A method, device and equipment for detecting vibration of a galvanometer

Abstract

The present invention relates to a galvanometer jitter detection method, device and equipment. The galvanometer jitter detection method comprises: controlling the self-collimating laser to emit laser, and after the laser is irradiated to the metal printing surface via the beam expander, the galvanometer and the field lens, controlling the microscope to obtain a measured line diameter image under the microscope; calculating the line widths of two lines in the measured line diameter image; calculating the jitter amplitude of the galvanometer according to the line widths of the two lines, and being able to timely understand and obtain the motion state of the motors in the two servo motors of the galvanometer when in standby mode, and measuring the jitter amplitude of the galvanometer, which has a good reference effect on 3D printing results, prevents galvanometer problems in advance, and avoids problems such as low strength of processed workpieces and abnormal stress.

Description

Technical Field

[0001] The present invention relates to the technical field of 3D printing, and in particular to a galvanometer jitter detection method, a galvanometer jitter detection device, a galvanometer jitter detection equipment, a computer device and a storage medium. Background Art

[0002] In metal 3D printing technology, the galvanometer is one of the most important optical components in laser printing. The galvanometer consists of a servo motor, a laser reflector, and a control drive board. It is the core component for controlling laser printing. Its two lenses in the X and Y directions are perpendicular to each other. The motor deflection is controlled by the drive signal to quickly deflect the two reflectors so that the laser can be accurately positioned on the X and Y planes, and finally form the printed texture. The core point of its motion control is the servo motor. The accuracy of the servo motor determines the accuracy of the laser motion. Then, when the existing servo motor, even a high-precision servo motor, is used in laser 3D printing, due to the more stringent accuracy of laser 3D printing, it will be found that the laser beam becomes wider during movement when the galvanometer is used, which will directly lead to the printing path not being consistent with the design path, and there will be overlap, resulting in uneven stress of the printed workpiece and low strength of the structural parts.

[0003] The laser used in metal 3D printing is a single-mode laser with a very small spot. Any slight jitter in the motor will significantly affect the laser's printing path. The existing detection is relatively rough, only detecting whether the galvanometer light output is normal within the range of the naked eye, and cannot meet the laser motion control conditions under high-precision conditions. Summary of the invention

[0004] In view of the above problems, embodiments of the present invention are proposed to provide a galvanometer jitter detection method, a galvanometer jitter detection apparatus, a galvanometer jitter detection device, a computer device and a storage medium that overcome the above problems or at least partially solve the above problems.

[0005] To achieve the above object, the present invention proposes a galvanometer jitter detection method, which is applied to a galvanometer jitter detection device, the device comprising: a self-collimating laser, a beam expander, a galvanometer, a field lens and a microscope;

[0006] The method comprises:

[0007] Control the self-collimating laser to emit laser, and after the laser is irradiated to the metal printing surface via the beam expander, the galvanometer, and the field lens, control the microscope to obtain a line diameter measurement image under the microscope;

[0008] Calculating the line widths of two lines in the measured line diameter image;

[0009] The jitter amplitude of the galvanometer is calculated according to the line widths of the two lines.

[0010] Preferably, the step of calculating the vibration amplitude of the galvanometer according to the line widths of the two lines comprises:

[0011] Obtaining preset parameters, wherein the preset parameters include the focal length of the focusing mirror, the wavelength of the incident light beam, and the diameter of the incident light beam;

[0012] The spot diameter is calculated based on the focal length of the focusing mirror, the wavelength of the incident light beam and the diameter of the incident light beam;

[0013] The jitter amplitude is calculated based on the spot diameter and the line width of the two lines.

[0014] Preferably, calculating the line widths of two lines in the measured line diameter image includes:

[0015] Identifying a first line and a second line of the measured line diameter image;

[0016] The distance between the first line and the second line is calculated, and the distance is determined as the line width of the two lines.

[0017] Preferably, the self-collimating laser is arranged behind the beam expander, the galvanometer is arranged in front of the beam expander, the field lens is arranged behind the galvanometer and placed on the metal printing surface; and the microscope is arranged on the metal printing surface.

