A new structure of a composite ion pump

Abstract

The application belongs to the field of ultra-high vacuum, and particularly relates to a new structure of a composite ion pump, which comprises an ion pump, a flange adapter welding part, an adapter cylinder, a connecting terminal, a lead wire, an insulating ceramic tube, a connecting column and a NEG pump core, the flange adapter welding part comprises a flange, an adapter and a two-core NEG electrode plug, the ion pump adopts an SKY20L pump, the pump port is replaced by the flange adapter welding part, the NEG pump core adopts a SaesD400 pump core, the two-core plug in the flange adapter welding part is pressed together with the lead wire through the connecting terminal, the insulating ceramic tube passes through the two lead wires and plays an insulating role, the connecting column connects the lead wire and the two plugs of the NEG pump core and is fixed through a countersunk screw, and the NEG electrode plug is combined on the ion pump port to integrate the NEG activation and the ion pump pumping functions. The application solves the problem that a small pumping speed ion pump is compact in space and inconvenient to increase pumping ports. The application has a simple structure and is convenient to install, and provides a new structure for optimization of the composite ion pump structure.

Description

Technical Field

[0001] This invention belongs to the field of ultra-high vacuum, specifically a novel structure of a composite ion pump. Background Technology

[0002] In recent years, composite ion pumps have been widely developed as an important means of achieving ultra-high vacuum. NEG pumps (non-evaporative getter pumps), as a type of non-evaporative adsorption vacuum pump, do not evaporate additional gases during operation, unlike titanium sublimators. Instead, they utilize the chemical reactivity of the material itself to achieve degassing through surface adsorption or further internal diffusion. NEG pumps are small in size and compact in structure, and can operate without a power source after activation. Combining NEG pumps with ion pumps not only compensates for the significant drop in pumping speed of ion pumps at low pressures, but also allows NEG pumps to maintain extremely high pumping speeds for air, water vapor, and hydrogen, which is beneficial for achieving higher ultimate vacuums.

[0003] The composite structure of NEG pump and ion pump is relatively easy to implement in high-pumping-speed ion pumps. However, in low-pumping-speed ion pumps, due to the small volume and compact structure, it is necessary to take into account both the pump inlet position and the NEG electrode position. Therefore, the design of the composite pump structure of NEG pump and ion pump must take into account the above factors. Summary of the Invention

[0004] In order to meet the requirements of the composite structure of NEG pump and ion pump, the purpose of this invention is to provide a new structure of composite ion pump.

[0005] The objective of this invention is achieved through the following technical solution:

[0006] This invention includes an NEG pump, an adapter tube, a flange-connector weldment, and an ion pump. One end of the flange-connector weldment is connected to the pump inlet of the ion pump, and the other end of the flange-connector weldment is connected to the pump core of the NEG pump via the adapter tube. The flange-connector weldment includes a flange, a connector, and a NEG electrode plug. One end of the connector is connected to the pump inlet of the ion pump, and the flange is connected to the other end of the connector. The NEG electrode plug is connected to the connector. One end of the adapter tube is connected to the pump core, and the other end of the adapter tube is mounted on the flange. The adapter tube has an opening for air intake. The adapter tube, flange, and connector are connected in sequence. The NEG electrode plug is connected to one end of lead A via a connecting terminal. The other end of lead A passes through an insulating ceramic tube and connects to one end of a connecting post. The other end of the connecting post is connected to lead B on the pump core. The connecting post, insulating ceramic tube, lead A, and connecting terminal are all located inside the interconnected adapter tube, flange, and connector.

[0007] Wherein: one end of the adapter cylinder is annular, the pump core is inserted into the annular ring, and is fixed to the adapter cylinder by a side set screw.

[0008] The bottom of the outer side of the ring is chamfered.

[0009] The adapter cylinder has openings symmetrically provided on both sides of its axial cross-section along its length.

[0010] The NEG electrode plug is welded to the side of the connector, meaning that the axial centerline of the NEG electrode plug intersects perpendicularly with the axial centerline of the connector.

[0011] The NEG electrode plug is a two-core NEG electrode plug. The two-core NEG electrode plug is crimped together with two leads A through connecting terminals. The insulating ceramic tube passes through the two leads A and serves to insulate the two leads A.

[0012] The advantages and positive effects of this invention are as follows:

[0013] This invention solves the problem of combining a NEG pump with a low-speed ion pump, where the small-volume, compact ion pump, while also accommodating the pump's inlet and NEG electrode positions, makes it inconvenient to add more inlets. Furthermore, this invention provides a novel structure for the combined NEG pump and low-speed ion pump design. Attached Figure Description

[0014] Figure 1 This is a cross-sectional view of the internal structure of the present invention;

[0015] Wherein: 1 is countersunk screw, 2 is connecting post, 3 is screw, 4 is insulating ceramic tube, 5 is lead A, 6 is connecting terminal, 7 is pump core, 8 is set screw, 9 is adapter tube, 10 is flange, 11 is connecting pipe, 12 is NEG electrode plug, and 13 is ion pump. Detailed Implementation

[0016] The invention will now be described in further detail with reference to the accompanying drawings.

