Wind speed and direction sensor, wind speed and direction detection device and method

Abstract

The application discloses a wind speed and direction sensor, a wind speed and direction detection device and a method, and belongs to the technical field of measurement and testing. The wind speed and direction sensor comprises a substrate, a heating component and a plurality of impedance measurement components. The substrate is internally provided with at least two cavities arranged along a first direction and at least two cavities arranged along a second direction; each cavity contains an electrolyte solution; the first direction is orthogonal to the second direction; the heating component is arranged on the upper surface of the substrate; a plurality of impedance measurement components are arranged corresponding to each cavity; wherein, for any cavity: a through hole is arranged on the upper surface of the substrate corresponding to the cavity, one end of the impedance measurement component contacts the electrolyte solution in the cavity, and the other end of the impedance measurement component extends to the upper surface of the substrate through the corresponding through hole; the impedance of the electrolyte solution monotonously changes with temperature. The embodiment of the application can effectively reduce the power consumption of the sensor and improve the detection sensitivity.

Description

Technical Field

[0001] This invention relates to the field of measurement and testing technology, and in particular to a wind speed and direction sensor, wind speed and direction detection equipment and method. Background Technology

[0002] The demand for wind speed and direction monitoring is gradually expanding from traditional fields such as weather forecasting, transportation, tourism, and agricultural production to areas such as urban construction and aerial surveying. Some applications, such as environmental monitoring of power grid transmission lines, require wind speed and direction monitoring equipment to be small in size, compact, and low in power consumption. Compared to traditional ultrasonic and cup-type sensors, sensors using MEMS (Micro-Electro-Mechanical System) technology for wind speed and direction monitoring have gained favor among many engineers due to their miniaturization advantages. However, the measurement and control circuits of most MEMS-based wind speed and direction sensors still use Wien bridge or similar circuits to measure temperature changes on the chip. These circuits include oscillation circuits and amplification circuits, resulting in a relatively complex structure. This leads to high power consumption and poor sensitivity in existing thermal wind speed and direction sensors. Summary of the Invention

[0003] This invention provides a wind speed and direction sensor, a wind speed and direction detection device and method, which can effectively reduce sensor power consumption and improve detection sensitivity.

[0004] In a first aspect, embodiments of the present invention provide a wind speed and direction sensor, comprising:

[0005] A substrate having at least two cavities arranged along a first direction and at least two cavities arranged along a second direction; each cavity contains an electrolyte solution; wherein the first direction and the second direction are orthogonal.

[0006] A heating element is disposed on the upper surface of the substrate;

[0007] Multiple impedance measuring components are provided for each cavity; wherein, for any cavity: a through hole is provided on the upper surface of the substrate corresponding to the cavity, one end of the impedance measuring component contacts the electrolyte solution in the cavity, and the other end of the impedance measuring component extends to the upper surface of the substrate through the corresponding through hole; wherein, the impedance of the electrolyte solution changes monotonically with temperature.

[0008] Optionally, the heating element is a mesh structure or a centrally symmetrical block structure;

[0009] The substrate has two cavities arranged along the first direction and two cavities arranged along the second direction; the four cavities are centrally symmetrically distributed around the center line of the heating component.

[0010] Optionally, the impedance measurement component includes electrodes, conductive connectors, and pads;

[0011] The electrode is disposed in the cavity and in contact with the electrolyte solution; the pad is disposed on the upper surface of the substrate corresponding to the through hole; the electrode is connected to the pad through the conductive connector; the conductive connector passes through the through hole.

[0012] Optionally, the electrode portion is immersed in the electrolyte solution, and the portion of the electrode exposed in the electrolyte solution is connected to the conductive connector.

[0013] Optionally, the electrode contacts the top of the cavity and covers the opening at the bottom of the via, and the electrolyte solution fills the cavity; the pad contacts the upper surface of the substrate and covers the opening at the top of the via; and the conductive connector fills the via.

[0014] Optionally, the wind speed and direction sensor further includes: two connecting leads connected to the heating component; the control device applies voltage to the heating component through the connecting leads to control the heating power of the heating component.

