Furnace door structure for diffusion furnace and diffusion furnace

Abstract

The present invention discloses a furnace door structure for a diffusion furnace and a diffusion furnace, wherein the furnace door structure comprises a metal furnace door and a heat radiation barrier, wherein the heat radiation barrier is installed on the inner side of the metal furnace door through a suspension mechanism; the suspension mechanism comprises a support plate and a support member, wherein the support member is installed on the metal furnace door through an adjustable support seat assembly; the adjustable support seat assembly comprises a support rod and a limit adjustment member, wherein the limit adjustment member is provided with an axial adjustment mechanism and an elastic adjustment mechanism, wherein the axial adjustment mechanism is used to adjust the distance from the support rod to the heat radiation barrier from the outside, and the elastic adjustment mechanism is used to elastically support the support rod and adjust the elastic force of the adjustable support seat assembly from the outside. The furnace door structure can adjust the buffering force of the heat radiation barrier at various positions in various directions from the outside of the metal furnace door, and can make the heat radiation barrier and the metal furnace door parallel to each other.

Description

Technical Field

[0001] The present invention relates to the technical field of photovoltaic production equipment, and in particular to a furnace door structure of a diffusion furnace equipment. The present invention also relates to a diffusion furnace provided with the furnace door structure. Background Art

[0002] Currently, in the preparation process of solar cells, silicon wafers need to go through processes such as texturing, diffusion, etching, coating and printing in sequence.

[0003] The diffusion process is a core step in the preparation of solar cells. That is, the silicon wafer is placed in a diffusion furnace with a quartz boat as a carrier, and nitrogen and a diffusion source are introduced into the diffusion furnace at a certain temperature to diffuse and deposit a PN junction on the surface of the silicon wafer.

[0004] With the popularization of solar power generation, the demand for related photovoltaic products is increasing. Under the premise of increasing production capacity demand, the requirements for the main components of diffusion process equipment are also getting higher and higher.

[0005] like Figure 1 As shown, it is a typical diffusion furnace soft landing process equipment, and its diffusion furnace body includes a heating furnace 11 and a quartz tube cavity 12, a furnace mouth flange 121 is arranged at the front end of the quartz tube cavity 12, and a furnace cavity air inlet pipe 18 and a furnace cavity exhaust pipe 19 are arranged at the rear end of the quartz tube cavity. When the silicon wafer carrier 31 and the silicon wafer 32 are sent into the quartz tube cavity 12, the furnace door 40 moves from the side and is tightly attached to the furnace mouth flange 121 at the front end of the quartz tube cavity 12, and the furnace door sealing ring 42 is used between the furnace door 40 and the furnace mouth flange 121 to achieve the sealing of the quartz tube cavity 12.

[0006] For the current diffusion furnace soft landing process equipment, the furnace door 40 is usually made of quartz material or metal material. If the furnace door 40 is made of quartz material, when the furnace door 40 is closed and sealed to the quartz tube cavity 12, the furnace door 40 is easy to break during movement or extrusion due to the brittleness of the quartz material. If the furnace door 40 is made of metal material, after the furnace door 40 is closed, when the high-temperature diffusion process is carried out, the metal impurities escape and cause pollution to the diffusion process taking place in the quartz tube cavity 12.

[0007] Although the pollution problem can be solved by combining quartz materials with metal materials, how to install the quartz part of the furnace door on the metal part and be able to flexibly adjust it from the outside of the metal furnace door has become a problem that needs to be solved urgently. Summary of the invention

[0008] The object of the present invention is to provide a furnace door structure for a diffusion furnace to solve the above technical problems.

[0009] Another object of the present invention is to provide a diffusion furnace provided with the furnace door structure.

