A high-efficiency helium detection device

By designing a helium leak detection device with a sealing soft cover, lifting column, and lower pressure plate, the problem of the inability to adjust the space in the existing technology was solved, and the sealing space can be adjusted according to the size of the parts, thereby improving the detection efficiency and accuracy of helium leak detection.

CN117249951BActive Publication Date: 2026-03-17SUZHOU FEIMUTE INTELLIGENT EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-09-19
Publication Date
2026-03-17

AI Technical Summary

Technical Problem

Existing helium detection devices cannot adjust the space according to the size of the parts, resulting in a large amount of helium escaping when the parts are not sealed, which reduces the detection efficiency.

Method used

A helium testing device was designed, comprising a sealing soft cover, a lifting column, a tightening ring, and a lower pressure plate. The size of the sealing soft cover is adjusted by an elastic rope and an electro-hydraulic rod, and it is divided into multiple sealed spaces to achieve batch testing of parts.

Benefits of technology

It improves the detection efficiency of helium leak detection and the overall effectiveness of the device. It can adjust the sealing space according to the size of the components, reduce helium leakage, and improve detection accuracy and efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application relates to the technical field of automobile part detection, and discloses a high-efficiency helium detection device, which comprises a vacuum treatment box, a main rotating rod is rotationally connected to the inner wall of the two ends of the vacuum treatment box, a conveying belt is arranged on the outer side of the main rotating rod, a plurality of bases are arranged on the inner side of the conveying belt, the two ends of the plurality of bases are fixedly connected to the inner side wall of the vacuum treatment box, a sealing soft cover is arranged on the top of the base, and the sealing ring and the elastic rope on the tightening ring are arranged. When the lifting column drives the vacuum outer ring and the helium outer ring to slide up and down in the sealing soft cover to the position of contacting the part, the elastic rope can pull the sealing soft cover at the position from the top to the upper part, and simultaneously seal the bottom position through the elastic rope, so that the internal space of the sealing soft cover can be reduced or increased according to the size and height of the part, and the detection efficiency of the helium detection device for detecting the helium leakage of the part is improved.
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Description

Technical Field

[0001] This invention relates to the field of automotive parts testing technology, specifically to a high-efficiency helium detection device. Background Technology

[0002] Helium testing is an inspection method that involves evacuating the workpiece and then filling it with helium gas at a certain pressure. The workpiece is placed in a vacuum chamber with a certain vacuum level requirement, and the vacuum chamber is connected to the leak detection port of a helium mass spectrometer.

[0003] Chinese patent disclosure CN105618391B discloses an automatic helium leak detection device, which is described as "consisting of a main belt 1, a box-entry transplanting machine 2, parallel first and second vacuum boxes 5 and 14, parallel first and second waiting belts 6 and 16, parallel third and fourth vacuum boxes 8 and 17, a box-exit transplanting machine 21, a diversion transplanting machine 24, and parallel non-conforming product placement belt 10 and conforming product belt 26 connected in sequence." When this device detects leaks in parts using helium, the output helium is used in a space that cannot be changed. When the space occupied by the parts is small, the space cannot be adjusted according to the size of the parts. This causes a large amount of helium inside the parts to overflow into a larger space before it can be detected by the instrument, resulting in a decrease in the overall effectiveness and efficiency of the helium detection device.

[0004] In view of this, the present invention proposes a highly efficient helium detection device. Summary of the Invention

[0005] This invention proposes a highly efficient helium detection device, which solves the problem in current wastewater biological treatment processes where the space cannot be changed according to the size of the components, resulting in a large amount of helium gas inside the components overflowing into the large space when the components are not sealed, thus requiring the instrument to detect the leak.

[0006] The technical solution of the present invention is as follows: A high-efficiency helium detection device includes a vacuum processing chamber. A main rotating rod is rotatably connected to the inner walls of both ends of the vacuum processing chamber. A conveyor belt is sleeved on the outer side of the main rotating rod. Multiple bases are provided on the inner side of the conveyor belt. The two ends of the multiple bases are fixedly connected to the inner wall of the vacuum processing chamber. Sealing soft covers are fixedly installed on both sides of the top of the bases. The two ends of the sealing soft covers are respectively fixedly connected to the inner wall of the vacuum processing chamber. Three sealing rings are fixedly installed at the top of the sealing soft covers through an opening. A lifting column is slidably connected to the inner wall of the three sealing rings. A top rod and a bottom rod are fixedly installed at the top and bottom ends of the lifting column, respectively. A helium outer ring is fixedly installed at the bottom end of the bottom rod. A tightening ring is fixedly installed at the bottom end of the top rod. Multiple retracting rods are rotatably connected to the inner side of the tightening ring. An elastic rope is fixedly installed between the bottom ends of the multiple retracting rods.

