Single chamber multilayer film evaporation system and method

Abstract

The application discloses a single-cavity multilayer film evaporation system and method, and relates to the field of evaporation system, and particularly relates to a single-cavity multilayer film evaporation system and method.The system comprises a feeding table, a first door valve arranged between the feeding buffer cavity and the feeding table, a second door valve arranged between the process cavity and the feeding buffer cavity, an evaporation system arranged outside the process cavity and connected with the process cavity through a third door valve, a fourth door valve arranged between the discharging buffer cavity and the process cavity, the process cavity being arranged between the feeding buffer cavity and the discharging buffer cavity, a fifth door valve arranged between the discharging table and the discharging buffer cavity, and a vacuum pumping system connected with the feeding buffer cavity, the process cavity and the discharging buffer cavity respectively; and a conveying table is arranged to carry the battery pieces to be plated and sequentially pass through the feeding table, the feeding buffer cavity, the process cavity, and then be conveyed to the discharging buffer cavity and the discharging table after being plated with multilayer films by the evaporation system in the process cavity.The application can complete the deposition of multilayer films in a single cavity, and the process time of product manufacturing is greatly shortened, and the production capacity is improved.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of solar cells, in particular to a single-cavity multilayer film evaporation system and method. BACKGROUND

[0002] A solar cell is a photoelectronic device for converting light energy into electric energy, and its photoelectric conversion efficiency is particularly important. In the process of photoelectric conversion, light reflection loss is particularly important, which reduces the number of incident photons per unit area of the solar cell, causes the current density of the solar cell to decrease, and thus affects the photoelectric conversion efficiency of the solar cell. Therefore, in order to improve the conversion efficiency of the cell, the reflection loss of light on the surface of the cell should be reduced, and the transmission of light should be increased. Therefore, the design of the antireflection film directly affects the incidence of light on the solar cell and has a great influence on the conversion efficiency of the solar cell.

[0003] The antireflection film is also called the anti-reflection film, and its main function is to reduce or eliminate the reflected light of optical surfaces such as lenses, prisms, plane mirrors and the like, thereby increasing the light transmission of these components and reducing or eliminating the stray light of the system. The simplest anti-reflection film is a single-layer film, which is a thin film with a relatively low refractive index coated on the optical surface of an optical part. If the optical thickness of the film layer is one-quarter of a certain wavelength, the optical path difference of the adjacent two beams of light is exactly pi, that is, the vibration directions are opposite, and the superposition result makes the reflection of the optical surface for the wavelength to be reduced. If the refractive index of the film layer is properly selected, the reflection of the optical surface can be completely eliminated. Generally, it is difficult to achieve the ideal anti-reflection effect by using a single-layer anti-reflection film. In order to achieve zero reflection at a single wavelength or good anti-reflection effect in a relatively wide spectral range, a double-layer, a triple-layer or even more layers of antireflection film are often used.

[0004] In order to improve the absorption efficiency of solar energy and reduce the reflection loss, a layer of antireflection film is generally coated on the surface of a silicon wafer when the solar cell panel is manufactured. At present, there is a relatively common and efficient production technology in the production of solar cells, that is, the evaporation coating film technology, which is called evaporation and coating for short. The evaporation and coating refers to a process method in which a certain heating evaporation method is used to evaporate and coat film materials (or film materials) and make them gasify, and the particles fly to the surface of the substrate to condense into a film under vacuum conditions.

[0005] The traditional evaporation and coating equipment can only prepare one film layer at a time, and in the process of preparing the solar cell, the vacuum needs to be frequently broken and evacuated, and the evaporation rate needs to be adjusted, so that the comprehensive utilization rate of the equipment and the production efficiency are low. SUMMARY

[0006] The application provides a single-cavity multilayer film evaporation system and method, which can complete the deposition of multiple film layers in a single chamber, thereby saving the processes of multiple vacuum pumping and breaking vacuum, greatly shortening the process time of product manufacturing, and improving the production capacity.

[0007] According to some embodiments, the present application provides a single-chamber multi-layer film evaporation system, comprising: a feeding table; a feeding buffer chamber, a first door valve being arranged between the feeding buffer chamber and the feeding table; a process chamber, a second door valve being arranged between the process chamber and the feeding buffer chamber; an evaporation system, the evaporation system being arranged outside the process chamber and having a third door valve arranged between the process chamber and the evaporation system; a discharging buffer chamber, a fourth door valve being arranged between the process chamber and the discharging buffer chamber, and the process chamber being arranged between the feeding buffer chamber and the discharging buffer chamber; a discharging table, a fifth door valve being arranged between the discharging table and the discharging buffer chamber; a vacuum pumping system, the vacuum pumping system being connected to the feeding buffer chamber, the process chamber and the discharging buffer chamber respectively; a transport platform, the transport platform carrying the battery pieces to be coated with films sequentially passing through the feeding table, the feeding buffer chamber, the process chamber, and then being transmitted to the discharging buffer chamber and the discharging table after the battery pieces are coated with films by the evaporation system in the process chamber.

[0008] Optionally, the process chamber comprises a process chamber one and a process chamber two, which are arranged in communication with each other; the process chamber one is in communication with the feeding buffer chamber, and the second door valve is arranged at the position where the process chamber one and the feeding buffer chamber are in communication; the process chamber one is used for separating the battery pieces to be coated with films from the transport platform and performing film evaporation treatment; the process chamber two is in communication with the discharging buffer chamber, and the fourth door valve is arranged at the position where the process chamber two and the discharging buffer chamber are in communication; the process chamber two is used for temporarily storing the transport platform; the evaporation system is arranged below the process chamber one, and the third door valve is arranged between the process chamber one and the evaporation system.

[0009] Optionally, the process chamber one comprises a first chamber and a first chamber cover used in cooperation with the first chamber; a plurality of electrostatic chucks are arranged on the first chamber cover, and a driving motor for driving the electrostatic chucks to move up and down is arranged on the first chamber cover; the electrostatic chucks are used for sucking the battery pieces to be coated with films on the transport platform.

