A split-flow CVD deposition chamber

Abstract

The present invention discloses a split-flow CVD deposition chamber, which relates to the technical field of CVD deposition chambers, including a deposition tube, wherein the inner wall of the deposition tube is fixedly connected with three groups of fixed blocks, and the three groups of fixed blocks are fixedly connected with a placement rack. The present invention is provided with a rotating unit and a blowing unit, wherein the driving motor rotates to drive the driving shaft to rotate and drive the three fixed gears to rotate, and the three fixed gears rotate to drive the three fixed gear rings and the three rotating nozzles to rotate, and the first fan blows air from the nozzle through the L-shaped tube, the fixed tube, and the rotating nozzle, thereby enabling the top surface of the workpiece to contact with the carbon source gas, the rotating nozzle rotates to drive the fixed rod and the fixed plate to rotate, and the fixed plate rotates to drive the carbon source gas to form a vortex, so that the carbon source gas can be densified with the workpiece in a vortex manner, thereby realizing the workpiece densification project, and can perform vortex densification on the workpiece and densify the top surface of the workpiece by jetting, thereby improving the densification effect on the workpiece.

Description

Technical Field

[0001] The present invention relates to the technical field of split-flow deposition chambers, and in particular to a split-flow CVD deposition chamber. Background Art

[0002] Chemical vapor deposition is the most widely used technology in the semiconductor industry for depositing a variety of materials, including a wide range of insulating materials, most metal materials and metal alloys. CVD technology passes carbon source gas into a high-temperature pyrolysis furnace for pyrolysis. The pyrolytic carbon is deposited on the carbon fiber preform through mechanisms such as diffusion and convection to increase the density.

[0003] Chinese patent publication number CN218115585U discloses a split-type CVD deposition chamber, including a fixed base, a deposition chamber protection assembly and a deposition chamber carbon source gas uniformization assembly. The deposition chamber protection assembly includes a shock-absorbing connecting plate, a shock-absorbing damper, a telescopic shock-absorbing spring, a deposition chamber barrel, a deposition chamber closed door, a fixed inner ring plate, a deposition plate connecting buckle and a preformed deposition plate. The deposition chamber carbon source gas uniformization assembly includes a fixed vertical plate, a drive motor, a carbon source gas fan, a carbon source gas inlet pipe, a connecting support ring plate, a motor support shaft, an exhaust motor, a rotating exhaust transmission shaft and a rotating exhaust fan blade.

[0004] However, the above invention has the following shortcomings: when the existing split-flow CVD deposition chamber densifies a multi-layer workpiece, since the carbon source gas flows from bottom to top to densify the workpiece, the contact time and number of times between the workpiece and the carbon source gas are short, especially the top surface of the workpiece cannot fully contact the carbon source gas, resulting in unsatisfactory contact effect between the workpiece and the carbon source gas, thereby reducing the densification effect of the workpiece. Summary of the Invention

[0005] The object of the present invention is to provide a split-flow CVD deposition chamber to solve the problems raised in the above-mentioned background technology. A driving motor is used to drive the rotating nozzle and the nozzle to rotate, thereby rotating and blowing air on the workpiece, so that the top surface of the workpiece can be in contact with the carbon source gas. The rotating nozzle rotates to drive the fixed rod and the fixed plate to rotate. The rotation of the fixed plate drives the carbon source gas to rotate and form a vortex, so that the carbon source gas can be densified with the workpiece in a vortex manner, realizing the workpiece densification project, and can perform vortex densification on the workpiece and densify the top surface of the workpiece by jetting, thereby improving the densification effect of the workpiece.

[0006] The technical solution of the present invention is: a split-flow CVD deposition chamber, comprising a deposition cylinder, wherein the inner wall of the deposition cylinder is fixedly connected to three groups of fixed blocks, and the three groups of fixed blocks are fixedly connected to a placement rack;

[0007] Three fixing rings, the three fixing rings are respectively arranged above the three placement racks;

[0008] A rotating air blowing mechanism, wherein the rotating air blowing mechanism is located on the deposition cylinder;