[0010] To achieve the above-mentioned purpose, the present invention provides a furnace door structure for a diffusion furnace, wherein the furnace door structure comprises a metal furnace door and a heat radiation barrier located on the inner side of the metal furnace door, wherein the heat radiation barrier is installed on the metal furnace door through a hanging mechanism; the hanging mechanism comprises a support plate and a plurality of adjustment support seat assemblies arranged on the outer side of the heat radiation barrier, wherein the adjustment support seat assembly is arranged on the metal furnace door, the support plate is provided with a plurality of slots, and the adjustment support seat assembly corresponds to the slots one by one and is movably connected, characterized in that the adjustment support seat assembly is arranged to be able to adjust the adjustment support seat assembly from the outer side of the metal furnace door so that the heat radiation barrier is parallel to the metal furnace door, the adjustment support seat assembly comprises a support rod, an axial adjustment mechanism and an elastic adjustment mechanism, the axial adjustment mechanism is arranged to adjust the distance between the support rod and the heat radiation barrier from the outer side of the metal furnace door, and the elastic adjustment mechanism is arranged to elastically support the support rod and adjust the elastic force of the adjustment support seat assembly from the outer side of the metal furnace door.

[0011] Optionally, the adjustment support seat assembly also includes a support member and a limit adjustment member, one end of the support rod is connected to the support member, the other end of the support rod is connected to the limit adjustment member, the support member is provided with a bayonet, and the slot of the support plate is snapped into the bayonet of the support member.

[0012] Optionally, the bayonet of the support member is an annular bayonet, and its cross section is Y-shaped.

[0013] Optionally, the axial adjustment mechanism comprises an external thread and a screwing portion provided on an outer wall of the limit adjustment member, and the limit adjustment member is threadedly connected to the metal furnace door via its external thread.

[0014] Optionally, a nut seat is fixed to the outer surface of the metal furnace door, and the nut seat is provided with an internal thread matching the external thread of the limit adjustment member.

[0015] Optionally, the portion of the adjustment support seat assembly located outside the metal furnace door is arranged in a sealed cavity formed by a sealing base and a sealing cover plate, and a sealing ring is provided between the contact surfaces of the sealing cover plate and the sealing base.

[0016] Optionally, a sealing groove is provided on the contact surface of the sealing cover plate or the sealing base, the sealing ring is installed in the sealing groove, and the sealing groove is higher than the outer surface of the metal furnace door.

[0017] Optionally, the elastic adjustment mechanism includes an internal thread arranged on the inner wall of the limit adjustment member; an adjustment spring and a locking nut are arranged inside the limit adjustment member, and the locking nut is provided with an external thread matching the internal thread of the limit adjustment member, one end of the adjustment spring abuts against the support rod, and the other end abuts against the locking nut.

[0018] Optionally, an expansion portion is provided at the end of the support rod located in the inner cavity of the limit adjustment member, and a limit portion is provided at the end of the limit adjustment member close to the metal furnace door, and the expansion portion of the support rod is clamped with the limit portion of the limit adjustment member.

[0019] Optionally, the metal furnace door is provided with a first hole for passing the support rod and a second hole for accommodating an end of the limit adjustment member close to the metal furnace door, the aperture of the second hole is larger than that of the first hole, and the two form a stepped hole.

[0020] Optionally, the shape of the support plate includes but is not limited to a T-shape, a triangle or a quadrilateral.

[0021] Optionally, the number of the card slots is two, three or four, and the card slots are evenly arranged or symmetrically arranged with the axis of the support plate as the center.

[0022] Optionally, the slot is semicircular or gourd-shaped.

[0023] Optionally, the outer edge of the thermal radiation blocking member is provided with multiple limit ribs, and gaps are provided between adjacent limit ribs. The peripheral structure of the support plate is pressed into the gap and rotated to interfere with the limit ribs. A plurality of anti-rotation limit members are installed on the support plate, and the anti-rotation limit members are used to prevent the thermal radiation blocking member and the support plate from rotating relative to each other.

[0024] Optionally, a plurality of elastic buckles are arranged on the inner side of the support plate, and the elastic buckles are pressed against the inside of the limiting retaining edge of the heat radiation blocking member.

[0025] Optionally, the thermal radiation blocking member includes a quartz door and an opaque high-temperature resistant material filled in the quartz door.

[0026] Optionally, a furnace door air inlet pipe is provided on the metal furnace door, and inert gas is filled into the gap space between the metal furnace door and the heat radiation blocking member via the furnace door air inlet pipe.

