Automatic cleaning apparatus for semiconductor chip cassettes

Abstract

The application discloses a kind of automatic cleaning equipment of semiconductor chip box, it is related to chip box cleaning technical field, and the application includes feeding mechanism, the side of feeding mechanism is equipped with the cleaning mechanism for cleaning chip box, transport mechanism for transporting chip box is equipped in cleaning mechanism, lifting mechanism for driving chip box lifting is equipped below cleaning mechanism, the above lifting mechanism of right side is equipped with the limiting mechanism for limiting chip box, the present application is positioned and pressed to chip box by limiting mechanism, avoid chip box deviate the just below of cleaning adhesive tape, and avoid chip box adhere on cleaning adhesive tape, influence cleaning efficiency, secondly, chip box is automatically fed by feeding mechanism, avoid manual feeding, save labor cost, the present application is positioned and pressed to chip box of different sizes by setting second spring and third spring, make rotating column and gyro wheel can, improve the practicability of device.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of chip box cleaning, in particular to an automatic cleaning device for semiconductor chip box. BACKGROUND

[0002] A semiconductor chip is a semiconductor device that can realize a certain function by etching, wiring and manufacturing on a semiconductor sheet, and a semiconductor chip box is a box body used for storing semiconductor chips, and is usually used for transferring and transporting semiconductor chips.

[0003] At present, most semiconductor chip boxes are rectangular boxes, and since the chip box is used for storing chips, the inside of the chip box needs to be cleaned between chip loading to avoid chip contamination caused by the chip box, which leads to chip scrap. The commonly used cleaning method is to use cleaning tape to stick and remove the dirt particles existing in the chip box, and then detect it by a detection device. However, most cleaning devices do not set a device for pressing the chip box during use, so that the chip box may be attached to the cleaning tape during the sticking process, causing the cleaning tape to be contaminated and reducing the cleaning efficiency. In addition, most cleaning devices do not set an automatic feeding device during use, and workers need to manually feed, which increases labor costs and may lead to labor shortage, affecting work efficiency. To solve the above problems, the inventor proposes an automatic cleaning device for semiconductor chip box to solve the above problems. SUMMARY

[0004] In order to solve the problems of chip box easily attached to cleaning tape and manual feeding, the purpose of the present application is to provide an automatic cleaning device for semiconductor chip box.

[0005] To solve the above technical problems, the present application adopts the following technical scheme: an automatic cleaning device for semiconductor chip box, comprising a feeding mechanism, a cleaning mechanism for cleaning the chip box is arranged on the side of the feeding mechanism, a conveying mechanism for conveying the chip box is arranged in the cleaning mechanism, a lifting mechanism for lifting the chip box is arranged below the cleaning mechanism, and a limiting mechanism for limiting the chip box is arranged above the lifting mechanism on the right side.

[0006] Preferably, the feeding mechanism comprises a feeding table, two side plates are slidingly installed on the upper surface of the feeding table, two moving plates are slidingly installed on the mutually close sides of the two side plates, an installation table is fixedly installed on the side of the feeding table away from the cleaning mechanism, a push plate is slidingly installed on the upper surface of the installation table, a sliding block is fixedly installed on the lower surface of the push plate, the sliding block is slidingly arranged in the installation table, an electric cylinder is fixedly installed on the side of the installation table away from the feeding table, and one end of the electric cylinder close to the feeding table is fixedly connected to the sliding block.

[0007] Preferably, the cleaning mechanism comprises a bottom plate, and the bottom plate is fixedly connected to the feeding table near the side of the mounting table, a fixed frame is fixedly installed on the upper surface of the bottom plate, a dry ice spraying device is fixedly installed on the upper surface of the fixed frame, a shielding box is fixedly installed on one side of the top of the fixed frame, and a pipeline at the bottom of the dry ice spraying device is fixedly connected to the inside of the shielding box, a sponge pad is fixedly installed on the side of the top of the fixed frame away from the shielding box, four connecting plates are fixedly installed on the side of the top of the fixed frame away from the shielding box, a storage roller is rotatably installed between the two connecting plates on the right side, a winding roller is rotatably installed between the two connecting plates on the left side, a connecting strip is fixedly installed on one side of the top of the fixed frame, a transmission rod is rotatably installed in the connecting strip, one end of the transmission rod is fixedly connected to the winding roller, an installation strip is fixedly installed on the side of the fixed frame, a connecting rod is rotatably installed in the installation strip, the connecting rod and the transmission rod are in transmission through a synchronous wheel and a synchronous belt, a sixth bevel gear is fixedly installed at the center of one end of the connecting rod away from the synchronous wheel, two installation rods are rotatably installed on the inside of the two sides of the fixed frame, a fifth bevel gear is fixedly installed at the center of one end of the installation rod on the left side away from the conveying mechanism, the installation rod is located on the side away from the feeding table, the fifth bevel gear and the sixth bevel gear are in meshing, and a sorting device is fixedly installed on the side of the bottom plate away from the feeding table.

[0008] Preferably, the conveying mechanism comprises conveying rollers, four conveying rollers are rotatably arranged on the inner wall of the fixed frame, and the conveying rollers are fixedly connected at the center of one end of the installation rods close to each other, conveying belts are in transmission installation between the two conveying rollers on the same side, four installation frames are fixedly installed on the conveying belts, rotating plates are rotatably installed between the opposite two installation frames, rotating shafts are fixedly installed on the two sides of the rotating plates, one end of the rotating shafts away from the rotating plates rotatably penetrates the installation frames, first springs are fixedly installed on the outer surfaces of the rotating shafts, one end of the first springs away from the rotating shafts is fixedly connected to the inside of the installation frames, first gears are fixedly installed on one end of the rotating shafts away from the rotating plates, first toothed plates are fixedly installed on the two sides of the inner wall of the fixed frame, the first gears and the first toothed plates are in movable meshing, push strips are fixedly installed on the lower surfaces of the rotating plates, and the push strips and the chip boxes are in movable contact.