[0018] The present invention provides a galvanometer jitter detection device, which is applied to a galvanometer jitter detection device, wherein the device comprises: a self-collimating laser, a beam expander, a galvanometer, a field lens and a microscope;

[0019] The device comprises:

[0020] A laser module is used to control the self-collimating laser to emit laser light, and after the laser light is irradiated to the metal printing surface via the beam expander, the galvanometer, and the field lens, the microscope is controlled to obtain a line diameter measurement image under the microscope;

[0021] A line width calculation module, used to calculate the line widths of two lines in the measured line diameter image;

[0022] The jitter amplitude calculation module is used to calculate the jitter amplitude of the galvanometer according to the line widths of the two lines.

[0023] Preferably, the jitter amplitude calculation module includes:

[0024] A preset parameter acquisition submodule, used to acquire preset parameters, wherein the preset parameters include the focal length of the focusing mirror and the wavelength and diameter of the incident light beam;

[0025] A spot diameter calculation submodule, used to calculate the spot diameter according to the focal length of the focusing mirror, the wavelength of the incident light beam and the diameter of the incident light beam;

[0026] The jitter amplitude calculation submodule is used to calculate the jitter amplitude according to the spot diameter and the line width of the two lines.

[0027] Preferably, the line width calculation module includes:

[0028] An identification submodule, used for identifying the first line and the second line of the measured line diameter image;

[0029] The determination submodule is used to calculate the distance between the first line and the second line, and determine the distance as the line width of the two lines.

[0030] Preferably, the self-collimating laser is arranged behind the beam expander, the galvanometer is arranged in front of the beam expander, the field lens is arranged behind the galvanometer and placed on the metal printing surface; and the microscope is arranged on the metal printing surface.

[0031] The present invention provides a galvanometer jitter detection device, the device comprising:

[0032] Self-collimating laser, beam expander, galvanometer, field lens and microscope;

[0033] The self-collimating laser is arranged behind the beam expander, the galvanometer is arranged in front of the beam expander, the field lens is arranged behind the galvanometer and placed on the metal printing surface; the microscope is arranged on the metal printing surface;

[0034] The self-collimating laser emits a laser, and after the laser of the self-collimating laser passes through a beam expander, the spot diameter increases. After the light beam with the increased spot diameter passes through a galvanometer, it is focused by a field lens and focused on a metal printing surface, and a line diameter measurement image is obtained through a microscope;

[0035] Calculating the line widths of two lines in the measured line diameter image;

[0036] The jitter amplitude of the galvanometer is calculated according to the line widths of the two lines.

[0037] Preferably, the self-collimation laser comprises a laser and a self-collimation module.

[0038] Preferably, the galvanometer is an optical device for controlling the light emitting position of the laser, and comprises two reflecting mirrors and a servo motor for controlling the reflecting mirrors. When the servo motor rotates, it drives the reflecting mirrors to control the reflection direction of the light.

[0039] Preferably, the field lens includes a plurality of first lenses, so that the light forms a focused spot at each point on the focal plane.

[0040] Preferably, the beam expander includes a plurality of second lenses, and the beam expander is used to adjust the beam diameter.

[0041] The present invention provides a computer device, comprising a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of the above-mentioned galvanometer jitter detection method when executing the computer program.

[0042] The present invention provides a computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the steps of the above-mentioned galvanometer mirror jitter detection method are implemented.

[0043] In an embodiment of the present invention, the galvanometer jitter detection method includes: controlling the self-collimating laser to emit laser, and after the laser is irradiated to the metal printing surface via the beam expander, the galvanometer, and the field lens, controlling the microscope to obtain a measured line diameter image under the microscope; calculating the line widths of two lines in the measured line diameter image; calculating the jitter amplitude of the galvanometer according to the line widths of the two lines, and being able to timely understand and obtain the movement state of the motors in the two servo motors of the galvanometer when in standby mode, and measuring the jitter amplitude of the galvanometer, which has a good reference effect on 3D printing results, prevents galvanometer problems in advance, and avoids problems such as low strength of the workpiece after processing and abnormal stress. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] By reading the detailed description below with reference to the accompanying drawings, the above and other purposes, features and advantages of the exemplary embodiments of the present disclosure will become readily understood. In the accompanying drawings, several embodiments of the present disclosure are shown in an exemplary and non-limiting manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein:

[0045] Figure 1 is a schematic diagram of a galvanometer jitter detection device according to an embodiment of the present invention;

[0046] Figure 2 is a flowchart of a method for detecting vibration of a galvanometer according to an embodiment of the present invention;

[0047] Figure 3 is a flow chart of a line width calculation step according to an embodiment of the present invention;

[0048] Figure 4 is a schematic diagram of a line diameter measurement image according to an embodiment of the present invention;

[0049] Figure 5 is a diagram of steps for calculating a jitter amplitude according to an embodiment of the present invention;

[0050] Figure 6 is a structural block diagram of an embodiment of a galvanometer jitter detection device according to an embodiment of the present invention;

[0051] Figure 7 The diagram is a diagram of the internal structure of a computer device according to an embodiment.