[0010] Optionally, the evaporation system comprises a source replacement chamber, an evaporation chamber, a plurality of groups of evaporation source electrodes arranged in the evaporation chamber, a plurality of groups of evaporation source modules arranged in the source replacement chamber, and a switching component; the source replacement chamber and the evaporation chamber are in communication with each other; the switching component is used for controlling the evaporation source modules with different film coating materials to move between the source replacement chamber and the evaporation chamber to realize contact or separation with the evaporation source electrodes; the evaporation source electrodes make the film coating materials in the evaporation source modules evaporate and uniformly coat on the battery pieces to be coated with films when the evaporation source electrodes contact the evaporation source modules and are powered.

[0011] Optionally, the evaporation source module comprises an evaporation source carrier and a metal boat arranged on the evaporation source carrier, the metal boat being used for placing coating materials; the evaporation source carrier is movable between the source switching chamber and the evaporation chamber under the control of the switching component, so as to realize contact with or separation from the evaporation source electrode.

[0012] Optionally, the vacuum pumping system comprises a vacuum pump one, a vacuum pump two and a vacuum pump three; the vacuum pump one is connected with the upper material buffering cavity through a vacuum pipeline; the vacuum pump two is connected with the process cavity through a vacuum pipeline; the vacuum pump three is connected with the lower material buffering cavity through a vacuum pipeline.

[0013] According to some embodiments, the present application further provides a single-cavity multi-layer film evaporation method using the single-cavity multi-layer film evaporation system, comprising the following steps: opening a first door valve, conveying a cell to be coated into the upper material buffering cavity, closing the first door valve, vacuumizing the upper material buffering cavity to a pressure value equal to that of the process cavity; opening a second door valve, conveying the cell to be coated from the upper material buffering cavity into the process cavity, and closing the second door valve; opening a third door valve, performing evaporation coating treatment on the cell to be coated in the process cavity by the evaporation system; opening a fourth door valve, conveying the cell after coating into the lower material buffering cavity, and closing the fourth door valve, aerating the lower material buffering cavity to a pressure value equal to that of the atmosphere; opening a fifth door valve, conveying the cell after coating into the lower material buffering cavity, and closing the fifth door valve, vacuumizing the lower material buffering cavity to a pressure value equal to that of the process cavity.

[0014] Optionally, the opening of the second door valve, the conveying of the cell to be coated from the upper material buffering cavity into the process cavity, and the closing of the second door valve comprise: opening the second door valve, conveying the cell to be coated from the upper material buffering cavity into the first cavity of the process cavity one by the conveying carrier, closing the second door valve after reaching a specified position; driving the motor to drive the electrostatic chuck to descend to attract the cell to be coated and to ascend to separate the cell to be coated from the conveying carrier; continuing to convey the conveying carrier forward into the second cavity of the process cavity two to wait.

[0015] Optionally, the opening of the third door valve, the evaporation coating treatment of the cell to be coated in the process cavity by the evaporation system, comprise: opening the third door valve, driving the motor to drive the electrostatic chuck with the cell to be coated to descend; the switching component controls the current evaporation source carrier to move from the source switching chamber into the evaporation chamber and to contact with the evaporation source electrode; electrifying the evaporation source electrode, so that the coating materials in the metal boat are heated to evaporate and uniformly coated on the cell to be coated.

[0016] Optionally, the third door valve is opened, the evaporation deposition system performs evaporation deposition treatment on the cell to be plated in the process chamber, and further comprises: after the evaporation source carrier completes the plating of the cell to be plated, the evaporation source electrode is powered off; the switching component controls the evaporation source carrier to retreat to the source changing chamber to give way, and controls the evaporation source carrier carrying different plating materials to move from the source changing chamber to the evaporation chamber to contact the evaporation source electrode, so as to realize the deposition of different plating materials on the cell.

[0017] Advantages:

[0018] The single-chamber multi-layer film evaporation deposition system of the present application comprises a pipeline type feeding table, a feeding buffer chamber, a process chamber, an evaporation deposition system, a discharging buffer chamber and a discharging table, the vacuum degrees of the feeding buffer chamber, the process chamber, the evaporation deposition system and the discharging buffer chamber are kept consistent, the chambers are communicated or isolated by valves at the communication positions, the cell can complete multi-layer film deposition in the process chamber, the process time of product manufacturing is greatly shortened, the production capacity is improved, the cell product is prevented from being transferred between multiple evaporation deposition devices, the possibility of product contamination and transportation damage is reduced, the effect of the film layer and the yield of the cell are improved, the equipment floor area can be reduced compared with the multiple evaporation deposition devices or the single evaporation deposition device with multiple process chambers, and the land cost of product manufacturing is saved. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application or in the prior art, the drawings needed in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative effort.

[0020] Figure 1 is a structural schematic diagram of the single-chamber multi-layer film evaporation deposition system in embodiment one;

[0021] Figure 2 is a front view of the single-chamber multi-layer film evaporation deposition system in embodiment one;

[0022] Figure 3 is a side view of the single-chamber multi-layer film evaporation deposition system in embodiment one;

[0023] Figure 4 is a structural schematic diagram of the evaporation deposition system in the single-chamber multi-layer film evaporation deposition system in embodiment one; Figure 1 ;

[0024] Figure 5 is a sectional view of the evaporation deposition system in the single-chamber multi-layer film evaporation deposition system in embodiment oneFigure 1 ;

[0025] Figure 6 is an enlarged view of A part in Figure 5 ;

[0026] Figure 7 is a top view of the evaporation system in the single-cavity multilayer film evaporation system in the first embodiment;

[0027] Figure 8 is a structural schematic diagram of the combination of the frame and the evaporation source carrier in the first embodiment;

[0028] Figure 9 is a sectional schematic diagram of the evaporation system in the single-cavity multilayer film evaporation system in the first embodiment Figure 2 ;

[0029] Figure 10 is a sectional schematic diagram of the evaporation system in the single-cavity multilayer film evaporation system in the first embodiment Figure 3 ;

[0030] Figure 11 is a flow schematic diagram of the single-cavity multilayer film evaporation method in the first embodiment;

[0031] Figure 12 is a flow schematic diagram of the conveying of the film-coated battery piece into the process cavity in the first embodiment;

[0032] Figure 13 is a flow schematic diagram of the film coating of the film-coated battery piece in the process cavity in the first embodiment.