[0009] The rotating blowing mechanism includes a rotating unit, a blowing unit and a transmission unit, the rotating unit includes a driving motor fixedly connected to the top of the deposition cylinder, the output end of the driving motor is connected to the driving shaft through a coupling, the top of the deposition cylinder is provided with a rotating hole, the bottom end of the driving shaft passes through the rotating hole and is fixedly connected to the mounting block, one end of the mounting block is fixedly connected to the inner wall of the deposition cylinder, three fixed gears are keyed on the driving shaft, and rotating nozzles are rotatably sleeved on the three fixing rings. A plurality of nozzles are evenly provided in the circumferential direction of the inner walls of the three rotating nozzles, the outer cylindrical walls of the three rotating nozzles are fixedly connected to fixed gear rings, the three fixed gear rings are respectively meshed with the three fixed gears, the bottom ends of the three rotating nozzles are fixedly connected to two fixed rods, and the bottom ends of the six fixed rods are fixedly connected to a fixed plate.

[0010] Preferably, the blowing unit includes a first fan fixedly connected to the top of the deposition cylinder, the air outlet end of the first fan is fixedly connected to a connecting pipe, the bottom end of the connecting pipe is fixedly connected to a fixed pipe, three L-shaped tubes are fixedly connected to the fixed pipe, the inner wall of the deposition cylinder is provided with three fixing holes, the tops of the three fixing rings are provided with air inlet holes, and the bottom ends of the three L-shaped tubes respectively pass through the three fixing holes and are fixedly connected to the three air inlet holes.

[0011] Preferably, the tops of the three fixing rings are fixedly connected to L-shaped rods, and one end of the L-shaped rods is fixedly connected to the inner wall of the deposition cylinder.

[0012] Preferably, the transmission unit includes an air outlet opened on the inner wall of the top of the deposition cylinder, a mounting cover is fixedly connected to the air outlet, a tripod is fixedly connected to the inner wall of the mounting cover, a movable hole is opened on the top of the tripod, a movable shaft is rotatably connected in the movable hole, a suction fan blade is fixedly connected to the bottom end of the movable shaft, a mounting hole is opened on the top of the mounting cover, the top of the movable shaft passes through the mounting hole and extends to the top of the mounting cover, a transmission wheel is fixedly sleeved on the movable shaft and the drive shaft, and a transmission belt is tensioned and sleeved on the two transmission wheels.

[0013] Preferably, a plurality of air outlet holes are provided on the inner wall of the mounting cover, and a dustproof net is fixedly connected to each of the plurality of air outlet holes.

[0014] Preferably, an air inlet is opened on the inner wall of the bottom end of the deposition cylinder, a fixed cover is fixedly connected to the air inlet, a second fan is provided below the fixed cover, the output end of the second fan is fixedly connected to the bottom of the fixed cover, and the air inlet end of the second fan is fixedly connected to a carbon source gas inlet pipe.

[0015] Preferably, a rotating shaft is provided in the fixed cover, the bottom end of the rotating shaft is fixedly connected with a rotating fan blade, the top end of the rotating shaft extends into the deposition cylinder, and multiple groups of stirring rods are evenly fixed on the rotating shaft, and the multiple groups of stirring rods are all located in the deposition cylinder.

[0016] Preferably, a fixing piece is rotatably sleeved on the rotating shaft, and two L-shaped plates are fixedly connected to the top of the fixing piece, and the bottom ends of the two L-shaped plates are fixedly connected to the bottom inner wall of the deposition cylinder, and the shape of the fixing piece is "conical".

[0017] Preferably, the bottom of the deposition cylinder is fixedly connected to a fixing frame, the second fan is fixedly connected to the fixing frame, and a closed door is installed on the deposition cylinder.

[0018] The present invention provides a split-flow CVD deposition chamber through improvements, which has the following improvements and advantages compared with the prior art:

[0019] First: The present invention sets a rotating unit and a blowing unit, and the driving motor rotates to drive the driving shaft to rotate and drive the three fixed gears to rotate. The rotation of the three fixed gears drives the three fixed gear rings and the three rotating nozzles to rotate. The first fan blows air from the nozzle through the L-shaped tube, the fixed tube, and the rotating nozzle, so that the rising carbon source gas is blown onto the workpiece, thereby enabling the top surface of the workpiece to contact with the carbon source gas. Since the rotating nozzle can rotate, the top surface of the workpiece can be fully and evenly contacted with the carbon source gas. The rotation of the rotating nozzle drives the fixed rod and the fixed plate to rotate. The rotation of the fixed plate drives the carbon source gas to rotate and form a vortex, so that the carbon source gas can be densified with the workpiece in a vortex manner, realizing the workpiece densification project, and can perform vortex densification on the workpiece and densify the top surface of the workpiece by jetting, thereby improving the densification effect of the workpiece.