[0052] In the figure: self-collimating laser 1, beam expander 2, galvanometer 3, field lens 4, microscope 5, metal printing surface 6. DETAILED DESCRIPTION

[0053] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present disclosure.

[0054] The specific embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

[0055] Reference Figure 1 , shows a schematic diagram of a galvanometer jitter detection device according to an embodiment of the present invention, which may specifically include the following components:

[0056] Self-collimating laser 1, beam expander 2, galvanometer 3, field lens 4 and microscope 5;

[0057] Specifically, the self-collimating laser 1 is arranged behind the beam expander 2, the galvanometer 3 is arranged in front of the beam expander 2, the field lens 4 is arranged behind the galvanometer 3 and placed on the metal printing surface 6; the microscope 5 is arranged on the metal printing surface 6;

[0058] In the embodiment of the present invention, the self-collimating laser 1 emits a laser. After the laser of the self-collimating laser 1 passes through the beam expander 2, the spot diameter increases. After the light beam with the increased spot diameter passes through the galvanometer 3, it is focused by the field lens 4 and focused on the metal printing surface 6. The measured line diameter image is obtained through the microscope 5, and the jitter amplitude of the galvanometer 3 is calculated by measuring the line diameter image.

[0059] Specifically applied to the embodiment of the present invention, the self-collimation laser 1 includes a laser and a self-collimation module.

[0060] In actual application in the embodiment of the present invention, the galvanometer 3 is an optical device for controlling the light emitting position of the laser, and includes two reflectors and a servo motor for controlling the reflectors. When the servo motor rotates, it drives the reflectors to control the reflection direction of the light.

[0061] Specifically, the field lens 4 includes a plurality of first lenses, which can form a focused light spot at each point on the focal plane;

[0062] In addition, the beam expander 2 includes a plurality of second lenses, and the beam expander 2 is used to adjust the beam diameter;

[0063] In the embodiment of the present invention, the galvanometer 3 jitter detection device also includes a computer device, which can be a terminal, and the terminal can be a tablet computer, a personal computer, an all-in-one computer, etc. The embodiment of the present invention does not limit the specific type of the terminal, and the operating system of the terminal can include Android, IOS, Windows Phone, Windows, etc. The present invention does not impose too many restrictions on this. The terminal is used to control the emission of the laser of the autocollimation laser 1, control the rotation angle of the beam expander 2, the galvanometer 3, and the field lens 4, and control the acquisition of the measured line diameter image displayed by the microscope 5, and then calculate the jitter amplitude of the galvanometer 3 according to the measured line diameter image.

[0064] In the embodiment of the present invention, the movement state of the two servo motors of the galvanometer when in standby mode can be understood and obtained in a timely manner, and the jitter amplitude of the galvanometer can be measured, which has a good reference effect on the 3D printing results, prevents the galvanometer problems in advance, and avoids the problems of low strength of the workpiece after processing and abnormal stress.

[0065] Reference Figure 2 , shows a flowchart of the steps of a galvanometer jitter detection method embodiment of the present invention, which is applied to a galvanometer jitter detection device, the device comprising: a self-collimating laser, a beam expander, a galvanometer, a field lens and a microscope;

[0066] The self-collimating laser is arranged behind the beam expander, the galvanometer is arranged in front of the beam expander, the field lens is arranged behind the galvanometer and placed on the metal printing surface; the microscope is arranged on the metal printing surface, which may specifically include the following steps:

[0067] Step 101, controlling the self-collimating laser to emit laser, and after the laser is irradiated to the metal printing surface via the beam expander, the galvanometer, and the field lens, controlling to obtain a line diameter measurement image under a microscope;

[0068] In actual application to the embodiments of the present invention, the terminal can control the self-collimating laser to emit laser and stop emitting laser. Furthermore, the terminal can also control the servo motor connected to the reflector. When the servo motor rotates, it drives the reflector to control the reflection direction of light. In addition, the microscope can also be controlled to obtain the measured line diameter image under the microscope.