[0009] Preferably, the lower surfaces of the feeding table are symmetrically provided with supporting legs, the supporting legs are fixedly installed between the sides close to each other, a mounting plate is fixedly installed on the lower surface of the supporting legs, two fixed blocks are fixedly installed on the lower surface of the mounting plate, a cross rod is rotatably installed in the two fixed blocks, the cross rod and the two installation rods on the side close to the feeding table are in transmission through a synchronous wheel and a synchronous belt, a fourth bevel gear is fixedly installed on the middle outer surface of the cross rod, a one-way bearing is rotatably installed in the mounting plate, the top end of the one-way bearing is rotatably arranged in the feeding table, a third bevel gear is fixedly installed at the center of the bottom end of the one-way bearing, the third bevel gear and the fourth bevel gear are in meshing, a second gear is fixedly installed at the center of the top end of the one-way bearing, a first toothed plate is fixedly installed on the lower surface of the push plate, and the first toothed plate and the second gear are in movable meshing.

[0010] Preferably, the lifting mechanism comprises a base, two bases are located below the bottom plate, two telescopic plates are slidingly installed in the base, two first screws are rotatably installed in the base, the telescopic plates are threadedly connected to the first screws, a first bevel gear is fixedly installed at the bottom end center of the first screw, rotating rods are rotatably installed in the base, the rotating rods are driven by a synchronous wheel and a synchronous belt, two second bevel gears are fixedly installed on the outer surface of the rotating rod, the second bevel gears are engaged with the first bevel gear, a placing table is fixedly installed on the upper surface of the two telescopic plates on the left, the outer surface of the placing table is in movable contact with the bottom plate, and two positioning devices are fixedly installed on the upper surface of the placing table.

[0011] Preferably, the fixed plates are fixedly installed on the side away from the bottom plate of the two supporting legs on the left, a fixed strip is fixedly installed on the lower surface of the fixed plate, a fixed rod is rotatably installed in the fixed strip, the fixed rod and the rotating rod on the left are driven by a synchronous wheel and a synchronous belt, a vertical rod is rotatably installed in the fixed plate, the top end of the vertical rod is rotatably arranged in the feeding table, a second bevel gear is fixedly installed at the center of one end of the fixed rod close to the vertical rod, a first bevel gear is fixedly installed at the bottom end center of the vertical rod, the first bevel gear is engaged with the second bevel gear, a first gear is fixedly installed at the top end center of the vertical rod, and the first gear plate is in movable engagement with the first gear.

[0012] Preferably, the limiting mechanism comprises an operation table, the lower surface of the operation table is fixedly connected to the two telescopic plates on the right, four rectangular blocks are slidingly installed on the upper surface of the operation table, limiting blocks are fixedly installed on the lower surface of the rectangular block, the limiting blocks are slidingly arranged in the operation table, four second screws are rotatably installed in the operation table, the limiting blocks are threadedly connected to the second screws, a third gear is rotatably installed in the operation table, a rectangular plate is fixedly installed in the operation table, four transmission rods are rotatably installed in the rectangular plate, fourth gears are fixedly installed at the bottom end center of the transmission rod, the four fourth gears are engaged with the third gear, sixth bevel gears are fixedly installed at the top end center of the transmission rod, fifth bevel gears are fixedly installed at the center of one end of the second screw close to the transmission rod, and the fifth bevel gears are engaged with the sixth bevel gears.

[0013] Preferably, the moving rod is slidably installed in the rectangular block and slidably penetrates the rectangular block, a moving frame is fixedly installed at the center of the end of the moving rod away from the rectangular block, a second spring is fixedly installed on the moving frame close to the side surface of the rectangular block, and the end of the second spring away from the moving frame is fixedly connected to the rectangular block, a guide rod is slidably installed in the moving frame and slidably penetrates the moving frame, a third spring is fixedly installed on the upper surface of the moving frame, and the end of the third spring away from the moving frame is fixedly connected to the handle of the guide rod, a fixing frame is fixedly installed at the center of the bottom end of the guide rod, a roller is rotatably installed in the fixing frame and movably contacts the upper surface of the chip box, and rotating columns are rotatably installed on the lower surfaces of the two sides of the moving frame and movably contact the outer surface of the chip box.

[0014] Preferably, the horizontal plate is fixedly installed in the base on the right side, the sleeve is rotatably installed in the horizontal plate, the lifting rod is slidably installed in the sleeve, the third gear is fixedly connected to the center of the top end of the lifting rod, two limiting strips are fixedly installed on the outer surface of the inner ring of the sleeve, the limiting strips are slidably arranged in the lifting rod, the mounting frame is fixedly installed on the lower surface of the horizontal plate, the second rotating rod is rotatably installed in the mounting frame, the second rotating rod is rotatably arranged in the horizontal plate at the top end, the second rotating rod and the sleeve are in transmission through the synchronous wheel and the synchronous belt, the third bevel gear is fixedly installed at the center of the bottom end of the second rotating rod, the third rotating rod is rotatably installed in the mounting frame at the bottom, the fourth bevel gear is fixedly installed at the center of the end of the third rotating rod close to the second rotating rod, the fourth bevel gear is engaged with the third bevel gear, the second gear is fixedly installed at the center of the end of the third rotating rod away from the fourth bevel gear, and the second toothed plate is fixedly installed on the side of the telescopic plate away from the stretching plate on the right side.