[0020] Secondly: The present invention starts the driving motor to rotate and drives the driving shaft to rotate through the setting of the transmission unit. Since the transmission belt and the two transmission wheels can be combined into a belt transmission mechanism, the driving shaft rotates and drives the movable shaft to rotate through the belt transmission mechanism. The rotation of the movable shaft drives the suction fan blades to rotate. The rotation of the suction fan blades can guide the carbon source gas entering the deposition cylinder to move upward, so that the carbon source gas is discharged from the air outlet of the mounting cover through the three placement racks. When the carbon source gas passes through the three placement racks, the workpiece can be densified.

[0021] Third: The present invention starts the second fan, so that the carbon source gas enters the deposition cylinder through the carbon source gas inlet pipe and the installation cover. Under the action of the "conical" fixing part, the carbon source gas can be dispersed to the surroundings. Since the second fan blows air into the deposition cylinder, the wind drives the rotating blades to rotate, and the rotation of the rotating blades drives the rotating shaft and the stirring rod to rotate. When the carbon source gas passes through the stirring rod, the rotating stirring rod can fully disperse the carbon source gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the present invention;

[0024] Figure 2 Schematic diagram of the internal three-dimensional structure of the sedimentation cylinder in the present invention;

[0025] Figure 3 Schematic diagram of the three-dimensional structure of the rotary blowing mechanism in the present invention;

[0026] Figure 4 For the present invention Figure 3 A in the middle is an enlarged schematic diagram of the three-dimensional structure;

[0027] Figure 5 This is a schematic diagram of the internal three-dimensional structure of the mounting cover in the present invention;

[0028] Figure 6 Schematic diagram of the internal three-dimensional structure of the transmission unit in the present invention;

[0029] Figure 7 Schematic diagram of the cross-sectional structure of the rotating nozzle in the present invention;

[0030] Figure 8 For the present invention Figure 7 The enlarged schematic diagram of the three-dimensional structure at point B in the middle.

[0031] Reference numerals:

[0032] 1. Sedimentation cylinder; 101. Fixing block; 102. Placement rack; 103. Fixing ring; 104. Rotating nozzle; 105. Nozzle; 106. Fixing gear ring; 107. Fixing gear; 108. Drive shaft; 109. Drive motor; 110. L-shaped rod; 111. Fixing rod; 112. Fixing plate; 113. Mounting block; 2. First blower; 201. Connecting pipe; 202. Fixing pipe; 203. L-shaped tube; 3. Fixed cover; 301. Second fan; 302. Carbon source gas inlet pipe; 303. Fixed frame; 304. L-shaped plate; 305. Fixing part; 306. Rotating shaft; 307. Stirring rod; 308. Rotating fan blades; 4. Mounting cover; 401. Tripod; 402. Movable shaft; 403. Suction fan blades; 404. Drive wheel; 405. Drive belt; 406. Dust screen; 5. Closed door. DETAILED DESCRIPTION

[0033] The present invention is described in detail below, clearly and completely describing the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0034] The present invention provides a split-flow CVD deposition chamber through improvement. The technical solution of the present invention is:

[0035] like Figures 1 to 8 As shown, an embodiment of the present invention provides a split-flow CVD deposition chamber, comprising a deposition cylinder 1, wherein three groups of fixing blocks 101 are fixedly connected to the inner wall of the deposition cylinder 1, and each of the three groups of fixing blocks 101 is fixedly connected to a placement rack 102;

[0036] Three fixing rings 103, the three fixing rings 103 are respectively arranged above the three placement racks 102;

[0037] Rotating air blowing mechanism, the rotating air blowing mechanism is located on the deposition cylinder 1;