[0069] Step 102, calculating the line widths of two lines in the measured line diameter image;

[0070] After obtaining the measured line diameter image, the line widths of the two lines in the measured line diameter image can be calculated; specifically applied to the embodiment of the present invention, refer to Figure 3 , shows a flow chart of a line width calculation step of an embodiment of the present invention, including the following steps:

[0071] Step 11, identifying the first line and the second line of the measured line diameter image;

[0072] Step 12: Calculate the distance between the first line and the second line, and determine the distance as the line width of the two lines.

[0073] Specifically, the first line and the second line of the measured line diameter image are identified, and then the distance between the first line and the second line is calculated, and the distance is determined as the line width of the two lines.

[0074] Reference Figure 4 , shows a schematic diagram of a line diameter measurement image according to an embodiment of the present invention, such as Figure 4 As shown, the two outermost lines in the light spot jitter direction are the first line and the second line.

[0075] Step 103: Calculate the vibration amplitude of the galvanometer according to the line widths of the two lines.

[0076] After the line widths of the two lines are obtained, the jitter amplitude of the galvanometer can be calculated according to the line widths of the two lines; in a preferred embodiment, referring to Figure 5 , showing a flow chart of a jitter amplitude calculation step according to an embodiment of the present invention, further comprising the following steps:

[0077] Step 21, obtaining preset parameters, wherein the preset parameters include the focal length of the focusing mirror, the wavelength of the incident light beam, and the diameter of the incident light beam;

[0078] Step 22, calculating the spot diameter according to the focal length of the focusing mirror, the wavelength of the incident light beam and the diameter of the incident light beam;

[0079] Step 23, calculating the jitter amplitude according to the spot diameter and the line width of the two lines.

[0080] In the embodiment of the present invention, the preset parameters include the focal length f of the focusing lens and the wavelength of the incident light beam. λ and the diameter D of the incident beam; while the spot diameter is d, the spot diameter d of the focus is proportional to the focal length f of the focusing lens and the laser wavelength λ, and inversely proportional to the diameter D of the incident beam. Therefore, the spot diameter of the focused light spot can be reduced by the beam expander, and then it passes through the galvanometer to be measured, and after being output from the galvanometer, it is focused by the field lens, the spot is reduced, and the laser is printed on the metal printing surface to form a crosshair where the XY axis intersects. The line width of the two lines can be observed under the microscope, and the terminal control obtains the measured line diameter image under the microscope, and the line width of the two lines in the measured line diameter image is measured. The jittered light spot is as follows Figure 5As shown, the lateral jitter causes the moving line width to be larger than the actual line width. Therefore, the jitter amplitude is equal to the line width of the jittered light spot (i.e., the line width of the two lines) minus the spot diameter divided by 2. In this way, the jitter amplitude can be calculated.

[0081] In the embodiment of the present invention, the movement state of the two servo motors of the galvanometer when in standby mode can be understood and obtained in a timely manner, and the jitter amplitude of the galvanometer can be measured, which has a good reference effect on the 3D printing results, prevents the galvanometer problems in advance, and avoids the problems of low strength of the workpiece after processing and abnormal stress.

[0082] It should be noted that, for the sake of simplicity, the method embodiments are described as a series of action combinations, but those skilled in the art should be aware that the embodiments of the present invention are not limited by the order of the actions described, because according to the embodiments of the present invention, certain steps can be performed in other orders or simultaneously. Secondly, those skilled in the art should also be aware that the embodiments described in the specification are all preferred embodiments, and the actions involved are not necessarily required by the embodiments of the present invention.

[0083] Reference Figure 6 , shows a structural block diagram of an embodiment of a galvanometer jitter detection device according to an embodiment of the present invention, which may specifically include the following modules:

[0084] The laser module 301 is used to control the self-collimating laser to emit laser light, and after the laser light is irradiated to the metal printing surface via the beam expander, the galvanometer, and the field lens, the microscope is controlled to obtain a line diameter measurement image under the microscope;

[0085] A line width calculation module 302 is used to calculate the line widths of two lines in the measured line diameter image;

[0086] The jitter amplitude calculation module 303 is used to calculate the jitter amplitude of the galvanometer according to the line widths of the two lines.