[0015] Optionally, the wind speed and direction sensor further includes: two layout leads; the layout leads are connected to the heating component;

[0016] The connecting leads and the layout leads are identical in shape, size and material, and each lead is centrally symmetrically distributed around the center of the heating component.

[0017] Secondly, embodiments of the present invention also provide a wind speed and direction detection device, comprising: a control device and a wind speed and direction sensor as provided in any embodiment of the present invention, wherein the control device is connected to the heating component and each of the impedance measuring components.

[0018] Thirdly, embodiments of the present invention also provide a method for detecting wind speed and direction, characterized in that it is executed by the control device in the wind speed and direction detection equipment of any embodiment of the present invention, and the wind speed and direction detection method includes:

[0019] Heating the heating element;

[0020] Acquire the measurement signals of each of the impedance measurement components, and determine the impedance of the electrolyte solution in each of the cavities based on the measurement signals;

[0021] The wind speed in the first direction is determined based on the impedance of the electrolyte solution in each cavity in the first direction, and the wind speed in the second direction is determined based on the impedance of the electrolyte solution in each cavity in the second direction.

[0022] The wind speed in the first direction and the wind speed in the second direction are vector-synthesized to obtain wind speed and direction information.

[0023] Optionally, the substrate is provided with two cavities arranged along the first direction and two cavities arranged along the second direction; the control device stores a first calibration curve and a second calibration curve; the first calibration curve characterizes the relationship between the impedance difference of the electrolyte solution in the two cavities in the first direction and the wind speed, and the second calibration curve characterizes the relationship between the impedance difference of the electrolyte solution in the two cavities in the second direction and the wind speed.

[0024] In determining the wind speed, the wind speed in the first direction is determined based on the impedance difference of the electrolyte solutions in the two cavities in the first direction and the first calibration curve; the wind speed in the second direction is determined based on the impedance difference of the electrolyte solutions in the two cavities in the second direction and the second calibration curve.

[0025] The wind speed and direction sensor provided in this invention uses electrochemical impedance spectroscopy to replace the traditional Wien bridge temperature measurement method, thereby obtaining more accurate wind speed change information. This wind speed and direction sensor has the advantages of low power consumption and high sensitivity. Specifically, the wind speed and direction sensor adopts a cavity structure. On the one hand, wind speed and direction information is determined by measuring the change in impedance of the electrolyte solution in the cavity. Compared with existing measurement methods based on complex circuits, such as the Wien bridge, this effectively reduces sensor power consumption and minimizes the influence of circuit parameter changes, especially improving the sensor's sensitivity at low wind speeds. On the other hand, compared with the traditional MEMS wind speed and direction sensor scheme that collects surface temperature gradient changes, there is virtually no heat loss inside the substrate due to environmental factors other than the wind being measured. The temperature change of the solution inside the cavity is more significant, which can more accurately characterize the heat change caused by the wind being measured, thus effectively improving the sensor's measurement accuracy and sensitivity.

[0026] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a three-dimensional structural diagram of a wind speed and direction sensor provided in an embodiment of the present invention;

[0029] Figure 2 It is a kind of along Figure 1 A schematic diagram of the cross-sectional structure of line A-A';

[0030] Figure 3 It is a kind of along Figure 1 Schematic diagram of the cross-sectional structure of B-B';

[0031] Figure 4 It is another kind of... Figure 1 Schematic diagram of the cross-sectional structure of B-B';

[0032] Figure 5 This is a flowchart illustrating a wind speed and direction detection method provided in an embodiment of the present invention. Detailed Implementation

[0033] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0034] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion.

[0035] This invention provides a wind speed and direction sensor. Figure 1 This is a three-dimensional structural diagram of a wind speed and direction sensor provided in an embodiment of the present invention; Figure 2 It is a kind of along Figure 1 A schematic diagram of the cross-sectional structure of line A-A'; Figure 3 It is a kind of along Figure 1 A schematic diagram of the cross-sectional structure of section B-B'. See also... Figure 1-3 The wind speed and direction sensor includes a substrate 10, a heating element 20, and multiple impedance measuring elements 30. The substrate 10 has at least two cavities 11 arranged along a first direction X and at least two cavities 11 arranged along a second direction Y; each cavity 11 contains an electrolyte solution 13; the first direction X and the second direction Y are orthogonal; the figure exemplarily shows two cavities 11 arranged in each direction. The heating element 20 is disposed on the upper surface of the substrate 10. Each cavity 11 corresponds to at least one impedance measuring element 30, so that the control device in the wind speed and direction detection equipment equipped with the wind speed and direction sensor can determine the impedance of the electrolyte solution 13 in the cavity 11 through the measurement signal transmitted by the impedance measuring element 30.

