw nut 122 is mounted on the inner ring and rotates coaxially with the inner ring relative to the outer ring.

[0075] Specifically, bearing 113 can be an angular contact ball bearing or a tapered roller bearing.

[0076] In practical applications, since the lead screw 121 needs to provide load-bearing capacity for the micro-motion stage 2, the lead screw nut 122 connected to the lead screw 121 will be subjected to axial force from the lead screw 121. By setting angular contact ball bearings or tapered roller bearings, on the one hand, the axial movement of the lead screw nut 122 can be restricted by the inner ring, and on the other hand, a sufficiently large axial load-bearing capacity can be provided so that the lead screw 121 can maintain sufficient stability when bearing the micro-motion stage 2 and the heavy-load workpiece on the micro-motion stage 2.

[0077] It should be noted that in this embodiment, the axial direction of the lead screw 121, the axial direction of the lead screw nut 122, the axial direction of the bearing 113, and the axial direction of the worm gear 111 are all arranged in the vertical direction.

[0078] The limiting guide assembly 13 includes a guide rail 131, a slider 132, and a clamping structure 133.

[0079] One end of the clamping structure 133 clamps the lead screw 121 to restrict the axial rotation of the lead screw 121.

[0080] The other end of the clamping structure 133 is fixedly connected to the slider 132.

[0081] The slider 132 is slidably connected to the guide rail 131. The length direction of the guide rail 131 is parallel to the axis of the lead screw 121. The slider 132 slides relative to the guide rail 131 along the length direction.

[0082] Specifically, the clamping structure 133 includes an integrally formed clamping part 1331 and a connecting part 1332.

[0083] The connecting part 1332 is fixedly connected to the end of the slider 132 away from the guide rail 131.

[0084] The clamping part 1331 is provided with a clamping through hole, the axis of which coincides with the axis of the lead screw nut 122, and the lead screw 121 passes through the clamping through hole.

[0085] The outer periphery of the clamping part 1331 is provided with a clamping gap that communicates with the clamping through hole, and the extension direction of the clamping gap is parallel to the length direction of the lead screw 121.

[0086] The clamping part 1331 is also provided with a locking screw hole and a locking bolt, with the locking screw hole extending laterally through the clamping gap.

[0087] The locking bolt passes through the locking screw hole and is used to adjust the clamping gap.

[0088] Specifically, the locking screw hole can be a through hole or a threaded hole. If the locking screw hole is a through hole, the locking bolt and nut are used to adjust the size of the clamping gap. If the locking screw hole is a threaded hole, the locking bolt can be directly engaged with the locking screw hole to adjust the size of the clamping gap.

[0089] Specifically, if it is necessary to tighten the lead screw 121, the tightening gap can be locked to cause the inner wall of the tightening through hole to contract and tighten the lead screw 121.

[0090] like Figure 3 and Figure 4 As shown in the figure, this embodiment of the specification also provides a vertical three-degree-of-freedom micro-motion stage, including a base 6 and a retainer 7 fixedly connected to the base 6. The retainer 7 is arranged parallel to the upper end of the base 6.

[0091] Three sets of motion mechanisms 1 are provided on the base 6. The three sets of motion mechanisms 1 are evenly distributed around the same center above the base 6.

[0092] The three motion mechanisms 1 are connected together to the micro-motion stage 2, which is located above the cage 7 and the base 6.

[0093] Specifically, such as Figures 1 to 4 As shown, three ball seats 4 are fixedly installed on the lower end face of the micro-motion stage 2. The three ball seats 4 are connected to the ball heads 3 at the upper end of the three lead screws 121 one by one to realize the connection between the micro-motion stage 2 and the three sets of motion mechanisms 1.

[0094] The drive unit and worm gear 112 are fixedly mounted on the upper end face of the base 6, and the output shaft of the drive unit and the worm gear 112 are coaxially connected by a coupling.

[0095] The outer ring is fixed to the cage 7, and the axis of the outer ring is perpendicular to the upper end face of the cage 7 and the upper end face of the base 6. The lead screw nut 122 is assembled on the inner ring, and the axis of the lead screw nut 122 coincides with the axis of the inner ring. The lead screw nut 122 achieves a rotatable connection with the cage 7 through the cooperation of the inner and outer rings.

[0096] The lead screw 121 is threadedly connected to the lead screw nut 122, and the lead screw 121 is set perpendicular to the upper end of the base 6.

[0097] Three mounting seats 8 are fixed on the upper surface of the base 6, and the three mounting seats 8 are respectively set for three sets of motion mechanisms 1.

[0098] Among them, the limit guide components 13 in the three sets of motion mechanisms 1 are installed on the three mounting seats 8 one by one.

[0099] Specifically, the guide rail 131 is fixedly mounted on the mounting base 8 in the vertical direction, and the slider 132 is slidably connected to the guide rail 131 in the vertical direction.

[0100] One end of the clamping structure 133 is fixedly connected to the end of the slider 132 away from the guide rail 131, and the other end of the clamping structure 133 clamps the upper area of ​​the lead screw 121 to restrict the rotation of the lead screw 121.

[0101] When the lead screw nut 122 rotates, the lead screw 121 moves axially under the guidance of the clamping structure 133 and the slider 132.

[0102] In practical applications, the three motion mechanisms 1 work together to enable the micro-stage 2 to achieve micron-level adjustment of the three degrees of freedom (RxRyZ), that is, to achieve micron-level adjustment of the height and tilt angle of the micro-stage 2.

[0103] Among them, the x and y directions are two mutually perpendicular directions in the horizontal direction, and the Z direction is the vertical direction.