[0027] To achieve the other purpose mentioned above, the present invention provides a diffusion furnace, including a heating furnace, a quartz tube cavity and a furnace mouth flange located at the end of the quartz tube cavity, a furnace door structure is arranged at the furnace mouth flange, a sealing ring is arranged on the metal furnace door, the metal furnace door and the furnace mouth flange are sealed by the sealing ring, and a furnace door structure for a diffusion furnace as described in any of the above items is provided.

[0028] The furnace door structure for a diffusion furnace provided by the present invention has a limit adjustment member for adjusting the support seat assembly, which is provided with an axial adjustment mechanism and an elastic adjustment mechanism. Through the elastic adjustment mechanism, the extension amount of the support member can be adjusted from the outside of the metal furnace door, so that the suspended heat radiation blocking member is parallel to the metal furnace door in the vertical direction. Through the elastic adjustment mechanism, the elastic force of the adjustment support seat assembly at various locations can be adjusted accordingly from the outside of the metal furnace door, that is, the buffering force of the heat radiation blocking member at various positions in various directions can be adjusted to achieve better buffering of the heat radiation blocking member at various positions in various directions, and prevent the heat radiation blocking member from being squeezed and broken. Since the adjustment can be made from the outside of the metal furnace door, there is no need to remove the suspended heat radiation blocking member when adjusting, and the installation and disassembly are simple and the adjustment is convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic diagram of the structure of a typical diffusion furnace soft landing process equipment;

[0030] Figure 2 A schematic structural diagram of a furnace door structure of a diffusion furnace provided by an embodiment of the present invention;

[0031] Figure 3 for Figure 2 A perspective view of the furnace door shown in;

[0032] Figure 4 for Figure 3 A three-dimensional view of the furnace door shown in another perspective;

[0033] Figure 5 This is a schematic diagram of the inner structure of a metal furnace door;

[0034] Figure 6 is a perspective view of a thermal radiation barrier;

[0035] Figure 7 is a three-dimensional diagram of a support plate;

[0036] Figure 8 This is a three-dimensional diagram of the support plate during installation;

[0037] Fig. 9 A three-dimensional image from another perspective during the installation of the support plate;

[0038] Fig.10 is a perspective view of a thermal radiation barrier;

[0039] Fig.11 Schematic diagram of the process of hanging a quartz door on a metal furnace door;

[0040] Fig.12 is a cross-sectional schematic diagram of a furnace door;

[0041] Fig.13 for Fig.12 Schematic diagram of a partial enlarged view;

[0042] Fig.14 for Fig.12 A right side view of the furnace door shown;

[0043] Fig.15 for Fig.13 A cross-sectional view of the limit adjustment member shown in ;

[0044] Fig.16 for Fig.13 A three-dimensional view of the limit adjustment member shown in ;

[0045] Fig.17 for Fig.13 A cross-sectional view of the locking nut shown in ;

[0046] Fig.18 for Fig.13 A perspective view of the locking nut is shown in FIG.

[0047] In the figure:

[0048] 11. Heating furnace; 12. Quartz tube cavity; 121. Furnace mouth flange; 18. Furnace cavity air inlet pipe; 19. Furnace chamber exhaust pipe; 31. Silicon wafer carrier; 32. Silicon wafer; 40. Furnace door; 42. Sealing ring; 41. Metal furnace door; 411. Furnace door air inlet pipe; 412. Sealing base; 50. Adjustment support seat assembly; 51. Support member; 511. Bayonet; 52. Support rod; 53. Nut seat; 54. Limit adjustment member; 541. External thread; 542. Screw part; 543. Internal thread; 55. Locking nut; 56. Adjustment spring; 60. Heat radiation blocking member; 61. Quartz door; 611. Limit rib; 612. Limit ring; 62. Support plate; 620. Round edge; 621. Slot; 63. Limit block; 64. Elastic buckle; 71. Sealing cover plate; 72. Base sealing ring. DETAILED DESCRIPTION

[0049] In order to enable those skilled in the art to better understand the scheme of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0050] In this article, the terms "upper, lower, inside, outside" and the like are established based on the positional relationships shown in the drawings. The corresponding positional relationships may also change depending on the drawings, and therefore cannot be understood as absolute limitations on the scope of protection; moreover, relational terms such as "first" and "second" and the like are merely used to distinguish one component from another with the same name, and do not necessarily require or imply any actual relationship or order between these components.