[0036] The number of impedance measurement components 30 corresponding to each cavity 11 can be set according to the testing requirements of the impedance testing device in the control device. As exemplarily shown in the figure, each cavity 11 corresponds to two spaced impedance measurement components 30. Specifically, for any cavity 11: a through-hole 12 is provided on the upper surface of the substrate 10 corresponding to the cavity; one end of the impedance measurement component 30 contacts the electrolyte solution 13 in the cavity 11, and the other end of the impedance measurement component 30 extends to the upper surface of the substrate 10 through the corresponding through-hole 12. That is, the impedance measurement component 30 is partially immersed in the electrolyte solution 13 to accurately acquire the impedance information of the electrolyte solution 13 and convert it into a measurement signal; and the impedance measurement component 30 extends beyond the through-hole 12 to establish an electrical connection with the control device and smoothly transmit the measurement signal to the control device. It should be noted that... Figure 2 The position of the through hole 12 is marked with a dashed line to illustrate the correspondence between the positions of the through hole 12 and the cavity 11. Specifically, the vertical projection of the through hole 12 onto the surface of the substrate 10 falls within the vertical projection range of the cavity 11 onto the surface of the substrate 10.

[0037] The substrate 10 is made of a material with good thermal conductivity so that the heat generated by the heating element 20 can be efficiently transferred through the substrate 10 and conducted to the electrolyte solution 13 within the cavity 11. For example, the substrate material can be a good thermally conductive material such as silicon, silicon carbide, or ceramic. The electrolyte solution 13 has the characteristic that its impedance changes monotonically with temperature, so that the change in the impedance of the electrolyte solution can accurately characterize the change in the thermal field caused by the passing of the wind, allowing the control device to determine the wind speed in any direction based on the impedance of the electrolyte solution 13 in each cavity 11. For example, water or sodium chloride solution can be used as the electrolyte solution 13.

[0038] For example, the detection principle of this wind direction and speed sensor can be:

[0039] Heating component 20 is controlled to heat the substrate 10, transferring heat to the electrolyte solution 13 in each cavity 11. Under windless conditions, a stable initial thermal field distribution can be formed. When the wind to be measured blows across the sensor surface, it causes uneven thermal field distribution, and the impedance of the electrolyte solution 13 in each cavity 10 changes with temperature. For any direction between the first direction X and the second direction Y, the wind speed in that direction can be determined based on the impedance value of the solution in each cavity 11. Then, the wind speeds in the two orthogonal directions are vector synthesized to obtain the wind speed vector signal, which can characterize the wind speed and direction information of the wind to be measured. For example, the first direction X and the second direction Y can be any two orthogonal directions parallel to the upper surface of the substrate 10. For example, the first direction X is the WE direction, and the second direction is the NS direction.

[0040] Taking two cavities 11 arranged in one direction as an example, and assuming an initial uniform thermal field distribution, the initial impedances of the two cavities 11 are identical. When the thermal field distribution changes due to the blowing of the wind, an impedance difference exists between the solutions in the two cavities 11. This impedance difference indicates the temperature difference between the two cavities 11. Since there is a monotonic correlation between the temperature difference between the two cavities 11 and the wind speed, the control device can determine the wind speed in that direction based on the impedance difference of the solutions in the two cavities 11. For example, when more than two cavities 11 are arranged in one direction, wind speed information can be obtained based on the impedance difference between every two cavities 11. Then, the wind speed in that direction can be determined based on the statistical values ​​of the wind speed information in that direction. For instance, the average value of the wind speed information in that direction can be used as the wind speed in that direction to make the wind speed information in that direction more accurate.