[0015] Compared with the prior art, the present application has the following beneficial effects:

[0016] 1. The limiting mechanism is used for positioning and pressing the chip box, so that the chip box is prevented from deviating from the position directly below the cleaning adhesive tape and adhering to the cleaning adhesive tape, and the cleaning efficiency is improved.

[0017] 2. The third rotating rod, the sleeve, the lifting rod and the second rotating rod are cooperated to drive the rotating column and the roller to move, the chip box is positioned and pressed, the second spring and the third spring are arranged to enable the rotating column and the roller to position and press chip boxes of different sizes, and the practicability of the device is improved.

[0018] 3. The cleaning rubber belt is rolled up through the cooperation between the mounting rod, the connecting rod and the transmission rod to drive the rolling roller to rotate, so that the used part of the cleaning rubber belt is rolled up, the next chip box is conveniently cleaned by the cleaning rubber belt, and the pollution of the chip box caused by the contact between the used cleaning rubber belt and the chip box is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description only constitute some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative effort on the basis of these drawings.

[0020] Figure 1 It is a schematic diagram of the overall structure of the present application.

[0021] Figure 2 It is a schematic diagram of the overall cross-sectional structure of the present application.

[0022] Figure 3 It is a schematic diagram of the cross-sectional structure of the loading mechanism and the cleaning mechanism of the present application.

[0023] Figure 4 It is a schematic diagram of the cross-sectional structure of the fixed frame of the present application.

[0024] Figure 5 It is a schematic diagram of the cross-sectional structure of the lifting mechanism of the present application.

[0025] Figure 6 It is a schematic diagram of the cross-sectional structure of the limiting mechanism of the present application.

[0026] Figure 7 It is a schematic diagram of the cross-sectional structure of the rectangular block of the present application.

[0027] Figure 8 It is a schematic diagram of the cross-sectional structure of the horizontal plate of the present application.

[0028] Figure 9 It is an enlarged schematic diagram of the structure at A of the present application. Figure 3

[0029] Figure 10 It is an enlarged schematic diagram of the structure at B of the present application. Figure 4

[0030] It is an enlarged schematic diagram of the structure at C of the present application. Figure 11 Figure 4

[0031] ​​​In the diagram: 1. Feeding mechanism; 101. Feeding platform; 102. Side plate; 103. Moving plate; 104. Mounting platform; 105. Electric cylinder; 106. Support leg; 107. Fixed plate; 108. Mounting plate; 109. Fixed block; 110. Horizontal bar; 111. Vertical bar; 112. First bevel gear; 113. Second bevel gear; 114. Fixed bar; 115. Fixed rod; 116. Push plate; 117. Slider; 118. First gear plate; 119. First gear; 120. Second gear; 121. One-way bearing; 122. Third bevel gear 1. Wheel; 2. Fourth bevel gear; 3. Cleaning mechanism; 4. Base plate; 5. Fixing frame; 6. Dry ice spraying device; 7. Shielding box; 8. Sponge pad; 9. Mounting rod; 10. Connecting plate; 211. Storage roller; 222. Rewinding roller; 313. Connecting bar; 4. Transmission rod; 5. Fifth bevel gear; 6. Sixth bevel gear; 7. Mounting bar; 8. Connecting rod; 9. First toothed plate; 10. Transport mechanism; 11. Transport roller; 22. Transport belt; 33. Mounting frame; 4. 305. Rotating plate; 306. Push bar; 307. Rotating shaft; 308. First spring; 309. First gear; 4. Lifting mechanism; 401. Base; 402. Placement platform; 403. Telescopic plate; 404. First screw; 405. First bevel gear; 406. Rotating rod; 407. Second bevel gear; 408. Horizontal plate; 409. Lifting rod; 410. Sleeve; 411. Second rotating rod; 412. Mounting bracket; 413. Third bevel gear; 414. Fourth bevel gear; 415. Second gear; 416. Second gear plate; 417. Connecting block; 4 18. Third rotating rod; 419. Limiting bar; 5. Sorting device; 6. Limiting mechanism; 601. Operating table; 602. Rectangular block; 603. Limiting block; 604. Second screw; 605. Fifth bevel gear; 606. Third gear; 607. Fourth gear; 608. Transmission rod; 609. Sixth bevel gear; 610. Rectangular plate; 611. Moving frame; 612. Moving rod; 613. Second spring; 614. Guide rod; 615. Third spring; 616. Fixing frame; 617. Roller; 618. Rotating column; 7. Positioning device. Detailed Implementation

[0032] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0033] Example: Figures 1-11As shown, the present invention provides an automatic cleaning device for semiconductor chip boxes, including a feeding mechanism 1. The feeding mechanism 1 has a cleaning mechanism 2 on its side for cleaning the chip boxes, which is used to clean the dirt particles inside the chip boxes to prevent the chip boxes from contaminating the chips and causing them to be scrapped. The cleaning mechanism 2 has a transport mechanism 3 for transporting the chip boxes, which is used to transfer the chip boxes. Below the cleaning mechanism 2 is a lifting mechanism 4 for lifting the chip boxes, which is used to lift the chip boxes so that the chip boxes come into contact with the cleaning mechanism 2. Above the lifting mechanism 4 on the right side is a limiting mechanism 6 for limiting the chip boxes to prevent the chip boxes from sticking to the cleaning tape.