[0007] Preferably, two first electro-hydraulic rods are fixedly installed at the top of the top rod, and lifting springs are fixedly installed at both ends of the top of the sealing ring. The fixed ends of the first electro-hydraulic rods and the top ends of the lifting springs are fixedly connected to the top inner wall of the vacuum treatment box. Multiple baffles are fixedly installed on the bottom outer side of the tightening ring, and limit springs are rotatably connected between the inner side of the multiple baffles and the outer side of the tightening rod.

[0008] Preferably, a plurality of lower pressure plates are slidably connected to the top outer side of the sealing soft cover, a plurality of winding strips are fixedly installed on the top of the plurality of lower pressure plates, and winding rods are fixedly installed on the top ends of the plurality of winding strips. The two ends of the winding rods are rotatably connected to the top inner wall of the vacuum treatment chamber.

[0009] Preferably, the bottom of the helium outer ring is provided with a vacuum outer ring, and the top of the vacuum outer ring and the bottom of the helium outer ring are each rotatably connected to two rotating rings. Two second electro-hydraulic rods are fixedly installed between the two rotating rings. A balance column is fixedly installed between the telescopic ends of the second electro-hydraulic rods. A gas storage ring is rotatably connected to the inner side of both the vacuum outer ring and the helium outer ring. The inner side of the gas storage ring is connected to a top pipe. The bottom end of the top pipe is connected to a vertical telescopic pipe. The bottom end of the vertical telescopic pipe is connected to one end of the balance column. The outlet of the balance column is connected to a secondary telescopic pipe. The outlet of the secondary telescopic pipe is connected to an exhaust hood.

[0010] Preferably, two first electric telescopic rods are provided on the outer side of the auxiliary telescopic tube. The two ends of the two first electric telescopic rods are fixedly connected to the outer side of the exhaust hood and one end of the balance column, respectively. The outer sides of the vacuum outer ring and the helium outer ring are both connected to a transition box. The bottom end of the transition box is connected to the first telescopic tube and the second telescopic tube, respectively. The bottom ends of the first telescopic tube and the second telescopic tube are both connected to a ventilation column. Two second electric telescopic rods and a third electric telescopic rod are provided on the outer side of the first telescopic tube and the second telescopic tube, respectively. The two ends of the two second electric telescopic rods and the third electric telescopic rods are fixedly connected to the top end of the ventilation column and the top outer side of the transition box, respectively.

[0011] Preferably, a rotating gear ring is fixedly installed on one outer end of the gas storage ring, a rotating gear is meshed on the outer side of the rotating gear ring, a rotating motor is fixedly installed on one end of the rotating gear, and a transmission motor is fixedly installed on one end of one of the main rotating rods.

[0012] Preferably, a base plate is fixedly installed on both sides of the vacuum processing box, and a vacuum pump and a delivery pump are fixedly installed on the top of the two base plates respectively. The output end of the vacuum pump is connected to a vacuum branch pipe, and the output end of the delivery pump is connected to a helium branch pipe. Each branch of the vacuum branch pipe and the helium branch pipe is inserted and connected to the inner walls of both ends of the base. The top of the delivery pump is connected to a helium cylinder through a pipe. Each branch of the vacuum branch pipe and the helium branch pipe is fixedly installed with an electric valve.

[0013] Preferably, a placement plate is fixedly installed on one side of the vacuum treatment chamber, a helium mass spectrometer leak detector is fixedly installed on the top of the placement plate, a branch detection head is fixedly installed at one end of the helium mass spectrometer leak detector, and the end of the branch detection head is fixedly connected to the inner wall of the sealing soft cover.