[0038] The rotating blowing mechanism includes a rotating unit, a blowing unit and a transmission unit. The rotating unit includes a driving motor 109 fixedly connected to the top of the deposition cylinder 1. The output end of the driving motor 109 is connected to the driving shaft 108 through a coupling. A rotating hole is opened on the top of the deposition cylinder 1. The bottom end of the driving shaft 108 passes through the rotating hole and is fixedly connected to the mounting block 113. One end of the mounting block 113 is fixedly connected to the inner wall of the deposition cylinder 1. Three fixed gears 107 are keyed to the driving shaft 108. The three fixed rings 103 are all rotatably sleeved with rotating nozzles 104. A plurality of nozzles 10 are evenly opened in the circumferential direction of the inner wall of the three rotating nozzles 104. 5. The cylindrical outer walls of the three rotating nozzles 104 are fixedly connected to the fixed gear ring 106, and the three fixed gear rings 106 are respectively engaged with the three fixed gears 107. The bottom ends of the three rotating nozzles 104 are fixedly connected to two fixed rods 111, and the bottom ends of the six fixed rods 111 are fixedly connected to the fixed plate 112. Through the setting of the rotating unit, the driving motor 109 drives the fixed gear ring 106 and the rotating nozzle 104 to rotate through the driving shaft 108 and the fixed gear 107, thereby being able to perform rotational blowing on the workpiece, so that the wind drives the carbon source gas to fully contact the top surface of the workpiece, thereby improving the densification effect on the top surface of the workpiece.

[0039] Furthermore, the blowing unit includes a first fan 2 fixedly connected to the top of the deposition cylinder 1, the air outlet end of the first fan 2 is fixedly connected to a connecting pipe 201, the bottom end of the connecting pipe 201 is fixedly connected to a fixed pipe 202, and three L-shaped tubes 203 are fixedly connected to the fixed pipe 202. The inner wall of the deposition cylinder 1 is provided with three fixing holes, and the tops of the three fixing rings 103 are provided with air inlet holes. The bottom ends of the three L-shaped tubes 203 pass through the three fixing holes respectively and are fixedly connected to the three air inlet holes; through the setting of the blowing unit, the first fan 2 is started to blow air to the fixed pipe 202 through the L-shaped tube 203, and the wind in the fixed pipe 202 enters the pipeline formed by the rotating nozzle 104 and the fixed ring 103 through the three L-shaped tubes 203, and then blows air through multiple nozzles 105, thereby achieving air blowing and densification of the workpiece.

[0040] Furthermore, the tops of the three fixing rings 103 are fixedly connected with L-shaped rods 110, and one end of the L-shaped rods 110 is fixedly connected to the inner wall of the deposition cylinder 1; through the setting of the L-shaped rods 110, the L-shaped rods 110 and the L-shaped tubes 203 are symmetrical based on the deposition cylinder 1, thereby improving the stability of the fixing rings 103.

[0041] Furthermore, the transmission unit includes an air outlet opened on the inner wall of the top of the deposition cylinder 1, and a mounting cover 4 is fixedly connected in the air outlet, and a tripod 401 is fixedly connected to the inner wall of the mounting cover 4, and a movable hole is opened at the top of the tripod 401, and a movable shaft 402 is rotatably connected in the movable hole, and the bottom end of the movable shaft 402 is fixedly connected to a suction fan blade 403, and a mounting hole is opened at the top of the mounting cover 4, and the top end of the movable shaft 402 passes through the mounting hole and extends to the top of the mounting cover 4, and a transmission wheel 404 is fixedly sleeved on the movable shaft 402 and the driving shaft 108, and a transmission belt 405 is tensioned and sleeved on the two transmission wheels 404; through the setting of the transmission unit, the driving shaft 108 drives the movable shaft 402 to rotate through the transmission belt 405 and the transmission wheel 404, and the rotation of the movable shaft 402 drives the suction fan blade 403 to rotate, and the rotation of the suction fan blade 403 can guide the carbon source gas entering the deposition cylinder 1 to move upward, thereby realizing the densification of the workpiece.

[0042] Furthermore, a plurality of air outlet holes are provided on the inner wall of the mounting cover 4, and a dustproof net 406 is fixedly connected to each of the plurality of air outlet holes; the provision of the dustproof net 406 can play a role in preventing dust.

[0043] Furthermore, an air inlet is provided on the inner wall of the bottom end of the deposition cylinder 1, and a fixed cover 3 is fixedly connected to the air inlet. A second fan 301 is provided below the fixed cover 3, and the output end of the second fan 301 is fixedly connected to the bottom of the fixed cover 3. The air inlet end of the second fan 301 is fixedly connected to the carbon source gas inlet pipe 302, and a rotating shaft 306 is provided in the fixed cover 3, and the bottom end of the rotating shaft 306 is fixedly connected to the rotating fan blade 308. The top end of the rotating shaft 306 extends into the deposition cylinder 1, and multiple groups of stirring rods 307 are evenly fixed on the rotating shaft 306, and the multiple groups of stirring rods 307 are all located in the deposition cylinder 1; by setting the rotating fan blade 308, the second fan 301 is started, so that the carbon source gas enters the deposition cylinder 1 through the carbon source gas inlet pipe 302 and the mounting cover 4, and the wind drives the rotating fan blade 308, the rotating shaft 306 and the stirring rod 307 to rotate. When the carbon source gas passes through the stirring rod 307, the rotating stirring rod 307 can fully disperse the carbon source gas.