[0087] Preferably, the jitter amplitude calculation module includes:

[0088] A preset parameter acquisition submodule, used to acquire preset parameters, wherein the preset parameters include the focal length of the focusing mirror and the wavelength and diameter of the incident light beam;

[0089] A spot diameter calculation submodule, used to calculate the spot diameter according to the focal length of the focusing mirror, the wavelength of the incident light beam and the diameter of the incident light beam;

[0090] The jitter amplitude calculation submodule is used to calculate the jitter amplitude according to the spot diameter and the line width of the two lines.

[0091] Preferably, the line width calculation module includes:

[0092] An identification submodule, used for identifying the first line and the second line of the measured line diameter image;

[0093] The determination submodule is used to calculate the distance between the first line and the second line, and determine the distance as the line width of the two lines.

[0094] Each module in the above-mentioned galvanometer shake detection device can be implemented in whole or in part by software, hardware or a combination thereof. Each of the above-mentioned modules can be embedded in or independent of a processor in a computer device in the form of hardware, or can be stored in a memory in a computer device in the form of software, so that the processor can call and execute the operations corresponding to each of the above modules.

[0095] The galvanometer mirror jitter detection device provided above can be used to execute the galvanometer mirror jitter detection method provided in any of the above embodiments, and has corresponding functions and beneficial effects.

[0096] In one embodiment, a computer device is provided. The computer device may be a terminal, and its internal structure diagram may be as follows: Figure 7 As shown. The computer device includes a processor, a memory, a network interface, a display screen and an input device connected through a system bus. Among them, the processor of the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The network interface of the computer device is used to communicate with an external terminal through a network connection. When the computer program is executed by the processor, a galvanometer jitter detection method is implemented. The display screen of the computer device can be a liquid crystal display screen or an electronic ink display screen, and the input device of the computer device can be a touch layer covering the display screen, or a button, trackball or touchpad set on the computer device housing, or an external keyboard, touchpad or mouse, etc.

[0097] Those skilled in the art will understand that Figure 7 The structure shown in the figure is only a block diagram of a part of the structure related to the solution of the present application, and does not constitute a limitation on the computer device to which the solution of the present application is applied. The specific computer device may include more or fewer components than those shown in the figure, or combine certain components, or have a different arrangement of components.

[0098] In one embodiment, a computer device is provided, including a memory and a processor, wherein a computer program is stored in the memory, and when the processor executes the computer program, the following steps are implemented:

[0099] Control the self-collimating laser to emit laser, and after the laser is irradiated to the metal printing surface via the beam expander, the galvanometer, and the field lens, control the microscope to obtain a line diameter measurement image under the microscope;

[0100] Calculating the line widths of two lines in the measured line diameter image;

[0101] The jitter amplitude of the galvanometer is calculated according to the line widths of the two lines.

[0102] In a preferred embodiment, the processor implements the following steps when executing the computer program:

[0103] Obtaining preset parameters, wherein the preset parameters include the focal length of the focusing mirror, the wavelength of the incident light beam, and the diameter of the incident light beam;

[0104] The spot diameter is calculated based on the focal length of the focusing mirror, the wavelength of the incident light beam and the diameter of the incident light beam;

[0105] The jitter amplitude is calculated based on the spot diameter and the line width of the two lines.

[0106] In a preferred embodiment, the processor implements the following steps when executing the computer program:

[0107] Identifying a first line and a second line of the measured line diameter image;

[0108] The distance between the first line and the second line is calculated, and the distance is determined as the line width of the two lines.

[0109] In one embodiment, a computer readable storage medium is provided, on which a computer program is stored, and when the computer program is executed by a processor, the following steps are implemented:

[0110] Control the self-collimating laser to emit laser, and after the laser is irradiated to the metal printing surface via the beam expander, the galvanometer, and the field lens, control the microscope to obtain a line diameter measurement image under the microscope;

[0111] Calculating the line widths of two lines in the measured line diameter image;

[0112] The jitter amplitude of the galvanometer is calculated according to the line widths of the two lines.