[0041] The wind speed and direction sensor provided in this invention uses electrochemical impedance spectroscopy to replace the traditional Wien bridge temperature measurement method, thereby obtaining more accurate wind speed change information. This wind speed and direction sensor has the advantages of low power consumption and high sensitivity. Specifically, the wind speed and direction sensor adopts a cavity structure. On the one hand, wind speed and direction information is determined by measuring the change in impedance of the electrolyte solution 13 in the cavity 11. Compared with the measurement methods based on complex circuits, such as the Wien bridge in the prior art, this can effectively reduce sensor power consumption and minimize the influence of circuit parameter changes, especially improving the sensor's sensitivity at low wind speeds. On the other hand, compared with the traditional MEMS wind speed and direction sensor scheme that collects surface temperature gradient changes, there is basically no heat loss inside the substrate 10 due to environmental factors other than the wind being measured. The solution temperature change in the cavity 11 is more significant, which can more accurately characterize the heat change caused by the influence of the wind being measured, thus effectively improving the sensor's measurement accuracy and sensitivity.

[0042] See also Figure 2Based on the above embodiments, optionally, the heating element 20 is a mesh structure or a centrally symmetrical block structure. That is, the vertical projection of the heating element 20 onto the upper surface of the substrate 10 can be a mesh or a centrally symmetrical pattern, and the projected shape of the heating element 20 can be, for example, a square or other regular polygon. For example, the heating element 20 can be disposed at the center of the upper surface of the substrate 10. This configuration in this embodiment ensures the uniformity of the heat field generated by the heating element 20, guaranteeing a uniform initial heat field distribution even in the absence of wind. Specifically, the heating element 20 can be a symmetrically shaped heating resistor, the resistance value of which can be set according to actual needs. The heating resistor can be implemented using a multilayer metal CMOS process.

[0043] Based on the above embodiments, alternatively, such as Figure 1-3 As shown, the substrate 10 has two cavities 11 arranged along a first direction X and two cavities 11 arranged along a second direction Y. The four cavities 11 are centrally symmetrically distributed around the center line of the heating element 20 (perpendicular to the center line of the upper surface of the substrate 10). The four cavities 11 are identical in shape and size, and the material and volume of the electrolyte solution 13 inside are also identical. In this embodiment, the four cavities 11 are arranged symmetrically around the heating element 20, ensuring the consistency of the solution impedance within each cavity 11 under windless conditions, thereby simplifying the detection logic.

[0044] In summary, when the sensor is operating, under windless conditions, the heating element 20 generates a uniformly symmetrically distributed thermal field on the sensor surface, and the impedance of the solution in the four cavities 11 remains consistent. When wind blows, the thermal field shifts, generating a corresponding temperature gradient on the sensor surface. The viscosity of the liquid in the cavities 11 decreases linearly with increasing temperature, and the solution impedance changes accordingly. Therefore, temperature information can be characterized by measuring the impedance of the electrolyte solution 13. Empirical formulas show that temperature varies with wind speed; therefore, calibrating the sensor using standard wind tunnel wind speeds can obtain the impedance difference between the solutions in the two cavities 11 in a single direction at a specific wind speed. In actual testing, the corresponding wind speed in the corresponding direction can be obtained by measuring the impedance difference in the first and second directions. Vector synthesis of these two values ​​yields the vector wind speed signal.

[0045] See also Figure 1 Based on the above embodiments, optionally, the wind speed and direction sensor also includes multiple leads 40 disposed on the upper surface of the substrate 10. Among the multiple leads 40 are two connecting leads 41, which connect to the heating element 20. The two connecting leads 41 respectively lead out to two connection terminals of the heating element to connect to a control device. The control device can apply voltage to the heating element 20 through the connecting leads 41 to control the heating power of the heating element 20. The heating element 20 is, for example, a heating resistor.

[0046] Furthermore, the plurality of leads 40 also includes two layout leads 42; the layout leads 42 connect to the heating element 20. Each lead 40 has the same shape, size, and material, and is centrally symmetrically distributed around the center line of the heating element 20 (perpendicular to the center line of the upper surface of the substrate 10). In this embodiment, two connecting leads 41 are used to connect to the control device. By adding two layout leads 42, forming a centrally symmetrical structure with the two connecting leads 41, the symmetry of the thermal field can be effectively guaranteed. Also, each lead 40 can be set as a thin strip to avoid disrupting the central thermal field and to avoid the influence of corner effects. For example, the connecting leads 41 and the layout leads 42 can be arranged at intervals around the heating element 20 on the upper surface of the substrate 10.