[0044] Furthermore, a fixing part 305 is rotatably sleeved on the rotating shaft 306, and two L-shaped plates 304 are fixedly connected to the top of the fixing part 305. The bottom ends of the two L-shaped plates 304 are fixedly connected to the bottom inner wall of the deposition cylinder 1, and the shape of the fixing part 305 is "conical". Through the setting of the fixing part 305, under the action of the "conical" fixing part 305, the carbon source gas can be dispersed to the surroundings.

[0045] Furthermore, the bottom of the deposition cylinder 1 is fixedly connected to a fixing frame 303, the second fan 301 is fixedly connected to the fixing frame 303, and a closed door 5 is installed on the deposition cylinder 1; through the setting of the fixing frame 303, the second fan 301 is installed and fixed, and through the setting of the closed door 5, the workpiece can be processed in a closed environment.

[0046] Specific implementation steps: open the closed door 5, place the workpieces that need chemical vapor deposition on the three placement racks 102 respectively, close the closed door 5, start the second fan 301, so that the carbon source gas enters the deposition cylinder 1 through the carbon source gas inlet pipe 302 and the installation cover 4, and under the action of the "conical" fixing member 305, the carbon source gas can be dispersed to the surroundings. As the second fan 301 blows air into the deposition cylinder 1, the wind drives the rotating blades 308 to rotate, and the rotation of the rotating blades 308 drives the rotating shaft 306 and the stirring rod 307 to rotate. When the carbon source gas passes through the stirring rod 307, Rotating the stirring rod 307 can fully disperse the carbon source gas, start the drive motor 109 and the first fan 2, start the drive motor 109 to rotate and drive the drive shaft 108 to rotate. Since the transmission belt 405 and the two transmission wheels 404 can be combined into a belt transmission mechanism, the drive shaft 108 rotates through the belt transmission mechanism to drive the movable shaft 402 to rotate. The rotation of the movable shaft 402 drives the suction fan blade 403 to rotate. The rotation of the suction fan blade 403 can guide the carbon source gas entering the deposition cylinder 1 to move upward, so that the carbon source gas passes through the three placement racks 102 and the air outlet of the mounting cover 4. When the carbon source gas passes through the three placement racks 102, the workpiece can be densified. The driving shaft 108 rotates to drive the three fixed gears 107 to rotate. The three fixed gears 107 rotate to drive the three fixed gear rings 106 to rotate. The three fixed gear rings 106 rotate to drive the three rotating nozzles 104 to rotate. The first fan 2 starts to blow air to the fixed pipe 202 through the L-shaped pipe 203. The wind in the fixed pipe 202 passes through the three L-shaped pipes 203 into the pipeline formed by the rotating nozzle 104 and the fixed ring 103, and then blows through the multiple nozzles 105, so that the rising carbon source gas The carbon source gas is blown onto the workpiece, so that the top surface of the workpiece can come into contact with the carbon source gas. Since the rotating nozzle 104 can rotate, the top surface of the workpiece can fully and evenly come into contact with the carbon source gas. The rotating nozzle 104 rotates to drive the fixed rod 111 and the fixed plate 112 to rotate. The rotation of the fixed plate 112 drives the carbon source gas to rotate and form a vortex, so that the carbon source gas can be densified with the workpiece in a vortex manner, realizing the workpiece densification project, and can perform vortex densification on the workpiece and densify the top surface of the workpiece by jetting, thereby improving the densification effect of the workpiece.