[0104] Several tension springs 9 are provided between the base 6 and the micro-motion stage 2. The tension springs 9 cooperate with each other to improve the rigidity of the micro-motion stage 2 in the horizontal direction.

[0105] Specifically, a number of tension springs 9 are fixedly connected between the micro-motion stage 2 and the base 6 and / or the retainer 7. The tension springs 9 are distributed circumferentially around the micro-motion stage 2 and act together on the micro-motion stage 2 to provide several circumferentially distributed tension forces, thereby improving the rigidity of the micro-motion stage 2 in the horizontal direction and maintaining sufficient stability for use in the reverse welding process.

[0106] Furthermore, the tension springs 9 include several first springs and several second springs.

[0107] The two ends of the first spring are fixedly connected to the base 6 and the micro-motion stage 2, respectively.

[0108] The two ends of the second spring are fixedly connected to the cage 7 and the micro-motion stage 2, respectively.

[0109] In some other embodiments, several tension springs 9 may also be installed between the base 6 and the micro-motion stage 2, or several tension springs 9 may also be installed between the retainer 7 and the micro-motion stage 2. The specific installation can be adjusted according to the overall structure, and no further limitations are made here.

[0110] Furthermore, all three motion mechanisms 1 employ backlash compensation to further ensure the adjustment accuracy of the micro-motion stage 2.

[0111] The various embodiments in this specification are described in a progressive manner. The same or similar parts between the various embodiments can be referred to each other. Each embodiment focuses on describing the differences from other embodiments.

[0112] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A motion mechanism for a micro-motion stage, characterized in that, Includes drive components, transmission components, vertical adjustment components, and limit guide components; The vertical adjustment assembly includes a lead screw and a lead screw nut; The lead screw nut is connected to the transmission assembly, which is used to transmit the power of the driving component to drive the lead screw nut to rotate around its own axis. The axial movement of the lead screw nut is limited by the transmission assembly; The lead screw is connected to the limiting guide assembly, which is used to limit the axial rotation of the lead screw and provide guidance for the axial displacement of the lead screw, so that when the lead screw nut rotates about its own axis, the lead screw is displaced axially. One end of the lead screw is used to connect to the micro stage, and the angle between the lead screw and the micro stage is adjustable. When the lead screw is displaced axially, the height and tilt angle of the micro-motion table change accordingly with the axial displacement of the lead screw; The limiting and guiding assembly includes a guide rail, a slider, and a clamping structure; One end of the clamping structure is clamped to the lead screw to restrict the axial rotation of the lead screw; The other end of the clamping structure is fixedly connected to the slider; The slider is slidably connected to the guide rail, the length direction of the guide rail is parallel to the axis of the lead screw, and the slider slides relative to the guide rail along the length direction.

2. The motion mechanism according to claim 1, characterized in that, The transmission assembly includes a worm gear and a worm that mesh with each other; The worm gear is connected to the output end of the drive component; The worm gear is coaxially connected to the lead screw nut; The power output by the drive component is transmitted to the lead screw nut through the worm gear and the worm.

3. The motion mechanism according to claim 2, characterized in that, The transmission assembly also includes bearings; The bearing includes an inner ring and an outer ring, which are coaxially rotatably connected. The lead screw nut is installed on the inner ring and rotates coaxially with the inner ring relative to the outer ring.

4. The motion mechanism according to claim 1, characterized in that, The upper end of the lead screw is used to connect to the micro-motion table, and the upper end of the lead screw is provided with a ball head; The lower end of the micro-motion stage is provided with a ball seat, the ball head and the ball seat abut against each other, and the relative angle between the ball head and the ball seat is adjustable; The lead screw achieves angular adjustment with the micro-motion table through the cooperation of the ball head and the ball seat.

5. The motion mechanism according to claim 1, characterized in that, The clamping structure includes an integrally formed clamping part and a connecting part; The connecting part is fixedly connected to the end of the slider away from the guide rail; The clamping part is provided with a clamping through hole, and the lead screw passes through the clamping through hole; The outer periphery of the clamping part is provided with a clamping gap communicating with the clamping through hole; The clamping part is also provided with a locking screw hole and a locking bolt. The locking screw hole extends laterally through the clamping gap, and the locking bolt passes through the locking screw hole to adjust the size of the clamping gap. By adjusting the clamping gap, the inner wall of the clamping through hole clamps the lead screw.

6. The motion mechanism according to claim 2, characterized in that, The worm gear and the lead screw nut are coaxially and fixedly connected by a clamping device; The lead screw is provided with a limiting block, which is located at the end of the worm gear away from the lead screw nut. The limiting block is used to limit the maximum distance that the lead screw can move axially away from the worm gear.

7. A vertical three-degree-of-freedom micro-motion stage, characterized in that, Includes base and micro-motion stage; The base is provided with three sets of motion mechanisms as described in any one of claims 1-6, and the three sets of motion mechanisms are evenly distributed circumferentially around the same center on the base. The micro-motion stage is positioned above the three sets of motion mechanisms and is connected to the three sets of motion mechanisms.

8. The vertical three-degree-of-freedom micro-motion stage according to claim 7, characterized in that, A retainer is also provided between the base and the micro-motion stage; The lead screw nut is rotatably connected to the cage.

9. The vertical three-degree-of-freedom micro-motion stage according to claim 8, characterized in that, A plurality of tension springs are provided between the base and / or the retainer and the micro-motion stage, the tension springs being used to increase the rigidity of the micro-motion stage in the horizontal direction.

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