[0047] See also Figure 3 Based on the above embodiments, optionally, the impedance measurement component 30 may include an electrode 31, a conductive connector 32, and a pad 33. The electrode 31 is disposed in the cavity 11 and contacts the electrolyte solution 13; the pad 33 is disposed on the upper surface of the substrate 10 corresponding to the through-hole 12; the electrode 31 is connected to the pad 33 via the conductive connector 32; the conductive connector 32 passes through the through-hole 12. The electrode 31, conductive connector 32, and pad 33 can all be made of conductive materials; for example, the electrode 31 is a platinum electrode, the conductive connector 32 is a metal pillar, and the pad 33 is a metal pad.

[0048] Based on the above embodiments, optionally, electrode 31 is partially immersed in electrolyte solution 13, with a portion of electrode 31 exposed above electrolyte solution 13, such as the top surface of electrode 31, connected to conductive connector 32. This arrangement avoids unexpected situations such as voltage instability caused by electrode 31 being completely immersed in electrolyte solution 13 and connected to pad 33 via electrolyte solution and conductive metal pillar, thus ensuring the accuracy of the detection results.

[0049] Based on the above embodiments, there are several optional ways to arrange the various parts of the impedance measurement component 30. Several of these methods will be described below.

[0050] See Figure 3In one embodiment, optionally, electrode 31 contacts the top of cavity 11 and covers the opening at the bottom of via 12, electrolyte solution 13 fills cavity 11, and the top surface of electrode 31 is exposed outside electrolyte solution 13. Pad 33 contacts the upper surface of substrate 10 and covers the opening at the top of via 12. Conductive connector 32 fills via 12 and connects the top surface of electrode 31 and bottom surface of pad 33 respectively. Exemplarily, after preparing substrate 10, four cavities 11 inside it can be etched using MEMS processing technology and the cavities 11 can be filled with electrolyte solution 13; substrate 10 is inverted, platinum electrodes are sputtered from the top of cavity 11, and the via 12 is filled with metal and connected to pad 33 to form a passage.

[0051] See Figure 4 In another embodiment, optionally, the electrode 31 may not contact the top of the cavity 11, but may be connected by the conductive connector 32 and suspended inside the cavity 11. In this case, the injection height of the electrolyte solution 13 in the thickness direction Z of the sensor can be set more flexibly, as long as it partially submerges (or contacts) the electrode 31.

[0052] In summary, the monolithic integrated wind speed and direction sensor provided in this embodiment of the invention consists of a silicon substrate, a heating resistor, pads 33, cavities 11, platinum electrodes exposed in a solution, and metal injected into vias. Four solution-filled cavities 11 are symmetrically distributed around the heating resistor. Two opposing cavity structures form a group, and the two groups of cavity structures are orthogonally arranged. An electrolyte solution 13 is injected into the cavities. The viscosity of the electrolyte solution 13 decreases with increasing temperature; therefore, the solution resistance is highly sensitive to temperature, and the change in solution resistance is linear with temperature. The resistance of the platinum electrodes exposed in the solution and the metal pillars connecting the platinum electrodes to the pads 33 changes very little with temperature and can be approximated as not changing with temperature. Therefore, the measured resistance change can be considered as a change in solution impedance caused by temperature change. Empirical formulas show that, with other external conditions unchanged, the chip surface temperature changes with wind speed; that is, the greater the wind speed, the greater the temperature change. Therefore, by measuring the impedance changes of the two groups of electrolyte solutions and performing vector synthesis, the specific wind speed and direction can be determined.

[0053] This invention also provides a wind speed and direction detection device, including the wind speed and direction sensor provided in any embodiment of this invention, which has corresponding beneficial effects. For example, the wind speed and direction detection device includes a control device and a wind speed and direction sensor. The control device is connected to the heating component and each impedance measuring component in the wind speed and direction sensor. The control device is used to control the heating process of the heating component, collect the measurement signals of each impedance measuring component to calculate the impedance of the electrolyte solution in each cavity, and determine the wind speed and direction information of the wind to be measured based on the impedance of the electrolyte solution in each cavity.