[0033] Reference signs: 10, loading table; 20, loading buffer cavity; 21, loading buffer cavity chamber; 22, loading buffer cavity cover; 30, process cavity; 31, process cavity one; 311, first cavity; 312, first cavity cover; 313, electrostatic chuck; 314, driving motor; 32, process cavity two; 321, second cavity; 322, second cavity cover; 40, evaporation system; 41, source replacement chamber; 411, door plate; 42, evaporation chamber; 43, evaporation source electrode; 44, evaporation source module; 441, evaporation source carrier; 442, metal boat; 4421, contact point; 45, frame; 451, side plate; 452, roller structure; 453, railing; 46, lifting component; 461, lifting motor; 462, lead screw; 463, guide rod; 464, sliding block; 465, connecting rod; 47, horizontal moving mechanism; 471, transmission motor; 472, transmission wheel; 473, transmission belt; 50, unloading buffer cavity; 51, unloading buffer cavity chamber; 52, unloading buffer cavity cover; 60, unloading table; 70, vacuum pumping system; 71, vacuum pump one; 72, vacuum pump two; 73, vacuum pump three; 74, vacuum pipeline; 80, transportation carrier; 90, support frame; 100, conveying wheel structure; 200, battery piece inlet; 300 battery piece outlet. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the various embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details are presented in the embodiments of the present invention to facilitate a better understanding of the invention. However, the technical solutions claimed in the present invention can be implemented even without these technical details and various variations and modifications based on the following embodiments. The division of the following embodiments is for ease of description and should not constitute any limitation on the specific implementation of the present invention. The various embodiments can be combined with and referenced by each other without contradiction.

[0035] The following describes in detail, with reference to the accompanying drawings, a single-cavity multilayer film evaporation system provided in this embodiment. Figure 1 As shown, the system includes: a loading platform 10, a loading buffer chamber 20, a process chamber 30, a vapor deposition system 40, a unloading buffer chamber 50, and an unloading platform 60, arranged sequentially. A first valve is installed between the loading platform 10 and the loading buffer chamber 20, allowing for connection or isolation between them. A second valve is installed between the loading buffer chamber 20 and the process chamber 30, allowing for connection or isolation between them. The vapor deposition system 40 is located directly below the process chamber 30, and a third valve is installed between them, allowing for connection or isolation between them. A fourth valve is installed between the process chamber 30 and the unloading buffer chamber 50, allowing for connection or isolation between them. A fifth valve is installed between the unloading buffer chamber 50 and the unloading platform 60, which can be used to connect or isolate the unloading buffer chamber 50 and the unloading platform 60. It also includes a vacuum system 70, an unloading platform, and a transport platform 80. The vacuum system 70 is connected to the loading buffer chamber 20, the process chamber 30, and the unloading buffer chamber 50 to achieve vacuuming of each part. The transport platform 80 carries the solar cells to be coated and sequentially flows through the loading platform 10, the loading buffer chamber 20, and the process chamber 30. After being deposited with multiple layers of film by the vapor deposition system 40 in the process chamber 30, the cells are transported to the unloading buffer chamber 50 and the unloading platform 60.

[0036] When the multi-layer film layer is evaporated on the to-be-coated cell sheet, the first door valve is opened, the transport platform 80 carrying the to-be-coated cell sheet enters the upper loading buffer cavity 20 from the upper loading platform 10, and reaches the corresponding position. Then, the first door valve is closed. At this time, the upper loading buffer cavity 20 is evacuated to the same pressure value as the process cavity 30 by using the vacuum pumping system 70. Then, the second door valve is opened, and the transport platform 80 transports the to-be-coated cell sheet into the process cavity 30. When the to-be-coated cell sheet reaches the corresponding position, the second door valve is closed. At this time, the third door valve is opened, and the evaporation system 40 evaporates the multi-layer film layer on the to-be-coated cell sheet on the transport platform 80. After the coating is completed, the fourth door valve is opened, and the transport platform 80 transports the coated cell sheet to the lower loading buffer cavity 50. When the transport platform 80 reaches the corresponding position, the fourth door valve is closed, and the lower loading buffer cavity 50 is filled with air to atmospheric pressure. Then, the fifth door valve is opened, and the transport platform 80 transports the cell sheet to the lower loading platform 60. Then, the fifth door valve is closed, and the lower loading buffer cavity 50 is evacuated to the same pressure value as the process cavity 30 by using the vacuum pumping system 70. Thus, the multi-layer film layer evaporation process of the cell sheet is completed. In this embodiment, the upper loading buffer cavity 20, the process cavity 30 and the lower loading buffer cavity 50 are respectively evacuated by using the vacuum pumping system 70. By providing the upper loading buffer cavity 20 and the lower loading buffer cavity 50, the multi-layer film layer can be prepared in the process cavity 30 after the cavity is opened once, without opening the cavity in the middle, thereby reducing the opening frequency of the cavity, reducing the multiple breakage of the process cavity 30, reducing the time for adjusting the process, improving the production efficiency, and completing the multi-layer film evaporation in the process cavity 30. The length of the equipment can be greatly reduced, the equipment area can be reduced, and the land cost for product manufacturing can be saved.

[0037] Please continue to refer to Figure 1 It is to be noted that, in this embodiment, the upper loading platform 10, the upper loading buffer cavity 20, the process cavity 30, the lower loading buffer cavity 50 and the lower loading platform 60 can be arranged on the support frame 90. The upper loading platform 10, the upper loading buffer cavity 20, the process cavity 30, the lower loading buffer cavity 50 and the lower loading platform 60 are combined into a production line by the support frame 90. Thus, the to-be-coated cell sheet is transported by the transport platform 80 from the upper loading platform 10 to the lower loading platform 60 in sequence. In addition, the transport platform 80 is provided with a conveying wheel structure 100 in each of the upper loading platform 10, the upper loading buffer cavity 20, the process cavity 30, the lower loading buffer cavity 50 and the lower loading platform 60. The transport platform 80 is conveyed by the conveying wheel structure 100 in each part. That is, the conveying wheel structure 100 for conveying the transport platform 80 is arranged in each part. The conveying wheel structure 100 is driven by an external power component such as a motor to realize the conveying operation of the transport platform 80. The use of the conveying wheel structure 100 to realize the circulation of the transport platform 80 is a relatively mature technology in the field, and will not be described in detail here.