[0034] The feeding mechanism 1 includes a feeding platform 101. Two side plates 102 are slidably installed on the upper surface of the feeding platform 101. Two movable plates 103 are slidably installed on the sides of the two side plates 102 that are close to each other. An installation platform 104 is fixedly installed on the side of the feeding platform 101 away from the cleaning mechanism 2. A push plate 116 is slidably installed on the upper surface of the installation platform 104. A slider 117 is fixedly installed on the lower surface of the push plate 116 and is slidably disposed inside the installation platform 104. An electric cylinder 105 is fixedly installed on the side of the installation platform 104 away from the feeding platform 101, and one end of the electric cylinder 105 near the feeding platform 101 is fixedly connected to the slider 117.

[0035] By adopting the above technical solution, the electric cylinder 105 can drive the push plate 116 to move.

[0036] The cleaning mechanism 2 includes a base plate 201, with the side of the base plate 201 near the mounting platform 104 fixedly connected to the loading platform 101. A fixing frame 202 is fixedly installed on the upper surface of the base plate 201, and a dry ice spraying device 203 is fixedly installed on the upper surface of the fixing frame 202. A shielding box 204 is fixedly installed on one side of the top of the fixing frame 202, and the pipe at the bottom of the dry ice spraying device 203 is fixedly connected to the inside of the shielding box 204. A sponge pad 205 is fixedly installed on the side of the top of the fixing frame 202 away from the shielding box 204. Four connecting plates 207 are fixedly installed on the side of the top of the fixing frame 202 away from the shielding box 204. A storage roller 208 is rotatably installed between the two connecting plates 207 on the right side, and a winding roller 209 is rotatably installed between the two connecting plates 207 on the left side. A connecting strip is fixedly installed on one side of the top of the fixing frame 202. 210. A transmission rod 211 is rotatably installed inside the connecting strip 210, and one end of the transmission rod 211 is fixedly connected to the take-up roller 209. An installation strip 214 is fixedly installed on the side of the fixed frame 202. A connecting rod 215 is rotatably installed inside the installation strip 214. The connecting rod 215 and the transmission rod 211 are driven by a synchronous pulley and a synchronous belt. A sixth bevel gear 213 is fixedly installed at the center of the end of the connecting rod 215 away from the synchronous pulley. Two installation rods 206 are rotatably installed on both sides of the fixed frame 202. A fifth bevel gear 212 is fixedly installed at the center of the end of the installation rod 206 on the left side away from the transport mechanism 3. This installation rod 206 is located on the side away from the loading platform 101. The fifth bevel gear 212 and the sixth bevel gear 213 mesh with each other. A sorting device 5 is fixedly installed on the side of the bottom plate 201 away from the loading platform 101.

[0037] By adopting the above technical solution, the mounting rod 206 can drive the take-up roller 209 to rotate.

[0038] The transport mechanism 3 includes four transport rollers 301, which are rotatably mounted on the inner wall of the fixed frame 202. Each transport roller 301 is fixedly connected to the center of one end of a mounting rod 206 that is close to the others. A transport belt 302 is driven between two transport rollers 301 on the same side. Four mounting frames 303 are fixedly mounted on the transport belt 302. A rotating plate 304 is rotatably mounted between two opposing mounting frames 303. A rotating shaft 306 is fixedly mounted on both sides of the rotating plate 304, with the end of the rotating shaft 306 furthest from the rotating plate 304. A rotating through mounting frame 303 is connected to a rotating shaft 306. A first spring 307 is fixedly mounted on the outer surface of the rotating shaft 306, and the end of the first spring 307 away from the rotating shaft 306 is fixedly connected to the inside of the mounting frame 303. A first gear 308 is fixedly mounted on the end of the rotating shaft 306 away from the rotating plate 304. A first toothed plate 216 is fixedly mounted on both sides of the inner wall of the fixed frame 202, and the first gear 308 and the first toothed plate 216 are in movable meshing. A pusher 305 is fixedly mounted on the lower surface of the rotating plate 304, and the pusher 305 is in movable contact with the chip box.

[0039] By adopting the above technical solution, the mounting rod 206 can drive the chip box to move.

[0040] Support legs 106 are symmetrically installed on both sides of the lower surface of the loading platform 101. A mounting plate 108 is fixedly installed between the sides of the four support legs 106 that are close to each other. Two fixing blocks 109 are fixedly installed on the lower surface of the mounting plate 108. A crossbar 110 is rotatably installed inside the two fixing blocks 109. The crossbar 110 and two mounting rods 206 near the side of the loading platform 101 are driven by a synchronous pulley and a synchronous belt. A fourth bevel gear 123 is fixedly installed on the outer surface of the middle part of the crossbar 110. A one-way bearing 121 is rotatably installed inside the mounting plate 108. Since the one-way bearing 121 has an inner ring and an outer ring, the outer ring can rotate normally when the inner ring does not rotate. At this time, the inner ring at the bottom of the one-way bearing 121 is connected to the third bevel gear 122, so that when the first gear plate 118 moves forward... When the drive plate 120 rotates, the inner and outer rings of the one-way bearing 121 rotate simultaneously, thereby driving the third bevel gear 122 to rotate. When the first gear plate 118 moves backward and drives the second gear 120 to rotate, the inner ring of the one-way bearing 121 does not rotate but the outer ring rotates, thus it cannot drive the third bevel gear 122 to rotate. The top of the one-way bearing 121 is rotatably set inside the loading platform 101. The third bevel gear 122 is fixedly installed at the bottom center of the one-way bearing 121, and the third bevel gear 122 meshes with the fourth bevel gear 123. The second gear 120 is fixedly installed at the top center of the one-way bearing 121. The first gear plate 118 is fixedly installed on the lower surface of the push plate 116, and the first gear plate 118 and the second gear 120 are movably meshed.