[0014] Preferably, a switch panel is fixedly installed on the outside of the vacuum treatment box. The surface of the switch panel is respectively fixedly installed with a first electro-hydraulic rod switch, a second electro-hydraulic rod switch, a first electric telescopic rod switch, a second electric telescopic rod switch, a third electric telescopic rod switch, a rotary motor switch, a transmission motor switch, a vacuum pump switch, a delivery pump switch, an electric valve switch, and a helium mass spectrometer leak detector switch. The first electro-hydraulic rod, the second electro-hydraulic rod, the first electric telescopic rod, the second electric telescopic rod, the third electric telescopic rod, the rotary motor, the transmission motor, the vacuum pump, the delivery pump, the electric valve, and the helium mass spectrometer leak detector are electrically connected to an external power supply via the first electro-hydraulic rod switch, the second electro-hydraulic rod switch, the first electric telescopic rod switch, the second electric telescopic rod switch, the third electric telescopic rod switch, the rotary motor switch, the transmission motor switch, the vacuum pump switch, the delivery pump switch, the electric valve switch, and the helium mass spectrometer leak detector switch, respectively.

[0015] The working principle and beneficial effects of this invention are as follows:

[0016] In this invention, the sealing ring and the elastic rope on the tightening ring allow the lifting column to slide the vacuum outer ring and helium outer ring up and down inside the sealed soft cover until they contact the component. At this point, the elastic rope pulls the excess portion of the sealed soft cover upwards from the top, simultaneously sealing the bottom end. This allows the internal space of the sealed soft cover to be adjusted according to the size and height of the component, thereby improving the overall efficiency of the helium leak detection device. Furthermore, the lower pressure plate, through gravity, divides the entire sealed soft cover into multiple sealed spaces, enabling batch helium leak detection of multiple components on the conveyor belt. After leak detection, the lower pressure plate is lifted upwards by the winding rod and winding strip, connecting the entire sealed soft cover and conveying the leak-detected components outwards via the conveyor belt, further improving the overall leak detection efficiency of the helium leak detection device. Attached Figure Description

[0017] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0018] Figure 1 This is a three-dimensional structural diagram of a high-efficiency helium detection device proposed in this invention;

[0019] Figure 2 This is a schematic diagram of the vacuum pump structure proposed in this invention;

[0020] Figure 3 This is a schematic diagram of the sealing soft cover structure proposed in this invention;

[0021] Figure 4 This is a schematic diagram of the internal structure of the vacuum processing chamber proposed in this invention;

[0022] Figure 5 This is a schematic diagram of the lifting column structure proposed in this invention;

[0023] Figure 6 This is a schematic diagram of the tightening ring structure proposed in this invention;

[0024] Figure 7 This is a schematic diagram of the gas storage ring structure proposed in this invention;

[0025] Figure 8 This is a schematic diagram of the helium outer ring structure proposed in this invention;

[0026] Figure 9 This is a schematic diagram of the first telescopic tube structure proposed in this invention;

[0027] In the diagram: 1. Vacuum processing box; 2. Main rotating rod; 3. Conveyor belt; 4. Base; 5. Sealing soft cover; 6. Sealing ring; 7. Lifting column; 8. Top rod; 9. Bottom rod; 10. Helium outer ring; 11. Tightening ring; 12. Retracting rod; 13. Elastic rope; 14. First electro-hydraulic rod; 15. Lifting spring; 16. Baffle; 17. Limiting spring; 18. Lower pressure plate; 19. Retracting strip; 20. Retracting rod; 21. Vacuum outer ring; 22. Rotating ring; 23. Second electro-hydraulic rod; 24. Balance column; 25. Gas storage ring; 26. Top pipe; 27. Vertical telescopic pipe 28. Secondary telescopic pipe; 29. ​​Exhaust hood; 30. First electric telescopic rod; 31. Transition box; 32. First telescopic pipe; 33. Second telescopic pipe; 34. Ventilation column; 35. Second electric telescopic rod; 36. Third electric telescopic rod; 37. Rotating gear ring; 38. Rotating gear; 39. Rotating motor; 40. Transmission motor; 41. Base plate; 42. Vacuum pump; 43. Delivery pump; 44. Vacuum branch pipeline; 45. Helium branch pipeline; 46. Helium cylinder; 47. Electric valve; 48. Placement plate; 49. Helium mass spectrometer leak detector; 50. Branch detection head. Detailed Implementation