[0113] In a preferred embodiment, the computer program implements the following steps when executed by a processor:

[0114] Obtaining preset parameters, wherein the preset parameters include the focal length of the focusing mirror, the wavelength of the incident light beam, and the diameter of the incident light beam;

[0115] The spot diameter is calculated based on the focal length of the focusing mirror, the wavelength of the incident light beam and the diameter of the incident light beam;

[0116] The jitter amplitude is calculated based on the spot diameter and the line width of the two lines.

[0117] In a preferred embodiment, the computer program implements the following steps when executed by a processor:

[0118] Identifying a first line and a second line of the measured line diameter image;

[0119] The distance between the first line and the second line is calculated, and the distance is determined as the line width of the two lines.

[0120] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0121] It will be appreciated by those skilled in the art that the embodiments of the present invention may be provided as methods, devices, or computer program products. Therefore, the embodiments of the present invention may take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware. Moreover, the embodiments of the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program codes.

[0122] The embodiments of the present invention are described with reference to the flowcharts and / or block diagrams of the methods, terminal devices (systems), and computer program products according to the embodiments of the present invention. It should be understood that each process and / or block in the flowchart and / or block diagram, as well as the combination of the processes and / or blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing terminal device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing terminal device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0123] These computer program instructions may also be stored in a computer readable memory capable of directing a computer or other programmable data processing terminal device to operate in a specific manner, so that the instructions stored in the computer readable memory produce a manufactured product including an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0124] These computer program instructions can also be loaded onto a computer or other programmable data processing terminal device so that a series of operating steps are executed on the computer or other programmable terminal device to produce a computer-implemented process, thereby providing instructions for executing on the computer or other programmable terminal device to implement the process. Figure 1 A process or multiple processes and / or boxes Figure 1 A step that specifies a function in one or more boxes.

[0125] Although the preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the embodiments of the present invention.

[0126] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or terminal device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or terminal device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or terminal device including the elements.

[0127] In the above description of this specification, unless otherwise clearly specified and limited, the terms "fixed", "installed", "connected" or "connected" should be understood in a broad sense. For example, with regard to the term "connection", it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal connection of two elements or the interaction relationship between two elements. Therefore, unless otherwise clearly defined in this specification, those skilled in the art can understand the specific meanings of the above terms in the present invention according to the specific circumstances.

[0128] According to the above description of this specification, those skilled in the art may also understand that the terms used below, such as "up", "down", "front", "back", "left", "right", "length", "width", "thickness", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential", "center", "longitudinal", "lateral", "clockwise" or "counterclockwise", etc., which indicate the orientation or position relationship, are based on the orientation or position relationship shown in the drawings of this specification, and are only for the purpose of facilitating the explanation of the scheme of the present invention and simplifying the description, rather than explicitly or implicitly indicating that the device or element involved must have the specific orientation, be constructed and operate in a specific orientation. Therefore, the above-mentioned orientation or position relationship terms cannot be understood or interpreted as limitations on the scheme of the present invention.

[0129] In addition, the terms "first" or "second" used in this specification to refer to numbers or ordinals are only used for descriptive purposes and cannot be understood as explicitly or implicitly indicating relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this specification, the meaning of "plurality" is at least two, such as two, three or more, etc., unless otherwise clearly and specifically defined.

[0130] The above is a detailed introduction to a galvanometer jitter detection method, a galvanometer jitter detection device, a galvanometer jitter detection equipment, a computer device and a storage medium provided by the present invention. Specific examples are used in this article to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea; at the same time, for general technical personnel in this field, according to the idea of ​​the present invention, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A galvanometer jitter detection method, characterized in that: Applicable to a galvanometer jitter detection device, the device comprising: a self-collimating laser, a beam expander, a galvanometer, a field lens and a microscope; The method comprises: Control the self-collimating laser to emit laser, and after the laser is irradiated to the metal printing surface via the beam expander, the galvanometer, and the field lens, control the microscope to obtain a line diameter measurement image under the microscope; Calculating the line widths of two lines in the measured line diameter image; The jitter amplitude of the galvanometer is calculated according to the line widths of the two lines.

2. The galvanometer mirror jitter detection method according to claim 1, characterized in that: The step of calculating the vibration amplitude of the galvanometer according to the line widths of the two lines comprises: Obtaining preset parameters, wherein the preset parameters include the focal length of the focusing mirror, the wavelength of the incident light beam, and the diameter of the incident light beam; The spot diameter is calculated based on the focal length of the focusing mirror, the wavelength of the incident light beam and the diameter of the incident light beam; The jitter amplitude is calculated based on the spot diameter and the line width of the two lines.