[0047] The above description is intended to enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A split-flow CVD deposition chamber, comprising a deposition cylinder (1), characterized in that: Three groups of fixed blocks (101) are fixedly connected to the inner wall of the deposition cylinder (1), and each of the three groups of fixed blocks (101) is fixedly connected to a placement rack (102); Three fixing rings (103), the three fixing rings (103) are respectively arranged above the three placement racks (102); A rotating air blowing mechanism, the rotating air blowing mechanism being located on the deposition cylinder (1); The rotary blowing mechanism comprises a rotary unit, a blowing unit and a transmission unit. The rotary unit comprises a driving motor (109) fixedly connected to the top of the deposition cylinder (1). The output end of the driving motor (109) is connected to a driving shaft (108) via a coupling. A rotary hole is provided at the top of the deposition cylinder (1). The bottom end of the driving shaft (108) passes through the rotary hole and is fixedly connected to a mounting block (113). One end of the mounting block (113) is fixedly connected to the inner wall of the deposition cylinder (1). Three fixed gears (108) are keyed to the driving shaft (108). 7), the three fixed rings (103) are all rotatably sleeved with a rotating nozzle (104), the inner walls of the three rotating nozzles (104) are evenly provided with a plurality of nozzles (105) in the circumferential direction, the cylindrical outer walls of the three rotating nozzles (104) are all fixedly connected to a fixed gear ring (106), the three fixed gear rings (106) are respectively engaged with the three fixed gears (107), the bottom ends of the three rotating nozzles (104) are all fixedly connected to two fixed rods (111), and the bottom ends of the six fixed rods (111) are all fixedly connected to a fixed plate (112); The blowing unit comprises a first fan (2) fixedly connected to the top of the deposition cylinder (1), the air outlet end of the first fan (2) is fixedly connected to a connecting pipe (201), the bottom end of the connecting pipe (201) is fixedly connected to a fixing pipe (202), three L-shaped tubes (203) are fixedly connected to the fixing pipe (202), the inner wall of the deposition cylinder (1) is provided with three fixing holes, the tops of the three fixing rings (103) are provided with air inlet holes, and the bottom ends of the three L-shaped tubes (203) respectively pass through the three fixing holes and are fixedly connected to the three air inlet holes; The transmission unit comprises an air outlet opened on the inner wall of the top of the deposition cylinder (1), a mounting cover (4) is fixedly connected in the air outlet, a tripod (401) is fixedly connected to the inner wall of the mounting cover (4), a movable hole is opened at the top of the tripod (401), a movable shaft (402) is rotatably connected in the movable hole, a suction fan blade (403) is fixedly connected at the bottom end of the movable shaft (402), a mounting hole is opened at the top of the mounting cover (4), the top end of the movable shaft (402) passes through the mounting hole and extends to the top of the mounting cover (4), a transmission wheel (404) is fixedly sleeved on the movable shaft (402) and the drive shaft (108), and a transmission belt (405) is tensioned and sleeved on the two transmission wheels (404); An air inlet is provided on the inner wall of the bottom end of the deposition cylinder (1), a fixed cover (3) is fixedly connected to the air inlet, a second fan (301) is provided below the fixed cover (3), an output end of the second fan (301) is fixedly connected to the bottom of the fixed cover (3), and an air inlet end of the second fan (301) is fixedly connected to a carbon source gas inlet pipe (302); A rotating shaft (306) is provided in the fixed cover (3), the bottom end of the rotating shaft (306) is fixedly connected to a rotating fan blade (308), the top end of the rotating shaft (306) extends into the deposition cylinder (1), and multiple groups of stirring rods (307) are evenly fixed on the rotating shaft (306), and the multiple groups of stirring rods (307) are all located in the deposition cylinder (1); A fixing member (305) is rotatably sleeved on the rotating shaft (306), and two L-shaped plates (304) are fixedly connected to the top of the fixing member (305). The bottom ends of the two L-shaped plates (304) are fixedly connected to the bottom inner wall of the deposition cylinder (1), and the shape of the fixing member (305) is "conical".

2. The split-flow CVD deposition chamber according to claim 1, wherein: The tops of the three fixing rings (103) are all fixedly connected to an L-shaped rod (110), and one end of the L-shaped rod (110) is fixedly connected to the inner wall of the deposition cylinder (1).

3. The split-flow CVD deposition chamber according to claim 2, wherein: The inner wall of the mounting cover (4) is provided with a plurality of air outlet holes, and a dustproof net (406) is fixedly connected to each of the plurality of air outlet holes.

4. The split-flow CVD deposition chamber according to claim 3, wherein: The bottom of the deposition cylinder (1) is fixedly connected to a fixing frame (303), the second fan (301) is fixedly connected to the fixing frame (303), and a closed door (5) is installed on the deposition cylinder (1).

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