[0028] The technical solutions of the present invention will be clearly and completely described below with reference to the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0029] Please see Figure 1 , Figure 2 , Figure 3 as well as Figure 4A high-efficiency helium leak detection device, when performing helium leak detection on components, firstly, the main rotating rod 2 is driven by the drive motor 40 to rotate, so that the main rotating rod 2 drives the conveyor belt 3 to move inside the vacuum processing chamber 1, allowing multiple components to be sequentially conveyed into the chamber. After the components move into the vacuum processing chamber 1, the first electro-hydraulic rod 14 acts on the top rod 8, so that the top rod 8 can drive the lifting column 7 and the tightening ring 11 to move downwards synchronously. At the same time, the bottom rod 9 at the bottom end of the top rod 8 drives the vacuum outer ring 21 and the helium outer ring 10 to move downwards, and the sealing soft cover 5 at the position of the tightening ring 11 can pass through the upper baffle 16 of the tightening ring 11 and the retracting rod 12. The function of the limiting spring 17 is to allow the retracting rod 12 to tighten and seal the excess sealing soft cover 5 at the top of the bottom rod 9 under the combined action of the spring and the elastic rope 13. The excess sealing soft cover 5 at the top of the tightening ring 11 can then be lifted upward by the action of the lifting spring 15 on the sealing ring 6. This allows the individual components to be adjusted according to the required space when performing helium leak detection through the vacuum outer ring 21 and the helium outer ring 10. This enables rapid detection of helium leaks within a limited space when a helium leak occurs, improving the overall efficiency of helium leak detection.

[0030] Please see Figure 3 as well as Figure 4 When a component needs to be helium leak tested inside the sealed soft cover 5, the gravity of the lower pressure plate 18 causes the winding rod 20 to rotate in the opposite direction, releasing the winding strip 19 on the winding rod 20 downwards. This allows the lower pressure plate 18 to press down on the top of the sealed soft cover 5 and onto the conveyor belt 3 and the base 4, dividing the entire sealed soft cover 5 into multiple individual spaces, thereby improving the efficiency of helium leak testing for components.

[0031] Please see Figure 5 as well as Figure 7While the sealing soft cover 5 is spatially adjusted according to the size of the components, the distance between the vacuum outer ring 21 and the helium outer ring 10 and the balance column 24 is equalized by the synchronous extension and retraction of the second electric hydraulic rods 23 at both ends of the balance column 24. Simultaneously with the height adjustment of the balance column 24, the vertical telescopic tube 27 can follow the balance column 24 to adjust its length at the outlet of the top tube 26, allowing the exhaust hood 29 connected to the auxiliary telescopic tube 28 to move up and down to the port where the components require gas flow. Since the gas flow port of the components may be located at different positions on the components, this can be achieved by rotating the vacuum outer ring 21 or the helium outer ring 10. Motor 39 drives the rotation of rotating gear 38, which in turn drives the internal gas storage ring 25 to rotate via rotating gear ring 37. When the gas storage ring 25 rotates, the rotating ring 22 can rotate simultaneously on the vacuum outer ring 21 and the helium outer ring 10 through the connection of top pipe 26, vertical telescopic pipe 27, balance column 24 and second electric telescopic rod 35. After the two balance columns 24 drive the auxiliary telescopic pipe 28 and exhaust hood 29 to adjust their positions, the distance between the exhaust hood 29 and the component port can be adjusted and sealed by the action of the first electric telescopic rod 30 between the exhaust hood 29 and the balance column 24.

[0032] Please see Figure 7 as well as Figure 8 After sealing the component ports with the exhaust hood 29, the second electric telescopic rod 35 can extend and retract between the transition box 31 and the ventilation column 34 on the vacuum outer ring 21, allowing the ventilation column 34 to be inserted into the vacuum branch pipe 44 at the top of the base 4. The first telescopic tube 32 extends and retracts according to the distance between the transition box 31 and the ventilation column 34. Similarly, the third electric telescopic rod 36 extends and retracts between the transition box 31 and the ventilation column 34 on the helium outer ring 10, allowing the ventilation column 34 to be inserted into the helium branch pipe 45 at the top of the base 4. The second telescopic tube 33 also extends and retracts according to the extension and retraction of the third electric telescopic rod 36. After the two ventilation columns 34 are connected to the vacuum branch pipe 44 and the helium branch pipe 45 respectively, the components can be helium leak checked by turning on the vacuum pump 42 and the delivery pump 43.