[0041] By adopting the above technical solution, the No. 1 tooth plate 118 can drive the mounting rod 206 to rotate.

[0042] The lifting mechanism 4 includes a base 401, with two bases 401 located below the base plate 201. Two telescopic plates 403 are slidably installed inside the base 401. Two first screws 404 are rotatably installed inside the base 401, and the telescopic plates 403 are threaded onto the first screws 404. A first bevel gear 405 is fixedly installed at the center of the bottom end of the first screw 404. A rotating rod 406 is rotatably installed inside the base 401, and the two rotating rods 406 are driven by a synchronous pulley and a synchronous belt. Two second bevel gears 407 are fixedly installed on the outer surface of the rotating rod 406, and the second bevel gears 407 mesh with the first bevel gear 405. A placement platform 402 is fixedly installed on the upper surface of the two telescopic plates 403 on the left side, and the outer surface of the placement platform 402 is in contact with the base plate 201. Two positioning devices 7 are fixedly installed on the upper surface of the placement platform 402.

[0043] By adopting the above technical solution, the rotating rod 406 can drive the telescopic plate 403 to move.

[0044] A fixing plate 107 is fixedly installed on the side of the two supporting legs 106 on the left side away from the base plate 201. A fixing strip 114 is fixedly installed on the lower surface of the fixing plate 107. A fixing rod 115 is rotatably installed inside the fixing strip 114. The fixing rod 115 and the rotating rod 406 on the left side are driven by a synchronous pulley and a synchronous belt. A vertical rod 111 is rotatably installed inside the fixing plate 107. The top end of the vertical rod 111 is rotatably set inside the loading platform 101. A second bevel gear 113 is fixedly installed at the center of the end of the fixing rod 115 near the vertical rod 111. A first bevel gear 112 is fixedly installed at the center of the bottom end of the vertical rod 111. The first bevel gear 112 and the second bevel gear 113 mesh with each other. A first gear 119 is fixedly installed at the center of the top end of the vertical rod 111. A first gear plate 118 and a first gear 119 are movably meshed.

[0045] By adopting the above technical solution, the No. 1 toothed plate 118 can drive the rotating rod 406 to rotate.

[0046] The limiting mechanism 6 includes an operating table 601, the lower surface of which is fixedly connected to two telescopic plates 403 located on the right side. Four rectangular blocks 602 are slidably mounted on the upper surface of the operating table 601. Limiting blocks 603 are fixedly mounted on the lower surface of the rectangular blocks 602 and slidably disposed inside the operating table 601. Four second screws 604 are rotatably mounted inside the operating table 601, and the limiting blocks 603 are threaded onto the second screws 604. A third gear 6 is rotatably mounted inside the operating table 601. 06. A rectangular plate 610 is fixedly installed inside the operating table 601. Four transmission rods 608 are rotatably installed inside the rectangular plate 610. A fourth gear 607 is fixedly installed at the center of the bottom end of the transmission rod 608, and the four fourth gears 607 mesh with the third gear 606. A sixth bevel gear 609 is fixedly installed at the center of the top end of the transmission rod 608. A fifth bevel gear 605 is fixedly installed at the center of the end of the second screw 604 near the transmission rod 608, and the fifth bevel gear 605 meshes with the sixth bevel gear 609.

[0047] By adopting the above technical solution, the third gear 606 can drive the rectangular block 602 to move.

[0048] A movable rod 612 is slidably installed inside a rectangular block 602, and the movable rod 612 slides through the rectangular block 602. A movable frame 611 is fixedly installed at the center of the end of the movable rod 612 away from the rectangular block 602. A second spring 613 is fixedly installed on the side of the movable frame 611 near the rectangular block 602, and the end of the second spring 613 away from the movable frame 611 is fixedly connected to the rectangular block 602. A guide rod 614 is slidably installed inside the movable frame 611, and the guide rod 614 slides through the movable frame 611. A third spring 615 is fixedly installed on the upper surface of the moving frame 611, and the end of the third spring 615 away from the moving frame 611 is fixedly connected to the handle of the guide rod 614. A fixed frame 616 is fixedly installed at the center of the bottom end of the guide rod 614. A roller 617 is rotatably installed inside the fixed frame 616, and the outer surface of the roller 617 is in contact with the upper surface of the chip box. Rotating columns 618 are rotatably installed on the lower surfaces of both sides of the moving frame 611, and the outer surface of the rotating columns 618 is in contact with the outer surface of the chip box.

[0049] By adopting the above technical solution, the rotating column 618 and the roller 617 can limit the position of the chip box.

[0050] A horizontal plate 408 is fixedly installed inside the base 401 on the right side. A sleeve 410 is rotatably installed inside the horizontal plate 408. A lifting rod 409 is slidably installed inside the sleeve 410, and the top center of the lifting rod 409 is fixedly connected to a third gear 606. Two limiting strips 419 are fixedly installed on the outer surface of the inner ring of the sleeve 410, and the limiting strips 419 are slidably disposed inside the lifting rod 409. A mounting bracket 412 is fixedly installed on the lower surface of the horizontal plate 408. A second rotating rod 411 is rotatably installed in the middle of the mounting bracket 412, and the top of the second rotating rod 411 is rotatably disposed inside the horizontal plate 408. The second rotating rod 411 and the sleeve 410 are driven by a synchronous pulley and a synchronous belt. The bottom center of the second rotating rod 411 is fixedly connected to the third gear 606. A third bevel gear 413 is fixedly installed. A third rotating rod 418 is rotatably installed inside the bottom of the mounting bracket 412. A fourth bevel gear 414 is fixedly installed at the center of the end of the third rotating rod 418 near the center of the second rotating rod 411, and the fourth bevel gear 414 meshes with the third bevel gear 413. A second gear 415 is fixedly installed at the center of the end of the third rotating rod 418 away from the fourth bevel gear 414. Two connecting blocks 417 are fixedly installed on the side of the telescopic plate 403 on the right side near the horizontal plate 408, and the two connecting blocks 417 are slidably disposed inside the base 401. A second toothed plate 416 is fixedly installed on the side of the two connecting blocks 417 away from the telescopic plate 403, and the second toothed plate 416 is movably meshed with the second gear 415.