[0038] Please continue to refer to Figure 1It is shown that, in the present embodiment, it is also necessary to point out that the feeding buffer cavity 20 comprises a feeding buffer cavity chamber 21 and a feeding buffer cavity cover 22, the feeding buffer cavity cover 22 matches the feeding buffer cavity chamber 21, and the feeding buffer cavity cover 22 can ensure the sealing of the feeding buffer cavity chamber 21 when it is covered on the feeding buffer cavity chamber 21, so as to ensure the vacuum degree of the feeding buffer cavity chamber 21 when the feeding buffer cavity chamber 21 is subsequently vacuumized by the vacuumizing system 70. The feeding buffer cavity chamber 21 is provided with a battery piece inlet 200 on the side close to the feeding table 10, and a first door valve is arranged at the battery piece inlet 200, so that the communication or isolation between the feeding buffer cavity chamber 21 and the feeding table 10 is realized by opening and closing the first door valve. At the beginning, the to-be-coated battery pieces are placed on the conveying table 80 and on the feeding table 10, and under the condition that the first door valve is opened, the conveying table 80 can be conveyed from the feeding table 10 to the feeding buffer cavity chamber 21 through the conveying wheel structure 100 via the battery piece inlet 200, and after reaching the corresponding position, the first door valve is closed to isolate the feeding buffer cavity chamber 21 and the feeding table 10, and then the feeding buffer cavity chamber 21 is vacuumized by the vacuumizing system 70 to the same pressure value as the process cavity 30.

[0039] Please continue to refer to Figure 1 It is shown that, in the present embodiment, the process cavity 30 comprises a process cavity one 31 and a process cavity two 32, the process cavity one 31 and the process cavity two 32 are arranged in communication with each other, the process cavity one 31 comprises a first cavity 311 and a first cavity cover 312 used in cooperation with the first cavity 311, and the first cavity cover 312 can ensure the sealing of the first cavity 311 when it is covered on the first cavity 311. The first cavity 311 is arranged close to the feeding buffer cavity chamber 21, and the first cavity 311 is also provided with a battery piece inlet 200 communicated to the feeding buffer cavity chamber 21, and a second door valve is arranged at the battery piece inlet 200 for mutual communication between the first cavity 311 and the feeding buffer cavity chamber 21, and the communication or isolation between the first cavity 311 and the feeding buffer cavity chamber 21 is realized by opening and closing the second door valve.

[0040] Please refer to Figures 1-3 It is shown that the first cavity 311 is used for separating the to-be-coated battery pieces from the conveying table 80 in this area, so a plurality of electrostatic chucks 313 and drive motors 314 are arranged on the first cavity cover 312, the drive motors 314 are mainly used for controlling the up-down driving of the plurality of electrostatic chucks 313, and the electrostatic chucks 313 are mainly used for sucking the to-be-coated battery pieces on the conveying table 80. Therefore, after the conveying table 80 conveys the to-be-coated battery pieces from the feeding buffer cavity 20 to the first cavity 311, the drive motor 314 can drive the electrostatic chuck 313 to descend to suck the to-be-coated battery pieces on the conveying table 80, and after sucking, the electrostatic chuck 313 is raised to separate the to-be-coated battery pieces from the conveying table 80.

[0041] The first chamber 311 is also used for the to-be-coated battery piece to perform evaporation film layer treatment in the area. The bottom of the first chamber 311 is provided as a hollow structure, and the evaporation system 40 is arranged below the first chamber 311. Therefore, the third door valve is arranged between the first chamber 311 and the evaporation system 40, and the communication or isolation between the first chamber 311 and the evaporation system 40 can be realized by opening and closing the third door valve.

[0042] The process cavity two 32 includes a second chamber 321 and a second cavity cover 322 used in cooperation with the second chamber 321. The second cavity cover 322 can ensure the sealing of the second chamber 321 when the cover is arranged on the second chamber 321. The second chamber 321 is arranged close to the blanking buffer cavity 50. The second chamber 321 is provided with a battery piece outlet 300 communicated to the blanking buffer cavity 50. The fourth door valve is arranged at the battery piece outlet 300 for mutual communication between the second chamber 321 and the blanking buffer cavity 50. The communication or isolation between the second chamber 321 and the blanking buffer cavity 50 can be realized by opening and closing the fourth door valve.

[0043] The second chamber 321 is mainly used for temporary storage of the transport platform 80. After the to-be-coated battery piece is transported from the blanking buffer cavity 20 to the first chamber 311 by the transport platform 80, the driving motor 314 controls the electrostatic chuck 313 to descend and pick up the to-be-coated battery piece and then to ascend to separate from the transport platform 80. Then the transport platform 80 continues to be transported forward to the second chamber 321 to wait. At this time, the driving motor 314 controls the electrostatic chuck 313 to descend with the to-be-coated battery piece to perform film layer treatment by the evaporation system 40. After the film layer treatment is completed, the transport platform 80 returns to the first chamber 311 to carry the battery piece with completed coating and continues to be transported forward. In the vacuum environment of the process cavity 30, the electrostatic chuck 313 is used to perform the piece picking and rotating action, so that the film uniformity is better.

[0044] Please refer to Figure 1 , Figure 4 and Figure 5 It is also necessary to point out in the embodiment that the evaporation system 40 includes a source changing chamber 41, an evaporation chamber 42, an evaporation source electrode 43, an evaporation source module 44 and a switching component. The evaporation chamber 42 is located directly below the first chamber 311 and is switched to be communicated or isolated by the third door valve. The source changing chamber 41 is located beside the evaporation chamber 42 and is arranged to be communicated with each other. A window is further arranged on the side of the source changing chamber 41 and is communicated with the inside of the source changing chamber 41. A door plate 411 is hinged at the window. The window is closed or opened by the door plate 411. Thus, the film coating material in the source changing chamber 41 can be replaced.