[0051] Please refer to Figures 2 to 6 , Figure 2 A schematic structural diagram of a furnace door structure of a diffusion furnace provided by an embodiment of the present invention; Figure 3 for Figure 2 A perspective view of the furnace door shown in; Figure 4 for Figure 3 A three-dimensional view of the furnace door shown in another perspective; Figure 5 This is a schematic diagram of the inner structure of a metal furnace door; Figure 6 A perspective view of a thermal radiation barrier.

[0052] As shown in the figure, in a specific embodiment, in order to avoid the furnace door 40 being made of quartz material which is easy to break or metal material which may cause pollution to the diffusion process, the furnace door structure of the diffusion furnace provided by the present invention is a combined furnace door structure, and its furnace door 40 is mainly composed of a metal furnace door 41 and a heat radiation blocking member 60 suspended on the inner side of the metal furnace door 41. The metal furnace door 41 is used to seal the furnace mouth of the furnace body. The main body of the heat radiation blocking member 60 is a quartz door 61. The quartz door 61 is made of quartz material and is filled with opaque and high-temperature resistant materials such as glass fiber. These materials will not cause pollution to the diffusion process after being heated.

[0053] In order to avoid metal contamination of the metal furnace door 41, a furnace door air inlet pipe 411 is provided on the metal furnace door 41 for introducing inert gases such as nitrogen. The gas can be filled into the gap space between the metal furnace door 41 and the thermal radiation blocking member 60 through the furnace door air inlet pipe 411. The end face of the thermal radiation blocking member 60 is close to or attached to the end face of the step inside the quartz tube cavity 12. This space forms a micro-positive pressure air curtain to prevent the diffusion process gas from reaching there to corrode the metal furnace door 41 and pollute the diffusion process.

[0054] The heat radiation blocking member 60 is installed on the inner side of the metal furnace door 41 through a hanging mechanism. The hanging mechanism includes a support plate 62 arranged on the quartz door 61 and a plurality of support members 51 arranged on the metal furnace door 41. The support plate 62 is provided with a slot 621, and the support member 51 is provided with a corresponding slot 511. After the hanging connection, the slot 621 of the support plate 62 is connected to the slot 511 of the support member 51, and the weight of the heat radiation blocking member 60 is supported by the support member 51.

[0055] In this embodiment, two downwardly opening slots 621 and a gourd-shaped slot 621 are provided on the upper side of the support plate 62. The bayonet 511 of the support member 51 is an annular bayonet, and the cross section of the annular bayonet is Y-shaped (see Fig.13 In other embodiments, two card slots 621 or four card slots 621 or other numbers of card slots 621 may be provided as required, and the card slots 621 and the bayonet 511 may also be in other shapes.

[0056] Please refer to Figures 7 to 11 , Figure 7 is a three-dimensional diagram of a support plate; Figure 8 This is a three-dimensional diagram of the support plate during installation; Fig. 9 A three-dimensional image from another perspective during the installation of the support plate; Fig.10 is a perspective view of a thermal radiation barrier; Fig.11 Schematic diagram of the process of hanging a quartz door on a metal furnace door.

[0057] As shown in the figure, the support plate 62 is installed in the accommodating cavity on the opposite side of the quartz door 61 and the metal furnace door 41. A limiting ring 612 is provided on the inner wall of the accommodating cavity, and a plurality of spaced limiting ribs 611 are provided on the opening edge of the accommodating cavity. A limiting groove is formed between the limiting rib 611 and the limiting ring 612, and the support plate 62 is inserted into the limiting groove. The above structure facilitates the installation and fixation of the support plate 62.

[0058] In this embodiment, the support plate 62 is an incomplete circular plate, which is generally T-shaped and has three rounded edge portions 620 around it. The lower edges of the left and right horizontal portions and the lower ends of the vertical portions are respectively provided with slots 621 , and the quartz door 61 is provided with three arc-shaped limit retaining edges 611 corresponding to the rounded edge portions 620 .