[0054] This invention also provides a wind speed and direction detection method, which can be executed by the wind speed and direction detection equipment provided in any embodiment of this invention. The detection process is mainly controlled by a control device, and it has corresponding beneficial effects. Figure 5 This is a schematic flowchart of a wind speed and direction detection method provided in an embodiment of the present invention. See also... Figure 5 The wind speed and direction detection method specifically includes the following steps:

[0055] S110, Heating component.

[0056] The control device may include a control unit and a heating unit. The control unit can control the voltage applied by the heating unit to the heating component in order to control the heating power.

[0057] S120. Acquire the measurement signals of each impedance measurement component, and determine the impedance of the electrolyte solution in each cavity based on each measurement signal.

[0058] The control device may include an impedance measuring instrument, which is used to determine the impedance of the electrolyte solution in each cavity based on each measurement signal, and transmit the impedance value to the control unit for further processing.

[0059] S130. Determine the wind speed in the first direction based on the impedance of the electrolyte solution in each cavity in the first direction, and determine the wind speed in the second direction based on the impedance of the electrolyte solution in each cavity in the second direction.

[0060] S140. Perform vector synthesis of the wind speed in the first direction and the wind speed in the second direction to obtain wind speed and wind direction information.

[0061] Specifically, the wind speed and direction information may include the wind speed and direction information of the wind to be measured.

[0062] The wind speed and direction detection method provided in this invention uses electrochemical impedance spectroscopy to replace the traditional Wien bridge temperature measurement method, thereby obtaining more accurate wind speed change information. On one hand, by measuring the change in impedance of the electrolyte solution in the cavity to determine wind speed and direction information, compared to existing measurement methods based on complex circuits such as the Wien bridge, this effectively reduces sensor power consumption and minimizes the influence of circuit parameter changes, especially improving the sensor's sensitivity at low wind speeds. On the other hand, compared to traditional MEMS wind speed and direction sensors that collect surface temperature gradient changes, there is virtually no heat loss inside the substrate due to environmental factors other than the wind being measured. The temperature change of the solution inside the cavity is more significant, more accurately characterizing the heat changes caused by the wind being measured, thus effectively improving measurement accuracy.

[0063] Based on the above embodiments, optionally, taking the arrangement of two cavities along a first direction and two cavities along a second direction as examples, S130 may specifically be: determining the wind speed in the first direction based on the impedance difference of the electrolyte solutions in the two cavities in the first direction and a first calibration curve; determining the wind speed in the second direction based on the impedance difference of the electrolyte solutions in the two cavities in the second direction and a second calibration curve. The control device may include a memory to store the first and second calibration curves. The first calibration curve characterizes the correspondence between the impedance difference of the electrolyte solutions in the two cavities in the first direction and the wind speed, and the second calibration curve characterizes the correspondence between the impedance difference of the electrolyte solutions in the two cavities in the second direction and the wind speed.

[0064] The calibration curves described above can be obtained through wind tunnel testing. Specifically, before using the wind speed and direction sensor (hereinafter referred to as the sensor), it needs to be calibrated. The calibration process is as follows: place the sensor in a wind tunnel device, ensuring that either the first or second direction of the sensor is aligned with the direction of the wind flow. Measure the difference in solution impedance in the measured direction at different wind speeds. The resulting curve shows the impedance difference in the measured direction as a function of wind speed; this is the calibration curve. Calibration can be performed on both the NS and WE directions of the sensor using the same method. For example, when the sensor has good symmetry, the first calibration curve and the second calibration curve are identical.

[0065] Specifically, targeting Figure 1-3 The wind speed and direction sensor operates by connecting an external voltage to the heating resistor, and controlling the voltage magnitude determines the heating power. In a windless state, the thermal field on the sensor surface is uniformly distributed around the heating resistor. At this time, the solution impedance within the two sets of cavity structures is consistent, and the output impedance difference is zero. When wind blows, it carries heat from upstream to downstream, resulting in uneven temperature changes on the sensor surface. The wind blowing across the sensor surface can be orthogonally decomposed into components with a certain wind speed in the NS and WE directions. This means that the solution temperature within the two sets of cavity structures in these two directions also exhibits opposite changes, and the impedance difference in the two directions is not zero. By comparing the measured impedance difference with the calibration curve, the wind speed in each direction can be obtained. Vector synthesis of the wind speeds in the NS and WE directions yields the actual measured wind speed and direction information.