[0051] By adopting the above technical solution, the second gear plate 416 is able to rotate the third gear 606.

[0052] Working principle: First, the electric cylinder 105 is activated, causing the push plate 116 to move. The movement of the push plate 116 moves the chip box, placing it on the placement stage 402. Simultaneously, the movement of the push plate 116 moves the first gear plate 118. When the first gear plate 118 meshes with the first gear 119, it rotates the first gear 119. The rotation of the first gear 119 rotates the vertical rod 111, which in turn rotates the first bevel gear 112. The rotation of the first bevel gear 112 then rotates the second bevel gear 111. 3. The rotation of the second bevel gear 113 drives the fixed rod 115 to rotate, the rotation of the fixed rod 115 drives the rotating rod 406 to rotate, the rotation of the two rotating rods 406 drives the two second bevel gears 407 to rotate, the rotation of the second bevel gears 407 drives the first bevel gear 405 to rotate, the rotation of the first bevel gear 405 drives the first screw 404 to rotate, and the rotation of the first screw 404 drives the telescopic plate 403 to move, so that the placement platform 402 and the operating platform 601 move downward to the interior of the bottom plate 201.

[0053] Secondly, after the first gear plate 118 and the first gear 119 disengage, the first gear plate 118 meshes with the second gear 120, causing the second gear 120 to rotate. The rotation of the second gear 120 drives the one-way bearing 121, which in turn drives the third bevel gear 122. The rotation of the third bevel gear 122 then drives the fourth bevel gear 123, which in turn drives the crossbar 110. The rotation of the crossbar 110 then drives the mounting rod 206, which in turn drives the transport roller 301. The rotation drives the conveyor belt 302 to move, which in turn drives the mounting frame 303 to move. The movement of the mounting frame 303 drives the rotating plate 304 to move, which in turn drives the pusher 305 to move. When the pusher 305 comes into contact with the chip box, it pushes the chip box to move, moving the chip box from the placement table 402 to the operating table 601. During this movement, the meshing of the first toothed plate 216 and the first gear 308 drives the rotating plate 304 to rotate, which in turn drives the pusher 305 to rotate. The thrust generated by the rotation moves the chip box onto the operating table 601.

[0054] Then, when the push plate 116 moves backward, the meshing of the first gear plate 118 and the first gear 119 drives the first gear 119 to rotate. The rotation of the first gear 119 causes the telescopic plate 403 to move upward, bringing the upper surface of the placement platform 402 into contact with the lower surface of the shielding box 204. The dry ice spraying device 203 is then activated to spray dry ice onto the chip box, causing the dirt particles to solidify and become brittle, facilitating the removal of the dirt particles by the cleaning tape. This also brings the chip box on the operating table 601 into contact with the cleaning tape, removing the dirt particles inside the chip box. Simultaneously, the upward movement of the telescopic plate 403 drives the connecting block 417 to move, and the connecting block 417... The movement of the second gear 416 causes the second gear 415 to move. When the second gear 416 meshes with the second gear 415, it causes the second gear 415 to rotate. The rotation of the second gear 415 causes the third rotating rod 418 to rotate. The rotation of the third rotating rod 418 causes the fourth bevel gear 414 to rotate. The rotation of the fourth bevel gear 414 causes the third bevel gear 413 to rotate. The rotation of the third bevel gear 413 causes the second rotating rod 411 to rotate. The rotation of the second rotating rod 411 causes the sleeve 410 to rotate. The rotation of the sleeve 410 causes the lifting rod 409 to rotate. The rotation of the lifting rod 409 causes the third gear 606 to rotate.

[0055] The rotation of the third gear 606 drives the fourth gear 607 to rotate, which in turn drives the transmission rod 608 to rotate. The rotation of the transmission rod 608 drives the sixth bevel gear 609 to rotate, which in turn drives the fifth bevel gear 605 to rotate. The rotation of the fifth bevel gear 605 drives the second screw 604 to rotate, which in turn drives the limit block 603 to move. This causes the outer surfaces of the four sets of rotating columns 618 to contact the outer surface of the chip box, positioning the chip box at the center of the operating table 601. At the same time, the four rollers 617 contact the upper surface of the chip box to press it down, preventing the chip box from sticking to the cleaning tape.

[0056] Finally, when the pusher plate 116 pushes the next chip box to the placement table 402, the pusher bar 305 pushes the cleaned chip box to the sorting device 5 for detection and sorting.