[0045] The evaporation source electrodes 43 are arranged in a plurality of rows in a vertical and rectangular array, the upper ends of the evaporation source electrodes 43 extend into the evaporation chamber 42, and the lower ends of the evaporation source electrodes 43 are connected to an external power supply to enable the evaporation source electrodes 43 to be powered on or powered off.

[0046] The evaporation source modules 44 are arranged in a plurality of groups in the source exchange chamber 41, and are arranged in a vertical and equidistant manner in the source exchange chamber 41. The evaporation source modules 44 can be moved from a position where the source exchange chamber 41 and the evaporation chamber 42 are in communication to the evaporation chamber 42 to enable the evaporation source modules 44 to be in contact with or separated from the evaporation source electrodes 43.

[0047] Referring to Figure 5 , Figure 7 , the evaporation source module 44 includes an evaporation source carrier 441 and a metal boat 442. The metal boat 442 is arranged on the evaporation source carrier 441 and is used to place a coating material. The coating materials placed in the metal boats 442 of the evaporation source modules 44 in each group can be different, so that different materials can be used to coat the back surface of the battery piece. When the evaporation source carrier 441 is moved into the evaporation chamber 42, the evaporation source carrier 441 is located above the evaporation source electrodes 43 and the two are in reliable contact. When the evaporation source electrodes 43 are powered on, the coating material in the metal boat 442 is heated and evaporated, and is uniformly coated on the battery piece to be coated.

[0048] In one example, referring to Figure 5 , Figure 6 , the metal boat 442 is connected to a contact point 4421 below the metal boat 442. The contact point 4421 extends out of the bottom of the evaporation source carrier 441 and is used to contact the upper end of the evaporation source electrodes 43. When the evaporation source carrier 441 is moved to be located above the evaporation source electrodes 43, the metal boat 442 is in reliable contact with the evaporation source electrodes 43 through the contact point 4421.

[0049] Referring to Figure 5As shown, in an implementable manner, the switching component includes a lifting mechanism and a horizontal moving mechanism. The lifting mechanism is used to control the lifting or lowering of the plurality of groups of evaporation source modules 44 in the vertical direction in the source exchange chamber 41. When one group of evaporation source modules 44 is lifted or lowered to a position where the source exchange chamber 41 and the evaporation chamber 42 are in communication with each other, the corresponding position is considered to be reached, and then the evaporation source module 44 can be moved horizontally into the evaporation chamber 42. The horizontal moving mechanism is arranged in the evaporation chamber 42. After the evaporation source module 44 completes the film coating layer on the battery piece in the evaporation chamber 42, the horizontal moving mechanism controls the evaporation source module 44 to return to the source exchange chamber 41 in the original path, and then the lifting mechanism can lift or lower the evaporation source module 44 to adjust the vacancy, so that the new evaporation source module 44 can be located at the position where the source exchange chamber 41 and the evaporation chamber 42 are in communication with each other, thereby realizing the switching operation.

[0050] Referring to Figure 4 , Figure 5 As shown, in an example, the lifting mechanism includes a frame 45 and a lifting component 46. The frame 45 is arranged in a plurality of vertical directions, and each frame 45 corresponds to a group of evaporation source modules 44 for carrying the evaporation source modules 44. The lifting component 46 is used to control the synchronous lifting or lowering of the plurality of frames 45 in the vertical direction.

[0051] Referring to Figure 5 , Figure 8 and Figure 9 As shown, the frame 45 includes two oppositely arranged side plates 451, a roller structure 452 connected between the bottoms of the two side plates 451, and a handrail 453 connected between the tops of the two side plates 451, thereby forming an area for placing an evaporation source carrier 441. The evaporation source carrier 441 is located between the two side plates 451, and the two opposite sides of the evaporation source carrier 441 are close to the two side plates 451. The bottom of the evaporation source carrier 441 is supported on the roller structure 452. Through the use of the roller structure 452, the evaporation source carrier 441 can be lifted or lowered in the vertical direction synchronously with the roller structure 452, and at the same time, the evaporation source carrier 441 can be conveyed forward by the roller structure 452. The top of the evaporation source carrier 441 is in contact with the handrail 453, and the use of the handrail 453 can ensure the stability of the evaporation source carrier 441 during the lifting process.

[0052] The lifting component 46 includes a lifting motor 461, a lead screw 462, a guide rod 463, a slider 464, and a connecting rod 465. The lead screw 462 and the guide rod 463 are symmetrically arranged on the side wall of the power exchange chamber 41 and are vertically oriented. The connecting rod 465 is vertically oriented and fixed to several side plates 451 arranged in a vertical direction, thereby connecting the side plates 451 of several frames 45 together. There are two sliders 464, which are fixedly connected to the opposite sides of two side plates 451. One slider 464 has a guide hole 4641, and the guide rod 463 is movably inserted into the guide hole 4641 of the slider 464 on each side plate 451 to achieve a sliding connection. The other slider 464 has a threaded hole 4642, and the lead screw 462 is inserted into the threaded hole 4642 of the slider 464 on each side plate 451, and the two are threaded together. The lifting motor 461 is located at the bottom of the power exchange chamber 41, and the upper end of the lead screw 462 is rotatably connected to the top of the power exchange chamber 41. The lower end of the lead screw 462 extends out of the power exchange chamber 41 and is connected to the output shaft of the lifting motor 461. Thus, the lifting motor 461, the lead screw 462, and the guide rod 463 work together to raise or lower the evaporation source platform 441. When the evaporation source platform 441 rises or falls to the position corresponding to the connection between the power exchange chamber 41 and the evaporation chamber 42, the evaporation source platform 441 moves forward with the help of the roller structure 452 and enters the evaporation chamber 42 from the power exchange chamber 41.

[0053] Of course, this embodiment does not limit the structure of the lifting component 46. Any other structure that can achieve the same function can also be used, such as the combination of rack and pinion.

[0054] Reference Figure 4 , Figure 9 as well as Figure 10 As shown, in one example, the transverse movement mechanism 47 is configured as two sets, which are arranged opposite each other and located on both sides of the evaporation chamber 42. The transverse movement mechanism 47 includes a drive motor 471, a drive wheel 472, and a drive belt 473. The transmission direction of the drive belt 473 is consistent with the transmission direction of the roller structure 452 and is located on the same horizontal plane. The drive belt 473 is wound in a ring around several drive wheels 472 to achieve reciprocating motion. The output shaft of the drive motor 471 is connected to one of the drive wheels 472, thereby controlling the drive wheel 472 to move, so as to drive the drive belt 473 to move.