[0059] The back of each round edge portion 620 is provided with an elastic buckle 64, and there is a material removal area between adjacent round edge portions 620 in the circumferential direction. The round edge portion 620 of the support plate 62 is pressed into the gap of the limiting rib 611 and rotated at a certain angle to collide with the limiting rib 611. The round edge portion 620 and the elastic buckle 64 enter the limiting groove, and the elastic buckle 64 is against the inside of the limiting rib 611 of the thermal radiation blocking member 60. In this embodiment, due to the installation groove structure composed of the limiting ring 612 and the limiting rib 611, the elastic buckle 64 is against the limiting ring 612, and the limiting ring 612 is a part of the inner wall structure of the thermal radiation blocking member 60. The elastic buckle 64 plays the role of elastic support, so that the support plate 62 is fixed by the limiting rib 611 and the limiting ring 612, and the support plate 62 will not shake in the installation groove, and then the anti-rotation limiting member is installed. The anti-rotation limiter is a plurality of limit blocks 63 fixed to the support plate 62, and the limit blocks 63 are in conflict with the end of the limit retaining edge 611. The limit blocks 63 are used to prevent the heat radiation blocking member 60 and the support plate 31 from rotating relative to each other. The limit blocks 63 prevent the support plate 62 from rotating after being installed in place. The support plate 62 is provided with a plurality of mounting holes. After the support plate 62 is installed in place, the limit blocks 63 are fixed to the mounting holes to prevent the support plate 62 from rotating.

[0060] In this embodiment, the anti-rotation limiter is two limit blocks 63 fixed to the support plate 62, and the limit blocks 63 extend along the radial direction of the support plate 62, one of the limit blocks 63 abuts against the end of one of the limit ribs 611 in the clockwise direction, and the other limit block 63 abuts against the end of the other limit rib 611 in the counterclockwise direction. After the support plate 62 is installed inside the quartz door 61, the quartz door 61 and the support plate 62 can be prevented from rotating relative to each other.

[0061] Please continue to refer to Figures 12 to 18 , Fig.12 is a cross-sectional schematic diagram of a furnace door; Fig.13 for Fig.12 Schematic diagram of a partial enlarged view; Fig.14 for Fig.12 A right side view of the furnace door shown; Fig.15 for Fig.13 A cross-sectional view of the limit adjustment member shown in ; Fig.16 for Fig.13 A three-dimensional view of the limit adjustment member shown in ; Fig.17 for Fig.13 A cross-sectional view of the locking nut shown in ; Fig.18 for Fig.13 A perspective view of the locking nut is shown in FIG.

[0062] As shown in the figure, the support member 51 is installed on the metal furnace door 41 through the adjusting support base assembly 50. The number of the adjusting support base assemblies 50 can be two, or three, or more than three. In this embodiment, three adjusting support base assemblies 50 are provided and are distributed in an inverted "pin" shape.

[0063] The adjusting support base assembly 50 is provided with a support rod 52 and a limit adjusting member 54. One end of the support rod 52 is connected to the support member 51, and the other end is connected to the limit adjusting member 54. The limit adjusting member 54 is provided with an axial adjusting mechanism and an elastic adjusting mechanism. Among them, the axial adjusting mechanism is used to adjust the length of the support rod 52 extending out, and the elastic adjusting mechanism is used to elastically support the support rod 52 and adjust the elastic force of the support rod 52.

[0064] Specifically, the axial adjusting mechanism includes an external thread 541 and a screwing part 542 provided on the outer wall of the limit adjusting member 54. The metal furnace door 41 is provided with a first hole for passing through the support rod 52 and a second hole for accommodating the front end of the limit adjusting member 54. The aperture of the second hole is larger than that of the first hole, and the two form a stepped hole.

[0065] A nut seat 53 corresponding to the second hole is fixed on the outer surface of the metal furnace door 41. The nut seat 53 is provided with an internal thread. The limit adjusting member 54 is threadedly connected to the nut seat 53 through its external thread 541. By screwing the screwing part 542, the axial position of the limit adjusting member 54 can be adjusted.