[0057] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. An automatic cleaning device for semiconductor chip boxes, comprising a feeding mechanism (1), characterized in that: The side of the feeding mechanism (1) is provided with a cleaning mechanism (2) for cleaning the chip box, and the cleaning mechanism (2) is provided with a transport mechanism (3) for transporting the chip box. Below the cleaning mechanism (2) is a lifting mechanism (4) for lifting the chip box. Above the lifting mechanism (4) on the right side is a limiting mechanism (6) for limiting the chip box. The feeding mechanism (1) includes a feeding platform (101). Two side plates (102) are slidably installed on the upper surface of the feeding platform (101). Two movable plates (103) are slidably installed on the sides of the two side plates (102) that are close to each other. An installation platform (104) is fixedly installed on the side of the feeding platform (101) away from the cleaning mechanism (2). A push plate (116) is slidably installed on the upper surface of the installation platform (104). A slider (117) is fixedly installed on the lower surface of the push plate (116). The slider (117) is slidably disposed inside the installation platform (104). An electric cylinder (105) is fixedly installed on the side of the installation platform (104) away from the feeding platform (101). One end of the electric cylinder (105) close to the feeding platform (101) is fixedly connected to the slider (117). The cleaning mechanism (2) includes a base plate (201), and the side of the base plate (201) near the mounting platform (104) is fixedly connected to the loading platform (101). A fixing frame (202) is fixedly installed on the upper surface of the base plate (201), and a dry ice spraying device (203) is fixedly installed on the upper surface of the fixing frame (202). A shielding box (204) is fixedly installed on one side of the top inside the fixing frame (202), and the pipe at the bottom of the dry ice spraying device (203) is fixedly connected to the shielding box (204). Inside the fixed frame (202), a sponge pad (205) is fixedly installed on the top side away from the shielding box (204). Four connecting plates (207) are fixedly installed on the top side of the fixed frame (202) away from the shielding box (204). A storage roller (208) is rotatably installed between the two connecting plates (207) on the right side, and a take-up roller (209) is rotatably installed between the two connecting plates (207) on the left side. A connecting strip is fixedly installed on the top side of the fixed frame (202). (210), a transmission rod (211) is rotatably installed inside the connecting strip (210), and one end of the transmission rod (211) is fixedly connected to the take-up roller (209). An installation strip (214) is fixedly installed on the side of the fixing frame (202). A connecting rod (215) is rotatably installed inside the installation strip (214), and the connecting rod (215) and the transmission rod (211) are driven by a synchronous pulley and a synchronous belt. A sixth [unclear] is fixedly installed at the center of the end of the connecting rod (215) away from the synchronous pulley. The bevel gear (213) has two mounting rods (206) rotatably installed on both sides of the fixed frame (202). The fifth bevel gear (212) is fixedly installed at the center of the end of the mounting rod (206) on the left side away from the transport mechanism (3), and this mounting rod (206) is located on the side away from the loading platform (101). The fifth bevel gear (212) and the sixth bevel gear (213) mesh with each other. The sorting device (5) is fixedly installed on the side of the bottom plate (201) away from the loading platform (101).

2. The automatic cleaning device for a semiconductor chip cassette as described in claim 1, characterized in that, The transport mechanism (3) includes four transport rollers (301), which are rotatably mounted on the inner wall of the fixed frame (202). A transport roller (301) is fixedly connected to the center of one end of a mounting rod (206) that is close to each other. A transport belt (302) is driven between two transport rollers (301) on the same side. Four mounting frames (303) are fixedly mounted on the transport belt (302). A rotating plate (304) is rotatably mounted between two opposing mounting frames (303). Rotating shafts (306) are fixedly mounted on both sides of the rotating plate (304), and the rotating shafts (306) are far from the rotating plate (304). One end rotates through the mounting frame (303), and a first spring (307) is fixedly installed on the outer surface of the rotating shaft (306). The end of the first spring (307) away from the rotating shaft (306) is fixedly connected to the inside of the mounting frame (303). A first gear (308) is fixedly installed on the end of the rotating shaft (306) away from the rotating plate (304). A first toothed plate (216) is fixedly installed on both sides of the inner wall of the fixed frame (202), and the first gear (308) and the first toothed plate (216) are in movable meshing. A pusher (305) is fixedly installed on the lower surface of the rotating plate (304), and the pusher (305) is in movable contact with the chip box.

3. The automatic cleaning device for a semiconductor chip cassette as described in claim 2, characterized in that, Support legs (106) are symmetrically installed on both sides of the lower surface of the loading platform (101). An installation plate (108) is fixedly installed between the sides of the four support legs (106) that are close to each other. Two fixing blocks (109) are fixedly installed on the lower surface of the installation plate (108). A crossbar (110) is rotatably installed inside the two fixing blocks (109). The crossbar (110) and the two mounting rods (206) on the side close to the loading platform (101) are driven by a synchronous pulley and a synchronous belt. A fourth bevel gear (123) is fixedly installed on the outer surface of the middle part of the crossbar (110). A one-way bearing (121) is rotatably installed inside the mounting plate (108), and the top of the one-way bearing (121) is rotatably set inside the loading platform (101). A third bevel gear (122) is fixedly installed at the center of the bottom end of the one-way bearing (121), and the third bevel gear (122) and the fourth bevel gear (123) mesh with each other. A second gear (120) is fixedly installed at the center of the top end of the one-way bearing (121). A first toothed plate (118) is fixedly installed on the lower surface of the push plate (116), and the first toothed plate (118) and the second gear (120) are movably meshed.

4. The automatic cleaning device for a semiconductor chip cassette as described in claim 3, characterized in that, The lifting mechanism (4) includes a base (401), and the two bases (401) are located below the base plate (201). Two telescopic plates (403) are slidably installed inside the base (401). Two first screws (404) are rotatably installed inside the base (401), and the telescopic plates (403) are threaded onto the first screws (404). A first bevel gear (405) is fixedly installed at the center of the bottom end of the first screw (404). A rotating rod (406) is rotatably installed inside the base (401). The two rotating rods (406) are driven by a synchronous pulley and a synchronous belt. Two second bevel gears (407) are fixedly installed on the outer surface of the rotating rods (406), and the second bevel gears (407) mesh with the first bevel gear (405). The upper surface of the two telescopic plates (403) on the left side is fixedly installed with a placement platform (402), and the outer surface of the placement platform (402) is in contact with the base plate (201). Two positioning devices (7) are fixedly installed on the upper surface of the placement platform (402).