[0033] Please see Figure 1 , Figure 2 as well as Figure 3After the vacuum pump 42 is turned on, gas can be vacuumed into the vacuum outer ring 21 sequentially through the vacuum branch pipe 44, base 4, vent column 34, first telescopic pipe 32, and transition box 31. When the gas storage ring 25 inside the vacuum outer ring 21 rotates, the corresponding air holes on the gas storage ring 25 and the vacuum outer ring 21 connect, and the gas inside the sealed component connected to the exhaust hood 29 is vacuumed sequentially through the gas storage ring 25, top pipe 26, vertical telescopic pipe 27, balance column 24, and auxiliary telescopic pipe 28. Similarly... Similarly, the helium gas in the helium cylinder 46 is extracted by the delivery pump 43, and then delivered to the helium branch pipe 45. From there, it is output to the second telescopic pipe 33 and the helium outer ring 10, allowing it to fill the interior of the components through the connected exhaust hood 29. When a gap exists in the components and a helium leak occurs, the helium mass spectrometer leak detector 49 detects the helium content in multiple spaces inside the sealed soft cover 5 through the branch detection head 50, thus improving the overall efficiency of helium leak detection and the overall effectiveness of the device.

[0034] Working principle and usage procedure: When using this device to perform helium leak detection on parts, the lifting column 7, top rod 8, tightening ring 11, vacuum outer ring 21, and helium outer ring 10 are raised and lowered relative to the sealing ring 6 and sealing soft cover 5. This allows the sealing soft cover 5 to be lifted and sealed according to the size of the parts, reducing the size of a single space in the sealing soft cover 5. At the same time, the downward pressure of the lower plate 18 divides the entire sealing soft cover 5 into multiple individual spaces, thus enabling batch testing of multiple parts. After adjusting the space occupied by the cover 5, the height position between the exhaust cover 29 and the component can be adjusted and connected and sealed. At this time, the vacuum pump 42 can be used to extract the air inside the component through the exhaust cover 29 connected to it. Then, the helium gas inside the helium cylinder 46 can be extracted by the delivery pump 43 and filled into the component through the exhaust cover 29 connected to it. After filling, the component can be helium leak detected by the helium mass spectrometer leak detector 49 and the detection heads 50 of each individual space.

[0035] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A high efficiency helium detection device, characterized by, The utility model provides a vacuum processing box, the inner wall rotation of both ends of vacuum processing box is connected with main rotary lever, the outside of main rotary lever is equipped with conveying belt, the inside of conveying belt is equipped with a plurality of pedestal, both ends of a plurality of pedestal are fixedly connected with the inner wall of vacuum processing box, and the top both sides of pedestal are fixedly installed sealing soft cover, and the both ends of sealing soft cover are fixedly connected with the inner wall of vacuum processing box respectively, and the top of sealing soft cover is fixedly installed three sealing rings through aperture, and the inner wall of three sealing rings is slidably connected with lifting column, and the top and bottom of lifting column are fixedly installed top rod and bottom rod respectively, and the bottom of bottom rod is fixedly installed helium outer ring, and the bottom of top rod is fixedly installed tightening ring, and the inside rotation of tightening ring is connected with a plurality of collecting rod, and the bottom between a plurality of collecting rod is fixedly installed elastic rope, The top of top rod is fixedly installed two first electric hydraulic rods, and the top both ends of sealing ring are fixedly installed lifting spring, and the fixed end of first electric hydraulic rod and the top of lifting spring are all fixedly connected with the top inner wall of vacuum processing box, and the bottom outside of tightening ring is fixedly installed a plurality of baffle, and the inside between a plurality of baffle and the outside of collecting rod is rotatably connected with limiting spring, The top outside of sealing soft cover is slidably connected with a plurality of down pressure plate, and the top of a plurality of down pressure plate is fixedly installed a plurality of winding strip, and the top of a plurality of winding strip is fixedly installed winding rod, and both ends of winding rod are rotatably connected with the top inner wall of vacuum processing box, The bottom of helium outer ring is equipped with vacuum outer ring, and the top of vacuum outer ring and the bottom of helium outer ring are rotatably connected with two rotating rings, and two rotating rings are fixedly installed two second electric hydraulic rods between, and the telescopic end of second electric hydraulic rod is fixedly installed balance column between, and the inside of vacuum outer ring and helium outer ring are rotatably connected with gas storage ring, and the inside of gas storage ring is communicated with top pipe, and the bottom of top pipe is communicated with vertical telescopic pipe, and the bottom of vertical telescopic pipe and the inside one end of balance column are interconnected, and the gas outlet of balance column is communicated with auxiliary telescopic pipe, and the gas outlet of auxiliary telescopic pipe is communicated with exhaust cover.