[0066] One end of the support rod 52 located in the inner cavity of the limit adjusting member 54 has an increased diameter and is limited by the front-end necking of the limit adjusting member 54. The elastic adjusting mechanism has an internal thread 543 provided on the inner wall of the limit adjusting member 54, an adjusting spring 56 and a locking nut 55. One end of the adjusting spring 56 abuts against the support rod 52, and the other end abuts against the locking nut 55. An internal hexagonal hole or a square hole is provided inside the locking nut 55. A wrench is inserted into the hole to tighten the locking nut 55, and the position of the locking nut 55 relative to the limit adjusting member 54 can be adjusted, thereby adjusting the elastic force of the adjusting spring 56.

[0067] The part of the adjusting support base assembly 50 located outside the metal furnace door is arranged in a sealing cavity formed by a sealing base 412 and a sealing cover plate 71. The sealing base 412 is welded to the metal furnace door 41, and the weld seam needs to be sealed without leakage. A base sealing ring 72 is arranged between the sealing base 412 and the sealing cover plate 71. By pressing and sealing, the inside and outside of the furnace door can be isolated to prevent air leakage.

[0068] The installation sealing groove of the base sealing ring 72 can be set on the sealing base 412 or the sealing cover plate 71. The contact surface of the base sealing ring 72 needs to be higher than the outer surface of the metal furnace door 41. This is because the outer surface temperature of the metal furnace door 41 is relatively high, while the end surface temperature of the sealing base 412 is relatively low. By keeping away from the outer surface of the metal furnace door 41, high temperature can be avoided from damaging the base sealing ring 72 or shortening its service life.

[0069] Of course, the sealing base 412 and the sealing cover plate 71 may also be connected by a clamping type or a tightening type vacuum quick release flange or other forms of flanges.

[0070] For the suspended heat radiation blocking member 60, when it moves or is squeezed, the support force of the adjustment support seat assembly 50 at each location of the metal furnace door 41 on the heat radiation blocking member 60 is different. In addition to providing vertical support force for the heat radiation blocking member 60, the adjustment support seat assembly 50 may also be subjected to horizontal squeezing force or pulling force of the heat radiation blocking member 60. By adjusting the elastic force of the adjustment spring 56 of the adjustment support seat assembly 50 at each location accordingly, the buffering force of the heat radiation blocking member 60 at each location in each direction can be adjusted, so as to achieve better buffering of the heat radiation blocking member 60 at each location in each direction, and prevent the heat radiation blocking member 60 from being squeezed and broken.

[0071] The suspended heat radiation blocking member 60 may not be parallel to the metal furnace door 41 in the vertical direction, which is not conducive to the maintenance of the micro-positive pressure air curtain and is also likely to cause the end face of the heat radiation blocking member 60 to collide with the step surface inside the quartz tube cavity 12 and thus break. By adjusting the extension amount of the limit adjustment member 54 of the support seat assembly 50 at various locations, the suspended heat radiation blocking member 60 can be made parallel to the metal furnace door 41 in the vertical direction.

[0072] When the heat radiation blocking member 60 needs to be installed on the metal furnace door 41, it is only necessary to align the slot position of the heat radiation blocking member 60 with the adjustment support seat assembly 50 on the metal furnace door 41, lift it up to a certain height, apply pressure to the inside, and then put it down. When the heat radiation blocking member 60 needs to be removed from the metal furnace door 41, it is only necessary to apply pressure to the inside of the heat radiation blocking member 60, lift it up to a certain height, and then take out the heat radiation blocking member 60. After removing the heat radiation blocking member 60, the adjustment support seat assembly 50 can be adjusted.

[0073] If it is necessary to adjust the elastic force of the adjustment spring 56 and the axial position of the limit adjustment member 54, the locking nut 55 or the limit adjustment member 54 can be adjusted on the outside of the metal furnace door without removing the suspended heat radiation blocking member 60. After the elastic force of the adjustment spring 56 and the axial position of the limit adjustment member 54 are adjusted, the base sealing ring 72 and the sealing cover plate 71 can be used to seal the part of the adjustment support seat assembly 50 located on the outside of the metal furnace door.