5. The automatic cleaning device for a semiconductor chip cassette as described in claim 4, characterized in that, Two supporting legs (106) on the left side are fixedly mounted with fixing plates (107) on the side away from the base plate (201). Fixing strips (114) are fixedly mounted on the lower surface of the fixing plates (107). Fixing rods (115) are rotatably mounted inside the fixing strips (114). The fixing rods (115) and the rotating rods (406) on the left side are driven by a synchronous pulley and a synchronous belt. A vertical rod (111) is rotatably mounted inside the fixing plates (107). The top of the vertical rod (111) is... The rotating device is located inside the loading platform (101). A second bevel gear (113) is fixedly installed at the center of one end of the fixed rod (115) near the vertical rod (111). A first bevel gear (112) is fixedly installed at the center of the bottom end of the vertical rod (111), and the first bevel gear (112) meshes with the second bevel gear (113). A first gear (119) is fixedly installed at the center of the top end of the vertical rod (111), and the first gear plate (118) and the first gear (119) are movably meshed.

6. The automatic cleaning device for a semiconductor chip cassette as described in claim 5, characterized in that, The limiting mechanism (6) includes an operating table (601), and the lower surface of the operating table (601) is fixedly connected to two telescopic plates (403) located on the right side. Four rectangular blocks (602) are slidably installed on the upper surface of the operating table (601), and limiting blocks (603) are fixedly installed on the lower surface of the rectangular blocks (602). The limiting blocks (603) are slidably disposed inside the operating table (601). Four second screws (604) are rotatably installed inside the operating table (601), and the limiting blocks (603) are threadedly connected to the second screws (604). A third gear (6) is rotatably installed inside the operating table (601). 06), a rectangular plate (610) is fixedly installed inside the operating table (601). Four transmission rods (608) are rotatably installed inside the rectangular plate (610). A fourth gear (607) is fixedly installed at the center of the bottom end of the transmission rod (608), and the four fourth gears (607) mesh with the third gear (606). A sixth bevel gear (609) is fixedly installed at the center of the top end of the transmission rod (608). A fifth bevel gear (605) is fixedly installed at the center of one end of the second screw (604) near the transmission rod (608), and the fifth bevel gear (605) meshes with the sixth bevel gear (609).

7. The automatic cleaning device for a semiconductor chip cassette as described in claim 6, characterized in that, A movable rod (612) is slidably installed inside the rectangular block (602), and the movable rod (612) slides through the rectangular block (602). A movable frame (611) is fixedly installed at the center of the end of the movable rod (612) away from the rectangular block (602). A second spring (613) is fixedly installed on the side of the movable frame (611) near the rectangular block (602), and the end of the second spring (613) away from the movable frame (611) is fixedly connected to the rectangular block (602). A guide rod (614) is slidably installed inside the movable frame (611), and the guide rod (614) slides through the movable frame (611). 1) A third spring (615) is fixedly installed on the upper surface of the movable frame (611), and the end of the third spring (615) away from the movable frame (611) is fixedly connected to the handle of the guide rod (614). A fixed frame (616) is fixedly installed at the center of the bottom end of the guide rod (614). A roller (617) is rotatably installed inside the fixed frame (616), and the outer surface of the roller (617) is in contact with the upper surface of the chip box. Rotating columns (618) are rotatably installed on the lower surfaces of both sides of the movable frame (611), and the outer surface of the rotating columns (618) is in contact with the outer surface of the chip box.

8. The automatic cleaning device for a semiconductor chip cassette as described in claim 7, characterized in that, A horizontal plate (408) is fixedly installed inside the base (401) on the right side. A sleeve (410) is rotatably installed inside the horizontal plate (408). A lifting rod (409) is slidably installed inside the sleeve (410), and the top center of the lifting rod (409) is fixedly connected to a third gear (606). Two limiting strips (419) are fixedly installed on the outer surface of the inner ring of the sleeve (410), and the limiting strips (419) are slidably disposed inside the lifting rod (409). A mounting bracket (412) is fixedly installed on the lower surface of the horizontal plate (408). A second rotating rod (411) is rotatably installed in the middle of the mounting bracket (412), and the top of the second rotating rod (411) is rotatably disposed inside the horizontal plate (408). The second rotating rod (411) and the sleeve (410) are driven by a synchronous pulley and a synchronous belt. The bottom end of the second rotating rod (411) is... A third bevel gear (413) is fixedly installed at the center. A third rotating rod (418) is rotatably installed inside the bottom of the mounting bracket (412). A fourth bevel gear (414) is fixedly installed at the center of the end of the third rotating rod (418) near the second rotating rod (411), and the fourth bevel gear (414) meshes with the third bevel gear (413). A second gear (415) is fixedly installed at the center of the end of the third rotating rod (418) away from the fourth bevel gear (414). Two connecting blocks (417) are fixedly installed on the side of the telescopic plate (403) on the right side near the horizontal plate (408), and the two connecting blocks (417) are slidably disposed inside the base (401). A second toothed plate (416) is fixedly installed on the side of the two connecting blocks (417) away from the telescopic plate (403), and the second toothed plate (416) meshes with the second gear (415).

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