2. The high efficiency helium detection device of claim 1, wherein, The outside of auxiliary telescopic pipe is equipped with two first electric telescopic rods, and the both ends of two first electric telescopic rods are fixedly connected with the outside of exhaust cover and one end of balance column respectively, and the outside of vacuum outer ring and helium outer ring is communicated with transition box, and the bottom of transition box is communicated with first telescopic pipe and second telescopic pipe respectively, and the bottom of first telescopic pipe and second telescopic pipe is communicated with aeration column, and the outside of first telescopic pipe and second telescopic pipe is equipped with two second electric telescopic rods and third electric telescopic rods respectively, and the both ends of two second electric telescopic rods and third electric telescopic rods are fixedly connected with the top of aeration column and the top outside of transition box respectively.

3. The high efficiency helium detection device of claim 2, wherein, The outside one end of gas storage ring is fixedly installed rotating gear ring, and the outside of rotating gear ring is hingedly connected with rotating gear, and one end of rotating gear is fixedly installed rotating motor, and one end of one main rotary lever is fixedly installed transmission motor.

4. The high efficiency helium detection device of claim 3, wherein, Both sides of the vacuum processing box are fixedly installed with bottom plates, the top of the two bottom plates is respectively fixedly installed with a vacuum pump and a conveying pump, the output end of the vacuum pump is connected with a vacuum branch pipeline, the output end of the conveying pump is connected with a helium branch pipeline, each branch of the vacuum branch pipeline and the helium branch pipeline is in penetrating connection with the inner wall of both ends of the base, the top end of the conveying pump is connected with a helium cylinder through a pipeline, and each branch of the vacuum branch pipeline and the helium branch pipeline is fixedly installed with an electric valve.

5. The high efficiency helium detection device of claim 4, wherein, One side of the vacuum processing box is also fixedly installed with a placing plate, the top of the placing plate is fixedly installed with a helium mass spectrum leak detector, one end of the helium mass spectrum leak detector is fixedly installed with a branch detection head, and the tail end of the branch detection head is fixedly connected with the inner wall of the sealing soft cover.

6. The high efficiency helium detection device of claim 5, wherein, The outer side of the vacuum processing box is fixedly installed with a switch panel, the surface of the switch panel is respectively fixedly installed with a first electric hydraulic rod switch, a second electric hydraulic rod switch, a first electric telescopic rod switch, a second electric telescopic rod switch, a third electric telescopic rod switch, a rotating motor switch, a transmission motor switch, a vacuum pump switch, a conveying pump switch, an electric valve switch and a helium mass spectrum leak detector switch, and the first electric hydraulic rod, the second electric hydraulic rod, the first electric telescopic rod, the second electric telescopic rod, the third electric telescopic rod, the rotating motor, the transmission motor, the vacuum pump, the conveying pump, the electric valve and the helium mass spectrum leak detector are respectively electrically connected with an external power supply through the first electric hydraulic rod switch, the second electric hydraulic rod switch, the first electric telescopic rod switch, the second electric telescopic rod switch, the third electric telescopic rod switch, the rotating motor switch, the transmission motor switch, the vacuum pump switch, the conveying pump switch, the electric valve switch and the helium mass spectrum leak detector switch.

Citation Information

Patent Citations

  • Automatic helium leak detection device

    CN105618391B

  • Automatic helium leakage detecting device

    CN105618391A

  • Vacuum leak detection equipment

    CN216349410U