[0017] like Figure 1As shown, the present invention includes an NEG pump, an adapter tube 9, a flange-connector weldment, and an ion pump 13. One end of the flange-connector weldment is connected to the pump port of the ion pump 13, and the other end of the flange-connector weldment is connected to the pump core 7 of the NEG pump via the adapter tube 9. The flange-connector weldment includes a flange 10, a connector 11, and an NEG electrode plug 12. One end of the connector 11 is connected to the pump port of the ion pump 13, the flange 10 is connected to the other end of the connector 11, the NEG electrode plug 12 is connected to the connector 11, and one end of the adapter tube 9 is connected to the pump core 7. The other end of the adapter tube 9 is mounted on the flange 10. The adapter tube 9 has an opening 15 for air intake. The adapter tube 9, flange 10 and pipe 11 are connected in sequence. The NEG electrode plug 12 is connected to one end of the lead wire A5 through the connecting terminal 6. The other end of the lead wire A5 is connected to one end of the connecting post 2 after passing through the insulating ceramic tube 4. The other end of the connecting post 2 is connected to the lead wire B on the pump core 7. The connecting post 2, insulating ceramic tube 4, lead wire A5 and connecting terminal 6 are all located inside the adapter tube 9, flange 10 and pipe 11 that are connected.

[0018] In this embodiment, the ion pump 13 is a 20L ion pump manufactured by SKY Corporation (Shenyang Scientific Instruments Co., Ltd., Chinese Academy of Sciences), with the pump inlet replaced by a flange-connected welded part.

[0019] The pump core 7 of the NEG pump in this embodiment is a Saes D400 pump core (SES Getter (Nanjing) Co., Ltd.).

[0020] In this embodiment, one end of the adapter tube 9 is annular, and the pump core 7 is inserted into the annular ring and fixed to the adapter tube 9 by the side set screw 8. The left and right sides of the axial section of the adapter tube 9 are symmetrically provided with openings 15 along the length direction. The bottom of the outer side of the annular ring is chamfered 14. Through the openings 15 and chamfers 14 on both sides of the adapter tube 9, it is ensured that the gas can smoothly enter the ion pump 13 through the openings 15 on both sides and be pumped away by the ion pump 13. It also greatly increases the gas intake of the ion pump 13, thus realizing the NEG pump activation and the gas entering the ion pump 13 to achieve the gas pumping function.

[0021] In this embodiment, one end of the connector 11 is argon-arc welded to the pump port of the ion pump 13, with a leakage rate of less than 1×10E-10 Pa·L / S. The NEG electrode plug 12 is argon-arc welded to the side of the connector 11, that is, the axial center line of the NEG electrode plug 12 intersects the axial center line of the connector 11 perpendicularly. The flange 10 is argon-arc welded to the other end of the connector 11. The flange 10 is provided with two connecting lugs, and the lower end of the adapter cylinder 9 is provided with two extensions, which are respectively fixed to the two connecting lugs on the flange 10 by screws 3.

[0022] In this embodiment, the NEG electrode plug 12 is a two-core NEG electrode plug. The two-core NEG electrode plug is crimped together with two leads A5 through the connecting terminal 6. The insulating ceramic tube 4 passes through the two leads A5 and serves to insulate the two leads A5. The leads A5 are fixed to the connecting post 2 by countersunk screws 1.

Claims

1. A novel structure for a composite ion pump, characterized in that: The system includes an NEG pump, an adapter tube (9), a flange connector weldment, and an ion pump (13). One end of the flange connector weldment is connected to the pump port of the ion pump (13), and the other end of the flange connector weldment is connected to the pump core (7) of the NEG pump via the adapter tube (9). The flange connector weldment includes a flange (10), a connector (11), and an NEG electrode plug (12). One end of the connector (11) is connected to the pump port of the ion pump (13), and the flange (10) is connected to the other end of the connector (11). The NEG electrode plug (12) is connected to the connector (11). One end of the adapter tube (9) is connected to the pump core (7). The other end is installed on the flange (10), and the adapter (9) has an opening (15) for air intake; the adapter (9), flange (10) and pipe (11) are connected in sequence, the NEG electrode plug (12) is connected to one end of lead wire A (5) through the connecting terminal (6), the other end of lead wire A (5) is connected to one end of connecting post (2) after passing through the insulating ceramic tube (4), the other end of connecting post (2) is connected to lead wire B on pump core (7), and the connecting post (2), insulating ceramic tube (4), lead wire A (5) and connecting terminal (6) are all located inside the adapter (9), flange (10) and pipe (11) are connected; One end of the adapter tube (9) is annular, the pump core (7) is inserted into the annular ring, and is fixed to the adapter tube (9) by the side set screw (8); The bottom of the outer side of the ring is chamfered (14); The adapter tube (9) has openings (15) symmetrically opened on the left and right sides along the length direction of the axial section. The NEG electrode plug (12) is a two-core NEG electrode plug. The two-core NEG electrode plug is crimped together with two leads A (5) through the connecting terminal (6). The insulating ceramic tube (4) passes through the two leads A (5) and serves to insulate the two leads A (5).

2. The novel structure of the composite ion pump according to claim 1, characterized in that: The NEG electrode plug (12) is welded to the side of the connector (11), that is, the axial center line of the NEG electrode plug (12) intersects perpendicularly with the axial center line of the connector (11).

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