[0055] The evaporation source carrier 441 is in contact with the transmission belt 473 when it is conveyed into the evaporation chamber 42, so as to continue to be conveyed forward by the transmission belt 473 to reach a corresponding position, and then the evaporation source carrier 441 is returned to the source changing chamber 41 by the transmission belt 473 in the original path after the coating of the battery piece is completed. The structure of the transmission belt 473 used in the embodiment is mature for those skilled in the art, and will not be described in detail here.

[0056] Referring to Figures 1-3 It should be further explained that, in the embodiment, the vacuum pumping system 70 includes a vacuum pump one 71, a vacuum pump two 72 and a vacuum pump three 73, wherein the vacuum pump one 71 is connected to the loading buffer chamber 20 through a vacuum pipeline 74, the vacuum pump two 72 is connected to the process chamber 30 through a vacuum pipeline 74, and the vacuum pump three 73 is connected to the unloading buffer chamber 50 through a vacuum pipeline 74. The vacuum pumping system 70 can be used to control the vacuum pumping of the loading buffer chamber 20, the process chamber 30 and the unloading buffer chamber 50 respectively, so as to realize the vacuum pumping operation according to the process requirements.

[0057] Referring to Figure 1 It should be further explained that, in the embodiment, the unloading buffer chamber 50 includes an unloading buffer chamber 51 and an unloading buffer chamber cover 52, and the unloading buffer chamber cover 52 can ensure the sealing of the unloading buffer chamber 51 when it is covered on the unloading buffer chamber 51. The side of the unloading buffer chamber 51 close to the unloading table 60 is also provided with a battery piece outlet 300, and a fifth door valve is arranged at the battery piece outlet 300 which is connected between the unloading buffer chamber 51 and the unloading table 60. The communication or isolation between the unloading buffer chamber 51 and the unloading table 60 can be realized by opening and closing the fifth door valve. The structure of the loading table 10 and the loading buffer chamber 20 can be the same as that of the unloading table 60 and the unloading buffer chamber 50, so that the structure is simple and easy to design, and the stability of the battery piece transmission during coating can be better ensured, thereby ensuring the coating quality.

[0058] It should be further explained that the chamber shape of the loading buffer chamber 20, the process chamber 30 and the unloading buffer chamber 50 in the embodiment has no special requirements, and those skilled in the art can choose flexibly according to the actual situation, such as U-shaped, rectangular and the like. Further, the specific structure of the loading buffer chamber 20, the process chamber 30 and the unloading buffer chamber 50 also has no special requirements, and those skilled in the art can choose flexibly according to the actual needs and conventional selection, which will include all components and parts that meet the use requirements, such as the necessary components including chamber door, air valve, shell and the like.

[0059] The application also provides a single-chamber multi-layer film evaporation method using the single-chamber multi-layer film evaporation system, which comprises the following steps as shown in Figure 1 、 Figure 11

[0060] S101, opening the first door valve, waiting for the coated battery piece to be conveyed to the feeding buffer chamber, closing the first door valve, and vacuumizing the feeding buffer chamber to the same pressure value as the process chamber;

[0061] In this embodiment, it is necessary to note that when the film-coated layer needs to be processed, the battery piece to be coated is placed on the transport platform 80 and on the feeding table 10, then the first door valve is opened, the transport platform 80 is conveyed from the position of the battery piece inlet 200 to the feeding buffer chamber 20 through the conveying wheel structure 100, and after reaching the corresponding position, the first door valve is closed, at this time, the feeding buffer chamber 20 forms a closed area, and the vacuum pump one 71 is used to perform vacuumizing treatment, until the pressure value is equal to that of the process chamber 30.

[0062] S102, opening the second door valve, conveying the coated battery piece from the feeding buffer chamber to the process chamber, and closing the second door valve;

[0063] In this embodiment, it is necessary to note that after the transport platform 80 conveys the battery piece to be coated into the feeding buffer chamber 20, the second door valve is opened, so that the feeding buffer chamber 20 and the process chamber 30 are in communication, at this time, the transport platform 80 is conveyed from the position of the battery piece inlet 200 to the process chamber 30 through the conveying wheel structure 100, and after reaching the corresponding position, the second door valve is closed, so that the process chamber 30 and the feeding buffer chamber 20 are isolated.

[0064] Figure 12 Specifically, S1021, opening the second door valve, conveying the battery piece to be coated from the feeding buffer chamber 20 to the first chamber 311 of the process chamber one 31 by the transport platform 80, closing the second door valve after reaching the specified position;

[0065] S1022, driving the motor 314 to drive the electrostatic chuck 313 to descend to suck the battery piece to be coated on the transport platform 80, and driving the electrostatic chuck 313 to ascend again after the electrostatic chuck 313 sucks the battery piece to be coated, so that the battery piece to be coated is separated from the transport platform 80;

[0066] S1023, after the transport platform 80 and the battery piece to be coated are separated, continuing to convey forward to the second chamber 321 of the process chamber two 32 to wait.

[0067] S103, opening the third door valve, and the evaporation system performs evaporation coating treatment on the battery piece to be coated located in the process chamber;

[0068] Figure 13 ​​​As shown, specifically: S1031, open the third gate valve, drive motor 314 drives electrostatic chuck 313 with the plated battery piece down;

[0069] It should be noted that after opening the third gate valve, the first chamber 311 and the evaporation chamber 42 are in communication, at this time the drive motor 314 on the first chamber cover 312 drives the electrostatic chuck 313 with the plated battery piece down.

[0070] S1032, switch component control current evaporation source platform 441 from source changing chamber 41 to evaporation chamber 42 and contact with evaporation source electrode 43;

[0071] It should be noted that the current evaporation source platform 441 is moved from the source changing chamber 41 to the evaporation chamber 42 by the roller structure 452, and when entering the evaporation chamber 42, it is continuously forwarded by the transmission belt 473 until the current evaporation source platform 441 is transmitted to the contact point 4421 at the bottom of the evaporation source electrode 43, at which time it is considered that the current evaporation source platform 441 is transmitted to the corresponding position.