[0074] The above embodiments are only preferred solutions of the present invention, and are not limited thereto. On this basis, targeted adjustments can be made according to actual needs to obtain different implementation methods. For example, the shape of the support plate 62 in the present invention can be a variety of structural forms, including but not limited to having two corners, a triangle or a quadrilateral. The present embodiment is a triangular structure, which constitutes a T-shaped structure. It is also possible to use I-shaped, Y-shaped, triangular, quadrilateral and other structures, and it is also possible to use elliptical, rectangular, rectangular, trapezoidal and other structures. The number of the slots 621 is consistent with the number of the adjustment support seat assemblies 50, and the number can be two, three or four, etc. The slots 621 are evenly arranged or arranged symmetrically with the axis of the support plate 62 as the center. The support plate 62 is conducive to processing the slot structure and is convenient for hanging. In the present invention, the slots 621 can also be semicircular, or can also be gourd-shaped. Since there are many possible implementation methods, they will not be illustrated one by one here.

[0075] The furnace door structure of this diffusion furnace has at least the following advantages compared with the previous furnace door structures in the industry:

[0076] 1) It can simultaneously avoid the furnace door 40 being made of quartz material that is fragile or being made of metal material that may cause pollution to the diffusion process, and it is simple to install and disassemble and easy to adjust.

[0077] 2) By adjusting the support seat assembly 50, the buffer force of the quartz door 61 in all directions and positions can be adjusted, and the suspended quartz door 61 can be adjusted to be parallel to the metal furnace door 41 in the vertical direction to prevent the quartz door 61 from being squeezed or collided and broken.

[0078] 3) By adjusting the locking nut 55 or the limit adjustment member 54 on the outside of the metal furnace door 41 , the elastic force of the adjustment spring 56 and the axial position of the limit adjustment member 54 can be adjusted without removing the suspended heat radiation blocking member 60 .

[0079] 4) The portion of the adjusting support seat assembly 50 located on the outside of the metal furnace door is arranged in a sealed cavity formed by a sealing base 412 and a sealing cover plate 71. The sealing base 412 is sealed and welded to the metal furnace door 41. A base sealing ring 72 is arranged between the sealing base 412 and the sealing cover plate 71 to compress and seal, thereby isolating the inside and outside of the furnace door 40 and preventing air leakage.

[0080] In addition to the above-mentioned furnace door structure of the diffusion furnace, the present invention provides a diffusion furnace, which is equipped with the furnace door structure of the diffusion furnace described above. Regarding the remaining structures of the diffusion furnace, please refer to the prior art and will not be described in detail herein.

[0081] The above is a detailed introduction to the furnace door structure and diffusion furnace of the diffusion furnace provided by the present invention. Specific examples are used in this article to illustrate the principle and implementation of the present invention. The description of the above embodiments is only used to help understand the core idea of ​​the present invention. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A furnace door structure for a diffusion furnace, the furnace door structure comprising a metal furnace door and a heat radiation barrier located on the inner side of the metal furnace door, the heat radiation barrier being mounted on the metal furnace door through a hanging mechanism; the hanging mechanism comprising a support plate and a plurality of adjustment support seat assemblies arranged on the outer side of the heat radiation barrier, the adjustment support seat assemblies being arranged on the metal furnace door, the support plate being provided with a plurality of slots, the adjustment support seat assemblies corresponding to the slots one by one and being movably connected, characterized in that: The adjustable support seat assembly is configured to be able to adjust the adjustable support seat assembly from the outside of the metal furnace door so that the heat radiation blocking member is parallel to the metal furnace door. The adjustable support seat assembly includes a support rod, an axial adjustment mechanism and an elastic adjustment mechanism. The axial adjustment mechanism is configured to adjust the distance between the support rod and the heat radiation blocking member from the outside of the metal furnace door. The elastic adjustment mechanism is configured to elastically support the support rod and adjust the elastic force of the adjustable support seat assembly from the outside of the metal furnace door.

2. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The adjustment support seat assembly also includes a support member and a limit adjustment member, one end of the support rod is connected to the support member, and the other end of the support rod is connected to the limit adjustment member, the support member is provided with a bayonet, and the slot of the support plate is snapped into the bayonet of the support member.

3. The furnace door structure for a diffusion furnace according to claim 2, characterized in that: The bayonet of the support member is an annular bayonet, and its cross section is Y-shaped.

4. The furnace door structure for a diffusion furnace according to claim 2, characterized in that: The axial adjustment mechanism comprises an external thread and a screwing portion provided on the outer wall of the limit adjustment member, and the limit adjustment member is threadedly connected to the metal furnace door via its external thread.

5. The furnace door structure for a diffusion furnace according to claim 4, characterized in that: A nut seat is fixed on the outer surface of the metal furnace door, and the nut seat is provided with an internal thread that matches the external thread of the limit adjustment member.

6. The furnace door structure for a diffusion furnace according to claim 2, characterized in that: The part of the adjustment support seat assembly located outside the metal furnace door is arranged in a sealing cavity formed by a sealing base and a sealing cover plate, and a sealing ring is arranged between the contact surfaces of the sealing cover plate and the sealing base.

7. The furnace door structure for a diffusion furnace according to claim 6, characterized in that: The contact surface of the sealing cover plate or the sealing base is provided with a sealing groove, the sealing ring is installed in the sealing groove, and the sealing groove is higher than the outer surface of the metal furnace door.

8. The furnace door structure for a diffusion furnace according to claim 2, characterized in that: The elastic adjustment mechanism includes an internal thread arranged on the inner wall of the limit adjustment member; an adjustment spring and a locking nut are arranged inside the limit adjustment member, and the locking nut is provided with an external thread matching the internal thread of the limit adjustment member, one end of the adjustment spring abuts against the support rod, and the other end abuts against the locking nut.

9. The furnace door structure for a diffusion furnace according to claim 2, characterized in that: The end of the support rod located in the inner cavity of the limit adjustment member is provided with an expanded diameter portion, and the end of the limit adjustment member close to the metal furnace door is provided with a limit portion, and the expanded diameter portion of the support rod is clamped with the limit portion of the limit adjustment member.

10. The furnace door structure for a diffusion furnace according to claim 2, characterized in that: The metal furnace door is provided with a first hole for passing the support rod and a second hole for accommodating an end of the limit adjustment member close to the metal furnace door. The diameter of the second hole is larger than that of the first hole, and the two form a stepped hole.

11. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The shape of the support plate includes but is not limited to a T-shape, a triangle or a quadrilateral.

12. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The number of the card slots is two, three or four, and the card slots are evenly arranged or bilaterally symmetrically arranged with the axis of the support plate as the center.

13. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The card slot is in a semicircular shape or a gourd hole shape.

14. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The outer edge of the thermal radiation blocking member is provided with multiple limit ribs, and gaps are provided between adjacent limit ribs. The peripheral structure of the support plate is pressed into the gap and rotated to conflict with the limit ribs. Multiple anti-rotation limit members are installed on the support plate, and the anti-rotation limit members are used to prevent the thermal radiation blocking member and the support plate from rotating relative to each other.

15. The furnace door structure for a diffusion furnace according to claim 14, characterized in that: A plurality of elastic buckles are arranged on the inner side of the support plate, and the elastic buckles are pressed against the inner side of the limiting retaining edge of the heat radiation blocking member.

16. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The heat radiation blocking member includes a quartz door and an opaque high temperature resistant material filled in the quartz door.

17. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The metal furnace door is provided with a furnace door air inlet pipe, and inert gas is filled into the gap space between the metal furnace door and the heat radiation blocking member through the furnace door air inlet pipe.

18. A diffusion furnace, comprising a heating furnace, a quartz tube cavity and a furnace mouth flange located at the end of the quartz tube cavity, wherein a furnace door structure is arranged at the furnace mouth flange, a sealing ring is arranged on the metal furnace door, and the metal furnace door and the furnace mouth flange are sealed by the sealing ring, characterized in that: A furnace door structure according to any one of claims 1 to 17 is provided.

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