3. The galvanometer mirror jitter detection method according to claim 1, characterized in that: The calculating the line widths of two lines in the measured line diameter image includes: Identifying a first line and a second line of the measured line diameter image; The distance between the first line and the second line is calculated, and the distance is determined as the line width of the two lines.

4. The galvanometer mirror jitter detection method according to any one of claims 1 to 3, characterized in that: The self-collimating laser is arranged behind the beam expander, the galvanometer is arranged in front of the beam expander, the field lens is arranged behind the galvanometer and placed on the metal printing surface; and the microscope is arranged on the metal printing surface.

5. A galvanometer jitter detection device, characterized in that: Applicable to a galvanometer jitter detection device, the device comprising: a self-collimating laser, a beam expander, a galvanometer, a field lens and a microscope; The device comprises: A laser module is used to control the self-collimating laser to emit laser light, and after the laser light is irradiated to the metal printing surface via the beam expander, the galvanometer, and the field lens, the microscope is controlled to obtain a line diameter measurement image under the microscope; A line width calculation module, used to calculate the line widths of two lines in the measured line diameter image; The jitter amplitude calculation module is used to calculate the jitter amplitude of the galvanometer according to the line widths of the two lines.

6. The galvanometer mirror vibration detection device according to claim 5, characterized in that: The jitter amplitude calculation module comprises: A preset parameter acquisition submodule, used to acquire preset parameters, wherein the preset parameters include the focal length of the focusing mirror and the wavelength and diameter of the incident light beam; A spot diameter calculation submodule, used to calculate the spot diameter according to the focal length of the focusing mirror, the wavelength of the incident light beam and the diameter of the incident light beam; The jitter amplitude calculation submodule is used to calculate the jitter amplitude according to the spot diameter and the line width of the two lines.

7. The galvanometer mirror vibration detection device according to claim 5, characterized in that: The line width calculation module comprises: An identification submodule, used for identifying the first line and the second line of the measured line diameter image; The determination submodule is used to calculate the distance between the first line and the second line, and determine the distance as the line width of the two lines.

8. The galvanometer mirror vibration detection device according to any one of claims 5 to 7, characterized in that: The self-collimating laser is arranged behind the beam expander, the galvanometer is arranged in front of the beam expander, the field lens is arranged behind the galvanometer and placed on the metal printing surface; and the microscope is arranged on the metal printing surface.

9. A galvanometer jitter detection device, characterized in that: The device comprises: Self-collimating laser, beam expander, galvanometer, field lens and microscope; The self-collimating laser is arranged behind the beam expander, the galvanometer is arranged in front of the beam expander, the field lens is arranged behind the galvanometer and placed on the metal printing surface; the microscope is arranged on the metal printing surface; The self-collimating laser emits a laser, and after the laser of the self-collimating laser passes through a beam expander, the spot diameter increases. After the light beam with the increased spot diameter passes through a galvanometer, it is focused by a field lens and focused on a metal printing surface, and a line diameter measurement image is obtained through a microscope; Calculating the line widths of two lines in the measured line diameter image; The jitter amplitude of the galvanometer is calculated according to the line widths of the two lines.

10. The galvanometer mirror vibration detection device according to claim 9, characterized in that: The self-collimating laser comprises a laser and a self-collimating module.

11. The galvanometer mirror vibration detection device according to claim 9, characterized in that: The galvanometer is an optical device for controlling the light emitting position of the laser, and includes two reflectors and a servo motor for controlling the reflectors. When the servo motor rotates, it drives the reflectors to control the reflection direction of the light.

12. The galvanometer mirror vibration detection device according to claim 9, characterized in that: The field lens includes a plurality of first lenses, so that light forms a focused light spot at each point on the focal plane.

13. The galvanometer mirror vibration detection device according to claim 9, characterized in that: The beam expander includes a plurality of second lenses and is used for adjusting the beam diameter.

14. A computer device comprising a memory and a processor, wherein the memory stores a computer program, wherein: When the processor executes the computer program, the steps of the galvanometer mirror shake detection method according to any one of claims 1 to 4 are implemented.

15. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the galvanometer mirror shake detection method according to any one of claims 1 to 4 are implemented.

Images