[0072] S1033, power on the evaporation source electrode 43, make the plated material in the metal boat 442 heat and evaporate uniformly on the plated battery piece.

[0073] It should be noted that after the contact point 4421 at the bottom of the current evaporation source platform 441 contacts the evaporation source electrode 43, the evaporation source electrode 43 is powered on, and the plated material in the metal boat 442 is heated and evaporated uniformly on the plated battery piece.

[0074] S1034, after the current evaporation source platform 441 completes the plating of the plated battery piece, the evaporation source electrode 43 is powered off;

[0075] It should be noted that after the current evaporation source platform 441 completes the plating of the plated battery piece in the evaporation chamber 42, the evaporation source electrode 43 is powered off.

[0076] S1035, switch component control current evaporation source platform 441 back to source changing chamber 41 to make room, and switch control evaporation source platform 441 carrying different plated materials from source changing chamber 41 to evaporation chamber 42 to contact evaporation source electrode 43, in order to realize the plated battery piece with different plated materials;

[0077] It should be noted that the drive motor 471 controls the current evaporation source carrier 441 to retreat into the source changing chamber 41, and the current evaporation source carrier 441 is controlled to ascend or descend to expose the empty position by the lifting motor 461, and other evaporation source carriers 441 containing different coating materials are controlled to ascend or descend to the position communicated with the source changing chamber 41 and the evaporation chamber 42, and the source changing chamber 41 continues to be sent out through the roller structure 452, and when entering the evaporation chamber 42, it is transported to the contact point 4421 at the bottom of the metal boat 442 in the evaporation chamber 42 through the transmission belt 473 to contact with the evaporation source electrode 43, and the evaporation source electrode 43 is powered again to heat the coating material in the metal boat 442 to evaporate and uniformly coat on the battery piece to be coated. The above steps S1034 and S1035 are repeated, so that the evaporation source carrier 441 with different coating materials can be freely switched to coat different materials, and different coating materials can be placed on the metal boat 442 of the evaporation source carrier 441.

[0078] S1036, when the material needs to be added, the third gate valve is closed, the evaporation chamber 42 and the source changing chamber 41 are inflated to the atmospheric state, the door plate 411 is opened, the coating material is added, after the addition is completed, the door plate 411 is closed, the vacuum pump two 72 is used to pump the vacuum to the same pressure as the process chamber 30, then the third gate valve is opened, and the process continues.

[0079] S104, the fourth gate valve is opened, the battery piece after coating is transported to the discharging buffer chamber, the fourth gate valve is closed, and the discharging buffer chamber is inflated to the same pressure as the atmospheric pressure.

[0080] In the embodiment, it should be noted that after the battery piece to be coated is coated in the process chamber 30, the fourth gate valve is opened to communicate the second chamber 321 of the process chamber two 32 with the discharging buffer chamber 50, at this time the transportation carrier 80 can be transported into the discharging buffer chamber 51 through the battery piece outlet 300 by the transmission wheel structure 100 and reaches the corresponding position, the fourth gate valve is closed, and the discharging buffer chamber 51 is inflated to the same pressure as the atmospheric pressure.

[0081] S105, the fifth gate valve is opened, the battery piece after coating is transported to the discharging table, the fifth gate valve is closed, and the discharging buffer chamber is pumped to the same pressure as the process chamber.

[0082] In the embodiment, it should be noted that after the battery piece after coating is transported into the discharging buffer chamber 51, the fifth gate valve is opened to communicate the discharging buffer chamber 51 with the discharging table 60, at this time the transportation carrier 80 can be transported into the discharging table 60 through the battery piece outlet 300 by the transmission wheel structure 100, then the fifth gate valve is closed, and the discharging buffer chamber 51 is pumped to the same pressure as the chamber of the process chamber one 31 by the vacuum pump three 73.

[0083] The implementation principle of the embodiment is that the feeding table 10, the feeding buffer cavity 20, the process cavity 30, the discharging buffer cavity 50 and the discharging table 60 are sequentially arranged on the support frame 90, the battery piece can flow through the feeding table 10, the feeding buffer cavity 20, the process cavity 30, the discharging buffer cavity 50 and the discharging table 60 in sequence, and the evaporation source module 44 capable of replacing the film coating material is arranged in the evaporation system 40, and then the battery piece can realize multi-layer film evaporation in the process cavity 30 through the evaporation system 40, so that multi-layer film layers can be prepared in a single process cavity, the process cavity chamber does not need to be opened in the middle, the process of multiple times of breaking and vacuumizing the process cavity chamber is reduced, the process time of battery production is reduced, and the production efficiency is improved.

[0084] It should be understood that the above specific embodiments of the present application are only used for illustrative or explanatory purposes of the principles of the present application, and do not constitute a limitation of the present application. Therefore, any modification, equivalent replacement, improvement, etc. made without departing from the spirit and scope of the present application shall be included in the protection scope of the present application. In addition, the appended claims of the present application are intended to cover all variations and modifications falling within the scope and boundary of the appended claims or the equivalent forms of such scope and boundary.