[0066] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this invention can be achieved, and this is not limited herein.

[0067] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A wind speed and direction sensor, characterized in that, include: A substrate having at least two cavities arranged along a first direction and at least two cavities arranged along a second direction inside the substrate; Each cavity contains an electrolyte solution; wherein the first direction is orthogonal to the second direction; A heating element is disposed on the upper surface of the substrate; Multiple impedance measuring components are provided for each cavity; wherein, for any cavity: a through hole is provided on the upper surface of the substrate corresponding to the cavity, one end of the impedance measuring component contacts the electrolyte solution in the cavity, and the other end of the impedance measuring component extends to the upper surface of the substrate through the corresponding through hole; wherein, the impedance of the electrolyte solution changes monotonically with temperature.

2. The wind speed and direction sensor according to claim 1, characterized in that, The heating element has a mesh structure or a centrally symmetrical block structure; The substrate has two cavities arranged along the first direction and two cavities arranged along the second direction; the four cavities are centrally symmetrically distributed around the center line of the heating component.

3. The wind speed and direction sensor according to claim 1 or 2, characterized in that, The impedance measurement component includes electrodes, conductive connectors, and pads; The electrode is disposed in the cavity and in contact with the electrolyte solution; the pad is disposed on the upper surface of the substrate corresponding to the through hole; the electrode is connected to the pad through the conductive connector; the conductive connector passes through the through hole.

4. The wind speed and direction sensor according to claim 3, characterized in that, The electrode portion is immersed in the electrolyte solution, and the portion of the electrode exposed in the electrolyte solution is connected to the conductive connector.

5. The wind speed and direction sensor according to claim 3, characterized in that, The electrode contacts the top of the cavity and covers the opening at the bottom of the via; the electrolyte solution fills the cavity; the pad contacts the upper surface of the substrate and covers the opening at the top of the via; the conductive connector fills the via.

6. The wind speed and direction sensor according to claim 1 or 2, characterized in that, Also includes: Two connecting leads are connected to the heating element; the control device applies voltage to the heating element through the connecting leads to control the heating power of the heating element.

7. The wind speed and direction sensor according to claim 6, characterized in that, Also includes: Two layout leads; the layout leads are connected to the heating element; The connecting leads and the layout leads are identical in shape, size and material, and each lead is centrally symmetrically distributed around the center of the heating component.

8. A wind speed and direction detection device, characterized in that, include: The control device and the wind speed and direction sensor as described in any one of claims 1-7, wherein the control device is connected to the heating component and each of the impedance measuring components.

9. A method for detecting wind speed and direction, characterized in that, The wind speed and direction detection method is executed by the control device in the wind speed and direction detection equipment according to claim 8, and includes: Heating the heating element; Acquire the measurement signals of each of the impedance measurement components, and determine the impedance of the electrolyte solution in each of the cavities based on the measurement signals; The wind speed in the first direction is determined based on the impedance of the electrolyte solution in each cavity in the first direction, and the wind speed in the second direction is determined based on the impedance of the electrolyte solution in each cavity in the second direction. The wind speed in the first direction and the wind speed in the second direction are vector-synthesized to obtain wind speed and direction information.

10. The wind speed and direction detection method according to claim 9, characterized in that, The substrate has two cavities arranged along the first direction and two cavities arranged along the second direction; the control device stores a first calibration curve and a second calibration curve; the first calibration curve characterizes the relationship between the impedance difference of the electrolyte solution in the two cavities in the first direction and the wind speed, and the second calibration curve characterizes the relationship between the impedance difference of the electrolyte solution in the two cavities in the second direction and the wind speed. In the process of determining the wind speed, the wind speed in the first direction is determined based on the impedance difference of the electrolyte solutions in the two cavities in the first direction and the first calibration curve. The wind speed in the second direction is determined based on the impedance difference of the electrolyte solutions in the two cavities in the second direction and the second calibration curve.

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