Claims

1. A single chamber multi-layer film evaporation system, characterized by, It comprises: a loading table (10); a loading buffer cavity (20), which is provided with a first door valve between the loading buffer cavity (20) and the loading table (10); a process cavity (30), which is provided with a second door valve between the process cavity (30) and the loading buffer cavity (20); an evaporation system (40), which is provided outside the process cavity (30) and is provided with a third door valve between the process cavity (30) and the evaporation system (40); a discharging buffer cavity (50), which is provided with a fourth door valve between the discharging buffer cavity (50) and the process cavity (30), and the process cavity (30) is located between the loading buffer cavity (20) and the discharging buffer cavity (50); a discharging table (60), which is provided with a fifth door valve between the discharging table (60) and the discharging buffer cavity (50); a vacuum pumping system (70), which is connected with the loading buffer cavity (20), the process cavity (30) and the discharging buffer cavity (50) respectively; a conveying platform (80), which carries the battery pieces to be plated and sequentially flows through the loading table (10), the loading buffer cavity (20), the process cavity (30), and then is conveyed to the discharging buffer cavity (50) and the discharging table (60) after being evaporated with a plurality of film layers by the evaporation system (40) in the process cavity (30); wherein the process cavity (30) comprises a process cavity one (31) and a process cavity two (32) which are communicated with each other; the process cavity one (31) and the loading buffer cavity (20) are communicated with each other, and the process cavity one (31) is used for separating the battery pieces to be plated from the conveying platform (80) and performing evaporation film layer treatment; the process cavity two (32) and the discharging buffer cavity (50) are communicated with each other, and the process cavity two (32) is used for temporarily storing the conveying platform (80); the process cavity one (31) comprises a first cavity (311) and a first cavity cover (312) used in cooperation with the first cavity (311), a plurality of electrostatic chucks (313) are arranged on the first cavity cover (312), and a driving motor (314) for driving the electrostatic chucks (313) to move up and down is arranged on the first cavity cover (312), and the electrostatic chucks (313) are used for sucking the battery pieces to be plated on the conveying platform (80); the bottom of the first cavity (311) is provided as a hollow structure; the evaporation system (40) is arranged below the hollow structure at the bottom of the first cavity (311) of the process cavity one (31), and the third door valve is arranged between the process cavity one (31) and the evaporation system (40).

2. The single-cavity multi-layer film evaporation system according to claim 1, wherein the second door valve is arranged at a position where the process cavity one (31) and the loading buffer cavity (20) are communicated with each other; the fourth door valve is arranged at a position where the process cavity two (32) and the discharging buffer cavity (50) are communicated with each other.

3. The single-cavity multi-layer film evaporation system according to claim 2, wherein The evaporation system (40) comprises a source changing chamber (41), an evaporation chamber (42), a plurality of evaporation source electrodes (43) arranged in the evaporation chamber (42), a plurality of evaporation source modules (44) arranged in the source changing chamber (41), and a switching component; The source changing chamber (41) and the evaporation chamber (42) are in communication with each other, and the switching component is used to control the movement of the evaporation source modules (44) with different coating materials between the source changing chamber (41) and the evaporation chamber (42) to realize contact or separation with the evaporation source electrodes (43); The evaporation source electrodes (43) heat and evaporate the coating material in the evaporation source modules (44) when the evaporation source modules (44) are in contact with the evaporation source electrodes (43) and are powered on, and uniformly coat the battery pieces to be coated.

4. The single-chamber multi-layer film evaporation system according to claim 3, wherein The evaporation source module (44) comprises an evaporation source carrier (441) and a metal boat (442) arranged on the evaporation source carrier (441), and the metal boat (442) is used to place the coating material; The evaporation source carrier (441) can move between the source changing chamber (41) and the evaporation chamber (42) under the control of the switching component to realize contact or separation of the metal boat (442) with the evaporation source electrodes (43).

5. The single-chamber multi-layer film evaporation system according to claim 1, wherein The vacuum pumping system (70) comprises a vacuum pump one (71), a vacuum pump two (72), and a vacuum pump three (73); The vacuum pump one (71) is connected to the upper material buffering chamber (20) through a vacuum pipeline; The vacuum pump two (72) is connected to the process chamber (30) through a vacuum pipeline; The vacuum pump three (73) is connected to the lower material buffering chamber (50) through a vacuum pipeline.

6. A single-chamber multi-layer film deposition method using the single-chamber multi-layer film deposition system according to any one of claims 1 to 5, characterized by, The method comprises the following steps: Open the first gate valve, and transfer the battery pieces to be coated to the upper material buffering chamber (20), close the first gate valve, and vacuumize the upper material buffering chamber (20) to a pressure value equal to that of the process chamber (30); Open the second gate valve, transfer the battery pieces to be coated from the upper material buffering chamber (20) to the process chamber (30), and close the second gate valve; Open the third gate valve, and perform evaporation coating treatment on the battery pieces to be coated in the process chamber (30) by the evaporation system (40); Open the fourth gate valve, transfer the battery pieces after coating to the lower material buffering chamber (50), and close the fourth gate valve, and air charge the lower material buffering chamber (50) to a pressure value equal to that of the atmosphere; Open the fifth gate valve, transfer the battery pieces after coating to the lower material table (60), and close the fifth gate valve, and vacuumize the lower material buffering chamber (50) to a pressure value equal to that of the process chamber (30).

7. The single-chamber multi-layer film evaporation method according to claim 6, wherein The step of opening the second gate valve, transferring the battery pieces to be coated from the upper material buffering chamber (20) to the process chamber (30), and closing the second gate valve comprises: The second door valve is opened, and the transport platform 80 transports the battery to be plated into the first chamber 311 of the process cavity 1, and after reaching the specified position, the second door valve is closed. The driving motor 314 drives the electrostatic chuck 313 to descend to attract the battery to be plated and ascend to separate the battery to be plated from the transport platform 80. The transport platform 80 continues to transport forward into the second chamber 321 of the process cavity 2 to wait.

8. The single-cavity multi-layer film evaporation method according to claim 7, wherein the third door valve is opened, and the evaporation system 40 performs evaporation plating treatment on the battery to be plated in the process cavity 30, including: The third door valve is opened, and the driving motor 314 drives the electrostatic chuck 313 to descend with the battery to be plated. The switching component controls the current evaporation source platform 441 to move from the source changing chamber 41 to the evaporation chamber 42 and contact the evaporation source electrode 43. The evaporation source electrode 43 is powered on to heat and evaporate the plating material in the metal boat 442 and uniformly plate on the battery to be plated.

9. The single-cavity multi-layer film evaporation method according to claim 8, wherein the third door valve is opened, and the evaporation system 40 performs evaporation plating treatment on the battery to be plated in the process cavity 30, further including: After the current evaporation source platform 441 completes plating on the battery to be plated, the evaporation source electrode 43 is powered off. The switching component controls the current evaporation source platform 441 to retreat to the source changing chamber 41 to leave a vacancy, and controls the evaporation source platform 441 carrying different plating materials to move from the source changing chamber 41 to the evaporation chamber 42 to contact the evaporation source electrode 43, so as to realize the reduction of the film to be plated on the battery with different plating materials. ​ ​

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